TWI834108B - Contact angle measuring machine - Google Patents

Contact angle measuring machine Download PDF

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Publication number
TWI834108B
TWI834108B TW111101503A TW111101503A TWI834108B TW I834108 B TWI834108 B TW I834108B TW 111101503 A TW111101503 A TW 111101503A TW 111101503 A TW111101503 A TW 111101503A TW I834108 B TWI834108 B TW I834108B
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carrier plate
measuring machine
angle measuring
driver
water
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TW111101503A
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Chinese (zh)
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TW202328659A (en
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劉忠炯
余端仁
林岱蔚
邱敬凱
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友威科技股份有限公司
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Abstract

A contact angle measuring machine includes a machine body, a liquid injection device, a detection platform, a vacuum suction device, a light source device, and a camera device. The liquid injection is disposed on the machine body and movable along the Z-axis direction. The detection platform is disposed on the machine body and movable along the X-axis and the Y-axis direction, so that the liquid injection device drops the liquid drop toward the carrier plate on the detection platform. The vacuum suction device is disposed on the machine body and provides vacuum suction for sucking the carrier plate. The light source device and the camera device are disposed on opposite sides of the machine body. The camera device captures the image of the liquid drop dropping on the carrier plate, and calculates and displays the contact angle of the carrier plate through a display device.

Description

水滴角量測機Water drop angle measuring machine

本發明係有關於一種量測裝置,特別是指一種水滴角量測機,其能夠針對載板進行水滴角量測。The present invention relates to a measuring device, in particular to a water drop angle measuring machine, which can measure the water drop angle of a carrier board.

水滴角為衡量物品本身親、疏水性的重要指標,當物品的表面與水滴的接觸角越大,疏水性越高;物品的表面與水滴的接觸角越小,親水性越高。The water droplet angle is an important indicator to measure the affinity and hydrophobicity of the object itself. The larger the contact angle between the surface of the object and the water droplets, the higher the hydrophobicity; the smaller the contact angle between the surface of the object and the water droplets, the higher the hydrophilicity.

載板因有鍍膜,故需要進行量測水滴角,以判斷載板表面的親、疏水性,惟目前水滴角的量測方式有很多種,但不論那種量測方法,尚無專門針對載板進行量測的設備與儀器。Because the carrier board is coated, it is necessary to measure the water drop angle to determine the affinity and hydrophobicity of the surface of the carrier board. However, there are many ways to measure the water drop angle. However, no matter what kind of measurement method, there is no specific method for the carrier board. Equipment and instruments for measuring boards.

為解決上述課題,本發明揭露一種水滴角量測機,其利用真空吸力裝置以真空吸力而將載板平整地吸附於檢測平台上,而能確保載板為平整狀,以便進行水滴角的量測,且使量測更為準確。In order to solve the above problems, the present invention discloses a water drop angle measuring machine, which uses a vacuum suction device to adsorb the carrier plate flatly to the detection platform with vacuum suction, thereby ensuring that the carrier plate is flat so as to measure the water drop angle. measurement and make the measurement more accurate.

為達上述目的,本發明實施例中提供一種水滴角量測機,其用以對一載板進行水滴角量測,水滴角量測機包括機體、水液注射裝置、檢測平台、真空吸力裝置、光源裝置及攝像裝置。水液注射裝置設置於機體,且水液注射裝置能夠沿著一Z軸方向位移;檢測平台設置於機體,檢測平台具有一置放面,置放面提供載板放置,置放面設有複數個吸孔,檢測平台能夠沿著垂直於Z軸方向之一X軸方向及一Y軸方向位移,以便檢測平台移至對應於水液注射裝置下方,使水液注射裝置向載板滴落水液;真空吸力裝置設置於機體,且氣體連通於吸孔並提供真空吸力,而能夠吸附載板;光源裝置設置於機體一側;攝像裝置設置於機體另一側,並與光源裝置相對應,攝像裝置用以擷取水液滴落於載板上的影像。In order to achieve the above object, an embodiment of the present invention provides a water drop angle measuring machine, which is used to measure the water drop angle of a carrier plate. The water drop angle measuring machine includes a body, a water liquid injection device, a detection platform, and a vacuum suction device. , light source device and camera device. The water liquid injection device is arranged on the body, and the water liquid injection device can be displaced along a Z-axis direction; the detection platform is arranged on the body, and the detection platform has a placement surface that provides a carrier plate for placement, and the placement surface is provided with a plurality of With a suction hole, the detection platform can be displaced along an X-axis direction and a Y-axis direction perpendicular to the Z-axis direction, so that the detection platform moves to the bottom corresponding to the water injection device, so that the water injection device drips water onto the carrier plate ; The vacuum suction device is arranged on the body, and the gas is connected to the suction hole and provides vacuum suction, so as to be able to adsorb the carrier plate; the light source device is arranged on one side of the body; the camera device is arranged on the other side of the body and corresponds to the light source device, and the camera The device is used to capture images of water droplets falling on a carrier plate.

藉此,本發明以真空吸力而將載板吸附於檢測平台上,以確保載板不會翹曲,而能準確地量測載板表面的水滴角。Thereby, the present invention uses vacuum suction to adsorb the carrier plate to the detection platform to ensure that the carrier plate will not warp and can accurately measure the water droplet angle on the surface of the carrier plate.

再者,本發明水液注射裝置能夠沿Z軸方向移動,而檢測平台能沿X軸方向、Y軸方向移動,藉此三維移動控制,而能將水液滴在載板的不同位置上,增加量測的便利性。Furthermore, the water injection device of the present invention can move along the Z-axis direction, and the detection platform can move along the X-axis direction and the Y-axis direction. Through three-dimensional movement control, water droplets can be dropped on different positions of the carrier plate. Increase measurement convenience.

以下參照各附圖詳細描述本發明的示例性實施例,且不意圖將本發明的技術原理限制於特定公開的實施例,而本發明的範圍僅由申請專利範圍限制,涵蓋了替代、修改和等同物。Exemplary embodiments of the present invention are described in detail below with reference to the accompanying drawings. It is not intended to limit the technical principles of the present invention to the specifically disclosed embodiments, but the scope of the present invention is limited only by the scope of the patent application and covers substitutions, modifications and equivalent.

請參閱圖1至圖5所示,本發明係為一種水滴角量測機100,其用以對一載板1進行水滴角量測,水滴角量測機100包括一機體10、一水液注射裝置20、一檢測平台30、一真空吸力裝置40、一光源裝置50、一攝像裝置60、一顯示裝置70以及一控制裝置80。其中,載板1為複合式電路板、印刷電路板、銅箔基板(CCL)等等。Please refer to Figures 1 to 5. The present invention is a water drop angle measuring machine 100, which is used to measure the water drop angle on a carrier plate 1. The water drop angle measuring machine 100 includes a body 10, a water droplet angle measuring machine 100 and a water drop angle measuring machine 100. Injection device 20 , a detection platform 30 , a vacuum suction device 40 , a light source device 50 , a camera device 60 , a display device 70 and a control device 80 . Among them, the carrier board 1 is a composite circuit board, a printed circuit board, a copper foil substrate (CCL), etc.

機體10,係包括一底座11、一第一側部12、一第二側部13及一橫架部14,第一側部12與第二側部13分別立設於底座11的兩側,橫架部14設於第一側部12與第二側部13之間,水液注射裝置20設於橫架部14,光源裝置50設於第一側部12,攝像裝置60設於第二側部13而與光源裝置50相對應,檢測平台30設於底座11。The body 10 includes a base 11, a first side part 12, a second side part 13 and a horizontal frame part 14. The first side part 12 and the second side part 13 are respectively erected on both sides of the base 11. The horizontal frame part 14 is arranged between the first side part 12 and the second side part 13. The water injection device 20 is arranged on the horizontal bracket part 14, the light source device 50 is arranged on the first side part 12, and the camera device 60 is arranged on the second side part 12. The side portion 13 corresponds to the light source device 50 , and the detection platform 30 is provided on the base 11 .

於本發明實施例中,橫架部14包括一固定座141及一滑設於固定座141之活動座142,機體10包括一第一驅動器15,第一驅動器15設於活動座142,第一驅動器15作動時能夠使活動座142相對固定座141沿Z軸方向位移。其中,第一驅動器15包括馬達、齒輪、螺桿,以便使活動座142能夠相對固定座141產生滑移關係。In the embodiment of the present invention, the cross frame part 14 includes a fixed base 141 and a movable base 142 slidably installed on the fixed base 141. The body 10 includes a first driver 15, and the first driver 15 is installed on the movable base 142. When the driver 15 is activated, the movable base 142 can be displaced in the Z-axis direction relative to the fixed base 141 . The first driver 15 includes a motor, a gear, and a screw, so that the movable base 142 can have a sliding relationship relative to the fixed base 141 .

水液注射裝置20,係設置於機體10,且水液注射裝置20能夠沿著Z軸方向位移。於本發明實施例中,水液注射裝置20包括一第二驅動器21、一滑座22、一作動件23及一注射件24,第二驅動器21設於活動座142,滑座22固設於活動座142,藉此當第一驅動器15使活動座142位移時,滑座22亦隨著活動座142而位移;作動件23滑設於活動座142,注射件24設於滑座22,第二驅動器21作動時能夠使作動件23沿Z軸方向位移,並使注射件24射出水液。其中,第二驅動器21包括馬達、齒輪、螺桿,注射件24具有一唧筒241及一活塞242,活塞242係連接於作動件23,當第二驅動器21作動時,以便驅使作動件23能夠相對活動座142產生滑移關係,進而帶動活塞242相對唧筒241作動,而使唧筒241內的水液射出。The water liquid injection device 20 is installed on the body 10, and the water liquid injection device 20 is displaceable along the Z-axis direction. In the embodiment of the present invention, the water liquid injection device 20 includes a second driver 21, a slide seat 22, an actuator 23 and an injection part 24. The second driver 21 is provided on the movable seat 142, and the slide seat 22 is fixed on the movable seat 142. The movable seat 142, whereby when the first driver 15 displaces the movable seat 142, the sliding seat 22 also displaces along with the movable seat 142; the actuating part 23 is slidably provided on the movable seat 142, and the injection part 24 is provided on the sliding seat 22. When the two drivers 21 are activated, the actuating part 23 can be displaced along the Z-axis direction and the injection part 24 can inject water liquid. Among them, the second driver 21 includes a motor, a gear, and a screw. The injection part 24 has a pump 241 and a piston 242. The piston 242 is connected to the actuating member 23. When the second driver 21 actuates, the actuating member 23 can be driven to move relative to each other. The seat 142 has a sliding relationship, thereby driving the piston 242 to move relative to the pump 241, so that the water liquid in the pump 241 is ejected.

檢測平台30,係設置於機體10,檢測平台30具有一置放面31,置放面31提供載板1放置,且置放面31設有複數個吸孔311。檢測平台30能夠沿著垂直於Z軸方向之一X軸方向及一Y軸方向位移,以便檢測平台30移至對應於水液注射裝置20下方,使水液注射裝置20向載板1滴落水液,進而檢測載板1表面的水滴角。於本發明實施例中,更包括一第三驅動器90、一第一傳動組件91,第三驅動器90設於第二側部13,第一傳動組件91沿著X軸方向設置並傳動連接於第三驅動器90與檢測平台30之間,第三驅動器90為馬達,第一傳動組件91包括但不限於皮帶、皮帶輪之組合,據此,使檢測平台30能夠沿著X軸方向位移。The detection platform 30 is provided on the machine body 10. The detection platform 30 has a placement surface 31 for placing the carrier plate 1, and the placement surface 31 is provided with a plurality of suction holes 311. The detection platform 30 can be displaced along an X-axis direction and a Y-axis direction perpendicular to the Z-axis direction, so that the detection platform 30 moves to the bottom corresponding to the water injection device 20, so that the water injection device 20 drips water onto the carrier plate 1 liquid, and then detect the water droplet angle on the surface of the carrier plate 1. In the embodiment of the present invention, it further includes a third driver 90 and a first transmission component 91. The third driver 90 is provided on the second side 13. The first transmission component 91 is provided along the X-axis direction and is transmission connected to the second transmission component 91. Between the third driver 90 and the detection platform 30, the third driver 90 is a motor, and the first transmission component 91 includes but is not limited to a combination of belts and pulleys, thereby enabling the detection platform 30 to be displaced along the X-axis direction.

此外,本發明檢測平台30具有一上滑座32及一下滑座33,置放面31設於上滑座32一端。下滑座33沿著X軸方向滑設於底座11並隨著第一傳動組件91傳動而位移,上滑座32另一端滑設於下滑座33上。本發明更包括一第四驅動器92及一第二傳動組件93,第四驅動器92為馬達,第二傳動組件93包括但不限於皮帶、皮帶輪之組合。第四驅動器92與第二傳動組件93係設於底座11與置放面31之間,第二傳動組件93沿著Y軸方向設置並傳動連接於第四驅動器92與上滑座32之間,使上滑座32能夠相對下滑座33於Y軸方向位移。In addition, the detection platform 30 of the present invention has an upper sliding seat 32 and a lower sliding seat 33, and the placement surface 31 is provided at one end of the upper sliding seat 32. The lower seat 33 is slidably mounted on the base 11 along the X-axis direction and moves along with the transmission of the first transmission component 91 . The other end of the upper sliding seat 32 is slidably mounted on the lower seat 33 . The present invention further includes a fourth driver 92 and a second transmission component 93. The fourth driver 92 is a motor, and the second transmission component 93 includes but is not limited to a combination of a belt and a pulley. The fourth driver 92 and the second transmission component 93 are provided between the base 11 and the placement surface 31. The second transmission component 93 is provided along the Y-axis direction and is transmission connected between the fourth driver 92 and the upper sliding seat 32. The upper sliding seat 32 is allowed to displace in the Y-axis direction relative to the lower sliding seat 33 .

真空吸力裝置40,係設置於機體10,且氣體連通於所述吸孔311並提供真空吸力,而能夠吸附載板1。藉此透過此真空吸附方式,而能使載板1穩定地被吸附於置放面31,即便當載板1略有翹曲,也能夠使載板1平整地被吸附住,有利於後續的水滴角測量作業。於本發明實施例中,更包括複數個真空吸嘴34(如圖1及圖4所示),所述真空吸嘴34分別氣體連通設置於所述吸孔311,且每一個真空吸嘴34具有一第一端341、一第二端342及一位於第一端341及第二端342之間的彈性伸縮部343,第一端341係分別氣體連通設置於吸孔311,當真空吸力裝置40運作時,而能使第二端342吸附載板1(如圖5所示),且於本發明實施例中,當載板1被吸附於檢測平台30時,真空吸嘴34能縮入吸孔311內,以便使載板1平貼於置放面31。藉此,當載板1的翹曲程度較大時,載板1與置放面31之間的距離較大,此時能夠透過真空吸嘴34之彈性伸縮部343作為所述距離之補償,使真空吸嘴34依舊能夠將載板1平整地吸附住,以便克服載板1不平整而不易被吸附住的問題。The vacuum suction device 40 is disposed on the body 10 , and the gas is connected to the suction hole 311 to provide vacuum suction, so that the carrier plate 1 can be adsorbed. In this way, the carrier plate 1 can be stably adsorbed on the placement surface 31 through this vacuum adsorption method. Even when the carrier plate 1 is slightly warped, the carrier plate 1 can be adsorbed flatly, which is beneficial to subsequent operations. Water drop angle measurement operation. In the embodiment of the present invention, a plurality of vacuum nozzles 34 (as shown in FIGS. 1 and 4 ) are further included. The vacuum nozzles 34 are respectively arranged in gas communication with the suction holes 311 , and each vacuum nozzle 34 It has a first end 341, a second end 342 and an elastic telescopic part 343 between the first end 341 and the second end 342. The first end 341 is respectively arranged in gas communication with the suction hole 311. When the vacuum suction device 40 is in operation, the second end 342 can adsorb the carrier plate 1 (as shown in Figure 5), and in the embodiment of the present invention, when the carrier plate 1 is adsorbed on the detection platform 30, the vacuum nozzle 34 can be retracted into the suction hole 311 so that the carrier plate 1 is flat against the placement surface 31 . Therefore, when the degree of warpage of the carrier plate 1 is large, the distance between the carrier plate 1 and the placement surface 31 is relatively large. At this time, the elastic expansion and contraction portion 343 of the vacuum nozzle 34 can be used as compensation for the distance. The vacuum nozzle 34 is still able to adsorb the carrier plate 1 flatly, so as to overcome the problem that the carrier plate 1 is uneven and difficult to be adsorbed.

光源裝置50與攝像裝置60分別設置於機體10的兩側,且光源裝置50能朝向載板1投射光射,以便於攝像裝置60擷取水液滴落於載板1上的影像。The light source device 50 and the camera device 60 are respectively disposed on both sides of the body 10 , and the light source device 50 can project light toward the carrier plate 1 so that the camera device 60 can capture images of water droplets falling on the carrier plate 1 .

顯示裝置70,係與攝像裝置60電性連接,係根據所述影像,而用以計算顯示載板1之水滴角,以達到量測載板1之水滴角的目的。其中,顯示裝置70可以內置於機體10或是外接於機體10。The display device 70 is electrically connected to the camera device 60 and is used to calculate the water drop angle of the display carrier 1 based on the image, so as to achieve the purpose of measuring the water drop angle of the carrier board 1 . The display device 70 can be built into the body 10 or externally connected to the body 10 .

於本發明另一實施例中,置放面31凹設有一感測孔35,感測孔35設有一感測件36,用以感測載板1是否位於置放面31上(如圖4所示)。In another embodiment of the present invention, the placement surface 31 is recessed with a sensing hole 35, and the sensing hole 35 is provided with a sensing element 36 for sensing whether the carrier board 1 is located on the placement surface 31 (as shown in Figure 4 shown).

控制裝置80,係設置於機體10,控制裝置80電性連接於感測件36與真空吸力裝置40,當感測件36偵測到載板1位於置放面31上時,控制裝置80控制真空吸力裝置40開始運作,以便真空吸力裝置40使真空吸嘴34產生真空吸力而吸附載板1於置放面31上。於本發明實施例中,控制裝置80也電性連接於第一驅動器15、第二驅動器21、第三驅動器90、第四驅動器92、光源裝置50、攝像裝置60及顯示裝置70,並控制所述構件之運作,其中控制裝置80具有一設定模組81及一偵測模組82,該設定模組81能夠設定一預設閾值,偵測模組82用以偵測真空吸力裝置40所提供所述吸孔311之吸力值,當其中一個吸孔311之吸力值與預設閾值有差異時,控制裝置80則控制真空吸力裝置40停止運作。舉例來說,當其一吸孔311之吸力值小於預設閾值,即代表所述吸孔311與所述真空吸嘴34與載板1之間有漏氣情形,如此一來即無法將載板1平整吸附於置放面31上,因此透過控制裝置80使真空吸力裝置40停止運作,以便工作人員進行檢修作業,避免載板1無法平整地被吸附於置放面31上的問題。當然的,為了降低成本,單一真空吸力裝置40可以連通所有的吸孔311,而偵測模組82亦可以直接量測該真空吸力裝置40的吸力值,只要任何單一吸孔311未吸附到載板,偵測模組82所偵測到的吸力值便會發生異常,例如吸力值會小於預設閾值,藉此便可以發現異常狀態而進行檢修處理。The control device 80 is installed on the machine body 10. The control device 80 is electrically connected to the sensing component 36 and the vacuum suction device 40. When the sensing component 36 detects that the carrier plate 1 is located on the placement surface 31, the control device 80 controls The vacuum suction device 40 starts to operate, so that the vacuum suction device 40 causes the vacuum suction nozzle 34 to generate vacuum suction to adsorb the carrier plate 1 on the placement surface 31 . In the embodiment of the present invention, the control device 80 is also electrically connected to the first driver 15, the second driver 21, the third driver 90, the fourth driver 92, the light source device 50, the camera device 60 and the display device 70, and controls all of them. In the operation of the above components, the control device 80 has a setting module 81 and a detection module 82. The setting module 81 can set a preset threshold, and the detection module 82 is used to detect the pressure provided by the vacuum suction device 40. When the suction value of one of the suction holes 311 is different from the preset threshold, the control device 80 controls the vacuum suction device 40 to stop operating. For example, when the suction value of one of the suction holes 311 is less than a preset threshold, it means that there is air leakage between the suction hole 311 , the vacuum nozzle 34 and the carrier plate 1 . As a result, the carrier cannot be removed. The plate 1 is flat and adsorbed on the placement surface 31, so the vacuum suction device 40 is stopped through the control device 80 so that the staff can perform maintenance operations to avoid the problem that the carrier plate 1 cannot be adsorbed flatly on the placement surface 31. Of course, in order to reduce costs, a single vacuum suction device 40 can be connected to all suction holes 311, and the detection module 82 can also directly measure the suction value of the vacuum suction device 40, as long as any single suction hole 311 does not adsorb to the load. board, the suction value detected by the detection module 82 will be abnormal, for example, the suction value will be less than a preset threshold, so that the abnormal state can be discovered and repaired.

於本發明另一實施例中,置放面31於感測孔35外側凹設有一U字形之避讓槽37,讓機械手臂在搬運載板1時,機械手臂能夠伸入避讓槽37,而使機械手臂便於取放載板1。但本申請案中並不限制避讓槽37之形狀,只要能夠讓機械手臂方便進行載板1之置放即可。In another embodiment of the present invention, the placement surface 31 is recessed with a U-shaped escape groove 37 outside the sensing hole 35, so that when the robot arm is carrying the carrier plate 1, the robot arm can extend into the escape groove 37, so that The robotic arm is convenient for picking up and placing the carrier board 1. However, the shape of the escape groove 37 is not limited in this application, as long as the robot arm can conveniently place the carrier plate 1 .

於本發明另一實施例中,第一側部12具有一腔室121,光源裝置50設於腔室121內,光源裝置50包括一發光件51、一沿著Z軸方向設置的立桿52及一調整件53,發光件51設於調整件53,調整件53能夠選擇性定位於立桿52上,並沿著立桿52之高度位移調整。其中,調整件53包括一夾座531及一螺件532,夾座531夾設於立桿52,螺件532係螺設於夾座531,而使夾座531能夠沿著立桿52之高度位移調整。藉此,工作人員能夠依據載板1的厚度進行調整發光件51之高度位置,以利於攝像裝置60擷取水液滴落於載板1上的影像。In another embodiment of the present invention, the first side part 12 has a cavity 121, and the light source device 50 is disposed in the cavity 121. The light source device 50 includes a light-emitting component 51 and a vertical rod 52 disposed along the Z-axis direction. and an adjusting member 53. The light-emitting member 51 is provided on the adjusting member 53. The adjusting member 53 can be selectively positioned on the upright pole 52 and adjusted along the height displacement of the upright pole 52. Among them, the adjusting member 53 includes a clamping base 531 and a screw 532. The clamping base 531 is clamped on the vertical pole 52, and the screw 532 is screwed on the clamping base 531 so that the clamping base 531 can move along the height of the vertical pole 52. Displacement adjustment. Thereby, the staff can adjust the height position of the light-emitting element 51 according to the thickness of the carrier board 1, so as to facilitate the camera device 60 to capture the image of the water droplets falling on the carrier board 1.

綜合前述,本發明具有以下優點:Based on the foregoing, the present invention has the following advantages:

1.本發明以真空吸力而將載板1吸附於檢測平台30上,以確保載板1不會有翹曲之情形,而能準確地量測載板1表面的水滴角。1. The present invention uses vacuum suction to adsorb the carrier plate 1 to the detection platform 30 to ensure that the carrier plate 1 will not warp and can accurately measure the water droplet angle on the surface of the carrier plate 1 .

2.本發明透過具有彈性伸縮部343的真空吸嘴34來吸附載板1,而能夠補償載板1與置放面31之間的距離,以使載板1一部分翹曲過大時,也能夠被真空吸嘴34吸附於檢測平台30上,並維持平整的狀態,便於檢測載板1的水滴角。2. The present invention absorbs the carrier plate 1 through the vacuum nozzle 34 with the elastic expansion and contraction portion 343, thereby compensating the distance between the carrier plate 1 and the placement surface 31, so that when a part of the carrier plate 1 is too warped, it can It is adsorbed on the detection platform 30 by the vacuum suction nozzle 34 and maintained in a flat state to facilitate detection of the water droplet angle of the carrier plate 1 .

3.本發明能夠作三維移動與控制,以將水液滴在載板1的不同位置上,增加量測的便利性。3. The present invention can perform three-dimensional movement and control to drop water droplets on different positions of the carrier plate 1, thereby increasing the convenience of measurement.

4.藉由偵測模組82的設置,可確認載板1是否有完整的被吸附平貼於檢測平台30上,減少檢測水滴角之數值不準確的問題。4. Through the setting of the detection module 82, it can be confirmed whether the carrier plate 1 is completely adsorbed and flatly attached to the detection platform 30, thereby reducing the problem of inaccurate values of the detected water droplet angle.

5.藉由感測件36與偵測模組82的搭配使用,一方面要確認載板1有確實進入檢測平台30,另一方面並確認載板1有平整被吸附於檢測平台30上,避免自動檢測發生檢測錯誤的問題。5. Through the combination of the sensing element 36 and the detection module 82, on the one hand, it is necessary to confirm that the carrier plate 1 has indeed entered the detection platform 30, and on the other hand, it is necessary to confirm that the carrier plate 1 is flat and adsorbed on the detection platform 30. Avoid detection errors in automatic detection.

以上,雖然本發明是以一個最佳實施例作說明,精於此技藝者能在不脫離本發明精神與範疇下作各種不同形式的改變。前述所舉實施例僅用以說明本發明而已,非用以限制本發明之範圍。舉凡不違本發明精神所從事的種種修改或改變,俱屬本發明申請專利範圍。Although the present invention has been described with a preferred embodiment, those skilled in the art can make various modifications without departing from the spirit and scope of the present invention. The aforementioned embodiments are only used to illustrate the present invention and are not intended to limit the scope of the present invention. All modifications or changes that do not violate the spirit of the present invention fall within the scope of the patent application of the present invention.

100:水滴角量測機                                  10:機體 11:底座                                                          12:第一側部 121:腔室                                                 13:第二側部 14:橫架部                                                141:固定座 142:活動座                                              15:第一驅動器 20:水液注射裝置                                    21:第二驅動器 22:滑座                                                          23:作動件 24:注射件                                                241:唧筒 242:活塞                                                 30:檢測平台 31:置放面                                                311:吸孔 32:上滑座                                                33:下滑座 34:真空吸嘴                                            341:第一端 342:第二端                                              343:彈性伸縮部 35:感測孔                                                36:感測件 37:避讓槽                                                40:真空吸力裝置 50:光源裝置                                            51:發光件 52:立桿                                                          53:調整件 531:夾座                                                 532:螺件 60:攝像裝置                                            70:顯示裝置 80:控制裝置                                            81:設定模組 82:偵測模組                                            90:第三驅動器 91:第一傳動組件                                    92:第四驅動器 93:第二傳動組件                                    1:載板 X、Y、Z:軸 100: Water drop angle measuring machine 10: Machine body 11: Base 12: First side 121: chamber 14: Horizontal frame part 141: Fixed seat 142: Movable seat 15: First drive 20: Water injection device 21: Second drive 22: Slide 23: Motor parts 24:Injection parts 241:Pump 242:Piston 30:Detection platform 31: Placement surface 311: Suction hole 32: Upper sliding seat 33: Lowering seat 34: Vacuum nozzle 341: First end 342: Second end 343: Elastic expansion and contraction part 35: Sensing hole 36: Sensing piece 37: Avoidance trough 40: Vacuum suction device 50: Light source device 51: Light-emitting parts 52: Vertical pole 531: Clamp seat                               532: Screws 60:Camera device 70:Display device 80: Control device                                                                                                     81: Setting module 82: Detection module                     90: Third drive 91: First transmission assembly 92: Fourth drive 93: Second transmission assembly 1: Carrier plate X, Y, Z: axis

[圖1]為本發明水滴角量測機的立體外觀示意圖。 [圖2]為本發明水滴角量測機的方塊示意圖。 [圖3]為本發明水滴角量測機的前側示意圖。 [圖4]為本發明水滴角量測機吸附載板示意圖,顯示載板置放於檢測平台之置放面上且尚未被吸附。 [圖5]為本發明水滴角量測機吸附載板示意圖,顯示載板置放於檢測平台之置放面上且被真空吸力所吸附。 [Fig. 1] is a schematic three-dimensional appearance diagram of the water droplet angle measuring machine of the present invention. [Fig. 2] is a block diagram of the water drop angle measuring machine of the present invention. [Fig. 3] is a schematic diagram of the front side of the water droplet angle measuring machine of the present invention. [Figure 4] is a schematic diagram of the water drop angle measuring machine adsorbing the carrier plate according to the present invention, showing that the carrier plate is placed on the placement surface of the detection platform and has not yet been adsorbed. [Figure 5] is a schematic diagram of the water drop angle measuring machine adsorbing the carrier plate according to the present invention, showing that the carrier plate is placed on the placement surface of the detection platform and is adsorbed by vacuum suction.

100:水滴角量測機 100: Water drop angle measuring machine

10:機體 10: Body

11:底座 11: Base

12:第一側部 12:First side

13:第二側部 13:Second side

14:橫架部 14:Horizontal frame

141:固定座 141: Fixed seat

142:活動座 142: Movable seat

15:第一驅動器 15: First drive

20:水液注射裝置 20:Water liquid injection device

21:第二驅動器 21: Second drive

22:滑座 22:Sliding seat

23:作動件 23:Actuating parts

24:注射件 24:Injection parts

30:檢測平台 30:Detection platform

31:置放面 31: Placement surface

311:吸孔 311:Suction hole

32:上滑座 32: Upper slide seat

33:下滑座 33: Lower seat

34:真空吸嘴 34: Vacuum nozzle

35:感測孔 35: Sensing hole

37:避讓槽 37: Avoidance slot

50:光源裝置 50:Light source device

60:攝像裝置 60:Camera device

91:第一傳動組件 91:First transmission component

92:第四驅動器 92: Fourth Drive

93:第二傳動組件 93: Second transmission assembly

X、Y、Z:軸 X, Y, Z: axis

Claims (11)

一種水滴角量測機,其用以對一載板進行水滴角量測,該水滴角量測機包括:一機體;一水液注射裝置,係設置於該機體,且該水液注射裝置能夠沿著一Z軸方向位移;一檢測平台,係設置於該機體,該檢測平台具有一置放面,該置放面提供該載板放置,該置放面設有複數個吸孔,該檢測平台能夠沿著垂直於該Z軸方向之一X軸方向及一Y軸方向位移,以便該檢測平台移至對應於該水液注射裝置下方,使該水液注射裝置向該載板滴落水液;一真空吸力裝置,係設置於該機體,且氣體連通於該些吸孔並提供真空吸力,而能夠吸附該載板;一光源裝置,係設置於該機體一側;一攝像裝置,係設置於該機體另一側,並與該光源裝置相對應,該攝像裝置用以擷取水液滴落於該載板上的影像;以及複數個真空吸嘴,該些真空吸嘴分別氣體連通設置於該些吸孔,且該每一個真空吸嘴具有一第一端、一第二端及一位於該第一端及該第二端之間的彈性伸縮部,該等第一端係分別氣體連通設置於該些吸孔,該等第二端則能夠吸附該載板,當該載板被吸附於該檢測平台時,該些真空吸嘴能縮入該些吸孔內。 A water drop angle measuring machine is used to measure the water drop angle of a carrier plate. The water drop angle measuring machine includes: a body; a water liquid injection device, which is provided on the body, and the water liquid injection device can Displace along a Z-axis direction; a detection platform is provided on the machine body. The detection platform has a placement surface for placing the carrier plate. The placement surface is provided with a plurality of suction holes. The detection platform The platform can be displaced along an X-axis direction and a Y-axis direction perpendicular to the Z-axis direction, so that the detection platform moves to the bottom corresponding to the water injection device, so that the water injection device drips water onto the carrier plate ; A vacuum suction device is provided on the body, and gas is connected to the suction holes and provides vacuum suction to be able to adsorb the carrier plate; a light source device is provided on one side of the body; a camera device is provided On the other side of the body and corresponding to the light source device, the camera device is used to capture images of water droplets falling on the carrier plate; and a plurality of vacuum nozzles, which are respectively arranged in gas communication. These suction holes, and each vacuum suction nozzle has a first end, a second end and an elastic expansion and contraction part between the first end and the second end, and the first ends are in gas communication respectively. Disposed on the suction holes, the second ends can adsorb the carrier plate. When the carrier plate is adsorbed on the detection platform, the vacuum nozzles can retract into the suction holes. 如請求項1所述之水滴角量測機,其中,該置放面設有一感測孔,該感測孔設有一感測件,用以感測該載板是否位於該置放面上。 The water drop angle measuring machine of claim 1, wherein the placement surface is provided with a sensing hole, and the sensing hole is provided with a sensing component for sensing whether the carrier plate is located on the placement surface. 如請求項2所述之水滴角量測機,其中,該置放面於該感測孔外側凹設有一避讓槽。 The water drop angle measuring machine as claimed in claim 2, wherein the placement surface is concavely provided with an escape groove outside the sensing hole. 如請求項2所述之水滴角量測機,更包括一控制裝置設置於該機體,該控制裝置電性連接於該感測件與該真空吸力裝置,當該感測件偵測到該載板位於該置放面上時,該控制裝置控制該真空吸力裝置開始運作。 The water drop angle measuring machine as described in claim 2 further includes a control device disposed on the body, the control device is electrically connected to the sensing component and the vacuum suction device, when the sensing component detects the load When the board is on the placement surface, the control device controls the vacuum suction device to start operating. 如請求項4所述之水滴角量測機,其中,該控制裝置具有一設定模組及一偵測模組,該設定模組能夠設定一預設閾值,該偵測模組用以偵測該真空吸力裝置所提供該些吸孔之吸力值,當該其中一個吸孔之吸力值與該預設閾值有差異時,該控制裝置則控制該真空吸力裝置停止運作;該攝像裝置電性連接一顯示裝置,用以計算顯示該載板之水滴角。 The water drop angle measuring machine as described in claim 4, wherein the control device has a setting module and a detection module, the setting module can set a preset threshold, and the detection module is used to detect The vacuum suction device provides a suction value of the suction holes. When the suction value of one of the suction holes is different from the preset threshold, the control device controls the vacuum suction device to stop operating; the camera device is electrically connected A display device used to calculate and display the water drop angle of the carrier plate. 如請求項1所述之水滴角量測機,其中,該機體包括一底座、一第一側部、一第二側部及一橫架部,該第一側部與該第二側部分別立設於該底座的兩側,該橫架部設於該第一側部與該第二側部之間,該水液注射裝置設於該橫架部,該光源裝置設於該第一側部,該攝像裝置設於該第二側部,該檢測平台設於該底座。 The water drop angle measuring machine as claimed in claim 1, wherein the body includes a base, a first side, a second side and a transverse frame, and the first side and the second side are respectively Standing on both sides of the base, the cross frame is provided between the first side and the second side, the water injection device is provided on the cross frame, and the light source device is provided on the first side part, the camera device is provided on the second side, and the detection platform is provided on the base. 如請求項6所述之水滴角量測機,其中,該第一側部具有一腔室,該光源裝置設於該腔室內,該光源裝置包括一發光件、一沿著該Z軸方向設置的立桿及一調整件,該發光件設於該調整件,該調整件能夠選擇性定位於該立桿上,並沿著該立桿之高度位移調整。 The water drop angle measuring machine as claimed in claim 6, wherein the first side has a chamber, the light source device is disposed in the chamber, the light source device includes a light-emitting element, a light source disposed along the Z-axis direction A vertical pole and an adjusting member, the light-emitting member is provided on the adjusting member, and the adjusting member can be selectively positioned on the vertical pole and adjusted along the height displacement of the vertical pole. 如請求項7所述之水滴角量測機,其中,該調整件包括一夾座及一螺件,該夾座夾設於該立桿,該螺件係螺設於該夾座,而使該夾座能夠沿著該立桿之高度位移調整。 The water drop angle measuring machine as described in claim 7, wherein the adjusting member includes a clamp base and a screw. The clamp base is clamped on the vertical rod, and the screw is screwed on the clamp base, so that The clamp base can be adjusted along the height displacement of the vertical pole. 如請求項6所述之水滴角量測機,該橫架部包括一固定座及一滑設於該固定座之活動座,該機體包括一第一驅動器,該第一驅動器設於該活動座,該第一驅動器作動時能夠使該活動座相對該固定座沿該Z軸方向位移;該水液注射裝置包括一第二驅動器、一滑座、一作動件及一注射件,該第二驅動器設於該活動座,該滑座固設於該活動座,該作動件滑設於該活動座,該注射件設於該滑座,該第二驅動器作動時能夠使該作動件沿該Z軸方向位移,並使該注射件射出水液。 As for the water drop angle measuring machine described in claim 6, the horizontal frame part includes a fixed base and a movable base slidably installed on the fixed base, the body includes a first driver, and the first driver is located on the movable base , when the first driver is activated, the movable seat can be displaced along the Z-axis direction relative to the fixed seat; the water liquid injection device includes a second driver, a sliding seat, an actuating part and an injection part. The second driver It is provided on the movable seat, the slide seat is fixed on the movable seat, the actuator is slidably provided on the movable seat, the injection part is provided on the slide seat, and when the second driver is activated, the actuator can be moved along the Z-axis The injection part is displaced in the direction and causes the injection part to eject water liquid. 如請求項9所述之水滴角量測機,更包括一第三驅動器及一第一傳動組件,該第三驅動器設於該第二側部,該第一傳動組件沿著該X軸方向設置並傳動連接於該第三驅動器與該檢測平台之間。 The water drop angle measuring machine according to claim 9, further comprising a third driver and a first transmission component, the third driver is provided on the second side, and the first transmission component is provided along the X-axis direction. and is drivingly connected between the third driver and the detection platform. 如請求項10所述之水滴角量測機,更包括一第四驅動器及一第二傳動組件,該檢測平台具有一上滑座及一下滑座,該置放面設於該上滑座一端,該下滑座沿著該X軸方向滑設於該底座並隨著該第一傳動組件傳動而位移,該上滑座另一端滑設於該下滑座上,該第四驅動器與該第二傳動組件設於該底座與該置放面之間,該第二傳動組件沿著該Y軸方向設置並傳動連接於該第四驅動器與該上滑座之間,使該上滑座能夠相對該下滑座於該Y軸方向位移。 The water drop angle measuring machine as described in claim 10 further includes a fourth driver and a second transmission component, the detection platform has an upper sliding seat and a lower sliding seat, and the placement surface is provided at one end of the upper sliding seat. , the lower seat is slidably mounted on the base along the The component is disposed between the base and the placement surface. The second transmission component is disposed along the Y-axis direction and is drivingly connected between the fourth driver and the upper sliding seat so that the upper sliding seat can slide downward relative to the The seat is displaced in the Y-axis direction.
TW111101503A 2022-01-13 2022-01-13 Contact angle measuring machine TWI834108B (en)

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* Cited by examiner, † Cited by third party
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JP2002107282A (en) * 2000-09-29 2002-04-10 Canon Inc Measuring device for contact angle
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JP2010060379A (en) * 2008-09-02 2010-03-18 Fujifilm Corp Contact angle measuring system and contact angle measuring method
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