CN113261087A

CN113261087A - Block heater and block heater assembly

Info

Publication number: CN113261087A
Application number: CN201980083310.5A
Authority: CN
Inventors: 闵明基; 金正国; 吴世龙; 李泰昊
Original assignee: Jusung Engineering Co Ltd
Current assignee: Jusung Engineering Co Ltd
Priority date: 2018-12-17
Filing date: 2019-12-11
Publication date: 2021-08-13
Also published as: KR20200074870A; TWI829829B; TW202029429A

Abstract

The block heater according to an embodiment may include: a heating element for providing a predetermined amount of heat to the gas line; and a heat transfer unit disposed between the gas line and the heating element to transfer heat to the gas line, wherein the heat transfer unit includes a convex or concave portion formed on at least one side of the heat transfer unit in a length direction of the gas line.

Description

Block heater and block heater assembly

Technical Field

The invention relates to a block heater and a block heater assembly.

Background

Generally, a chemical vapor deposition (CVP) process is a process for evaporating a liquid-phase material into an evaporation gas and depositing the evaporation gas in the form of a thin film on a surface of a semiconductor device. In the chemical vapor deposition process, if heat is unevenly transferred to a gas line (which is a path along which an evaporation gas flows), a liquid-phase material is unevenly heated, thereby generating defects such as particles. Thus, the degree to which uniform temperature is provided throughout the gas line is directly related to semiconductor manufacturing efficiency.

In order to solve the above problems, a block heater as a means for heating a gas line to a uniform temperature has been continuously studied.

Fig. 1 is a diagram schematically showing the configuration of a conventional block heater.

Referring to fig. 1, a semiconductor manufacturing apparatus 1 is configured to: a block heater 40 configured to heat the gas line 30 is disposed between the vaporizer 10 and the chamber 20, and the block heater 40 includes a plurality of divided unit heating modules 41, 43, and 45. However, the conventional block heater has the following problems.

When the connection structure of the block heater 40 shown in the area a of fig. 1 is carefully observed, a predetermined gap is formed between the adjacent ones of the unit heating modules 41, 43, and 45 that contact each other due to the difference in the thermal expansion coefficient between the gas line 30 and the block heater 40, and a portion of the gas line 30 is exposed outwardly through each gap.

Due to the decrease in thermal conductivity, cold spots (cold spots) are formed at the exposed portion of the gas line 30, and the evaporated gas is liquefied again, whereby the gas line may be clogged, and defective particles are generated.

There is therefore a need for a connection structure of a block heater: a uniform temperature is provided in a predetermined portion of the gas line in order to ensure stability of the boil-off gas.

Disclosure of Invention

[ problem ] to provide a method for producing a semiconductor device

Embodiments provide a block heater and a block heater assembly in which the shape of a heat transfer unit is changed such that adjacent block heaters are connected to each other while overlapping each other, whereby a uniform temperature can be provided within a predetermined portion of a gas line.

Technical objects that can be achieved by the embodiments are not limited to what is specifically described above, and other technical objects that are not described herein will be more clearly understood to those of ordinary skill in the art from the following detailed description.

[ technical solution ] A

In one embodiment, a block heater comprises: a heating element configured to provide a predetermined amount of heat to the gas line; and a heat transfer unit disposed between the gas line and the heating element to transfer heat to the gas line, wherein the heat transfer unit includes a convex or concave portion formed on at least one side of the heat transfer unit in a length direction of the gas line.

The heat transfer unit may be formed of an aluminum (Al) material having excellent heat conduction efficiency.

Aluminum oxide (Al) may be formed on the surface of the heat transfer unit by anodizing₂O₃) And (3) a membrane.

The heating element may be a planar heating element.

The block heater may further include a cover plate disposed opposite the heat transfer unit in a state in which the heating element is disposed between the cover plate and the heat transfer unit, wherein an air gap may be formed between an outer surface of the cover plate and an inner surface of the case.

The heat transfer unit may include a first recess having a shape corresponding to a shape of the gas line and a second recess disposed adjacent to the first recess, the second recess having a shape corresponding to a shape of a connection member mounted to an end of the gas line.

In another embodiment, a block heater assembly comprises: a plurality of block heaters, each of which includes a heat transfer unit, wherein a plurality of protrusions or a plurality of recesses are provided at opposite ends of the heat transfer unit, and the heat transfer units are coupled to each other by engagement between each protrusion and a corresponding one of the recesses.

Each block heater may include at least one heating element configured to provide a predetermined amount of heat to the gas line.

One surface of each projection may contact a surface of the gas line, and one surface of each recess may contact another surface of a corresponding one projection while being spaced apart from the gas line.

The block heater assembly may further include a connection unit disposed between the heat transfer units, wherein the connection unit may be made of a material having the same thermal conductivity as the heat transfer units.

[ PROBLEMS ] the present invention

According to at least one embodiment of the present invention, heat having a uniform temperature is provided within a predetermined portion of a gas line, thereby suppressing a change in the state of a process gas flowing in the gas line, significantly reducing the amount of defective particles, and improving the quality of a deposited film.

It should be noted that the effects of the present invention are not limited to the above-mentioned effects, and the effects not mentioned above will be clearly understood from the above description of the present invention to those skilled in the art.

Drawings

Fig. 1 is a diagram schematically showing the configuration of a conventional block heater;

fig. 2 is a diagram schematically showing the configuration of a semiconductor manufacturing apparatus including a block heater assembly according to an embodiment of the present invention;

FIG. 3 is an exploded perspective view of the block heater assembly shown in FIG. 2;

FIG. 4 is a cross-sectional view of the block heater taken along line 1-1' of FIG. 2;

FIG. 5 is a perspective view illustrating a heat transfer unit of a block heater assembly according to an embodiment of the present invention;

FIG. 6 is a perspective view illustrating a heat transfer unit of a block heater assembly according to another embodiment of the present invention;

FIG. 7 is a perspective view illustrating a heat transfer unit of a block heater assembly according to another embodiment of the present invention;

fig. 8 is a diagram illustrating a block heater applied to a gas line including a three-way valve according to an embodiment of the present invention;

fig. 9 is a perspective view illustrating a block heater assembly according to still another embodiment of the present invention.

Best mode

Reference will now be made in detail to the preferred embodiments, examples of which are illustrated in the accompanying drawings. Specific embodiments thereof are shown by way of example in the drawings and the embodiments may be susceptible to various modifications and alternative forms.

It will be understood that, although the terms first, second, etc. may be used herein to describe various elements, these elements should not be limited by these terms. Furthermore, relative terms such as "on.. upper/above" and "on.. lower/below" are used merely to distinguish one object or element from another object or element without necessarily or necessarily involving any physical or logical relationship or order between such objects or elements.

The terminology used in the description is for the purpose of providing an explanation of particular embodiments only and is not intended to be limiting of the invention. A singular form may include a plurality unless it is meant to be clearly different depending on the context.

Hereinafter, a block heater and a block heater assembly according to embodiments will be described with reference to the accompanying drawings.

Fig. 2 is a diagram schematically showing the configuration of a semiconductor manufacturing apparatus including a block heater assembly according to an embodiment of the present invention.

Referring to fig. 2, the semiconductor manufacturing apparatus 1000 includes: an evaporator 100 configured to evaporate a liquid-phase treatment material; a process chamber 200 configured to inject a process gas supplied from the vaporizer 100 thereinto in order to deposit a thin film on the substrate S; a gas line 300 disposed between the vaporizer 100 and the process chamber 200 so as to define a passage of the process gas; and a block heater assembly 400 configured to uniformly heat the entire gas line 300.

The block heater assembly 400 may include a plurality of

block heaters

400a, 400b, and 400c disposed in a plurality of spaced heating zones z1, z2, and z3, respectively.

Each of the

block heaters

400a, 400b, and 400c is a separate unit constituting the block heater assembly 400, and the block heater assembly 400 is an assembly in which the

block heaters

400a, 400b, and 400c are coupled to each other. The block heater assembly 400 can provide heat having a uniform temperature to the entire gas line 300. In fig. 2, the block heater assembly is illustrated as including three block heaters, but this is merely illustrative. The number of block heaters may vary depending on the length of the gas line or the design of the engineer.

Since the block heater assembly 400 includes the

block heaters

400a, 400b, and 400c as separate units as described above, the separate units may be easily detached from or attached to each other during maintenance.

Each of the

block heaters

400a, 400b, and 400c may include: a heat transfer unit 410 configured to receive the gas line 300; a case 420 configured to surround the heat transfer unit 410 and define an appearance of the block heater; and a heating element (not shown) configured to provide a predetermined amount of heat.

The heat transfer unit 410 may include a rectangular block body 411 and a protrusion 413 or a recess 415 formed on at least one side or the other side of the heat transfer unit 410 in a length direction of the gas line 300. Here, the convex 413 and/or the concave 415 of the heat transfer unit 410 serve as a connection part for coupling between adjacent block heaters. Meanwhile, an end of the heat transfer unit 410 formed at one side or the other side of each of the

block heaters

400a and 400c, which communicates with the evaporator 100 and/or the process chamber 200, may have a flat surface.

The convex part 413 may include a coupling protrusion 4131 formed at an outer surface of the block body 411 and protruding by a predetermined length.

The recess 415 may include a coupling recess 4151 formed at an outer surface of the block body 411 and depressed by a predetermined length, and sidewalls 4153 provided at opposite ends thereof due to the formation of the coupling recess 4151.

Now, a coupling structure between adjacent block heaters shown in fig. 2 will be described.

The coupling protrusion 4131 of the convex part 413 formed at one side of the second block heater 400b is inserted and seated in the coupling recess 4151 of the concave part 415 formed at the other side of the first block heater 400a, whereby the first and

second block heaters

400a and 400b are coupled to each other.

The coupling recess 4151 of the recess 415 formed at the other side of the second block heater 400b receives the coupling protrusion 4131 of the protrusion 413 formed at one side of the third block heater 400c, whereby the second and

third block heaters

400b and 400c are coupled to each other.

As described above, the convex part 413 and the concave part 415 of the heat transfer unit 410 are engaged with each other in the length direction of the gas line 300, whereby the adjacent block heaters are tightly fixed to each other by being assembled, and in the coupling region B between the adjacent block heaters, the coupling protrusion 4131 of the convex part 413 and the sidewall 4153 of the concave part 415 overlap each other in a direction perpendicular to the length direction of the gas line 300. Further, one surface 4131a of the convex portion 413 contacts the gas line 300, and one surface 4153a of the concave portion 415 contacts the other surface 4131b of the convex portion 413 while being separated from the gas line 300.

Unlike the conventional block heater 40 shown in fig. 1, the block heater assembly 400 according to the embodiment is configured to: so that the protrusions 413 and the recesses 415 of the adjacent block heaters are formed to have a staggered structure and coupled to each other, whereby an even distribution of temperature can be maintained throughout the gas line 300. Optionally, block heater assembly 400 may uniformly heat the gas lines in separate heating zones z1, z2, and z 3.

Referring to an enlarged view of the coupling region B shown in fig. 2, even if a predetermined gap a1 is formed between the adjacent first and second block heaters 400a and 400B due to a difference in thermal expansion coefficient between the gas line 300 and the heat transfer unit 410, a heat conduction path is defined along arrows (straight lines) between the side wall 4153 of the first block heater 400a and the coupling protrusion 4131 of the second block heater 400B, which overlap each other. Along the heat conduction path, the heat supplied from the first block heater 400a is conducted to the second block heater 400b, and the heat supplied from the second block heater 400c is conducted to the first block heater 400a, whereby the temperature deviation generated at the gap region a1 can be significantly reduced.

Further, a space hermetically sealed by the coupling recess 4151 of the first block heater 400a and the coupling protrusion 4131 of the second block heater 400b is defined in the predetermined gap g2, and a thermal convection path is defined along arrows (concentric circles) in the hermetically sealed space. Since the heat provided from the first and

second block heaters

400a and 400b is transferred to the gas line 300 along the thermal convection path, the formation of cold spots at a portion of the gas line 300 can be prevented.

As described above, the block heater assembly 400 according to the embodiment is configured to have the structure: the heat transfer units 410 of the adjacent block heaters overlap each other while being staggered, whereby temperature deviation between the block heaters can be reduced while preventing cold spots from being formed at portions of the gas line 300. Accordingly, the phase of the process gas flowing in the gas line 300 is not changed (e.g., from a gas phase to a liquid phase), whereby the quality of the deposited film can be improved. Further, alignment during assembly can be easily achieved, and heat loss to the outside through maximum contact between surfaces can also be prevented. Hereinafter, a process of assembling the block heater according to the embodiment will be described.

Fig. 3 is an exploded perspective view of the block heater assembly shown in fig. 2.

Referring to (a) of fig. 3, the block heater assembly 400 according to an embodiment may include a plurality of

block heaters

400a and 400b, and each of the

block heaters

400a and 400b may be formed in a symmetrical structure in which the block heater may be divided into upper and lower portions or left and right portions.

The gas line 300 includes a circular tube 310, a two-way valve body 320, and a connecting member 330 having bolts mounted to the body.

The heat transfer unit 410 of the first block heater 400a has a shape corresponding to that of the gas line 300 so as to be closely fitted to the gas line 300. The heat transfer unit 410 includes: concave recesses 4171 and 4173 formed in portions thereof corresponding to the tube 310 and the two-way valve body 320 of the gas line 300 so as to be in surface contact with the gas line 300; and a stepped recess 4175 formed in a portion thereof corresponding to the bolt-mounted coupling member 330 of the gas line 300 so as to be in contact with the gas line regardless of the position of the bolt. As described above, the plurality of recesses 417 are formed in the heat transfer unit 410 so that the contact area is increased over the entire gas line 300. This configuration is provided to uniformly conduct predetermined heat from the heat transfer unit 410 to the gas line. If such a contact state is released at a certain portion, the heat conduction efficiency at the portion may be significantly reduced.

Referring to (b) of fig. 3, the first unit block heaters 400a-1 of the first block heater 400a formed in a symmetrical structure are assembled in a direction perpendicular to the length direction of the gas line 300, and thus are uniformly in close contact with the gas line 300, which is an object to be heated. Here, a fastening means 500 such as a fastener or a catching jaw is provided at an upper portion and/or a side portion of the first unit block heater 400 a-1.

Referring to (c) of fig. 3, the second unit block heater 400a-2 of the first unit block heater 400a formed in a symmetrical structure is uniformly brought into close contact with the gas line 300, which is the object to be heated, while being firmly fastened and coupled to the first unit block heater 400a-1 by the fastening means 500 provided at the first unit block heater 400 a-1.

Meanwhile, as previously described, the first and second unit block heaters 400a-1 and 400a-2 constituting the first block heater 400a are symmetrical with respect to the length direction of the gas line 300, and the unit block heaters 400a-1 and 400a-2 include the same components.

Hereinafter, the assembly of the block heater will be described with reference to a sectional view of the block heater shown in fig. 4.

FIG. 4 is a cross-sectional view of the block heater taken along line 1-1' of FIG. 2.

Referring to fig. 4, the block heater 400a may include: a heat transfer unit 410 configured to receive the gas line 300; a case 420 configured to surround the heat transfer unit 410 and define an appearance of the block heater; a heating element 430 configured to provide a predetermined amount of heat; and a cover plate 440 configured to cover the heating element 430.

The heat transfer unit 410 may be formed to correspond to the shape of the gas line 300 and may contact the surface of the gas line 300 such that a predetermined heat provided from the heating element 430 is conducted to the gas line 300.

The heat transfer unit 410 may be made of a material having high thermal conductivity, for example, the heat transfer unit 410 may include any one material selected from the group consisting of aluminum (Al), copper (Cu), silver (Ag), tungsten (W), and a combination thereof, but the present invention is not limited thereto. The heat transfer unit 410 made of a material having high thermal conductivity can smoothly transfer heat provided from the heating element 430 to the gas line 300.

The surface of the heat transfer unit 410 is anodized to have high corrosion resistance as well as wear resistance. Aluminum oxide (Al) may be formed on the surface of the heat transfer unit 410 by anodizing₂O₃) And (3) a membrane.

At least one depression 417 (e.g., concave depressions 4171 and 4173 and step depression 4175) having a shape corresponding to the shape of the outer circumferential surface of the gas line 300 may be formed at one end of the heat transfer unit 410, and a receiving depression 419 depressed to a predetermined depth may be formed at the other end of the heat transfer unit 410 to receive the heating element 430.

The heating element 430 may provide a predetermined amount of heat to the heat transfer unit 410 so that the process gas flowing in the gas line 300 is heated to a uniform temperature.

The heating element 430 may be a planar heating element configured such that the heating area is uniformly distributed over its entire area so as to have a uniform distribution of temperature.

The heating element 430 may be seated in a receiving recess 419 formed at the other end of the heat transfer unit 410. At this time, the depth or width of the receiving recess 419 may correspond to the thickness or width of the heating element 430, so that a separate space is not formed between the receiving recess 419 and the heating element 430, and an air pocket is not formed. The reason for this is that: in the case where the air pocket is formed at the junction surface between the accommodation recess 419 and the heating element 430, a uniform temperature is not provided to the heat transfer unit 410 due to the local dispersion of heat.

The cover plate 440 is disposed opposite to the heat transfer unit 410 in a state where the heating element 430 is disposed between the heat transfer unit 410. In addition, a cover plate 440 is disposed on the other end of the heat transfer unit 410 and the heating element 430 to cover the heating element 430 seated in the receiving recess 419.

The cover plate 440 may be provided to improve uniformity of heat emitted from the heating element 430 and fix the position of the heating element 430, and may be made of, for example, a silicon carbide (SiC) material.

The case 420 may surround the heat transfer unit 410 and/or the cover plate 440, and may define the appearance of the block heater 400 a.

The case 420 may be made of an insulating material having high heat resistance in order to prevent heat supplied from the heating element 430 from escaping the block heater 400 a. As an example of an insulating material having high heat resistance, polyether ether ketone (PEEK) may be used.

In addition, a coating layer configured to reflect heat emitted from the heating element 430 to the heat transfer unit 410 may be provided on an inner surface of the case 420 in order to improve thermal insulation or heat generation performance.

A predetermined air gap 450 may be formed between the inner surface of the housing 420 and the outer surface of the cap plate 440. The reason for this is that: in the case where the air gap 450 is not formed in the case 420, heat generated from the heating element 430 may be conducted to the case 420 through the cap plate 440, and the thermal insulation performance of the case 420 may be significantly reduced due to the conducted heat.

Accordingly, in the block heater 400a according to the embodiment, the separate air gap 450 is formed in the case 420, whereby it is possible to control a heat flow path between the heating element 430 and the case 420 and to ensure the thermal insulation performance of the case 420.

At this time, the width d1 of the air gap 450 may be equal to or may correspond to the width d2 of the heating element 430. Alternatively, the area of the air gap 450 may be equal to or may correspond to the area of the heating element 430.

Meanwhile, as previously described, the heating element 430 is designed to be covered by the receiving recess 419 and the cover plate 440 of the heat transfer unit 410 in order to provide heat having a uniform temperature. At this time, the heating element 430 is not directly disposed at one side and/or the other side of the heat transfer unit 410 for design-related reasons. Therefore, it is required to improve the heat conduction efficiency at one side and/or the other side of the heat transfer unit 410 connected to the adjacent block heater in order to prevent the occurrence of the local temperature difference over the entire gas line 300. This will be described with reference to fig. 5 to 7.

Fig. 5 to 7 are perspective views of the heat transfer unit taken along line 2-2' of fig. 2.

Fig. 5 is a perspective view illustrating a heat transfer unit of a block heater assembly according to an embodiment of the present invention.

Referring to an exploded perspective view shown in (a) of fig. 5, the first heat transfer unit 410a and the second heat transfer unit 410b have the same shape in which a concave portion 415 and a convex portion 413 are formed at one side and the other side thereof. At this time, the first heat transfer unit 410a and the second heat transfer unit 410b may be sequentially disposed in the length direction of the gas line 300.

The first heat transfer unit 410a may include a concave portion 415a formed at one side thereof and a convex portion 413a formed at the other side thereof, and the second heat transfer unit 410b may include a concave portion 415b formed at one side thereof and a convex portion 413b formed at the other side thereof.

The convex part 413 includes a coupling protrusion 4131 formed at an outer surface of the block body 411 and protruding a predetermined length, and the concave part 415 includes a coupling recess 4151 formed at an outer surface of the block body 411 and depressed a predetermined length and sidewalls 4153 disposed at opposite ends thereof due to the formation of the coupling recess 4151.

Referring to an assembled perspective view shown in (b) of fig. 5, the convex part 413a formed at the other side of the first heat transfer unit 410a and the concave part 415b provided at one side of the second heat transfer unit 410b overlap each other and are closely fixed to each other by fitting.

The recess 415b may be formed to have a size such that the convex portion 413a can be inserted thereinto, and the width of the coupling protrusion 4131 may be equal to the width of the coupling recess 4151 such that the coupling protrusion 4131 is disposed inside the coupling recess 4151. Here, the width of the coupling protrusion 4131 may be about 3 to 8mm, but the present invention is not limited thereto.

Meanwhile, heat supplied from the first heating element (not shown) may be conducted to the second heat transfer unit 410b via the concave portion 415b, which is located at one side of the second heat transfer unit 410b and overlaps the convex portion 413a located at the other side of the first heat transfer unit 410a, and heat supplied from the second heating element (not shown) may be conducted to the first heat transfer unit 410a via the convex portion 413a, which is located at the other side of the first heat transfer unit 410a and overlaps the concave portion 415b located at one side of the second heat transfer unit 410 b.

As described above, a heat conduction path may be defined along the arrows between the coupling protrusion 4131 positioned at the other side of the first heat transfer unit 410a and the sidewall 4153 positioned at one side of the second heat transfer unit 410B, which overlap each other, whereby temperature compensation may be achieved in the region B where the first heat transfer unit 410a and the second heat transfer unit 410B are coupled to each other. Accordingly, an even distribution of temperature can be maintained throughout the first and second

heat transfer units

410a and 410 b. Optionally, bulk heater assembly 400 may uniformly heat gas line 300 in separate heating zones z1, z2, and z 3.

Fig. 6 is a perspective view illustrating a heat transfer unit of a block heater assembly according to another embodiment of the present invention.

Referring to an exploded perspective view shown in fig. 6 (a), the first heat transfer unit 410a and the second heat transfer unit 410b are provided at opposite sides thereof with concave portions 415a or convex portions 413b and have different shapes. At this time, the first heat transfer unit 410a and the second heat transfer unit 410b may be alternately disposed in the length direction of the gas line 300.

The convex portions 413b may be formed at opposite sides of the second heat transfer unit 410b, and the

concave portions

415a and 415c may be formed at opposite sides of the first and third

heat transfer units

410a and 410c located at one side and the other side of the second heat transfer unit 410 b. In the case where the second heat transfer unit 410b is disposed between the first heat transfer unit 410a and the third heat transfer unit 410c at opposite sides where the

recesses

415a and 415c are formed, respectively, as described above, a user may easily detach the heat transfer units from each other during maintenance.

Referring to an assembled perspective view shown in (b) of fig. 6, the concave portion 415a formed at the other side of the first heat transfer unit 410a and the convex portion 413b provided at one side of the second heat transfer unit 410b overlap each other and are closely fixed to each other by fitting; the convex part 413b formed at the other side of the second heat transfer unit 410b and the concave part 415c provided at one side of the third heat transfer unit 410c overlap each other and are closely fixed to each other by fitting.

As shown in the drawing, adjacent heat transfer units are formed to have a staggered structure in a state of overlapping each other. As a result, in the coupling region B1 between the first heat transfer unit 410a and the second heat transfer unit 410B and/or the coupling region B2 between the second heat transfer unit 410B and the third heat transfer unit 410c, a heat conduction path may be formed, and temperature compensation may be achieved along the formed heat conduction path, whereby uniform distribution of temperature may be maintained throughout the first to third

heat transfer units

410a, 410B, and 410 c. Optionally, bulk heater assembly 400 may uniformly heat gas line 300 in separate heating zones z1, z2, and z 3.

Fig. 7 is a perspective view illustrating a heat transfer unit of a block heater assembly according to another embodiment of the present invention.

Referring to an exploded perspective view shown in (a) of fig. 7, the first heat transfer unit 410a and the second heat transfer unit 410b are provided at opposite sides thereof with

recesses

415a and 415b, respectively, and have the same shape. At this time, a connection unit 412 may be disposed between the first heat transfer unit 410a and the second heat transfer unit 410 b.

The connection unit 412 may be formed to have a size sufficient to be inserted into the

recesses

415a and 415b of the first and second

heat transfer units

410a and 410b, and the width d3 of the connection unit 412 may be equal to the sum of a first width d4 of the coupling recess 4151 at the other side of the first heat transfer unit 410a and a second width d5 of the coupling recess 4151 at the one side of the second heat transfer unit 410 b. Here, the width d3 of the connection unit 412 may be about 3 to 8mm, but the present invention is not limited thereto.

The connection unit 412 may be made of a material having high thermal conductivity. For example, the connection unit 412 may include any one material selected from the group consisting of aluminum (Al), copper (Cu), silver (Ag), tungsten (W), and a combination thereof, but the present invention is not limited thereto.

In addition, the connection unit 412 may be made of a material having the same thermal conductivity as the first and second

heat transfer units

410a and 410 b. If the thermal conductivity of the connection unit 412 is different from the thermal conductivity of the first and second

heat transfer units

410a and 410b, the amounts of heat transferred to the respective regions of the gas line 300 may be different from each other, and thus a uniform distribution of temperature may not be maintained throughout the gas line 300.

Referring to an assembled perspective view shown in (b) of fig. 7, the connection unit 412 overlaps the recess 415a formed at the other side of the first heat transfer unit 410a and the recess 415b formed at one side of the second heat transfer unit 410b, and is closely fixed thereto by fitting. At this time, one surface 412a of the connection unit 412 contacts the surface of the gas line 300, and one surface 4153a of the recess 415 contacts the other surface 412b of the connection unit 412 while being spaced apart from the gas line 300.

Meanwhile, heat supplied from the first heating element (not shown) may be conducted to the second heat transfer unit 410b via the connection unit 412 overlapping the recess 415a located at the other side of the first heat transfer unit 410a, and heat supplied from the second heating element (not shown) may be conducted to the first heat transfer unit 410a via the connection unit 412 overlapping the recess 415b located at one side of the second heat transfer unit 410 b. That is, the first and second heat transfer units 410a and 410B adjacent to each other may be formed to have a staggered structure in a state of overlapping each other by the arrangement of the connection units 412, and a heat conduction path may be formed in the coupling region B1 between the first and second heat transfer units 410a and 410B, and temperature compensation may be achieved along the formed heat conduction path, whereby uniform distribution of temperature may be maintained throughout the first and second heat transfer units 410a and 410B. Optionally, bulk heater assembly 400 may uniformly heat gas line 300 in separate heating zones z1, z2, and z 3.

Hereinafter, a block heater structure applicable to the gas line 300 including the three-way valve will be described with reference to fig. 8.

Fig. 8 is a diagram illustrating a block heater applied to a gas line including a three-way valve according to an embodiment of the present invention.

For convenience of description, descriptions overlapping those of fig. 2 will be omitted, and descriptions will be given based on differences.

Referring to fig. 8, the block heater assembly may include a plurality of block heaters 400a to 400f disposed in a plurality of partitioned heating zones z1 to z 6.

As shown in region C of fig. 8, the gas line 300 provided in the fifth heating zone z5 among the heating zones z1 to z6 may further include a three-way valve configured to selectively discharge the process gas introduced from the vaporizer 100 to the process chamber 200a or the EVAC 200 b.

The three-way valve includes: a valve body 340 in which an inlet 341 and first and second outlets 342 and 343 are formed; and a ball (not shown) installed in the valve body 340 to open and close the process gas flow path or change the direction of the process gas flow path.

As described above with reference to fig. 3, the heat transfer unit 410 disposed in close contact with the gas line 300 having the two-way valve has a shape corresponding to that of the gas line 300 to be fitted on the gas line 300. In particular, the heat transfer unit 410 is provided with a concave groove 4173, and the concave groove 4173 has a shape corresponding to the shape of the outer circumferential surface of the main body 320 of the two-way valve to make surface contact with the main body 320 of the two-way valve.

However, for the heat transfer unit 410 disposed in close contact with the gas line 300 having the three-way valve, as shown in fig. 8, the recess 4177 formed in the main body 340 of the three-way valve may have a different shape. If the predetermined recess is formed in the surface of the heat transfer unit 410 and has a shape corresponding to the shape of the outer circumferential surface of the valve main body 340, it is impossible to mount a valve head (not shown) for reasons related to work. The reason is that: for the three-way valve, unlike the two-way valve, a position where a valve head (not shown) is installed is limited due to interference of a gas line.

Accordingly, the heat transfer unit 410 of the block heater 400e according to the embodiment may be disposed in a surface thereof having the predetermined recess 4177, wherein the predetermined recess 4177 is configured to receive a three-way valve. The recess 4177 may be formed with a size sufficient to receive the body 340 of the three-way valve. At this time, the inner diameter of the recess 4177 may be formed to be greater than the outer diameter of the valve body 340.

The block heater 400e may further include a filling part 460 disposed in a space between the recess 4177 and the valve body 340, the filling part 460 being made of a material having the same thermal conductivity as the heat transfer unit 410. This is to uniformly conduct predetermined heat from the heat transfer unit 410 to the gas line 300 and improve heat conduction efficiency at a portion where a contact state is released due to the formation of the recess 4177. The packing part may maximize surface contact with the gas line 300, thereby achieving effective heat transfer.

Referring to an exploded perspective view shown in (a) of fig. 9, the block heater assembly 400 may include a plurality of

heat transfer units

410a and 410b and a connection unit 412 disposed between the

heat transfer units

410a and 410b, and the

heat transfer units

410a and 410b may be formed to have the same shape.

Each of the

heat transfer units

410a and 410b includes a block main body 411 and a pair of protrusions 415 integrally formed at opposite side surfaces of the block main body 411, each protrusion 415 having a "[" or "U" shaped cross section and being formed to protrude by a predetermined thickness d4 at an outer surface of the block main body 411.

The protrusion 415 includes a first section 4151, a second section 4152 opposite to the first section 4151, and a third section 4153 disposed between the first and

second sections

4151 and 4152 to prevent heat provided from a heating element (not shown) from being discharged to the outside, and the concave depression 417 disposed in surface contact with the gas line 300 may be opened through the protrusion 415. Each of the

heat transfer units

410a and 410b is provided at one side and the other side thereof with an opening OP, which is surrounded by the outer surface of the block body 411 and the inner circumferential surface of the protrusion 415, and the connection unit 412 may be inserted into the opening OP.

The connection unit 412 is formed to have a size and/or shape sufficient to be closely inserted into the openings OP formed at one side and the other side of the

heat transfer units

410a and 410 b. For example, the cross-sections of the connection unit 412 and the opening OP are consistent with each other in area and shape, and the width d3 of the connection unit 412 may be twice the thickness d4 of the protrusion 415 (d4 ═ d 3/2).

In addition, the connection unit 412 may be made of a material having the same thermal conductivity as the

heat transfer units

410a and 410 b. For example, the connection unit 412 may include any one material selected from the group consisting of aluminum (Al), copper (Cu), silver (Ag), tungsten (W), and a combination thereof.

Referring to an assembled perspective view shown in (b) of fig. 9, the connection unit 412 overlaps the openings OP formed at one side and the other side of the

heat transfer units

410a and 410b, and is tightly fixed thereto by fitting.

At this time, the front surface 412a of the connection unit 412 contacts the surface of the gas line 300, and the rear surface 412b of the connection unit 412 opposite to the front surface 412a directly contacts the third sections 4153 of the protrusions 415 constituting the

heat transfer units

410a and 410 b. Further, each of the upper and lower surfaces of the connection unit 412 directly contacts a corresponding one of the first and

second sections

4151 and 4152 of the protrusion 415, and the side surface of the connection unit 412 directly contacts the block body 411.

That is, the connection unit 412 is completely surrounded by the coupling between the

heat transfer units

410a and 410b, not exposed to the outside. Accordingly, heat supplied from the heating element (not shown) is captured in the inner circumferential surface of the protrusion 415, which is in direct contact with the connection unit 412, and a loss path of the heat discharged to the outside is bypassed or extended by the third section 4153, whereby the thermal insulation efficiency of the block heater assembly 400 can be improved.

Further, since the

heat transfer units

410a and 410b overlap the connection unit 412 in a staggered structure, a heat conduction path is formed along an arrow between the adjacent

heat transfer units

410a and 410b, and temperature compensation can be achieved along the heat conduction path, whereby uniform distribution of temperature can be maintained. Thus, the bulk heater assembly 400 can uniformly heat the gas line 300 in the separate heating zones z1, z2, and z 3.

It should be noted that the effects of the present invention are not limited to the above-mentioned effects, and other effects not mentioned will be clearly understood by those of ordinary skill in the art from the above description of the present invention.

Although only a few embodiments have been described above, various other embodiments may be provided. The above-described embodiments may be combined in various ways (unless incompatible), and new embodiments may be implemented accordingly.

It will be apparent to those skilled in the art that the present invention may be embodied in specific forms other than those set forth above without departing from the spirit or essential characteristics of the invention. The foregoing detailed description is, therefore, to be construed in all aspects as illustrative and not restrictive. The scope of the invention should be determined by reasonable interpretation of the appended claims and all changes which come within the range of equivalency of the appended claims are intended to be embraced therein.

[ modes for the invention ]

The modes for carrying out the invention have been described fully in the above best modes for carrying out the invention.

[ INDUSTRIAL APPLICABILITY ]

The invention relates to a block heater and a block heater assembly. Therefore, the present invention has industrial applicability.

Claims

1. A block heater comprising:

a heating element configured to provide a predetermined amount of heat to the gas line; and

a heat transfer unit disposed between the gas line and the heating element to transfer heat to the gas line, wherein

The heat transfer unit includes a protrusion or a recess formed on at least one side of the heat transfer unit in a length direction of the gas line.

2. The block heater according to claim 1, wherein the heat transfer unit is made of an aluminum (Al) material having excellent heat transfer efficiency.

3. The block heater according to claim 2, wherein aluminum oxide (Al) is formed on the surface of the heat transfer unit by anodizing₂O₃) And (3) a membrane.

4. The block heater according to claim 1, wherein the heating element is a planar heating element.

5. The block heater of claim 1, further comprising:

a cover plate disposed opposite to the heat transfer unit in a state in which the heating element is disposed between the cover plate and the heat transfer unit, wherein

An air gap is formed between the outer surface of the cover plate and the inner surface of the housing.

6. The block heater according to claim 1, wherein the heat transfer unit comprises:

a first recess having a shape corresponding to a shape of the gas line; and

a second recess disposed adjacent to the first recess, the second recess having a shape corresponding to a shape of a connecting member mounted to an end of the gas line.

7. A block heater assembly comprising:

a plurality of block heaters each including a heat transfer unit, wherein

A plurality of protrusions or a plurality of recesses are provided at opposite ends of the heat transfer unit,

the heat transfer units are coupled to each other by engagement between each of the protrusions and a corresponding one of the recesses.

8. The block heater assembly of claim 7, wherein each block heater comprises at least one heating element configured to provide a predetermined amount of heat to the gas line.

9. The block heater assembly of claim 7, wherein

One surface of each projection contacts a surface of the gas line,

one surface of each concave portion contacts the other surface of the corresponding one convex portion while being spaced apart from the gas line.

10. The block heater assembly of claim 7, further comprising:

a connecting unit disposed between the heat transfer units, wherein

The connection unit is made of a material having the same thermal conductivity as the heat transfer unit.