TWI795615B - Resin molding device and method for manufacturing resin molded product - Google Patents

Resin molding device and method for manufacturing resin molded product Download PDF

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TWI795615B
TWI795615B TW108144207A TW108144207A TWI795615B TW I795615 B TWI795615 B TW I795615B TW 108144207 A TW108144207 A TW 108144207A TW 108144207 A TW108144207 A TW 108144207A TW I795615 B TWI795615 B TW I795615B
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pressure
clamping
resin
detection value
mold
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TW108144207A
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Chinese (zh)
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TW202021771A (en
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小河冬彦
奥西祥人
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日商Towa股份有限公司
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/02Transfer moulding, i.e. transferring the required volume of moulding material by a plunger from a "shot" cavity into a mould cavity
    • B29C45/021Plunger drives; Pressure equalizing means for a plurality of transfer plungers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/17Component parts, details or accessories; Auxiliary operations
    • B29C45/76Measuring, controlling or regulating
    • B29C45/77Measuring, controlling or regulating of velocity or pressure of moulding material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/17Component parts, details or accessories; Auxiliary operations
    • B29C45/76Measuring, controlling or regulating
    • B29C45/7653Measuring, controlling or regulating mould clamping forces
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C2945/00Indexing scheme relating to injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould
    • B29C2945/76Measuring, controlling or regulating
    • B29C2945/76494Controlled parameter
    • B29C2945/76498Pressure

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Injection Moulding Of Plastics Or The Like (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)

Abstract

The present invention improves a resin molded product by reducing the influence of back pressure due to transfer pressure. The present invention includes: a mold clamping mechanism, clamping a molding die and a molding die; a plunger driving mechanism, moving a plunger within a pot of the molding die; a clamp pressure detection unit, detecting a clamp pressure on a molding die caused by the mold clamping mechanism; a transfer pressure detection unit, detecting a transfer pressure on a resin caused by the plunger driving mechanism; and a control unit, controlling the mold clamping mechanism based on the clamp pressure detected by the clamp pressure detection unit and the transfer pressure detected by the transfer pressure detection unit, wherein when the detected transfer pressure rises, the control unit controls the mold clamping mechanism so that the clamp pressure rises relative to the transfer pressure, and when the detected transfer pressure falls, the control unit controls the mold clamping mechanism so that the clamp pressure becomes a predetermined value regardless of the transfer pressure.

Description

樹脂成形裝置以及樹脂成形品的製造方法Resin molding device and method for manufacturing resin molded product

本發明是有關於一種樹脂成形裝置以及樹脂成形品的製造方法。The present invention relates to a resin molding device and a method for manufacturing a resin molded product.

關於進行傳遞模塑(transfer mold)法的樹脂成形的樹脂成形裝置,存在下述樹脂成形裝置,即:利用下模與上模夾緊被成形品,利用柱塞(plunger)從形成於下模的料筒(pot)壓送樹脂,對形成在下模與上模之間的模腔(cavity)供給樹脂而進行樹脂密封。Regarding the resin molding apparatus for resin molding by transfer molding, there is a resin molding apparatus in which a molded product is clamped between a lower mold and an upper mold, and a molded product is formed from the lower mold by a plunger. The resin is pressure-fed from the barrel (pot), and the resin is supplied to the cavity (cavity) formed between the lower mold and the upper mold to perform resin sealing.

所述樹脂成形裝置中,在樹脂成形時,由柱塞所致的樹脂的注入壓力(傳遞壓力)作為背壓(back pressure)而向打開模具的方向作用,因此有可能作用於被成形品的夾緊壓力變化,產生樹脂毛邊。另外,也想到考慮背壓而將夾緊壓力相應地設定得大,但若如此則也有可能損傷被成形品。In the above-mentioned resin molding device, during resin molding, the injection pressure (transmission pressure) of the resin by the plunger acts in the direction of opening the mold as a back pressure (back pressure), so it may act on the molded product. Clamping pressure changes, resulting in resin burrs. In addition, it is conceivable to set the clamping pressure relatively high in consideration of the back pressure, but this may damage the molded product.

因此,專利文獻1所示的樹脂成形裝置構成為在樹脂成形時,根據由柱塞所致的樹脂的注入壓力(傳遞壓力)而控制夾緊壓力。 [現有技術文獻] [專利文獻]Therefore, the resin molding apparatus disclosed in Patent Document 1 is configured to control the clamping pressure in accordance with the injection pressure (transmission pressure) of the resin by the plunger during resin molding. [Prior art literature] [Patent Document]

[專利文獻1]日本專利特開平11-58435號公報[Patent Document 1] Japanese Patent Laid-Open No. 11-58435

[發明所要解決的問題] 但是,所述樹脂成形裝置中,僅根據注入壓力(傳遞壓力)來控制夾緊壓力,在樹脂成形時在傳遞壓力下降的情況下夾緊壓力也下降,難以解決背壓的問題。[Problem to be Solved by the Invention] However, in the above-mentioned resin molding apparatus, the clamping pressure is controlled only by the injection pressure (transmission pressure), and when the transmission pressure drops during resin molding, the clamping pressure also drops, and it is difficult to solve the problem of back pressure.

因此,本發明是為了解決所述問題點而成,且其主要課題在於減小由傳遞壓力所致的背壓的影響而改良樹脂成形品。 [解決問題的技術手段]Therefore, the present invention is made to solve the above-mentioned problems, and its main subject is to reduce the influence of the back pressure due to the transmission pressure and improve the resin molded product. [Technical means to solve the problem]

也就是說,本發明的樹脂成形裝置的特徵在於包括:合模機構,將成形模合模;柱塞驅動機構,使柱塞在所述成形模的料筒內移動;夾緊壓力檢測部,檢測所述合模機構對所述成形模的夾緊壓力;傳遞壓力檢測部,檢測所述柱塞驅動機構對樹脂的傳遞壓力;以及控制部,基於所述夾緊壓力檢測部所檢測出的夾緊壓力及所述傳遞壓力檢測部所檢測出的傳遞壓力來控制所述合模機構,所述控制部在所述檢測出的傳遞壓力上升時,以所述夾緊壓力對應於所述傳遞壓力而上升的方式控制所述合模機構,且在所述檢測出的傳遞壓力下降時,以所述夾緊壓力與所述傳遞壓力無關而成為規定值的方式控制所述合模機構。 [發明的效果]That is, the resin molding device of the present invention is characterized in that it includes: a mold clamping mechanism for clamping the molding mold; a plunger driving mechanism for moving the plunger in the barrel of the molding mold; a clamping pressure detection unit, detecting the clamping pressure of the molding die by the mold clamping mechanism; a transmission pressure detecting unit detecting the transmission pressure of the plunger driving mechanism to the resin; and a control unit based on the clamping pressure detected by the clamping pressure detecting unit. The clamping pressure and the transmission pressure detected by the transmission pressure detection unit control the mold clamping mechanism, and the control unit adjusts the clamping pressure to the transmission pressure when the detected transmission pressure rises. The mold clamping mechanism is controlled so that the pressure increases, and the mold clamping mechanism is controlled so that the clamping pressure becomes a predetermined value regardless of the transmission pressure when the detected transmission pressure decreases. [Effect of the invention]

根據如此構成的本發明,能夠減小由傳遞壓力所致的背壓的影響而改良樹脂成形品。According to the present invention thus constituted, it is possible to improve the resin molded product by reducing the influence of the back pressure due to the transmission pressure.

接下來,舉例對本發明進行更詳細說明。但是,本發明不受以下說明的限定。Next, the present invention will be described in more detail with examples. However, the present invention is not limited by the following description.

如上文所述,本發明的樹脂成形裝置的特徵在於包括:合模機構,將成形模合模;柱塞驅動機構,使柱塞在所述成形模的料筒內移動;夾緊壓力檢測部,檢測所述合模機構對所述成形模的夾緊壓力;傳遞壓力檢測部,檢測所述柱塞驅動機構對樹脂的傳遞壓力;以及控制部,基於所述夾緊壓力檢測部所檢測出的夾緊壓力及所述傳遞壓力檢測部所檢測出的傳遞壓力來控制所述合模機構,所述控制部在所述檢測出的傳遞壓力上升時,以所述夾緊壓力對應於所述傳遞壓力而上升的方式控制所述合模機構,且在所述檢測出的傳遞壓力下降時,以所述夾緊壓力與所述傳遞壓力無關而成為規定值的方式控制所述合模機構。As described above, the resin molding device of the present invention is characterized in that it includes: a mold clamping mechanism for clamping the forming mold; a plunger driving mechanism for moving the plunger in the barrel of the forming mold; a clamping pressure detection unit , detecting the clamping pressure of the forming mold by the mold clamping mechanism; the transmission pressure detection part, detecting the transmission pressure of the plunger driving mechanism to the resin; and the control part, based on the clamping pressure detection part detected The mold clamping mechanism is controlled by the clamping pressure and the transmission pressure detected by the transmission pressure detection part. When the detected transmission pressure rises, the control part uses the clamping pressure corresponding to the The mold clamping mechanism is controlled so that the transmission pressure increases, and when the detected transmission pressure decreases, the clamping pressure is controlled so that it becomes a predetermined value regardless of the transmission pressure.

若為此種本發明的樹脂成形裝置,則在所檢測出的傳遞壓力上升時,以夾緊壓力對應於所述傳遞壓力而上升的方式控制合模機構,且在所檢測出的傳遞壓力下降時,以夾緊壓力與所述傳遞壓力無關而成為規定值的方式控制合模機構,因此夾緊壓力不會對應於傳遞壓力的下降而下降,能夠減小由傳遞壓力所致的背壓的影響而改良樹脂成形品。According to such a resin molding apparatus of the present invention, when the detected transmission pressure rises, the clamping mechanism is controlled so that the clamping pressure rises corresponding to the transmission pressure, and when the detected transmission pressure decreases, the clamping mechanism is controlled. In this case, the mold clamping mechanism is controlled so that the clamping pressure becomes a predetermined value regardless of the transmission pressure, so that the clamping pressure does not decrease in response to a drop in the transmission pressure, and the amount of back pressure caused by the transmission pressure can be reduced. Improve resin molded products by influence.

具體而言,所述控制部理想的是在所述檢測出的傳遞壓力下降時,以所述夾緊壓力與所述傳遞壓力無關而成為一定值的方式控制所述合模機構。若為所述構成,則能夠使合模機構的控制簡單。Specifically, the control unit preferably controls the mold clamping mechanism so that the clamping pressure becomes a constant value regardless of the transmission pressure when the detected transmission pressure drops. According to the above configuration, the control of the mold clamping mechanism can be simplified.

此外,所述控制部也可在所述檢測出的傳遞壓力下降時,以所述夾緊壓力與所述傳遞壓力無關而成為以規定關係變化的值的方式控制所述合模機構。此處,關於以規定關係變化的值,例如可想到夾緊壓力為直線性或階段性地單調增加或單調減少的值。In addition, the control unit may control the mold clamping mechanism so that the clamping pressure becomes a value that changes in a predetermined relationship regardless of the transmission pressure when the detected transmission pressure drops. Here, regarding the value that changes in a predetermined relationship, for example, a value in which the clamping pressure monotonically increases or decreases linearly or stepwise is conceivable.

作為具體的控制形態,理想的是所述控制部將所述傳遞壓力的前次檢測值與所述傳遞壓力的本次檢測值進行比較,在所述本次檢測值小於所述前次檢測值時,以所述夾緊壓力不下降的方式控制所述合模機構。此處,控制部也可通過算出傳遞壓力的前次檢測值與本次檢測值的差量,從而比較前次檢測值與本次檢測值。As a specific control form, it is desirable that the control unit compares the previous detection value of the delivery pressure with the current detection value of the transmission pressure, and when the current detection value is smaller than the previous detection value , the clamping mechanism is controlled so that the clamping pressure does not drop. Here, the control unit may compare the previous detection value and the current detection value by calculating the difference between the previous detection value and the current detection value of the delivery pressure.

另外,使用上文所述的樹脂成形裝置的樹脂成形品的製造方法也為本發明的一形態。Moreover, the manufacturing method of the resin molded article using the above-mentioned resin molding apparatus is also an aspect of this invention.

<本發明的一實施方式> 以下,參照圖式對本發明的樹脂成形裝置的一實施方式進行說明。此外,以下所示的任一圖中,均為了容易地理解而適當省略或誇張地示意性描畫。<An embodiment of the present invention> Hereinafter, one embodiment of the resin molding apparatus of the present invention will be described with reference to the drawings. In addition, in any of the drawings shown below, for easy understanding, they are appropriately omitted or exaggerated and schematically drawn.

<樹脂成形裝置100的總體構成> 本實施方式的樹脂成形裝置100為使用傳遞模塑法的樹脂成形裝置。此樹脂成形裝置例如對安裝有半導體晶片的基板進行樹脂成形,且使用呈圓柱狀的片(tablet)狀的熱硬化性樹脂(以下稱為「樹脂片」)作為樹脂材料。此外,「基板」可舉出玻璃環氧基板、陶瓷基板、樹脂基板、金屬基板等通常的基板及導線架(lead frame)等。<Overall Configuration of Resin Molding Device 100> The resin molding apparatus 100 of this embodiment is a resin molding apparatus using transfer molding. This resin molding apparatus performs resin molding on, for example, a substrate on which a semiconductor chip is mounted, and uses a cylindrical tablet-shaped thermosetting resin (hereinafter referred to as “resin tablet”) as a resin material. In addition, the "substrate" includes general substrates such as glass epoxy substrates, ceramic substrates, resin substrates, and metal substrates, lead frames, and the like.

具體而言,樹脂成形裝置100如圖1所示,分別具備下述模塊作為構成元件:供給模塊2,供給樹脂密封前的基板W(以下稱為「密封前基板W」)及樹脂片T;例如兩個樹脂成形模塊3A、3B,進行樹脂成形;以及搬出模塊4,用於搬出樹脂成形品。此外,作為構成元件的供給模塊2、樹脂成形模塊3A、樹脂成形模塊3B以及搬出模塊4分別能夠對其他構成元件彼此裝卸,且能夠更換。Specifically, as shown in FIG. 1 , the resin molding apparatus 100 includes the following modules as constituent elements: a supply module 2 for supplying a substrate W before resin sealing (hereinafter referred to as "substrate W before sealing") and a resin sheet T; For example, two resin molding modules 3A and 3B are used to perform resin molding; and an unloading module 4 is used to unload resin molded products. In addition, the supply module 2, the resin molding module 3A, the resin molding module 3B, and the carry-out module 4 which are constituent elements are each detachable and replaceable from other constituent elements.

另外,樹脂成形裝置100具備:搬送機構5(以下稱為「裝載器(loader)5」),將由供給模塊2供給的密封前基板W及樹脂片T搬送至樹脂成形模塊3A、樹脂成形模塊3B;以及搬送機構6(以下稱為「卸載器6」),將由樹脂成形模塊3A、樹脂成形模塊3B進行了樹脂成形的樹脂成形品搬送至搬出模塊4。In addition, the resin molding apparatus 100 is provided with a conveyance mechanism 5 (hereinafter referred to as "loader (loader) 5") for conveying the pre-sealing substrate W and the resin sheet T supplied from the supply module 2 to the resin molding module 3A and the resin molding module 3B. and a transport mechanism 6 (hereinafter referred to as “unloader 6 ”) that transports the resin molded product that has been resin-molded by the resin molding module 3A and the resin molding module 3B to the unloading module 4 .

本實施方式的供給模塊2是使基板供給模塊7及樹脂供給模塊8一體化而成。The supply module 2 of this embodiment integrates the substrate supply module 7 and the resin supply module 8 .

基板供給模塊7具有基板送出部71及基板供給部72。基板送出部71將匣盒(magazine)內的密封前基板W送出至基板排列部。基板供給部72從基板送出部71接受密封前基板W,並使所接受的密封前基板W在規定方向排列,交給裝載器5。The substrate supply module 7 has a substrate delivery unit 71 and a substrate supply unit 72 . The substrate delivery unit 71 sends out the unsealed substrate W in the magazine to the substrate alignment unit. The substrate supply unit 72 receives the un-sealed substrates W from the substrate delivery unit 71 , arranges the received un-sealed substrates W in a predetermined direction, and delivers them to the loader 5 .

樹脂供給模塊8具有樹脂送出部81及樹脂供給部82。樹脂送出部81從後述的儲料器(stocker)接受樹脂片T,並將樹脂片T送出至樹脂供給部82。樹脂供給部82從樹脂送出部81接受樹脂片T,並使所接受的樹脂片T在規定方向排列,交給裝載器5。The resin supply module 8 has a resin delivery unit 81 and a resin supply unit 82 . The resin sending part 81 receives the resin sheet T from the stocker (stocker) mentioned later, and sends the resin sheet T to the resin supply part 82. The resin supply part 82 receives the resin sheet T from the resin delivery part 81, arranges the received resin sheet T in a predetermined direction, and delivers it to the loader 5.

樹脂成形模塊3A、樹脂成形模塊3B分別具有模壓部31。如圖2所示,各模壓部31具有作為可升降的成形模的下模311、作為相對向地固定在下模311的上方的成形模的上模312、以及用於將下模311及上模312合模的合模機構313。The resin molding block 3A and the resin molding block 3B each have a molded part 31 . As shown in Figure 2, each molding part 31 has the lower die 311 as the forming die that can be lifted, the upper die 312 as the forming die that is fixed on the top of the lower die 311 oppositely, and is used for lower die 311 and upper die. The clamping mechanism 313 of 312 clamping molds.

下模311固定於可動盤314的上表面,上模312固定於上部固定盤315的下表面。合模機構313通過使可動盤314上下移動,而將上模312及下模311合模或開模。此外,合模機構313可使用:利用將伺服馬達(servo motor)等的旋轉變換為直線移動的滾珠螺杆機構而傳遞至可動盤314的直動方式的機構、或利用例如肘節連杆(toggle link)等連杆機構將伺服馬達等的動力源傳遞至可動盤314的連杆方式的機構。The lower mold 311 is fixed on the upper surface of the movable plate 314 , and the upper mold 312 is fixed on the lower surface of the upper fixed plate 315 . The mold clamping mechanism 313 clamps or opens the upper mold 312 and the lower mold 311 by moving the movable platen 314 up and down. In addition, the mold clamping mechanism 313 may use a linear motion mechanism that converts the rotation of a servo motor or the like into a linear motion and transmits it to the movable platen 314, or may use, for example, a toggle link. link) and other link mechanisms that transmit a power source such as a servo motor to the movable plate 314 in a link system.

在合模機構313,設有檢測在下模311及上模312的合模時產生的夾緊壓力的夾緊壓力檢測部10。夾緊壓力檢測部10例如為應變儀、負荷傳感器(load cell)、壓力傳感器。由所述夾緊壓力檢測部10所檢測出的夾緊壓力信號被發送至控制部9。The clamping mechanism 313 is provided with a clamping pressure detector 10 that detects clamping pressure generated when the lower mold 311 and the upper mold 312 are clamped. The clamping pressure detection unit 10 is, for example, a strain gauge, a load cell, or a pressure sensor. The clamping pressure signal detected by the clamping pressure detection unit 10 is sent to the control unit 9 .

在下模311,形成有供安裝由裝載器5所搬送的密封前基板W的安裝部311a。另外,在下模311,形成有供安裝由裝載器5所搬送的樹脂片T的多個料筒311b。進而,在下模311設有柱塞316,此柱塞316用於在料筒311b內將樹脂片T注入至例如形成於上模312的樹脂通路312a及模腔312b。On the lower mold 311, a mounting portion 311a for mounting the pre-sealed substrate W conveyed by the loader 5 is formed. Moreover, in the lower mold|type 311, the several cylinder 311b in which the resin sheet T conveyed by the loader 5 is mounted is formed. Furthermore, the lower die 311 is provided with a plunger 316 for injecting the resin sheet T into, for example, the resin passage 312 a and the cavity 312 b formed in the upper die 312 in the cylinder 311 b.

柱塞316通過柱塞驅動機構317而在料筒311b內升降移動。所述柱塞驅動機構317使柱塞316相對於下模311而進退移動,由此,柱塞316在料筒311b內進退移動。此處,柱塞驅動機構317例如可使用:將伺服馬達與滾珠螺杆機構組合而成的機構、或將氣缸或油壓缸與杆(rod)組合而成的機構等。The plunger 316 moves up and down in the cylinder 311b by the plunger driving mechanism 317 . The plunger driving mechanism 317 moves the plunger 316 forward and backward with respect to the lower mold 311, whereby the plunger 316 moves forward and backward in the cylinder 311b. Here, for the plunger driving mechanism 317 , for example, a combination of a servo motor and a ball screw mechanism, a combination of an air cylinder or hydraulic cylinder and a rod (rod), or the like can be used.

在柱塞驅動機構317,設有檢測柱塞驅動機構317對樹脂的傳遞壓力的傳遞壓力檢測部11。所謂傳遞壓力,更具體而言,為利用柱塞316來擠壓將料筒311b內的樹脂片T加熱並使其熔融而成的熔融樹脂時施加於柱塞316的壓力。傳遞壓力檢測部11例如為應變儀、負荷傳感器、壓力傳感器。由所述傳遞壓力檢測部11所檢測出的傳遞壓力信號被發送至控制部9。The plunger driving mechanism 317 is provided with a transmission pressure detection unit 11 that detects the transmission pressure of the plunger driving mechanism 317 to the resin. More specifically, the transfer pressure is the pressure applied to the plunger 316 when the plunger 316 squeezes the molten resin obtained by heating and melting the resin sheet T in the cylinder 311b. The transmission pressure detection unit 11 is, for example, a strain gauge, a load sensor, or a pressure sensor. The transmission pressure signal detected by the transmission pressure detection unit 11 is sent to the control unit 9 .

此外,在上模312及下模311分別嵌埋有加熱器等加熱部。通過所述加熱部,上模312及下模311通常被加熱至180℃左右。In addition, heating parts such as heaters are embedded in the upper mold 312 and the lower mold 311 , respectively. The upper mold 312 and the lower mold 311 are usually heated to about 180° C. by the heating unit.

<樹脂成形裝置100的樹脂成形動作> 以下,對本實施方式的樹脂成形裝置100的樹脂成形的基本動作進行說明。<Resin molding operation of the resin molding device 100> Hereinafter, the basic operation of resin molding by the resin molding apparatus 100 of this embodiment will be described.

基板送出部71將匣盒內的密封前基板W送出至基板供給部72。基板供給部72使所接受的密封前基板W向規定方向排列,交給裝載器5。與此同時,樹脂送出部81將從儲料器接受的樹脂片T送出至樹脂供給部82。樹脂供給部82將所接受的樹脂片T中需要的個數(圖1中為四個)交給裝載器5。The substrate delivery unit 71 sends out the unsealed substrate W in the cassette to the substrate supply unit 72 . The substrate supply unit 72 arranges the received substrates W before sealing in a predetermined direction, and delivers them to the loader 5 . At the same time, the resin sending part 81 sends out the resin sheet T received from the stocker to the resin supply part 82 . The resin supply unit 82 delivers the required number (four in FIG. 1 ) of the received resin sheets T to the loader 5 .

接著,裝載器5將所接受的兩片密封前基板W及四個樹脂片T同時向模壓部31搬送。裝載器5將密封前基板W供給於下模311的安裝部311a,將樹脂片T供給於形成在下模311的料筒311b的內部。Next, the loader 5 conveys the received two pre-sealed substrates W and the four resin sheets T to the molding unit 31 at the same time. The loader 5 supplies the pre-sealing substrate W to the mounting portion 311 a of the lower mold 311 , and supplies the resin sheet T to the inside of the cylinder 311 b formed in the lower mold 311 .

然後,使用合模機構313將上模312與下模311合模。接著,利用柱塞316來擠壓將各料筒311b內的樹脂片T加熱並使其熔融而成的熔融樹脂。由此,熔融樹脂經過樹脂通路312a而被注入至形成於上模312的模腔312b的內部。接著,通過將熔融樹脂以硬化所需要的所需時間加熱,而使熔融樹脂硬化而形成硬化樹脂。由此,模腔312b內的半導體晶片及其周邊的基板被密封在與模腔312b的形狀對應地成形的硬化樹脂(密封樹脂)內。Then, the upper mold 312 and the lower mold 311 are clamped using the mold clamping mechanism 313 . Next, the molten resin obtained by heating and melting the resin sheet T in each cylinder 311b is squeezed by the plunger 316 . Thus, molten resin is injected into the cavity 312b formed in the upper mold 312 through the resin passage 312a. Next, the molten resin is hardened by heating the molten resin for a required time required for hardening to form a hardened resin. Thereby, the semiconductor wafer in the cavity 312b and the surrounding substrate are sealed in the cured resin (sealing resin) molded in accordance with the shape of the cavity 312b.

然後,經過硬化所需要的所需時間後,將上模312與下模311開模,將已密封基板(未圖示)脫模。然後,使用卸載器6將由模壓部31進行了樹脂密封的已密封基板(樹脂成形品)收容在搬出模塊4的基板收容部41。Then, after the time required for curing has elapsed, the upper mold 312 and the lower mold 311 are opened, and the sealed substrate (not shown) is released from the mold. Then, the sealed substrate (resin molded product) resin-sealed by the press part 31 is accommodated in the substrate accommodating part 41 of the carry-out module 4 using the unloader 6 .

包含所述一系列動作的樹脂成形裝置100總體的動作由控制部9進行控制。所述控制部9在圖1中設於供給模塊2,但也可設於其他模塊。此外,控制部9例如包含具有中央處理器(Central Processing Unit,CPU)、內部記憶體、類比數位(Analog-to-Digital,AD)轉換器、輸入輸出逆變器等的專用或通用的電腦。The overall operation of the resin molding apparatus 100 including the series of operations described above is controlled by the control unit 9 . The control unit 9 is provided in the supply module 2 in FIG. 1 , but may be provided in another module. In addition, the control unit 9 includes, for example, a dedicated or general-purpose computer including a central processing unit (Central Processing Unit, CPU), an internal memory, an analog-to-digital (Analog-to-Digital, AD) converter, an input-output inverter, and the like.

<控制部9的具體控制內容> 接著,參照圖3對控制部9的具體控制內容進行說明。<Specific control content of the control unit 9> Next, specific control contents of the control unit 9 will be described with reference to FIG. 3 .

(步驟S1:下模上升開始) 將密封前基板W及四個樹脂片T供給於模壓部31後,控制部9控制合模機構313而使下模311上升。(Step S1: The lower mold starts to rise) After the pre-sealing substrate W and the four resin sheets T are supplied to the molding unit 31 , the control unit 9 controls the mold clamping mechanism 313 to raise the lower mold 311 .

(步驟S2:夾緊壓力檢測) 此時,設於合模機構313的夾緊壓力檢測部10檢測夾緊壓力,並將此夾緊壓力信號發送至控制部9。(Step S2: clamping pressure detection) At this time, the clamping pressure detection unit 10 provided in the mold clamping mechanism 313 detects the clamping pressure, and sends the clamping pressure signal to the control unit 9 .

(步驟S3:夾緊壓力,設定值a≦檢測值P) 控制部9判斷夾緊壓力的檢測值P是否成為預定的設定值a以上(設定值a≦檢測值P)。(Step S3: clamping pressure, setting value a≦detection value P) The control unit 9 determines whether or not the detected value P of the clamping pressure is equal to or greater than a predetermined set value a (set value a≦detected value P).

當檢測值P小於設定值a時,回到(步驟S2:夾緊壓力檢測),控制部9控制合模機構313而使下模311繼續上升,夾緊壓力檢測部10檢測夾緊壓力。When the detection value P is less than the set value a, return to (step S2: detection of clamping pressure), the control unit 9 controls the clamping mechanism 313 to make the lower mold 311 continue to rise, and the clamping pressure detection unit 10 detects the clamping pressure.

(步驟S4:下模上升停止) 另一方面,當檢測值P成為設定值a以上時,控制部9控制合模機構313而使下模311停止上升。(Step S4: The lower mold rises and stops) On the other hand, when the detected value P becomes equal to or greater than the set value a, the control unit 9 controls the mold clamping mechanism 313 to stop the lower mold 311 from ascending.

(步驟S5:柱塞上升開始) 然後,控制部9控制柱塞驅動機構317,使柱塞316開始上升。控制部9也可在檢測值P成為設定值a的80%以上的夾緊壓力的時機使柱塞316開始上升等,在檢測值P達到設定值a前使柱塞316開始上升。此外,控制部9對柱塞驅動機構317的控制具有速度控制階段及壓力控制階段,例如在柱塞的位置達到規定位置之前為速度控制階段,隨後成為壓力控制階段。柱塞位置例如能夠由作為柱塞驅動機構317的伺服馬達的編碼器(encoder)檢測。(Step S5: Start of plunger rising) Then, the control unit 9 controls the plunger drive mechanism 317 to start the plunger 316 to rise. The control unit 9 may start to lift the plunger 316 when the detected value P becomes 80% or more of the clamping pressure of the set value a, etc., and start the lift of the plunger 316 before the detected value P reaches the set value a. In addition, the control of the plunger drive mechanism 317 by the controller 9 has a speed control stage and a pressure control stage, for example, a speed control stage until the plunger position reaches a predetermined position, and a pressure control stage thereafter. The plunger position can be detected by, for example, an encoder of a servo motor as the plunger driving mechanism 317 .

(步驟S6:傳遞壓力及柱塞位置檢測) 此時,設於柱塞驅動機構317的傳遞壓力檢測部11檢測傳遞壓力,並將此傳遞壓力信號發送至控制部9。另外,設於柱塞驅動機構317的柱塞位置檢測部(未圖示)檢測柱塞316的位置,並將此柱塞位置信號發送至控制部9。(Step S6: Transmission pressure and plunger position detection) At this time, the transmission pressure detection unit 11 provided in the plunger driving mechanism 317 detects the transmission pressure, and sends the transmission pressure signal to the control unit 9 . In addition, a plunger position detection unit (not shown) provided in the plunger driving mechanism 317 detects the position of the plunger 316 and sends the plunger position signal to the control unit 9 .

(步驟S7:傳遞壓力及柱塞位置,設定值α≦檢測值X) 控制部9判斷傳遞壓力及柱塞位置各自的檢測值X是否成為預定的各自的設定值α以上(設定值α≦檢測值X)。 此外,此處將傳遞壓力及柱塞位置兩者的檢測值X為各自的設定值α以上設為條件(及(AND)條件),亦可將任一者的檢測值X為設定值α以上設為條件(或(OR)條件)。(Step S7: transmit pressure and plunger position, setting value α≦detection value X) The control unit 9 determines whether the detected value X of the transmission pressure and the plunger position is equal to or greater than a predetermined set value α (set value α≦detected value X). In addition, here, the detection value X of both the transmission pressure and the plunger position is set as a condition (and (AND) condition) that the detection value X of both the transmission pressure and the plunger position is equal to or greater than the set value α, and the detection value X of either one may be greater than the set value α. Set as a condition (or (OR) condition).

當檢測值X小於設定值α時,回到(步驟S6:傳遞壓力及柱塞位置檢測),控制部9控制柱塞驅動機構317而使柱塞316繼續上升,傳遞壓力檢測部11及柱塞位置檢測部檢測傳遞壓力及柱塞位置。When the detection value X is less than the set value α, return to (step S6: transmission pressure and plunger position detection), the control part 9 controls the plunger driving mechanism 317 to make the plunger 316 continue to rise, and the transmission pressure detection part 11 and the plunger The position detection unit detects the transmission pressure and the position of the plunger.

(步驟S8:下模上升再次開始) 另一方面,當檢測值X為設定值α以上時,控制部9控制合模機構313,使下模311再次開始上升。由此,夾緊壓力上升(參照圖4)。(Step S8: lower mold rise starts again) On the other hand, when the detected value X is equal to or greater than the set value α, the control unit 9 controls the mold clamping mechanism 313 to start raising the lower mold 311 again. As a result, the clamping pressure increases (see FIG. 4 ).

(步驟S9:夾緊壓力及傳遞壓力檢測) 此時,夾緊壓力檢測部10檢測夾緊壓力並發送至控制部9,傳遞壓力檢測部11檢測傳遞壓力並發送至控制部9。(Step S9: detection of clamping pressure and transmission pressure) At this time, the clamping pressure detection unit 10 detects the clamping pressure and sends it to the control unit 9 , and the transmission pressure detection unit 11 detects the transmission pressure and sends it to the control unit 9 .

(步驟S10:傳遞壓力,前次檢測值≧本次檢測值) 控制部9將傳遞壓力的本次檢測值與前次檢測值進行比較,判斷本次檢測值是否成為前次檢測值以下(前次檢測值≧本次檢測值)。此處,本次檢測值是為了進行步驟S10的處理而新獲取的傳遞壓力的檢測值。前次檢測值為在獲取本次檢測值以前獲取的傳遞壓力的檢測值,且既可為在本次檢測值的近前獲取的檢測值,也可為在規定時間前獲取的檢測值。(Step S10: transmit the pressure, the previous detection value≧this detection value) The control unit 9 compares the current detection value of the delivery pressure with the previous detection value, and determines whether the current detection value is equal to or lower than the previous detection value (previous detection value≧current detection value). Here, the detected value this time is the detected value of the delivery pressure newly acquired for performing the process of step S10. The previous detection value is a detection value of the transmission pressure obtained before the current detection value, and may be a detection value obtained before the current detection value or a detection value obtained before a predetermined time.

(步驟S11:根據傳遞壓力而追隨控制夾緊壓力) 當本次檢測值大於前次檢測值時,控制部9根據傳遞壓力而控制夾緊壓力。也就是說,為了使夾緊壓力追隨傳遞壓力的上升而上升,控制合模機構313(參照圖4)。(Step S11: follow and control the clamping pressure according to the transmission pressure) When the current detection value is greater than the previous detection value, the control unit 9 controls the clamping pressure according to the transmission pressure. That is, the mold clamping mechanism 313 is controlled so that the clamping pressure increases following the increase in the transmission pressure (see FIG. 4 ).

(步驟S12:夾緊壓力,設定值b≦檢測值Q) 然後,控制部9判斷夾緊壓力的檢測值Q是否成為預定的設定值b以上(設定值b≦檢測值Q)。(Step S12: clamping pressure, setting value b≦detection value Q) Then, the control unit 9 judges whether or not the detected value Q of the clamping pressure is equal to or greater than a predetermined set value b (set value b≦detected value Q).

(步驟S13:下模上升停止) 當夾緊壓力的檢測值Q為設定值b以上時,控制部9控制合模機構313,使下模311停止上升。(Step S13: The lower mold rises and stops) When the detected value Q of the clamping pressure is equal to or greater than the set value b, the control unit 9 controls the mold clamping mechanism 313 to stop the lower mold 311 from ascending.

當夾緊壓力的檢測值Q小於設定值b時,控制部9進入下一步驟(步驟S14:傳遞壓力,設定值β≦檢測值Y)。When the detected value Q of the clamping pressure is smaller than the set value b, the control unit 9 proceeds to the next step (step S14: transmit pressure, set value β≦detected value Y).

(步驟S14:傳遞壓力,設定值β≦檢測值Y) 接著,控制部9判斷傳遞壓力的檢測值Y是否成為預定的設定值β以上(設定值β≦檢測值Y)。(Step S14: Transmission pressure, set value β≦detection value Y) Next, the control unit 9 judges whether or not the detected value Y of the transmission pressure is equal to or greater than a predetermined set value β (set value β≦detected value Y).

(步驟S15:柱塞上升停止) 當傳遞壓力的檢測值Y為設定值β以上時,控制部9控制柱塞驅動機構317,使柱塞316停止上升。由此,樹脂成形時的開模前的控制結束。(Step S15: The plunger rises and stops) When the detected value Y of the transmission pressure is equal to or greater than the set value β, the control unit 9 controls the plunger drive mechanism 317 to stop the plunger 316 from ascending. This completes the control before mold opening during resin molding.

另一方面,當傳遞壓力的檢測值Y小於設定值β時,回到(步驟S9:夾緊壓力及傳遞壓力檢測),控制部9控制合模機構313而使下模311繼續上升,夾緊壓力檢測部10及傳遞壓力檢測部11檢測夾緊壓力及傳遞壓力。On the other hand, when the detected value Y of the transmission pressure is less than the set value β, return to (step S9: clamping pressure and transmission pressure detection), the control part 9 controls the mold clamping mechanism 313 so that the lower mold 311 continues to rise, clamping The pressure detection unit 10 and the transmission pressure detection unit 11 detect the clamping pressure and the transmission pressure.

(步驟S16:將夾緊壓力控制為一定) 所述(步驟S10:傳遞壓力,前次檢測值≧本次檢測值)中,當本次檢測值為前次檢測值以下時,控制部9以與傳遞壓力無關而使夾緊壓力成為預定的規定值的方式進行控制(步驟S16)。本實施方式的控制部9以夾緊壓力成為一定值的方式控制合模機構313(參照圖4)。詳細而言,控制部9將檢測出成為前次檢測值以下的本次檢測值的時間點的夾緊壓力控制為一定。(Step S16: Controlling the clamping pressure to be constant) In the above (step S10: transmission pressure, previous detection value≧this detection value), when the current detection value is lower than the previous detection value, the control unit 9 makes the clamping pressure a predetermined value irrespective of the transmission pressure. The control is performed in the manner of a predetermined value (step S16). The control unit 9 of the present embodiment controls the mold clamping mechanism 313 so that the clamping pressure becomes a constant value (see FIG. 4 ). Specifically, the control unit 9 controls the clamping pressure to be constant at the point in time at which the present detection value is detected to be equal to or less than the previous detection value.

此外,也在此一定控制時,夾緊壓力檢測部10及傳遞壓力檢測部11檢測夾緊壓力及傳遞壓力(步驟S9),控制部9一直判斷傳遞壓力的本次檢測值是否成為前次檢測值以下(前次檢測值≧本次檢測值)(步驟S10)。In addition, also in this constant control, the clamping pressure detection unit 10 and the transmission pressure detection unit 11 detect the clamping pressure and the transmission pressure (step S9), and the control unit 9 always judges whether the current detection value of the transmission pressure is equal to the previous detection value. value or less (previous detection value≧this detection value) (step S10).

此處,如圖4所示,控制部9設為下述情況:在由夾緊壓力的一定控制切換為夾緊壓力的追隨控制時,本次檢測值超過由夾緊壓力的追隨控制切換為夾緊壓力的一定控制時的檢測值。此外,也可設為下述構成:通過傳遞壓力的本次檢測值與近前的前次檢測值的比較,而切換夾緊壓力的追隨控制與夾緊壓力的一定控制。Here, as shown in FIG. 4 , the control unit 9 is set as follows: When switching from the constant control of the clamping pressure to the follow-up control of the clamping pressure, the current detection value exceeds the switching from the follow-up control of the clamping pressure to The detection value when the clamping pressure is under constant control. In addition, a configuration may be adopted in which the follow-up control of the clamping pressure and the constant control of the clamping pressure are switched by comparing the current detected value of the transmission pressure with the immediately previous detected value.

<本實施方式的效果> 根據本實施方式的樹脂成形裝置100,在所檢測出的傳遞壓力上升時,以夾緊壓力對應於所述傳遞壓力而上升的方式控制合模機構313,且在所檢測出的傳遞壓力下降時,以夾緊壓力與所述傳遞壓力無關而成為規定值的方式控制合模機構313,因此夾緊壓力不會對應於傳遞壓力的下降而下降,能夠減小由傳遞壓力所致的背壓的影響而改良樹脂成形品。<Effects of this embodiment> According to the resin molding apparatus 100 of the present embodiment, when the detected transmission pressure increases, the clamping mechanism 313 is controlled so that the clamping pressure increases according to the transmission pressure, and when the detected transmission pressure decreases, the clamping mechanism 313 is controlled. Since the mold clamping mechanism 313 is controlled so that the clamping pressure becomes a predetermined value irrespective of the transmission pressure, the clamping pressure does not decrease corresponding to the drop in the transmission pressure, and the effect of the back pressure caused by the transmission pressure can be reduced. Improve resin molded products by influence.

<其他變形實施方式> 此外,本發明不限於所述實施方式。<Other Modified Embodiments> In addition, the present invention is not limited to the embodiments.

例如,夾緊壓力檢測部10只要檢測合模機構313對下模311及上模312的夾緊壓力,則無需設於合模機構313,也可設於合模機構313與可動盤314之間、可動盤314與下模311之間、或上部固定盤315與上模312之間等。For example, as long as the clamping pressure detection part 10 detects the clamping pressure of the mold clamping mechanism 313 on the lower mold 311 and the upper mold 312, it does not need to be installed in the mold clamping mechanism 313, and can also be installed between the mold clamping mechanism 313 and the movable plate 314. , Between the movable plate 314 and the lower mold 311, or between the upper fixed plate 315 and the upper mold 312, etc.

另外,傳遞壓力檢測部11只要檢測柱塞驅動機構317對樹脂的傳遞壓力,則無需設於柱塞驅動機構317,也可設於柱塞316與柱塞驅動機構317之間等。The transmission pressure detector 11 need not be provided in the plunger driving mechanism 317 as long as it detects the transmission pressure of the resin by the plunger driving mechanism 317 , and may be provided between the plunger 316 and the plunger driving mechanism 317 .

所述實施方式的控制流程中,判斷(步驟S12:夾緊壓力,設定值b≦檢測值Q)後,判斷(步驟S14:傳遞壓力,設定值β≦檢測值Y),但也可相反,或也可並列地處理步驟S12及步驟S14。In the control flow of the above-mentioned embodiment, after judging (step S12: clamping pressure, setting value b≦detection value Q), it is judged (step S14: transmission pressure, setting value β≦detection value Y), but it can also be reversed, Alternatively, step S12 and step S14 may be processed in parallel.

進而,控制部9也可在所檢測出的傳遞壓力下降時,以夾緊壓力與所述傳遞壓力無關而成為以規定關係變化的值的方式控制合模機構313。此時,可想到控制部9以夾緊壓力成為直線性或階段性地單調增加的值的方式控制合模機構313。此時,夾緊壓力設為不破損的程度的增加量。另外,可想到控制部9使夾緊壓力為直線性或階段性地單調減少的值。此時,設為能夠減小由傳遞壓力所致的背壓的影響的程度的減少量。Furthermore, the control unit 9 may control the mold clamping mechanism 313 so that the clamping pressure becomes a value that changes in a predetermined relationship regardless of the transmission pressure when the detected transmission pressure drops. At this time, it is conceivable that the control unit 9 controls the mold clamping mechanism 313 so that the clamping pressure becomes a value that increases linearly or monotonously in steps. At this time, the clamping pressure is set to an increase amount that does not cause damage. In addition, it is conceivable that the control unit 9 sets the clamping pressure to a value that monotonously decreases linearly or stepwise. In this case, the reduction amount is set to such an extent that the influence of the back pressure due to the transmission pressure can be reduced.

所述實施方式中,為在供給模塊2與搬出模塊4之間連接有兩個樹脂成形模塊3A、樹脂成形模塊3B的構成,但也可設為下述構成:將供給模塊2與搬出模塊4設為一個模塊,將樹脂成形模塊3A、樹脂成形模塊3B連接於所述模塊。另外,樹脂成形裝置也可不像所述實施方式那樣模塊化為各模塊。In the above-described embodiment, the configuration in which the two resin molding modules 3A and 3B are connected between the supply module 2 and the carry-out module 4 may be a configuration in which the supply module 2 and the carry-out module 4 are connected to each other. One module is used, and the resin molding module 3A and the resin molding module 3B are connected to the module. In addition, the resin molding apparatus does not have to be modularized into individual modules like the embodiment described above.

此外,本發明不限於所述實施方式,當然可於不偏離其主旨的範圍內進行各種變形。In addition, this invention is not limited to the said embodiment, Of course, a various deformation|transformation is possible in the range which does not deviate from the summary.

2:供給模塊 3A、3B:樹脂成形模塊 4:搬出模塊 5:搬送機構(裝載器) 6:搬送機構(卸載器) 7:基板供給模塊 8:樹脂供給模塊 9:控制部 10:夾緊壓力檢測部 11:傳遞壓力檢測部 31:模壓部 41:基板收容部 71:基板送出部 72:基板供給部 81:樹脂送出部 82:樹脂供給部 100:樹脂成形裝置 311:下模(成形模) 311a:安裝部 311b:料筒 312:上模(成形模) 312a:樹脂通路 312b:模腔 313:合模機構 314:可動盤 315:上部固定盤 316:柱塞 317:柱塞驅動機構 S1~S16:步驟 T:樹脂片 W:密封前基板2: supply module 3A, 3B: Resin molding module 4: Move out the module 5: Transport mechanism (loader) 6: Transport mechanism (unloader) 7: Substrate supply module 8: Resin supply module 9: Control Department 10: Clamping pressure detection part 11: Transmission pressure detection part 31:Molding department 41: substrate housing 71: Substrate sending part 72: Substrate supply department 81:Resin sending part 82: Resin supply department 100: Resin molding device 311: Lower mold (forming mold) 311a: Installation Department 311b: Barrel 312: upper mold (forming mold) 312a: Resin pathway 312b: mold cavity 313: Clamping mechanism 314: Movable disk 315: upper fixed plate 316: plunger 317:Plunger drive mechanism S1~S16: Steps T: resin sheet W: sealed front substrate

圖1為示意性地表示本實施方式的樹脂成形裝置的構成的平面圖。 圖2為表示所述實施方式的樹脂成形品的製造方法的圖。 圖3為所述實施方式的控制流程圖。 圖4為所述實施方式的傳遞壓力及夾緊壓力的經時變化的示意圖。FIG. 1 is a plan view schematically showing the configuration of a resin molding apparatus according to the present embodiment. FIG. 2 is a diagram showing a method of manufacturing a resin molded article according to the embodiment. FIG. 3 is a control flow diagram of the embodiment. FIG. 4 is a schematic diagram of temporal changes in transmission pressure and clamping pressure in the embodiment.

S1~S16:步驟 S1~S16: Steps

Claims (3)

一種樹脂成形裝置,包括:合模機構,將成形模合模;柱塞驅動機構,使柱塞在所述成形模的料筒內移動;夾緊壓力檢測部,檢測所述合模機構對所述成形模的夾緊壓力;傳遞壓力檢測部,檢測所述柱塞驅動機構對樹脂的傳遞壓力;以及控制部,基於所述夾緊壓力檢測部所檢測出的所述夾緊壓力及所述傳遞壓力檢測部所檢測出的所述傳遞壓力來控制所述合模機構,在使所述成形模及所述柱塞停止上升以使所述夾緊壓力及所述傳遞壓力成為一定之前,所述控制部將所述傳遞壓力的前次檢測值與所述傳遞壓力的本次檢測值進行比較,在所述本次檢測值大於所述前次檢測值時,以所述夾緊壓力對應於所述傳遞壓力而上升的方式追隨控制所述合模機構,且在所述本次檢測值小於所述前次檢測值時,以所述夾緊壓力與所述傳遞壓力無關而成為一定值的方式一定控制所述合模機構,且在所述本次檢測值超過由所述追隨控制切換為所述一定控制時的檢測值時,所述控制部由所述一定控制切換為所述追隨控制。 A resin molding device, comprising: a mold clamping mechanism for clamping a forming mold; a plunger driving mechanism for moving a plunger in a barrel of the forming mold; a clamping pressure detection unit for detecting the impact of the mold clamping mechanism on the the clamping pressure of the molding die; the transmission pressure detection unit detects the transmission pressure of the plunger drive mechanism to the resin; and the control unit based on the clamping pressure detected by the clamping pressure detection unit and the The mold clamping mechanism is controlled by transmitting the transmission pressure detected by the pressure detection unit, and the clamping pressure and the transmission pressure are kept constant until the molding die and the plunger are stopped from rising. The control unit compares the previous detection value of the transmission pressure with the current detection value of the transmission pressure, and when the current detection value is greater than the previous detection value, the clamping pressure corresponds to The mold clamping mechanism is controlled so that the transmission pressure rises, and when the current detection value is smaller than the previous detection value, the clamping pressure becomes a constant value regardless of the transmission pressure. The mode of constant control of the mold clamping mechanism, and when the current detection value exceeds the detection value when the follow-up control is switched to the constant control, the control unit switches from the constant control to the follow-up control . 如申請專利範圍第1項所述的樹脂成形裝置,其中所述控制部在所述本次檢測值小於所述前次檢測值時,將檢測出成為 小於所述前次檢測值的本次檢測值的時間點的所述夾緊壓力控制為一定。 The resin molding device according to claim 1, wherein the control unit detects that when the current detection value is smaller than the previous detection value, the The clamping pressure is controlled to be constant at the time point of the current detection value which is smaller than the previous detection value. 一種樹脂成形品的製造方法,使用如申請專利範圍第1項或第2項所述的樹脂成形裝置。 A method of manufacturing a resin molded product, using the resin molding device described in claim 1 or 2.
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