CN219385401U - Sealing mechanism, double-layer furnace tube device and heating furnace - Google Patents

Abstract

The utility model belongs to the technical field of semiconductor manufacturing, and discloses a sealing mechanism, a double-layer furnace tube device and a heating furnace. The sealing mechanism is arranged at the opening end of the double-layer furnace tube body, the double-layer furnace tube body comprises an inner layer tube and an outer layer tube which are sleeved, and the sealing mechanism comprises a mounting piece and a sealing piece. The installation piece is arranged at the opening end of the double-layer furnace tube body, and the inner layer tube and the outer layer tube are both arranged on the installation piece; the sealing piece is connected to one side of the mounting piece, which is away from the double-layer furnace tube body, and can seal the open ends of the inner layer tube and the outer layer tube. The sealing mechanism can realize simultaneous sealing of the inner layer pipe and the outer layer pipe of the double-layer furnace pipe device, and improves the assembly efficiency of the double-layer furnace pipe device.

Description

Sealing mechanism, double-layer furnace tube device and heating furnace

Technical Field

The utility model relates to the technical field of semiconductor manufacturing, in particular to a sealing mechanism, a double-layer furnace tube device and a heating furnace.

Background

In the diffusion process of semiconductor and photovoltaic materials, a heating furnace is commonly used. The common diffusion process is to place a quartz boat bearing silicon chip and other material matrix in a quartz tube in the heat field of a heating furnace, then to introduce process gas into the quartz tube, and to perform chemical reaction for several times under high temperature condition to deposit film.

At present, in order to improve the uniformity of the coating film of the material matrix, a scheme of a double-layer furnace tube is provided. In the diffusion process, the inner layer pipe and the outer layer pipe of the double-layer furnace pipe are required to be sealed, so that the vacuum state inside the inner layer pipe and the outer layer pipe is ensured.

Therefore, a sealing mechanism, a dual-layer furnace tube apparatus and a heating furnace are needed to solve the above problems.

Disclosure of Invention

According to one aspect of the present utility model, it is an object to provide a closing mechanism capable of simultaneously closing an inner tube and an outer tube of a double-layered furnace tube apparatus, thereby improving the assembly efficiency of the double-layered furnace tube apparatus.

To achieve the purpose, the utility model adopts the following technical scheme:

the closing mechanism, closing mechanism installs in the open end of double-deck boiler tube body, double-deck boiler tube body is including the inlayer pipe and the outer pipe that the cover was established, closing mechanism includes:

the mounting piece is mounted at the opening end of the double-layer furnace tube body, and the inner layer tube and the outer layer tube are both mounted on the mounting piece;

the sealing piece is connected to one side, away from the double-layer furnace tube body, of the mounting piece, and the opening ends of the inner layer tube and the outer layer tube can be sealed.

As a preferable scheme of the sealing mechanism provided by the utility model, the mounting piece is provided with an inner pipe inserting hole and an outer pipe positioning groove, the opening end of the inner pipe is inserted into the inner pipe inserting hole, and the opening end of the outer pipe is inserted into the outer pipe positioning groove.

As a preferable mode of the closing mechanism provided by the utility model, the inner wall of the inner pipe insertion hole is provided with a first abutting table, and the inner pipe can be axially positioned on the first abutting table.

As the preferable scheme of the closing mechanism provided by the utility model, a second abutting table is arranged in the outer tube positioning groove in a surrounding manner, an outer tube boss is arranged at the opening end of the outer tube in a surrounding manner, and the outer tube boss abuts against the second abutting table.

As a preferable scheme of the sealing mechanism provided by the utility model, the sealing piece is provided with a first sealing ring groove, the first sealing ring groove is embedded with a sealing element, and when the sealing piece is connected with the mounting piece, the sealing element is clamped between the sealing piece and the mounting piece.

As the preferable scheme of the sealing mechanism provided by the utility model, the mounting piece is provided with a first air inlet channel, the sealing piece is provided with a second air inlet channel, the first air inlet channel is communicated with the second air inlet channel, and the second air inlet channel is communicated with the inner cavity of the inner layer pipe.

As a preferable mode of the closing mechanism provided by the utility model, the mounting piece is further provided with an exhaust channel, a buffer space is formed between the inner layer pipe and the outer layer pipe, and the exhaust channel is communicated with the buffer space, so that gas in the buffer space can be exhausted from the exhaust channel.

As the preferable scheme of the sealing mechanism provided by the utility model, an annular gas uniform flow space is arranged between the inner pipe inserting hole and the outer pipe positioning groove, and the annular gas uniform flow space is communicated with the exhaust channel and the buffer space.

According to still another aspect of the present utility model, it is an object to provide a double-deck furnace tube apparatus, which includes a double-deck furnace tube body, the double-deck furnace tube body includes the inner layer tube and the outer layer tube, the inner layer tube is sleeved in the outer layer tube, and the double-deck furnace tube apparatus further includes any one of the closing mechanisms in the above-mentioned scheme, and the closing mechanism is disposed at an opening end of the double-deck furnace tube body.

According to another aspect of the present utility model, it is an object to provide a heating furnace, including the double-deck furnace tube apparatus and the furnace body according to the above-mentioned aspects, wherein the double-deck furnace tube body is disposed in the furnace body.

The utility model has the beneficial effects that:

the closing mechanism provided by the utility model is arranged at the opening end of the double-layer furnace tube body, and can simultaneously close the opening end of the inner layer tube and the opening end of the outer layer tube. The closure mechanism includes a mounting member and a closure member. The mounting piece is arranged at the opening end of the double-layer furnace tube body, and the inner layer tube and the outer layer tube are both arranged at the mounting piece. That is, the mount is capable of positioning the open ends of the inner layer pipe and the outer layer pipe and directly closing the opening of the space between the outer layer pipe and the inner layer pipe. The sealing piece is connected to one side of the mounting piece, which is away from the double-layer furnace tube body, and can seal the open ends of the inner layer tube and the outer layer tube. That is, through the assembly cooperation of this closure piece and installed part, can realize the closure of inlayer pipe and outer pipe open end, effectively improve double-deck boiler tube device's packaging efficiency.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the following description will briefly explain the drawings needed in the description of the embodiments of the present utility model, and it is obvious that the drawings in the following description are only some embodiments of the present utility model, and other drawings may be obtained according to the contents of the embodiments of the present utility model and these drawings without inventive effort for those skilled in the art.

FIG. 1 is a schematic diagram of a dual-layer furnace tube apparatus according to an embodiment of the present utility model;

FIG. 2 is an enlarged view of a portion of the structure labeled A in FIG. 1;

FIG. 3 is an enlarged view of a portion of the structure labeled B in FIG. 1;

FIG. 4 is an exploded schematic view of a closure mechanism provided by an embodiment of the present utility model;

fig. 5 is a schematic structural view of a heating furnace according to an embodiment of the present utility model.

In the figure:

10. an inner layer tube; 11. an inner tube boss; 12. a reaction chamber;

20. an outer layer tube; 21. an outer tube boss; 22. a buffer space;

100. a mounting member; 110. the inner pipe is inserted with a hole; 120. an outer tube positioning groove; 121. a second abutment; 122. annular gas uniform flow space; 130. a first abutment; 140. a first air intake passage; 141. a first docking channel; 142. a second docking channel; 150. an exhaust passage; 160. positioning holes; 170. a mounting hole;

200. a closure; 210. a first seal ring groove; 220. a second seal ring groove; 230. a second intake passage; 231. an inlet section; 232. a ventilation section; 233. an outlet section; 240. a thermocouple through hole;

300. an exhaust pipe;

400. and an air inlet pipe.

Detailed Description

The utility model is described in further detail below with reference to the drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the utility model and are not limiting thereof. It should be further noted that, for convenience of description, only some, but not all of the structures related to the present utility model are shown in the drawings.

In the description of the present utility model, unless explicitly stated and limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

In the present utility model, unless expressly stated or limited otherwise, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, as well as the first and second features not being in direct contact but being in contact with each other through additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.

In the description of the present embodiment, the terms "upper", "lower", "right", "left", and the like are orientation or positional relationships based on those shown in the drawings, merely for convenience of description and simplicity of operation, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the utility model. Furthermore, the terms "first," "second," and the like, are used merely for distinguishing between descriptions and not for distinguishing between them.

Embodiments of the present utility model are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative only and are not to be construed as limiting the utility model.

FIG. 1 shows a schematic structure of a dual-layer furnace tube apparatus according to an embodiment of the present utility model; FIG. 2 shows a close-up view of the structure labeled A in FIG. 1; FIG. 3 shows a close-up view of the structure labeled B in FIG. 1; fig. 4 shows an exploded view of a closure mechanism provided by an embodiment of the present utility model. Referring to fig. 1-4, the present embodiment provides a sealing mechanism and a dual-layer furnace tube apparatus. The double-layer furnace tube device comprises a double-layer furnace tube body, wherein the double-layer furnace tube body comprises an inner tube 10 and an outer tube 20 which are coaxially sleeved, the inner tube 10 is sleeved in the outer tube 20, the outer tube 20 is a cylindrical blind tube with one end closed, the inner tube 10 is a cylindrical through tube with two ends open, the inner cavity of the inner tube is a reaction chamber 12, and a quartz boat for bearing a material matrix is placed in the reaction chamber 12. The inner tube 10 has a length smaller than that of the outer tube 20, and an annular buffer space 22 is formed between the inner tube 10 and the outer tube 20. The closing mechanism is disposed at the open end of the dual-layer furnace tube body to close the buffer space 22 and the reaction chamber 12.

Specifically, the closure mechanism includes a mounting member 100 and a closure member 200. The mounting member 100 is mounted at the open end of the dual-layer furnace tube body, and is provided with an inner tube insertion hole 110 and an outer tube positioning groove 120. The open end of the inner tube 10 is inserted into the inner tube insertion hole 110, the inner wall of the inner tube insertion hole 110 is provided with a first abutment 130, and the inner tube 10 can abut against the first abutment 130 to realize axial positioning. The first abutment 130 is an annular boss structure, and the first abutment 130 is disposed around the inner wall of the inner tube insertion hole 110. An inner pipe boss 11 is disposed at a distance from the end of the inner pipe 10, the end of the inner pipe 10 abuts against the first abutment 130, and the inner pipe boss 11 abuts against the opening of the inner pipe insertion hole 110.

More specifically, the outer tube positioning groove 120 is an annular groove concentrically disposed in the inner tube inserting hole 110, the open end of the outer tube 20 is inserted into the outer tube positioning groove 120, and the bottom of the outer tube positioning groove 120 can axially position the outer tube 20. The sealing member 200 is connected to the side of the mounting member 100 facing away from the dual-layer furnace tube body, and can seal the open end of the inner tube 10. A second abutment 121 is provided in the outer tube positioning groove 120.

More specifically, an annular gas uniform flow space 122 is provided between the outer tube positioning groove 120 and the inner tube insertion hole 110. The annular gas uniform flow space 122 can communicate with the buffer space 22. The outer tube positioning groove 120 is provided with a second abutting table 121, and the opening end ring of the outer tube 20 is provided with an outer tube boss 21. When the outer tube 20 is inserted into the outer tube positioning groove 120, the outer tube boss 21 can abut against the second abutment 121, ensuring the mounting stability of the outer tube 20 in the outer tube positioning groove 120.

More specifically, the closure 200 is removably attached to the mounting member 100. In this embodiment, the sealing member 200 has a disc-shaped structure, and the sealing member 200 is abutted against one side of the mounting member 100 away from the dual-layer furnace tube body under the action of a power source such as a cylinder, so as to seal the inner tube insertion hole 110 and further seal the reaction chamber 12. The enclosure 200 is opened to allow the quartz boat carrying the material substrates to be accessed within the reaction chamber 12.

Preferably, the closure 200 defines a plurality of concentrically disposed seal ring grooves. Specifically, in the present embodiment, the closure 200 is provided with a first seal ring groove 210 and a second seal ring groove 220 that are concentrically disposed. The first sealing ring groove 210 and the second sealing ring groove 220 are respectively embedded with a sealing element, when the sealing member 200 abuts against the mounting member 100, the sealing element is clamped between the sealing member 200 and the mounting member 100, and the sealing element can be a rubber sealing ring, and the rubber sealing ring is elastically compressed and deformed, so that the sealing between the sealing member 200 and the mounting member 100 is ensured.

With continued reference to fig. 4, the closure 200 is also provided with a thermocouple aperture 240. The thermocouple through hole 240 is formed at the geometric center of the sealing member 200, the thermocouple can be inserted into the reaction chamber 12 from the thermocouple through hole 240, and a sealing ring is arranged on the thermocouple, and the sealing ring can be tightly attached to the inner wall of the thermocouple through hole 240, so as to ensure the vacuum degree of the reaction chamber 12.

Referring to fig. 1 and 2, the closure mechanism further includes an air inlet pipe 400, the air inlet pipe 400 being connected between the peripheral side portion of the mounting member 100 and an external process air source. In this embodiment, the air inlet pipe 200 may employ a VCR block joint. The mounting member 100 defines a first air inlet passage 140 and the closure member 200 defines a second air inlet passage 230. The first air inlet channel 140 communicates with the air inlet pipe 200, and when the sealing member 200 is in abutting connection with the mounting member 100, the first air inlet channel 140 communicates with the second air inlet channel 230, and the second air inlet channel 230 communicates with the reaction chamber 12.

Specifically, referring to fig. 3, the first air intake passage 140 includes a first docking passage 141 and a second docking passage 142. The first docking channel 141 is a linear channel, and is opened along the radial direction of the mounting member 100, and the second docking channel 142 and the first docking channel 141 are mutually communicated at an angle and opened along the thickness direction of the mounting member 100. In this embodiment, the angle between the second docking channel 142 and the first docking channel 141 is a right angle. The second air inlet channel 230 can be in butt joint with the second butt joint channel 142, so as to open with the first air inlet channel 140.

Referring to fig. 3, the second air intake passage 230 has a C-shaped structure, and includes an inlet section 231, a ventilation section 232, and an outlet section 233, which are sequentially connected. The inlet section 231 and the outlet section 233 are open in the thickness direction of the closure 200. When the fitting 100 and the closing member 200 are assembled and the fitting 100 is installed at the open end of the dual-layered furnace tube body, the inlet section 231 can be communicated with the second docking channel 142 and the outlet section 233 can be communicated with the reaction chamber 12.

More specifically, the sealing mechanism further includes an exhaust pipe 300, the mounting member 100 is further provided with an exhaust channel 150, and the exhaust pipe 300 is connected to the mounting member 100, so as to be capable of communicating the exhaust channel 150 with external air extraction equipment. The exhaust passage 150 communicates with the annular gas uniform flow space 122 in the outer tube positioning groove 120, and the gas in the buffer space 22 can flow into the annular gas uniform flow space 122 and the exhaust passage 150 in sequence. The annular gas uniform flow space 122 can play a role in gas uniform flow, can realize circulation suction in the process of air outlet of the buffer space 22, and effectively prevents gas deposition. The annular gas uniform flow space 122 can achieve a more uniform pumping process of the buffer space 22 compared to single hole pumping, thereby ensuring more uniform tail pumping of the inner tube 10 and helping to further improve the gas uniformity of the inner tube 10. In this embodiment, the exhaust pipe 300 may employ a KF welding head.

Through the arrangement, the sealing mechanism has an air guide function. The process gas can enter the reaction chamber 12 through the closing mechanism in a first direction and flow from the opening at the other end of the inner tube 10 into the outer tube 20, then move back to the closing mechanism in the buffer space 22 in the opposite direction to the first direction and be exhausted by the closing mechanism.

Fig. 5 shows a schematic structural diagram of a heating furnace according to an embodiment of the present utility model. Referring to fig. 5, the present embodiment also provides a heating furnace. The heating furnace is internally provided with a thermal field, and comprises the double-layer furnace tube device provided by the implementation. The double-layer furnace tube body is arranged in the thermal field, and the sealing mechanism is arranged in the heating furnace.

Referring to fig. 4 and 5, the mounting member 100 is provided with a plurality of positioning holes 160, and the plurality of positioning holes 160 are uniformly formed in the mounting member 100. The positioning holes 160 can be penetrated by positioning pins that can position the mounting member 100 at a target position of the housing of the heating furnace. In this embodiment, the number of the positioning holes 160 is three.

Specifically, the mounting member 100 is further provided with a plurality of mounting holes 170, and the plurality of mounting holes 170 are uniformly distributed on the mounting member 100. The mounting holes 170 are provided for mounting bolts that can connect the mounting member 100 to a target location of the housing of the heating furnace. In this embodiment, the number of the mounting holes 170 is also three.

It is to be understood that the above examples of the present utility model are provided for clarity of illustration only and are not limiting of the embodiments of the present utility model. Various obvious changes, rearrangements and substitutions can be made by those skilled in the art without departing from the scope of the utility model. It is not necessary here nor is it exhaustive of all embodiments. Any modification, equivalent replacement, improvement, etc. which come within the spirit and principles of the utility model are desired to be protected by the following claims.

Claims (10)

1. The closing mechanism, its characterized in that, closing mechanism installs in the open end of double-deck boiler tube body, double-deck boiler tube body is including inlayer pipe (10) and outer pipe (20) that the cover was established, closing mechanism includes:

the mounting piece (100) is mounted at the opening end of the double-layer furnace tube body, and the inner layer tube (10) and the outer layer tube (20) are both mounted on the mounting piece (100);

and the sealing piece (200) is connected to one side of the mounting piece (100) away from the double-layer furnace tube body, and can seal the open ends of the inner layer tube (10) and the outer layer tube (20).

2. The closure mechanism according to claim 1, wherein the mounting member (100) is provided with an inner tube insertion hole (110) and an outer tube positioning groove (120), an open end of the inner tube (10) is inserted into the inner tube insertion hole (110), and an open end of the outer tube (20) is inserted into the outer tube positioning groove (120).

3. The closure mechanism according to claim 2, wherein the inner wall of the inner tube insertion bore (110) is provided with a first abutment table (130), the inner tube (10) being axially positionable at the first abutment table (130).

4. The closure mechanism of claim 2, wherein a second abutment (121) is looped in the outer tube positioning groove (120), the open end of the outer tube (20) loops around an outer tube boss (21), the outer tube boss (21) abutting the second abutment (121).

5. The closure mechanism of claim 1, wherein the closure member (200) defines a first sealing ring groove (210), the first sealing ring groove (210) is embedded with a sealing element, and the sealing element is sandwiched between the closure member (200) and the mounting member (100) when the closure member (200) is connected to the mounting member (100).

6. The closure mechanism according to claim 1, wherein the mounting member (100) is provided with a first air inlet channel (140), the closure member (200) is provided with a second air inlet channel (230), the first air inlet channel (140) is communicated with the second air inlet channel (230), and the second air inlet channel (230) is communicated with the inner cavity of the inner layer tube (10).

7. The closure mechanism according to claim 2, wherein the mounting member (100) is further provided with an exhaust passage (150), a buffer space (22) is formed between the inner tube (10) and the outer tube (20), and the exhaust passage (150) communicates with the buffer space (22) so that gas in the buffer space (22) can be exhausted from the exhaust passage (150).

8. The closure mechanism of claim 7, wherein an annular gas uniform flow space (122) is provided between the inner tube insertion hole (110) and the outer tube positioning groove (120), the annular gas uniform flow space (122) being in communication with the exhaust passage (150) and the buffer space (22).

9. The double-layer furnace tube device is characterized by comprising a double-layer furnace tube body, wherein the double-layer furnace tube body comprises an inner layer tube (10) and an outer layer tube (20), the inner layer tube (10) is sleeved in the outer layer tube (20), and the double-layer furnace tube device further comprises a sealing mechanism according to any one of claims 1-8, wherein the sealing mechanism is arranged at the opening end of the double-layer furnace tube body.

10. The heating furnace is characterized by comprising the double-layer furnace tube device and a furnace body, wherein the double-layer furnace tube device and the furnace body are arranged in the furnace body.