KR100739590B1 - Apparatus for heating chamber gas - Google Patents

Abstract

An apparatus for heating chamber gas is provided to improve a thermal efficiency of a heater by forming a heat conducting part in a combination type of a column shape and a wing shape. An apparatus for heating chamber gas includes a heater(230) converting electric energy into thermal energy and a heat conducting part(220) for conducting the heat generated by the heater to a chamber gas(14). The heater and the heat conducting part are enclosed by a housing(210) having an inlet port(212) at an upper portion and an exhaust port(214) at a lower portion. The heat conducting part has a disc-shaped wing formed in a hollow column for receiving the heater, and a gas passing hole is formed around the column.

Description

Chamber gas heating device {Apparatus for heating chamber gas}

1 is a view showing a semiconductor manufacturing chamber and its peripheral apparatus.

2 is a view showing a chamber gas heating apparatus according to an embodiment of the present invention.

FIG. 3 is a diagram illustrating the thermal conductive part of FIG. 2.

4A and 4B illustrate various embodiments of the position of gas through holes.

5 is a view showing a chamber gas heating apparatus according to another embodiment of the present invention.

6 is a view showing a chamber gas heating apparatus according to another embodiment of the present invention.

7 is a view showing a chamber gas heating apparatus according to another embodiment of the present invention.

The present invention relates to a chamber gas heating apparatus, and more particularly, to a chamber gas heating apparatus which has excellent thermal efficiency with a simpler structure, prevents generation of powder, and is easy to maintain and manage.

1 is a view showing a semiconductor manufacturing chamber and its peripheral apparatus.

Chamber gases 12 and 14 are injected into a chamber 10 for producing a wafer, which is a semiconductor material. The chamber gas 12, also called an atmosphere gas, serves as a gas that intentionally or intentionally does not cause a chemical reaction in a process in the chamber.

Generally, the chamber is at a high temperature of 150 to 200 degrees Celsius. On the other hand, since the chamber gas 14 is stored in the external gas tank 30, it is generally room temperature (20 degrees to 30 degrees). This temperature difference causes the chemical reaction in the first chamber to deteriorate, and secondly, the formation of powder when the chamber gas is introduced into the chamber. Powder is a chemical produced by a chemical reaction when a low temperature gas encounters a high temperature reactive material and becomes a particle that causes a decrease in the purity of a process.

To solve this problem, the chamber gas is heated by the chamber gas heating device 20 and then purged into the chamber by the purging device 40 before entering the chamber.

However, recent chamber gas heating apparatus has a complicated structure and is not easy to maintain. As an example, the gas heating apparatus for manufacturing a wafer shown in Korean Patent Application No. 2003-35585 proposes a technology in which a gas circulation tube 14 is built around a heater 20 and a heat conductor 16 to heat a gas. However, such a structure has a problem that it is not easy to implement a small heating device due to its large volume and low thermal efficiency due to a complicated path for heat transfer, and there is a problem that maintenance and repair are difficult due to a complicated structure.

Accordingly, the present invention has been made to solve the above problems, it is an object of the present invention to provide a chamber gas heating apparatus including a transmission path that is simpler, more efficient and easy to maintain.

In order to solve the above problems, the chamber gas heating apparatus of the present invention comprises a heater for converting electrical energy into thermal energy; A heat conduction unit transferring heat generated by the heater to the chamber gas; And a housing surrounding the outside of the heater and the heat conduction portion, the housing including an intake port at an upper portion and an exhaust port at the bottom thereof, wherein the heat conduction portion is a hollow columnar shape so that the heater can be inserted therein. It includes a disk-shaped wing formed with a gas through-hole for penetrating the chamber gas around.

In one embodiment, the thermally conductive portion is formed of a stable material that does not react with the chamber gas, for example quartz.

In one embodiment, the heat conduction portion, the upper surface is closed, the inside of the columnar body is empty; And a disk-shaped wing, which is spaced in the longitudinal direction at a predetermined interval in the body portion, wherein the wing portion includes one or more gas through holes on its surface.

In one embodiment, further comprising a blocking member located between the inner wall of the housing and the heat conducting portion to block the chamber gas flowing around the heat conducting portion from contacting the inner wall of the housing.

In one embodiment, the body portion includes a head protruding upward from the first wing of the uppermost portion of the wing, the head portion has a head gas through-hole for penetrating the exhaust gas inside the head to the outside Is formed.

In one embodiment, the housing includes a coupling groove in which the head portion of the heat conductive portion is coupled to a portion where the housing is in contact with the heat conductive portion.

In one embodiment, the gas through hole is formed at a position coinciding with the gas through hole of the different wings.

In one embodiment, the gas through hole is formed at a position that is not coincident with the gas through hole of the different wing portions.

In addition, the present invention, a heater for converting electrical energy into thermal energy; A heat conduction unit transferring heat generated by the heater to the chamber gas; And a housing surrounding the outside of the heater and the heat conduction portion, the housing including an intake port at an upper portion and an exhaust port at the bottom thereof, wherein the heat conduction portion is a hollow columnar shape so that the heater can be inserted therein. A first chamber gas heating unit comprising a disk-shaped wing having a gas through hole formed therein for penetrating the chamber gas; And a second chamber gas heating part having the same structure as the first chamber gas heating part, wherein the first chamber gas heating part and the second chamber gas heating part function as an exhaust port of the first chamber gas heating part and the second chamber gas heating part. It is characterized by being connected through a connection passage that functions as a suction port of the heating portion.

In one embodiment, further comprising a blocking member located between the inner wall of the housing and the heat conducting portion to block the chamber gas flowing around the heat conducting portion from contacting the inner wall of the housing.

Hereinafter, with reference to the accompanying drawings will be described in detail a preferred embodiment of the present invention.

2 is a view showing a chamber gas heating apparatus according to an embodiment of the present invention.

The chamber gas heating apparatus 200 includes a housing 210, a heat conduction unit 220, and a heater 230.

The heater 230 converts electrical energy into thermal energy. Electrical energy is supplied through the wiring 234. In one embodiment, the heater 230 is columnar.

The heat conductive part 220 heats the chamber gas 14 by transferring the heat discharged by the heater 230 to the chamber gas 14. The heat conduction unit 220 is formed of a material, for example, quartz, which is capable of heat transfer and is resistant to high temperature heat. In the present invention, the heat conduction unit 220 has a cylindrical shape of which the inside thereof is empty so that the heater 230 can be inserted therein, and includes one or more disk-shaped wings around the cylinder. The disk-shaped wing includes a gas through hole. In one embodiment, the thermally conductive portion 220 is made of a material comprising quartz. A more detailed description will be given with reference to FIG. 3.

The housing 210 surrounds the outside of the heater 230 and the heat conductive part 220, and includes a suction port 212 at a portion corresponding to an upper portion of the heat conductive part 220, and the heat conductive part 220 of the heat conductive part 220. The exhaust port 214 is included in a portion corresponding to the lower portion.

In one embodiment, the housing 210 includes a bottom cover 212. A central hole 214 is formed at the center of the lower cover 212, and the heater 230 is inserted into the central hole 214. The heater 230 is fixed to the housing 210 through the fixing member 232.

In one embodiment, an exhaust port 214 is formed in the lower cover 212 (see FIG. 5).

The chamber gas 14 is discharged in the order of the inlet port 212-> the gas through-hole of the heat conductive part 220-> the exhaust port 214.

FIG. 3 is a diagram illustrating the thermal conductive part of FIG. 2.

The heat conduction part 220 includes a body part 310 and a wing part 320.

The body portion 310 has a closed upper surface and is hollow in a hollow shape.

The wing part 320 is a disk shape and is spaced apart from the body part 310 in the longitudinal direction at a predetermined interval. In the wing 320, one or more gas through holes 322 are located on the disk surface of the wing. The wing 320 may be a plurality.

According to the present invention, since the heater portion and the heat conductive portion are separated from each other, firstly, it is possible to implement the heater portion and the heat conductive portion using different materials, thereby taking advantage of saving material and separate production of parts. And, second, because it is composed of a separate component there is an advantage that the maintenance, such as replacement is convenient and low cost.

In addition, according to the present invention, the chamber gas 14 flows from the top to the bottom along the gas through hole 322 formed in the heat conduction portion, and because the disk-shaped wing is located in the flow path, the chamber while the heat transfer area is increased. Since the flow of gas does not decrease, efficient heat transfer and gas flow are possible.

In addition, in the present invention, when the heat conducting portion is formed of quartz (SiO 2), in consideration of the fact that the heater is usually made of a metal outside, the chamber gas is in contact with quartz which is very stable in chemical properties, and is very unstable in metal properties. Since it is not in contact, it is possible to prevent the generation of powder (powder) that can be generated by the reaction of the chamber gas and the metal.

In a modified embodiment, the body portion 310 includes a head portion 314 protruding from the first wing portion 320. The head 314 is a portion protruding upward from the upper end of the body portion 310 to the position where the first wing 320 is formed. According to this embodiment, the heat transfer rate is increased because the area in which the exhaust gas is in contact with the heat conducting portion is increased.

In a modified embodiment, the head 314 includes a head gas through hole 312. The head gas through hole 312 discharges the chamber gas introduced into the head 314 laterally outwardly (see FIG. 2). According to the present embodiment, since the gas flow becomes natural due to the body gas through hole 312, it is possible to prevent the reduction of the exhaust gas flow that may occur due to the addition of the head 314.

4A and 4B illustrate various embodiments of the position of gas through holes.

In the embodiment of FIG. 4A, the gas through holes 411, 412, 413,... In each wing portion when proceeding to the first wing 401, the second wing 402, the third wing 403, ... The positions of coincide with each other. That is, as shown in the right side of Figure 4a, the gas through holes coincide in parallel with each other, and because of this, the gas flow is fast and the heat transfer time is small, so that it can be efficiently applied to a chamber that does not require much heat transfer. Do.

In the embodiment of FIG. 4B, the gas through holes 431, 432, 433,... Of each wing in progressing to the first wing 421, the second wing 422, the third wing 423, ... The positions of do not coincide with each other and are shifted. That is, as shown in the right drawing of FIG. 4B, the gas through holes coincide in parallel with each other in the odd gas through holes, and the even gas through holes coincide in parallel with each other, but are displaced from each other between the odd and even gas through holes. It is formed in. In this case, the gas flow increases heat transfer time instead of lowering the gas flow rate than the embodiment of FIG. 4A, so that the gas flow can be efficiently implemented in a chamber requiring much heat transfer.

5 is a view showing a chamber gas heating apparatus according to another embodiment of the present invention.

The chamber gas heating apparatus 500 includes a housing 510, a heat conducting unit 520, a heater 530, and a blocking member 540.

The blocking member 540 is positioned between the inner wall of the housing 510 and the heat conductive part 520 to block the chamber gas 14 flowing around the heat conductive part 520 from contacting the inner wall of the housing 510. . The blocking member 540 is formed of a material that is stable so that a chemical reaction does not occur even when the chamber gas 14 contacts, and most preferably, is formed of quartz (Sio2). In one embodiment, the blocking member 540 is formed in the same shape as the inner wall of the housing.

According to the present embodiment, since the chamber gas 14 does not directly contact the outer wall of the housing 510 by the blocking member 540, when the inner wall of the housing 510 is formed of a metal that is easily reacted with the chamber gas, the chamber The gas is prevented from reacting with the inner wall of the housing to produce powder.

In addition, according to the present embodiment, since the blocking member 540 can be detached and detached at any time, it is easy to repair and replace.

6 is a view showing a chamber gas heating apparatus according to another embodiment of the present invention.

FIG. 6 is an enlarged view of a surface in which the head of the heat conductive part 220 contacts the housing 210 as the modified embodiment of FIGS. 2 and 3.

In the embodiment of Figure 6, the housing 210 of the present invention includes a coupling groove 610 in the portion in contact with the heat conducting portion 220. The head 314 of the heat conducting part 220 is attached to the coupling groove 610.

According to the embodiment of Figure 6, the heat conductive portion 220 is more firmly fixed by the coupling groove 610. In addition, the chamber gas 14 introduced into the head 314 of the heat conduction part 220 does not leak in a different path, and all of them pass through the head gas through hole 312 so that heat transfer can be more efficiently performed. can do.

7 is a view showing a chamber gas heating apparatus according to another embodiment of the present invention.

The chamber gas heating apparatus 700 has a shape in which two chamber gas heating apparatuses of FIG. 2 are connected through a connection passage 150. That is, the chamber gas heating apparatus 700 includes a first housing 711, a second housing 712, a first heater 731, a second heater 733, a first heat conductive part 721, and a second heat conductive part ( 723 and a connecting passage 150.

The first housing 711 includes only the inlet 712 and does not include the exhaust port. However, the chamber gas 14 that has passed through the first heat conducting portion 721 of the first housing 711 is connected to the lower portion of the second housing 713 through a connection passage 750 formed at the lower portion of the first housing 711. In with

The second housing 713 includes only the exhaust port 714 and does not include the intake port. However, the introduction of the chamber gas into the second housing 713 is performed through a connection passage 750 formed at a lower portion between the first housing 711 and the second housing 713.

That is, two chamber gas heating apparatuses of FIG. 2 are formed through a connection passage, and the connection passage functions as an exhaust port of one heating apparatus and as the other intake port.

The shapes and functions of the first and second heaters and the first and second heat conductive parts are the same as those in FIG. 2.

According to this embodiment, since two heaters perform heat transfer for one path (from suction to exhaust) of chamber gas, the effect of heating is more excellent. In addition, since the two housings are integrally formed, the thermal efficiency of the heating apparatus of FIG. 2 is much higher than that of connecting the two in series.

In one embodiment, the heating device 700 of FIG. 7 includes the blocking member of FIG. 5.

So far I looked at the center of the preferred embodiment for the present invention. Those skilled in the art will appreciate that the present invention can be implemented in a modified form without departing from the essential features of the present invention. Therefore, the disclosed embodiments should be considered in descriptive sense only and not for purposes of limitation. The scope of the present invention is shown in the claims rather than the foregoing description, and all differences within the scope will be construed as being included in the present invention.

As described above, according to the present invention, the thermally conductive portion has a columnar shape + a wing shape, and is excellent in thermal efficiency and can be implemented in a simple structure.

Further, according to the present invention, since the heat conducting portion is formed of stable quartz which does not react with the chamber gas, there is no problem of powder generation due to the reaction of the chamber gas with the metallic material in the heater or the gas pipe.

In addition, according to the present invention, since the surface of the chamber gas in contact with the metallic material is reduced by the blocking member, it is possible to further reduce the generation of powder.

Further, according to the present invention, the heat transfer is efficient by not only firmly fixing the heat conducting portion by the coupling groove but also allowing all the chamber gases inside the head to pass through the head gas through holes.

Claims (11)

A heater for converting electrical energy into thermal energy; A heat conduction unit transferring heat generated by the heater to the chamber gas; And It includes a housing surrounding the outside of the heater and the heat conduction portion, including a suction port in the upper portion, and an exhaust port in the lower portion, The heat conducting unit is a chamber gas heating device, characterized in that the column is hollow so that the heater can be inserted, and includes a disk-shaped wing formed with a gas through-hole for penetrating the chamber gas around the pillar. The chamber gas heating apparatus of claim 1, wherein the heat conductive portion is formed of a stable material that does not react with the chamber gas. 3. The chamber gas heating apparatus of claim 2, wherein said material is quartz (SiO2). The method of claim 3, wherein the heat conductive portion The upper surface is closed and the inside of the columnar body is empty; And It includes a disk-shaped wing, which is spaced apart in the longitudinal direction at a predetermined interval in the body portion, The wing portion chamber gas heating device, characterized in that it comprises one or more gas through holes on the surface. The method of claim 1, And a blocking member positioned between the inner wall of the housing and the heat conductive portion to block the chamber gas flowing around the heat conductive portion from contacting the inner wall of the housing. According to claim 4, wherein the body portion comprises a head protruding upward from the first wing of the top of the wing, Chamber head heating device is characterized in that the head portion is formed through the head gas through-holes for the exhaust gas inside the head to pass to the outside. The method of claim 6, wherein the housing And a coupling groove in which the head of the heat conductive portion is coupled to a portion of the housing in contact with the heat conductive portion. The method of claim 1, The gas through-holes are chamber gas heating apparatus, characterized in that formed in the position corresponding to the gas through-holes of the different wings. The method of claim 1, The gas through-holes are chamber gas heating apparatus, characterized in that formed in a position where they do not coincide with the gas through holes of different wings. A heater for converting electrical energy into thermal energy; A heat conduction unit transferring heat generated by the heater to the chamber gas; And It surrounds the outside of the heater and the heat conduction portion, and includes a housing including an intake port in the upper portion, an exhaust port in the lower portion, the heat conduction portion is a columnar shape of the inside of the hollow so that the heater can be inserted, the periphery of the column A first chamber gas heating unit comprising a disk-shaped wing having a gas through hole formed therein for penetrating the chamber gas; And And a second chamber gas heating unit having the same structure as the first chamber gas heating unit, wherein the first chamber gas heating unit and the second chamber gas heating unit function as an exhaust port of the first chamber gas heating unit and the second chamber gas heating unit. Chamber gas heating device characterized in that connected via a connecting passage that functions as a negative inlet. The method of claim 10, And a blocking member positioned between the inner wall of the housing and the heat conductive portion to block the chamber gas flowing around the heat conductive portion from contacting the inner wall of the housing.

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