TWI789717B - Release film roll and manufacturing method thereof, ceramic part sheet and manufacturing method thereof, and ceramic part and manufacturing method thereof - Google Patents

Release film roll and manufacturing method thereof, ceramic part sheet and manufacturing method thereof, and ceramic part and manufacturing method thereof Download PDF

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TWI789717B
TWI789717B TW110107285A TW110107285A TWI789717B TW I789717 B TWI789717 B TW I789717B TW 110107285 A TW110107285 A TW 110107285A TW 110107285 A TW110107285 A TW 110107285A TW I789717 B TWI789717 B TW I789717B
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roll
release film
winding
manufacturing
ceramic
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TW202202341A (en
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飯島忠良
江守泰彦
飯田修治
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日商 Tdk 股份有限公司
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65HHANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS, CABLES
    • B65H18/00Winding webs
    • B65H18/08Web-winding mechanisms
    • B65H18/26Mechanisms for controlling contact pressure on winding-web package, e.g. for regulating the quantity of air between web layers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G13/00Apparatus specially adapted for manufacturing capacitors; Processes specially adapted for manufacturing capacitors not provided for in groups H01G4/00 - H01G11/00
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00Fixed capacitors; Processes of their manufacture
    • H01G4/30Stacked capacitors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G4/00Fixed capacitors; Processes of their manufacture
    • H01G4/32Wound capacitors

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Laminated Bodies (AREA)
  • Ceramic Capacitors (AREA)
  • Absorbent Articles And Supports Therefor (AREA)

Abstract

本揭示提供一種剝離膜卷之製造方法,其具有一面將接觸輥按壓於捲繞卷一面以捲繞卷捲繞剝離膜之捲繞步驟,且捲繞步驟中,一面使接觸輥旋轉驅動一面捲繞剝離膜。本揭示提供一種陶瓷零件片材之製造方法,其具有以下步驟:於自由上述製造方法獲得之剝離膜卷拉出之剝離膜之剝離層之表面,使用包含陶瓷粉末之糊膏,形成陶瓷生坯片。This disclosure provides a method of manufacturing a release film roll, which has a winding step of pressing the touch roll on the winding roll and winding the release film with the winding roll, and in the winding step, rotating the touch roll while driving the roll around the release film. The present disclosure provides a method for manufacturing a ceramic component sheet, which has the following steps: on the surface of the release layer of the release film drawn from the release film roll obtained by the above-mentioned manufacturing method, a paste containing ceramic powder is used to form a ceramic green body piece.

Description

剝離膜卷及其製造方法、陶瓷零件片材及其製造方法、以及陶瓷零件及其製造方法Release film roll and manufacturing method thereof, ceramic part sheet and manufacturing method thereof, and ceramic part and manufacturing method thereof

本揭示係關於一種剝離膜卷及其製造方法、陶瓷零件片材及其製造方法、以及陶瓷零件及其製造方法。The present disclosure relates to a release film roll and a manufacturing method thereof, a ceramic part sheet and a manufacturing method thereof, and a ceramic part and a manufacturing method thereof.

近年來,隨著電子機器小型化之要求,電子零件亦逐漸小型化。電子零件之一種即陶瓷零件亦逐年小型化。例如,陶瓷零件之一種即積層陶瓷電容器將介電層及內部電極之厚度薄化,而謀求大電容化。一般之積層陶瓷電容器藉由將剝離膜作為載體膜,將介電層及內部電極形成於載體膜上作為生坯片,剝離生坯片並積層而製造。In recent years, with the demand for miniaturization of electronic equipment, electronic components have gradually been miniaturized. Ceramic parts, which are one type of electronic parts, are also being miniaturized year by year. For example, multilayer ceramic capacitors, which are one type of ceramic components, are designed to increase capacitance by reducing the thickness of the dielectric layer and internal electrodes. A general multilayer ceramic capacitor is manufactured by using a release film as a carrier film, forming a dielectric layer and internal electrodes on the carrier film as a green sheet, peeling off the green sheet, and laminating them.

若積層陶瓷電容器之介電層之厚度變薄,則有表示會產生短路等問題之耐電壓強度之耐壓性能降低之傾向。尤其,介電層之厚度不均一之情形時,較薄部分會成為耐壓性能降低之要因。具備具有此種較薄部分之介電層之積層陶瓷電容器耐壓不良,積層陶瓷電容器之良率降低。另一方面,若介電層之厚度均一,則耐壓性能良好,積層陶瓷電容器之良率提高。When the thickness of the dielectric layer of the laminated ceramic capacitor becomes thinner, the withstand voltage performance indicating the withstand voltage strength, which causes problems such as short circuit, tends to decrease. In particular, when the thickness of the dielectric layer is not uniform, the thinner part will be the cause of the decrease in withstand voltage performance. A multilayer ceramic capacitor having a dielectric layer having such a thin portion has poor withstand voltage, and the yield of the multilayer ceramic capacitor decreases. On the other hand, if the thickness of the dielectric layer is uniform, the withstand voltage performance is good, and the yield rate of the laminated ceramic capacitor is improved.

作為介電層之載體膜使用之剝離膜中存在之損傷等成為介電層之厚度變動之要因。又,剝離膜表面之平滑性會對介電層之厚度均一性造成影響。鑑於此種狀況,例如專利文獻1中,研討有可使剝離膜平滑化而減少介電層之厚度不均之剝離膜卷。 [先前技術文獻] [專利文獻]Damage or the like in the release film used as the carrier film of the dielectric layer becomes a factor of variation in the thickness of the dielectric layer. In addition, the smoothness of the release film surface will affect the thickness uniformity of the dielectric layer. In view of such a situation, for example, in Patent Document 1, a release film roll capable of smoothing the release film and reducing thickness unevenness of the dielectric layer has been studied. [Prior Art Literature] [Patent Document]

專利文獻1:日本專利特開2011-206995號公報Patent Document 1: Japanese Patent Laid-Open No. 2011-206995

[發明所欲解決之問題][Problem to be solved by the invention]

陶瓷零件之製造步驟中,於自剝離膜卷拉出之剝離膜之剝離層之表面,形成陶瓷生坯片。此處,作為用以提高陶瓷零件之生產性之對策,認為加長捲繞於剝離膜卷之剝離膜之捲繞長度,減少剝離膜卷之更換頻率較為有效。In the manufacturing process of ceramic parts, a ceramic green sheet is formed on the surface of the release layer of the release film pulled out from the release film roll. Here, as measures for improving the productivity of ceramic parts, it is considered that it is effective to lengthen the winding length of the release film wound on the release film roll and reduce the replacement frequency of the release film roll.

另一方面,將平滑化之剝離膜捲繞於捲芯之情形時,有相鄰之剝離膜間之空氣不易逸散之傾向。若空氣逸散存在不均,則會產生偏芯,剝離膜之捲繞狀態之品質降低。為了提高捲繞狀態之品質需抑制捲繞偏移等之產生,故需要增大捲繞時之剝離膜之張力。為了較大地維持捲繞時之剝離膜之張力,隨著捲繞進展捲繞卷之徑變大,需要提高捲軸之轉矩。然而,若使捲軸之轉矩提高,過度增大捲繞時之張力,則有將捲芯表面之突起及剝離膜所含之填充料等之形狀轉印於剝離膜,於剝離膜之剝離層之表面(剝離面)產生凹凸及變形之虞。為抑制此種形狀轉印,需要以較低之張力捲繞剝離膜。鑑於此種事項,若剝離膜之捲繞長度變長,則難以僅憑捲軸之轉矩控制而兼顧捲繞狀態之品質與減少剝離膜之凹凸及變形。On the other hand, when the smoothed release film is wound around a core, the air between adjacent release films tends to be difficult to escape. If the air escapes unevenly, the center will be eccentric, and the quality of the peeling film in the wound state will be reduced. In order to improve the quality of the winding state, it is necessary to suppress the occurrence of winding deviation, etc., so it is necessary to increase the tension of the release film during winding. In order to maintain a large tension of the release film during winding, the diameter of the winding roll becomes larger as the winding progresses, and it is necessary to increase the torque of the winding shaft. However, if the torque of the reel is increased and the tension during winding is excessively increased, the shape of the protrusions on the surface of the core and the filler contained in the release film may be transferred to the release film, and the release layer of the release film may be transferred to the release film. There is a risk of unevenness and deformation on the surface (peeling surface). In order to suppress such shape transfer, it is necessary to wind the release film with a relatively low tension. In view of such matters, if the winding length of the release film becomes longer, it will be difficult to balance the quality of the winding state and the reduction of unevenness and deformation of the release film only by torque control of the reel.

因此,本揭示提供一種捲繞狀態之品質較高,且可充分減少剝離膜表面之凹凸及變形的剝離膜卷及其製造方法。又,本揭示提供一種藉由使用此種剝離膜卷而具有優異之可靠性之陶瓷零件片材及其製造方法。又,本揭示提供一種藉由使用此種陶瓷零件片材而具有優異之可靠性之陶瓷零件及其製造方法。 [解決問題之技術手段]Therefore, the present disclosure provides a release film roll with high quality in the rolled state, which can sufficiently reduce unevenness and deformation on the surface of the release film, and a manufacturing method thereof. Also, the present disclosure provides a ceramic component sheet having excellent reliability by using such a release film roll, and a manufacturing method thereof. Also, the present disclosure provides a ceramic part having excellent reliability by using such a ceramic part sheet and a manufacturing method thereof. [Technical means to solve the problem]

本揭示之剝離膜卷之製造方法具有捲繞步驟,其一面將接觸輥按壓於捲繞卷一面將剝離膜捲繞於捲繞卷,捲繞步驟中,一面使接觸輥旋轉驅動一面捲繞剝離膜。剝離膜之搬送可使用搬送輥。另,捲繞卷是指已於捲芯進行包含剝離膜之膜之捲繞之狀態之膜卷。The manufacturing method of the peeling film roll disclosed in the present disclosure has a winding step. While pressing the touch roll to the winding roll, the release film is wound on the winding roll. In the winding step, the touch roll is rotated and driven while winding and peeling off. membrane. The transfer of the peeling film can use a transfer roller. In addition, a winding roll means the film roll of the state which wound up the film containing a release film on a core.

上述製造方法中,捲繞步驟中,將接觸輥按壓於捲繞卷,且一面使該接觸輥旋轉驅動一面將剝離膜捲繞於捲繞卷。藉由該接觸輥之按壓與旋轉驅動,可促進捲繞之剝離膜間之空氣逸散。藉此,可縮小捲繞卷之轉矩,抑制剝離膜中之凹凸形狀之轉印,且抑制捲繞偏移之產生。因此,可製造捲繞狀態之品質較高,且充分減少剝離膜表面之凹凸及變形之剝離膜卷。In the above manufacturing method, in the winding step, the touch roll is pressed against the winding roll, and the release film is wound up on the winding roll while rotating and driving the touch roll. By pressing and rotating the touch roller, air escape between the rolled release films can be promoted. Thereby, the torque of a winding roll can be reduced, the transfer of the uneven|corrugated shape in a peeling film can be suppressed, and generation|occurrence|production of a winding misalignment can be suppressed. Therefore, it is possible to manufacture a release film roll in which the quality of the rolled state is high and the unevenness and deformation on the surface of the release film are sufficiently reduced.

上述製造方法中,於捲繞步驟,將剝離膜之厚度設為F[m],將剝離膜之寬度設為W[m],將旋轉驅動捲繞卷之捲軸之轉矩設為T[N·m]時,可將T/(F·W)之值維持在70,000~420,000 N/m之範圍內。In the above manufacturing method, in the winding step, the thickness of the peeling film is set to F[m], the width of the peeling film is set to W[m], and the torque of the reel for rotating and driving the winding roll is set to T[N ·m], the value of T/(F·W) can be maintained within the range of 70,000 to 420,000 N/m.

如先前般不使用接觸輥捲繞之情形時,若將T/(F·W)之值設為上述範圍,則雖可充分減少因轉印所致之凹凸,但產生捲繞剝離膜時之力作用於捲繞至其內側之剝離膜,而於與捲繞方向正交之方向偏移之所謂捲繞偏移。上述捲繞步驟中,由於接觸輥按壓剝離膜且旋轉驅動,故即使將T/(F·W)之值設為上述範圍亦可抑制捲繞偏移之產生。其結果,可進而抑制剝離膜中之凹凸形狀之轉印與捲繞偏移之產生。因此,可製造捲繞狀態之品質充分高,且進而減少剝離膜表面之凹凸及變形之剝離膜卷。In the case of winding without using a touch roll as before, if the value of T/(F·W) is set within the above range, the unevenness caused by transfer can be sufficiently reduced, but it is difficult to wind the release film. A force acts on the peeling film wound to the inner side, and the so-called winding deviation is deviated in the direction perpendicular to the winding direction. In the above-mentioned winding step, since the touch roller presses the release film and is rotationally driven, even if the value of T/(F·W) is within the above-mentioned range, occurrence of winding deviation can be suppressed. As a result, the transfer of the uneven shape in the peeling film and the occurrence of winding deviation can be further suppressed. Therefore, it is possible to manufacture a release film roll in which the quality of the rolled state is sufficiently high, and furthermore, unevenness and deformation on the surface of the release film are reduced.

上述製造方法中,於捲繞步驟,將旋轉驅動捲繞卷之捲軸之轉矩T[N·m]之最大值設為Tmax [N·m],將最小值設為Tmin [N·m],及將上述最大值與上述最小值之和的1/2設為Tave [N·m]時,亦可滿足下述式(1)及(2)。 Tmax ≦1.2×Tave (1) Tmin ≧0.8×Tave (2)In the above-mentioned manufacturing method, in the winding step, the maximum value of the torque T [N·m] that rotates and drives the reel for winding the reel is set to T max [N·m], and the minimum value is set to T min [N·m] m], and when 1/2 of the sum of the above-mentioned maximum value and the above-mentioned minimum value is T ave [N·m], the following formulas (1) and (2) can also be satisfied. T max ≦1.2×T ave (1) T min ≧0.8×T ave (2)

藉由滿足上述式(1)及式(2),可減少捲軸之轉矩變動。藉此,可充分抑制捲繞之剝離膜之張力劇烈變化,捲繞卷之捲繞位置偏移,或產生褶皺。By satisfying the above formula (1) and formula (2), the torque variation of the reel can be reduced. Thereby, it can fully suppress that the tension|tensile_strength of the peeling film wound up changes suddenly, the winding position of a winding roll deviates, and a wrinkle arises.

上述製造方法可包含使用搬送輥搬送剝離膜之搬送步驟、及沿長邊方向切斷剝離膜之切斷步驟。可於切斷剝離膜之前,由夾壓輥與搬送輥夾持剝離膜。藉由以夾壓輥與搬送輥夾持剝離膜,可對切斷之剝離膜賦予特定張力。藉此,可順利地進行切斷步驟,且高精度地調整剝離膜之切斷部分之形狀。The above-mentioned manufacturing method may include a conveyance step of conveying the release film using a conveyance roller, and a cutting step of cutting the release film in the longitudinal direction. Before cutting the release film, the release film may be sandwiched between a nip roll and a conveyance roll. By pinching the release film between the nip roll and the conveying roll, a specific tension can be given to the cut release film. Thereby, the cutting step can be performed smoothly, and the shape of the cut part of the peeling film can be adjusted with high precision.

本揭示之一態樣之剝離膜卷藉由上述任一製造方法獲得。由於該剝離膜卷係藉由上述任一製造方法獲得者,故捲繞狀態之品質較高,且充分減少剝離膜表面之凹凸及變形。The release film roll of an aspect of the present disclosure is obtained by any of the above-mentioned manufacturing methods. Since the release film roll is obtained by any one of the above-mentioned manufacturing methods, the quality of the rolled state is high, and the unevenness and deformation on the surface of the release film are sufficiently reduced.

本揭示之一態樣之陶瓷零件片材之製造方法具有以下步驟:於自上述任一剝離膜卷拉出之剝離膜之剝離層之表面,使用包含陶瓷粉末之糊膏形成陶瓷生坯片。A method of manufacturing a ceramic component sheet according to an aspect of the present disclosure includes the step of forming a ceramic green sheet using a paste containing ceramic powder on the surface of the peeling layer of the peeling film pulled out from any of the above peeling film rolls.

上述製造方法使用自上述任一剝離膜卷拉出之剝離膜。上述剝離膜卷可充分抑制因捲繞偏移而於剝離膜之表面產生損傷、及因轉印而於剝離膜之表面產生凹凸。因此,可於遍及自捲繞於剝離膜卷之剝離膜之前端至後端間之廣闊區域,形成充分減少厚度變動及針孔之陶瓷生坯片。因此,可製造可靠性優異之陶瓷零件片材。本揭示中,剝離膜之「後端」是指與捲芯相接之側之一端,剝離膜之「前端」是指出現於剝離膜卷之外周面之側之一端。The above-mentioned production method uses a release film drawn from any one of the above-mentioned release film rolls. The above-mentioned release film roll can sufficiently suppress the generation of damage on the surface of the release film due to winding misalignment, and the generation of unevenness on the surface of the release film due to transfer. Therefore, it is possible to form a ceramic green sheet with sufficiently reduced thickness variations and pinholes over a wide area from the front end to the rear end of the release film wound on the release film roll. Therefore, a ceramic component sheet excellent in reliability can be manufactured. In this disclosure, the "rear end" of the release film refers to the end on the side in contact with the core, and the "front end" of the release film refers to the end that appears on the outer peripheral surface of the release film roll.

本揭示之一態樣之陶瓷零件之製造方法具有以下步驟:使用由上述製造方法獲得之陶瓷零件片材,獲得包含陶瓷生坯片之積層體;及燒成積層體,獲得燒結體。A method of manufacturing a ceramic part according to an aspect of the present disclosure has the following steps: using the ceramic part sheet obtained by the above-mentioned manufacturing method to obtain a laminated body including ceramic green sheets; and firing the laminated body to obtain a sintered body.

上述製造方法中,使用充分抑制因捲繞偏移及轉印所致之表面凹凸及厚度變動之剝離膜,製造陶瓷零件。藉此,可形成充分減少厚度變動及針孔之陶瓷生坯片。因此,可製造可靠性優異之陶瓷零件。In the above manufacturing method, ceramic parts are manufactured using a release film that sufficiently suppresses surface irregularities and thickness variations due to winding misalignment and transfer. Thereby, it is possible to form a ceramic green sheet with sufficiently reduced thickness variations and pinholes. Therefore, ceramic parts excellent in reliability can be manufactured.

本揭示之一態樣之陶瓷零件片材係可於自上述任一剝離膜卷拉出之剝離膜之剝離層之表面,形成包含陶瓷生坯片之生坯片而獲得。A ceramic component sheet according to an aspect of the present disclosure can be obtained by forming a green sheet including a ceramic green sheet on the surface of a release layer of a release film drawn from any of the release film rolls described above.

使用自上述任一剝離膜卷拉出之剝離膜,獲得上述陶瓷零件片材。上述剝離膜之剝離層已充分抑制因捲繞偏移及轉印所致之表面凹凸及變形。因此,可充分減少陶瓷生坯片之厚度變動及針孔。形成包含此種陶瓷生坯片之生坯片而獲得之陶瓷零件片材具有優異之可靠性。The above-mentioned ceramic component sheet is obtained using a release film pulled out from any one of the above-mentioned release film rolls. The release layer of the above-mentioned release film has sufficiently suppressed surface unevenness and deformation caused by winding deviation and transfer. Therefore, thickness variation and pinholes of the ceramic green sheet can be sufficiently reduced. A ceramic part sheet obtained by forming a green sheet including such a ceramic green sheet has excellent reliability.

本揭示之一態樣之陶瓷零件具備燒結體,其係形成包含上述陶瓷零件片材之陶瓷生坯片之積層體,將該積層體燒成而獲得。上述陶瓷生坯片之厚度變動及針孔已充分減少。上述陶瓷零件因具備將包含此種陶瓷生坯片之積層體燒成而獲得之燒結體而可靠性優異。 [發明之效果]A ceramic component according to an aspect of the present disclosure includes a sintered body obtained by forming a laminate of ceramic green sheets including the above ceramic component sheet and firing the laminate. The thickness variation and pinholes of the above-mentioned ceramic green sheets have been substantially reduced. The above-mentioned ceramic part has excellent reliability because it includes a sintered body obtained by firing a laminate including such a ceramic green sheet. [Effect of Invention]

根據本揭示,可提供一種即使加長剝離膜之捲繞長度,捲繞狀態之品質亦較高,且可充分減少剝離膜表面之凹凸及變形的剝離膜卷及其製造方法。又,可提供一種藉由使用此種剝離膜卷,而具有優異之可靠性之陶瓷零件片材及其製造方法。又,可提供一種藉由使用此種陶瓷零件片材,而具有優異之可靠性之陶瓷零件片材及其製造方法。According to the present disclosure, even if the winding length of the release film is increased, the quality of the rolled state is high, and the unevenness and deformation of the surface of the release film can be sufficiently reduced and the production method thereof can be provided. In addition, a ceramic component sheet having excellent reliability and a method of manufacturing the same can be provided by using such a release film roll. In addition, it is possible to provide a ceramic component sheet having excellent reliability by using such a ceramic component sheet and a method of manufacturing the same.

以下,根據情形,參照圖式說明本揭示之實施形態。各圖式中,對同一或同等要件標註同一符號,根據情形省略重複之說明。但,以下之實施形態係用以說明本揭示之例示,並非旨在將本揭示限定於以下內容。Hereinafter, embodiments of the present disclosure will be described with reference to the drawings depending on the situation. In each drawing, the same symbol is marked for the same or equivalent elements, and repeated explanations are omitted depending on the situation. However, the following embodiments are examples for explaining the present disclosure, and are not intended to limit the present disclosure to the following contents.

圖1係一實施形態之剝離膜卷之立體圖。圖1之剝離膜卷100具備:剝離膜20,其具有基材膜及剝離層;及捲芯10,其捲繞有剝離膜20。剝離膜20例如於以積層陶瓷電容器為代表之陶瓷零件之製造步驟中,作為載體膜使用。該製造步驟中,例如於剝離膜之上藉由塗佈或印刷,而形成成為介電質生坯片之陶瓷生坯片,及成為內部電極之電極生坯片,其後,將該等剝離並積層,燒成積層體而製造陶瓷零件。剝離膜20係自剝離膜卷100拉出而使用。Fig. 1 is a perspective view of a release film roll of an embodiment. The peeling film roll 100 of FIG. 1 is equipped with the peeling film 20 which has a base film and a peeling layer, and the core 10 by which the peeling film 20 was wound. The release film 20 is used as a carrier film, for example, in the manufacturing process of ceramic parts represented by laminated ceramic capacitors. In this manufacturing step, for example, a ceramic green sheet to be a dielectric green sheet and an electrode green sheet to be an internal electrode are formed by coating or printing on a release film, and then these are peeled off. And laminated, fired laminated body to manufacture ceramic parts. The release film 20 is used after being pulled out from the release film roll 100 .

作為捲芯10之材質,列舉紙、塑膠、金屬等。製造陶瓷零件時,由於顆粒會成為產生針孔之原因,故較佳為包含不產生紙粉之輕量之塑膠者。作為此種材料,列舉ABS樹脂、酚醛樹脂及纖維增強塑膠等。纖維增強塑膠因除了較高機械強度外還具有柔軟性,故可較佳使用。作為纖維增強塑膠,列舉以熱硬化性樹脂強化纖維者。作為樹脂,列舉環氧樹脂、不飽和聚酯樹脂等。作為纖維,列舉玻璃纖維、芳族聚醯胺纖維等。考慮成本方面等,樹脂可為不飽和聚酯樹脂。基於同樣觀點,纖維可為玻璃纖維。Examples of the material of the core 10 include paper, plastic, metal, and the like. When manufacturing ceramic parts, since particles can cause pinholes, it is preferable to include light-weight plastics that do not generate paper dust. Examples of such materials include ABS resins, phenolic resins, and fiber-reinforced plastics. Fiber-reinforced plastics are preferred due to their flexibility in addition to their high mechanical strength. Examples of fiber-reinforced plastics include ones in which fibers are reinforced with a thermosetting resin. Examples of the resin include epoxy resins, unsaturated polyester resins, and the like. Examples of the fiber include glass fiber, aramid fiber, and the like. In consideration of cost and the like, the resin may be an unsaturated polyester resin. Based on the same viewpoint, the fibers may be glass fibers.

捲芯10之外徑可為150 mm以下,亦可為100 mm以下。藉此,可減小剝離膜卷100之尺寸,減少設置空間及輸送成本。The outer diameter of the winding core 10 may be less than 150 mm, or less than 100 mm. Thereby, the size of the peeling film roll 100 can be reduced, and the installation space and transportation cost can be reduced.

捲繞於捲芯10之剝離膜20之捲繞長度可為4000 m以上,可為5000 m以上,亦可為6000 m以上。藉此,於陶瓷生坯片及陶瓷零件等之製造步驟中,可減少剝離膜卷100之更換頻率,進而提高各種製品之生產效率。剝離膜20之厚度可為10~110 μm,亦可為20~60 μm。剝離膜20之寬度可為例如0.1~2 m。另,本揭示中,將拉出及捲繞剝離膜時,搬送剝離膜之方向稱為長邊方向,將與剝離膜之長邊方向正交之方向稱為剝離膜之寬度方向。The winding length of the release film 20 wound around the core 10 may be 4000 m or more, 5000 m or more, or 6000 m or more. Thereby, in the manufacturing steps of ceramic green sheets and ceramic parts, etc., the replacement frequency of the release film roll 100 can be reduced, thereby improving the production efficiency of various products. The thickness of the release film 20 may be 10-110 μm, or 20-60 μm. The width of the release film 20 may be, for example, 0.1-2 m. In addition, in this disclosure, when pulling out and winding a release film, the direction in which the release film is conveyed is referred to as the longitudinal direction, and the direction perpendicular to the longitudinal direction of the release film is referred to as the width direction of the release film.

圖2係顯示剝離膜之一例之剖視圖。剝離膜20具有基材膜22及其一面上之剝離層24。基材膜22可為合成樹脂膜。作為合成樹脂,列舉聚酯樹脂、聚丙烯樹脂及聚乙烯樹脂等聚烯烴樹脂、聚乳酸樹脂、聚碳酸酯樹脂、聚甲基丙烯酸甲酯樹脂等丙烯酸系樹脂、聚苯乙烯樹脂、尼龍等聚醯胺樹脂、聚氯乙烯樹脂、聚胺酯樹脂、氟系樹脂、以及聚苯硫醚樹脂等。其中,較佳為聚酯樹脂。聚酯樹脂中,基於力學性質、透明性、成本等觀點,更佳為聚對苯二甲酸乙二酯(PET,polyethylene terephthalate)。Fig. 2 is a cross-sectional view showing an example of a release film. The release film 20 has a base film 22 and a release layer 24 on one surface thereof. The base film 22 may be a synthetic resin film. Examples of synthetic resins include polyolefin resins such as polyester resins, polypropylene resins, and polyethylene resins, acrylic resins such as polylactic acid resins, polycarbonate resins, and polymethyl methacrylate resins, polystyrene resins, and polystyrene resins such as nylon. Amide resins, polyvinyl chloride resins, polyurethane resins, fluorine-based resins, and polyphenylene sulfide resins. Among them, polyester resin is preferred. Among the polyester resins, polyethylene terephthalate (PET, polyethylene terephthalate) is more preferable in terms of mechanical properties, transparency, cost, and the like.

基材膜22之厚度較佳為10~100 μm,更佳為20~50 μm。厚度未達10 μm之情形時,有剝離膜20之尺寸穩定性等物理特性受損之傾向。厚度超出100 μm之情形時,有導致剝離膜20之每單位面積之製造成本上升之傾向。The thickness of the base film 22 is preferably 10-100 μm, more preferably 20-50 μm. When the thickness is less than 10 μm, physical properties such as dimensional stability of the release film 20 tend to be impaired. When the thickness exceeds 100 μm, the manufacturing cost per unit area of the release film 20 tends to increase.

基於充分提高剝離膜20之機械強度之觀點,基材膜22可以無損透明性之程度含有填充料(填充劑)。本實施形態之剝離膜卷100係即使基材膜22含有填充料,亦可充分抑制將填充料之形狀轉印於在沿剝離膜卷100之徑向上相鄰之剝離膜20之剝離層24。填充料並非特別限定者,列舉例如碳酸鈣、磷酸鈣、二氧化矽、高嶺土、滑石粉、氧化鈦、燒製二氧化矽、氧化鋁、及有機粒子等。From the viewpoint of sufficiently improving the mechanical strength of the release film 20, the base film 22 may contain a filler (filler) to such an extent that the transparency is not impaired. The release film roll 100 of this embodiment can sufficiently suppress the transfer of the shape of the filler to the release layer 24 of the release film 20 adjacent in the radial direction of the release film roll 100 even if the base film 22 contains the filler. The filler is not particularly limited, and examples thereof include calcium carbonate, calcium phosphate, silica, kaolin, talc, titanium oxide, fired silica, alumina, and organic particles.

剝離層24係於基材膜22之一面上塗佈包含剝離劑之溶液,使之乾燥及硬化而形成。塗佈方法未特別限定,只要使用反向塗佈法、凹版塗佈法、桿式塗佈法、棒式塗佈法、邁耶棒式塗佈法、模塗法、噴塗法等即可。乾燥可使用熱風乾燥、紅外線乾燥、自然乾燥等。為抑制乾燥時之水分結露,較佳進行加熱,且可為60~120°C左右。The release layer 24 is formed by coating a solution containing a release agent on one surface of the base film 22, drying and curing it. The coating method is not particularly limited, and any method such as reverse coating, gravure coating, bar coating, bar coating, Meyer bar coating, die coating, or spray coating may be used. For drying, hot air drying, infrared drying, natural drying, etc. can be used. In order to suppress moisture condensation during drying, it is preferable to heat, and it can be about 60-120°C.

作為用以形成剝離層24之剝離劑,列舉例如矽酮系剝離劑、長鏈烷基系剝離劑、氟系剝離劑及胺基醇酸樹脂系者。矽酮系剝離劑基於硬化反應之差異,有加成反應系矽酮剝離劑、縮合系矽酮剝離劑、紫外線硬化系剝離劑等。Examples of the release agent for forming the release layer 24 include silicone-based release agents, long-chain alkyl-based release agents, fluorine-based release agents, and amino alkyd resin-based release agents. Silicone-based release agents include addition reaction-based silicone release agents, condensation-based silicone release agents, and ultraviolet-curable silicone release agents based on differences in curing reactions.

硬化條件只要根據剝離劑之硬化系統適當選擇即可。例如,若剝離劑為加成反應系之矽酮,則可藉由以80~130°C加熱處理數十秒而使之硬化。若為紫外線硬化系,則可將水銀燈、金屬鹵素燈等作為光源,照射紫外線使之硬化。照射紫外線使自由基聚合之情形時,為防止氧抑制,較佳於氮氣氛圍下進行硬化。剝離層24之厚度變動幅度宜小為佳。The curing conditions may be appropriately selected according to the curing system of the release agent. For example, if the release agent is an addition reaction silicone, it can be hardened by heat treatment at 80-130°C for tens of seconds. In the case of an ultraviolet curing system, a mercury lamp, a metal halide lamp, etc. can be used as a light source, and it can be cured by irradiating ultraviolet rays. In the case of radical polymerization by irradiating ultraviolet rays, it is preferable to cure in a nitrogen atmosphere in order to prevent oxygen inhibition. It is better that the variation range of the thickness of the peeling layer 24 is small.

加成反應系矽酮剝離劑使於聚二甲基矽氧烷之末端及/或側鏈導入有乙烯基者與氫矽氧烷反應而硬化。硬化可使用鉑催化劑。例如,可以100°C左右之硬化溫度使之硬化數十秒至數分鐘。剝離層24之厚度亦可為50~300 nm左右。作為加成反應系之剝離劑,可列舉信越化學工業股份有限公司製之K847、KS847T、KS-776L、KS-776A、KS-841、KS-774、KS-3703T、KS-3601等(皆為商品名)。The addition reaction silicone release agent reacts with hydrogen siloxane to harden polydimethylsiloxane with vinyl groups introduced into the terminal and/or side chain. Hardening can use a platinum catalyst. For example, it can be hardened for tens of seconds to several minutes at a hardening temperature of about 100°C. The thickness of the release layer 24 may also be about 50-300 nm. As the release agent of the addition reaction system, K847, KS847T, KS-776L, KS-776A, KS-841, KS-774, KS-3703T, KS-3601, etc. manufactured by Shin-Etsu Chemical Co., Ltd. (all are Product name).

剝離層24亦可以例如(甲基)丙烯酸酯成分與(甲基)丙烯酸酯改性矽酮之硬化物構成。由於此種硬化物可以紫外線硬化,故可增大剝離層24之厚度。因此,例如於基材膜22包含填充料之情形時,可覆蓋因填料所致之突起,使剝離層24之表面(剝離面)平滑化。該情形時,剝離層24之厚度亦可為30~3000 nm。The peeling layer 24 can also be comprised, for example by the cured product of (meth)acrylate component and (meth)acrylate modified silicone. Since this cured product can be cured by ultraviolet rays, the thickness of the peeling layer 24 can be increased. Therefore, for example, when the base film 22 contains a filler, the protrusion by a filler can be covered and the surface (release surface) of the peeling layer 24 can be smoothed. In this case, the thickness of the release layer 24 may be 30 to 3000 nm.

亦可使用互不相溶之(甲基)丙烯酸酯單體與(甲基)丙烯酸酯改性矽酮油。將該等與反應引發劑一起混合於溶劑中,塗佈於基材膜22後,使溶劑乾燥。如此,亦可於使矽酮改性矽酮油於表面附近局部化之狀態下,利用紫外線使之硬化,形成剝離層24。作為(甲基)丙烯酸酯改性矽酮油,可使用眾所周知者。例如,可列舉信越化學工業股份有限公司製之X-22-164A、X-22-164B、X-22-174DX、X-22-2445(皆為商品名)等。It is also possible to use immiscible (meth)acrylate monomers and (meth)acrylate modified silicone oils. These are mixed with a reaction initiator in a solvent and applied to the base film 22, and then the solvent is dried. In this way, the peeling layer 24 can also be formed by curing the silicone-modified silicone oil with ultraviolet rays in a state where the silicone-modified silicone oil is localized near the surface. As the (meth)acrylate-modified silicone oil, known ones can be used. For example, X-22-164A, X-22-164B, X-22-174DX, X-22-2445 (all are brand names) etc. manufactured by Shin-Etsu Chemical Co., Ltd. are mentioned.

剝離膜20之剝離層24之表面較佳為平滑。具體而言,剝離層24之表面粗糙度(Rp)較佳為100 nm以下,更佳為50 nm以下。本實施形態之剝離層24之表面粗糙度(Rp)為JIS B 0601-2001所規定之最大峰值,可使用接觸式表面粗糙度計或掃描型白色干涉顯微鏡測定。The surface of the release layer 24 of the release film 20 is preferably smooth. Specifically, the surface roughness (Rp) of the release layer 24 is preferably 100 nm or less, more preferably 50 nm or less. The surface roughness (Rp) of the release layer 24 in this embodiment is the maximum peak value specified in JIS B 0601-2001, and can be measured using a contact surface roughness meter or a scanning white interference microscope.

一實施形態之剝離膜卷100之製造方法具有:搬送步驟,其使用搬送輥搬送剝離膜;切斷步驟,其沿長邊方向切斷剝離膜;及捲繞步驟,其一面將接觸輥按壓於捲繞卷,一面以捲繞卷捲繞剝離膜。搬送步驟亦可於切斷步驟前後之任一者或兩者進行。The manufacturing method of the release film roll 100 according to one embodiment includes: a conveying step of conveying the peeling film using a conveying roller; a cutting step of cutting the peeling film along the longitudinal direction; and a winding step of pressing the touch roller on one side. A winding roll is used, and the peeling film is wound with a winding roll on one side. The conveying step may be performed either or both before and after the cutting step.

圖3係顯示進行剝離膜卷100之製造方法之製造裝置之一例之圖。圖3之製造裝置300中,使用剝離膜卷200。剝離膜卷200將具有較剝離膜20寬之寬度(例如1~2 m)之剝離膜20A捲繞於卷芯11。剝離膜卷200藉由以眾所周知之方法,將剝離膜20A捲繞於捲芯11而製造。剝離層可以與基材膜之長邊方向平行之方式條紋狀排列複數個而形成。此時,可將剝離膜20A之基材膜側作為內側,捲繞於捲芯11,亦可將剝離層側作為內側而捲繞。剝離膜卷200之捲繞長度可長於剝離膜卷100之捲繞長度。亦可以對剝離膜卷100之捲繞長度之整數倍之長度,加上伴隨於切斷作業之損耗量之長度,製作剝離膜卷200。該情形時,捲繞步驟中,可於剝離膜卷100完成後,將自剝離膜卷200送出之剝離膜20A沿寬度方向切斷,將該剝離膜卷200繼續使用於其它剝離膜卷100之製造。藉此,可謀求生產性之效率化。FIG. 3 is a diagram showing an example of a manufacturing apparatus for performing the manufacturing method of the release film roll 100 . In the manufacturing apparatus 300 of FIG. 3, the release film roll 200 is used. The release film roll 200 winds up the release film 20A having a wider width (for example, 1 to 2 m) than the release film 20 around the core 11 . The release film roll 200 is manufactured by winding up the release film 20A around the core 11 by a well-known method. The release layer may be formed by arranging a plurality of them in stripes so as to be parallel to the longitudinal direction of the base film. At this time, the base film side of 20 A of release films may be wound up on the core 11, or may be wound up with the release layer side inside. The winding length of the release film roll 200 may be longer than that of the release film roll 100 . The peeling film roll 200 can also be produced by adding the length of the loss amount accompanying the cutting operation to the length which is an integral multiple of the winding length of the peeling film roll 100 . In this case, in the winding step, after the release film roll 100 is completed, the release film 20A sent out from the release film roll 200 can be cut in the width direction, and the release film roll 200 can be continuously used in other release film rolls 100. manufacture. Thereby, productivity efficiency can be aimed at.

製造裝置300在設置於上游側之送出部110中,將剝離膜卷200之捲芯11插入至旋轉軸202,旋轉軸202可旋轉地支持剝離膜卷200。再者,製造裝置300具備於上下方向夾著自剝離膜卷200拉出之剝離膜20A之一對輥50。製造裝置300於進行搬送步驟之一對輥50之下游側,依序具備進行切斷步驟之切斷部120、及進行捲繞步驟之捲繞部130。The manufacturing apparatus 300 inserts the core 11 of the peeling film roll 200 into the rotating shaft 202 in the delivery part 110 provided in the upstream, and the rotating shaft 202 supports the peeling film roll 200 rotatably. In addition, the manufacturing apparatus 300 is equipped with the pair of roll 50 which pinches|interposes the release film 20A pulled out from the release film roll 200 in the up-down direction. The manufacturing apparatus 300 is sequentially provided with the cutting part 120 which performs the cutting process, and the winding part 130 which performs the winding process on the downstream side of the pair of rollers 50 which perform the conveying process.

作為一對輥50之材質,列舉金屬、塑膠、橡膠等。構成一對輥50之上輥50a與下輥50b可以互不相同之材質構成。例如,基於使剝離膜20A與上輥50a充分接觸之觀點,上輥50a可為至少表面為橡膠製之搬送輥。為了抑制下輥50b自身變形而致使搬送速度變得不穩定,下輥50b可為金屬製之夾壓輥。一對輥50之構成未特別限定,變化例中,亦可使上輥50a為夾壓輥,使下輥50b為搬送輥。Examples of the material of the pair of rollers 50 include metal, plastic, rubber, and the like. The upper roller 50a and the lower roller 50b constituting the pair of rollers 50 may be made of different materials. For example, the top roll 50a may be a conveyance roll made of rubber at least on the surface from the viewpoint of sufficiently contacting the release film 20A with the top roll 50a. In order to prevent the lower roller 50b from deforming itself and causing the conveying speed to become unstable, the lower roller 50b may be a pinch roller made of metal. The configuration of the pair of rollers 50 is not particularly limited, and in a modified example, the upper roller 50a may be used as a nip roller, and the lower roller 50b may be used as a transfer roller.

一對輥50可具有使剝離膜20A之張力於其上游側與下游側不同之功能。與剝離膜20A之行進方向反向之轉矩作用於送出部110之旋轉軸202,對剝離膜20A施加張力。作為反向之轉矩,可使用摩擦轉矩、或電磁閘等予以施加。藉由一對輥50具有使剝離膜20A之張力不同之功能,而可高自由度地進行切斷部120及捲繞部130中之剝離膜20之張力控制。The pair of rollers 50 may have a function of making the tension of the release film 20A different between the upstream side and the downstream side. A torque opposite to the traveling direction of the peeling film 20A acts on the rotating shaft 202 of the delivery unit 110 to apply tension to the peeling film 20A. As the reverse torque, friction torque, electromagnetic brake, etc. can be used to apply it. Since the pair of rollers 50 have the function of varying the tension of the release film 20A, the tension control of the release film 20 in the cutting unit 120 and the winding unit 130 can be performed with a high degree of freedom.

切斷部120具有上刃輥60a與下刃輥60b。上刃輥60a可沿其之旋轉軸方向,以特定間隔安裝複數片上刃。上刃輥60a之上刃可與下刃輥60b嚙合。將通過一對輥50之剝離膜20A於上刃輥60a與下刃輥60b間,沿長邊方向切斷。藉此,分割成例如具有100~500 mm寬度之剝離膜20。若於捲軸102安裝複數個捲芯10,一面以接觸輥70按壓被切斷之剝離膜20一面將其捲繞於捲芯10,則可一次性製造複數個剝離膜卷100。切斷部120可使用排刃等眾所周知之切斷機。另,亦可不具有切斷部120。該情形時,可自一個剝離膜卷200獲得一個剝離膜卷100。The cutting unit 120 has an upper blade roller 60a and a lower blade roller 60b. The upper blade roller 60a may be provided with a plurality of upper blades at specific intervals along the direction of its rotation axis. The upper blade of the upper blade roller 60a is engageable with the lower blade roller 60b. The release film 20A passing through the pair of rolls 50 is cut along the longitudinal direction between the upper blade roll 60a and the lower blade roll 60b. Thereby, it divides into the peeling film 20 which has a width of 100-500 mm, for example. If a plurality of winding cores 10 are installed on the reel 102, and the cut release film 20 is pressed by the touch roller 70 and wound on the winding core 10, a plurality of release film rolls 100 can be manufactured at one time. As the cutting unit 120, a well-known cutting machine such as a row blade can be used. In addition, the cutting part 120 may not be provided. In this case, one release film roll 100 can be obtained from one release film roll 200 .

捲繞部130具備捲軸102,其插入至捲繞卷100a之捲芯10,可旋轉地支持捲芯10。以切斷部120切斷所得之剝離膜20捲繞於捲繞部130中安裝在捲軸102之捲芯10。此時,捲軸102以特定轉矩旋轉,且接觸輥70將捲繞之剝離膜20按壓於捲芯10側。即,剝離膜20一面由接觸輥70按壓一面被捲繞。藉由捲軸102以特定捲繞轉矩旋轉驅動,可提高剝離膜20之捲繞性。又,接觸輥70對捲繞卷100a之按壓大小可適當調整。The winding unit 130 includes a winding shaft 102 inserted into the winding core 10 of the winding roll 100 a to rotatably support the winding core 10 . The peeling film 20 obtained by cutting by the cutting part 120 is wound up on the core 10 attached to the reel 102 in the winding part 130 . At this time, the reel 102 rotates with a specific torque, and the touch roller 70 presses the wound release film 20 against the core 10 side. That is, the release film 20 is wound up while being pressed by the touch roll 70 . By rotating the reel 102 with a specific winding torque, the winding property of the release film 20 can be improved. In addition, the pressing force of the touch roller 70 on the winding roll 100a can be appropriately adjusted.

該例中,接觸輥70與捲軸102反向旋轉,但不限定於此。接觸輥70與捲軸102亦可以相同方向旋轉。但,基於進而提高捲繞狀態之品質,且進而減少剝離膜20表面之凹凸及變形之觀點,較佳為接觸輥70與捲軸102反向旋轉。In this example, the touch roller 70 and the reel 102 rotate counterclockwise, but the present invention is not limited thereto. The contact roller 70 and the reel 102 can also rotate in the same direction. However, from the standpoint of further improving the quality of the wound state and further reducing unevenness and deformation on the surface of the release film 20 , it is preferable that the touch roller 70 and the reel 102 rotate in opposite directions.

圖4係顯示進行剝離膜卷100之製造方法之製造裝置之另一例之圖。圖4之製造裝置301於取代捲繞部130而具有捲繞部131之點,與圖3之製造裝置300不同。製造裝置301之送出部110及切斷部120可與製造裝置300相同。製造裝置301之捲繞部131中,剝離膜20首先與接觸輥70接觸,於與接觸輥70接觸之狀態下,繞接觸輥70約半圈後,被夾於接觸輥70與捲繞卷100a間。剝離膜20於接觸輥70與捲繞卷100a間一面受按壓,一面由以特定轉矩旋轉之捲軸102捲繞。該例中,剝離膜20一面由接觸輥70按壓一面捲繞。接觸輥70旋轉驅動,且捲軸102亦以特定捲繞轉矩旋轉驅動,藉此可提高剝離膜20之捲繞性。FIG. 4 is a diagram showing another example of a manufacturing apparatus for performing the manufacturing method of the release film roll 100 . The manufacturing apparatus 301 of FIG. 4 is different from the manufacturing apparatus 300 of FIG. 3 in that it has the winding part 131 instead of the winding part 130. The delivery unit 110 and the cutting unit 120 of the manufacturing device 301 may be the same as those of the manufacturing device 300 . In the winding part 131 of the manufacturing device 301, the peeling film 20 is first in contact with the touch roll 70, and in the state of contact with the touch roll 70, after about half a turn around the touch roll 70, it is sandwiched between the touch roll 70 and the winding roll 100a. between. The release film 20 is pressed between the touch roll 70 and the winding roll 100a, and is wound up by the reel 102 rotating with a specific torque. In this example, the release film 20 is wound up while being pressed by the touch roll 70 . The contact roller 70 is driven to rotate, and the reel 102 is also driven to rotate with a specific winding torque, thereby improving the windability of the release film 20 .

圖5係模式性顯示施加於捲繞部130、131中捲繞於捲繞卷100a之剝離膜20之張力變化的圖。圖5之橫軸係捲繞卷100a之卷形狀之大小,縱軸係施加於捲繞之剝離膜20之張力。圖5之直線1表示將剝離膜20以恆定張力捲繞以恆定張力控制捲繞時之張力變化。恆定張力控制時,由於自捲繞開始時至結束時以恆定張力捲繞剝離膜,故於內側,捲芯表面之突起及剝離膜所含之填充料等之形狀被轉印於剝離膜,易於剝離膜之剝離層表面產生凹凸。FIG. 5 is a diagram schematically showing changes in tension applied to the release film 20 wound up on the winding roll 100 a in the winding portions 130 and 131 . The horizontal axis of FIG. 5 is the size of the roll shape of the wound roll 100a, and the vertical axis is the tension applied to the rolled release film 20 . The straight line 1 in FIG. 5 represents the change in tension when the release film 20 is wound at a constant tension and the winding is controlled at a constant tension. In the case of constant tension control, since the release film is wound with a constant tension from the beginning to the end of the winding, on the inside, the protrusions on the surface of the core and the shape of the filler contained in the release film are transferred to the release film, which is easy The surface of the release layer of the release film has unevenness.

圖5之曲線2表示以錐度張力控制捲繞剝離膜時之張力變化。該情形時,隨著捲繞進展,卷徑變大,與直線1相比,可減小施加於捲繞之剝離膜20之張力。因此,可抑制於剝離膜20之剝離層24之表面產生凹凸。Curve 2 in FIG. 5 shows the change in tension when the release film is wound by controlling the tapered tension. In this case, as the winding progresses, the winding diameter becomes larger, and the tension applied to the winding peeling film 20 can be reduced compared to the straight line 1 . Therefore, occurrence of unevenness on the surface of the release layer 24 of the release film 20 can be suppressed.

圖5之曲線3表示將捲軸102之轉矩控制為恆定,捲繞剝離膜20時之張力變化。該情形時,隨著捲繞進展卷徑變大,可較曲線2進而減小施加於捲繞之剝離膜20之張力。因此,可充分抑制於剝離膜20之剝離層24之表面產生凹凸。Curve 3 in FIG. 5 shows the change in tension when the release film 20 is wound while the torque of the reel 102 is controlled to be constant. In this case, as the winding progresses, the winding diameter becomes larger, and the tension applied to the winding release film 20 can be further reduced compared to curve 2 . Therefore, occurrence of unevenness on the surface of the release layer 24 of the release film 20 can be sufficiently suppressed.

接觸輥70藉由驅動部旋轉驅動。如圖5之曲線3所示,即使以較低張力捲繞剝離膜20,亦一面由接觸輥70按壓一面旋轉驅動接觸輥70,故可減少沿捲繞卷100a之徑向上相鄰之剝離膜20間之空氣。藉此,可抑制產生捲繞偏移、滑動現象及捲繞過緊,可抑制於剝離層24產生褶皺及損傷等凹凸。接觸輥70之旋轉速度可適當微調。切斷部120之切斷速度恆定之情形時,接觸輥70之旋轉速度亦可大致恆定。The touch roller 70 is rotationally driven by a drive unit. As shown in curve 3 of FIG. 5 , even if the release film 20 is wound with a relatively low tension, the touch roll 70 is pressed by the touch roll 70 and rotated to drive the touch roll 70, so the number of release films adjacent in the radial direction of the winding roll 100a can be reduced. 20 rooms of air. Thereby, occurrence of winding misalignment, slipping phenomenon, and excessive winding can be suppressed, and occurrence of irregularities such as wrinkles and scratches on the peeling layer 24 can be suppressed. The rotation speed of the touch roller 70 can be finely adjusted appropriately. When the cutting speed of the cutting unit 120 is constant, the rotational speed of the touch roller 70 may be substantially constant.

接觸輥70之材質列舉金屬、塑膠、橡膠等。剝離膜20易帶電之情形時,亦可將接觸輥70設為導電性者。亦可根據接觸輥70之材質,適當調整接觸輥70之直徑。例如,若為硬材質,則可使用直徑較大者,若為柔材質,則可使用直徑較小者。The material of the touch roller 70 includes metal, plastic, rubber and the like. When the peeling film 20 is easily charged, the touch roller 70 may be made conductive. The diameter of the touch roller 70 can also be adjusted appropriately according to the material of the touch roller 70 . For example, if it is a hard material, you can use a larger diameter, and if it is a soft material, you can use a smaller diameter.

圖6係顯示圖3之捲繞部130之控制方法之一例之圖。捲繞部130可具有:轉矩控制部81a,其控制旋轉驅動捲繞卷100a之捲軸102之轉矩T;及旋轉驅動部82,其基於來自轉矩控制部81a之轉矩資訊,旋轉驅動捲軸102。旋轉驅動部82基於來自轉矩控制部81a之轉矩資訊,以轉軸102之轉矩(捲繞轉矩)成為T之方式旋轉驅動。另,捲繞卷100a係捲繞剝離膜20時之剝離膜卷,當捲繞結束時成為剝離膜卷100。FIG. 6 is a diagram showing an example of a control method of the winding unit 130 in FIG. 3 . The winding part 130 may have: a torque control part 81a, which controls the torque T to rotationally drive the winding shaft 102 of the winding reel 100a; and a rotation driving part 82, which rotates and drives Scroll 102. The rotational drive unit 82 is rotationally driven so that the torque (winding torque) of the rotary shaft 102 becomes T based on the torque information from the torque control unit 81 a. In addition, the winding roll 100a is a release film roll when the release film 20 is wound, and becomes the release film roll 100 when the winding is completed.

將捲繞之剝離膜20之厚度設為F[m],將剝離膜20之寬度設為W[m],將旋轉驅動捲繞卷100a之捲軸102之轉矩設為T[N·m]時,T/(F·W)之值可維持在70,000~420,000 N/m之範圍內。該值表示捲軸102賦予至剝離膜20之每單位剖面之轉矩之大小。藉由將捲繞步驟之T/(F·W)之值設為上述範圍,可抑制沿剝離膜卷100之徑向上相鄰之剝離膜彼此之凹凸轉印,且減少剝離膜20間之空氣,使剝離膜彼此充分密接。基於相同觀點,捲繞步驟之T/(F·W)之值可在70,000~280,000 N/m之範圍內,亦可在100,000~210,000 N/m之範圍內。Let the thickness of the rolled release film 20 be F[m], the width of the release film 20 be W[m], and the torque of the reel 102 that rotates and drives the winding roll 100a be T[N·m] At this time, the value of T/(F·W) can be maintained in the range of 70,000-420,000 N/m. This value represents the magnitude of the torque per unit section of the release film 20 that the reel 102 imparts. By setting the value of T/(F·W) in the winding step within the above-mentioned range, it is possible to suppress the transfer of unevenness between adjacent release films in the radial direction of the release film roll 100, and reduce the air between the release films 20 , so that the peeling films are sufficiently adhered to each other. Based on the same point of view, the value of T/(F·W) in the winding step may be in the range of 70,000-280,000 N/m, or in the range of 100,000-210,000 N/m.

捲軸102之轉矩T之變動宜小為佳。例如,將捲繞步驟之捲軸102之轉矩T[N·m]之最大值設為Tmax [N·m],將最小值設為Tmin [N·m]、及將最大值Tmax 與最小值Tmin 之和的1/2設為Tave [N·m]時,可滿足下述式(1)及(2),亦可滿足下述式(3)及(4)。 Tmax ≦1.2×Tave (1) Tmin ≧0.8×Tave (2) Tmax ≦1.1×Tave (3) Tmin ≧0.9×Tave (4)The variation of the torque T of the reel 102 should be small. For example, let the maximum value of the torque T [N·m] of the reel 102 in the winding step be T max [N·m], the minimum value be T min [N·m], and the maximum value T max When 1/2 of the sum to the minimum value T min is T ave [N·m], the following formulas (1) and (2) can be satisfied, and the following formulas (3) and (4) can also be satisfied. T max ≦1.2×T ave (1) T min ≧0.8×T ave (2) T max ≦1.1×T ave (3) T min ≧0.9×T ave (4)

捲繞步驟中,藉由滿足下述(1)及(2)或式(3)及4(4),可縮小捲軸102之轉矩T之變化幅度。藉此,可充分抑制因轉矩T變大而可能產生之捲繞過緊。另,捲繞步驟中若將轉矩T設為恆定,則隨著捲繞卷100a之卷徑r變大,剝離膜20之捲繞張力變低。本實施形態中,因一面由接觸輥70按壓剝離膜20一面藉由旋轉驅動進行捲繞,故即使捲繞張力變低,亦可充分減少於徑向上相鄰之剝離膜20間之空氣量。In the winding step, by satisfying the following (1) and (2) or formulas (3) and 4 (4), the variation range of the torque T of the winding shaft 102 can be reduced. Thereby, it is possible to sufficiently suppress the overtightening of the winding which may occur due to the increase of the torque T. Moreover, if the torque T is made constant in a winding process, the winding tension of the peeling film 20 will become low as the winding diameter r of the winding roll 100a becomes large. In this embodiment, since the release film 20 is pressed by the touch roller 70 and wound up by rotational driving, even if the winding tension becomes low, the amount of air between the release films 20 adjacent in the radial direction can be sufficiently reduced.

製造裝置300亦可具有:轉矩控制部81b,其控制接觸輥70之旋轉軸72之轉矩T’;及旋轉驅動部83,其基於來自轉矩控制部81b之轉矩資訊,旋轉驅動旋轉軸72。旋轉驅動部83基於來自轉矩控制部81b之轉矩資訊,以旋轉軸72之轉矩成為T’之方式旋轉驅動。若增大接觸輥70之轉矩T’,則捲繞之剝離膜20之張力變大。The manufacturing apparatus 300 may also have: a torque control part 81b that controls the torque T' of the rotating shaft 72 of the touch roller 70; Shaft 72. The rotational drive unit 83 is rotationally driven so that the torque of the rotary shaft 72 becomes T' based on the torque information from the torque control unit 81b. When the torque T' of the touch roller 70 is increased, the tension of the peeling film 20 to be wound increases.

例如,於卷徑r較小時,為了不對剝離膜20過度施加張力,而縮小接觸輥70之轉矩T’。且,若隨著捲繞進展卷徑r變大,而增大轉矩T’,則可以接觸輥70之轉矩T’輔助轉矩T為恆定轉矩以下時之剝離膜20之張力降低。藉此,可減少捲繞卷100a中之空氣量,且抑制隨著張力降低之剝離膜20之翻轉,提高切斷時之穩定性。For example, when the roll diameter r is small, the torque T' of the touch roller 70 is reduced in order not to apply excessive tension to the release film 20. Furthermore, if the torque T' is increased as the winding progresses, the winding diameter r becomes larger, and the torque T' of the contact roller 70 can assist the reduction of the tension of the release film 20 when the torque T is equal to or less than a constant torque. Thereby, the amount of air in the winding roll 100a can be reduced, and the inversion of the peeling film 20 as the tension decreases can be suppressed, and the stability at the time of cutting can be improved.

有時控制裝置300由按壓控制部81c與缸體部84構成,該按壓控制部81c控制接觸輥70對捲繞卷100a之按壓P,該缸體部84產生實際按壓。缸體部84藉由對缸體送入壓縮之空氣而產生按壓。藉由調整壓縮之空氣之氣壓而控制接觸輥之按壓。Sometimes the control device 300 is composed of a pressing control unit 81c that controls the pressing P of the touch roller 70 on the winding roll 100a and a cylinder unit 84 that generates the actual pressing. The cylinder portion 84 is pressed by sending compressed air into the cylinder. The pressing of the touch roller is controlled by adjusting the air pressure of the compressed air.

接觸輥70對捲繞卷100a之按壓P可隨著卷徑r變大而逐漸變大。使捲軸102之轉矩T恆定之情形時,隨著卷徑r變大,剝離膜20之張力變小。因此,若增大接觸輥70之按壓P,則可充分減少於徑向上相鄰之剝離膜20間之空氣量。按壓亦可根據切斷步驟中之切斷速度及剝離膜20之寬度等設定。The pressing P of the touch roller 70 on the winding roll 100a can gradually increase as the roll diameter r increases. When the torque T of the reel 102 is kept constant, the tension of the peeling film 20 becomes smaller as the reel diameter r becomes larger. Therefore, if the pressing force P of the touch roller 70 is increased, the amount of air between the release films 20 adjacent in the radial direction can be sufficiently reduced. The pressure can also be set according to the cutting speed in the cutting step, the width of the release film 20, and the like.

捲軸102亦可具備用以將捲芯10固定於捲軸102之固定機構。剝離膜20之捲繞結束,獲得剝離膜卷100後,使用缸體部84移動接觸輥70,使其離開剝離膜卷100。接著,解除捲軸102之固定機構,將剝離膜卷100自捲軸102卸下。如此可製造剝離膜卷100。The reel 102 may also have a fixing mechanism for fixing the core 10 to the reel 102 . After the winding of the release film 20 is completed and the release film roll 100 is obtained, the touch roller 70 is moved using the cylinder part 84 so as to be separated from the release film roll 100 . Then, the fixing mechanism of the reel 102 is released, and the peeling film roll 100 is unloaded from the reel 102 . In this way, the release film roll 100 can be manufactured.

如此製造之剝離膜卷100於捲繞步驟中,以接觸輥70將剝離膜20按壓於捲繞卷100a,且一面使該接觸輥70旋轉驅動一面捲繞剝離膜20。接觸輥70以按壓P將捲繞於捲繞卷100a之剝離膜20朝捲繞卷100a按壓。又,接觸輥70以轉矩T’旋轉驅動。因此,可促進捲繞之剝離膜20間之空氣逸散,抑制捲繞偏移之產生。又,可縮小捲繞卷100a之捲軸102之轉矩T,減少對剝離膜20之剝離層24表面轉印凹凸形狀。因此,可製造捲繞狀態之品質較高,且充分減少剝離膜20表面之凹凸及變形之剝離膜卷100。The peeling film roll 100 manufactured in this way presses the peeling film 20 to the winding roll 100a with the touch roll 70 in a winding process, and winds up the peeling film 20 while rotating and driving this touch roll 70. The contact roller 70 presses the release film 20 wound up on the winding roll 100a toward the winding roll 100a by the pressing force P. As shown in FIG. Also, the touch roller 70 is rotationally driven with a torque T'. Therefore, the escape of air between the wound release films 20 can be promoted, and the occurrence of winding misalignment can be suppressed. In addition, the torque T of the reel 102 of the winding roll 100a can be reduced, and the transfer of unevenness to the surface of the release layer 24 of the release film 20 can be reduced. Therefore, it is possible to manufacture the release film roll 100 in which the quality of the rolled state is high and the unevenness and deformation of the surface of the release film 20 are sufficiently reduced.

控制部80具有轉矩控制部81a、81b及按壓控制部81c。控制部80由通常之電腦系統構成,該電腦系統包含:CPU(Central Processing Unit:中央處理單元)、ROM(Read Only Memory:唯讀記憶體)及RAM(Ramdom Access Memory:隨機存取記憶體)等主記憶裝置、鍵盤及滑鼠等輸入裝置、顯示器等輸出裝置、用以於與各種測定部間進行資料收發之收發部、及硬碟等輔助記憶裝置等。轉矩控制部81a、81b及按壓控制部81c可包含於一個電腦系統中,亦可分別由個別之電腦系統構成。The control unit 80 has torque control units 81a and 81b and a pressing control unit 81c. The control unit 80 is composed of a common computer system, and the computer system includes: CPU (Central Processing Unit: Central Processing Unit), ROM (Read Only Memory: Read Only Memory) and RAM (Ramdom Access Memory: Random Access Memory) Main memory devices such as keyboards and mice, output devices such as displays, sending and receiving units for data transmission and reception with various measurement units, and auxiliary memory devices such as hard disks, etc. The torque control units 81a, 81b and the pressing control unit 81c may be included in one computer system, or may be constituted by separate computer systems.

轉矩控制部81a、旋轉驅動部82及捲軸102無須以個別之硬體構成,亦可由一個或二個硬體構成。例如,轉矩控制部81a與旋轉驅動部82之功能亦可由市場銷售之轉矩馬達實現。轉矩控制部81之轉矩控制方法未特別限制,例如亦可使用摩擦軸進行。轉矩控制部81b、旋轉驅動部83及旋轉軸72亦無須以個別之硬體構成,亦可由一個或二個硬體構成。例如,轉矩控制部81b與旋轉驅動部83之功能亦可以市場銷售之轉矩馬達實現。又,按壓控制部81c及缸體部84亦無須以個別之硬體構成,亦可由一個硬體構成。The torque control part 81a, the rotation driving part 82 and the reel 102 do not need to be composed of separate hardware, but can also be composed of one or two hardware. For example, the functions of the torque control unit 81a and the rotation driving unit 82 can also be realized by commercially available torque motors. The torque control method of the torque control part 81 is not specifically limited, For example, a friction shaft can also be used. The torque control part 81b, the rotation driving part 83 and the rotating shaft 72 do not need to be constituted by individual hardware, and may also be constituted by one or two hardware. For example, the functions of the torque control unit 81b and the rotation driving unit 83 can also be realized by a commercially available torque motor. Also, the pressing control part 81c and the cylinder part 84 do not need to be constituted by separate hardware, but may be constituted by one hardware.

圖7係本揭示之一實施形態之陶瓷零件片材之剖視圖。圖7之陶瓷零件片材40之製造方法具有以下步驟:於自剝離膜卷100拉出之剝離膜20之剝離層24之表面24a,使用包含陶瓷粉末之糊膏與電極糊膏,形成包含陶瓷生坯片32及電極生坯片34之生坯片30。Fig. 7 is a cross-sectional view of a ceramic part sheet according to an embodiment of the present disclosure. The manufacturing method of the ceramic parts sheet 40 of FIG. 7 has the following steps: on the surface 24a of the peeling layer 24 of the peeling film 20 pulled out from the peeling film roll 100, a paste containing ceramic powder and an electrode paste are used to form a paste containing ceramic powder. The green sheet 30 of the green sheet 32 and the electrode green sheet 34 .

陶瓷生坯片32可塗佈含有陶瓷粉末之陶瓷糊膏,使之乾燥而形成。電極生坯片34可於陶瓷生坯片32之上塗佈電極糊膏,使之乾燥而形成。The ceramic green sheet 32 can be formed by applying a ceramic paste containing ceramic powder and drying it. The electrode green sheet 34 can be formed by coating an electrode paste on the ceramic green sheet 32 and drying it.

例如若為積層陶瓷電容器,則可將介電質原料(陶瓷粉末)與有機媒劑混練而調製陶瓷糊膏。作為介電質原料,列舉藉由燒成而成為複合氧化物或氧化物之各種化合物。例如,可自碳酸鹽、硝酸鹽、氫氧化物、有機金屬化合物等適當選擇使用。介電質原料之平均粒子徑為4 μm以下,較佳為0.1~3.0 μm之粉末。For example, in the case of a multilayer ceramic capacitor, a ceramic paste can be prepared by kneading a dielectric raw material (ceramic powder) and an organic vehicle. Examples of dielectric raw materials include various compounds that become composite oxides or oxides by firing. For example, carbonates, nitrates, hydroxides, organometallic compounds and the like can be appropriately selected and used. The average particle diameter of the dielectric material is less than 4 μm, preferably 0.1-3.0 μm powder.

電極糊膏例如可將選自由各種導電性金屬及合金等之導電體材料、以及各種氧化物、有機金屬化合物及樹脂酸鹽等於燒成後成為導電體材料之材料等所組成之群之至少一者、與有機媒劑混練而調製。作為製造電極糊膏時使用之導電體材料,較佳使用Ni金屬、Ni合金、或該等之混合物。為提高接著性,電極糊膏亦可包含塑化劑。作為塑化劑,列舉鄰苯二甲酸丁基苄酯(BBP,Butyl Benzyl Phthalate)等鄰苯二甲酸酯、己二酸、磷酸酯、乙二醇類等。For example, the electrode paste can be at least one selected from the group consisting of various conductive metals and alloys and other conductive materials, and various oxides, organic metal compounds, resinates, etc., which become conductive materials after firing. Or, mixed with an organic medium and prepared. As the conductor material used for producing the electrode paste, Ni metal, Ni alloy, or a mixture thereof is preferably used. In order to improve adhesion, the electrode paste may also contain a plasticizer. Examples of the plasticizer include phthalates such as butyl benzyl phthalate (BBP, Butyl Benzyl Phthalate), adipic acid, phosphoric acid esters, glycols, and the like.

陶瓷糊膏及電極糊膏所含之有機媒劑係將黏合劑樹脂溶解於有機溶劑中而調製。作為用於有機媒劑之黏合劑樹脂,列舉例如乙基纖維素、丙烯酸系樹脂、縮丁醛系樹脂、聚乙烯縮醛、聚乙烯醇、聚烯烴、聚胺酯、聚苯乙烯、及該等之共聚物等。其中,較佳使用縮丁醛系樹脂,具體而言係聚乙烯縮丁醛系樹脂。藉由使用縮丁醛系樹脂,可提高陶瓷生坯片之機械強度。陶瓷糊膏及電極糊膏之一者或兩者亦可視需要含有選自由各種分散劑、塑化劑、除電劑、介電質、玻璃粉、絕緣體等所組成之群之至少一種添加物。The organic vehicle contained in the ceramic paste and the electrode paste is prepared by dissolving a binder resin in an organic solvent. Examples of binder resins used in organic vehicles include ethyl cellulose, acrylic resins, butyral resins, polyvinyl acetal, polyvinyl alcohol, polyolefins, polyurethanes, polystyrene, and the like. Copolymer etc. Among them, it is preferable to use a butyral-based resin, specifically, a polyvinyl butyral-based resin. By using a butyral resin, the mechanical strength of a ceramic green sheet can be improved. One or both of the ceramic paste and the electrode paste may optionally contain at least one additive selected from the group consisting of various dispersants, plasticizers, static removers, dielectrics, glass powder, and insulators.

使用例如刮板裝置等,將上述陶瓷糊膏塗佈於剝離膜20之剝離層24之表面24a。且,使塗佈之陶瓷糊膏於乾燥裝置內,例如以50~100°C之溫度乾燥1~20分鐘,形成陶瓷生坯片32。陶瓷生坯片32與乾燥前相比,收縮5~25%。The above-mentioned ceramic paste is applied to the surface 24a of the release layer 24 of the release film 20 using, for example, a doctor blade device or the like. And, the coated ceramic paste is dried in a drying device, for example, at a temperature of 50-100° C. for 1-20 minutes to form a ceramic green sheet 32 . The ceramic green sheet 32 shrinks by 5 to 25% compared to before drying.

其後,於陶瓷生坯片32之表面32a上,使用例如網版印刷裝置,以成為特定圖案之方式印刷上述電極糊膏。使印刷後之電極糊膏於乾燥裝置內,例如以50~100°C之溫度乾燥1~20分鐘,形成電極生坯片34。如此,可獲得於剝離膜20之剝離層24之上依序積層有陶瓷生坯片32與電極生坯片34之陶瓷零件片材40。Thereafter, on the surface 32a of the ceramic green sheet 32, the above-mentioned electrode paste is printed in a predetermined pattern using, for example, a screen printing device. The printed electrode paste is dried in a drying device, for example, at a temperature of 50-100° C. for 1-20 minutes to form an electrode green sheet 34 . In this way, the ceramic component sheet 40 in which the ceramic green sheet 32 and the electrode green sheet 34 are sequentially laminated on the release layer 24 of the release film 20 can be obtained.

若剝離膜卷100之剝離膜20之凹凸或厚度變動變大,則陶瓷生坯片32之厚度變動幅度變大。自剝離膜卷100拉出之剝離膜20已充分減少於剝離層24因捲繞偏移及滑動現象等所致之損傷之產生及凹凸。因此,可遍及自捲繞於剝離膜卷100之剝離膜20之前端至後端間之廣闊區域,充分抑制厚度變動及針孔之陶瓷生坯片32。使用具備此種陶瓷生坯片之陶瓷零件片材40製作之陶瓷零件可靠性佳。If the unevenness or thickness variation of the release film 20 of the release film roll 100 becomes larger, the thickness variation range of the ceramic green sheet 32 becomes larger. The peeling film 20 pulled out from the peeling film roll 100 has sufficiently reduced the occurrence of damage and irregularities on the peeling layer 24 due to winding misalignment, sliding phenomena, and the like. Therefore, the ceramic green sheet 32 with thickness variation and pinholes can be sufficiently suppressed over a wide area from the front end to the rear end of the release film 20 wound on the release film roll 100 . The ceramic parts produced by using the ceramic part sheet 40 having such a ceramic green sheet have good reliability.

陶瓷生坯片32及電極生坯片34之厚度亦可分別為1.0 μm以下。即使厚度如此小,厚度變動亦得到抑制,因此可獲得具有高可靠性之陶瓷零件。本揭示之陶瓷零件片材不限定於圖7者,例如亦可不具有電極生坯片,僅以陶瓷生坯片32構成。The thicknesses of the ceramic green sheet 32 and the electrode green sheet 34 may be 1.0 μm or less. Even if the thickness is so small, variation in thickness is suppressed, so ceramic parts with high reliability can be obtained. The ceramic component sheet of the present disclosure is not limited to the one shown in FIG. 7 , and may be composed of only the ceramic green sheet 32 without having an electrode green sheet, for example.

本揭示之一實施形態之陶瓷零件之製造方法具有:積層步驟,其準備複數個陶瓷零件片材,積層複數個陶瓷零件片材之生坯片,獲得積層體;燒成步驟,其燒成積層體,獲得燒結體;及電極形成步驟,其於該燒結體形成端子電極,獲得積層陶瓷電容器。A method for manufacturing ceramic parts according to an embodiment of the present disclosure includes: a lamination step of preparing a plurality of ceramic part sheets, and laminating green sheets of the plurality of ceramic part sheets to obtain a laminate; a firing step of firing the laminate body to obtain a sintered body; and an electrode forming step of forming terminal electrodes on the sintered body to obtain a laminated ceramic capacitor.

圖8係顯示以上述製造方法製造之積層陶瓷電容器之一例之剖視圖。積層陶瓷電容器90具備內層部92、及於積層方向夾著該內層部92之一對外層部93。積層陶瓷電容器90於側面具有端子電極95。Fig. 8 is a cross-sectional view showing an example of a multilayer ceramic capacitor manufactured by the above-mentioned manufacturing method. The multilayer ceramic capacitor 90 includes an inner layer portion 92 and an outer layer portion 93 sandwiching the inner layer portion 92 in the stacking direction. Multilayer ceramic capacitor 90 has terminal electrodes 95 on side surfaces.

內層部92具有複數層(本例中為13層)陶瓷層96(介電層)、及複數層(本例中為12層)內部電極層94。陶瓷層96與內部電極層94交替積層。內部電極層94與端子電極95電性連接。外層部93由陶瓷層形成。該陶瓷層例如亦可與陶瓷生坯片32同樣地形成。The inner layer portion 92 has a plurality of layers (13 layers in this example) of ceramic layers 96 (dielectric layers) and a plurality of layers (12 layers in this example) of internal electrode layers 94 . Ceramic layers 96 and internal electrode layers 94 are laminated alternately. The internal electrode layer 94 is electrically connected to the terminal electrode 95 . The outer layer portion 93 is formed of a ceramic layer. The ceramic layer can also be formed, for example, in the same manner as the ceramic green sheet 32 .

積層步驟中,剝離圖7所示之陶瓷零件片材40之剝離膜20,獲得生坯片30。將該生坯片30之一面30b積層於外層用生坯片。自另一陶瓷零件片材40剝離另一剝離膜20,獲得另一生坯片30,以最先剝離之生坯片之電極生坯片34與另一生坯片30之一面30b相向之方式積層。其後,藉由重複進行此種順序,積層生坯片30,而獲得積層體。即,該積層步驟中,剝離剝離膜20,獲得生坯片30,並依序積層生坯片30。藉由重複複數次該順序,形成積層體。最後,亦進行外層用生坯片之積層。In the lamination step, the release film 20 of the ceramic component sheet 40 shown in FIG. 7 is peeled off to obtain the green sheet 30 . One side 30b of this green sheet 30 is laminated on the outer layer green sheet. Another peeling film 20 is peeled off from another ceramic component sheet 40 to obtain another green sheet 30 , and the electrode green sheet 34 of the first peeled green sheet is laminated so that one side 30 b of the other green sheet 30 faces. Thereafter, by repeating this procedure, the green sheets 30 are laminated to obtain a laminate. That is, in this lamination step, the release film 20 is peeled off to obtain the green sheet 30, and the green sheets 30 are sequentially laminated. By repeating this sequence a plurality of times, a laminate is formed. Finally, the green sheet for the outer layer is also laminated.

積層體之生坯片之積層片數未特別限制,例如可為數十層至數百層。亦可於與積層體之積層方向正交之兩端面,設置未形成電極層之厚的外層用生坯片。亦可於形成積層體後,切斷積層體而作為生坯片。The number of laminated green sheets of the laminate is not particularly limited, and may be, for example, tens to hundreds of layers. A green sheet for an outer layer having a thickness not to be formed with an electrode layer may also be provided on both end surfaces perpendicular to the lamination direction of the laminate. After forming the laminated body, the laminated body may be cut and used as a green sheet.

燒成步驟中,將積層步驟中獲得之積層體(生坯片)進行燒成,獲得燒結體。燒成條件較佳以1100~1300°C,於加濕之氮氣與氫氣之混合氣體等之氛圍下進行。但,燒成時之氛圍中之氧分壓較佳為10-2 Pa以下,更佳為10-2 ~10-8 Pa。另,較佳於燒成前實施積層體之脫黏合劑處理。脫黏合劑處理可以通常之條件進行。例如,使用Ni或Ni合金等賤金屬作為內部電極層之介電質材料之情形時,較佳以200~600°C進行。In the firing step, the layered body (green sheet) obtained in the layering step is fired to obtain a sintered body. The firing conditions are preferably carried out at 1100-1300°C in an atmosphere of humidified mixed gas of nitrogen and hydrogen. However, the oxygen partial pressure in the atmosphere during firing is preferably at most 10 -2 Pa, more preferably 10 -2 to 10 -8 Pa. In addition, it is preferable to perform binder removal treatment of the laminate before firing. The binder removal treatment can be carried out under normal conditions. For example, when base metals such as Ni or Ni alloys are used as the dielectric material of the internal electrode layer, it is preferable to carry out at 200 to 600°C.

燒成後,為了使構成燒結體之陶瓷層再氧化,亦可進行熱處理。熱處理之保持溫度或最高溫度較佳為1000~1100°C。熱處理時之氧分壓較佳高於燒成時之還原氛圍之氧分壓,更佳為10-2 Pa~1Pa。較佳為對如此獲得之燒結體利用例如滾筒研磨、噴砂等實施端面研磨。After firing, heat treatment may be performed in order to re-oxidize the ceramic layer constituting the sintered body. The holding temperature or maximum temperature of the heat treatment is preferably 1000-1100°C. The oxygen partial pressure during heat treatment is preferably higher than that of the reducing atmosphere during firing, more preferably 10 -2 Pa to 1 Pa. It is preferable to subject the sintered body thus obtained to end surface grinding by, for example, barrel grinding, sandblasting, or the like.

電極形成步驟中,藉由於燒結體之側面上燒接端子電極用糊膏,形成端子電極95,而可獲得圖8所示之積層陶瓷電容器90。該積層陶瓷電容器90之製造方法中,使用具有充分減少因剝離膜20之凹凸及捲繞偏移等所致之損傷之剝離層的剝離膜卷100。因此,可充分減少陶瓷層96及內部電極層94之厚度不均及針孔。因此,抑制耐壓降低,可靠性優異。In the electrode forming step, the terminal electrode 95 is formed by firing the terminal electrode paste on the side surface of the sintered body, and the multilayer ceramic capacitor 90 shown in FIG. 8 can be obtained. In the method of manufacturing the multilayer ceramic capacitor 90, the release film roll 100 having a release layer that sufficiently reduces damage due to unevenness and winding misalignment of the release film 20 is used. Therefore, thickness unevenness and pinholes of the ceramic layer 96 and the internal electrode layer 94 can be sufficiently reduced. Therefore, the decrease in withstand voltage is suppressed, and the reliability is excellent.

以上,雖已說明若干實施形態,但本揭示並非限定於上述實施形態者。例如,雖已說明形成積層陶瓷電容器作為陶瓷零件之例,但本揭示之陶瓷零件不限定於積層陶瓷電容器,例如亦可為其它陶瓷零件。陶瓷零件亦可為例如變阻器或積層電感器。 [實施例]As mentioned above, although some embodiment was described, this indication is not limited to the said embodiment. For example, an example of forming a laminated ceramic capacitor as a ceramic component has been described, but the ceramic component of the present disclosure is not limited to the laminated ceramic capacitor, and may be other ceramic components, for example. The ceramic component can also be, for example, a varistor or a multilayer inductor. [Example]

雖欲參照實施例及比較例,更詳細地說明本揭示之內容,但本揭示並非限定於下述實施例者。Although the contents of the present disclosure will be described in more detail with reference to Examples and Comparative Examples, the present disclosure is not limited to the following Examples.

(實施例1) <剝離膜卷之製作> 為製作剝離膜,根據以下順序調製剝離劑溶液。對於100質量部之壬二醇二丙烯酸酯,準備0.25質量部之丙烯酸酯改性矽酮油(商品名:X-22-2445,信越化學工業股份有限公司製)、100質量部之甲基乙基酮、及100質量部之甲苯。將該等放入金屬製容器中攪拌混合,獲得無色透明溶液。(Example 1) <Making of peeling film roll> In order to prepare a release film, a release agent solution was prepared in the following procedure. For 100 parts by mass of nonanediol diacrylate, prepare 0.25 parts by mass of acrylate-modified silicone oil (trade name: X-22-2445, manufactured by Shin-Etsu Chemical Co., Ltd.), 100 parts by mass of methyl ethyl alcohol Ketone, and 100 parts by mass of toluene. These were put into a metal container and stirred and mixed to obtain a colorless transparent solution.

於上述溶液中加入2.5質量部之反應引發劑(商品名:Omnirad127、IGM Rasins B.V.製),調製塗佈液。自塗佈裝置之縫隙擠出塗佈液,塗佈於寬度1100 mm之雙軸延伸聚對苯二甲酸乙二酯膜(PET膜,厚度:30 μm)之一面,以溫度80°C之熱風吹30秒,使甲基乙基酮及甲苯蒸發。如此,於PET膜上形成塗佈層。2.5 parts by mass of a reaction initiator (trade name: Omnirad 127, manufactured by IGM Rasins B.V.) was added to the above solution to prepare a coating solution. Extrude the coating liquid from the gap of the coating device, and coat it on one side of a biaxially stretched polyethylene terephthalate film (PET film, thickness: 30 μm) with a width of 1100 mm. The wind blows for 30 seconds to evaporate methyl ethyl ketone and toluene. In this way, a coating layer was formed on the PET film.

接著,於氧濃度100 ppm之氮氣氛圍下照射紫外線,使塗佈層硬化,形成具有剝離功能之剝離層。如此,獲得於PET膜之一面具有剝離層之剝離膜(切斷前)。使用掃描型白色干涉顯微鏡(裝置名:VS1540,日立Hightech股份有限公司製),測定剝離膜之剝離層之表面粗糙度(Rp)。其結果,剝離層之表面粗糙度(Rp)為30 nm。剝離層之厚度為1 μm。將此種剝離膜捲繞於捲芯,獲得剝離膜卷(切斷前)。又,製作之剝離膜之全長為7000 m。Next, ultraviolet rays were irradiated in a nitrogen atmosphere with an oxygen concentration of 100 ppm to harden the coating layer and form a peeling layer with a peeling function. In this way, a release film (before cutting) having a release layer on one side of the PET film was obtained. The surface roughness (Rp) of the release layer of the release film was measured using a scanning white interference microscope (apparatus name: VS1540, manufactured by Hitachi Hightech Co., Ltd.). As a result, the surface roughness (Rp) of the release layer was 30 nm. The thickness of the release layer was 1 μm. Such a release film was wound up on a core to obtain a release film roll (before cutting). In addition, the total length of the manufactured release film was 7000 m.

使用如圖3所示之製造裝置,將上述剝離膜卷200(切斷前)安裝於旋轉軸202。以切斷部120將自剝離膜卷200(切斷前)拉出之剝離膜沿長邊方法切斷成5卷,設為寬度200 mm之尺寸。如圖3所示,將5卷剝離膜(切斷後)以剝離層24成為外側之方式,分別捲繞於外徑為88.2 mm之FRP製卷芯10。捲繞時,對捲繞卷100a按壓接觸輥70,且一面使捲軸102與接觸輥70旋轉驅動,一面將剝離膜捲繞於捲芯10。使用摩擦軸作為捲軸102。The above-mentioned release film roll 200 (before cutting) is attached to the rotating shaft 202 using the manufacturing apparatus shown in FIG. 3 . The release film pulled out from the release film roll 200 (before cutting) was cut into five rolls along the long side by the cutting unit 120, and was set to a size of 200 mm in width. As shown in FIG. 3 , five rolls of the release film (after cutting) were wound up on FRP cores 10 each having an outer diameter of 88.2 mm so that the release layer 24 was on the outside. At the time of winding, the touch roll 70 is pressed against the winding roll 100a, and the release film is wound up on the core 10 while rotating the winding shaft 102 and the touch roll 70 . A friction shaft is used as the reel 102 .

捲軸102之轉矩T固定為0.868 N·m。即,最大值Tmax 及最小值Tmin 皆為0.868 N/m。T/(F·W)之值為140,000 N/m。獲得之5卷剝離膜卷之捲繞長度皆為6000 m。The torque T of the reel 102 is fixed at 0.868 N·m. That is, both the maximum value T max and the minimum value T min are 0.868 N/m. The value of T/(F·W) was 140,000 N/m. The winding lengths of the obtained five release film rolls were all 6000 m.

<捲繞狀態之品質評估> 以目視評估剝離膜卷之捲繞狀態。將側面中,剝離膜之側端部整齊地排列無捲繞偏移之情形評估為「A」,將有捲繞偏移之情形評估為「B」。結果如表1所示。<Quality evaluation of winding state> The winding state of the release film roll was evaluated visually. Among the side faces, the case where the side ends of the release film were aligned neatly without winding deviation was evaluated as "A", and the case with winding deviation was evaluated as "B". The results are shown in Table 1.

<介電質生坯片之形成及評估> 使用製作之剝離膜卷,按照以下順序形成介電質生坯片作為陶瓷零件片材。分別準備BaTiO3 系粉末作為陶瓷粉末,聚乙烯縮丁醛(PVB,Polyvinyl butyral)作為有機黏合劑,及甲醇作為溶劑。接著,對於100質量部之陶瓷粉末,調配10質量部之有機黏合劑、及165質量部之溶劑,以球磨機混練,獲得介電質漿料。<Formation and Evaluation of Dielectric Green Sheets> Using the produced release film roll, dielectric green sheets were formed as ceramic component sheets in the following procedure. Prepare BaTiO 3 series powder as ceramic powder, polyvinyl butyral (PVB, Polyvinyl butyral) as organic binder, and methanol as solvent. Next, for 100 parts by mass of the ceramic powder, 10 parts by mass of an organic binder and 165 parts by mass of a solvent were prepared and kneaded with a ball mill to obtain a dielectric slurry.

將剝離膜卷安裝於塗布機,於自剝離膜卷拉出之剝離膜之剝離層側塗佈介電質漿料,於剝離膜之剝離層之表面形成介電質生坯片。介電質生坯片之厚度設定值為0.9 μm。介電質生坯片之厚度變動幅度係使用直列設置之透過型X射線膜厚計(商品名:AccureX,(股份)Hutec製),一面於剝離膜之寬度方向橫穿一面沿長邊方向連續測定。厚度變動幅度由厚度之平均值、最大值及最小值求得。即,將最大值-平均值之絕對值與最小值-平均值之絕對值中較大的值設為厚度變動幅度。另,於距離捲繞於捲芯之剝離膜卷之後端之長度為100 m範圍內之剝離膜,因塗布機裝置上之制約而未形成介電質生坯片。The release film roll is installed in a coater, and the dielectric slurry is coated on the release layer side of the release film drawn from the release film roll to form a dielectric green sheet on the release layer surface of the release film. The thickness setting value of the dielectric green sheet is 0.9 μm. The variation range of the thickness of the dielectric green sheet is to use a transmission type X-ray film thickness gauge (trade name: AccureX, manufactured by Hutec Co., Ltd.) installed in a row, one side crosses the width direction of the release film and the other side continues along the long side direction Determination. The thickness variation range is obtained from the average value, maximum value and minimum value of the thickness. That is, the greater value of the absolute value of the maximum value-average value and the absolute value of the minimum value-average value is set as the width of thickness variation. In addition, the release film within a length of 100 m from the rear end of the release film roll wound on the core was not formed into a dielectric green sheet due to restrictions on the coating machine.

針對製作之剝離膜上之介電質生坯片,調查針孔與介電質生坯片之厚度變動幅度。只要介電質生坯片之厚度在0.855 μm至0.945 μm之範圍內,即厚度變動幅度為0.045 μm(設定厚度之±5%),即為良品。厚度變動幅度為0.03 μm,為良品。又,未檢測出針孔。For the dielectric green sheet on the produced release film, the pinholes and the thickness variation range of the dielectric green sheet were investigated. As long as the thickness of the dielectric green sheet is within the range of 0.855 μm to 0.945 μm, that is, the thickness variation range is 0.045 μm (±5% of the set thickness), it is a good product. The variation range of thickness is 0.03 μm, which is a good product. Also, pinholes were not detected.

(實施例2~7) 除藉由變更作為捲軸102使用之摩擦軸,如表1所示般變更捲軸102之轉矩T以外,皆與實施例1同樣地製作剝離膜卷。與實施例1同樣地進行捲繞狀態之品質評估、介電質生坯片之形成及評估。結果如表1所示。(Embodiments 2-7) A release film roll was produced in the same manner as in Example 1 except that the torque T of the reel 102 was changed as shown in Table 1 by changing the friction shaft used as the reel 102 . Quality evaluation of the wound state, formation and evaluation of the dielectric green sheet were performed in the same manner as in Example 1. The results are shown in Table 1.

(比較例1) 使用與實施例7相同之摩擦軸。不使用接觸輥進行剝離膜之捲繞。進行獲得之剝離膜卷之捲繞狀態之品質評估時,在剝離膜卷之側面,剝離膜之切斷面(端面)不整齊。又,捲繞結束後,若自捲軸卸下剝離膜卷,則內側之剝離膜滑動,剝離膜卷竹筍狀變形。認為其原因在於,隨著卷徑變大,儘管捲繞之剝離膜之張力降低,但不使用接觸輥之故。於該狀態下,無法以塗佈裝置塗佈介電質漿料,故於該時點結束評估。另,解卷剝離膜卷觀察剝離膜時,於自側端部往內側約3 cm以內之區域,可見如剝離膜折疊之變形。(comparative example 1) The same friction shaft as in Example 7 was used. Winding of the release film was performed without using a touch roll. When the quality evaluation of the winding state of the obtained release film roll was performed, the cut surface (end surface) of the release film was irregular on the side surface of the release film roll. Also, after the winding is completed, if the release film roll is removed from the reel, the release film on the inner side will slide, and the release film roll will deform like a bamboo shoot. The reason for this is considered to be that the touch roll was not used although the tension of the peeling film wound up decreased as the roll diameter became larger. In this state, the dielectric slurry could not be coated with the coating device, so the evaluation was terminated at this point. In addition, when the release film roll is unrolled and the release film is observed, the folded deformation of the release film can be seen in the area within about 3 cm from the side end to the inside.

(比較例2) 調整捲繞卷之捲軸之轉矩,以施加於捲繞之剝離膜之張力恆定之方式,捲繞剝離膜(張力恆定控制)。與實施例1同樣地進行獲得之剝離膜卷之捲繞狀態之品質評估、介電質生坯片之形成及評估。結果如表1所示。(comparative example 2) The torque of the winding shaft is adjusted so that the tension applied to the wound release film is constant, and the release film is wound (tension constant control). Quality evaluation of the winding state of the obtained release film roll, formation and evaluation of a dielectric green sheet were performed similarly to Example 1. The results are shown in Table 1.

觀察到剝離膜卷夾帶空氣。又,接近剝離膜卷之捲芯之部分,具體而言,距離捲繞於捲芯之剝離膜卷之後端之長度在100 m至500 m範圍之剝離膜中,隨著變為內側介電質生坯片之厚度變動幅度惡化,介電質生坯片之厚度變動幅度為0.06 μm。如此,有厚度變動幅度超出設定厚度之±5%範圍之部分,為不良。又,距離捲繞於捲芯之剝離膜卷之後端之長度在100 m至250 m範圍之剝離膜中,觀察到介電質生坯片以如針孔般之形態變薄之部分。Air was observed to be entrapped in the release film roll. Also, the part close to the core of the release film roll, specifically, in the release film whose length is in the range of 100 m to 500 m from the rear end of the release film roll wound on the core, becomes the inner dielectric The thickness variation range of the green sheet deteriorated, and the thickness variation range of the dielectric green sheet was 0.06 μm. In this way, if there is a part whose thickness variation range exceeds ±5% of the set thickness, it is considered bad. Also, in the release film whose length was in the range of 100 m to 250 m from the rear end of the release film roll wound on the core, a portion of the dielectric green sheet that was thinned in a pinhole-like form was observed.

[表1]    捲軸之轉矩T [N·m] T/(F·W) [N/m] 捲繞狀態之品質 厚度變動幅度[μm] 實施例1 0.868 140,000 A 0.03 實施例2 0.434 70,000 A 0.03 實施例3 0.651 105,000 A 0.03 實施例4 1.302 210,000 A 0.03 實施例5 1.736 280,000 A 0.035 實施例6 2.170 350,000 A 0.04 實施例7 2.604 420,000 A 0.045 比較例1 2.604 420,000 B - 比較例2 張力恆定控制 A ~0.06 [Table 1] Reel Torque T [N·m] T/(F·W) [N/m] The quality of winding state Thickness variation [μm] Example 1 0.868 140,000 A 0.03 Example 2 0.434 70,000 A 0.03 Example 3 0.651 105,000 A 0.03 Example 4 1.302 210,000 A 0.03 Example 5 1.736 280,000 A 0.035 Example 6 2.170 350,000 A 0.04 Example 7 2.604 420,000 A 0.045 Comparative example 1 2.604 420,000 B - Comparative example 2 constant tension control A ~0.06

[產業上之可利用性] 根據本揭示,可提供一種即使加長剝離膜之捲繞長度,捲繞狀態之品質亦較高,且充分減少剝離膜表面之凹凸及變形的剝離膜卷及其製造方法。又,可提供一種藉由使用此種剝離膜卷,而具有優異之可靠性之陶瓷零件片材及其製造方法。又,可提供一種藉由使用此種陶瓷零件片材,而具有優異之可靠性之陶瓷零件及其製造方法。[Industrial availability] According to this disclosure, even if the winding length of the release film is increased, the quality of the rolled state is high, and the release film surface has sufficiently reduced irregularities and deformations, and a method for manufacturing the same can be provided. In addition, a ceramic component sheet having excellent reliability and a method of manufacturing the same can be provided by using such a release film roll. In addition, a ceramic part having excellent reliability and a method of manufacturing the same can be provided by using such a ceramic part sheet.

10:捲芯 11:捲芯 20:剝離膜 20A:剝離膜 22:基材膜 24:剝離層 24a:表面 30:生坯片 30b:一面 32:陶瓷生坯片 32a:表面 34:電極生坯片 40:陶瓷零件片材 50:輥 50a:上輥 50b:下輥 60a:上刃輥 60b:下刃輥 70:接觸輥 72:旋轉軸 80:控制部 81a:轉矩控制部 81b:轉矩控制部 81c:按壓控制部 82:旋轉驅動部 83:旋轉驅動部 84:缸體部 90:積層陶瓷電容器 92:內層部 93:外層部 94:內部電極層 95:端子電極 96:陶瓷層 100:剝離膜卷 100a:捲繞卷 102:捲軸 110:送出部 120:切斷部 130:捲繞部 131:捲繞部 200:剝離膜卷 202:旋轉軸 300:製造裝置 301:製造裝置 P:按壓 r:卷徑 T:轉矩 T':轉矩10: Core 11: Core 20: Peel off film 20A: Peel-off film 22: Substrate film 24: peeling layer 24a: surface 30: green sheet 30b: one side 32: ceramic green sheet 32a: surface 34: electrode green sheet 40: ceramic parts sheet 50: roll 50a: Upper roller 50b: Lower roller 60a: Upper blade roller 60b: Lower blade roller 70: contact roller 72: axis of rotation 80: Control Department 81a: Torque control unit 81b: Torque control unit 81c: Press the control part 82:Rotary drive unit 83:Rotary drive unit 84: Cylinder body 90:Laminated Ceramic Capacitors 92: inner part 93: outer part 94: Internal electrode layer 95: terminal electrode 96: ceramic layer 100: peel film roll 100a: winding roll 102: scroll 110: sending department 120: cutting part 130: winding department 131: Winding department 200: peel film roll 202: Rotation axis 300: Manufacturing device 301: Manufacturing device P: press r: volume diameter T: Torque T': Torque

圖1係一實施形態之剝離膜卷之立體圖。 圖2係顯示剝離膜之一例之剖視圖。 圖3係顯示剝離膜卷之製造裝置之一例之圖。 圖4係顯示剝離膜卷之製造裝置之另一例之圖。 圖5係模式性顯示捲繞部中捲繞於捲繞卷之剝離膜之張力變化之圖。 圖6係顯示捲繞部之控制方法之一例之圖。 圖7係一實施形態之陶瓷零件片材之剖視圖。 圖8係顯示一實施形態之陶瓷零件之剖視圖。Fig. 1 is a perspective view of a release film roll of an embodiment. Fig. 2 is a cross-sectional view showing an example of a release film. Fig. 3 is a diagram showing an example of a manufacturing apparatus of a release film roll. Fig. 4 is a diagram showing another example of a manufacturing device of a release film roll. Fig. 5 is a diagram schematically showing changes in tension of a release film wound up on a winding roll in a winding section. Fig. 6 is a diagram showing an example of a control method of a winding unit. Fig. 7 is a cross-sectional view of a ceramic part sheet according to an embodiment. Fig. 8 is a cross-sectional view showing a ceramic part of an embodiment.

10:捲芯 10: Core

11:捲芯 11: Core

20:剝離膜 20: Peel off film

20A:剝離膜 20A: Peel-off film

50:輥 50: roll

50a:上輥 50a: Upper roller

50b:下輥 50b: Lower roller

60a:上刃輥 60a: Upper blade roller

60b:下刃輥 60b: Lower blade roller

70:接觸輥 70: contact roller

100:剝離膜卷 100: peel film roll

100a:捲繞卷 100a: winding roll

102:捲軸 102: scroll

110:送出部 110: sending department

120:切斷部 120: cutting part

130:捲繞部 130: winding department

200:剝離膜卷 200: peel film roll

202:旋轉軸 202: Rotation axis

300:製造裝置 300: Manufacturing device

Claims (8)

一種剝離膜卷之製造方法,其具有捲繞步驟,其一面將接觸輥按壓於捲繞卷,一面將具有基材膜及剝離層之剝離膜捲繞於上述捲繞卷,上述捲繞步驟中,一面旋轉驅動上述接觸輥,一面以隨著上述捲繞卷之卷徑變大而減小施加於上述剝離膜之張力之方式控制旋轉驅動上述捲繞卷之捲軸之轉矩並捲繞上述剝離膜。 A method of manufacturing a peeling film roll, which has a winding step. On one side, the touch roll is pressed on the winding roll, and on the other hand, the peeling film having a base film and a release layer is wound on the winding roll. In the winding step , while rotating and driving the above-mentioned contact roller, while controlling the torque of the reel shaft of the above-mentioned winding roll to wind the above-mentioned peeling roll in such a way that the tension applied to the above-mentioned release film is reduced as the roll diameter of the above-mentioned winding roll becomes larger. membrane. 如請求項1之剝離膜卷之製造方法,其中上述捲繞步驟中,將上述剝離膜之厚度設為F[m],將上述剝離膜之寬度設為W[m],將旋轉驅動上述捲繞卷之捲軸之轉矩設為T[N.m]時,將T/(F.W)之值維持在70,000~420,000N/m之範圍內。 The manufacturing method of the peeling film roll according to claim 1, wherein in the above-mentioned winding step, the thickness of the above-mentioned peeling film is set as F [m], the width of the above-mentioned release film is set as W [m], and the above-mentioned roll is driven by rotation The torque of the winding reel is set to T[N. m], keep the value of T/(F.W) within the range of 70,000~420,000N/m. 如請求項1或2之剝離膜卷之製造方法,其中上述捲繞步驟中,將旋轉驅動上述捲繞卷之捲軸之轉矩T[N.m]之最大值設為Tmax[N.m],將最小值設為Tmin[N.m],及將上述最大值與上述最小值之和的1/2設為Tave[N.m]時,滿足下述式(1)及(2),Tmax≦1.2×Tave (1) Tmin≧0.8×Tave (2)。 The manufacturing method of the peeling film roll according to claim 1 or 2, wherein in the above-mentioned winding step, the torque T [N. The maximum value of m] is set to T max [N. m], set the minimum value to T min [N. m], and set T ave [N. m], the following formulas (1) and (2) are satisfied, T max ≦1.2×T ave (1) T min ≧0.8×T ave (2). 如請求項1或2之剝離膜卷之製造方法,其包含:搬送步驟,其使用搬送輥搬送上述剝離膜;及切斷步驟,其將上述剝離膜沿長邊方向切斷;且 於切斷上述剝離膜之前,由夾壓輥與上述搬送輥夾持上述剝離膜。 The method of manufacturing a release film roll according to claim 1 or 2, comprising: a conveying step of conveying the peeling film using a conveying roller; and a cutting step of cutting the peeling film in the longitudinal direction; and Before cutting the said peeling film, the said peeling film is pinched by the nip roll and the said conveyance roll. 一種陶瓷零件片材之製造方法,其具有以下步驟:於自以如請求項1至4中任一項之製造方法獲得之剝離膜卷拉出之上述剝離膜之剝離層之表面,使用包含陶瓷粉末之糊膏,形成陶瓷生坯片。 A method for manufacturing a ceramic component sheet, comprising the following steps: on the surface of the peeling layer of the above-mentioned peeling film pulled out from the peeling film roll obtained by the manufacturing method according to any one of claims 1 to 4, use a ceramic Paste of powder to form ceramic green sheet. 一種具備燒結體之陶瓷零件之製造方法,其具有以下步驟:使用以如請求項5之製造方法獲得之上述陶瓷零件片材,獲得包含上述陶瓷生坯片之積層體;及燒成上述積層體,獲得上述燒結體。 A method of manufacturing a ceramic part having a sintered body, comprising the steps of: using the above-mentioned ceramic part sheet obtained by the manufacturing method according to claim 5, to obtain a laminate comprising the above-mentioned ceramic green sheet; and firing the above-mentioned laminate , to obtain the above sintered body. 一種陶瓷零件片材,其係於自如以請求項1~4中任一項之製造方法獲得之剝離膜卷拉出之上述剝離膜之剝離層之表面,形成包含陶瓷生坯片之生坯片而獲得。 A ceramic part sheet, which is formed on the surface of the peeling layer of the above-mentioned peeling film drawn from the peeling film roll obtained by the manufacturing method in any one of claims 1 to 4, and forms a green sheet comprising a ceramic green sheet And get. 一種陶瓷零件,其具備燒結體,該燒結體係形成包含如請求項7之陶瓷零件片材之陶瓷生坯片之積層體,將該積層體燒成而獲得。 A ceramic part, which has a sintered body, the sintered system forms a laminated body of ceramic green sheets including the ceramic part sheet according to claim 7, and the laminated body is obtained by firing the laminated body.
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