TWI801997B - A pad conditioner ,conditioner head and a spinning part therein - Google Patents

Abstract

The invention discloses a trimming head rotating part, a polishing pad trimming head and a trimmer. The lower gland of the inner ring is arranged in the cavity formed between the transmission film and the grinding seat, and the universal transmission pin is arranged between the lower gland of the inner ring and the grinding seat, thereby forming a transmission film transmission structure. With the characteristic of deformability, when the grinding wheel set under the grinding seat is in contact with the polishing pad, a certain pressure is applied downward to the rotating part of the dressing head, and the transmission film uses the universal transmission pin as the adjustment fulcrum to follow the polishing of the grinding wheel. The pad is deformed, so as to realize the universal adjustment, so that the grinding wheel disc and the polishing pad are closely attached, thereby ensuring the polishing effect of the dressing head on the polishing pad.

Description

Dressing head rotating part, polishing pad dressing head and dresser

The invention relates to the field of semiconductor integrated circuit wafer manufacturing, in particular to a trimming head rotating part, a polishing pad trimming head and a trimmer.

In the Chemical Mechanical Planarization (CMP) equipment, the wafer is polished on the surface of the rough polishing pad. As the polishing time prolongs, the surface of the polishing pad is ground and the polishing effect is lost. The dresser of the grinding wheel trims the surface of the polishing pad to make the surface of the polishing pad rough and frictional, so that it can continue to have the function of polishing. However, as the polishing pad is used for a long time, the thickness of the polishing pad will decrease and the surface height will be uneven. The problem of losing the polishing effect is that if the grinding wheel disc cannot fit tightly with the polishing pad, the edge of the grinding wheel disc will cause scratches on the polishing pad during the rotation of the grinding wheel disc, which will affect the wafer polishing effect.

In order to solve the above problems, most of the structure of the dressing head of the existing dresser adopts a rigid pin-hole fit structure to drive the rotation of the grinding wheel disc, so as to ensure that the grinding wheel disc and the polishing pad are completely tightly attached at any time.

However, the existing trimmer with pin-hole fit structure has a certain hysteresis in the transmission process due to the gap between the pin and the hole parts; also due to the need for universal adjustment, there needs to be an adjustment space inside, no seal, and the trimming head The interior and exterior of the dressing head are connected, so that the processing fluid will enter the interior during the work process, and the processing fluid is prone to crystallization inside the dressing head, which will eventually reduce the universal activity space inside the dressing head, and the processing fluid will fall to the polishing after crystallization. The risk of the pad scratching the wafer; and because the rigid pin and hole structure is in line contact with the parts during the transmission process, so that long-term use will cause long-term impact on the contact surface of the parts and cause damage, and the falling metal particles will enter the polishing Pad, in some processes, it will cause a short circuit in the circuit on the surface of the wafer, resulting in the loss of wafer scrap.

In view of this, the embodiment of the present invention provides a dressing head rotating component, a polishing pad dressing head and a dresser, so as to solve the problems caused by the existing dresser with a pin-hole fitting structure.

In order to achieve the above purpose, embodiments of the present invention provide the following technical solutions: The first aspect of the present invention discloses a rotating part of a dressing head, including: a transmission fastener, a transmission film, a lower gland of the inner ring, a universal transmission pin and a grinding seat; The transmission fastener is used to connect with the transmission shaft of the trimming head; The lower edge of the transmission film is fixedly connected to the upper end surface of the grinding seat, the upper end surface is fixed to the transmission fastener, and a cavity is formed between the transmission film and the grinding seat; The lower gland of the inner ring is arranged in the cavity, and the universal transmission pin is arranged between the lower gland of the inner ring and the grinding seat; The lower part of the grinding seat is used for installing the grinding wheel disc.

Preferably, the cavity formed between the transmission film and the grinding seat is a sealed cavity.

Preferably, the transmission film is made of flexible material.

Preferably, the transmission membrane, the lower gland of the inner ring and the grinding seat are coaxially arranged.

Preferably, the universal transmission pin is arranged concentrically with the transmission film.

Preferably, the mating end of the universal transmission pin has a spherical structure;

The lower part of the lower gland of the inner ring is provided with a matching groove for matching with the matching end of the universal transmission pin, and the fixed end of the universal transmission pin is fixed to the grinding seat.

Preferably, the universal transmission pin and the grinding seat are integrally structured.

Preferably, the mating end of the universal transmission pin has a spherical structure;

The bottom of the grinding seat is provided with a matching groove for matching with the matching end of the universal transmission pin, and the fixed end of the universal transmission pin is fixed to the lower gland of the inner ring.

Preferably, the universal transmission pin and the lower gland of the inner ring are integrally structured.

Preferably, a mounting groove for mounting the universal drive pin is opened in the grinding seat.

Preferably, it further includes: the lower gland of the outer ring; The lower gland of the outer ring is arranged on the upper part of the grinding seat, and is fixedly connected with the upper edge of the transmission membrane; The transmission fastener passes through the lower gland along the outer ring and is in transmission connection with the transmission membrane.

Preferably, the transmission fastener is an upper gland of the inner ring.

The second aspect of the present invention discloses a polishing pad dressing head, including: a driving device, a transmission shaft, a dressing head mounting seat, a bearing, and the dressing head rotating part disclosed in the first aspect of the present invention; The driving device and the bearing are arranged in the mounting seat of the trimming head; The driving device is connected with the transmission shaft, and the transmission shaft passes through the bearing and is in transmission connection with the transmission film of the rotating part of the trimming head.

Preferably, the transmission shaft and the transmission fastener of the rotating part of the dressing head are integrally structured.

The third aspect of the present invention discloses a dresser, comprising: a dresser arm, a base, and the polishing pad dresser disclosed in the second aspect of the present invention.

One end of the conditioning arm is connected to the base, and the other end is connected to the polishing pad conditioning head.

It can be seen from the above that the present invention discloses a dressing head rotating part, a polishing pad dressing head and a dresser. The inner ring lower gland is arranged in the cavity formed between the transmission film and the grinding seat, and the inner ring A universal transmission pin is set between the lower gland and the grinding seat to form a transmission film transmission structure. Due to the deformable characteristics of the transmission film, when the grinding wheel set under the grinding seat contacts the polishing pad, it rotates towards the dressing head The component exerts a certain pressure downwards, and the transmission film takes the universal transmission pin as the adjustment fulcrum to deform as the grinding wheel disc fits the polishing pad, thereby realizing universal adjustment, so that the grinding wheel disc and the polishing pad are closely attached, thereby ensuring the alignment of the dressing head. The polishing effect of the polishing pad.

The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

In the present invention, the terms "comprising", "comprising" or any other variation thereof are intended to cover a non-exclusive inclusion such that a process, method, article or apparatus comprising a set of elements includes not only those elements, but also includes none. other elements specifically listed, or, moreover, elements inherent in such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising a ..." does not exclude the presence of additional identical elements in the process, method, article or apparatus comprising said element.

An embodiment of the present invention provides a rotating part of the dressing head, see Figure 1-5, Figure 1 is a schematic structural diagram of the polishing pad dressing head, the rotating part of the dressing head includes: a transmission fastener, a transmission membrane 6, and a lower gland on the inner ring 7. Universal transmission pin 8 and grinding seat 10; The transmission fastener is used to connect with the transmission shaft of the trimming head; The lower edge of the transmission film 6 is fixedly connected to the upper end surface of the grinding seat 10, the upper end surface is fixed to the transmission fastener, and a cavity is formed between the transmission film 6 and the grinding seat 10; The inner ring lower gland 7 is arranged in the cavity, and the universal transmission pin 8 is arranged between the inner ring lower gland 7 and the grinding seat 10; The bottom of the grinding seat 10 is used for installing the grinding wheel disc 11 .

It should be noted that, by setting the inner ring lower gland 7 in the cavity formed between the transmission film 6 and the grinding seat 10, and between the inner ring lower gland 7 and the grinding seat The universal transmission pin 8 is arranged between the 10, thereby forming a transmission film transmission structure, because the transmission film 6 has a deformable characteristic, when the emery wheel disc 11 arranged under the grinding seat 10 is in contact with the polishing pad 302, through the dressing The rotating part of the head exerts a certain pressure downward, and the transmission film 6 takes the universal transmission pin 8 as the adjustment fulcrum to deform as the grinding wheel disc 11 fits the polishing pad 302, thereby realizing universal adjustment, so that the grinding wheel disc 11 and the polishing pad 302 are closely attached combined, thereby ensuring the polishing effect of the rotating part of the dressing head on the polishing pad 302.

Specifically, the cavity formed between the transmission film 6 and the grinding seat 10 is a sealed cavity.

It should be noted that the cavity formed between the transmission film 6 and the grinding seat 10 is set as a sealed cavity. When the rotating parts of the dressing head are working, the machining fluid cannot enter the sealed cavity, thereby avoiding machining The crystallization of the liquid affects the universal adjustment of the transmission film 6, and also avoids the risk of the crystallization of the processing liquid falling onto the polishing pad and scratching the wafer.

Specifically, the transmission film 6 is a flexible material.

It should be noted that the flexible material may be metal, rubber, plastic, or other flexible materials. The present invention does not specifically limit the material of the transmission membrane 6 .

Specifically, the transmission membrane 6 , the lower gland 7 of the inner ring and the grinding seat 10 are coaxially arranged.

It should be noted that the transmission film 6, the inner ring lower gland 7 and the grinding seat 10 are coaxially arranged to avoid excessive vibration of the dressing head when the dressing head rotates, which is beneficial to ensure the polishing pad Polished effect.

Further, the universal transmission pin 8 is coaxially arranged with the transmission film 6 .

It should be noted that the universal transmission pin 8 and the transmission film 6 are coaxially arranged, and after applying pressure downward to the trimming head, the transmission film 6 moves along with the grinding wheel with the universal transmission pin 8 as the adjustment fulcrum. When the disk 11 fits the polishing pad 302 and is deformed, the transmission film 6 can be stressed more uniformly, avoiding the deformation of the transmission film 6 that cannot be reset due to uneven force, and prolonging the service life of the transmission film 6 .

Specifically, the matching end of the universal transmission pin 8 is a spherical structure;

The lower part of the lower gland 7 of the inner ring is provided with a matching groove for matching with the matching end of the universal transmission pin 8 , and the fixed end of the universal transmission pin 8 is fixed to the grinding seat 10 .

It should be noted that the matching end of the universal transmission pin 8 is set as a spherical structure, and the lower end surface of the inner ring lower gland 7 is provided with a matching groove for matching with the matching end of the universal transmission pin 8, After applying downward pressure to the dressing head, the transmission film 6 can be more flexible and use the universal transmission pin 8 as the adjustment fulcrum to deform as the grinding wheel disc 11 fits the polishing pad 302, thereby realizing the universal adjustment capability, so that the grinding wheel disc 11 Can be attached to the polishing pad 302 in any direction.

It should also be noted that, by opening a matching groove on the lower end surface of the inner ring lower gland 7 to cooperate with the matching end of the universal transmission pin 8, it is also possible to prevent the transmission film 6 from being connected to the universal transmission pin 8. Displacement occurs when the fulcrum is deformed as the grinding wheel disc 11 is attached to the polishing pad 302 in order to adjust.

Further, the universal transmission pin 8 and the grinding seat 10 are integrally structured.

It should be noted that the integrated structure of the universal drive pin 8 and the grinding seat 10 facilitates the installation and disassembly of the staff, and can prevent the universal drive pin 8 from being installed improperly during the installation process and affecting the polishing. Effect.

Further, the matching end of the universal transmission pin 8 is a spherical structure; The bottom of the grinding base 10 is provided with a matching groove for matching with the matching end of the universal transmission pin 8 , and the fixed end of the universal transmission pin 8 is fixed to the lower gland 7 of the inner ring.

It should be noted that the matching end of the universal drive pin 8 is set to a spherical structure, and a matching groove for matching with the matching end of the universal drive pin 8 is provided at the bottom of the grinding seat 10, which can After applying downward pressure to the dressing head, the transmission film 6 can be more flexible and use the universal transmission pin 8 as the adjustment fulcrum to deform as the grinding wheel disc 11 fits the polishing pad 302, thereby realizing the universal adjustment capability, so that the grinding wheel disc 11 can Conforms to the polishing pad 302 in any direction.

It should also be noted that, by opening a matching groove at the bottom of the grinding seat 10 to cooperate with the matching end of the universal drive pin 8, it is also possible to prevent the transmission film 6 from moving with the grinding wheel with the universal drive pin 8 as the adjustment fulcrum. Displacement occurs when the disk 11 deforms in contact with the polishing pad 302 .

Specifically, the universal transmission pin 8 and the lower gland 7 of the inner ring are integrally structured.

It should be noted that the integrated structure of the universal transmission pin 8 and the lower gland 7 of the inner ring is conducive to the convenience of installation and disassembly by the staff, and can avoid the installation failure of the universal transmission pin 8 during the installation process. In place to affect the polishing effect.

Further, the universal transmission pin 8 has a spherical structure, and the bottom of the grinding seat 10 and the lower part of the inner ring lower gland 7 are provided with matching grooves for matching with the universal transmission pin 8 .

It should be noted that the universal transmission pin 8 is arranged as a spherical structure, and a matching groove for matching with the universal transmission pin 8 is opened at the bottom of the grinding seat 10 and the lower part of the inner ring lower gland 7, After applying downward pressure to the dressing head, the transmission film 6 can be more flexible and use the universal transmission pin 8 as the adjustment fulcrum to deform as the grinding wheel disc 11 fits the polishing pad 302, thereby realizing the universal adjustment capability, so that the grinding wheel disc 11 Can be attached to the polishing pad 302 in any direction.

It should also be noted that by opening a matching groove on the bottom of the grinding seat 10 and the lower part of the inner ring lower gland 7 to cooperate with the universal transmission pin 8, it is also possible to prevent the transmission film 6 from moving in a universal direction. The transmission pin 8 is an adjustment fulcrum and displacement occurs when the grinding wheel disc 11 is attached to the polishing pad 302 and deforms.

Further, a mounting groove for fixing the universal transmission pin 8 is opened in the grinding seat 10 .

It should be noted that opening the installation groove for fixing the universal transmission pin 8 in the inner ring can prevent the displacement of the universal transmission pin 8 during use, so that the lower gland 7 of the inner ring can be connected with the grinding seat 10 It is always in the coaxial state, thereby ensuring the stable rotation of the dressing head, and ensuring the polishing effect of the dressing head on the polishing pad.

Further, the rotating part of the trimming head further includes: the outer ring lower gland 9; The outer ring lower gland 9 is arranged on the upper part of the grinding seat 10, and is fixedly connected with the upper edge of the transmission membrane 6; The transmission fastener passes through the lower gland 9 along the outer ring and is in transmission connection with the transmission membrane 6 .

It should be noted that by arranging the outer ring lower gland 9 on the top of the grinding seat 10, and fixing the outer ring lower gland 9 with the upper edge of the transmission membrane 6, the transmission membrane 6 can be more stable. Drive the grinding seat 10 to rotate, avoid the interruption of the connection between the transmission film 6 and the grinding seat 10, and effectively ensure the polishing efficiency of the polishing pad.

Specifically, the transmission fastener is the upper gland 5 of the inner ring.

It should be noted that setting the transmission fastener as the upper gland 5 of the inner ring can not only enable the transmission shaft 2 to drive the transmission membrane 6 to rotate, but also better fix the transmission shaft 2 and the transmission membrane 6, and further The transmission interruption is avoided, and the polishing efficiency of the polishing pad is effectively guaranteed.

The embodiment of the present invention also provides a polishing pad dressing head, including: a driving device 1, a transmission shaft 2, a dressing head mounting seat 3, a bearing 4 and a dressing head rotating part; The rotating parts of the trimming head include: transmission fasteners, transmission membrane 6, inner ring lower gland 7, universal transmission pin 8 and grinding seat 10; The transmission fastener is used to connect with the transmission shaft of the trimming head; The lower edge of the transmission film 6 is fixedly connected to the upper end surface of the grinding seat 10, the upper end surface is fixed to the transmission fastener, and a cavity is formed between the transmission film 6 and the grinding seat 10; The inner ring lower gland 7 is arranged in the cavity, and the universal transmission pin 8 is arranged between the inner ring lower gland 7 and the grinding seat 10; The bottom of the grinding seat 10 is used to install the grinding wheel disc 11; The driving device 1 and the bearing 4 are arranged in the trimming head mounting seat 3; The driving device 1 is connected to the transmission shaft 2, and the transmission shaft 2 passes through the bearing 4 and is in transmission connection with the transmission film 6 of the rotating part of the dressing head.

In the embodiment of the present invention, the driving device 1, the transmission shaft 2, the trimming head mounting seat 3 and the bearing 4 are arranged, and the driving device 1 and the bearing 4 are arranged in the trimming head mounting seat 3, and the driving device 1 and the The transmission shaft 2 is connected, and the transmission shaft 2 passes through the bearing 4 and is connected to the transmission film 6. The driving device 1 provides rotational power, and drives the transmission film 6 to rotate through the transmission shaft 2, and then drives the entire dressing head Rotate, and by setting the inner ring lower gland 7 in the cavity formed between the transmission film 6 and the grinding seat 10, and between the inner ring lower gland 7 and the grinding seat 10 The universal transmission pins 8 are arranged between them to form a transmission film transmission structure. Since the transmission film has a deformable characteristic, after the emery wheel disc 11 arranged under the grinding seat 10 contacts the polishing pad 302, the polishing pad dressing head A certain pressure is applied downward, and the transmission film 6 takes the universal transmission pin 8 as the adjustment fulcrum to deform as the grinding wheel disc 11 fits the polishing pad 302, thereby realizing universal adjustment, so that the grinding wheel disc 11 and the polishing pad 302 are closely attached, and then The polishing effect of the dressing head on the polishing pad 302 is guaranteed, and compared with the prior art, the universal transmission pin 8 of the present invention is in the cavity formed by the transmission film 6 and the grinding seat 10, and the machining fluid cannot enter the cavity, and then Avoid the crystallization of the processing fluid from affecting the universal adjustment of the transmission film 6, and also avoid the risk of the crystallization of the processing fluid falling onto the polishing pad and scratching the wafer.

Further, the transmission shaft 2 and the transmission fastener of the rotating part of the dressing head are integrally structured.

It should be noted that the transmission shaft 2 and the transmission fastener of the dressing head rotating part are set as an integrated structure, which can facilitate the staff to disassemble and maintain the polishing pad dressing head, and to carry out the polishing pad dressing head. When assembling, the installation steps of the staff are reduced, and the assembly efficiency of the staff is improved.

The embodiment of the present invention also provides a dresser, including: a dresser arm 202, a base 203, and a polishing pad dresser head 201; One end of the dressing arm 202 is connected to the base 203, and the other end is connected to the polishing pad dressing head; The polishing pad dressing head includes: a driving device 1, a transmission shaft 2, a dressing head mounting seat 3, a bearing 4 and a dressing head rotating part; The rotating parts of the trimming head include: transmission fasteners, transmission membrane 6, inner ring lower gland 7, universal transmission pin 8 and grinding seat 10; The transmission fastener is used to connect with the transmission shaft of the trimming head; The lower edge of the transmission film 6 is fixedly connected to the upper end surface of the grinding seat 10, the upper end surface is fixed to the transmission fastener, and a cavity is formed between the transmission film 6 and the grinding seat 10; The inner ring lower gland 7 is arranged in the cavity, and the universal transmission pin 8 is arranged between the inner ring lower gland 7 and the grinding seat 10; The bottom of the grinding seat 10 is used to install the grinding wheel disc 11; The driving device 1 and the bearing 4 are arranged in the trimming head mounting seat 3;

The driving device 1 is connected to the transmission shaft 2, and the transmission shaft 2 passes through the bearing 4 and is in transmission connection with the transmission film 6 of the rotating part of the dressing head.

In the embodiment of the present invention, the driving device 1, the transmission shaft 2, the trimming head mounting seat 3 and the bearing 4 are arranged, and the driving device 1 and the bearing 4 are arranged in the trimming head mounting seat 3, and the driving device 1 and the The transmission shaft 2 is connected, and the transmission shaft 2 passes through the bearing 4 and is connected to the transmission film 6. The driving device 1 provides rotational power, and drives the transmission film 6 to rotate through the transmission shaft 2, and then drives the entire dressing head Rotate, and by setting the inner ring lower gland 7 in the cavity formed between the transmission film 6 and the grinding seat 10, and between the inner ring lower gland 7 and the grinding seat 10 The universal transmission pins 8 are arranged between them to form a transmission film transmission structure. Since the transmission film has a deformable characteristic, after the emery wheel disc 11 arranged under the grinding seat 10 contacts the polishing pad 302, the polishing pad dressing head A certain pressure is applied downward, and the transmission film 6 takes the universal transmission pin 8 as the adjustment fulcrum to deform as the grinding wheel disc 11 fits the polishing pad 302, thereby realizing universal adjustment, so that the grinding wheel disc 11 and the polishing pad 302 are closely attached, and then The polishing effect of the dressing head on the polishing pad 302 is guaranteed, and compared with the prior art, the universal transmission pin 8 of the present invention is in the cavity formed by the transmission film 6 and the grinding seat 10, and the machining fluid cannot enter the cavity, and then Avoid the crystallization of the processing fluid from affecting the universal adjustment of the transmission film 6, and also avoid the risk of the crystallization of the processing fluid falling onto the polishing pad and scratching the wafer.

In order to facilitate the understanding of the above solution, the solution will be further introduced below with reference to FIG. 1 to FIG. 5 .

The main components of the polishing pad dressing head include: driving device 1, transmission shaft 2, dressing head mounting seat 3, bearing 4, inner ring upper gland 5, transmission film 6, inner ring lower gland 7, universal transmission pin 8, Gland 9, grinding seat 10, emery wheel disc 11 on the outer ring.

Connection and movement mode: The upper end driving device 1 is connected to the upper end of the transmission shaft 2, and the transmission shaft 2 is connected to the upper gland 5 of the bottom inner ring, wherein the driving device 1, transmission shaft 2 and bearing 4 are all installed in the dressing head mounting seat 3, and the inner ring is pressed A transmission film 6 is installed between the cover 5 and the lower gland 7 of the inner ring, and the outer edge of the transmission film 6 is connected with the upper gland 9 of the outer ring and the grinding seat 10, and the grinding seat 10 is connected with the grinding wheel disc 11; the grinding seat 10 is equipped with a ten thousand To the transmission pin 8, it fits closely with the lower gland 9 of the inner ring.

During the movement, the driving device 1 drives the transmission shaft 2, drives the upper gland 5 of the inner ring and the transmission film 6 to rotate, and connects the upper gland 9 of the outer ring, the grinding seat 10, and the grinding wheel disc 11 through the transmission film 6 to realize the driving of the grinding wheel The function of disc rotation; after the polishing pad has been used for a period of time, after the surface of the polishing pad becomes uneven, under the action of the downward pressure, the transmission film 6 can use the universal transmission pin 8 as the adjustment fulcrum to fit and polish with the grinding wheel disc 11 The pad is deformed to ensure that the grinding wheel disc 11 adheres to the polishing pad all the time.

Because the transmission film 6 is made of rubber, flexible plastic and other materials, in the actual use process, the torque can be transmitted through the transmission film 6 and the material itself can be deformed according to the needs of the grinding wheel, so as to realize its transmission and ten thousand to adjust the function;

The main components and movement mode of the trimmer: Main components of the dresser: dresser head 201, dresser arm 202, base 203, dresser 301, polishing pad 302; Movement mode: the base 203 is fixed on the polishing platform, and the dressing arm 202 applies pressure to the dressing head 201 and swings on the polishing pad 302. During the swinging process of the trimming arm 202, the dressing head 201 constantly moves according to the movement of the polishing pad 302. The shape adjustment grinding wheel disc 11 is in close contact with it.

The present invention wants to protect point: 1. A dressing head capable of driving a grinding wheel to rotate. 2. The method of using the film to drive the rotation of the grinding wheel. 3. The film material is not unique, metal, rubber, plastic with certain ductility can be used.

Advantages of the present invention compared with prior art: 1. Compared with the existing original pin and hole matching connection, a new transmission film transmission structure is adopted, the parts are connected without gaps, and the grinding wheel responds faster when it rotates. 2. The matching structure of the original pin and the hole will lead to the communication between the inside of the grinding seat and the external polishing environment, resulting in the entry of external water and polishing liquid, and the crystallization of the polishing liquid; and the structure of the transmission film can isolate the inside and outside of the grinding seat Sealed, there is no crystallization of the polishing liquid inside the grinding seat, and there is no risk of water entering the inside of the grinding seat. 3. With the rigid gap structure of the original pin and the hole, the parts will collide during the rotation. After a long time of use, particles will fall off at the collision position and fall into the external polishing environment, while the parts using the transmission film structure Tight fit, no risk of falling particles after collision with rigid structure. 4. The original pin and hole structure needs a height space for universal adjustment due to rigid parts, while the transmission membrane structure can achieve a larger universal adjustment angle at a smaller height due to its own deformable characteristics.

Each embodiment of this specification is described in a progressive manner, the same and similar parts of each embodiment can be referred to each other, and each embodiment focuses on the difference from other embodiments. In particular, for the system or the system embodiment, since it is basically similar to the method embodiment, the description is relatively simple, and for related parts, please refer to the part of the description of the method embodiment. The systems and system embodiments described above are only illustrative, and the units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is It can be located in one place, or it can be distributed over multiple network elements. Part or all of the modules can be selected according to actual needs to achieve the purpose of the solution of this embodiment. It can be understood and implemented by those skilled in the art without creative effort.

Professionals can further realize that the units and algorithm steps described in conjunction with the embodiments disclosed herein can be implemented by electronic hardware, computer software, or a combination of the two. In order to clearly illustrate the hardware and Interchangeability of software. In the above description, the components and steps of each example have been generally described according to their functions. Whether these functions are performed by hardware or software depends on the specific application and design constraints of the technical solution. Skilled artisans may use different methods to implement the described functions for each specific application, but such implementation should not be regarded as exceeding the scope of the present invention.

The above description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention. Therefore, the present invention will not be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

1: Drive device 2: drive shaft 3: Dressing head mount 4: Bearing 5: Gland on the inner ring 6: Transmission film 7: Inner ring lower gland 8:Universal transmission pin 9: Gland on the outer ring 10: Grinding seat 11: Grinding wheel disc 201: Dressing head 202: Dressing arm 203: base 301: Dresser 302: polishing pad

In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings that need to be used in the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description are only the present invention For the embodiments of the invention, those skilled in the art can also obtain other drawings according to the provided drawings without creative work. Fig. 1 is a schematic structural view of a polishing pad dressing head provided by an embodiment of the present invention; Fig. 2 is a schematic structural view of a trimmer provided by an embodiment of the present invention; Fig. 3 is a working schematic diagram of the trimmer provided by the embodiment of the present invention; Fig. 4 is the front view of the transmission membrane provided by the embodiment of the present invention; Fig. 5 is a side view of the transmission membrane provided by the embodiment of the present invention.

1: Drive device

2: drive shaft

3: Dressing head mount

4: Bearing

5: Gland on the inner ring

6: Transmission film

7: Inner ring lower gland

8:Universal transmission pin

9: Gland on the outer ring

10: Grinding seat

11: Grinding wheel disc

Claims (15)

A rotating part of a dressing head, comprising: a transmission fastener, a transmission film (6), an inner ring lower gland (7), a universal transmission pin (8) and a grinding seat (10); the transmission fastener is used for dressing The transmission shaft of the head is connected; the lower edge of the transmission film (6) is fixedly connected with the upper end surface of the grinding seat (10), the upper end surface is fixed with the transmission fastener, and the transmission film (6) is connected with the A cavity is formed between the grinding seats (10); the inner ring lower gland (7) is arranged in the cavity, and the universal transmission pin (8) is arranged in the inner ring lower gland (7) Between the grinding seat (10), wherein the universal transmission pin (8) and the transmission film (6) are coaxially arranged in a direction perpendicular to the bottom surface of the grinding seat (10); The lower part of the grinding seat (10) is used for installing the grinding wheel disc (11). The rotating part of the dressing head according to claim 1, wherein the cavity formed between the transmission film (6) and the grinding seat (10) is a sealed cavity. The rotating component of the dressing head according to claim 1, wherein the transmission film (6) is made of a flexible material. The rotating part of the dressing head according to claim 1, wherein the transmission film (6), the inner ring lower gland (7) and the grinding seat (10) are coaxially arranged. The rotating part of the dressing head as described in claim 1, wherein the matching end of the universal drive pin (8) is a spherical structure; The lower part of the inner ring lower gland (7) is provided with a matching groove for matching with the matching end of the universal transmission pin (8), and the fixed end of the universal transmission pin (8) is fixed to the grinding seat (10). The rotating part of the dressing head according to claim 5, wherein the universal transmission pin (8) and the grinding seat (10) are integrally structured. The rotating part of the dressing head according to claim 1, wherein the matching end of the universal transmission pin (8) is a spherical structure; The matching groove of the matching end fits, and the fixed end of the universal transmission pin (8) is fixed to the lower gland (7) of the inner ring. The rotating part of the dressing head according to claim 7, wherein the universal transmission pin (8) and the inner ring lower gland (7) are integrally structured. The rotating part of the dressing head according to claim 1, wherein the universal transmission pin (8) is a spherical structure, and the bottom of the grinding seat (10) and the lower part of the inner ring lower gland (7) are provided with A fitting groove for fitting the universal transmission pin (8). The rotating part of the dressing head according to claim 1, wherein an installation groove for installing the universal transmission pin (8) is opened in the grinding seat (10). The rotating part of the dressing head as described in claim 1, further comprising: the outer ring lower gland (9); the outer ring lower gland (9) is arranged on the upper part of the grinding seat (10), and the transmission film The upper edge of (6) is fixedly connected; the transmission fastener passes through the lower gland (9) along the outer ring and is in transmission connection with the transmission film (6). The rotating part of the dressing head according to claim 1, wherein the transmission fastener is an upper gland (5) on the inner ring. A polishing pad dressing head, comprising: a driving device (1), a transmission shaft (2), a dressing head mounting seat (3), a bearing (4) and a dressing head rotating part according to any one of claim 1 to claim 12 The driving device (1) and the bearing (4) are arranged in the trimming head mounting seat (3); the driving device (1) is connected with the transmission shaft (2), and the transmission shaft ( 2) passing through the bearing (4) and drivingly connected with the transmission film (6) of the rotating part of the dressing head. The polishing pad conditioning head as claimed in claim 13, wherein the transmission shaft (2) is integrally structured with the transmission fastener of the rotating part of the conditioning head. A trimmer, comprising: a trimming arm (202), a base (203) and a polishing pad trimming head (201) as described in any one of claim 13 to claim 14; one end of the trimming arm (202) is connected to The base (203) is connected, and the other end is connected with the polishing pad conditioning head.

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