KR20250053229A - 에너지 제어를 이용하여 전기 가열기를 제어하는 방법 및 시스템 - Google Patents

에너지 제어를 이용하여 전기 가열기를 제어하는 방법 및 시스템 Download PDF

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Publication number
KR20250053229A
KR20250053229A KR1020257012095A KR20257012095A KR20250053229A KR 20250053229 A KR20250053229 A KR 20250053229A KR 1020257012095 A KR1020257012095 A KR 1020257012095A KR 20257012095 A KR20257012095 A KR 20257012095A KR 20250053229 A KR20250053229 A KR 20250053229A
Authority
KR
South Korea
Prior art keywords
heater
temperature
energy
control mode
target temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020257012095A
Other languages
English (en)
Korean (ko)
Inventor
앤드류 오플라브스키
제레미 콴트
키이스 네스
제이콥 린들리
Original Assignee
와틀로 일렉트릭 매뉴팩츄어링 컴파니
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 와틀로 일렉트릭 매뉴팩츄어링 컴파니 filed Critical 와틀로 일렉트릭 매뉴팩츄어링 컴파니
Publication of KR20250053229A publication Critical patent/KR20250053229A/ko
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00—Control of temperature
    • G05D23/19—Control of temperature characterised by the use of electric means
    • G05D23/1902—Control of temperature characterised by the use of electric means characterised by the use of a variable reference value
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B11/00—Automatic controllers
    • G05B11/01—Automatic controllers electric
    • G05B11/36—Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential
    • G05B11/42—Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential for obtaining a characteristic which is both proportional and time-dependent, e.g. P. I., P. I. D.
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Program-control systems
    • G05B19/02—Program-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of program data in numerical form
    • G05B19/4155—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of program data in numerical form characterised by program execution, i.e. part program or machine function execution, e.g. selection of a program
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00—Control of temperature
    • G05D23/19—Control of temperature characterised by the use of electric means
    • G05D23/1902—Control of temperature characterised by the use of electric means characterised by the use of a variable reference value
    • G05D23/1904—Control of temperature characterised by the use of electric means characterised by the use of a variable reference value variable in time
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B1/00—Details of electric heating devices
    • H05B1/02—Automatic switching arrangements specially adapted to apparatus ; Control of heating devices
    • H05B1/0227—Applications
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B1/00—Details of electric heating devices
    • H05B1/02—Automatic switching arrangements specially adapted to apparatus ; Control of heating devices
    • H05B1/0227—Applications
    • H05B1/0288—Applications for non specified applications
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/42—Servomotor, servo controller kind till VSS
    • G05B2219/42033—Kind of servo controller
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/50—Machine tool, machine tool null till machine tool work handling
    • G05B2219/50333—Temperature
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B1/00—Details of electric heating devices
    • H05B1/02—Automatic switching arrangements specially adapted to apparatus ; Control of heating devices
    • H05B1/0227—Applications
    • H05B1/023—Industrial applications

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Human Computer Interaction (AREA)
  • Manufacturing & Machinery (AREA)
  • Control Of Temperature (AREA)
  • Control Of Resistance Heating (AREA)
  • Control Of Heat Treatment Processes (AREA)
KR1020257012095A 2020-09-04 2021-09-02 에너지 제어를 이용하여 전기 가열기를 제어하는 방법 및 시스템 Pending KR20250053229A (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US202063074520P 2020-09-04 2020-09-04
US63/074,520 2020-09-04
PCT/US2021/048884 WO2022051509A1 (en) 2020-09-04 2021-09-02 Method and system for controlling an electric heater using control on energy
KR1020237011417A KR102799668B1 (ko) 2020-09-04 2021-09-02 에너지 제어를 이용하여 전기 가열기를 제어하는 방법 및 시스템

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
KR1020237011417A Division KR102799668B1 (ko) 2020-09-04 2021-09-02 에너지 제어를 이용하여 전기 가열기를 제어하는 방법 및 시스템

Publications (1)

Publication Number Publication Date
KR20250053229A true KR20250053229A (ko) 2025-04-21

Family

ID=78032517

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020257012095A Pending KR20250053229A (ko) 2020-09-04 2021-09-02 에너지 제어를 이용하여 전기 가열기를 제어하는 방법 및 시스템
KR1020237011417A Active KR102799668B1 (ko) 2020-09-04 2021-09-02 에너지 제어를 이용하여 전기 가열기를 제어하는 방법 및 시스템

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020237011417A Active KR102799668B1 (ko) 2020-09-04 2021-09-02 에너지 제어를 이용하여 전기 가열기를 제어하는 방법 및 시스템

Country Status (7)

Country Link
US (2) US11921526B2 (enExample)
EP (2) EP4209112B1 (enExample)
JP (1) JP7753347B2 (enExample)
KR (2) KR20250053229A (enExample)
IL (1) IL301030B1 (enExample)
TW (1) TWI806147B (enExample)
WO (1) WO2022051509A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11083050B2 (en) * 2017-11-21 2021-08-03 Watlow Electric Manufacturing Company Integrated heater and method of manufacture
US12351917B2 (en) * 2020-12-01 2025-07-08 Applied Materials, Inc. Multi-zone heater tuning in substrate heater
CN121704584B (zh) * 2026-02-11 2026-04-17 扬州市优珂电气有限公司 一种高效节能电加热器温度智能控制方法

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JPS62114003A (ja) * 1985-11-13 1987-05-25 Kokusai Electric Co Ltd 高速応答制御装置
US4737617A (en) * 1987-07-22 1988-04-12 General Electric Company Power control for cooking appliance with transient operating modes
US5397515A (en) * 1992-10-30 1995-03-14 Allen-Bradley Company, Inc. Injection molding machine temperature control system
DE4319652C2 (de) 1993-06-14 2002-08-08 Perkin Elmer Bodenseewerk Zwei Verfahren zur Temperatursteuerung
JPH09258601A (ja) * 1996-03-26 1997-10-03 Tec Corp 加熱定着装置の温度制御方法及び装置
JP2000164499A (ja) 1998-11-27 2000-06-16 Komatsu Ltd 基板温度制御装置及びそのコントローラ
US6768084B2 (en) 2002-09-30 2004-07-27 Axcelis Technologies, Inc. Advanced rapid thermal processing (RTP) using a linearly-moving heating assembly with an axisymmetric and radially-tunable thermal radiation profile
US7035694B2 (en) * 2003-05-13 2006-04-25 National Instruments Corporation Automatic tuning of motion controllers using search techniques
US7196295B2 (en) 2003-11-21 2007-03-27 Watlow Electric Manufacturing Company Two-wire layered heater system
US7398693B2 (en) 2006-03-30 2008-07-15 Applied Materials, Inc. Adaptive control method for rapid thermal processing of a substrate
US20070251939A1 (en) * 2006-04-27 2007-11-01 Applied Materials, Inc. Control scheme for cold wafer compensation on a lithography track
JP4901486B2 (ja) 2007-01-04 2012-03-21 日本フェンオール株式会社 Ｐｉｄ制御方法及びｐｉｄ制御装置
WO2008154503A2 (en) 2007-06-08 2008-12-18 Pressco Technology Inc. A method and system for wavelength specific thermal irradiation and treatment
CN103792973B (zh) 2007-06-18 2017-10-27 翱泰温控器（惠州）有限公司 液体加热容器及其控制器
US7848840B2 (en) * 2008-01-04 2010-12-07 Applied Materials, Inc. Method of controlling process parameters for semiconductor manufacturing apparatus
KR20110026513A (ko) * 2008-07-02 2011-03-15 그라코 미네소타 인크. 히터 및 모터 제어
US8867908B2 (en) 2011-08-31 2014-10-21 General Electric Company Self-programming water heater
JP5805509B2 (ja) * 2011-11-30 2015-11-04 トヨタ紡織株式会社 ヒータ制御装置及び車両用シートヒータ
KR20160042810A (ko) 2013-03-15 2016-04-20 페이스컨트롤스, 엘엘씨 듀티 사이클 기반 hvac＆r 장비의 자동 제어를 위한 제어기, 및 그를 사용하는 시스템 및 방법
WO2015100375A1 (en) 2013-12-26 2015-07-02 Kateeva, Inc. Thermal treatment of electronic devices
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TWI606242B (zh) 2015-09-17 2017-11-21 旺矽科技股份有限公司 溫度控制系統及其方法
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JP6974131B2 (ja) 2017-11-20 2021-12-01 アズビル株式会社 推定装置および方法
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Also Published As

Publication number Publication date
IL301030B1 (en) 2026-02-01
TWI806147B (zh) 2023-06-21
EP4209112B1 (en) 2025-02-19
EP4209112C0 (en) 2025-02-19
EP4531497A3 (en) 2025-06-25
WO2022051509A1 (en) 2022-03-10
EP4531497A2 (en) 2025-04-02
EP4209112A1 (en) 2023-07-12
JP2023540531A (ja) 2023-09-25
TW202225878A (zh) 2022-07-01
KR20230062854A (ko) 2023-05-09
US11921526B2 (en) 2024-03-05
JP7753347B2 (ja) 2025-10-14
US20240264616A1 (en) 2024-08-08
US20220075399A1 (en) 2022-03-10
IL301030A (en) 2023-05-01
KR102799668B1 (ko) 2025-04-22

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A107 Divisional application of patent
PA0104 Divisional application for international application

Comment text: Divisional Application for International Patent

Patent event code: PA01041R01D

Patent event date: 20250414

Application number text: 1020237011417

Filing date: 20230403

PG1501 Laying open of application
A201 Request for examination
PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 20250430

Comment text: Request for Examination of Application