财30322 五、新型說明： 【新型所屬之技術領域】 特别是一種用於清潔 本創作係為一種超音波清潔機裝置 面板之超音波清潔機裝置。 【先前技術】 在製作面板的過程中，常常會有些瑕疵， 氣泡。這些瑕疵會影響光阻塗佈的均勻性， 髒汙、4 線路圖案缺陷’ @此通常會利用自動光學檢=所製造出來^ J瑕症。而為了避免在製程中產生的殘膝或油脂 果’通常會在檢測前進行殘膠清除步驟。 習知之殘膠清除步驟，經常利用清潔劑對面板製程中產生 之殘膠或油汙加以清除，此方法為人工進行，效率不佳。秋而 中華民國發明專利第出7694號揭露一種浸泡機，包括有機 座、旋轉輸送機構、出料機構、入料機構及料夾等等，其中機 座上具有圓筒狀的浸泡槽，而旋轉輸送機構係設於浸泡槽内， 且旋轉輸送浸泡機構上係設置複數料夾。另外，出料機構與入 料機構係相鄰設置’並位於浸泡槽的一側，且出料機構及入料 機構均與旋轉輸送機構連結，可控制料件於料失間進行輸出與 輸入，並經由旋轉輸送機構之作動，可使已進入料夾之物料於 浸泡槽内一邊進行長時間（30〜60分鐘）的加熱浸泡，同時緩步 旋轉前進。料件上殘留之餘膠即藉由浸泡槽中之藥液，經過足 夠的溫度及時間反應’可將殘膠去除。此旋轉式之浸泡輸送方 式’除了可以連續式一邊進料另一邊同時出料作業以外，亦大 1430322 幅縮小了浸泡機之體積，以達到用最小空間處理相當大量之料 件殘膠去除作業。 習知之清除殘膠方法，有時也會造成面板的損傷。因此’ 為了能在自動光學檢測前清除面板上之殘膠’期待有更有效且 經濟的解決方案出現。 【新型内容】 本創作係為一種超音波清潔機裝置，其包括：—溶劑超音 波槽以及一界面活性劑超音波槽。本創作主要是要達到快速有 效且自動化地將基板之殘膠及油汙清除，並且不會使基材遭到 損傷。 本創作係為一種超音波清潔機裝置，其包括：一溶劑超音 波槽，其中充填有可溶解殘膠的溶劑；以及一界面活性劑超音 波槽，其係沿一動線方向連接設置於溶劑超音波槽之下游側， 且其中充填有去除油污的界面活性劑。 藉由本創作的實施，至少可達到下列進步功效： -、自動化地將基板之殘膠及油汙清除。 =、快速有地將基板之殘膠及油汙清除。 三、有效地料、溶劑及界面活性劑成本。 四板因為清除殘膠動作受到損傷之機率。 為了使任何熟習相關技蓺 以實施’且根據本說明書所;露之内容=術内容並據 式，任何熟習相關枯蓺 甲％專利範圍及圖 點，因此將在實㈣解本__之目的及優 式中詳細敘述本創作之詳細特徵以及優 100221404 1013068712-0 M430322 修正日期:101/02/22 【實施方式】 第1圖林創作實施例之一種超音波清潔機裝置之側視 圖:第2圖為本創作實綠例之—種超音波清潔機裝置之動作一 不思圖帛3圖為本創作實施例之一種超音波清潔機裝置之動 作一不=圖。第4圖為本創作實施例之_種超音波清潔機裝置 之動作三示意圖。第5圖為本創作實施例之—種超音波清潔機 裝置之動作四示意圖。 如第1圖所示，本實施例為一種超音波清潔機裝置1〇〇， 其包括：-溶劑超音波槽1G以及一界面活性㈣音波槽, 另外還可進-步包括：至少—個水超音波槽3();至少一個執風 乾槽40=轉向單元50;至少一個料片帛6〇; 一失送單元7〇; -傳达早7L 8G以及-自動光學檢測裝置9G。基板可以批次地 置放於各個槽财以進行_、清洗1乾·.·等處理。 浴劑超音波槽1G，其巾充填有可溶解殘膠的_，藉此利 用超音波震i溶劑以產生真空氣泡内爆，而内爆產生的衝擊， 可以將浸沒在可溶解殘膠的溶劑中的基板表面的殘膠及污物 震落剝離下來’如此—來可以將基板上之細微殘膠及污物清洗 乾淨且不傷及基板之表面，尤其是例如驗製作面板的基板。 界面活f生劑超音波槽2〇，其係沿一動線方向^連接設置 於冷劑超日波槽1G之下游側。當基板之殘膠清除完畢後，為 了方便清除基板表面上之油汙（例如油脂），因此可在界面活性 劑超音波槽20巾充財去除油污的界面活性劑，以利用超音 ：1ύϊ3<^ΕΙΧ2-0 M430322 修正曰期:101/02/22 波之«in理’將浸沒在可去除油污之界面活性劑中的基 板表面上的油脂震落剝離下來。 本實施例之超音波清潔機裝置100可以進一步包括至少一 個水超音波槽30，用以清除基板表面上殘餘之溶劑、界面活性 劑或未沖洗淨之㈣。為了使作業連貫’至少-個水超音波槽 30是沿動線方向71連接設置於界面活性劑超音波槽20之下游 側，並且在水超音波槽30中充填有純水或離子水等，以利用 超音波之震盪空穴原理，將經過溶劑超音波槽1〇及界面活性 劑超音波槽2G清除殘縣油汙狀基板浸沒在水巾，以進一 步清除基板表面上殘餘之溶劑、界面活性劑或未沖洗淨之髒 污。 本實施例之超音波清潔機裝置丨〇 〇可以進一步包括至少一 個熱風乾槽40’熱風乾槽4〇係沿動線方向71連接設置於水超 音波槽3G之下游側’以利於基板财清潔之後，再經由熱風 乾槽40之風刀切水以去除水珠’如此一來，熱風乾後的基板 可以自動化地直接進行其他程序。 本實施例之超音波清潔機裝置1〇〇可以進一步包括一轉向 單元50，為了將已完成去殘膠、去料、水洗淨及烘乾之基板 能自動化地直接進行其他程序，例如自動光學檢測（Aut〇mated Optical Inspection, A0I) ’通常需要將原本是垂直的基板轉 向成能水平放置於機台上’因此轉向單元5〇係沿動線方向71 連接&置於熱風乾槽40之下游側’以便將基板轉成水平之方 向，使其能進行後續之平台上的處理。 本實施例之超音波清潔機裝置1〇〇可以進一步包括至少一 100221404 1013068712-0 .. 修正日期:101/02/22 例Γ W'料架6G可以大量地載持複數個待清洗基板， .且白：1面板垂直插入於料片架60上，因此有利於大量 自動化之/月先程序。此外’料片架60可以沿動線方向71以 样放置於溶劑超音㈣ig、界面活性劑超音波 : 水超9攻槽30、熱風乾槽40並由轉向單元50使料片 架60轉向。 …如第2圖至第5圖所示，本實施例之超音波清潔機裝置_ 可乂進v包括夾送單元7〇，夾送單元7〇係設置於溶劑超音 波槽1G、^面料劑超音波槽2()、水超音波槽3q及熱風乾槽 40及轉向早70 5Q之上方，夾送單S 7G可用以將夾持料片架 ⑽’並在夹持料片$ 6〇後沿動線方向71移動。例如當要從溶 別超音波槽10將料片架6〇移至界面活性劑超音波槽2〇時， 夾持單元70需要將料片架60夾持並提起，接著往界面活性劑 超音波槽20移動’之後再將料片架6〇放置於界面活性劑超音 波槽20之界面活性劑中。料片架6〇以此方式沿著動線方向 移動直到進入轉向單元50，轉向單元50將料片架60旋轉90 度以使基板平行於AOI裝置之機台，以利後續之自動化檢測作 業。 本實施例之超音波清潔機裝置100可以進一步包括一傳送 單元80。在接下來的處理中，需要使基板能自動化地進行如 AOI之類的檢測處理，因此將傳送單元80沿動線方向71連接 設置於轉向單元50之下游側，利用傳送單元80將基板往下輪 送並接受檢測。 本實施例之超音波清潔機裝置100可以進一步包括一個自 難娜軸一〇 M430322 動光學檢測裝置90，自動光學拾制壯 元予仏測裝置90可以檢測出基板的 非^小的缺陷，在檢啊光學檢㈣置可以設置位於傳送單 凡之上方及下方’以檢測經傳送單元⑼傳送之基板的正反 兩面。 惟上述各實施例係用以說明太 ^ 兄月本創作之特點，其目的在使熟 習該技術者能瞭解本創作之内衮拍 門令並據以實施，而非限定本創作 本創作所揭示之精神而完成之等 效修飾或修改’仍應包含在以下所述之㈣專利範圍中。 【圖式簡單說明】 第1圖為本創作實施例之-種超音波清潔機裝置之側視圖。 第2圖為本創作實施例之-種超音波清潔機裝置之動作一示意 圖。 第3圖為本創作實施例之-種超音波清潔機$置之動作二示意 圖。 第4圖為本創作實施例之-種超音波清潔機裝置之動作三示意 圖。 第5圖為本創作實施例之-種超音波清潔機裝置之動作四示意 圖。 【主要元件符號說明】 100.............................超音波清潔機裝置 10...............................溶劑超音波槽 20...............................界面活性劑超音波槽 100221404 101306.871-2-0 M430322 3〇...............................水超音波槽 40...............................熱風乾槽 50...............................轉向單元 60...............................料片架 70 ...............................夾送單元 71 ...............................動線方向 80...............................傳送單元 90...............................自動光學檢測裝置 -10022:1404- •10150^871-2-Of ' '. · -v · **-*.·-Finance 30322 V. New description: [New technical field] A special ultrasonic cleaning device for cleaning the panel of the ultrasonic cleaning device. [Prior Art] In the process of making panels, there are often some flaws and bubbles. These flaws will affect the uniformity of the photoresist coating, and the contamination of the 4-line pattern will normally be created by automated optical inspection. In order to avoid residual knee or oily fruit produced during the process, the residual glue removal step is usually performed before the test. The conventional residue removal step often uses a cleaning agent to remove residual glue or oil generated in the panel process. This method is performed manually and is inefficient. Autumn and the Republic of China invention patent No. 7694 discloses a soaking machine comprising an organic seat, a rotating conveying mechanism, a discharging mechanism, a feeding mechanism and a material folder, etc., wherein the base has a cylindrical soaking groove and rotates The conveying mechanism is arranged in the soaking tank, and the plurality of material clips are arranged on the rotating conveying soaking mechanism. In addition, the discharging mechanism and the feeding mechanism are disposed adjacent to each other and located on one side of the immersion tank, and the discharging mechanism and the feeding mechanism are all connected with the rotating conveying mechanism, and the material can be controlled to output and input during the material loss. And through the action of the rotating conveying mechanism, the material that has entered the material folder can be heated and immersed for a long time (30 to 60 minutes) while being slowly rotated forward. The residual glue remaining on the material can be removed by soaking the liquid in the tank and reacting through sufficient temperature and time. This rotary immersion conveying method 'in addition to continuous feeding while feeding the other side while discharging the same, the large 1430322 size reduces the volume of the immersion machine to achieve a relatively large amount of material residue removal operation with a minimum space. Conventional methods for removing residual glue sometimes cause damage to the panel. Therefore, in order to be able to remove the residual glue on the panel before automatic optical inspection, a more efficient and economical solution is expected. [New Content] This creation is an ultrasonic cleaner device that includes: a solvent ultrasonic bath and a surfactant ultrasonic bath. The main purpose of this creation is to quickly and effectively remove the residue and oil from the substrate without damaging the substrate. The present invention is an ultrasonic cleaning device comprising: a solvent ultrasonic wave tank filled with a solvent capable of dissolving residual glue; and a surfactant ultrasonic wave groove connected in a moving line direction to the solvent super The downstream side of the sonic groove is filled with a surfactant for removing oil. With the implementation of this creation, at least the following advancements can be achieved: - Automatic removal of residual glue and oil from the substrate. =, quickly remove the residual glue and oil from the substrate. Third, the cost of effective materials, solvents and surfactants. The probability of damage to the four plates due to the removal of residual glue. In order to make any familiar technology relevant to the implementation of 'and according to this specification; the content of the disclosure = the content of the law and according to the formula, any familiar with the relevant patent range and map points, so the purpose of the (4) solution __ And the detailed description of the detailed features of the creation and the excellent 100221404 1013068712-0 M430322 revision date: 101/02/22 [Embodiment] The first embodiment of the ultrasonic cleaning device of the first embodiment of the creation of the first embodiment: the second The figure is based on the action of the virtual greening device. The action of the ultrasonic cleaning device is not illustrated. FIG. 3 is a diagram of the operation of an ultrasonic cleaning device of the present embodiment. Fig. 4 is a schematic view showing the action 3 of the ultrasonic cleaning device of the present invention. Fig. 5 is a schematic view showing the action 4 of the ultrasonic cleaning device of the present embodiment. As shown in FIG. 1, the embodiment is an ultrasonic cleaner device 1A, comprising: a solvent ultrasonic wave tank 1G and an interface active (four) sound wave groove, and further comprising: at least one water Ultrasonic groove 3 (); at least one air drying groove 40 = steering unit 50; at least one web 帛 6 〇; one escaping unit 7 〇; - early 7L 8G and - automatic optical detecting device 9G. The substrate can be placed in batches for processing, such as _, cleaning, dry, and the like. The bath ultrasonic wave tank 1G, the towel is filled with _, which can dissolve the residual glue, thereby utilizing the ultrasonic vibration solvent to generate a vacuum bubble implosion, and the impact generated by the implosion can be immersed in the solvent capable of dissolving the residual glue. The residual glue on the surface of the substrate and the dirt are peeled off. This is so that the fine residue and dirt on the substrate can be cleaned without damaging the surface of the substrate, especially for example, the substrate on which the panel is fabricated. The interface is a supersonic wave tank 2〇, which is connected along the moving line direction to the downstream side of the refrigerant super-day wave groove 1G. After the residual glue of the substrate is removed, in order to facilitate the removal of oil stains (such as grease) on the surface of the substrate, the surfactant can be used in the surfactant ultrasonic bath 20 to remove the oily surfactant to utilize the supersonic: 1ύϊ3<^ ΕΙΧ2-0 M430322 Correction period: 101/02/22 The wave of "in" removes the grease on the surface of the substrate immersed in the oil-repellent surfactant. The ultrasonic cleaner apparatus 100 of the present embodiment may further include at least one water ultrasonic wave tank 30 for removing residual solvent, surfactant or unwashed surface on the surface of the substrate. In order to make the operation coherent, at least one water ultrasonic wave groove 30 is connected to the downstream side of the surfactant ultrasonic wave groove 20 in the moving direction 71, and the water ultrasonic wave groove 30 is filled with pure water or ionized water or the like. By using the principle of oscillating holes of ultrasonic waves, the oil-stained substrate of the residual county is immersed in the water towel through the solvent ultrasonic wave tank 1〇 and the surfactant ultrasonic wave groove 2G to further remove residual solvent and surfactant on the surface of the substrate. Or not flushed with dirt. The ultrasonic cleaner device 本 of the embodiment may further include at least one hot air drying tank 40'. The hot air drying tank 4 is connected to the downstream side of the water ultrasonic wave tank 3G along the moving line direction 71 to facilitate the substrate cleaning. Thereafter, the water is cut by the air knife of the hot air drying tank 40 to remove the water droplets. Thus, the hot air dried substrate can be automatically and directly subjected to other procedures. The ultrasonic cleaner device 1 of this embodiment may further include a steering unit 50, which can automatically perform other procedures, such as automatic optics, in order to automatically complete the substrate for degreasing, blanking, water washing and drying. Aut〇mated Optical Inspection (A0I) 'It is usually necessary to turn the originally vertical substrate to be horizontally placed on the machine table. Therefore, the steering unit 5 is connected in the direction of the moving line 71 and placed in the hot air drying tank 40. The downstream side 'to turn the substrate into a horizontal direction, enabling it to be processed on subsequent platforms. The ultrasonic cleaner device 1 of this embodiment may further include at least one 100221404 1013068712-0.. Revision date: 101/02/22 Example Γ The W' rack 6G can carry a plurality of substrates to be cleaned in a large amount. And white: 1 panel is vertically inserted into the rack 60, thus facilitating a large number of automated/monthly programs. Further, the tablet holder 60 can be placed in the direction of the moving line 71 so as to be in the solvent super (4) ig, the surfactant ultrasonic wave: the water super 9 tap 30, the hot air drying tank 40, and the bobbin 60 is turned by the steering unit 50. As shown in Fig. 2 to Fig. 5, the ultrasonic cleaning device of the present embodiment _ can be inserted into the v-clamping unit 7A, and the pinch unit 7 is disposed in the solvent ultrasonic wave tank 1G, ^ fabric Ultrasonic groove 2 (), water ultrasonic groove 3q and hot air dry groove 40 and above the steering 70 5Q, the pinch single S 7G can be used to hold the chip holder (10)' and after holding the piece of material $6〇 Moves in the direction of the moving line 71. For example, when the rack 6 is to be moved from the dissolution ultrasonic bath 10 to the surfactant ultrasonic bath 2, the clamping unit 70 needs to clamp and lift the rack 60, and then to the surfactant ultrasonic wave. After the tank 20 is moved 'the rack 6 〇 is placed in the surfactant of the surfactant ultrasonic bath 20 . The web holder 6 is moved in the direction of the moving line in this manner until entering the steering unit 50, and the diverting unit 50 rotates the rack 60 by 90 degrees so that the substrate is parallel to the machine of the AOI device for subsequent automated inspection work. The ultrasonic cleaner apparatus 100 of the present embodiment may further include a transfer unit 80. In the next processing, it is necessary to enable the substrate to perform the detection processing such as AOI automatically, so that the transfer unit 80 is connected to the downstream side of the steering unit 50 in the moving direction 71, and the substrate is lowered by the transfer unit 80. Rotate and accept the test. The ultrasonic cleaner device 100 of the present embodiment may further include a self-drilling axis 〇 M430322 moving optical detecting device 90, and the automatic optical picking and squeezing device 60 can detect the non-small defects of the substrate. The optical inspection (4) can be set above and below the transmission unit to detect the front and back sides of the substrate conveyed by the transport unit (9). However, the above embodiments are used to illustrate the characteristics of the creation of the Tai Brothers, and the purpose of the present invention is to enable the skilled person to understand the slogan of the creation and to implement it, instead of limiting the creation of the creation. Equivalent modifications or modifications made by the spirit of the spirit shall still be included in the scope of the (4) patents described below. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a side view of a supersonic cleaning device of the present embodiment. Fig. 2 is a schematic view showing the operation of the ultrasonic cleaning device of the present embodiment. Fig. 3 is a schematic diagram showing the action of the ultrasonic cleaning machine of the present embodiment. Fig. 4 is a schematic view showing the operation of the ultrasonic cleaning device of the present embodiment. Fig. 5 is a schematic view showing the operation of the ultrasonic cleaning device of the present embodiment. [Explanation of main component symbols] 100............................. Ultrasonic cleaner device 10........ .......................Solvent Ultrasonic Groove 20......................... ......... surfactant supersonic groove 100221404 101306.871-2-0 M430322 3〇.......................... .....Water Ultrasonic Groove 40............................... Hot Air Drying Slot 50..... ..........................Steering unit 60..................... ..........Sheet holder 70...............................Pushing unit 71. ..............................moving direction 80................ ...............Transfer unit 90...............................Automatic Optical detection device -1022:1404- •10150^871-2-Of ' '. · -v · **-*.·-