CN105771639A - Low-concentration VOC (volatile organic compound) polluted air purification device using catalyst rotating wheel - Google Patents
Low-concentration VOC (volatile organic compound) polluted air purification device using catalyst rotating wheel Download PDFInfo
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- CN105771639A CN105771639A CN201610305847.XA CN201610305847A CN105771639A CN 105771639 A CN105771639 A CN 105771639A CN 201610305847 A CN201610305847 A CN 201610305847A CN 105771639 A CN105771639 A CN 105771639A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/86—Catalytic processes
- B01D53/8678—Removing components of undefined structure
- B01D53/8687—Organic components
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
- B01D2253/10—Inorganic adsorbents
- B01D2253/102—Carbon
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
- B01D2253/10—Inorganic adsorbents
- B01D2253/106—Silica or silicates
- B01D2253/108—Zeolites
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2255/00—Catalysts
- B01D2255/10—Noble metals or compounds thereof
- B01D2255/102—Platinum group metals
- B01D2255/1021—Platinum
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2255/00—Catalysts
- B01D2255/10—Noble metals or compounds thereof
- B01D2255/102—Platinum group metals
- B01D2255/1023—Palladium
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2255/00—Catalysts
- B01D2255/20—Metals or compounds thereof
- B01D2255/207—Transition metals
- B01D2255/2073—Manganese
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2255/00—Catalysts
- B01D2255/20—Metals or compounds thereof
- B01D2255/207—Transition metals
- B01D2255/20738—Iron
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2255/00—Catalysts
- B01D2255/20—Metals or compounds thereof
- B01D2255/207—Transition metals
- B01D2255/20761—Copper
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- Environmental & Geological Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Biomedical Technology (AREA)
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- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Exhaust Gas Treatment By Means Of Catalyst (AREA)
Abstract
The invention discloses a low-concentration VOC (volatile organic compound) polluted air purification device using a catalyst rotating wheel. The low-concentration VOC polluted air purification device comprises a purification device main body consisting of a first honeycomb rotating wheel and a second honeycomb rotating wheel which are fixed together and are communicated; a processing region, a clean region, a desorption region and a decomposition region are formed in the purification device main body; the clean region is communicated with the desorption region; the desorption region is communicated with the decomposition region; an exhaust blast blower is used for introducing gas into the clean region, and is communicated with the decomposition region through an air pipe for exhausting the gas in the decomposition region; a desorption heater is arranged on an air pipe for communicating the desorption region and the decomposition region, and is used for heating the gas introduced from the desorption region to decomposition region; the decomposition heater is arranged on the air pipe for communicating the desorption region and the decomposition region and is used for heating gas introduced from the desorption region into the decomposition region; a branch air pipe is arranged between the exhaust blast blower and an outlet air pipe of the clean region; an air return valve is arranged on the branch air pipe; partial gas exhausted from the exhaust blast blower is introduced into the desorption heater through the branch air pipe and the air return valve.
Description
Technical field
The present invention relates to a kind of air cleaner, more specifically, be a kind of low concentration VOC contaminated air purifier using catalyst runner.
Background technology
Along with the highly integrated and high performance of semiconductor crystal wafer processing and integrated circuit, in order to improve semiconductor crystal wafer processing, surface-mounted integrated circuit manufacture, the quality of the various electronic components such as LCDs production and the yield rate of product.Requirement for the clean room required for production environment is also more and more higher.Clean the regulation strict implementation cleannes management such as room according to manufacturing engineering and just become most important.And how to reduce the chemical compositions such as dust, VOC in cleannes benchmark and also become critically important problem.
In addition, the new method of room air pollution (building standard method, the part correction execution making with method execution and enforcing a rule with method) of Japanese Heisei execution in 15 years defines the measure dispersing in health for chemical substance in room, denotes the concentration pointer value of indoor formaldehyde and VOC etc..During for exceeding this pointer value situation, it will usually building materials and glue etc. are dispersed into the dusty gas forced ventilations such as the VOC in nature or by raising the method outside the VOC discharge chamber that building materials etc. are produced by indoor temperature pressure by employing forced ventilation mode.These methods, while overwhelming majority VOC can be distributed in 4~6 months after completion so that it is below pointer value, but period length and the air conditioner energy by ventilation generation lose and have just become problem.
In order to purify these VOC, patent document 1 (Japanese Unexamined Patent Publication 7-256048 publication) and the double-deck runner containing catalyst portion and sorbent material part used disclosed in patent document 2 (Japanese Unexamined Patent Publication 10-15339 publication) and the purifier containing catalyst and the runner of the mixture of sorbent material.The suction off loading of the regeneration air after additionally using disclosed in patent document 3 (Japanese Unexamined Patent Publication 2002-204919 publication) catalyst adsorption runner to decompose VOC concentration is put.And, at rotary wheel regeneration outlet side or process outlet side and arrange platinum catalyst layer disclosed in patent document 4 (Japanese Unexamined Patent Publication 10-244125 publication), arranging two-layer renewing zone, any one can with the concentration device processing air counter current flow.
Although the runner that the part being made up of catalyst and sorbent material disclosed in patent document 1 overlaps with gas circulating direction and the purifier that the runner containing catalyst and sorbent material mixture is divided into treatment region, renewing zone and clear area.But there is the problem owing to catalyst amount is not enough and the catalyst of decomposition temperature deficiency generation cannot decompose completely.It addition, the air part processing exit imports clear area, the problem that clear area cooling effect is not good as clean air.
Patent document 2 proposes above-mentioned runner is divided into treatment region, regenerate 1st district, regenerate 2nd district and the purifier in 4 regions, clear area, but owing to regenerative heater is arranged on process outlet side, VOC concentration is higher, therefore there is the problem that reactivation outlet (namely processing entrance) side catalyst decomposition efficiency does not give full play to.
Although patent document 3 proposes the adsorption desorption device employing common sorption runner, catalyst decomposition heater 4 and harmful gas ingredient breakdown removing catalyst 8 it is provided with at exhaust flow path place, but sorption enrichment facility and catalyst decomposer are necessary, device complicates, and has resulted in the problem that Original equipment cost increases.
The sorption runner made by the hydrophobic zeolite as sorbent is used although patent document 4 proposes, segmentation has treatment region, preheating zone, the concentration device of renewing zone and clear area, but owing to renewing zone defines counter current flow with the air flow of preheating zone with the air flow for the treatment of region, therefore the flow process that not only system is all has just become complicated, and (preheating gas aerofluxus becomes the opposite of runner, by pipe arrangement by preheating gas supply side, must return to), the runner internal temperature step-down of processed gas supply side and preheating gas exhaust side and deodorize gas exhaust side, cause the problem that catalyst can not decompose completely.
Summary of the invention
Owing to prior art also exists the problems referred to above, the present invention proposes to use the low concentration VOC contaminated air purifier of catalyst runner, and it can effectively solve the problem that problems of the prior art.
The present invention solves the problems referred to above by the following technical programs:
Use the low concentration VOC contaminated air purifier of catalyst runner, including: a purifier main body, it is made up of the first honeycomb runner being fixed together and connect and the second honeycomb runner, wherein: upstream is located at by described first honeycomb runner, honeycomb channel surface load on this first honeycomb runner holds catalyst, for the VOC pollutant contained in catalytic oxidation decomposition gas;Downstream is located at by described second honeycomb runner, honeycomb channel surface load on this second honeycomb runner holds catalyst and sorbent mixture, for decomposing and the VOC in adsorbed gas, dusty gas arrives described second honeycomb runner after entering via described first honeycomb runner, the pollutant such as contained VOC adsorbed by honeycomb runner, purify after air discharge;Being formed with treatment region, clear area, desorption district and resolver in described purifier main body, described clear area is connected with desorption district by airduct, and described desorption district is connected with described resolver by airduct;Exhaust blower, it for passing into described clear area by gas, and described exhaust blower and described resolver are connected by airduct and discharge for by the gas of described resolver;Desorption heater, it is located on the airduct that described clear area connects with described desorption district, for being heated by the gas being led to described desorption district by clear area;Decomposition heater, it is located on the airduct that described desorption district connects with described resolver, for being heated by the gas being led to described resolver by desorption district;One branch's airduct, it is located between described exhaust blower and described desorption heater, described branch airduct is provided with the portion gas of the resolver that described exhaust blower is discharged by an air returning valve, described branch airduct and described air returning valve and passes in described desorption heater.
Airduct between described resolver and described exhaust blower is provided with a device for monitoring temperature, and this device for monitoring temperature detects the temperature of gas in described resolver, and controls described decomposition heater and start or quit work.
Described decomposition heater upstream is separately accessed an exogenous QI by an airduct and is imported automatic air-valve, and described exogenous QI imports automatic air-valve and controls to start or quit work by described device for monitoring temperature.
Described first honeycomb runner upstream is provided with a process aerator, and described dusty gas is passed in described treatment region by this process aerator.
Dusty gas can also be imported in described treatment region and described clear area by described process aerator.
The downstream of described treatment region is provided with a process air-valve, and it is for controlling the discharge of gas in treatment region.
Described first honeycomb runner is processed into runner shape by non-automatic incombustible material and immerses in catalyst solution, then dry forms, and its inner surface and outer surface are equipped with ripple;During described second honeycomb runner is processed into runner shape by non-automatic incombustible material and is immersed catalyst and sorbent mixed solution, then dry form, its inner surface and outer surface are equipped with ripple.
The wide cut of described first honeycomb runner is 1/3rd of described purifier main body wide cut;The wide cut of described second honeycomb runner is 2/3rds of described purifier main body wide cut.
Described catalyst is containing ferrum, manganese, the oxidation Decomposition catalyst of copper component and noble metal system catalyst one or a combination set of containing platinum, palladium composition.
Described sorbent is one of hydrophobic zeolite and activated carbon or its mixing.
Operate this purifier time, described resolver, desorption district and clear area by the speed of gas lower than the described treatment region speed by gas.
The heating-up temperature that the heating-up temperature that described desorption heater sets sets lower than described decomposition heater.
Owing to have employed above-mentioned technological means, the low concentration VOC contaminated air purifier of catalyst runner of using of the application can purifying low-concentration VOC contaminated air by the honeycomb runner of a two-layer structure, enrichment facility and decomposer need not be respectively provided with again, by the close mode of device, it is possible to control Original equipment cost;Simultaneously by the conservative control of gas flow, reach energy-conservation beneficial effect.
Accompanying drawing explanation
Fig. 1 is the structural representation of the first embodiment of the present invention;
Fig. 2 is the structural representation of the second embodiment of the present invention.
Detailed description of the invention
Below in conjunction with detailed description of the invention, the present invention is described in detail.
First embodiment:
In this embodiment, purifier includes the parts such as purifier main body, process aerator 7, air exhauster 10, desorption heater 8, decomposition heater 9, device for monitoring temperature 14, exogenous QI importing automatic air-valve 11, air returning valve 12.
As it is shown in figure 1, the purifier main body of the application is two bed devices, it is made up of the first honeycomb runner 1 being fixed together and connect and the second honeycomb runner 2.Upstream is located at by wherein said first honeycomb runner 1, and the honeycomb channel surface load on this first honeycomb runner holds catalyst, for the VOC pollutant contained in catalytic oxidation decomposition gas.Described first honeycomb runner 1 is processed into runner shape by non-automatic incombustible material and immerses in catalyst solution, then dry forms, and its inner surface and outer surface are equipped with ripple.Described catalyst is containing ferrum, manganese, the oxidation Decomposition catalyst of copper component and noble metal system catalyst one or a combination set of containing platinum, palladium composition.Downstream is located at by described second honeycomb runner 2, and the honeycomb channel surface load on this second honeycomb runner holds catalyst and sorbent mixture, for decomposing and the VOC in adsorbed gas.During described second honeycomb runner 2 is processed into runner shape by non-automatic incombustible material and is immersed catalyst and sorbent mixed solution, then dry form, its inner surface and outer surface are equipped with ripple.The catalyst components that second honeycomb runner 2 contains is same as described above or similar, and the described sorbent contained is one of hydrophobic zeolite and activated carbon or its mixing.Shown in Figure 1, the wide cut of described first honeycomb runner 1 is 1/3rd of described purifier main body wide cut, and the wide cut of described second honeycomb runner 2 is 2/3rds of described purifier main body wide cut.
Shown in Figure 1, described purifier main body is formed treatment region 3, clear area 6, desorption district 5 and resolver 4.Described clear area 6 is connected with desorption district 5 by airduct, and described desorption district 5 is connected with described resolver 4 by airduct.
Described first honeycomb runner 1 upstream is provided with process aerator 7, and described dusty gas is passed in described treatment region by this process aerator 7.Dusty gas enters via described first honeycomb runner 1, described second honeycomb runner 2 discharge.The downstream of described treatment region is provided with a process air-valve 15, and it is for controlling the discharge of gas in treatment region.Processed air through treatment region 3, the low concentration VOC dusty gas contained in the processed air of the second cell rotor 2 sorption, reach the air of purifying contaminated after being separated off from processed air.
Exhaust blower 10 connects described resolver 4, and for gas passes into described clear area 6, and described exhaust blower 10 passes through airduct with described resolver 4 and valve 13 is connected discharges for by the gas of described resolver 4.Desorption heater 8 is located on the airduct that described clear area 6 connects with described desorption district 5, for being heated by the gas being led to described desorption district 5 by clear area 6.Decomposition heater 9 is located on the airduct that described desorption district 5 connects with described resolver 4, for being heated by the gas being led to described resolver 4 by desorption district 5.The heating-up temperature that the heating-up temperature that described desorption heater 8 sets sets lower than described decomposition heater 9, as the temperature playing catalyst capacity of decomposition.Such as, the temperature of decomposition heater be 240 DEG C Celsius (temperature below is all with " Celsius " for unit), desorption heater 8 temperature be 180 DEG C.Separately, one branch's airduct is located between described exhaust blower and described desorption heater 8, described branch airduct is provided with an air returning valve 12, the portion gas of the resolver that described exhaust blower is discharged by described branch airduct and described air returning valve 12 passes in described desorption heater 8, owing to from resolver, gas out is high-temperature gas, the heating load of desorption heater 8 can be alleviated after being mixed with the gas in clear area by this high-temperature gas of part, utilize the heat that resolver produces to reach energy-conservation effect.
Owing to catalyst can cause Abnormal Decomposition to react, in order to prevent scaling loss honeycomb runner and device, airduct between described resolver 4 and described exhaust blower 10 is provided with a device for monitoring temperature 14, this device for monitoring temperature 14 detects the temperature of gas in described resolver 4, and controls described decomposition heater 9 and start or quit work.Meanwhile, separately accessing an exogenous QI by an airduct in described decomposition heater 9 upstream and import automatic air-valve 11, described exogenous QI imports automatic air-valve 11 and controls to start or quit work by described device for monitoring temperature 14.When device for monitoring temperature 14 detects the temperature in resolver higher than institute's Dingan County's total temperature (such as 250 DEG C), the signal that device for monitoring temperature 14 sends, the out-of-work exogenous QI of simultaneously opening of decomposition heater 9 imports automatic air-valve 11, is imported by the gas of outside in decomposition heater 9 and in resolver 4.It addition, replace the gas of outside also into carbon dioxide and the nitrogen family gas etc. that play disconnected oxygen effect.Further, the entrance side in resolver 4 arranges nozzle etc., is sprayed in purifier main body with water and extinguishing fluid etc..
In order to realize purifying preferably the effect of air, the region area ratio of runner is, resolver: desorption district: clear area: during treatment region=2:2:2:10, air quantity than for 2:2:1:20~2:2:1:30, to guarantee during operating resolver 4, desorption district 5, clear area 6 by slow by air surface wind speed than treatment region 3 of air surface wind speed.
The operation principle of the application is:
1, indoor dusty gas first passes around process blower fan 7 and passes into treatment region 3, and the first honeycomb runner through treatment region decomposes and decomposes after the second honeycomb runner and be discharged to indoor after sorption, purification;
2, indoor gas is passed into clear area by exhaust blower 10, discharges to desorption district behind clear area, enters in desorption district after desorption heater 8 heats, and desorption district discharges after gas internal contamination thing carries out desorption again;Gas enters resolver after decomposition heater heats and carries out the decomposition of VOC, the temperature in resolver detected by device for monitoring temperature 14 simultaneously, when the temperature in resolver 4 is higher than institute's Dingan County's total temperature, the signal that device for monitoring temperature 14 sends, the out-of-work exogenous QI of simultaneously opening of decomposition heater 9 imports automatic air-valve 11, the gas of outside is imported in decomposition heater 9 and in resolver 4, the gas of outside is replaced also into carbon dioxide and the nitrogen family gas etc. that play disconnected oxygen effect, and the entrance side in resolver 4 arranges nozzle etc., it is sprayed in purifier main body with water and extinguishing fluid etc..When device for monitoring temperature 14 detect temperature normal time, decompose, after terminating, the gas in resolver 4 be discharged into indoor by exhaust blower 10 part, the gas that another part goes successively in the outlet conduits of clear area 6 and clear area 6 exports mixes.
Progressively purified by above-mentioned steps, the air in clean room that can be effective and energy-conservation.
Second embodiment:
Shown in Figure 2, Fig. 2 is the structural representation of the second embodiment of the present invention.Relative first embodiment, dusty gas is simultaneously directed in described treatment region 3 and described clear area 6 by the described process aerator 7 that differs only in of the second embodiment.
Should be understood that these embodiments are merely to illustrate the present invention rather than restriction the scope of the present invention.In addition, it is to be understood that after having read the content that the present invention lectures, the present invention can be made various changes or modifications by those skilled in the art, and these equivalent form of values fall within the application appended claims limited range equally.
Claims (12)
1. use the low concentration VOC contaminated air purifier of catalyst runner, it is characterised in that including:
One purifier main body, it is made up of the first honeycomb runner being fixed together and connect and the second honeycomb runner, wherein: upstream is located at by described first honeycomb runner, the honeycomb channel surface load on this first honeycomb runner holds catalyst, for the VOC pollutant contained in catalytic oxidation decomposition gas;Downstream is located at by described second honeycomb runner, honeycomb channel surface load on this second honeycomb runner holds catalyst and sorbent mixture, for decomposing and the VOC in adsorbed gas, dusty gas arrives described second honeycomb runner after entering via described first honeycomb runner, the pollutant such as contained VOC adsorbed by honeycomb runner, purify after air discharge;Being formed with treatment region, clear area, desorption district and resolver in described purifier main body, described clear area is connected with desorption district by airduct, and described desorption district is connected with described resolver by airduct;
Exhaust blower, it for passing into described clear area by gas, and described exhaust blower and described resolver are connected by airduct and discharge for by the gas of described resolver;
Desorption heater, it is located on the airduct that described clear area connects with described desorption district, for being heated by the gas being led to described desorption district by clear area;
Decomposition heater, it is located on the airduct that described desorption district connects with described resolver, for being heated by the gas being led to described resolver by desorption district;
One branch's airduct, it is located between described exhaust blower and described desorption heater, described branch airduct is provided with the portion gas of the resolver that described exhaust blower is discharged by an air returning valve, described branch airduct and described air returning valve and passes in described desorption heater.
2. the low concentration VOC contaminated air purifier of use catalyst runner according to claim 1, it is characterized in that, airduct between described resolver and described exhaust blower is provided with a device for monitoring temperature, this device for monitoring temperature detects the temperature of gas in described resolver, and controls described decomposition heater and start or quit work.
3. the low concentration VOC contaminated air purifier of use catalyst runner according to claim 2, it is characterized in that, described decomposition heater upstream is separately accessed an exogenous QI by an airduct and is imported automatic air-valve, and described exogenous QI imports automatic air-valve and controls to start or quit work by described device for monitoring temperature.
4. the low concentration VOC contaminated air purifier of use catalyst runner according to claim 1, it is characterised in that described first honeycomb runner upstream is provided with a process aerator, and described dusty gas is passed in described treatment region by this process aerator.
5. the low concentration VOC contaminated air purifier of use catalyst runner according to claim 1, it is characterised in that described process aerator can also be designed to be imported by dusty gas in described treatment region and described clear area.
6. the low concentration VOC contaminated air purifier of use catalyst runner according to claim 1, it is characterised in that the downstream of described treatment region is provided with a process air-valve, it is for controlling the discharge of gas in treatment region.
7. the low concentration VOC contaminated air purifier of use catalyst runner according to claim 1, it is characterized in that, described first honeycomb runner is processed into runner shape by non-automatic incombustible material and immerses in catalyst solution, then dry forms, and its inner surface and outer surface are equipped with ripple;During described second honeycomb runner is processed into runner shape by non-automatic incombustible material and is immersed catalyst and sorbent mixed solution, then dry form, its inner surface and outer surface are equipped with ripple.
8. the low concentration VOC contaminated air purifier of use catalyst runner according to claim 1, it is characterised in that the wide cut of described first honeycomb runner is 1/3rd of described purifier main body wide cut;The wide cut of described second honeycomb runner is 2/3rds of described purifier main body wide cut.
9. the low concentration VOC contaminated air purifier of use catalyst runner according to claim 1, it is characterised in that described catalyst is containing ferrum, manganese, the oxidation Decomposition catalyst of copper component and noble metal system catalyst one or a combination set of containing platinum, palladium composition.
10. the low concentration VOC contaminated air purifier of use catalyst runner according to claim 1, it is characterised in that described sorbent is one of hydrophobic zeolite and activated carbon or its mixing.
11. the low concentration VOC contaminated air purifier of use catalyst runner according to claim 1, it is characterised in that operate this purifier time, described resolver, desorption district and clear area by the speed of gas lower than the described treatment region speed by gas.
12. the low concentration VOC contaminated air purifier of use catalyst runner according to claim 1, it is characterised in that the heating-up temperature that the heating-up temperature that described desorption heater sets sets lower than described decomposition heater.
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GB2553563A (en) * | 2016-09-09 | 2018-03-14 | Richard Mcgee Donald | Apparatus for removing organic vapours from gaseous streams |
CN107970742A (en) * | 2018-01-02 | 2018-05-01 | 江苏龙净科杰催化剂再生有限公司 | A kind of zeolite runner and its zeolite runner enrichment facility for handling complex component exhaust gas |
CN108854442A (en) * | 2017-05-10 | 2018-11-23 | 新盛Eng株式会社 | Volatile organic compounds removes system |
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