TWI893113B - 用於直視型顯示器之次像素發光二極體及其製造方法 - Google Patents
用於直視型顯示器之次像素發光二極體及其製造方法Info
- Publication number
- TWI893113B TWI893113B TW110116921A TW110116921A TWI893113B TW I893113 B TWI893113 B TW I893113B TW 110116921 A TW110116921 A TW 110116921A TW 110116921 A TW110116921 A TW 110116921A TW I893113 B TWI893113 B TW I893113B
- Authority
- TW
- Taiwan
- Prior art keywords
- leds
- layer
- subset
- substrate
- backplane
- Prior art date
Links
Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H29/00—Integrated devices, or assemblies of multiple devices, comprising at least one light-emitting semiconductor element covered by group H10H20/00
- H10H29/01—Manufacture or treatment
- H10H29/012—Manufacture or treatment of active-matrix LED displays
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/01—Manufacture or treatment
- H10W72/0198—Manufacture or treatment batch processes
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/01—Manufacture or treatment
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/01—Manufacture or treatment
- H10H20/011—Manufacture or treatment of bodies, e.g. forming semiconductor layers
- H10H20/018—Bonding of wafers
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/84—Coatings, e.g. passivation layers or antireflective coatings
- H10H20/841—Reflective coatings, e.g. dielectric Bragg reflectors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/85—Packages
- H10H20/857—Interconnections, e.g. lead-frames, bond wires or solder balls
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H29/00—Integrated devices, or assemblies of multiple devices, comprising at least one light-emitting semiconductor element covered by group H10H20/00
- H10H29/01—Manufacture or treatment
- H10H29/02—Manufacture or treatment using pick-and-place processes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H29/00—Integrated devices, or assemblies of multiple devices, comprising at least one light-emitting semiconductor element covered by group H10H20/00
- H10H29/10—Integrated devices comprising at least one light-emitting semiconductor component covered by group H10H20/00
- H10H29/14—Integrated devices comprising at least one light-emitting semiconductor component covered by group H10H20/00 comprising multiple light-emitting semiconductor components
- H10H29/142—Two-dimensional arrangements, e.g. asymmetric LED layout
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H29/00—Integrated devices, or assemblies of multiple devices, comprising at least one light-emitting semiconductor element covered by group H10H20/00
- H10H29/30—Active-matrix LED displays
- H10H29/49—Interconnections, e.g. wiring lines or terminals
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H29/00—Integrated devices, or assemblies of multiple devices, comprising at least one light-emitting semiconductor element covered by group H10H20/00
- H10H29/80—Constructional details
- H10H29/832—Electrodes
- H10H29/8322—Electrodes characterised by their materials
- H10H29/8325—Reflective materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/01—Manufacture or treatment
- H10H20/034—Manufacture or treatment of coatings
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/01—Manufacture or treatment
- H10H20/036—Manufacture or treatment of packages
- H10H20/0364—Manufacture or treatment of packages of interconnections
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H29/00—Integrated devices, or assemblies of multiple devices, comprising at least one light-emitting semiconductor element covered by group H10H20/00
- H10H29/01—Manufacture or treatment
- H10H29/032—Manufacture or treatment of electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H29/00—Integrated devices, or assemblies of multiple devices, comprising at least one light-emitting semiconductor element covered by group H10H20/00
- H10H29/01—Manufacture or treatment
- H10H29/036—Manufacture or treatment of packages
- H10H29/0364—Manufacture or treatment of packages of interconnections
Landscapes
- Led Devices (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Led Device Packages (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US202063026454P | 2020-05-18 | 2020-05-18 | |
| US63/026,454 | 2020-05-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW202209626A TW202209626A (zh) | 2022-03-01 |
| TWI893113B true TWI893113B (zh) | 2025-08-11 |
Family
ID=78511893
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW110116921A TWI893113B (zh) | 2020-05-18 | 2021-05-11 | 用於直視型顯示器之次像素發光二極體及其製造方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US11973172B2 (enExample) |
| EP (1) | EP4154324B1 (enExample) |
| JP (1) | JP7611271B2 (enExample) |
| KR (1) | KR20230013072A (enExample) |
| CN (1) | CN115989590A (enExample) |
| TW (1) | TWI893113B (enExample) |
| WO (1) | WO2021236382A1 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US12299641B2 (en) * | 2018-08-03 | 2025-05-13 | Cirqil, Inc. | Systems and methods for organizing and sharing contact and calendar information |
| CN115989590A (zh) | 2020-05-18 | 2023-04-18 | 纳诺西斯有限公司 | 用于直视型显示器的次像素发光二极管及其制造方法 |
| CN114927458B (zh) * | 2022-05-26 | 2025-07-25 | 广东省科学院半导体研究所 | 芯片转移方法、Micro-LED显示器件及制作方法 |
| WO2024247230A1 (ja) * | 2023-06-01 | 2024-12-05 | 日本電信電話株式会社 | 半導体光電極の製造方法 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US20180166429A1 (en) * | 2016-12-13 | 2018-06-14 | Hong Kong Beida Jade Bird Display Limited | Mass Transfer Of Micro Structures Using Adhesives |
| TW201840015A (zh) * | 2017-03-16 | 2018-11-01 | 美商康寧公司 | 用於大量轉移微型led的方法及製程 |
| US20180366450A1 (en) * | 2014-12-19 | 2018-12-20 | Nathan Gardner | Method of making a light emitting diode array on a backplane |
| US20190371229A1 (en) * | 2018-05-31 | 2019-12-05 | Invensas Corporation | Formation of a Light-Emitting Diode Display |
| US20200013760A1 (en) * | 2018-07-09 | 2020-01-09 | Xiamen Changelight Co. Ltd. | Methods and display devices for micro-led mass transfer processes |
Family Cites Families (24)
| Publication number | Priority date | Publication date | Assignee | Title |
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| KR20000002733A (ko) | 1998-06-23 | 2000-01-15 | 구자홍 | 광자기 기록 매체 |
| KR20110039313A (ko) | 2008-07-07 | 2011-04-15 | 글로 에이비 | 나노구조 led |
| CN102903804B (zh) * | 2011-07-25 | 2015-12-16 | 财团法人工业技术研究院 | 发光元件的转移方法以及发光元件阵列 |
| US8350251B1 (en) | 2011-09-26 | 2013-01-08 | Glo Ab | Nanowire sized opto-electronic structure and method for manufacturing the same |
| JP2015532014A (ja) | 2012-09-18 | 2015-11-05 | グロ アーベーGlo Ab | ナノピラミッドサイズ光電構造及びそれを製造するための方法 |
| WO2015095049A1 (en) | 2013-12-17 | 2015-06-25 | Glo Ab | Iii-nitride nanowire led with strain modified surface active region and method of making thereof |
| JP6806774B2 (ja) * | 2015-12-07 | 2021-01-06 | グロ アーベーGlo Ab | 基板間led移送のための、孤立iii族窒化物光アイランド上のレーザリフトオフ |
| US10714464B2 (en) * | 2016-02-16 | 2020-07-14 | Glo Ab | Method of selectively transferring LED die to a backplane using height controlled bonding structures |
| JP2019511838A (ja) | 2016-04-04 | 2019-04-25 | グロ アーベーGlo Ab | ダイ移送用のバックプレーン通過レーザ照射 |
| US10236447B2 (en) | 2016-05-24 | 2019-03-19 | Glo Ab | Selective die repair on a light emitting device assembly |
| DE102017100812B4 (de) * | 2017-01-17 | 2024-04-25 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Verfahren zur Herstellung eines optoelektronischen Halbleiterbauteils und optoelektronisches Halbleiterbauteil |
| WO2018223391A1 (en) * | 2017-06-09 | 2018-12-13 | Goertek. Inc | Micro-led array transfer method, manufacturing method and display device |
| US10707374B2 (en) | 2017-09-15 | 2020-07-07 | Glo Ab | Etendue enhancement for light emitting diode subpixels |
| US11362238B2 (en) | 2017-10-06 | 2022-06-14 | Nanosys, Inc. | Light emitting diode containing oxidized metal contacts |
| TWI650854B (zh) * | 2017-10-31 | 2019-02-11 | 英屬開曼群島商錼創科技股份有限公司 | 微型發光二極體顯示面板及其製造方法 |
| TWI635605B (zh) | 2017-11-02 | 2018-09-11 | Pixeled Display Co., Ltd. | 微型發光二極體顯示面板 |
| US11404400B2 (en) * | 2018-01-24 | 2022-08-02 | Apple Inc. | Micro LED based display panel |
| KR102433873B1 (ko) * | 2018-01-29 | 2022-08-19 | 삼성전자주식회사 | Led 패널 및 led 패널의 제조 방법 |
| US11069837B2 (en) * | 2018-04-20 | 2021-07-20 | Glo Ab | Sub pixel light emitting diodes for direct view display and methods of making the same |
| KR102617962B1 (ko) * | 2018-10-02 | 2023-12-27 | 삼성전자주식회사 | 반도체 발광소자 |
| US11158761B2 (en) * | 2019-05-07 | 2021-10-26 | Facebook Technologies, Llc | Bonding methods for light emitting diodes |
| KR102881826B1 (ko) * | 2019-12-19 | 2025-11-07 | 엘지전자 주식회사 | 발광 소자를 이용한 디스플레이 장치 및 그 제조 방법 |
| JP7153183B2 (ja) * | 2020-01-29 | 2022-10-14 | 日亜化学工業株式会社 | 発光装置の製造方法 |
| CN115989590A (zh) | 2020-05-18 | 2023-04-18 | 纳诺西斯有限公司 | 用于直视型显示器的次像素发光二极管及其制造方法 |
-
2021
- 2021-05-11 CN CN202180048362.6A patent/CN115989590A/zh active Pending
- 2021-05-11 TW TW110116921A patent/TWI893113B/zh active
- 2021-05-11 US US17/317,779 patent/US11973172B2/en active Active
- 2021-05-11 WO PCT/US2021/031868 patent/WO2021236382A1/en not_active Ceased
- 2021-05-11 JP JP2022570399A patent/JP7611271B2/ja active Active
- 2021-05-11 KR KR1020227044261A patent/KR20230013072A/ko active Pending
- 2021-05-11 EP EP21808976.1A patent/EP4154324B1/en active Active
-
2024
- 2024-04-04 US US18/626,810 patent/US12439757B2/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20180366450A1 (en) * | 2014-12-19 | 2018-12-20 | Nathan Gardner | Method of making a light emitting diode array on a backplane |
| US20180166429A1 (en) * | 2016-12-13 | 2018-06-14 | Hong Kong Beida Jade Bird Display Limited | Mass Transfer Of Micro Structures Using Adhesives |
| TW201840015A (zh) * | 2017-03-16 | 2018-11-01 | 美商康寧公司 | 用於大量轉移微型led的方法及製程 |
| US20190371229A1 (en) * | 2018-05-31 | 2019-12-05 | Invensas Corporation | Formation of a Light-Emitting Diode Display |
| US20200013760A1 (en) * | 2018-07-09 | 2020-01-09 | Xiamen Changelight Co. Ltd. | Methods and display devices for micro-led mass transfer processes |
Also Published As
| Publication number | Publication date |
|---|---|
| CN115989590A (zh) | 2023-04-18 |
| US20210359186A1 (en) | 2021-11-18 |
| US11973172B2 (en) | 2024-04-30 |
| EP4154324B1 (en) | 2026-01-21 |
| JP2023526833A (ja) | 2023-06-23 |
| JP7611271B2 (ja) | 2025-01-09 |
| KR20230013072A (ko) | 2023-01-26 |
| TW202209626A (zh) | 2022-03-01 |
| EP4154324A4 (en) | 2024-06-12 |
| EP4154324A1 (en) | 2023-03-29 |
| WO2021236382A1 (en) | 2021-11-25 |
| US20240274772A1 (en) | 2024-08-15 |
| US12439757B2 (en) | 2025-10-07 |
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