JP2019084804A - Scribing wheel, holder unit, and scribing method - Google Patents

Abstract

To provide a scribing wheel capable of suppressing a start defect upon the start of the scribing of a substrate, a method for producing the same, and a scribing method.SOLUTION: Provided is a scribing wheel 40 comprising: an opposing pair of inclined surfaces 42 having a V-shaped cross section formed as an outer circumferential face of a disk-shaped substrate; grooves 44 arranged circumferentially at a fixed interval along and laterally about a ridge line 43 where the oppositely inclined faces abut each other. Each groove 44 has an in-groove ridge line 46 continuous with the ridge line 43. A first edge angle on one side of the in-groove ridge line 46 adjacent to the ridge line 43 is designed to be greater than a second edge angle on the other side of the in-groove ridge line adjacent to the ridge line 43. At scribing, the scribing wheel is rotated in such a manner that the ridge line 43 on the second edge angle side of the edge line is contacted with the brittle material substrate prior to the ridge line 43 on the first edge angle side so as to improve start performance.SELECTED DRAWING: Figure 3

Description

  The present invention relates to a scribing wheel for forming a scribing line on a brittle material substrate such as a glass substrate, a holder unit including the scribing wheel, and a scribing method.

  As a scribing wheel for dividing a brittle material substrate, it is known to form a groove at the cutting edge of the ridge line portion of this scribing wheel. In Patent Document 1, a laser beam from a laser processing machine is irradiated toward inclined surfaces on both sides including a cutting edge that becomes a V shape of a cutter wheel that is mounted with a shaft hole on a drive shaft of a motor and is rotationally driven. A method of manufacturing a cutter wheel for forming a melt groove is disclosed. According to such a manufacturing method, a belt-like inclined surface groove is formed on the inclined surface so as to intersect on the blade edge side, and a blade edge groove having a protrusion corresponding to a V shape on the blade edge side where the inclined surface grooves intersect. Will be formed.

  Further, Patent Document 2 proposes a scribing wheel in which a groove is formed on the cutting edge of the scribing wheel, and the angle at which the ridgeline of the cutting edge contacts the groove in side view is different on both sides of the groove.

JP, 2009-234874, A JP, 2014-189415, A

  The groove formed in Patent Document 1 has a protrusion inside along the ridgeline, and the shape of the protrusion is symmetrical to a line perpendicular to the ridgeline in the deepest part of the groove. With such a scribing wheel, the same performance can be exhibited regardless of the direction in which it is attached to the holder, but the optimal shape of the groove with respect to the direction of scribing has not been sufficiently studied. .

  Further, in the scribing wheel according to Patent Document 2, there is no ridge line inside the groove, so that the angle at which the ridge line contacts the groove differs at both ends of the groove to prevent chipping of the end of the groove and prolong the life However, the scribing performance (goodness in performance) at the start of scribing was not particularly considered.

  An object of the present invention is to provide a scribing wheel, a holder unit, and a scribing method, which have high performance even with a small load when scribing a substrate.

The scribing wheel according to the present invention has a disc-like inclined surface with a V-shaped cross section on the outer periphery, and a ridge line at which the inclined surface intersects, and has a plurality of grooves at regular intervals of the inclined surface including the ridge line. A scribing wheel that
The groove extends to the inclined surface, and has an in-groove ridge line continuous with the ridge line inside the groove,
A second edge angle formed between the ridge line and the other in-groove ridge line adjacent to the ridge line, an angle of a first edge angle formed between the ridge line and the one in-groove ridge line adjacent to the ridge line It is characterized in that it is larger than the angle of.

  The holder unit according to the present invention has a disc-like inclined surface whose outer periphery has a V-shaped cross section and a ridge line at which the inclined surface intersects, and has a plurality of grooves at regular intervals of the inclined surface including the ridge line. Scribing wheel, a pin rotatably holding the scribing wheel, and a pair of supporting portions forming a holding groove for disposing the scribing wheel, the pin for disposing the pin on the pair of supporting portions A holder unit comprising a holder provided with a hole, wherein the groove of the scribing wheel extends to the inclined surface, and has an in-groove ridge line continuous with the ridge line inside the groove; An angle of a first edge angle formed between the ridge line and the adjacent in-groove ridge line adjacent to the ridge line is a second edge formed between the ridge line and the other-in-groove ridge line adjacent to the ridge line. Characterized in that it is larger than the angle of the corner.

  The present invention is a scribing wheel having a disc-like inclined surface having a V-shaped cross section and a ridge line at which the inclined surface intersects, and having a plurality of grooves at regular intervals of the inclined surface including the ridge line. The groove of the scribing wheel has an inclined surface groove extending to the inclined surface, and a groove inner ridge line continuous with the ridge line inside the inclined surface groove. An angle of a first edge angle formed between the ridgeline and the groove adjacent to the one side from an angle of a second edge angle formed between the ridgeline and the groove adjacent to the other side The scribing wheel is rotated such that the first edge angle side of the ridgeline contacts the brittle material substrate later than the second edge angle side.

  According to the scribing wheel, the holder unit, and the scribing method of the present invention having such features, when dividing the substrate, the amount of sliding is small even if the load applied to the substrate from the scribing wheel is not very large. It can be a scribing method.

It is the schematic of the scribing apparatus in embodiment of this invention. It is a front view of the holder joint which the scribing apparatus in embodiment of this invention has. Fig.3 (a) is a side view of a scribing wheel, FIG.3 (b) is a front view of a scribing wheel, FIG.3 (c) is an enlarged side view of a scribing wheel. FIG. 4 is a schematic view when dividing the brittle material substrate. FIGS. 5 (a) and 5 (b) are schematic views of a scribing wheel and a brittle material substrate in the case of using a scribing wheel having a groove with an asymmetric shape at the cutting edge at the time of scribing. FIG. 6 is a graph showing the distance until scribing starts when scribing using the scribing wheel according to the embodiment of the present invention. FIG. 7 is a schematic view showing a processing method for forming grooves in the scribing wheel.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. However, the embodiment shown below shows an example for embodying the technical idea of the present invention, and it is not intended to specify the present invention in this embodiment. The invention is also applicable to other embodiments within the scope of the claims.

  A schematic view of a scribing apparatus 10 according to an embodiment of the present invention is shown in FIG. The scribing device 10 is provided with a moving table 11. The moving table 11 is screwed with the ball screw 13, and when the ball screw 13 is rotated by driving the motor 14, the moving table 11 moves in the y-axis direction along the pair of guide rails 12 a and 12 b.

  A motor 15 is installed on the upper surface of the moving table 11. The motor 15 is for rotating the table 16 located at the top in the xy plane and positioning the table 16 at a predetermined angle. The brittle material substrate 17 as the object to be cut is placed on the table 16 and held by a vacuum suction unit (not shown) or the like. Examples of the brittle material substrate 17 to be scribed include a glass substrate, a ceramic substrate made of low temperature fired ceramics and high temperature fired ceramics, a silicon substrate, a compound semiconductor substrate, a sapphire substrate, a quartz substrate and the like. In addition, the brittle material substrate 17 may have a thin film or a semiconductor material attached or contained on the surface or inside thereof. The brittle material substrate 17 may have a thin film or the like that does not correspond to the brittle material attached to the surface thereof.

  The scribing device 10 is provided with two CCD cameras 18 for imaging the alignment mark formed on the surface of the brittle material substrate 17 above the brittle material substrate 17 placed on the table 16. A bridge 19 is bridged by columns 20a and 20b along the x-axis direction so as to straddle the moving table 11 and the table 16 at the upper part thereof.

  A guide 22 is attached to the bridge 19, and the scribing head 21 is guided by the guide 22 and installed movably in the x-axis direction. A holder unit 30 is attached to the scribing head 21 via a holder joint 23.

  FIG. 2 shows a front view of the holder joint 23 to which the holder unit 30 is attached. In addition, while the front view of the holder joint 23 is shown by FIG. 2, sectional drawing of the bearings 25a and 25b attached to the rotating shaft part 23a, and the spacer 25c is shown collectively.

  The holder joint 23 has a substantially cylindrical shape, and is constituted of a rotary shaft portion 23a and a cylindrical joint portion 23b. In the state where the holder joint 23 is mounted on the scribing head 21, the rotary shaft portion 23a is mounted on the two bearings 25a, 25b via the cylindrical spacer 25c, and the holder joint 23 is rotatably held. .

  A circular opening 26 is formed at the lower end of the joint portion 23b, and a magnet 27 is embedded in the upper portion of the opening 26. The holder 24 of the holder unit 30 is detachably attached via the opening 26. The holder unit 30 comprises a holder 24, pins 33 and a scribing wheel 40.

  The holder 24 is made of a substantially cylindrical metal or the like, and flat portions 29a and 29b are formed on the lower end side thereof. In FIG. 2, the enlarged view of the lower end side of the holder unit 30 is an enlarged view of the holder unit 30 observed in the lateral direction indicated by the arrow A.

  A holding groove 31 for holding the scribing wheel 40 is formed between the flat portion 29a and the flat portion 29b. Hole-shaped pin holes 32 are formed in the flat portions 29a and 29b, respectively, for fixing the scribing wheel 40. The scribing wheel 40 is rotatably attached to the holder 24 by causing the pin 33 to penetrate the pin hole 32 and the scribing wheel 40.

  On the upper end side of the holder 24, a mounting portion 34 for positioning is formed. The mounting portion 34 is formed by cutting the holder 24 and has an inclined portion 34 a and a flat portion 34 b.

  When mounting the holder unit 30 to the holder joint 23, the holder unit 30 is inserted toward the opening 26 from the mounting portion 34 side. At that time, the metal portion on the upper end side of the holder 24 is drawn by the magnet 27, the inclined portion 34a of the mounting portion 34 contacts the parallel pin 28 passing through the inside of the opening 26, and positioning is performed. It is fixed to On the other hand, when removing the holder unit 30 from the holder joint 23, it can be easily removed by pulling the holder 24 downward.

  Since the scribing wheel 40 of the holder unit 30 is a consumable item, periodical replacement is required. In the present embodiment, since the holder unit 30 is mounted on the scribing head 21 via the holder joint 23, the holder unit 30 can be easily attached and detached. Therefore, the scribing wheel 40 and the holder 24 are treated as one without removing the scribing wheel 40 from the holder 24. In addition, the holder unit 30 itself may be replaced. Therefore, the scribing wheel 40 can be easily replaced.

Next, the details of the scribing wheel 40 will be described.
FIGS. 3A, 3B, and 3C show a side view, a front view, and an enlarged side view of the scribing wheel 40, respectively. In addition, the enlarged side view of FIG.3 (c) is a part shown by circle c of FIG. 3 (a). The scribing wheel 40 has a main body portion 41, an inclined surface 42, a ridge line 43, and a groove 44.

  The main body 41 has a disk shape. In the vicinity of the center of the main body portion 41, a through hole 45 which penetrates the main body portion 41 in the rotational axis direction is formed. By inserting the pin 33 into the through hole 45, the scribing wheel 40 is rotatably held by the holder 24 via the pin 33. An annular inclined surface 42 is formed on the outer periphery of the main body portion 41.

  The inclined surface 42 is a slope of an annular body formed by concentric inner and outer peripheries centered on the rotation axis. The inclined surface 42 is substantially V-shaped in a front view, and a ridge line 43 at which the inclined surface 42 intersects is formed at the outermost peripheral portion of the inclined surface 42. The thickness of the scribing wheel 40 with respect to the rotational axis direction gradually decreases toward the ridge line 43.

  As shown in FIG. 3C, ridge lines 43 and grooves 44 are alternately formed at regular intervals on the outermost peripheral portion of the inclined surface 42. The groove 44 is provided to extend along the inclined surface 42 across the ridgeline 43, and the inside of the groove 44 is a V-shape which is asymmetric on the left and right with respect to the original shape when viewed from the direction perpendicular to the ridgeline 43. It is a hollow of Further, the groove 44 is continuous with the ridge line 43 and has an in-groove ridge line 46 recessed from the ridge line 43 to the center side (the through hole 45 side) of the main body 41. The groove 44 is formed in a chevron shape with the in-groove ridge line 46 at the top, in the cross section in the direction perpendicular to the ridge line 43, like the original inclined surface. In the present embodiment, the groove 44 is formed so as to become shallower as it goes away from the in-groove ridge 46 along the inclined surface.

The shape of the in-groove ridge line 46 is asymmetrical when viewed from the direction perpendicular to the ridge line 43, and the angle α of the first edge angle 47 formed between the ridge line 43 and the adjacent in-groove ridge line 46 is the ridge line It is larger than the angle β of the second edge angle 48 formed between 43 and the adjacent in-groove ridge 46 on the adjacent side.
Here, in the present embodiment, the first edge angle 47 is 168 °, and the second edge angle 48 is 142 °. The angle α of the first edge angle 47 is preferably in the range of 130 ° to 170 °, and the angle β of the second edge angle 48 is larger than 90 ° and 20 ° to 50 ° more than the angle α of the first edge angle 47 It is preferable to make it smaller.

  FIG. 4 shows a schematic view when dividing the brittle material substrate 17. In FIG. 4, only the holder unit 30 and the brittle material substrate 17 are shown.

  In the scribing apparatus 10, the scribing wheel 40 is designed to determine the rotation direction, and is configured to always rotate in a fixed direction to form a scribe line on the brittle material substrate 17. Specifically, when forming a scribe line on the brittle material substrate 17, the inclined portion 34a side of the holder 24 always becomes the advancing direction. In FIG. 4, in the case of scribing the brittle material substrate 17 in the right direction, the inclined portion 34 a side of the holder 24 is in the right direction. Subsequently, in the case of scribing the brittle material substrate 17 in the left direction, the joint portion 23b is rotated via the rotation shaft portion 23a of the holder joint 23, and the inclined portion 34a side of the holder 24 is in the left direction.

  Next, a method of scribing a brittle material substrate by a scribing apparatus will be described. 5 (a) and 5 (b) are partial enlarged views of the scribing wheel and the brittle material substrate, respectively, and FIG. 5 (a) is a case where the second edge angle abuts against the substrate first at the time of scribing, FIG. 5 (b) In each case, the first edge angle first comes in contact with the substrate at the time of scribing.

  Referring to FIG. 5A, the scribing wheel 40 is in contact with the brittle material substrate 17 and constantly rotates in the direction of the arrow F to divide the brittle material substrate 17. In this case, the traveling direction of the holder unit 30 at this time is the opposite direction of the arrow F. Asymmetrical grooves are formed on the inclined surface 42 of the scribing wheel 40, and ridge lines 43 and grooves 44 are alternately continued. The groove 44 has an asymmetric shape, and the angle α of the first edge angle 47 formed by the in-groove ridge line 46 and the ridge line 43 is the angle β of the second edge angle 48 formed by the in-groove ridge line 46 and the ridge line 43 It is larger than that (see FIG. 3 (c)). In the present embodiment, as shown in FIG. 5A, when the scribing wheel 40 is rotated in the direction of the arrow F, the side of the ridge 43 having the second edge corner 48 is first brought into contact with the brittle material substrate 17 The side having the first edge angle 47 later abuts on the brittle material substrate 17. That is, the first edge angle 47 at the ridge line 43 is located more downstream than the second edge angle 48 with respect to the rotation direction of the scribing wheel 40. On the other hand, in FIG. 5B, the scribing wheel 40 is attached to the holder 24 in the reverse direction, and the side of the ridge line 43 having the second edge angle 48 abuts against the brittle material substrate 17 and has the first edge angle 47. It shows the case where the scribing is performed such that the side comes in contact with the brittle material substrate 17 later.

  FIG. 6 shows the slip amount (the distance from the start of scribing to the occurrence of a rib mark (vertical crack) and normal scribing) when scribing is performed on a glass substrate using the scribing wheel according to the above-described embodiment. FIG. FIG. 6 shows the distance (μm) from the scribing start point to the rib mark generation and its frequency when scribing is performed 20 times at a load of 8 N, and the side having the 43 second edge angle 48 of the ridge line is a brittle material In the case where scribing is performed so as to abut on the substrate (second edge angle leading, see FIG. 5A) and in the case where the side having the first edge angle 47 of the ridge line 43 is previously scribed so as to abut on the brittle material substrate It is divided into a first edge angle leading, see FIG. 5 (b)). As a result, when scribing so that the side having the second edge angle 48 of the ridge 43 first contacts the brittle material substrate, rib marks are formed within 500 μm from the start of scribing at 19 times during 20 times of scribing, ie vertical cracks Is occurring. On the other hand, in the case where the side having the first edge angle 47 of the ridge line 43 was first scribed so as to abut the brittle material substrate, the slippage amounted to 1000 μm or more in 17 out of 20 scribings. Therefore, when scribing, if scribing is performed so that the second edge angle 48 side of ridge line 43 first contacts the substrate, there is obtained an effect that the amount of slippage until rib mark formation is small and the covering is good even if scribing load is not too large. Be

  This is thought to be because a crack that is the starting point of the vertical crack is easily formed by applying a force such that the in-groove ridge 46 on the second edge angle 48 side pushes the substrate backward and downward with respect to the scribing direction. Be On the other hand, when the first edge angle 47 is first scribed so as to contact the substrate, a force is applied by the in-groove ridge line 46 to push the substrate in the diagonally downward direction behind the substrate by the ridge line. Cracks are difficult to be formed, so it is considered that the amount of slip is large and it is a defect.

  Next, the manufacturing process of the groove 44 of the scribing wheel 40 will be described. The groove 44 is formed on the outer peripheral portion of the disc by laser processing, for example. First, as shown in FIG. 7, the through hole 45 of the scribing wheel 40 is connected and fixed to the shaft 52 of the motor 51. Then, the laser beam is irradiated from the laser processing machine 53 from the direction parallel to the ridge line of the scribing wheel 40 toward the cutting edge. At this time, the irradiation condition of the laser beam and the number of times of processing are selected so that the depth of the groove is deepest at a position separated by a predetermined distance from the center of the width of the processing area in the ridge direction. Then, by moving a fixed distance back and forth in the X-axis direction about the ridgeline 43 along the rotation axis, an in-groove ridgeline 46 is formed at the center, and an inclined surface groove 49 extending to an inclined surface is formed.

  When the processing of one groove is completed, the scribing wheel 40 is rotated by a predetermined angle by the motor 51, and laser light is irradiated from the laser processing machine 53 to perform similar groove processing. By repeating such an operation, it is possible to form grooves 44 with a constant pitch around the entire circumference of the outer peripheral part of the scribing wheel 40, and to make the inside thereof asymmetrical in the circumferential direction.

  In this embodiment, a large number of grooves are formed at constant intervals on the ridge line, but the number of grooves is not limited. The shape of the groove in the side view is not limited to the V-shaped groove, but may be a known shape such as a U-shaped groove. Although the depth of the groove is changed in the long axis direction of the groove, the depth may be constant in the groove, or the depth may be different on the left and right inclined surfaces of the ridge. Furthermore, the width and distance of the ridgeline direction of the groove, and the angle with respect to the outer peripheral ridgeline can be arbitrarily determined.

  Moreover, although the groove is formed in the outer peripheral part of the disc by laser processing in the present embodiment, other processing methods such as grindstone processing can also be used.

  The scribing wheel of the present invention can be applied to a scribing apparatus and a scribing tool for scribing a single plate and a bonded substrate.

DESCRIPTION OF SYMBOLS 10 scribing apparatus 11 moving base 12a, 12b guide rail 13 ball screw 14 motor 15 motor 16 table 17 brittle material substrate 18 camera 19 bridge 20a support 20a support 20b support 21 scribe head 22 guide 23 holder joint 23a rotation shaft 23b joint 25 holder 25a, 25b bearing 25c spacer 26 opening 27 magnet 28 parallel pin 29a flat part 29b flat part 30 holder unit 31 holding groove 32 pin hole 33 pin 34 attachment part 34a inclined part 34b flat part 40 scribing wheel 41 main part 42 inclined surface 43 ridge 44 groove 45 through hole 46 in-groove ridge line 47 first edge angle 48 second edge angle 51 motor 52 axis 53 laser processing machine

Claims (4)

A scribing wheel having a disc-like inclined surface having a V-shaped cross section and ridge lines at which the inclined surfaces intersect, and having a plurality of grooves at regular intervals of the inclined surface including the ridge lines,
The groove extends to the inclined surface, and has an in-groove ridge line continuous with the ridge line inside the groove,
A second edge angle formed between the ridge line and the other in-groove ridge line adjacent to the ridge line, an angle of a first edge angle formed between the ridge line and the one in-groove ridge line adjacent to the ridge line A scribing wheel characterized in that it is larger than the angle of.   The scribing according to claim 1, wherein the angle of the first edge angle is 130 ° to 170 °, and the angle of the second edge angle is smaller than the angle of the first edge angle by 20 ° to 50 °. wheel. A scribing wheel having a disc-like inclined surface having a V-shaped cross section and a ridge line at which the inclined surface intersects, and having a plurality of grooves at regular intervals of the inclined surface including the ridge line;
A pin rotatably holding the scribing wheel;
A holder unit comprising: a pair of support portions forming a holding groove in which the scribing wheel is disposed; and a holder provided with pin holes in which the pins are disposed in the pair of support portions,
The groove of the scribing wheel extends to the inclined surface, and has an in-groove ridge line continuous with the ridge line inside the groove,
A second edge angle formed between the ridge line and the other in-groove ridge line adjacent to the ridge line, an angle of a first edge angle formed between the ridge line and the one in-groove ridge line adjacent to the ridge line A holder unit characterized in that it is larger than the angle of. Brittle using a scribing wheel having a disc-like inclined surface having a V-shaped cross section and a ridge line at which the inclined surface intersects, and having a plurality of grooves at regular intervals of the inclined surface including the ridge line A method of scribing a material substrate,
The groove of the scribing wheel extends to the inclined surface, and has an in-groove ridge line continuous with the ridge line inside the groove,
A second edge angle formed between the ridge line and the other in-groove ridge line adjacent to the ridge line, an angle of a first edge angle formed between the ridge line and the one in-groove ridge line adjacent to the ridge line Is greater than the angle of
A scribing method comprising: rotating the scribing wheel such that the first edge angle side of the ridge line contacts the brittle material substrate later than the second edge angle side.

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