M415143 五、新型說明： 【新型所屬之技術領域】 本創作涉及對大尺寸的液晶面板等玻璃基板、帶膜基板、其 他基板同賴_L祕產品大顿錢切的乡條蝴線的基板 劃線裝置。 【先前技術】 為了達到上述目的，在往返移動的工作臺上載置大 —ί使工作臺移動’—邊藉由在卫作臺移動路徑的正 上方左右以規定間隔排列的多個切割器、針(needle)、妒 4，的下降’在玻璃基板的表面(上表面)—次劃j 小塊切湘的切割線。該小塊切湘的切割線只劃在 斗 者X軸方向以及γ轴方向上。 袖万向或 另外’並列的各劃線工具藉由數值控制能夠調 能夠與產品大小的尺寸相匹配(例如，參照專利文獻 同使侍 另外，除了上述結構以外，還有藉由攝像機能夠進^ M 線的例子(例如，參照專利文獻2、3)。 丁準確劃 【專利文獻】 專利文獻1 .日本特開平11_343133號公報 專利文獻2 :曰本特開2009-73714號公報 專利文獻3 :日本實公平6-415號公報 【新型内容】 (創作所欲解決之問題） 能 根據上述專利文獻1的平板玻璃的切割方 尺寸的玻璃基板一次同時獲得多張產品大小的i板‘，，出從大 M415143 夠提南生產率。 但是，在專利文獻1的切割方式中，在初期階段中，對主基 板進行試切(劃出切割線）’確認試切的各切割線是否在劃線位置二 在切割線不位於劃線位置的情況下進行切割器的位置調節。另 外，該切割器的位置調節是藉由依次提供玻璃基板並劃出切割 來進行的。 ° 但是，如果進行試切，由於使用大尺寸高價的母基板，因此 發生因進行無益作業而產生不必要支出的問題。 曰另外，由於每次改變切割線時都進行試切，因此除了造成大 里支出之外，還因劃線位置的確認作業等而存在機器運轉率顯 下降的問題。 ”''可 另外 根據專利文獻2的玻璃基板切割裝置，每個基板 都進行劃線卫具的定位，以便藉由攝像機補償劃線加 位置的偏移量，因此，存在生產節拍大幅下降的問題。 切宝丨在專利文獻卜2以及3的玻璃基板切财式中，移動 刀J^及工作臺來能夠一次進行多張產品大小的劃線。 方然能夠進行並列切割器的¥軸方向(與工作臺的移動 向)的定位，但無法進行各切割器的x軸方向ΐ 。即，沒有χ軸方向的位置調節功能。 圖存在亚列切割器的位置偏移(相對於Χ軸），則如 發生不向端在X軸線上 電極面的不對齊 此產生不合格品。即，發生產品T的 袭置因此摘作的目的纽提供—鷄決上述問題的基板劃線 (解決問題之方式） 體，動本用:下;?，即，具備:移動 由旋轉單元在平面上旋轤姓至，〔、设置成在該移動體上可藉 塊，其設置成可在橫切今作V所載置的大尺寸基板；多個滑 亥作室的移動路徑正上方的導轨上，可 M415143 達，並將該可逆馬達的輸出轴固定到 但不限定於此。 31的下表面中心部， 载置於上述工作臺3上的基板 即，將工作臺3作為盒子而吸引盒子=持，如下方式進行， 個連通小孔35，藉由吸引來保持。。在盒子的頂壁設置多 此時，設為藉由在工作臺3 上抵接玻璃基板A的邊緣，進行定位^ —固隅角的兩邊的銷9 設置在^ΐίΛΓ動路徑的水平部件21的兩端之門 塊23上設置有藉由氣缸等升降單元 作為上述的舰工具25有_輪、 亚且，各滑塊23被設為藉由横向移 田射 右方向移動。 π初早70 26迠夠早獨向左 件，上軸橫向轉單元26麟為：在水平邛 輸出， J二ί而猎由第二馬達29的可逆運轉使滑‘23:左方η 機31並且，在各劃線工具25的附近設有安裳在基座28上的攝像 上的g的攝像機31以及劃線工具25配置在劃線方向的同轴線 該攝像機31藉由横向移動單元26使兩側滑塊23移動板 ^的上表面兩側角的對準標記a的位置，讀取對準標記a，並^取 設严於基板A上表面的劃線標記b以及藉由劃線工具乃的切割 輪等劃在玻璃基板A的邊緣部上表面的短的試切線c。 ° 圖中的41是引導劃線工具25的升降的導向單元。 如果如上所述地構成，則將基板A載置於工作臺3上，使移 動體1往返移動，藉由攝像機3丨讀取基板A的四角的對準標記a， 量，根與讀取相伴的加工偏移 切割線線工具 -微向則方移動。 至3起保持使基板A略 的其，藉由升降單元24使各劃線工且25下降一 翁標記B)部分#购5、@ 6 標記B的前方(脫離 線’藉由升降單元24使各劃紅劃出試切 此藉申各攝像機31讀取割，、升而返回。 伴C是在蚊销 甲）上遇疋如圖6所示地在非正娟相罢 罝(表不在圖 正規位置(如圖6所示，如果相‘與檢測相伴的非 ，則使劃線工具25與劃線的偏移距 第二馬達29的運轉)將劃線工具25 ^ 3、二‘單几26(藉由 相適應的紅並則、移魅正置(^)祕’進行與偏移量 r旦上ί的補償方式中，藉由與攝像機31連接的運管F置呼管值 矛夕里’基於該計算藉由控制裝置使 计才偏 並且，—邊使移動體】前進移〔二 反轉運轉。 降的，工具25對工作臺3上的基板A書t:宝 1ί降早凡24下 ,藉由相同的步驟在前面的切割線之間可LiJ — 次、1 夕-人切告丨j線，另外，盘工作喜3 ―知# &上 -J 人或 9〇。，可_跑直相㈣^線蛛贼蝴·制基板A 的下=即S :根據基板A的厚度關決定畫彳線工具“ 25 b 5 之後’劃線工具25再次移動至劃線標記B位置，在該位置上 M415143 對基板A的1部分劃出劃線。 也可件形成f各劃線工具25劃絲—根劃線之後， 也j以確5忍疋否實際劃出劃線。 線X結果’如圖7所示，能夠劃出與劃線標記6的中心一致的劃 圖中S為劃線幅度。 的距二ίΐίϊ線ί後’根據劃線X的中心和劃線基準中心 具的鋪健城在劃線工 在本創作的第ί實：===高成品率。 動的移動體1上，設有藉由麵t θ ® 11所不’在彺返移 置的大尺寸基板Α的臺3 在平面上旋轉且保持所載 上述基板A、移動體丨的往返移動、工一 以及载置於工作臺3的基板a的侔拄至的碇轉早兀2 相同，因此省略詳細· 槐持枝的結猶第—實施方式 另外，在橫切工作臺3正上方的水平的 在圖示的情況下，上述橫向移動單元6 置於棒部件61的後面全長上的導轨65上滑動自 端之間的螺栓68擰入到橫向部件66的 的可逆運郝㈣灰68，達70 導軌71上，再有’位置調節單开後面王長上设置的 輪73心|在樺向邮使各滑塊64軸支樓的小齒 由馬達74可逆驅動各自的小齒輪73 ^滑免2 ^ 動，以此能夠調節位置。 Q月鬼64向左右方向滑 此外，雜上魏構，也可喊由其簡構達到目的。 9 M415143 另外’在各滑塊64上設有藉由鄉& 4々缸仰_ 的移動方向滑動的移動台76,在各移動L 向工作臺3 77進行升降的劃線工具78。 口 上叹有猎由升降單元 此省降單元77以及劃線工具78與第—實施方式相同，因 在圖示的情況下，上述縱向移動單 的，79的導軌80上滑動自由地卡合移動64 將猎由安裝在基座79上的馬達91的可逆驅動龙81，亚且 入到被移動台76支撐的螺母83中，彳 1轉^、栓82擰 其他=構移_前後方向)軸台76 ^稀伙此，也可以藉由 查I姑Ϊ有’在移動台76上設有讀取基板A的對準伊己a以月〜 f别雜記S_產品_ 攝像機^ 及母個 取基板a的兩二貝4猎由，rfi台％的攝像機84讀 置計算與讀取伴隨的加工^移m攝接的運算裝 旋轉單元2 ^ 根據其^猎由控制裝置運轉 使作$ 3向_針、逆時針方向旋轉與補償量冲1 ^ ϊί i藉由各攝像機84讀取每個劃線產品的圖荦桿古己S，ϋ 機乂裝置計算與讀取相伴的劃二Ϊ 7^ 的^作堂的移動方向前邊緣之間的加工(劃線)偏r 二，計算藉由縱向移動單元75使移動台76向工作臺的^ 動方向刖方f者後方移動(與補償量相對應）。 夕 62的下降劃線工具78、藉由橫向移動單元 【圖式簡單說明】 圖1是表示本創作的第—實施方式的俯視圖 圖2是表示本創作的第—實施方式的側視圖 M415143 圖 視圖 是表示本創作的第一實施方式的主要部分的縱剖放大側 圖4是玻璃基板的俯視圖。 圖5是表示試切線和劃線標記的關係的放大俯視圖。 圖6，表示試切線和劃線標記的關係的放大俯視圖。 圖7是表示正確劃線的放大俯視圖。 圖8是表示第二實施方式的俯視圖。 圖9是表示第二實施方式的縱剖側視圖。 示ί二ί施方式的主要部分的放大俯視圖。 ^ 12 1 Hi方式社要部分的縱剖放大側視圖 圖12疋表不產品圖案的俯視圖。 70口 圖13疋表示產品的偏移量的俯視圖。 【主要元件符號說明】 A. ..基板 a...對準標記 B. ·.劃線標記 C·..試切線 &..劃線寬度 s…圖案標記 T…產品(產品圖案） X..·劃線 z…偏移距離 I.·移動體 2·..旋轉單元 3··.工作臺 4、 22、65、7卜80…導執 5、 23、64、67、81…滑塊 6、 68、82…螺栓 M415143 7、69、83…螺母 8.. .第一馬達 9…銷 21.. .水平部件 24、 77...升降單元 25、 78…劃線工具 26、 62...橫向移動單元 27、 72...齒條 28、 79...基座 29…第二馬達 30、 73:"小齒輪 31、 84...攝像機 35.. .連通小孔 41…導向單元 61.. .棒部件 63.. .位置調節單元 66.. .橫向部件 70、74、91...馬達 75.. .縱向移動單元 76.. .移動台 12M415143 V. New description: [New technical field] This creation involves the substrate drawing of a large-sized liquid crystal panel such as a glass substrate, a film-coated substrate, and other substrates that rely on the _L secret product. Line device. [Prior Art] In order to achieve the above object, a plurality of cutters and needles arranged at a predetermined interval on the left and right sides of the moving path of the table are placed on the reciprocating table. (needle), 妒4, the drop 'on the surface (upper surface) of the glass substrate - the second cut j cut line of cut Xiang. The cutting line of the small piece of cut Xiang is only drawn in the X-axis direction of the hopper and the γ-axis direction. Sleeve or other 'parallel' of each scribing tool can be adjusted to match the size of the product by numerical control (for example, refer to the patent document and the other, in addition to the above structure, there is also a camera capable of Example of the M-line (for example, refer to Patent Documents 2 and 3). PCT Patent Publication No. JP-A-2009-73714 Patent Document 2: Japanese Patent Publication No. 2009-73714 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 In the cutting method of Patent Document 1, in the cutting method of Patent Document 1, the main substrate is subjected to trial cutting (cutting the cutting line) to confirm whether each of the cut lines of the trial cut is at the scribing position. The position adjustment of the cutter is performed without the cutting line being located at the scribe line position. In addition, the position adjustment of the cutter is performed by sequentially providing a glass substrate and cutting out the cut. However, if the trial cutting is performed, since the mother substrate having a large size and a high price is used, there is a problem that unnecessary expenses are incurred due to the unprofitable operation. 曰 In addition, since the trial cutting is performed every time the cutting line is changed, In addition to the large-scale expenditure, there is a problem that the machine operation rate is lowered due to the confirmation operation of the scribing position, etc. ""', in addition, according to the glass substrate cutting device of Patent Document 2, each substrate is subjected to a scribing aid. The positioning is such that the offset of the line and the position is compensated by the camera, and therefore there is a problem that the production tempo is greatly reduced. In the glass substrate cutting method of Patent Documents 2 and 3, the cutting knife J^ and The workbench can perform scribing of multiple product sizes at a time. The position of the parallel axis of the parallel cutter (moving direction of the table) can be performed, but the x-axis direction of each cutter cannot be performed. There is no position adjustment function in the direction of the x-axis. The figure has the positional offset of the sub-column cutter (relative to the x-axis), then the misalignment of the electrode faces on the X-axis is not occurred. This produces a non-conforming product. That is, the occurrence of the product T occurs, so the purpose of the extraction is provided. The substrate is crossed (the way to solve the problem), and the following is used: The movement is rotated by the rotating unit on the plane to the last name, [, set to be borrowed on the moving body, which is set to be a large-sized substrate that can be placed across the current V; the movement of a plurality of slides On the guide rail directly above the path, M415143 can be reached, and the output shaft of the reversible motor is fixed to, but not limited to. The central portion of the lower surface of the 31, the substrate placed on the table 3, that is, the workbench 3, as a box, attracting the box = holding, as follows, the communicating small holes 35 are held by suction. The top wall of the box is placed at a large amount, at this time, by abutting the glass substrate A on the table 3. The edge of the edge is fixed. The pin 9 on both sides of the solid angle is disposed on the door block 23 at both ends of the horizontal member 21 of the moving path. The lifting unit by the cylinder or the like is provided as the ship tool 25 having the above-mentioned wheel. , and the sliders 23 are set to move laterally by the field. Moving the right direction. π early 70 6 迠 early enough to the left piece, the upper axis lateral rotation unit 26 Lin is: in the horizontal 邛 output, J ί while hunting by the reversible operation of the second motor 29 to slide '23: left η machine 31 Further, in the vicinity of each scribing tool 25, a camera 31 in which g is imaged on the susceptor 28 and a scribing tool 25 are disposed in a line in the scribe line direction. The camera 31 is moved by the lateral movement unit 26 The side sliders 23 are moved to the positions of the alignment marks a on the opposite sides of the upper surface of the board, the alignment marks a are read, and the scribe marks b set on the upper surface of the substrate A are taken and the scribe lines are drawn by The cutting wheel or the like of the tool is drawn on the short trial line c on the upper surface of the edge portion of the glass substrate A. 41 in the figure is a guide unit that guides the lifting and lowering of the scribing tool 25. According to the configuration described above, the substrate A is placed on the table 3, the moving body 1 is moved back and forth, and the alignment marks a of the four corners of the substrate A are read by the camera 3, and the amount is accompanied by reading. The machining offset cutting line tool - the micro direction moves. Up to 3, the substrate A is kept abbreviated, and each of the scribe lines 25 is lowered by the hoisting unit 24, and the front portion of the mark B) is removed. The front line (the detachment line) is made by the hoisting unit 24 Each reddish stroke is cut out, and each camera 31 reads and cuts, and rises and returns. The accompanying C is caught on the mosquito net, as shown in Fig. 6 in the non-Juanjuan phase. The normal position (as shown in Fig. 6, if the phase is accompanied by the non-detection, the offset of the scribing tool 25 from the scribe line from the operation of the second motor 29) will be the scribing tool 25^3, two 'single 26 (by adapting the red sum, shifting the charm (^) secret' to compensate with the offset r ί, the transport tube F connected to the camera 31 is set to call the value of the spear 'Based on this calculation, the controller is biased by the control device, and the moving body is moved forward. [Two reverse rotation operations. Down, the tool 25 is on the substrate A on the workbench 3. Book t: Bao 1ί降早凡24 Next, by the same procedure, between the preceding cutting lines, LiJ-times, 1 eve-persons can be used to inform the 丨j line, and in addition, the disk work hi 3 ―知# &上-J person or 9〇. _run Phase (4) ^ 线 贼 蝴 · 制 制 制 制 制 制 = = = = = = = = = = 制 制 = = = = = = = : : : : : : : : : : : : : : : : : : On M415143, a part of the substrate A is scribed. It is also possible to form a scribe line 25 after each scribe line-root scribe line, and also to determine whether the line is actually 5 or not. As shown in Fig. 7, it is possible to draw a line corresponding to the center of the scribe mark 6 in which the S is the scribe line width. The distance from the line ίΐίϊ line ί 'after the center of the scribe line X and the line center of the scribe line In the first work of the stencil: === high yield. The moving mobile body 1 is provided with a large-sized substrate Α which is not displaced by the surface t θ ® 11 3 Rotating on the plane and keeping the above-mentioned substrate A and the moving body 往返 reciprocating movement, the work 1 and the substrate a placed on the table 3 are the same, so the detailed description is omitted. The knot of the branch - the embodiment additionally, in the case of the horizontal level directly above the table 3, the lateral movement unit 6 is placed The guide rail 65 on the rear end of the rod member 61 slides from the end of the bolt 68 between the end to the reversible load (four) ash 68 of the cross member 66, up to 70 rail 71, and then has a 'position adjustment single open back king The length of the wheel 73 is set on the long side | in the birch to the mail, the small teeth of the 64-axis branch of each slider are reversibly driven by the motor 74 to slide the respective pinion 73 ^2, so that the position can be adjusted. Sliding in the left and right direction, in addition to the Wei structure, can also be shouted by its simplicity to achieve the purpose. 9 M415143 In addition, each of the sliders 64 is provided with a moving table that slides in the moving direction of the township & 76. A scribing tool 78 that moves up and down the table 3 77 in each movement L. The sigh is spurred by the lifting unit. The lowering unit 77 and the scribing tool 78 are the same as the first embodiment. In the illustrated case, the longitudinally moving single, 79 rails 80 are slidably engaged and moved 64. The reversible driving dragon 81 of the motor 91 mounted on the base 79 is submerged into the nut 83 supported by the moving table 76, and the 彳1 turns, the bolt 82 is screwed to the other = the configuration shift _ front and rear direction) 76^Rarely, it is also possible to find the substrate A on the mobile station 76 by arranging the alignment of the substrate A on the mobile station 76 in a month~f don't miscellaneous S_product_camera^ and the mother take the substrate a two-two shell 4 hunting, rfi station% of the camera 84 reading calculation and reading accompanying processing ^ shift m camera computing rotation unit 2 ^ according to its operation by the control device to make $ 3 to _ The needle, the counterclockwise rotation and the compensation amount are 1 ^ ϊί i. Each camera 84 reads the map mast of each of the scribing products, and the 乂 machine calculates and reads the accompanying strokes. ^Processing (dash line) between the front edges of the moving direction of the working chamber is two, and the moving unit 76 is moved to the table by the longitudinal moving unit 75. INTRODUCTION side direction f by moving backward (corresponding to an amount of compensation). FIG. 1 is a plan view showing a first embodiment of the present invention. FIG. 2 is a side view showing a side view of the first embodiment of the present invention. FIG. 4 is a plan view showing a glass substrate in a main portion of the first embodiment of the present invention. Fig. 5 is an enlarged plan view showing a relationship between a trial scribe line and a scribe line mark. Fig. 6 is an enlarged plan view showing the relationship between a trial scribe line and a scribe line mark. Fig. 7 is an enlarged plan view showing a correct scribe line. Fig. 8 is a plan view showing a second embodiment. Fig. 9 is a longitudinal sectional side view showing a second embodiment. An enlarged top view of the main part of the method. ^ 12 1 Vertical view of the main part of the Hi-mode company. Side view Figure 12 shows the top view of the product pattern. 70 port Fig. 13A shows a top view of the offset of the product. [Description of main component symbols] A. .. substrate a... alignment mark B. ·. scribe mark C·.. trial cut line &.. scribe width s... pattern mark T... product (product pattern) X ..·Line z...offset distance I.·moving body 2·..rotating unit 3··. workbench 4, 22, 65, 7 bu 80...lead 5, 23, 64, 67, 81...slip Blocks 6, 68, 82... Bolts M415143 7, 69, 83... Nuts 8.. First motor 9... Pins 21.. Horizontal parts 24, 77... Lifting units 25, 78... Scribing tools 26, 62 ...transverse movement unit 27, 72...rack 28, 79... base 29...second motor 30, 73: "pinion 31, 84...camera 35.. communicating aperture 41 ...guide unit 61.. .bar member 63.. position adjustment unit 66.. transverse member 70, 74, 91...motor 75.. longitudinal movement unit 76.. mobile station 12