TWI817396B - 控制器及氣化供給裝置 - Google Patents

控制器及氣化供給裝置 Download PDF

Info

Publication number
TWI817396B
TWI817396B TW111109997A TW111109997A TWI817396B TW I817396 B TWI817396 B TW I817396B TW 111109997 A TW111109997 A TW 111109997A TW 111109997 A TW111109997 A TW 111109997A TW I817396 B TWI817396 B TW I817396B
Authority
TW
Taiwan
Prior art keywords
valve seat
controller
diaphragm
main body
nickel
Prior art date
Application number
TW111109997A
Other languages
English (en)
Chinese (zh)
Other versions
TW202241582A (zh
Inventor
日高敦志
田中一輝
中谷貴紀
森崎和之
北野真史
平田薰
永瀬正明
西野功二
池田信一
Original Assignee
日商富士金股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商富士金股份有限公司 filed Critical 日商富士金股份有限公司
Publication of TW202241582A publication Critical patent/TW202241582A/zh
Application granted granted Critical
Publication of TWI817396B publication Critical patent/TWI817396B/zh

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/17—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being actuated by fluid pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K25/00—Details relating to contact between valve members and seats
    • F16K25/005—Particular materials for seats or closure elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J7/00—Apparatus for generating gases
    • B01J7/02—Apparatus for generating gases by wet methods
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/32—Details
    • F16K1/34—Cutting-off parts, e.g. valve members, seats
    • F16K1/42—Valve seats
    • F16K1/427—Attachment of the seat to the housing by one or more additional fixing elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/16—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being mechanically actuated, e.g. by screw-spindle or cam
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/03—Heat exchange with the fluid
    • F17C2227/0367—Localisation of heat exchange
    • F17C2227/0388—Localisation of heat exchange separate
    • F17C2227/0393—Localisation of heat exchange separate using a vaporiser
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Lift Valve (AREA)
  • Fluid-Driven Valves (AREA)
  • Feeding And Controlling Fuel (AREA)
  • Spray Control Apparatus (AREA)
  • Vehicle Body Suspensions (AREA)
TW111109997A 2021-04-01 2022-03-18 控制器及氣化供給裝置 TWI817396B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021063133 2021-04-01
JP2021-063133 2021-04-01

Publications (2)

Publication Number Publication Date
TW202241582A TW202241582A (zh) 2022-11-01
TWI817396B true TWI817396B (zh) 2023-10-01

Family

ID=83458858

Family Applications (1)

Application Number Title Priority Date Filing Date
TW111109997A TWI817396B (zh) 2021-04-01 2022-03-18 控制器及氣化供給裝置

Country Status (5)

Country Link
US (1) US20240167577A1 (fr)
JP (1) JP7461686B2 (fr)
KR (1) KR20230145432A (fr)
TW (1) TWI817396B (fr)
WO (1) WO2022209639A1 (fr)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI243881B (en) * 2003-02-13 2005-11-21 Fujikin Kk Valve for vacuum discharge system
TW202045843A (zh) * 2019-03-08 2020-12-16 美商應用材料股份有限公司 隔膜閥及操作隔膜閥的方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4119275B2 (ja) * 2003-02-18 2008-07-16 忠弘 大見 真空排気系用のダイヤフラム弁
JP5669384B2 (ja) 2009-12-01 2015-02-12 株式会社フジキン 圧電駆動式バルブ及び圧電駆動式流量制御装置
JP6578125B2 (ja) 2015-04-30 2019-09-18 株式会社フジキン 気化供給装置
US10006564B2 (en) * 2016-08-10 2018-06-26 Ckd Corporation Corrosion resistant coating for process gas control valve
JP7143161B2 (ja) * 2018-09-14 2022-09-28 Ckd株式会社 流体制御弁

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI243881B (en) * 2003-02-13 2005-11-21 Fujikin Kk Valve for vacuum discharge system
TW202045843A (zh) * 2019-03-08 2020-12-16 美商應用材料股份有限公司 隔膜閥及操作隔膜閥的方法

Also Published As

Publication number Publication date
TW202241582A (zh) 2022-11-01
KR20230145432A (ko) 2023-10-17
US20240167577A1 (en) 2024-05-23
JP7461686B2 (ja) 2024-04-04
WO2022209639A1 (fr) 2022-10-06
JPWO2022209639A1 (fr) 2022-10-06

Similar Documents

Publication Publication Date Title
JP5837869B2 (ja) 原料気化供給装置
JP4119275B2 (ja) 真空排気系用のダイヤフラム弁
US8047510B2 (en) Evaporation supply apparatus for raw material and automatic pressure regulating device used therewith
Boeltken et al. Fabrication and testing of a planar microstructured concept module with integrated palladium membranes
US20120097881A1 (en) Valve seat structure of fluid control valve
USRE34303E (en) Metal diaphragm valve
TWI817396B (zh) 控制器及氣化供給裝置
US9304517B2 (en) Flow control device
KR102513246B1 (ko) 실린더 밸브, 및 실린더와 실린더 밸브에서 오염물의 형성을 억제하기 위한 방법
US7370672B2 (en) Diverter valve
JP2018096473A (ja) 制御弁
JP2017053405A (ja) アクチュエータ付きバルブ
JPH0771628A (ja) オールメタルダイアフラム弁
US11976748B2 (en) Diaphragm valve
TWI835023B (zh) 壓力感測器
US7571893B2 (en) Valve with high temperature rating
JP2005140260A (ja) 真空比例開閉弁
JP2005265032A (ja) シート部構造
JP2009079302A (ja) 液体材料気化装置