TWI727627B - Buried circuit board and method for manufacturing the same - Google Patents

Buried circuit board and method for manufacturing the same Download PDF

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TWI727627B
TWI727627B TW109102273A TW109102273A TWI727627B TW I727627 B TWI727627 B TW I727627B TW 109102273 A TW109102273 A TW 109102273A TW 109102273 A TW109102273 A TW 109102273A TW I727627 B TWI727627 B TW I727627B
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layer
copper
copper foil
substrate
conductive circuit
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TW202130237A (en
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黃釧杰
李治綋
張文猛
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大陸商碁鼎科技秦皇島有限公司
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/16Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor
    • H05K1/162Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor incorporating printed capacitors
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/18Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/38Improvement of the adhesion between the insulating substrate and the metal
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09Shape and layout
    • H05K2201/09209Shape and layout details of conductors
    • H05K2201/09654Shape and layout details of conductors covering at least two types of conductors provided for in H05K2201/09218 - H05K2201/095
    • H05K2201/09736Varying thickness of a single conductor; Conductors in the same plane having different thicknesses

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)
  • Manufacturing Of Printed Wiring (AREA)

Abstract

A method for manufacturing a buried circuit board includes: providing a buried substrate and performing a first surface pretreatment on the buried substrate, and manufacturing a first copper layer to form a first conductive circuit layer; performing a first browning treatment; pressing a first copper-clad substrate ; the first copper-clad substrate including a first base material layer and a third copper foil layer; forming a first and a second copper-added layers by electroplating; a thickness of the first or the second copper-added layer is equal to an etching amount of the first surface pretreatment and the f first browning treatment; performing a second surface pre-treatment and forming the second copper- added layer and the second copper layer to a second conductive circuit layer; performing a second browning treatment; and laminating a second copper-clad substrate; wherein the second copper-clad substrate includes a second base material layer and a fourth copper layer, a thicknesses of the first conductive circuit layer is equal to the second conductive circuit layers, a sum of a thickness of the second copper-cladded layer after the second browning treatment and a thickness of the third copper foil layer is equal to a thickness of the fourth copper foil layer. The manufacturing method can improve the board warping phenomenon and can improve the first-time success rate of the first piece.

Description

埋容電路板及其製作方法Embedded capacitance circuit board and manufacturing method thereof

本發明涉及一種多層印刷電路板技術,尤其涉及一種埋容電路板及其製作方法。The invention relates to a multilayer printed circuit board technology, in particular to a buried capacitance circuit board and a manufacturing method thereof.

隨著電子產品向輕、薄、短、小方向發展,所需實現的功能越來越多,PCB板可利用面積越來越小,但PCB上相應的電子元器件越來越多,從而催生出內埋元器件的PCB產品。With the development of electronic products in the direction of light, thin, short and small, more and more functions need to be realized. The usable area of PCB boards is getting smaller and smaller, but there are more and more corresponding electronic components on the PCB, thus giving birth to PCB products with embedded components.

將電容埋入PCB產品中,需要使用埋容基板材料,所述埋容基板作為電容的材料多為高介電常數、超薄的陶瓷材料,所述埋容基板採用傳統的雙面蝕刻的方式製作內層線路時由於埋容材料超薄易碎的特性,雙面無銅部分特別容易碎板,導致產品報廢。To embed capacitors in PCB products, it is necessary to use embedded capacitance substrate materials. The embedded capacitance substrates used as capacitors are mostly high-permittivity, ultra-thin ceramic materials. The embedded capacitance substrates adopt the traditional double-sided etching method Due to the ultra-thin and fragile characteristics of the embedded capacitance material when making the inner circuit, the double-sided copper-free part is particularly easy to shatter, resulting in product scrap.

目前主流的製作方法為單面蝕刻埋容基板,線上路面覆半固化片、銅箔進行一次層壓,之後將埋容基板另一面進行內層線路製作後覆半固化片與銅箔進行第二次層壓。由於去綜化、線路前處理及綜化會對銅箔層有咬蝕,而埋容基板的核心板的第二銅箔層比與其相背的第一銅箔層多經歷一次去棕化、線路前處理及棕化,從而將導致核心板兩側的導電線路層的厚度不均一,從而會導致此類產品的板翹曲的現象難以控制,導致報廢率很高,以及導致首件一次成功率低。At present, the mainstream production method is to etch the embedded capacitor on one side, and laminate the prepreg and copper foil on the road surface for a single lamination. Then, the other side of the embedded capacitor is laminated with the prepreg and copper foil for the second laminate. Due to the de-synthesis, pre-processing and synthesis of the circuit will bite the copper foil layer, and the second copper foil layer of the core board of the embedded capacitor substrate undergoes one more de-browning and de-browning than the first copper foil layer opposite to it. Pre-processing and browning of the circuit will result in uneven thickness of the conductive circuit layer on both sides of the core board, which will cause the board warping of such products to be difficult to control, resulting in a high scrap rate and leading to the first time success The rate is low.

有鑑於此,本發明提供一種能夠改善板翹曲現象且能夠提高首件一次成功率的埋容電路板的製作方法。In view of this, the present invention provides a method for manufacturing a buried capacitance circuit board that can improve the warpage phenomenon of the board and can increase the first-time success rate of the first product.

還有必要提供一種採用如上所述的埋容電路板的製作方法製作而成的埋容電路板。It is also necessary to provide a buried capacitance circuit board manufactured by the method for manufacturing a buried capacitance circuit board as described above.

一種埋容電路板的製作方法,包括提供一埋容基板,所述埋容基板包括一電容核心層及形成在所述電容核心層相背兩表面上的第一銅箔層和第二銅箔層;對所述第一銅箔層和第二銅箔層進行第一次表面前處理並將第一次表面前處理後的第一銅箔層製作形成第一導電線路層;對所述第一導電線路層及第一次表面前處理後的第二銅箔層進行第一次棕化處理;將一第一單面覆銅基板壓合在所述第一導電線路層上;所述第一單面覆銅基板包括一形成在所述第一導電線路層上的第一基材層及形成在所述第一基材層上的一第三銅箔層;通過電鍍在所述第三銅箔層及所述第二銅箔層上分別形成一第一加鍍銅層及一第二加鍍銅層;所述第一加鍍銅層及所述第二加鍍銅層的厚度等於第一次表面前處理及第一次棕化的咬蝕量;對所述第一加鍍銅層及所述第二加鍍銅層進行第二次表面前處理並將第二次表面前處理後的所述第二加鍍銅層及所述第二銅箔層製作形成第二導電線路層;對所述第二導電線路層及進行了第二次表面前處理後的所述第一加鍍銅層進行第二次棕化處理;及在所述第二導電線路層上壓合一第二單面覆銅基板,所述第二單面覆銅基板包括一形成在所述第二導電線路層上的第二基材層及形成在所述第二基材層上的第四銅箔層,其中,所述第一導電線路層的厚度等於所述第二導電線路層的厚度,所述第三銅箔層與第二次棕化處理後的第一加鍍銅層的厚度之和等於所述第四銅箔層的厚度。A method for manufacturing a buried capacitance circuit board includes providing a buried capacitance substrate, the buried capacitance substrate including a capacitor core layer and a first copper foil layer and a second copper foil formed on opposite surfaces of the capacitor core layer Layer; the first copper foil layer and the second copper foil layer are subjected to a first surface pretreatment and the first copper foil layer after the first surface pretreatment is made to form a first conductive circuit layer; A conductive circuit layer and the second copper foil layer after the first surface pretreatment are subjected to the first browning treatment; a first single-sided copper-clad substrate is laminated on the first conductive circuit layer; A single-sided copper-clad substrate includes a first substrate layer formed on the first conductive circuit layer and a third copper foil layer formed on the first substrate layer; A first copper-plated layer and a second copper-plated layer are respectively formed on the copper foil layer and the second copper foil layer; the thickness of the first copper-plated layer and the second copper-plated layer is equal to The biting amount of the first surface pretreatment and the first browning; the second surface pretreatment and the second surface pretreatment are performed on the first copper-plated layer and the second copper-plated layer After the second copper plating layer and the second copper foil layer are fabricated to form a second conductive circuit layer; the second conductive circuit layer and the first conductive circuit layer after the second surface pretreatment The copper-plated layer is subjected to a second browning treatment; and a second single-sided copper-clad substrate is laminated on the second conductive circuit layer, and the second single-sided copper-clad substrate includes a second conductive circuit layer formed on the The second substrate layer on the circuit layer and the fourth copper foil layer formed on the second substrate layer, wherein the thickness of the first conductive circuit layer is equal to the thickness of the second conductive circuit layer, so The sum of the thickness of the third copper foil layer and the first copper-plated layer after the second browning treatment is equal to the thickness of the fourth copper foil layer.

進一步地,在將所述第一單面覆銅基板壓合在所述第一導電線路層上的步驟之後,還包括步驟:對所述電路基板結構進行撈邊並製作通孔。Further, after the step of pressing and bonding the first single-sided copper-clad substrate on the first conductive circuit layer, the method further includes the steps of: trimming the circuit substrate structure and making through holes.

進一步地,在對所述電路基板結構進行撈邊並製作通孔的步驟後,還包括步驟:對所述電路基板結構進行去棕化處理;其中,所述第一加鍍銅層及所述第二加鍍銅層的厚度還包括去棕化時的咬蝕量。Further, after the steps of trimming the circuit substrate structure and making through holes, it further includes the step of: debrowning the circuit substrate structure; wherein, the first copper plating layer and the The thickness of the second copper plating layer also includes the amount of bite during debrowning.

進一步地,在對所述第一銅箔層和第二銅箔層進行第一次表面前處理並將第一次表面前處理後的第一銅箔層製作形成第一導電線路層的步驟之前,還包括步驟:對所述埋容基板的所述第一銅箔層和第二銅箔層進行裁切。Further, before the step of performing the first surface pretreatment on the first copper foil layer and the second copper foil layer and making the first copper foil layer after the first surface pretreatment to form the first conductive circuit layer , It also includes the step of cutting the first copper foil layer and the second copper foil layer of the embedded capacitance substrate.

進一步地,所述電容核心層的材質為陶瓷。Further, the material of the capacitor core layer is ceramic.

進一步地,所述電容核心層的厚度為2~12um。Further, the thickness of the capacitor core layer is 2-12um.

進一步地,所述第一基材層及所述第二基材層的材質為半固化片、聚醯亞胺、聚對苯二甲酸乙二醇酯或聚萘二甲酸乙二醇酯、聚乙烯、特氟龍、液晶高分子聚合物及聚氯乙烯中的至少一種。Further, the materials of the first substrate layer and the second substrate layer are prepreg, polyimide, polyethylene terephthalate or polyethylene naphthalate, polyethylene, At least one of Teflon, liquid crystal polymer and polyvinyl chloride.

一種埋容電路板,所述埋容電路板通過如上所述的埋容電路板的製作方法製作而成。A buried capacitance circuit board is manufactured by the above-mentioned manufacturing method of the buried capacitance circuit board.

本發明提供的埋容電路板及其製作方法,在壓合第一單面覆銅基板後,通過電鍍在所述第三銅箔層及所述第二銅箔層上分別形成一第一加鍍銅層及一第二加鍍銅層;所述第一加鍍銅層及所述第二加鍍銅層的厚度等於第一次表面前處理、第一次棕化及去棕化的咬蝕量,並在後續的表面前處理與棕化制程中使得所述第一導電線路層的厚度等於所述第二導電線路層的厚度,第二次棕化處理後的所述第三銅箔層的厚度等於所述第四銅箔層的厚度,從而可以優化蝕刻線體鐳射等參數,便於製作並能提升產能;還可以改善各層銅厚的制程能力指數及翹板現象;第一導電線路層及第二導電線路層採用單面蝕刻線路的方式形成,從而能夠確保蝕刻面的另一面電容層有銅依附,不會被破壞。In the embedded capacitance circuit board and the manufacturing method thereof provided by the present invention, after pressing the first single-sided copper-clad substrate, a first coating is formed on the third copper foil layer and the second copper foil layer by electroplating. A copper-plated layer and a second copper-plated layer; the thickness of the first copper-plated layer and the second copper-plated layer is equal to the bite of the first surface pretreatment, the first browning and de-browning In the subsequent surface pretreatment and browning process, the thickness of the first conductive circuit layer is equal to the thickness of the second conductive circuit layer, and the third copper foil after the second browning treatment The thickness of the layer is equal to the thickness of the fourth copper foil layer, so that parameters such as the etching line body laser can be optimized, which is convenient for production and can increase productivity; it can also improve the process capability index and the warping phenomenon of each layer of copper thickness; the first conductive circuit The layer and the second conductive circuit layer are formed by a single-sided etching circuit, so as to ensure that the capacitor layer on the other side of the etching surface is attached with copper and will not be damaged.

為能進一步闡述本發明達成預定發明目的所採取的技術手段及功效,以下結合附圖1-10及較佳實施方式,對本發明提供的埋容電路板及其製作方法的具體實施方式、結構、特徵及其功效,作出如下詳細說明。顯然,所描述的實施例僅是本發明一部分實施例,而不是全部的實施例。基於本發明中的實施例,本領域普通技術人員在沒有做出創造性勞動前提下所獲得的所有其他實施例,都屬於本發明保護的範圍。In order to further explain the technical means and effects adopted by the present invention to achieve the intended purpose of the invention, the following describes the specific implementation, structure, and structure of the embedded capacitance circuit board and its manufacturing method provided by the present invention with reference to accompanying drawings 1-10 and preferred embodiments. The characteristics and effects are described in detail as follows. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present invention.

需要說明的是,當一個元件被認為是“連接”另一個元件,它可以是直接連接到另一個元件或者可能同時存在居中設置的元件。當一個元件被認為是“設置在”另一個元件,它可以是直接設置在另一個元件上或者可能同時存在居中設置的元件。It should be noted that when an element is considered to be "connected" to another element, it can be directly connected to another element or a centrally arranged element may exist at the same time. When an element is considered to be "disposed on" another element, it can be directly disposed on another element or a centrally disposed element may also exist at the same time.

除非另有定義,本文所使用的所有的技術和科學術語與屬於本發明的技術領域的技術人員通常理解的含義相同。本文中在本發明的說明書中所使用的術語只是為了描述具體的實施例的目的,不是旨在於限制本發明。本文所使用的術語“及/或”包括一個或多個相關的所列項目的任意的和所有的組合。Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the technical field of the present invention. The terms used in the description of the present invention herein are only for the purpose of describing specific embodiments, and are not intended to limit the present invention. The term "and/or" as used herein includes any and all combinations of one or more related listed items.

請參閱圖1-10,本發明提供一種埋容電路板100的製作方法,包括步驟:1-10, the present invention provides a method for manufacturing a buried capacitance circuit board 100, which includes the steps:

第一步,請參閱圖1,提供一埋容基板10,所述埋容基板10包括一電容核心層11及形成在所述電容核心層11相背兩表面上的第一銅箔層12和第二銅箔層13。In the first step, referring to FIG. 1, a buried capacitor substrate 10 is provided. The buried capacitor substrate 10 includes a capacitor core layer 11 and a first copper foil layer 12 formed on opposite surfaces of the capacitor core layer 11 and The second copper foil layer 13.

其中,所述電容核心層11的材質為高介電常數、超薄的材料。在本實施方式中,所述電容核心層11的材質為高介電常數、超薄的陶瓷材料。Wherein, the material of the capacitor core layer 11 is a high dielectric constant and ultra-thin material. In this embodiment, the material of the capacitor core layer 11 is a high dielectric constant, ultra-thin ceramic material.

其中,所述電容核心層11的厚度為2.0~12.0um。所述第一銅箔層12與所述第二銅箔層13的厚度相同。Wherein, the thickness of the capacitor core layer 11 is 2.0-12.0um. The thickness of the first copper foil layer 12 and the second copper foil layer 13 are the same.

在本實施方式中,所述電容核心層11厚度為2.0 um,所述第一銅箔層12及所述第二銅箔層13的厚度均為25.0 umIn this embodiment, the thickness of the capacitor core layer 11 is 2.0 um, and the thickness of the first copper foil layer 12 and the second copper foil layer 13 are both 25.0 um.

第二步, 請參閱圖2,對所述埋容基板10的所述第一銅箔層12和第二銅箔層13進行裁切。In the second step, referring to FIG. 2, the first copper foil layer 12 and the second copper foil layer 13 of the embedded capacitor substrate 10 are cut.

其中,所述裁切可以是裁切所述埋容基板10的形狀,還可以是減薄所述第一銅箔層12和第二銅箔層13的厚度。Wherein, the cutting may be cutting the shape of the embedded capacitance substrate 10, or may be reducing the thickness of the first copper foil layer 12 and the second copper foil layer 13.

在本實施方式中,經過剪切後的所述第一銅箔層12和第二銅箔層13的厚度均為20.0 um。也即是說,經過剪切後的所述第一銅箔層12和第二銅箔層13的厚度損耗均是5 um。In this embodiment, the thickness of the first copper foil layer 12 and the second copper foil layer 13 after shearing are both 20.0 um. In other words, the thickness loss of the first copper foil layer 12 and the second copper foil layer 13 after shearing are both 5 um.

第三步, 請參閱圖3,對經過剪切後的所述第一銅箔層12和第二銅箔層13進行第一次表面前處理並將第一次表面前處理後的第一銅箔層12製作形成第一導電線路層14。In the third step, referring to FIG. 3, the first copper foil layer 12 and the second copper foil layer 13 after being cut are subjected to the first surface pretreatment and the first copper after the first surface pretreatment The foil layer 12 is fabricated to form the first conductive circuit layer 14.

當然,在其他實施方式中,也可以省略裁切的步驟。此時,第一次表面前處理的物件是:所述第一銅箔層12和第二銅箔層13。Of course, in other embodiments, the cutting step may also be omitted. At this time, the objects for the first surface pretreatment are: the first copper foil layer 12 and the second copper foil layer 13.

其中,表面前處理是為了去除所述第一銅箔層12和第二銅箔層13表面的氧化物。表面前處理一般包括噴錫、有機可焊性保護劑、全板鍍鎳金、沉金、沉錫、沉銀、化學鎳鈀金、電鍍硬金等中的至少一種。Wherein, the surface pretreatment is to remove oxides on the surfaces of the first copper foil layer 12 and the second copper foil layer 13. The surface pretreatment generally includes at least one of tin spraying, organic solderability protective agent, full-board nickel-gold plating, immersion gold, immersion tin, immersion silver, electroless nickel-palladium-gold, and hard gold plating.

其中,經過第一次表面前處理後的所述第一導電線路層14及所述第二銅箔層13的厚度具有一定的損耗。在本實施方式中,經過第一次表面前處理後的所述第一導電線路層14及所述第二銅箔層13的厚度損耗均為0.5 um。也即是說,經過第一次表面前處理後的所述第一導電線路層14及所述第二銅箔層13的銅厚均為19.5 um。Wherein, the thickness of the first conductive circuit layer 14 and the second copper foil layer 13 after the first surface pretreatment has a certain loss. In this embodiment, the thickness loss of the first conductive circuit layer 14 and the second copper foil layer 13 after the first surface pretreatment is 0.5 um. In other words, the copper thickness of the first conductive circuit layer 14 and the second copper foil layer 13 after the first surface pretreatment is 19.5 um.

其中,通過影像轉移制程將所述第一銅箔層12製作形成所述第一導電線路層14。其中,影像轉移制程包括壓膜、曝光、顯影、蝕刻、去膜等。Wherein, the first copper foil layer 12 is fabricated by an image transfer process to form the first conductive circuit layer 14. Among them, the image transfer process includes lamination, exposure, development, etching, and film removal.

其中,顯影及蝕刻的噴淋壓力≤1.5kgf/cm2。Among them, the spray pressure for developing and etching is less than or equal to 1.5kgf/cm2.

第四步, 請參閱圖4,對所述第一導電線路層14及第一次表面前處理後的第二銅箔層13進行第一次棕化處理。In the fourth step, referring to FIG. 4, a first browning treatment is performed on the first conductive circuit layer 14 and the second copper foil layer 13 after the first surface pretreatment.

其中,棕化處理是為了去除所述第一導電線路層14及第一次表面前處理後的第二銅箔層13表面的油脂、雜物等,以保證所述第一導電線路層14及第一次表面前處理後的第二銅箔層13表面的清潔度。棕化後使所述第一導電線路層14及第一次表面前處理後的第二銅箔層13表面的有一層均勻的絨毛,從而增加所述埋容基板與後續的覆銅基板的基材層之間的結合力,從而避免分層爆板等問題。另外,棕化後需要在一定時間內壓合,避免棕化層吸水,導致爆板。Among them, the browning treatment is to remove grease, debris, etc. on the surface of the first conductive circuit layer 14 and the second copper foil layer 13 after the first surface pretreatment, so as to ensure that the first conductive circuit layer 14 and The cleanliness of the surface of the second copper foil layer 13 after the first surface pretreatment. After browning, there is a layer of uniform fluff on the surface of the first conductive circuit layer 14 and the second copper foil layer 13 after the first surface pretreatment, thereby increasing the base of the embedded capacitance substrate and the subsequent copper-clad substrate The bonding force between the material layers, so as to avoid problems such as delamination and bursting. In addition, it needs to be pressed within a certain period of time after browning to prevent the browning layer from absorbing water and causing board burst.

其中,在第一次棕化時的噴淋壓力≤1.5kgf/cm2。Among them, the spray pressure during the first browning is less than or equal to 1.5kgf/cm2.

其中,經過第一次棕化處理的所述第一導電線路層14及第一次表面前處理後的第二銅箔層13的厚度具有一定的損耗。在本實施方式中,經過第一次棕化處理的所述第一導電線路層14及第一次表面前處理後的第二銅箔層13的厚度損耗均為1.4 um。也即是說,經過第一次棕化處理的所述第一導電線路層14及第一次表面前處理後的第二銅箔層13的厚度的銅厚均為18.1um。Wherein, the thickness of the first conductive circuit layer 14 after the first browning treatment and the second copper foil layer 13 after the first surface pretreatment has a certain loss. In this embodiment, the thickness loss of the first conductive circuit layer 14 after the first browning treatment and the second copper foil layer 13 after the first surface pretreatment are both 1.4 um. That is to say, the copper thickness of the first conductive circuit layer 14 after the first browning treatment and the second copper foil layer 13 after the first surface pretreatment are both 18.1 um.

第五步,請參閱圖5,將一第一單面覆銅基板20壓合在所述第一導電線路層14上,得到一電路基板結構110。In the fifth step, referring to FIG. 5, a first single-sided copper-clad substrate 20 is pressed onto the first conductive circuit layer 14 to obtain a circuit substrate structure 110.

其中,所述第一單面覆銅基板20包括一形成在所述第一導電線路層14上的第一基材層21及形成在所述第一基材層21上的一第三銅箔層22。Wherein, the first single-sided copper-clad substrate 20 includes a first substrate layer 21 formed on the first conductive circuit layer 14 and a third copper foil formed on the first substrate layer 21 Layer 22.

在本實施方式中,所述第一基材層21的材質為半固化片、聚醯亞胺、聚對苯二甲酸乙二醇酯或聚萘二甲酸乙二醇酯、聚乙烯、特氟龍、液晶高分子聚合物、聚氯乙烯等業界常用的基材材料中的至少一種。In this embodiment, the material of the first substrate layer 21 is prepreg, polyimide, polyethylene terephthalate or polyethylene naphthalate, polyethylene, Teflon, At least one of the substrate materials commonly used in the industry such as liquid crystal polymer and polyvinyl chloride.

在本實施方式中,所述第一基材層21的厚度為25.0 um,所述第三銅箔層22的厚度為18.0 um。In this embodiment, the thickness of the first substrate layer 21 is 25.0 um, and the thickness of the third copper foil layer 22 is 18.0 um.

第六步, 請參閱圖6,對所述電路基板結構110進行撈邊、製作通孔及去棕化。In the sixth step, referring to FIG. 6, the circuit substrate structure 110 is trimmed, through holes are made, and debrowning.

在其他實施方式中,製作通孔的步驟還可以省略。In other embodiments, the step of making the through hole can also be omitted.

其中,經過去棕化的所述電路基板結構110的第三銅箔層22及所述第二銅箔層13的銅厚具有一定的損耗。在本實施方式中,經過去棕化的所述電路基板結構110的第三銅箔層22及所述第二銅箔層13的厚度損耗均為1.0 um。也即是說,去棕化後的所述第三銅箔層22的厚度為17.0 um,去棕化後的所述第二銅箔層13的厚度為17.1 um。Wherein, the copper thickness of the third copper foil layer 22 and the second copper foil layer 13 of the circuit substrate structure 110 after debrowning has a certain loss. In this embodiment, the thickness loss of the third copper foil layer 22 and the second copper foil layer 13 of the circuit substrate structure 110 after debrowning are both 1.0 um. In other words, the thickness of the third copper foil layer 22 after debrowning is 17.0 um, and the thickness of the second copper foil layer 13 after debrowning is 17.1 um.

第七步, 請參閱圖7, 通過電鍍在去棕化後的所述第三銅箔層22及所述第二銅箔層13上分別形成一第一加鍍銅層23及一第二加鍍銅層24。In the seventh step, referring to FIG. 7, a first copper-plating layer 23 and a second copper-plating layer 23 are formed on the third copper foil layer 22 and the second copper foil layer 13 after debrowning, respectively. Copper-plated layer 24.

其中,所述第一加鍍銅層23及所述第二加鍍銅層24的厚度等於第一次表面前處理、第一次棕化及去棕化的咬蝕量。Wherein, the thickness of the first copper-plated layer 23 and the second copper-plated layer 24 is equal to the amount of biting of the first surface pretreatment, first browning and de-browning.

在本實施方式中,所述第一加鍍銅層23及所述第二加鍍銅層24的厚度均為2.9 um。也即是說,所述第三銅箔層22與所述第一加鍍銅層23的厚度和為19.9 um,所述第二銅箔層13與所述第二加鍍銅層24的厚度和為20.0 um。In this embodiment, the thickness of the first copper-plated layer 23 and the second copper-plated layer 24 are both 2.9 um. In other words, the sum of the thicknesses of the third copper foil layer 22 and the first copper-plated layer 23 is 19.9 um, and the thicknesses of the second copper foil layer 13 and the second copper-plated layer 24 The sum is 20.0 um.

第八步, 請參閱圖8,對所述第一加鍍銅層23及所述第二加鍍銅層24進行第二次表面前處理並將第二次表面前處理後的所述第二加鍍銅層24及所述第二銅箔層13製作形成第二導電線路層15。In the eighth step, referring to FIG. 8, a second surface pretreatment is performed on the first copper-plated layer 23 and the second copper-plated layer 24, and the second surface pretreatment after the second surface pretreatment is performed The copper layer 24 and the second copper foil layer 13 are added to form a second conductive circuit layer 15.

其中,經過第二次表面前處理後的所述第一加鍍銅層23及所述第二加鍍銅層24均具有一定的銅厚損耗。在本實施方式中,經過第二次表面前處理後的所述第一加鍍銅層23及所述第二加鍍銅層24的銅厚損耗為0.5 um。也即是說,經過第二次表面前處理後的所述第一加鍍銅層23與所述第三銅箔層22的厚度和為19.4 um,經過第二次表面前處理後的所述第二導電線路層15的厚度為19.5 um。Wherein, the first copper-plated layer 23 and the second copper-plated layer 24 after the second surface pretreatment have a certain copper thickness loss. In this embodiment, the copper thickness loss of the first copper-plated layer 23 and the second copper-plated layer 24 after the second surface pretreatment is 0.5 um. In other words, the sum of the thicknesses of the first copper plating layer 23 and the third copper foil layer 22 after the second surface pretreatment is 19.4 um, and the thickness of the second surface pretreatment is 19.4 um. The thickness of the second conductive circuit layer 15 is 19.5 um.

其中,通過影像轉移制程將第二次表面前處理後的所述第二加鍍銅層24及所述第二銅箔層13製作形成第二導電線路層15。其中,影像轉移制程包括壓膜、曝光、顯影、蝕刻、去膜等。Wherein, the second copper-plated layer 24 and the second copper foil layer 13 after the second surface pretreatment are fabricated by an image transfer process to form a second conductive circuit layer 15. Among them, the image transfer process includes lamination, exposure, development, etching, and film removal.

其中,顯影及蝕刻的噴淋壓力≤1.5kgf/cm2。Among them, the spray pressure for developing and etching is less than or equal to 1.5kgf/cm2.

第九步, 請參閱圖9,對所述第二導電線路層15及進行了第二次表面前處理後的所述第一加鍍銅層23進行第二次棕化處理。In the ninth step, referring to FIG. 9, a second browning process is performed on the second conductive circuit layer 15 and the first copper-plated layer 23 after the second surface pretreatment.

其中,第二次棕化處理後的所述第二導電線路層15及所述第一加鍍銅層23的厚度具有一定的損耗。在本實施方式中,第二次棕化處理後的所述第二導電線路層15及所述第一加鍍銅層23的厚度損耗均為1.4 um。也即是說,第二次棕化處理後的所述第二導電線路層15的厚度為18.1um,第二次棕化處理後的所述第一加鍍銅層23與所述第三銅箔層22的厚度之和為18.0um。Wherein, the thickness of the second conductive circuit layer 15 and the first copper plating layer 23 after the second browning treatment has a certain loss. In this embodiment, the thickness loss of the second conductive circuit layer 15 and the first copper plating layer 23 after the second browning treatment are both 1.4 um. That is to say, the thickness of the second conductive circuit layer 15 after the second browning treatment is 18.1um, and the first copper plating layer 23 and the third copper after the second browning treatment The total thickness of the foil layer 22 is 18.0um.

其中,在第二次棕化時的噴淋壓力≤1.5kgf/cm2。Among them, the spray pressure during the second browning is less than or equal to 1.5kgf/cm2.

第十步, 請參閱圖10,在所述第二導電線路層15上壓合一第二單面覆銅基板40,以得到所述埋容電路板100。In the tenth step, referring to FIG. 10, a second single-sided copper-clad substrate 40 is press-fitted on the second conductive circuit layer 15 to obtain the embedded capacitance circuit board 100.

其中,所述第二單面覆銅基板40包括一形成在所述第二導電線路層15上的第二基材層41及形成在所述第二基材層41上的第四銅箔層42。其中,所述第一導電線路層14的厚度等於所述第二導電線路層15的厚度,所述第三銅箔層22和進行了第二次棕化後的所述第一加鍍銅層23的厚度之和等於所述第四銅箔層42的厚度。Wherein, the second single-sided copper-clad substrate 40 includes a second substrate layer 41 formed on the second conductive circuit layer 15 and a fourth copper foil layer formed on the second substrate layer 41 42. Wherein, the thickness of the first conductive circuit layer 14 is equal to the thickness of the second conductive circuit layer 15, the third copper foil layer 22 and the first copper plating layer after the second browning The sum of the thickness of 23 is equal to the thickness of the fourth copper foil layer 42.

在本實施方式中,所述第一導電線路層14與所述第二導電線路層15的厚度均為18.1 um,所述第四銅箔層42的厚度為18.0 um,所述第三銅箔層22和進行了第二次棕化後的所述第一加鍍銅層23的厚度之和為18.0 um。In this embodiment, the thickness of the first conductive circuit layer 14 and the second conductive circuit layer 15 are both 18.1 um, the thickness of the fourth copper foil layer 42 is 18.0 um, and the third copper foil The sum of the thickness of the layer 22 and the first copper-plated layer 23 after the second browning is 18.0 um.

本發明還提供一種採用上述埋容電路板的製作方法的埋容電路板100,所述埋容電路板100包括一電容核心層11、形成在所述電容核心層11上的第一導電線路層14和第二導電線路層15、形成在所述第一導電線路層14上的第一基材層21、形成在所述第一基材層21上的第一外層銅箔層25、形成在所述第二導電線路層15上的第二基材層41及形成在所述第二基材層41上的第二外層銅箔層43。其中,所述第一導電線路層14的厚度等於所述第二導電線路層15的厚度,所述第一外層銅箔層25等於所述第二外層銅箔層43的厚度。其中,第一外層銅箔層25由第三銅箔層22及經過表面前處理及棕化後的所述第一加鍍銅層23堆疊而成,所述第二外層銅箔層43即為所述第四銅箔層42。The present invention also provides a buried capacitance circuit board 100 using the above-mentioned manufacturing method of the buried capacitance circuit board. The buried capacitance circuit board 100 includes a capacitor core layer 11 and a first conductive circuit layer formed on the capacitor core layer 11 14 and the second conductive circuit layer 15, a first base material layer 21 formed on the first conductive circuit layer 14, a first outer copper foil layer 25 formed on the first base material layer 21, formed on The second base material layer 41 on the second conductive circuit layer 15 and the second outer copper foil layer 43 formed on the second base material layer 41. The thickness of the first conductive circuit layer 14 is equal to the thickness of the second conductive circuit layer 15, and the first outer copper foil layer 25 is equal to the thickness of the second outer copper foil layer 43. Wherein, the first outer copper foil layer 25 is formed by stacking the third copper foil layer 22 and the first copper-plated layer 23 after surface pretreatment and browning, and the second outer copper foil layer 43 is The fourth copper foil layer 42.

本發明提供的埋容電路板及其製作方法,在壓合第一單面覆銅基板後,通過電鍍在所述第三銅箔層及所述第二銅箔層上分別形成一第一加鍍銅層及一第二加鍍銅層;所述第一加鍍銅層及所述第二加鍍銅層的厚度等於第一次表面前處理、第一次棕化及去棕化的咬蝕量,並在後續的表面前處理與棕化制程中使得所述第一導電線路層的厚度等於所述第二導電線路層的厚度,第二次棕化處理後的所述第三銅箔層的厚度等於所述第四銅箔層的厚度,從而可以優化蝕刻線體鐳射等參數,便於製作並能提升產能;還可以改善各層銅厚的制程能力指數及翹板現象;第一導電線路層及第二導電線路層採用單面蝕刻線路的方式形成,從而能夠確保蝕刻面的另一面電容層有銅依附,不會被破壞。In the embedded capacitance circuit board and the manufacturing method thereof provided by the present invention, after pressing the first single-sided copper-clad substrate, a first coating is formed on the third copper foil layer and the second copper foil layer by electroplating. A copper-plated layer and a second copper-plated layer; the thickness of the first copper-plated layer and the second copper-plated layer is equal to the bite of the first surface pretreatment, the first browning and de-browning In the subsequent surface pretreatment and browning process, the thickness of the first conductive circuit layer is equal to the thickness of the second conductive circuit layer, and the third copper foil after the second browning treatment The thickness of the layer is equal to the thickness of the fourth copper foil layer, so that parameters such as the etching line body laser can be optimized, which is convenient for production and can increase productivity; it can also improve the process capability index and the warping phenomenon of each layer of copper thickness; the first conductive circuit The layer and the second conductive circuit layer are formed by a single-sided etching circuit, so as to ensure that the capacitor layer on the other side of the etching surface is attached with copper and will not be damaged.

以上所述,僅是本發明的較佳實施方式而已,並非對本發明任何形式上的限制,雖然本發明已是較佳實施方式揭露如上,並非用以限定本發明,任何熟悉本專業的技術人員,在不脫離本發明技術方案範圍內,當可利用上述揭示的技術內容做出些許更動或修飾為等同變化的等效實施方式,但凡是未脫離本發明技術方案內容,依據本發明的技術實質對以上實施方式所做的任何簡單修改、等同變化與修飾,均仍屬於本發明技術方案的範圍內。The above are only the preferred embodiments of the present invention and do not limit the present invention in any form. Although the present invention has been disclosed as the preferred embodiments, it is not intended to limit the present invention. Anyone who is familiar with the profession Without departing from the scope of the technical solution of the present invention, when the technical content disclosed above can be used to make some changes or modification into equivalent implementations of equivalent changes, but all that does not deviate from the technical solution of the present invention, according to the technical essence of the present invention Any simple modifications, equivalent changes and modifications made to the above embodiments still fall within the scope of the technical solutions of the present invention.

100:埋容電路板 10:埋容基板 11:電容核心層 12:第一銅箔層 13:第二銅箔層 14:第一導電線路層 20:第一單面覆銅基板 21:第一基材層 22:第三銅箔層 23:第一加鍍銅層 24:第二加鍍銅層 15:第二導電線路層 40:第二單面覆銅基板 41:第二基材層 42:第四銅箔層 25:第一外層銅箔層 43:第二外層銅箔層 110:電路基板結構100: Buried capacitance circuit board 10: Embedded capacitance substrate 11: Capacitor core layer 12: The first copper foil layer 13: The second copper foil layer 14: The first conductive circuit layer 20: The first single-sided copper clad substrate 21: The first substrate layer 22: The third copper foil layer 23: The first copper plating layer 24: The second copper plating layer 15: The second conductive circuit layer 40: The second single-sided copper clad substrate 41: The second substrate layer 42: The fourth copper foil layer 25: The first outer copper foil layer 43: The second outer copper foil layer 110: Circuit board structure

圖1為本發明一較佳實施方式提供的一種埋容基板的剖視圖。FIG. 1 is a cross-sectional view of an embedded capacitor substrate provided by a preferred embodiment of the present invention.

圖2將圖1所示的埋容基板去棕化處理後的剖視圖。Fig. 2 is a cross-sectional view of the embedded capacitor substrate shown in Fig. 1 after debrowning treatment.

圖3為將圖2所示的去棕化後的所述第一銅箔層和第二銅箔層進行第一次表面前處理並將第一次表面前處理後的第一銅箔層製作形成第一導電線路層後的剖視圖。Figure 3 is the first copper foil layer and the second copper foil layer after the debrowning shown in Figure 2 are subjected to the first surface pretreatment and the first copper foil layer after the first surface pretreatment is produced A cross-sectional view after forming the first conductive circuit layer.

圖4為將圖3所示的去棕化後的第二銅箔層及第一導電線路層進行第一次棕化後的剖視圖。4 is a cross-sectional view of the second copper foil layer and the first conductive circuit layer after the debrowning shown in FIG. 3 are browned for the first time.

圖5為在圖4所述的第一導電線路層上壓合一第一單面覆銅基板後的剖視圖。5 is a cross-sectional view of a first single-sided copper-clad substrate after pressing and bonding a first single-sided copper-clad substrate on the first conductive circuit layer described in FIG. 4.

圖6為對圖5所示的第一單面覆銅基板進行撈邊、去棕化後的剖視圖。6 is a cross-sectional view of the first single-sided copper-clad substrate shown in FIG. 5 after trimming and debrowning.

圖7為在圖6所示的去棕化後的銅箔層上分別形成以第一加鍍銅層和第二加鍍銅層後的剖視圖。7 is a cross-sectional view of a first copper-plated layer and a second copper-plated layer formed on the debrowning copper foil layer shown in FIG. 6 respectively.

圖8為對圖7所示的對所述第一加鍍銅層及所述第二加鍍銅層進行第二次表面前處理並將第二次表面前處理後的所述第二加鍍銅層及所述第二銅箔層製作形成第二導電線路層後的剖視圖。FIG. 8 is a second surface pre-treatment of the first copper-plated layer and the second copper-plated layer shown in FIG. 7 and the second surface pre-treatment after the second surface pre-treatment A cross-sectional view of the copper layer and the second copper foil layer after the second conductive circuit layer is formed.

圖9為對圖8所示的第二導電線路層及第二次表面前處理後的第一加鍍銅層進行第二次棕化後的剖視圖。9 is a cross-sectional view of the second conductive circuit layer shown in FIG. 8 and the first copper-plated layer after the second surface pretreatment after the second browning.

圖10為在圖9所示的第二次棕化後的第二導電線路層上壓合一第二單面覆銅基板後的剖視圖。10 is a cross-sectional view of a second single-sided copper-clad substrate after pressing a second single-sided copper-clad substrate on the second conductive circuit layer after the second browning shown in FIG. 9.

100:埋容電路板 100: Buried capacitance circuit board

11:電容核心層 11: Capacitor core layer

14:第一導電線路層 14: The first conductive circuit layer

21:第一基材層 21: The first substrate layer

22:第三銅箔層 22: The third copper foil layer

23:第一加鍍銅層 23: The first copper plating layer

15:第二導電線路層 15: The second conductive circuit layer

40:第二單面覆銅基板 40: The second single-sided copper clad substrate

41:第二基材層 41: The second substrate layer

42:第四銅箔層 42: The fourth copper foil layer

25:第一外層銅箔層 25: The first outer copper foil layer

43:第二外層銅箔層 43: The second outer copper foil layer

Claims (8)

一種埋容電路板的製作方法,其中,包括 提供一埋容基板,所述埋容基板包括一電容核心層及形成在所述電容核心層相背兩表面上的第一銅箔層和第二銅箔層; 對所述第一銅箔層和第二銅箔層進行第一次表面前處理並將第一次表面前處理後的第一銅箔層製作形成第一導電線路層; 對所述第一導電線路層及第一次表面前處理後的第二銅箔層進行第一次棕化處理; 將一第一單面覆銅基板壓合在所述第一導電線路層上;所述第一單面覆銅基板包括一形成在所述第一導電線路層上的第一基材層及形成在所述第一基材層上的一第三銅箔層; 通過電鍍在所述第三銅箔層及第一次棕化處理後的所述第二銅箔層上分別形成一第一加鍍銅層及一第二加鍍銅層;所述第一加鍍銅層及所述第二加鍍銅層的厚度等於第一次表面前處理及第一次棕化時的咬蝕量; 對所述第一加鍍銅層及所述第二加鍍銅層進行第二次表面前處理並將第二次表面前處理後的所述第二加鍍銅層及所述第二銅箔層製作形成第二導電線路層; 對所述第二導電線路層及進行了第二次表面前處理後的所述第一加鍍銅層進行第二次棕化處理;及 在所述第二導電線路層上壓合一第二單面覆銅基板,以得到一電路基板結構,所述第二單面覆銅基板包括一形成在所述第二導電線路層上的第二基材層及形成在所述第二基材層上的第四銅箔層,其中,所述第一導電線路層的厚度等於所述第二導電線路層的厚度,所述第三銅箔層與第二次棕化處理後的第一加鍍銅層的厚度之和等於所述第四銅箔層的厚度。 A method for manufacturing a buried capacitance circuit board, which includes providing a buried capacitance substrate, the buried capacitance substrate including a capacitor core layer and a first copper foil layer and a second copper foil layer formed on opposite surfaces of the capacitor core layer Copper foil layer Performing a first surface pretreatment on the first copper foil layer and the second copper foil layer, and fabricating the first copper foil layer after the first surface pretreatment to form a first conductive circuit layer; Performing the first browning treatment on the first conductive circuit layer and the second copper foil layer after the first surface pretreatment; A first single-sided copper-clad substrate is press-fitted on the first conductive circuit layer; the first single-sided copper-clad substrate includes a first base material layer formed on the first conductive circuit layer and A third copper foil layer on the first substrate layer; A first copper plating layer and a second copper plating layer are respectively formed on the third copper foil layer and the second copper foil layer after the first browning treatment by electroplating; The thickness of the copper-plated layer and the second copper-plated layer is equal to the amount of biting during the first surface pretreatment and the first browning; Perform a second surface pretreatment on the first copper-plated layer and the second copper-plated layer, and the second copper-plated layer and the second copper foil after the second surface pre-treatment Layer production to form a second conductive circuit layer; Performing a second browning treatment on the second conductive circuit layer and the first copper-plated layer after the second surface pretreatment; and A second single-sided copper-clad substrate is laminated on the second conductive circuit layer to obtain a circuit substrate structure. The second single-sided copper-clad substrate includes a second single-sided copper-clad substrate formed on the second conductive circuit layer. Two substrate layers and a fourth copper foil layer formed on the second substrate layer, wherein the thickness of the first conductive circuit layer is equal to the thickness of the second conductive circuit layer, and the third copper foil The sum of the thickness of the layer and the first copper-plated layer after the second browning treatment is equal to the thickness of the fourth copper foil layer. 如請求項1所述的埋容電路板的製作方法,其中,在將所述第一單面覆銅基板壓合在所述第一導電線路層上的步驟之後,還包括步驟: 對所述電路基板結構進行撈邊並製作通孔。 The method for manufacturing a buried capacitance circuit board according to claim 1, wherein after the step of pressing and bonding the first single-sided copper-clad substrate on the first conductive circuit layer, the method further comprises: The circuit substrate structure is trimmed and a through hole is made. 如請求項2所述的埋容電路板的製作方法,其中,還包括步驟: 對所述電路基板結構進行去棕化處理;其中,所述第一加鍍銅層及所述第二加鍍銅層的厚度還包括去棕化時的咬蝕量。 The manufacturing method of the embedded capacitance circuit board according to claim 2, which further includes the following steps: Debrowning is performed on the circuit substrate structure; wherein the thicknesses of the first copper-plated layer and the second copper-plated layer also include the amount of biting during the debrowning. 如請求項1所述的埋容電路板的製作方法,其中,在對所述第一銅箔層和第二銅箔層進行第一次表面前處理並將第一次表面前處理後的第一銅箔層製作形成第一導電線路層的步驟之前,還包括步驟: 對所述埋容基板的所述第一銅箔層和第二銅箔層進行裁切。 The manufacturing method of the embedded capacitance circuit board according to claim 1, wherein the first surface pretreatment is performed on the first copper foil layer and the second copper foil layer, and the first surface pretreatment is performed after the first surface pretreatment. Before the step of fabricating a copper foil layer to form the first conductive circuit layer, the method further includes the following steps: Cutting the first copper foil layer and the second copper foil layer of the embedded capacitance substrate. 如請求項1所述的埋容電路板的製作方法,其中,所述電容核心層的材質為陶瓷。The manufacturing method of the embedded capacitor circuit board according to claim 1, wherein the material of the capacitor core layer is ceramic. 如請求項1所述的埋容電路板的製作方法,其中,所述電容核心層的厚度為2~12um。The manufacturing method of the embedded capacitor circuit board according to claim 1, wherein the thickness of the capacitor core layer is 2-12um. 如請求項1所述的埋容電路板的製作方法,其中,所述第一基材層及所述第二基材層的材質為半固化片、聚醯亞胺、聚對苯二甲酸乙二醇酯或聚萘二甲酸乙二醇酯、聚乙烯、特氟龍、液晶高分子聚合物及聚氯乙烯中的至少一種。The manufacturing method of the embedded capacitance circuit board according to claim 1, wherein the materials of the first substrate layer and the second substrate layer are prepreg, polyimide, polyethylene terephthalate At least one of ester or polyethylene naphthalate, polyethylene, Teflon, liquid crystal polymer and polyvinyl chloride. 一種埋容電路板,其中,所述埋容電路板通過如請求項1-7任一項所述的埋容電路板的製作方法製作而成。A buried capacitance circuit board, wherein the buried capacitance circuit board is manufactured by the manufacturing method of the buried capacitance circuit board according to any one of claims 1-7.
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