TWI802282B - The electro-conductive contact pin assembly - Google Patents

Abstract

The invention provides a combination of conductive contact pins made by MEMS process to have sufficient thickness.

Description

Conductive contact pin combination

The invention relates to a combination of conductive contact pins.

A test device having a plurality of conductive contact pins between the connection terminals of the semiconductor package or wafer for testing and the connection terminals on the test circuit substrate side is used in a test device for semiconductor packages or wafers of integrated circuits Device and testing socket. The conductive characteristic test of semiconductor components is performed by approaching the detection object (semiconductor wafer or semiconductor package) in a detection device with multiple conductive contact pins and making the conductive contact pins correspond to the electrode pads (or solder balls or bumps) on the detection object. ) touch to execute. When the conductive contact needle is in contact with the electrode pad on the detection object, after reaching the state where the two start to contact, the process of further approaching the detection object is performed.

It is previously known to use pogo-pins as sockets for conductive contact pins that make contact with semiconductor packages. The previous pogo pin is a spring pin with a spring in contact between the upper contact tip and the lower contact tip and surrounded by a barrel. However, pogo pins with such a structure have limitations in correspondence with a fine pitch of 300 μm or less.

In order to solve this problem, a technology of manufacturing conductive contact pins using a microelectromechanical system (MEMS) process has been developed. right The process of manufacturing contact pins using the MEMS process is described. First, after the photoresist film is coated on the surface of the conductive substrate, the photoresist film is patterned. Afterwards, the photoresist film is used as a mold, and the metal material is deposited on the exposed surface of the conductive substrate in the opening by electroplating, and the photoresist film and the conductive substrate are removed, thereby obtaining the contact pin. As mentioned above, the contact pins manufactured using the MEMS process are called MEMS contact pins. The shape of this MEMS contact pin has the same shape as the shape of the opening formed in the photoresist film mold.

On the other hand, in the prior art, since the photoresist film is used as a mold to manufacture the MEMS contact pins, the thickness of the MEMS contact pins is affected by the height of the mold of the photoresist film. However, in the case of multi-step laminated photoresist, an alignment error occurs between the upper and lower layered photoresist, and the side of the contact pin is not vertical due to the alignment error, and a step difference appears. Therefore, since there is a limitation in making the thickness of the contact pin sufficiently thick, the thickness of its cross-sectional shape has a thin rectangular shape compared to the width. Therefore, a dead space is formed inside the cylindrical space for accommodating the contact pin, and the thickness is thin, and the rigidity is relatively poor, so there is a problem that it is easy to break.

[Prior art literature]

[Patent Document]

[Patent Document 1] Korean Registered Patent Publication Registration No. 10-0659944

[Patent Document 2] Korean Registered Patent Publication Registration No. 10-0647131

The present invention is proposed to solve the above-mentioned problems, and the purpose of the present invention is to provide a conductive contact pin assembly that combines conductive contact pins produced by MEMS process to have sufficient thickness.

In order to achieve this purpose of the present invention, the conductive contact pin assembly according to the present invention is a conductive contact pin assembly comprising a first conductive contact pin and a second conductive contact pin combined with the first conductive contact pin, the first The conductive contact pin includes: a first upper contact tip; a first lower contact tip; and a first elastic main body connecting the first upper contact tip and the first lower contact tip, the first The two conductive contact pins include: a second upper contact tip; a second lower contact tip; and a second elastic main body connecting the second upper contact tip to the second lower contact tip, the first The upper contact tip and the second upper contact tip are coupled to each other by an upper coupling unit, the first lower contact tip and the second lower contact tip are coupled to each other by a lower coupling unit, and the The first elastic body part and the second elastic body part are not combined with each other.

In addition, the upper coupling unit includes a protrusion formed on any one of the first upper contact tip and the second upper contact tip and a hole into which the protrusion is inserted.

In addition, the lower coupling unit includes a protrusion formed on any one of the first lower contact tip and the second lower contact tip and a hole into which the protrusion is inserted.

In addition, the upper coupling unit includes an upper needle inserted into To a first upper hole formed in the first upper contact tip and a second upper hole formed in the second upper contact tip.

In addition, the lower coupling unit includes a lower needle inserted into a first lower hole formed at the first lower contact tip and a second lower hole formed at the second lower contact tip.

In addition, the first upper contact tip is hingedly coupled to the second upper contact tip.

In addition, the first lower contact tip is hingedly coupled to the second lower contact tip.

In addition, the deformation direction of the first elastic body part and the deformation direction of the second elastic body part are opposite to each other.

In addition, the first conductive contact pin and the second conductive contact pin are made of materials having different physical properties from each other in at least one of conductivity, hardness, and elasticity.

On the other hand, the conductive contact pin combination according to the present invention is a conductive contact pin combination comprising a first conductive contact pin and a second conductive contact pin combined with the first conductive contact pin, the first conductive contact pin comprising: a first upper contact tip having a first upper protrusion; a first lower contact tip having a first lower protrusion; and a first elastic body portion connecting the first upper contact tip to the first lower contact tip The upper contact tip, the second conductive contact pin includes: a second upper contact tip with a second upper hole for inserting the first upper protrusion; a second lower contact tip with a second lower hole for the first lower the second lower hole into which the upper protrusion is inserted; and the second elastic body part, connecting the second upper contact tip with the second lower contact tip.

On the other hand, the conductive contact pin combination according to the present invention is a conductive contact pin combination comprising a first conductive contact pin and a second conductive contact pin combined with the first conductive contact pin, the first conductive contact pin comprising: a first upper contact tip having a first upper hole; a first lower contact tip having a first lower protrusion; and a first elastic body portion connecting the first upper contact tip to the first lower contact tip The upper contact tip, the second conductive contact pin includes: a second upper contact tip with a second upper protrusion inserted into the first upper hole; a second lower contact tip with a second lower contact tip for the first lower hole a second lower hole into which the upper protrusion is inserted; and a second elastic main body connecting the second upper contact tip with the second lower contact tip.

On the other hand, the conductive contact pin assembly according to the present invention is a conductive contact pin assembly formed by combining a plurality of conductive contact pins, and the conductive contact pin includes: an upper contact tip with an upper hole; a lower contact tip with a lower holes; and an elastic main body connecting the upper contact tip and the lower contact tip, stacking a plurality of conductive contact pins, inserting the upper pins into the plurality of upper holes and inserting the lower pins into the plurality of lower holes .

The invention provides a combination of conductive contact pins made by MEMS process to have sufficient thickness.

10: Conductive contact pin combination

100: first conductive contact pin/conductive contact pin

110: first upper contact tip/upper contact tip

111: first upper body/upper body

113: the first upper protruding tip/upper protruding tip

120: first lower contact tip/lower contact tip

121: First lower body/lower body

123: the first lower protruding tip/lower protruding tip

130: first elastic body part/elastic body part

135, 235: blade

200: second conductive contact pin/conductive contact pin

210: second upper contact tip

211: second upper body

213: second upper protruding tip

220: second lower contact tip

221: second lower body

223: second lower protruding tip

230: second elastic body part

300: upper binding unit

311: First upper protrusion/protrusion

312: Second upper hole/hole

321: First upper hole

322: second upper protrusion

331: upper hole

350: upper needle

400: Lower combination unit

411: First lower protrusion/protrusion

412: Second lower hole/hole

421: first lower protrusion

422: second lower hole

431: Bottom hole

450: lower needle

(a) of Fig. 1, (b) of Fig. 1 are to show the preferred first implementation according to the present invention The diagram of the first conductive contact pin and the second conductive contact pin of the example.

FIG. 2 is a diagram illustrating combining a first conductive contact pin with a second conductive contact pin according to a preferred first embodiment of the present invention.

Fig. 3(a) and Fig. 3(b) are diagrams showing a first conductive contact pin and a second conductive contact pin according to a preferred second embodiment of the present invention.

FIG. 4 is a diagram illustrating combining a first conductive contact pin with a second conductive contact pin according to a preferred second embodiment of the present invention.

FIG. 5 is a diagram showing a conductive contact pin according to a preferred third embodiment of the present invention.

FIG. 6 is a diagram illustrating coupling of conductive contact pins according to a preferred third embodiment of the present invention.

The following is merely illustrative of the principles of the invention. Therefore, even if it is not explicitly described or illustrated in this specification, those skilled in the art can realize the principle of the invention and invent various devices included in the concept and scope of the invention. In addition, all conditional terms and examples listed in this specification should be understood in principle only for the purpose of clearly understanding the concept of the invention, and should not be limited to the examples and states specifically listed above.

The above objects, features, and advantages will be further clarified by the following detailed description related to the accompanying drawings, so those skilled in the technical field to which the invention belongs can easily implement the technical idea of the invention.

Reference will be made to cross-sectional views and/or perspective views which are ideal illustrations of the present invention. Examples described in this specification will be described. In order to effectively explain the technical content, the thicknesses of the films and regions shown in these drawings are exaggerated. The shape of the illustrations may be deformed due to manufacturing techniques and/or tolerances. In addition, the numbers of the conductive contact pins shown in the drawings are only partially shown in the drawings. Thus, embodiments of the invention are not limited to the specific forms shown, but also include variations in forms resulting from manufacturing processes.

When various embodiments are described, even if the embodiments are different, components performing the same functions are given the same names and the same reference numerals for convenience. In addition, for the sake of convenience, configurations and operations already described in other embodiments will be omitted.

The conductive contact pin assembly according to the preferred embodiment of the present invention is equipped with the detection device and is used to make electrical contact and physical contact with the detection object to transmit electrical signals. The detection device may be a detection device used in a semiconductor manufacturing process, and as an example, may be a probe card and a test socket according to a detection object. The detection device according to the preferred embodiment of the present invention is not limited thereto, and includes any device that applies electricity to confirm whether the detection object is defective.

In the combination of conductive contact pins according to a preferred embodiment of the present invention, a plurality of conductive contact pins are combined in a laminated state. The conductive contact pins according to the preferred embodiment of the present invention can be fabricated by MEMS technology.

In the combination of conductive contact pins according to a preferred embodiment of the present invention, conductive contact pins having the same shape as each other can be combined by combining units, and conductive contact pins having different shapes can be combined by combining units. constitute.

The conductive contact pin assembly according to the preferred embodiment of the present invention includes a first lead An electrical contact pin and a second conductive contact pin combined with the first conductive contact pin, the first conductive contact pin includes: a first upper contact tip; a first lower contact tip; and a first elastic body , connecting the first upper contact tip and the first lower contact tip, the second conductive contact pin includes: a second upper contact tip; a second lower contact tip; and a second elastic body , connecting the second upper contact tip and the second lower contact tip, the first upper contact tip and the second upper contact tip are combined with each other by an upper coupling unit, the first lower contact tip The bottom contact tip and the second lower contact tip are combined with each other by the lower coupling unit, and the first elastic main body and the second elastic main body are not combined with each other.

Here, the upper coupling unit includes a protrusion formed on any one of the first upper contact tip and the second upper contact tip and a hole into which the protrusion is inserted. And/or the lower coupling unit includes a protrusion formed on any one of the first lower contact tip and the second lower contact tip and a hole into which the protrusion is inserted.

Also, the upper coupling unit includes an upper needle inserted into a first upper hole formed at the first upper contact tip and a second upper hole formed at the second upper contact tip. The lower coupling unit includes a lower needle inserted into a first lower hole formed at the first lower contact tip and a second lower hole formed at the second lower contact tip.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings.

(a) of Fig. 1, (b) of Fig. 1 and Fig. 2 are for explaining according to the present invention The diagram of the conductive contact pin combination 10 of the preferred first embodiment, Fig. 1(a) and Fig. 1(b) show the first conductive contact pin 100 and the second conductive contact pin 200 before combining 2 is a diagram showing a combined state of the first conductive contact pin 100 and the second conductive contact pin 200 .

The conductive contact pin assembly 10 according to the preferred first embodiment of the present invention includes a first conductive contact pin 100 and a second conductive contact pin 200 combined with the first conductive contact pin 100 .

The first conductive contact pin 100 and the second conductive contact pin 200 may be formed of conductive material. Here, the conductive material can be selected from platinum (Pt), rhodium (Rh), palladium (Pd), copper (Cu), silver (Ag), gold (Au), iridium (Ir) or alloys thereof, or nickel- At least one of cobalt (NiCo) alloy, palladium-cobalt (PdCo) alloy, palladium-nickel (PdNi) alloy or nickel-phosphorus (NiP) alloy is selected. The first conductive contact pin 100 and the second conductive contact pin 200 may have a multi-layer structure in which a plurality of conductive materials are laminated. Each conductive layer formed of different materials can be selected from platinum (Pt), rhodium (Rh), palladium (Pd), copper (Cu), silver (Ag), gold (Au), iridium (Ir) or alloys thereof , or palladium-cobalt (PdCo) alloy, palladium-nickel (PdNi) alloy or nickel-phosphorus (NiP) alloy.

The first conductive contact pin 100 includes a first upper contact tip 110, a first lower contact tip 120, and a first elastic main body 130 connecting the first upper contact tip 110 and the first lower contact tip 120. The two conductive contact pins 200 include a second upper contact tip 210 , a second lower contact tip 220 , and a second elastic body portion 230 connecting the second upper contact tip 210 and the second lower contact tip 220 .

The first upper contact tip 110 and the second upper contact tip 210 are connected by the upper The part combining units 300 are combined with each other, the first lower contact tip 120 and the second lower contact tip 220 are combined with each other through the lower combining unit 400 , and the first elastic body part 130 and the second elastic body part 230 are not combined with each other.

Here, the upper coupling unit 300 includes a protrusion 311 formed on any one of the first upper contact tip 110 and the second upper contact tip 210 and a hole 312 into which the protrusion 311 is inserted. In addition, the lower coupling unit 400 includes a protrusion 411 formed on any one of the first lower contact tip 120 and the second lower contact tip 220 and a hole 412 into which the protrusion 411 is inserted.

Referring to (a) of FIG. 1 and (b) of FIG. 1, (a) of FIG. 1 is a diagram showing a first conductive contact pin 100, and (b) of FIG. 1 is a diagram showing a second conductive contact pin 200 .

The first conductive contact pin 100 includes a first upper contact tip 110 having a first upper protrusion 311 and a first lower contact tip 120 having a first lower protrusion 411 .

The first upper contact tip 110 includes a first upper body 111 and a first upper protruding tip 113 . The first upper body 111 is formed in a substantially quadrangular shape on a plane. The first upper protrusion 311 is provided on the surface of the first upper body 111 . Preferably, the first upper protrusion 311 protrudes from the lower surface of the first upper body 111 . The cross-sectional shape of the first upper protrusion 311 may have a circular shape, but is not limited thereto, and may be configured as a polygonal shape. The first upper protruding tip 113 protrudes from the end side of the first upper body 111 and has a sharp shape.

The first lower contact tip 120 includes a first lower body 121 and a first lower The protruding tip 123. The first lower body 121 is formed in a substantially quadrangular shape on a plane. The first lower protrusion 411 is provided on the surface of the first lower body 121 . Preferably, the first lower protrusion 411 protrudes from the lower surface of the first lower body 121 . The cross-sectional shape of the first lower protrusion 411 may have a circular shape, but is not limited thereto, and may be configured as a polygonal shape. The first lower protrusion 411 and the first upper protrusion 311 are disposed on the lower surface of the first conductive contact pin 100 and their protruding directions are the same as each other.

The first lower protruding tip 123 protrudes from the end side of the first lower body 121 and has a sharp shape.

Since the first upper protruding tip 113 and the first lower protruding tip 123 can function as parts that substantially contact the contact object, the first upper protruding tip 113 and the first lower protruding tip 123 can be made of a material with relatively high hardness. form. As an example, the first upper protruding tip 113 and the first lower protruding tip 123 may be formed of platinum (Pt) or rhodium (Rh). On the contrary, the main body of the first conductive contact pin 100 can be formed by selecting at least one of a material with relatively high conductivity or a metal with high elasticity compared with the first upper protruding tip 113 .

The first elastic body portion 130 connects the first upper contact tip 110 and the first lower contact tip 120 . The first elastic body part 130 includes a plurality of blades 135 . One end of each blade 135 is connected to the first upper body 111 , and the other end is connected to the first lower body 121 . The blades 135 are spaced apart from each other and provided in plurality so that the first upper body 111 and the first lower body 121 are elastically deformed to move close to each other or move away from each other. Each vane 135 has an arcuate shape curved to one side based on both ends, like the shape of the letter "C" of the alphabet. Referring to (a) of Figure 1, Each blade 135 has a shape curved to the left with respect to both ends.

The second conductive contact pin 200 includes: a second upper contact tip 210 with a second upper hole 312 for the first upper protrusion 311 to be inserted; and a second lower contact tip 220 with a second lower protrusion 411 for insertion Second lower hole 412 .

The second upper contact tip 210 includes a second upper body 211 and a second upper protruding tip 213 . The second upper body 211 is formed in a substantially quadrangular shape on a plane. The second upper hole 312 is provided inside the second upper body 211 . Preferably, the second upper hole 312 is formed through the second upper body 211 inside the second upper body 211 . The second upper protruding tip 213 protrudes from the end side of the second upper body 211 and has a sharp shape.

The second lower contact tip 220 includes a second lower body 221 and a second lower protruding tip 223 . The second lower body 221 is formed in a substantially quadrangular shape on a plane. The second lower hole 412 is provided inside the second lower body 221 . Preferably, the second lower hole 412 is formed through the second lower body 221 inside the second lower body 221 .

The second elastic body portion 230 connects the second upper contact tip 210 and the second lower contact tip 220 . The second elastic body part 230 includes a plurality of blades 235 . One end of each blade 235 is connected to the second upper body 211 , and the other end is connected to the second lower body 221 . The blades 235 are spaced apart from each other and provided in plurality so that the second upper body 211 and the second lower body 221 are elastically deformed to move closer to each other or move away from each other. Each vane 235 has an arcuate shape curved to one side based on both ends, like the reverse shape of the letter "C" of the alphabet. Referring to (b) of FIG. 1 , each blade 235 has a shape curved to the right with respect to both end portions.

FIG. 2 is a diagram illustrating a state in which the first conductive contact pin 100 and the second conductive contact pin 200 explained above are combined. Referring to FIG. 2 , the first conductive contact pin 100 is located at the front and the second conductive contact pin 200 is located at the rear of the first conductive contact pin 100 and combined.

The first upper protrusion 311 is inserted into the second upper hole 312 to constitute the upper coupling unit 300 , and the first lower protrusion 411 is inserted into the second lower hole 412 to constitute the lower coupling unit 400 .

The first upper contact tip 110 of the first conductive contact pin 100 is combined with the second upper contact tip 210 of the second conductive contact pin 200 by the upper bonding unit 300 , and the first lower contact of the first conductive contact pin 100 contacts The tip 120 is combined with the second lower contact tip 220 of the second conductive contact pin 200 through the lower combining unit 400 . But here the first elastic body part 130 and the second elastic body part 230 are not combined with each other.

With the combination of the first conductive contact pin 100 and the second conductive contact pin 200 through the upper joint unit 300 and the lower joint unit 400, the conductive contact pin assembly 10 with sufficient thickness can be provided, and the conductive contact pin can be accommodated. No void space may be formed inside the combined cylindrical space.

Since the first elastic body part 130 of the first conductive contact pin 100 has the leaf 135 of the shape bent to the left, and the second elastic body part 230 of the second conductive contact pin 200 has the leaf 235 of the shape of the right bend, the second The deformation direction of the first elastic body part 130 and the deformation direction of the second elastic body part 230 are opposite to each other. This ensures the structural stability of the conductive contact pin assembly 10 .

The first upper contact tip 110 and the second upper contact tip 210 coupled by the upper coupling unit 300 perform hinge coupling using the first upper protrusion 311 as a hinge axis, and the second coupling by the lower coupling unit 400 The first lower contact tip 120 and the second lower contact tip 220 can be hinged by using the first lower protrusion 411 as a hinge shaft. In this case, the cross section of the first upper protrusion 311 and the second upper hole 312 is formed in a circular shape and allows relative rotation between each other, and the cross section of the first lower protrusion 411 and the second lower hole 412 is also formed in a circular shape and allowed to rotate relative to each other. Rotation relative to each other is allowed.

By allowing the relative rotation of the first conductive contact pin 100 and the second conductive contact pin 200 based on the first upper protrusion 311 and the first lower protrusion 411 in the upper and lower parts of the conductive contact pin assembly 10, it can be removed more easily. Oxide film formed on the surface of the contact object. More specifically, since the first upper contact tip 110 and the second upper contact tip 210 come into contact with the contact object located on the upper side, they can rotate on the basis of the first upper protrusion 311 while descending, so the first upper part protrudes. The tip 113 and the second upper protruding tip 213 scrape off the surface of the contact object more effectively, thereby easily removing the oxide film of the contact object. In addition, since the first lower contact tip 120 and the second lower contact tip 220 come into contact with the contact object located on the lower side, they can rotate on the basis of the first lower protrusion 411 while descending, so the first lower protrusion protrudes. The tip 123 and the second lower protruding tip 223 scrape off the surface of the contact object more effectively, thereby easily removing the oxide film of the contact object.

The first conductive contact pin 100 and the second conductive contact pin 200 can use materials having different physical properties from each other in at least one of conductivity, hardness, and elasticity. to make. For example, the first conductive contact pin 100 may be a contact pin made of a material with excellent electrical conductivity, and the second conductive contact pin 200 may be a contact pin made of a material with excellent hardness or elasticity. The conductive contact pin produced as a single body has limitations in producing a contact pin excellent in all of conductivity, hardness, and elasticity. The reason for this is that a material with excellent electrical conductivity has low hardness or elasticity. Therefore, it is possible to produce a contact pin having excellent conductivity, hardness, and elasticity compared with a conductive contact pin used as a single body.

Next, a second embodiment according to the present invention will be explained. However, in the embodiments described below, compared with the above-mentioned first embodiment, the description will focus on the characteristic components, and the description of the same or similar components as the first embodiment will be omitted.

(a) of FIG. 3, (b) of FIG. b) is a view showing the first conductive contact pin 100 and the second conductive contact pin 200 before bonding, and FIG. 4 is a view showing a state in which the first conductive contact pin 100 and the second conductive contact pin 200 are bonded.

In the conductive contact pin assembly 10 according to the second embodiment of the present invention, there are differences in the composition of the upper coupling unit 300 and the lower coupling unit 400 from the conductive contact pin assembly 10 according to the first embodiment.

The first conductive contact pin 100 includes a first upper contact tip 110 with a first upper hole 321 and a first lower contact tip 120 with a first lower protrusion 421, and the second conductive contact pin 200 includes: a second upper portion a contact tip 210 having a second upper protrusion 322 inserted into the first upper hole 321; and a second lower contact tip 220, has a second lower hole 422 into which the first lower protrusion 421 is inserted.

Inserting the second upper protrusion 322 into the first upper hole 321 constitutes the upper coupling unit 300 , and inserting the first lower protrusion 421 into the second lower hole 422 constitutes the lower coupling unit 400 .

The first upper contact tip 110 of the first conductive contact pin 100 is combined with the second upper contact tip 210 of the second conductive contact pin 200 by the upper bonding unit 300 , and the first lower contact of the first conductive contact pin 100 contacts The tip 120 is combined with the second lower contact tip 220 of the second conductive contact pin 200 through the lower combining unit 400 . But here the first elastic body part 130 and the second elastic body part 230 are not combined with each other.

Next, a third embodiment according to the present invention will be explained. However, in the embodiments described below, compared with the above-mentioned first embodiment, the description will focus on the characteristic components, and the description of the same or similar components as the first embodiment will be omitted.

5 and 6 are diagrams for illustrating a conductive contact pin assembly 10 according to a preferred third embodiment of the present invention, and FIG. 5 shows the first conductive contact pin 100 and the second conductive contact pin 200 before bonding. FIG. 6 is a diagram showing a combined state of the first conductive contact pin 100 and the second conductive contact pin 200 .

In the conductive contact pin assembly 10 according to the third embodiment of the present invention, there are differences in the composition of the upper coupling unit 300 and the lower coupling unit 400 from the conductive contact pin assembly 10 according to the first embodiment.

The conductive contact pin 100 comprises an upper contact tip 110 with an upper hole 331 The tip 120 is in contact with the lower portion having the lower hole 431 .

The upper contact tip 110 includes an upper body 111 and an upper protruding tip 113 . The upper body 111 is formed in a substantially quadrangular shape on a plane. The upper hole 331 is formed through the upper body 111 inside the upper body 111 . The cross-sectional shape of the upper hole 331 may have a circle but is not limited thereto, and may be configured as a polygon. The upper protruding tip 113 protrudes from the end side of the upper body 111 and has a sharp shape.

The lower contact tip 120 includes a lower body 121 and a lower protruding tip 123 . The lower body 121 is formed in a substantially quadrilateral shape on a plane. The lower hole 431 is formed inside the lower body 121 to penetrate the lower body 121 . The cross-sectional shape of the lower hole 431 may have a circle but is not limited thereto, and may be configured as a polygon. The lower protruding tip 123 protrudes from the end side of the lower body 121 and has a sharp shape.

The elastic body portion 130 connects the upper contact tip 110 and the lower contact tip 120 . The elastic main body 130 includes a plurality of blades 135 . One end of each blade 135 is connected to the upper body 111 and the other end is connected to the lower body 121 . The blades 135 are spaced apart from each other and provided in plurality so that the upper body 111 and the lower body 121 are elastically deformed to move closer to each other or move away from each other. Each of the blades 135 has an arcuate shape that curves toward one side based on both ends, like the letter "C" of the alphabet. Referring to FIG. 5 , each blade 135 has a shape curved to the left based on both ends. On the other hand, different from this, each vane 235 may have an arc shape curved to one side based on both ends, like the inverse shape of the letter "C" of the alphabet.

Referring to FIG. 6 , a plurality of conductive contact pins 100 are stacked, upper pins 350 are inserted into a plurality of upper holes 331 , and lower pins 450 are inserted into a plurality of lower holes 431 . will go up Inserting the lower needle 350 into the upper hole 331 constitutes the upper coupling unit 300 , and inserting the lower needle 450 into the lower hole 431 constitutes the lower coupling unit 400 . The first upper contact tip 110 of the first conductive contact pin 100 is combined with the second upper contact tip 210 of the second conductive contact pin 200 by the upper bonding unit 300, and the first lower contact of the first conductive contact pin 100 contacts The tip 120 is combined with the second lower contact tip 220 of the second conductive contact pin 200 through the lower combining unit 400 . But here the first elastic body part 130 and the second elastic body part 230 are not combined with each other.

On the other hand, although it is not shown in the figure, the two ends of the upper needle 350 and the lower needle 450 may further include fastening anti-separation parts. The detachment prevention part may be provided at both ends of the upper needle 350 and the lower needle 450, and integrate a plurality of conductive contact needles 100 into one body.

Since no protrusion is formed and only the upper hole 331 and the lower hole 431 are formed on the surface of the conductive contact pin 100 according to the third embodiment, the manufacturing process of the conductive contact pin 100 may be simplified.

In addition, since the upper needle 350 and the lower needle 450 are inserted in a state where a plurality of conductive contact pins 100 are stacked, and the plurality of conductive contact pins 100 are combined at one time, there is an advantage that even if the thickness of the individually fabricated conductive contact pin 100 is thin, The overall thickness of the conductive contact pin assembly 10 can also be freely adjusted and changed.

In addition, even if any one of the plurality of conductive contact pins 100 is damaged, the upper pin 350 and the lower pin 450 can be pulled out, and only the damaged conductive contact pin 100 can be replaced to form the conductive contact pin assembly 10, so it has the advantage of easy maintenance. advantage.

In addition, any one of the plurality of conductive contact pins 100 is excellent in electrical conductivity After any one of them is made of materials with excellent elasticity, they can be combined to form the conductive contact pin assembly 10 . In this way, a plurality of conductive contact pins 100 having different physical properties such as conductivity, hardness, and elasticity can be combined, so that they can have more effective electrical conductivity, Physical properties such as hardness and elasticity.

The conductive contact pins 100 , 200 described above can be manufactured by using an anodic oxide film mold and using a MEMS process. More specifically, after forming a photoresist on the upper surface of the anodized film, exposing and developing it to prepare an anodized film material mold with openings, and using the crystal provided at the lower part of the anodized film material mold The seed layer is electroplated to make the conductive contact pin 100 . Here, the mold made of anodized film means a film formed by anodizing a metal as a base material, and the pores mean holes formed during the process of anodizing a metal to form an anodized film. For example, when the metal as the base material is aluminum (Al) or an aluminum alloy, anodic oxidation of the base material forms an anodized film made of aluminum oxide (Al ₂ O ₃ ) on the surface of the base material. The anodized film formed as described above is vertically divided into a barrier layer in which pores are not formed, and a porous layer in which pores are formed. In the base material on which the anodized film having the barrier layer and the porous layer is formed on the surface, if the base material is removed, only the anodized film made of aluminum oxide (Al ₂ O ₃ ) remains. The anodized film can be formed by removing the barrier layer formed when anodizing is performed and the pores penetrate along the upper and lower sides, or by leaving the barrier layer formed when anodizing as it is and leaving the upper and lower ends of the pores A closed structure is formed. The anodized film has a coefficient of thermal expansion of 2 ppm/°C to 3 ppm/°C. Therefore, when exposed in a high-temperature environment, there is little thermal deformation due to temperature. Therefore, even if the manufacturing environment of the conductive contact pin 100 is a high temperature environment, the precise conductive contact pin 100 can be manufactured without thermal deformation.

As mentioned above, although the preferred embodiments of the present invention are described differently, those of ordinary skill in the corresponding technical field can implement various embodiments within the scope of the ideas and fields of the present invention described in the scope of the following claims. modification or deformation.

100: first conductive contact pin/conductive contact pin

110: first upper contact tip/upper contact tip

111: first upper body/upper body

113: the first upper protruding tip/upper protruding tip

120: first lower contact tip/lower contact tip

121: First lower body/lower body

123: the first lower protruding tip/lower protruding tip

130: first elastic body part/elastic body part

135, 235: blade

200: second conductive contact pin/conductive contact pin

210: second upper contact tip

211: second upper body

213: second upper protruding tip

220: second lower contact tip

221: second lower body

223: second lower protruding tip

230: second elastic body part

311: First upper protrusion/protrusion

312: Second upper hole/hole

411: First lower protrusion/protrusion

412: Second lower hole/hole

Claims (12)

A combination of conductive contact pins, including a first conductive contact pin and a second conductive contact pin combined with the first conductive contact pin, wherein the first conductive contact pin includes: a first upper contact tip; a first lower part a contact tip; and a first elastic main body connecting the first upper contact tip with the first lower contact tip, the second conductive contact pin comprising: a second upper contact tip; a second lower part a contact tip; and a second elastic body portion connecting the second upper contact tip and the second lower contact tip, the first upper contact tip and the second upper contact tip via an upper The combining units are combined with each other, the first lower contact tip and the second lower contact tip are combined with each other through the lower combining unit, the first elastic body part includes a plurality of first blades, and the second elastic The main body part includes a plurality of second blades, the plurality of first blades have a shape bent to one side with respect to both end portions, and the plurality of second blades have a shape curved toward the other side with respect to both end portions. curved shape, the plurality of first vanes and the plurality of second vanes are elastically deformed to the one side and the other side, respectively, so that the first upper contact tip and the second The upper contact tip and the first lower contact tip and the second lower contact tip move closer to each other or move away from each other. The conductive contact pin assembly according to claim 1, wherein the upper coupling unit includes a protrusion formed on any one of the first upper contact tip and the second upper contact tip, and the protrusion is inserted into hole. The conductive contact pin assembly according to claim 1, wherein the lower coupling unit includes a protrusion formed on any one of the first lower contact tip and the second lower contact tip and a support for the protrusion Insertion hole. The conductive contact pin assembly according to claim 1, wherein the upper coupling unit includes an upper pin inserted into a first upper hole formed in the first upper contact tip and formed in the second The upper portion contacts the second upper hole of the tip. The conductive contact pin assembly according to claim 1, wherein the lower coupling unit includes a lower pin inserted into a first lower hole formed in the first lower contact tip and formed in the The second lower portion contacts the second lower hole of the tip. The conductive contact pin assembly according to claim 1, wherein the first upper contact tip and the second upper contact tip are hingedly combined. The conductive contact pin assembly according to claim 1, wherein the first lower contact tip is hingedly combined with the second lower contact tip. The conductive contact pin assembly according to claim 1, wherein the deformation direction of the first elastic body part is the same as the deformation direction of the second elastic body part The shape directions are opposite to each other. The combination of conductive contact pins according to claim 1, wherein the first conductive contact pin and the second conductive contact pin are made of materials having different physical properties from each other in at least any one of conductivity, hardness, and elasticity to make. A combination of conductive contact pins, comprising a first conductive contact pin and a second conductive contact pin combined with the first conductive contact pin, wherein the first conductive contact pin includes: a first upper contact tip with a first upper portion a protrusion; a first lower contact tip having a first lower protrusion; and a first resilient body portion connecting the first upper contact tip to the first lower contact tip, the second conductive contact The needle includes: a second upper contact tip having a second upper hole into which said first upper protrusion is inserted; a second lower contact tip having a second lower hole into which said first lower protrusion is inserted; Two elastic main parts, connecting the second upper contact tip and the second lower contact tip, the first elastic main part includes a plurality of first blades, and the second elastic main part includes a plurality of second blades, the plurality of first blades have a shape bent to one side based on both ends, and the plurality of second blades have a shape bent to the other side based on both ends shape, the plurality of first blades and the plurality of second blades are elastically deformed to the one side and the other side respectively, so that the first upper part contacts the tip and the second upper part contacts The tips and the first lower contact tip and the second lower contact tip move closer to each other or move away from each other. A combination of conductive contact pins, comprising a first conductive contact pin and a second conductive contact pin combined with the first conductive contact pin, wherein the first conductive contact pin includes: a first upper contact tip with a first upper portion a hole; a first lower contact tip having a first lower protrusion; and a first resilient body portion connecting said first upper contact tip to said first lower contact tip, said second conductive contact The needle includes: a second upper contact tip having a second upper protrusion inserted into the first upper hole; a second lower contact tip having a second lower hole into which the first lower protrusion is inserted; Two elastic main parts, connecting the second upper contact tip and the second lower contact tip, the first elastic main part includes a plurality of first blades, and the second elastic main part includes a plurality of second blades, the plurality of first blades have a shape bent to one side based on two ends shape, the plurality of second blades have a shape bent to the other side based on the two ends, and the plurality of first blades and the plurality of second blades are respectively bent toward the one side and the other side. One side is elastically deformed so that the first upper contact tip and the second upper contact tip and the first lower contact tip and the second lower contact tip move closer to each other or move closer to each other. Move away. A conductive contact pin assembly is a conductive contact pin combination formed by combining a plurality of conductive contact pins. The conductive contact pin includes: an upper contact tip with an upper hole; a lower contact tip with a lower hole; and an elastic main body , connecting the upper contact tip and the lower contact tip, the plurality of conductive contact pins are laminated, the upper pins are inserted into the plurality of upper holes and the lower pins are inserted into the plurality of lower holes, the The elastic body part includes a plurality of blades having a shape bent to one side or the other side based on both ends, and the plurality of blades are elastically moved toward the one side or the other side. deformed so that the upper contact tip and the lower contact tip move closer to each other or move away from each other.

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