TWI792422B - Method and device for fabricating the test probe - Google Patents

Abstract

A method and device for manufacturing a probe for detection are disclosed. manufacture The method includes the steps of: providing a plurality of terminals through a micro-electromechanical system (MEMS) process to connect a terminal assembly of a support frame through tie rods; providing a cylindrical barrel having a hollow portion penetrating in a lengthwise direction; one end is inserted into and fixed to each terminal of the terminal assembly; and the terminals fixed at the one end of the barrel are separated by the tie bar.

Description

Manufacturing method and manufacturing device of detection probe

The present invention relates to a manufacturing method and a manufacturing device of a detection probe used for detecting electrical properties of a detected object such as a camera module.

An inspection device for inspecting electrical characteristics of an object to be inspected, such as a semiconductor wafer, uses inspection probes that electrically connect terminals of the object to be inspected to terminals of an inspection circuit. Fig. 1 is a diagram showing a conventional detection probe (1) used in a detection device. The detection probe (1) comprises: a cylindrical barrel (barrel) (11); a first plunger (plunger) (12) fixed on one side of the barrel (11); ) and a second plunger (13) that is slidably supported; and a spring ( spring) (14).

The first plunger (12) includes a contact tip (tip) that contacts a terminal of the object to be detected and a cylinder insertion portion that is inserted into the cylinder (11). The barrel insertion portion includes grooves dug in the circumferential direction. After the cylinder insertion part is inserted into the cylinder (11), it can be fixed by deforming the part of the cylinder (11) corresponding to the groove by dimple or rolling. .

Due to the miniaturization of products, the pitch of the terminals of the detected object contacted by the detection probe (1) is gradually further reduced, so the size of the detection probe (1) also becomes very small. For example, in order to assemble many detection probes (1), it is very cumbersome and difficult to perform dimple or rolling work after inserting the first plunger (12) into the barrel (11) with a diameter of 1 mm or less homework.

In particular, the terminal of a specific object to be inspected, such as a camera module, may have a terminal having a curved shape, unlike a ball grid array (BGA) type. Therefore, as the tip of the conventional first plunger (12) shown in FIG. 1, a plate-shaped terminal having a contact tip suitable for detection can be used.

This type of plate-shaped terminal has the advantage of being mass-producible through molds or microelectromechanical system (MEMS) processes, but it has the following problem: it is difficult to pass through the pits or rollers after being inserted into the cylindrical body. Even if it is fixed by pressing operation, its workability will be reduced.

The object of the present invention is to provide a method and device for manufacturing a detection probe with low manufacturing cost.

Another object of the present invention is to provide a method and apparatus for manufacturing a detection probe excellent in workability.

Provide a kind of manufacturing method for the detection probe that is used to realize the subject of the present invention Law. The manufacturing method of the detection probe includes the steps of: providing a plurality of terminals connected to a terminal set of a support frame through respective tie rods; providing a cylindrical barrel having a hollow portion penetrating in a length direction; connecting one end of the barrel to partially inserting and fixing each terminal of the terminal assembly; and separating the terminal fixed at one end of the barrel from the supporting frame by the tie bar.

The step of equipping the barrel may include the step of forming an inward protrusion protruding toward a center of an inner diameter of the barrel.

The terminal may have a barrel insertion portion having an elastic deformation portion and a stopper portion.

The fixing step may include the step of locking and fixing the stopper portion on the inward protrusion.

The terminal may include: a body part; a contact part extending from one side of the body part to contact the detected object; and a cylinder insertion part extending from the other side opposite to one side of the body part and fixed on the body part. inside the barrel.

The tie rod may be connected to the body portion.

The tie rod may extend side by side with the axial direction of the barrel.

The body portion may include a stopper rib that limits a degree to which the cylinder insertion portion is inserted into the cylinder.

The step of equipping the barrel may include inserting a spring into the inside of the barrel, and supporting a plunger slidably to the other end of the barrel.

After the fixing step, the following steps may also be included: inserting the spring into to the interior of the barrel and supports a plunger slidably to the other end of the barrel.

An apparatus for manufacturing a probe according to an embodiment of the present invention is provided. The manufacturing device includes: a terminal mounting part that mounts a terminal assembly including a plurality of terminals; a cylinder mounting part that places a cylinder at a position corresponding to the terminals; and a non-slip wall adjacent to the terminal mounting part. equipped.

It may further include: a recess provided between the terminal mounting portion and the barrel mounting portion.

In the recessed portion, the body portion and the barrel insertion portion of the terminal can be placed in a floating state.

The barrel mounting portion may include a barrel receiving portion extending in a direction toward the terminal.

An extension line of the barrel insertion portion of a terminal placed on the terminal mounting portion and an extension line of the barrel accommodating portion may coincide with each other.

The detection probe of the present invention is assembled into the barrel under the state of mass-manufacturing through mold (Mold) or microelectromechanical system (MEMS) process, so that assembly is easy and manufacturing cost is reduced.

1. 100: detection probe

11, 110: barrel

12: The first plunger

13: Second plunger

14, 140: spring

103: hollow

111: inward protrusion

112: Reduced diameter part

120, 420, 1201, 1202, 1203, 1204: terminals

121: Body Department

122: contact part

123: cylinder insertion part

130: plunger

150: Terminal set

151: Support frame

152: tie rod

200: sacrificial substrate

210: the first photoresist layer

212: Terminal set pattern

220: pattern groove

230: conductive material layer

240: the second photoresist layer

250: metal layer

300: Manufacturing device

310: bottom

311: Terminal mounting part

312: Cylinder carrying part

313: depression

320: non-slip wall

420-1: first terminal

420-2: Second terminal

421-1: First Body Division

421-2: Second Body

422-1: first contact part

422-2: second contact part

423-1: The first cylinder insertion part

423-2: Second cylinder insertion part

1211: tie rod connecting part

1212: stop edge

1221: tip

1231: stopper

1231-1: The first stop

1231-2: Second stop

1232: slot

1233: elastic deformation part

1234: Expansion slot

1235: the first tension rod / tension rod

1236:Second tension rod/tension rod

1237: elastic support part

1238-1: First stop extension

1238-2: Second stop extension

3121: Cylinder receiving groove

3131: first wall

3132: second wall

A-A, B-B: section

D1: outer diameter

D2: Maximum distance

FIG. 1 is a cross-sectional view showing a conventional detection probe.

Fig. 2 is a diagram showing a detection probe according to a first embodiment of the present invention.

FIG. 3 is a diagram showing terminals of FIG. 2 .

FIG. 4 is a diagram showing a terminal set (set) including a plurality of terminals.

FIG. 5 is a diagram showing a sacrificial substrate having patterned grooves for a plurality of terminal assemblies.

6( a ) to 6 ( f ) are diagrams showing a process of manufacturing a terminal assembly based on a cross section taken along A-A of FIG. 5 .

7A to 7D are diagrams illustrating a method of manufacturing a detection probe according to an embodiment of the present invention.

8A to 8C are diagrams illustrating a method of manufacturing a detection probe according to another embodiment of the present invention.

Fig. 9 is a diagram showing a terminal according to a second embodiment of the present invention.

Fig. 10 is a diagram showing a terminal according to a third embodiment of the present invention.

Fig. 11 is a diagram showing a terminal according to a fourth embodiment of the present invention.

Fig. 12 is a diagram showing a terminal according to a fifth embodiment of the present invention.

Fig. 13 is a diagram showing a terminal according to a sixth embodiment of the present invention.

Fig. 14 is a sectional view taken along part B-B of Fig. 13 .

Fig. 15 is a diagram showing a first terminal and a second terminal according to a seventh embodiment of the present invention.

FIG. 16 is a diagram showing an overlapping terminal in which the first terminal and the second terminal of FIG. 15 are overlapped.

Hereinafter, the detection probe (100) according to the embodiment of the present invention will be described in detail with reference to the accompanying drawings.

FIG. 2 is a diagram illustrating a detection probe (100) according to a first embodiment of the present invention, and FIG. 3 is a diagram illustrating a terminal (120) of FIG. 2 .

Referring to Fig. 2, the detection probe (100) may comprise: a hollow cylindrical barrel (110); a terminal (120) fixed at one end of the barrel (110); A plunger (130) at the other end of (110); and a spring (140) disposed between the terminal (120) and the plunger (130) in the barrel (110).

The cylinder (110) has a hollow (103) penetrating in the shape of a tube. The barrel ( 110 ) is made of conductive material such as brass, and may be plated with copper (Cu), gold (Au) or silver (Ag) as a whole.

The barrel (110) may include an inward protrusion (111) protruding inward at an end of the insertion terminal (120). The inward protrusions (111) can be manufactured by dimple or rolling operations. The inward protrusion (111) may be pre-formed before insertion into the terminal (120).

The barrel ( 110 ) may include a reduced diameter portion ( 112 ) that is reduced in diameter at the end portion on the other side where the plunger ( 130 ) is inserted. The reduced diameter portion (112) is different from the inward protrusion (111), and can be formed by dimple work after inserting the plunger (130) into the other end of the barrel (110).

The terminal (120) can be manufactured by mold or MEMS process. The terminal (120) may be made of, for example, nickel (Ni), nickel-cobalt (Ni—Co), or nickel-iron (NiF) alloy, or the like.

Referring to Fig. 3, the terminal (120) may include a body portion (121), a contact The contact part (122) of the terminal of the measuring object and the cylinder insertion part (123) inserted into the cylinder (110).

The body part (121) has a rectangular shape, the contact part (122) can extend from one side of the first long side, and the cylinder insertion part (123) extends from the second long side opposite to the first long side. The body part (121) may include a tie bar connection part (1211) connecting a tie bar described later to the first long side. The second long side is formed with a length greater than the outer diameter (D1 of FIG. 2 ) of the barrel (110) and may form a stop edge (1212). The tie rod connecting portion (1211) can also be equipped on the short sides on both sides according to the design.

The contact portion (122) may include a tip (1221) that contacts the contact to be detected. Tips (1221) can be formed single or multiple.

The barrel insertion part (123) may include: a pair of stopper parts (1231) protruding from both sides in the width direction; a closed slot (1232) extending along the length direction; Elastic deformation part (1233).

The maximum distance (D2) between the pair of stoppers (1231) can be set in such a way that it is at least the same as the inner diameter of the barrel (110) or can be pressed into the barrel (110). The stopper part (1231) may be formed in a barb shape toward the body part (121) so as to be effectively caught by the inward protrusion (111) of the barrel (110).

The slot ( 1232 ) may include, for example, a circular expansion slot ( 1234 ) having a diameter larger than the width of the slot ( 1232 ) at both ends in the length direction.

The elastic deformation part (1233) may include a pair of tension rods (1235, 1236) formed with a slot (1232).

As mentioned above, after inserting the cylinder body insertion part (123) into the cylinder body (110) When the one side end of the cylinder (110) is elastically deformed by the tension rods (1235, 1236) to the central axis of the cylinder (110) through the inward protrusion (111) of the cylinder (110), the stopper (1231) is elastically deformed. After the stop portion (1231) passes over the inward protrusion (111), the elastically recoverable tension rods (1235, 1236) are stuck at the inward protrusion (111) of the barrel (110). At this time, the cylinder insertion portion (123) can be fixed without further insertion when the stop edge (1212) contacts the end of the cylinder (110).

FIG. 4 is a diagram showing a terminal set (150) including a plurality of terminals (120).

The terminal set (150) can be manufactured by MEMS process or mold process. The terminal assembly (150) may include: a support frame (151); a plurality of terminals (120) detachably connected to the support frame (151); and a system for connecting the plurality of terminals (120) to the support frame (151). Rod (152).

The tie bar (152) may be connected to the terminal ( 120) anywhere in the body portion (121). The tie rod (152) is preferably connected to the opposite side of the first side, ie the second side, of the body portion (121) to which the barrel insertion portion (123) is connected. The reason for this is to prevent the tie rod (152) from being separated from the main body (121) due to the pressure applied when the cylinder (110) is inserted into the cylinder insertion portion (123). In particular, the tie rod (152) is preferably positioned to extend in parallel to the direction in which the cylinder insertion portion (123) extends.

FIG. 5 is a diagram showing a sacrificial substrate (200) having a pattern groove (220) of a plurality of terminal sets (150).

The sacrificial substrate ( 200 ) is not limited, and may preferably be a silicon substrate, a laminated ceramic substrate or a silicon wafer.

Referring to Fig. 5, the terminal assembly (150) can form a pattern groove (220) corresponding to the shape on one side of the sacrificial substrate (200), and fill the material (such as nickel or nickel-cobalt) that constitutes the terminal (120) through a plating process. alloy, or nickel-iron alloy) for manufacture.

6( a ) to 6 ( f ) are diagrams representing a process of manufacturing a terminal set ( 150 ) based on a section taken along section A-A of FIG. 5 .

Referring to (a) of FIG. 6 , a photosensitive first photoresist layer ( 210 ) is coated on the upper surface of the sacrificial substrate ( 200 ), and an exposure mask is used to expose the first photoresist layer ( 210 ) and the terminal set ( 150 ), using a solvent to remove the first photoresist layer (210) corresponding to the exposed terminal assembly pattern (212).

Referring to (b) of FIG. 6 , the exposed terminal assembly pattern ( 212 ) of the sacrificial substrate ( 200 ) is etched to form a pattern groove ( 220 ).

Referring to (c) of FIG. 6 , a conductive substance layer ( 230 ) is formed on the sacrificial substrate ( 200 ) including the pattern groove ( 220 ) by sputtering or chemical vapor deposition (CVD). The conductive substance layer (230) can be sputtered to form a titanium layer and a copper layer in sequence. The conductive substance layer ( 230 ) can be used as an electrode in the electroplating process described later.

Referring to (d) of FIG. 6 , the photosensitive second photoresist layer ( 240 ) is coated on the upper surface of the sacrificial substrate ( 200 ) coated with the conductive material layer ( 230 ), and the second photoresist layer is covered with an exposure mask. (240) expose a pattern corresponding to the shape of the terminal set (150), and remove the second photoresist layer corresponding to the exposed terminal set pattern by using a solvent (240). Therefore, the upper surface of the sacrificial substrate (200) may expose a portion corresponding to the pattern of the terminal assembly (150), that is, the conductive material layer (230) at the bottom of the pattern groove (220).

Referring to (e) of FIG. 6 , the pattern groove ( 220 ) may be filled with a metal layer ( 250 ) not limited to nickel, nickel-cobalt alloy, or nickel-iron alloy, etc., through an electroplating process.

Referring to (f) of FIG. 6 , a portion protruding to the outside of the pattern groove ( 220 ) may be polished by, for example, chemical mechanical polishing (CMP) or the like.

Thereafter, by selectively etching the sacrificial substrate (200), the first photoresist layer (210), the second photoresist layer (240) and the conductive material layer (230), the terminal set ( 150).

Additionally, the terminal set ( 150 ) may also be entirely plated with gold (Au) (not limited to gold (Au)).

7A to 7D are diagrams illustrating a method of manufacturing a detection probe (100) according to an embodiment of the present invention.

Fig. 7A is a diagram showing a manufacturing apparatus (300) for assembling a detection probe (100). The manufacturing device (300) may include a bottom (310) and an anti-skid wall (320) built on one side of the bottom (310).

The bottom (310) may include: a collection carrying portion (311) connected to the anti-slip wall (320) and extending a predetermined width along the anti-slip wall (320); a cylinder carrying portion (312) spaced apart from the collection carrying portion (311) and the recessed part (313) dug out between the collection carrying part (311) and the cylinder carrying part (312).

Referring to FIG. 7B , the assembly mounting part ( 311 ) may mount a plurality of terminals ( 120 ) as a terminal assembly ( 150 ) arranged side by side in an extending direction. At this time, the supporting frame (151) of the terminal assembly (150) is in contact with the non-slip wall (320), thus being prevented from being pushed during insertion of the barrel (110) described later.

The barrel carrying part (312) may include a barrel receiving groove (3121), and the barrel receiving groove (3121) is placed in the barrel of a plurality of terminals (120) of the terminal set (150) carried by the set carrying part (311). The body insertion portion (123) extends side by side in the extending direction.

In the recessed part (313), the body part (121) and the barrel insertion part (123) of the plurality of terminals (120) of the terminal set (150) carried by the set carrying part (311) can be floated and positioned, and include the second A wall (3131) and a second wall (3132). Here, the second long side on the opposite side to the first long side of the body part (121) connected to the cylinder insertion part (123) can contact the second wall (3132) of the recessed part (313), that is, it is compatible with the collective loading. The second wall (3132) to which the portion (311) meets. Therefore, pushing of the terminal (120) can be counteracted during insertion of the barrel (110) described later. The end of the barrel insertion part (123) may be placed in the barrel receiving groove (3121) through the recessed part (313).

7C is a diagram showing a state in which the cylinder (110) is mounted in the cylinder accommodation groove (3121) of the cylinder mounting portion (312) in the state where the terminal assembly (150) is mounted on the assembly mounting portion (311) . Here, the cylindrical body (110) can be slid and moved toward each terminal (120) of the mounted terminal set (150) along the direction of the arrow. The barrel (110) may be pre-formed with an inward protrusion (111) at one end along the outer peripheral surface inwardly by dimple or rolling. In addition, in the state where the spring (140) and the plunger (130) are inserted into the cylinder (110), the cylinder (110) The other end can be processed with dimples so that the plunger (130) will not fall off.

FIG. 7D is a diagram showing a state in which the barrel ( 110 ) is slid and inserted into the barrel insertion portion ( 123 ) of the terminal ( 120 ) to be fixed in FIG. 7C . When the cylinder body (110) is inserted into the cylinder body insertion part (123), the tension rod (1235) of the elastic deformation part (1233) when the stopper part (1231) of the cylinder body insertion part (123) passes the inward protrusion (111) , 1236) will produce elastic deformation toward the central axis direction of the cylinder body (110). Thereafter, when the stop part (1231) of the cylinder insertion part (123) passes the inward protrusion (111), the tension rods (1235, 1236) of the elastic deformation part (1233) elastically recover, and the stop part (1231) can be aligned with the The inward protrusions (111) are fastened and fixed.

8A to 8C are diagrams illustrating a method of manufacturing a detection probe (100) according to another embodiment of the present invention.

Referring to FIG. 8A , the barrel ( 110 ) forms an inward protrusion ( 111 ) on one end side, but unlike FIG. 7C , the spring ( 140 ) and the plunger ( 130 ) are not inserted into the inside. Here, the cylinder mounting part (312) of the manufacturing apparatus (300) is formed so that the other end part of the cylinder (110) mounted on the empty space differs from FIG. 7A. This is to facilitate the processing of the dents at the other end of the barrel (110) which will be described later.

FIG. 8B is a diagram showing a state in which the cylinder body ( 110 ) in FIG. 8A is slid to insert and fix the cylinder body insertion portion ( 123 ) of the terminal ( 120 ) into the cylinder body ( 110 ).

FIG. 8C shows a state in which the other end of the barrel (110) is dimpled after inserting the spring (140) and partially inserting the plunger (130) in FIG. 8B. Therefore, the detection probe (100) can be produced in the same manner as in the form shown in Fig. 7D.

Since the cylinder body (110) has a very small size such as a diameter of 1mm or less, before inserting the terminal (120) of the fixed terminal assembly (150), the spring (140) and the plunger (130) are respectively inserted. Pit handling can be difficult. Therefore, as shown in FIG. 8B , in a state where the barrel insertion portion ( 123 ) of a plurality of terminals ( 120 ) connected to the terminal set ( 150 ) is inserted into the barrel ( 110 ) and fixed, it is easier to insert the spring. (140) and plunger (130) and carry out dimple processing.

Fig. 9 is a diagram showing a terminal (1201) according to a second embodiment of the present invention. Description of the same parts as the terminal ( 120 ) according to the first embodiment shown in FIG. 3 will be omitted.

The cylinder insertion part (123) may include: a first stopper part (1231-1) and a second stopper part (1231-2) respectively protruding from both sides in the width direction; an open slot extending along the length direction (1232); and an elastic deformation (1233) formed by the slot (1232).

The maximum distance between the first stopper part (1231-1) and the second stopper part (1231-2) may be at least the same as the inner diameter of the barrel or set in such a way that it can be pressed into the barrel (110). The first stopper (1231-1) may be adjacent to the open-type slot (1232) and formed at the free end of the first tension rod (1235).

The slit ( 1232 ) may be formed in such a manner as to extend rearward in the length direction from the tip portion, extend outward in the width direction, and be opened. Slot (1232) may include an expansion slot (1234) at an inner end that is larger than the width of slot (1232).

The elastic deformation part (1233) may include a first tension rod (1235) and a second tension rod (1236) formed by separating the slot (1232). First Tension Rod (1235) May be formed in a cantilever configuration that meets the open slot (1232).

As mentioned above, when the cylinder inserting part (123) is inserted into one side end of the cylinder (110), the first tension rod (1235) and the second tension rod (1236) can be positioned at the first stopper part ( 1231-1) and the second stop portion (1231-2) are elastically deformed when passing through the inward protrusion (111) of the barrel (110). At this time, the first tension rod (1235) of the cantilever type may deform more than the second tension rod (1236).

Fig. 10 is a diagram showing a terminal (1202) according to a third embodiment of the present invention. Description of the same parts as the terminal ( 120 ) according to the first embodiment shown in FIG. 3 will be omitted.

The cylinder insertion part (123) may include: a first stopper part (1231-1) and a second stopper part (1231-2) respectively protruding from both sides in the width direction; an open slot extending along the length direction (1232); and an elastic deformation (1233) formed by the slot (1232).

The slot ( 1232 ) may be formed in such a manner as to extend forward toward the free end in the length direction to be opened. The slot (1232) may gradually expand towards the free end.

Fig. 11 is a diagram showing a terminal (1203) according to a fourth embodiment of the present invention. Description of the same parts as the terminal ( 1201 ) according to the second embodiment shown in FIG. 9 will be omitted.

The cylinder insertion part (123) may include: a first stopper part (1231-1) and a second stopper part (1231-2) respectively protruding on both sides relative to the length direction; a slot (1232); and an elastic deformation portion (1233) connected to the slot (1232).

The maximum distance between the first stopper part (1231-1) and the second stopper part (1231-2) may be set in such a manner that it is at least the same as the inner diameter of the barrel or may be pressed into the barrel.

The slot ( 1232 ) may be formed in such a manner that it extends forward along the length direction and then passes through the stopper ( 1231 ) and opens at one side in the width direction. Fig. 12 is a diagram showing a terminal (1204) according to a fifth embodiment of the present invention. Description of the same parts as the terminal ( 1202 ) according to the third embodiment shown in FIG. 10 will be omitted.

The cylinder insertion part (123) may include: a first stopper part (1231-1) and a second stopper part (1231-2) respectively protruding on both sides in the width direction; a slot (1232) extending along the length direction ); an elastic deformation portion (1233) formed by the slots (1232); and an elastic support portion (1237) provided between the slots (1232).

The elastic support part (1237) can connect the second tension rod (1236) from the first tension rod (1235) within the slot (1232). The elastic support part (1237) may be formed in an arc shape with a predetermined curvature.

The elastic supporting part (1237) can be similarly applied to the terminals (1201, 1203) according to the second embodiment and the fourth embodiment shown in Fig. 9 and Fig. 11 .

FIG. 13 is a diagram showing a terminal (120) according to a sixth embodiment of the present invention, and FIG. 14 is a cross-sectional view taken along section B-B of FIG. 13 . Description of the same parts as the terminal ( 120 ) according to the first embodiment shown in FIG. 3 will be omitted.

Referring to Fig. 13 and Fig. 14, the cylinder insertion part (123) may include a first stop extension part ( 1238-1) and the second stop extension (1238-2).

Such a first stop extension (1238-1) and a second stop extension (1238-2) can more firmly fix the plate-shaped terminal (120) to the barrel (110).

As a modified example, the side faces of the first stopper extension (1238-1) and the second stopper extension (1238-2) facing the inner side of the barrel (110) may contact the inner wall of the barrel (110) surface. Fig. 15 is a diagram showing the first terminal (420-1) and the second terminal (420-2) according to the seventh embodiment of the present invention, and Fig. 16 shows the first terminal (420-1) and the second terminal (420-2) in Fig. A diagram of a terminal (420) where two terminals (420-2) overlap.

15 and 16, the terminal (420) may include a first terminal (420-1) and a second terminal (420-2) which may overlap each other in a thickness direction.

The first terminal (420-1) may include: a first body part (421-1); a first contact part (422-1) extending integrally from one side of the first body part (421-1); The opposite side of the first body part (421-1) is integrally extended and inserted into the first cylinder insertion part (423-1) of the cylinder (110).

The second terminal (420-2) may include: a second body part (421-2); a second contact part (422-2) extending integrally from one side of the second body part (421-2); The opposite side of the second body part (421-2) is integrally extended and inserted into the second cylinder insertion part (423-2) of the cylinder (110).

The first cylinder insertion part (423-1) and the first body part (421-1) may be formed to 1/2 the thickness of the first contact part (422-1).

Likewise, the second cylinder insertion part (423-2) and the second body part (421-2) may be formed to 1/2 the thickness of the second contact part (422-2).

The first cylinder insertion part ( 423 - 1 ) and the second cylinder insertion part ( 423 - 2 ) have structures similar to those of the cylinder insertion part ( 123 ) shown in FIG. 3 . In the state where the first terminal (420-1) and the second terminal (420-2) overlap in the thickness direction, the first cylinder insertion part (423-1) and the second cylinder insertion part (423-2) can Insert and secure to one end of the barrel.

The terminal (420) may be formed by inverting and overlapping any one of the first terminal (420-1) and the second terminal (420-2) manufactured by the same structure. In the state where the first terminal (420-1) and the second terminal (420-2) overlap, the first contact portion (422-1) and the second contact portion (422-2) can be arranged at different positions from each other . As shown in FIG. 16, the overlapping first terminal (420-1) and second terminal (420-2) may have a fork shape. In addition, the first contact portion (422-1) and the second contact portion (422-2) may be located on the same plane.

So far, the contact portion (121) of the terminal (120) has been shown and explained in a plate shape, but may have a cross-sectional shape of a cylinder or a quadrangular prism.

In the foregoing specification, the invention and its advantages have been described with reference to specific embodiments. However, it will be apparent to those skilled in the art that various modifications and changes can be made without departing from the scope of the present invention as set forth in the following claims. Accordingly, the specification and drawings are to be regarded as illustrative rather than restrictive of the invention. All such possible modifications are intended to be within the scope of the present invention.

110: barrel

111: inward protrusion

120: terminal

130: plunger

140: spring

150: Terminal set

300: Manufacturing device

310: bottom

311: Terminal mounting part

312: Cylinder carrying part

313: depression

320: non-slip wall

1231: stopper

Claims (7)

A method for manufacturing a detection probe, comprising the steps of: providing a plurality of terminals connected to a terminal set of a support frame through tie rods; providing a cylindrical barrel having a hollow portion penetrating in the length direction; one end is inserted into and fixed to each of the terminals of the terminal assembly; and the terminal fixed to the one end of the barrel is separated from the support frame by the tie bar. The method for manufacturing a detection probe according to claim 1, wherein the terminal includes: a body part; a contact part extending from one side of the body part to contact the object to be detected; and a cylinder insertion part connected to the The opposite side of the main body part is extended and fixed on the cylindrical body. The method of manufacturing a detection probe according to claim 2, wherein the tie rod is connected to the body part, and the tie rod extends side by side with the axial direction of the barrel. The method for manufacturing a detection probe according to claim 1, wherein the step of equipping the barrel includes the steps of: inserting a spring into the interior of the barrel and sliding it to the other end of the barrel way to support the plunger. The manufacturing method of the detection probe as claimed in item 1, wherein After the step of fixing, a step of inserting a spring into the inside of the cylinder and supporting the plunger to be slidable to the other end of the cylinder is further included. A manufacturing device for a detection probe, comprising: a terminal mounting part, which places a terminal set including a plurality of terminals and a plurality of tie rods respectively connected to the plurality of terminals; a barrel mounting part, at a position corresponding to the terminals A placement cylinder; and a non-slip wall provided adjacent to the terminal mounting portion. The detection probe manufacturing device according to claim 6, further comprising: a recess provided between the terminal mounting portion and the barrel mounting portion.

Images