TWI796103B - Inspection device, resin molding device, cutting device, method of manufacturing resin molded product, and method of manufacturing cut product - Google Patents

Abstract

The problem to be solved by the present invention is to provide an inspection device, a resin molding device, a cutting device, a method of manufacturing a resin molded product, and a method of manufacturing a cut product, which can suppress deviation of light irradiated to an inspection object. In order to solve this problem, the inspection device of the present invention includes a camera and coaxial lighting. Coaxial lighting includes a half mirror, a light source unit, a plate member, and an adjustment unit. The half mirror is arranged on the observation axis connecting the inspection object and the camera, and is inclined with respect to the observation axis. The light source unit is configured to emit light toward the half mirror from a direction different from the observation axis. The light emitted from the light source unit is reflected by the half mirror to irradiate the inspection object. The plate-shaped member is disposed between the light source unit and the half mirror. A plurality of slits are formed in the plate member, and the slits are substantially parallel to each other. The adjustment unit is configured to adjust the arrangement of the plate-shaped member.

Description

Inspection device, resin molding device, cutting device, manufacturing method of resin molded product, and manufacturing method of cut product

The present invention relates to an inspection device, a resin molding device, a cutting device, a method for manufacturing a resin molded product, and a method for manufacturing a cut product.

Japanese Patent Application Publication No. 2017-187296 (Patent Document 1) discloses a coaxial lighting device. This coaxial lighting device includes a half mirror and a light source unit that irradiates light onto the half mirror. The half mirror is arranged on an observation axis connecting the object of observation, that is, the workpiece, and an observation unit such as a camera, and is inclined with respect to the observation axis. The light emitted from the light source unit is reflected by the half mirror to irradiate the workpiece (see Patent Document 1).

[Prior Art Literature] (patent documents) Patent Document 1: Japanese Patent Laid-Open No. 2017-187296

[Problem to be solved by the invention] In the coaxial illuminating device disclosed in Patent Document 1, in order to make the light irradiated on the observation object as uniform as possible, it is desirable that the angle of the light incident on the half mirror is a predetermined angle. In order to adjust the incident angle of light on the half mirror, a method may be considered in which a plate-shaped member is formed with a plurality of slits parallel to each other between the light source unit and the half mirror. However, even with this method, depending on the precision of the slits formed in the plate-like member, the incident angle of most light to the half mirror may not be at a predetermined angle. As a result, the deviation of light irradiated to the observation object (inspection object) becomes large.

The present invention was made to solve such problems, and its object is to provide an inspection device, a resin molding device, a cutting device, a method of manufacturing a resin molded product, and a method of manufacturing a cut product, which can suppress the light irradiated to the inspection object. offset.

[Technical means to solve the problem] An inspection device according to an aspect of the present invention includes a camera and coaxial lighting. The camera is configured to take an image of the inspection object. The coaxial illumination is configured to irradiate light onto the object to be inspected. Coaxial lighting includes a half mirror, a light source unit, a plate member, and an adjustment unit. The half mirror is arranged on the observation axis connecting the inspection object and the camera, and is inclined with respect to the observation axis. The light source unit is configured to emit light toward the half mirror from a direction different from the observation axis. The light emitted from the light source unit is reflected by the half mirror to irradiate the inspection object. The plate-shaped member is disposed between the light source unit and the half mirror. A plurality of slits are formed in the plate member, and the slits are substantially parallel to each other. The adjustment unit is configured to adjust the arrangement of the plate-shaped member.

A resin molding device according to another aspect of the present invention includes: a resin molding mechanism configured to manufacture a resin molded product; and the above-mentioned inspection device.

A cutting device according to another aspect of the present invention includes: a cutting mechanism configured to manufacture a cut product by cutting an object to be cut; and an inspection device.

A method of manufacturing a resin molded article according to another aspect of the present invention includes the steps of: manufacturing a resin molded article; and inspecting an inspection object using the inspection device described above. Objects to be inspected include resin molded products.

A method of manufacturing a cut product according to another aspect of the present invention includes the steps of: manufacturing a cut product by cutting an object to be cut; and inspecting the object to be inspected using the inspection device described above. The object to be inspected includes the object to be cut or the aforementioned cut-off product.

[Effect of the invention] According to the present invention, it is possible to provide an inspection device, a resin molding device, a cutting device, a method of manufacturing a resin molded product, and a method of manufacturing a cut product in which deviation of light irradiated to an inspection object can be suppressed.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In addition, the same code|symbol is attached|subjected to the same or a corresponding part in a figure, and the description is not repeated.

[1. Summary] Fig. 1 is a diagram schematically showing an inspection device 10 according to the present embodiment. A cross section of the coaxial illuminator 100 included in the inspection device 10 is shown in FIG. 1 . The directions indicated by each of the arrows UDFBLR are common to all drawings.

As shown in FIG. 1 , the inspection device 10 includes a coaxial illuminator 100 and a camera 200 . The coaxial illuminator 100 is disposed between the camera 200 and the inspection object 300 . The coaxial illuminator 100 is configured to irradiate the inspection object 300 with light from above the inspection object 300 . The camera 200 is configured to take an image of the inspection object 300 irradiated with light from above the inspection object 300 . In the inspection device 10 , the state of the surface of the inspection target object 300 is inspected based on the image captured by the camera 200 .

The inspection object 300 is, for example, a substrate before resin molding to which electronic components are connected, or a package substrate after resin molding of a substrate to which electronic components are connected, or the like. As an example of the package substrate, there are BGA (Ball Grid Array, ball grid array) package substrate, LGA (Land Grid Array, land grid array) package substrate, CSP (Chip Size Package, chip size package) package substrate, LED (Light Emitting Diode, light-emitting diode) package substrate, QFN (Quad Flat No-leaded, square flat no lead) package substrate.

The coaxial lighting 100 includes a light source unit 125 , a plate member 140 , a half mirror 150 , and a frame 110 . The light source unit 125 includes a substrate 121 , LEDs 120 , and a diffusion plate 130 . The shape of the substrate 121 is substantially rectangular, and a plurality of LEDs 120 are mounted on the substrate 121 . The substrate 121 is arranged substantially parallel to the observation axis C1 of the camera 200 . The plurality of LEDs 120 are each configured to emit light toward the half mirror 150 .

The diffuser plate 130 is a thin plate of frosted glass, and is disposed between the LEDs 120 and the plate-shaped member 140 . The shape of the diffusion plate 130 is substantially rectangular. The diffusion plate 130 is arranged substantially parallel to the observation axis C1 of the camera 200 . Light emitted from LED 120 is diffused by diffusion plate 130 . That is, the light source unit 125 diffuses the light emitted by the LED 120 through the diffuser plate 130 to perform surface emission.

The plate member 140 is disposed between the light source unit 125 and the half mirror 150 . The shape of the plate member 140 is substantially rectangular. The plate-shaped member 140 is arranged substantially parallel to the observation axis C1 of the camera 200 . A plurality of slits (louver, light-shielding grille) 142 are formed in the plate member 140, and the slits 142 are substantially parallel to each other. The plate-shaped member 140 is configured to suppress the diffusion of the light emitted from the light source unit 125 and to increase the parallelism of the light. As the plate-shaped member 140, for example, a light control film (Light Control Film) can be applied.

The half mirror 150 is arranged on the observation axis C1 of the camera 200 . The reflection surface of the half mirror 150 is inclined with respect to the observation axis C1 inside the housing 110 . The reflection surface of the half mirror 150 is, for example, inclined approximately 45 degrees with respect to the observation axis C1. The half mirror 150 is made of, for example, a glass plate whose surface is coated with a dielectric multilayer film, a metal thin film, or the like. The half mirror 150 is configured to have a reflectance of approximately 50% and a transmittance of approximately 50% for light having an incident angle of 45 degrees, for example.

The housing 110 accommodates the light source unit 125, the plate member 140, the half mirror 150, and the like inside. The frame body 110 is made of, for example, an aluminum alloy or the like. The shape of the housing 110 is, for example, a rectangular parallelepiped. Among the inner wall surfaces of the housing 110 , for example, a region between the half mirror 150 and the plate member 140 is configured as a mirror surface. In the housing 110 , in order to observe the inspection object 300 with the camera 200 , for example, a window (not shown) made of glass is formed on one surface on the side of the camera 200 . In addition, in the housing 110, a light emitting port (not shown) for emitting light is formed on one surface on the inspection object 300 side.

Most of the light passing through the plate-like member 140 is directed in a direction substantially perpendicular to the plate-like member 140 , whereby the light reflected by the half mirror 150 is irradiated substantially uniformly on the entire object 300 to be inspected. That is, when the light passing through the plate-shaped member 140 is mostly perpendicular to the plate-shaped member 140 , it is unlikely that the intensity of the light irradiated to each region of the inspection object 300 varies greatly.

[2. Possible problems caused by plate-shaped members] In the direction of arrow FB, when each slit 142 extends in a direction substantially perpendicular to one side of the plate-like member 140, and this side is the side facing the diffusion plate 130 among the sides of the plate-like member 140, Most of the light passing through the plate-like member 140 is directed in a direction substantially perpendicular to the plate-like member 140 . However, it is not easy to control the extending direction of each slit 142 in the plate-shaped member 140 at the time of production of the plate-shaped member 140 .

FIG. 2 is a diagram for explaining problems caused by the slits 142 in the plate-shaped member 140 being inclined more than expected. In FIG. 2, the inclination of the slit 142 is exaggerated for easy understanding. As shown in FIG. 2, in this plate-shaped member 140, each slit 142 does not extend in a substantially perpendicular direction with respect to one side of the plate-shaped member 140, and this surface is one of the surfaces of the plate-shaped member 140 that is compatible with the diffuser. The opposite side of the plate 130. Therefore, the light passing through the plate-shaped member 140 is often not substantially perpendicular to the plate-shaped member 140 . As a result, the light reflected by the half mirror 150 does not irradiate the entire object 300 to be inspected substantially uniformly. In this example, among the upper surfaces of the inspection target object 300 , the area closer to the arrow F direction is irradiated with stronger light than the area closer to the arrow B direction. In this way, the light irradiated on the inspection target object 300 deviates, and the inspection accuracy of the surface state of the inspection target object 300 decreases in the inspection device 10 .

In order to suppress such a problem, ingenuity has been devised in the configuration of the inspection device 10 . Hereinafter, the configuration of the inspection device 10 will be described in detail.

[3. Configuration of inspection device] FIG. 3 is a diagram schematically showing the upper surface of the coaxial lighting 100 . FIG. 4 is a diagram schematically showing the front of the coaxial lighting 100 . Fig. 5 is a schematic cross-sectional view taken along line V-V in Fig. 3 . In addition, for ease of description, in each figure, a part of the coaxial illuminator 100 is shown in a state of seeing through the inside.

Referring to FIG. 3 , FIG. 4 , and FIG. 5 , in the coaxial lighting 100 , an adjustment unit 160 is provided at each end in the arrow LR direction. The adjustment unit 160 is configured to adjust the arrangement of the plate-shaped member 140 . Specifically, the adjustment unit 160 can adjust the position of the plate-shaped member 140 in the direction of the arrow FB, and can adjust the position of the plate-shaped member 140 with an axis (shaft member 166 described later) that extends in the direction of the arrow LR as the center of rotation. Rotation angle. That is, the adjustment unit 160 includes a “position adjustment unit” for adjusting the position of the plate-shaped member 140 and an “angle adjustment mechanism” for adjusting the rotation angle of the plate-shaped member 140 .

The adjustment unit 160 includes a holder 163 , a supporting member 170 ( FIG. 5 ), a moving member 161 , an operating member 162 , a shaft member 166 , a stopper 169 ( FIG. 5 ), and a light shielding cover 167 . Each member included in the adjustment unit 160 is made of metal or resin. Also, the color of each member included in the adjustment unit 160 is preferably black. This is to reduce the possibility that the light entering the adjustment unit 160 will diffuse and adversely affect the light irradiated on the inspection object 300 .

The position adjustment unit includes a moving member 161 configured to linearly move the plate-like member 140 between the light source unit 125 and the half mirror 150 . Also, the above-mentioned angle adjustment mechanism mainly includes a clamper 163, a shaft member 166, and a stopper 169. The clamper is configured to hold the plate-shaped member 140, and the shaft member 166 becomes a rotating shaft of the clamper 163. The stopper 169 is configured to stop the rotation of the shaft member 166 . In addition, the angle adjustment mechanism includes a supporting member 170 that supports the shaft member 166 and is mounted on the moving member 161 together. The supporting member 170 includes a supporting member body portion 165 and a connecting portion 164, the supporting member body portion 165 is installed on the moving member 161, and the connecting portion 164 connects the vicinity of the moving member 161 in the supporting member body portion 165 and the holder 163. Through holes through which the shaft member 166 penetrates are respectively formed in the support member main body portion 165 and the connection portion 164 .

The clamper 163 is configured to clamp the plate-shaped member 140 , thereby holding the plate-shaped member 140 . The holder 163 is connected to the supporting member 170 . The support member 170 includes a substantially S-shaped connection portion 164 , a square support member body portion 165 , and a shaft member holding portion 168 . The connection part 164, the support member main body part 165, and the shaft member holding part 168 may be formed integrally, or may be formed as separate bodies. When the connection part 164, the support member body part 165, and the shaft member holding part 168 are separately formed as different entities, the connection part 164 and the support member body part 165 are fixed, and the support member body part 165 and the shaft The member holding parts 168 are fixed together.

A hole is formed at a position close to the upper end of the supporting member main body portion 165 , and thread cutting, for example, is performed on the hole. The moving member 161 passes through the hole. The moving member 161 is constituted by, for example, a ball screw extending in the arrow FB direction. The position where the hole is formed in the supporting member main body portion 165 is deviated upward from the position of the shaft member 166 in the arrow UD direction (height direction). In other words, the moving member 161 deviates in the height direction from the aforementioned shaft member. Therefore, even if the color of the moving member 161 is other than black, the light entering the adjusting portion 160 from the vicinity of the connecting portion of the shaft member 166 and the holder 163 is less likely to be diffused by the moving member 161 . The connecting portion 164 connects the vicinity of the moving member 161 in the supporting member main body portion 165 and the end surface of the holder 163 .

An operating member 162 is attached to the moving member 161 . The moving member 161 is rotated by rotating the operation member 162 . Accompanying the rotation of the moving member 161, the supporting member 170 is moved in the direction of arrow FB. As a result, the plate-shaped member 140 is moved in the arrow FB direction. That is, along with the rotation of the moving member 161 , the plate member 140 is linearly moved between the diffusion plate 130 and the half mirror 150 . In this way, in the inspection device 10 , the position adjustment unit of the adjustment unit 160 can adjust the position of the plate member 140 between the diffuser plate 130 and the half mirror 150 by rotating the operation member 162 .

A hole H1 is formed in an end surface of the holder 163 to accommodate a part of the shaft member 166 . Thread cutting is performed on the hole H1. A screw portion S1 is formed at one end portion of the shaft member 166 . The screw portion S1 is accommodated in the hole portion H1. Thereby, the shaft member 166 and the holder 163 are fixed.

In the support member 170 , holes are formed in the coupling portion 164 , the support member body portion 165 , and the shaft member holding portion 168 , through which the shaft member 166 penetrates. The support member 170 supports the shaft member 166 by passing the shaft member 166 through these holes. Thread cutting is not carried out on the holes respectively formed in the connecting portion 164, the supporting member body portion 165, and the shaft member holding portion 168, so that the shaft member 166 can be held relative to the connecting portion 164, the supporting member body portion 165, and the shaft member, respectively. Section 168 rotates.

By rotating the shaft member 166 , the holder 163 rotates around the shaft member 166 . Along with the rotation of the holder 163, the plate-shaped member 140 held by the holder 163 is also rotated. In this way, in the inspection device 10 , the angle adjustment mechanism of the adjustment unit 160 can adjust the angle of the plate member 140 relative to the half mirror 150 by rotating the shaft member 166 .

A hole is formed in the shaft member holding portion 168 to accommodate the stopper 169 . The hole extends in a direction substantially perpendicular to the hole through which the shaft member 166 penetrates. For example, screw cutting is performed on this hole, and the stopper 169 is formed by a screw. At this time, the stopper 169 is screwed into the hole of the shaft member holding portion 168 , whereby friction is generated between the stopper 169 and the shaft member 166 . The rotation of the shaft member 166 is restricted by this friction. That is, the stopper 169 stops the rotation of the shaft member 166 . The rotation angle of the shaft member 166 can be fixed by the stopper 169 and the angle of the plate member 140 with respect to the half mirror 150 can be fixed.

The shade cover 167 is configured to cover the shaft member holding portion 168 and the stopper 169 . Thereby, it is possible to suppress the entry of light from the vicinity of the connecting portion between the shaft member 166 and the shaft member holding portion 168 into the inside of the adjustment portion 160 .

In this way, in the inspection device 10 , the position of the plate member 140 between the diffusion plate 130 and the half mirror 150 can be adjusted.

FIG. 6 is a diagram schematically showing the inspection device 10 in a state where the distance between the diffuser plate 130 and the plate-shaped member 140 is shortened. As shown in FIG. 6 , in this inspection device 10 , the distance between the diffusion plate 130 and the plate-shaped member 140 is shortened, for example, compared with the example shown in FIG. 2 .

Even when each slit 142 does not extend in a direction substantially perpendicular to one side of the plate-like member 140, and this side is the side facing the diffuser plate 130 among the faces of the plate-like member 140, if the diffuser plate 130 As the distance to the plate-shaped member 140 becomes shorter, light substantially perpendicular to the plate-shaped member 140 passes through the slit 142 more easily than when the distance between the diffuser plate 130 and the plate-shaped member 140 is long. As a result, a situation in which the intensity of light irradiated to each area of the inspection target object 300 differs greatly is less likely to occur.

FIG. 7 is a diagram schematically showing the inspection device 10 in a state where the angle of the plate-shaped member 140 is inclined with respect to the half mirror 150 . In addition, in Fig. 7, the inclination of the slit 142 is exaggerated for easy understanding.

As shown in FIG. 7, in this inspection device 10, the plate-shaped member 140 is inclined so that the extension direction of each slit 142 is approximately perpendicular to one side of the plate-shaped member 140, and this surface is the plate-shaped member 140. The side facing the diffuser plate 130 among the sides. Since the extension direction of each slit 142 is approximately perpendicular to one side of the plate-shaped member 140, and this surface is the one facing the diffuser plate 130 among the surfaces of the plate-shaped member 140, the The light at 140 is mostly perpendicular to the plate member 140 . As a result, the light reflected by the half mirror 150 is substantially uniformly irradiated on the entire object 300 to be inspected.

[4. Features] As described above, in the inspection device 10 according to the present embodiment, the arrangement of the plate-shaped member 140 can be adjusted. Therefore, according to the inspection device 10, the traveling direction of the light passing through the plate-shaped member 140 can be adjusted by adjusting the arrangement of the plate-shaped member 140, so the light reflected by the half mirror 150 and irradiated to the inspection object 300 can be suppressed. offset.

[5. Other embodiments] The concept of the above-mentioned embodiments is not limited to the above-described embodiments. Hereinafter, an example of other embodiments to which the idea of the above-mentioned embodiments can be applied will be described.

In the above-mentioned embodiment, an example in which the present invention is applied to an inspection device has been described, but the present invention can also be applied to, for example, a resin molding device or a cutting device other than an inspection device.

FIG. 8 is a block diagram schematically showing the configuration of the resin molding apparatus 400 . As shown in FIG. 8 , the resin molding device 400 includes a resin molding mechanism 410 and an inspection device 10 . The resin molding mechanism 410 mainly includes a mold clamping mechanism (not shown) for clamping a molding mold (not shown) and a molding mold. The resin molding mechanism 410 is configured to clamp a molding die to perform resin molding of a molding object to manufacture a resin molded product. The inspection device 10 inspects, for example, a substrate before resin molding or a package substrate after resin molding, that is, a resin molded product. At this time, the substrate before resin molding or the package substrate after resin molding becomes the inspection object 300 . Examples of inspections include positional displacement inspections and count inspections of electronic components connected to substrates before resin molding, appearance inspections of package substrates, and the like.

FIG. 9 is a block diagram schematically showing the configuration of the cutting device 500 . As shown in FIG. 9 , the cutting device 500 includes a cutting mechanism 510 and an inspection device 10 . The cutting mechanism 510 is mainly composed of a rotating shaft portion (not shown) having a blade, and the cutting object is cut by the high-speed rotating blade to produce a cut product. The inspection device 10 inspects, for example, an object to be cut or a cut product. At this time, the object to be cut or the cut product becomes the object to be inspected 300 . Examples of the inspection include visual inspection of the resin-molded side of the object to be cut, that is, the package substrate, and inspection of the surface of the object to be cut, that is, the resin-molded surface of the package substrate.

In addition, in the above-mentioned embodiment, the inspection apparatus 10 is configured to be able to adjust the position of the plate-shaped member 140 in the arrow direction FB, and to be able to adjust the rotation angle of the plate-shaped member 140 with the shaft member 166 as the rotation center. However, it is not necessary that two-way adjustments be possible. That is, only one of the adjustment of the position of the plate-shaped member 140 in the arrow direction FB and the adjustment of the rotation angle of the plate-shaped member 140 around the shaft member 166 as the rotation center may be performed.

As mentioned above, the embodiment of this invention was demonstrated as an example. That is, the detailed description and drawings are disclosed for illustrative purposes. Therefore, among the constituent elements described in the detailed description and the drawings, constituent elements that are not necessary for solving problems may be included. Therefore, even if these unnecessary constituent elements are described in the detailed description and drawings, these unnecessary constituent elements should not be recognized as essential immediately.

In addition, various modifications and changes can be made to the above-mentioned embodiments within the scope of the present invention. That is, for implementation of the present invention, appropriate specific configurations can be adopted in accordance with the embodiments.

10: Check device 100: coaxial lighting 110: frame 120:LED 121: Substrate 125: Light source department 130: Diffusion plate 140: Plate member 142: Slit 150: half mirror 160: Adjustment department 161: Mobile components 162: Operating components 163: Holder 164: linking part 165: Support member body part 166: Shaft component 167: shade cover 168: shaft member holding part 169: stopper 170: Support components 200: camera 300: Check object 400: resin molding device 410: Resin forming mechanism 500: cutting device 510: cutting mechanism C1: Observation axis H1: Hole S1: screw part

Fig. 1 is a diagram schematically showing an inspection device. Fig. 2 is a diagram for explaining problems caused by the inclination of each slit in the plate-shaped member more than expected. Fig. 3 is a top view schematically showing the coaxial illumination. Fig. 4 is a front view schematically showing coaxial lighting. Fig. 5 is a schematic cross-sectional view taken along line V-V in Fig. 3 . Fig. 6 is a diagram schematically showing an inspection device in a state where the distance between the diffuser plate and the plate-shaped member is shortened. Fig. 7 is a diagram schematically showing an inspection device in a state where a plate-shaped member is inclined at an angle with respect to a half mirror. Fig. 8 is a block diagram schematically showing the configuration of a resin molding device. Fig. 9 is a block diagram schematically showing the configuration of the cutting device.

Domestic deposit information (please note in order of depositor, date, and number) none

Overseas storage information (please note in order of storage country, organization, date, and number) none

10: Check device

100: coaxial lighting

110: frame

120:LED

121: Substrate

125: Light source department

130: Diffusion plate

140: Plate member

142: Slit

150: half mirror

200: camera

300: Check object

C1: Observation axis

Claims (9)

An inspection device comprising: a camera configured to take an image of an inspection object; and a coaxial illumination configured to irradiate light onto the inspection object; the coaxial illumination includes: a half mirror disposed on a On the observation axis of the aforementioned camera, and inclined relative to the aforementioned observation axis; the light source part is configured to emit light toward the aforementioned half mirror from a direction different from the aforementioned observation axis; a plate-shaped member is disposed between the aforementioned light source part and the aforementioned half mirror Between, a plurality of slits are formed in the plate-shaped member, and these slits are substantially parallel to each other; and, the adjustment part is configured to adjust the configuration of the aforementioned plate-shaped member; The mirror reflects and irradiates the aforementioned inspection object; wherein, the aforementioned adjustment part includes: a position adjustment part configured to adjust the distance between the aforementioned plate-shaped member and the aforementioned light source part; and an angle adjustment mechanism configured to adjust the distance between the aforementioned plate-shaped member The angle of the member relative to the half mirror; the position adjustment unit includes a moving member configured to linearly move the plate-shaped member between the light source unit and the half mirror; the angle adjustment mechanism includes : Holder, configured to hold the aforementioned A plate-shaped member; and, a shaft member serving as a rotation shaft of the holder; and the moving member deviated in a height direction from the shaft member. The inspection device according to claim 1, wherein the angle adjustment mechanism further includes a stopper configured to stop the rotation of the shaft member. The inspection device according to claim 1 or 2, wherein the holder includes a hole for receiving a part of the shaft member. The inspection device according to claim 1 or 2, wherein the angle adjustment mechanism includes a supporting member that supports the shaft member and is mounted on the moving member together; the supporting member includes: a main body of the supporting member , which is installed on the aforementioned moving member; and, a connecting portion, which connects the vicinity of the aforementioned moving member in the aforementioned supporting member body portion and the aforementioned clamper; the aforementioned supporting member body portion and the aforementioned connecting portion are respectively formed with penetrating A hole is provided for the penetration of the aforementioned shaft member. The inspection device according to claim 1 or 2, wherein the coaxial illumination includes a light-shielding cover configured to cover the adjustment part. A resin molding device comprising: a resin molding mechanism configured to manufacture a resin molded product; and the inspection device according to any one of claims 1 to 5. A cutting device comprising: a cutting mechanism configured to cut an object to be cut to produce A cut-off product; and, the inspection device as described in any one of Claims 1 to 5. A method of manufacturing a resin molded product, comprising: manufacturing a resin molded product; and inspecting the inspection object using the inspection device according to any one of claims 1 to 5; the inspection object includes the resin Formed products. A method of manufacturing a cut product, comprising the steps of: manufacturing a cut product by cutting an object to be cut; and using the inspection device as described in any one of claims 1 to 5 to inspect The inspection object is inspected; the inspection object includes the cutting object or the cutting product.

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