TWI800698B - 半導體元件結構及其製造方法 - Google Patents

半導體元件結構及其製造方法 Download PDF

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Publication number
TWI800698B
TWI800698B TW108143893A TW108143893A TWI800698B TW I800698 B TWI800698 B TW I800698B TW 108143893 A TW108143893 A TW 108143893A TW 108143893 A TW108143893 A TW 108143893A TW I800698 B TWI800698 B TW I800698B
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Taiwan
Prior art keywords
fabricating
same
semiconductor device
semiconductor
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TW108143893A
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English (en)
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TW202123477A (zh
Inventor
付延超
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聯華電子股份有限公司
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TW108143893A 2019-12-02 2019-12-02 半導體元件結構及其製造方法 TWI800698B (zh)

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TW108143893A TWI800698B (zh) 2019-12-02 2019-12-02 半導體元件結構及其製造方法

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TW108143893A TWI800698B (zh) 2019-12-02 2019-12-02 半導體元件結構及其製造方法

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TW202123477A TW202123477A (zh) 2021-06-16
TWI800698B true TWI800698B (zh) 2023-05-01

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11823992B2 (en) 2021-09-24 2023-11-21 Nanya Technology Corporation Semiconductor device with uneven electrode surface and method for fabricating the same

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6180537B1 (en) * 1998-12-14 2001-01-30 United Silicon Incorporated Method of fabricating dielectric layer in alignment marker area
US20070037405A1 (en) * 2005-08-10 2007-02-15 Samsung Electronics Co., Ltd. Methods of forming metal-insulator-metal (MIM) capacitors with passivation layers on dielectric layers and devices so formed
US20120181657A1 (en) * 2011-01-17 2012-07-19 Taiwan Semiconductor Manufacturing Company, Ltd. Forming Metal-Insulator-Metal Capacitors Over a Top Metal Layer
US20150255533A1 (en) * 2011-03-04 2015-09-10 Nick Lindert Semiconductor structure having a capacitor and metal wiring integrated in a same dielectric layer
US20190096800A1 (en) * 2017-09-28 2019-03-28 Taiwan Semiconductor Manufacturing Co., Ltd. Novel mim structure

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6180537B1 (en) * 1998-12-14 2001-01-30 United Silicon Incorporated Method of fabricating dielectric layer in alignment marker area
US20070037405A1 (en) * 2005-08-10 2007-02-15 Samsung Electronics Co., Ltd. Methods of forming metal-insulator-metal (MIM) capacitors with passivation layers on dielectric layers and devices so formed
US20120181657A1 (en) * 2011-01-17 2012-07-19 Taiwan Semiconductor Manufacturing Company, Ltd. Forming Metal-Insulator-Metal Capacitors Over a Top Metal Layer
US20150255533A1 (en) * 2011-03-04 2015-09-10 Nick Lindert Semiconductor structure having a capacitor and metal wiring integrated in a same dielectric layer
US20190096800A1 (en) * 2017-09-28 2019-03-28 Taiwan Semiconductor Manufacturing Co., Ltd. Novel mim structure

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TW202123477A (zh) 2021-06-16

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