Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 台灣積體電路製造股份有限公司filedCritical台灣積體電路製造股份有限公司
Publication of TW202410366ApublicationCriticalpatent/TW202410366A/zh
Application grantedgrantedCritical
Publication of TWI844267BpublicationCriticalpatent/TWI844267B/zh