TWI806147B - 用以使用能量控制來控制電加熱器之方法及系統 - Google Patents

用以使用能量控制來控制電加熱器之方法及系統 Download PDF

Info

Publication number
TWI806147B
TWI806147B TW110132897A TW110132897A TWI806147B TW I806147 B TWI806147 B TW I806147B TW 110132897 A TW110132897 A TW 110132897A TW 110132897 A TW110132897 A TW 110132897A TW I806147 B TWI806147 B TW I806147B
Authority
TW
Taiwan
Prior art keywords
heater
temperature
power
energy
target temperature
Prior art date
Application number
TW110132897A
Other languages
English (en)
Chinese (zh)
Other versions
TW202225878A (zh
Inventor
安德魯 奧普拉夫斯基
傑瑞米 昆特
基斯 奈斯
傑可比 林德雷
Original Assignee
美商瓦特洛威電子製造公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 美商瓦特洛威電子製造公司 filed Critical 美商瓦特洛威電子製造公司
Publication of TW202225878A publication Critical patent/TW202225878A/zh
Application granted granted Critical
Publication of TWI806147B publication Critical patent/TWI806147B/zh

Links

Images

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00—Control of temperature
    • G05D23/19—Control of temperature characterised by the use of electric means
    • G05D23/1902—Control of temperature characterised by the use of electric means characterised by the use of a variable reference value
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Program-control systems
    • G05B19/02—Program-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of program data in numerical form
    • G05B19/4155—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of program data in numerical form characterised by program execution, i.e. part program or machine function execution, e.g. selection of a program
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00—Control of temperature
    • G05D23/19—Control of temperature characterised by the use of electric means
    • G05D23/1902—Control of temperature characterised by the use of electric means characterised by the use of a variable reference value
    • G05D23/1904—Control of temperature characterised by the use of electric means characterised by the use of a variable reference value variable in time
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B1/00—Details of electric heating devices
    • H05B1/02—Automatic switching arrangements specially adapted to apparatus ; Control of heating devices
    • H05B1/0227—Applications
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B1/00—Details of electric heating devices
    • H05B1/02—Automatic switching arrangements specially adapted to apparatus ; Control of heating devices
    • H05B1/0227—Applications
    • H05B1/0288—Applications for non specified applications
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/42—Servomotor, servo controller kind till VSS
    • G05B2219/42033—Kind of servo controller
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/50—Machine tool, machine tool null till machine tool work handling
    • G05B2219/50333—Temperature
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B1/00—Details of electric heating devices
    • H05B1/02—Automatic switching arrangements specially adapted to apparatus ; Control of heating devices
    • H05B1/0227—Applications
    • H05B1/023—Industrial applications

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Human Computer Interaction (AREA)
  • Manufacturing & Machinery (AREA)
  • Control Of Temperature (AREA)
  • Control Of Resistance Heating (AREA)
  • Control Of Heat Treatment Processes (AREA)
TW110132897A 2020-09-04 2021-09-03 用以使用能量控制來控制電加熱器之方法及系統 TWI806147B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US202063074520P 2020-09-04 2020-09-04
US63/074,520 2020-09-04

Publications (2)

Publication Number Publication Date
TW202225878A TW202225878A (zh) 2022-07-01
TWI806147B true TWI806147B (zh) 2023-06-21

Family

ID=78032517

Family Applications (1)

Application Number Title Priority Date Filing Date
TW110132897A TWI806147B (zh) 2020-09-04 2021-09-03 用以使用能量控制來控制電加熱器之方法及系統

Country Status (7)

Country Link
US (2) US11921526B2 (enExample)
EP (2) EP4209112B1 (enExample)
JP (1) JP7753347B2 (enExample)
KR (2) KR20250053229A (enExample)
IL (1) IL301030B1 (enExample)
TW (1) TWI806147B (enExample)
WO (1) WO2022051509A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11083050B2 (en) * 2017-11-21 2021-08-03 Watlow Electric Manufacturing Company Integrated heater and method of manufacture
US12351917B2 (en) * 2020-12-01 2025-07-08 Applied Materials, Inc. Multi-zone heater tuning in substrate heater
CN121704584B (zh) * 2026-02-11 2026-04-17 扬州市优珂电气有限公司 一种高效节能电加热器温度智能控制方法

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040060917A1 (en) * 2002-09-30 2004-04-01 Yong Liu Advanced rapid thermal processing (RTP) using a linearly-moving heating assembly with an axisymmetric and radially-tunable thermal radiation profile
TW200741882A (en) * 2006-03-30 2007-11-01 Applied Materials Inc Adaptive control method for rapid thermal processing of a substrate
CN101801625A (zh) * 2007-06-08 2010-08-11 普瑞斯克技术公司 一种用于特定波长热照射和处理的方法和系统
CN103792973A (zh) * 2007-06-18 2014-05-14 翱泰温控器(深圳)有限公司 液体加热容器及其控制器
TW201537804A (zh) * 2013-12-26 2015-10-01 凱特伊夫公司 用於電子裝置之熱處理的設備與技術
CN105393182A (zh) * 2013-03-15 2016-03-09 速度控制有限责任公司 用于自动控制循环工作的havc和r设备的控制器以及使用该控制器的系统和方法
CN108702818A (zh) * 2015-09-03 2018-10-23 联邦科学技术研究组织 微波加热设备和加热方法
CN109964082A (zh) * 2016-06-24 2019-07-02 赫高公司 食物产品温度调节单元
US20200094494A1 (en) * 2017-08-29 2020-03-26 The Boeing Company Heater System for Fiber Placement Machine
TW202027192A (zh) * 2018-08-08 2020-07-16 美商蘭姆研究公司 利用基於電阻溫度係數(tcr)元件之加熱器漸進式加熱基板處理系統的構件

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62114003A (ja) * 1985-11-13 1987-05-25 Kokusai Electric Co Ltd 高速応答制御装置
US4737617A (en) * 1987-07-22 1988-04-12 General Electric Company Power control for cooking appliance with transient operating modes
US5397515A (en) * 1992-10-30 1995-03-14 Allen-Bradley Company, Inc. Injection molding machine temperature control system
DE4319652C2 (de) 1993-06-14 2002-08-08 Perkin Elmer Bodenseewerk Zwei Verfahren zur Temperatursteuerung
JPH09258601A (ja) * 1996-03-26 1997-10-03 Tec Corp 加熱定着装置の温度制御方法及び装置
JP2000164499A (ja) 1998-11-27 2000-06-16 Komatsu Ltd 基板温度制御装置及びそのコントローラ
US7035694B2 (en) * 2003-05-13 2006-04-25 National Instruments Corporation Automatic tuning of motion controllers using search techniques
US7196295B2 (en) 2003-11-21 2007-03-27 Watlow Electric Manufacturing Company Two-wire layered heater system
US20070251939A1 (en) * 2006-04-27 2007-11-01 Applied Materials, Inc. Control scheme for cold wafer compensation on a lithography track
JP4901486B2 (ja) 2007-01-04 2012-03-21 日本フェンオール株式会社 Ｐｉｄ制御方法及びｐｉｄ制御装置
US7848840B2 (en) * 2008-01-04 2010-12-07 Applied Materials, Inc. Method of controlling process parameters for semiconductor manufacturing apparatus
KR20110026513A (ko) * 2008-07-02 2011-03-15 그라코 미네소타 인크. 히터 및 모터 제어
US8867908B2 (en) 2011-08-31 2014-10-21 General Electric Company Self-programming water heater
JP5805509B2 (ja) * 2011-11-30 2015-11-04 トヨタ紡織株式会社 ヒータ制御装置及び車両用シートヒータ
US10728956B2 (en) 2015-05-29 2020-07-28 Watlow Electric Manufacturing Company Resistive heater with temperature sensing power pins
US10641507B2 (en) * 2015-09-16 2020-05-05 Siemens Industry, Inc. Tuning building control systems
TWI606242B (zh) 2015-09-17 2017-11-21 旺矽科技股份有限公司 溫度控制系統及其方法
JP6974131B2 (ja) 2017-11-20 2021-12-01 アズビル株式会社 推定装置および方法
US11545375B2 (en) 2019-06-17 2023-01-03 Applied Materials, Inc. Hybrid control system for workpiece heating

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040060917A1 (en) * 2002-09-30 2004-04-01 Yong Liu Advanced rapid thermal processing (RTP) using a linearly-moving heating assembly with an axisymmetric and radially-tunable thermal radiation profile
TW200741882A (en) * 2006-03-30 2007-11-01 Applied Materials Inc Adaptive control method for rapid thermal processing of a substrate
CN101801625A (zh) * 2007-06-08 2010-08-11 普瑞斯克技术公司 一种用于特定波长热照射和处理的方法和系统
CN103792973A (zh) * 2007-06-18 2014-05-14 翱泰温控器(深圳)有限公司 液体加热容器及其控制器
CN105393182A (zh) * 2013-03-15 2016-03-09 速度控制有限责任公司 用于自动控制循环工作的havc和r设备的控制器以及使用该控制器的系统和方法
TW201537804A (zh) * 2013-12-26 2015-10-01 凱特伊夫公司 用於電子裝置之熱處理的設備與技術
CN108702818A (zh) * 2015-09-03 2018-10-23 联邦科学技术研究组织 微波加热设备和加热方法
CN109964082A (zh) * 2016-06-24 2019-07-02 赫高公司 食物产品温度调节单元
US20200094494A1 (en) * 2017-08-29 2020-03-26 The Boeing Company Heater System for Fiber Placement Machine
TW202027192A (zh) * 2018-08-08 2020-07-16 美商蘭姆研究公司 利用基於電阻溫度係數(tcr)元件之加熱器漸進式加熱基板處理系統的構件

Also Published As

Publication number Publication date
IL301030B1 (en) 2026-02-01
EP4209112B1 (en) 2025-02-19
EP4209112C0 (en) 2025-02-19
EP4531497A3 (en) 2025-06-25
WO2022051509A1 (en) 2022-03-10
EP4531497A2 (en) 2025-04-02
EP4209112A1 (en) 2023-07-12
JP2023540531A (ja) 2023-09-25
TW202225878A (zh) 2022-07-01
KR20230062854A (ko) 2023-05-09
US11921526B2 (en) 2024-03-05
KR20250053229A (ko) 2025-04-21
JP7753347B2 (ja) 2025-10-14
US20240264616A1 (en) 2024-08-08
US20220075399A1 (en) 2022-03-10
IL301030A (en) 2023-05-01
KR102799668B1 (ko) 2025-04-22

Similar Documents

Publication Publication Date Title
TWI806147B (zh) 用以使用能量控制來控制電加熱器之方法及系統
TWI809475B (zh) 用於提供針對電氣加熱器的可變調降控制之方法及系統
JP2025143293A (ja) 温度制限装置を備えた熱システム
US20250028302A1 (en) Systems and methods for using intermediate data to improve system control and diagnostics
JP6070145B2 (ja) 調節器、操作量出力方法、プログラムおよび記憶媒体
JP6500976B2 (ja) 温度制御システム及び温度制御方法
CN109765948A (zh) 一种用于ct探测器的无过冲温度控制算法