TWI441692B - Method of cleaning a substrate using the ultrasonic vibration of a medium - Google Patents

Description

Method of cleaning a substrate using ultrasonic oscillating liquid

The present invention is a method of cleaning a substrate using an ultrasonic oscillating liquid, and more particularly a method for cleaning a panel.

In the process of making panels, there are often some defects such as dirt, scratches and air bubbles. These defects can affect the uniformity of the photoresist coating, resulting in defects in the printed wiring pattern, so automatic optical inspection instruments are often used to detect these flaws. In order to avoid the residual glue or grease generated in the process, the cleaning step is usually performed before the detection.

Conventional cleaning steps, often using a cleaning agent to remove residual glue or oil stains generated in the panel process, such as the Republic of China Patent Publication No. 200800423 discloses a panel cleaning machine and method thereof by using a continuous belt surface The flat plate transports a panel, and the cleaning liquid is sprayed by a cleaning nozzle, and the foreign matter on the surface of the panel is washed by a cleaning nozzle. The cleaning nozzle and the discharge path are disposed at a rear end portion of the conveying panel position for cleaning and removing foreign matter accumulated on the inner surface of the belt after being removed by the panel surface. Therefore, the foreign matter accumulated on the inner surface of the belt for conveying the panel can be washed and removed, and discharged to the outside of the washing machine.

The method of panel cleaning machine disclosed in the conventional method, which uses only one cleaning procedure. This is an important issue in order to more effectively and stably remove residual glue and oil on the panel before automatic optical inspection and to reduce panel damage caused by the cleaning process.

The present invention is a method of cleaning a substrate using an ultrasonic oscillating liquid, comprising the steps of: providing a substrate to be cleaned; performing residue removal; and performing oil removal. The invention is mainly to achieve quick and effective removal of residual glue and oil stains generated on the substrate during the manufacturing process.

The invention provides a method for cleaning a substrate by using an ultrasonic oscillating liquid, comprising the steps of: providing a substrate to be cleaned; performing residue removal, which is to soak the substrate to be cleaned with an alcohol alkyl hydrocarbon solvent; In a solvent ultrasonic bath, by ultrasonically oscillating an alcohol-based alkyl hydrocarbon alcohol-based alkyl hydrocarbon solvent to remove the residual glue on the substrate to be cleaned; and performing oil removal, the system is to be treated The cleaning substrate is immersed in a surfactant ultrasonic wave tank filled with a surfactant, and the surfactant is oscillated by ultrasonic waves, so that the surfactant removes oil stain on the substrate to be cleaned, wherein the surfactant is a neutral active agent A solution mixed with water and having a ratio of neutral active agent to water of 20:80.

With the implementation of the present invention, at least the following advancements can be achieved:

First, achieve better and faster residual glue removal.

Second, achieve better and faster oil removal.

Third, the damage of the substrate can be greatly avoided.

In order to make those skilled in the art understand the technical content of the present invention and implement it, and according to the disclosure, the patent scope and the drawings, the related objects and advantages of the present invention can be easily understood by those skilled in the art. The detailed features and advantages of the present invention will be described in detail in the embodiments.

1 is a flow chart of a method for cleaning a substrate using an ultrasonic oscillating liquid according to an embodiment of the present invention. FIG. 2 is a schematic view showing the removal of residual glue according to an embodiment of the present invention. Figure 3 is a schematic view showing the removal of oil stains according to an embodiment of the present invention. Figure 4 is a schematic illustration of a cleaning step in accordance with an embodiment of the present invention. Figure 5 is a schematic view of a drying step in accordance with an embodiment of the present invention.

As shown in FIG. 1, the embodiment is a method S100 for cleaning a substrate by using an ultrasonic oscillating liquid, which comprises the steps of: providing a substrate to be cleaned (step S10); performing residue removal (step S20); Oil stain removal (step S30).

As shown in FIG. 2, a substrate to be cleaned is provided (step S10). The substrate 10 to be cleaned may be a panel to be cleaned, or may be a PCB substrate to be cleaned.

The residual glue removal (step S20) is performed by vertically immersing the substrate 10 to be cleaned in a solvent ultrasonic wave tank 20 filled with a solvent. The solvent used in this embodiment may be, for example, an alcohol alkyl hydrocarbon. When the cleaning operation is performed, the chemical action of the solvent itself and the surface of the substrate 10 to be cleaned has the function of removing residual glue, and is generated by ultrasonic shocking solvent. The physical effect can further accelerate the effect of removing the residual glue on the substrate 10 to be cleaned.

As shown in FIG. 3, the oil stain removal is performed (step S30), which is to remove the substrate 10 to be cleaned after the residue removal (step S20), and then vertically immersed in the surfactant ultrasonic wave tank filled with one of the surfactants. In 30, the surfactant is oscillated by ultrasonic waves to cause the surfactant to remove oil stains on the substrate 10 to be cleaned. The surfactant loaded in the surfactant ultrasonic wave tank 30 can be neutral. The solution in which the active agent is mixed with water, wherein the ratio of the neutral active agent to water may be 20:80.

As shown in FIG. 4, the method S100 for using the ultrasonic oscillating liquid to clean the substrate in the embodiment may further include at least one cleaning step (step S40), whereby the residual glue may be removed (step S20). And the residual solvent and the surfactant on the substrate 10 to be cleaned after the oil stain removal (step S30) are washed. The cleaning step (step S40) is to vertically immerse the substrate 10 to be cleaned in a water ultrasonic wave tank 40 filled with pure water, and ultrasonically oscillate the pure water to clean the substrate 10 to be cleaned.

As shown in FIG. 5, the method S100 for using the ultrasonic oscillating liquid to clean the substrate of the embodiment may further include at least one drying step (step S50), whereby the cleaning step (step S40) may be completed. The substrate to be cleaned 10 is dried to facilitate the subsequent processing of other subsequent processes such as automatic optical inspection to proceed smoothly. The drying step (step S50) is to place the substrate 10 to be cleaned in a hot drying tank 50, and a hot air cutting water bead is generated by a wind knife 51 to dry the substrate 10 to be cleaned.

The embodiments are described to illustrate the features of the present invention, and the purpose of the present invention is to enable those skilled in the art to understand the present invention and to implement the present invention without limiting the scope of the present invention. Equivalent modifications or modifications made by the spirit of the disclosure should still be included in the scope of the claims described below.

10‧‧‧The substrate to be cleaned

20‧‧‧Solvent Ultrasonic Groove

30‧‧‧Interactive Surfactant Ultrasonic Groove

40‧‧‧Water Ultrasonic Slot

50‧‧‧Hot drying tank

51‧‧‧ wind knife

1 is a flow chart of a method for cleaning a substrate using an ultrasonic oscillating liquid according to an embodiment of the present invention.

FIG. 2 is a schematic view showing the removal of residual glue according to an embodiment of the present invention.

Figure 3 is a schematic view showing the removal of oil stains according to an embodiment of the present invention.

Figure 4 is a schematic illustration of a cleaning step in accordance with an embodiment of the present invention.

Figure 5 is a schematic view of a drying step in accordance with an embodiment of the present invention.

S100‧‧‧Method for cleaning substrates by using ultrasonic oscillating liquid

S10‧‧‧ provides a substrate to be cleaned

S20‧‧‧Removal of residual glue

S30‧‧‧ Oil removal

S40‧‧‧ cleaning steps

S50‧‧‧ drying step

Claims (4)

A method for cleaning a substrate by using an ultrasonic oscillating liquid, comprising the steps of: providing a substrate to be cleaned; performing a residue removal by immersing the substrate to be cleaned in a solvent filled with an alcohol alkyl hydrocarbon solvent; In the ultrasonic bath, the alcohol alkyl hydrocarbon solvent is oscillated by ultrasonic waves, so that the alcohol alkyl hydrocarbon solvent removes the residual glue on the substrate to be cleaned; and the oil removal is performed. The substrate to be cleaned is immersed in a surfactant ultrasonic wave tank filled with a surfactant, and the surfactant is oscillated by ultrasonic waves, so that the surfactant removes oil stain on the substrate to be cleaned, wherein the surfactant It is a solution in which a neutral active agent is mixed with water, and the ratio of the neutral active agent to the water is 20:80. The method of using an ultrasonic oscillating liquid to clean a substrate according to claim 1, further comprising at least one cleaning step of immersing the substrate to be cleaned in a water ultrasonic wave tank filled with pure water. The pure water is oscillated by ultrasonic waves to clean the substrate to be cleaned. The method of using an ultrasonic oscillating liquid to clean a substrate as described in claim 2, further comprising at least one drying step of placing the substrate to be cleaned in a hot drying tank, A wind knife produces hot air to dry the substrate to be cleaned. A method for cleaning a substrate by using an ultrasonic oscillating liquid as described in any one of claims 1 to 3, wherein the substrate to be cleaned is a The panel to be cleaned.