TWI832646B - Package plate and method of making thereof - Google Patents

Package plate and method of making thereof Download PDF

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TWI832646B
TWI832646B TW111150808A TW111150808A TWI832646B TW I832646 B TWI832646 B TW I832646B TW 111150808 A TW111150808 A TW 111150808A TW 111150808 A TW111150808 A TW 111150808A TW I832646 B TWI832646 B TW I832646B
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Taiwan
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trench
manufacturing
shielding material
packaging
substrate
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TW111150808A
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TW202428087A (en
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張磊
丁夢蝶
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大陸商環維電子(上海)有限公司
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Abstract

A manufacturing method of a package plate is provided. The manufacturing method of a package plate including providing a substrate, and a composite material layer is provided on the surface of the substrate. In the scribing step, at least one groove is formed in the composite material layer by means of a laser. In the spraying step, the shielding material is sprayed directly toward the at least one groove, and the shielding material forms a deposition layer attached to the surface of the at least one groove. In the cutting step, a cutting path is preset on the outside of the groove, and another laser means is used to cut the substrate along the cutting path to obtain a package plate.

Description

封裝板塊以及其製作方法Packaging plate and its manufacturing method

本發明涉及一種封裝板塊的製作方法,特別是涉及一種具有屏蔽材料層的封裝板塊的製作方法。 The present invention relates to a method for manufacturing a packaging panel, and in particular to a method for manufacturing a packaging panel with a shielding material layer.

隨著科技演進,電子產品內的電子元件因用戶的需求,常需要有屏蔽磁場的機制。例如天線即在其基板上設置有屏蔽層。 With the evolution of technology, electronic components in electronic products often require mechanisms to shield magnetic fields due to user needs. For example, an antenna is provided with a shielding layer on its substrate.

現有的屏蔽層設置技術是對基板整體噴塗電磁屏蔽材料,然而,對於特定區域(選擇性區域)才需要屏蔽材料的產品而言,必須藉由保護層或遮罩遮擋無須噴塗的區域,如此即增加了製程的工序以及成本。 The existing shielding layer setting technology is to spray electromagnetic shielding material on the entire substrate. However, for products that require shielding material only in specific areas (selective areas), the areas that do not need to be sprayed must be covered by a protective layer or mask, that is, Increased manufacturing steps and costs.

故,如何通過製程技術的改良,來提升噴塗屏蔽材料的使用,簡化工序以及節省製造成本,以克服上述的缺陷,已成為該項事業所欲解決的重要課題之一。 Therefore, how to improve the use of spray shielding materials, simplify the process and save manufacturing costs through the improvement of process technology to overcome the above-mentioned defects has become one of the important issues to be solved by this business.

本發明所要解決的技術問題在於,針對現有技術的不足提供一種封裝板塊的製作方法以及一種封裝板塊。 The technical problem to be solved by the present invention is to provide a method for manufacturing a packaging panel and a packaging panel in view of the shortcomings of the existing technology.

為了解決上述的技術問題,本發明所採用的其中一技術方案是提供一種封裝板塊的製作方法,其包括:提供步驟,提供基板,基板的表面上設有複合材料層。刻劃步驟,以雷射手段在複合材料層中形成至少一溝槽。 噴塗步驟,在至少一溝槽外直接朝向至少一溝槽噴塗一屏蔽材料,屏蔽材料形成一沉積層附著於至少一溝槽的內壁面上。切割步驟,在溝槽外側預設有裁切路徑,以另一雷射手段沿裁切路徑裁切基板,以得到封裝板塊。 In order to solve the above technical problems, one of the technical solutions adopted by the present invention is to provide a method for manufacturing a packaging panel, which includes: providing a substrate, and a composite material layer is provided on the surface of the substrate. In the scribing step, at least one groove is formed in the composite material layer using laser means. In the spraying step, a shielding material is sprayed outside the at least one trench directly toward the at least one trench, and the shielding material forms a deposition layer attached to the inner wall of the at least one trench. In the cutting step, a cutting path is preset outside the trench, and another laser means is used to cut the substrate along the cutting path to obtain a packaging plate.

在一可行的實施例中,屏蔽材料包括表面活性劑。 In one possible embodiment, the barrier material includes a surfactant.

在一可行的實施例中,封裝板塊的製作方法進一步包括吹除步驟,在執行噴塗步驟後,吹除基板的表面,以吹除部分屏蔽材料於至少一溝槽外沉積的餘留層。 In a possible embodiment, the manufacturing method of the packaging board further includes a blowing step. After performing the spraying step, blowing off the surface of the substrate to blow off a portion of the remaining layer of shielding material deposited outside at least one trench.

在一可行的實施例中,進一步包括吹除步驟,在執行切割步驟後,吹除基板的表面,以吹除部分屏蔽材料於至少一溝槽外沉積的餘留層。 In a possible embodiment, a blowing step is further included. After the cutting step is performed, the surface of the substrate is blown away to blow away the remaining layer of a portion of the shielding material deposited outside the at least one trench.

在一可行的實施例中,吹除步驟係以乾冰進行吹除。 In a possible embodiment, the blowing step is performed using dry ice.

在一可行的實施例中,溝槽的深度為大於等於5μm。 In a feasible embodiment, the depth of the trench is greater than or equal to 5 μm.

在一可行的實施例中,沉積層的厚度為小於等於5μm。 In a feasible embodiment, the thickness of the deposited layer is less than or equal to 5 μm.

在一可行的實施例中,屏蔽材料包括多個銅粉,其在整體屏蔽材料的占比為90%以上。 In a feasible embodiment, the shielding material includes a plurality of copper powders, which account for more than 90% of the entire shielding material.

為了解決上述的技術問題,本發明還採用的其中一技術方案是提供一種封裝板塊,包括基板、複合材料層及沉積層。複合材料層位於基板上,複合材料層開設有至少一溝槽,在一縱向上溝槽深度為大於等於5μm。沉積層位於溝槽內,沉積層於縱向上的厚度為小於等於5μm,且沉積層由屏蔽材料構成。 In order to solve the above technical problems, one of the technical solutions adopted by the present invention is to provide a packaging plate, which includes a substrate, a composite material layer and a deposition layer. The composite material layer is located on the substrate. The composite material layer is provided with at least one groove, and the depth of the groove in a longitudinal direction is greater than or equal to 5 μm. The deposition layer is located in the trench, the thickness of the deposition layer in the longitudinal direction is less than or equal to 5 μm, and the deposition layer is composed of a shielding material.

本發明的其中一有益效果在於,本發明所提供的封裝板塊的製作方法,其能通過“直接朝向至少一溝槽噴塗屏蔽材料”以及“屏蔽材料形成沉積層附著於至少一溝槽的內壁面上”的技術方案,以減少系統封裝(SiP:System in a Package)的工序,以及節省製程成本。 One of the beneficial effects of the present invention is that the manufacturing method of the packaging plate provided by the present invention can be achieved by "spraying shielding material directly toward at least one trench" and "shielding material forming a deposition layer attached to the inner wall surface of at least one trench" "On" technical solutions to reduce the process of system packaging (SiP: System in a Package) and save process costs.

為使能更進一步瞭解本發明的特徵及技術內容,請參閱以下有 關本發明的詳細說明與圖式,然而所提供的圖式僅用於提供參考與說明,並非用來對本發明加以限制。 In order to further understand the features and technical content of the present invention, please refer to the following Regarding the detailed description and drawings of the present invention, the drawings provided are only for reference and illustration and are not used to limit the present invention.

200:封裝板塊 200:Packaging section

22:基板 22:Substrate

24:複合材料層 24:Composite material layer

241:溝槽 241:Trench

26:沉積層 26:Sediment layer

261:餘留層 261:Remaining layer

D:深度 D: Depth

H:厚度 H:Thickness

P:裁切路徑 P: clipping path

S100,S100’:封裝板塊的製作方法 S100, S100’: Manufacturing method of packaging plate

S1-S4:步驟 S1-S4: Steps

S10:步驟 S10: Steps

圖1為本發明第一實施例提供一種封裝板塊的製作方法之步驟流程圖。 FIG. 1 is a flow chart of a method for manufacturing a packaging panel according to a first embodiment of the present invention.

圖2為對應圖1所示實施例之步驟S1示意圖。 FIG. 2 is a schematic diagram corresponding to step S1 of the embodiment shown in FIG. 1 .

圖3為對應圖1所示實施例之步驟S2示意圖。 FIG. 3 is a schematic diagram corresponding to step S2 of the embodiment shown in FIG. 1 .

圖4為對應圖1所示實施例之步驟S3示意圖。 FIG. 4 is a schematic diagram corresponding to step S3 of the embodiment shown in FIG. 1 .

圖5為對應圖1所示實施例之步驟S4示意圖。 FIG. 5 is a schematic diagram corresponding to step S4 of the embodiment shown in FIG. 1 .

圖6為圖3所示實施例中溝槽的示意圖。 FIG. 6 is a schematic diagram of the trench in the embodiment shown in FIG. 3 .

圖7為本發明一實施例之封裝板塊之外觀示意圖。 FIG. 7 is a schematic diagram of the appearance of a packaging module according to an embodiment of the present invention.

圖8為圖7所示實施例中,以Ⅷ-Ⅷ為截線之示意圖。 FIG. 8 is a schematic diagram taking VIII-VIII as a cross-section in the embodiment shown in FIG. 7 .

圖9為本發明第二實施例提供一種封裝板塊的製作方法之步驟流程圖。 FIG. 9 is a flow chart of a method for manufacturing a packaging panel according to a second embodiment of the present invention.

圖10為對應圖9所示實施例中,經步驟S3後,沉積層之示意圖。 FIG. 10 is a schematic diagram of the deposited layer after step S3 in the embodiment shown in FIG. 9 .

圖11為對應圖9所示實施例中,經步驟S10後,沉積層之示意圖。 FIG. 11 is a schematic diagram of the deposited layer after step S10 in the embodiment shown in FIG. 9 .

以下是通過特定的具體實施例來說明本發明所公開有關“封裝板塊的製作方法”的實施方式,本領域技術人員可由本說明書所公開的內容瞭解本發明的優點與效果。本發明可通過其他不同的具體實施例加以施行或應用,本說明書中的各項細節也可基於不同觀點與應用,在不背離本發明的構思下進行各種修改與變更。另外,本發明的附圖僅為簡單示意說明,並非 依實際尺寸的描繪,事先聲明。以下的實施方式將進一步詳細說明本發明的相關技術內容,但所公開的內容並非用以限制本發明的保護範圍。 The following is a specific embodiment to illustrate the implementation of the "packaging plate manufacturing method" disclosed in the present invention. Those skilled in the art can understand the advantages and effects of the present invention from the content disclosed in this specification. The present invention can be implemented or applied through other different specific embodiments, and various details in this specification can also be modified and changed based on different viewpoints and applications without departing from the concept of the present invention. In addition, the drawings of the present invention are only simple schematic illustrations and are not Depiction of actual size, stated in advance. The following embodiments will further describe the relevant technical content of the present invention in detail, but the disclosed content is not intended to limit the scope of the present invention.

另外,本文中所使用的術語“或”,應視實際情況可能包括相關聯的列出項目中的任一個或者多個的組合。 In addition, the term "or" used in this article shall include any one or combination of more of the associated listed items depending on the actual situation.

[第一實施例] [First Embodiment]

請參閱圖1,為本發明第一實施例提供一種封裝板塊的製作方法S100之步驟流程圖。併同參閱圖2至圖5,圖2為對應圖1所示實施例之步驟S1示意圖。圖3為對應圖1所示實施例之步驟S2示意圖。圖4為對應圖1所示實施例之步驟S3示意圖。圖5為對應圖1所示實施例之步驟S4示意圖。 Please refer to FIG. 1 , which is a step flow chart of a packaging module manufacturing method S100 according to the first embodiment of the present invention. Referring also to FIGS. 2 to 5 , FIG. 2 is a schematic diagram corresponding to step S1 of the embodiment shown in FIG. 1 . FIG. 3 is a schematic diagram corresponding to step S2 of the embodiment shown in FIG. 1 . FIG. 4 is a schematic diagram corresponding to step S3 of the embodiment shown in FIG. 1 . FIG. 5 is a schematic diagram corresponding to step S4 of the embodiment shown in FIG. 1 .

封裝板塊的製作方法S100包括下列步驟:提供步驟S1:提供基板22,基板22的表面上設有複合材料層24。刻劃步驟S2:以雷射手段在複合材料層24中形成至少一溝槽241。噴塗步驟S3:直接朝向至少一溝槽241噴塗屏蔽材料,屏蔽材料形成沉積層26附著於至少一溝槽241的內壁面上(如圖3及圖4所示,是在溝槽241外直接朝向溝槽241噴塗)。切割步驟S4:在溝槽241外側預設有裁切路徑P,以另一雷射手段沿裁切路徑P裁切基板22,以得到封裝板塊200。 The manufacturing method S100 of the packaging panel includes the following steps: providing step S1: providing a substrate 22 with a composite material layer 24 provided on the surface of the substrate 22. Scoring step S2: Use laser means to form at least one groove 241 in the composite material layer 24. Spraying step S3: Spray the shielding material directly toward at least one trench 241. The shielding material forms a deposition layer 26 attached to the inner wall surface of at least one trench 241 (as shown in FIGS. 3 and 4, directly facing outside the trench 241). Groove 241 spraying). Cutting step S4: A cutting path P is preset outside the trench 241, and another laser means is used to cut the substrate 22 along the cutting path P to obtain the packaging panel 200.

基板22可以是但不限於電木板,依據一些實施例,基板22為玻璃纖維板或塑膠板。基板22上具有複合材料層24,可以是但不限於塑料層,塑料層例如環氧樹酯。在刻劃步驟中,以雷射手段開設溝槽241,可以增加溝槽241內壁面(包括底壁面)的表面粗糙度,使屏蔽材料所形成的沉積層26易於附著在溝槽241的內壁面上。 The substrate 22 may be, but is not limited to, a bakelite board. According to some embodiments, the substrate 22 is a fiberglass board or a plastic board. There is a composite material layer 24 on the substrate 22, which may be but is not limited to a plastic layer, such as epoxy resin. In the scribing step, using laser means to create the trench 241 can increase the surface roughness of the inner wall of the trench 241 (including the bottom wall), so that the deposition layer 26 formed of the shielding material can easily adhere to the inner wall of the trench 241 superior.

請參閱圖6至圖8,圖6為圖3所示實施例中溝槽241的示意圖。圖7為本發明一實施例之封裝板塊200之外觀示意圖。圖8為圖7所示實施例中,以8-8為截線之示意圖。沉積層26的厚度H可能高於、等於或小於溝槽241的深 度D。依據一些實施例,溝槽241的深度D大於等於5μm。依據一些實施例,沉積層26的厚度H為小於6μm,優選的,沉積層26的厚度H小於等於5μm。 Please refer to FIGS. 6 to 8 . FIG. 6 is a schematic diagram of the trench 241 in the embodiment shown in FIG. 3 . FIG. 7 is a schematic diagram of the appearance of the packaging module 200 according to an embodiment of the present invention. FIG. 8 is a schematic diagram of the embodiment shown in FIG. 7 , taking line 8-8 as a cross-section. The thickness H of the deposited layer 26 may be greater than, equal to, or less than the depth of the trench 241 Degree D. According to some embodiments, the depth D of the trench 241 is greater than or equal to 5 μm. According to some embodiments, the thickness H of the deposition layer 26 is less than 6 μm. Preferably, the thickness H of the deposition layer 26 is less than or equal to 5 μm.

依據一些實施例,屏蔽材料的主要成分為銅粉(Cu),銅成分的占比為95%以上,銅粉有較佳的沉積表現(緻密程度高)。在一些實施例中,除了以銅粉為主的屏蔽材料外,另添加表面活性劑,一同噴塗於溝槽241內,如此,相較於沒有添加表面活性劑的屏蔽材料所成形的沉積層26,其可改善沉積層的緻密性。換言之,在屏蔽材料中添加表面活性劑,可以改善銅粉流動及成形中所產生的團聚現象(agglomeration),使沉積層26在溝槽241內分布均勻,如圖8所示。 According to some embodiments, the main component of the shielding material is copper powder (Cu), the copper component accounts for more than 95%, and the copper powder has better deposition performance (high density). In some embodiments, in addition to the shielding material mainly composed of copper powder, surfactant is added and sprayed into the trench 241 together. In this way, compared with the deposition layer 26 formed by the shielding material without adding surfactant, , which can improve the compactness of the deposited layer. In other words, adding surfactant to the shielding material can improve the agglomeration produced during the flow and forming of copper powder, so that the deposition layer 26 can be evenly distributed in the trench 241, as shown in FIG. 8 .

噴塗屏蔽材料與溝槽241的距離以及屏蔽材料的溫度皆會影響銅粉在沉積層26中的緻密性,依據一些實施例,前述的距離為40mm至60mm,依據一些實施例,前述溫度為80度C至100度C。然而本發明並無限制,端視用戶需求而改變前述距離及前述溫度的設定。前述的“噴塗”,依據一些實施例,是指濺鍍(sputtering)。另依據一些實施例,是指噴塗(spray),本發明並無限制。 The distance between the sprayed shielding material and the trench 241 and the temperature of the shielding material will affect the density of the copper powder in the deposition layer 26. According to some embodiments, the aforementioned distance is 40 mm to 60 mm. According to some embodiments, the aforementioned temperature is 80 degrees C to 100 degrees C. However, the present invention is not limited and the distance and temperature settings can be changed depending on the user's needs. The aforementioned "spraying", according to some embodiments, refers to sputtering. According to some embodiments, it refers to spraying, which is not limited by the present invention.

依據一實施例,在沉積層26沉積後,進行高溫高濕試驗,在300小時、溫度85度以及濕度85%的條件下,沉積層26的阻抗維持在0.2歐姆(Ω)以下,且沉積層26與溝槽241仍具有良好的附著關係。依據一實施例,在沉積層26沉積後,進行高溫高濕試驗,在300小時、溫度85度以及濕度85%的條件下,沉積層26的阻抗為0.19歐姆(Ω)。 According to an embodiment, after the deposition layer 26 is deposited, a high-temperature and high-humidity test is performed. Under the conditions of 300 hours, a temperature of 85 degrees, and a humidity of 85%, the impedance of the deposition layer 26 is maintained below 0.2 ohms (Ω), and the deposition layer 26 still has a good adhesion relationship with the groove 241. According to an embodiment, after the deposition layer 26 is deposited, a high temperature and high humidity test is performed. Under the conditions of 300 hours, a temperature of 85 degrees, and a humidity of 85%, the impedance of the deposition layer 26 is 0.19 ohms (Ω).

[第二實施例] [Second Embodiment]

請參閱圖9,為本發明第二實施例提供一種封裝板塊的製作方法S100’之步驟流程圖。併同參閱圖10及圖11,圖10為對應圖9所示實施例中,經步驟S3後,沉積層之示意圖。圖11為對應圖9所示實施例中,經步驟S10後, 沉積層之示意圖。依據此實施例,封裝板塊的製作方法S100進一步包括:吹除步驟S10:在噴塗步驟S3後,吹除基板22的表面,以吹除部分屏蔽材料於至少一溝槽241外沉積的餘留層261。如圖10所示,在屏蔽材料沉積於溝槽241中時,在溝槽241邊界處會產生毛邊現象(burr phenomenon),所述毛邊即為餘留層261,透過吹除步驟,可將餘留層261去除,使基板22上不需要屏蔽材料的表面上不具有屏蔽材料,改善毛邊現象(見圖11)。依據一些實施例,是在切割步驟S4後進行吹除步驟S10,具有同樣改善毛邊現象的效益。 Please refer to FIG. 9 , which provides a step flow chart of a packaging module manufacturing method S100' according to the second embodiment of the present invention. Referring also to FIGS. 10 and 11 , FIG. 10 is a schematic diagram of the deposited layer after step S3 in the embodiment shown in FIG. 9 . Figure 11 corresponds to the embodiment shown in Figure 9. After step S10, Schematic diagram of sedimentary layers. According to this embodiment, the manufacturing method S100 of the packaging panel further includes: blowing step S10: after the spraying step S3, blowing off the surface of the substrate 22 to blow off the remaining layer of the shielding material deposited outside at least one trench 241. 261. As shown in FIG. 10 , when the shielding material is deposited in the trench 241 , a burr phenomenon will occur at the boundary of the trench 241 . The burr phenomenon is the remaining layer 261 . Through the blowing step, the remaining layer 261 can be removed. The remaining layer 261 is removed, so that there is no shielding material on the surface of the substrate 22 that does not require shielding material, thereby improving the burr phenomenon (see Figure 11). According to some embodiments, the blowing step S10 is performed after the cutting step S4, which has the same benefit of improving the burr phenomenon.

優選的,吹除步驟是以乾冰(dry ice)進行吹除,吹除基板22的表面以去除餘留層261。 Preferably, the blowing step uses dry ice to blow off the surface of the substrate 22 to remove the remaining layer 261 .

請再參閱圖7,本發明還提出一實施例之封裝板塊200,封裝板塊200包括基板22、複合材料層24及沉積層26。複合材料層24位於基板22上,複合材料層24開設有至少一溝槽241,在一縱向上溝槽241深度D(見圖6)為大於等於5μm。沉積層26位於溝槽241內,沉積層26於縱向上的厚度H(見圖8)為小於等於5μm,且沉積層26由屏蔽材料構成。關於基板22、複合材料層24及沉積層26的說明請參閱上述。 Please refer to FIG. 7 again. The present invention also provides a packaging module 200 according to an embodiment. The packaging module 200 includes a substrate 22 , a composite material layer 24 and a deposition layer 26 . The composite material layer 24 is located on the substrate 22. The composite material layer 24 is provided with at least one groove 241, and the depth D (see Figure 6) of the groove 241 in a longitudinal direction is greater than or equal to 5 μm. The deposition layer 26 is located in the trench 241. The thickness H (see FIG. 8) of the deposition layer 26 in the longitudinal direction is less than or equal to 5 μm, and the deposition layer 26 is composed of a shielding material. Please refer to the above for descriptions of the substrate 22, the composite material layer 24 and the deposition layer 26.

[實施例的有益效果] [Beneficial effects of the embodiment]

本發明的其中一有益效果在於,本發明所提供的封裝板塊的製作方法S100,其能通過“噴塗步驟,直接朝向至少一溝槽241噴塗一屏蔽材料”以及“屏蔽材料形成沉積層26附著於至少一溝槽241的內壁面上”的技術方案,以減少系統封裝(SiP:System in a Package)的工序,以及節省製程成本。 One of the beneficial effects of the present invention is that the manufacturing method S100 of the packaging plate provided by the present invention can pass through the "spraying step of directly spraying a shielding material toward at least one trench 241" and "the shielding material forming deposition layer 26 is attached to The technical solution is "on the inner wall of at least one trench 241" to reduce the process of system packaging (SiP: System in a Package) and save process costs.

進一步說明,在基板22上不需要屏蔽的區域無須設置保護層或遮罩,依據用戶的需求,以雷射手段刻劃一溝槽241,接以直接噴塗的方式噴塗屏蔽材料於溝槽241內。依據本發明所提供封裝板塊的製作方法S100,所噴 塗的圖形尺寸的公差精度達到±10μm,且沉積層26的厚度H可小於等於5μm,相較於現有技術中,沉積層的厚度約為6至8μm,本發明的封裝板塊的製作方法S100具有突出的技術功效。 To further explain, there is no need to provide a protective layer or mask in the areas on the substrate 22 that do not need to be shielded. According to the user's needs, a groove 241 is carved by laser means, and then the shielding material is sprayed into the groove 241 by direct spraying. . According to the manufacturing method S100 of the packaging plate provided by the present invention, the sprayed The tolerance accuracy of the pattern size of the coating reaches ±10 μm, and the thickness H of the deposition layer 26 can be less than or equal to 5 μm. Compared with the existing technology, the thickness of the deposition layer is about 6 to 8 μm. The manufacturing method S100 of the packaging plate of the present invention has Outstanding technical performance.

以上所公開的內容僅為本發明的優選可行實施例,並非因此侷限本發明的申請專利範圍,所以凡是運用本發明說明書及圖式內容所做的等效技術變化,均包含於本發明的申請專利範圍內。 The contents disclosed above are only preferred and feasible embodiments of the present invention, and do not limit the scope of the patent application of the present invention. Therefore, all equivalent technical changes made by using the description and drawings of the present invention are included in the application of the present invention. within the scope of the patent.

S100:封裝板塊的製作方法 S100: Manufacturing method of packaging plate

S1-S4:步驟 S1-S4: Steps

Claims (9)

一種封裝板塊的製作方法,其包括:一提供步驟,提供一基板,所述基板的表面上設有一複合材料層;一刻劃步驟,以一雷射手段在所述複合材料層中形成至少一溝槽;一噴塗步驟,在所述至少一溝槽外直接朝向所述至少一溝槽噴塗一屏蔽材料,所述屏蔽材料形成一沉積層附著於所述至少一溝槽的內壁面上;以及一切割步驟,在所述溝槽外側預設有一裁切路徑,以另一雷射手段沿所述裁切路徑裁切所述基板,以得到所述封裝板塊。 A method for manufacturing a packaging panel, which includes: a step of providing a substrate with a composite material layer provided on the surface of the substrate; and a scribing step of using a laser to form at least one layer of composite material in the composite material layer. Trench; a spraying step of spraying a shielding material directly outside the at least one trench toward the at least one trench, and the shielding material forms a deposition layer attached to the inner wall of the at least one trench; and In a cutting step, a cutting path is preset outside the trench, and another laser means is used to cut the substrate along the cutting path to obtain the packaging plate. 如請求項1所述的封裝板塊的製作方法,其中在所述噴塗步驟中,還添加一表面活性劑與所述屏蔽材料混合,併同噴塗於所述至少一溝槽。 The manufacturing method of a packaging panel as claimed in claim 1, wherein in the spraying step, a surfactant is added to mix with the shielding material and sprayed on the at least one groove at the same time. 如請求項1所述的封裝板塊的製作方法,進一步包括一吹除步驟,在執行所述噴塗步驟後,吹除所述基板的表面,以吹除部分所述屏蔽材料於所述至少一溝槽外沉積的一餘留層。 The manufacturing method of the packaging board according to claim 1, further comprising a blowing step. After performing the spraying step, blowing off the surface of the substrate to blow off part of the shielding material in the at least one groove. A residual layer deposited outside the tank. 如請求項1所述的封裝板塊的製作方法,進一步包括一吹除步驟,在執行所述切割步驟後,吹除所述基板的表面,以吹除部分所述屏蔽材料於所述至少一溝槽外沉積的一餘留層。 The manufacturing method of the packaging board according to claim 1, further comprising a blowing step. After performing the cutting step, blowing off the surface of the substrate to blow off part of the shielding material in the at least one groove. A residual layer deposited outside the tank. 如請求項3或4所述的封裝板塊的製作方法,其中所述吹除步驟是以乾冰進行吹除。 The method for making a package plate as described in claim 3 or 4, wherein the blowing step is to use dry ice. 如請求項1所述的封裝板塊的製作方法,其中所述溝槽的深度為大於等於5μm。 The method for manufacturing a packaging plate as claimed in claim 1, wherein the depth of the trench is greater than or equal to 5 μm. 如請求項1所述的封裝板塊的製作方法,其中所述沉積層的厚度為小於等於5μm。 The manufacturing method of a packaging plate according to claim 1, wherein the thickness of the deposition layer is less than or equal to 5 μm. 如請求項1所述的封裝板塊的製作方法,其中所述屏蔽材料包括多個銅粉,其在整體所述屏蔽材料的占比為90%以上。 The manufacturing method of a packaging panel as described in claim 1, wherein the shielding material includes a plurality of copper powders, which account for more than 90% of the entire shielding material. 一種如請求項1所述的封裝板塊的製作方法所製成的封裝板塊。 A packaging plate made by the method of making a packaging plate according to claim 1.
TW111150808A 2022-12-16 2022-12-30 Package plate and method of making thereof TWI832646B (en)

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TW201541601A (en) * 2014-04-28 2015-11-01 Universal Scient Ind Shanghai Manufacturing method of electronic packaging device
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TW202147468A (en) * 2020-06-10 2021-12-16 日商拓自達電線股份有限公司 Method for manufacturing electromagnetic shielding package using conductive composition which forms a spacing shielding layer that is smooth with respect to an upper surface of a sealing layer by curing a conductive composition filled in a trough formed in the sealing layer
CN115226303A (en) * 2021-04-16 2022-10-21 庆鼎精密电子(淮安)有限公司 Manufacturing method of packaging structure with electromagnetic shielding effect

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201541601A (en) * 2014-04-28 2015-11-01 Universal Scient Ind Shanghai Manufacturing method of electronic packaging device
TW202135637A (en) * 2019-10-31 2021-09-16 德商賀利氏德國有限責任兩合公司 Electromagnetic interference shielding in recesses of electronic modules
TW202147468A (en) * 2020-06-10 2021-12-16 日商拓自達電線股份有限公司 Method for manufacturing electromagnetic shielding package using conductive composition which forms a spacing shielding layer that is smooth with respect to an upper surface of a sealing layer by curing a conductive composition filled in a trough formed in the sealing layer
CN115226303A (en) * 2021-04-16 2022-10-21 庆鼎精密电子(淮安)有限公司 Manufacturing method of packaging structure with electromagnetic shielding effect

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