TWI829829B - Block heater and block heater assembly - Google Patents

Abstract

A block heater is disclosed. The block heater may include a heating element configured to supply predetermined heat to a gas line and a heat transfer unit disposed between the gas line and the heating element to transfer heat to the gas line, wherein the heat transfer unit may include a convex portion or a concave portion formed on at least one side thereof in a longitudinal direction of the gas line.

Description

Block heaters and block heater assemblies

This application claims the priority of Korean Patent Application No. 10-2018-0163044 filed on December 17, 2018 and Korean Patent Application No. 10-2019-0161569 filed on December 6, 2019, which are incorporated herein by reference. As fully stated here.

The present invention relates to a block heater and a block heater assembly.

Generally, a chemical vapor deposition (CVP) process is a process in which a liquid phase material is evaporated into an evaporated gas and the evaporated gas is deposited in the form of a thin film on the surface of a semiconductor device. In the chemical vapor deposition process, if heat is not transferred evenly to the gas lines that serve as paths for the evaporated gas to flow, the liquid phase material will be heated unevenly, resulting in defects such as particles. Therefore, the degree to which uniform temperatures are provided throughout the gas line is directly related to semiconductor manufacturing efficiency.

In order to solve the above-mentioned problems, steady research has been conducted on block heaters as a means of heating gas lines to a uniform temperature.

FIG. 1 is a view schematically showing the structure of a conventional block heater.

Referring to FIG. 1 , the semiconductor manufacturing equipment 1 is used to dispose a block heater 40 for heating a gas line 30 between an evaporator 10 and a chamber 20 , and to include a plurality of separate block heaters 40 . unit heating modules 41, 43 and 45. However, the conventional block heater has the following problems.

When the connection structure of the block heater 40 shown in area A of FIG. 1 is carefully observed, due to the difference in thermal expansion coefficient between the gas pipeline 30 and the block heater 40, in the adjacent and contacting unit heating modules Predetermined gaps are formed between 41, 43 and 45, and a part of the gas pipeline 30 is exposed to the outside through each gap.

Due to the reduction in thermal conductivity, cold spots are formed at the exposed portions of the gas line 30, and the evaporated gas is liquefied again, so that the gas line may be clogged and defective particles may be generated.

Therefore, there is a need for a connection structure of a block heater that provides uniform temperature within a predetermined interval of the gas pipeline to ensure the stability of the evaporated gas.

Embodiments provide a block heater and a block heater assembly, wherein the shape of the heat transfer unit is changed so that adjacent block heaters overlap each other while being connected to each other, thereby providing a predetermined section of the gas pipeline. Uniform temperature.

The technical objectives that can be achieved through the embodiments are not limited to what has been specifically described above, and through the following detailed description, those of ordinary skill in the art will more clearly understand other technical objectives not described herein.

In one embodiment, the block heater includes a heating element for supplying predetermined heat to the gas line and a heat transfer unit disposed between the gas line and the heating element to transfer heat to the gas line, wherein the heat transfer unit includes A protrusion or recess formed on at least one side of the heat transfer unit along the longitudinal direction of the gas pipeline.

The heat transfer unit may be made of aluminum (Al) material with excellent thermal conductivity efficiency.

An aluminum oxide (Al ₂ O ₃ ) film can be formed on one surface of the heat transfer unit through anodization.

The heating element may be a planar heating element.

The block heater may further include a cover plate disposed opposite to the heat transfer unit, and the heating element is disposed between the cover plate and the heat transfer unit, wherein an outer surface of the cover plate and a shell An air gap can be formed between an inner surface.

The heat transfer unit may include a first recess having a shape corresponding to the shape of the gas pipeline; and a second recess disposed adjacent to the first recess, the second recess having a shape corresponding to the shape of the gas pipeline. The shape of a connecting member at one end of the gas pipeline.

In another embodiment, a block heater assembly includes a plurality of block heaters, each of the block heaters includes a heat transfer unit, wherein a plurality of convex portions or a plurality of recessed portions are disposed on the heat transfer unit. The opposite ends and the heat transfer units are coupled to each other through an engagement between each of the convex portions and a corresponding one of the concave portions.

Each of the block heaters includes at least one heating element for providing predetermined heat to a gas pipeline.

A surface of each of the convex parts contacts a surface of the gas pipeline, and a surface of each of the concave parts contacts another surface of one of the corresponding convex parts, and at the same time, the surface of each of the concave parts is in contact with the surface of the gas pipeline. Gas lines are separated.

The block heater assembly may further include a connection unit disposed between the heat transfer units, wherein the connection unit may be made of a material having the same thermal conductivity as the heat transfer units.

It is to be understood that both the foregoing summary and the following detailed description of the invention are exemplary and explanatory and are intended to provide further explanation of the invention as claimed.

According to at least one embodiment of the present invention, heat with uniform temperature is provided within a predetermined interval of the gas pipeline, thereby suppressing state changes of the processing gas flowing in the gas pipeline, the number of defective particles is significantly reduced, and the quality of the deposited film is improved. .

Reference will now be made in detail to the preferred embodiments, examples of which are illustrated in the accompanying drawings. Although the embodiments are susceptible to various modifications and alternative forms, specific embodiments thereof are shown by way of example in the drawings.

It will be understood that, although the terms "first," "second," etc. may be used herein to describe various elements, these elements are not limited by these terms. In addition, relative terms such as "upper/upper/above" and "lower/lower/under" are only used to distinguish one subject or element from another subject or element and do not necessarily require or refer to a relationship between these subjects or elements. Any physical or logical relationship or sequence.

The terminology used in this specification is provided for the purpose of explaining particular embodiments only and is not intended to limit the invention. A singular expression may include a plural expression unless the expression has an absolutely different meaning from the context.

Hereinafter, a block type heater and a block type heater assembly according to embodiments will be described with reference to the drawings.

2 is a view schematically showing the configuration of a semiconductor manufacturing equipment having a block-type heater assembly according to one embodiment of the present invention.

Referring to FIG. 2 , a semiconductor manufacturing equipment 1000 includes an evaporator 100 , a processing chamber 200 , a gas line 300 , and a block heater assembly 400 . The evaporator 100 is used to evaporate the liquid phase processing material, and the processing chamber 200 is used to inject the processing gas supplied from the evaporator 100 inside to deposit a thin film on the substrate S. The gas pipeline 300 is provided between the evaporator 100 and the processing chamber 200 The block heater assembly 400 is used to uniformly heat the entire gas pipeline 300 .

The block heater assembly 400 may include a plurality of block heaters 400a, 400b, and 400c disposed in a plurality of separated heating zones z1, z2, and z3, respectively.

Each of the block heaters 400a, 400b, and 400c is an individual unit that constitutes the block heater assembly 400, and the block heater assembly 400 is an assembly in which the block heaters 400a, 400b, and 400c are coupled to each other. The block heater assembly 400 can provide heat with a uniform temperature throughout the gas line 300 . In Figure 2, the block heater assembly is shown as containing three block heaters, however, this is exemplary only. The number of block heaters can be changed according to the length of the gas pipeline or the engineer's design.

Since the block heater assembly 400 includes the block heaters 400a, 400b, and 400c, and as described above, the block heaters 400a, 400b, and 400c are individual units, the individual units can be easily separated and connected to each other during maintenance.

Block heaters 400a, 400b, and 400c may each include a heat transfer unit 410, a housing 420, and a heating element (not shown). The heat transfer unit 410 is used to accommodate the gas pipeline 300, the housing 420 is used to enclose the heat transfer unit 410 and define the appearance of the block heater, and the heating element is used to provide predetermined heat.

The heat transfer unit 410 may include a rectangular block 411 and a protrusion 413 or a recess 415 formed along the longitudinal direction of the gas pipeline 300 at at least one side or the other side of the heat transfer unit 410 . Here, the protrusions 413 and/or the recesses 415 of the heat transfer unit 410 serve as connections for coupling between adjacent block heaters. Meanwhile, the end of the heat transfer unit 410 formed on one side or the other side of each of the block heaters 400a and 400c, which are related to evaporation, may have a flat surface. The device 100 and/or the processing chamber 200 are in communication.

The protrusion 413 may include a coupling protrusion 4131 formed on an outer surface of the block 411 to protrude a predetermined length.

Recess 415 may include coupling notch 4151 and sidewall 4153. The coupling recess 4151 is formed on the outer surface of the block 411 to be depressed by a predetermined length, and due to the formation of the coupling recess 4151, side walls 4153 are provided at opposite ends of the recess 415.

Now, the coupling structure between adjacent block heaters shown in FIG. 2 will be described.

The coupling protrusion 4131 of the convex portion 413 formed on one side of the second block heater 400b is inserted into and seated in the coupling recess 4151 of the recess 415 formed on the other side of the first block heater 400a, whereby the second The one-piece heater 400a and the second block-type heater 400b are coupled to each other.

The coupling recess 4151 of the recess 415 formed on the other side of the second block heater 400b is accommodated in the coupling protrusion 4131 of the convex portion 413 formed on one side of the third block heater 400c, whereby the second block heater 400c The heater 400b and the third block heater 400c are coupled to each other.

As described above, the convex portion 413 and the concave portion 415 of the heat transfer unit 410 are engaged with each other in the longitudinal direction of the gas pipeline 300, so that adjacent block heaters are firmly fastened to each other through fitting, and, in the adjacent block heaters, the In the coupling area B between the block heaters, the coupling protrusion 4131 of the convex part 413 and the side wall 4153 of the recessed part 415 overlap each other in a direction perpendicular to the longitudinal direction of the gas pipeline 300 . In addition, one surface 4131a of the convex part 413 is in contact with the gas pipeline 300, and one surface 4153a of the recessed part 415 is in contact with the other surface 4131b of the convex part 413 while being separated from the gas pipeline 300.

Different from the conventional block heater 40 shown in FIG. 1 , the block heater assembly 400 of this embodiment is configured such that the convex portions 413 and the concave portions 415 of adjacent block heaters are formed to have a staggered structure and are coupled to each other so that a uniform distribution of temperature can be maintained throughout the gas line 300 . Alternatively, the block heater assembly 400 may heat the gas lines uniformly in separate heating zones z1, z2, and z3.

Referring to the enlarged view of the coupling area B shown in FIG. 2, due to the difference in thermal expansion coefficient between the gas pipeline 300 and the heat transfer unit 410, even between the adjacent first block heater 400a and the second block heater 400b A predetermined gap area a1 is formed between them, and the heat conduction path can still be defined along the arrow (straight line) between the side wall 4153 of the first block heater 400a and the coupling protrusion 4131 of the second block heater 400b that overlap each other. Along the thermal conduction path, the heat provided from the first block heater 400a is conducted to the second block heater 400b, and the heat provided from the second block heater 400b is conducted to the first block heater 400a, Therefore, the temperature deviation generated in the gap area a1 can be significantly reduced.

In addition, in the predetermined gap a2, a sealed space tightly closed by the coupling recess 4151 of the first block heater 400a and the coupling protrusion 4131 of the second block heater 400b is defined, and in this sealed space , defining the thermal convection path along the arrows (concentric circles). Since the heat supplied from the first block heater 400a and the second block heater 400b is transferred to the gas line 300 along the heat convection path, cold spots can be prevented from forming on a portion of the gas line 300.

As described above, the block heater assembly 400 according to the embodiment is used to have the following structure: the heat transfer units 410 of adjacent block heaters are staggered and overlapped with each other, so that the temperature deviation between the block heaters can be reduced. , while preventing cold spots from forming on a portion of the gas line 300 . Therefore, the processing gas flowing in the gas pipeline 300 does not undergo a phase change (for example, from a gas phase to a liquid phase), thereby improving the quality of the deposited film. In addition, alignment can be easily achieved during assembly and heat loss to the outside is prevented through maximum contact between surfaces. Hereinafter, an assembly process of the block heater according to the embodiment will be described.

FIG. 3 is an exploded perspective view of the block heater assembly shown in FIG. 2 .

Referring to Figure 3(a), a block heater assembly 400 according to one embodiment may include a plurality of block heaters (block heater 400a and block heater 400b), and the block heater 400a and the block heater 400a Each of the heaters 400b may be formed into a symmetrical structure in which the block heater may be divided into upper and lower parts or left and right parts.

The gas pipeline 300 includes a round pipe 310, a body 320 of a two-way valve, and a connecting member 330 mounted with bolts.

The heat transfer unit 410 of the first block type heater 400a has a shape corresponding to the shape of the gas pipeline 300, and is thereby tightly fitted to the gas pipeline 300. The heat transfer unit 410 includes sunken recesses 4171 and 4173 as well as stepped recesses 4175 . The sinking recess 4171 and the sinking recess 4173 are formed in the portion of the heat transfer unit 410 corresponding to the round tube 310 of the gas pipeline 300 and the body 320 of the two-way valve so as to be in surface contact with the gas pipeline 300, and the stepped recess 4175 is formed in the heat transfer unit 410. 410 is formed in a portion corresponding to the connecting member 330 of the gas pipeline 300 having a bolt mounted thereon so as to be in contact with the gas pipeline 300 regardless of the position of the bolt. As described above, a plurality of notches 417 are formed in the heat transfer unit 410 so that the contact area increases throughout the gas line 300 . This configuration is provided to uniformly conduct predetermined heat from the heat transfer unit 410 to the gas line 300 . If this contact state is released at a specific part, the thermal conductivity efficiency at that part will be significantly reduced.

Referring to FIG. 3(b), the first unit block heater 400a-1 of the first block heater 400a is formed in a symmetrical structure, and the first unit block heater 400a-1 of the first block heater 400a is vertically oriented. It is assembled in the longitudinal direction of the gas pipeline 300 and is therefore evenly in close contact with the gas pipeline 300 as the object to be heated. Here, a fixing means 500 such as a fastener or a clamp is provided on the upper part and/or the side part of the first unit block heater 400a-1.

Referring to FIG. 3(c), the second unit block heater 400a-2 of the first block heater 400a is formed in a symmetrical structure, and the second unit block heater 400a-2 of the first block heater 400a is evenly formed. It is in close contact with the gas pipeline 300 as the object to be heated, and at the same time, it is firmly fixed and coupled to the first unit block type heater 400a-1 through the fixing means 500 provided on the first unit block type heater 400a-1.

Meanwhile, as mentioned above, the first unit block heater 400a-1 and the second unit block heater 400a-2 constituting the first block heater 400a are symmetrical with respect to the longitudinal direction of the gas pipeline 300, and the first The unit block heater 400a-1 and the second unit block heater 400a-2 include the same components.

Hereinafter, components of the block heater will be described with reference to a cross-sectional view of the block heater shown in FIG. 4 .

FIG. 4 is a cross-sectional view of the block heater taken along line 1-1' of FIG. 2 .

Referring to FIG. 4 , the block heater 400a may include a heat transfer unit 410, a housing 420, a heating element 430, and a cover plate 440. The heat transfer unit 410 is used to accommodate the gas pipeline 300, the casing 420 is used to surround the heat transfer unit 410 and define the appearance of the block heater, the heating element 430 is used to provide predetermined heat, and the cover plate 440 is used to cover the heating element 430.

The heat transfer unit 410 may be formed in a shape corresponding to the gas pipeline 300 and may be in contact with a surface of the gas pipeline 300 so that predetermined heat supplied from the heating element 430 is transferred to the gas pipeline 300 .

The heat transfer unit 410 may be made of a material exhibiting high thermal conductivity. For example, the heat transfer unit 410 may include any one selected from the group consisting of aluminum (Al), copper (Cu), silver (Ag), tungsten (W), and combinations thereof; however, the present invention is not limited thereto. The heat transfer unit 410 made of a material with high thermal conductivity can smoothly conduct the heat supplied from the heating element 430 to the gas pipeline 300 .

The surface of the heat transfer unit 410 is anodized to exhibit high corrosion resistance and wear resistance. An aluminum oxide (Al ₂ O ₃ ) film may be formed on the surface of the heat transfer unit 410 through anodization.

At least one recess 417 (for example, the recessed recess 4171 , the recessed recess 4173 and the stepped recess 4175 ) has a shape corresponding to the shape of the outer peripheral surface of the gas pipeline 300 , and the at least one recess 417 is located in one of the heat transfer units 410 A receiving recess 419 is formed in one end of the heat transfer unit 410 and is recessed to a predetermined depth to accommodate the heating element 430 in the other end of the heat transfer unit 410 .

The heating element 430 may provide predetermined heat to the heat transfer unit 410 so that the processing gas flowing in the gas line 300 is heated to a uniform temperature.

Heating element 430 may be a planar heating element configured such that the heating area is evenly distributed over the entire area of heating element 430 to have a uniform temperature distribution.

The heating element 430 may be placed in a receiving recess 419 formed in the other end of the heat transfer unit 410. At this time, the depth or width of the accommodation recess 419 may correspond to the thickness or width of the heating element 430, so that neither a separate space nor an air pocket is formed between the accommodation recess 419 and the heating element 430. The reason is that in a state where air pockets are formed at the joint surface between the accommodation recess 419 and the heating element 430, a uniform temperature may not be provided to the heat transfer unit 410 due to partial heat dissipation.

The cover plate is arranged opposite to the heat transfer unit, and the heating element is arranged between the cover plate and the heat transfer unit. In addition, a cover plate 440 is provided on the other end of the heat transfer unit 410 and the heating element 430 to cover the heating element 430 disposed in the receiving recess 419 .

The cover plate 440 may be provided to improve the uniformity of heat emitted from the heating element 430 and to fix the position of the heating element 430, and may be made of a material such as silicon carbide (SiC).

The housing 420 may surround the heat transfer unit 410 and/or the cover plate 440, and the housing 420 may define the appearance of the block heater 400a.

The housing 420 may be made of an insulating material with high heat resistance to prevent the heat provided from the heating element 430 from escaping the block heater 400a. Polyether ether ketone (PEEK) can be used as an example of an insulating material that exhibits high heat resistance.

In addition, a coating to reflect heat emitted from the heating element 430 to the heat transfer unit 410 may be provided on the inner surface of the housing 420 to improve heat insulation or heat dissipation performance.

A predetermined air gap 450 may be formed between the inner surface of the housing 420 and the outer surface of the cover 440 . The reason is that when the air gap 450 is not formed in the housing 420, the heat generated by the heating element 430 can be conducted to the housing 420 through the cover plate 440, and due to the conducted heat, the thermal insulation performance of the housing 420 is reduced. may be significantly reduced.

Therefore, in the block type heater 400a according to this embodiment, a separate air gap 450 is formed in the housing 420, so that the heat flow path between the heating element 430 and the housing 420 can be controlled to ensure thermal insulation of the housing 420 performance.

At this time, the width d1 of the air gap 450 may be equal to or may correspond to the width d2 of the heating element 430 . Alternatively, the area of air gap 450 may be equal to or may correspond to the area of heating element 430 .

Meanwhile, as mentioned above, the heating element 430 is designed to be covered by the receiving recess 419 and the cover plate 440 of the heat transfer unit 410 to provide heat with a uniform temperature. At this time, for design-related reasons, the heating element 430 is not provided directly on one side and/or the other side of the heat transfer unit 410 . Therefore, in order to prevent local temperature differences from occurring throughout the gas pipeline 300, it is necessary to improve the heat transfer efficiency on one side and/or the other side of the heat transfer unit 410 connected to the adjacent block heater. This will be described below with reference to FIGS. 5 to 7 .

5 to 7 are perspective views of the heat transfer unit taken along line 2-2' of FIG. 2 .

5 is a perspective view of a heat transfer unit of a block heater assembly according to an embodiment of the present invention.

Referring to the exploded perspective view shown in FIG. 5(a) , the first heat transfer unit 410a and the second heat transfer unit 410b have the same shape, wherein each side of the first heat transfer unit 410a and the second heat transfer unit 410b and A concave portion (recessed portion 415a or concave portion 415b) and a convex portion (convex portion 413a or convex portion 413b) are formed on the other side. At this time, the first heat transfer unit 410a and the second heat transfer unit 410b may be sequentially disposed along the longitudinal direction of the gas pipeline 300.

The first heat transfer unit 410a may include a recessed portion 415a formed on one side of the first heat transfer unit 410a and a convex portion 413a formed on the other side of the first heat transfer unit 410a, and the second heat transfer unit 410b may be included in the second heat transfer unit 410a. The recessed portion 415b formed on one side of the heat transfer unit 410b and the convex portion 413b formed on the other side of the second heat transfer unit 410b.

The convex portion 413a includes a coupling protrusion 4131 formed on the outer surface of the block 411 to protrude a predetermined length, and the recessed portion 415b includes a coupling recess 4151 formed on the outer surface of the block 411 to be lowered and a side wall 4153. Pressed to a predetermined length, side walls 4153 are provided at opposite ends of the recess 415b due to the formation of the coupling recess 4151.

Referring to the assembly perspective views shown in FIGS. 5(a) and 5(b) , the convex portion 413a formed on the other side of the first heat transfer unit 410a and the recessed portion 415b provided on one side of the second heat transfer unit 410b are mutually exclusive. Overlapping and firmly fastened together by fitting.

The recess 415b may be formed to have a size such that the protrusion 413a is inserted into the recess 415b, and the width of the coupling protrusion 4131 may be equal to the width of the coupling recess 4151 so that the coupling protrusion 4131 is seated within the coupling recess 4151. Here, the width of the coupling protrusion 4131 may be about 3 mm to 8 mm; however, the present invention is not limited thereto.

At the same time, the heat provided from the first heating element (not shown) may be conducted to the second heat transfer unit 410b through the recess 415b on one side of the second heat transfer unit 410b, and the recess 415b on one side of the second heat transfer unit 410b is in contact with the second heat transfer unit 410b. The convex portion 413a on the other side of the first heat transfer unit 410a overlaps, and the heat provided from the second heating element (not shown) can be conducted to the third heat transfer unit 410a through the convex portion 413a on the other side of the first heat transfer unit 410a. In one heat transfer unit 410a, the convex portion 413a on the other side of the first heat transfer unit 410a overlaps with the recessed portion 415b on one side of the second heat transfer unit 410b.

As described above, the heat conduction path may be defined along the arrow between the coupling protrusion 4131 on the other side of the first heat transfer unit 410a and the side wall 4153 on one side of the second heat transfer unit 410b, the coupling protrusion 4131 and the side wall 4153 overlap each other, so that temperature compensation can be achieved in the coupling region B where the first heat transfer unit 410a and the second heat transfer unit 410b are coupled to each other. Therefore, uniform distribution of temperature can be maintained throughout the first heat transfer unit 410a and the second heat transfer unit 410b. Alternatively, block heater assembly 400 may heat gas line 300 uniformly in separate heating zones z1, z2, and z3.

6 is a perspective view illustrating a heat transfer unit of a block heater assembly according to another embodiment of the present invention.

Referring to the exploded perspective view shown in FIG. 6(a) , the first heat transfer unit 410a and the second heat transfer unit 410b are provided with a plurality of recessed portions 415a or a plurality of convex portions 413b on their respective opposite sides, and the first heat transfer unit 410a and the second heat transfer unit 410b have different shapes. At this time, the first heat transfer units 410a and the second heat transfer units 410b may be alternately arranged in the longitudinal direction of the gas pipeline 300.

The convex portion 413b may be formed on opposite sides of the second heat transfer unit 410b, and the recessed portions 415a and 415c may be formed on opposite sides of the first and third heat transfer units 410a and 410c, the first and third heat transfer units 410a and 410c. The third heat transfer unit 410c is provided on one side and the other side of the second heat transfer unit 410b. In a state where the second heat transfer unit 410b is disposed between the first heat transfer unit 410a and the third heat transfer unit 410c, recesses 415a are formed on opposite sides of the first heat transfer unit 410a and the third heat transfer unit 410c respectively. and recess 415c. As mentioned above, the user can easily separate the heat transfer units from each other during maintenance.

Referring to the assembly perspective views shown in FIGS. 6(a) and 6(b) , the recessed portion 415a formed on the other side of the first heat transfer unit 410a and the convex portion 413b provided on one side of the second heat transfer unit 410b are mutually exclusive. The convex portion 413b formed on the other side of the second heat transfer unit 410b and the recessed portion 415c provided on one side of the third heat transfer unit 410c overlap each other and are tightly fixed to each other through fitting. Fastened together and tightly.

As shown in the figure, adjacent heat transfer units are formed to have a staggered structure in a state of overlapping each other. As a result, a heat conduction path may be formed in the coupling area B1 between the first heat transfer unit 410a and the second heat transfer unit 410b and/or the coupling area B2 between the second heat transfer unit 410b and the third heat transfer unit 410c. A heat conduction path is formed in the heat conduction path, and temperature compensation can be achieved along the formed heat conduction path, so that a uniform distribution of temperature can be maintained throughout the first heat transfer unit 410a, the second heat transfer unit 410b, and the third heat transfer unit 410c. Alternatively, block heater assembly 400 may heat gas line 300 uniformly in separate heating zones z1, z2, and z3.

7 is a perspective view illustrating a heat transfer unit of a block heater assembly according to another embodiment of the present invention.

Referring to the exploded perspective view shown in FIG. 7(a) , the first heat transfer unit 410a and the second heat transfer unit 410b are respectively provided with recesses 415a and 415b on opposite sides thereof, and the first heat transfer unit 410a and the second heat transfer unit 410a are respectively provided with recesses 415a and recesses 415b. Thermal units 410b have the same shape. At this time, the connection unit 412 may be provided between the first heat transfer unit 410a and the second heat transfer unit 410b.

The connection unit 412 may be formed with a sufficient size to be inserted into the recess 415a of the first heat transfer unit 410a and the recess 415b of the second heat transfer unit 410b, and the width d3 of the connection unit 412 may be equal to the other side of the first heat transfer unit 410a. The sum of the first width d4 of the coupling recess 4151 on one side and the second width d5 of the coupling recess 4151 on one side of the second heat transfer unit 410b. Here, the width d3 of the connection unit 412 may be approximately 3 mm to 8 mm; however, the present invention is not limited thereto.

The connection unit 412 may be made of a material with high thermal conductivity. For example, the connection unit 412 may include any one selected from the group consisting of aluminum (Al), copper (Cu), silver (Ag), tungsten (W), and combinations thereof; however, the present invention is not limited thereto.

In addition, the connection unit 412 may be made of a material having the same thermal conductivity as the first heat transfer unit 410a and the second heat transfer unit 410b. If the thermal conductivity of the connection unit 412 is different from the thermal conductivity of the first heat transfer unit 410a and the second heat transfer unit 410b, the heat transferred to various areas of the gas pipeline 300 may be different from each other, and thus may not be maintained throughout the gas pipeline 300 Uniform distribution of temperature.

Referring to the assembly perspective views shown in FIGS. 7(a) and 7(b) , the connection unit 412 has a recess 415a formed on the other side of the first heat transfer unit 410a and a recess 415a formed on one side of the second heat transfer unit 410b. The recessed portions 415b overlap, and the connection unit 412 is firmly fastened to the first heat transfer unit 410a and the second heat transfer unit 410b through fitting. At this time, one surface 412a of the connection unit 412 contacts the surface of the gas pipeline 300, and one surface 4153a of the recess 415 contacts the other surface 412b of the connection unit 412, while the one surface 4153a of the recess 415 is separated from the gas pipeline 300.

At the same time, the heat provided from the first heating element (not shown) may be conducted to the second heat transfer unit 410b via the connection unit 412, which overlaps the recess 415a on the other side of the first heat transfer unit 410a, and the connection unit 412 may conduct the heat provided by the second heating element (not shown) to the first heat transfer unit 410a through the connection unit 412, which overlaps the recess 415b on one side of the second heat transfer unit 410b. That is to say, the first heat transfer unit 410a and the second heat transfer unit 410b that are adjacent to each other can form a staggered structure in an overlapping state by providing the connecting unit 412. A heat conduction path may be formed in the coupling area B1 between the units 410b, and temperature compensation may be achieved along the formed heat conduction path, so that uniform temperature distribution may be maintained throughout the first heat transfer unit 410a and the second heat transfer unit 410b. Alternatively, block heater assembly 400 may heat gas line 300 uniformly in separate heating zones z1, z2, and z3.

Hereinafter, the structure of a block heater applicable to the gas line 300 including a three-way valve will be described with reference to FIG. 8 .

8 is a view illustrating a block heater applied to a gas pipeline including a three-way valve according to one embodiment of the present invention.

For convenience of description, description overlapping with that of FIG. 2 will be omitted, and description will be based on differences.

Referring to FIG. 8 , the block heater assembly may include a plurality of block heaters 400a ~ 400f disposed in a plurality of separated heating zones z1 to z6.

As shown in area C of FIG. 8 , a gas pipeline 300 is provided in the fifth heating zone z5 among the heating zones z1 to z6 . The gas pipeline 300 may also include a three-way valve for selectively transferring the gas from the heating zone z1 to z6 . The process gas introduced by the evaporator 100 is discharged to the process chamber 200a or EVAC 200b.

The three-way valve includes a valve body 340 and a ball. The valve body 340 has an inlet 341, a first outlet 342 and a second outlet 343 formed in the valve body 340. A ball (not shown) is installed in the valve body 340 to open and close the process gas flow path or change the direction of the process gas flow path.

As previously described with reference to FIG. 3 , the heat transfer unit 410 disposed in close contact with the gas pipeline 300 having the two-way valve has a shape corresponding to the shape of the gas pipeline 300 so as to fit on the gas pipeline 300 . In particular, the heat transfer unit 410 is provided with a recessed recess 4173 whose shape corresponds to the shape of the outer peripheral surface of the body 320 of the two-way valve, so as to be in surface contact with the body 320 of the two-way valve.

However, as shown in FIG. 8 , for the heat transfer unit 410 provided in close contact with the gas pipeline 300 having a three-way valve, the notch 4177 formed in the valve body 340 of the three-way valve may have a different shape. If a predetermined recess is formed in the surface of the heat transfer unit 410 so that the recess has a shape corresponding to the shape of the outer peripheral surface of the valve body 340, the valve head (not shown) cannot be installed due to work reasons. The reason is that for three-way valves, which are different from two-way valves, the installation position of the valve head (not shown) is restricted due to the interference of the gas pipeline.

Therefore, the heat transfer unit 410 of the block heater 400e according to the embodiment may be provided with a predetermined recess 4177 on the surface of the heat transfer unit 410, and the recess 4177 is used to accommodate the three-way valve. The recess 4177 may be formed with sufficient size to accommodate the valve body 340 of the three-way valve. At this time, the inner diameter of the notch 4177 may be formed larger than the outer diameter of the valve body 340 .

The block heater 400e may further include a filling portion 460 disposed in the space between the recess 4177 and the valve body 340, and the filling portion 460 is made of a material having the same thermal conductivity as the heat transfer unit 410. The filling portion 460 is provided to uniformly conduct predetermined heat from the heat transfer unit 410 to the gas pipeline 300, and improves the heat conduction efficiency at the portion where the contact state is released due to the formation of the notch 4177. The filling portion 460 can maximize surface contact with the gas line 300, thereby enabling efficient heat transfer.

Figure 9 is a perspective view of a block heater assembly according to yet another embodiment of the present invention.

Referring to the exploded perspective view shown in FIG. 9(a) , the block heater assembly 400 may include a plurality of heat transfer units (a first heat transfer unit 410a and a second heat transfer unit 410b) and disposed between the first heat transfer unit 410a and the second heat transfer unit 410b. The connecting unit 412 between the second heat transfer unit 410b, and the first heat transfer unit 410a and the second heat transfer unit 410b may be formed to have the same shape.

The first heat transfer unit 410a and the second heat transfer unit 410b each include a block 411 and a pair of protrusions 415' integrally formed on opposite side surfaces of the block 411, and each protrusion 415' has a "[" or "U" shape. cross section, and the protrusion 415' is formed on the outer surface of the block 411 to project a predetermined width d4.

The protrusion 415' includes a first section 4151', a second section 4152' opposite the first section 4151', a third section 4153' disposed between the first section 4151' and the second section 4152', and a recess 417 . The third section 4153' prevents the heat provided from the heating element (not shown) from dissipating to the outside. The trapped recess 417 is provided in surface contact with the gas line 300 and can be opened by the protrusion 415'. Each of the first heat transfer unit 410a and the second heat transfer unit 410b may be provided with an opening OP on one side and the other side thereof, the opening OP being surrounded by the outer surface of the block 411 and the inner peripheral surface of the protrusion 415', and The connection unit 412 can be inserted into the opening OP.

The connection unit 412 is formed to have a sufficient size and/or shape to be tightly inserted into the openings OP formed on one side and the other side of the first and second heat transfer units 410a and 410b. For example, the cross sections of the connection unit 412 and the opening OP are the same as each other in area and shape, and the width d3 of the connection unit 412 may be twice the width d4 of the protrusion 415' (d4 = d3/2).

In addition, the connection unit 412 may be made of a material exhibiting the same thermal conductivity as the first heat transfer unit 410a and the second heat transfer unit 410b. For example, the connection unit 412 may include any one selected from the group consisting of aluminum (Al), copper (Cu), silver (Ag), tungsten (W), and combinations thereof.

Referring to the assembled perspective views shown in FIGS. 9(a) and 9(b) , the connection unit 412 overlaps the opening OP formed on one side and the other side of the first heat transfer unit 410a and the second heat transfer unit 410b, And it is firmly fastened to the first heat transfer unit 410a and the second heat transfer unit 410b through fitting.

At this time, the front surface 412a of the connection unit 412 contacts the surface of the gas pipeline 300, and the rear surface 412b of the connection unit 412 opposite to the front surface 412a directly contacts the protrusions 415' constituting the first heat transfer unit 410a and the second heat transfer unit 410b. The third paragraph 4153'. In addition, each of the upper surface and the lower surface of the connecting unit 412 directly contacts a corresponding one of the first section 4151' and the second section 4152' of the protrusion 415', and the side surface of the connecting unit 412 directly contacts the block 411.

That is, the connection unit 412 is completely surrounded by the coupling between the first heat transfer unit 410a and the second heat transfer unit 410b, and the connection unit 412 is not exposed to the outside. Therefore, the heat provided from the heating element (not shown) is captured in the inner peripheral surface of the protrusion 415' in direct contact with the connection unit 412, and the loss path of the heat discharged to the outside is bypassed or expanded by the third section 4153' , thus, the heat insulation efficiency of the block heater assembly 400 can be improved.

In addition, since the first heat transfer unit 410a and the second heat transfer unit 410b overlap the connection unit 412 in a staggered structure, a heat conduction path is formed along the arrows between the adjacent first heat transfer units 410a and the second heat transfer unit 410b. , and realize temperature compensation along the heat conduction path, so that the uniform distribution of temperature can be maintained. Therefore, the block heater assembly 400 can heat the gas line 300 uniformly in the separate heating zones z1, z2, and z3.

According to at least one embodiment of the present invention, heat with uniform temperature is provided within a predetermined interval of the gas pipeline, thereby suppressing state changes of the processing gas flowing in the gas pipeline, the number of defective particles is significantly reduced, and the quality of the deposited film is improved. .

It should be noted that the effects of the present invention are not limited to the above-mentioned effects, and those of ordinary skill in the art will clearly understand other aspects and unmentioned effects of the present invention based on the above description of the present invention.

Although only a few embodiments are described above, various other embodiments may be provided. Unless they are incompatible, the above embodiments may be combined in various ways, and new embodiments may thereby be implemented.

It will be apparent to those of ordinary skill in the art that the present invention may be embodied in specific forms other than those set forth herein without departing from the spirit and essential characteristics of the invention. Accordingly, the above detailed description is to be construed in all respects as illustrative and not restrictive. The scope of the present invention should be determined by a reasonable interpretation of the appended patent scope, and all changes that fall within the equivalent range of the appended patent scope should be included therein.

1:Semiconductor manufacturing equipment 10:Evaporator 20: Chamber 30:Gas pipeline 40:Block heater 41, 43, 45: unit heating module 1000:Semiconductor manufacturing equipment 100:Evaporator 200, 200a: Processing chamber 200b:EVAC 300:Gas pipeline 310: round tube 320:Ontology 330:Connection components 340: Valve body 341: Entrance 342:First exit 343:Second exit 400: Block heater assembly 400a, 400b, 400c, 400d, 400e, 400f: block heater 400a-1: First unit block heater 400a-2: Second unit block heater 410:Heat transfer unit 410a: First heat transfer unit 410b: Second heat transfer unit 410c: Third heat transfer unit 411:Block 412: Connection unit 412a, 412b: Surface 413, 413a, 413b: convex part 4131:Coupling protrusion 4131a, 4131b: Surface 415, 415a, 415b, 415c: concave part 4151:Coupling notch 4153:Side wall 4153a: Surface 415’:Protrusion 4151’: first paragraph 4152’:Second paragraph 4153’: The third paragraph 417: Notch 4171, 4173: Caught in a notch 4175:Step notch 4177:Notch 419: accommodation notch 420: Shell 430:Heating element 440:Cover 450: air gap 460: Filling Department 500: Fixed means A, C: area S:Substrate z1, z2, z3, z4, z5, z6: heating zone B, B1, B2: coupling area a1: gap area a2: gap OP: Open your mouth d1, d2, d3, d4, d5: width

The drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this document, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention. In the diagram: FIG. 1 is a view schematically showing the structure of a conventional block heater. 2 is a view schematically showing the configuration of a semiconductor manufacturing equipment having a block-type heater assembly according to one embodiment of the present invention. FIG. 3 is an exploded perspective view of the block heater assembly shown in FIG. 2 . FIG. 4 is a cross-sectional view of the block heater taken along line 1-1' of FIG. 2 . 5 is a perspective view of a heat transfer unit of a block heater assembly according to an embodiment of the present invention. 6 is a perspective view illustrating a heat transfer unit of a block heater assembly according to another embodiment of the present invention. 7 is a perspective view illustrating a heat transfer unit of a block heater assembly according to another embodiment of the present invention. 8 is a view illustrating a block heater applied to a gas pipeline including a three-way valve according to one embodiment of the present invention. Figure 9 is a perspective view of a block heater assembly according to yet another embodiment of the present invention.

1000:Semiconductor manufacturing equipment

100:Evaporator

200: Processing Chamber

300:Gas pipeline

400: Block heater assembly

400a, 400b, 400c: block heater

410:Heat transfer unit

411:Block

413:convex part

4131:Coupling protrusion

4131a, 4131b: surface

415: concave part

4151:Coupling notch

4153:Side wall

4153a: Surface

420: Shell

S:Substrate

z1, z2, z3: heating zone

B: coupling area

a1: gap area

a2: gap

Claims (7)

A block heater assembly includes: a plurality of block heaters, each of the block heaters includes: at least one heating element for providing predetermined heat to a gas pipeline; a plurality of heat transfer units disposed on the between the gas pipeline and the at least one heating element to transfer heat to the gas pipeline. The heat transfer units include a first heat transfer unit and a second heat transfer unit; and a connection unit disposed on the heat transfer units. between the thermal units, wherein a plurality of recessed portions are respectively provided at opposite ends of the heat transfer units and have the same shape, and wherein the connecting unit is formed to have a sufficient size to be inserted into the recessed portions of the heat transfer units middle. The block heater assembly of claim 1, wherein the connection unit is made of a material with the same thermal conductivity as the heat transfer units. The block heater assembly of claim 2, wherein the connection unit includes any one selected from the group consisting of aluminum (AL), copper (Cu), silver (Ag), tungsten (W) and combinations thereof By. The block heater assembly of claim 1, wherein a width of the connecting unit is equal to a first width of a coupling notch on one side of the first heat transfer unit and the other side of the second heat transfer unit. The sum of a second width of a coupling recess on the sides. The block heater assembly of claim 1, wherein the connection unit is connected to the recess formed on one side of the first heat transfer unit and the recess formed on the other side of the second heat transfer unit. Overlapping, and firmly fastened to the first heat transfer unit and the second heat transfer unit through fitting. The block heater assembly of claim 1, wherein each of the recesses has a [or U-shaped cross section. The block heater assembly of claim 6, wherein the connection unit is completely surrounded by the coupling between the first heat transfer unit and the second heat transfer unit, and the connection unit is not exposed to the outside.

Images