TWI795552B - Measuring method and measuring apparatus - Google Patents

Measuring method and measuring apparatus Download PDF

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TWI795552B
TWI795552B TW108112807A TW108112807A TWI795552B TW I795552 B TWI795552 B TW I795552B TW 108112807 A TW108112807 A TW 108112807A TW 108112807 A TW108112807 A TW 108112807A TW I795552 B TWI795552 B TW I795552B
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image
unit
plane
images
angle
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TW201945977A (en
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大西史朗
得津裕太郎
杉本巖生
鈴川正紘
小﨑修司
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日商日立造船股份有限公司
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/89Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined

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  • General Health & Medical Sciences (AREA)
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Abstract

An object is held in a condition where a surface of the object is perpendicular to a predetermined XY plane and a direction corresponding to a transfer direction while the object was manufactured is parallel to the XY plane. Further, the object is positioned in a condition where an angle between a normal of the surface of the object and the X direction becomes an initial angle (Step S11). Parallel light is irradiated with the object from X direction (Step S12). A image capturing device captures an image on a screen which is projected through the object (Step S13). Next, capturing an image by the image capturing device is repeated while changing the angle between the normal of the surface of the object and the X direction to obtain a plurality of images (Steps S13 to S15).

Description

測量方法以及測量裝置 Measuring method and measuring device

本發明是有關於一種自薄片狀或板狀的對象物取得圖像的技術,所取得的圖像較佳為用以取得對象物的厚度或表面形狀的變化的特性。 The present invention relates to a technique for obtaining an image from a sheet-shaped or plate-shaped object. The obtained image is preferably used to obtain characteristics of changes in thickness or surface shape of the object.

自先前以來,已知有連續地製造薄片狀或板狀的構件的技術。例如,在日本專利特開2010-46798號公報的輥成形裝置中,將自模具(die)擠出的熔融樹脂一邊由輥夾著,一邊連續地運送,而使薄片成形。 Conventionally, there has been known a technique for continuously producing sheet-like or plate-like members. For example, in the roll forming apparatus of JP-A-2010-46798, molten resin extruded from a die (die) is conveyed continuously while being sandwiched between rolls, and a sheet is formed.

另一方面,亦提出有檢查經連續地製造的薄片的各種技術。例如,在日本專利特開2007-211092號公報的檢查方法中,是在光源與屏幕之間相對於屏幕傾斜地配置薄片狀的薄膜,拍攝屏幕,藉此來檢查由薄膜表面的平緩的波狀的凹凸引起的薄膜的厚度偏差。在日本專利特開平5-180785號公報的缺陷狀態檢測方法中,揭示有如下的技術:相對於透明黏著薄片體的寬度方向傾斜地配置直管螢光管,利用相機來檢測沿薄片的長度方向的條紋狀缺陷部的陰影。 On the other hand, various techniques for inspecting continuously produced sheets have also been proposed. For example, in the inspection method of Japanese Patent Application Laid-Open No. 2007-211092, a sheet-shaped film is arranged obliquely relative to the screen between the light source and the screen, and the screen is photographed, thereby inspecting the gentle wave shape of the film surface. Variation in film thickness due to unevenness. In the defect detection method of Japanese Patent Laid-Open No. 5-180785, the following technology is disclosed: a straight fluorescent tube is arranged obliquely with respect to the width direction of the transparent adhesive sheet, and a camera is used to detect defects along the length direction of the sheet. Shading of streaky defects.

然而,當一邊連續地運送一邊製造薄片或板時,會由於各種因素,而出現沿寬度方向延伸的凸狀或凹狀的厚度或表面形狀的變化。厚度或表面形狀的變化既存在被評估為缺陷的情況,亦存在作為產品的質量等級而被評估的情況。在任何情況下,均期望取得光的透過或反射的不均的特性,藉此使所取得的特性有助於進行產生變化的原因的探究、減少變化的裝置調整、是否有減少變化的餘地的判斷等。 However, when a sheet or a plate is manufactured while being continuously conveyed, variations in thickness or surface shape of convex or concave shapes extending in the width direction occur due to various factors. A change in thickness or surface shape may be evaluated as a defect or as a quality level of the product. In any case, it is desirable to obtain the characteristics of non-uniform transmission or reflection of light, so that the obtained characteristics can be used to help in the investigation of the cause of the change, the adjustment of the device to reduce the change, and whether there is room for reducing the change. Judgment etc.

本發明是朝向一種圖像取得方法,其取得來源於薄片狀或板狀的對象物的圖像,所述薄片狀或板狀的對象物是一邊在運送方向上連續地運送一邊製造。 The present invention is directed to an image acquisition method for acquiring an image derived from a sheet-shaped or plate-shaped object manufactured while being continuously conveyed in a conveying direction.

圖像取得方法包括如下的步驟:a)以所述對象物的面與預定的XY平面垂直,並且所述運送方向與所述XY平面平行,並且所述對象物的所述面的法線與X方向所成的角度成為第一角度的方式而配置所述對象物;b)將相對於Y方向平行或收斂或發散的光自所述X方向照射至所述對象物;c)藉由取得將透過或反射所述對象物的光投影至屏幕而成的像,或藉由接收透過或反射所述對象物的光,而取得圖像;d)以所述對象物的所述面與所述XY平面垂直,並且所述運送方向與所述XY平面平行,並且所述對象物的所述面的法線與所述X方向所成的角度成為第二角度的方式而配置所述對象物;以及e)藉由再次執行所述c)步驟,而取得其他圖像。 The image acquisition method includes the following steps: a) The surface of the object is perpendicular to a predetermined XY plane, and the conveying direction is parallel to the XY plane, and the normal line of the surface of the object is The object is arranged so that the angle formed by the X direction becomes the first angle; b) irradiating the object from the X direction with light that is parallel or convergent or divergent with respect to the Y direction; c) by obtaining An image formed by projecting light transmitted or reflected from the object onto a screen, or an image obtained by receiving light transmitted or reflected from the object; d) using the surface of the object and the The XY plane is vertical, the conveying direction is parallel to the XY plane, and the angle formed by the normal line of the surface of the object and the X direction becomes a second angle, and the object is arranged. and e) obtaining other images by performing the step c) again.

根據本發明,可取得表示運送方向上的對象物的光的透過或反射的不均的特性的圖像。 According to the present invention, it is possible to obtain an image showing unevenness in transmission or reflection of light from an object in the transport direction.

在較佳的形態中,在所述d)步驟中,使所述對象物以與所述XY平面垂直的軸為中心而旋轉。 In a preferred embodiment, in the step d), the object is rotated about an axis perpendicular to the XY plane.

在更佳的形態中,藉由一邊將所述d)步驟中的所述對象物的所述面的法線與所述X方向所成的角度僅變更15度以下的角度,一邊反覆進行所述d)步驟及所述e)步驟,而取得多個圖像。 In a more preferable form, the above steps are repeated while changing the angle formed by the normal line of the surface of the object in the step d) and the X direction by an angle of 15 degrees or less. Step d) and step e) to obtain a plurality of images.

本發明亦朝向一種測量方法,自薄片狀或板狀的對象物取得表示所述對象物的特性的測量值,所述薄片狀或板狀的對象物是一邊在運送方向上連續地運送一邊製造。所述測量方法包括如下的步驟:f)藉由所述圖像取得方法而取得所述圖像及所述其他圖像;以及g)取得與所述運送方向相對應的方向上的所述圖像及所述其他圖像的明度的變化。 The present invention is also directed to a measuring method for obtaining measured values representing properties of said object from a sheet-shaped or plate-shaped object manufactured while being continuously conveyed in the conveying direction. . The measuring method includes the steps of: f) acquiring the image and the other images by the image acquiring method; and g) acquiring the map in a direction corresponding to the conveying direction. Changes in the brightness of the image and other images mentioned.

在較佳的形態中,在所述d)步驟中,使所述對象物以與所述XY平面垂直的軸為中心而旋轉,藉由一邊變更所述d)步驟中的所述對象物的所述面的法線與所述X方向所成的角度,一邊反覆進行所述d)步驟及所述e)步驟而取得多個圖像,來取得包含所述圖像及所述其他圖像的多個圖像,並在所述g)步驟中,取得所述運送方向上的所述多個圖像的明度變化。 In a preferred form, in the step d), the object is rotated around an axis perpendicular to the XY plane, and the object is rotated while changing the position of the object in the step d). The angle formed by the normal line of the surface and the X direction, while repeatedly performing the step d) and the step e) to obtain a plurality of images, to obtain the image including the image and the other images a plurality of images, and in the step g), obtain brightness changes of the plurality of images in the conveying direction.

更佳的形態進而包括如下的步驟:h)取得所述多個圖像的各自的明度變化的最大值。 A more preferable form further includes the following step: h) Obtaining the maximum value of the respective brightness changes of the plurality of images.

本發明亦朝向一種圖像取得裝置,取得來源於薄片狀或板狀的對象物的圖像,所述薄片狀或板狀的對象物是一邊在運送方向上連續地運送一邊製造。圖像取得裝置包括:保持部,以所述對象物的面與預定的XY平面垂直,並且所述運送方向與所述XY平面平行,並且所述對象物的所述面的法線與X方向所成的角度能夠相對地變更的方式而保持所述對象物;照明部,將相對於Y方向而平行或收斂或發散的光自所述X方向照射至所述對象物;以及攝像部,藉由取得將透過或反射所述對象物的光投影至屏幕而成的像,或藉由接收透過或反射所述對象物的光而取得圖像。 The present invention is also directed to an image acquisition device that acquires an image derived from a sheet-shaped or plate-shaped object manufactured while being continuously conveyed in a conveying direction. The image acquisition device includes: a holding part, wherein the surface of the object is perpendicular to a predetermined XY plane, the conveying direction is parallel to the XY plane, and the normal line of the surface of the object is parallel to the X direction. The formed angle can be relatively changed to hold the object; the illumination unit irradiates the object from the X direction with parallel, convergent or divergent light with respect to the Y direction; and the imaging unit, by An image is obtained by projecting light transmitted or reflected from the object onto a screen, or an image is obtained by receiving light transmitted or reflected from the object.

在較佳的形態中,所述保持部使所述對象物以與所述XY平面垂直的軸為中心而旋轉。 In a preferred aspect, the holding unit rotates the object about an axis perpendicular to the XY plane.

更佳的形態進而包括控制部,所述控制部對所述攝像部及所述保持部進行控制。藉由所述控制部的控制,而一邊由所述保持部變更所述對象物的所述面的法線與所述X方向所成的角度,一邊由所述攝像部反覆取得圖像。 A more preferable aspect further includes a control unit that controls the imaging unit and the holding unit. Under the control of the control unit, the imaging unit repeatedly acquires images while changing the angle formed by the normal line of the surface of the object and the X direction by the holding unit.

所述目的及其他目的、特徵、形態及優點將參照隨附圖示,藉由以下進行的本發明的詳細說明而闡明。 These and other objects, features, aspects, and advantages will be clarified by the following detailed description of the present invention with reference to the accompanying drawings.

1:測量裝置 1: Measuring device

9、90:對象物 9, 90: object

11:圖像取得裝置 11: Image acquisition device

12:電腦 12: computer

13:顯示器 13: Display

21:保持部 21: Keeping Department

22:照明部 22: Lighting department

23:屏幕 23: screen

24:攝像部 24: Camera department

25:控制部 25: Control Department

60:圖像 60: Image

61:橫方向 61: Horizontal direction

62:縱方向 62: Vertical direction

63:圖像處理範圍 63: Image processing range

64:單位區域 64: unit area

71:平行光 71: parallel light

81:模具 81: Mold

82:主輥 82: Main roller

83:第一金屬彈性輥 83: The first metal elastic roller

84:第二金屬彈性輥 84: Second metal elastic roller

91:運送方向 91: Shipping direction

92:寬度方向 92: Width direction

121:運算部 121: Computing department

211:框架 211: frame

212:馬達 212: motor

221:光源 221: light source

222:光出射部 222: light emitting part

223、241:透鏡 223, 241: lens

242:感測器部 242: Sensor Department

243:支持部 243: Support Department

901~903:針對不同的對象物9的測量結果 901~903: Measurement results for different objects 9

911、912:虛線 911, 912: dotted line

J1:軸 J1: axis

J2:光軸 J2: optical axis

S11~S18:步驟 S11~S18: steps

X、Y、Z:方向 X, Y, Z: direction

圖1是測量裝置的前視圖。 Fig. 1 is a front view of the measuring device.

圖2是圖像取得裝置的平面圖。 Fig. 2 is a plan view of the image acquisition device.

圖3是表示製造對象物的情形的概略圖。 Fig. 3 is a schematic diagram showing a state of manufacturing an object.

圖4是表示對象物的圖。 FIG. 4 is a diagram showing an object.

圖5是表示測量裝置的動作的流程的圖。 FIG. 5 is a diagram showing the flow of operations of the measuring device.

圖6是表示所取得的圖像的一例的圖。 FIG. 6 is a diagram showing an example of an acquired image.

圖7是放大地表示圖像處理範圍的圖。 FIG. 7 is an enlarged view showing an image processing range.

圖8是表示明度變化的一例的圖。 FIG. 8 is a diagram showing an example of brightness change.

圖9是例示旋轉位置與明度的最大變化值的關係的圖。 FIG. 9 is a diagram illustrating a relationship between a rotational position and a maximum change value of brightness.

圖10是表示其他圖像取得裝置的平面圖。 Fig. 10 is a plan view showing another image acquisition device.

圖1是表示本發明的第一實施形態的測量裝置1的前視圖。測量裝置1包括圖像取得裝置11、電腦12及顯示器13。圖2是圖像取得裝置11的平面圖。在圖1及圖2中,為了便於說明,表示X方向、Y方向及Z方向。X方向、Y方向及Z方向為相互垂直。成為測量的對象的對象物9是一邊在規定的運送方向上連續地運送,一邊製造的薄片狀或板狀的構件。對象物9例如是藉由樹脂而成形。對象物9較佳為作為觸控面板用玻璃的代替品的塑膠產品,但對象物9的用途並不限定於此。對象物9亦可藉由樹脂以外的材料而成形。在第一實施形態中,對象物9為透明,對象物9的兩主面為大致平面。 Fig. 1 is a front view showing a measuring device 1 according to a first embodiment of the present invention. The measurement device 1 includes an image acquisition device 11 , a computer 12 and a display 13 . FIG. 2 is a plan view of the image acquisition device 11 . In FIGS. 1 and 2 , for convenience of description, the X direction, the Y direction, and the Z direction are shown. The X direction, the Y direction and the Z direction are perpendicular to each other. The object 9 to be measured is a sheet-shaped or plate-shaped member manufactured while being continuously conveyed in a predetermined conveying direction. The object 9 is molded by resin, for example. The object 9 is preferably a plastic product as a substitute for glass for a touch panel, but the application of the object 9 is not limited thereto. The object 9 may also be formed of a material other than resin. In the first embodiment, the object 9 is transparent, and both main surfaces of the object 9 are substantially flat.

如圖1及圖2所示,圖像取得裝置11包括保持對象物9的保持部21、將光照射至對象物9的照明部22、屏幕23、攝像部24及控制部25。在圖2中省略控制部25的圖示。保持部21是以對象物9的面與XY平面垂直,並且對象物9上的製造時的運送 方向所對應的方向與XY平面平行的方式而保持對象物9。所謂對象物9的「面」,是指對象物9所具有的最大的面。所謂XY平面,是指與X方向及Y方向平行的預定的虛擬的一個面。 As shown in FIGS. 1 and 2 , image acquisition device 11 includes holding unit 21 holding object 9 , illuminating unit 22 irradiating light onto object 9 , screen 23 , imaging unit 24 , and control unit 25 . The illustration of the control unit 25 is omitted in FIG. 2 . The holding part 21 is the surface of the object 9 perpendicular to the XY plane, and the transportation of the object 9 during manufacture The object 9 is held so that the direction corresponding to the direction is parallel to the XY plane. The “surface” of the object 9 refers to the largest surface of the object 9 . The XY plane refers to a predetermined virtual one plane parallel to the X direction and the Y direction.

保持部21包括保持對象物9的框架(frame)211及馬達212。馬達212使框架211以與Z方向平行,即,與XY平面垂直的軸J1為中心而旋轉。保持部21是以對象物9的面的法線與X方向所成的角度能夠相對地變更的方式而保持對象物9。在圖2中,以兩點鏈線表示框架211旋轉的情形。 The holding unit 21 includes a frame 211 for holding the object 9 and a motor 212 . The motor 212 rotates the frame 211 about an axis J1 parallel to the Z direction, that is, perpendicular to the XY plane. The holding unit 21 holds the object 9 such that the angle between the normal line of the surface of the object 9 and the X direction can be relatively changed. In FIG. 2 , the frame 211 is rotated by a chain line of two dots.

照明部22包括光源221、光出射部222及透鏡223。在圖2中,省略光源221的圖示。照明部22的光軸J2與X方向平行,即,與YZ平面垂直。在本實施形態中,光源221是發光二極體(light-emitting diode,LED)。亦可使用其他裝置作為光源221。光源221所生成的光經由光纖導入至光出射部222。光出射部222自針孔(pin hole)射出光。即,光出射部222是點光源。光源221及光出射部222亦可成為一個單元。自光出射部222射出的光藉由透鏡223而轉換成平行光71。在圖1及圖2中,省略保持光出射部222或透鏡223的構成元件的圖示。 The lighting unit 22 includes a light source 221 , a light emitting unit 222 and a lens 223 . In FIG. 2 , illustration of the light source 221 is omitted. The optical axis J2 of the illumination unit 22 is parallel to the X direction, that is, perpendicular to the YZ plane. In this embodiment, the light source 221 is a light-emitting diode (LED). Other devices can also be used as the light source 221 . The light generated by the light source 221 is introduced into the light emitting part 222 through an optical fiber. The light emitting part 222 emits light from a pin hole. That is, the light emitting part 222 is a point light source. The light source 221 and the light emitting part 222 can also be a unit. The light emitted from the light emitting portion 222 is converted into parallel light 71 by the lens 223 . In FIGS. 1 and 2 , illustration of constituent elements holding the light emitting portion 222 and the lens 223 is omitted.

藉由照明部22,將平行光71自X方向照射至對象物9。透過對象物9的光被導向屏幕23。藉此,使透過對象物9的光投影至屏幕23。攝像部24取得已投影至屏幕23的像。若準確地表達,則是攝像部24取得表示已投影至屏幕23的對象物9的像的資料。攝像部24自與保持部21的框架211不發生干擾的位置拍 攝屏幕23。攝像部24是自斜上方拍攝屏幕23,故所取得的圖像被修正為與自正面拍攝的情況相同的形狀。在圖1及圖2中,省略支持屏幕23及攝像部24的構成元件。控制部25對保持部21的馬達212及攝像部24進行控制。 The parallel light 71 is irradiated to the object 9 from the X direction by the illuminating part 22 . The light transmitted through the object 9 is guided to the screen 23 . Thereby, the light transmitted through the object 9 is projected onto the screen 23 . The imaging unit 24 acquires an image projected on the screen 23 . Expressed precisely, the imaging unit 24 acquires data representing an image of the object 9 projected on the screen 23 . The imaging unit 24 takes pictures from a position that does not interfere with the frame 211 of the holding unit 21. Capture screen 23. Since the imaging unit 24 captures the screen 23 from obliquely above, the acquired image is corrected to have the same shape as when it is captured from the front. In FIGS. 1 and 2 , constituent elements of the support screen 23 and the imaging unit 24 are omitted. The control unit 25 controls the motor 212 of the holding unit 21 and the imaging unit 24 .

圖3是表示製造對象物9的情形的概略圖。圖3表示藉由日本專利特開2010-46798號公報所揭示的製造方法而製造的情形,但對象物9的製造方法並不限定於所述方法。自模具81擠出的薄片狀的熔融樹脂首先被導入至高剛性的主輥82與第一金屬彈性輥83之間的間隙內。使樹脂夾於主輥82與第一金屬彈性輥83之間而成形,並藉由主輥82的旋轉而運送至主輥82上。將樹脂進而導入至主輥82與第二金屬彈性輥84之間的間隙內,夾於主輥82與第二金屬彈性輥84之間而進一步成形。 FIG. 3 is a schematic diagram showing a state of manufacturing object 9 . FIG. 3 shows a state of being manufactured by the manufacturing method disclosed in Japanese Patent Application Laid-Open No. 2010-46798, but the manufacturing method of the object 9 is not limited to the method described above. The sheet-shaped molten resin extruded from the die 81 is first introduced into the gap between the highly rigid main roll 82 and the first metal elastic roll 83 . The resin is formed by being sandwiched between the main roll 82 and the first metal elastic roll 83 , and is conveyed onto the main roll 82 by the rotation of the main roll 82 . The resin is further introduced into the gap between the main roll 82 and the second metal elastic roll 84 , and is sandwiched between the main roll 82 and the second metal elastic roll 84 to be further shaped.

將樹脂藉由第二金屬彈性輥84的旋轉,而運送至第二金屬彈性輥84上,並成為連續的對象物90而朝向以符號91表示的運送方向進行運送。圖1及圖2所示的對象物9是切取對象物90的一部分的物體。 The resin is conveyed onto the second metal elastic roller 84 by the rotation of the second metal elastic roller 84 , and is conveyed as a continuous object 90 in the conveying direction indicated by reference numeral 91 . The object 9 shown in FIGS. 1 and 2 is an object obtained by cutting out a part of the object 90 .

圖4是表示對象物9的圖。在表示與圖3的運送方向91相對應的方向的箭頭上標註符號91。在以下的說明中,與運送方向91相對應的對象物9上的方向亦稱為「運送方向91」。並且,將與對象物9的面平行,並且與運送方向91垂直的方向稱為寬度方向92。在圖1及圖2中,寬度方向92與XY平面垂直。 FIG. 4 is a diagram showing an object 9 . A symbol 91 is attached to an arrow indicating a direction corresponding to the conveying direction 91 in FIG. 3 . In the following description, the direction on the object 9 corresponding to the conveyance direction 91 is also referred to as "transportation direction 91". In addition, a direction parallel to the surface of the object 9 and perpendicular to the transport direction 91 is referred to as a width direction 92 . In FIGS. 1 and 2 , the width direction 92 is perpendicular to the XY plane.

圖5是表示測量裝置1的動作的流程的圖。首先,將對 象物9安裝於保持部21的框架211。如以上所述,對象物9的面與XY平面垂直,並且運送方向91與XY平面平行。控制部25使馬達212旋轉,而將對象物9配置於預定的最初的旋轉位置。藉此,以對象物9的面的法線與X方向所成的角度成為初始的第一角度的方式而配置對象物9(步驟S11)。對象物9的面的法線(準確而言,法線方向)並非面上的各位置的嚴格意義上的法線,而是指保持於框架211的對象物9的面的大致法線方向,是相對於框架211或馬達212的旋轉軸而固定的方向。 FIG. 5 is a diagram showing the flow of operations of the measurement device 1 . First, the The object 9 is mounted on the frame 211 of the holding part 21 . As described above, the surface of the object 9 is perpendicular to the XY plane, and the conveyance direction 91 is parallel to the XY plane. The control unit 25 rotates the motor 212 to arrange the object 9 at a predetermined initial rotation position. Thereby, the object 9 is arranged so that the angle formed by the normal line of the surface of the object 9 and the X direction becomes an initial first angle (step S11). The normal (accurately, the normal direction) of the surface of the object 9 is not the normal line in the strict sense of each position on the surface, but the approximate normal direction of the surface of the object 9 held by the frame 211, is a direction fixed with respect to the rotation axis of the frame 211 or the motor 212 .

光源221所生成的光自光出射部222射出,而將平行光71自X方向照射至對象物9(步驟S12)。當然,步驟S11與步驟S12的順序亦可調換。藉由向對象物9照射光,而將透過對象物9的光投影至屏幕23而形成對象物9的投影像。藉由控制部25的控制,而使攝像部24取得投影像的圖像(步驟S13)。圖像的資料經由控制部25而記憶於電腦12的記憶部。 The light generated by the light source 221 is emitted from the light emitting part 222, and the parallel light 71 is irradiated to the object 9 from the X direction (step S12). Of course, the order of step S11 and step S12 can also be exchanged. By irradiating light onto the object 9 , the light transmitted through the object 9 is projected onto the screen 23 to form a projected image of the object 9 . Under the control of the control unit 25, the imaging unit 24 acquires an image of the projected image (step S13). Image data is stored in the memory unit of the computer 12 via the control unit 25 .

控制部25使馬達212旋轉而將對象物9配置於下一個旋轉位置。藉此,以對象物9的面的法線與X方向所成的角度成為第二角度的方式而配置對象物9(步驟S14、步驟S15)。再者,對象物9是以軸J1為中心而旋轉,因此對象物9的面與XY平面垂直,並且運送方向91與XY平面平行的狀態得以維持。藉由再次利用攝像部24執行圖像的取得,而將第二次的圖像的資料記憶於電腦12的記憶部(步驟S13)。 The control unit 25 rotates the motor 212 to arrange the object 9 at the next rotational position. Thereby, the object 9 is arranged so that the angle formed by the normal line of the surface of the object 9 and the X direction becomes a 2nd angle (step S14, step S15). Furthermore, since the object 9 rotates around the axis J1, the surface of the object 9 is perpendicular to the XY plane, and the state in which the conveyance direction 91 is parallel to the XY plane is maintained. The data of the second image is stored in the memory section of the computer 12 by performing image acquisition again by the imaging section 24 (step S13 ).

藉由控制部25的控制,而一邊變更對象物9的面與X 方向所成的第二角度,一邊反覆利用攝像部24進行拍攝(步驟S13~步驟S15)。藉此,取得多個圖像,並將其資料記憶於電腦12。然後,停止利用照明部22向對象物9照射光(步驟S16)。 By the control of the control unit 25, while changing the plane and X of the object 9 The second angle formed by the directions is repeatedly photographed by the imaging unit 24 (step S13 to step S15). Thereby, a plurality of images are obtained, and their data are stored in the computer 12 . Then, light irradiation to the object 9 by the illumination unit 22 is stopped (step S16).

步驟S15中的對象物9的旋轉角度的間距較佳為15度以下。並且,旋轉方向及旋轉角度的間距可進行各種變更,但較佳為旋轉方向及旋轉角度的間距為固定。再者,在所述說明中,是將對象物9的面的法線與X方向所成的最初的角度稱為「第一角度」,將第二次以後的角度稱為「第二角度」,但該些均為便於說明的表達,不一定必須加以區別。在以下的其他實施形態中亦同。 The pitch of the rotation angle of the object 9 in step S15 is preferably 15 degrees or less. In addition, although the pitch of the rotation direction and the rotation angle can be changed in various ways, it is preferable that the pitch of the rotation direction and the rotation angle is constant. In addition, in the above description, the first angle formed by the normal line of the surface of the object 9 and the X direction is referred to as "first angle", and the second and subsequent angles are referred to as "second angle". , but these are expressions for convenience of explanation and do not necessarily have to be distinguished. The same applies to other embodiments described below.

圖6是表示所取得的圖像的一例即圖像60的圖。圖6的橫方向61是與對象物9上的運送方向91相對應的方向。縱方向62是與對象物9的寬度方向92相對應的方向。在圖6中,利用沿縱方向62延伸的多個虛線來表現在圖像60中出現沿縱方向62延伸的多個條紋的現象。該些條紋是由於在運送方向91上對象物9的厚度或表面形狀發生變化而產生。條紋在對象物9的寬度方向92上延伸,故以下稱為「橫條紋」。 FIG. 6 is a diagram showing an image 60 as an example of the acquired image. The horizontal direction 61 in FIG. 6 is a direction corresponding to the transport direction 91 on the object 9 . The longitudinal direction 62 is a direction corresponding to the width direction 92 of the object 9 . In FIG. 6 , the phenomenon that a plurality of stripes extending in the longitudinal direction 62 appear in the image 60 is represented by a plurality of dotted lines extending in the longitudinal direction 62 . These streaks are caused by changes in the thickness or surface shape of the object 9 in the transport direction 91 . Since the stripes extend in the width direction 92 of the object 9, they are called "horizontal stripes" hereinafter.

以符號63表示的矩形表示圖像60之中由電腦12的運算部121處理的區域。以下,將所述區域63稱為「圖像處理範圍」。圖7是放大地表示圖像處理範圍63的圖。圖像處理範圍63被分成在縱方向62上延伸的多個細長的單位區域64。多個單位區域64在橫方向61上排列。一個單位區域64的橫方向61上的寬度是一個畫素以上的寬度,在本實施形態中,在各單位區域64內在橫 方向61上排列四個畫素。 A rectangle indicated by a symbol 63 represents an area of the image 60 to be processed by the computing unit 121 of the computer 12 . Hereinafter, the area 63 is referred to as "image processing range". FIG. 7 is an enlarged view showing the image processing range 63 . The image processing range 63 is divided into a plurality of elongated unit areas 64 extending in the longitudinal direction 62 . A plurality of unit regions 64 are arranged in the lateral direction 61 . The width of one unit area 64 in the horizontal direction 61 is equal to or greater than one pixel, and in this embodiment, each unit area 64 is horizontally Four pixels are arranged in direction 61 .

運算部121求出各單位區域64的畫素值的平均作為所述單位區域64的明度。實際上,是進行消除照明光的強度的不均一或光學系統的影響的修正。具體而言,預先在不存在對象物9的狀態下,攝像部24取得屏幕23的圖像。運算部121求出圖像中的各單位區域64的明度作為參照明度。繼而,將在存在對象物9的狀態下所取得的圖像中的各單位區域64的明度除以參照明度。藉此,獲得經修正的明度。經修正的明度表示與單位區域64相對應的對象物9上的區域的透過率。在以下的說明中,將經修正的明度簡稱為「明度」。 The calculation unit 121 obtains the average value of the pixel values of each unit area 64 as the lightness of the unit area 64 . Actually, correction is performed to eliminate the unevenness of the intensity of the illumination light or the influence of the optical system. Specifically, the imaging unit 24 acquires an image of the screen 23 in advance in a state where the object 9 does not exist. The computing unit 121 obtains the brightness of each unit area 64 in the image as a reference brightness. Next, the lightness of each unit area 64 in the image acquired with the object 9 present is divided by the reference lightness. Thereby, corrected lightness is obtained. The corrected lightness represents the transmittance of the area on the object 9 corresponding to the unit area 64 . In the following description, the corrected lightness is simply referred to as "lightness".

運算部121對藉由反覆實施步驟S13而取得的多個圖像進行所述運算。藉此,取得各圖像的橫方向61,即,與運送方向91相對應的方向上的明度的變化(步驟S17)。圖8是表示明度變化的一例的圖。橫軸表示單位區域64的編號,縱軸表示明度。由圖8可知,由於某些原因,明度產生有變化。並且,可知明度的變化具有某種程度的週期性。 The computing unit 121 performs the computing on a plurality of images obtained by repeatedly performing step S13. Thereby, changes in brightness in the horizontal direction 61 of each image, that is, in the direction corresponding to the transport direction 91 are obtained (step S17 ). FIG. 8 is a diagram showing an example of brightness change. The horizontal axis represents the number of the unit area 64, and the vertical axis represents lightness. It can be seen from Figure 8 that due to some reasons, the brightness has changed. Furthermore, it can be seen that the change in brightness has some degree of periodicity.

運算部121求出各圖像的明度變化的最大值。作為明度的變化,可使用各種值,在本實施形態中,是取得相互鄰接的單位區域64之間的明度差,即,自其中一者的明度減去另一者的明度所得的值的絕對值作為明度的變化。繼而,自各圖像取得明度變化的最大值。以下,將明度變化的最大值稱為「對比度(contrast)」。各圖像分別對應於各旋轉位置,故藉由求出自對象物9的一個 樣品取得的各圖像的對比度,可獲得旋轉位置與對比度的關係。 The calculation unit 121 obtains the maximum value of the brightness change of each image. Various values can be used as the change in brightness. In this embodiment, the difference in brightness between adjacent unit regions 64, that is, the absolute value obtained by subtracting the brightness of one of them from the brightness of the other is obtained. Value as a change in lightness. Then, the maximum value of brightness change is acquired from each image. Hereinafter, the maximum value of brightness change is called "contrast". Each image corresponds to each rotation position respectively, so by obtaining a The contrast of each image obtained by the sample can obtain the relationship between the rotation position and the contrast.

圖9是例示對象物9的旋轉位置與對比度的關係的圖。圖9所示的資訊是顯示於圖1的顯示器13(步驟S18)。符號901、符號902、符號903表示針對不同的對象物9的測量結果。但是,圖9並未準確地表現實際獲得的測量結果,而是基於實際的測量結果,描繪對比度相對於旋轉位置的典型關係。旋轉位置表示對象物9的面的法線與X方向所成的角度,故而以下將旋轉位置亦稱為「入射角」。入射角0度是平行光71垂直地入射至對象物9的狀態。 FIG. 9 is a diagram illustrating the relationship between the rotational position of the object 9 and the contrast. The information shown in FIG. 9 is displayed on the display 13 of FIG. 1 (step S18). Symbols 901 , 902 , and 903 represent measurement results for different objects 9 . However, FIG. 9 does not accurately represent the actually obtained measurement results, but instead depicts a typical relationship of contrast with respect to rotational position based on actual measurement results. The rotation position represents the angle formed by the normal line of the surface of the object 9 and the X direction, so the rotation position is also referred to as "incident angle" hereinafter. An incident angle of 0 degrees is a state where the parallel light 71 is perpendicularly incident on the object 9 .

一般而言,若入射角增大,則對比度增大。其原因在於,若朝向對象物9的照明光的入射角增大,則鄰接的單位區域64之間的明度差增大。然而,當明度變化的一個週期的長度短時,若照明光的入射角過度增大,則一個週期的長度會包含在一個單位區域64內,從而明度的變化反而下降。其結果為,對比度下降。 In general, as the incident angle increases, the contrast increases. The reason for this is that as the incident angle of the illumination light toward the object 9 increases, the brightness difference between adjacent unit regions 64 increases. However, when the length of one cycle of brightness change is short, if the incident angle of the illumination light is excessively increased, the length of one cycle is included in one unit area 64 , and the change in brightness decreases instead. As a result, contrast decreases.

在圖9的示例的情況下,在標註符號901的線中,入射角為60度時對比度為最大。在標註符號902的線中,入射角為70度時對比度為最大。在標註符號903的線中,入射角為0度至80度時,對比度單調遞增。明度的變化表示運送方向91上的對象物9的厚度或表面形狀的變化,故可以說,在符號901的情況,對象物9存在週期長度短的週期性的厚度或表面形狀的變化,在符號902的情況,對象物9存在週期長度較符號901的情況更長的週期性的厚度或表面形狀的變化,在符號903的情況,對象物9存在 週期長度較符號902的情況更長的週期性的厚度或表面形狀的變化。作為圖9所示的資訊的測量值表示運送方向91上的對象物9的厚度或表面形狀的變化的週期性的特性,即,對象物9上的橫條紋的特性。更準確而言,表示由橫條紋引起的光的透過或反射的不均的特性。再者,對比度自增加轉為減少的位置受到單位區域64的橫方向61的寬度的影響。即,對比度自增加轉為減少的位置取決於攝像部24的畫素的尺寸及單位區域64的橫方向61的畫素數。 In the case of the example in FIG. 9 , in the line marked with reference numeral 901 , the contrast becomes maximum when the incident angle is 60 degrees. In the line marked with reference numeral 902, the contrast ratio is maximum when the incident angle is 70 degrees. In the line marked with symbol 903 , the contrast increases monotonously when the incident angle is from 0° to 80°. The change in lightness represents the change in the thickness or surface shape of the object 9 on the conveying direction 91, so it can be said that in the case of symbol 901, the object 9 has periodic thickness or surface shape changes with a short cycle length. In the case of 902, the object 9 has periodic changes in thickness or surface shape whose period length is longer than that in the case of symbol 901, and in the case of symbol 903, the object 9 has A periodic change in thickness or surface shape with a period length longer than in the case of symbol 902 . The measured value as the information shown in FIG. 9 represents the periodic characteristics of the change in the thickness or surface shape of the object 9 in the conveying direction 91 , that is, the characteristics of the horizontal stripes on the object 9 . More precisely, it represents the characteristic of uneven transmission or reflection of light due to horizontal stripes. Furthermore, the position where the contrast turns from increasing to decreasing is affected by the width of the unit area 64 in the lateral direction 61 . That is, the position where the contrast changes from increasing to decreasing depends on the pixel size of the imaging unit 24 and the number of pixels in the horizontal direction 61 of the unit area 64 .

在測量裝置1中,藉由使對象物9旋轉,可容易地使橫條紋的特性在二維空間內進行數值化及曲線圖(graph)化。 In the measurement device 1 , by rotating the object 9 , the characteristics of the horizontal stripes can be easily digitized and graphed in two-dimensional space.

以如上所述的方式而獲得的資訊可用於各種用途。例如,在圖9中,當對比度在右側大時,可以說在對象物9上,產生有在寬度方向92上延伸,並且相對於運送方向91的長週期的橫條紋。當對比度在左側大時,可以說在對象物9上,產生有在寬度方向92上延伸,並且相對於運送方向91的短週期的橫條紋。因此,當表示對比度的線存在於左上時,可以說對象物9存在短週期的容易引人注目的橫條紋。藉此,例如,當入射角為以虛線911表示的70度以下時,若對比度為以虛線912表示的0.2以上,則可判斷為經製造的構件不滿足品質基準。由於可利用照明光的入射角及對比度這兩個參數來評估品質,故例如,當對象物9為觸控面板用的透明板時,能夠以需要的視場角參照曲線圖而定量地評估橫條紋是否明顯。 Information obtained in the manner described above can be used for various purposes. For example, in FIG. 9 , when the contrast is greater on the right side, it can be said that horizontal stripes extending in the width direction 92 and having a long period with respect to the conveyance direction 91 are generated on the object 9 . When the contrast is large on the left side, it can be said that horizontal stripes extending in the width direction 92 and having a short period with respect to the conveyance direction 91 are generated on the object 9 . Therefore, when a line indicating contrast exists on the upper left, it can be said that the object 9 has short-period horizontal stripes that are easy to be noticed. Thus, for example, when the incident angle is 70 degrees or less indicated by the dotted line 911 , if the contrast is greater than or equal to 0.2 indicated by the dotted line 912 , it can be determined that the manufactured member does not satisfy the quality standard. Since the quality can be evaluated by using the two parameters of the incident angle of the illumination light and the contrast, for example, when the object 9 is a transparent plate for a touch panel, it can be quantitatively evaluated by referring to the graph with the required viewing angle. Are the stripes obvious.

並且,圖9的資訊亦可用於製造裝置啟動時等的調整。對比度為最大的入射角是根據製造裝置的調整不良部位而確定。所謂裝置的調整不良,是指例如相互咬合的齒輪的位置調整的不良、熔融樹脂的不適當的溫度、輥間的不適當的速度差、模具與輥間隙之間的距離的調整不良等。由於該些成形條件的調整不良,而有時會在對象物9出現具有特有的週期性的橫條紋。因此,藉由取得圖9所示的資訊,可迅速掌握裝置的調整不良的原因。例如,自橫條紋的特性,可確定橫條紋是作為因哪個齒輪產生的齒輪痕跡(gear mark)而出現的,從而可迅速確定需要調整的部位。 In addition, the information in FIG. 9 can also be used for adjustments at the start-up of the manufacturing equipment. The incident angle at which the contrast becomes the maximum is determined according to the poorly adjusted part of the manufacturing device. The so-called poor adjustment of the device refers to, for example, poor adjustment of the position of meshing gears, improper temperature of molten resin, improper speed difference between rolls, and poor adjustment of the distance between the mold and the roll gap. Owing to poor adjustment of these molding conditions, there may be cases where characteristic periodic horizontal stripes appear on the object 9 . Therefore, by acquiring the information shown in FIG. 9 , it is possible to quickly grasp the cause of the adjustment failure of the device. For example, from the characteristics of the horizontal stripes, it can be determined which gear the horizontal stripes appear as a gear mark (gear mark), so that the position that needs to be adjusted can be quickly determined.

圖9的資訊亦可用於操作者對製造裝置的操作能力的評估。當存在尚說不上是所述調整不良的橫條紋時,藉由預先獲得由相同材料製造時熟練者操作裝置時的資訊,可判斷是否有進一步提高當前的操作者的能力的餘地。並且,亦會成為判斷是否需要進一步學習裝置的哪個部分的細微操作的材料。 The information in FIG. 9 can also be used by the operator to evaluate the operational capability of the manufacturing equipment. When there are horizontal stripes that cannot be said to be poorly adjusted, it can be judged whether there is room for further improvement of the current operator's ability by obtaining information in advance when a skilled person operates the device when it is made of the same material. In addition, it will also serve as a material for judging whether it is necessary to further learn the fine operation of which part of the device.

在測量裝置1中,亦可進行所述運算以外的處理。藉由圖像取得裝置11獲得多個圖像,可基於該些圖像掌握運送方向91上的對象物9的厚度或表面形狀的變化的特性,從而可進行各種判斷,所述多個圖像是由自多個角度透過對象物9的光所形成。 In the measurement device 1, processing other than the above-described calculations may also be performed. A plurality of images are obtained by the image acquisition device 11, and based on these images, the characteristics of the change in thickness or surface shape of the object 9 in the conveying direction 91 can be grasped, so that various judgments can be made. It is formed by light passing through the object 9 from multiple angles.

圖10是表示本發明的第二實施形態的測量裝置的圖像取得裝置11的平面圖。測量裝置的圖像取得裝置11以外的部分與圖1同樣。在圖10中,省略了照明部22的光源221及控制部 25的圖示。在以下的說明中,對與第一實施形態具有相同功能的構成元件標註相同符號。圖像取得裝置11的攝像部24接收來自對象物9的反射光。對象物9既可為透明,亦可為不透明。對象物9的被照射照明光的面大致為平面。 Fig. 10 is a plan view showing an image acquisition device 11 of a measurement device according to a second embodiment of the present invention. Parts other than the image acquisition device 11 of the measuring device are the same as those in FIG. 1 . In FIG. 10 , the light source 221 and the control unit of the lighting unit 22 are omitted. 25 illustration. In the following description, the same code|symbol is attached|subjected to the component which has the same function as 1st Embodiment. The imaging unit 24 of the image acquisition device 11 receives reflected light from the object 9 . The object 9 may be transparent or opaque. The surface of the object 9 irradiated with the illumination light is substantially flat.

保持部21及照明部22的結構與圖1及圖2同樣。在圖10中,亦將照明部22的光軸的方向確定為X方向,對象物9的面與XY平面垂直,並且對象物9上的運送方向91與XY平面平行。 The structures of the holding unit 21 and the lighting unit 22 are the same as those in FIGS. 1 and 2 . In FIG. 10 , the direction of the optical axis of the illuminating unit 22 is also defined as the X direction, the surface of the object 9 is perpendicular to the XY plane, and the transport direction 91 on the object 9 is parallel to the XY plane.

攝像部24包括透鏡241、感測器部242及支持部243。透鏡241及感測器部242是固定於支持部243。雖省略圖示,但如以兩點鏈線所示,進而設置有使攝像部24以保持部21的軸J1為中心旋轉的旋轉機構。藉此,當對象物9以軸J1為中心而旋轉時,攝像部24進行移動,以使反射光入射至攝像部24。入射至攝像部24的反射光經由透鏡241而導入至感測器部242,將圖像的資料經由控制部25記憶於電腦12的記憶部。 The imaging unit 24 includes a lens 241 , a sensor unit 242 and a support unit 243 . The lens 241 and the sensor part 242 are fixed on the supporting part 243 . Although not shown in the drawing, as shown by chain lines, a rotation mechanism for rotating the imaging unit 24 around the axis J1 of the holding unit 21 is further provided. Thereby, when the object 9 rotates around the axis J1 , the imaging unit 24 moves so that reflected light enters the imaging unit 24 . The reflected light incident on the imaging unit 24 is introduced into the sensor unit 242 through the lens 241 , and image data is stored in the memory unit of the computer 12 through the control unit 25 .

測量裝置1的動作與第一實施形態同樣。如圖5所示,首先,以對象物9的面的法線與X方向所成的角度成為初始的第一角度的方式而配置對象物9(步驟S11)。將平行光71自X方向照射至對象物9(步驟S12),藉由攝像部24接收經對象物9反射的光而取得圖像(步驟S13)。圖像的資料是經由控制部25而記憶於電腦12的記憶部。 The operation of the measurement device 1 is the same as that of the first embodiment. As shown in FIG. 5 , first, the object 9 is arranged so that the angle formed by the normal line of the surface of the object 9 and the X direction becomes an initial first angle (step S11 ). The parallel light 71 is irradiated to the object 9 from the X direction (step S12 ), and the imaging unit 24 receives the light reflected by the object 9 to obtain an image (step S13 ). The image data is stored in the memory unit of the computer 12 via the control unit 25 .

控制部25使馬達212旋轉而將對象物9配置於下一個 旋轉位置。藉此,以對象物9的面的法線與X方向所成的角度成為第二角度的方式而配置對象物9(步驟S14、步驟S15)。攝像部24亦進行移動,以使反射光入射。藉由再次利用攝像部24執行圖像的取得,而將第二個圖像的資料記憶於電腦12的記憶部(步驟S13)。 The control unit 25 rotates the motor 212 to place the object 9 on the next Rotate position. Thereby, the object 9 is arranged so that the angle formed by the normal line of the surface of the object 9 and the X direction becomes a 2nd angle (step S14, step S15). The imaging unit 24 also moves so that reflected light enters. The data of the second image is stored in the storage unit of the computer 12 by performing image acquisition again by the imaging unit 24 (step S13 ).

藉由控制部25的控制,而一邊變更對象物9的面與X方向所成的第二角度及攝像部24的位置,一邊反覆利用攝像部24進行攝像(步驟S13~步驟S15)。藉此,取得多個圖像,並將其資料記憶於電腦12。然後,停止利用照明部22向對象物9照射光(步驟S16)。 Under the control of the control unit 25, while changing the second angle between the surface of the object 9 and the X direction and the position of the imaging unit 24, the imaging unit 24 repeatedly performs imaging (step S13 to step S15). Thereby, a plurality of images are obtained, and their data are stored in the computer 12 . Then, light irradiation to the object 9 by the illumination unit 22 is stopped (step S16).

所取得的圖像藉由與第一實施形態同樣的處理,而取得各單位區域64的明度(準確而言,為修正後的明度)。用於明度的修正的參照明度是由如下的圖像求出,所述圖像是使保持部21保持平坦的反射板而取得的圖像。運算部121針對多個圖像進行所述運算。藉此,取得各圖像的橫方向61,即,與運送方向91相對應的方向上的明度的變化(步驟S17)。明度的變化具有週期性。運算部121藉由與第一實施形態同樣的處理,而求出各圖像的明度變化的最大值即對比度。 The obtained image is subjected to the same processing as in the first embodiment, and the brightness (accurately, the brightness after correction) of each unit area 64 is obtained. The reference brightness used for brightness correction is obtained from an image obtained by holding the holding portion 21 on a flat reflector. The computing unit 121 performs the computation on a plurality of images. Thereby, changes in brightness in the horizontal direction 61 of each image, that is, in the direction corresponding to the transport direction 91 are obtained (step S17 ). Brightness changes periodically. The calculation unit 121 obtains the contrast which is the maximum value of the brightness change of each image by the same processing as that of the first embodiment.

當攝像部24接收反射光時,明度的變化表示運送方向91上的對象物9的表面的形狀的變化。藉由自各圖像取得對比度,而獲得依據圖9的資訊即測量值。即,獲得入射角與對比度的關係。入射角與對比度的關係是顯示於顯示器13(步驟S18)。 測量值表示運送方向91上的對象物9的表面形狀的變化的週期性的特性,即,對象物9上的橫條紋的特性。更準確而言,表示由橫條紋引起的光的反射的不均的特性。並且,在測量裝置中,藉由使對象物9旋轉,可容易地使橫條紋的特性在二維空間內進行數值化及曲線圖化。 When the imaging unit 24 receives reflected light, a change in brightness indicates a change in the shape of the surface of the object 9 in the transport direction 91 . By deriving the contrast from each image, the information according to FIG. 9, ie the measurement, is obtained. That is, the relationship between the incident angle and the contrast is obtained. The relationship between the incident angle and the contrast is displayed on the display 13 (step S18). The measured value represents the periodic characteristic of the change in the surface shape of the object 9 in the transport direction 91 , that is, the characteristic of the horizontal stripes on the object 9 . More precisely, it represents the characteristic of uneven reflection of light due to horizontal stripes. Furthermore, in the measurement device, by rotating the object 9, the characteristics of the horizontal stripes can be easily digitized and graphed in two-dimensional space.

關於自作為反射型的測量裝置的第二實施形態獲得的資訊,亦與第一實施形態同樣地,可用於製造物的合格與否判定、裝置的調整不良、操作者的熟練度的判定等各種用途。 As with the first embodiment, the information obtained from the second embodiment, which is a reflective measuring device, can be used for various purposes, such as judgment of good or bad of manufactured products, poor adjustment of equipment, judgment of operator's proficiency, etc. use.

在測量裝置中,亦可進行所述運算以外的處理。藉由取得多個圖像,可基於該些圖像掌握運送方向91上的對象物9的表面形狀的變化的特性,從而可進行各種判斷,所述多個圖像是藉由以多個角度在對象物9上反射的光而形成。 In the measurement device, processing other than the above calculations may also be performed. By acquiring a plurality of images, the characteristics of the change in the surface shape of the object 9 in the conveyance direction 91 can be grasped based on these images, so that various judgments can be made. It is formed by the light reflected on the object 9 .

在所述實施形態中,是取得多個圖像,但所取得的圖像亦可僅為兩個。即,由步驟S14進行的反覆處理亦可為一次。即使所取得的圖像僅為兩個,亦可掌握運送方向91上的對象物9的厚度或表面形狀的變化的特性。當然,如上所述,較佳為以一邊將對象物9的面的法線與X方向所成的角僅變更15度以下的角度,一邊反覆取得圖像為宜。藉此,可更確實地掌握運送方向91上的對象物9的厚度或表面形狀的變化的特性。當考慮到圖像取得時間時,在實際應用上,變更的角度為一度以上。 In the above embodiment, a plurality of images are obtained, but only two images may be obtained. That is, the iterative process performed by step S14 may be performed once. Even if only two images are acquired, the characteristics of the change in thickness or surface shape of the object 9 in the conveying direction 91 can be grasped. Of course, as described above, it is preferable to repeatedly acquire images while changing the angle formed by the normal line of the surface of the object 9 and the X direction by an angle of 15 degrees or less. This makes it possible to more reliably grasp the characteristics of changes in the thickness and surface shape of the object 9 in the conveying direction 91 . When the image acquisition time is taken into consideration, in practice, the angle of change is one degree or more.

所述實施形態的圖像取得裝置11及測量裝置1可進行各種各樣的變更。 The image acquisition device 11 and the measurement device 1 of the above-described embodiments can be modified in various ways.

在第一實施形態中,是攝像部24取得投影至屏幕23的對象物9的像,但亦可與第二實施形態同樣地,藉由攝像部24直接接收透過對象物9的光,而取得圖像。同樣地,在第二實施形態中,亦可將經對象物9反射的光導引至屏幕,由攝像部24取得投影至屏幕的像。如上所述,圖像取得裝置11亦可利用各種方法來取得來源於對象物9的圖像。 In the first embodiment, the imaging unit 24 acquires the image of the object 9 projected on the screen 23, but similarly to the second embodiment, the imaging unit 24 can directly receive the light transmitted through the object 9 to obtain the image. image. Similarly, in the second embodiment, the light reflected by the object 9 may be guided to the screen, and the image projected on the screen may be acquired by the imaging unit 24 . As described above, the image acquisition device 11 can also acquire the image originating from the object 9 by various methods.

當攝像部24直接接收來自對象物9的光時,如圖10所示,當感測器部242的受光面小於來自對象物9的光束的剖面時,需要使光聚集的透鏡241。但是,當感測器部242的受光面大於來自對象物9的光束的剖面時,透鏡241則可省略。 When the imaging unit 24 directly receives light from the object 9, as shown in FIG. However, when the light-receiving surface of the sensor part 242 is larger than the cross-section of the light beam from the object 9, the lens 241 can be omitted.

照射至對象物9的光並不限定於平行光。只要相對於Y方向而平行或收斂或發散,亦可相對於Z方向而散射。所謂相對於Y方向的收斂或發散,是指Y方向上的光束的寬度根據距光源的距離而逐漸縮小或逐漸擴大。當然,照明光亦可為相對於Z方向而收斂或發散的光。當照明光相對於Y方向而收斂或發散時,若對象物9上的運送方向91的位置不同,則所述位置與屏幕23或攝像部24之間的距離不同,因此可根據距離進行使圖像的各部位擴大或縮小的處理。該些處理可根據照明部22、對象物9與屏幕23或攝像部24的幾何學上的位置關係而容易地進行。 The light irradiated to the object 9 is not limited to parallel light. As long as they are parallel, convergent, or divergent with respect to the Y direction, they may also be scattered with respect to the Z direction. The so-called convergence or divergence with respect to the Y direction means that the width of the light beam in the Y direction gradually shrinks or gradually expands according to the distance from the light source. Of course, the illumination light can also be light that converges or diverges with respect to the Z direction. When the illumination light converges or diverges with respect to the Y direction, if the position on the object 9 in the conveying direction 91 is different, the distance between the position and the screen 23 or the imaging unit 24 will be different. The process of enlarging or shrinking each part of the image. These processes can be easily performed according to the geometrical positional relationship between the illumination unit 22 , the object 9 , and the screen 23 or the imaging unit 24 .

在圖10的第二實施形態中,攝像部24與對象物9的旋轉同步地進行旋轉,但亦可使對象物9的方向固定,而使照明部22及攝像部24以軸J1為中心進行旋轉。在圖2及圖10的示例中, 藉由使對象物9以與XY平面垂直的軸為中心而旋轉,可容易地變更朝向對象物9的照明光的入射角。 In the second embodiment of FIG. 10, the imaging unit 24 rotates in synchronization with the rotation of the object 9, but it is also possible to fix the direction of the object 9 and make the illumination unit 22 and the imaging unit 24 rotate around the axis J1. rotate. In the example shown in Figure 2 and Figure 10, By rotating the object 9 around the axis perpendicular to the XY plane, the incident angle of the illumination light toward the object 9 can be easily changed.

在圖2的第一實施形態中,對象物9並不限定於透明。例如,在攝像部24為紅外線相機的情況下,對象物9只要是使紅外線透過的物體即可,亦可為不透明。對象物9只要針對照明光具有透過性即可。 In the first embodiment shown in FIG. 2, the object 9 is not limited to being transparent. For example, when the imaging unit 24 is an infrared camera, the object 9 may be opaque as long as it transmits infrared rays. The object 9 only needs to be transparent to the illumination light.

在所述實施形態中,是使用一組的照明部22及攝像部24進行多次攝像,但亦可將多組的照明部22及攝像部24設置於測量裝置1。此時,可同時取得照明光的入射角度不同的多個圖像。亦可藉由將多組的照明部22及攝像部24設置於測量裝置1,而將測量裝置1以在線(in-line)方式設置於製造對象物9的製造裝置。藉此,可實現即時(real time)的產品檢查或品質評估。 In the above-described embodiment, multiple sets of illumination units 22 and imaging units 24 are used to perform multiple imaging, but a plurality of sets of illumination units 22 and imaging units 24 may be provided in the measurement device 1 . In this case, a plurality of images having different incident angles of illumination light can be acquired simultaneously. It is also possible to install the measuring device 1 in-line in the manufacturing apparatus of the manufacturing object 9 by installing a plurality of sets of the illuminating unit 22 and the imaging unit 24 on the measuring device 1 . Thereby, real-time product inspection or quality evaluation can be realized.

電腦12的運算部121的處理並不限定於所述實施形態中所說明的情況,而可進行各種運算,求出表示對象物9的橫條紋的特性的值。例如,亦可在所獲得的多個圖像中,分別求出在與對象物9的寬度方向92相對應的上下方向上排列的畫素的值的平均值,對與運送方向91相對應的方向上的所述平均值的變化進行傅立葉(Fourier)變換而求出橫條紋的特性。橫條紋的特性亦可藉由人以肉眼觀察確認多個圖像來掌握。自以多個角度透過或反射對象物9的光而獲得的多個圖像會顯示由橫條紋引起的光的透過或反射的不均的特性,因此無論在運算的情況,還是在肉眼觀察的情況,均可容易地掌握橫條紋的特性。 The processing of the calculation unit 121 of the computer 12 is not limited to the case described in the above-mentioned embodiment, and various calculations may be performed to obtain values representing the characteristics of the horizontal stripes of the object 9 . For example, it is also possible to obtain the average value of the values of the pixels arranged in the vertical direction corresponding to the width direction 92 of the object 9 among the plurality of obtained images, and to obtain the average value of the pixel values corresponding to the conveying direction 91. The change in the average value in the direction is subjected to Fourier transform to obtain the characteristics of the horizontal stripes. The characteristics of the horizontal stripes can also be grasped by observing and confirming multiple images with naked eyes. Multiple images obtained from light transmitted or reflected from the object 9 at multiple angles will show the unevenness of transmission or reflection of light caused by horizontal stripes. In any case, the characteristics of the horizontal stripes can be easily grasped.

所述實施形態及各變形例中的結構只要不相互矛盾,即可適當組合。 The configurations in the above-described embodiments and modifications may be appropriately combined as long as they do not contradict each other.

已對發明加以詳細描寫而進行說明,但是所述說明是例示性的而非限定性的作用。因此,可以說只要不脫離本發明的範圍,即可能存在多種變形或形態。 The invention has been described and described in detail, but the description is illustrative and not restrictive. Therefore, it can be said that various modifications and forms are possible without departing from the scope of the present invention.

S11~S18:步驟 S11~S18: steps

Claims (6)

一種測量方法,藉由測量裝置自薄片狀或板狀的對象物取得表示所述對象物的特性的測量值,薄片狀或板狀的所述對象物是一邊在運送方向上連續地運送一邊製造,所述測量方法包括如下的步驟:a)藉由所述測量裝置的保持部,以所述對象物的最大面與預定的XY平面垂直,並且所述運送方向與所述XY平面平行,並且所述對象物的所述最大面的法線與X方向所成的角度成為規定的角度的方式而配置所述對象物;b)藉由所述測量裝置的照明部,將相對於Y方向平行或收斂或發散的光自所述X方向照射至所述對象物;c)藉由所述測量裝置的攝像部,藉由取得將透過或反射所述對象物的光投影至屏幕而成的像,或藉由接收透過或反射所述對象物的光,而取得圖像;d)藉由所述測量裝置的運算部,取得與所述運送方向相對應的方向上的所述圖像的明度變化的最大值;e)藉由所述測量裝置的控制部,在維持所述對象物的所述最大面與所述XY平面垂直且所述運送方向與所述XY平面平行的狀態的同時,一邊改變所述對象物的所述最大面的法線與所述X方向所成的角度一邊反覆進行所述b)步驟至所述d)步驟,藉此所述攝像部取得多個圖像而所述運算部取得所述多個圖像的各自的所述明度變化的最大值;以及 f)藉由所述運算部,取得所述對象物的所述最大面的法線與所述X方向所成的角度和所述明度變化的最大值之間的關係。 A measuring method in which measured values representing characteristics of a sheet-like or plate-like object are obtained by a measuring device from a sheet-like or plate-like object manufactured while being continuously conveyed in a conveying direction , the measuring method includes the following steps: a) by means of the holding part of the measuring device, the largest surface of the object is perpendicular to a predetermined XY plane, and the conveying direction is parallel to the XY plane, and Arranging the object so that the angle formed by the normal line of the largest surface of the object and the X direction becomes a predetermined angle; Either convergent or divergent light is irradiated to the object from the X direction; c) by the imaging unit of the measurement device, an image formed by projecting the light transmitted or reflected by the object onto the screen is obtained , or obtain an image by receiving the light transmitted or reflected by the object; d) obtain the lightness of the image in the direction corresponding to the conveying direction by the computing part of the measuring device The maximum value of the change; e) by the control unit of the measuring device, while maintaining the state in which the maximum surface of the object is perpendicular to the XY plane and the conveyance direction is parallel to the XY plane, Step b) to step d) are repeated while changing the angle between the normal of the largest surface of the object and the X direction, whereby the imaging unit acquires a plurality of images and the calculation unit obtains a maximum value of the brightness change of each of the plurality of images; and f) Obtaining the relationship between the angle formed by the normal of the largest surface of the object and the X direction and the maximum value of the brightness change by the calculation unit. 如申請專利範圍第1項所述的測量方法,其中在所述e)步驟中,使所述對象物以與所述XY平面垂直的軸為中心而旋轉。 The measuring method according to claim 1, wherein in the e) step, the object is rotated around an axis perpendicular to the XY plane. 如申請專利範圍第1項或第2項所述的測量方法,其中在所述e)步驟中,一邊將所述對象物的所述最大面的法線與所述X方向所成的角度僅變更15度以下的角度,一邊反覆進行所述b)步驟至所述d)步驟。 As the measurement method described in item 1 or item 2 of the scope of patent application, wherein in the e) step, the angle formed by the normal line of the largest surface of the object and the X direction is only While changing the angle of 15 degrees or less, step b) to step d) are repeated. 一種測量裝置,自薄片狀或板狀的對象物取得表示所述對象物的特性的測量值,薄片狀或板狀的所述對象物是一邊在運送方向上連續地運送一邊製造,所述測量裝置包括:保持部,以在維持所述對象物的最大面與預定的XY平面垂直且所述運送方向與所述XY平面平行的狀態的同時,所述對象物的所述最大面的法線與X方向所成的角度能夠相對地變更的方式而保持所述對象物;照明部,將相對於Y方向而平行或收斂或發散的光自所述X方向照射至所述對象物;攝像部,藉由取得將透過或反射所述對象物的光投影至屏幕而成的像,或藉由接收透過或反射所述對象物的光,而取得圖像;運算部,取得與所述運送方向相對應的方向上的所述圖像的 明度變化的最大值;以及控制部,對所述攝像部及所述保持部進行控制;藉由所述控制部的控制,所述保持部一邊改變所述對象物的所述最大面的法線與所述X方向所成的角度而所述攝像部一邊反覆取得圖像,藉此取得多個圖像;所述運算部取得所述多個圖像的各自的所述明度變化的最大值,並取得所述對象物的所述最大面的法線與所述X方向所成的角度和所述明度變化的最大值之間的關係。 A measuring device that acquires measured values representing properties of a sheet-like or plate-like object that is produced while being continuously conveyed in a conveying direction, the measuring The device includes: a holding unit for maintaining a state where the largest surface of the object is perpendicular to a predetermined XY plane and the conveying direction is parallel to the XY plane, so that the normal line of the largest surface of the object The object is held in such a manner that the angle formed with the X direction can be relatively changed; the illumination unit irradiates the object from the X direction with light that is parallel, convergent or divergent with respect to the Y direction; the imaging unit , by obtaining an image formed by projecting the light transmitted or reflected by the object onto a screen, or by receiving the light transmitted or reflected by the object to obtain an image; corresponding to the orientation of the image on the a maximum value of brightness change; and a control unit that controls the imaging unit and the holding unit; under the control of the control unit, the holding unit changes the normal line of the maximum surface of the object the angle formed with the X direction while the imaging unit repeatedly acquires images, thereby acquiring a plurality of images; the calculation unit acquires the maximum value of the brightness change of each of the plurality of images, And obtain the relationship between the angle formed by the normal of the largest surface of the object and the X direction and the maximum value of the brightness change. 如申請專利範圍第4項所述的測量裝置,其中所述保持部使所述對象物以與所述XY平面垂直的軸為中心而旋轉。 The measuring device according to claim 4, wherein the holding unit rotates the object about an axis perpendicular to the XY plane. 如申請專利範圍第4項或第5項所述的測量裝置,其中藉由所述控制部的控制,一邊將所述對象物的所述最大面的法線與所述X方向所成的角度僅變更15度以下的角度,一邊取得所述多個圖像。 The measuring device according to claim 4 or claim 5, wherein the angle formed by the normal line of the largest surface of the object and the X direction is controlled by the control unit. The plurality of images are obtained while changing only an angle of 15 degrees or less.
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