JP2013036948A - Defect inspection device - Google Patents
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- 238000007689 inspection Methods 0.000 title claims abstract description 126
- 230000007547 defect Effects 0.000 title claims abstract description 54
- 230000003287 optical effect Effects 0.000 claims abstract description 51
- 238000003384 imaging method Methods 0.000 claims description 27
- 230000003667 anti-reflective effect Effects 0.000 claims 1
- 238000000034 method Methods 0.000 description 14
- 238000001514 detection method Methods 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 230000001678 irradiating effect Effects 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000001788 irregular Effects 0.000 description 2
- 238000004049 embossing Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
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Abstract
Description
本発明は、欠陥検査装置に関する。さらに詳しくは、梨地処理（マット処理）やヘアライン仕上げされた被検査対象の表面を光学的手法によって検査する欠陥検査装置に関する。 The present invention relates to a defect inspection apparatus. More specifically, the present invention relates to a defect inspection apparatus that inspects the surface of an inspection target that has been subjected to a matte process (matte process) or a hairline finish by an optical method.
表面が平滑な被検査対象において、その表面の欠陥、例えば、スジ状の傷などの検査には、光学的手法を用いた検査が行われている。かかる検査では、ＬＥＤ等の光源から発せられる光を被検査対象の表面に照射する。すると、被検査対象の表面が平滑な表面であれば、正常な表面では正反射のみが生じる一方、欠陥が存在する表面では、乱反射により散乱光が発生する。したがって、撮影手段によって被検査対象を撮影すれば、撮影された散乱光の強度に基づいて、傷等の欠陥の有無を判断することができる。 In an inspection target having a smooth surface, inspection using an optical method is performed for inspection of defects on the surface, for example, streak-like scratches. In such an inspection, light emitted from a light source such as an LED is irradiated on the surface of the inspection target. Then, if the surface to be inspected is a smooth surface, only normal reflection occurs on a normal surface, while scattered light is generated by irregular reflection on a surface where defects exist. Therefore, if the object to be inspected is imaged by the imaging means, the presence or absence of defects such as scratches can be determined based on the intensity of the captured scattered light.
一方、ヘアライン仕上げをした金属表面のように細かな凹凸を有する表面は、この凹凸でも乱反射して散乱光が発生するため、散乱光の強度では、傷等の欠陥の有無を判断することは困難である。 On the other hand, a surface with fine irregularities, such as a metal surface with a hairline finish, diffusely reflects even the irregularities and generates scattered light. Therefore, it is difficult to determine the presence or absence of defects such as scratches with the intensity of the scattered light. It is.
かかるヘアライン仕上げをした金属表面において、表面に形成された傷等の欠陥を判別する技術が開発されている（特許文献１）。
特許文献１には、同じ列上に位置する複数の発光体を有する光源から被検査対象の表面に光を照射して欠陥を検出する装置が開示されており、各発光体の光軸から一定の範囲よりも外側の光のみが被検査対象の表面に照射されるように構成されている。このため、被検査対象に対して異なる方向から光を照射することができるので、均一な凹凸より深い凹凸欠陥を光らせることが可能となり、被検査対象の表面が、ヘアラインや梨地肌のような細かな凹凸を有する表面であっても、表面の傷などを検出することができる。
A technique for discriminating defects such as scratches formed on the surface of a metal surface having such a hairline finish has been developed (Patent Document 1).
Patent Document 1 discloses an apparatus that detects a defect by irradiating light on a surface of an object to be inspected from a light source having a plurality of light emitters located on the same row, and is fixed from the optical axis of each light emitter. Only the light outside the range is irradiated onto the surface of the inspection object. For this reason, since it is possible to irradiate light on the object to be inspected from different directions, it becomes possible to shine uneven defects deeper than uniform unevenness, and the surface of the object to be inspected is fine like a hairline or a satin surface. Even on a surface having a rough surface, scratches on the surface can be detected.
現在のところ、光学的方法を用いて、ヘアライン仕上げをした金属表面や梨地肌等の検査を行うことができる検査装置は、上述した特許文献１の技術しか見当たらないが、他の方法でもヘアラインや梨地肌のような細かな凹凸を有する表面の傷などを検出することができれば、好ましい。 At present, only the technique of Patent Document 1 described above can be found as an inspection apparatus capable of inspecting a metal surface or a textured skin having a hairline finish using an optical method. It is preferable if scratches on the surface having fine irregularities such as satin skin can be detected.
本発明は上記事情に鑑み、表面に細かな凹凸を有する部材であってもその表面の欠陥を検出できる欠陥検査装置を提供することを目的とする。 In view of the above circumstances, an object of the present invention is to provide a defect inspection apparatus that can detect defects on the surface of a member having fine irregularities on the surface.
第１発明の欠陥検査装置は、被検査対象の表面の欠陥を検査する装置であって、前記被検査対象に向けて光を放出する投光手段と、前記被検査対象の表面において反射した光を受光する受光部を備えた撮影手段と、を備えており、前記投光手段は、光源と、該光源と前記被検査対象との間に設けられた、該光源から前記被検査対象に照射される光を制限する遮光部材と、を備えており、該遮光部材は、前記光源から放出される光を通過させるスリットを備えており、該スリットは、前記被検査対象の表面が平坦面である場合において、該スリットを通過して前記被検査対象の表面で反射する光の光軸方向と前記撮影手段の受光部の光軸方向とが同軸となるように形成されていることを特徴とする。
第２発明の欠陥検査装置は、第１発明において、前記撮影手段が、複数の受光部を備えており、前記遮光部材は、複数のスリットを備えており、該複数のスリットは、前記被検査対象の表面が平坦面である場合において、一のスリットを通過して前記被検査対象の表面で反射する光の光軸方向と、前記撮影手段の複数の受光部における一の受光部の光軸方向とが同軸となるように、それぞれ形成されていることを特徴とする。
第３発明の欠陥検査装置は、第２発明において、前記遮光部材は、複数の遮光プレートを有しており、該複数の遮光プレートは、隣接する遮光プレート同士が、互いに間隔を開けた状態で配設されていることを特徴とする。
第４発明の欠陥検査装置は、第３発明において、前記複数の遮光部材は、その表面に反射防止処理が施されており、隣接する遮光プレート同士が、反射防止処理が施された表面同士を対向させた状態となるように配設されていることを特徴とする。
第５発明の欠陥検査装置は、第３または第４発明において、前記複数の遮光プレートは、前記撮影手段の受光部の光軸方向に対する表面の傾斜角度が調整可能に設けられていることを特徴とする。
A defect inspection apparatus according to a first aspect of the present invention is an apparatus for inspecting a defect on a surface of an inspection target, a light projecting unit that emits light toward the inspection target, and light reflected on the surface of the inspection target And a light-receiving unit that receives the light, and the light projecting unit is provided between the light source and the light source and the inspection target, and irradiates the inspection target from the light source. A light-shielding member that restricts light emitted from the light source, and the light-shielding member includes a slit that allows light emitted from the light source to pass therethrough. In some cases, the optical axis direction of the light that passes through the slit and is reflected by the surface of the object to be inspected is formed so as to be coaxial with the optical axis direction of the light receiving unit of the imaging unit. To do.
The defect inspection apparatus according to a second aspect of the present invention is the defect inspection apparatus according to the first aspect, wherein the imaging means includes a plurality of light receiving portions, the light shielding member includes a plurality of slits, and the plurality of slits are the inspection target. When the surface of the object is a flat surface, the optical axis direction of the light that passes through one slit and is reflected by the surface of the object to be inspected, and the optical axis of one light receiving unit in the plurality of light receiving units of the imaging unit Each is formed so that the direction is coaxial.
In a defect inspection apparatus according to a third aspect based on the second aspect, the light shielding member has a plurality of light shielding plates, and the plurality of light shielding plates are in a state where adjacent light shielding plates are spaced apart from each other. It is characterized by being arranged.
The defect inspection apparatus according to a fourth aspect of the present invention is the defect inspection apparatus according to the third aspect, wherein the plurality of light shielding members are subjected to an antireflection treatment on the surfaces thereof, and adjacent light shielding plates are disposed between the surfaces subjected to the antireflection treatment. It arrange | positions so that it may be made to oppose. It is characterized by the above-mentioned.
The defect inspection apparatus according to a fifth aspect of the present invention is the defect inspection apparatus according to the third or fourth aspect, wherein the plurality of light shielding plates are provided so that an inclination angle of a surface with respect to an optical axis direction of a light receiving portion of the photographing unit can be adjusted. And
第１発明によれば、光源から被検査対象の表面に向けて放出される光のうち、スリットを通過した光のみが被検査対象の表面に照射される。この光が被検査対象の表面で反射すると、被検査対象の表面が平坦面である場合には、反射した光の光軸と撮影手段の受光部の光軸方向とが同軸となる。つまり、被検査対象の表面が平坦面である場合にのみスリットを通過した光の正反射光が受光部に入射されるようになっているので、ヘアライン仕上げなどの凹凸を有する表面に形成された平面状になった欠陥や、平坦面に形成された凹凸などの傷を検出することができる。
第２発明によれば、複数のスリットを通過した光の正反射光は、それぞれ対応する受光部にのみ入射される。したがって、他のスリットを通過した光の影響を受けることなく、欠陥を検出することができる。
第３発明によれば、隣接する遮光プレート間に形成される隙間をスリットとすることができるので、スリットを通過する光において、被検査対象の表面に照射される光に含まれるスリットの光軸方向に対して傾いた光の割合を少なくすることができる。すると、スリットの光軸方向に対して傾いた光の影響による欠陥検出精度の低下が生じることを抑えることができる。
第４発明によれば、遮光プレートの表面に反射防止処理が施されているので、遮光プレートの表面での反射した光に起因する欠陥検出精度の低下を防止することができる。
第５発明によれば、撮影手段の受光部の光軸方向に対する表面の傾斜角度を調整することができるので、被検査対象が変更されたり、視野幅（受光距離）の変更が生じたりした場合でも、隣接する遮光プレート間に形成される隙間（スリット）を通過して被検査対象の表面で反射する光の光軸と撮影手段の受光部の光軸方向とが同軸となるように調整することができる。
According to the first aspect of the invention, only the light that has passed through the slit among the light emitted from the light source toward the surface of the inspection target is irradiated on the surface of the inspection target. When this light is reflected by the surface of the object to be inspected, when the surface of the object to be inspected is a flat surface, the optical axis of the reflected light and the optical axis direction of the light receiving unit of the photographing means are coaxial. In other words, the specularly reflected light of the light that has passed through the slit is made incident on the light receiving unit only when the surface of the object to be inspected is a flat surface, so that it is formed on a surface having irregularities such as a hairline finish. It is possible to detect a defect such as a flattened surface or a scratch formed on a flat surface.
According to the second aspect of the invention, the specularly reflected light that has passed through the plurality of slits is incident only on the corresponding light receiving portions. Therefore, a defect can be detected without being affected by light that has passed through another slit.
According to the third invention, since the gap formed between the adjacent light shielding plates can be a slit, in the light passing through the slit, the optical axis of the slit included in the light irradiated on the surface of the object to be inspected The ratio of light inclined with respect to the direction can be reduced. Then, it can suppress that the defect detection accuracy falls by the influence of the light inclined with respect to the optical axis direction of a slit.
According to the fourth aspect of the invention, since the antireflection treatment is performed on the surface of the light shielding plate, it is possible to prevent a decrease in defect detection accuracy due to the light reflected on the surface of the light shielding plate.
According to the fifth invention, since the inclination angle of the surface with respect to the optical axis direction of the light receiving portion of the photographing means can be adjusted, the inspection object is changed or the field width (light receiving distance) is changed. However, adjustment is made so that the optical axis of light passing through a gap (slit) formed between adjacent light shielding plates and reflected by the surface of the object to be inspected is coaxial with the optical axis direction of the light receiving portion of the imaging means. be able to.
本発明の欠陥検査装置は、被検査対象の表面を光学的手法により検査する欠陥検査装置であって、表面に形成された傷などを検出することができるものである。
とくに、ヘアラインのように規則的な細かな凹凸が形成された表面や、梨地肌のような細かな凹凸が形成された表面に発生した傷等の検出に適した装置である。
The defect inspection apparatus of the present invention is a defect inspection apparatus that inspects the surface of an object to be inspected by an optical technique, and can detect scratches and the like formed on the surface.
In particular, it is an apparatus suitable for detecting scratches and the like generated on a surface having regular fine irregularities such as a hairline, or a surface having fine irregularities such as satin.
（欠陥検査装置１の説明）
本発明の欠陥検査装置は、被検査対象の表面に対して光を照射する投光手段に特徴を有しているが、まず、欠陥検査装置の全体的な構成を簡単に説明する。
(Description of defect inspection apparatus 1)
The defect inspection apparatus of the present invention is characterized by the light projecting means for irradiating light onto the surface of the inspection object. First, the overall configuration of the defect inspection apparatus will be briefly described.
図２において、符号Ｓは、本実施形態の欠陥検査装置１によって表面の欠陥が検査される被検査対象を示している。この被検査対象Ｓは、連続して搬送される、フィルムや金属等からなるシート状の部材などであるが、とくに限定されない。 In FIG. 2, symbol S indicates an inspection target whose surface is inspected by the defect inspection apparatus 1 of the present embodiment. The inspection target S is a sheet-like member made of a film, metal, or the like that is continuously conveyed, but is not particularly limited.
図２に示すように、本発明の欠陥検査装置１は、被検査対象Ｓにおいて検査を行う表面側に、被検査対象Ｓの表面に対して光を照射する投光手段１０と、被検査対象Ｓの表面の検査位置ＤＬを撮影する撮影手段２０と、撮影手段２０によって撮影された信号に基づいて傷等の有無を判断する解析手段３０とを備えている。
なお、解析手段３０は、投光手段１０および撮影手段２０と電気的に接続されており、両者の作動を制御する機能も有している。
As shown in FIG. 2, the defect inspection apparatus 1 according to the present invention includes a light projecting unit 10 that irradiates light on the surface of the inspection target S on the surface of the inspection target S, and an inspection target. An imaging unit 20 for imaging the inspection position DL on the surface of S and an analysis unit 30 for determining the presence or absence of a scratch or the like based on a signal imaged by the imaging unit 20 are provided.
The analyzing means 30 is electrically connected to the light projecting means 10 and the photographing means 20 and has a function of controlling the operation of both.
図２（Ｂ）に示すように、撮影手段２０は、撮像部２１と、レンズ２２を備えている。
撮像部２１は、投光手段１０から被検査対象Ｓの表面に照射された光（以下、照射光という）のうち被検査対象Ｓの表面で反射した光（以下、反射光という）を受光するものであり、例えば、ラインセンサ等のように複数の受光素子21sを有している。
レンズ２２は、反射光を集光して、撮像部２１の受光素子21sに集光した光を入射するものである。
As illustrated in FIG. 2B, the photographing unit 20 includes an imaging unit 21 and a lens 22.
The imaging unit 21 receives light reflected on the surface of the inspection target S (hereinafter referred to as reflected light) out of light irradiated on the surface of the inspection target S from the light projecting means 10 (hereinafter referred to as irradiation light). For example, it has a plurality of light receiving elements 21s such as a line sensor.
The lens 22 collects the reflected light and makes the collected light incident on the light receiving element 21 s of the imaging unit 21.
この撮影手段２０は、被検査対象Ｓの表面が滑らかな面であれば、被検査対象Ｓの表面において照射光と等しい角度で反射される反射光（正反射光）が、レンズ２２によって集光されて各受光素子21sに入射されるように配設されている。この撮影手段２０における撮像部２１の受光素子21sが特許請求の範囲にいう受光部に相当する。 If the surface of the inspection target S is a smooth surface, the imaging unit 20 collects reflected light (regular reflection light) reflected on the surface of the inspection target S at an angle equal to the irradiation light by the lens 22. And is arranged so as to be incident on each light receiving element 21s. The light receiving element 21s of the imaging unit 21 in the photographing means 20 corresponds to a light receiving unit in the claims.
なお、撮像部２１がラインセンサ等のように複数の受光素子21sが並んで配設されているものの場合には、撮影手段２０は、複数の受光素子21sが並ぶ方向と被検査対象Ｓの幅方向とが平行となるように配設される。
また、撮影手段２０の撮像部２１は、受光素子21sを複数有するものに限られず、被検査対象Ｓの表面で反射した光を検出できる受光素子を有する機器であれば、とくに限定されない。
In the case where the imaging unit 21 is provided with a plurality of light receiving elements 21s arranged like a line sensor or the like, the imaging unit 20 determines the direction in which the plurality of light receiving elements 21s are arranged and the width of the object S to be inspected. It arrange | positions so that a direction may become parallel.
In addition, the imaging unit 21 of the photographing unit 20 is not limited to one having a plurality of light receiving elements 21s, and is not particularly limited as long as the apparatus has a light receiving element that can detect light reflected from the surface of the inspection target S.
（投光手段１０）
つぎに、投光手段１０を詳細に説明する。
図１および図３において、符号１１は投光手段１０の光源を示している。この光源１１は被検査対象Ｓの幅方向（図１では左右方向、図２および図３（Ａ）では紙面に垂直な方向）に沿って延びたものであり、被検査対象Ｓの幅方向と平行な略線状の光を放出することができるものである。
図３（Ａ）に示すように、光源１１は光を放出する発光体11aを備えている。この発光体11aは、例えば、被検査対象Ｓの幅方向と平行に配設された棒状の蛍光灯や、被検査対象Ｓの幅方向に沿って複数のＬＥＤ素子（発光体）が一列に並んで配設された回路などをあげることができるが、とくに限定されない。
以下では、光源１１において、被検査対象Ｓの幅方向と平行な方向を光源１１の軸方向という。例えば、発光体11aが棒状の蛍光灯の場合であればその軸方向、また、ＬＥＤ素子が一列に並んで配設された発光体11aの場合であればＬＥＤ素子が並んでいる方向を、光源１１の軸方向という。
(Light projection means 10)
Next, the light projecting means 10 will be described in detail.
1 and 3, reference numeral 11 indicates a light source of the light projecting means 10. The light source 11 extends along the width direction of the inspection target S (the horizontal direction in FIG. 1 and the direction perpendicular to the paper surface in FIGS. 2 and 3A). It is possible to emit light in a substantially parallel line.
As shown in FIG. 3A, the light source 11 includes a light emitter 11a that emits light. The light emitter 11a is, for example, a rod-like fluorescent lamp disposed in parallel with the width direction of the inspection target S, or a plurality of LED elements (light emission bodies) arranged in a line along the width direction of the inspection target S. Although the circuit etc. arrange | positioned by can be mention | raise | lifted, it does not specifically limit.
Hereinafter, in the light source 11, a direction parallel to the width direction of the inspection target S is referred to as an axial direction of the light source 11. For example, when the light emitter 11a is a rod-shaped fluorescent lamp, the axial direction thereof, and when the light emitter 11a is arranged with the LED elements arranged in a line, the direction in which the LED elements are aligned is set as the light source. 11 axial directions.
なお、検査精度を高める上では、被検査対象Ｓの走行方向（図１では上下な方向、図２および図３（Ａ）では左右方向）において、被検査対象Ｓに照射される光の幅ＷＤがあまり広くないほうが好ましい。被検査対象Ｓに照射される光における走行方向の幅ＷＤを制限する方法はとくに限定されないが、例えば、図３（Ａ）に示すような構造を有する光源１１を採用することができる。つまり、図３（Ａ）に示すように、光源１１に、ケース11bを設け、このケース11b内に蛍光灯やＬＥＤ素子等の発光体11aを収容する。そして、このケース11bに光を透過する光放出窓11cを形成して、この光放出窓11cを通して被検査対象Ｓに向けて照射させる。すると、被検査対象Ｓに照射される光における走行方向の幅ＷＤ、つまり、被検査対象Ｓの走行方向において、被検査対象Ｓに光が照射される範囲を制限することができる。 In order to improve the inspection accuracy, the width WD of the light irradiating the inspection target S in the traveling direction of the inspection target S (vertical direction in FIG. 1 and horizontal direction in FIGS. 2 and 3A). Is preferably not too wide. A method for limiting the width WD in the traveling direction in the light irradiated to the inspection target S is not particularly limited, and for example, the light source 11 having a structure as shown in FIG. That is, as shown in FIG. 3A, a case 11b is provided in the light source 11, and a light emitter 11a such as a fluorescent lamp or an LED element is accommodated in the case 11b. Then, a light emission window 11c that transmits light is formed in the case 11b, and the object S is irradiated through the light emission window 11c. Then, the width WD in the traveling direction in the light irradiated to the inspection target S, that is, the range in which the light to be inspected S is irradiated in the traveling direction of the inspection target S can be limited.
また、被検査対象Ｓの幅方向において、被検査対象Ｓに照射される光の強度のバラツキを小さくして、被検査対象Ｓに均一な強度の光を照射する上では、光源１１は、後述する遮光部材２０との間に、光を拡散して透過する散乱板などを備えていることが好ましい。例えば、図３（Ａ）に示すように、発光体11aをケース11bに収容して、このケース11bに光を透過する光放出窓11cを形成した場合には、この光放出窓11cとして、上述したような散乱板を設置することができる。 In order to irradiate the inspected object S with light having a uniform intensity in the width direction of the inspected object S by reducing variation in the intensity of light applied to the inspected object S, the light source 11 is described later. It is preferable that a scattering plate or the like that diffuses and transmits light is provided between the light shielding member 20 and the light shielding member 20. For example, as shown in FIG. 3A, when the light emitter 11a is accommodated in the case 11b and a light emission window 11c that transmits light is formed in the case 11b, the light emission window 11c is described above. Such a scattering plate can be installed.
（遮光部材１５）
図１および図３に示すように、投光手段１０は、光源１１と被検査対象Ｓとの間に、遮光部材１５を備えている。この遮光部材１５は、光源１１から放出された光について、光源１１から被検査対象Ｓに照射される光を制限する機能を有するものである。
(Light shielding member 15)
As shown in FIGS. 1 and 3, the light projecting unit 10 includes a light shielding member 15 between the light source 11 and the inspection target S. The light shielding member 15 has a function of limiting the light emitted from the light source 11 to the inspection target S with respect to the light emitted from the light source 11.
まず、遮光部材１５は、光源１１の軸方向に沿って延びたフレーム１６を備えている。このフレーム１６は、後述する複数の遮光プレート１７を支持するものであり、光源１１から放出される光と干渉しない位置（つまり、被検査対象Ｓ上に影を形成しない位置）に設けられている（図３（Ａ）参照）。 First, the light shielding member 15 includes a frame 16 extending along the axial direction of the light source 11. The frame 16 supports a plurality of light shielding plates 17 to be described later, and is provided at a position that does not interfere with light emitted from the light source 11 (that is, a position where no shadow is formed on the inspection target S). (See FIG. 3A).
図１に示すように、フレーム１６には、光源１１の軸方向に沿って（言い換えれば、フレーム１６の軸方向に沿って）複数の遮光プレート１７が取り付けられている。この遮光プレート１７は、遮光部17aと、この遮光部17aをフレーム１６に固定する固定部17bとを備えている。 As shown in FIG. 1, a plurality of light shielding plates 17 are attached to the frame 16 along the axial direction of the light source 11 (in other words, along the axial direction of the frame 16). The light shielding plate 17 includes a light shielding part 17 a and a fixing part 17 b for fixing the light shielding part 17 a to the frame 16.
遮光部17aは、厚さが数ｍｍ程度の板によって形成された、略長方形の板状の部材であるが、その厚さおよび形状はとくに限定されない。
固定部17bは、軸状の部材であり、遮光部17aの側端取り付けられている。例えば、固定部17bの軸方向と遮光部17aの一辺とが略平行となるように、遮光部17aは固定部17bに取り付けられている。この固定部17bは、その軸方向の一端がフレーム１６に固定されている。具体的には、隣接する遮光プレート１７における遮光部17aの表面同士が互いに対向し、かつ、遮光部17aの表面間に光源１１から放出される光が通過できる程度の隙間（スリット15h）が形成されるように、各遮光プレート１７の固定部17bがフレーム１６に固定されている。
The light shielding portion 17a is a substantially rectangular plate-like member formed of a plate having a thickness of about several millimeters, but the thickness and shape thereof are not particularly limited.
The fixing portion 17b is a shaft-like member, and is attached to the side end of the light shielding portion 17a. For example, the light shielding part 17a is attached to the fixing part 17b so that the axial direction of the fixing part 17b and one side of the light shielding part 17a are substantially parallel. One end of the fixing portion 17b in the axial direction is fixed to the frame 16. Specifically, a gap (slit 15h) that allows the light emitted from the light source 11 to pass between the surfaces of the light shielding portions 17a of the adjacent light shielding plates 17 facing each other and between the surfaces of the light shielding portions 17a is formed. As described above, the fixing portion 17 b of each light shielding plate 17 is fixed to the frame 16.
しかも、複数の遮光プレート１７は、各スリット15hを通過した光の正反射光が撮影手段２０の各受光素子21sにそれぞれ入射しうるように配設されている。具体的には、被検査対象Ｓの表面が平坦面である場合において、一のスリット15hを通過して被検査対象Ｓの表面で反射する光の光軸方向ＲＬと、撮影手段２０の一の受光素子21sの光軸ＬＡ方向とが同軸となるように、複数の遮光プレート１７が配設されている。つまり、複数の遮光プレート１７は、一のスリット15hから被検査対象Ｓの表面に照射された光のうち、被検査対象Ｓの表面で正反射した光のみが特定の受光素子21s（対応する受光素子21s）に入射され、被検査対象Ｓの表面で乱反射した光はどの受光素子21sにも入射しないように配設されているのである。 Moreover, the plurality of light shielding plates 17 are arranged so that the specularly reflected light of the light that has passed through the slits 15h can enter the light receiving elements 21s of the photographing means 20, respectively. Specifically, when the surface of the inspection target S is a flat surface, the optical axis direction RL of the light that passes through one slit 15h and is reflected by the surface of the inspection target S, and one of the imaging means 20 A plurality of light shielding plates 17 are arranged so that the direction of the optical axis LA of the light receiving element 21s is coaxial. In other words, among the plurality of light shielding plates 17, only the light regularly reflected on the surface of the inspection target S among the light irradiated on the surface of the inspection target S from one slit 15 h is a specific light receiving element 21 s (corresponding light receiving element). The light incident on the element 21s) and diffusely reflected on the surface of the inspection object S is disposed so as not to enter any light receiving element 21s.
例えば、図３（Ｂ）に示すように、隣接する遮光プレート17A〜Cが設けられている場合を考える。なお、図３（Ｂ）において、線ＳＬは、光源１１と各スリット15hの中心（具体的には、各スリット15hの先端における開口の中心ＳＣ）とを結んだ線を示している。つまり、光源１１から放出されスリット15hを通過する光のうち、各スリット15hの中心ＳＣを通過して被測定対象Ｓに照射される光を示している。言い換えれば、各スリット15hから被測定対象Ｓに照射される照射光の光軸を示している。以下では、各スリット15hから被測定対象Ｓに照射される照射光の光軸を、単にスリット15hの光軸ＳＬという。 For example, consider a case where adjacent light shielding plates 17A to 17C are provided as shown in FIG. In FIG. 3B, a line SL indicates a line connecting the light source 11 and the center of each slit 15h (specifically, the center SC of the opening at the tip of each slit 15h). That is, among the light emitted from the light source 11 and passing through the slit 15h, the light irradiated to the measurement target S through the center SC of each slit 15h is shown. In other words, the optical axis of the irradiation light emitted from each slit 15h to the measurement target S is shown. Hereinafter, the optical axis of the irradiation light applied to the measurement target S from each slit 15h is simply referred to as the optical axis SL of the slit 15h.
図３（Ｂ）に示すように、光源１１から放出された光のうち、遮光プレート17A，17B間のスリット15haの光軸SL1の方向に沿った光Ｌａは、スリット15haを通過して被検査対象Ｓの表面に照射される。
一方、スリット15haの光軸SL1に対して傾斜した方向の光（図３（Ｂ）のＬｂ，Ｌｃ）は、遮光部17aによって遮られてスリット15haの開口から放出されず、被検査対象Ｓの表面に照射されない。
同様に、光源１１から放出された光のうち、遮光プレート17B，17C間のスリット15hbの光軸SL2の方向に沿った光だけがスリット15hbを通過して被検査対象Ｓの表面に照射される。
すると、遮光部材１５によって、各スリット15hからは、その光軸ＳＬの方向に沿った光のみが被検査対象Ｓの表面に照射光として照射されるので、この照射光が被検査対象Ｓの表面で反射された反射光の光軸ＲＬと光軸ＬＡとが同軸となる撮影手段２０の各受光素子21sにのみ、各スリット15hを通過した光が入射されることになるのである。
As shown in FIG. 3B, among the light emitted from the light source 11, the light La along the direction of the optical axis SL1 of the slit 15ha between the light shielding plates 17A and 17B passes through the slit 15ha and is inspected. The surface of the target S is irradiated.
On the other hand, the light in the direction inclined with respect to the optical axis SL1 of the slit 15ha (Lb and Lc in FIG. 3B) is blocked by the light shielding portion 17a and is not emitted from the opening of the slit 15ha, and The surface is not irradiated.
Similarly, only the light emitted from the light source 11 along the direction of the optical axis SL2 of the slit 15hb between the light shielding plates 17B and 17C passes through the slit 15hb and is irradiated on the surface of the inspection object S. .
Then, the light shielding member 15 irradiates only the light along the direction of the optical axis SL from the slits 15h onto the surface of the inspection object S as irradiation light. The light that has passed through each slit 15h is incident only on each light receiving element 21s of the photographing means 20 in which the optical axis RL of the reflected light reflected by the optical axis RL and the optical axis LA are coaxial.
なお、被検査対象Ｓの表面で乱反射した光が、「どの受光素子21sにも入射しない」とは、「どの受光素子21sにも全く入射しない」という意味ではなく、乱反射した光が偶然に受光素子21sに入射したとしても、欠陥の検出精度に影響を与えない程度の光量しか受光素子21sに入射しないという意味である。
また、「各スリット15hからは、その光軸ＳＬの方向に沿った光のみが被検査対象Ｓの表面に照射光として照射される」とは、「光軸ＳＬの方向に沿った光以外が全く被検査対象Ｓの表面に照射されない」という意味ではない。光軸ＳＬの方向に沿った光以外が各スリット15hを通過して被検査対象Ｓの表面に照射されてその光の反射光が偶然に受光素子21sに入射したとしても、受光素子21sに入射される光量が、欠陥の検出精度に影響を与えない程度の光量にしかならない、という意味である。
Note that the fact that the light irregularly reflected on the surface of the inspection object S does not enter any light receiving element 21s does not mean that it does not enter any light receiving element 21s, but the light irregularly reflected is received by chance. This means that even if it is incident on the element 21s, only a quantity of light that does not affect the defect detection accuracy is incident on the light receiving element 21s.
Further, “from each slit 15h, only the light along the direction of the optical axis SL is irradiated as the irradiation light on the surface of the object S to be inspected” means “other than the light along the direction of the optical axis SL. It does not mean that the surface of the inspection object S is not irradiated at all. Even if light other than the light along the direction of the optical axis SL passes through each slit 15h and is irradiated on the surface of the object S to be inspected, the reflected light of the light incidents on the light receiving element 21s accidentally. This means that the amount of light emitted is only a light amount that does not affect the detection accuracy of the defect.
投光手段１０が上記のごとき構成となっているので、本実施形態の欠陥検査装置１では、被検査対象Ｓの表面が平坦面である場合であっても、被検査対象Ｓの表面がヘアライン仕上げや梨地肌などの凹凸を有する表面であっても、その表面に形成された凹凸などの傷を検出することができる。 Since the light projecting means 10 is configured as described above, in the defect inspection apparatus 1 of the present embodiment, even if the surface of the inspection target S is a flat surface, the surface of the inspection target S is a hairline. Even on a surface having irregularities such as a finish or a textured surface, scratches such as irregularities formed on the surface can be detected.
例えば、被検査対象Ｓの表面が平坦面の場合には、表面に傷などがなければ、スリット15hを通過して被検査対象Ｓの表面に照射された光は、対応する受光素子21sに正反射光が入射される。つまり、ある程度強度の強い正反射光が対応する受光素子21sに入射される。
一方、表面に傷があれば、その表面に照射された光は乱反射するので、表面に傷がない場合に比べて、正反射光の強度が弱くなり、受光素子21sに入射される光の強度（つまり受光素子21sに入射される正反射光の強度）が低下する。
したがって、被検査対象Ｓの表面が平坦面の場合には、撮影手段２０によって撮影された画像では、傷が形成されている部分は周囲に比べて暗くなるので、画像に基づいて被検査対象Ｓの表面の傷等を検出することができる。
For example, when the surface of the inspection target S is a flat surface, if there is no scratch on the surface, the light irradiated to the surface of the inspection target S through the slit 15h is directly applied to the corresponding light receiving element 21s. Reflected light is incident. That is, specularly reflected light having a certain intensity is incident on the corresponding light receiving element 21s.
On the other hand, if there is a scratch on the surface, the light irradiated on the surface is diffusely reflected, so that the intensity of the specular reflection light is weaker than the case where there is no scratch on the surface, and the intensity of the light incident on the light receiving element 21s. That is, the intensity of the specularly reflected light incident on the light receiving element 21s is reduced.
Therefore, in the case where the surface of the inspection target S is a flat surface, in the image captured by the imaging unit 20, the portion where the scratch is formed is darker than the surroundings, and therefore the inspection target S based on the image. It is possible to detect surface scratches and the like.
また、被検査対象Ｓの表面がヘアライン仕上げや梨地肌などの凹凸を有する面である場合には、表面に傷などがなければ、スリット15hを通過して被検査対象Ｓの表面に照射された光は、被検査対象Ｓの表面で乱反射され、対応する受光素子21sに入射される光（正反射光）は弱くなる。
一方、表面に傷が形成された場合、その部分が略平坦面になる。すると、略平坦面となった部分に照射された光は正反射するので、表面に傷がない場合に比べて、受光素子21sに入射される光の強度が増加する。
したがって、被検査対象Ｓの表面がヘアライン仕上げや梨地肌などの凹凸を有する面である場合には、撮影手段２０によって撮影された画像では、傷が形成されている部分は周囲に比べて明るくなるので、画像に基づいて被検査対象Ｓの表面の傷等を検出することができる。
Further, when the surface of the inspection target S is a surface having irregularities such as a hairline finish or a satin surface, the surface of the inspection target S is irradiated through the slit 15h if there is no scratch on the surface. The light is irregularly reflected on the surface of the inspection object S, and the light (regular reflection light) incident on the corresponding light receiving element 21s becomes weak.
On the other hand, when a scratch is formed on the surface, the portion becomes a substantially flat surface. Then, since the light irradiated to the substantially flat surface is regularly reflected, the intensity of the light incident on the light receiving element 21s is increased as compared with the case where the surface is not damaged.
Therefore, when the surface of the inspection target S is a surface having irregularities such as a hairline finish or a satin surface, in the image photographed by the photographing means 20, the portion where the scratch is formed becomes brighter than the surroundings. Therefore, it is possible to detect a scratch on the surface of the inspection object S based on the image.
（遮光プレート１７について）
なお、遮光プレート１７は、板状の遮光部17aの表面に反射防止処理が施されていることが好ましい。
(About shading plate 17)
The light shielding plate 17 is preferably subjected to antireflection treatment on the surface of the plate-shaped light shielding portion 17a.
遮光部17aの表面で光が反射すると、その反射光もスリット15hを通過して被検査対象Ｓの表面に照射される。かかる光が被検査対象Ｓの表面に照射されると、その光があたかも正反射光（擬似正反射光）のように撮影手段２０の受光素子21sに入射する可能性がある。擬似正反射光とは、被検査対象Ｓの表面で反射された光のうち、その光の走行方向がたまたま受光素子21sの光軸ＬＡと同軸となったものを意味している。
かかる擬似正反射光が受光素子21sに入射されると、この擬似正反射光の強度の分だけ、受光素子21sに入射される光の強度が強くなる。
When light is reflected on the surface of the light shielding part 17a, the reflected light also passes through the slit 15h and is irradiated on the surface of the inspection object S. When such light is irradiated on the surface of the inspection object S, the light may be incident on the light receiving element 21s of the photographing unit 20 as if it were specularly reflected light (pseudo specularly reflected light). The pseudo regular reflection light means light out of the light reflected from the surface of the inspection object S, whose traveling direction happens to be coaxial with the optical axis LA of the light receiving element 21s.
When such pseudo regular reflection light is incident on the light receiving element 21s, the intensity of light incident on the light receiving element 21s is increased by the intensity of the pseudo regular reflection light.
すると、被検査対象Ｓの表面がヘアライン仕上げや梨地肌などの凹凸を有する面である場合、被検査対象Ｓの表面においてその受光素子21sが観察している部分に傷などの欠陥が存在していると誤って判断される可能性がある。
また、被検査対象Ｓの表面が平坦面である場合であれば、被検査対象Ｓの表面においてその受光素子21sの観察している部分に傷があったとしても、その部分に傷がないと誤って判断される可能性がある。つまり、被検査対象Ｓの表面欠陥の誤検出や見過ごしが生じる可能性がある。
したがって、遮光部17aの表面で反射してスリット15hを通過する光に起因する、被検査対象Ｓの表面における乱反射による検査ミスや欠陥検出精度の低下を防止する上では、遮光プレート１７は、板状の遮光部17aの表面に反射防止処理が施されていることが好ましい。
なお、板状の遮光部17aの表面に施す反射防止処理は、例えば、艶消塗装やエンボス加工などの方法を採用することができるが、とくに限定されない。
Then, when the surface of the inspection target S is a surface having irregularities such as a hairline finish or a satin surface, there is a defect such as a scratch on the portion of the surface of the inspection target S observed by the light receiving element 21s. May be mistakenly determined to be.
Further, if the surface of the inspection target S is a flat surface, even if there is a scratch on the portion of the surface of the inspection target S observed by the light receiving element 21s, there is no scratch on that portion. There is a possibility of being judged erroneously. That is, there is a possibility that a surface defect of the inspection target S is erroneously detected or overlooked.
Therefore, in order to prevent an inspection error due to irregular reflection on the surface of the inspection target S caused by light reflected on the surface of the light shielding portion 17a and passing through the slit 15h and a decrease in defect detection accuracy, the light shielding plate 17 is a plate. It is preferable that an antireflection treatment is applied to the surface of the light shielding portion 17a.
The antireflection treatment applied to the surface of the plate-shaped light shielding portion 17a can employ, for example, a method such as matting or embossing, but is not particularly limited.
（遮光プレート１７の取り付けについて）
遮光プレート１７は、撮影手段２０、被検査対象Ｓの表面および投光手段１０の相対的な位置が一定であれば、遮光プレート１７はその固定部17bがフレーム１６に固定されていたり、固定部17bをフレーム１６に固定すると各遮光プレート１７の遮光部17aがフレーム１６の軸方向に対してそれぞれ所定の角度となるようになっていたりしてもよい。例えば、フレーム１６に所定の角度のスリットや孔を設けて、そのスリットや孔に固定部17を固定したり取り付けたりすると、各遮光プレート１７の遮光部17aの表面がフレーム１６の軸方向に対してそれぞれ所定の角度となるように形成してもよい。言い換えれば、撮影手段２０の受光素子21sの光軸ＬＡ方向（つまり、受光素子21sの光軸ＬＡを被検査対象Ｓの表面で正反射させた方向）に対する遮光部17aの表面の傾斜角度が所定の角度となるように形成してもよい。
(Attaching the light shielding plate 17)
As long as the relative positions of the imaging unit 20, the surface of the object S to be inspected, and the light projecting unit 10 are constant, the light shielding plate 17 has a fixed portion 17 b fixed to the frame 16 or a fixed portion. When 17b is fixed to the frame 16, the light shielding portion 17a of each light shielding plate 17 may be at a predetermined angle with respect to the axial direction of the frame 16. For example, when the frame 16 is provided with slits or holes of a predetermined angle, and the fixing part 17 is fixed or attached to the slits or holes, the surface of the light shielding part 17a of each light shielding plate 17 is in the axial direction of the frame 16. Each of them may be formed at a predetermined angle. In other words, the inclination angle of the surface of the light shielding portion 17a with respect to the direction of the optical axis LA of the light receiving element 21s of the photographing means 20 (that is, the direction in which the optical axis LA of the light receiving element 21s is regularly reflected by the surface of the inspection object S) is predetermined. You may form so that it may become this angle.
しかし、フレーム１６の軸方向に対して、遮光プレート１７の遮光部17aの角度（つまり、撮影手段２０の受光素子21sの光軸ＬＡ方向に対する遮光部17a表面の傾斜角度）が調整できるようになっていることが好ましい。この場合、被検査対象Ｓが変更された場合や最適な投光距離を検討する場合などに、正反射光のみが撮影手段２０の受光素子21sに入射されるように調整することができる、という利点が得られる。 However, the angle of the light shielding portion 17a of the light shielding plate 17 with respect to the axial direction of the frame 16 (that is, the inclination angle of the surface of the light shielding portion 17a with respect to the optical axis LA direction of the light receiving element 21s of the photographing means 20) can be adjusted. It is preferable. In this case, it can be adjusted so that only specularly reflected light is incident on the light receiving element 21s of the imaging means 20 when the inspection target S is changed or when an optimum projection distance is examined. Benefits are gained.
例えば、固定部17bの基端に貫通穴を設け、フレーム１６にネジ穴を形成しておく。すると、固定部17bの貫通穴にボルトを通して、ボルトをフレーム１６のネジ穴に螺合して締め付ければ、固定部17bをフレーム１６に固定することができる。しかも、かかる構造の場合、ボルトを緩めた状態では、固定部17bを、その基端（つまり、ボルト）を支点として揺動させることができるので、フレーム１６に対する固定部17bの揺動角度、言い換えれば、遮光部17aの表面の角度を調整することができる。 For example, a through hole is provided at the base end of the fixing portion 17b, and a screw hole is formed in the frame 16. Then, the fixing portion 17b can be fixed to the frame 16 by passing the bolt through the through hole of the fixing portion 17b and screwing the bolt into the screw hole of the frame 16 and tightening. Moreover, in the case of such a structure, when the bolt is loosened, the fixing portion 17b can be swung with its base end (that is, the bolt) as a fulcrum, so that the swing angle of the fixing portion 17b with respect to the frame 16, in other words, In this case, the angle of the surface of the light shielding part 17a can be adjusted.
また、遮光プレート１７の遮光部17aの角度を調整できるようにした場合、装置の作動中に遮光プレート１７の傾きがズレる可能性がある。かかるズレを防ぐ上では、フレーム１６によって遮光プレート１７の固定部17bにおける軸方向の両端を保持固定できる構造とすることが好ましい。
また、固定部17bを遮光部17aの一辺に設ける場合を説明したが、遮光部17aが矩形の場合には、固定部17bを互いに対向する一対の辺に設けてもよい。この場合には、遮光部17aの両端が固定されるので、遮光プレート１７の傾きのズレをより確実に防ぐことができる。
In addition, when the angle of the light shielding portion 17a of the light shielding plate 17 can be adjusted, the inclination of the light shielding plate 17 may be shifted during the operation of the apparatus. In order to prevent such a shift, it is preferable to have a structure in which both ends of the fixing portion 17b of the light shielding plate 17 in the axial direction can be held and fixed by the frame 16.
Further, the case where the fixing portion 17b is provided on one side of the light shielding portion 17a has been described, but when the light shielding portion 17a is rectangular, the fixing portion 17b may be provided on a pair of opposite sides. In this case, since both ends of the light shielding part 17a are fixed, it is possible to prevent the deviation of the inclination of the light shielding plate 17 more reliably.
（遮光プレート１７の調整方法）
フレーム１６の軸方向に対して、遮光プレート１７の遮光部17aの角度が調整できるようになっている場合、各スリット15hの光軸ＳＬに沿って各スリット15hを通過した光の正反射光を撮影手段２０の各受光素子21sに入光させるために、遮光プレート１７の遮光部17aの傾きを調整することが必要である。
例えば、以下のごとき方向によって遮光プレート１７の遮光部17aの傾きを調整することができる。
(How to adjust the light-shielding plate 17)
When the angle of the light shielding part 17a of the light shielding plate 17 can be adjusted with respect to the axial direction of the frame 16, the specularly reflected light of the light passing through each slit 15h along the optical axis SL of each slit 15h is reflected. In order to make each light receiving element 21s of the photographing means 20 enter the light, it is necessary to adjust the inclination of the light shielding portion 17a of the light shielding plate 17.
For example, the inclination of the light shielding portion 17a of the light shielding plate 17 can be adjusted according to the following direction.
図４（Ａ）に示すように、まず、被検査対象Ｓを検査する状態において、撮影手段２０のレンズ２２の主点Ｈが配置される位置に、糸STの基端を設置する。
一方、投光手段１０は、本来設置される位置に対して被検査対象Ｓを挟んで対称の位置に設置する。
上記状態となると、糸ＳＴの先端部を各遮光プレート１７の取り付け位置にあわせて、糸ＳＴにたるみがない状態（張った状態）とする。
As shown in FIG. 4A, first, in the state in which the inspection object S is inspected, the base end of the thread ST is installed at the position where the principal point H of the lens 22 of the photographing means 20 is arranged.
On the other hand, the light projecting means 10 is installed at a symmetrical position with the object S to be inspected with respect to the originally installed position.
If it will be in the above-mentioned state, it will be in the state (tensioned state) where there is no slack in yarn ST according to the attachment position of each shading plate 17 at the tip part of yarn ST.
そして、図４（Ｂ）に示すように、各遮光プレート１７を、その遮光部17aの表面が糸ＳＴの軸方向と一致するように配置する。すると、各遮光プレート１７の表面間に形成されるスリット15hの光軸ＳＬの軸方向を撮影手段２０の各受光素子21sの軸方向と一致させることができる。 Then, as shown in FIG. 4B, each light shielding plate 17 is disposed so that the surface of the light shielding portion 17a coincides with the axial direction of the yarn ST. Then, the axial direction of the optical axis SL of the slit 15 h formed between the surfaces of the respective light shielding plates 17 can be matched with the axial direction of the respective light receiving elements 21 s of the photographing means 20.
最後に、投光手段１０を検査の際に設置される位置に配置すれば、各スリット15hの中心ＳＣを通過した光の被検査対象Ｓの表面における正反射光の光軸ＲＬを、撮影手段２０の各受光素子21sの光軸ＬＡと同軸にすることができる。 Finally, if the light projecting means 10 is arranged at a position where it is installed at the time of inspection, the optical axis RL of the specularly reflected light on the surface of the inspection object S of the light passing through the center SC of each slit 15h is taken as the imaging means. It can be coaxial with the optical axis LA of each of the 20 light receiving elements 21s.
なお、遮光プレート１７の遮光部17aの取り付け角度を調整する方法はとくに限定されない。例えば、上記例では、糸ＳＴを利用したが、レーザ光を使用して調整することも可能である。レーザ光を使用して調整する場合には、被検査対象Ｓにおける検査位置（図１および図２ではＤＬの位置）に鏡等の反射部材を設けておき、この反射部材に対して撮影手段２０のレンズ２２の主点Ｈの位置からレーザ光等を照射する。すると、レーザ光は、受光素子21sの光軸ＬＡと同軸な光線となるので、このレーザ光と各遮光プレート１７の遮光部17aの表面とが平行となるように調整する。すると、各スリット15hの中心ＳＣを通過した光の被検査対象Ｓの表面における正反射光の光軸ＲＬを、撮影手段２０の各受光素子21sの光軸ＬＡと同軸にすることができる。 The method for adjusting the mounting angle of the light shielding portion 17a of the light shielding plate 17 is not particularly limited. For example, in the above example, the yarn ST is used, but adjustment using a laser beam is also possible. When adjustment is performed using laser light, a reflecting member such as a mirror is provided at the inspection position (the DL position in FIGS. 1 and 2) in the inspection object S, and the imaging means 20 is provided for this reflecting member. A laser beam or the like is irradiated from the position of the principal point H of the lens 22. Then, since the laser light becomes a light beam coaxial with the optical axis LA of the light receiving element 21s, the laser light and the surface of the light shielding portion 17a of each light shielding plate 17 are adjusted to be parallel. Then, the optical axis RL of the specularly reflected light on the surface of the inspection object S of the light passing through the center SC of each slit 15h can be made coaxial with the optical axis LA of each light receiving element 21s of the photographing means 20.
（他の例）
上記例では、遮光プレート１７を設けて、スリット15hを形成する場合を説明したが、スリット15hを形成する方法はとくに限定されない。例えば、板状の部材にスリット状の貫通穴を形成して、その貫通孔の開口の中心と光源とを結ぶ線が、上述したような配置となるようにしても、同様の効果を得ることができる。この場合、板状の部材の厚さが薄くなると、貫通穴を通過する光において、その光軸（図３（Ｂ）のＳＬ参照）に対して傾いた光が含まれる割合が多くなる。したがって、かかる構成を採用する場合には、上述した遮光プレート１７のように、光軸（図３（Ｂ）のＳＬ参照）に対して傾いた光をある程度制限する構成を採用することが好ましい。例えば、板状の部材の厚さを厚くすれば、貫通孔の内壁を遮光プレート１７のように機能させることができる。
(Other examples)
In the above example, the case where the light shielding plate 17 is provided to form the slit 15h has been described, but the method for forming the slit 15h is not particularly limited. For example, even if a slit-like through hole is formed in a plate-like member and the line connecting the center of the opening of the through hole and the light source is arranged as described above, the same effect can be obtained. Can do. In this case, when the thickness of the plate-like member is reduced, the ratio of the light that passes through the through hole includes light that is inclined with respect to the optical axis (see SL in FIG. 3B). Therefore, when such a configuration is employed, it is preferable to employ a configuration that restricts light inclined to the optical axis (refer to SL in FIG. 3B) to some extent, such as the light shielding plate 17 described above. For example, if the thickness of the plate-like member is increased, the inner wall of the through hole can function as the light shielding plate 17.
（実験結果）
本発明の欠陥検査装置の効果を確認するために、遮光部材を設けた場合（実施例）と設けない場合（比較例）について、投光手段から放出される光の状況を比較した。
(Experimental result)
In order to confirm the effect of the defect inspection apparatus of the present invention, the situation of the light emitted from the light projecting means was compared between the case where the light shielding member was provided (Example) and the case where the light shielding member was not provided (Comparative Example).
光源は、実施例、比較例とも同じ光源を使用した。
使用した光源は、一般的な棒状の蛍光灯をケース内に収容して、ケースの開口から光を放出する構造を有するものであり、実施例、比較例とも、ケースの開口の前面に遮光部材を配置した。
遮光部材は、上述した遮光プレートの調整方法によって、遮光プレートの表面を延長した面が投光手段の上方に設けられた焦点を通過するように配設した。
なお、遮光プレートには、表面に黒アルマイト加工を行って、表面での反射が少なくなるようにした板材を使用した。
The same light source was used for the light source in both the examples and comparative examples.
The light source used has a structure in which a general rod-shaped fluorescent lamp is accommodated in a case and light is emitted from the opening of the case. In both the example and the comparative example, a light shielding member is provided in front of the opening of the case. Arranged.
The light shielding member was arranged so that the surface obtained by extending the surface of the light shielding plate passed through the focal point provided above the light projecting means by the above-described method for adjusting the light shielding plate.
In addition, the light-shielding plate used the board | plate material which performed the black alumite process on the surface so that reflection on the surface might decrease.
実験結果を図５に示す。
図５（Ａ）に示すように、比較例では、投光手段から放出される光は、投光手段の軸方向（図５（Ａ）では左右方向）に沿って延びた長方形状になっていることが確認できる。
一方、図５（Ｂ）に示すように、実施例では、投光手段から放出される光は、投光手段の軸方向を底辺とする略三角形状になっており、スリットを通過した光が焦点の方向に向かうように、光の照射方向を調整できていることが確認できる。
The experimental results are shown in FIG.
As shown in FIG. 5A, in the comparative example, the light emitted from the light projecting means has a rectangular shape extending along the axial direction of the light projecting means (the left-right direction in FIG. 5A). It can be confirmed.
On the other hand, as shown in FIG. 5B, in the embodiment, the light emitted from the light projecting means has a substantially triangular shape with the axial direction of the light projecting means as the base, and the light passing through the slit is It can be confirmed that the light irradiation direction can be adjusted so as to be directed toward the focal point.
本発明の欠陥検査装置は、表面に細かな凹凸を有する、梨地肌やヘアライン等を有する部材の表面検査に適している。 The defect inspection apparatus of the present invention is suitable for surface inspection of a member having fine unevenness on the surface and having a textured surface, a hairline, or the like.
１ 欠陥検査装置
１０ 投光手段
１１ 光源
１５ 遮光部材
１５ｈ スリット
１７ 遮光プレート
２０ 撮影手段
２１ｓ 受光素子
Ｓ 被検査対象
DESCRIPTION OF SYMBOLS 1 Defect inspection apparatus 10 Light projection means 11 Light source 15 Light-shielding member 15h Slit 17 Light-shielding plate 20 Imaging means 21s Light-receiving element S Inspection object
Claims (5)
前記被検査対象に向けて光を放出する投光手段と、
前記被検査対象の表面において反射した光を受光する受光部を備えた撮影手段と、を備えており、
前記投光手段は、
光源と、
該光源と前記被検査対象との間に設けられた、該光源から前記被検査対象に照射される光を制限する遮光部材と、を備えており、
該遮光部材は、
前記光源から放出される光を通過させるスリットを備えており、
該スリットは、
前記被検査対象の表面が平坦面である場合において、該スリットを通過して前記被検査対象の表面で反射する光の光軸方向と前記撮影手段の受光部の光軸方向とが同軸となるように形成されている
ことを特徴とする欠陥検査装置。 A device for inspecting a surface defect to be inspected,
A light projecting means for emitting light toward the inspection object;
An imaging means including a light receiving unit that receives light reflected from the surface of the inspection target; and
The light projecting means is
A light source;
A light-shielding member that is provided between the light source and the object to be inspected and restricts light emitted from the light source to the object to be inspected.
The light shielding member is
Comprising a slit through which light emitted from the light source passes,
The slit
When the surface of the inspection object is a flat surface, the optical axis direction of the light that passes through the slit and is reflected by the surface of the inspection object is coaxial with the optical axis direction of the light receiving unit of the imaging unit. A defect inspection apparatus characterized by being formed as described above.
前記遮光部材は、複数のスリットを備えており、
該複数のスリットは、
前記被検査対象の表面が平坦面である場合において、一のスリットを通過して前記被検査対象の表面で反射する光の光軸方向と、前記撮影手段の複数の受光部における一の受光部の光軸方向とが同軸となるように、それぞれ形成されている
ことを特徴とする請求項１記載の欠陥検査装置。 The photographing means includes a plurality of light receiving units,
The light shielding member includes a plurality of slits,
The plurality of slits are
When the surface of the object to be inspected is a flat surface, the optical axis direction of the light that passes through one slit and is reflected by the surface of the object to be inspected, and one light receiving unit in the plurality of light receiving units of the imaging unit The defect inspection apparatus according to claim 1, wherein the defect inspection apparatus is formed so as to be coaxial with each other.
該複数の遮光プレートは、
隣接する遮光プレート同士が、互いに間隔を開けた状態で配設されている
ことを特徴とする請求項２記載の欠陥検査装置。 The light shielding member has a plurality of light shielding plates,
The plurality of light shielding plates are:
The defect inspection apparatus according to claim 2, wherein the adjacent light shielding plates are arranged in a state of being spaced apart from each other.
その表面に反射防止処理が施されており、
隣接する遮光プレート同士が、反射防止処理が施された表面同士を対向させた状態となるように配設されている
ことを特徴とする請求項３記載の欠陥検査装置。 The plurality of light shielding members are:
Anti-reflective treatment is given to the surface,
The defect inspection apparatus according to claim 3, wherein the adjacent light shielding plates are arranged so that the surfaces subjected to the antireflection treatment face each other.
前記撮影手段の受光部の光軸方向に対する表面の傾斜角度が調整可能に設けられている
ことを特徴とする請求項３または４記載の欠陥検査装置。
The plurality of light shielding plates are:
5. The defect inspection apparatus according to claim 3, wherein an inclination angle of a surface with respect to an optical axis direction of a light receiving unit of the photographing unit is adjustable.
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| JP6039119B1 (en) * | 2016-02-23 | 2016-12-07 | 株式会社ヒューテック | Defect inspection equipment |
| JP6228695B1 (en) * | 2017-02-27 | 2017-11-08 | 株式会社ヒューテック | Defect inspection equipment |
| JP2018141644A (en) * | 2017-02-27 | 2018-09-13 | 株式会社ヒューテック | Defect inspection device |
| JPWO2020183616A1 (en) * | 2019-03-12 | 2020-09-17 | ||
| WO2022172629A1 (en) * | 2021-02-10 | 2022-08-18 | Ｔｏｗａ株式会社 | Inspection device, resin molding device, cutting device, method for manufacturing resin molded article, and method for manufacturing cut article |
| JP2022122512A (en) * | 2021-02-10 | 2022-08-23 | Ｔｏｗａ株式会社 | Inspection device, resin molding device, cutting device, method for manufacturing resin molding, and method for manufacturing cut article |
| TWI796103B (en) * | 2021-02-10 | 2023-03-11 | 日商Ｔｏｗａ股份有限公司 | Inspection device, resin molding device, cutting device, method of manufacturing resin molded product, and method of manufacturing cut product |
| KR20220155703A (en) * | 2021-05-17 | 2022-11-24 | 주식회사 진성티이씨 | Seal Inspection Method |
| KR20220155702A (en) * | 2021-05-17 | 2022-11-24 | 주식회사 진성티이씨 | Seal Inspection device |
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