TWI827943B - 熱處理爐的加熱器單元 - Google Patents
熱處理爐的加熱器單元 Download PDFInfo
- Publication number
- TWI827943B TWI827943B TW110122280A TW110122280A TWI827943B TW I827943 B TWI827943 B TW I827943B TW 110122280 A TW110122280 A TW 110122280A TW 110122280 A TW110122280 A TW 110122280A TW I827943 B TWI827943 B TW I827943B
- Authority
- TW
- Taiwan
- Prior art keywords
- heat treatment
- sleeve
- heater unit
- treatment furnace
- lower plate
- Prior art date
Links
- 238000010438 heat treatment Methods 0.000 title claims abstract description 121
- 238000001816 cooling Methods 0.000 claims abstract description 58
- 239000002245 particle Substances 0.000 claims abstract description 15
- 239000012809 cooling fluid Substances 0.000 claims abstract description 9
- 238000007789 sealing Methods 0.000 claims abstract description 9
- 230000008878 coupling Effects 0.000 claims description 4
- 238000010168 coupling process Methods 0.000 claims description 4
- 238000005859 coupling reaction Methods 0.000 claims description 4
- 238000009413 insulation Methods 0.000 abstract description 2
- 239000000758 substrate Substances 0.000 description 45
- 238000000034 method Methods 0.000 description 28
- 238000004519 manufacturing process Methods 0.000 description 18
- 230000003749 cleanliness Effects 0.000 description 7
- 238000004904 shortening Methods 0.000 description 5
- 238000001035 drying Methods 0.000 description 4
- 239000000428 dust Substances 0.000 description 4
- 239000012530 fluid Substances 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000002950 deficient Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 238000006731 degradation reaction Methods 0.000 description 2
- 238000005485 electric heating Methods 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000012044 organic layer Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
- C03C23/007—Other surface treatment of glass not in the form of fibres or filaments by thermal treatment
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B32/00—Thermal after-treatment of glass products not provided for in groups C03B19/00, C03B25/00 - C03B31/00 or C03B37/00, e.g. crystallisation, eliminating gas inclusions or other impurities; Hot-pressing vitrified, non-porous, shaped glass products
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B23/00—Heating arrangements
- F26B23/04—Heating arrangements using electric heating
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1313—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells specially adapted for a particular application
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nonlinear Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Thermal Sciences (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Sustainable Development (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Furnace Details (AREA)
- Surface Heating Bodies (AREA)
- Resistance Heating (AREA)
- Muffle Furnaces And Rotary Kilns (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2021-0061427 | 2021-05-12 | ||
KR1020210061427A KR102551053B1 (ko) | 2021-05-12 | 2021-05-12 | 열처리 오븐의 히터 유닛 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW202244445A TW202244445A (zh) | 2022-11-16 |
TWI827943B true TWI827943B (zh) | 2024-01-01 |
Family
ID=83946958
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW110122280A TWI827943B (zh) | 2021-05-12 | 2021-06-18 | 熱處理爐的加熱器單元 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP7256243B2 (ja) |
KR (1) | KR102551053B1 (ja) |
CN (1) | CN115340301B (ja) |
TW (1) | TWI827943B (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102559562B1 (ko) * | 2021-03-11 | 2023-07-27 | 주식회사 한국제이텍트써모시스템 | 열처리 오븐의 배기 덕트 일체형 히터 유닛 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1985000084A1 (en) * | 1983-06-17 | 1985-01-03 | Hideaki Ito | Electric heater and heat exchanger employing the same |
TW526670B (en) * | 2000-12-06 | 2003-04-01 | Noritake Co Ltd | Far infrared thin type heater and base plate-heating burner |
TW200714739A (en) * | 2005-09-09 | 2007-04-16 | Applied Materials Inc | Removable heater |
TW200936973A (en) * | 2007-11-16 | 2009-09-01 | Watlow Electric Mfg | Moisture resistant layered sleeve heater and method of manufacture thereof |
CN107101258A (zh) * | 2017-06-15 | 2017-08-29 | 中创杰能(天津)科技有限公司 | 一种新型光电供热技术 |
TWI611730B (zh) * | 2012-11-07 | 2018-01-11 | Ngk Insulators Ltd | 紅外線加熱裝置及乾燥爐 |
CN110207243A (zh) * | 2019-04-09 | 2019-09-06 | 天津金立盛业有限公司 | 用于供热设备的金属框架型材、发热单元及智能供热设备 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2822253C2 (de) * | 1978-05-22 | 1981-12-10 | Estel Hoesch Werke Ag, 4600 Dortmund | Vorrichtung zum Beheizen von offenen Materialschmelzebehältern, wie Verzinkungs-, Emaillier-, Verbleiungs-, Metall- oder Glasbäder in Wannen oder Becken |
JPH09270293A (ja) * | 1996-04-01 | 1997-10-14 | Nippon Steel Corp | 熱処理炉のヒーター端子棒 |
JP2939217B2 (ja) * | 1997-11-05 | 1999-08-25 | 中外炉工業株式会社 | 雰囲気循環式熱処理炉 |
JP4048242B2 (ja) * | 2002-05-29 | 2008-02-20 | エスペック株式会社 | 熱処理装置 |
JP4280981B2 (ja) * | 2003-06-27 | 2009-06-17 | 株式会社Ihi | 真空熱処理炉の冷却ガス風路切替え装置 |
KR100722154B1 (ko) | 2005-08-16 | 2007-05-28 | 주식회사 제우스 | 밀폐가 개선된 lcd 글라스 기판용 오븐챔버 |
JP5044125B2 (ja) * | 2006-02-09 | 2012-10-10 | 光洋サーモシステム株式会社 | 熱処理装置 |
JP2007309540A (ja) * | 2006-05-16 | 2007-11-29 | Hitachi Chem Co Ltd | 熱板、複合熱板及びこれらを備えた加熱炉 |
JP2008204679A (ja) * | 2007-02-19 | 2008-09-04 | Taiheiyo Cement Corp | 基板加熱装置 |
JP5311324B2 (ja) * | 2007-08-31 | 2013-10-09 | Ntn株式会社 | 熱処理炉 |
JP2009094281A (ja) * | 2007-10-09 | 2009-04-30 | Dainippon Screen Mfg Co Ltd | 基板冷却装置 |
JP5377463B2 (ja) * | 2010-11-16 | 2013-12-25 | 東京エレクトロン株式会社 | 加熱処理装置 |
KR101380138B1 (ko) | 2011-09-09 | 2014-04-01 | 주식회사 아이비원 | 스틸 히터를 이용한 챔버 타입 글라스 건조장치 |
JP6076631B2 (ja) * | 2012-07-12 | 2017-02-08 | 光洋サーモシステム株式会社 | ヒータユニットおよび熱処理装置 |
KR101238560B1 (ko) | 2012-11-29 | 2013-02-28 | 주식회사 디엠텍 | Lcd 글라스 오븐챔버 |
CN104088910B (zh) * | 2014-07-15 | 2016-08-24 | 中冶南方(武汉)威仕工业炉有限公司 | 冷轧退火炉炉辊轴承用组合密封装置 |
KR102139615B1 (ko) * | 2018-07-10 | 2020-08-12 | 세메스 주식회사 | 기판 처리 장치 |
KR102238134B1 (ko) * | 2020-11-17 | 2021-04-09 | (주)티엔에스베큠 | 급속 냉각 가능한 열처리장치 |
-
2021
- 2021-05-12 KR KR1020210061427A patent/KR102551053B1/ko active IP Right Grant
- 2021-06-18 TW TW110122280A patent/TWI827943B/zh active
- 2021-07-06 CN CN202110761476.7A patent/CN115340301B/zh active Active
- 2021-10-27 JP JP2021175208A patent/JP7256243B2/ja active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1985000084A1 (en) * | 1983-06-17 | 1985-01-03 | Hideaki Ito | Electric heater and heat exchanger employing the same |
TW526670B (en) * | 2000-12-06 | 2003-04-01 | Noritake Co Ltd | Far infrared thin type heater and base plate-heating burner |
TW200714739A (en) * | 2005-09-09 | 2007-04-16 | Applied Materials Inc | Removable heater |
TW200936973A (en) * | 2007-11-16 | 2009-09-01 | Watlow Electric Mfg | Moisture resistant layered sleeve heater and method of manufacture thereof |
TWI611730B (zh) * | 2012-11-07 | 2018-01-11 | Ngk Insulators Ltd | 紅外線加熱裝置及乾燥爐 |
CN107101258A (zh) * | 2017-06-15 | 2017-08-29 | 中创杰能(天津)科技有限公司 | 一种新型光电供热技术 |
CN110207243A (zh) * | 2019-04-09 | 2019-09-06 | 天津金立盛业有限公司 | 用于供热设备的金属框架型材、发热单元及智能供热设备 |
Also Published As
Publication number | Publication date |
---|---|
CN115340301B (zh) | 2024-04-19 |
KR20220154302A (ko) | 2022-11-22 |
KR102551053B1 (ko) | 2023-07-05 |
CN115340301A (zh) | 2022-11-15 |
JP2022176039A (ja) | 2022-11-25 |
TW202244445A (zh) | 2022-11-16 |
JP7256243B2 (ja) | 2023-04-11 |
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