TWI794879B - Test probe - Google Patents

Abstract

A detection probe for detecting electrical properties of a detected object is disclosed. detection The probe includes: a barrel having a hollow and one end equipped with an inward protrusion protruding inward; a terminal having a stopper caught at the inward protrusion and a The inward protrusion elastically deforms the stopper portion toward the central axis of the barrel; and a plunger is housed in the other end of the barrel so as to be slidably movable in a lengthwise direction.

Description

detection probe

The invention relates to a detection probe for detecting the electrical characteristics of objects to be detected such as camera modules.

As shown in Fig. 1, the detecting probe (1) used for detecting the electrical characteristics of the object to be detected comprises: a cylindrical barrel (barrel) (11); A plunger (12); a second plunger (13) partially inserted into the other side of the barrel (11) and slidably supported; and a first plunger equipped in the barrel (11) (12) and the spring (14) between the second plunger (13).

The first plunger (12) includes a contact tip (tip) that contacts a terminal of the object to be detected and a cylinder insertion portion that is inserted into the cylinder (11). The barrel insertion portion includes grooves dug in the circumferential direction. After the cylinder insertion part is inserted into the cylinder (11), it can be fixed by deforming the part of the cylinder (11) corresponding to the groove by dimple or rolling. .

Due to the miniaturization of products, the pitch of the terminals of the detected object contacted by the detection probe (1) is gradually further reduced, so the size of the detection probe (1) used for detection also becomes very small. For example, performing dimple or rolling work after inserting the first plunger (12) into the barrel (11) with a diameter of 1 mm or less is a very tedious and difficult work.

In particular, the terminal of a specific object to be inspected, such as a camera module, may have a terminal having a curved shape, unlike a ball grid array (BGA) type. Therefore, as the tip of the conventional first plunger (12) shown in FIG. 1, a plate-shaped terminal having a contact tip suitable for detection can be used.

This type of plate-shaped terminal has the advantage of being mass-producible through molds or microelectromechanical system (MEMS) processes, but it has the following problem: it is difficult to pass through the pits or rollers after being inserted into the cylindrical body. Even if it is fixed by pressing operation, its workability will be reduced.

An object of the present invention is to provide a detection probe that can be mass-produced and has a structure that is excellent in workability.

A detection probe for achieving the subject of the present invention is provided. The detection probe includes: a cylinder body, which is hollow and equipped with an inward protrusion protruding inward at one end; a terminal, which has a stopper inserted and fixed in the cylinder body and stuck at the inward protrusion, and when inserted into the One end of the barrel is an elastic deformation portion that elastically deforms the stopper toward the central axis of the barrel through the inward protrusion; the other end of the barrel.

The elastic deformation part may include a pair of tension bars formed with slots extending in a lengthwise direction.

The slots may comprise closed or open slots.

The slot may include an expanded slot expanded in a width direction.

The stopper may include a stopper extension extending in a thickness direction on the end side.

The terminals can be manufactured by MEMS process.

The terminal may include: a body part; a contact part having a tip integrally extending from one side of the body part and contacting a detected contact point of a detected object; and a barrel insertion part extending from one side of the body part. The opposite side is integrally extended and inserted into the barrel.

The body portion may include a stopper rib that limits a degree to which the cylinder insertion portion is inserted into the cylinder.

The body portion may include a tie bar connecting portion to a tie bar, the tie bar connecting portion may be located on an opposite side of the stop rib.

The terminal includes a first terminal and a second terminal overlapped and inserted into the barrel, and the first terminal and the second terminal may respectively include contact portions provided at different positions from each other.

The detection probe of the present invention is mass-produced and assembled into the barrel through a mold (Mold) or microelectromechanical system (MEMS) process, thereby not only reducing the manufacturing cost but also improving the assembly workability of the detection probe.

1. 100: detection probe

11, 110: barrel

12: The first plunger

13: Second plunger

14, 140: spring

103: hollow

111: inward protrusion

112: Reduced diameter part

120, 420, 1201, 1202, 1203, 1204: terminals

121: Body Department

122: contact part

123: cylinder insertion part

130: plunger

150: Terminal set

151: Support frame

152: tie rod

200: sacrificial substrate

210: the first photoresist layer

212: Terminal set pattern

220: pattern groove

230: conductive material layer

240: the second photoresist layer

250: metal layer

300: Manufacturing device

310: bottom

311: Terminal mounting part

312: Cylinder carrying part

313: depression

320: non-slip wall

420-1: first terminal

420-2: Second terminal

421-1: First Body Division

421-2: Second Body

422-1: first contact part

422-2: second contact part

423-1: The first cylinder insertion part

423-2: Second cylinder insertion part

1211: tie rod connecting part

1212: stop edge

1221: tip

1231: stopper

1231-1: The first stop

1231-2: Second stop

1232: slot

1233: elastic deformation part

1234: Expansion slot

1235: the first tension rod / tension rod

1236:Second tension rod/tension rod

1237: elastic support part

1238-1: First stop extension

1238-2: Second stop extension

3121: Cylinder receiving groove

3132: second wall

D1: outer diameter

D2: Maximum distance

FIG. 1 is a cross-sectional view showing a conventional detection probe.

Fig. 2 is a diagram showing a detection probe according to a first embodiment of the present invention.

FIG. 3 is a diagram showing terminals of FIG. 2 .

FIG. 4 is a diagram showing a terminal set (set) including a plurality of terminals.

FIG. 5 is a diagram showing a sacrificial substrate having patterned grooves for a plurality of terminal assemblies.

6( a ) to 6 ( f ) are diagrams showing a process of manufacturing a terminal assembly based on a cross section taken along A-A of FIG. 5 .

7A to 7D are diagrams illustrating a method of manufacturing a detection probe according to an embodiment of the present invention.

8A to 8C are diagrams illustrating a method of manufacturing a detection probe according to another embodiment of the present invention.

Fig. 9 is a diagram showing a terminal according to a second embodiment of the present invention.

Fig. 10 is a diagram showing a terminal according to a third embodiment of the present invention.

Fig. 11 is a diagram showing a terminal according to a fourth embodiment of the present invention.

Fig. 12 is a diagram showing a terminal according to a fifth embodiment of the present invention.

Fig. 13 is a diagram showing a terminal according to a sixth embodiment of the present invention.

Fig. 14 is a sectional view taken along part B-B of Fig. 13 .

Fig. 15 is a diagram showing a first terminal and a second terminal according to a seventh embodiment of the present invention.

FIG. 16 is a diagram showing an overlapping terminal in which the first terminal and the second terminal of FIG. 15 are overlapped. diagram.

Hereinafter, the detection probe (100) according to the embodiment of the present invention will be described in detail with reference to the accompanying drawings.

FIG. 2 is a diagram illustrating a detection probe (100) according to a first embodiment of the present invention, and FIG. 3 is a diagram illustrating a terminal (120) of FIG. 2 .

Referring to Fig. 2, the detection probe (100) may comprise: a hollow cylindrical barrel (110); a terminal (120) fixed at one end of the barrel (110); A plunger (130) at the other end of (110); and a spring (140) disposed between the terminal (120) and the plunger (130) in the barrel (110).

The cylinder (110) has a hollow (103) penetrating in the shape of a tube. The barrel ( 110 ) is made of conductive material such as brass, and may be plated with copper (Cu), gold (Au) or silver (Ag) as a whole.

The barrel (110) may include an inward protrusion (111) protruding inward at an end of the insertion terminal (120). The inward protrusions (111) can be made by dimples or rolling operations. The inward protrusion (111) may be pre-formed before insertion into the terminal (120).

The barrel ( 110 ) may include a reduced diameter portion ( 112 ) that is reduced in diameter at the end portion on the other side where the plunger ( 130 ) is inserted. The reduced diameter part (112) is different from the inward protrusion (111), and can be formed by dimple work after inserting the plunger (130) into the other end of the barrel (110).

The terminal (120) can be manufactured by mold or MEMS process. Terminal(120) It can be made of, for example, nickel (Ni), nickel-cobalt (Ni-Co) or nickel-iron (NiF) alloy, etc.

Referring to FIG. 3 , the terminal (120) may include a body part (121), a contact part (122) of the terminal contacting the detected object, and a barrel insertion part (123) inserted into the barrel (110).

The body part (121) has a rectangular shape, the contact part (122) can extend from one side of the first long side, and the cylinder insertion part (123) extends from the second long side opposite to the first long side. The body part (121) may include a tie bar connection part (1211) connecting a tie bar described later to the first long side. The second long side is formed with a length greater than the outer diameter (D1 of FIG. 2 ) of the barrel (110) and may form a stop edge (1212). The tie rod connecting portion (1211) can also be equipped on the short sides on both sides according to the design.

The contact portion (122) may include a tip (1221) that contacts the contact to be detected. Tips (1221) can be formed single or multiple.

The barrel insertion part (123) may include: a pair of stopper parts (1231) protruding from both sides in the width direction; a closed slot (1232) extending along the length direction; Elastic deformation part (1233).

The maximum distance ( D2 ) between the pair of stoppers ( 1231 ) may be at least the same as the inner diameter of the barrel ( 110 ) or a degree that can be pressed into the barrel ( 110 ). The stopper part (1231) may be formed in a barb shape toward the body part (121) so as to be effectively caught by the inward protrusion (111) of the barrel (110).

The slot ( 1232 ) may include, for example, a circular expansion slot ( 1234 ) having a diameter larger than the width of the slot ( 1232 ) at both ends in the length direction.

The elastic deformation part (1233) may include a slot (1232) separated by a A pair of tension rods (1235, 1236).

As mentioned above, when the cylinder insertion part (123) is inserted into one side end of the cylinder (110), the tension rods (1235, 1236) make the stopper (1231) pass through the inward protrusion of the cylinder (110) (111) and elastically deforms toward the central axis direction of the cylindrical body (110). After the stop portion (1231) passes over the inward protrusion (111), the elastically recoverable tension rods (1235, 1236) are stuck at the inward protrusion (111) of the barrel (110). At this time, the cylinder insertion portion (123) can be fixed without further insertion when the stop edge (1212) contacts the end of the cylinder (110).

FIG. 4 is a diagram showing a terminal set (150) including a plurality of terminals (120).

The terminal set (150) can be manufactured by MEMS process or mold process. The terminal assembly (150) may include: a support frame (151); a plurality of terminals (120) detachably connected to the support frame (151); and a system for connecting the plurality of terminals (120) to the support frame (151). Rod (152).

The tie bar (152) may be connected to the terminal ( 120) anywhere in the body portion (121). The tie rod (152) is preferably connected to the opposite side of the first side, ie the second side, of the body portion (121) to which the barrel insertion portion (123) is connected. The reason for this is to prevent the tie rod (152) from being separated from the main body (121) due to the pressure applied when the cylinder (110) is inserted into the cylinder insertion portion (123). In particular, the tie rod (152) is preferably positioned to extend in parallel to the direction in which the cylinder insertion portion (123) extends.

FIG. 5 is a diagram showing a sacrificial substrate (200) having a pattern groove (220) of a plurality of terminal sets (150).

The sacrificial substrate ( 200 ) is not limited, and may preferably be a silicon substrate, a laminated ceramic substrate or a silicon wafer.

Referring to Fig. 5, the terminal assembly (150) can form a pattern groove (220) corresponding to the shape on one side of the sacrificial substrate (200), and fill the material (such as nickel or nickel-cobalt) that constitutes the terminal (120) through a plating process. alloy, or nickel-iron alloy) for manufacture.

6( a ) to 6 ( f ) are diagrams showing a process of manufacturing a terminal assembly ( 150 ) based on a cross section taken along A-A of FIG. 5 .

Referring to (a) of FIG. 6 , a photosensitive first photoresist layer ( 210 ) is coated on the upper surface of the sacrificial substrate ( 200 ), and an exposure mask is used to expose the first photoresist layer ( 210 ) and the terminal set ( 150 ), using a solvent to remove the first photoresist layer (210) corresponding to the exposed terminal assembly pattern (212).

Referring to (b) of FIG. 6 , the exposed terminal assembly pattern ( 212 ) of the sacrificial substrate ( 200 ) is etched to form a pattern groove ( 220 ).

Referring to (c) of FIG. 6 , a conductive substance layer ( 230 ) is formed on the sacrificial substrate ( 200 ) including the pattern groove ( 220 ) by sputtering or chemical vapor deposition (CVD). The conductive substance layer (230) can be sputtered to form a titanium layer and a copper layer in sequence. The conductive substance layer ( 230 ) can be used as an electrode in the electroplating process described later.

Referring to (d) of FIG. 6 , the photosensitive second photoresist layer ( 240 ) is coated on the upper surface of the sacrificial substrate ( 200 ) coated with the conductive material layer ( 230 ), and exposed to The mask exposes a pattern corresponding to the shape of the terminal set (150) on the second photoresist layer (240), and a solvent is used to remove the second photoresist layer (240) corresponding to the exposed terminal set pattern. Therefore, the upper surface of the sacrificial substrate (200) may expose a portion corresponding to the pattern of the terminal assembly (150), that is, the conductive material layer (230) at the bottom of the pattern groove (220).

Referring to (e) of FIG. 6 , the pattern groove ( 220 ) may be filled with a metal layer ( 250 ) not limited to nickel, nickel-cobalt alloy, or nickel-iron alloy, etc., through an electroplating process.

Referring to (f) of FIG. 6 , a portion protruding to the outside of the pattern groove ( 220 ) may be polished by, for example, chemical mechanical polishing (CMP) or the like.

Thereafter, by selectively etching the sacrificial substrate (200), the first photoresist layer (210), the second photoresist layer (240) and the conductive material layer (230), the terminal set ( 150).

Additionally, the terminal set ( 150 ) may also be entirely plated with gold (Au) (not limited to gold (Au)).

7A to 7D are diagrams illustrating a method of manufacturing a detection probe (100) according to an embodiment of the present invention.

Fig. 7A is a diagram showing a manufacturing apparatus (300) for assembling a detection probe (100). The manufacturing device (300) may include a bottom (310) and an anti-skid wall (320) built on one side of the bottom (310).

The bottom (310) may include: a collection carrying portion (311) that joins with the anti-slip wall (320) and extends a predetermined width along the anti-slip wall (320); Spaced apart cylinder mounting parts (312); and a recessed part (313) dug out between the collective mounting part (311) and the cylinder mounting part (312).

Referring to FIG. 7B , the assembly mounting part ( 311 ) may mount a plurality of terminals ( 120 ) as a terminal assembly ( 150 ) arranged side by side in an extending direction. At this time, the supporting frame (151) of the terminal assembly (150) is in contact with the non-slip wall (320), thus being prevented from being pushed during insertion of the barrel (110) described later.

The barrel carrying part (312) may include a barrel receiving groove (3121), and the barrel receiving groove (3121) is placed in the barrel of a plurality of terminals (120) of the terminal set (150) carried by the set carrying part (311). The body insertion portion (123) extends side by side in the extending direction.

In the recessed part (313), the body part (121) and the barrel insertion part (123) of the plurality of terminals (120) of the terminal set (150) carried by the set carrying part (311) can be floated and positioned. Here, the second long side on the opposite side to the first long side of the body part (121) connected to the cylinder insertion part (123) can contact the second wall (3132) of the recessed part (313), that is, it is compatible with the collective loading. The second wall (3132) to which the portion (311) meets. Therefore, pushing of the terminal (120) can be counteracted during insertion of the barrel (110) described later. The end of the barrel insertion part (123) may be placed in the barrel receiving groove (3121) through the recessed part (313).

7C is a diagram showing a state in which the cylinder (110) is mounted in the cylinder accommodation groove (3121) of the cylinder mounting portion (312) in the state where the terminal assembly (150) is mounted on the assembly mounting portion (311) . Here, the cylindrical body (110) can be slid and moved toward each terminal (120) of the mounted terminal set (150) along the direction of the arrow. The barrel (110) can be dimpled or rolled at one end Inward protrusions (111) are pre-formed inwardly along the outer peripheral surface. In addition, in the state where the spring (140) and the plunger (130) are inserted into the barrel (110), the other end of the barrel (110) may be in a state of being processed with a dimple so that the plunger (130) does not will fall off.

FIG. 7D is a diagram showing a state in which the barrel ( 110 ) is slid and inserted into the barrel insertion portion ( 123 ) of the terminal ( 120 ) to be fixed in FIG. 7C . When the cylinder body (110) is inserted into the cylinder body insertion part (123), the tension rod (1235) of the elastic deformation part (1233) when the stopper part (1231) of the cylinder body insertion part (123) passes the inward protrusion (111) , 1236) will produce elastic deformation toward the central axis direction of the cylinder body (110). Thereafter, when the stop part (1231) of the cylinder insertion part (123) passes the inward protrusion (111), the tension rods (1235, 1236) of the elastic deformation part (1233) elastically recover, and the stop part (1231) can be aligned with the The inward protrusions (111) are fastened and fixed.

8A to 8C are diagrams illustrating a method of manufacturing a detection probe (100) according to another embodiment of the present invention.

Referring to FIG. 8A , the barrel ( 110 ) forms an inward protrusion ( 111 ) on one end side, but unlike FIG. 7C , the spring ( 140 ) and the plunger ( 130 ) are not inserted into the interior. Here, the cylinder mounting part (312) of the manufacturing apparatus (300) is formed so that the other end part of the cylinder (110) mounted on the empty space differs from FIG. 7A. This is to facilitate the processing of the dents at the other end of the barrel (110) which will be described later.

FIG. 8B is a diagram showing a state in which the cylinder body ( 110 ) in FIG. 8A is slid to insert and fix the cylinder body insertion portion ( 123 ) of the terminal ( 120 ) into the cylinder body ( 110 ).

Figure 8C shows the spring (140) inserted and the plunger partially inserted in Figure 8B (130) A state where the other end of the barrel (110) is then subjected to a dimple treatment. Therefore, the detection probe (100) can be produced in the same manner as in the form shown in Fig. 7D.

Since the cylinder body (110) has a very small size such as a diameter of 1mm or less, before inserting the terminal (120) of the fixed terminal assembly (150), the spring (140) and the plunger (130) are respectively inserted. Pit handling can be difficult. Therefore, as shown in FIG. 8B , in a state where the barrel insertion portion ( 123 ) of a plurality of terminals ( 120 ) connected to the terminal set ( 150 ) is inserted into the barrel ( 110 ) and fixed, it is easier to insert the spring. (140) and plunger (130) and carry out dimple processing.

Fig. 9 is a diagram showing a terminal (1201) according to a second embodiment of the present invention. Description of the same parts as the terminal ( 120 ) according to the first embodiment shown in FIG. 3 will be omitted.

The cylinder insertion part (123) may include: a first stopper part (1231-1) and a second stopper part (1231-2) respectively protruding from both sides in the width direction; an open slot extending along the length direction (1232); and an elastic deformation (1233) formed by the slot (1232).

The maximum distance between the first stopper part (1231-1) and the second stopper part (1231-2) may be at least the same as the inner diameter of the barrel or set in such a way that it can be pressed into the barrel (110). The first stopper (1231-1) may be adjacent to the open-type slot (1232) and formed at the free end of the first tension rod (1235).

The slit ( 1232 ) may be formed in such a manner as to extend rearward in the length direction from the tip portion, extend outward in the width direction, and be opened. Slot (1232) may include an expansion slot (1234) at an inner end that is larger than the width of slot (1232).

The elastic deformation part (1233) may include a first tension rod (1235) and a second tension rod (1236) formed by separating the slot (1232). The first tension rod (1235) may be formed in a cantilever configuration meeting the open slot (1232).

As mentioned above, when the cylinder inserting part (123) is inserted into one side end of the cylinder (110), the first tension rod (1235) and the second tension rod (1236) can be positioned at the first stopper part ( 1231-1) and the second stop portion (1231-2) are elastically deformed when passing through the inward protrusion (111) of the barrel (110). At this time, the first tension rod (1235) of the cantilever type may deform more than the second tension rod (1236).

Fig. 10 is a diagram showing a terminal (1202) according to a third embodiment of the present invention. Description of the same parts as the terminal ( 120 ) according to the first embodiment shown in FIG. 3 will be omitted.

The cylinder insertion part (123) may include: a first stopper part (1231-1) and a second stopper part (1231-2) respectively protruding from both sides in the width direction; an open slot extending along the length direction (1232); and an elastic deformation (1233) formed by the slot (1232).

The slot ( 1232 ) may be formed in such a manner as to extend forward toward the free end in the length direction to be opened. The slot (1232) may gradually expand towards the free end.

Fig. 11 is a diagram showing a terminal (1203) according to a fourth embodiment of the present invention. Description of the same parts as the terminal ( 1201 ) according to the second embodiment shown in FIG. 9 will be omitted.

The cylinder insertion part (123) may include: a first stopper part (1231-1) and a second stopper part (1231-2) respectively protruding on both sides relative to the length direction; An opening-type slot (1232) extending toward the direction; and an elastic deformation part (1233) connected to the slot (1232).

The maximum distance between the first stopper part (1231-1) and the second stopper part (1231-2) may be set in such a manner that it is at least the same as the inner diameter of the barrel or may be pressed into the barrel.

The slot (1232) can be formed in a manner of extending forward along the length direction and then opening on one side of the width direction through the first stopper part (1231-1) and the second stopper part (1231-2). Fig. 12 is a diagram showing a terminal (1204) according to a fifth embodiment of the present invention. Description of the same parts as the terminal ( 1202 ) according to the third embodiment shown in FIG. 10 will be omitted.

The cylinder insertion part (123) may include: a first stopper part (1231-1) and a second stopper part (1231-2) respectively protruding on both sides in the width direction; a slot (1232) extending along the length direction ); an elastic deformation portion (1233) formed by the slots (1232); and an elastic support portion (1237) provided between the slots (1232).

The elastic support part (1237) can connect the second tension rod (1236) from the first tension rod (1235) within the slot (1232). The elastic support part (1237) may be formed in an arc shape with a predetermined curvature.

The elastic supporting part (1237) can be similarly applied to the terminals (1201, 1203) according to the second embodiment and the fourth embodiment shown in Fig. 9 and Fig. 11 .

FIG. 13 is a diagram showing a terminal (120) according to a sixth embodiment of the present invention, and FIG. 14 is a cross-sectional view showing part B-B of FIG. 13 . Description of the same parts as the terminal ( 120 ) according to the first embodiment shown in FIG. 3 will be omitted.

Referring to Fig. 13 and Fig. 14, the cylinder insertion part (123) may include a first stop extension part ( 1238-1) and the second stop extension (1238-2).

Such a first stop extension (1238-1) and a second stop extension (1238-2) can more firmly fix the plate-shaped terminal (120) to the barrel (110).

As a modified example, the side faces of the first stopper extension (1238-1) and the second stopper extension (1238-2) facing the inner side of the barrel (110) may contact the inner wall of the barrel (110) surface. Fig. 15 is a diagram showing the first terminal (420-1) and the second terminal (420-2) according to the seventh embodiment of the present invention, and Fig. 16 shows the first terminal (420-1) and the second terminal (420-2) in Fig. A diagram of a terminal (420) where two terminals (420-2) overlap.

15 and 16, the terminal (420) may include a first terminal (420-1) and a second terminal (420-2) which may overlap each other in a thickness direction.

The first terminal (420-1) may include: a first body part (421-1); a first contact part (422-1) extending integrally from one side of the first body part (421-1); The opposite side of the first body part (421-1) is integrally extended and inserted into the first cylinder insertion part (423-1) of the cylinder (110).

The second terminal (420-2) may include: a second body part (421-2); a second contact part (422-2) extending integrally from one side of the second body part (421-2); The opposite side of the second body part (421-2) is integrally extended and inserted into the second cylinder insertion part (423-2) of the cylinder (110).

The first cylinder insertion part (423-1) and the first body part (421-1) can form It is 1/2 of the thickness of the first contact portion (422-1).

Likewise, the second cylinder insertion part (423-2) and the second body part (421-2) may be formed to 1/2 the thickness of the second contact part (422-2).

The first cylinder insertion part ( 423 - 1 ) and the second cylinder insertion part ( 423 - 2 ) have structures similar to those of the cylinder insertion part ( 123 ) shown in FIG. 3 . In the state where the first terminal (420-1) and the second terminal (420-2) overlap in the thickness direction, the first cylinder insertion part (423-1) and the second cylinder insertion part (423-2) can Insert and secure to one end of the barrel.

The terminal (420) may be formed by turning over and overlapping any one of the first terminal (420-1) and the second terminal (420-2) manufactured by the same structure. In the state where the first terminal (420-1) and the second terminal (420-2) overlap, the first contact portion (422-1) and the second contact portion (422-2) can be arranged at different positions from each other . As shown in FIG. 16, the overlapped first terminal (420-1) and second terminal (420-2) may have a fork shape. In addition, the first contact portion (422-1) and the second contact portion (422-2) may be located on the same plane.

So far, the contact portion (121) of the terminal (120) has been shown and explained in a plate shape, but may have a cross-sectional shape of a cylinder or a quadrangular prism.

In the foregoing specification, the invention and its advantages have been described with reference to specific embodiments. However, it will be apparent to those skilled in the art that various modifications and changes can be made without departing from the scope of the present invention as described in the following claims. Accordingly, the specification and drawings are to be regarded as illustrative rather than restrictive of the invention. All such possible modifications shall be within this within the scope of the invention.

120: terminal

121: Body Department

122: contact part

123: cylinder insertion part

1211: tie rod connecting part

1212: stop edge

1221: tip

1231: stopper

1232: slot

1233: elastic deformation part

1234: Expansion slot

1235: the first tension rod / tension rod

1236:Second tension rod/tension rod

D2: Maximum distance

Claims (5)

A detection probe, comprising in the detection probe: a cylinder having a hollow and one end equipped with an inward protrusion protruding inward; The terminal has a stopper inserted and fixed in the barrel and caught at the inward protrusion, and when inserted into one end of the barrel, the stopper is directed toward the barrel by the inward protrusion an elastic deformation portion elastically deformed by the central axis of the body; and The plunger is accommodated in the other end of the barrel so as to be slidably movable in the longitudinal direction. The detection probe as described in claim item 1, wherein The elastic deformation part includes a pair of tension rods separated by a slot extending along the length direction. The detection probe as described in claim item 1, wherein The terminals include: body part; a contact portion having a tip integrally extended from one side of the body portion and contacting a detected contact of the detected object; and The cylinder insertion portion integrally extends from the other side facing the one side of the body portion and is inserted into the cylinder. The detection probe as described in claim item 3, wherein The body part includes a stopper edge for limiting the insertion degree of the cylinder insertion part into the cylinder. The detection probe as described in claim item 4, wherein The body portion includes a tie rod connecting portion connecting the tie rod, The connecting portion of the tie rod is located on the opposite side of the stop edge.

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