CN114076838A

CN114076838A - Detection probe

Info

Publication number: CN114076838A
Application number: CN202110884624.4A
Authority: CN
Inventors: 曺惺铉
Original assignee: Leeno Industiral Inc
Current assignee: Leeno Industiral Inc
Priority date: 2020-08-11
Filing date: 2021-08-03
Publication date: 2022-02-22
Also published as: TWI794879B; KR20220019917A; TW202206823A; KR102456449B1

Abstract

A detection probe for detecting an electrical characteristic of an object to be detected is disclosed. The detection probe comprises: a cylinder body having a hollow shape and provided with an inward protrusion protruding inward at one end portion; a terminal having a stopper portion caught by the inward protrusion and an elastic deformation portion elastically deforming the stopper portion toward a central axis of the barrel by the inward protrusion when inserted into one end portion of the barrel; and a plunger housed in the other end portion of the cylinder so as to be slidably movable in a longitudinal direction.

Description

Detection probe

Technical Field

The present invention relates to a detection probe for detecting electrical characteristics of an object to be detected such as a camera module.

Background

As shown in fig. 1, a detection probe 1 for detecting an electrical characteristic of an object to be detected includes: a cylindrical barrel (barrel) 11; a first plunger (plunger)12 fixed to one side of the cylinder 11; a second plunger 13 partially inserted into the other side of the cylinder 11 and slidably movably supported; and a spring (spring)14 provided between the first plunger 12 and the second plunger 13 within the cylinder 11.

The first plunger 12 includes a contact tip (tip) of a terminal that contacts an object to be detected and a barrel insertion portion that is inserted into the barrel 11. The cylinder insertion portion includes a groove dug out in a circumferential direction. After the tubular body insertion portion is inserted into the tubular body 11, the tubular body 11 may be fixed by deforming the portion corresponding to the groove by pressing with a dimple (dimple) or rolling operation.

Due to the miniaturization of products, the pitch of the terminals of the object to be detected, which the detection probes 1 come into contact with, gradually becomes smaller, and therefore the size of the detection probes 1 used for detection also becomes very small. For example, it is very troublesome and difficult to perform a dimpling or rolling operation after inserting the first plunger 12 into the cylinder 11 having a diameter of 1mm or less.

In particular, terminals of a specific object to be detected, such as a camera module, may have curved-surface-shaped terminals, unlike a Ball Grid Array (BGA) type. Therefore, as the tip of the conventional first plunger 12 shown in fig. 1, a plate-shaped terminal (terminal) having a contact tip having a form suitable for detection may be used.

Such a plate-shaped terminal has an advantage that mass production can be performed by a mold or a Micro Electro Mechanical System (MEMS) process, but has the following problems: after being inserted into a cylindrical tube, the tube is difficult to fix by a dimpling operation or a rolling operation, and workability may be deteriorated.

Disclosure of Invention

[ problems to be solved by the invention ]

The purpose of the present invention is to provide a detection probe that can be mass-produced and has a structure that is excellent in workability.

[ means for solving problems ]

Provided is a detection probe for achieving the object of the present invention. The detection probe comprises: a cylinder body having a hollow shape and provided with an inward protrusion protruding inward at one end portion; a terminal having a stopper portion inserted and fixed into the barrel and caught at the inward protrusion, and an elastic deformation portion elastically deforming the stopper portion toward a central axis of the barrel by the inward protrusion when inserted into one end portion of the barrel; and a plunger housed in the other end portion of the cylinder so as to be slidably movable in a longitudinal direction.

The elastic deformation portion may include a pair of tension rods (tension bars) formed by slots (slots) elongated in a length direction.

The slots may comprise closed or open slots.

The slot may include an expansion slot expanding in a width direction.

The stopper portion may include a stopper extension portion extending in the thickness direction at the end portion side.

The terminals may be fabricated by a MEMS process.

The terminal may include: a body portion; a contact part having a tip integrally extended from one side of the body part and contacting a contact point to be detected of an object to be detected; and a cylinder insertion part integrally extended from the other side opposite to the one side of the body part and inserted into the cylinder.

The body portion may include a stopper rib that limits the extent to which the cartridge insertion portion is inserted into the cartridge.

The body portion may include a tie bar connection portion connecting a tie bar,

the tie bar connection may be located on opposite sides of the stop edge.

The terminals include first and second terminals that are overlapped to be inserted into the barrel, and the first and second terminals may include contact portions provided at different positions from each other, respectively.

[ Effect of the invention ]

The detection probe of the invention is manufactured in a large quantity and assembled to the cylinder body through a Mold (Mold) or Micro Electro Mechanical System (MEMS) process, thereby reducing the manufacturing cost and improving the assembly operability of the detection probe.

Drawings

Fig. 1 is a cross-sectional view showing a conventional detection probe.

FIG. 2 is a view showing a detection probe according to a first embodiment of the present invention.

Fig. 3 is a diagram showing the terminal of fig. 2.

Fig. 4 is a diagram showing a terminal set (set) including a plurality of terminals.

Fig. 5 is a diagram showing a sacrificial substrate having a plurality of pattern grooves of terminal sets.

Fig. 6 (a) to 6 (f) are diagrams showing a process of manufacturing the terminal set based on a cross section taken along a-a of fig. 5.

Fig. 7A to 7D are views illustrating a method of manufacturing a sensing probe according to an embodiment of the present invention.

Fig. 8A to 8C are views illustrating a method of manufacturing a sensing probe according to another embodiment of the present invention.

Fig. 9 is a diagram showing a terminal according to a second embodiment of the present invention.

Fig. 10 is a diagram showing a terminal according to a third embodiment of the present invention.

Fig. 11 is a diagram showing a terminal according to a fourth embodiment of the present invention.

Fig. 12 is a diagram showing a terminal according to a fifth embodiment of the present invention.

Fig. 13 is a diagram showing a terminal according to a sixth embodiment of the present invention.

Fig. 14 is a sectional view taken along the line B-B of fig. 13.

Fig. 15 is a diagram showing a first terminal and a second terminal according to a seventh embodiment of the present invention.

Fig. 16 is a diagram showing a superimposed terminal obtained by superimposing the first terminal and the second terminal shown in fig. 15.

[ description of symbols ]

1. 100, and (2) a step of: detection probe

11. 110: barrel body

12: first plunger

13: second plunger

14. 140: spring

103: hollow cavity

111: inward protrusion

112: diameter reducing part

120. 420, 1201, 1202, 1203, 1204: terminal with a terminal body

121: body part

122: contact part

123: barrel insertion part

130: plunger piston

150: terminal set

151: supporting frame

152: tie bar

200: sacrificial substrate

210: first photoresist layer

212: terminal set pattern

220: pattern groove

230: conductive material layer

240: second photoresist layer

250: metal layer

300: manufacturing apparatus

310: bottom part

311: terminal mounting part

312: barrel mounting part

313: concave part

320: anti-skid wall

420-1: first terminal

420-2: second terminal

421-1: first body part

421-2: second body part

422-1: first contact part

422-2: second contact part

423-1: first barrel insertion part

423-2: second cylinder insertion part

1211: tie bar connecting part

1212: stop edge

1221: tip end

1231: stop part

1231-1: first stop part

1231-2: second stop part

1232: narrow slot

1233: elastic deformation part

1234: expansion slot

1235: first tension bar/tension bar

1236: second tension bar/tension bar

1237: elastic support part

1238-1: first stop extension part

1238-2: second stop extension part

3121: barrel accommodation groove

3132: second wall

D1: outer diameter

D2: maximum distance

Detailed Description

Hereinafter, the detection probe 100 according to the embodiment of the present invention will be described in detail with reference to the accompanying drawings.

Fig. 2 is a view illustrating a sensing probe 100 according to a first embodiment of the present invention, and fig. 3 is a view illustrating a terminal 120 of fig. 2.

Referring to fig. 2, the detection probe 100 may include: a hollow cylindrical barrel 110; a terminal 120 fixed to one end of the barrel 110; a plunger 130 which is partially inserted into the other end of the cylinder 110 in a slidably movable manner; and a spring 140 disposed between the terminal 120 and the plunger 130 within the barrel 110.

The cylinder 110 has a hollow 103 penetrating in a tubular shape. The cylinder 110 is made of a conductive material such as brass, and may be entirely plated with copper (Cu), gold (Au), or silver (Ag).

The barrel 110 may include an inward protrusion 111 protruding inward at an end of the insertion terminal 120. The inward protrusions 111 may be manufactured by a dimpling or rolling operation. The inward protrusions 111 may be preformed prior to insertion of the terminals 120.

Barrel 110 may include a reduced diameter portion 112 with a reduced diameter at the end on the other side of insertion plunger 130. The reduced diameter portion 112 may be formed by a dimple (double) operation after the plunger 130 is inserted into the other end of the cylinder 110, unlike the inward protrusion 111.

The terminals 120 may be manufactured by a mold or MEMS process. The terminal 120 may be made of, for example, nickel (Ni), nickel-cobalt (Ni — Co), or nickel-iron (NiF) alloy, etc.

Referring to fig. 3, the terminal 120 may include a body part 121, a contact part 122 of the terminal contacting an object to be detected, and a barrel insertion part 123 inserted into the barrel 110.

The body portion 121 has a rectangular shape, and the contact portion 122 may extend from one side of a first long side, and the cylinder insertion portion 123 may extend from a second long side opposite to the first long side. The body portion 121 may include a tie bar connecting portion 1211 that connects a tie bar, which will be described later, to the first long side. The second long side is formed with a length greater than the outer diameter (D1 of fig. 2) of the barrel 110 and may form a stopper edge 1212. The tie bar joint 1211 may also be provided at both short sides according to design.

The contact portion 122 may include a tip 1221 that contacts the contact to be detected. The tips 1221 may be formed singly or in plurality.

The barrel insertion part 123 may include: a pair of stopper portions 1231 protruding from both side surfaces in the width direction; a closed slot 1232 extending in a length direction; and an elastically deformable portion 1233 formed by the slot 1232.

The maximum distance D2 between the pair of stops 1231 may be at least as large as the inside diameter of the barrel 110 or may be pressed into the barrel 110. The stopper 1231 may be formed in a barb shape toward the body part 121 to be effectively caught by the inward protrusion 111 of the cylinder 110.

The slot 1232 may include, for example, a circular expansion slot 1234 having a diameter larger than the width of the slot 1232 at both ends in the length direction.

The elastically deformable portion 1233 may include a pair of

tension rods

1235, 1236 formed by partitioning a slot 1232.

As described above, when the tubular body insertion portion 123 is inserted into the one end portion of the tubular body 110, the

tension rods

1235 and 1236 elastically deform the stopper 1231 in the central axis direction of the tubular body 110 by the inward protrusion 111 of the tubular body 110. After the stopper 1231 passes over the inward protrusion 111, the elastically

restorable tension rods

1235, 1236 are caught at the inward protrusion 111 of the cylinder 110. At this time, the cylinder insertion portion 123 may be fixed without being continuously inserted when the stopper edge 1212 comes into contact with the end of the cylinder 110.

Fig. 4 is a diagram showing a terminal set 150 including a plurality of terminals 120.

The terminal set 150 may be manufactured by a MEMS process or a mold (mold) process. The terminal set 150 may include: a support frame 151; a plurality of terminals 120 detachably connectable to the support frame 151; and tie bars 152 connecting the plurality of terminals 120 to the support frame 151.

The tie bar 152 may be connected to any portion of the body 121 of the terminal 120 as long as it does not interfere with the process of inserting the cylindrical body 110 into the cylindrical body insertion portion 123 in the manufacturing process of the inspection probe 100 to be described later. The tie bar 152 is preferably connected to a second side, which is opposite to the first side of the body portion 121 to which the cylinder insertion portion 123 is connected. The reason is that the tie bar 152 is not separated from the body 121 by the pressure applied when the cylinder 110 is inserted into the cylinder insertion portion 123. In particular, the tie bar 152 is preferably positioned to extend parallel to the extending direction of the cylinder insertion portion 123.

Fig. 5 is a diagram showing a sacrificial substrate 200 having a plurality of pattern grooves 220 of the terminal set 150.

The sacrificial substrate 200 is not limited, and a silicon substrate, a laminated ceramic substrate, or a silicon wafer may be preferably used.

Referring to fig. 5, the terminal assembly 150 may be manufactured by forming a pattern groove 220 corresponding to a shape of one surface of a sacrificial substrate 200 and filling a material (e.g., nickel, or nickel-cobalt alloy, or nickel-iron alloy) constituting the terminal 120 through a plating process.

Fig. 6 (a) to 6 (f) are diagrams showing a process of manufacturing the terminal set 150 based on a cross section taken along a-a of fig. 5.

Referring to fig. 6 (a), a photosensitive first photoresist layer 210 is coated on the upper surface of the sacrificial substrate 200, a pattern corresponding to the shape of the terminal set 150 is exposed on the first photoresist layer 210 using an exposure mask, and the first photoresist layer 210 corresponding to the exposed terminal set pattern 212 is removed using a solvent.

Referring to fig. 6 (b), the exposed terminal set pattern 212 of the sacrificial substrate 200 is etched to form a pattern groove 220.

Referring to fig. 6 (c), a conductive substance layer 230 is formed on the sacrificial substrate 200 including the pattern groove 220 by sputtering or Chemical Vapor Deposition (CVD). The conductive material layer 230 may be sputtered to form a titanium layer and a copper layer in this order. The conductive substance layer 230 may be used as an electrode in an electroplating process to be described later.

Referring to fig. 6 (d), a photosensitive second photoresist layer 240 is coated on the upper surface of the sacrificial substrate 200 coated with the conductive material layer 230, a pattern corresponding to the shape of the terminal assembly 150 is exposed to the second photoresist layer 240 using an exposure mask, and the second photoresist layer 240 corresponding to the exposed terminal assembly pattern is removed using a solvent. Therefore, the upper surface of the sacrificial substrate 200 may expose a portion corresponding to the pattern of the terminal assembly 150, i.e., the conductive material layer 230 located at the bottom of the pattern groove 220.

Referring to fig. 6 (e), a metal layer 250, which is not limited to nickel, nickel-cobalt alloy, nickel-iron alloy, or the like, may be filled in the pattern groove 220 by an electroplating process.

Referring to fig. 6 (f), the portion protruding to the outside of the pattern groove 220 may be polished by, for example, Chemical Mechanical Polishing (CMP), or the like.

Thereafter, the terminal set 150 shown in fig. 4 can be manufactured by selectively etching the sacrificial substrate 200, the first and second photoresist layers 210 and 240, and the conductive material layer 230.

Additionally, the terminal set 150 may also be entirely plated with gold (Au) (not limited to gold (Au)).

Fig. 7A to 7D are views illustrating a method of manufacturing the sensing probe 100 according to the embodiment of the present invention.

Fig. 7A is a diagram showing a manufacturing apparatus 300 for assembling the detection probe 100. The manufacturing apparatus 300 may include a bottom 310 and a non-slip wall 320 established at one side of the bottom 310.

The bottom 310 may include: a set mounting part 311 connected to the non-slip wall 320 and extending along the non-slip wall 320 by a predetermined width; a cylinder mounting portion 312 spaced apart from the collection mounting portion 311; and a recessed portion 313 hollowed out between the collection mounting portion 311 and the cylinder mounting portion 312.

Referring to fig. 7B, the set mounting portion 311 may mount the terminal set 150 in which the plurality of terminals 120 are arranged side by side in the extending direction. At this time, the support frame 151 of the terminal set 150 is in contact with the non-slip wall 320, and thus may be prevented from being pushed during the insertion of the cylinder 110, which will be described later.

The barrel mounting portion 312 may include a barrel housing groove 3121, and the barrel housing groove 3121 extends side by side in an extending direction of the barrel insertion portions 123 of the plurality of terminals 120 of the terminal set 150 mounted on the set mounting portion 311.

The main body 121 and the cylindrical insertion portion 123 of the plurality of terminals 120 of the terminal assembly 150 mounted on the assembly mounting portion 311 are positioned in the recessed portion 313 so as to be able to float. Here, a second long side located opposite to the first long side of the body part 121 of the connection cylinder insertion part 123 may contact the second wall 3132 of the depression 313, that is, the second wall 3132 in contact with the collective mounting part 311. Therefore, the pushing of the terminal 120 can be offset in the insertion process of the cylinder 110 to be described later. The end of the barrel insertion part 123 may be seated in the barrel accommodation groove 3121 through the depression 313.

Fig. 7C is a view showing a state in which the cylinder 110 is mounted in the cylinder housing groove 3121 of the cylinder mounting portion 312 in a state in which the terminal group 150 is mounted on the group mounting portion 311. Here, the cylindrical body 110 can be slid in the direction of the arrow toward the terminals 120 of the mounted terminal set 150. The cylinder 110 may be pre-formed with inward protrusions 111 inward along the outer circumferential surface at one end portion by a dimple (dimple) or rolling operation. In addition, in a state where the spring 140 and the plunger 130 are inserted into the cylinder 110, the other end portion of the cylinder 110 may be in a pitted state so that the plunger 130 does not fall off.

Fig. 7D is a view showing a state in which the cylindrical body 110 is slid and inserted into the cylindrical body insertion portion 123 of the terminal 120 and fixed in fig. 7C. When the cylindrical body 110 is inserted into the cylindrical body insertion portion 123, the

tension rods

1235, 1236 of the elastic deformation portion 1233 are elastically deformed in the central axis direction of the cylindrical body 110 when the stopper 1231 of the cylindrical body insertion portion 123 passes the inward protrusion 111. Thereafter, when the stopper 1231 of the cartridge insertion part 123 passes through the inward protrusion 111, the

tension rods

1235, 1236 of the elastic deformation part 1233 are elastically restored, and the stopper 1231 may be fastened and fixed with the inward protrusion 111.

Fig. 8A to 8C are views illustrating a method of manufacturing the sensing probe 100 according to another embodiment of the present invention.

Referring to fig. 8A, the cylinder 110 is formed with an inward protrusion 111 at one end side, but the spring 140 and the plunger 130 are not inserted into the inside unlike fig. 7C. Here, the tubular body mounting portion 312 of the manufacturing apparatus 300 is formed so that the other end portion of the mounted tubular body 110 is placed in an empty space, unlike fig. 7A. This is for facilitating the pit processing at the other end of the cylindrical body 110 to be described later.

Fig. 8B is a view showing a state where the cylinder 110 in fig. 8A is slidably moved to insert and fix the cylinder insertion part 123 of the terminal 120 into the cylinder 110.

Fig. 8C shows a state in which the other end portion of the cylinder 110 is subjected to the dimple process after the spring 140 is inserted and the plunger 130 is partially inserted in fig. 8B. Therefore, the detection probe 100 can be manufactured in the same manner as the mode shown in fig. 7D.

Since the cylinder 110 is a very small size, for example, 1mm or less in diameter, it may be difficult to perform a dimpling process after inserting the spring 140 and the plunger 130, respectively, before inserting the terminals 120 securing the terminal assembly 150. Therefore, as shown in fig. 8B, in a state where the cylinder insertion portion 123 connected to the plurality of terminals 120 of the terminal set 150 is inserted into the cylinder 110 and fixed, it is possible to more easily insert the spring 140 and the plunger 130 and perform the dimpling process.

Fig. 9 is a diagram showing a terminal 1201 according to a second embodiment of the present invention. The description of the same portions as those of the terminal 120 according to the first embodiment shown in fig. 3 will be omitted.

The barrel insertion part 123 may include: a first stopper portion 1231-1 and a second stopper portion 1231-2 protruding from both sides in the width direction, respectively; an open slot 1232 extending in a length direction; and an elastically deformable portion 1233 formed by the slot 1232.

The maximum distance between the first and second stops 1231-1 and 1231-2 may be at least the same as the inside diameter of the barrel or set in such a way that it can be pressed into the barrel 110. The first stop 1231-1 may be adjacent to the open slot 1232 and formed at the free end of the first tension bar 1235.

The slit 1232 may be formed to extend rearward from the tip portion in the longitudinal direction and then extend outward in the width direction so as to be open. The slot 1232 may include an expansion slot 1234 at the inboard end that is larger than the width of the slot 1232.

The elastic deformation portion 1233 may include a first tension bar 1235 and a second tension bar 1236 formed by separating the slots 1232. The first tension bar 1235 may be formed in a cantilever configuration in conjunction with the open slot 1232.

As described above, when the cartridge insertion part 123 is inserted into the one end of the cartridge 110, the first and

second tension rods

1235 and 1236 are elastically deformed when the first and second stoppers 1231-1 and 1231-2 pass the inward protrusion 111 of the cartridge 110. At this time, the cantilever type first tension rod 1235 may be deformed more than the second tension rod 1236.

Fig. 10 is a diagram showing a terminal 1202 according to a third embodiment of the present invention. The description of the same portions as those of the terminal 120 according to the first embodiment shown in fig. 3 will be omitted.

The slot 1232 may be formed to be opened so as to extend forward toward the free end portion in the longitudinal direction. The slot 1232 may gradually expand toward the free end.

Fig. 11 is a diagram showing a terminal 1203 according to a fourth embodiment of the present invention. Description of the same portions as those of the terminal 1201 according to the second embodiment shown in fig. 9 will be omitted.

The barrel insertion part 123 may include: a first blocking portion 1231-1 and a second blocking portion 1231-2 protruding from both sides with respect to the longitudinal direction; an open slot 1232 extending in a length direction; and an elastically deformable portion 1233 contiguous with the slot 1232.

The maximum distance between the first and second stops 1231-1 and 1231-2 can be set at least as large as the inside diameter of the barrel or can be pressed into the barrel.

The slit 1232 may be formed to extend forward in the longitudinal direction and then to be opened at one side in the width direction through the stopper 1231. Fig. 12 is a diagram showing a terminal 1204 according to a fifth embodiment of the present invention. The description of the same portions as those of the terminal 1202 according to the third embodiment shown in fig. 10 will be omitted.

The barrel insertion part 123 may include: a first stopper portion 1231-1 and a second stopper portion 1231-2 protruding from both sides in the width direction, respectively; a slot 1232 extending in a length direction; an elastically deformable portion 1233 formed by the slot 1232; and elastic supports 1237 provided between the slots 1232.

The resilient support 1237 may connect the second tension bar 1236 from the first tension bar 1235 within the slot 1232. The elastic support 1237 may be formed in an arc shape having a predetermined curvature.

The elastic support 1237 can be similarly applied to the

terminals

1201, 1203 according to the second and fourth embodiments shown in fig. 9 and 11.

Fig. 13 is a view showing a terminal 120 according to a sixth embodiment of the present invention, and fig. 14 is a sectional view showing a portion B-B of fig. 13. The description of the same portions as those of the terminal 120 according to the first embodiment shown in fig. 3 will be omitted.

Referring to fig. 13 and 14, the cartridge insertion part 123 may include first and second stopper extensions 1238-1 and 1238-2 extending in a thickness direction from the first and second stoppers 1231-1 and 1231-2.

Such first and second catching extensions 1238-1 and 1238-2 may more firmly fix the plate-shaped terminal 120 to the barrel 110.

As a modified example, the sides of the first and second catching extensions 1238-1 and 1238-2 facing the inside of the cylinder 110 may be curved surfaces contacting the inner wall of the cylinder 110. Fig. 15 is a diagram showing a first terminal 420-1 and a second terminal 420-2 according to a seventh embodiment of the present invention, and fig. 16 is a diagram showing the terminal 420 in which the first terminal 420-1 and the second terminal 420-2 of fig. 15 are overlapped.

Referring to fig. 15 and 16, the terminal 420 may include a first terminal 420-1 and a second terminal 420-2 that may overlap each other in a thickness direction.

The first terminal 420-1 may include: the first body portion 421-1; a first contact portion 422-1 integrally extended from one side of the first body portion 421-1; and a first body insertion part 423-1 integrally extended from the other side opposite to the one side of the first body part 421-1 and inserted into the cylinder 110.

The second terminal 420-2 may include: a second body portion 421-2; a second contact portion 422-2 integrally extending from one side of the second body portion 421-2; and a second cylinder insertion part 423-2 integrally extended from the other side opposite to the one side of the second body part 421-2 and inserted into the cylinder 110.

The first cylinder insertion part 423-1 and the first body part 421-1 may be formed to 1/2 the thickness of the first contact part 422-1.

Similarly, the second cylinder insertion part 423-2 and the second body part 421-2 may be formed to be 1/2 the thickness of the second contact part 422-2.

The first cylindrical body insertion portion 423-1 and the second cylindrical body insertion portion 423-2 have a structure similar to that of the cylindrical body insertion portion 123 shown in fig. 3, respectively. The first cylindrical insertion portion 423-1 and the second cylindrical insertion portion 423-2 are inserted and fixed to one end portion of the cylindrical body in a state where the first terminal 420-1 and the second terminal 420-2 are overlapped in the thickness direction.

The terminal 420 may be formed by turning and overlapping any one of the first and second terminals 420-1 and 420-2 manufactured by the same structure. The first and second contact portions 422-1 and 422-2 may be arranged at different positions from each other in a state where the first and second terminals 420-1 and 420-2 overlap. As shown in fig. 16, the overlapped first and second terminals 420-1 and 420-2 may have a fork shape. In addition, the first contact portion 422-1 and the second contact portion 422-2 may be located on the same plane.

The contact portion 121 of the terminal 120 has been shown and described as a plate shape so far, but may have a shape of a cross section of a cylinder or a quadrangular prism.

In the foregoing specification, the invention and its advantages have been described with reference to specific embodiments. However, it will be apparent to those skilled in the art that various modifications and variations can be made without departing from the scope of the invention as set forth in the following claims. The specification and drawings are, accordingly, to be regarded in an illustrative rather than a restrictive sense. All such possible modifications are intended to be within the scope of the present invention.

Claims

1. A detection probe comprising, in the detection probe:

a cylinder body having a hollow shape and provided with an inward protrusion protruding inward at one end portion;

a terminal having a stopper portion inserted and fixed into the barrel and caught at the inward protrusion, and an elastic deformation portion elastically deforming the stopper portion toward a central axis of the barrel by the inward protrusion when inserted into one end portion of the barrel; and

and a plunger housed in the other end portion of the cylinder so as to be slidable in a longitudinal direction.

2. The detection probe of claim 1, wherein

The elastic deformation portion includes a pair of tension bars formed by partitioning a slot elongated in the length direction.

3. The detection probe of claim 1, wherein

The terminal includes:

a body portion;

a contact part having a tip integrally extended from one side of the body part and contacting a contact point to be detected of an object to be detected; and

and a cylindrical body insertion part integrally extended from the other side opposite to the one side of the main body part and inserted into the cylindrical body.

4. The detection probe of claim 3, wherein

The body portion includes a stopper rib that limits the extent to which the barrel insertion portion is inserted into the barrel.

5. The detection probe of claim 4, wherein

The body portion includes a tie bar connecting portion connecting the tie bars,

the tie bar connecting portions are located on opposite sides of the stopper rib.