JP2017019290A - Scribe method and scribe device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a scribe method which refers to an actual position of an alignment mark irrespective of positional displacement, angle displacement or the like at the positioning of a glass baseboard, and without being affected by a thermal expansion mechanical error of a moving mechanism part of a scribe head, and can exactly form a scribe line in a scheduled position, and to provide a scribe device.SOLUTION: In a scribe method, a scribe device 1 comprises a CCD camera 10 for moving a coordinate system integrally with a scribe head, aligns a camera sensor of the CCD camera 10 on three points of alignment marks, measures a coordinate of a mark center of three points of the alignment marks, detects an error between the mark center coordinate and a camera center, performs calculation processing such as coordinate rotation, right angle correction and moving amount correction on the basis of the error, converts an actual coordinate of the mark center of the alignment marks into a work coordinate system Z', and operates a scribe in the converted work coordinate system Z'.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a scribing method and a scribing apparatus suitable for forming a scribe line on a brittle material substrate such as a glass substrate, a semiconductor substrate, or a solar cell substrate.

  The present invention also relates to a scribing method and a scribing apparatus for forming a scribe line on a glass substrate, a semiconductor substrate, or a solar cell substrate on which alignment marks are written.

  In addition, the said glass substrate, a semiconductor substrate, and the board | substrate for solar cells are collectively called a glass substrate below.

  In addition, the present invention captures the image of the alignment mark of the glass substrate that is positioned each time the glass substrate is replaced, performs image processing with the CCD camera, measures the position or coordinates of the alignment mark, performs the necessary processing, and then performs a scribe operation. The present invention relates to an improvement in a scribing method and a scribing apparatus.

  Patent Document 1 describes a scribing method for a glass substrate on which alignment marks are written.

  According to Patent Document 1, first, for example, a glass substrate on which a positioning alignment mark is written is positioned on a table and fixed by suction. Next, using the two CCD cameras installed above the scribe device, the two alignment marks on the left and right sides on the substrate are imaged to perform image processing. Next, by image processing, it is detected how much the substrate is inclined from the reference line of the table, and how much the substrate is deviated from the origin position as a reference of the table. Next, based on the detection result, the tilt of the substrate is corrected by rotating the table, and the deviation from the origin position of the table is moved by moving the table in the Y-axis direction and moving the scribe head in the X-axis direction. to correct.

  This correction is done every time the board is replaced. As soon as this correction operation is completed, the scribing operation is started.

  That is, in the technique of Patent Document 1, a scribe line is first formed on a glass substrate without confirming a scribe line, and a scribe operation is performed after a positioning correction operation.

JP2011-251900

  However, the scribe line is mainly formed by moving the scribe head. At this time, the movement mechanism of the scribe head is affected by thermal expansion and mechanical error, so that an error occurs in the movement value of the scribe head, and it becomes difficult to accurately form a scribe line at the planned position.

  The set value and actual movement amount do not match. Furthermore, since the thermal expansion of the glass substrate and the scribing head moving mechanism part and the table moving mechanism part are different, the formation of the scribe line in accordance with the alignment mark position of the glass substrate accurately and in conformity with it. Have difficulty. Many corrections are required.

  Therefore, the present invention has no relation to the positional deviation, the angular deviation, etc. in the positioning of the glass substrate, and further, it is not affected by the thermal expansion mechanical error of the moving mechanism part of the scribe head, and the reference to the actual position of the alignment mark. Another object of the present invention is to provide a scribing method and a scribing apparatus capable of accurately forming a scribe line at a predetermined position.

  In the present invention, on the upper surface of a table provided with an X-direction stopper and a Y-direction stopper for positioning the glass substrate, the scribe head is the X-axis which is the end of the X-direction stopper and the Y-side which is the end of the Y-direction stopper. A scribing method for forming a scribe line on a glass substrate by moving a coordinate system Z composed of an axis includes a CCD camera that moves the coordinate system integrally with a scribe head, and the glass substrate is placed on the X and Y axes on the upper surface of the table. The scribe head and the CCD camera are moved together as a result of the positioning, and the X axis, Y, and Y are set for each of at least three alignment marks M1, M2, and M3 that are written on the glass substrate and are orthogonally arranged. Coordinates M1 (X = X1, Y = Y1) from the axis, M2 (X = X2, Y = Y1), 3 (X = X1, Y = Y3) and align the camera sensor of the CCD camera, measure the coordinates of the mark centers of the three alignment marks M1, M2, and M3. For the alignment marks M1, M2, and M3, An error between the mark center coordinates and the camera center is detected, and calculation processing such as coordinate rotation, squareness correction, and movement amount correction is performed based on the error, and the actual coordinates of the mark center of the alignment mark M1 are obtained. (X = 0, Y = 0), the actual coordinates of the mark center of the alignment mark M2 are (X = X2-X1, Y = 0), and the actual coordinates of the mark center of the alignment mark M3 are (X = 0). , Y = Y3−Y1) is converted into the workpiece coordinate system Z ′, and the scribing method is used to operate the scribe in the converted workpiece coordinate system Z ′. .

  In the present invention, on the upper surface of the table provided with the X-direction stopper and the Y-direction stopper for positioning the glass substrate, the scribe head is positioned at the X-axis and the Y-direction topper at the end of the X-direction stopper. A scribing apparatus that moves a coordinate system Z composed of a certain Y axis to form a scribe line on a glass substrate, includes a CCD camera that moves the coordinate system integrally with the scribe head, and the glass substrate is moved to the X axis on the upper surface of the table, The scribe head and the CCD camera are moved together with the Y-axis positioned, and the X-axis is set for each of at least three alignment marks M1, M2, and M3 that are written on the glass substrate and are orthogonally arranged. , Coordinates M1 from the Y axis (X = X1, Y = Y1), M2 (X = X2, Y = Y1) , M3 (X = X1, Y = Y3) and the means for measuring the coordinates of the mark centers of the three alignment marks M1, M2, and M3 by aligning the camera center of the CCD camera and the coordinates based on this error Calculation processing such as rotation, perpendicularity correction, and movement amount correction is performed, and the actual coordinates of the mark center of the alignment mark M1 are set to (X = 0, Y = 0), and the actual coordinates of the mark center of the alignment mark M2 are ( X = X2-X1, Y = 0), the actual coordinate of the mark center of the alignment mark M3 is converted into a workpiece coordinate system Z ′ with (X = 0, Y = Y3-Y1), and this converted workpiece coordinate system A scribing device including means for operating scribing in Z ′.

  In the above description, coordinates M1 (X = X1, Y = Y1) and M2 (X = X2, Y = Y1) from the X axis and Y axis set on the table of alignment marks M1, M2, and M3 on the glass substrate. , M3 (X = X1, Y = Y3) is also a set coordinate.

  The CCD camera moves with the scribe head as a unit on the glass substrate positioned on the X and Y axes set on the table, and the alignment is at least three points in a direct arrangement relationship on the glass substrate. The actual position coordinate of each mark center of the mark is measured based on the set coordinate of each alignment mark, the actual coordinate value of the measured mark center is replaced with the set coordinate, and the above The work coordinate system is converted where the three alignment marks are arranged on the coordinate axis and the origin with the actual coordinates of the mark center, and scribing is performed in the converted work coordinate system. Then, the designated value of scribe is converted and executed based on the actual position of the mark center.

  Therefore, when the scribing is performed using the production drawing numerical values, the actual position, distance, and angle of the mark center between the alignment marks are matched, and a compliant scribe line is formed.

  Hereinafter, the respective mark centers of the alignment marks M1, M2, and M3 are referred to as M1C, M2C, and M3C.

  In addition, since the scribing is performed at the converted work coordinates in which the mark centers M1C, M2C, and M3C of the alignment M1, M2, and M3 of the three orthogonal points are positioned on the coordinate axis, the positioned glass substrate is in a state of positional deviation and angular deviation. Even in this case, the scribe line is formed with reference to the actual position of the alignment mark.

  In addition, since the mark centers M1C, M2C, and M3C are measured by moving the scribe head and the CCD camera together, the measured values are measured values including the thermal expansion mechanical error of the scribe head moving mechanism. . For this reason, the command value to the scribing head based on the measurement and the movement amount coincide with each other, and the scribing is accurately formed at the planned position.

  For example, according to the scribing method of the present invention, when the distance between the centers of the mark M1 and the mark M2 in the drawing dimensions is 300 mm, but the actual distance between the centers is 300.5 mm, X passing through M1 When a scribe line of X = 0 and a straight line of X = 300 passing through M2 is formed, the interval between the two scribe lines is 300.5 mm.

FIG. 1 is a plan view of a scribing apparatus showing an embodiment of the present invention. FIG. 2 is a side view of the scribing apparatus shown in FIG. FIG. 3 is an explanatory diagram in which the work coordinate system is corrected and converted with reference to the center coordinates of alignment marks at three orthogonal points on the glass substrate. FIG. 4 is a flowchart of the scribing method of the present invention.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  1 and 2 show a scribing device 1.

  Reference numeral 2 denotes a scribe head.

  Reference numeral 3 denotes X-axis moving means for moving the scribe head 2 in the X-axis direction.

  Reference numeral 4 denotes Y-axis moving means for moving the scribe head 2 in the Y-axis direction.

  The X axis moving means 3 and the Y axis moving means 4 will be described in detail later.

  Reference numeral 5 denotes a glass substrate on which alignment marks are written.

  Reference numeral 6 denotes a table on which the glass substrate 5 is positioned and set on the upper surface and sucked and fixed. This table 6 is fixed in this embodiment. Further, X-direction stoppers 7 and 7 and a Y-direction stopper 8 for positioning the glass substrate 5 are disposed on the upper surface of the table 6.

  The tip sides 7A and 7A of the X direction stoppers 7 and 7 are the X axis 7B, and the tip side 8A of the Y direction stopper 8 is the Y axis 8B.

  The scribe head 2 moves in a coordinate system formed by the X axis 7B and the Y axis 8B.

  As will be described later, a CCD camera 10 is juxtaposed with the scribe head 2 and moves together with the CCD camera 10.

  Further, the scribe head 2 holds a scribe wheel at the lower part, presses the scribe wheel against the glass substrate 5 and moves it to form a scribe line 11.

  Reference numeral 10 denotes a CCD camera.

  The CCD camera 10 and the scribe head 2 are attached in parallel to a common 9 as will be described later.

  Therefore, the X-axis moving means 3 and the Y-axis moving means 4 for moving the CCD camera 10 and the scribe head 2 in the coordinate system in the scribing apparatus 1 will be described in detail.

  The X-axis moving unit 3 includes 1 of the X1-axis moving unit 3 and 2 of the X2-axis moving unit 3 provided along the X-axis direction on both sides of the table 6.

  Each of the X1-axis moving means 1 and the X2-axis moving means 2 is attached to a guide rail 12 attached to the base 11 along the X-axis direction, and a slide block which is held by the guide rail 12 and is movable. The moving body 13 is provided along with the guide rail 12, and the ball screw 15 is connected to the moving body 13. The moving body 13 moves in the X-axis direction via the ball screw 15 by driving the servo motor 14. The servomotors 14 and 14 of the X1 axis moving means 1 and the X2 axis moving means 2 are respectively synchronously controlled, and the moving bodies 13 and 13 are synchronously moved in the X axis direction.

  The Y-axis moving means 4 is installed perpendicularly to the X-axis direction on one moving body 13 of the X1-axis moving means 3 and two moving bodies 13 of the X2-axis moving means 3. The Y-axis moving means 4 is constructed across the table 6 and moves in the X-axis direction.

  The Y axis moving means 4 includes a brich body 16 installed on one moving body 13 of the X1 axis moving means 3 and two moving bodies 13 of the X2 axis moving means 3, and the brich body 16 along the Y axis direction. The guide rail 17 is provided, the L-shaped Y-axis gear ridge 18 attached to the slide block that is held by the guide rail 17 and freely movable, and the Y-axis servo motor 19 is connected to the base portion. And the ball screw 20 is screwed into the nut portion of the Y-axis gear ridge 18. The Y-axis gear ridge 18 moves in the Y-axis direction via the ball screw 20 by driving the Y-axis servo motor 19.

  A head plate 9 is attached to the front surface of the Y-axis gear ridge 18 via a linear motor device 22.

  The head plate 9 is moved up and down by the linear motor device 22. A scribe head 2 and a CCD camera 10 are arranged in parallel on the front surface of the head plate 9.

  The head plate 9 is moved up and down vertically by a numerical command from the linear motor device 22 so that the scribing head 2 and the CCD camera 10 are integrated and the upper surface of the table 6 is extended toward the set glass substrate 5. Moreover, it stops at a required position.

  In order to adjust the focus of the CCD camera 10, a slide device that includes a motor, a reverse screw, and a guide rail and moves up and down by driving the motor may be used instead of the linear motor device 22.

  A scribing method using the scribing apparatus 1 will be described with reference to FIGS.

Every time the glass substrate 5 is replaced,
(I) The glass substrate 5 is applied to the tip sides 7A and 7A of the X-direction stoppers 7 and 7 on the upper surface of the table 6 and the tip side 8A of the Y-direction stopper 8, and is adsorbed and fixed on the X-axis 7A and the Y-axis 8B.
(II) The NC apparatus is operated to move the CCD camera 10 as a unit with the scribe head 2 to move the work coordinate system, and is written on the positioned glass substrate 5 and has at least three alignment marks M1 in an orthogonal arrangement relationship. For M2 and M3, coordinates M1 (X = X1, Y = Y1), M2 (X = X2, Y = Y1), M3 (X = X1, Y = Y3) from the X axis 7A and the Y axis 8B The camera center 31 of the CCD camera 10 is aligned and the actual coordinates of the mark centers M1C, M2C, M3C of the three alignment marks M1, M2, M3 are measured.

For each of the marks M1, M2, and M3, (III) the coordinates of the actual positions of the mark centers M1C, M2C, and M3C and the coordinates M1 (X = X1, Y = Y1), M2 ( The error between X = X2, Y = Y1) and M3 (X = X1, Y = Y3) is measured.

  (IV) Based on the above errors, calculation processing such as coordinate rotation, squareness correction, and movement amount correction is performed, and the coordinates of the actual position of the mark center M1C of the alignment mark M1 are set (X = 0, Y = 0). Further, the coordinates of the actual position of the mark center M2C of the alignment mark M2 are (X = X2-X1, Y = 0), and the coordinates of the actual position of the mark center M3C of the alignment mark M3 are (X = 0, Y = The workpiece coordinate system is converted to Y3-Y1).

  (V) In this converted work coordinate system, scribe is operated.

  A scribing method using the scribing apparatus 1 will be described with reference to FIGS.

Every time the glass substrate 5 is replaced,
(I) The glass substrate 5 is attached to the tip sides 7A and 7A of the X-direction stoppers 7 and 7 on the upper surface of the table 6 and the tip side 8A of the Y-direction stopper 8, and is adsorbed and fixed on the X-axis 7B and the Y-axis 8B.
(II) The NC apparatus is operated to move the CCD camera 10 as a unit with the scribe head 2 to move the work coordinate system, and is written on the positioned glass substrate 5 and has at least three alignment marks M1 in an orthogonal arrangement relationship. For M2 and M3, the coordinates M1 (X = X1, Y = Y1), M2 (X = X2, Y = Y1), M3 (X = X1, Y = Y3) from the X axis 7B and the Y axis 8B. The camera center 31 of the CCD camera 10 is aligned, and the coordinates of the actual positions of the mark centers M1C, M2C, and M3C of the three alignment marks M1, M2, and M3 are detected.

  (III) For the respective marks M1, M2, and M3, the coordinates of the actual positions of the respective mark centers M1C, M2C, and M3C and the coordinates M1 (X = X1, Y = Y1), M2 (X = X2) of the camera center 31 , Y = Y1) and M3 (X = X1, Y = Y3) are measured.

  (IV) Based on each of the above errors, calculation processing such as coordinate rotation, squareness correction, and movement amount correction is performed, and the coordinates of the actual position of the mark center M1C of the alignment mark M1 are (X = 0, Y = O). The coordinates of the actual position of the mark center M2C of the alignment mark M2 are (X = X2-X1, Y = 0), and the coordinates of the actual position of the mark center M3C of the alignment mark M3 are (X = 0, Y = The workpiece coordinate system is converted to Y3-Y1).

  (V) A scribe operation is performed in this converted work coordinate system.

DESCRIPTION OF SYMBOLS 1 Scribe device 2 Scribe head 5 Glass substrate 7 X direction stopper 8 Y direction stopper 10 CCD camera 31 Camera center

Claims (5)

  Orthogonal X and Y reference lines for positioning the glass substrate are provided on the upper surface of the table, and the scribe head moves along the X and Y coordinate systems based on the reference lines to form scribe lines on the positioned glass substrate. In the scribing method, a CCD camera that moves the coordinate system as a unit with the scribing head is provided, and the CCD camera is moved in a state where the glass substrate is positioned. The CCD camera is aligned with the mark setting coordinates M1 (X = X1, Y = Y1), M2 (X = X2, Y = Y1), and M3 (X = X1, Y = Y3), and at least three alignments are performed. Measure the coordinates of the mark center of the mark, detect the error with the set coordinates of the previous alignment mark, and based on this error Further, calculation processing such as coordinate rotation, squareness correction, and movement amount correction is performed, and the actual mark center coordinates of the alignment mark M1 are set to (X = 0, Y = 0), and the actual mark center coordinates of the alignment mark M2 are set. (X = X2-X1, Y = 0), the actual coordinate of the mark center of the alignment mark M3 is converted to a workpiece coordinate system Z ′ with (X = 0, Y = Y3-Y1), and this converted workpiece coordinate system A scribing method for operating scribing in Z ′.   Above the table with the X-direction stopper and Y-direction stopper for positioning the glass substrate on the upper surface, the scribe head is composed of the X-axis that is the end of the X-direction stopper and the Y-axis that is the end of the Y-direction stopper A scribing method for moving a system Z to form a scribe line on a glass substrate, comprising a CCD camera that moves the coordinate system integrally with the scribe head and positioning the glass substrate on the X axis and Y axis on the upper surface of the table , The scribe head and the CCD camera are moved together, and at least three alignment marks M1, M2, and M3 that are written on the glass substrate and are orthogonally arranged are coordinates from the X and Y axes. M1 (X = X1, Y = Y1), M2 (X = X2, Y = Y1), M3 (X = 1, Y = Y3), the camera center of the CCD camera is aligned, the coordinates of the mark centers of the three alignment marks M1, M2, and M3 are measured, and the mark center for each of the alignment marks M1, M2, and M3 is measured. And the camera center are detected, and calculation processing such as coordinate rotation, squareness correction, and movement amount correction is performed based on this error, and the actual coordinates of the alignment center of the alignment mark M1 (X = 0, Y = 0), the actual mark center coordinates of the alignment mark M2 are (X = X2-X1, Y = 0), and the actual mark center coordinates of the alignment mark M3 are (X = 0, Y = Y3-Y1). A scribing method comprising: means for converting the workpiece coordinate system Z ′ into a workpiece coordinate system Z ′ and operating the scribing in the converted workpiece coordinate system Z ′.   Above the table with the X-direction stopper and Y-direction stopper for positioning the glass substrate on the upper surface, the scribe head is composed of the X-axis that is the end of the X-direction stopper and the Y-axis that is the end of the Y-direction stopper A scribing apparatus that moves the system Z to form a scribe line on a glass substrate, and includes a CCD camera that moves the coordinate system integrally with the scribe head, and the glass substrate is positioned on the X and Y axes on the table top surface. , The scribe head and the CCD camera are moved together, and at least three alignment marks M1, M2, and M3 that are written on the glass substrate and are orthogonally arranged are coordinates from the X and Y axes. M1 (X = X1, Y = Y1), M2 (X = X2, Y = Y1), M3 (X = 1, Y = Y3), the means for measuring the mark center coordinates of the three alignment marks M1, M2, and M3 by aligning the camera center of the CCD camera, and based on this error, coordinate rotation, squareness correction, Calculation processing such as movement amount correction is performed, the actual mark center coordinates of the alignment mark M1 are (X = 0, Y = 0), and the actual mark center coordinates of the alignment mark M2 are (X = X2-X1, Y = 0), a means for converting the actual coordinates of the mark center of the alignment mark M3 into a workpiece coordinate system Z ′ having (X = 0, Y = Y3-Y1), and operating scribing in the converted workpiece coordinate system Z ′; A scribing device with   The scribing method according to claim 1 or 2, wherein the scribing head moves in the X axis and the table on which the glass substrate is positioned and mounted moves in the Y axis. The scribing device according to claim 3, wherein the scribing head moves in the X axis, and the table on which the glass substrate is positioned and mounted moves in the Y axis.

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