TWI827943B - 熱處理爐的加熱器單元 - Google Patents

熱處理爐的加熱器單元 Download PDF

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Publication number
TWI827943B
TWI827943B TW110122280A TW110122280A TWI827943B TW I827943 B TWI827943 B TW I827943B TW 110122280 A TW110122280 A TW 110122280A TW 110122280 A TW110122280 A TW 110122280A TW I827943 B TWI827943 B TW I827943B
Authority
TW
Taiwan
Prior art keywords
heat treatment
sleeve
heater unit
treatment furnace
lower plate
Prior art date
Application number
TW110122280A
Other languages
English (en)
Chinese (zh)
Other versions
TW202244445A (zh
Inventor
中西識
河在昱
Original Assignee
南韓商捷太格特熱系統韓國股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 南韓商捷太格特熱系統韓國股份有限公司 filed Critical 南韓商捷太格特熱系統韓國股份有限公司
Publication of TW202244445A publication Critical patent/TW202244445A/zh
Application granted granted Critical
Publication of TWI827943B publication Critical patent/TWI827943B/zh

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Classifications

    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303Apparatus specially adapted to the manufacture of LCDs
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/007Other surface treatment of glass not in the form of fibres or filaments by thermal treatment
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B32/00Thermal after-treatment of glass products not provided for in groups C03B19/00, C03B25/00 - C03B31/00 or C03B37/00, e.g. crystallisation, eliminating gas inclusions or other impurities; Hot-pressing vitrified, non-porous, shaped glass products
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26DRYING
    • F26BDRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B23/00Heating arrangements
    • F26B23/04Heating arrangements using electric heating
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1313Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells specially adapted for a particular application

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Thermal Sciences (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Sustainable Development (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Furnace Details (AREA)
  • Surface Heating Bodies (AREA)
  • Resistance Heating (AREA)
  • Muffle Furnaces And Rotary Kilns (AREA)
TW110122280A 2021-05-12 2021-06-18 熱處理爐的加熱器單元 TWI827943B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2021-0061427 2021-05-12
KR1020210061427A KR102551053B1 (ko) 2021-05-12 2021-05-12 열처리 오븐의 히터 유닛

Publications (2)

Publication Number Publication Date
TW202244445A TW202244445A (zh) 2022-11-16
TWI827943B true TWI827943B (zh) 2024-01-01

Family

ID=83946958

Family Applications (1)

Application Number Title Priority Date Filing Date
TW110122280A TWI827943B (zh) 2021-05-12 2021-06-18 熱處理爐的加熱器單元

Country Status (4)

Country Link
JP (1) JP7256243B2 (ja)
KR (1) KR102551053B1 (ja)
CN (1) CN115340301B (ja)
TW (1) TWI827943B (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102559562B1 (ko) * 2021-03-11 2023-07-27 주식회사 한국제이텍트써모시스템 열처리 오븐의 배기 덕트 일체형 히터 유닛

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1985000084A1 (en) * 1983-06-17 1985-01-03 Hideaki Ito Electric heater and heat exchanger employing the same
TW526670B (en) * 2000-12-06 2003-04-01 Noritake Co Ltd Far infrared thin type heater and base plate-heating burner
TW200714739A (en) * 2005-09-09 2007-04-16 Applied Materials Inc Removable heater
TW200936973A (en) * 2007-11-16 2009-09-01 Watlow Electric Mfg Moisture resistant layered sleeve heater and method of manufacture thereof
CN107101258A (zh) * 2017-06-15 2017-08-29 中创杰能(天津)科技有限公司 一种新型光电供热技术
TWI611730B (zh) * 2012-11-07 2018-01-11 Ngk Insulators Ltd 紅外線加熱裝置及乾燥爐
CN110207243A (zh) * 2019-04-09 2019-09-06 天津金立盛业有限公司 用于供热设备的金属框架型材、发热单元及智能供热设备

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2822253C2 (de) * 1978-05-22 1981-12-10 Estel Hoesch Werke Ag, 4600 Dortmund Vorrichtung zum Beheizen von offenen Materialschmelzebehältern, wie Verzinkungs-, Emaillier-, Verbleiungs-, Metall- oder Glasbäder in Wannen oder Becken
JPH09270293A (ja) * 1996-04-01 1997-10-14 Nippon Steel Corp 熱処理炉のヒーター端子棒
JP2939217B2 (ja) * 1997-11-05 1999-08-25 中外炉工業株式会社 雰囲気循環式熱処理炉
JP4048242B2 (ja) * 2002-05-29 2008-02-20 エスペック株式会社 熱処理装置
JP4280981B2 (ja) * 2003-06-27 2009-06-17 株式会社Ihi 真空熱処理炉の冷却ガス風路切替え装置
KR100722154B1 (ko) 2005-08-16 2007-05-28 주식회사 제우스 밀폐가 개선된 lcd 글라스 기판용 오븐챔버
JP5044125B2 (ja) * 2006-02-09 2012-10-10 光洋サーモシステム株式会社 熱処理装置
JP2007309540A (ja) * 2006-05-16 2007-11-29 Hitachi Chem Co Ltd 熱板、複合熱板及びこれらを備えた加熱炉
JP2008204679A (ja) * 2007-02-19 2008-09-04 Taiheiyo Cement Corp 基板加熱装置
JP5311324B2 (ja) * 2007-08-31 2013-10-09 Ntn株式会社 熱処理炉
JP2009094281A (ja) * 2007-10-09 2009-04-30 Dainippon Screen Mfg Co Ltd 基板冷却装置
JP5377463B2 (ja) * 2010-11-16 2013-12-25 東京エレクトロン株式会社 加熱処理装置
KR101380138B1 (ko) 2011-09-09 2014-04-01 주식회사 아이비원 스틸 히터를 이용한 챔버 타입 글라스 건조장치
JP6076631B2 (ja) * 2012-07-12 2017-02-08 光洋サーモシステム株式会社 ヒータユニットおよび熱処理装置
KR101238560B1 (ko) 2012-11-29 2013-02-28 주식회사 디엠텍 Lcd 글라스 오븐챔버
CN104088910B (zh) * 2014-07-15 2016-08-24 中冶南方(武汉)威仕工业炉有限公司 冷轧退火炉炉辊轴承用组合密封装置
KR102139615B1 (ko) * 2018-07-10 2020-08-12 세메스 주식회사 기판 처리 장치
KR102238134B1 (ko) * 2020-11-17 2021-04-09 (주)티엔에스베큠 급속 냉각 가능한 열처리장치

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1985000084A1 (en) * 1983-06-17 1985-01-03 Hideaki Ito Electric heater and heat exchanger employing the same
TW526670B (en) * 2000-12-06 2003-04-01 Noritake Co Ltd Far infrared thin type heater and base plate-heating burner
TW200714739A (en) * 2005-09-09 2007-04-16 Applied Materials Inc Removable heater
TW200936973A (en) * 2007-11-16 2009-09-01 Watlow Electric Mfg Moisture resistant layered sleeve heater and method of manufacture thereof
TWI611730B (zh) * 2012-11-07 2018-01-11 Ngk Insulators Ltd 紅外線加熱裝置及乾燥爐
CN107101258A (zh) * 2017-06-15 2017-08-29 中创杰能(天津)科技有限公司 一种新型光电供热技术
CN110207243A (zh) * 2019-04-09 2019-09-06 天津金立盛业有限公司 用于供热设备的金属框架型材、发热单元及智能供热设备

Also Published As

Publication number Publication date
CN115340301B (zh) 2024-04-19
KR20220154302A (ko) 2022-11-22
KR102551053B1 (ko) 2023-07-05
CN115340301A (zh) 2022-11-15
JP2022176039A (ja) 2022-11-25
TW202244445A (zh) 2022-11-16
JP7256243B2 (ja) 2023-04-11

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