TWI800415B - 感測層及包含其之半導體結構 - Google Patents

感測層及包含其之半導體結構 Download PDF

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Publication number
TWI800415B
TWI800415B TW111123554A TW111123554A TWI800415B TW I800415 B TWI800415 B TW I800415B TW 111123554 A TW111123554 A TW 111123554A TW 111123554 A TW111123554 A TW 111123554A TW I800415 B TWI800415 B TW I800415B
Authority
TW
Taiwan
Prior art keywords
same
semiconductor structure
sensing layer
structure containing
sensing
Prior art date
Application number
TW111123554A
Other languages
English (en)
Other versions
TW202400506A (zh
Inventor
蔡明志
Original Assignee
新唐科技股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 新唐科技股份有限公司 filed Critical 新唐科技股份有限公司
Priority to TW111123554A priority Critical patent/TWI800415B/zh
Priority to CN202211088397.5A priority patent/CN117330605A/zh
Application granted granted Critical
Publication of TWI800415B publication Critical patent/TWI800415B/zh
Publication of TW202400506A publication Critical patent/TW202400506A/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
    • G01N27/127—Composition of the body, e.g. the composition of its sensitive layer comprising nanoparticles

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Light Receiving Elements (AREA)
  • Measurement Of Radiation (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
TW111123554A 2022-06-24 2022-06-24 感測層及包含其之半導體結構 TWI800415B (zh)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW111123554A TWI800415B (zh) 2022-06-24 2022-06-24 感測層及包含其之半導體結構
CN202211088397.5A CN117330605A (zh) 2022-06-24 2022-09-07 感测层及包含其的半导体结构

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW111123554A TWI800415B (zh) 2022-06-24 2022-06-24 感測層及包含其之半導體結構

Publications (2)

Publication Number Publication Date
TWI800415B true TWI800415B (zh) 2023-04-21
TW202400506A TW202400506A (zh) 2024-01-01

Family

ID=86949017

Family Applications (1)

Application Number Title Priority Date Filing Date
TW111123554A TWI800415B (zh) 2022-06-24 2022-06-24 感測層及包含其之半導體結構

Country Status (2)

Country Link
CN (1) CN117330605A (zh)
TW (1) TWI800415B (zh)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1946999A (zh) * 2004-04-30 2007-04-11 金伯利-克拉克环球有限公司 用于光学检测系统的电致发光照明源
CN102265144A (zh) * 2008-12-01 2011-11-30 通用电气公司 采用分析物识别元件的基于射频传感器
US20160123865A1 (en) * 2013-06-10 2016-05-05 Portland State University Hydrogel compositions and methods for electrochemical sensing
TW202132096A (zh) * 2020-02-18 2021-09-01 新唐科技股份有限公司 阻障層及包括該阻障層的氣體感測器
TWI751863B (zh) * 2020-12-28 2022-01-01 新唐科技股份有限公司 半導體結構

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1946999A (zh) * 2004-04-30 2007-04-11 金伯利-克拉克环球有限公司 用于光学检测系统的电致发光照明源
CN102265144A (zh) * 2008-12-01 2011-11-30 通用电气公司 采用分析物识别元件的基于射频传感器
US20160123865A1 (en) * 2013-06-10 2016-05-05 Portland State University Hydrogel compositions and methods for electrochemical sensing
TW202132096A (zh) * 2020-02-18 2021-09-01 新唐科技股份有限公司 阻障層及包括該阻障層的氣體感測器
TWI751863B (zh) * 2020-12-28 2022-01-01 新唐科技股份有限公司 半導體結構

Also Published As

Publication number Publication date
TW202400506A (zh) 2024-01-01
CN117330605A (zh) 2024-01-02

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