CN103472602A - Calibrating module for positioning worktable of liquid crystal manufacturing equipment - Google Patents
Calibrating module for positioning worktable of liquid crystal manufacturing equipment Download PDFInfo
- Publication number
- CN103472602A CN103472602A CN2013104018688A CN201310401868A CN103472602A CN 103472602 A CN103472602 A CN 103472602A CN 2013104018688 A CN2013104018688 A CN 2013104018688A CN 201310401868 A CN201310401868 A CN 201310401868A CN 103472602 A CN103472602 A CN 103472602A
- Authority
- CN
- China
- Prior art keywords
- liquid crystal
- manufacturing equipment
- crystal manufacturing
- rotary positioning
- support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Landscapes
- Liquid Crystal (AREA)
Abstract
The invention relates to a calibrating module for a positioning worktable of liquid crystal manufacturing equipment. The calibrating module comprises a base, wherein the base is U-shaped; surfaces of embossments on two sides of the base are accurately ground to form a U-shaped sliding track; a large sliding table is arranged on the inner side of the U-shaped sliding track; a rotary positioning device is fixed above the large sliding table through a support; a circle of crossed roller bearings is arranged between the support and the rotary positioning device; a linear guide track is fixed at the top end of the rotary positioning device through screws; and an elongated sliding block is arranged on the linear guide track. By the technical scheme, the calibrating module can be used with various worktables and base stations, and can calibrate linear motion in the XY directions and an angle theta.
Description
Technical field
The present invention relates to semiconductor, liquid crystal manufacturing equipment and inspection machine field, be specifically related to a kind of liquid crystal manufacturing equipment positioning table calibration module.
Background technology
In semiconductor, liquid crystal manufacturing equipment and inspection machine field, after the mechanical arm led by positioning table or other actuating unit have been located in the plane, need the calibration operation platform to carry out the calibration of XY axial location and angle θ, if calibrated with common rectilinear direction calibration operation platform or rotational alignment worktable, need they are installed respectively to corresponding position, take up space very much, this processing mode for accurate miniature is very unfavorable, if a kind of calibration module is arranged, their function is integrated, and the problems referred to above will be readily solved.
Summary of the invention
The object of the invention is to overcome the problem that prior art exists, a kind of liquid crystal manufacturing equipment positioning table calibration module is provided.
For realizing above-mentioned technical purpose, reach above-mentioned technique effect, the present invention is achieved through the following technical solutions:
A kind of liquid crystal manufacturing equipment positioning table calibration module, comprise base, described base is the U font, the convex surfaces on described base both sides is carried out to smooth grinding and form U font slide rail, described U font slide rail installed inside has large-scale slide unit, fix a rotary positioning apparatus by support above described large-scale slide unit, one circle crossed roller bearing is installed between described support and described rotary positioning apparatus, described rotary positioning apparatus top is fixed with line slideway by screw, is provided with the strip slide block on described line slideway.
Further, at the other end of described base, electric machine support is installed, the motor of installing in described electric machine support drives described large-scale slide unit by ball-screw.
Further, described rotary positioning apparatus can be made Arbitrary Rotation at described large-scale slide unit by described crossed roller bearing and support.
Further, described strip slide block both can be free to slide on described line slideway, also can make Arbitrary Rotation by described rotary positioning apparatus.
Further, be separately installed with two sensors on the both sides of described large-scale slide unit.
The invention has the beneficial effects as follows:
Adopt technical solution of the present invention, this calibration module and various worktable and base station can be used in combination, carry out the correction of rectilinear motion and the angle θ of XY direction, especially be used in the correction of angle θ, optional position can be set as to rotation center, therefore the degree of freedom of motion is high, the action variation.
The accompanying drawing explanation
Fig. 1 is structural representation of the present invention.
Number in the figure explanation: 1, base, 2, U font slide rail, 3, large-scale slide unit, 4, support, 5, rotary positioning apparatus, 6, crossed roller bearing, 7, screw, 8, line slideway, 9, the strip slide block, 10, electric machine support, 11, motor, 12, ball-screw, 13,, sensor.
Embodiment
Below with reference to the accompanying drawings and in conjunction with the embodiments, describe the present invention in detail.
Shown in Fig. 1, a kind of liquid crystal manufacturing equipment positioning table calibration module, comprise base 1, described base 1 is the U font, the convex surfaces on described base 1 both sides is carried out to smooth grinding and form U font slide rail 2, described U font slide rail 2 installed inside have large-scale slide unit 3, fix a rotary positioning apparatus 5 by support 4 above described large-scale slide unit 3, one circle crossed roller bearing 6 is installed between described support 4 and described rotary positioning apparatus 5, described rotary positioning apparatus 5 tops are fixed with line slideway 8 by screw 7, be provided with strip slide block 9 on described line slideway 8.
Further, at the other end of described base 1, electric machine support 10 is installed, the motor 11 of described electric machine support 10 interior installations drives described large-scale slide unit 3 by ball-screw 12.
Further, described rotary positioning apparatus 5 can be made Arbitrary Rotation by described crossed roller bearing 6 at described large-scale slide unit 3 with support 4.
Further, described strip slide block 9 both can be free to slide on described line slideway 8, also can make Arbitrary Rotation by described rotary positioning apparatus 5.
Further, be separately installed with two sensors 13 on the both sides of described large-scale slide unit 3.
Principle of the present invention:
This calibration module in use, can be used in combination with various worktable and base station, coordinate the locating device that moves axially on base station or worktable, carry out the correction of rectilinear motion and the angle θ of XY direction, especially the large-scale slide unit 3 carried in conjunction with this module and strip slide block 9, can be set as optional position the correction that rotation center carries out angle θ; Sensor 13 on large-scale slide unit 3 both sides, the linear position that can catch accurately this XY direction changes and the variation of angle θ, and converts them to electric signal and send master control system to.
The foregoing is only the preferred embodiments of the present invention, be not limited to the present invention, for a person skilled in the art, the present invention can have various modifications and variations.Within the spirit and principles in the present invention all, any modification of doing, be equal to replacement, improvement etc., within all should being included in protection scope of the present invention.
Claims (5)
1. a liquid crystal manufacturing equipment positioning table calibration module, comprise base (1), it is characterized in that, described base (1) is the U font, the convex surfaces on described base (1) both sides is carried out to smooth grinding and form U font slide rail (2), described U font slide rail (2) installed inside has large-scale slide unit (3), fix a rotary positioning apparatus (5) in described large-scale slide unit (3) top by support (4), one circle crossed roller bearing (6) is installed between described support (4) and described rotary positioning apparatus (5), described rotary positioning apparatus (5) top is fixed with line slideway (8) by screw (7), be provided with strip slide block (9) on described line slideway (8).
2. liquid crystal manufacturing equipment positioning table calibration module according to claim 1, it is characterized in that, the other end at described base (1) is equipped with electric machine support (10), and the motor (11) of installing in described electric machine support (10) drives described large-scale slide unit (3) by ball-screw (12).
3. liquid crystal manufacturing equipment positioning table calibration module according to claim 1, is characterized in that, described rotary positioning apparatus (5) can be made Arbitrary Rotation at described large-scale slide unit (3) by described crossed roller bearing (6) and support (4).
4. according to claim 1 and 3 described liquid crystal manufacturing equipment positioning table calibration modules, it is characterized in that, described strip slide block (9) both can be free to slide on described line slideway (8), also can make Arbitrary Rotation by described rotary positioning apparatus (5).
5. liquid crystal manufacturing equipment positioning table calibration module according to claim 1, is characterized in that, on the both sides of described large-scale slide unit (3), is separately installed with two sensors (13).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013104018688A CN103472602A (en) | 2013-09-06 | 2013-09-06 | Calibrating module for positioning worktable of liquid crystal manufacturing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013104018688A CN103472602A (en) | 2013-09-06 | 2013-09-06 | Calibrating module for positioning worktable of liquid crystal manufacturing equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103472602A true CN103472602A (en) | 2013-12-25 |
Family
ID=49797509
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2013104018688A Pending CN103472602A (en) | 2013-09-06 | 2013-09-06 | Calibrating module for positioning worktable of liquid crystal manufacturing equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103472602A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000111677A (en) * | 1998-10-07 | 2000-04-21 | Canon Inc | Positioning stage device, color filter manufacturing device and liquid crystal aligner |
| JP2006210393A (en) * | 2005-01-25 | 2006-08-10 | Dainippon Printing Co Ltd | Substrate processing apparatus, substrate transfer apparatus and substrate control method |
| CN201425674Y (en) * | 2009-05-26 | 2010-03-17 | 北京清大天达光电科技有限公司 | LCD marking, identification and alignment system |
| CN101807371A (en) * | 2010-04-07 | 2010-08-18 | 苏州凯蒂亚半导体制造设备有限公司 | Position precorrection device in ACF attaching equipment of flat-panel display |
| CN202139163U (en) * | 2010-02-04 | 2012-02-08 | 白井科技股份有限公司 | substrate scribing device |
| CN203502700U (en) * | 2013-09-06 | 2014-03-26 | 苏州凯欧机械科技有限公司 | Calibration module for positioning workbench of liquid crystal manufacturing equipment |
-
2013
- 2013-09-06 CN CN2013104018688A patent/CN103472602A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000111677A (en) * | 1998-10-07 | 2000-04-21 | Canon Inc | Positioning stage device, color filter manufacturing device and liquid crystal aligner |
| JP2006210393A (en) * | 2005-01-25 | 2006-08-10 | Dainippon Printing Co Ltd | Substrate processing apparatus, substrate transfer apparatus and substrate control method |
| CN201425674Y (en) * | 2009-05-26 | 2010-03-17 | 北京清大天达光电科技有限公司 | LCD marking, identification and alignment system |
| CN202139163U (en) * | 2010-02-04 | 2012-02-08 | 白井科技股份有限公司 | substrate scribing device |
| CN101807371A (en) * | 2010-04-07 | 2010-08-18 | 苏州凯蒂亚半导体制造设备有限公司 | Position precorrection device in ACF attaching equipment of flat-panel display |
| CN203502700U (en) * | 2013-09-06 | 2014-03-26 | 苏州凯欧机械科技有限公司 | Calibration module for positioning workbench of liquid crystal manufacturing equipment |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103551276B (en) | A kind of intelligent high-speed point gum machine | |
| CN104071570B (en) | The autoloader of coupling electric logging device equipment | |
| US9410786B2 (en) | Coordinate measuring apparatus | |
| CN102629566B (en) | Processing unit (plant) | |
| CN103470927A (en) | Rotating and positioning mechanism for converting linear movements into rotary movements | |
| CN103474384A (en) | Wedge-structure precision positioning lifting platform on semiconductor processing equipment | |
| CN105203884A (en) | Automatic safety inspection system for air conditioner external unit | |
| CN102152133A (en) | Five-coordinate locating mechanism | |
| CN203502700U (en) | Calibration module for positioning workbench of liquid crystal manufacturing equipment | |
| CN107526372B (en) | Five controlling means and curved surface or cambered surface glass panels's check out test set | |
| CN204831228U (en) | Axle room automatic checkout device and production facility thereof | |
| CN103134802A (en) | Two-dimensional movement apparatus for PCB optical detection | |
| CN203738787U (en) | Mechanical arm with testing heads controlled to accurately move and be positioned in XY plane | |
| CN103522742B (en) | Workbench servo positioning control system and positioning control method | |
| CN103472602A (en) | Calibrating module for positioning worktable of liquid crystal manufacturing equipment | |
| CN103624776A (en) | Mechanical arm for precisely motion positioning control of testing head in XY plane | |
| CN102889905A (en) | Detection device | |
| CN204831345U (en) | Electric power check out test set mount | |
| CN204090327U (en) | A kind of drive rail of chip mounter | |
| CN202648635U (en) | Three-coordinate measuring machine capable of realizing multiple measuring modes | |
| CN203503632U (en) | Wedge-structure precision positioning lifting platform on semiconductor processing equipment | |
| CN204986661U (en) | Pointolite adjusting device of medical endoscope detector | |
| CN104807421A (en) | Automatic detection device for relative position of component after forming of tow belt forming | |
| CN104942089A (en) | Full-automatic bending machine and full-automatic bending method | |
| CN103415156A (en) | Stable type PCB welding rotating adsorption jig |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20131225 |