TWI858261B - 使用通過光學干涉儀的光學信號傳輸之溫度測量系統及方法 - Google Patents
使用通過光學干涉儀的光學信號傳輸之溫度測量系統及方法 Download PDFInfo
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- TWI858261B TWI858261B TW110120285A TW110120285A TWI858261B TW I858261 B TWI858261 B TW I858261B TW 110120285 A TW110120285 A TW 110120285A TW 110120285 A TW110120285 A TW 110120285A TW I858261 B TWI858261 B TW I858261B
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- optical signal
- interferometer
- temperature
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
- G01K11/32—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in transmittance, scattering or luminescence in optical fibres
- G01K11/3206—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in transmittance, scattering or luminescence in optical fibres at discrete locations in the fibre, e.g. using Bragg scattering
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K15/00—Testing or calibrating of thermometers
- G01K15/005—Calibration
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
- G01K11/32—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in transmittance, scattering or luminescence in optical fibres
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US202063034063P | 2020-06-03 | 2020-06-03 | |
| US63/034,063 | 2020-06-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW202217253A TW202217253A (zh) | 2022-05-01 |
| TWI858261B true TWI858261B (zh) | 2024-10-11 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW110120285A TWI858261B (zh) | 2020-06-03 | 2021-06-03 | 使用通過光學干涉儀的光學信號傳輸之溫度測量系統及方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US11906368B2 (cg-RX-API-DMAC7.html) |
| EP (1) | EP4162245A1 (cg-RX-API-DMAC7.html) |
| JP (1) | JP7554291B2 (cg-RX-API-DMAC7.html) |
| KR (1) | KR102745808B1 (cg-RX-API-DMAC7.html) |
| CN (1) | CN115803595A (cg-RX-API-DMAC7.html) |
| TW (1) | TWI858261B (cg-RX-API-DMAC7.html) |
| WO (1) | WO2021247912A1 (cg-RX-API-DMAC7.html) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI871469B (zh) | 2020-06-03 | 2025-02-01 | 美商富克有限公司 | 使用共振器差分技術之光子裝置 |
| CN112834072B (zh) * | 2021-02-08 | 2021-09-24 | 广东海洋大学 | 一种检测条纹对比度变化的迈克尔逊干涉光纤温度传感器 |
| WO2023183064A1 (en) | 2022-03-22 | 2023-09-28 | Fluke Corporation | Temperature measurement system and method using multimode of an optical resonator |
| US12498275B2 (en) | 2023-01-31 | 2025-12-16 | Fluke Corporation | Temperature measurement using fabry-pãƒâ€°rot resonator on end of optical fiber |
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| TW201304032A (zh) * | 2011-03-28 | 2013-01-16 | 東京威力科創股份有限公司 | 基板處理裝置之處理室內構成構件及其溫度測定方法 |
| US20190111483A1 (en) * | 2016-02-04 | 2019-04-18 | The Aerospace Corporation | Systems and methods for monitoring temperature using acoustic waves during processing of a material |
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2021
- 2021-06-03 WO PCT/US2021/035767 patent/WO2021247912A1/en not_active Ceased
- 2021-06-03 US US17/338,454 patent/US11906368B2/en active Active
- 2021-06-03 CN CN202180031802.7A patent/CN115803595A/zh active Pending
- 2021-06-03 JP JP2022574427A patent/JP7554291B2/ja active Active
- 2021-06-03 KR KR1020227042193A patent/KR102745808B1/ko active Active
- 2021-06-03 EP EP21736786.1A patent/EP4162245A1/en active Pending
- 2021-06-03 TW TW110120285A patent/TWI858261B/zh active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030118075A1 (en) * | 1999-12-14 | 2003-06-26 | Gustav Schweiger | Optical temperature sensor |
| US20060233216A1 (en) * | 2003-01-16 | 2006-10-19 | Georg Schuele | Method and device for contactless temperature monitoring and temperature adjustment |
| CN101218492A (zh) * | 2005-07-05 | 2008-07-09 | 国立大学法人广岛大学 | 温度测量装置以及利用它的热处理装置、温度测量方法 |
| CN101825480A (zh) * | 2010-01-29 | 2010-09-08 | 浙江大学 | 一种基于宽带光源和级连光波导滤波器的光传感器 |
| TW201202675A (en) * | 2010-03-12 | 2012-01-16 | Tokyo Electron Ltd | Probe for temperature measurement, temperature measuring system and temperature measuring method using the same |
| TW201304032A (zh) * | 2011-03-28 | 2013-01-16 | 東京威力科創股份有限公司 | 基板處理裝置之處理室內構成構件及其溫度測定方法 |
| US20190111483A1 (en) * | 2016-02-04 | 2019-04-18 | The Aerospace Corporation | Systems and methods for monitoring temperature using acoustic waves during processing of a material |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2021247912A1 (en) | 2021-12-09 |
| CN115803595A (zh) | 2023-03-14 |
| JP2023528463A (ja) | 2023-07-04 |
| US11906368B2 (en) | 2024-02-20 |
| JP7554291B2 (ja) | 2024-09-19 |
| TW202217253A (zh) | 2022-05-01 |
| KR20230017791A (ko) | 2023-02-06 |
| EP4162245A1 (en) | 2023-04-12 |
| US20210381908A1 (en) | 2021-12-09 |
| KR102745808B1 (ko) | 2024-12-20 |
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