TWI812697B - 圖像識別裝置、及具有圖像識別裝置的物品製造裝置 - Google Patents
圖像識別裝置、及具有圖像識別裝置的物品製造裝置 Download PDFInfo
- Publication number
- TWI812697B TWI812697B TW108112632A TW108112632A TWI812697B TW I812697 B TWI812697 B TW I812697B TW 108112632 A TW108112632 A TW 108112632A TW 108112632 A TW108112632 A TW 108112632A TW I812697 B TWI812697 B TW I812697B
- Authority
- TW
- Taiwan
- Prior art keywords
- image
- aforementioned
- recognition
- processing
- images
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 32
- 238000003860 storage Methods 0.000 claims abstract description 28
- 230000007246 mechanism Effects 0.000 claims description 114
- 230000007547 defect Effects 0.000 claims description 99
- 238000000034 method Methods 0.000 claims description 81
- 230000008569 process Effects 0.000 claims description 81
- 230000002950 deficient Effects 0.000 claims description 9
- 238000003384 imaging method Methods 0.000 description 36
- 230000008676 import Effects 0.000 description 10
- 238000001514 detection method Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 5
- 238000007689 inspection Methods 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 230000008520 organization Effects 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 238000000605 extraction Methods 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000002372 labelling Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0004—Industrial image inspection
- G06T7/0008—Industrial image inspection checking presence/absence
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0004—Industrial image inspection
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/10—Segmentation; Edge detection
- G06T7/11—Region-based segmentation
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/20—Analysis of motion
- G06T7/292—Multi-camera tracking
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
- G06V10/00—Arrangements for image or video recognition or understanding
- G06V10/20—Image preprocessing
- G06V10/22—Image preprocessing by selection of a specific region containing or referencing a pattern; Locating or processing of specific regions to guide the detection or recognition
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/10—Image acquisition modality
- G06T2207/10016—Video; Image sequence
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/30—Subject of image; Context of image processing
- G06T2207/30108—Industrial image inspection
- G06T2207/30148—Semiconductor; IC; Wafer
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/30—Subject of image; Context of image processing
- G06T2207/30204—Marker
Landscapes
- Engineering & Computer Science (AREA)
- Theoretical Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Quality & Reliability (AREA)
- Multimedia (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Image Analysis (AREA)
- Inspection Of Paper Currency And Valuable Securities (AREA)
- Vending Machines For Individual Products (AREA)
- Packaging For Recording Disks (AREA)
- Image Processing (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018077653A JP6890101B2 (ja) | 2018-04-13 | 2018-04-13 | 画像識別装置、及び画像識別装置を備える物品製造装置 |
JP2018-077653 | 2018-04-13 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201944289A TW201944289A (zh) | 2019-11-16 |
TWI812697B true TWI812697B (zh) | 2023-08-21 |
Family
ID=68284351
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW108112632A TWI812697B (zh) | 2018-04-13 | 2019-04-11 | 圖像識別裝置、及具有圖像識別裝置的物品製造裝置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP6890101B2 (ko) |
KR (1) | KR102649500B1 (ko) |
CN (1) | CN110390662A (ko) |
TW (1) | TWI812697B (ko) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20230053838A1 (en) * | 2020-02-18 | 2023-02-23 | Nec Corporation | Image recognition apparatus, image recognition method, and recording medium |
JP7510975B2 (ja) | 2022-07-22 | 2024-07-04 | プライムアースEvエナジー株式会社 | 検査装置及び検査装置のキャリブレーション方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005158780A (ja) * | 2003-11-20 | 2005-06-16 | Hitachi Ltd | パターン欠陥検査方法及びその装置 |
TWI256372B (en) * | 2001-12-27 | 2006-06-11 | Tokyo Electron Ltd | Carrier system of polishing processing body and conveying method of polishing processing body |
TWI465711B (zh) * | 2006-12-14 | 2014-12-21 | Nippon Electric Glass Co | 板玻璃缺陷檢測裝置、板玻璃製造方法、板玻璃物品、板玻璃良否判斷裝置以及板玻璃檢查方法 |
TW201721567A (zh) * | 2015-12-11 | 2017-06-16 | 澧達科技股份有限公司 | 儲藏物的位置追蹤方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5696591A (en) * | 1996-01-05 | 1997-12-09 | Eastman Kodak Company | Apparatus and method for detecting longitudinally oriented flaws in a moving web |
JP2001084364A (ja) * | 1999-09-13 | 2001-03-30 | Matsushita Electric Ind Co Ltd | 画像撮像検査装置及びこれを用いた実装基板検査装置 |
JP2005010036A (ja) * | 2003-06-19 | 2005-01-13 | Koyo Seiko Co Ltd | 外観検査装置 |
JP2007178144A (ja) * | 2005-12-27 | 2007-07-12 | Advanced Mask Inspection Technology Kk | パターン検査装置、パターン検査方法、検査対象試料、及び検査対象試料の管理方法 |
JP5006551B2 (ja) * | 2006-02-14 | 2012-08-22 | 住友化学株式会社 | 欠陥検査装置及び欠陥検査方法 |
JP2010127809A (ja) * | 2008-11-28 | 2010-06-10 | Nippon Paper Industries Co Ltd | 外観検査装置及び外観検査システム並びにプログラム |
JP5353566B2 (ja) * | 2009-08-31 | 2013-11-27 | オムロン株式会社 | 画像処理装置および画像処理プログラム |
JP6075912B2 (ja) * | 2013-03-14 | 2017-02-08 | Juki株式会社 | 画像処理装置及び画像処理方法 |
JP6430228B2 (ja) | 2014-12-15 | 2018-11-28 | 株式会社Screenホールディングス | 画像分類装置および画像分類方法 |
-
2018
- 2018-04-13 JP JP2018077653A patent/JP6890101B2/ja active Active
-
2019
- 2019-04-10 KR KR1020190041984A patent/KR102649500B1/ko active IP Right Grant
- 2019-04-11 TW TW108112632A patent/TWI812697B/zh active
- 2019-04-12 CN CN201910294158.7A patent/CN110390662A/zh active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI256372B (en) * | 2001-12-27 | 2006-06-11 | Tokyo Electron Ltd | Carrier system of polishing processing body and conveying method of polishing processing body |
JP2005158780A (ja) * | 2003-11-20 | 2005-06-16 | Hitachi Ltd | パターン欠陥検査方法及びその装置 |
TWI465711B (zh) * | 2006-12-14 | 2014-12-21 | Nippon Electric Glass Co | 板玻璃缺陷檢測裝置、板玻璃製造方法、板玻璃物品、板玻璃良否判斷裝置以及板玻璃檢查方法 |
TW201721567A (zh) * | 2015-12-11 | 2017-06-16 | 澧達科技股份有限公司 | 儲藏物的位置追蹤方法 |
Also Published As
Publication number | Publication date |
---|---|
CN110390662A (zh) | 2019-10-29 |
JP6890101B2 (ja) | 2021-06-18 |
JP2019184489A (ja) | 2019-10-24 |
TW201944289A (zh) | 2019-11-16 |
KR20190120076A (ko) | 2019-10-23 |
KR102649500B1 (ko) | 2024-03-21 |
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