CN205659561U - Use low concentration VOC contaminated air purifier of catalyst runner - Google Patents

Use low concentration VOC contaminated air purifier of catalyst runner Download PDF

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Publication number
CN205659561U
CN205659561U CN201620421170.1U CN201620421170U CN205659561U CN 205659561 U CN205659561 U CN 205659561U CN 201620421170 U CN201620421170 U CN 201620421170U CN 205659561 U CN205659561 U CN 205659561U
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China
Prior art keywords
runner
resolver
desorption
gas
honeycomb
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Withdrawn - After Issue
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CN201620421170.1U
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Chinese (zh)
Inventor
金伟力
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Western Environmental Protection Energy Saving Equipment (changshu) Co Ltd
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Western Environmental Protection Energy Saving Equipment (changshu) Co Ltd
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Abstract

The utility model discloses an use low concentration VOC contaminated air purifier of catalyst runner, include: constitute the purifier main part by first honeycomb runner and second honeycomb the runner together fixed and intercommunication, be formed with treatment region, clean area, desorption district and resolver in the purifier main part, the intercommunication is distinguished with the desorption to the clean area, desorption district with the resolver intercommunication, the exhaust air -blower is used for letting in gas the clean area, the exhaust air -blower is linked together through the tuber pipe with the resolver, the desorption heater is located on the tuber pipe of clean area and desorption district intercommunication for to heat by the gas that the clean area led to desorption district, it locates on the tuber pipe of desorption district and resolver intercommunication to decompose the heater for to lead to by the desorption district the gas of resolver heats, branch's tuber pipe locate the exhaust air -blower with between the desorption heater, be equipped with a return air valve on branch's tuber pipe, branch's tuber pipe and return air valve will exhaust air -blower exhaust part gas and let in in the desorption heater.

Description

Use the low concentration VOC contaminated air purifier of catalyst runner
Technical field
This utility model relates to a kind of air cleaner, more specifically, is a kind of low concentration using catalyst runner VOC contaminated air purifier.
Background technology
Along with semiconductor crystal wafer processing and the highly integrated and high performance of integrated circuit, in order to improve semiconductor crystal wafer Processing, surface-mounted integrated circuit manufacture, the quality of the various electronic components such as LCDs production and the yield rate of product.For producing The requirement of the clean room required for environment is more and more higher.Manage according to strict cleannes of carrying out of regulation such as manufacturing engineering cleaning rooms Just become most important.And how to reduce the chemical compositions such as dust, VOC in cleannes benchmark and also become critically important asking Topic.
(building standard method, implement order with method and execute with method additionally, the new method of room air pollution that Japan's Heisei 15 years is implemented A part for line discipline corrects to be implemented) define the measure dissipating in health for chemical substance in room, denote indoor The concentration pointer value of formaldehyde and VOC etc..During for exceeding this pointer value situation, it will usually use forced ventilation mode by building materials And the dusty gas forced ventilation such as the VOC that is dispersed in nature such as glue or force to produce building materials etc. by raising indoor temperature VOC discharge chamber outside method.These methods, while overwhelming majority VOC can be distributed in 4 after completion~6 months so that it is Below pointer value, but period length and produced by ventilation air conditioner energy loss just become problem.
In order to purify these VOC, (Japan is special for patent document 1 (Japanese Unexamined Patent Publication 7-256048 publication) and patent document 2 Open flat 10-15339 publication) in disclose use containing catalyst portion and the double-deck runner of sorbent material part and containing touching The purifier of the runner of the mixture of matchmaker and sorbent material.Additionally patent document 3 (Japanese Unexamined Patent Publication 2002-204919 public affairs Report) in disclose and use catalyst adsorption runner to decompose the suction off loading of regeneration air after VOC concentrates to put.Further, patent document 4 (Japanese Unexamined Patent Publication 10-244125 publication) discloses platinum catalyst is set at rotary wheel regeneration outlet side or process outlet side Layer, arranges two-layer renewing zone, and any one can be with the concentration device processing air counter current flow.
Although disclose in patent document 1 that the part being made up of catalyst and sorbent material overlaps with gas circulating direction turns Take turns and be divided into by the runner containing catalyst and sorbent material mixture the purifier for the treatment of region, renewing zone and clear area.But It is to there is the problem owing to catalyst amount is not enough and the catalyst of decomposition temperature deficiency generation cannot decompose completely.It addition, process outlet The air part at place imports clear area, the problem that clear area cooling effect is the best as clean air.
Patent document 2 proposes above-mentioned runner is divided into treatment region, regenerate 1st district, regenerate 2nd district and 4, clear area district The purifier in territory, but owing to regenerative heater is arranged on process outlet side, VOC concentration is higher, therefore there is reactivation outlet The problem that (i.e. processing entrance) side catalyst decomposition efficiency does not give full play to.
Although patent document 3 proposes the adsorption desorption device employing common sorption runner, set at exhaust flow path Put catalyst decomposition heater 4 and harmful gas ingredient breakdown removing catalyst 8, but sorption enrichment facility and catalyst have decomposed dress It is necessary for putting, and device complicates, and has resulted in the problem that original cost increases.
The sorption runner made by the hydrophobic zeolite as sorbent is used, segmentation although patent document 4 proposes Have a concentration device for the treatment of region, preheating zone, renewing zone and clear area, but due to renewing zone and preheating zone air flow with The air flow for the treatment of region defines counter current flow, (preheating gas aerofluxus that the flow process that the most not only system is all has just become complicated Become the opposite of runner, will pipe arrangement by preheating gas supply side, it is necessary to return), processed gas supply side i.e. preheats The runner internal temperature step-down of gas exhaust side and deodorize gas exhaust side, causes the problem that catalyst can not decompose completely.
Utility model content
Owing to prior art also exists the problems referred to above, the utility model proposes and use the low concentration VOC of catalyst runner to pollute Air cleaner, it can effectively solve the problem that problems of the prior art.
This utility model solves the problems referred to above by the following technical programs:
Use the low concentration VOC contaminated air purifier of catalyst runner, including: a purifier main body, it is by fixing Together and the first honeycomb runner of connecting and the second honeycomb runner are constituted, wherein: upstream is located at by described first honeycomb runner, its Honeycomb channel surface load holds catalyst, for being catalyzed in oxidation Decomposition gas the pollutant contained;Described second honeycomb runner sets In downstream, its honeycomb channel surface load holds catalyst and sorbent mixture, for the VOC decomposed and in adsorbed gas, pollutes The pollutant such as gas arrives described second honeycomb runner after entering via described first honeycomb runner, contained VOC are by honeycomb Runner adsorbed, purify after air discharge;Be formed in described purifier main body treatment region, clear area, desorption district and Resolver, described clear area is connected with desorption district by airduct, and described desorption district is connected with described resolver by airduct;Aerofluxus Aerator, it for being passed through described clear area by gas, and described exhaust blower is connected by airduct with described resolver Discharge for by the gas of described resolver;Desorption heater, it is located at the wind that described clear area connects with described desorption district Guan Shang, for heating the gas being led to described desorption district by clear area;Decomposition heater, its be located at described desorption district with On the airduct of described resolver connection, for the gas being led to described resolver by desorption district is heated;One branch's airduct, It is located between described exhaust blower and described desorption heater, and described branch airduct is provided with an air returning valve, described branch The portion gas of the resolver that described exhaust blower is discharged by airduct and described air returning valve is passed through in described desorption heater.
Airduct between described resolver and described exhaust blower is provided with a device for monitoring temperature, and this monitoring temperature fills Put and detect the temperature of gas in described resolver, and control described decomposition heater and start or quit work.
Described decomposition heater upstream is separately accessed an exogenous QI by an airduct and is imported automatic air-valve, and described exogenous QI imports automatically Air-valve controls to start or quit work by described device for monitoring temperature.
Described first honeycomb runner upstream is provided with a process aerator, and described dusty gas is passed through institute by this process aerator State in treatment region.
Dusty gas can also be imported in described treatment region and described clear area by described process aerator.
The downstream of described treatment region is provided with a process air-valve, and it is the discharge of gas in controlling treatment region.
Described first honeycomb runner by non-automatic incombustible material be processed into runner shape and immerse in catalyst solution, be then dried and Become, its inner surface and outer surface are equipped with ripple;Described second honeycomb runner is processed into runner shape by non-automatic incombustible material and soaks Enter catalyst with in sorbent mixed solution, then be dried form, its inner surface and outer surface are equipped with ripple.
The wide cut of described first honeycomb runner is 1/3rd of described purifier main body wide cut;Described second honeycomb turns Wide cut is described purifier main body wide cut 2/3rds of wheel.
Described catalyst is to touch containing ferrum, manganese, the oxidation Decomposition catalyst of copper component and the noble metal system containing platinum, palladium composition One or a combination set of matchmaker.
Described sorbent is one of hydrophobic zeolite and activated carbon or its mixing.
Operate this purifier time, described resolver, desorption district and clear area by the speed of gas less than described process District's speed by gas.
The heating-up temperature that the heating-up temperature that described desorption heater sets sets less than described decomposition heater.
Owing to have employed above-mentioned technological means, the low concentration VOC contaminated air using catalyst runner of the application purifies dress Put by the honeycomb runner of a two-layer structure can purifying low-concentration VOC contaminated air, need not be respectively provided with again concentration dress Put and decomposer, by the close mode of device, it is possible to control Original equipment cost;Simultaneously by the reasonable control of gas flow System, reaches energy-conservation beneficial effect.
Accompanying drawing explanation
Fig. 1 is the structural representation of first embodiment of the present utility model;
Fig. 2 is the structural representation of the second embodiment of the present utility model.
Detailed description of the invention
Below in conjunction with detailed description of the invention, describe this utility model in detail.
First embodiment:
In this embodiment, purifier includes purifier main body, processes aerator 7, air exhauster 10, desorption heating Device 8, decomposition heater 9, device for monitoring temperature 14, exogenous QI import the parts such as automatic air-valve 11, air returning valve 12.
As it is shown in figure 1, the purifier main body of the application is two bed devices, its by be fixed together and connect One honeycomb runner 1 and the second honeycomb runner 2 are constituted.Upstream is located at by wherein said first honeycomb runner 1, and its honeycomb channel surface is carried on a shoulder pole Hold catalyst, for being catalyzed in oxidation Decomposition gas the VOC pollutant contained.Described first honeycomb runner 1 is by non-automatic incombustible material It is processed into runner shape and immerses in catalyst solution, be then dried and form, its inner surface and outer surface are equipped with ripple.Described tactile Matchmaker is containing one of ferrum, manganese, the oxidation Decomposition catalyst of copper component and the noble metal system catalyst containing platinum, palladium composition or its group Close.Downstream is located at by described second honeycomb runner 2, and its honeycomb channel surface load holds catalyst and sorbent mixture, is used for decomposing With the VOC in adsorbed gas.Described second honeycomb runner 2 is processed into runner shape by non-automatic incombustible material and immerses catalyst and sorbent In mixed solution, then be dried form, its inner surface and outer surface are equipped with ripple.The catalyst that second honeycomb runner 2 contains Composition is same as described above or similar, and the described sorbent contained is one of hydrophobic zeolite and activated carbon or its mixing.See Shown in Fig. 1, the wide cut of described first honeycomb runner 1 is 1/3rd of described purifier main body wide cut, described second honeycomb The wide cut of runner 2 is 2/3rds of described purifier main body wide cut.
Shown in Figure 1, described purifier main body is formed treatment region 3, clear area 4, desorption district 5 and resolver 6.Described clear area 4 is connected with desorption district 5 by airduct, and described desorption district 5 is connected with described resolver 4 by airduct.
Described first honeycomb runner 1 upstream is provided with process aerator 7, and described dusty gas is passed through by this process aerator 7 In described treatment region.Dusty gas enters via described first honeycomb runner 1, described second honeycomb runner 2 discharge.Described place The downstream in reason district is provided with a process air-valve 15, and it is the discharge of gas in controlling treatment region.Processed air is through processing District 3, the second cell rotor 2 sorption is processed in air the low concentration VOC dusty gas contained, and is separated off from processed air After reach the air of purifying contaminated.
Exhaust blower 10 connects described resolver 4, for gas is passed through described clear area 6, and described aerofluxus air blast Machine 10 is connected for by the gas discharge of described resolver 4 by airduct and valve 13 with described resolver 4.Desorption heating Device 8 is located on the airduct that described clear area 6 connects with described desorption district 5, for being led to described desorption district 5 by clear area 6 Gas heats.Decomposition heater 4 is located on the airduct that described desorption district 5 connects with described resolver 4, and being used for will be by being desorbed District 5 leads to the gas of described resolver 4 and heats.The heating-up temperature that described desorption heater 8 sets adds less than described decomposition The heating-up temperature that hot device 9 sets, as the temperature playing catalyst capacity of decomposition.Such as, the temperature of decomposition heater is Celsius 240 DEG C (temperature below all with " Celsius " as unit), the temperature of desorption heater 8 are 180 DEG C.Separately, branch's airduct is located at described Between exhaust blower and described desorption heater 8, described branch airduct is provided with an air returning valve 12, described branch airduct and institute The portion gas stating the resolver that described exhaust blower is discharged by air returning valve 12 is passed through in described desorption heater 8, due to from Resolver gas out is high-temperature gas, can alleviate de-after being mixed with the gas in clear area by this high-temperature gas of part The heating load of additional heat device 8, utilizes heat that resolver produces to reach energy-conservation effect.
Owing to catalyst can cause Abnormal Decomposition to react, in order to prevent scaling loss honeycomb runner and device, described resolver 4 with Airduct between described exhaust blower 10 is provided with a device for monitoring temperature 14, and this device for monitoring temperature 14 detects described decomposition The temperature of gas in district 4, and control described decomposition heater 9 and start or quit work.Meanwhile, in described decomposition heater 9 Trip separately accesses an exogenous QI by an airduct and imports automatic air-valve 11, and described exogenous QI imports automatic air-valve 11 by described monitoring temperature Device 14 controls to start or quit work.Temperature in device for monitoring temperature 14 detects resolver is higher than institute's Dingan County's total temperature Time (such as 250 DEG C), the signal that device for monitoring temperature 14 sends, decomposition heater 9 is opened exogenous QI and is imported while quitting work Automatically air-valve 11, in importing decomposition heater 9 by the gas of outside and in resolver 4.It addition, also into playing disconnected oxygen effect Carbon dioxide and nitrogen family gas etc. replace the gas of outside.Further, the entrance side in resolver 4 arranges nozzle etc., uses water And extinguishing fluid etc. is sprayed in purifier main body.
In order to realize preferably purifying the effect of air, the region area ratio of runner is, resolver: desorption district: clear area: During treatment region=2:2:2:10, air quantity ratio is for 2:2:1:20~2:2:1:30, resolver 4 to be guaranteed during operating, desorption district 5, clear Clean district 6 by slow by air surface wind speed than treatment region 3 of air surface wind speed.
The operation principle of the application is:
1, indoor dusty gas first passes around process pathogenic wind 7 and is passed through treatment region 3, through the first honeycomb runner for the treatment of region Decompose and decompose after the second honeycomb runner and be discharged to indoor after sorption;
2, indoor gas is passed through clear area by exhaust blower 10, discharges to desorption district behind clear area, through de- Entering in desorption district after additional heat device 8 heating, desorption district discharges after gas internal contamination thing is carried out desorption absorption again;Gas warp Enter resolver after crossing decomposition heater heating and carry out the decomposition of VOC, resolver detected by device for monitoring temperature 14 simultaneously Interior temperature, when the temperature in resolver 4 is higher than institute's Dingan County's total temperature, the signal that device for monitoring temperature 14 sends, decomposition adds Hot device 9 is opened exogenous QI and is imported automatic air-valve 11 while quitting work, by the interior and decomposition of gas importing decomposition heater 9 of outside In district 4, it is possible to import and play carbon dioxide and the nitrogen family gas etc. of disconnected oxygen effect and replace the gas of outside, and in resolver 4 Entrance side nozzle etc. is set, be sprayed in purifier main body with water and extinguishing fluid etc..When device for monitoring temperature 14 detects When temperature is normal, decomposes, after terminating, the gas in resolver 4 is discharged into indoor by exhaust blower 10 part, another portion Divide in going successively to clear area 6 outlet conduits and the gas of clear area 6 outlet mixes.
Progressively purified by above-mentioned steps, the air in clean room that can be effective and energy-conservation.
Second embodiment:
Shown in Figure 2, Fig. 2 is the structural representation of the second embodiment of the present utility model.First embodiment relatively is come Say, the second embodiment differ only in described process aerator 7 dusty gas is simultaneously directed described treatment region 7 and described clearly In clean district 6.
Should be understood that these embodiments are merely to illustrate this utility model rather than limit scope of the present utility model. In addition, it is to be understood that after having read the content that this utility model is lectured, this utility model can be made by those skilled in the art Various changes or amendment, these equivalent form of values fall within the application appended claims limited range equally.

Claims (8)

1. use the low concentration VOC contaminated air purifier of catalyst runner, it is characterised in that including:
One purifier main body, it is made up of, wherein the first honeycomb runner being fixed together and connect and the second honeycomb runner: Upstream is located at by described first honeycomb runner, and its honeycomb channel surface load holds catalyst;Downstream is located at by described second honeycomb runner, its Honeycomb channel surface load holds catalyst and sorbent mixture, and dusty gas arrives institute after entering via described first honeycomb runner Discharge after stating the second honeycomb runner;Treatment region, clear area, desorption district and resolver it is formed with in described purifier main body, Described clear area is connected with desorption district by airduct, and described desorption district is connected with described resolver by airduct;
Exhaust blower, it for being passed through described clear area by gas, and described exhaust blower passes through wind with described resolver Pipe is connected, and is discharged by the gas of described resolver;
Desorption heater, it is located on the airduct that described clear area connects with described desorption district;
Decomposition heater, it is located on the airduct that described desorption district connects with described resolver;
One branch's airduct, it is located between described exhaust blower and described desorption heater, and described branch airduct is provided with one The portion gas of the resolver that described exhaust blower is discharged by air returning valve, described branch airduct and described air returning valve is passed through described In desorption heater.
The low concentration VOC contaminated air purifier of use catalyst runner the most according to claim 1, it is characterised in that Airduct between described resolver and described exhaust blower is provided with a device for monitoring temperature, and this device for monitoring temperature detects institute State the temperature of gas in resolver, and control described decomposition heater and start or quit work.
The low concentration VOC contaminated air purifier of use catalyst runner the most according to claim 2, it is characterised in that Described decomposition heater upstream is separately accessed an exogenous QI by an airduct and is imported automatic air-valve, and described exogenous QI imports automatic air-valve to be passed through Described device for monitoring temperature controls to start or quit work.
The low concentration VOC contaminated air purifier of use catalyst runner the most according to claim 1, it is characterised in that Described first honeycomb runner upstream is provided with a process aerator, and described dusty gas is passed through described process by this process aerator In district.
The low concentration VOC contaminated air purifier of use catalyst runner the most according to claim 1, it is characterised in that Dusty gas is imported in described treatment region and described clear area by described process aerator.
The low concentration VOC contaminated air purifier of use catalyst runner the most according to claim 1, it is characterised in that The downstream of described treatment region is provided with a process air-valve.
The low concentration VOC contaminated air purifier of use catalyst runner the most according to claim 1, it is characterised in that The wide cut of described first honeycomb runner is 1/3rd of described purifier main body wide cut;The wide cut of described second honeycomb runner For described purifier main body wide cut 2/3rds.
The low concentration VOC contaminated air purifier of use catalyst runner the most according to claim 1, it is characterised in that The heating-up temperature that the heating-up temperature that described desorption heater sets sets less than described decomposition heater.
CN201620421170.1U 2016-05-10 2016-05-10 Use low concentration VOC contaminated air purifier of catalyst runner Withdrawn - After Issue CN205659561U (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105771639A (en) * 2016-05-10 2016-07-20 西部技研环保节能设备(常熟)有限公司 Low-concentration VOC (volatile organic compound) polluted air purification device using catalyst rotating wheel
CN110327738A (en) * 2019-07-29 2019-10-15 中科新天地(合肥)环保科技有限公司 Zeolite runner Adsorption Concentration RTO cooperating with low-temperature plasma waste gas treatment process
CN112791558A (en) * 2019-11-14 2021-05-14 中微惠创科技(上海)有限公司 Rotary gas adsorption device and working method thereof

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105771639A (en) * 2016-05-10 2016-07-20 西部技研环保节能设备(常熟)有限公司 Low-concentration VOC (volatile organic compound) polluted air purification device using catalyst rotating wheel
CN105771639B (en) * 2016-05-10 2018-02-23 西部技研环保节能设备(常熟)有限公司 Air cleaning unit is polluted using the low concentration VOC of catalyst runner
CN110327738A (en) * 2019-07-29 2019-10-15 中科新天地(合肥)环保科技有限公司 Zeolite runner Adsorption Concentration RTO cooperating with low-temperature plasma waste gas treatment process
CN112791558A (en) * 2019-11-14 2021-05-14 中微惠创科技(上海)有限公司 Rotary gas adsorption device and working method thereof
CN112791558B (en) * 2019-11-14 2023-02-03 中微惠创科技(上海)有限公司 Rotary gas adsorption device and working method thereof

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