JP7611271B2 - 直視型ディスプレイのためのサブピクセル発光ダイオードおよびその製造方法 - Google Patents

直視型ディスプレイのためのサブピクセル発光ダイオードおよびその製造方法 Download PDF

Info

Publication number
JP7611271B2
JP7611271B2 JP2022570399A JP2022570399A JP7611271B2 JP 7611271 B2 JP7611271 B2 JP 7611271B2 JP 2022570399 A JP2022570399 A JP 2022570399A JP 2022570399 A JP2022570399 A JP 2022570399A JP 7611271 B2 JP7611271 B2 JP 7611271B2
Authority
JP
Japan
Prior art keywords
layer
backplane
leds
substrate
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2022570399A
Other languages
English (en)
Japanese (ja)
Other versions
JP2023526833A5 (enExample
JP2023526833A (ja
Inventor
オヌーシャ ポークリヤル,
オゼル ズラル テスカン,
サケット チャッダ,
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Samsung Electronics Co Ltd
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Publication of JP2023526833A publication Critical patent/JP2023526833A/ja
Publication of JP2023526833A5 publication Critical patent/JP2023526833A5/ja
Application granted granted Critical
Publication of JP7611271B2 publication Critical patent/JP7611271B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H29/00—Integrated devices, or assemblies of multiple devices, comprising at least one light-emitting semiconductor element covered by group H10H20/00
    • H10H29/01—Manufacture or treatment
    • H10H29/012—Manufacture or treatment of active-matrix LED displays
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/01—Manufacture or treatment
    • H10W72/0198—Manufacture or treatment batch processes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/01—Manufacture or treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/01—Manufacture or treatment
    • H10H20/011—Manufacture or treatment of bodies, e.g. forming semiconductor layers
    • H10H20/018—Bonding of wafers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/01—Manufacture or treatment
    • H10H20/034—Manufacture or treatment of coatings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/01—Manufacture or treatment
    • H10H20/036—Manufacture or treatment of packages
    • H10H20/0364—Manufacture or treatment of packages of interconnections
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80—Constructional details
    • H10H20/84—Coatings, e.g. passivation layers or antireflective coatings
    • H10H20/841—Reflective coatings, e.g. dielectric Bragg reflectors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80—Constructional details
    • H10H20/85—Packages
    • H10H20/857—Interconnections, e.g. lead-frames, bond wires or solder balls
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H29/00—Integrated devices, or assemblies of multiple devices, comprising at least one light-emitting semiconductor element covered by group H10H20/00
    • H10H29/01—Manufacture or treatment
    • H10H29/02—Manufacture or treatment using pick-and-place processes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H29/00—Integrated devices, or assemblies of multiple devices, comprising at least one light-emitting semiconductor element covered by group H10H20/00
    • H10H29/10—Integrated devices comprising at least one light-emitting semiconductor component covered by group H10H20/00
    • H10H29/14—Integrated devices comprising at least one light-emitting semiconductor component covered by group H10H20/00 comprising multiple light-emitting semiconductor components
    • H10H29/142—Two-dimensional arrangements, e.g. asymmetric LED layout
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H29/00—Integrated devices, or assemblies of multiple devices, comprising at least one light-emitting semiconductor element covered by group H10H20/00
    • H10H29/30—Active-matrix LED displays
    • H10H29/49—Interconnections, e.g. wiring lines or terminals
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H29/00—Integrated devices, or assemblies of multiple devices, comprising at least one light-emitting semiconductor element covered by group H10H20/00
    • H10H29/80—Constructional details
    • H10H29/832—Electrodes
    • H10H29/8322—Electrodes characterised by their materials
    • H10H29/8325—Reflective materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H29/00—Integrated devices, or assemblies of multiple devices, comprising at least one light-emitting semiconductor element covered by group H10H20/00
    • H10H29/01—Manufacture or treatment
    • H10H29/032—Manufacture or treatment of electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H29/00—Integrated devices, or assemblies of multiple devices, comprising at least one light-emitting semiconductor element covered by group H10H20/00
    • H10H29/01—Manufacture or treatment
    • H10H29/036—Manufacture or treatment of packages
    • H10H29/0364—Manufacture or treatment of packages of interconnections

Landscapes

  • Led Devices (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Led Device Packages (AREA)
JP2022570399A 2020-05-18 2021-05-11 直視型ディスプレイのためのサブピクセル発光ダイオードおよびその製造方法 Active JP7611271B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202063026454P 2020-05-18 2020-05-18
US63/026,454 2020-05-18
PCT/US2021/031868 WO2021236382A1 (en) 2020-05-18 2021-05-11 Subpixel light emitting diodes for direct view display and methods of making the same

Publications (3)

Publication Number Publication Date
JP2023526833A JP2023526833A (ja) 2023-06-23
JP2023526833A5 JP2023526833A5 (enExample) 2024-05-22
JP7611271B2 true JP7611271B2 (ja) 2025-01-09

Family

ID=78511893

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022570399A Active JP7611271B2 (ja) 2020-05-18 2021-05-11 直視型ディスプレイのためのサブピクセル発光ダイオードおよびその製造方法

Country Status (7)

Country Link
US (2) US11973172B2 (enExample)
EP (1) EP4154324B1 (enExample)
JP (1) JP7611271B2 (enExample)
KR (1) KR102977784B1 (enExample)
CN (1) CN115989590A (enExample)
TW (1) TWI893113B (enExample)
WO (1) WO2021236382A1 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12299641B2 (en) * 2018-08-03 2025-05-13 Cirqil, Inc. Systems and methods for organizing and sharing contact and calendar information
CN115989590A (zh) 2020-05-18 2023-04-18 纳诺西斯有限公司 用于直视型显示器的次像素发光二极管及其制造方法
CN114927458B (zh) * 2022-05-26 2025-07-25 广东省科学院半导体研究所 芯片转移方法、Micro-LED显示器件及制作方法
JPWO2024247230A1 (enExample) * 2023-06-01 2024-12-05

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016100657A2 (en) 2014-12-19 2016-06-23 Glo Ab Method of making a light emitting diode array on a backplane

Family Cites Families (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20000002733A (ko) 1998-06-23 2000-01-15 구자홍 광자기 기록 매체
CN103022282B (zh) 2008-07-07 2016-02-03 格罗有限公司 纳米结构led
CN102903804B (zh) * 2011-07-25 2015-12-16 财团法人工业技术研究院 发光元件的转移方法以及发光元件阵列
US8350251B1 (en) 2011-09-26 2013-01-08 Glo Ab Nanowire sized opto-electronic structure and method for manufacturing the same
US8809875B2 (en) * 2011-11-18 2014-08-19 LuxVue Technology Corporation Micro light emitting diode
CN104769732A (zh) 2012-09-18 2015-07-08 Glo公司 纳米角锥体大小的光电子结构及其制造方法
TWI621278B (zh) 2013-12-17 2018-04-11 瑞典商Glo公司 具有應變改質表面活性區域之第三族氮化物奈米線led及其製造方法
EP3387882B1 (en) * 2015-12-07 2021-05-12 Glo Ab Laser lift-off on isolated iii-nitride light islands for inter-substrate led transfer
US10714464B2 (en) 2016-02-16 2020-07-14 Glo Ab Method of selectively transferring LED die to a backplane using height controlled bonding structures
WO2017175051A1 (en) 2016-04-04 2017-10-12 Glo Ab Through backplane laser irradiation for die transfer
US10236447B2 (en) 2016-05-24 2019-03-19 Glo Ab Selective die repair on a light emitting device assembly
US10325893B2 (en) * 2016-12-13 2019-06-18 Hong Kong Beida Jade Bird Display Limited Mass transfer of micro structures using adhesives
KR102468071B1 (ko) * 2017-01-09 2022-11-17 글로 에이비 다이렉트 뷰 디스플레이를 위한 집적 반사기를 갖는 발광 다이오드 및 이의 제조 방법
DE102017100812B4 (de) * 2017-01-17 2024-04-25 OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung Verfahren zur Herstellung eines optoelektronischen Halbleiterbauteils und optoelektronisches Halbleiterbauteil
TWI756384B (zh) * 2017-03-16 2022-03-01 美商康寧公司 用於大量轉移微型led的方法及製程
US11024611B1 (en) * 2017-06-09 2021-06-01 Goertek, Inc. Micro-LED array transfer method, manufacturing method and display device
US10707374B2 (en) * 2017-09-15 2020-07-07 Glo Ab Etendue enhancement for light emitting diode subpixels
US11362238B2 (en) 2017-10-06 2022-06-14 Nanosys, Inc. Light emitting diode containing oxidized metal contacts
TWI650854B (zh) 2017-10-31 2019-02-11 英屬開曼群島商錼創科技股份有限公司 微型發光二極體顯示面板及其製造方法
TWI635605B (zh) 2017-11-02 2018-09-11 Pixeled Display Co., Ltd. 微型發光二極體顯示面板
US11404400B2 (en) * 2018-01-24 2022-08-02 Apple Inc. Micro LED based display panel
KR102433873B1 (ko) * 2018-01-29 2022-08-19 삼성전자주식회사 Led 패널 및 led 패널의 제조 방법
US11069837B2 (en) * 2018-04-20 2021-07-20 Glo Ab Sub pixel light emitting diodes for direct view display and methods of making the same
US11024220B2 (en) * 2018-05-31 2021-06-01 Invensas Corporation Formation of a light-emitting diode display
CN108807265B (zh) * 2018-07-09 2020-01-31 厦门乾照光电股份有限公司 Micro-LED巨量转移方法、显示装置及制作方法
KR102617962B1 (ko) * 2018-10-02 2023-12-27 삼성전자주식회사 반도체 발광소자
US11158761B2 (en) * 2019-05-07 2021-10-26 Facebook Technologies, Llc Bonding methods for light emitting diodes
KR102881826B1 (ko) * 2019-12-19 2025-11-07 엘지전자 주식회사 발광 소자를 이용한 디스플레이 장치 및 그 제조 방법
JP7153183B2 (ja) * 2020-01-29 2022-10-14 日亜化学工業株式会社 発光装置の製造方法
CN115989590A (zh) 2020-05-18 2023-04-18 纳诺西斯有限公司 用于直视型显示器的次像素发光二极管及其制造方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016100657A2 (en) 2014-12-19 2016-06-23 Glo Ab Method of making a light emitting diode array on a backplane

Also Published As

Publication number Publication date
KR20230013072A (ko) 2023-01-26
EP4154324A4 (en) 2024-06-12
EP4154324A1 (en) 2023-03-29
US11973172B2 (en) 2024-04-30
TWI893113B (zh) 2025-08-11
US12439757B2 (en) 2025-10-07
WO2021236382A1 (en) 2021-11-25
TW202209626A (zh) 2022-03-01
CN115989590A (zh) 2023-04-18
JP2023526833A (ja) 2023-06-23
EP4154324B1 (en) 2026-01-21
US20210359186A1 (en) 2021-11-18
US20240274772A1 (en) 2024-08-15
KR102977784B1 (ko) 2026-06-12

Similar Documents

Publication Publication Date Title
TWI922867B (zh) 用於直視型顯示器之子像素發光二極體及其製造方法
EP3566251B1 (en) Light emitting diodes with integrated reflector for a direct view display and method of making thereof
US11710805B2 (en) Light emitting diode containing oxidized metal contacts
US12527128B2 (en) Light emitting diodes containing deactivated regions and methods of making the same
EP4154324B1 (en) Subpixel light emitting diodes for direct view display and methods of making the same
WO2019199946A1 (en) Light emitting diodes formed on nanodisk substrates and methods of making the same
US12074251B2 (en) Semiconductor device containing stress relaxation layer and method of making thereof
US20240421246A1 (en) Light emitting diode containing pinhole masking layer and method of making thereof
US11362238B2 (en) Light emitting diode containing oxidized metal contacts
US20230223494A1 (en) Light emitting diodes and method of making thereof by selectively growing active layers from trench separated areas
US11695100B2 (en) Light emitting diode containing a grating and methods of making the same

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20240510

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20240510

A711 Notification of change in applicant

Free format text: JAPANESE INTERMEDIATE CODE: A711

Effective date: 20241111

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20241210

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20241223

R150 Certificate of patent or registration of utility model

Ref document number: 7611271

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150