JP2011075534A - Curved-surface appearance inspection apparatus - Google Patents

Curved-surface appearance inspection apparatus Download PDF

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JP2011075534A
JP2011075534A JP2009244922A JP2009244922A JP2011075534A JP 2011075534 A JP2011075534 A JP 2011075534A JP 2009244922 A JP2009244922 A JP 2009244922A JP 2009244922 A JP2009244922 A JP 2009244922A JP 2011075534 A JP2011075534 A JP 2011075534A
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curved surface
inspection apparatus
appearance inspection
camera
area camera
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Yasunori Watanabe
康徳 渡邊
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HIKICHI SEIKO KK
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HIKICHI SEIKO KK
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an image inspection apparatus for detecting defects, without fail, by suppressing reflection of illumination obstructing detection of defects to a target having a curved surface of a mirror surface. <P>SOLUTION: Planar lighting systems 3a, 3b are disposed, while an area camera body 1 is covered; a diffusion plate 4 is provided on the front of the planar lighting systems 3a, 3b; a camera unit for reflecting illumination on an inspection target for allowing defects to stand out is mounted to the tip of a perpendicular articulated robot; and the positional relation between the inspection target and the camera unit is held fixed at all times, thus defects existing on the surface of the inspection target having a curved surface of a mirror surface are detected. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

本発明は、カメラにより撮像した画像をコンピュータにより処理して、対象物表面の欠陥を検出する外観検査装置に関わるもので、特に、ほぼ鏡面の光沢を有する曲面に存在する、幅または大きさが1mm以下の微細な欠陥を検出し得る、外観検査装置に関するものである。  The present invention relates to an appearance inspection apparatus that detects an image captured by a camera by a computer and detects defects on the surface of an object. In particular, the present invention has a width or size that exists on a curved surface having a substantially specular gloss. The present invention relates to an appearance inspection apparatus capable of detecting minute defects of 1 mm or less.

これまで、鏡面で、かつ曲面の対象物の外観検査は、肉眼による検査が主であり、人手により対象物の角度を変えて、目視観察する方法が行われていた。曲率が小さい鏡面に対しては、レーザー光などを用いて反射による欠損の検査も行われているが、処理能力、処理時間などの課題が多く、対象物が限定されることが多い。  Until now, the visual inspection of a mirror-like and curved object has been mainly performed by the naked eye, and a method of visually observing the object by changing the angle of the object manually has been performed. A mirror surface with a small curvature is also inspected for defects by reflection using laser light or the like, but there are many problems such as processing capability and processing time, and the target is often limited.

また、鏡面でない曲面を有する対象物に対しては、エリアカメラによる画像を処理することによる外観検査が有効であり、欠陥を検出に必要な有効画素数を得るために、エリアを限定して複数回撮像を行うことになるが、曲面に対し、カメラの焦点距離を一定に保持するために、カメラ自体、または対象物に、上下左右や回転の動きを与える必要があった。  In addition, for an object having a curved surface that is not a mirror surface, appearance inspection by processing an image with an area camera is effective, and in order to obtain the effective number of pixels necessary for detecting a defect, a plurality of areas are limited. However, in order to keep the focal length of the camera constant with respect to the curved surface, it is necessary to give the camera itself or an object an up / down / left / right or rotational movement.

この他に、鏡面の曲面を有する対象物をエリアカメラで撮像した場合、カメラ自体の映り込みもあるが、対象物周囲の物も映り込む結果、欠陥を隠してしまうことがある。さらに、鏡面の対象物をエリアカメラで撮像する場合は、カメラ視野方向に対称に照明を配置する方法が一般的であるが、曲面に対しては、照明配置が困難な場合もある。  In addition, when an object having a mirror surface is captured by an area camera, the camera itself may be reflected, but as a result, objects around the object may also be reflected, thereby hiding defects. Furthermore, when imaging an object with a mirror surface with an area camera, a method of arranging illumination symmetrically with respect to the camera viewing direction is common, but illumination arrangement may be difficult for a curved surface.

曲面を画像処理により検査する方法として、特許文献1には、複数のLEDを配置した照明部とCCDカメラ部を、同一基板内に一体化したユニットを用いる技術が開示されている。また、特許文献2には、所定領域毎に光を照射して、曲面の正常部分が明部となって現れるように撮像した複数の画像を処理することにより、欠陥を検出する技術が開示されている。  As a method of inspecting a curved surface by image processing, Patent Document 1 discloses a technique using a unit in which an illumination unit in which a plurality of LEDs are arranged and a CCD camera unit are integrated in the same substrate. Patent Document 2 discloses a technique for detecting a defect by irradiating light for each predetermined region and processing a plurality of images captured so that a normal portion of a curved surface appears as a bright portion. ing.

しかしながら、これらの特許文献には、前記の問題点に対処し得る技術が、必ずしも十分に開示されてはいない。  However, these patent documents do not necessarily fully disclose a technique that can cope with the above-described problems.

特開2007−278713号公報  JP 2007-278713 A 特開2008−026149号公報  JP 2008-026149 A

従って本発明の課題は、エリアカメラを用いて、鏡面の曲面を有する対象物の外観検査を可能とする、曲面外観検査装置を提供することにある。  Therefore, the subject of this invention is providing the curved-surface external appearance inspection apparatus which enables the external appearance inspection of the target object which has a curved surface of a mirror surface using an area camera.

本発明は、鏡面の曲面を有する対象物の表面に存在する、カケ、キズ、ピンホールなどの欠陥を検出する手段としてエリアカメラを用いるために、カメラ、照明装置、多関節ロボットの組み合わせ構造を検討した結果なされたものである。  The present invention uses a combined structure of a camera, a lighting device, and an articulated robot in order to use an area camera as a means for detecting defects such as cracks, scratches, and pinholes existing on the surface of an object having a mirror surface. It was made as a result of examination.

即ち、本発明は、エリアカメラと、前記エリアカメラの軸方向と一定の角度をなすように配置されてなる複数の面状照明装置と、前記エリアカメラのレンズの周囲に配置され、前記面状照明装置による照明光を拡散させるための拡散板とを有する撮像部と、撮像の対象物に対する前記撮像部の位置及び角度を制御する機能を有する多関節ロボットを有し、前記照明光を前記対象物に照射撮像して得られる画像により、前記対象物の欠陥を検出する機能を備えたことを特徴とする曲面外観検査装置である。  That is, the present invention provides an area camera, a plurality of planar illumination devices arranged so as to form a certain angle with the axial direction of the area camera, and the area camera. An imaging unit having a diffusing plate for diffusing illumination light from the illumination device; and an articulated robot having a function of controlling a position and an angle of the imaging unit with respect to an object to be imaged; A curved surface appearance inspection apparatus having a function of detecting a defect of the object from an image obtained by irradiating and imaging the object.

また、本発明は、前記面状照明装置と前記拡散板が一体化されてなることを特徴とする、前記の曲面外観検査装置である。  Moreover, the present invention is the curved surface appearance inspection apparatus, wherein the planar illumination device and the diffusion plate are integrated.

また、本発明は、前記照明光が前記対象物を照射する範囲が、前記エリアカメラの視野よりも広いことを特徴とする、前記の曲面外観検査装置である。  Further, the present invention is the curved surface appearance inspection apparatus, wherein a range in which the illumination light irradiates the object is wider than a field of view of the area camera.

本発明による曲面外観検査装置は前記のような構造を具備しているので、多関節ロボットにより、エリアカメラの焦点および対象物に対する角度を、任意に調整することが可能である。また、照明装置は、エリアカメラの周囲に配置された面状照明装置の照明光を、拡散板を介して対象物に照射するので、均一な照明光を対象物へ照射することが可能であり、反射を抑制でき、照明装置自体の対象物への映り込みも抑制ができる。しかも本発明においては、面状照明装置と拡散板が一体化されて多関節ロボットに取り付けられているので、照明光の状態が、多関節ロボットの動作などによって影響を受けることが極めて少ない。  Since the curved surface appearance inspection apparatus according to the present invention has the above-described structure, the articulated robot can arbitrarily adjust the focal point of the area camera and the angle with respect to the object. In addition, the illumination device irradiates the object with the illumination light of the planar illumination device arranged around the area camera via the diffusion plate, so that it is possible to irradiate the object with uniform illumination light. The reflection can be suppressed, and the reflection of the illumination device itself on the object can also be suppressed. In addition, in the present invention, since the planar illumination device and the diffusion plate are integrated and attached to the articulated robot, the state of the illumination light is extremely less affected by the operation of the articulated robot.

照明装置の大きさは、エリアカメラの視野サイズや、エリアカメラと対象物との距離から算出し、光源としては複数のLEDを一定間隔に配列して面状照明装置としたものや、有機EL素子のような面状発光体を用いることが可能であるが、拡散板を用いて面全体の明るさを均一に調整できることは、前記の通りである。これによって、均一な淡い照明光を対象物に照射することでき、対象物の均一な面に存在する欠陥が強調され検出される。  The size of the illuminating device is calculated from the visual field size of the area camera and the distance between the area camera and the object, and as a light source, a plurality of LEDs are arranged at regular intervals to form a planar illuminating device, or an organic EL Although a planar light emitter such as an element can be used, as described above, the brightness of the entire surface can be uniformly adjusted using a diffusion plate. As a result, the object can be illuminated with uniform light, and defects existing on the uniform surface of the object are emphasized and detected.

また、照明光が対象物を照射する範囲をエリアカメラの視野より広くすることにより、エリアカメラの軸が対象物の面と垂直に接しない状態でも、エリアカメラの視野を、照明光の照射範囲が十分にカバーすることが可能となるので、欠陥を確実に検出することが可能となる。さらに、エリアカメラがエリアカメラ自体の反射像を捉えることによる、支障を減少できる。  In addition, by making the range in which the illumination light illuminates the object wider than the field of view of the area camera, the area camera's field of view can be adjusted even if the area camera axis is not perpendicular to the surface of the object. Can be sufficiently covered, so that defects can be reliably detected. Furthermore, troubles caused by the area camera capturing the reflected image of the area camera itself can be reduced.

なお、撮像した画像の処理には、コンピュータを用いるが、処理のための方法としては、照明による画像の濃淡ムラの影響を除外するために、画像の部分領域毎に閾値を変化させて2値化を行う、動的閾値処理を用いることが望ましい。また多関節ロボットの作動制御もコンピュータで行うので、ティーチング機能を付与することが可能で、大量に生産される対象物を検査する場合の必要条件である、検査ポジションの同一性を確保することができる。  A computer is used to process the captured image. However, as a method for processing, in order to exclude the influence of unevenness in the density of the image due to illumination, the threshold value is changed for each partial region of the image to perform binary processing. It is desirable to use dynamic threshold processing that performs the conversion. In addition, since the operation control of the articulated robot is also performed by a computer, it is possible to add a teaching function and ensure the same inspection position, which is a necessary condition when inspecting a mass-produced object. it can.

本発明により、これまで目視が主流であった鏡面の曲面を有する対象物の外観検査を、エリアカメラを用いた検査とすることが可能となる。そして、エリアカメラによる画像検査は、人為的な見落としを防止し、曖昧な判定基準を数値化することが可能となるとともに、画像データとして欠陥を保存することで、品質改善のためのデータベース構築が可能となる。  According to the present invention, it is possible to make an appearance inspection of an object having a mirror-like curved surface, which has been the mainstream until now, an inspection using an area camera. Image inspection with an area camera prevents human oversight, makes it possible to quantify ambiguous criteria, and saves defects as image data, enabling database construction for quality improvement. It becomes possible.

本発明の曲面外観検査装置に係るエリアカメラと面状照明装置の配置に一例を示す図、図1(a)は正面図、図1(b)は側面図。  The figure which shows an example in arrangement | positioning of the area camera which concerns on the curved-surface external appearance inspection apparatus of this invention, and a planar illuminating device, Fig.1 (a) is a front view, FIG.1 (b) is a side view. 本発明の曲面外観検査装置に係るカメラユニットを多関節ロボットに取り付けた状態を示す図、図2(a)は正面図、図2(b)は側面図。  The figure which shows the state which attached the camera unit which concerns on the curved-surface external appearance inspection apparatus of this invention to the articulated robot, FIG. 2 (a) is a front view, FIG.2 (b) is a side view. 本発明の曲面外観検査装置に係るカメラユニットと検査対象物の位置の設定の一例を示す図。  The figure which shows an example of the setting of the position of the camera unit which concerns on the curved-surface external appearance inspection apparatus of this invention, and a test target object. 本発明の曲面外観検査装置に係る検査対象物への照明の映り込みの状態を示した図、図4(a)は検査対象物が平面の場合、図4(b)は検査対象物が曲面の場合、図4(c)検査対象物が曲面で多面の場合。  The figure which showed the state of the reflection of the illumination to the test target object concerning the curved-surface external appearance inspection apparatus of this invention, FIG.4 (a) is a case where a test target object is a plane, FIG.4 (b) is a test target object is a curved surface In the case of FIG. 4 (c), the inspection object is a curved surface and multifaceted.

次に本発明を実施するための形態について、図を用いて説明する。  Next, embodiments for carrying out the present invention will be described with reference to the drawings.

図1は、本発明の曲面外観検査装置に係るエリアカメラと面状照明装置の配置に一例を示す図で、図1(a)は正面図、図1(b)は側面図である。図1において、1はエリアカメラ本体、2はレンズ、3a、3bは面状照明装置、4は拡散板、5は固定用ケース、6はフランジである。  1A and 1B are diagrams showing an example of the arrangement of an area camera and a planar illumination device according to the curved surface appearance inspection apparatus of the present invention. FIG. 1A is a front view and FIG. 1B is a side view. In FIG. 1, 1 is an area camera body, 2 is a lens, 3a and 3b are planar illumination devices, 4 is a diffuser plate, 5 is a fixing case, and 6 is a flange.

レンズ2は、視野に合わせて適宜選択したものを用いる。また、この例では、面状照明装置3a、3bは、エリアカメラ本体1の、図における上下に、拡散板4の角度に合わせて、エリアカメラ本体1と一定の角度をなすように設置される。より具体的には、拡散板4が曲面の場合、面状照明装置3a、3bの中心を通る垂線が、拡散板4の法線と一致するように設置することが望ましい。また、面状照明装置3aと3bと拡散板4との距離は、拡散板4全体に照明光が照射される位置とする。  The lens 2 is appropriately selected according to the field of view. Further, in this example, the planar illumination devices 3a and 3b are installed so as to form a certain angle with the area camera body 1 according to the angle of the diffusion plate 4 above and below the area camera body 1 in the drawing. . More specifically, when the diffusing plate 4 is a curved surface, it is desirable that the vertical line passing through the centers of the planar lighting devices 3 a and 3 b is aligned with the normal line of the diffusing plate 4. The distance between the planar lighting devices 3a and 3b and the diffusion plate 4 is a position where the entire diffusion plate 4 is irradiated with illumination light.

拡散板4は、表面に微細な凹凸を付与したり、内部に光を散乱させる素材を分散させたりした、アクリル系高分子材料やポリカーボネート系などの透明な高分子材料で構成され、面状照明装置3a、3bの照明光をさらにランダムに拡散させるために用いられ、鏡面の曲面を有する対象物に、照明光を均一に照射する機能を具備することは、前記の通りである。さらに、対象物の曲面を覆うように角度を付与するか、R面などの曲面とすることで、照明光の照射範囲を拡げる効果が得られる。  The diffusing plate 4 is made of a transparent polymer material such as an acrylic polymer material or a polycarbonate material, which is provided with fine irregularities on the surface or in which a material that scatters light is dispersed. As described above, the illumination light of the devices 3a and 3b is used for further diffusing the illumination light at random, and has a function of uniformly illuminating the object having a specular curved surface. Furthermore, the effect which expands the irradiation range of illumination light is acquired by providing an angle so that the curved surface of a target object may be covered, or making it curved surfaces, such as R surface.

なお、エリアカメラ本体1、面状照明装置3a、3b、及び拡散板4は、固定用ケース5に配置、固定され、フランジ5を介して多関節ロボットに取り付けられる。  The area camera body 1, the planar illumination devices 3 a and 3 b, and the diffusion plate 4 are arranged and fixed in a fixing case 5 and attached to the articulated robot via the flange 5.

図2は、本発明の曲面外観検査装置に係るカメラユニットを、多関節ロボットに取り付けた状態を示す図で、図2(a)は正面図、図2(b)は側面図である。図2において、7は、多関節ロボット、8は、エリアカメラ本体1、レンズ2、面状照明装置3a、3b、拡散板4を組み立てたカメラユニット、9は検査対象物である。  2A and 2B are views showing a state in which the camera unit according to the curved surface appearance inspection apparatus of the present invention is attached to the articulated robot. FIG. 2A is a front view and FIG. 2B is a side view. In FIG. 2, 7 is an articulated robot, 8 is a camera unit in which an area camera body 1, a lens 2, planar illumination devices 3a and 3b and a diffusion plate 4 are assembled, and 9 is an inspection object.

図2に示したように、本発明においては、カメラユニット8の対象物9への向き、カメラユニット8と検査対象物9との距離を適正にするために、多関節ロボットとして、6軸または7軸のものを用いることが望ましく、カメラユニット8を、多関節ロボットの6軸部または7軸部に設置する。  As shown in FIG. 2, in the present invention, in order to make the orientation of the camera unit 8 toward the object 9 and the distance between the camera unit 8 and the inspection object 9 appropriate, It is desirable to use a seven-axis one, and the camera unit 8 is installed on the six-axis part or the seven-axis part of the articulated robot.

図3は、本発明の曲面外観検査装置に係る、カメラユニットと検査対象物の位置の設定の一例を示す図である。図3において、8a、8b、8cは、カメラユニット、10a、10b、10cは、カメラユニット8a、8b、8cの軸に垂直な面、11a、11b、11cは、カメラユニット8a、8b、8cの軸と検査対象物が交わる点の接平面、12は、複数の曲面を有する検査対象物である。  FIG. 3 is a diagram showing an example of setting of the positions of the camera unit and the inspection object according to the curved surface appearance inspection apparatus of the present invention. In FIG. 3, 8a, 8b and 8c are camera units, 10a, 10b and 10c are surfaces perpendicular to the axes of the camera units 8a, 8b and 8c, and 11a, 11b and 11c are camera units 8a, 8b and 8c. A tangent plane at a point where the axis and the inspection object intersect, 12 is an inspection object having a plurality of curved surfaces.

本発明の曲面外観検査装置の操作にあっては、図3に示したように、カメラユニット8a、8b、8cの検査対象物12への向きや、カメラユニット8a、8b、8cと検査対象物12との距離を、検査対象物12の表面の状態に対応させ、適切に設定する必要があり、多関節ロボットの動作制御をコンピュータで行ない、ティーチングも行う。なお、図3に示した例では、カメラユニット8a、8b、8cと接平面11a、11b、11cが直交しないので、撮像画面へのカメラユニット8a、8b、8c自体の映り込みを避けることができる。  In the operation of the curved surface appearance inspection apparatus of the present invention, as shown in FIG. 3, the orientation of the camera units 8a, 8b, 8c toward the inspection object 12, the camera units 8a, 8b, 8c and the inspection object It is necessary to appropriately set the distance to 12 in accordance with the state of the surface of the inspection object 12, and the articulated robot is controlled by a computer and teaching is also performed. In the example shown in FIG. 3, since the camera units 8a, 8b, and 8c and the tangent planes 11a, 11b, and 11c are not orthogonal, it is possible to avoid reflection of the camera units 8a, 8b, and 8c themselves on the imaging screen. .

図4は、本発明の曲面外観検査装置に係る、検査対象物への照明の映り込みの状態を示した図で、図4(a)は検査対象物が平面の場合、図4(b)は検査対象物が曲面の場合、図4(c)検査対象物が曲面で多面の場合である。  FIG. 4 is a diagram showing a state of illumination reflected on the inspection object according to the curved surface appearance inspection apparatus of the present invention. FIG. 4 (a) shows a case where the inspection object is a plane, and FIG. Is the case where the inspection object is a curved surface, and FIG. 4C is the case where the inspection object is a curved surface and has many surfaces.

図4に示したように検査対象物の状態により、カメラユニット8の向きや距離を適正に調整する必要があるのは、前記の通りであるが、図4(a)は、平面の検査対象物14の表面に対し、カメラユニット8に傾斜を付与して設置した例であり、拡散板の角度を調整することで、検出面全体に照明を映し込ませることができている。図4(b)は曲面であるが、同様に照明を映し込ませることができている。図4(c)は、検査対象物が曲面の多面であるが、一部照明以外の部分を映し込んでいる。この場合は、多面を分割して撮像するように、カメラユニット8の向きや位置を設定することで検査が可能となる。  As described above, it is necessary to appropriately adjust the direction and distance of the camera unit 8 depending on the state of the inspection object as shown in FIG. 4, but FIG. In this example, the camera unit 8 is inclined with respect to the surface of the object 14, and the illumination can be reflected on the entire detection surface by adjusting the angle of the diffusion plate. Although FIG. 4B is a curved surface, illumination can be similarly reflected. In FIG. 4C, the object to be inspected is a multi-faceted curved surface, but a portion other than the partial illumination is shown. In this case, inspection can be performed by setting the orientation and position of the camera unit 8 so as to divide and capture multiple faces.

以上に説明したように、本発明によれば従来に外観検査装置では、欠陥に検出が困難であった、鏡面の曲面の外観検査が確実かつ容易に行える曲面外観検査装置を提供でき、例えばメタリック塗装が施された自動車の、外観検査の効率を大幅に向上できる。なお、本発明は、前記実施の形態に限定されるものではなく、本発明の分野における通常の知識を有する者であれば想到し得る、各種変形、修正を含む要旨を逸脱しない範囲の設計変更があっても、本発明に含まれることは勿論である。  As described above, according to the present invention, it is possible to provide a curved appearance inspection apparatus that can reliably and easily perform an appearance inspection of a curved surface of a mirror surface, which has been difficult to detect with a defect in the conventional appearance inspection apparatus. The appearance inspection efficiency of painted cars can be greatly improved. It should be noted that the present invention is not limited to the above-described embodiment, and can be conceived by those having ordinary knowledge in the field of the present invention, and design changes within a range not departing from the gist including various modifications and corrections Of course, the present invention is included in the present invention.

1,10 エリアカメラ本体
2,11 レンズ
3a,3b 面状照明装置
4 拡散板
5 固定用ケース
6 ロボット取り付けフランジ
7 多関節ロボット
8,8a,8b,8c カメラユニット
9,12 検査対象物
10a,10b,10c カメラユニットの軸に垂直な面
11a,11b,11c カメラユニットの軸と検査対象物が交わる点の接平面
12 照明ユニット
DESCRIPTION OF SYMBOLS 1,10 Area camera main body 2,11 Lens 3a, 3b Planar illuminating device 4 Diffuser 5 Fixing case 6 Robot mounting flange 7 Articulated robot 8, 8a, 8b, 8c Camera unit 9, 12 Inspection object 10a, 10b , 10c Surfaces 11a, 11b, 11c perpendicular to the axis of the camera unit 12 Tangential plane at the point where the axis of the camera unit intersects the inspection object 12 Illumination unit

Claims (3)

エリアカメラと、前記エリアカメラの軸方向と一定の角度をなすように配置されてなる複数の面状照明装置と、前記エリアカメラのレンズの周囲に配置され、前記面状照明装置による照明光を拡散させるための拡散板とを有する撮像部と、撮像の対象物に対する前記撮像部の位置及び角度を制御する機能を有する多関節ロボットを有し、前記照明光を前記対象物に照射撮像して得られる画像により、前記対象物の欠陥を検出する機能を備えたことを特徴とする曲面外観検査装置。  An area camera, a plurality of planar illumination devices arranged to form a certain angle with the axial direction of the area camera, and arranged around a lens of the area camera, and illuminating light from the planar illumination device An imaging unit having a diffusion plate for diffusing, and an articulated robot having a function of controlling a position and an angle of the imaging unit with respect to an object to be imaged; A curved surface appearance inspection apparatus having a function of detecting a defect of the object from an obtained image. 前記面状照明装置と前記拡散板が一体化されてなることを特徴とする、請求項1に記載の曲面外観検査装置。  The curved surface appearance inspection apparatus according to claim 1, wherein the planar illumination device and the diffusion plate are integrated. 前記照明光が前記対象物を照射する範囲は、前記エリアカメラの視野よりも広いことを特徴とする、請求項1または請求項2に記載の曲面外観検査装置。  The curved surface appearance inspection apparatus according to claim 1, wherein a range in which the illumination light irradiates the object is wider than a field of view of the area camera.
JP2009244922A 2009-10-01 2009-10-01 Curved-surface appearance inspection apparatus Pending JP2011075534A (en)

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US20140028857A1 (en) * 2011-04-29 2014-01-30 Siemens Healthcare Diagnostics Inc. High flux collimated illuminator and method of uniform field illumination
JP2021085788A (en) * 2019-11-28 2021-06-03 株式会社リコー Evaluation device and method for evaluation
US12136238B2 (en) 2021-09-03 2024-11-05 Kabushiki Kaisha Toshiba Processing device relating to inspection of inspection object, inspection system of inspection object, processing method relating to inspection of inspection object, and non-transitory storage medium

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JP2008046103A (en) * 2006-07-19 2008-02-28 Shimatec:Kk Surface inspection device

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Publication number Priority date Publication date Assignee Title
JP2007278713A (en) * 2006-04-03 2007-10-25 Chuo Denshi Keisoku Kk Lighting method in coating inspecting device
JP2008046103A (en) * 2006-07-19 2008-02-28 Shimatec:Kk Surface inspection device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140028857A1 (en) * 2011-04-29 2014-01-30 Siemens Healthcare Diagnostics Inc. High flux collimated illuminator and method of uniform field illumination
JP2021085788A (en) * 2019-11-28 2021-06-03 株式会社リコー Evaluation device and method for evaluation
US12136238B2 (en) 2021-09-03 2024-11-05 Kabushiki Kaisha Toshiba Processing device relating to inspection of inspection object, inspection system of inspection object, processing method relating to inspection of inspection object, and non-transitory storage medium

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