TWI816709B - Marking wheel, holder unit and marking method - Google Patents

Abstract

An object of the present invention is to provide a scribing wheel that can suppress the bite failure at the beginning of scribing of a substrate, a manufacturing method thereof, and a scribing method. The scribing wheel 40 of the present invention has an inclined surface 42 with a V-shaped cross section on the outer peripheral surface of the disc-shaped base plate and grooves 44 with certain intervals centered on the ridge line 43 where the inclined surfaces intersect. Each groove 44 has an inner groove ridge 46 that is continuous with the ridge line 43, and the angle of the inner groove ridge 46 and the first edge angle on the side adjacent to the ridge line 43 is greater than the angle of the first edge angle on the other side adjacent to the ridge line 43. 2 edge corners. During scribing, the scribing wheel is rotated in such a manner that the ridge line 43 on the second edge corner side of the ridge line contacts the brittle material substrate earlier than the ridge line 43 on the first edge corner side, thereby causing bite Performance improvements.

Description

Marking wheel, holder unit and marking method

The present invention relates to a scribing wheel used to form scribing lines on brittle material substrates such as glass substrates, a holder unit including the scribing wheel, and a scribing method.

As a scribing wheel for cutting brittle material substrates, it is known to have a groove formed at the tip of the ridge portion of the scribing wheel. Patent Document 1 discloses a method of manufacturing a milling wheel by irradiating the inclined surfaces on both sides of the V-shaped tip of the milling wheel that is rotationally driven through the drive shaft mounting shaft hole of the motor with laser processing. The machine's laser light forms a molten tank. By this manufacturing method, strip-shaped inclined surface grooves are formed on the inclined surface as if they intersect in the blade tip side, and protrusions corresponding to the V shape are formed on the blade tip side where the inclined surface grooves intersect. Tip groove.

Furthermore, Patent Document 2 proposes a scribing wheel in which a groove is formed on the blade tip of the scribing wheel, and the angle at which the ridge line of the blade tip meets the groove is different on both sides of the groove when viewed from the side.

[Prior technical literature] [Patent Document]

[Patent Document 1] Japanese Patent Application Laid-Open No. 2009-234874

[Patent Document 2] Japanese Patent Application Laid-Open No. 2014-189415

The groove formed in Patent Document 1 has protrusions inside along the ridge line, and the shape of the protrusion is symmetrical with respect to a line perpendicular to the ridge line of the deepest part of the groove. In this type of marking wheel, the same performance can be achieved regardless of which direction the holder is installed, but the optimal shape of the groove relative to the direction of the marking movement cannot be said to have been fully examined.

Furthermore, in the scribing wheel of Patent Document 2, there is no ridge inside the groove, and the angle at which the ridge and the groove meet is different at both ends of the groove. Although this can prevent defects at the ends of the groove and extend the service life, it does not. No special consideration is given to the scribing performance (good bite) at the beginning of scribing.

An object of the present invention is to provide a scribing wheel, a holder unit, and a scribing method that have high bite performance even if the load is reduced when scribing a substrate.

The scribing wheel of the present invention is characterized in that it is in the shape of a disk and has an inclined surface with a V-shaped outer circumference and a ridge line where the inclined surface intersects, and the inclined surface including the ridge line is provided with plural numbers at regular intervals. For a groove, the above-mentioned groove extends on the above-mentioned inclined surface, and there is an inner groove ridge line continuous from the above-mentioned ridge line inside the above-mentioned groove; and the third ridge line formed between the above-mentioned ridge line and the above-mentioned inner groove ridge line on one adjacent side 1 The angle of the edge angle is greater than the second edge formed between the above-mentioned ridge line and the adjacent ridge line in the above-mentioned groove on the other side The angle of the horn.

The holder unit of the present invention is characterized in that it includes a scribing wheel, which is disk-shaped and has an inclined surface with a V-shaped cross-section on the outer circumference, and a ridge line where the above-mentioned inclined surface intersects. The inclined surface is provided with a plurality of grooves at regular intervals; a pin that holds the scribing wheel rotatably; and a holder that includes a pair of support portions forming holding grooves for arranging the scribing wheel, and is provided on the pair of The support part is provided with a pin hole for disposing the above-mentioned pin; and the above-mentioned groove of the above-mentioned marking wheel extends on the above-mentioned inclined surface, and there is an inner groove ridge line continuous from the above-mentioned ridge line inside the above-mentioned groove; the above-mentioned ridge line is adjacent to one of the above-mentioned ridge lines The angle of the first edge angle formed between the above-mentioned ridge lines in the groove on one side is greater than the angle of the second edge angle formed between the above-mentioned ridge line and the adjacent ridge line in the groove on the other side.

The scribing method of the present invention is characterized in that it is a scribing method for brittle material substrates using a scribing wheel. The scribing wheel is disk-shaped and has an inclined surface with a V-shaped cross section on the outer circumference, and the intersection of the above-mentioned inclined surface The ridge line, and the above-mentioned inclined surface including the above-mentioned ridge line is provided with a plurality of grooves at certain intervals. The above-mentioned groove of the above-mentioned marking wheel has an inclined surface groove extending along the above-mentioned inclined surface, and the inside of the above-mentioned inclined surface groove starts from the above-mentioned ridge. A continuous ridge line in a groove; the angle of the first edge angle formed between the above-mentioned ridge line and the above-mentioned groove on one adjacent side is greater than the angle between the above-mentioned ridge line and the above-mentioned groove on the other adjacent side. 2. The angle of the edge angle; and the scribing method is to rotate the scribing wheel in such a way that the first edge angle side of the ridge line comes into contact with the brittle material substrate later than the second edge angle side.

According to the scribing wheel, the holder unit, and the scribing method of the present invention having such characteristics, when the substrate is broken, the amount of sliding can be small even if the load exerted by the scribing wheel on the substrate is not increased. A good scribing method that bites into.

10: Marking device

11:Mobile station

12a, 12b: guide rail

13: Ball screw

14: Motor

15: Motor

16:Platform

17: Brittle material substrate

18:Camera

19:Bridge Department

20a: Pillars

20b: Pillar

21: line head

22: Guide parts

23:Retainer joint

23a:Rotating shaft part

23b:Joint head

24: holder

25a:Bearing

25b:Bearing

25c: spacer

26:Open your mouth

27:Magnet

28: Parallel pin

29a: planum

29b: planum

30: Holder unit

31:Retaining slot

32: Pin hole

33:pin

34:Installation Department

34a: Inclined part

34b: planum

40: Marking wheel

41: Ontology part

42: Inclined surface

43: Ridgeline

44:Slot

45:Through hole

46: Ridgeline

47: 1st edge angle

48: 2nd edge angle

51: Motor

52:Shaft

53:Laser processing machine

F: arrow

α: angle

β: angle

FIG. 1 is a schematic diagram of a scribing device according to an embodiment of the present invention.

FIG. 2 is a front view of the holder joint of the scribing device according to the embodiment of the present invention.

Figure 3(a) is a side view of the marking wheel, Figure 3(b) is a front view of the marking wheel, and Figure 3(c) is an enlarged side view of the marking wheel.

Figure 4 is a schematic diagram of breaking a brittle material substrate.

Figures 5(a) and (b) are schematic diagrams of a scribing wheel and a brittle material substrate when a scribing wheel with an asymmetrically shaped groove at the tip is used during scribing.

FIG. 6 is a graph showing the distance to the start of scribing when the scribing wheel according to the embodiment of the present invention is used for scribing.

Figure 7 is a schematic diagram showing a processing method for forming grooves in the scribing wheel.

Hereinafter, embodiments of the present invention will be described using drawings. However, the embodiment shown below is an example for embodying the technical idea of the present invention, and it is not intended that the present invention be limited to the embodiment. The present invention can also be applied to other embodiments included in the scope of the patent application.

FIG. 1 shows a schematic diagram of a scribing device 10 according to an embodiment of the present invention. The marking device 10 is provided with Mobile station 11. The moving stage 11 is screwed with the ball screw 13, and is driven by the motor 14 to rotate the ball screw 13 and move in the y-axis direction along a pair of guide rails 12a and 12b.

A motor 15 is provided on the upper surface of the moving platform 11 . The motor 15 rotates the upper platform 16 in the xy plane and positions it at a specific angle. The brittle material substrate 17 as the object to be cut is placed on the platform 16 and held by a vacuum suction mechanism (not shown). Examples of the brittle material substrate 17 to be scribed include glass substrates, ceramic substrates including low-temperature fired ceramics or high-temperature fired ceramics, silicon substrates, compound semiconductor substrates, sapphire substrates, and quartz substrates. In addition, the brittle material substrate 17 may have a thin film or a semiconductor material attached to or contained on its surface or inside. The brittle material substrate 17 may also have a thin film or the like that is not equivalent to the brittle material attached to its surface.

The scribing device 10 is equipped with two CCD (Charge Couple Device) cameras 18 which are placed above the brittle material substrate 17 placed on the platform 16 to capture the alignment marks formed on the surface of the brittle material substrate 17 . The bridge portion 19 is erected by the pillars 20a and 20b along the x-axis direction in such a manner as to span the moving platform 11 and the upper platform 16 .

A guide 22 is attached to the bridge portion 19 , and the scribing head 21 is guided by the guide 22 so as to be movable in the x-axis direction. On the scribing head 21, the holder unit 30 is installed through the holder joint 23.

A front view of the holder joint 23 with the holder unit 30 installed is shown in FIG. 2 . In addition, while FIG. 2 shows a front view of the holder joint 23, a cross-sectional view of the bearings 25a, 25b and the spacer 25c mounted on the rotating shaft part 23a is also shown.

The holder joint 23 is formed into a substantially cylindrical shape and is composed of a rotation shaft portion 23a and a cylindrical joint portion 23b. With the holder joint 23 attached to the scribing head 21, the rotation shaft 23a is attached to the two bearings 25a, 25b via the cylindrical spacer 25c, and holds the holder joint 23 rotatably.

A circular opening 26 is formed at the lower end of the joint part 23b, and a magnet 27 is embedded in the upper part of the opening 26. Through the opening 26, the holder 24 of the holder unit 30 is detachably installed. The holder unit 30 is provided with the holder 24, the pin 33, and the scribing wheel 40.

The holder 24 is made of a substantially cylindrical metal or the like, and flat portions 29 a and 29 b are formed on the lower end side thereof. In addition, in FIG. 2 , the enlarged view of the lower end side of the holder unit 30 is an enlarged view of the holder unit 30 viewed from the lateral direction indicated by arrow A.

A holding groove 31 for holding the scribing wheel 40 is formed between the flat portion 29a and the flat portion 29b. Hole-shaped pin holes 32 for fixing the scribing wheel 40 are formed in the flat portions 29a and 29b respectively. By allowing the pin 33 to penetrate the pin hole 32 and the scribing wheel 40, the scribing wheel 40 is rotatably attached to the holder 24.

A mounting portion 34 for positioning is formed on the upper end side of the holder 24 . The mounting part 34 is formed by cutting the holder 24 and has an inclined part 34a and a flat part 34b.

When installing the holder unit 30 on the holder joint 23, remove the holder unit 30 from the installation part. 34 is inserted sideways into the opening 26. At this time, the metal part on the upper end side of the holder 24 is attracted by the magnet 27, and the inclined part 34a of the mounting part 34 contacts the parallel pin 28 passing through the inside of the opening 26 for positioning, and the holder 24 is fixed to the holder joint. twenty three. On the contrary, when the holder unit 30 is removed from the holder joint part 23, it can be easily removed by pulling out the holder 24 downward.

Since the marking wheel 40 of the holder unit 30 is a consumable item, it needs to be replaced regularly. In this embodiment, since the holder unit 30 is mounted on the scribing head 21 via the holder joint 23, the holder unit 30 can be easily attached and detached. Therefore, there is no need to detach the marking wheels 40 from the holder 24, and the marking wheels 40 and the holder 24 can be handled as one body. In addition, the holder unit 30 itself can also be replaced. Therefore, the replacement operation of the scribing wheel 40 becomes easy.

Next, the details of the scribing wheel 40 will be described.

Figures 3(a), (b), and (c) show side views, front views, and enlarged side views of the marking wheel 40 respectively. In addition, the enlarged side view of Fig. 3(c) shows the part shown by circle c in Fig. 3(a). The scribing wheel 40 has a body part 41, an inclined surface 42, a ridge 43, and a groove 44.

The main body part 41 is disc-shaped. A through hole 45 penetrating the main body 41 in the direction of the rotation axis is formed near the center of the main body 41 . By inserting the pin 33 into the through hole 45 , the scribing wheel 40 is rotatably held by the holder 24 via the pin 33 . An annular inclined surface 42 is formed on the outer periphery of the body portion 41 .

The inclined surface 42 is an inclined surface of an annular body formed by the inner circumference and the outer circumference of concentric circles with the rotation axis as the center. The inclined surface 42 is generally V-shaped when viewed from the front, and the outermost portion of the inclined surface 42 is The peripheral portion forms a ridge 43 where the inclined surfaces 42 intersect. The thickness of the scribing wheel 40 with respect to the direction of the rotation axis gradually becomes smaller toward the ridge line 43 .

As shown in FIG. 3(c) , on the outermost peripheral portion of the inclined surface 42, ridges 43 and grooves 44 are alternately formed at certain intervals. The groove 44 is provided to extend along the inclined surface 42 and across the ridge line 43. When viewed from a direction perpendicular to the ridge line 43, the inside of the groove 44 is a left-right asymmetric V-shaped depression relative to the original shape. The groove 44 is continuous from the ridge line 43, and has a recessed ridge line 46 in the groove closer to the center side of the body part 41 (the side of the through hole 45) than the ridge line 43. In the cross section perpendicular to the direction of the ridge line 43, the groove 44 has a mountain shape with the ridge line 46 in the groove as the vertex, just like the original inclined surface. In this embodiment, the groove 44 is formed in such a manner that its depth becomes shallower as it moves away from the groove inner ridge 46 along the inclined surface.

The shape of the ridge line 46 in the groove is asymmetrical when viewed from a direction perpendicular to the ridge line 43. The angle α of the first edge angle 47 formed between the ridge line 43 and the ridge line 46 in the groove adjacent to one side is larger than the ridge line. The angle β of the second edge angle 48 formed between 43 and the adjacent ridge line 46 in the groove on the other side.

Here, in this embodiment, the first edge angle 47 is 168°, and the second edge angle 48 is 142°. The angle α of the first edge angle 47 is preferably in the range of 130° to 170°, and the angle β of the second edge angle 48 is preferably greater than 90° and 20° to 50° smaller than the angle α of the first edge angle 47 .

In FIG. 4 , a schematic diagram of breaking the brittle material substrate 17 is shown. In addition, in FIG. 4 , only the holder unit 30 and the brittle material substrate 17 are shown.

In the marking device 10, the direction of rotation of the marking wheel 40 is fixed and always rotates in a certain direction. And a scribing line is formed on the brittle material substrate 17 . Specifically, when forming a scribe line on the brittle material substrate 17, the inclined portion 34a side of the holder 24 is always in the traveling direction. In FIG. 4 , when the brittle material substrate 17 is scribed in the right direction, the inclined portion 34 a side of the holder 24 is in the right direction. Then, when the brittle material substrate 17 is scribed in the left direction, the joint part 23b rotates via the rotation axis part 23a of the holder joint 23, and the inclined part 34a side of the holder 24 is directed in the left direction.

Next, the scribing method of the brittle material substrate of the scribing device will be described. Figure 5(a) and (b) are partial enlarged views of the scribing wheel and the brittle material substrate respectively. Figure 5(a) shows the situation where the second edge corner first contacts the substrate during scribing. Figure 5(b) This shows the situation where the first edge corner first contacts the substrate during scribing.

Referring to FIG. 5(a) , the scribing wheel 40 is in contact with the brittle material substrate 17 and always rotates in the direction of arrow F to break the brittle material substrate 17 . In addition, the traveling direction of the holder unit 30 at this time is the opposite direction of the arrow F. An asymmetrical groove is formed on the inclined surface 42 of the scribing wheel 40, and the ridges 43 and grooves 44 are alternately continuous. The groove 44 has an asymmetric shape, and the angle α of the first edge angle 47 formed by the ridge line 46 and the ridge line 43 in the groove is greater than the angle β of the second edge angle 48 formed by the ridge line 46 and the ridge line 43 in the groove ( Refer to Figure 3(c)). In this embodiment, if the scribing wheel 40 rotates in the direction of arrow F as shown in FIG. 5(a) , then the side of the ridge 43 with the second edge angle 48 first contacts the brittle material substrate 17 and has the first The side of the edge corner 47 is in contact with the brittle material substrate 17 . That is, with respect to the rotation direction of the scribing wheel 40 , the first edge angle 47 on the ridge line 43 is located further downstream than the second edge angle 48 . In contrast, Figure 5(b) shows that the marking wheel 40 is installed on the holder 24 in reverse, and the side of the ridge 43 with the second edge angle 48 first abuts the brittle material substrate 17 with the first edge angle 47 The side is then in contact with the brittle material substrate 17 for scribing.

FIG. 6 is a graph showing the amount of slippage (the distance from the starting point of scribing to the occurrence of ribs (vertical cracks) and normal scribing) when scribing a glass substrate using the scribing wheel according to the above embodiment. Figure 6 is a case where scribing is performed every 20 times under a load of 8N, divided into: a case where scribing is performed with the side of the ridge 43 having the second edge angle 48 first contacting the brittle material substrate (second edge) Corner first, refer to Figure 5(a)), and the case where scribing is performed in such a manner that the side of the ridge line 43 with the first edge corner 47 is first in contact with the brittle material substrate (first edge corner first, see Figure 5(a) b)), and displays the distance (μm) from the starting point of the scribing line to the occurrence of ribs and its frequency. As a result, when scribing was performed with the side of the ridge line 43 having the second edge angle 48 in contact with the brittle material substrate first, in 19 out of 20 scribing runs, the distance was 500 μm from the start of the scribing. Ribs are generated inside, that is, vertical cracks are generated. On the other hand, when scribing is performed with the side of the ridge line 43 having the first edge angle 47 first coming into contact with the brittle material substrate, the sliding amount is 1000 μm or more in 17 out of 20 scribing operations. Therefore, if the second edge corner 48 side of the ridge line 43 is first contacted with the substrate during scribing, the amount of sliding before the ribs are formed can be reduced even if the scribing load is not increased. And the bite effect is good.

This is considered to be because cracks that become the starting points of vertical cracks are easily formed by applying force to the groove ridge 46 on the second edge corner 48 side to press the substrate in a rearward and downward direction with respect to the direction of travel of the scribing line. On the other hand, it can be considered that when scribing is performed with the first edge corner 47 in contact with the substrate first, the ridge line 46 in the groove exerts a force pressing the substrate with the ridge line in the diagonally downward direction behind the substrate. It is difficult to form a crack that becomes the starting point of a vertical crack, so the amount of slippage increases, resulting in poor bite.

Next, the manufacturing process of the groove 44 of the marking wheel 40 will be described. The groove 44 is formed on the outer circumference of the disc by, for example, laser processing. First, as shown in FIG. 7 , the through hole 45 of the marking wheel 40 is connected and fixed to the shaft 52 of the motor 51 . And the laser processing machine 53 irradiates the laser light from a direction parallel to the ridge line of the scribing wheel 40 toward the tool tip. At this time, the laser light irradiation conditions and processing times are selected in such a way that the depth of the groove becomes deeper from the center of the width of the area to be processed to the position farthest from a specific distance in the direction of the ridge line. And by moving back and forth at a certain distance along the rotation axis with the ridge 43 as the center in the X-axis direction, an inclined surface groove 49 is formed including the ridge 46 in the center and extending on the inclined surface.

When the processing of one groove is completed, the scribing wheel 40 is rotated at a specific angle by the motor 51, and laser light is irradiated from the laser processing machine 53 to perform the same groove processing. By repeating this operation, grooves 44 at a certain pitch are formed over the entire outer circumference of the scribing wheel 40, and the inside thereof can be made into an asymmetrical shape in the circumferential direction.

In addition, in this embodiment, a plurality of grooves are formed at regular intervals on the ridge line, but the number of grooves is not limited. The shape of the groove in side view is not limited to a V-shaped groove and may also be a well-known shape such as a U-shaped groove. Furthermore, although the depth of the groove changes in the direction of the long axis of the groove, it may be set to a constant depth within the groove, or may have different depths in the inclined surfaces on the left and right of the ridge line. Furthermore, the width and spacing in the ridge direction of the grooves and the angle of the outer peripheral ridge can also be determined arbitrarily.

In addition, in this embodiment, although the groove is formed on the outer peripheral part of the disc by laser processing, it may be replaced by other processing methods such as grindstone processing.

[Industrial availability]

The scribing wheel of the present invention can be used in scribing devices and scribing tools for scribing single boards and bonded substrates.

40‧‧‧Scribe wheel

41‧‧‧Main part

42‧‧‧Retainer

43‧‧‧ridge

44‧‧‧Slot

45‧‧‧through hole

46‧‧‧ridge

47‧‧‧1st edge angle

48‧‧‧2nd edge angle

α‧‧‧angle

β‧‧‧angle

Claims (4)

A scribing wheel, characterized in that it is in the shape of a disk and has an inclined surface with a V-shaped outer circumference and a ridge line where the inclined surface intersects, and the inclined surface including the ridge line is provided with plural numbers at regular intervals. For a groove, the above-mentioned groove extends on the above-mentioned inclined surface, and there is an inner groove ridge line continuous from the above-mentioned ridge line inside the above-mentioned groove; and the above-mentioned ridge line and the adjacent side of the above-mentioned inner groove ridge line are formed between The angle of the first edge angle is greater than the angle of the second edge angle formed between the above-mentioned ridge line and the adjacent ridge line in the groove on the other side; and the above-mentioned first edge angle side of the above-mentioned ridge line is larger than the above-mentioned first edge angle. 2 The edge and corner sides rotate later in contact with the brittle material substrate. For example, the marking wheel of claim 1, wherein the angle of the first edge angle is 130°~170°, and the angle of the above-mentioned second edge angle is 20°~50° smaller than the angle of the above-mentioned first edge angle. A holder unit, characterized in that it includes: a scribing wheel, which is disc-shaped and has an inclined surface with a V-shaped cross-section on the outer circumference, and a ridge line where the above-mentioned inclined surface intersects; A plurality of grooves are provided at regular intervals; a pin that holds the scribing wheel rotatably; and a holder unit that includes a pair of support portions forming a holding groove for arranging the scribing wheel, and a mount with an inclined portion. part, and the pair of support parts are provided with pins for disposing the above pins hole; and the above-mentioned groove of the above-mentioned marking wheel extends on the above-mentioned inclined surface, and there is an inner groove ridge line continuous from the above-mentioned ridge line inside the above-mentioned groove; and between the above-mentioned ridge line and the above-mentioned inner groove ridge line on one adjacent side The angle of the first edge angle formed is greater than the angle of the second edge angle formed between the above-mentioned ridge line and the adjacent ridge line in the groove on the other side; so that the above-mentioned holder is provided with the above-mentioned inclined portion When the scribing wheel is rotated so that one side becomes the scribing traveling direction, the first edge angle side of the ridge line of the scribing wheel comes into contact with the brittle material substrate later than the second edge angle side. A scribing method, characterized in that it is a scribing method for a brittle material substrate using a scribing wheel. The scribing wheel is disk-shaped and has an inclined surface with a V-shaped cross-section on the outer circumference, and the intersection of the above-mentioned inclined surfaces. A ridge line, and a plurality of grooves at regular intervals on the above-mentioned inclined surface including the above-mentioned ridge line, and the above-mentioned grooves of the above-mentioned scribing wheel extend on the above-mentioned inclined surface, and there is an inner groove ridge continuous from the above-mentioned ridge line inside the above-mentioned groove. line; the angle of the first edge angle formed between the above-mentioned ridge line and the ridge line in the above-mentioned groove on one adjacent side is greater than the angle between the above-mentioned ridge line and the ridge line in the above-mentioned groove on the other adjacent side. 2. The angle of the edge angle; and the scribing method is to rotate the scribing wheel in such a way that the first edge angle side of the ridge line comes into contact with the brittle material substrate later than the second edge angle side.