M403651 五、新型說明： 【新型所屬之技術領域】 本創作係關於一種玻璃基板檢測裝置，更具體而言係 關於一種僅使用一電荷耦合元件（CCD)攝影機即可從多方 向進行檢測之玻璃基板檢測裝置。 【先前技術】 玻璃基板在目前科技產業上之應用非常廣泛，舉凡各 式大小之液晶顯示器、具有螢幕可顯示資訊之通訊設備及 曰曰片專’白舄使用到玻璃基板。然而，製造完成之玻璃基 板，係以工廠生產之大尺寸規格出廠，銷售至客戶端後再 自行裁切至所需之尺寸，或直接以工廠生產之規格進行使 用，亦或是對出廠之玻璃基板進行熱處理等後製過程。故 在基板玻璃出廠前’必須先檢測玻璃基板是否具有氣泡、 研磨不均、貝殼紋或破裂等瑕疵。 習知之玻璃基板檢測包含使用人工肉眼檢測及使用電 月a視克方式檢測玻璃基板（G丨ass substrate)邊緣之缺陷。由 於對玻璃基板邊緣缺陷檢測精度上之需求，電腦視覺方式 通吊使用2組或以上各2個直線掃瞄電荷耦合元件攝影機 (Line Scan CCD)並搭配透射式照明，設置於玻璃基板兩側 邊緣之上下方，對在生產線之導輪上通過之玻璃基板之邊 緣進订即時掃描。玻璃基板邊緣之實際影像將被完整擷 取。所檢測出之缺陷影像與數據可完整顯示於螢幕上，對 於玻璃基板上通常較容易出現之缺陷亦可設定相關之參數 4 M403651 '以反應生產線上與製程相關之問題，以做為生產線上即時 排除問題之參考。 請參閱圖一，台灣發明專利公告第1289662之代表 圖，係利用一 CCD攝影機31及兩片稜鏡321、322觀察玻 璃基板背面之缺陷，並將CCD攝影機3丨擷取之影像轉換 成類比之電壓訊號。然其並無法取得玻璃基板側邊之影 .像，若欲取得玻璃基板側邊之影像，需另外再增加一台 .CCD攝影機。且此案之玻璃基板缺陷檢測裝置亦無法直^ 取得玻璃基板上側之影像，在玻璃基板瑕疵之判讀上，亦 有可能造成遺漏。 【新型内容】 本創作之一目的在於揭露一種玻璃基板檢測裝置，使 用複數個稜鏡及晶體柱，改變光之路徑’ -光學取像裝置影機)即可同 板邊緣之上方、側面及下方之影像。 本創作之另一目的在於揭露一種玻璃基板檢測裝置， ，其包含-光學取像裝置，設置於欲檢測之玻璃基板上方， 且所述光學取像裝置之焦距大體上調整至所述玻璃基板邊 緣之上表面’-第一光學裝置包含一取景部及一延伸部， 其中所述取景部係設置於所述玻璃基板下方，用以操取所 述玻璃基板邊緣之下方影像’所述延伸部係向玻璃基板外 側延伸’用以將所拮員取之所述下方影像傳輸至一第三光學 裝置；-第二光學裝置，設置於所述玻璃基板側邊，用以 操取所述玻璃基板邊緣之側邊影像，並傳輸至一第四光學 5 M403651 所述第二光學裝置，設置於大體上相 取導所述玻璃基板邊緣之下方影像傳輪至所 所述第^所述第四光學裝置，設置於大體上相對 側邊裝置之位置，用以引導所述玻璃基板邊緣之 〜像傳輪至所述光學取像裝置；其中所述第 ^系為可調整，用則丨㈣述玻璃基板邊緣之下；:影像= 兩至所述光學取像裝置之所述焦距之景深範圍中；其令所 述第四光學裝置係為可調整，用以引導所述玻璃基板邊缘 之側邊影像傳輸至料光學取像裝置之所述焦距之景 圍中。 本創作之又一目的在於揭露一種玻璃基板檢測系統， /、包*光學取像模組，設置於欲檢測之玻璃基板上方， 且焦距大體上調整於所述玻璃基板之上表面；一第一光學 模組，用以擷取所述玻璃基板邊緣下方之影像；一第二光 本模組，用以擷取所述玻璃基板邊緣側邊之影像；其中所 述第一光學模組及所述第二光學模組分別引導所述玻璃基 板邊緣下方之影像及所述玻璃基板邊緣側邊之影像傳輸至 所述光學取像裝置之所述焦距之景深範圍中。 【實施方式】 本創作將以較佳之實施例及觀點加以敘述，而此類敘 述係解釋本創作之結構，僅供用以說明而非用以限制本創 作之專利保護範圍。因此，除說明書中之實施例之外，本 創作亦可廣泛實行於其他實施例中。 在玻璃基板之生產過程中，會對玻璃基板邊緣進行研 6 M403651. 磨之磨邊處理，在磨邊處理之過程中可能會產生研磨不均 勻、未研磨、白燒焦或黑燒焦等研磨不良之情況，且在玻 璃基板之生產過程中亦可能會發生如破板（br〇ken plates)、邊損（edge breaks)或角損（corner brakes)等狀況。 本創作之玻璃基板檢測裝置即是用於檢測玻璃基板邊緣之 各種上述不良狀況。 本創作之玻璃基板檢測裝置係利用一光源投射裝置， 投射光源至一玻璃基板，使光發生折射、透射 '反射及產 生色散效果後，產生一由光所組成之影像，透過至少一光 學裝置傳遞所述由光所組成之影像，再經由一光學取像裝 置將所述由光所組成之影像轉換成為電子訊號，以針對玻 璃基板進行檢測，並得知磨邊處理之研磨狀況，可隨時針 對所述研磨狀況調整進行磨邊處理之裝置，以提高玻璃基 板生產過程之良率至98〜99%以上。 於本創作之實施例中，揭露一種玻璃基板檢測系統， 如圖二所示。玻璃基板檢測系統i 〇〇〇主要包含一光學取像 模組11 00、一第一光學模組1 200及一第二光學模組1 3 〇〇， 用以同時進行玻璃基板500、玻璃基板邊緣55〇之上方影 像55 1、側邊影像552及/或下方影像553之檢測。又，玻 璃基板檢測系統1000較佳可包含至少一照明模組14〇〇， 以其產生之光線照射玻璃基板500 ’使玻璃基板5〇〇產生 更清楚之顯影’以供玻璃基板檢測系統丨〇〇〇進行檢測。 於本創作之實施例中，揭露一種玻璃基板檢測裝置， 如圖三所示。玻璃基板檢測裝置2〇〇〇主要包含一光學取像 7 M403651 裴置21〇〇、一第一光學裝置22〇〇、一第二光學裝置23〇〇、 一第三光學裝置2400及一第四光學裝置25〇〇。其中所述 光學取像裝置2100(較佳可為人類之肉眼或攝影機；更佳 可為電荷耦合元件（CCD )攝影機，用以將所取得之圖像 轉換為電子訊號）’設置於欲檢測之玻璃基板5〇〇上方，且 所述光學取像裝置2100之焦距大體上調整至所述玻璃基 •板邊緣之上表面。第一光學裝置22〇〇 (較佳可為一棱鏡， $佳可為一側邊截面大體上為倒梯形之稜鏡，該倒梯形稜 鏡之長底邊平面係相對應於該玻璃基板邊緣55〇之下表 面，該長底邊平面更包括一取景部22〇3及一延伸部22〇6; 又所述稜鏡戴面之兩側邊最佳為各與所述倒梯形之長底邊 成水平相傾45度角且左右相對。），其中所述第一光學裝 置2200之°卩（較佳為上述倒梯形稜鏡中與一斜面相對之 長底邊之一部分，即取景部22〇3)設置於所述玻璃基板5〇〇 下方，用以擷取所述玻璃基板邊緣55〇之下方影像; 所述第-光學裝置2200之另-部（較佳為上述倒梯形棱鏡 中與另一斜面相對之長底邊之另一部份，即延伸部Μ%) 向所述玻璃基板500外側延伸，用以將所擷取之所述玻璃 基板邊緣550之下方影像553折射並傳輸至所述第一光學 裝置2200之另一部（即延伸部22〇6)上方。第二光學裝 置测（較佳可為-稜鏡’更佳可為-側邊截面大體上為 三角形之稜鏡，又所述稜鏡之截面最佳可為一直角三角 形，其中所述直角三角形之長邊大體上呈45度角相 述玻璃基㈣緣55G)，設置於所述玻璃基板側邊，、用 M403$51 以掏取所述玻璃基板邊緣55〇之側邊影像552 光學裝置2300更佳為用以引導由所述第二光學裝置2遍 則邊入射之影像經折射後傳輪向所述第二光學裝置B⑼ :上方。第三光學裝置24〇〇 (較佳為一柱狀晶體 2體上相對所述第-光學裝置2雇之由玻璃 下方向外延伸之延伸部2206之位置，用以引導所 一 光學裝置2綱折射之所述玻璃基板邊緣55〇之下方 553傳輪至所述光學取像裝置雇。第四光學裝置2剔(/較 佳為-柱狀晶體），設置於大體上相對所述第二光學裝置 2300之位置’用以引導經由所述第二光學裝置咖〇折射 之所述破璃基板邊緣55〇之側邊影像552傳輸至所述光學 取像裝置2刚。其中所述第三光學裝置·及所述第四 光學裝置2500之架設高度係為可調整，或調整其長度和/ 或折射率’或以更換不同長度和/或折射率之替換品方式， 使所述玻璃基板檢測裝置2〇〇〇應用在不同厚度之玻璃基 板500上時，引導所述玻璃基板邊緣55〇之下方影像553 及側邊影像552傳輸至所述光學取像裝置21⑼之所述焦距 之景深範圍中。 又，在本創作之一實施例令，上述之玻璃基板檢測裝 置 〇更包含至少一照明裝置2600。所述至少一照明裝 置2600(更佳為同軸照明裝置）係設置於所述玻璃基板彻 上方所述玻璃基板邊緣550之側邊及/或所述玻璃基板 500之下方，對玻璃基板提供照明光源，使玻璃基板檢測 裝置2200可取得更佳清晰之成像。 9 M403.651. 41考圖四所示，為本創作之玻璃基板檢測裝置中光 ’線 <動方向。玻璃基板檢測裝置2000之照明裝置2600 更包含一第—光源裝置2630，亦可稱為正面光源裝置，設 置於玻璃基板500上方，以投射光源至欲檢測之玻璃基板 500上方’且較佳為同軸光源，投射出平行之光源；一第 一光源裝置2660 ’亦可稱為背光光源裝置，設置於玻璃基 板500下方’投射光源至欲檢測之玻璃基板5〇〇下方，其 較佳可為一背光板（backlight);及一第三光源裝置2690， 亦可稱為側邊光源裝置，設置於玻璃基板5〇〇側邊，以投 射光源至欲檢測之玻璃基板5〇〇側邊。光學取像裝置21⑼ 之焦距調整至玻璃基板500之上平面及/或玻璃基板邊緣 550之上表面，因此可直接取得玻璃基板5〇〇上平面之光 學影像及/或玻璃基板邊緣550之上方影像551。玻璃基板 邊、、彖550之下方影像553由第一光學裝置位於玻璃基板邊 緣下方之位於長底邊之取景部22〇3進入第一光學裝置，經 由第一光學裝置2200之折射後顯像於第一光學裝置22〇〇 位於長底邊之延伸部2206;由於第三光學裝置24〇〇為一 晶體柱’且大體上相對第一光學裝置22〇〇位於玻璃基板邊 緣550外側之延伸部2206,引導經由第一光學裝置22〇〇 折射之玻璃基板邊緣550之下方影像553透過第三光學裝 置2400傳輸至所述光學取像裝置21〇〇之所述焦距之景深 範圍中。玻璃基板邊緣550之側邊影像552由第二光學裝 置2300折射後往上射入第四光學裝置25〇〇，使玻璃基板 邊緣550之側邊影像552透過第四光學裝置25〇〇傳輸至所 M403651 , 述光學取像裝置21 〇〇之所述焦距之景深範圍中。由於光學 取像裝置2 100其焦距之景深大體上為2mm，且其焦距係 調整於玻璃基板500之上表面及/或玻璃基板邊緣5〇〇之上 表面，玻璃基板檢測裝置2000係利用第一光學裝置22〇〇、 第二光學裝置2300、第三光學裝置24〇〇及第四光學裝置 2500擷取玻璃基板邊緣55〇之下方影像553及玻璃基板邊 ’杀550之側邊影像552 ,並傳輸至光學取像裝置21 〇〇其焦 .距之景深中，使所述玻璃基板5〇〇之上方影像、玻璃基板 邊緣550之上方影像55卜側邊影像552及/或下方影像553 同時清楚傳輸至光學取像裝置21〇〇，以同時進行玻璃基板 500之缺陷檢測。又，本創作之玻璃基板檢測裝置2〇〇〇可 依照欲檢測之玻璃基板500所具有相異之厚度，更換並調 整第一光學裝置2200 '第二光學裝置23〇〇、第三光學裝置 2400、第四光學裝置25〇〇之規格、長度、折射率及/或在 玻璃基板檢測裝置2000内之相對位置。 。月再參考圖四所示，為本創作玻璃基板檢測裝置2〇〇〇 •中細部光線走向<示意圖。|創作係利用棱鏡改變光線角 度，使光線轉變方向。所述第一光學裝置22〇〇位於玻璃基 板邊緣550下方之取景部22〇3具有一與水平成^度角之 第一斜面2210，且位於所述第一光學裝置2之延伸部 206 "有另一與所述第一斜面22相對且同樣與水平成 45度角之第二斜自222〇’ #第二光源裝置之光源直 射至玻璃基板邊緣550之下表面時，由玻璃基板邊緣55〇 之下表面反射之光線形成一破璃基板邊緣55〇之下方影像 M403651 553’所述玻璃基板邊緣550之下方影像553之光線被第一 光學裝置2200之取景部2203接收，由於被第一光學裝置 2200接收之光線碰觸第一光學裝置2200之第一斜面2210 時’係為45度之入射角度’此入射角度已大於臨界角，因 此光線反射時’其方向改變9〇度，之後光線射向第一光學 裝置2200之第二斜面2220 ’其入射角度亦為45度，大於 臨界角’使光線之反射方向改變90度，因此玻璃基板邊緣 550之下方影像553之光線經由第一光學裝置2200使其方 向改變180度’將玻璃基板邊緣550之下方影像553折射 向上’以傳輸至第三光學裝置2400。 所述第二光學裝置2300設置於玻璃基板邊緣55〇之側 邊’且具有一與水平成45度角之第二光學裝置斜面2310, 此第一光學裝置斜面2310設置於相對玻璃基板邊緣55〇 之側邊。當第三光源裝置2690之光源直射至玻璃基板邊緣 550之側邊時’由玻璃基板邊緣55〇之侧邊反射之光線形 成一玻璃基板邊緣550側邊影像552，所述玻璃基板邊緣 550側邊影像552之光線被第二光學裝置斜面231〇折射向 上’以傳輸至第四光學裝置2500。 本創作所揭露之玻璃基板檢測裝置，可使用但不限於 下列玻璃基板之檢測：平面玻璃、漂浮玻璃、鍍膜玻璃、 平板顯不器玻璃、汽車玻璃、薄膜電晶體玻璃及液晶顯示 杰玻璃等，本創作所揭露之玻璃基板檢測裝置甚至可使用 在晶圓之邊緣檢測。且所述玻璃基板檢測裝置之晶體柱可 依照欲檢測之玻璃基板厚度更換不同之長度，且調整所述 M403.651. 晶體柱相對於玻璃基板及光學取像裝置間之高度，以成像 •於所述光學取像裝置焦距之景深中。 【圖式簡單說明】 圖一係為習知技術之玻璃基板背面檢測系統之示音 圖； 、、 圖^一係為本創作之玻璃基板檢測糸統之方塊圖； 圖三係為本創作之玻璃基板檢測裝置之示意圖；及 圖四係為本創作之玻璃基板檢測裝置中光線走向之示 意圖。 【主要元件符號說明】 3 1C C D攝影機 321稜鏡 322稜鏡 500玻璃基板 550玻璃基板邊緣 551上方影像 552側邊影像 553下方影像 1000玻璃基板檢測系統 1100光學取像模組 1200第一光學模組 1300第二光學模組 1400照明模組 2000玻璃基板檢測裝置 13 M403651 2100光學取像裝置 2200第一光學裝置 2203取景部 2206延伸部 2210第一斜面 2220第二斜面 2300第二光學裝置 2310第二光學裝置斜面 2400第三光學裝置 2500第四光學裝置 2600照明裝置 2630第一光源裝置 2660第二光源裝置 2690第三光源裝置 14M403651 V. New description: [New technical field] This paper is about a glass substrate inspection device, more specifically a glass substrate that can be detected from multiple directions using only a charge coupled device (CCD) camera. Detection device. [Prior Art] Glass substrates are widely used in the current technology industry, and various types of liquid crystal displays, communication devices with screen display information, and cymbals are used in glass substrates. However, the finished glass substrate is shipped from the factory to the large size specifications, sold to the customer and then cut to the required size, or directly used in the factory specifications, or the factory glass. The substrate is subjected to a post-production process such as heat treatment. Therefore, before the substrate glass is shipped, it is necessary to first detect whether the glass substrate has bubbles, uneven grinding, shelling or cracking. Conventional glass substrate inspection involves the use of artificial visual inspection and the detection of defects in the edge of a glass substrate (G丨ass substrate) using a power-on-a-ray method. Due to the need for the detection accuracy of the edge defects of the glass substrate, the computer vision method uses two or more sets of two linear scanning charge coupled device cameras (Line Scan CCD) and transmissive illumination, which are disposed on both sides of the glass substrate. Above and below, an instant scan is placed on the edge of the glass substrate that passes through the guide wheels of the production line. The actual image of the edge of the glass substrate will be completely captured. The detected defects and data can be displayed on the screen completely. For the defects that are usually easy to appear on the glass substrate, the relevant parameters can be set. 4 M403651 'Respond to the problems related to the process on the production line, as the production line. Refer to the problem. Please refer to Figure 1. The representative figure of Taiwan Invention Patent Notice No. 1289662 is to observe the defects on the back side of the glass substrate by using a CCD camera 31 and two 稜鏡321, 322, and convert the image captured by the CCD camera 3 into an analogy. Voltage signal. However, it is impossible to obtain the shadow of the side of the glass substrate. For example, if you want to obtain the image of the side of the glass substrate, you need to add another CCD camera. Moreover, the glass substrate defect detecting device of this case cannot directly obtain the image on the upper side of the glass substrate, and it may cause omission in the interpretation of the glass substrate. [New content] One of the purposes of this creation is to expose a glass substrate detecting device that uses a plurality of cymbals and crystal columns to change the path of light '-optical image capturing device') to the top, side and bottom of the same plate edge. Image. Another object of the present invention is to disclose a glass substrate detecting device comprising: an optical image capturing device disposed above a glass substrate to be inspected, and a focal length of the optical image capturing device is substantially adjusted to an edge of the glass substrate The upper surface of the first optical device includes a framing portion and an extending portion, wherein the framing portion is disposed under the glass substrate for operating an image of the lower portion of the edge of the glass substrate Extending to the outside of the glass substrate to transmit the image to the third optical device; the second optical device is disposed on the side of the glass substrate for operating the edge of the glass substrate The side image is transmitted to a fourth optical device 5 M403651, and the second optical device is disposed to substantially lower the image bearing wheel below the edge of the glass substrate to the fourth optical device Provided at a position substantially opposite to the side device for guiding the image bearing edge of the glass substrate to the optical image capturing device; wherein the second system is adjustable, Then (4) below the edge of the glass substrate; image = two to the depth of field of the focal length of the optical imaging device; the fourth optical device is adjustable to guide the glass substrate The side image of the edge is transmitted to the focal length of the optical imaging device. Another object of the present invention is to disclose a glass substrate detecting system, and the optical imaging module is disposed above the glass substrate to be inspected, and the focal length is substantially adjusted on the upper surface of the glass substrate; An optical module for capturing an image under the edge of the glass substrate; a second optical module for capturing an image of a side edge of the glass substrate; wherein the first optical module and the The second optical module respectively guides the image below the edge of the glass substrate and the image of the edge of the edge of the glass substrate to the depth of field range of the focal length of the optical imaging device. The present invention will be described in terms of preferred embodiments and aspects, and such descriptions are intended to illustrate the structure of the present invention and are intended to be illustrative only and not to limit the scope of the invention. Therefore, the present invention can be widely practiced in other embodiments in addition to the embodiments in the specification. In the production process of the glass substrate, the edge of the glass substrate is ground 6 M403651. Grinding and grinding, in the process of edging, uneven grinding, ungrinding, white burning or black burning may occur. In the case of bad conditions, such as br〇ken plates, edge breaks or corner brakes may occur during the production of the glass substrate. The glass substrate detecting device of the present invention is used to detect various defects described above at the edge of the glass substrate. The glass substrate detecting device of the present invention uses a light source projection device to project a light source to a glass substrate to refract, transmit, reflect and generate a dispersion effect, and then generate an image composed of light, which is transmitted through at least one optical device. The image composed of light is converted into an electronic signal by an optical image capturing device to detect the glass substrate, and the grinding condition of the edging process can be detected at any time. The grinding condition adjusts the apparatus for performing the edging treatment to increase the yield of the glass substrate production process to 98 to 99% or more. In the embodiment of the present invention, a glass substrate detecting system is disclosed, as shown in FIG. The glass substrate detecting system i 〇〇〇 mainly includes an optical image capturing module 11 00, a first optical module 1 200 and a second optical module 13 〇〇 for simultaneously performing the glass substrate 500 and the edge of the glass substrate. The image 55 above 55, the side image 552 and/or the lower image 553 are detected. In addition, the glass substrate detecting system 1000 preferably includes at least one lighting module 14A, and the light generated by the glass substrate 500' illuminates the glass substrate 500' to produce a clearer development of the glass substrate 5' for the glass substrate detecting system. 〇〇Check it out. In the embodiment of the present invention, a glass substrate detecting device is disclosed, as shown in FIG. The glass substrate detecting device 2 〇〇〇 mainly includes an optical image capturing device 7 M403651 〇〇 21 〇〇, a first optical device 22 〇〇, a second optical device 23 〇〇, a third optical device 2400, and a fourth Optical device 25 〇〇. Wherein the optical imaging device 2100 (preferably a human human eye or a camera; more preferably a charge coupled device (CCD) camera for converting the acquired image into an electronic signal) is disposed in the image to be detected. The glass substrate 5 is above and the focal length of the optical imaging device 2100 is substantially adjusted to the upper surface of the edge of the glass substrate. The first optical device 22〇〇 (preferably a prism, preferably having a side cross section substantially inverted trapezoidal shape, the long bottom plane of the inverted trapezoidal ridge corresponding to the edge of the glass substrate 55 〇 lower surface, the long bottom plane further includes a framing portion 22〇3 and an extending portion 22〇6; and the two sides of the 稜鏡 wearing surface are preferably the long bottom of each of the inverted trapezoids The side is inclined at a 45-degree angle and is opposite to the left and right.), wherein the first optical device 2200 is at least one part of the long bottom edge of the inverted trapezoidal ridge opposite to the inclined surface, that is, the framing portion 22 〇3) disposed under the glass substrate 5〇〇 for capturing an image below the edge of the glass substrate 55〇; another portion of the first optical device 2200 (preferably in the inverted prismatic prism described above) Another portion of the opposite side of the long bevel, that is, the extension Μ%) extends toward the outside of the glass substrate 500 for refracting and transmitting the image 553 below the edge 550 of the glass substrate that is captured The other portion of the first optical device 2200 (ie, the extension 22〇6) is above. Preferably, the second optical device (preferably - 稜鏡 ' may be - the side section is substantially triangular, and the cross section of the 稜鏡 is preferably a right triangle, wherein the right triangle The long side is substantially at a 45-degree angle of the glass base (four) edge 55G), is disposed on the side of the glass substrate, and uses M403$51 to capture the side image 552 of the edge of the glass substrate 55 光学 optical device 2300 Preferably, the image incident from the second optical device 2 is refracted and transmitted to the second optical device B (9): above. a third optical device 24 (preferably a position on the columnar crystal 2 opposite to the extension 2206 of the first optical device 2 extending outward from the glass for guiding the optical device 2 153 below the edge of the refracting glass substrate, 553 passes to the optical imaging device. The fourth optical device 2 (or preferably a columnar crystal) is disposed substantially opposite to the second optical The position 2 of the device 2300 is used to guide the side image 552 of the glass substrate edge 55 〇 refracted via the second optical device to the optical image capturing device 2, wherein the third optical device And the mounting height of the fourth optical device 2500 is adjustable, or the length and/or refractive index thereof is adjusted, or the replacement of different lengths and/or refractive indexes is replaced, so that the glass substrate detecting device 2 is When applied to the glass substrate 500 of different thicknesses, the lower image 553 and the side image 552 guiding the edge of the glass substrate 55 are transmitted to the depth of field of the focal length of the optical imaging device 21 (9). In this creation In an embodiment, the glass substrate detecting device further includes at least one illuminating device 2600. The at least one illuminating device 2600 (more preferably, a coaxial illuminating device) is disposed on the glass substrate edge 550 above the glass substrate Below the side and/or the glass substrate 500, an illumination source is provided to the glass substrate, so that the glass substrate detecting device 2200 can obtain a better and clearer image. 9 M403.651. 41 shown in Figure 4, for the creation In the glass substrate detecting device, the light 'line' is moving. The illuminating device 2600 of the glass substrate detecting device 2000 further includes a first light source device 2630, which may also be referred to as a front light source device, disposed above the glass substrate 500 to project the light source to Above the glass substrate 500 to be inspected, and preferably a coaxial light source, a parallel light source is projected; a first light source device 2660' may also be referred to as a backlight source device, disposed under the glass substrate 500 to project a light source to the glass to be inspected. The substrate 5 is preferably a backlight, and a third light source device 2690, which may also be referred to as a side light source device. On the side of the glass substrate 5, the light source is projected to the side of the glass substrate 5 to be detected. The focal length of the optical image capturing device 21 (9) is adjusted to the upper surface of the glass substrate 500 and/or the upper surface of the edge 550 of the glass substrate. Therefore, the optical image on the upper surface of the glass substrate 5 and/or the image 551 above the edge 550 of the glass substrate can be directly obtained. The image 553 below the edge of the glass substrate and the image 553 below the crucible 550 is located at the bottom of the edge of the glass substrate by the first optical device. The framing portion 22〇3 of the bottom edge enters the first optical device, and is refracted by the first optical device 2200 to be imaged on the extension portion 2206 of the first optical device 22 at the long bottom edge; since the third optical device 24〇〇 An extension 2206, which is a crystal column 'and substantially opposite to the first optical device 22 外侧 outside the edge 550 of the glass substrate, guides the lower image 553 of the edge 550 of the glass substrate refracted via the first optical device 22 through the third optical The device 2400 is transmitted to the depth of field range of the focal length of the optical imaging device 21A. The side image 552 of the edge 550 of the glass substrate is refracted by the second optical device 2300 and then incident on the fourth optical device 25 〇〇, so that the side image 552 of the edge 550 of the glass substrate is transmitted through the fourth optical device 25 至M403651, in the depth of field range of the focal length of the optical imaging device 21 。. Since the optical imaging device 2 100 has a focal length of substantially 2 mm and its focal length is adjusted on the upper surface of the glass substrate 500 and/or the upper surface of the glass substrate 5, the glass substrate detecting device 2000 utilizes the first The optical device 22, the second optical device 2300, the third optical device 24, and the fourth optical device 2500 capture the image 553 below the edge of the glass substrate 55 and the side image 552 of the glass substrate The image is transmitted to the optical imaging device 21, and the image above the glass substrate 5, the image 55 above the edge 550 of the glass substrate, and the image 552 and/or the image 553 at the same time are clear at the same time. It is transmitted to the optical image capturing device 21A to simultaneously perform defect detection of the glass substrate 500. Moreover, the glass substrate detecting device 2 of the present invention can replace and adjust the first optical device 2200 'the second optical device 23 〇〇 and the third optical device 2400 according to the thickness of the glass substrate 500 to be detected. The specification, length, refractive index, and/or relative position within the glass substrate detecting device 2000 of the fourth optical device 25A. . Referring to FIG. 4 again, the present invention is a schematic diagram of the middle glass light detecting device. The authoring department uses prisms to change the angle of light and redirect the light. The framing portion 22〇3 of the first optical device 22 below the edge 550 of the glass substrate has a first inclined surface 2210 at an angle of a horizontal angle, and is located at an extension portion of the first optical device 2 " When there is another second oblique light source opposite to the first inclined surface 22 and also at an angle of 45 degrees to the horizontal, the light source of the second light source device is directly directed to the lower surface of the edge 550 of the glass substrate, by the edge of the glass substrate 55. The light reflected from the surface of the underside of the crucible forms an image below the edge of the glass substrate 55. The image of the image 553 below the edge 550 of the glass substrate is received by the framing portion 2203 of the first optical device 2200. When the light received by the device 2200 touches the first inclined surface 2210 of the first optical device 2200, the angle of incidence is 45 degrees, and the incident angle is greater than the critical angle. Therefore, when the light is reflected, the direction changes by 9 degrees, and then the light is emitted. The angle of incidence of the second bevel 2220' of the first optical device 2200 is also 45 degrees, which is greater than the critical angle to change the direction of reflection of the light by 90 degrees, so the image 553 below the edge 550 of the glass substrate 2200 lines so that side 'the lower edge of the glass substrate of the image refracted upwardly 553,550' to 180 degrees to the third optical means for transmission via a first optical device 2400. The second optical device 2300 is disposed on the side of the edge of the glass substrate 55 and has a second optical device bevel 2310 at an angle of 45 degrees to the horizontal. The first optical device bevel 2310 is disposed on the edge of the opposite glass substrate. Side of it. When the light source of the third light source device 2690 is directly directed to the side of the edge 550 of the glass substrate, the light reflected by the side of the edge of the glass substrate 55 形成 forms a side edge image 552 of the glass substrate edge 550, and the edge of the edge 550 of the glass substrate The light of image 552 is refracted upward by second optical device ramp 231 to be transmitted to fourth optical device 2500. The glass substrate detecting device disclosed in the present invention can be used for, but not limited to, the following glass substrates: flat glass, floating glass, coated glass, flat panel glass, automotive glass, thin film crystal glass, and liquid crystal display glass. The glass substrate inspection device disclosed in the present application can even be used for edge detection at the wafer. And the crystal column of the glass substrate detecting device can be replaced with different lengths according to the thickness of the glass substrate to be detected, and the height of the M403.651. crystal column relative to the glass substrate and the optical image capturing device can be adjusted to form an image. The focal length of the optical imaging device is in the depth of field. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic diagram of a glass substrate backside detection system of the prior art; and Fig. 1 is a block diagram of the glass substrate inspection system of the present invention; The schematic diagram of the glass substrate detecting device; and FIG. 4 is a schematic diagram of the light direction in the glass substrate detecting device of the present invention. [Main component symbol description] 3 1C CD camera 321稜鏡322稜鏡500 glass substrate 550 glass substrate edge 551 above image 552 side image 553 lower image 1000 glass substrate detection system 1100 optical imaging module 1200 first optical module 1300 second optical module 1400 lighting module 2000 glass substrate detecting device 13 M403651 2100 optical image capturing device 2200 first optical device 2203 framing portion 2206 extending portion 2210 first inclined surface 2220 second inclined surface 2300 second optical device 2310 second optical Device ramp 2400 third optical device 2500 fourth optical device 2600 illumination device 2630 first light source device 2660 second light source device 2690 third light source device 14