CN113183031A - Dressing head rotating part, polishing pad dressing head and dresser - Google Patents
Dressing head rotating part, polishing pad dressing head and dresser Download PDFInfo
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- CN113183031A CN113183031A CN202110551351.1A CN202110551351A CN113183031A CN 113183031 A CN113183031 A CN 113183031A CN 202110551351 A CN202110551351 A CN 202110551351A CN 113183031 A CN113183031 A CN 113183031A
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- universal
- polishing pad
- grinding seat
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- 238000005498 polishing Methods 0.000 title claims abstract description 95
- 230000005540 biological transmission Effects 0.000 claims abstract description 209
- 210000004907 gland Anatomy 0.000 claims abstract description 64
- 238000009966 trimming Methods 0.000 claims description 62
- 230000003750 conditioning effect Effects 0.000 claims description 14
- 239000012528 membrane Substances 0.000 claims description 13
- 238000003825 pressing Methods 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 9
- 230000013011 mating Effects 0.000 claims description 6
- 238000010276 construction Methods 0.000 claims 3
- 230000000694 effects Effects 0.000 abstract description 9
- 229910001651 emery Inorganic materials 0.000 abstract 3
- 238000010030 laminating Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 description 16
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- 230000002035 prolonged effect Effects 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 1
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- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
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- 238000011900 installation process Methods 0.000 description 1
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/12—Dressing tools; Holders therefor
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Spinning Or Twisting Of Yarns (AREA)
- Details Of Garments (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Abstract
The invention discloses a dressing head rotating component, a polishing pad dressing head and a dresser. Set up in the cavity that forms between transmission film and grinding seat gland under the inner circle to set up universal drive pin under the inner circle between gland and the grinding seat, thereby constitute transmission film transmission structure, because the transmission film has deformable characteristic, after setting up the emery wheel dish under the grinding seat and polishing pad contact, through applying certain pressure downwards to finishing head rotary part, the transmission film uses universal drive pin to deform along with emery wheel dish laminating polishing pad as the regulation fulcrum, thereby realize universal regulation, make emery wheel dish and polishing pad closely laminate, and then guaranteed the polishing effect of finishing head to the polishing pad.
Description
Technical Field
The invention relates to the field of semiconductor integrated circuit chip manufacturing, in particular to a trimming head rotating component, a polishing pad trimming head and a trimmer.
Background
In a Chemical Mechanical Polishing (CMP) apparatus, a wafer is polished on a rough polishing pad surface, and as the polishing time is prolonged, the polishing pad surface is ground flat and loses the polishing effect, a dresser with a diamond grinding wheel disc is required to dress the polishing pad surface, so that the polishing pad surface is rough and has friction force, and the polishing pad continues to have the polishing function.
In order to solve the problems, most of the trimming heads of the existing trimmers adopt rigid pin hole matching structures to drive the grinding wheel disc to rotate so as to ensure that the grinding wheel disc and the polishing pad are completely and tightly attached at any time.
However, in the existing trimmer with the pin hole matching structure, because a gap exists between a pin and a hole part, certain hysteresis exists in the transmission process; the interior of the trimming head is required to have a regulating space due to universal regulation, and the interior and the exterior of the trimming head are communicated without sealing, so that processing liquid can enter the interior of the trimming head in a working project, the processing liquid is easy to crystallize in the interior of the trimming head, finally, the universal moving space in the trimming head is reduced, and the processing liquid has the risk of falling to a polishing pad to scratch a wafer after being crystallized; and because the parts of the rigid pin and hole structures are in line contact in the transmission process, the long-term impact of the contact surfaces of the parts can cause damage after long-term use, the falling metal particles can enter the polishing pad, and the short circuit of the circuits on the surface of the wafer can be caused in certain processes, so that the wafer scrapping loss is caused.
Disclosure of Invention
In view of this, embodiments of the present invention provide a dressing head rotating component, a polishing pad dressing head and a dresser, so as to solve the problems of the existing dresser with a pin hole matching structure.
In order to achieve the above purpose, the embodiments of the present invention provide the following technical solutions:
the present invention discloses in a first aspect a dressing head rotating member comprising: the grinding machine comprises a transmission fastener, a transmission film, an inner ring lower gland, a universal transmission pin and a grinding seat;
the transmission fastener is used for being connected with a transmission shaft of the trimming head;
the lower edge of the transmission film is fixedly connected with the upper end face of the grinding seat, the upper end face of the transmission film is fixed with the transmission fastening piece, and a cavity is formed between the transmission film and the grinding seat;
the inner ring lower pressing cover is arranged in the cavity, and the universal transmission pin is arranged between the inner ring lower pressing cover and the grinding seat;
and the lower part of the grinding seat is used for installing a grinding wheel disc.
Preferably, a cavity formed between the transmission film and the grinding seat is a sealed cavity.
Preferably, the transmission membrane is a flexible material.
Preferably, the transmission film, the inner ring lower gland and the grinding seat are coaxially arranged.
Preferably, the universal drive pin and the drive membrane are arranged coaxially.
Preferably, the mating end of the universal driving pin is a spherical structure;
the lower part of the inner ring lower gland is provided with a matching groove matched with the matching end of the universal transmission pin, and the fixed end of the universal transmission pin is fixed on the grinding seat.
Preferably, the universal driving pin and the grinding seat are of an integrated structure.
Preferably, the mating end of the universal driving pin is a spherical structure;
the bottom of the grinding seat is provided with a matching groove matched with the matching end of the universal transmission pin, and the fixed end of the universal transmission pin is fixed on the inner ring lower gland.
Preferably, the universal driving pin and the inner ring lower gland are of an integrated structure.
Preferably, an installation groove for installing the universal transmission pin is formed in the grinding seat.
Preferably, the method further comprises the following steps: an outer ring lower gland bush;
the outer ring lower gland is arranged at the upper part of the grinding seat and is fixedly connected with the upper edge of the transmission film;
the transmission fastener penetrates through the outer ring lower gland and is in transmission connection with the transmission film.
Preferably, the transmission fastener is an inner ring upper gland.
In a second aspect of the present invention, there is disclosed a polishing pad dressing head comprising: a drive device, a transmission shaft, a dressing head mounting seat, a bearing and a dressing head rotating part disclosed in the first aspect of the invention;
the driving device and the bearing are arranged in the trimming head mounting seat;
the driving device is connected with the transmission shaft, and the transmission shaft penetrates through the bearing and is in transmission connection with a transmission film of the trimming head rotating part.
Preferably, the transmission shaft and the transmission fastener of the trimming head rotating part are of an integrated structure.
A third aspect of the present invention discloses a finisher, including: a conditioning arm, a base, and the polishing pad conditioning head disclosed in the second aspect of the invention.
One end of the trimming arm is connected with the base, and the other end of the trimming arm is connected with the polishing pad trimming head.
According to the trimming head rotating component, the polishing pad trimming head and the trimmer, the inner ring lower pressing cover is arranged in the cavity formed between the transmission film and the grinding seat, and the universal transmission pin is arranged between the inner ring lower pressing cover and the grinding seat, so that a transmission film transmission structure is formed.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.
FIG. 1 is a schematic diagram of a polishing pad conditioning head according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a trimmer according to an embodiment of the present invention;
fig. 3 is a schematic diagram of a finisher according to an embodiment of the present invention;
FIG. 4 is a front view of a transmission membrane provided by an embodiment of the present invention;
FIG. 5 is a side view of a drive membrane provided by an embodiment of the present invention.
The grinding machine comprises a trimming head 201, a driving device 1, a transmission shaft 2, a trimming head mounting seat 3, a bearing 4, an inner ring upper gland 5, a transmission film 6, an inner ring lower gland 7, a universal transmission pin 8, an outer ring upper gland 9, a grinding seat 10 and a grinding wheel disc 11; a conditioning arm 202, a base 203, a dresser 301, and a polishing pad 302.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In this application, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
An embodiment of the present invention provides a dressing head rotating component, referring to fig. 1 to 5, where fig. 1 is a schematic structural diagram of a polishing pad dressing head, and the dressing head rotating component includes: the grinding machine comprises a transmission fastener, a transmission film 6, an inner ring lower gland 7, a universal transmission pin 8 and a grinding seat 10;
the transmission fastener is used for being connected with a transmission shaft of the trimming head;
the lower edge of the transmission film 6 is fixedly connected with the upper end face of the grinding seat 10, the upper end face of the transmission film is fixed with the transmission fastening piece, and a cavity is formed between the transmission film 6 and the grinding seat 10;
the inner ring lower gland 7 is arranged in the cavity, and the universal transmission pin 8 is arranged between the inner ring lower gland 7 and the grinding seat 10;
the lower part of the grinding seat 10 is used for installing a grinding wheel disk 11.
It should be noted that, by arranging the inner ring lower gland 7 in the cavity formed between the transmission film 6 and the grinding seat 10, and arranging the universal transmission pin 8 between the inner ring lower gland 7 and the grinding seat 10, a transmission film transmission structure is formed, because the transmission film 6 has a deformable characteristic, after the grinding wheel disc 11 arranged below the grinding seat 10 contacts with the polishing pad 302, by applying a certain pressure downwards to the finishing head rotating part, the transmission film 6 deforms along with the grinding wheel disc 11 attaching to the polishing pad 302 by using the universal transmission pin 8 as an adjusting fulcrum, thereby realizing universal adjustment, enabling the grinding wheel disc 11 and the polishing pad 302 to be closely attached, and further ensuring the polishing effect of the finishing head rotating part on the polishing pad 302.
Specifically, the cavity formed between the transmission film 6 and the grinding seat 10 is a sealed cavity. It should be noted that the cavity formed between the transmission film 6 and the grinding seat 10 is set as a sealed cavity, and when the trimming head rotating component works, the processing liquid cannot enter the sealed cavity, so that the influence of the crystallization of the processing liquid on the universal adjustment of the transmission film 6 is avoided, and the risk that the crystallization of the processing liquid drops to the polishing pad to scratch the wafer is also avoided.
Specifically, the transmission film 6 is made of a flexible material.
The flexible material may be metal, rubber, plastic, or other flexible materials, and the material of the transmission film 6 is not particularly limited in this application.
Specifically, the transmission film 6, the inner ring lower gland 7 and the grinding seat 10 are coaxially arranged.
It should be noted that the transmission film 6, the inner ring lower gland 7 and the grinding seat 10 are coaxially arranged, so that when the dressing head rotates, the dressing head is prevented from generating excessive vibration, and the polishing effect of the polishing pad is ensured.
Further, the universal driving pin 8 and the driving film 6 are coaxially arranged.
It should be noted that the universal driving pin 8 and the driving film 6 are coaxially arranged, so that after the pressure is applied to the trimming head downwards, when the driving film 6 deforms along with the grinding wheel disc 11 attached to the polishing pad 302 by taking the universal driving pin 8 as an adjusting fulcrum, the driving film 6 can be stressed more uniformly, the phenomenon that the driving film 6 cannot reset due to nonuniform stress is avoided, and the service life of the driving film 6 is further prolonged.
Specifically, the mating end of the universal driving pin 8 is a spherical structure;
the lower portion of the inner ring lower pressing cover 7 is provided with a matching groove matched with the matching end of the universal transmission pin 8, and the fixed end of the universal transmission pin 8 is fixed on the grinding seat 10.
It should be noted that the matching end of the universal driving pin 8 is set to be a spherical structure, and the lower end surface of the inner ring lower gland 7 is provided with a matching groove matched with the matching end of the universal driving pin 8, so that after the trimming head is pressed downwards, the driving film 6 can be deformed along with the grinding wheel disc 11 attached to the polishing pad 302 more flexibly by using the universal driving pin 8 as an adjusting fulcrum, and further universal adjusting capability is realized, so that the grinding wheel disc 11 can be attached to the polishing pad 302 in any direction.
It should be further noted that, by forming a matching groove matching with the matching end of the universal transmission pin 8 on the lower end surface of the inner ring lower gland 7, the transmission membrane 6 can be prevented from being displaced when the transmission membrane 6 deforms along with the attachment of the grinding wheel disc 11 to the polishing pad 302 by using the universal transmission pin 8 as an adjusting fulcrum.
Further, the universal driving pin 8 and the grinding seat 10 are of an integrated structure.
It should be noted that, the universal driving pin 8 and the grinding seat 10 are of an integral structure, which is beneficial for the worker to assemble and disassemble conveniently, and can prevent the polishing effect from being affected by the improper installation of the universal driving pin 8 in the installation process.
Further, the mating end of the universal driving pin 8 is a spherical structure;
the bottom of the grinding seat 10 is provided with a matching groove matched with the matching end of the universal transmission pin 8, and the fixed end of the universal transmission pin 8 is fixed on the inner ring lower gland 7.
It should be noted that the matching end of the universal driving pin 8 is set to be a spherical structure, and the bottom of the grinding seat 10 is provided with a matching groove matched with the matching end of the universal driving pin 8, so that after the trimming head is pressed downwards, the driving film 6 can be deformed along with the grinding wheel disc 11 attached to the polishing pad 302 more flexibly by using the universal driving pin 8 as an adjusting fulcrum, and further universal adjusting capability is realized, so that the grinding wheel disc 11 can be attached to the polishing pad 302 in any direction.
It should be noted that, by forming a matching groove at the bottom of the grinding seat 10 to match with the matching end of the universal driving pin 8, the transmission film 6 can be prevented from being displaced when the universal driving pin 8 is used as an adjusting fulcrum and the grinding wheel disc 11 is attached to the polishing pad 302.
Specifically, the universal driving pin 8 and the inner ring lower gland 7 are of an integrated structure.
It should be noted that the universal driving pin 8 and the inner ring lower gland 7 are of an integrated structure, so that the universal driving pin and the inner ring lower gland are convenient for workers to mount and dismount, and the polishing effect is prevented from being influenced due to the fact that the universal driving pin 8 is not mounted in place in the mounting process.
Further, universal drive round pin 8 is spherical structure, grind seat 10 bottom and gland 7 lower part under the inner circle all seted up with universal drive round pin 8 complex cooperation groove.
It should be noted that the universal driving pin 8 is set to be a spherical structure, and the bottom of the grinding seat 10 and the lower portion of the inner ring lower gland 7 are both provided with matching grooves matched with the universal driving pin 8, so that after the finishing head is pressed downwards, the driving film 6 can be deformed along with the grinding wheel disc 11 attached to the polishing pad 302 more flexibly by using the universal driving pin 8 as an adjusting fulcrum, and further universal adjusting capability is realized, so that the grinding wheel disc 11 can be attached to the polishing pad 302 in any direction.
It should be further noted that matching grooves matched with the universal driving pin 8 are formed in the bottom of the grinding seat 10 and the lower portion of the inner ring lower gland 7, so that the transmission membrane 6 can be prevented from being displaced when the universal driving pin 8 is used as an adjusting fulcrum and the grinding wheel 11 is attached to the polishing pad 302 to deform.
Further, a mounting groove for fixing the universal transmission pin 8 is formed in the grinding seat 10.
It should be noted that, the mounting groove for fixing the universal transmission pin 8 is formed in the inner ring, so that the universal transmission pin 8 can be prevented from being displaced in the using process, the inner ring lower pressing cover 7 and the grinding seat 10 can be always in the coaxial state, the stable rotation of the trimming head is further ensured, and the polishing effect of the trimming head on the polishing pad is ensured.
Further, the trimming head rotating part further includes: an outer ring lower gland 9;
the outer ring lower gland 9 is arranged at the upper part of the grinding seat 10 and is fixedly connected with the upper edge of the transmission film 6;
the transmission fastener penetrates through the outer ring lower gland 9 to be in transmission connection with the transmission film 6.
It should be noted that, by arranging the outer ring lower gland 9 on the upper portion of the grinding seat 10 and fixedly connecting the outer ring lower gland 9 with the upper edge of the transmission film 6, the transmission film 6 can more stably drive the grinding seat 10 to rotate, thereby avoiding the interruption of the connection between the transmission film 6 and the grinding seat 10 and effectively ensuring the polishing efficiency of the polishing pad.
Specifically, the transmission fastener is an inner ring upper gland 5.
It should be noted that, the transmission fastener is set as the inner ring upper gland 5, so that the transmission shaft 2 can drive the transmission film 6 to rotate, the transmission shaft 2 and the transmission film 6 can be better fixedly connected, transmission interruption is avoided, and the polishing efficiency of the polishing pad is effectively ensured.
An embodiment of the present invention further provides a polishing pad dressing head, including: the device comprises a driving device 1, a transmission shaft 2, a trimming head mounting seat 3, a bearing 4 and a trimming head rotating part;
the dressing head rotating member includes: the grinding machine comprises a transmission fastener, a transmission film 6, an inner ring lower gland 7, a universal transmission pin 8 and a grinding seat 10;
the transmission fastener is used for being connected with a transmission shaft of the trimming head;
the lower edge of the transmission film 6 is fixedly connected with the upper end face of the grinding seat 10, the upper end face of the transmission film is fixed with the transmission fastening piece, and a cavity is formed between the transmission film 6 and the grinding seat 10;
the inner ring lower gland 7 is arranged in the cavity, and the universal transmission pin 8 is arranged between the inner ring lower gland 7 and the grinding seat 10;
the lower part of the grinding seat 10 is used for installing a grinding wheel disk 11;
the driving device 1 and the bearing 4 are arranged in the trimming head mounting seat 3;
the driving device 1 is connected with the transmission shaft 2, and the transmission shaft 2 penetrates through the bearing 4 to be in transmission connection with a transmission film 6 of the trimming head rotating component.
In the embodiment of the application, the driving device 1, the transmission shaft 2, the trimming head mounting seat 3 and the bearing 4 are arranged, the driving device 1 and the bearing 4 are arranged in the trimming head mounting seat 3, the driving device 1 is connected with the transmission shaft 2, the transmission shaft 2 penetrates through the bearing 4 to be in transmission connection with the transmission film 6, the driving device 1 provides rotation power, the transmission film 6 is driven to rotate through the transmission shaft 2, the whole trimming head is driven to rotate, the inner ring lower pressing cover 7 is arranged in a cavity formed between the transmission film 6 and the grinding seat 10, the universal transmission pin 8 is arranged between the inner ring lower pressing cover 7 and the grinding seat 10, so that the transmission film transmission structure is formed, and as the transmission film has the deformable characteristic, after the grinding wheel 11 arranged below the grinding seat 10 is contacted with the polishing pad 302, according to the polishing pad trimming head, a certain pressure is downwards applied to the polishing pad trimming head, the transmission film 6 deforms along with the fact that the grinding wheel disc 11 is attached to the polishing pad 302 by taking the universal transmission pin 8 as an adjusting fulcrum, so that universal adjustment is achieved, the grinding wheel disc 11 is tightly attached to the polishing pad 302, the polishing effect of the trimming head on the polishing pad 302 is guaranteed, compared with the prior art, the universal transmission pin 8 is located in a cavity formed by the transmission film 6 and the grinding seat 10, machining liquid cannot enter the cavity, further the phenomenon that crystallization of the machining liquid affects universal adjustment of the transmission film 6 is avoided, and the risk that the crystallization of the machining liquid drops to the polishing pad wafer to scratch is avoided.
Further, the transmission shaft 2 and the transmission fastener of the trimming head rotating part are of an integrated structure.
It should be noted that, will the transmission shaft 2 with the transmission fastener of trimming head rotary part sets up to integral type structure, can make things convenient for the staff to dismantle the maintenance to polishing pad trimming head, and when assembling polishing pad trimming head, reduces staff's installation step, has improved staff's assembly efficiency.
An embodiment of the present invention further provides a finisher, including: a conditioning arm 202, a base 203, and a polishing pad conditioning head 201;
one end of the dressing arm 202 is connected with the base 203, and the other end is connected with the polishing pad dressing head;
the polishing pad conditioning head comprising: the device comprises a driving device 1, a transmission shaft 2, a trimming head mounting seat 3, a bearing 4 and a trimming head rotating part;
the dressing head rotating member includes: the grinding machine comprises a transmission fastener, a transmission film 6, an inner ring lower gland 7, a universal transmission pin 8 and a grinding seat 10;
the transmission fastener is used for being connected with a transmission shaft of the trimming head;
the lower edge of the transmission film 6 is fixedly connected with the upper end face of the grinding seat 10, the upper end face of the transmission film is fixed with the transmission fastening piece, and a cavity is formed between the transmission film 6 and the grinding seat 10;
the inner ring lower gland 7 is arranged in the cavity, and the universal transmission pin 8 is arranged between the inner ring lower gland 7 and the grinding seat 10;
the lower part of the grinding seat 10 is used for installing a grinding wheel disk 11;
the driving device 1 and the bearing 4 are arranged in the trimming head mounting seat 3;
the driving device 1 is connected with the transmission shaft 2, and the transmission shaft 2 penetrates through the bearing 4 to be in transmission connection with a transmission film 6 of the trimming head rotating component.
In the embodiment of the application, the driving device 1, the transmission shaft 2, the trimming head mounting seat 3 and the bearing 4 are arranged, the driving device 1 and the bearing 4 are arranged in the trimming head mounting seat 3, the driving device 1 is connected with the transmission shaft 2, the transmission shaft 2 penetrates through the bearing 4 to be in transmission connection with the transmission film 6, the driving device 1 provides rotation power, the transmission film 6 is driven to rotate through the transmission shaft 2, the whole trimming head is driven to rotate, the inner ring lower pressing cover 7 is arranged in a cavity formed between the transmission film 6 and the grinding seat 10, the universal transmission pin 8 is arranged between the inner ring lower pressing cover 7 and the grinding seat 10, so that the transmission film transmission structure is formed, and as the transmission film has the deformable characteristic, after the grinding wheel 11 arranged below the grinding seat 10 is contacted with the polishing pad 302, according to the polishing pad trimming head, a certain pressure is downwards applied to the polishing pad trimming head, the transmission film 6 deforms along with the fact that the grinding wheel disc 11 is attached to the polishing pad 302 by taking the universal transmission pin 8 as an adjusting fulcrum, so that universal adjustment is achieved, the grinding wheel disc 11 is tightly attached to the polishing pad 302, the polishing effect of the trimming head on the polishing pad 302 is guaranteed, compared with the prior art, the universal transmission pin 8 is located in a cavity formed by the transmission film 6 and the grinding seat 10, machining liquid cannot enter the cavity, further the phenomenon that crystallization of the machining liquid affects universal adjustment of the transmission film 6 is avoided, and the risk that the crystallization of the machining liquid drops to the polishing pad wafer to scratch is avoided.
To facilitate understanding of the above solution, the solution is further described below with reference to fig. 1 to 5.
The polishing pad dressing head comprises the following main parts: the grinding machine comprises a driving device 1, a transmission shaft 2, a trimming head mounting seat 3, a bearing 4, an inner ring upper gland 5, a transmission film 6, an inner ring lower gland 7, a universal transmission pin 8, an outer ring upper gland 9, a grinding seat 10 and a grinding wheel disc 11.
Connection and movement mode:
the upper end driving device 1 is connected with the upper end of a transmission shaft 2, the transmission shaft 2 is connected with an upper inner ring gland 5 at the bottom, the driving device 1, the transmission shaft 2 and a bearing 4 are all arranged in a trimming head mounting seat 3, a transmission film 6 is arranged between the upper inner ring gland 5 and a lower inner ring gland 7, the outer edge of the transmission film 6 is connected with an upper outer ring gland 9 and a grinding seat 10, and the grinding seat 10 is connected with a grinding wheel disc 11; the grinding seat 10 is provided with a universal driving pin 8 which is tightly attached to the inner ring lower gland 9.
In the motion process, the driving device 1 drives the transmission shaft 2 to drive the inner ring upper gland 5 and the transmission film 6 to rotate, and the transmission film 6 is connected with the outer ring upper gland 9, the grinding seat 10 and the grinding wheel disc 11 to realize the function of driving the grinding wheel disc to rotate; after the polishing pad is used for a period of time, the surface of the polishing pad becomes uneven, and under the action of the lower pressure, the transmission film 6 can deform along with the attachment of the grinding wheel disc 11 to the polishing pad by taking the universal transmission pin 8 as an adjusting fulcrum, so that the grinding wheel disc 11 is ensured to be attached to the polishing pad all the time.
Because the transmission film 6 is made of rubber, flexible plastic and other materials, in the actual use process, the transmission film 6 can transmit torque and the materials can deform along with the requirements of the grinding wheel disk, so that the functions of transmission and universal adjustment are realized;
main components and movement modes of the dresser:
main parts of the trimmer: a dressing head 201, a dressing arm 202, a base 203, a dresser 301, a polishing pad 302;
the motion mode is as follows: the base 203 is fixed on the polishing platform, and the dressing arm 202 applies a downward pressure to the dressing head 201 and the polishing pad 302 swings, so that the dressing head 201 continuously adjusts the grinding wheel disc 11 to be tightly attached to the polishing pad 302 according to the shape of the polishing pad 302 during the swinging of the dressing arm 202.
The invention aims to protect the points:
1. a trimming head capable of driving a grinding wheel disk to rotate.
2. A method for driving a grinding wheel disc to rotate by using a film.
3. The film material is not exclusive, and metal, rubber and plastic with certain ductility can be used.
Compared with the prior art, the invention has the advantages that:
1. compared with the existing original pin and hole matched connection, the novel transmission film transmission structure is adopted, the connection of parts is gapless, and the grinding wheel disc can respond faster when rotating.
2. The structure of the original pin and the hole which are matched can lead the inside of the grinding seat to be communicated with the external polishing environment, lead external water and polishing solution to enter and lead the polishing solution to crystallize; and the structure that uses the transmission film can make the isolated sealing of the inside and outside of grinding seat, does not have the polishing solution at the inside crystallization of grinding seat, also does not have the inside risk of water entering grinding seat.
3. The rigidity clearance structure in former round pin, hole can bump at the rotation in-process part, and after long-time the use, the collision position has the granule to drop to in the outside polished environment, and closely cooperate between the part of using the transmission membrane structure, the risk that the granule dropped after the no rigid structure bumps.
4. The original pin and hole structure needs height space for universal adjustment due to rigid parts, and the transmission membrane structure can realize larger universal adjustment angle at smaller height due to the deformable characteristic of the transmission membrane structure.
The embodiments in the present specification are described in a progressive manner, and the same and similar parts among the embodiments are referred to each other, and each embodiment focuses on the differences from the other embodiments. In particular, the system or system embodiments are substantially similar to the method embodiments and therefore are described in a relatively simple manner, and reference may be made to some of the descriptions of the method embodiments for related points. The above-described system and system embodiments are only illustrative, wherein the units described as separate parts may or may not be physically separate, and the parts displayed as units may or may not be physical units, may be located in one place, or may be distributed on a plurality of network units. Some or all of the modules may be selected according to actual needs to achieve the purpose of the solution of the present embodiment. One of ordinary skill in the art can understand and implement it without inventive effort.
Those of skill would further appreciate that the various illustrative elements and algorithm steps described in connection with the embodiments disclosed herein may be implemented as electronic hardware, computer software, or combinations of both, and that the various illustrative components and steps have been described above generally in terms of their functionality in order to clearly illustrate this interchangeability of hardware and software. Whether such functionality is implemented as hardware or software depends upon the particular application and design constraints imposed on the implementation. Skilled artisans may implement the described functionality in varying ways for each particular application, but such implementation decisions should not be interpreted as causing a departure from the scope of the present invention.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (16)
1. A trimmer head rotating member, comprising: the grinding machine comprises a transmission fastener, a transmission film (6), an inner ring lower gland (7), a universal transmission pin (8) and a grinding seat (10);
the transmission fastener is used for being connected with a transmission shaft of the trimming head;
the lower edge of the transmission film (6) is fixedly connected with the upper end face of the grinding seat (10), the upper end face of the transmission film is fixed with the transmission fastening piece, and a cavity is formed between the transmission film (6) and the grinding seat (10);
the inner ring lower gland (7) is arranged in the cavity, and the universal transmission pin (8) is arranged between the inner ring lower gland (7) and the grinding seat (10);
the lower part of the grinding seat (10) is used for installing a grinding wheel disc (11).
2. A finishing head rotating member according to claim 1, characterized in that the cavity formed between the transmission membrane (6) and the grinding seat (10) is a sealed cavity.
3. Finishing head rotating member according to claim 1, characterized in that the transmission membrane (6) is a flexible material.
4. The trimming head rotating member according to claim 1, wherein the transmission membrane (6), the inner ring lower gland (7) and the grinding seat (10) are arranged coaxially.
5. The trimming head rotating member according to claim 1, wherein the universal drive pin (8) is arranged coaxially with the drive diaphragm (6).
6. Finishing head rotating part according to claim 1, characterized in that the mating end of the cardan drive pin (8) is of spherical structure;
the lower portion of the inner ring lower pressing cover (7) is provided with a matching groove matched with the matching end of the universal transmission pin (8), and the fixed end of the universal transmission pin (8) is fixed on the grinding seat (10).
7. Finishing head rotating part according to claim 6, characterized in that the cardan drive pin (8) is of one-piece construction with the grinding seat (10).
8. Finishing head rotating part according to claim 1, characterized in that the mating end of the cardan drive pin (8) is of spherical structure; grind seat (10) bottom seted up with universal drive round pin (8) cooperation groove of cooperation end cooperation, the stiff end of universal drive round pin (8) is fixed in gland (7) under the inner circle.
9. Finishing head rotating part according to claim 8, characterized in that the cardan drive pin (8) is of one-piece construction with the inner ring lower gland (7).
10. The trimming head rotating component according to claim 1, wherein the universal driving pin (8) is a spherical structure, and the bottom of the grinding seat (10) and the lower part of the inner ring lower gland (7) are provided with matching grooves matched with the universal driving pin (8).
11. Finishing head rotating part according to claim 1, characterized in that the grinding seat (10) has a mounting groove in it for mounting the cardan pin (8).
12. The trimmer head rotating member of claim 1, further comprising: an outer ring lower gland (9);
the outer ring lower gland (9) is arranged at the upper part of the grinding seat (10) and is fixedly connected with the upper edge of the transmission film (6);
the transmission fastener penetrates through the outer ring lower gland (9) and is in transmission connection with the transmission film (6).
13. The trimmer head rotating member according to claim 1, wherein the drive fastener is an inner race upper gland (5).
14. A polishing pad conditioning head, comprising: -a drive means (1), a drive shaft (2), a finishing head mount (3), a bearing (4) and a finishing head rotating part according to any of claims 1 to 13;
the driving device (1) and the bearing (4) are arranged in the trimming head mounting seat (3);
the driving device (1) is connected with the transmission shaft (2), and the transmission shaft (2) penetrates through the bearing (4) to be in transmission connection with a transmission film (6) of the trimming head rotating component.
15. The polishing pad conditioning head of claim 14 wherein the drive shaft (2) is of unitary construction with the drive fastener of the conditioning head rotating member.
16. A conditioner, comprising: a conditioning arm (202), a base (203), and the polishing pad conditioning head (201) of any one of claims 14 to 15;
the conditioning arm (202) is connected to the base (203) at one end and to the polishing pad conditioning head at the other end.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110551351.1A CN113183031A (en) | 2021-05-20 | 2021-05-20 | Dressing head rotating part, polishing pad dressing head and dresser |
| TW110133469A TWI801997B (en) | 2021-05-20 | 2021-09-08 | A pad conditioner ,conditioner head and a spinning part therein |
| PCT/CN2021/118648 WO2022241982A1 (en) | 2021-05-20 | 2021-10-20 | Trimming head rotating component, polishing pad trimming head, and trimmer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110551351.1A CN113183031A (en) | 2021-05-20 | 2021-05-20 | Dressing head rotating part, polishing pad dressing head and dresser |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113183031A true CN113183031A (en) | 2021-07-30 |
Family
ID=76982752
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110551351.1A Pending CN113183031A (en) | 2021-05-20 | 2021-05-20 | Dressing head rotating part, polishing pad dressing head and dresser |
Country Status (3)
| Country | Link |
|---|---|
| CN (1) | CN113183031A (en) |
| TW (1) | TWI801997B (en) |
| WO (1) | WO2022241982A1 (en) |
Cited By (2)
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| CN114454095A (en) * | 2022-01-18 | 2022-05-10 | 北京烁科精微电子装备有限公司 | Dressing device for polishing pad |
| WO2022241982A1 (en) * | 2021-05-20 | 2022-11-24 | 杭州众硅电子科技有限公司 | Trimming head rotating component, polishing pad trimming head, and trimmer |
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Also Published As
| Publication number | Publication date |
|---|---|
| TWI801997B (en) | 2023-05-11 |
| WO2022241982A1 (en) | 2022-11-24 |
| TW202245987A (en) | 2022-12-01 |
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Application publication date: 20210730 |