TWI787305B - Photosensitive resin composition, dry film, cured product and printed wiring board - Google Patents

Photosensitive resin composition, dry film, cured product and printed wiring board Download PDF

Info

Publication number
TWI787305B
TWI787305B TW107124217A TW107124217A TWI787305B TW I787305 B TWI787305 B TW I787305B TW 107124217 A TW107124217 A TW 107124217A TW 107124217 A TW107124217 A TW 107124217A TW I787305 B TWI787305 B TW I787305B
Authority
TW
Taiwan
Prior art keywords
resin composition
photosensitive resin
coating film
acid
manufactured
Prior art date
Application number
TW107124217A
Other languages
Chinese (zh)
Other versions
TW201910917A (en
Inventor
荒井康昭
槇田昇平
嶋宮歩
中島孝典
加藤賢治
峰岸昌司
播磨英司
Original Assignee
日商太陽油墨製造股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商太陽油墨製造股份有限公司 filed Critical 日商太陽油墨製造股份有限公司
Publication of TW201910917A publication Critical patent/TW201910917A/en
Application granted granted Critical
Publication of TWI787305B publication Critical patent/TWI787305B/en

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Materials For Photolithography (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)

Abstract

本發明之課題係在於提供滿足正式硬化後之塗膜的高解析性的同時,亦可抑制顯影步驟中顯影液的汙染或因沉澱物所造成之顯影裝置之篩眼堵塞之感光性樹脂組成物、乾膜及硬化物。   本發明係以感光性樹脂組成物作為手段,其係含有鹼可溶性樹脂的感光性樹脂組成物,其特徵在於,將藉由感光性樹脂組成物的塗布而形成之塗膜以80℃40分鐘進行乾燥後之乾燥塗膜上的水的接觸角作為A(°),且將藉由感光性樹脂組成物的塗布而形成之塗膜以80℃70分鐘進行乾燥後之乾燥塗膜上的水的接觸角作為B(°)之情況中,A為75.0°以上,且   以R80 (%)=|(B-A)/A|×100所表示之變化率R80 為3.0以下。The object of the present invention is to provide a photosensitive resin composition that satisfies the high resolution of the coating film after the full-scale hardening, and can also suppress the contamination of the developer in the developing step or the clogging of the developing device due to sediment. , dry film and hardened products. The present invention uses a photosensitive resin composition as a means, which is a photosensitive resin composition containing an alkali-soluble resin, and is characterized in that the coating film formed by coating the photosensitive resin composition is carried out at 80°C for 40 minutes. The contact angle of water on the dry coating film after drying is A (°), and the contact angle of water on the dry coating film after drying the coating film formed by coating the photosensitive resin composition at 80°C for 70 minutes When the contact angle is B(°), A is 75.0° or more, and the rate of change R 80 represented by R 80 (%)=|(BA)/A|×100 is 3.0 or less.

Description

感光性樹脂組成物、乾膜、硬化物及印刷配線板Photosensitive resin composition, dry film, cured product and printed wiring board

本發明係關於一種感光性樹脂組成物,更詳細而言,係關於一種含有鹼可溶性樹脂的鹼顯影型之感光性樹脂組成物、乾膜、硬化物及印刷配線板。The present invention relates to a photosensitive resin composition, and more specifically, to an alkali-developable photosensitive resin composition containing an alkali-soluble resin, a dry film, a cured product, and a printed wiring board.

近年來,於行動電話或個人電腦或者觸控面板顯示器等,已提高對於小型化、高密度化、高精細化等的要求,於此等中所形成之印刷配線板的阻焊劑或包覆層或層間絕緣等的絕緣層或者導電電路或電極等的精緻化係變得比以往更加需要。In recent years, the requirements for miniaturization, high density, and high precision have been increased in mobile phones, personal computers, or touch panel displays, etc. Solder resist or coating layer of printed wiring boards formed in these Refinement of insulating layers such as interlayer insulation or conductive circuits or electrodes has become more necessary than ever.

對於這樣的要求,為了適用相較於圖案印刷法可高度精細的圖案化之光學蝕刻法,使用由感光性樹脂組成物所成之絕緣漿料或導電漿料來形成絕緣層或導電電路等(例如,參照專利文獻1~6)。又由於考慮環境問題,使用稀鹼水溶液作為顯影時的顯影液之鹼顯影型的絕緣漿料或導電漿料亦同時成為主流。 [先前技術文獻] [專利文獻]In order to meet such requirements, in order to apply the optical etching method that can be highly finely patterned compared to the pattern printing method, an insulating layer or a conductive circuit is formed using an insulating paste or a conductive paste made of a photosensitive resin composition ( For example, refer to Patent Documents 1 to 6). In consideration of environmental issues, alkali-developing insulating pastes or conductive pastes that use dilute alkaline aqueous solutions as the developer during development have also become mainstream. [Prior Art Document] [Patent Document]

[專利文獻1]日本特開2014-101412號公報   [專利文獻2]日本特開2013-137511號公報   [專利文獻3]日本特開2013-136727號公報   [專利文獻4]日本國際公開第2010/113287號手冊   [專利文獻5]日本特開2014-167090號公報   [專利文獻6]日本特開2015-026013號公報[Patent Document 1] Japanese Patent Application Publication No. 2014-101412 [Patent Document 2] Japanese Patent Application Publication No. 2013-137511 [Patent Document 3] Japanese Patent Application Publication No. 2013-136727 [Patent Document 4] Japanese International Publication No. 2010/ Handbook No. 113287 [Patent Document 5] Japanese Patent Application Laid-Open No. 2014-167090 [Patent Document 6] Japanese Patent Application Laid-Open No. 2015-026013

[發明所欲解決的課題][Problems to be Solved by the Invention]

然而,絕緣漿料或導電漿料中所使用之如同上述之鹼顯影類型的感光性樹脂組成物,係於顯影步驟中,溶解於顯影液之感光性樹脂組成物之成分沈澱於顯影液的底部,而有使顯影液被汙染之問題。顯影液的汙染若惡化,則顯影裝置亦會被污染,而造成顯影能力低下。又,於顯影液中沈澱之成分成為殘渣物,使顯影裝置發生篩眼堵塞之問題亦發生。因此,為了不使顯影能力下降,因此有必要增加顯影液的交換頻率,並於短時間內進行顯影裝置的洗滌,故亦有加工性不佳之問題。However, the alkali-developing type photosensitive resin composition used in the insulating paste or the conductive paste is in the developing step, and the components of the photosensitive resin composition dissolved in the developing solution are deposited at the bottom of the developing solution. , and there is a problem that the developer is contaminated. If the contamination of the developing solution worsens, the developing device will also be contaminated, resulting in a decrease in developing capability. In addition, the components precipitated in the developer solution become residues, causing the problem of clogging of the developing device. Therefore, in order not to lower the developing ability, it is necessary to increase the exchange frequency of the developer and to wash the developing device in a short time, so there is also a problem of poor processability.

因此本發明之目的在於提供一種滿足正式硬化後之塗膜的高解析性的同時,亦可抑制顯影步驟中顯影液的汙染或因沉澱物所造成之顯影裝置之篩眼堵塞之感光性樹脂組成物、乾膜及硬化物。 [解決課題之手段]Therefore, the object of the present invention is to provide a photosensitive resin composition that satisfies the high resolution of the coating film after formal hardening, and can also suppress the contamination of the developer in the developing step or the clogging of the mesh of the developing device caused by sediment. objects, dry film and hardened objects. [Means to solve the problem]

將感光性樹脂組成物之乾燥塗膜進行顯影時,係設置顯影管理幅(以下,亦稱為顯影生命。)。所謂顯影管理幅,係指使藉由塗布而形成之塗膜乾燥時之乾燥時間的幅度。乾燥塗膜的顯影管理幅若廣,則由於使藉由塗布而形成之塗膜乾燥時的乾燥時間可變長,而可使感光性樹脂組成物中的殘留溶劑充分地揮發,光硬化性或指觸乾燥性等的塗膜特性將變得良好。因此,步驟之管理上,需要一定以上的顯影管理幅。本發明人等發現,顯影步驟中顯影液的汙染或因沉澱物所造成之顯影裝置之篩眼堵塞的原因,係由於將使用感光性樹脂組成物形成之塗膜進行乾燥時的熱履歷所造成之顯影管理幅。亦即,發現顯影管理幅若為狹窄,則相較於顯影管理幅廣者,其顯影狀態將惡化,由於欲顯影之乾燥塗膜的狀態亦不同,故沉澱物亦變得容易生成,顯影液受到汙染,且進一步產生顯影裝置的篩眼堵塞狀況。When developing the dry coating film of the photosensitive resin composition, a development management sheet (hereinafter, also referred to as a development life.) is provided. The development management width refers to the width of the drying time when drying the coating film formed by coating. If the development management width of the dried coating film is wide, the drying time can be prolonged when the coating film formed by coating is dried, so that the residual solvent in the photosensitive resin composition can be fully volatilized, and the photohardening or Coating film characteristics such as dryness to touch become favorable. Therefore, in the management of the steps, more than a certain development management width is required. The inventors of the present invention have found that the cause of the contamination of the developing solution in the developing step or the clogging of the developing device due to sediment is due to the heat history when drying the coating film formed using the photosensitive resin composition. The development management width. That is, it was found that if the development management width is narrow, the development state will be worse than that of the development management width, and since the state of the dry coating film to be developed is also different, deposits are also easy to form, and the developer It is polluted and further produces the clogging of the developing device's mesh.

此外,本發明人等積極研究之結果,係著眼於感光性樹脂組成物之乾燥塗膜上的水的接觸角,水的接觸角若顯示為特定的數值,且若滿足特定的公式,則可賦予感光性樹脂組成物一定以上的顯影生命,而獲得可解決上述課題的知識。本發明係基於該知識者。In addition, as a result of active research by the present inventors, they focused on the contact angle of water on the dry coating film of the photosensitive resin composition. If the contact angle of water shows a specific value and satisfies a specific formula, it can be The above-mentioned problems can be solved by imparting a developing life of more than a certain level to the photosensitive resin composition. The present invention is based on this knowledge.

亦即,本發明之感光性樹脂組成物,其係含有鹼可溶性樹脂的感光性樹脂組成物,其特徵在於,   將藉由感光性樹脂組成物的塗布而形成之塗膜以80℃40分鐘進行乾燥後之乾燥塗膜上的水的接觸角作為A(°),且   將藉由感光性樹脂組成物的塗布而形成之塗膜以80℃70分鐘進行乾燥後之乾燥塗膜上的水的接觸角作為B(°)之情況中,   A為75.0°以上,且   以R80 (%)=|(B-A)/A|×100所表示之變化率R80 為3.0以下。That is, the photosensitive resin composition of the present invention is a photosensitive resin composition containing an alkali-soluble resin, and is characterized in that the coating film formed by coating the photosensitive resin composition is carried out at 80° C. for 40 minutes. The contact angle of water on the dry coating film after drying is A (°), and the contact angle of water on the dry coating film after drying the coating film formed by coating the photosensitive resin composition at 80°C for 70 minutes When the contact angle is B(°), A is 75.0° or more, and the rate of change R 80 represented by R 80 (%)=|(BA)/A|×100 is 3.0 or less.

又,本發明之感光性樹脂組成物,其係含有鹼可溶性樹脂的感光性樹脂組成物,其特徵在於,   將藉由感光性樹脂組成物的塗布而形成之塗膜以90℃20分鐘進行乾燥後之乾燥塗膜上的水的接觸角作為C(°),且   將藉由感光性樹脂組成物的塗布而形成之塗膜以90℃35分鐘進行乾燥後之乾燥塗膜上的水的接觸角作為D(°)之情況中,   C為75.0°以上,且   以R90 (%)=|(D-C)/C|×100所表示之變化率R90 為3.0以下。Also, the photosensitive resin composition of the present invention is a photosensitive resin composition containing an alkali-soluble resin, wherein the coating film formed by coating the photosensitive resin composition is dried at 90°C for 20 minutes The contact angle of water on the subsequent dried coating film is C (°), and the contact angle of water on the dried coating film after drying the coating film formed by coating the photosensitive resin composition at 90°C for 35 minutes When the angle is D (°), C is 75.0° or more, and the rate of change R 90 represented by R 90 (%)=|(DC)/C|×100 is 3.0 or less.

又,根據本發明之其他態樣之乾膜,其特徵在於,其係具有將上述感光性樹脂組成物於薄膜上塗布、乾燥所得之樹脂層。Moreover, the dry film according to another aspect of the present invention is characterized in that it has a resin layer obtained by coating and drying the above-mentioned photosensitive resin composition on a film.

又,根據本發明之其他態樣之硬化物,其特徵在於,其係使上述感光性樹脂組成物,或,上述乾膜之樹脂層硬化而得。Moreover, the cured product according to another aspect of the present invention is characterized in that it is obtained by curing the above-mentioned photosensitive resin composition, or the resin layer of the above-mentioned dry film.

此外,根據本發明之其他態樣之印刷配線板,其特徵在於其係具有上述硬化物。 [發明的效果]Furthermore, a printed wiring board according to another aspect of the present invention is characterized in that it has the above-mentioned cured product. [Effect of the invention]

依據本發明,可提供滿足正式硬化後之塗膜的高解析性的同時,亦可抑制顯影步驟中顯影液的汙染或因沉澱物所造成之顯影裝置之篩眼堵塞之感光性樹脂組成物、乾膜及硬化物。According to the present invention, it is possible to provide a photosensitive resin composition that satisfies the high resolution of the coating film after the full-scale hardening, and can also suppress the contamination of the developer in the developing step or the clogging of the mesh of the developing device caused by sediment, Dry film and cured product.

根據本發明之第1實施形態之感光性樹脂組成物,係含有鹼可溶性樹脂、作為乾燥塗膜時的水的接觸角係具有特定的關係者。亦即,本發明之感光性樹脂組成物,其特徵在於,將藉由感光性樹脂組成物的塗布而形成之塗膜以80℃40分鐘進行乾燥後之乾燥塗膜上的水的接觸角作為A(°),將藉由感光性樹脂組成物的塗布而形成之塗膜以80℃70分鐘進行乾燥後之乾燥塗膜上的水的接觸角作為B(°)之情況中,   A為75.0°以上,且以R80 (%)=|(B-A)/A|×100所表示之變化率R80 為3.0以下。The photosensitive resin composition according to the first embodiment of the present invention contains an alkali-soluble resin and has a specific relationship as a contact angle of water when drying a coating film. That is, the photosensitive resin composition of the present invention is characterized in that the contact angle of water on the dried coating film after drying the coating film formed by coating the photosensitive resin composition at 80° C. for 40 minutes is defined as A (°), when the contact angle of water on the dry coating film after drying the coating film formed by coating the photosensitive resin composition at 80°C for 70 minutes is B (°), A is 75.0 ° or more, and the rate of change R 80 represented by R 80 (%)=|(BA)/A|×100 is 3.0 or less.

又,根據本發明之第2實施形態之感光性樹脂組成物,係含有鹼可溶性樹脂者,其特徵在於,將藉由感光性樹脂組成物的塗布而形成之塗膜以90℃20分鐘進行乾燥後之乾燥塗膜上的水的接觸角作為C(°),且將藉由感光性樹脂組成物的塗布而形成之塗膜以90℃35分鐘進行乾燥後之乾燥塗膜上的水的接觸角作為D(°)之情況中,   C為75.0°以上,且   以R90 (%)=|(D-C)/C|×100所表示之變化率R90 為3.0以下。Also, the photosensitive resin composition according to the second embodiment of the present invention is one containing an alkali-soluble resin, wherein the coating film formed by coating the photosensitive resin composition is dried at 90° C. for 20 minutes The contact angle of water on the subsequent dried coating film is C (°), and the contact angle of water on the dried coating film after drying the coating film formed by coating the photosensitive resin composition at 90°C for 35 minutes When the angle is D (°), C is 75.0° or more, and the rate of change R 90 represented by R 90 (%)=|(DC)/C|×100 is 3.0 or less.

本發明人等積極研究之結果,發現藉由使感光性樹脂組成物之乾燥塗膜上的水的接觸角滿足如同上述之關係,可賦予一定以上的顯影生命,並防止顯影步驟中顯影液的汙染或因沉澱物所造成之顯影裝置之堵塞。究其原因尚不明確,但可認為如下。一般而言,對水的接觸角小則為親水性。然而,乾燥塗膜的情況,若親水性強則鹼顯影液變得容易與乾燥塗膜相溶,反而有使顯影變得困難的問題。本發明中,由於感光性樹脂組成物之乾燥塗膜上的水的接觸角為75.0°以上,使鹼顯影液與組成物的乾燥塗膜成為適度的相溶的狀態,顯影變得容易。進而,推論係由於即使改變形成乾燥塗膜時的乾燥條件,亦維持該狀態,因此亦維持適度地顯影狀態,其結果,起因於經顯影之乾燥塗膜之沉澱物亦變得不易產生,顯影液的汙染或顯影裝置的篩眼堵塞亦變得不會發生。然而,上述的機制僅為本發明人等的推測,本發明並非受到此理論所拘束者。As a result of active research, the present inventors have found that by making the contact angle of water on the dried coating film of the photosensitive resin composition satisfy the above-mentioned relationship, it is possible to provide a development life of more than a certain level, and to prevent the developer from developing. Pollution or blockage of the developing device caused by sediment. The reason for this is not clear, but it is considered as follows. Generally speaking, the smaller the contact angle with water, the more hydrophilic it is. However, in the case of a dried coating film, if the hydrophilicity is strong, an alkali developing solution becomes easy to dissolve in the dried coating film, and there is a problem that development becomes difficult on the contrary. In the present invention, since the contact angle of water on the dry coating film of the photosensitive resin composition is 75.0° or more, the alkali developer and the dry coating film of the composition are in a moderately compatible state, and development becomes easy. Furthermore, it is inferred that even if the drying conditions for forming a dried coating film are changed, this state is maintained, and therefore a moderately developed state is also maintained. Contamination of the liquid or clogging of the mesh of the developing device will not occur. However, the above-mentioned mechanism is only the conjecture of the present inventors, and the present invention is not bound by this theory.

此處,所謂接觸角,係於JIS R3257:1999中所定義者,本發明中,係藉由水的接觸角來規定接觸角。又,本發明中所謂的水,係指離子交換水,具體而言,使用以裝置(奧璐佳瑙股份公司製PureLite PRO-0250-003)所製備之處理水水質為1μS/cm以下的離子交換水。作為測定方法的一個例子,可舉出以下的方法。   水的接觸角係可使用DropMaster DM300作為接觸角計、FAMS(兩者均由協和界面科學股份公司製)作為界面測定解析總合系統,以下述條件藉由真圓擬合法進行測定及解析。 <測定條件及測定方法>   ・首先,啟動界面測定解析統合系統,並將CA/PD控制器開機。此時,將控制器的畫面上的「視野」選擇為「標準」。接下來,將離子交換水置入塑膠注射器,於其尖端安裝不鏽鋼製的針(22號尺寸),之後於試驗片的表面(乾燥塗膜表面)滴下。滴下的時候,確認接觸角計上附屬的相機的焦點是否正確。滴下後馬上按下控制器畫面上的「測定」按鈕。   ・測定中所使用之水:以裝置(奧璐佳瑙股份公司製PureLite PRO-0250-003)所製備之處理水水質為1μS/cm以下的離子交換水   ・水的滴下量:2μL   ・測定溫度:20℃   ・鏡頭的視野範圍:標準   接著,水滴下之後的接觸角係於經水平放置之試驗片上的任意5個位置進行測定,並將所測得之測定結果的平均值作為水的接觸角。此處,任意的5個位置的接觸角的值,係為各自藉由按下「測定」按鈕所自動算出的值。   本發明之特徵在於,A或C為75.0°以上。A或C之較佳值係為80.0°以上。又,作為A或C的上限係較佳為120.0°以下,更佳為110.0°以下。又,本發明中,藉由上述式所算出之接觸角的變化率R80 或R90 為3.0%以下,較佳為2.5%以下。Here, the contact angle is defined in JIS R3257:1999, and in the present invention, the contact angle is defined by the contact angle of water. In addition, the so-called water in the present invention refers to ion-exchanged water. Specifically, ion exchange water with a water quality of 1 μS/cm or less is used. Exchange water. As an example of the measurement method, the following method can be mentioned. The contact angle system of water can be measured and analyzed by the true circle fitting method under the following conditions using DropMaster DM300 as a contact angle meter and FAMS (both manufactured by Kyowa Interface Science Co., Ltd.) as an interface measurement and analysis integration system. <Measurement conditions and measurement methods> ・First, start the interface measurement analysis integrated system, and turn on the CA/PD controller. In this case, select "Standard" for "Field of View" on the screen of the controller. Next, ion-exchanged water was put into a plastic syringe, a stainless steel needle (size 22) was attached to the tip, and then it was dripped on the surface of the test piece (dry coating film surface). When dropping, check whether the focus of the camera attached to the contact angle meter is correct. Immediately after dropping, press the "measurement" button on the controller screen.・Water used in the measurement: Ion-exchanged water with a water quality of 1 μS/cm or less prepared by a device (PureLite PRO-0250-003 manufactured by Olucano Co., Ltd.) ・Amount of water dropped: 2 μL ・Measurement temperature : 20°C ・Viewing range of the lens: Standard Next, the contact angle after water drop is measured at any 5 positions on the horizontally placed test piece, and the average value of the measured results is taken as the water contact angle . Here, the values of the contact angles at five arbitrary positions are the values automatically calculated by pressing the "Measurement" button respectively. The present invention is characterized in that A or C is 75.0° or more. A preferable value of A or C is 80.0° or more. Also, the upper limit of A or C is preferably 120.0° or less, more preferably 110.0° or less. Also, in the present invention, the change rate R 80 or R 90 of the contact angle calculated by the above formula is 3.0% or less, preferably 2.5% or less.

本發明之感光性樹脂組成物之特徵在於,其係含有鹼可溶性樹脂。又,本發明的感光性樹脂組合物可以含有任意的成分作為鹼可溶性樹脂以外的成分。例如將感光性樹脂組成物作為如同阻焊劑之絕緣性樹脂組成物來使用之情況中,可含有光聚合起始劑、填充劑、反應性稀釋劑、熱硬化性成分等。又,作為導電性樹脂組成物,使用感光性樹脂組成物之情況中,亦可含有光聚合起始劑、填充劑、反應性稀釋劑、熱硬化性成分、有機酸等的各成分。The photosensitive resin composition of the present invention is characterized in that it contains an alkali-soluble resin. Moreover, the photosensitive resin composition of this invention may contain arbitrary components as components other than alkali-soluble resin. For example, when the photosensitive resin composition is used as an insulating resin composition like a solder resist, it may contain a photopolymerization initiator, a filler, a reactive diluent, a thermosetting component, and the like. Moreover, when using a photosensitive resin composition as a conductive resin composition, each component, such as a photoinitiator, a filler, a reactive diluent, a thermosetting component, and an organic acid, may be contained.

另一方面,為使藉由感光性樹脂組成物的塗布而形成之塗膜以80℃40分鐘進行乾燥後之乾燥塗膜上的水的接觸角A或將藉由塗布而形成之塗膜以90℃20分鐘進行乾燥後之乾燥塗膜上的水的接觸角C為75.0°以上,有必要調整感光性樹脂組成物的組成。作為調整的方法,雖無特別限制,然而作為有機成分的調整,例如,使用具有甲基或茀骨架者,使其含有有機酸、高級脂肪酸系、苯乙烯・丙烯酸系、苯乙烯・馬來酸系、聚丙烯醯胺系、烷基烯酮二聚體系、烯基琥珀酸酐系、石油系等的添加劑或矽氧系消泡劑則佳,然而並非受到此等之限制者。On the other hand, the contact angle A of water on the dry coating film after drying the coating film formed by coating the photosensitive resin composition at 80°C for 40 minutes or the coating film formed by coating is The contact angle C of water on the dried coating film after drying at 90° C. for 20 minutes is 75.0° or more, and it is necessary to adjust the composition of the photosensitive resin composition. The method of adjustment is not particularly limited, but as the adjustment of organic components, for example, those having a methyl or fennel skeleton are used, and organic acids, higher fatty acid-based, styrene-acrylic, styrene-maleic acid are used Additives such as polyacrylamide, alkyl ketene dimer, alkenyl succinic anhydride, petroleum or silicone defoamers are preferred, but not limited thereto.

又,即使改變感光性樹脂組成物之形成乾燥塗膜時的乾燥條件,亦可藉由進行感光性樹脂組成物的組成的調整來使接觸角維持於一定之範圍內,亦即,使R80 或R90 爲3.0%以下。作為調整的方法,雖無特別限制,然而於感光性樹脂組成物中,例如,可舉例出選擇不易熱分解之感光性成分或硬化成分或選擇具有適當沸點之有機溶劑等。推論此係由於藉由乾燥條件進行硬化反應並揮發溶劑,有使乾燥塗膜的表面狀態變化的疑慮,然而無論如何皆僅為推測的範圍,故並不受限於此。此外,調整的方法亦非受到此等之限制者。Also, even if the drying conditions for forming a dry coating film of the photosensitive resin composition are changed, the contact angle can be maintained within a certain range by adjusting the composition of the photosensitive resin composition, that is, R80 Or R 90 is 3.0% or less. The adjustment method is not particularly limited, but in the photosensitive resin composition, for example, selection of a photosensitive component or hardening component that is not easily thermally decomposed, or selection of an organic solvent with an appropriate boiling point can be mentioned. It is presumed that this is due to the possibility that the surface state of the dried coating film may change due to the hardening reaction and volatilization of the solvent by the drying conditions, but it is only a speculative range anyway, so it is not limited to this. In addition, the method of adjustment is not subject to these restrictions.

接下來,針對乾燥塗膜的水的接觸角係滿足如同上述之關係之本發明之感光性樹脂組成物的各成分進行詳細說明。此外,本發明專利說明書中,所謂(甲基)丙烯酸酯係總稱丙烯酸酯、甲基丙烯酸酯及該等的混合物之用語,其他類似的表現亦相同。Next, each component of the photosensitive resin composition of this invention which satisfies the above-mentioned relationship with respect to the water contact angle system of a dry coating film is demonstrated in detail. In addition, in the patent specification of the present invention, the so-called (meth)acrylate is a term that collectively refers to acrylate, methacrylate and their mixtures, and other similar expressions are also the same.

[鹼可溶性含有樹脂]   本發明之感光性樹脂組成物係含有鹼可溶性樹脂。鹼可溶性樹脂可為任何可溶於鹼之樹脂,可使用公知慣用者。鹼可溶性樹脂係可單獨使用1種或組合2種以上來使用。作為舉例,可舉出如含羧基之樹脂或含酚性羥基之樹脂之水溶性樹脂等。其中尤其因顯影性優異,故較佳為含羧基之樹脂或含酚性羥基之樹脂,更佳為含羧基之樹脂。含羧基之樹脂係藉由所含有之羧基,而可呈鹼顯影性。又,由感光性的觀點來看,除了羧基以外,較佳雖係分子內具有乙烯性不飽和鍵,然而亦可僅使用不具有乙烯性不飽和雙鍵之含羧基之樹脂。含羧基之樹脂不具有乙烯性不飽和鍵之情況,為了使組成物呈現光硬化性,故必須要併用反應性稀釋劑。作為乙烯性不飽和雙鍵,較佳係為源自丙烯酸或者甲基丙烯酸或該等的衍生物者。[Alkali-soluble resin] The photosensitive resin composition of the present invention contains an alkali-soluble resin. Alkali-soluble resins can be any alkali-soluble resins, and known and conventional ones can be used. Alkali-soluble resins can be used alone or in combination of two or more. Examples include water-soluble resins such as carboxyl group-containing resins or phenolic hydroxyl group-containing resins. Among these, carboxyl group-containing resins or phenolic hydroxyl group-containing resins are preferable because of excellent developability, and carboxyl group-containing resins are more preferable. The carboxyl group-containing resin can be developed by alkali due to the carboxyl group contained therein. Also, from the viewpoint of photosensitivity, it is preferable to have an ethylenically unsaturated bond in the molecule other than a carboxyl group, but only a carboxyl-containing resin that does not have an ethylenically unsaturated double bond may be used. When the carboxyl group-containing resin does not have an ethylenically unsaturated bond, a reactive diluent must be used together in order to make the composition exhibit photocurability. The ethylenically unsaturated double bond is preferably derived from acrylic acid or methacrylic acid or derivatives thereof.

作為含羧基之樹脂的具體例,可舉出如同以下所列舉出之化合物(可為寡聚物或聚合物)。Specific examples of the carboxyl group-containing resin include compounds listed below (which may be oligomers or polymers).

(1)具有芳香環之含羧基之樹脂,其係藉由(甲基)丙烯酸等的不飽和羧酸,與苯乙烯、α-甲基苯乙烯等的含不飽和基化合物之共聚合所獲得。此情況中,含不飽和基化合物及不飽和羧酸之中之至少1種含有芳香環即可。(1) A carboxyl group-containing resin having an aromatic ring obtained by copolymerization of an unsaturated carboxylic acid such as (meth)acrylic acid with an unsaturated group-containing compound such as styrene or α-methylstyrene . In this case, at least one of the unsaturated group-containing compound and the unsaturated carboxylic acid may contain an aromatic ring.

(2)藉由脂肪族二異氰酸酯、分支脂肪族二異氰酸酯、脂環式二異氰酸酯、芳香族二異氰酸酯等的二異氰酸酯,與二羥甲基丙酸、二羥甲基丁酸等的含羧基二元醇化合物及聚碳酸酯系多元醇、聚醚系多元醇、聚酯系多元醇、聚烯烴系多元醇、丙烯酸系多元醇、雙酚A系環氧烷加成體二醇、酚性羥基及具有醇性羥基之化合物等的二醇化合物的加成聚合反應而成之含羧基之胺基甲酸酯樹脂。此含羧基之胺基甲酸酯樹脂具有芳香環之情況,二異氰酸酯、含羧基二元醇化合物及二醇化合物之中之至少1種含有芳香環即可。(2) Diisocyanates such as aliphatic diisocyanate, branched aliphatic diisocyanate, alicyclic diisocyanate, aromatic diisocyanate, etc., and carboxyl group-containing diisocyanate such as dimethylol propionic acid, dimethylol butyric acid, etc. Polyol compounds and polycarbonate-based polyols, polyether-based polyols, polyester-based polyols, polyolefin-based polyols, acrylic-based polyols, bisphenol A-based alkylene oxide adduct diols, phenolic hydroxyl groups Carboxyl group-containing urethane resin obtained by addition polymerization of diol compounds such as compounds with alcoholic hydroxyl groups. When this carboxyl group-containing urethane resin has an aromatic ring, at least one of diisocyanate, carboxyl group-containing diol compound, and diol compound should just contain an aromatic ring.

(3)藉由脂肪族二異氰酸酯、分支脂肪族二異氰酸酯、脂環式二異氰酸酯、芳香族二異氰酸酯等的二異氰酸酯化合物,與聚碳酸酯系多元醇、聚醚系多元醇、聚酯系多元醇、聚烯烴系多元醇、丙烯酸系多元醇、雙酚A系環氧烷加成體二醇、酚性羥基及具有醇性羥基之化合物等的二醇化合物的加成聚合反應,於胺基甲酸酯樹脂的末端使酸酐反應而成之含末端羧基之胺基甲酸酯樹脂。此含羧基之胺基甲酸酯樹脂具有芳香環之情況,二異氰酸酯化合物、二醇化合物及酸酐之中之至少1種含有芳香環即可。(3) Diisocyanate compounds such as aliphatic diisocyanate, branched aliphatic diisocyanate, alicyclic diisocyanate, aromatic diisocyanate, etc., and polycarbonate polyol, polyether polyol, polyester polyol Addition polymerization of diol compounds such as alcohols, polyolefin polyols, acrylic polyols, bisphenol A-based alkylene oxide adduct diols, phenolic hydroxyl groups, and compounds with alcoholic hydroxyl groups. The terminal carboxyl group-containing urethane resin is formed by reacting acid anhydride at the end of the formate resin. When this carboxyl group-containing urethane resin has an aromatic ring, at least one of a diisocyanate compound, a diol compound, and an acid anhydride may contain an aromatic ring.

(4)藉由二異氰酸酯,與雙酚A型環氧樹脂、氫化雙酚A型環氧樹脂、雙酚F型環氧樹脂、雙酚S型環氧樹脂、聯二甲酚型環氧樹脂、聯酚型環氧樹脂等的2官能環氧樹脂之(甲基)丙烯酸酯或者其部分酸酐改質物、含羧基二元醇化合物及二醇化合物的加成聚合反應所得之感光性含羧基之胺基甲酸酯樹脂。此感光性含羧基之胺基甲酸酯樹脂具有芳香環之情況,二異氰酸酯、2官能環氧樹脂之(甲基)丙烯酸酯或者其部分酸酐改質物、含羧基二元醇化合物及二醇化合物之中之至少1種含有芳香環即可。(4) By diisocyanate, bisphenol A type epoxy resin, hydrogenated bisphenol A type epoxy resin, bisphenol F type epoxy resin, bisphenol S type epoxy resin, bixylenol type epoxy resin The photosensitive carboxyl group-containing epoxy resin obtained from the addition polymerization reaction of (meth)acrylate of bifunctional epoxy resin such as biphenol type epoxy resin or its partial anhydride modification, carboxyl group-containing dihydric alcohol compound and diol compound Urethane resin. When the photosensitive carboxyl group-containing urethane resin has an aromatic ring, diisocyanate, (meth)acrylate of bifunctional epoxy resin or its partial anhydride modification, carboxyl group-containing diol compound and diol compound It is sufficient that at least one of them contains an aromatic ring.

(5)於雙酚A型環氧樹脂、氫化雙酚A型環氧樹脂、雙酚F型環氧樹脂、雙酚S型環氧樹脂、雙酚AD型環氧樹脂、聯二甲酚型環氧樹脂、聯酚型環氧樹脂等的2官能環氧樹脂中添加二醇化合物,進而於藉由添加二異氰酸酯化合物所獲得之胺基甲酸酯環氧樹脂中,進一步使環氧丙基(甲基)丙烯酸酯反應,藉由該反應獲得之胺基甲酸酯環氧(甲基)丙烯酸酯樹脂的末端使酸酐反應而成之含末端羧基之胺基甲酸酯樹脂。此含末端羧基之胺基甲酸酯樹脂具有芳香環之情況,2官能環氧樹脂、二醇化合物、二醇化合物、二異氰酸酯化合物及酸酐之中之至少1種含有芳香環即可。(5) In bisphenol A type epoxy resin, hydrogenated bisphenol A type epoxy resin, bisphenol F type epoxy resin, bisphenol S type epoxy resin, bisphenol AD type epoxy resin, bixylenol type Diol compounds are added to bifunctional epoxy resins such as epoxy resins and biphenolic epoxy resins, and glycidyl groups are further added to urethane epoxy resins obtained by adding diisocyanate compounds. The (meth)acrylate reaction is a carboxyl-terminal-containing urethane resin obtained by reacting an acid anhydride at the end of the urethane epoxy (meth)acrylate resin obtained by this reaction. When the terminal carboxyl group-containing urethane resin has an aromatic ring, at least one of bifunctional epoxy resin, diol compound, diol compound, diisocyanate compound, and acid anhydride may contain an aromatic ring.

(6)於雙酚A型環氧樹脂、氫化雙酚A型環氧樹脂、雙酚F型環氧樹脂、雙酚S型環氧樹脂、雙酚AD型環氧樹脂、聯二甲酚型環氧樹脂、聯酚型環氧樹脂等的2官能環氧樹脂,使具有乙烯性不飽和基之單羧酸反應,於所獲得之環氧羧酸酯化合物中,藉由進一步添加二異氰酸酯化合物及2,2-雙(二羥甲基)-丙酸等的具有羧基之二醇化合物而獲得之含羧基之胺基甲酸酯樹脂。此含羧基之胺基甲酸酯樹脂具有芳香環之情況,2官能環氧樹脂、單羧酸及二異氰酸酯化合物及具有羧基之二醇化合物之中之至少1種含有芳香環即可。(6) In bisphenol A type epoxy resin, hydrogenated bisphenol A type epoxy resin, bisphenol F type epoxy resin, bisphenol S type epoxy resin, bisphenol AD type epoxy resin, bixylenol type For bifunctional epoxy resins such as epoxy resins and biphenol-type epoxy resins, react monocarboxylic acids having ethylenically unsaturated groups, and add diisocyanate compounds to the obtained epoxy carboxylate compounds A carboxyl group-containing urethane resin obtained from a carboxyl group-containing diol compound such as 2,2-bis(dimethylol)-propionic acid. When this carboxyl group-containing urethane resin has an aromatic ring, at least one of a bifunctional epoxy resin, a monocarboxylic acid and a diisocyanate compound, and a carboxyl group-containing diol compound may contain an aromatic ring.

(7)末端經(甲基)丙烯氧化之含羧基之胺基甲酸酯樹脂,其係於上述(2)或(4)之樹脂的合成中,於羥烷基(甲基)丙烯酸酯等的分子中添加具有1個羥基與1個以上(甲基)丙烯醯基之化合物。此感光性含羧基之胺基甲酸酯樹脂具有芳香環之情況,分子中具有1個羥基與1個以上(甲基)丙烯醯基之化合物含有芳香環即可。(7) Carboxyl group-containing urethane resin whose terminal is oxidized by (meth)propylene, which is used in the synthesis of the above-mentioned resin (2) or (4), in hydroxyalkyl (meth)acrylate, etc. A compound having one hydroxyl group and one or more (meth)acryloyl groups is added to the molecule. When the photosensitive carboxyl group-containing urethane resin has an aromatic ring, the compound having one hydroxyl group and one or more (meth)acryl groups in the molecule may contain an aromatic ring.

(8)末端經(甲基)丙烯氧化之含羧基之胺基甲酸酯樹脂,其系於上述(2)或(4)之樹脂的合成中,添加異佛爾酮二異氰酸酯與季戊四醇三丙烯酸酯的等莫耳反應物等,分子中具有1個異氰酸酯基及1個以上(甲基)丙烯醯基之化合物。此感光性含羧基之胺基甲酸酯樹脂具有芳香環之情況,分子中具有1個異氰酸酯基及1個以上(甲基)丙烯醯基之化合物含有芳香環即可。(8) A carboxyl-containing urethane resin whose terminal is oxidized by (meth)propylene, which is prepared by adding isophorone diisocyanate and pentaerythritol triacrylic acid during the synthesis of the above resin (2) or (4). Compounds having one isocyanate group and one or more (meth)acryloyl groups in the molecule, such as equimolar reactants of esters. When the photosensitive carboxyl group-containing urethane resin has an aromatic ring, the compound having one isocyanate group and one or more (meth)acryl groups in the molecule may contain an aromatic ring.

(9)於多官能環氧樹脂使(甲基)丙烯酸反應,於存在於側鏈之羥基上加成鄰苯二甲酸酐、四氫苯二甲酸酐、六氫鄰苯二甲酸酐等的二元酸酐之感光性含羧基之樹脂。此感光性含羧基之樹脂具有芳香環之情況,多官能環氧樹脂及二元酸酐之中之至少1種含有芳香環即可。(9) React (meth)acrylic acid with a multifunctional epoxy resin, and add dihydrophthalic anhydride, tetrahydrophthalic anhydride, hexahydrophthalic anhydride, etc. to the hydroxyl groups present in the side chain. Photosensitive carboxyl-containing resin of acid anhydride. When the photosensitive carboxyl group-containing resin has an aromatic ring, at least one of the polyfunctional epoxy resin and the dibasic acid anhydride may contain an aromatic ring.

(10)將2官能環氧樹脂之羥基僅一步於以表氯醇進行環氧化之多官能環氧樹脂使(甲基)丙烯酸反應,於生成之羥基上加成二元酸酐之感光性含羧基之樹脂。此感光性含羧基之樹脂具有芳香環之情況,2官能環氧樹脂及二元酸酐之中之至少1種含有芳香環即可。(10) The hydroxyl group of the bifunctional epoxy resin is reacted with (meth)acrylic acid in a multifunctional epoxy resin epoxidized with epichlorohydrin in only one step, and the photosensitive carboxyl group of dibasic acid anhydride is added to the generated hydroxyl group of resin. When the photosensitive carboxyl group-containing resin has an aromatic ring, at least one of the bifunctional epoxy resin and the dibasic acid anhydride may contain an aromatic ring.

(11)於多官能氧雜環丁烷樹脂使二羧酸反應,於所產生之1級羥基上加成二元酸酐之羧基含有聚酯樹脂。此感光性羧基含有聚酯樹脂具有芳香環之情況,多官能氧雜環丁烷樹脂、二羧酸及二元酸酐之中之至少1種含有芳香環即可。(11) A polyfunctional oxetane resin is reacted with a dicarboxylic acid, and the carboxyl group of the dibasic acid anhydride is added to the generated primary hydroxyl group to a polyester resin containing a dibasic acid. When the photosensitive carboxyl group-containing polyester resin has an aromatic ring, at least one of the polyfunctional oxetane resin, dicarboxylic acid, and dibasic acid anhydride may contain an aromatic ring.

(12)於使1分子中具有複數酚性羥基之化合物與環氧乙烷、環氧丙烷等的環氧烷反應所獲得之反應生成物使含不飽和基之單羧酸反應,並於獲得之反應生成物使多元酸酐反應所獲得之含羧基之感光性樹脂。(12) The reaction product obtained by reacting a compound having multiple phenolic hydroxyl groups in one molecule with alkylene oxides such as ethylene oxide and propylene oxide is reacted with an unsaturated group-containing monocarboxylic acid, and obtained The reaction product is a carboxyl group-containing photosensitive resin obtained by reacting polybasic acid anhydride.

(13)於使1分子中具有複數酚性羥基之化合物與碳酸伸乙酯、碳酸丙烯酯等的環狀碳酸酯化合物反應所獲得之反應生成物使含不飽和基之單羧酸反應,並於獲得之反應生成物使多元酸酐反應,所獲得之含羧基之感光性樹脂。(13) A reaction product obtained by reacting a compound having multiple phenolic hydroxyl groups in one molecule with a cyclic carbonate compound such as ethylene carbonate or propylene carbonate is reacted with an unsaturated group-containing monocarboxylic acid, and A carboxyl group-containing photosensitive resin is obtained by reacting polybasic acid anhydride with the obtained reaction product.

(14)於1分子中具有複數環氧基之環氧化合物,使p-羥基苯乙醇等的1分子中具有至少1個醇性羥基與1個酚性羥基之化合物,與 (甲基)丙烯酸等的含不飽和基之單羧酸反應,對於所獲得之反應生成物的醇性羥基,使馬來酸酐、四氫苯二甲酐、偏苯三酸酐、均苯四甲酸二酐、己二酸等的多元酸酐反應所獲得之含羧基之感光性樹脂。此感光性羧基含有聚酯樹脂具有芳香環之情況,環氧化合物、1分子中具有至少1個醇性羥基與1個酚性羥基之化合物、含不飽和基之單羧酸及多元酸酐之中之至少1種含有芳香環即可。(14) Epoxy compounds having multiple epoxy groups in one molecule, compounds having at least one alcoholic hydroxyl group and one phenolic hydroxyl group in one molecule such as p-hydroxyphenethyl alcohol, and (meth)acrylic acid For the reaction of monocarboxylic acids containing unsaturated groups such as maleic anhydride, tetrahydrophthalic anhydride, trimellitic anhydride, pyromellitic dianhydride, adipic acid, etc. Carboxyl group-containing photosensitive resin obtained by the reaction of polybasic anhydrides. The photosensitive carboxyl group contains the case where the polyester resin has an aromatic ring, among epoxy compounds, compounds having at least one alcoholic hydroxyl group and one phenolic hydroxyl group in one molecule, unsaturated group-containing monocarboxylic acids and polybasic acid anhydrides At least one of them has only to contain an aromatic ring.

(15)於上述(1)~(12)之任一項之樹脂進一步加成環氧丙基(甲基)丙烯酸酯、α-甲基環氧丙基(甲基)丙烯酸酯等的分子中具有1個環氧基與1個以上(甲基)丙烯醯基之化合物所成之感光性含羧基之樹脂。此感光性含羧基之胺基甲酸酯樹脂具有芳香環之情況,分子中具有1個環氧基與1個以上(甲基)丙烯醯基之化合物係可具有芳香環。(15) In any one of the above (1)~(12) resins, glycidyl (meth)acrylate, α-methylglycidyl (meth)acrylate, etc. are further added to the molecule A photosensitive carboxyl-containing resin composed of a compound having one epoxy group and one or more (meth)acryl groups. When the photosensitive carboxyl-containing urethane resin has an aromatic ring, a compound having one epoxy group and one or more (meth)acryl groups in the molecule may have an aromatic ring.

(16)於含羧基之(甲基)丙烯酸系共聚合樹脂中,藉由與1分子中具有環氧乙烷環與乙烯性不飽和基之化合物之反應所獲得之感光性的含羧基之樹脂。(16) A photosensitive carboxyl group-containing resin obtained by reacting a compound having an oxirane ring and an ethylenically unsaturated group in one molecule of a carboxyl group-containing (meth)acrylic copolymer resin .

(17)1分子中各自具有1個環氧基與不飽和雙鍵之化合物,與將具有不飽和雙鍵之化合物的各化合物之不飽和雙鍵共聚合之共聚合體,使不飽和單羧酸反應,於所生成之第2級的羥基使飽和或不飽和多元酸酐反應,獲得之感光性的含羧基之樹脂。(17) A compound having one epoxy group and an unsaturated double bond in each molecule, and a copolymer of the unsaturated double bonds of each compound having an unsaturated double bond, the unsaturated monocarboxylic acid The reaction is to react saturated or unsaturated polybasic acid anhydride on the generated second-stage hydroxyl group to obtain a photosensitive carboxyl-containing resin.

(18)於含羥基之聚合物,使飽和或不飽和多元酸酐反應後,於生成之羧酸,使1分子中各自具有1個環氧基與不飽和雙鍵之化合物反應,所獲得之含感光性之羥基及羧基之樹脂。(18) After reacting a saturated or unsaturated polybasic acid anhydride in a hydroxyl-containing polymer, react a compound having an epoxy group and an unsaturated double bond in each molecule of the resulting carboxylic acid to obtain a compound containing Photosensitive hydroxyl and carboxyl resins.

如同上述之含羧基之樹脂係由於於主鏈・聚合物的側鏈具有複數的羧基,故可藉由鹼水溶液顯影。As the carboxyl group-containing resin mentioned above has multiple carboxyl groups in the main chain and side chain of the polymer, it can be developed by an aqueous alkali solution.

又,上述樹脂之中,(1)中所舉例之樹脂或 (2)~(10)中所舉例之樹脂中,較佳係使用具有芳香環之含羧基之樹脂。此等的樹脂之中,更加係(2)~(8)及(10)中所舉例之樹脂,再更佳為(2)~(8)中所舉例之樹脂。Also, among the above-mentioned resins, among the resins exemplified in (1) or the resins exemplified in (2) to (10), it is preferable to use a carboxyl group-containing resin having an aromatic ring. Among these resins, the resins exemplified in (2)~(8) and (10) are more preferable, and the resins exemplified in (2)~(8) are more preferable.

作為含酚性羥基之樹脂,係若於主鏈或者側鏈具有酚性羥基,亦即具有鍵結於苯環之羥基則無特別限制。較佳為1分子中含2個以上酚性羥基之樹脂。作為1分子中含2個以上酚性羥基之樹脂,可列舉出兒茶酚、間苯二酚、氫醌、二羥基甲苯、萘二酚、t-丁鄰苯二酚、t-丁氫醌、鄰苯三酚、間苯三酚、雙酚A、雙酚F、雙酚S、聯酚、聯二甲酚、酚醛清漆型酚樹脂、酚醛清漆型烷基酚樹脂、雙酚A之酚醛清漆樹脂、二環戊二烯型酚樹脂、新酚醛(Xylok)型酚樹脂、萜烯改質酚樹脂、聚乙烯基酚類、酚類與具有酚性羥基之芳香族醛之縮合物、1-萘酚或2-萘酚與芳香族醛類之縮合物等,然而並非受到此等之限制者。The phenolic hydroxyl group-containing resin is not particularly limited as long as it has a phenolic hydroxyl group in the main chain or a side chain, that is, has a hydroxyl group bonded to a benzene ring. It is preferably a resin containing two or more phenolic hydroxyl groups in one molecule. Examples of resins containing two or more phenolic hydroxyl groups in one molecule include catechol, resorcinol, hydroquinone, dihydroxytoluene, naphthalenediol, t-butyrocatechol, and t-butylhydroquinone , pyrogallol, phloroglucinol, bisphenol A, bisphenol F, bisphenol S, bisphenol, bis-xylenol, novolac type phenol resin, novolak type alkylphenol resin, bisphenol A novolac Varnish resins, dicyclopentadiene-type phenolic resins, new phenolic (Xylok)-type phenolic resins, terpene-modified phenolic resins, polyvinylphenols, condensates of phenols and aromatic aldehydes with phenolic hydroxyl groups, 1 -Naphthol or condensates of 2-naphthol and aromatic aldehydes, etc., but not limited thereto.

又,鹼可溶性樹脂之鹼可溶性樹脂於25℃之乙二醇丁基醚溶液中之酸解離定數(pKa)為未滿9.5係由於可更高度地兼具正式硬化後之塗膜之解析性與顯影步驟中顯影液的汙染的觀點而較佳。此外,鹼可溶性樹脂為經2種以上鹼可溶性樹脂組合之混合物之情況,混合物(鹼可溶性樹脂全體)之pKa係未滿9.5。pKa的值係較佳為7.5~9.4,更佳為8.2~9.0。In addition, the acid dissociation constant (pKa) of the alkali-soluble resin in the ethylene glycol butyl ether solution at 25°C is less than 9.5 because it can have a higher resolution of the coating film after formal hardening It is preferable from the viewpoint of contamination of the developing solution in the developing step. In addition, when the alkali-soluble resin is a mixture of two or more alkali-soluble resins combined, the pKa of the mixture (all the alkali-soluble resins) is less than 9.5. The value of pKa is preferably 7.5-9.4, more preferably 8.2-9.0.

鹼可溶性樹脂係於結構中可具有或不具有芳香環,然而較佳係為具有芳香環之鹼可溶性樹脂。特佳係為具有雙酚結構之鹼可溶性樹脂。The alkali-soluble resin may or may not have an aromatic ring in its structure, but is preferably an alkali-soluble resin having an aromatic ring. Especially preferred is an alkali-soluble resin with a bisphenol structure.

又,鹼可溶性樹脂具有胺基甲酸酯鍵,係由於可更加抑制顯影步驟中顯影液的汙染或因沉澱物所造成之顯影裝置之篩眼堵塞的觀點而較佳。亦即,經賦予顯影性之情況,例如,具有胺基甲酸酯鍵之鹼可溶性樹脂之情況,即使使用鹼顯影液進行顯影,不論Na2 CO3 濃度,顯影殘渣的產生係皆受到抑制、解析性亦良好。關於顯影殘渣的抑制,胺基甲酸酯鍵係顯示與其他的成份具有高的可濕性,其結果,被認為係由於即使乾燥條件的變化,沉澱物亦難以生成。該另一方面,由於藉由稀鹼水溶液來進行顯影,以對於曝光部的損傷較少的狀態來形成圖像係成為可能,此外,於曝光領域與未曝光領域,對於鹼顯影液之溶解對比提高之結果,推測解析性係成為良好者。然而,使僅為推測,本發明並非受到此理論所拘束者。Also, the alkali-soluble resin having a urethane bond is preferable from the viewpoint of further suppressing the contamination of the developing solution in the developing step and the clogging of the developing device due to deposits. That is, in the case of imparting developability, for example, in the case of an alkali-soluble resin having a urethane bond, even if an alkaline developer is used for development, the generation of development residue is suppressed regardless of the concentration of Na 2 CO 3 , The resolution is also good. Regarding the suppression of development residue, the urethane bond system has high wettability with other components, and as a result, it is considered that deposits are difficult to form even if the drying conditions are changed. On the other hand, since the development is carried out by a dilute alkaline aqueous solution, it is possible to form an image with less damage to the exposed area. In addition, in the exposed area and the unexposed area, the dissolution of the alkaline developer is compared. As a result of the improvement, it is presumed that the analysis property becomes good. However, this is purely speculative and the invention is not bound by this theory.

上述鹼可溶性樹脂的酸價,係期望為20~200 mgKOH/g之範圍,更佳為40~180mgKOH/g之範圍,再更佳為50~160mgKOH/g之範圍。若為20~200mgKOH/g之範圍,則獲得正式硬化後之塗膜的密著性、鹼顯影係變得容易、因顯影液所造成之曝光部的溶解受到抑制、線條係維持為所需以上而不變得過於貧薄、正常的阻劑圖案的描繪係變得容易,故而較佳。又,可保持曝光部的耐顯影性與未曝光部的顯影性的對比,解析性佳,故而較佳。The acid value of the above-mentioned alkali-soluble resin is desirably in the range of 20-200 mgKOH/g, more preferably in the range of 40-180 mgKOH/g, still more preferably in the range of 50-160 mgKOH/g. If it is in the range of 20~200mgKOH/g, the adhesion of the coating film after the main hardening is obtained, the alkali development system becomes easy, the dissolution of the exposed part caused by the developer is suppressed, and the line system is maintained more than required Since drawing of a normal resist pattern becomes easy without becoming too thin, it is preferable. Moreover, since the contrast between the development resistance of an exposed part and the developability of an unexposed part can be maintained, and resolution is good, it is preferable.

又,本發明中所使用之鹼可溶性樹脂的重量平均分子量,雖因樹脂骨架而有所不同,然而較佳為2,000~150,000之範圍。若為此範圍內,則無黏著性係良好,曝光後的塗膜之耐濕性良好,顯影時不易發生膜減少。又,若在上述重量平均分子量之範圍內,則解析度提高,顯影性良好,且保存安定性亦變佳。更佳為5,000~ 100,000。此外,重量平均分子量係可由凝膠滲透層析法(GPC)法(聚苯乙烯標準)來求得。又,感光性樹脂組成物中含有2種以上鹼可溶性樹脂之情況,較佳雖係各樹脂在上述範圍內,但將各樹脂混合後之狀態下進行測定,且介於上述範圍內亦佳。Also, the weight average molecular weight of the alkali-soluble resin used in the present invention is preferably in the range of 2,000 to 150,000, although it varies depending on the resin skeleton. If it is within this range, the non-adhesive property is good, the moisture resistance of the coating film after exposure is good, and film reduction hardly occurs during image development. Moreover, if it exists in the range of the said weight average molecular weight, resolution improves, developability becomes favorable, and storage stability also becomes favorable. More preferably, it is 5,000~100,000. In addition, the weight average molecular weight can be calculated|required by the gel permeation chromatography (GPC) method (polystyrene standard). Also, when the photosensitive resin composition contains two or more alkali-soluble resins, it is preferable that each resin is within the above-mentioned range, but the measurement is performed in a state where the respective resins are mixed, and it is also preferably within the above-mentioned range.

鹼可溶性樹脂的玻璃轉移溫度較佳係在-10~ 60℃之範圍內。-10℃以上的情況,無黏著性更佳。60℃以下的情況,抗裂性係變得更良好。更佳為0~40℃。此外,鹼可溶性樹脂的玻璃轉移溫度可藉由感光性成分的示差掃描熱量計(DSC)測定求得。此外,感光性樹脂組成物中含有2種以上鹼可溶性樹脂之情況,較佳雖係各樹脂在上述範圍內,然而將各樹脂混合後之狀態下進行測定,於上述範圍內較佳。將各樹脂混合後之狀態下進行測定之情況,較佳係使各樹脂以塗料狀均一地經攪拌之狀態下測定。The glass transition temperature of the alkali-soluble resin is preferably in the range of -10 to 60°C. When the temperature is above -10℃, no stickiness is better. When the temperature is lower than 60°C, the crack resistance becomes better. More preferably, it is 0-40°C. In addition, the glass transition temperature of the alkali-soluble resin can be obtained by measuring the differential scanning calorimeter (DSC) of the photosensitive component. In addition, when two or more alkali-soluble resins are contained in the photosensitive resin composition, it is preferable that each resin is within the above-mentioned range, but the measurement is performed in a state where the respective resins are mixed, and it is preferably within the above-mentioned range. When the measurement is performed in a state in which the resins are mixed, it is preferable to measure in a state in which the resins are uniformly stirred in a paint state.

此種鹼可溶性樹脂的適當的摻混量係可依據感光性樹脂組成物的使用用途來進行適當調整。例如作為如同阻焊劑之絕緣性樹脂組成物使用之情況,鹼可溶性樹脂的摻混量係以固體成分換算,於全體組成物中為10~60質量%,較佳為15~50質量%。另一方面,作為導電性樹脂組成物使用之情況,鹼可溶性樹脂的摻混量係以固體成分換算,於全體組成物中為5~50質量%,較佳為5~40質量%。鹼可溶性樹脂的摻混量在上述範圍內,則正式硬化後之塗膜強度不會降低,並可抑制組成物的增黏或塗布性等的低下。The appropriate blending amount of such an alkali-soluble resin can be appropriately adjusted depending on the application of the photosensitive resin composition. For example, when used as an insulating resin composition like a solder resist, the blending amount of the alkali-soluble resin is 10 to 60% by mass, preferably 15 to 50% by mass, in terms of solid content in the entire composition. On the other hand, when used as a conductive resin composition, the blending amount of the alkali-soluble resin is 5 to 50% by mass, preferably 5 to 40% by mass, of the entire composition in terms of solid content. When the blending amount of the alkali-soluble resin is within the above-mentioned range, the strength of the coating film after main curing will not be lowered, and the thickening of the composition and the decrease in coating properties can be suppressed.

本發明的感光性樹脂組合物可以含有任意的成分作為鹼可溶性樹脂以外的成分。以下,針對任意的成分進行詳細説明。The photosensitive resin composition of the present invention may contain arbitrary components as components other than the alkali-soluble resin. Hereinafter, arbitrary components will be described in detail.

[光聚合起始劑]   本發明之感光性樹脂組成物中可含有光聚合起始劑。作為光聚合起始劑,並無特別限定,可列舉出例如,雙-(2,6-二氯苯甲醯基)苯基氧化膦、雙-(2,6-二氯苯甲醯基)-2,5-二甲基苯基氧化膦、雙-(2,6-二氯苯甲醯基)-4-丙基苯基氧化膦、雙-(2,6-二氯苯甲醯基)-1-萘基氧化膦、雙-(2,6-二甲氧基苯甲醯基)苯基氧化膦、雙-(2,6-二甲氧基苯甲醯基)-2,4,4-三甲基戊基氧化膦、雙-(2,6-二甲氧基苯甲醯基)-2,5-二甲基苯基氧化膦、雙-(2,4,6-三甲基苯甲醯基)-苯基氧化膦等的雙醯基氧化膦類;2,6-二甲氧基苯甲醯基二苯基氧化膦、2,6-二氯苯甲醯基二苯基氧化膦、2,4,6-三甲基苯甲醯基苯基膦酸甲基酯、2-甲基苯甲醯基二苯基氧化膦、特戊醯基苯基膦酸異丙基酯、2,4,6-三甲基苯甲醯基二苯基氧化膦等的單醯基氧化膦類;1-羥基-環己基苯基酮、1-[4-(2-羥基乙氧基)-苯基]-2-羥基-2-甲基-1-丙烷-1-酮、2-羥基-1-{4-[4-(2-羥基-2-甲基-丙醯基)-苄基]苯基}-2-甲基-丙烷-1-酮、2-羥基-2-甲基-1-苯基丙烷-1-酮等的羥基苯乙酮類;安息香、苄基酯、安息香甲基醚、安息香乙基醚、安息香n-丙基醚、安息香異丙基醚、安息香n-丁基醚等的安息香類;安息香烷基醚類;二苯甲酮、p-甲基二苯甲酮、米氏酮、甲基二苯甲酮、4,4’-二氯二苯甲酮、4,4’-雙二乙基胺基二苯甲酮等的二苯甲酮類;苯乙酮、2,2-二甲氧基-2-苯基苯乙酮、2,2-二乙氧基-2-苯基苯乙酮、1,1-二氯苯乙酮、1-羥基環己基苯基酮、2-甲基-1-[4-(甲基硫基)苯基]-2-嗎啉基-1-丙酮、2-苄基-2-二甲基胺-1-(4-嗎啉基苯基)-丁酮-1、2-(二甲基胺)-2-[(4-甲基苯基)甲基)-1-[4-(4-嗎咻基)苯基]-1-丁酮、N,N-二甲基胺苯乙酮等的苯乙酮類;噻噸酮、2-乙基噻噸酮、2-異丙基噻噸酮、2,4-二甲基噻噸酮、2,4-二乙基噻噸酮、2-氯噻噸酮、2,4-二異丙基噻噸酮等的噻噸酮類;蒽醌、氯蒽醌、2-甲基蒽醌、2-乙基蒽醌、2-tert-丁基蒽醌、1-氯蒽醌、2-戊基蒽醌、2-胺基蒽醌等的蒽醌類;苯乙酮二甲基縮酮、苄基二甲基縮酮等的縮酮類;乙基-4-二甲基胺苯甲酸酯、2-(二甲基胺)乙基苯甲酸酯、p-二甲基安息香酸乙基酯等的安息香酸酯類;1,2-辛烷二酮,1-[4-(苯基硫基)-,2-(O-苯甲醯基肟酯)]、乙酮,1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]-,1-(O-乙醯基肟酯)等的肟酯類;雙(η5-2,4-環戊二烯-1-基)-雙(2,6-二氟-3-(1H-吡咯-1-基)苯基)鈦、雙(環戊二烯基)-雙[2,6-二氟-3-(2-(1-吡咯-1-基)乙基)苯基]鈦等的二茂鈦類;苯基二硫化物2-硝基茀、布特林、茴香偶姻乙基醚、偶氮二異丁腈、四甲基秋蘭姆二硫化物等。以上的光聚合起始劑皆可單獨使用1種,亦可組合2種以上使用。[Photopolymerization initiator] The photosensitive resin composition of the present invention may contain a photopolymerization initiator. The photopolymerization initiator is not particularly limited, and examples thereof include bis-(2,6-dichlorobenzoyl)phenylphosphine oxide, bis-(2,6-dichlorobenzoyl) -2,5-Dimethylphenylphosphine oxide, bis-(2,6-dichlorobenzoyl)-4-propylphenylphosphine oxide, bis-(2,6-dichlorobenzoyl) )-1-naphthylphosphine oxide, bis-(2,6-dimethoxybenzoyl)phenylphosphine oxide, bis-(2,6-dimethoxybenzoyl)-2,4 , 4-trimethylpentylphosphine oxide, bis-(2,6-dimethoxybenzoyl)-2,5-dimethylphenylphosphine oxide, bis-(2,4,6-tri Bisacylphosphine oxides such as methylbenzoyl)-phenylphosphine oxide; 2,6-dimethoxybenzoyldiphenylphosphine oxide, 2,6-dichlorobenzoyldiphenylphosphine oxide Phenylphosphine oxide, methyl 2,4,6-trimethylbenzoylphenylphosphonate, 2-methylbenzoyldiphenylphosphine oxide, isopropyl pivalylphenylphosphonate Monoacyl phosphine oxides such as base esters, 2,4,6-trimethylbenzoyldiphenylphosphine oxide; 1-hydroxy-cyclohexyl phenyl ketone, 1-[4-(2-hydroxyethyl Oxy)-phenyl]-2-hydroxy-2-methyl-1-propan-1-one, 2-hydroxy-1-{4-[4-(2-hydroxy-2-methyl-propionyl )-benzyl]phenyl}-2-methyl-propane-1-one, 2-hydroxy-2-methyl-1-phenylpropane-1-one and other hydroxyacetophenones; benzoin, benzyl Benzoin esters, benzoin methyl ether, benzoin ethyl ether, benzoin n-propyl ether, benzoin isopropyl ether, benzoin n-butyl ether, etc.; benzoin alkyl ethers; benzophenone, p-methyl ether Benzophenones such as methylbenzophenone, Michler's ketone, methylbenzophenone, 4,4'-dichlorobenzophenone, 4,4'-bisdiethylaminobenzophenone, etc. class; acetophenone, 2,2-dimethoxy-2-phenylacetophenone, 2,2-diethoxy-2-phenylacetophenone, 1,1-dichloroacetophenone, 1-Hydroxycyclohexyl phenyl ketone, 2-methyl-1-[4-(methylthio)phenyl]-2-morpholinyl-1-propanone, 2-benzyl-2-dimethylamine -1-(4-morpholinophenyl)-butanone-1,2-(dimethylamine)-2-[(4-methylphenyl)methyl)-1-[4-(4- Acetophenones such as morphoyl)phenyl]-1-butanone, N,N-dimethylaminoacetophenone, etc.; thioxanthone, 2-ethylthioxanthone, 2-isopropylthioxanthene Thioxanthones such as ketones, 2,4-dimethylthioxanthone, 2,4-diethylthioxanthone, 2-chlorothioxanthone, 2,4-diisopropylthioxanthone, etc.; anthracene Quinone, chloroanthraquinone, 2-methylanthraquinone, 2-ethylanthraquinone, 2-tert-butylanthraquinone, 1-chloroanthraquinone, 2-amylanthraquinone, 2-aminoanthraquinone, etc. Anthraquinones; ketals such as acetophenone dimethyl ketal and benzyl dimethyl ketal; ethyl-4-dimethylamine benzoate, 2-(dimethylamine) ethyl Benzoic acid esters, benzoic acid esters such as ethyl p-dimethylbenzoate; 1,2-octanedione, 1-[4-(phenylthio)- , 2-(O-benzoyl oxime ester)], ethyl ketone, 1-[9-ethyl-6-(2-methylbenzoyl)-9H-carbazol-3-yl]-, Oxime esters such as 1-(O-acetyl oxime ester); bis(η5-2,4-cyclopentadien-1-yl)-bis(2,6-difluoro-3-(1H-pyrrole -1-yl)phenyl)titanium, bis(cyclopentadienyl)-bis[2,6-difluoro-3-(2-(1-pyrrol-1-yl)ethyl)phenyl]titanium, etc. Titanocenes; Phenyl disulfide 2-Nitrofen, Buterin, Anisoin ethyl ether, Azobisisobutyronitrile, Tetramethylthiuram disulfide, etc. All of the above photopolymerization initiators may be used alone or in combination of two or more.

作為市售品,作為雙醯基氧化膦類或單醯基氧化膦類等的氧化膦類的光聚合起始劑之市售品,可列舉出BASF JAPAN公司製的IRGACURE TPO、IGM Resins公司製Omnirad 819等。又,作為苯乙酮類的光聚合起始劑的市售品,可列舉出BASF JAPAN公司製的IRGACURE 369、IRGACURE 379EG、IGM Resins公司製Omnirad 907等。此外,作為肟酯類的光聚合起始劑的市售品,可列舉出BASF JAPAN公司製的CGI-325、IRGACURE OXE01、IRGACURE OXE02、ADEKA公司製的N-1919、NCI-831、日本化學工業公司製的TOE-004、常州強力電子新材料公司製的TR-PBG-304等。As commercially available products, examples of commercially available photopolymerization initiators of phosphine oxides such as bisacyl phosphine oxides and monoacyl phosphine oxides include IRGACURE TPO manufactured by BASF JAPAN, and IRGACURE TPO manufactured by IGM Resins. Omnirad 819 et al. Moreover, as a commercial item of the photoinitiator of acetophenone series, BASF JAPAN company make IRGACURE 369, IRGACURE 379EG, IGM Resins company make Omnirad 907, etc. are mentioned. In addition, examples of commercially available photopolymerization initiators of oxime esters include CGI-325, IRGACURE OXE01, IRGACURE OXE02 manufactured by BASF JAPAN, N-1919 manufactured by ADEKA, NCI-831, Nippon Chemical Industry Co., Ltd. TOE-004 made by the company, TR-PBG-304 made by Changzhou Qiangli Electronic New Material Co., Ltd., etc.

光聚合起始劑的摻混量,雖無特別限制,然而使用肟酯類的光聚合起始劑之情況的摻混量,係以固體成分換算,相對於鹼可溶性樹脂100質量份,較佳為0.01~10質量份,更佳為0.1~5質量份之範圍。藉由將其設定為0.01質量份以上,係以於銅上之光硬化性係變得更加確實、且耐化學性等的正式硬化後之塗膜特性提升之觀點而言較佳。又,藉由將其設定為5質量份以下,係以可抑制曝光後經塗膜表面之光吸收,深部的硬化性亦提升之觀點而言較佳。The blending amount of the photopolymerization initiator is not particularly limited, but the blending amount in the case of using an oxime ester-based photopolymerization initiator is preferably in terms of solid content relative to 100 parts by mass of the alkali-soluble resin. It is 0.01-10 mass parts, More preferably, it is the range of 0.1-5 mass parts. By setting this at 0.01 parts by mass or more, it is preferable from the viewpoint that the photocurability on copper becomes more reliable, and the coating film characteristics after main curing such as chemical resistance improve. Moreover, by setting it as 5 mass parts or less, it is preferable from a viewpoint that the light absorption by the surface of a coating film after exposure can be suppressed, and the curability of a deep part improves.

另一方面,肟酯類的光聚合起始劑以外的光聚合起始劑的含量係以固體成分換算,相對於鹼可溶性樹脂100質量份,較佳為0.1~30質量份,更佳為0.5~25質量份,再更佳為1~15質量份之範圍。若為0.1質量份以上,則由光硬化性或耐化學性等的觀點而言較佳。另一方面,若為30質量份以下,則以可控制因光聚合起始劑之經正式硬化後之塗膜表面之光吸收,且深部的硬化性亦提升之觀點而言較佳。On the other hand, the content of photopolymerization initiators other than oxime ester-based photopolymerization initiators is, in terms of solid content, preferably 0.1 to 30 parts by mass, more preferably 0.5 parts by mass, based on 100 parts by mass of the alkali-soluble resin. ~25 parts by mass, more preferably in the range of 1-15 parts by mass. It is preferable from viewpoints, such as photocurability and chemical resistance, as it is 0.1 mass part or more. On the other hand, if it is 30 mass parts or less, it is preferable from the viewpoint that the light absorption of the coating film surface after full hardening by a photoinitiator can be controlled, and the curability of a deep part also improves.

[填充劑]   本發明之感光性樹脂組成物中可含有填充劑。作為填充劑係並無特別限定,可使用公知慣用的無機或有機填充劑。摻混填充劑之目的並無特別限定,可為為了提高正式硬化後之塗膜的物理強度等。賦予導電性之情況,較佳係使用導電性填充劑,又,將本發明之感光性樹脂組成物用於絕緣層的形成之情況,較佳係使用絕緣性填充劑。[Filler] The photosensitive resin composition of the present invention may contain a filler. The filler system is not particularly limited, and known and commonly used inorganic or organic fillers can be used. The purpose of blending the filler is not particularly limited, and may be for improving the physical strength of the coating film after main hardening. When imparting conductivity, it is preferable to use a conductive filler, and when the photosensitive resin composition of the present invention is used for the formation of an insulating layer, it is preferable to use an insulating filler.

導電性填充劑的材質,係可使用賦予本發明之感光性樹脂組成物導電性之任何填充劑。作為此種導電性填充劑,可列舉出Ag、Au、Pt、Pd、Ni、Cu、Al、Sn、Pb、Zn、Fe、Ir、Os、Rh、W、Mo、Ru等,此等之中較佳係Ag。此等的導電性填充劑,係可以上述成分單體的形態來使用,然而亦可以合金,或氧化物的形態使用。此外,亦可使用氧化錫(SnO2 )、氧化銦(In2 O3 )、ITO (Indium Tin Oxide)等。此外,作為導電性填充劑,碳黑、石墨、奈米碳管等的碳粉亦可。惟,由於光透過性降低,故需要注意。As the material of the conductive filler, any filler that imparts conductivity to the photosensitive resin composition of the present invention can be used. Examples of such conductive fillers include Ag, Au, Pt, Pd, Ni, Cu, Al, Sn, Pb, Zn, Fe, Ir, Os, Rh, W, Mo, Ru, and the like. Ag is preferred. These conductive fillers can be used in the form of the above components alone, but can also be used in the form of alloys or oxides. In addition, tin oxide (SnO 2 ), indium oxide (In 2 O 3 ), ITO (Indium Tin Oxide), and the like can also be used. In addition, carbon powder such as carbon black, graphite, and carbon nanotubes may be used as the conductive filler. However, caution is required because the light transmittance decreases.

導電性填充劑的形狀,雖無特別限制,然較佳為薄片狀以外,特別以針狀、或球狀為較佳。藉此、光透過性係提升,又,可形成解析性優異之導電電路或電極。Although the shape of the conductive filler is not particularly limited, it is preferably in the form of flakes, especially in the form of needles or spheres. Thereby, the light transmittance is improved, and a conductive circuit or an electrode with excellent resolution can be formed.

導電性填充劑,係為了形成微細的線,故最大粒徑較佳為30μm以下。藉由使得最大粒徑為30μm以下,導電電路或電極的解析性提升。The conductive filler is for forming fine wires, so the maximum particle diameter is preferably 30 μm or less. By making the maximum particle size 30 μm or less, the resolution of the conductive circuit or the electrode is improved.

又,導電性填充劑的粒子徑係使用電子顯微鏡(SEM)以10,000倍觀察之隨機的10個導電性填充劑的平均粒徑,其範圍較佳為0.1~10μm。平均粒徑為0.1μm以上,則由導電性的觀點而言為較佳。另一方面,平均粒徑為10μm以下,則由防止網版的篩眼堵塞之觀點而言為較佳。此外,藉由Microtrac所測定之平均粒徑中,較佳係使用0.5~3.5μm的大小者。導電性填充劑之體積固有電阻率(JIS K 6911)較佳係10-3 Ω・cm以下。In addition, the particle size of the conductive filler is the average particle size of 10 random conductive fillers observed at 10,000 times using an electron microscope (SEM), and the range is preferably 0.1-10 μm. The average particle diameter is preferably 0.1 μm or more from the viewpoint of conductivity. On the other hand, an average particle diameter of 10 μm or less is preferable from the viewpoint of preventing clogging of screen meshes. In addition, among the average particle diameters measured by Microtrac, it is preferable to use those with a size of 0.5 to 3.5 μm. The intrinsic volume resistivity (JIS K 6911) of the conductive filler is preferably 10 -3 Ω·cm or less.

絕緣性填充劑較佳係具有體積固有電阻率(JIS K 6911)為1010 Ω・cm以上之絕緣性。作為絕緣性填充劑,可列舉出例如,無定形二氧化矽、溶融二氧化矽、球狀二氧化矽等的二氧化矽、硫酸鋇、水滑石、滑石、白土、碳酸鎂、碳酸鈣、氧化鋁、氧化鈦、氫氧化鋁、氮化矽、氮化鋁、氮化硼、諾易堡矽土粒子等。The insulating filler preferably has insulating properties with a specific volume resistivity (JIS K 6911) of 10 10 Ω·cm or more. Examples of insulating fillers include silicon dioxide such as amorphous silica, fused silica, and spherical silica, barium sulfate, hydrotalcite, talc, clay, magnesium carbonate, calcium carbonate, oxide Aluminum, titanium oxide, aluminum hydroxide, silicon nitride, aluminum nitride, boron nitride, Neuburg silica particles, etc.

填充劑係可單獨使用1種或組合2種以上來使用。The fillers can be used alone or in combination of two or more.

填充劑之適當的摻混量係可依據感光性樹脂組成物的使用用途來進行適當調整。例如作為如同阻焊劑之絕緣性樹脂組成物使用之情況,絕緣性填充劑的摻混量係以固體成分換算,相對於鹼可溶性樹脂100質量份,較佳為50~500質量份,更佳為100~300質量份。絕緣性填充劑的摻混量為50質量份以上,則由印刷性的觀點為較佳。又,絕緣性填充劑的摻混量為500質量份以下,則由印刷性與光的透過性的觀點為較佳。另一方面,作為導電性樹脂組成物使用之情況,導電性填充劑的摻混量係以固體成分換算,相對於鹼可溶性樹脂100質量份,較佳為700~1300質量份。導電性填充劑的摻混量為700質量份以上,則由導電性的觀點為較佳。又,導電性填充劑的摻混量為1300質量份以下,則由印刷性與光的透過性的觀點為較佳。The appropriate blending amount of the filler can be appropriately adjusted according to the application of the photosensitive resin composition. For example, when used as an insulating resin composition like a solder resist, the blending amount of the insulating filler is based on solid content conversion, and is preferably 50 to 500 parts by mass, more preferably 100~300 parts by mass. It is preferable from the viewpoint of printability that the compounding quantity of an insulating filler is 50 mass parts or more. Moreover, it is preferable that the compounding quantity of an insulating filler is 500 mass parts or less from a viewpoint of printability and light transmittance. On the other hand, when used as a conductive resin composition, the blending amount of the conductive filler is preferably 700 to 1300 parts by mass in terms of solid content relative to 100 parts by mass of the alkali-soluble resin. It is preferable that the compounding quantity of a conductive filler is 700 mass parts or more from a viewpoint of conductivity. Moreover, it is preferable that the compounding quantity of a conductive filler is 1300 mass parts or less from a viewpoint of printability and light transmittance.

(反應性稀釋劑)   本發明之感光性樹脂組成物係可有效地以光進行交聯,故亦可含有反應性稀釋劑。作為反應性稀釋劑,較佳係使用 (甲基)丙烯酸酯化合物。又,反應性稀釋劑較佳係為2官能以上,亦即,較佳為多官能。較佳為多官能之理由係由於將較於官能基的數量為1個的情況,其光反應性係提高,且解析性為優良。此外,本發明專利說明書中,所謂(甲基)丙烯酸酯,係總稱丙烯酸酯及甲基丙烯酸酯之用語,其他類似的表現亦相同。(Reactive diluent) The photosensitive resin composition of the present invention can effectively cross-link with light, so it may also contain a reactive diluent. As reactive diluents, (meth)acrylate compounds are preferably used. Also, the reactive diluent is preferably bifunctional or more, that is, preferably polyfunctional. The reason why it is preferable to be polyfunctional is that the photoreactivity is improved and the resolution is excellent compared to the case where the number of functional groups is one. In addition, in the patent specification of the present invention, the so-called (meth)acrylate is a term collectively referring to acrylate and methacrylate, and other similar expressions are also the same.

作為(甲基)丙烯酸酯化合物可列舉出多官能(甲基)丙烯酸酯單體或寡聚物(2官能以上的(甲基)丙烯酸酯單體或寡聚物),具體而言,例如,可列舉出慣用公知的聚酯(甲基)丙烯酸酯、聚醚(甲基)丙烯酸酯、胺基甲酸酯(甲基)丙烯酸酯、碳酸酯(甲基)丙烯酸酯、環氧(甲基)丙烯酸酯等。具體而言,丙烯酸2-羥乙酯、丙烯酸2-羥丙酯等的羥烷基丙烯酸酯類;乙二醇、甲氧基四乙二醇、聚乙二醇、丙二醇等的二醇之二丙烯酸酯類;N,N-二甲基丙烯醯胺、N-羥甲基丙烯醯胺、N,N-二甲基胺丙基丙烯醯胺等的丙烯醯胺類;N,N-二甲基胺乙基丙烯酸酯、N,N-二甲基胺丙基丙烯醯胺等的氨烷基丙烯酸酯類;已二醇、三羥甲基丙烷、季戊四醇、二季戊四醇、三-羥基乙基異三聚氰酸酯等的多價醇或此等的環氧乙烷加成物、環氧丙烷加成物、或者ε-己內酯加成物等的多價丙烯酸酯類;苯氧基丙烯酸酯、雙酚A二丙烯酸酯、及此等的酚類的環氧乙烷加成物或者環氧丙烷加成物等的多價丙烯酸酯類;丙二醇二環氧丙酯、丙二醇三環氧丙酯、三羥甲基丙烷三環氧丙酯、三環氧丙基異三聚氰酸酯等的環氧丙酯的多價丙烯酸酯類;不限定於前述內容,亦可舉出將聚醚多元醇、聚碳酸酯二醇、羥基末端聚丁二烯、聚酯多元醇等的多元醇直接丙烯酸酯化,或者,藉由二異氰酸酯而經胺基甲酸酯丙烯酸酯化之丙烯酸酯類及三聚氰胺丙烯酸酯、及對應於前述丙烯酸酯之各甲基丙烯酸酯類之中之至少一種等。Examples of (meth)acrylate compounds include polyfunctional (meth)acrylate monomers or oligomers (difunctional or more functional (meth)acrylate monomers or oligomers), and specifically, for example, Commonly known polyester (meth)acrylate, polyether (meth)acrylate, urethane (meth)acrylate, carbonate (meth)acrylate, epoxy (meth)acrylate, etc. ) acrylate, etc. Specifically, hydroxyalkyl acrylates such as 2-hydroxyethyl acrylate and 2-hydroxypropyl acrylate; diols such as ethylene glycol, methoxytetraethylene glycol, polyethylene glycol, and propylene glycol Acrylic esters; Acrylamides such as N,N-dimethylacrylamide, N-methylolacrylamide, N,N-dimethylaminopropylacrylamide, etc.; N,N-dimethylacrylamide Aminoalkyl acrylates such as N,N-dimethylaminopropyl acrylamide and N,N-dimethylaminopropyl acrylamide; hexanediol, trimethylolpropane, pentaerythritol, dipentaerythritol, tri-hydroxyethyliso Polyvalent alcohols such as cyanurate or polyvalent acrylates such as ethylene oxide adducts, propylene oxide adducts, or ε-caprolactone adducts; phenoxyacrylic acid esters, bisphenol A diacrylate, and polyvalent acrylates such as ethylene oxide adducts or propylene oxide adducts of these phenols; propylene glycol diglycidyl ester, propylene glycol triglycidyl Polyvalent acrylates of glycidyl esters such as trimethylolpropane triglycidyl ester, triglycidyl isocyanurate, etc.; not limited to the foregoing, but also polyether Direct acrylated polyols such as polyols, polycarbonate diols, hydroxyl-terminated polybutadiene, polyester polyols, or acrylated urethane acrylated by diisocyanate and Melamine acrylate, at least one of methacrylates corresponding to the aforementioned acrylates, and the like.

此外,亦可將於甲酚酚醛型環氧樹脂等的多官能環氧樹脂,使丙烯酸反應之環氧丙烯酸酯樹脂,或進一步於該環氧丙烯酸酯樹脂的羥基,使季戊四醇三丙烯酸酯等的羥基丙烯酸酯與異佛爾酮二異氰酸酯等的二異氰酸酯的半胺基甲酸酯化合物反應之環氧胺基甲酸酯丙烯酸酯化合物、及對應前述丙烯酸酯之各甲基丙烯酸酯樹脂或化合物等作為反應性稀釋劑使用。此種環氧丙烯酸酯系樹脂係不使指觸乾燥性降低,並可使光硬化性提升。In addition, it is also possible to use polyfunctional epoxy resins such as cresol novolak type epoxy resins, epoxy acrylate resins that react acrylic acid, or further use epoxy acrylate resins such as pentaerythritol triacrylate on the hydroxyl groups of the epoxy acrylate resins. Epoxyurethane acrylate compound in which hydroxyacrylate is reacted with hemiurethane compound of diisocyanate such as isophorone diisocyanate, and each methacrylate resin or compound corresponding to the aforementioned acrylate, etc. Used as a reactive diluent. Such an epoxy acrylate resin system can improve photocurability without reducing dryness to touch.

其中尤其,使用多官能(甲基)丙烯酸酯單體係較佳,特佳係4官能之(甲基)丙烯酸酯單體。作為4官能之(甲基)丙烯酸酯單體,可列舉出季戊四醇四(甲基)丙烯酸酯、季戊四醇四(甲基)丙烯酸酯、胺基甲酸酯(甲基)丙烯酸酯等,此其中尤其,由於與鹼可溶性樹脂相同的理由,具有胺基甲酸酯鍵者,亦即,胺基甲酸酯(甲基)丙烯酸酯係較佳。作為胺基甲酸酯(甲基)丙烯酸酯,可為任何具有胺基甲酸酯鍵者,例如,可舉出如同由以下式(I)所表示者。

Figure 02_image001
Among them, it is preferable to use a multi-functional (meth)acrylate monomer system, especially a tetrafunctional (meth)acrylate monomer system. Examples of tetrafunctional (meth)acrylate monomers include pentaerythritol tetra(meth)acrylate, pentaerythritol tetra(meth)acrylate, and urethane (meth)acrylate, among which , For the same reason as the alkali-soluble resin, one having a urethane bond, that is, a urethane (meth)acrylate type is preferable. As the urethane (meth)acrylate, any one having a urethane bond may be used, for example, one represented by the following formula (I) may be mentioned.
Figure 02_image001

上述式(I)中、Z1 係表示伸烷基、R1 係表示氫原子、R2 係表示甲基、R3 及R4 係各自獨立表示氫原子或甲基,但,R3 及R4 之至少一者係表示甲基。In the above formula (I), Z 1 represents an alkylene group, R 1 represents a hydrogen atom, R 2 represents a methyl group, R 3 and R 4 represent a hydrogen atom or a methyl group independently, but R 3 and R At least one of 4 represents a methyl group.

作為上述4官能之胺基甲酸酯(甲基)丙烯酸酯,較佳係丙烯酸與甲基丙烯為1比1之胺基甲酸酯(甲基)丙烯酸酯或酯(甲基)丙烯酸酯。As the above-mentioned tetrafunctional urethane (meth)acrylate, urethane (meth)acrylate or ester (meth)acrylate in which acrylic acid and methacrylic acid are 1:1 is preferable.

作為此種4官能基之胺基甲酸酯(甲基)丙烯酸酯或酯(甲基)丙烯酸酯,係例如於環氧丙基甲基丙烯酸酯加成丙烯酸,使此時產生之羥基與二異氰酸酯或二羧酸反應者係較佳。Urethane (meth)acrylate or ester (meth)acrylate as such a four-functional group is, for example, added acrylic acid to glycidyl methacrylate, and the hydroxyl group produced at this time is combined with two Those reacting with isocyanate or dicarboxylic acid are preferred.

反應性稀釋劑係可單獨使用1種或組合2種以上來使用。The reactive diluents can be used alone or in combination of two or more.

反應性稀釋劑的適當的摻混量係可依據感光性樹脂組成物的使用用途來進行適當調整。例如作為如同阻焊劑之絕緣性樹脂組成物使用之情況,反應性稀釋劑的摻混量係以固體成分換算,相對於鹼可溶性樹脂100質量份,較佳為1~30質量份,更佳為2~20質量份。1質量份以上的情況,光硬化性係良好,且於活性能量射線照射後之鹼顯影中,較易形成圖案之線。又,30質量份以下的情況,對於鹼水溶液之溶解性係良好,且圖案膜係不容易變得脆弱。另一方面,作為導電性樹脂組成物使用之情況,反應性稀釋劑的摻混量係以固體成分換算,相對於鹼可溶性樹脂100質量份,較佳係1~40質量份,更佳係5~40質量份。1質量份以上的情況,光硬化性係良好,且於活性能量射線照射後之鹼顯影中,較易形成圖案之線。40質量份以下的情況,對於鹼水溶液之溶解性係良好,且圖案膜不易變得脆弱。The appropriate blending amount of the reactive diluent can be appropriately adjusted according to the application of the photosensitive resin composition. For example, when it is used as an insulating resin composition like a solder resist, the blending amount of the reactive diluent is based on the solid content, and is preferably 1 to 30 parts by mass, more preferably 100 parts by mass of the alkali-soluble resin. 2~20 parts by mass. In the case of 1 part by mass or more, photocurability is good, and in alkali image development after active energy ray irradiation, it is easy to form lines of a pattern. Moreover, when it is 30 mass parts or less, the solubility with respect to an aqueous alkali solution is favorable, and a pattern film system is hard to become fragile. On the other hand, when used as a conductive resin composition, the blending amount of the reactive diluent is based on solid content, and is preferably 1 to 40 parts by mass, more preferably 5 parts by mass, relative to 100 parts by mass of the alkali-soluble resin. ~40 parts by mass. In the case of 1 part by mass or more, photocurability is good, and in alkali image development after active energy ray irradiation, it is easy to form lines of a pattern. When it is 40 parts by mass or less, the solubility to an aqueous alkali solution is good, and the patterned film is less likely to become fragile.

(熱硬化性成分)   本發明之感光性樹脂組成物由於抗裂性進一步提升,故亦可含有熱硬化性成分。作為本發明所使用之熱硬化性成分,可使用三聚氰胺樹脂、苯胍胺樹脂等的胺樹脂、嵌段異氰酸酯化合物、環碳酸酯化合物、多官能環氧化合物、多官能氧雜環丁烷化合物、環硫化物樹脂、三聚氰胺衍生物等的公知慣用的熱硬化性樹脂。熱硬化性成分係可單獨使用1種或組合2種以上來使用。本發明中,分子中具有選自由2個以上環狀醚基及環狀硫醚基之中之至少1種(以下,簡稱為環狀(硫基)醚基。)之熱硬化性成分,或,1分子內具有2個以上異氰酸酯基、或嵌段化異氰酸酯基之熱硬化性成分係較佳。(Thermosetting Components) The photosensitive resin composition of the present invention may further contain a thermosetting component because the crack resistance is further improved. As the thermosetting component used in the present invention, amine resins such as melamine resins and benzoguanamine resins, blocked isocyanate compounds, cyclocarbonate compounds, polyfunctional epoxy compounds, polyfunctional oxetane compounds, Known and commonly used thermosetting resins such as episulfide resins and melamine derivatives. A thermosetting component can be used individually by 1 type or in combination of 2 or more types. In the present invention, a thermosetting component having at least one selected from two or more cyclic ether groups and cyclic thioether groups (hereinafter, simply referred to as cyclic (thio)ether groups) in the molecule, or , A thermosetting component having two or more isocyanate groups or blocked isocyanate groups in one molecule is preferred.

分子中具有2個以上環狀(硫基)醚基之熱硬化性成分為分子中具有3、4或5員環的環狀醚基,或環狀硫醚基中之任一者或2個以上2種類的基團之化合物,例如,可列舉出分子內至少具有2個以上環氧基之化合物,亦即多官能環氧化合物、分子內至少具有2個以上氧雜環丁烷基之化合物,亦即多官能氧雜環丁烷化合物、分子內具有2個以上硫醚基之化合物,亦即環硫化物樹脂等。Thermosetting components with more than 2 cyclic (thio) ether groups in the molecule are cyclic ether groups with 3, 4 or 5-membered rings in the molecule, or any one or two of cyclic thioether groups Compounds of the above two types of groups, for example, compounds having at least 2 or more epoxy groups in the molecule, that is, polyfunctional epoxy compounds, compounds having at least 2 or more oxetanyl groups in the molecule , that is, polyfunctional oxetane compounds, compounds with more than two sulfide groups in the molecule, that is, episulfide resins, etc.

作為多官能環氧化合物,係可列舉出,例如,三菱化學股份公司製的jER828、jER834、jER1001、jER1004、DIC股份公司製的EPICLON 840、EPICLON 850、EPICLON 1050、EPICLON 2055、新日鐵住金股份公司製的EPOTOHTO YD-011、YD-013、YD-127、YD-128、陶氏化學公司製的D.E.R.317、D.E.R.331、D.E.R.661、D.E.R.664、住友化學工業股份公司製的Sumi-Epoxy ESA-011、ESA-014、ELA-115、ELA-128、旭化成工業股份公司製的A.E.R.330、A.E.R.331、A.E.R.661、A.E.R.664等的雙酚A型環氧樹脂;三菱化學股份公司製的jERYL903、DIC股份公司製的EPICLON 152、EPICLON 165、新日鐵住金股份公司製的EPOTOHTO YDB-400、YDB-500、陶氏化學公司製的D.E.R.542、住友化學工業股份公司製的Sumi-Epoxy ESB-400、ESB-700、旭化成工業股份公司製的A.E.R.711、A.E.R.714等的溴化環氧樹脂;三菱化學股份公司製的jER152、jER154、陶氏化學公司製的D.E.N.431、D.E.N.438、DIC股份公司製的EPICLON N-730、EPICLON N-770、EPICLON N-865、新日鐵住金股份公司製的EPOTOHTO YDCN-701、YDCN-704、日本化藥股份公司製的EPPN-201、EOCN-1025、EOCN-1020、EOCN-104S、RE-306、住友化學工業股份公司製的Sumi-Epoxy ESCN-195X、ESCN-220、旭化成工業股份公司製的A.E.R.ECN-235、ECN-299等的酚醛清漆型環氧樹脂;DIC股份公司製的EPICLON 830、三菱化學股份公司製的jER807、新日鐵住金股份公司製的EPOTOHTO YDF-170、YDF-175、YDF-2004等的雙酚F型環氧樹脂;新日鐵住金股份公司製的EPOTOHTO ST-2004、ST-2007、ST-3000等的氫化雙酚A型環氧樹脂;三菱化學股份公司製的jER604、新日鐵住金股份公司製的EPOTOHTO YH-434、住友化學工業股份公司製的Sumi-Epoxy ELM-120等的環氧丙基胺型環氧樹脂;乙內醯脲型環氧樹脂;Daicel股份公司製的CELLOXIDE 2021P等的脂環式環氧樹脂;三菱化學股份公司製的YL-933、陶氏化學公司製的T.E.N.、EPPN-501、EPPN-502等的三羥基苯基甲烷型環氧樹脂;三菱化學股份公司製的YL-6056、YX-4000、YL-6121等的聯二甲酚型或者聯酚型環氧樹脂或該等的混合物;日本化藥股份公司製的EBPS-200、ADEKA股份公司製的EPX-30、DIC股份公司製的EXA-1514等的雙酚S型環氧樹脂;三菱化學股份公司製的jER157S等的雙酚A酚醛清漆型環氧樹脂;三菱化學股份公司製的jERYL-931等的四酚基乙烷型環氧樹脂;日產化學工業股份公司製的TEPIC等的雜環式環氧樹脂;日本油脂股份公司製的BLENMER DGT等的二環氧丙基鄰苯二甲酸酯樹脂;新日鐵住金股份公司製的ZX-1063等的四環氧丙基二甲酚基乙烷樹脂;新日鐵住金化學股份公司製的ESN-190、ESN-360、DIC股份公司製的HP-4032、EXA-4750、EXA-4700等的含萘基環氧樹脂;DIC股份公司製的HP-7200、HP-7200H等的具有雙環戊二烯骨架之環氧樹脂;日本油脂股份公司製的CP-50S、CP-50M等的環氧丙基甲基丙烯酸酯共聚合系環氧樹脂;進而環己基馬來醯亞胺與環氧丙基甲基丙烯酸酯之共聚合環氧樹脂;環氧改質之聚丁二烯橡膠衍生物(例如Daicel股份公司製的EPL PB-3600等)、CTBN改質環氧樹脂(例如新日鐵住金化學股份公司製的YR-102、YR-450等)等,然而並非受到此等之限制者。此等的環氧樹脂係可單獨使用1種或組合2種以上來使用。此等之中,較佳為酚醛清漆型環氧樹脂、雜環式環氧樹脂、雙酚A型環氧樹脂或該等的混合物。Examples of polyfunctional epoxy compounds include jER828, jER834, jER1001, jER1004 manufactured by Mitsubishi Chemical Corporation, EPICLON 840, EPICLON 850, EPICLON 1050, EPICLON 2055 manufactured by DIC Corporation, Nippon Steel & Sumitomo Metal Co., Ltd. EPOTOHTO YD-011, YD-013, YD-127, YD-128 manufactured by the company, D.E.R.317, D.E.R.331, D.E.R.661, D.E.R.664 manufactured by The Dow Chemical Company, Sumi-Epoxy ESA- manufactured by Sumitomo Chemical Co., Ltd. 011, ESA-014, ELA-115, ELA-128, bisphenol A epoxy resins such as A.E.R.330, A.E.R.331, A.E.R.661, A.E.R.664 manufactured by Asahi Kasei Industries, Ltd.; jERYL903, DIC manufactured by Mitsubishi Chemical Corporation EPICLON 152, EPICLON 165 manufactured by a joint-stock company, EPOTOHTO YDB-400, YDB-500 manufactured by Nippon Steel & Sumitomo Metal Co., Ltd., D.E.R.542 manufactured by Dow Chemical Company, Sumi-Epoxy ESB-400 manufactured by Sumitomo Chemical Industries, Ltd., Brominated epoxy resins such as ESB-700, A.E.R.711 and A.E.R.714 manufactured by Asahi Kasei Industries Co., Ltd.; jER152 and jER154 manufactured by Mitsubishi Chemical Co., Ltd.; D.E.N.431 and D.E.N.438 manufactured by Dow Chemical Co., Ltd.; EPICLON N-730, EPICLON N-770, EPICLON N-865, EPOTOHTO YDCN-701, YDCN-704 manufactured by Nippon Steel & Sumitomo Metal Corporation, EPPN-201 manufactured by Nippon Kayaku Co., Ltd., EOCN-1025, EOCN-1020 , EOCN-104S, RE-306, Sumi-Epoxy ESCN-195X, ESCN-220 manufactured by Sumitomo Chemical Industries, Ltd., A.E.R.ECN-235, ECN-299 manufactured by Asahi Kasei Industries, Ltd., etc. Novolac-type epoxy resins; Epiclon 830 manufactured by DIC Co., Ltd., jER807 manufactured by Mitsubishi Chemical Co., Ltd., EPOTOHTO YDF-170, YDF-175, YDF-2004 manufactured by Nippon Steel & Sumitomo Metal Co., Ltd. and other bisphenol F epoxy resins; Hydrogenated bisphenol A type epoxy resins such as EPOTOHTO ST-2004, ST-2007, ST-3000 manufactured by a joint-stock company; jER604 manufactured by Mitsubishi Chemical Co., Ltd., EPOTOHTO YH-434 manufactured by Nippon Steel & Sumitomo Metal Co., Ltd., Sumitomo Chemical Industrial AG Glycidylamine-type epoxy resins such as Sumi-Epoxy ELM-120 manufactured by the company; hydantoin-type epoxy resins; alicyclic epoxy resins such as CELLOXIDE 2021P manufactured by Daicel Co., Ltd.; Mitsubishi Chemical Corporation YL-933 manufactured by Dow Chemical Co., Ltd., T.E.N., EPPN-501, EPPN-502, etc. Trishydroxyphenylmethane-type epoxy resins; YL-6056, YX-4000, YL-6121 manufactured by Mitsubishi Chemical Co., Ltd. Bixylenol-type or biphenol-type epoxy resins or mixtures thereof; EBPS-200 manufactured by Nippon Kayaku Co., Ltd., EPX-30 manufactured by ADEKA Co., Ltd., EXA-1514 manufactured by DIC Co., Ltd., etc. Bisphenol S-type epoxy resins; bisphenol A novolak-type epoxy resins such as jER157S manufactured by Mitsubishi Chemical Corporation; tetraphenol ethane-type epoxy resins such as jERYL-931 manufactured by Mitsubishi Chemical Corporation; Nissan Chemical Co., Ltd. Heterocyclic epoxy resins such as TEPIC manufactured by Industrial Co., Ltd.; Diglycidyl phthalate resins such as BLENMER DGT manufactured by NOF Co., Ltd.; ZX-1063 manufactured by Nippon Steel & Sumitomo Metal Co., Ltd., etc. Tetraglycidyl xylenyl ethane resin; ESN-190, ESN-360 manufactured by Nippon Steel & Sumikin Chemical Co., Ltd., HP-4032, EXA-4750, EXA-4700 manufactured by DIC Co., Ltd., etc. Naphthyl epoxy resins; epoxy resins having a dicyclopentadiene skeleton such as HP-7200 and HP-7200H manufactured by DIC Co., Ltd.; glycidyl epoxy resins such as CP-50S and CP-50M manufactured by NOF Corporation Methacrylate copolymerized epoxy resin; further copolymerized epoxy resin of cyclohexylmaleimide and epoxypropyl methacrylate; epoxy modified polybutadiene rubber derivatives (such as Daicel EPL PB-3600 manufactured by a joint-stock company), CTBN modified epoxy resin (such as YR-102, YR-450 manufactured by Nippon Steel Sumitomo Metal Chemical Co., Ltd.), etc., but not subject to these restrictions. These epoxy resins can be used individually by 1 type or in combination of 2 or more types. Among these, novolak-type epoxy resins, heterocyclic epoxy resins, bisphenol A-type epoxy resins, or mixtures thereof are preferred.

進一步於容易將乾燥塗膜的接觸角的值調整為一定的值的觀點,可具有甲基或茀骨架。作為具有甲基之環氧樹脂,可為任何具有甲基者,例如,可舉出如同由以下之式(II)所表示者。下述式(II)中,n數較佳為5~10。

Figure 02_image003
Furthermore, it may have a methyl group or a fennel skeleton from the viewpoint of making it easy to adjust the value of the contact angle of the dried coating film to a constant value. As the epoxy resin having a methyl group, any one having a methyl group may be used, for example, one represented by the following formula (II) may be mentioned. In the following formula (II), the number of n is preferably 5-10.
Figure 02_image003

另一方面,作為具有茀骨架之環氧樹脂,可為任何具有茀骨架者,例如,可列舉出如同由以下之式(III)所表示者。

Figure 02_image005
On the other hand, any epoxy resin having a fennel skeleton may be used, for example, those represented by the following formula (III) may be mentioned.
Figure 02_image005

作為多官能氧雜環丁烷化合物係可列舉出,雙[(3-甲基-3-氧雜環丁烷甲氧基)甲基]醚、雙[(3-乙基-3-氧雜環丁烷甲氧基)甲基]醚、1,4-雙[(3-甲基-3-氧雜環丁烷甲氧基)甲基]苯、1,4-雙[(3-乙基-3-氧雜環丁烷甲氧基)甲基]苯、(3-甲基-3-氧雜環丁烷)甲基丙烯酸酯、(3-乙基-3-氧雜環丁烷)甲基丙烯酸酯、(3-甲基-3-氧雜環丁烷)甲基甲基丙烯酸酯、(3-乙基-3-氧雜環丁烷)甲基甲基丙烯酸酯或該等的寡聚物或共聚合體等的多官能氧雜環丁烷類之外,氧雜環丁烷醇,與酚醛清漆樹脂、聚(p-羥基苯乙烯)、卡多型雙酚類、杯芳烴類、杯間苯二酚芳烴類、或倍半矽氧烷等的具有羥基之樹脂之醚化物等。其他,亦可舉出具有氧雜環丁烷環之不飽和單體與烷基(甲基)丙烯酸酯之共聚合體等。Examples of polyfunctional oxetane compounds include bis[(3-methyl-3-oxetanemethoxy)methyl]ether, bis[(3-ethyl-3-oxetane Cyclobutanemethoxy)methyl]ether, 1,4-bis[(3-methyl-3-oxetanemethoxy)methyl]benzene, 1,4-bis[(3-ethane Base-3-oxetanemethoxy)methyl]benzene, (3-methyl-3-oxetane)methacrylate, (3-ethyl-3-oxetane ) methacrylate, (3-methyl-3-oxetane) methyl methacrylate, (3-ethyl-3-oxetane) methyl methacrylate or the like In addition to polyfunctional oxetanes such as oligomers or copolymers, oxetanol, and novolac resins, poly(p-hydroxystyrene), cardo-type bisphenols, calixarene Etherification of resins with hydroxyl groups such as calix resorcinol aromatic hydrocarbons, silsesquioxane, etc. Other examples include copolymers of unsaturated monomers having an oxetane ring and alkyl (meth)acrylates, and the like.

作為分子中具有2個以上環狀硫醚基之環硫化物樹脂係例如可舉出,三菱化學股份公司製的雙酚A型環硫化物樹脂YL7000等。又,使用相同的合成方法,亦可使用將酚醛清漆型環氧樹脂的環氧基的氧原子取代為硫原子之環硫化物樹脂等。Examples of episulfide resins having two or more cyclic thioether groups in the molecule include bisphenol A episulfide resin YL7000 manufactured by Mitsubishi Chemical Corporation. In addition, using the same synthesis method, an episulfide resin in which an oxygen atom of an epoxy group of a novolak-type epoxy resin is substituted by a sulfur atom can also be used.

又,本發明之感光性樹脂組成物中,為了提升感光性樹脂組成物的硬化性及獲得之硬化膜的強韌性,較佳係添加1分子內具有2個以上異氰酸酯基、或嵌段化異氰酸酯基之化合物。此種1分子內具有2個以上異氰酸酯基、或嵌段化異氰酸酯基之化合物,係可列舉出1分子內具有2個以上異氰酸酯基之化合物,亦即聚異氰酸酯化合物,或1分子內具有2個以上嵌段化異氰酸酯基之化合物,亦即嵌段異氰酸酯化合物等。Also, in the photosensitive resin composition of the present invention, in order to improve the curability of the photosensitive resin composition and the toughness of the obtained cured film, it is preferable to add an isocyanate group having two or more isocyanate groups in one molecule, or a blocked isocyanate base compound. Such compounds having two or more isocyanate groups or blocked isocyanate groups in one molecule include compounds having two or more isocyanate groups in one molecule, that is, polyisocyanate compounds, or compounds having two or more isocyanate groups in one molecule. The above compounds with blocked isocyanate groups, that is, blocked isocyanate compounds and the like.

作為聚異氰酸酯化合物,可使用例如,芳香族聚異氰酸酯、脂肪族聚異氰酸酯或脂環式聚異氰酸酯。作為芳香族聚異氰酸酯的具體例,可列舉出 4,4’-二苯基甲烷二異氰酸酯、2,4-甲苯二異氰酸酯、2,6-甲苯二異氰酸酯、萘基-1,5-二異氰酸酯、o-伸茬基二異氰酸酯、m-伸茬基二異氰酸酯及2,4-甲苯二聚體。作為脂肪族聚異氰酸酯的具體例,可列舉出四亞甲基二異氰酸酯、六亞甲基二異氰酸酯、亞甲基二異氰酸酯、三甲基六亞甲基二異氰酸酯、4,4-亞甲基雙(環己基異氰酸酯)及異佛爾酮二異氰酸酯。作為脂環式聚異氰酸酯的具體例,可列舉出雙環庚烷三異氰酸酯。以及可舉出先前列舉出之異氰酸酯化合物的加成體、雙脲體及異三聚氰酸酯體。As the polyisocyanate compound, for example, aromatic polyisocyanate, aliphatic polyisocyanate or alicyclic polyisocyanate can be used. Specific examples of aromatic polyisocyanates include 4,4'-diphenylmethane diisocyanate, 2,4-toluene diisocyanate, 2,6-toluene diisocyanate, naphthyl-1,5-diisocyanate, o-stubble diisocyanate, m-stubble diisocyanate and 2,4-toluene dimer. Specific examples of aliphatic polyisocyanates include tetramethylene diisocyanate, hexamethylene diisocyanate, methylene diisocyanate, trimethylhexamethylene diisocyanate, 4,4-methylene bis (cyclohexyl isocyanate) and isophorone diisocyanate. As a specific example of alicyclic polyisocyanate, dicycloheptane triisocyanate is mentioned. And the adduct body, diurea body, and isocyanurate body of the isocyanate compound mentioned above are mentioned.

嵌段異氰酸酯化合物中所包含之嵌段化異氰酸酯基係藉由異氰酸酯基與封阻劑(blocking agent)之反應而被保護,且暫時成為惰性化之基。是在加熱至設定溫度時,該封阻劑解離,生成異氰酸酯基。The blocked isocyanate group contained in the blocked isocyanate compound is protected by the reaction of the isocyanate group with a blocking agent, and temporarily becomes an inert group. When heated to the set temperature, the blocking agent dissociates to generate isocyanate groups.

作為嵌段異氰酸酯化合物,可使用異氰酸酯化合物與異氰酸酯封阻劑之加成反應生成物。作為可與封阻劑反應之異氰酸酯化合物,可列舉出異三聚氰酸酯型、雙脲型、加成型等。作為此異氰酸酯化合物,例如,可使用與上述相同的芳香族聚異氰酸酯、脂肪族聚異氰酸酯或脂環式聚異氰酸酯。As the blocked isocyanate compound, an addition reaction product of an isocyanate compound and an isocyanate blocking agent can be used. Isocyanurate type, diurea type, addition type, etc. are mentioned as an isocyanate compound which can react with a blocking agent. As this isocyanate compound, for example, the same aromatic polyisocyanate, aliphatic polyisocyanate, or alicyclic polyisocyanate as described above can be used.

作為異氰酸酯封阻劑,係可列舉出例如,酚、甲酚、二甲酚、氯酚及乙基酚等的酚系封阻劑;ε-己內醯胺、δ-戊內醯胺、γ-丁內醯胺及β-丙內醯胺等的內醯胺系封阻劑;乙醯乙酸乙酯及乙醯丙酮等的活性亞甲基系封阻劑;甲醇、乙醇、丙醇、丁醇、戊醇、乙二醇單甲基醚、乙二醇單乙基醚、乙二醇單丁基醚、二乙二醇單甲基醚、丙二醇單甲基醚、苄基醚、二醇酸甲酯、二醇酸丁酯、二丙酮醇、乳酸甲酯及乳酸乙基等的醇系封阻劑;甲醛肟(formaldehyde oxime)、乙醛肟(acetaldoxime)、丙酮肟(acetoxime)、甲基乙基酮肟、二乙醯基單肟酯、環己烷肟等的肟酯系封阻劑;丁基硫醇、己基硫醇、t-丁基硫醇、硫酚、甲基硫基酚、乙基硫酚等的硫醇系封阻劑;乙酸醯胺、苄醯胺等的酸醯胺系封阻劑;琥珀酸醯亞胺及馬來酸醯亞胺等的醯亞胺系封阻劑;茬胺、苯胺、丁基胺、二丁基胺等的胺系封阻劑;咪唑、2-乙基咪唑等的咪唑系封阻劑;亞甲基亞胺及丙烯亞胺等的亞胺系封阻劑等。As the isocyanate blocking agent, for example, phenolic blocking agents such as phenol, cresol, xylenol, chlorophenol, and ethylphenol; ε-caprolactam, δ-valerolactamide, γ - Lactamide-based blocking agents such as butyrolactam and β-propiolactamide; active methylene-based blocking agents such as acetylacetate and acetylacetone; methanol, ethanol, propanol, butyl Alcohol, Amyl Alcohol, Ethylene Glycol Monomethyl Ether, Ethylene Glycol Monoethyl Ether, Ethylene Glycol Monobutyl Ether, Diethylene Glycol Monomethyl Ether, Propylene Glycol Monomethyl Ether, Benzyl Ether, Glycol Alcohol-based blocking agents such as methyl ester, butyl glycolate, diacetone alcohol, methyl lactate and ethyl lactate; formaldehyde oxime, acetaldoxime, acetoxime, formaldehyde Oxime ester blockers such as ethyl ethyl ketone oxime, diacetyl monoxime ester, cyclohexane oxime, etc.; butyl mercaptan, hexyl mercaptan, t-butyl mercaptan, thiophenol, methyl thio Thiol-based blocking agents such as phenol and ethylthiophenol; acid amide-based blocking agents such as acetate amide and benzamide; imide-based blocking agents such as succinic imide and maleic imide Blocking agent; amine-based blocking agents such as stubble amine, aniline, butylamine, dibutylamine, etc.; imidazole-based blocking agents such as imidazole, 2-ethylimidazole, etc.; methyleneimine and propyleneimine, etc. imine blocking agent, etc.

嵌段異氰酸酯化合物亦可為市售品,可列舉出例如,7950、7951、7960、7961、7982、7990、7991、7992(以上、Baxenden公司製)Sumidur BL-3175、BL-4165、BL-1100、BL-1265、Desmodur TPLS-2957、TPLS-2062、TPLS-2078、TPLS-2117、Desmotherm 2170、Desmotherm 2265(以上,為住友拜耳胺基甲酸酯股份公司製)、Coronate 2512、Coronate 2513、Coronate 2520(以上,為東曹股份公司製)、B-830、B-815、B-846、B-870、B-874、B-882(三井武田Chemicals股份公司製)、DURANATE TPA-B80E、17B-60PX、E402-B80T、MF-B60B、MF-K60B、SBN-70D(旭化成化學品股份公司製)、CURRANTS MOI-BM(昭和電工股份公司製)等。此外,Sumidur BL-3175、BL-4265係使用甲基乙基肟酯作為封阻劑而得到者。Blocked isocyanate compounds may also be commercially available, for example, 7950, 7951, 7960, 7961, 7982, 7990, 7991, 7992 (above, manufactured by Baxenden) Sumidur BL-3175, BL-4165, BL-1100 , BL-1265, Desmodur TPLS-2957, TPLS-2062, TPLS-2078, TPLS-2117, Desmotherm 2170, Desmotherm 2265 (above, manufactured by Sumitomo Bayer Urethane AG), Coronate 2512, Coronate 2513, Coronate 2520 (above, manufactured by Tosoh Co., Ltd.), B-830, B-815, B-846, B-870, B-874, B-882 (made by Mitsui Takeda Chemicals Co., Ltd.), DURANATE TPA-B80E, 17B -60PX, E402-B80T, MF-B60B, MF-K60B, SBN-70D (manufactured by Asahi Kasei Chemicals Co., Ltd.), CURRANTS MOI-BM (manufactured by Showa Denko Co., Ltd.), etc. In addition, Sumidur BL-3175 and BL-4265 are obtained by using methyl ethyl oxime ester as a blocking agent.

上述之1分子內具有2個以上異氰酸酯基、或嵌段化異氰酸酯基之化合物係可單獨使用1種或組合2種以上來使用。The compounds having two or more isocyanate groups or blocked isocyanate groups in one molecule can be used alone or in combination of two or more.

此種1分子內具有2個以上異氰酸酯基、或嵌段化異氰酸酯基之化合物的摻混量係以固體成分換算,相對於鹼可溶性樹脂100質量份、較佳係1~100質量份,更佳係2~70質量份。若為1質量份以上,則由正式硬化後之塗膜的強韌性的觀點來看較佳。另一方面,若為100質量份以下,則由保存安定性的觀點來看較佳。The blending amount of such a compound having two or more isocyanate groups or blocked isocyanate groups in one molecule is based on solid content, preferably 1 to 100 parts by mass, more preferably 1 to 100 parts by mass, based on 100 parts by mass of the alkali-soluble resin It is 2 to 70 parts by mass. If it is 1 part by mass or more, it is preferable from the viewpoint of the toughness of the coating film after full-scale hardening. On the other hand, it is preferable from the viewpoint of storage stability that it is 100 parts by mass or less.

(有機酸)   本發明之感光性樹脂組成物係亦可含有有機酸。對於有機酸其作為顯影助劑之機能亦有效地實現。又由於容易將乾燥塗膜的接觸角調整為一定的值,溶解後之感光性樹脂組成物中所包含之成分係變得不會沉澱於顯影液底部,其結果,於可抑制顯影步驟中顯影液的汙染或因沉澱物所造成之顯影裝置之篩眼堵塞之觀點為有效。其中,若含有二羧酸則可顯示所述之顯著之效果因而較佳係含有二羧酸。特別是將感光性樹脂組成物作為導電性樹脂組成物使用,則由於電阻低,亦即導電性亦進而提升,故更佳。又,作為有機酸,不具有芳香環之有機酸係較佳。藉由摻混不具有芳香環之有機酸,有機酸自體的光吸收性係受到抑制,相對地感光成分的光反應性係提高,而可獲得優良的解析性。(Organic acid) The photosensitive resin composition of the present invention may also contain an organic acid. For organic acids, its function as a developing aid is also effectively realized. And because it is easy to adjust the contact angle of the dry coating film to a certain value, the components contained in the dissolved photosensitive resin composition will not settle at the bottom of the developer solution, and as a result, the development step can be suppressed. The point of view of liquid pollution or clogging of the screen of the developing device caused by sediment is valid. Among them, if dicarboxylic acid is contained, the above-mentioned remarkable effect can be exhibited, so it is preferable to contain dicarboxylic acid. In particular, it is more preferable to use a photosensitive resin composition as a conductive resin composition because the resistance is low, that is, the conductivity is further improved. Moreover, as an organic acid, the organic acid which does not have an aromatic ring is preferable. By blending an organic acid that does not have an aromatic ring, the light absorption of the organic acid itself is suppressed, and the photoreactivity of the photosensitive component is relatively improved, so that excellent resolution can be obtained.

作為有機酸的具體例,可列舉出2,2’-硫代二乙酸、己二酸、異酪酸、甲酸、檸檬酸、戊二酸、乙酸、草酸、酒石酸、乳酸、丙酮酸、丙二酸、酪酸、蘋果酸、水楊酸、安息香酸、苯基乙酸、丙烯酸、馬來酸、富馬酸、巴豆酸等的羧酸類;亞磷酸二丁酯、亞磷酸丁酯、亞磷酸二甲酯、亞磷酸甲酯、亞磷酸二丙酯、亞磷酸丙酯、亞磷酸二苯酯、亞磷酸苯酯、亞磷酸二異丙酯、亞磷酸異丙酯、亞磷酸-n-甲基-2-乙基己酯等的亞磷酸的單或二酯類;磷酸二丁酯、磷酸丁酯、磷酸二甲酯、磷酸甲酯、磷酸二丙酯、磷酸丙酯、磷酸二苯酯、磷酸苯酯、磷酸二異丙酯、磷酸異丙酯、磷酸-n-丁基-2-乙基己酯等的磷酸的單或二酯類等。此其中尤其以顯影步驟中顯影液的汙染或因沉澱物所造成之顯影裝置之篩眼堵塞的抑制、導電性、解析性之中皆可產生更優良效果的觀點而言,較佳為2,2’-硫代二乙酸。Specific examples of organic acids include 2,2'-thiodiacetic acid, adipic acid, isobutyric acid, formic acid, citric acid, glutaric acid, acetic acid, oxalic acid, tartaric acid, lactic acid, pyruvic acid, and malonic acid. , butyric acid, malic acid, salicylic acid, benzoic acid, phenylacetic acid, acrylic acid, maleic acid, fumaric acid, crotonic acid and other carboxylic acids; dibutyl phosphite, butyl phosphite, dimethyl phosphite , methyl phosphite, dipropyl phosphite, propyl phosphite, diphenyl phosphite, phenyl phosphite, diisopropyl phosphite, isopropyl phosphite, phosphite-n-methyl-2 - Mono- or diesters of phosphorous acid such as ethylhexyl ester; dibutyl phosphate, butyl phosphate, dimethyl phosphate, methyl phosphate, dipropyl phosphate, propyl phosphate, diphenyl phosphate, phenyl phosphate Mono- or diesters of phosphoric acid such as diisopropyl phosphate, isopropyl phosphate, n-butyl-2-ethylhexyl phosphate, etc. Among them, especially in terms of the contamination of the developer in the developing step or the suppression of the clogging of the developing device caused by sediment, the conductivity and the resolution can produce more excellent effects, preferably 2, 2'-thiodiacetic acid.

作為上述有機酸的摻混量,係以固體成分換算,相對於前述鹼可溶性樹脂100質量份,較佳為1~10質量份之範圍,更佳為1~5質量份。1質量份以上的情況,較易發揮作為顯影助劑之效果,另一方面,10質量份以下的情況,解析性更佳。The blending amount of the organic acid is preferably in the range of 1 to 10 parts by mass, more preferably 1 to 5 parts by mass, in terms of solid content, based on 100 parts by mass of the alkali-soluble resin. When it is 1 mass part or more, it becomes easy to exhibit the effect as a developing aid, and on the other hand, when it is 10 mass parts or less, resolution becomes better.

(分散劑)   本發明之感光性樹脂組成物係亦可含有分散劑。藉由摻混分散劑,可改善感光性樹脂組成物的分散性、沉澱性。作為分散劑,可舉出例如,DISPERBYK-191(BYK・JAPAN公司製)。(Dispersant) The photosensitive resin composition of the present invention may also contain a dispersant. By blending a dispersant, the dispersibility and sedimentation properties of the photosensitive resin composition can be improved. As a dispersant, DISPERBYK-191 (made by BYK Japan company) is mentioned, for example.

(光聚合抑制劑)   本發明之感光性樹脂組成物係亦可含有光聚合抑制劑。藉由添加光聚合抑制劑,可抑制因曝光所造成之感光性樹脂組成物內部所發生的自由基聚合時,對應聚合抑制劑的種類及其添加量之一定量的自由基聚合。(Photopolymerization inhibitor) The photosensitive resin composition of the present invention may also contain a photopolymerization inhibitor. By adding a photopolymerization inhibitor, it is possible to suppress radical polymerization that occurs inside the photosensitive resin composition due to exposure, and a certain amount of free radical polymerization corresponds to the type of polymerization inhibitor and the amount added.

(熱硬化催化劑)   本發明之感光性樹脂組成物中含有上述分子中具有2個以上環狀(硫基)醚基之熱硬化性成分之情況,亦可含有熱硬化催化劑。作為該等之熱硬化催化劑,可列舉出例如,咪唑、2-甲基咪唑、2-乙基咪唑、2-乙基-4-甲基咪唑、2-苯基咪唑、4-苯基咪唑、1-氰乙基-2-苯基咪唑、1-(2-氰乙基)-2-乙基-4-甲基咪唑、2-苯基-4,5-二羥基甲基咪唑等的咪唑衍生物;雙氰胺、苄基二甲基胺、4-(二甲基胺)-N,N-二甲基苄基胺、4-甲氧基-N,N-二甲基苄基胺、4-甲基-N,N-二甲基苄基胺等的胺化合物、己二酸二醯肼、癸二酸二醯肼等的聯胺化合物;三苯基膦等的磷化合物等。又,作為市售品,可列舉出例如四國化成工業股份公司製的curezol 2MZ-A、curezol 2P4MHZ、curezol 2PHZ-PW(皆為咪唑系化合物的商品名)、SAN-APRO股份公司製的U-CAT3503N、U-CAT3502T(皆為二甲基胺的嵌段異氰酸酯化合物的商品名)、DBU、DBN、U-CATSA102、U-CAT5002(皆為二環式脒化合物及其鹽)等。尤其是並非限定於此等,環氧樹脂或氧雜環丁烷化合物之熱硬化催化劑、或是若有促進選自由環氧基及氧雜環丁烷基之中之一種與羧基之反應者即可,可單獨1種抑或混合2種以上使用。又,可使用胍胺、乙醯胍胺、苯胍胺、三聚氰胺、2,4-二胺基-6-甲基丙烯醯氧基乙基-S-三嗪、2-乙烯基-2,4-二胺基-S-三嗪、2-乙烯基-4,6-二胺基-S-三嗪・異三聚氰酸加成物、2,4-二胺基-6-甲基丙烯醯氧基乙基-S-三嗪・異三聚氰酸加成物等的S-三嗪衍生物,較佳係將這些亦作為密著性賦予劑而起作用的化合物與前述熱硬化催化劑組合使用。(Thermosetting catalyst) When the photosensitive resin composition of the present invention contains a thermosetting component having two or more cyclic (thio)ether groups in the molecule, it may also contain a thermosetting catalyst. Examples of such thermosetting catalysts include imidazole, 2-methylimidazole, 2-ethylimidazole, 2-ethyl-4-methylimidazole, 2-phenylimidazole, 4-phenylimidazole, Imidazoles such as 1-cyanoethyl-2-phenylimidazole, 1-(2-cyanoethyl)-2-ethyl-4-methylimidazole, 2-phenyl-4,5-dihydroxymethylimidazole, etc. Derivatives; dicyandiamide, benzyldimethylamine, 4-(dimethylamine)-N,N-dimethylbenzylamine, 4-methoxy-N,N-dimethylbenzylamine , amine compounds such as 4-methyl-N,N-dimethylbenzylamine, hydrazine compounds such as dihydrazide adipate and dihydrazide sebacate, phosphorus compounds such as triphenylphosphine, etc. In addition, commercially available products include, for example, curezol 2MZ-A, curezol 2P4MHZ, and curezol 2PHZ-PW (all of which are trade names of imidazole-based compounds) manufactured by Shikoku Chemical Industry Co., Ltd. -CAT3503N, U-CAT3502T (all are trade names of blocked isocyanate compounds of dimethylamine), DBU, DBN, U-CATSA102, U-CAT5002 (all are bicyclic amidine compounds and their salts), etc. In particular, without being limited thereto, a thermosetting catalyst for an epoxy resin or an oxetane compound, or one that promotes a reaction between an epoxy group and an oxetane group and a carboxyl group is Yes, they can be used alone or in combination of two or more. In addition, guanamine, acetylguanamine, benzoguanamine, melamine, 2,4-diamino-6-methacryloxyethyl-S-triazine, 2-vinyl-2,4 -Diamino-S-triazine, 2-vinyl-4,6-diamino-S-triazine, isocyanuric acid adduct, 2,4-diamino-6-methylpropene For S-triazine derivatives such as acyloxyethyl-S-triazine and isocyanuric acid adducts, it is preferable to combine these compounds that also function as adhesion imparting agents with the aforementioned thermosetting catalyst Use in combination.

此等熱硬化催化劑的摻混量,係為一般的量的比例即可,例如以固體成分換算,相對於鹼可溶性樹脂100質量份,較佳為0.1~20質量份,更佳為0.5~10質量份。The blending amount of these thermosetting catalysts may be a general amount ratio. For example, in terms of solid content, it is preferably 0.1 to 20 parts by mass, more preferably 0.5 to 10 parts by mass, based on 100 parts by mass of the alkali-soluble resin. parts by mass.

(熱聚合抑制劑)   本發明之感光性樹脂組成物係亦可含有熱聚合抑制劑。熱聚合抑制劑係可用於防止本發明之感光性樹脂組成物的熱聚合或經時性地聚合。(Thermal polymerization inhibitor) The photosensitive resin composition of the present invention may also contain a thermal polymerization inhibitor. The thermal polymerization inhibitor can be used to prevent thermal polymerization or time-dependent polymerization of the photosensitive resin composition of the present invention.

(鏈轉移劑)   本發明之感光性樹脂組成物中,為提高感度,作為鏈轉移劑可含有公知的N苯基甘胺酸類、苯氧基乙酸類、硫代苯氧乙酸類、巰基噻唑等。(Chain transfer agent) In order to increase the sensitivity, the photosensitive resin composition of the present invention may contain known N-phenylglycine acids, phenoxyacetic acids, thiophenoxyacetic acids, mercaptothiazoles, etc. as chain transfer agents. .

(有機溶劑)   本發明之感光性樹脂組成物,為了成為良好的塗布狀態,亦可含有有機溶劑。作為有機溶劑,可使用公知慣用的溶劑。作為有機溶劑,甲基乙基酮、環己酮等的酮類;甲苯、二甲苯、四甲基苯等的芳香族烴類;溶纖劑(乙二醇單乙基醚)、甲基溶纖劑、丁基溶纖劑、卡必醇(carbitol)、甲基卡必醇、丁基卡必醇、丙二醇單甲基醚、二丙二醇單甲基醚(DPGME)、二丙二醇二甲基醚、三丙二醇單甲基醚等的二醇醚類;乙酸乙基、乙酸丁基、乳酸丁基、溶纖劑乙酸酯(乙二醇單乙基醚乙酸酯)、丁基溶纖劑乙酸酯、卡必醇乙酸酯(二乙二醇單乙基醚乙酸酯;EDGAC)、丁基卡必醇乙酸酯、丙二醇單甲基醚乙酸酯(PMA)、二丙二醇單甲基醚乙酸酯、碳酸丙烯酯等的酯類;辛烷、癸烷等的脂肪族烴類;石油醚、石油腦、氫化石油腦、芳香族石油系溶劑等的石油系溶劑等,可使用公知慣用的溶劑。此等的溶劑,係可單獨使用或組合二種類以上使用。(Organic solvent) The photosensitive resin composition of the present invention may contain an organic solvent in order to obtain a good coating state. As the organic solvent, known and commonly used solvents can be used. As organic solvents, ketones such as methyl ethyl ketone and cyclohexanone; aromatic hydrocarbons such as toluene, xylene and tetramethylbenzene; cellosolve (ethylene glycol monoethyl ether), methyl solvent Cellulose agent, butyl cellosolve, carbitol (carbitol), methyl carbitol, butyl carbitol, propylene glycol monomethyl ether, dipropylene glycol monomethyl ether (DPGME), dipropylene glycol dimethyl ether, three Glycol ethers such as propylene glycol monomethyl ether; ethyl acetate, butyl acetate, butyl lactate, cellosolve acetate (ethylene glycol monoethyl ether acetate), butyl cellosolve acetate, Carbitol acetate (diethylene glycol monoethyl ether acetate; EDGAC), butyl carbitol acetate, propylene glycol monomethyl ether acetate (PMA), dipropylene glycol monomethyl ether ethyl esters such as acid esters and propylene carbonate; aliphatic hydrocarbons such as octane and decane; petroleum-based solvents such as petroleum ether, naphtha, hydrogenated naphtha, aromatic petroleum-based solvents, etc. solvent. These solvents can be used alone or in combination of two or more.

(其他的添加成分)   本發明之感光性樹脂組成物中,除上述的成分以外,當然亦可應需要適當摻混公知慣用的成分,例如增黏劑、如高級脂肪酸系、苯乙烯・丙烯酸系、苯乙烯・馬來酸系、聚丙烯醯胺系、烷基烯酮二聚體系、烯基琥珀酸酐系、石油系、矽氧系之消泡劑、調平劑、耦合劑、氧化防止劑、防鏽劑、著色劑等。(Other Added Components) In the photosensitive resin composition of the present invention, in addition to the above-mentioned components, of course, it is also possible to appropriately mix well-known and commonly used components, such as tackifiers, such as higher fatty acid systems, styrene-acrylic systems, etc. , styrene-maleic acid-based, polyacrylamide-based, alkyl ketene dimerization system, alkenyl succinic anhydride-based, petroleum-based, silicone-based defoamers, leveling agents, coupling agents, oxidation inhibitors , antirust agent, coloring agent, etc.

本發明之感光性樹脂組成物中之上述各必須成分以及任意成分之混練分散,係可使用三輥或摻合機等的機械。以這種方式使各成分分散之感光性樹脂組成物,係以網版印刷法、棒塗布機、刮刀塗布機等適當的塗布方法塗布於基材上。The kneading and dispersing of the above-mentioned essential components and optional components in the photosensitive resin composition of the present invention can use machines such as a three-roller or a blender. The photosensitive resin composition in which the components are dispersed in this way is applied to the substrate by an appropriate coating method such as screen printing, bar coater, or knife coater.

塗布後,為了獲得指觸乾燥性,較佳係將藉由塗布而形成之塗膜進行乾燥。本發明之感光性樹脂組成物的乾燥條件,係為了獲得在這之後良好的乾燥塗膜或顯影性,故其特徵在於以80℃下以40~70℃進行乾燥。作為乾燥方法,雖非受到特別限定者,然而舉出一例,可舉出熱風循環式乾燥爐,具體而言係將待乾燥的基板等的樣品藉由托盤等的利用,設置於爐內的中央部,藉由空氣的循環或管道的調節,將裝置內的溫度在80℃和90℃±1℃之範圍內保持恆定。作為裝置名,可舉出YAMATO科學股份公司製的DF610等。又,與前述為相同效果,亦即,若可將裝置內的溫度在80℃和90℃±1℃之範圍內保持恆定,則亦可使用遠紅外線乾燥爐等。乾燥後之膜厚,亦即作為乾燥膜厚雖係無特別制限,於變得更容易顯影的觀點再加上印刷性更佳優良之觀點中,阻焊劑塗料等的絕緣性樹脂組成物較佳係10~150μm,更佳為20~60μm。另一方面,導電性漿料等的導電性樹脂組成物更佳為1~20μm,更佳為1~10μm。After coating, in order to obtain dryness to touch, it is preferable to dry the coating film formed by coating. The drying condition of the photosensitive resin composition of the present invention is to obtain a good dry coating film or developability thereafter, so it is characterized in that it is dried at 40 to 70°C at 80°C. The drying method is not particularly limited, but as an example, a hot air circulation drying furnace is mentioned. Specifically, samples such as substrates to be dried are placed in the center of the furnace by using a tray or the like. Department, by air circulation or pipeline adjustment, the temperature inside the device is kept constant within the range of 80°C and 90°C±1°C. Examples of the device name include DF610 manufactured by Yamato Science Co., Ltd., and the like. In addition, it has the same effect as above, that is, if the temperature in the device can be kept constant within the range of 80°C and 90°C±1°C, a far-infrared drying oven or the like can also be used. The film thickness after drying, that is, the dry film thickness is not particularly limited, but from the viewpoint of easier development and better printability, insulating resin compositions such as solder resist coatings are preferable It is 10-150 μm, more preferably 20-60 μm. On the other hand, the conductive resin composition such as conductive paste is more preferably 1 to 20 μm, more preferably 1 to 10 μm.

接下來,使用具有特定的曝光圖案之負像掩模,施予接觸曝光或非接觸曝光。作為曝光光源,係使用鹵素燈、高壓水銀燈、雷射光、金屬鹵素燈、燈黑、無電極燈等。作為曝光量係可為積算光量為200mJ/cm2 以下的低光量。此外,亦可不使用遮罩,藉由雷射直接成像裝置,於乾燥塗膜上形成圖案。Next, contact exposure or non-contact exposure is performed using a negative image mask having a specific exposure pattern. As the exposure light source, a halogen lamp, a high pressure mercury lamp, a laser light, a metal halide lamp, a lamp black, an electrodeless lamp, etc. are used. As the exposure amount, a low light amount such that the integrated light amount is 200 mJ/cm 2 or less may be used. In addition, it is also possible to form a pattern on the dry coating film by using a laser direct imaging device without using a mask.

接下來,藉由噴霧法、浸漬法等的顯影,使曝光後的塗膜成為圖案狀。作為使用本發明之感光性樹脂組成物所形成之乾燥塗膜的顯影液,可使用氫氧化鈉、氫氧化鉀、碳酸鈉、碳酸鉀、矽酸鈉等的鹼水溶液。特別是,濃度約為1.5質量%以下之稀鹼水溶液雖係適宜使用,然而只要感光性樹脂組成物中的羧基係受到皂化,且未硬化部(未曝光部)係經去除則可,故並非受到如同上述之顯影液之限定者。Next, the coating film after exposure is made into a pattern form by image development, such as a spray method and a dipping method. As a developer for a dry coating film formed using the photosensitive resin composition of the present invention, an aqueous alkali solution such as sodium hydroxide, potassium hydroxide, sodium carbonate, potassium carbonate, and sodium silicate can be used. In particular, although a dilute alkali aqueous solution with a concentration of about 1.5% by mass or less is suitable for use, as long as the carboxyl groups in the photosensitive resin composition are saponified and the unhardened portion (unexposed portion) is removed, it is not necessary. Subject to the same restrictions as the developer mentioned above.

依據本發明之感光性樹脂組成物,藉由使用稀鹼水溶液作為顯影液,可獲得對曝光後的塗膜之損傷少,且具有優良解析性之曝光後的塗膜。According to the photosensitive resin composition of the present invention, by using a dilute alkali aqueous solution as a developing solution, an exposed coating film with less damage to the exposed coating film and excellent resolution can be obtained.

因此,於本發明之一形態中,曝光後的塗膜的形成方法中所使用之顯影液,係於顯影後的圖案形成中,較佳係Na2 CO3 濃度為0.1~2.0質量%的稀鹼水溶液。特別是阻焊劑塗料等的絕緣性樹脂組成物為Na2 CO3 濃度為0.2~2.0質量%之稀鹼水溶液係更佳。另一方面,導電性漿料等的導電性樹脂組成物為Na2 CO3 濃度為0.1~1.0質量%的稀鹼水溶液係更佳。Therefore, in one aspect of the present invention, the developer used in the method of forming the coated film after exposure is used in the pattern formation after development, preferably a dilute solution with a Na 2 CO 3 concentration of 0.1 to 2.0% by mass. alkaline aqueous solution. In particular, it is more preferable that the insulating resin composition such as solder resist paint is a dilute alkaline aqueous solution with a Na 2 CO 3 concentration of 0.2 to 2.0% by mass. On the other hand, the conductive resin composition such as conductive paste is more preferably a dilute alkaline aqueous solution with a Na 2 CO 3 concentration of 0.1 to 1.0% by mass.

顯影後,為了去除不需要的顯影液,較佳係進行水洗或酸中和。After image development, in order to remove unnecessary developing solution, it is preferable to perform water washing or acid neutralization.

接著,使所獲得之曝光後的塗膜藉由熱或紫外線照射而正式硬化。藉此,可形成印刷性優良,且為密著性及抗裂性優良之硬化膜之硬化物。熱硬化的情況,作為熱硬化溫度,較佳為180℃以下,更佳為150℃以下,再更佳為140℃以下,特佳為130℃以下。另一方面,藉由紫外線照射而硬化的情況,較佳係500~3000mJ/cm2 ,更佳係500~2000mJ/cm2Next, the obtained exposed coating film is fully cured by heat or ultraviolet irradiation. Thereby, it is possible to form a cured product having excellent printability, a cured film having excellent adhesion and crack resistance. In the case of thermosetting, the thermosetting temperature is preferably at most 180°C, more preferably at most 150°C, even more preferably at most 140°C, particularly preferably at most 130°C. On the other hand, when hardened by ultraviolet irradiation, it is preferably 500-3000 mJ/cm 2 , more preferably 500-2000 mJ/cm 2 .

本發明之感光性樹脂組成物係可乾膜化後使用亦可以液狀使用。以液狀使用之情況,使用1液性或2液性以上亦可。進行乾膜化之情況,係將本發明之感光性樹脂組成物塗布於載體薄膜上,乾燥後獲得所形成之樹脂層。將本發明之感光性樹脂組成物作為乾膜使用之情況的例子係表示如下。The photosensitive resin composition of the present invention can be used as a dry film or as a liquid. When using in liquid form, it is also possible to use 1-component or 2-component or more. In the case of dry film formation, the photosensitive resin composition of the present invention is coated on a carrier film, and the formed resin layer is obtained after drying. An example of the case where the photosensitive resin composition of the present invention is used as a dry film is shown below.

乾膜係具有依載體薄膜、樹脂層及應需要所使用之可剝離之保護薄膜的順序層合之結構者。樹脂層係將本發明之感光性樹脂組成物於載體薄膜或保護薄膜上塗布及乾燥後所形成之層。於載體薄膜上形成樹脂層後,將保護薄膜於其上層合,或於保護薄膜上形成樹脂層,並將此層合體層合於載體薄膜,即可獲得乾膜。The dry film has a structure in which a carrier film, a resin layer, and a peelable protective film are laminated in sequence. The resin layer is a layer formed by coating and drying the photosensitive resin composition of the present invention on a carrier film or a protective film. After the resin layer is formed on the carrier film, a protective film is laminated thereon, or a resin layer is formed on the protective film, and the laminate is laminated on the carrier film to obtain a dry film.

作為載體薄膜,係例如,可使用如厚度2~150μm的聚對苯二甲酸乙二酯或聚萘二甲酸乙二酯的聚酯薄膜等的熱可塑性薄膜。As the carrier film, for example, a thermoplastic film such as a polyester film of polyethylene terephthalate or polyethylene naphthalate having a thickness of 2 to 150 μm can be used.

樹脂層係可將感光性樹脂組成物藉由刮刀塗布機、模唇塗布機、缺角輪塗布機、薄膜塗布機等,於載體薄膜或保護薄膜,例如,以厚度10~150μm均一地塗布後乾燥而形成。Resin layer system The photosensitive resin composition can be uniformly coated on a carrier film or a protective film, for example, with a thickness of 10-150 μm by a knife coater, a die lip coater, a chip coater, a film coater, etc. formed by drying.

作為保護薄膜,係可使用,例如,聚乙烯薄膜、聚丙烯酯薄膜等,然而較佳係與樹脂層的接著力比載體薄膜小者。As the protective film, for example, a polyethylene film, a polypropylene film, etc. can be used, but those having a smaller adhesive force with the resin layer than the carrier film are preferable.

使用乾膜於基材上製作硬化物之硬化膜係,例如,剝離保護薄膜,重疊樹脂層與經形成電路之基材,使用貼合機等貼合,於經形成電路之基材上形成樹脂層。對於所形成之樹脂層,若進行與前述相同之曝光、顯影、正式硬化,則可形成硬化膜之硬化物。載體薄膜於曝光前或曝光後剝離皆可。Use a dry film to form a hardened film on a substrate, for example, peel off the protective film, overlap the resin layer with the substrate on which the circuit is formed, and use a laminating machine to bond the substrate to form a resin on the substrate on which the circuit is formed. Floor. The formed resin layer is subjected to the same exposure, development, and full-scale curing as described above to form a cured product of a cured film. The carrier film may be peeled off before exposure or after exposure.

此等的步驟中,作為基材,除預先以銅等形成有電路的印刷配線板或可撓性印刷配線板外,可使用紙酚樹脂、紙環氧樹脂、玻璃布環氧樹脂、玻璃聚醯亞胺、玻璃布/不織布環氧樹脂、玻璃布/紙環氧樹脂、合成纖維環氧樹脂、氟樹脂・聚乙烯・聚苯醚,聚苯醚・氰酸酯等的高頻率電路用貼銅層合板等之材質者之全部等級(FR-4等)的貼銅層合板、其他可舉例如金屬基板、聚醯亞胺薄膜、聚對苯二甲酸乙二酯(PET)薄膜、聚萘二甲酸乙二酯(PEN)薄膜、玻璃基板、陶瓷基板、晶圓板等。In these steps, as a base material, in addition to a printed wiring board or a flexible printed wiring board on which a circuit is formed with copper or the like in advance, paper phenol resin, paper epoxy resin, glass cloth epoxy resin, glass polystyrene resin, etc. can be used. Adhesives for high-frequency circuits such as imide, glass cloth/non-woven epoxy resin, glass cloth/paper epoxy resin, synthetic fiber epoxy resin, fluororesin・polyethylene・polyphenylene ether, polyphenylene ether・cyanate, etc. Copper-clad laminates of all grades (FR-4, etc.) of materials such as copper laminates, others such as metal substrates, polyimide films, polyethylene terephthalate (PET) films, polyethylene naphthalene Ethylene diformate (PEN) film, glass substrate, ceramic substrate, wafer plate, etc.

此外,本發明中,除上述基材外,可使用無耐熱性之樹脂製的基材。具體而言,作為樹脂製的基材,係例如,可列舉出聚醯亞胺、聚酯系樹脂、聚醚碸(PES)、聚苯乙烯(PS)、聚甲基丙烯酸甲酯(PMMA)、聚碳酸酯(PC)、聚醯胺(PA)、聚丙烯酯(PP)、聚氧二甲苯(PPO)等,可適宜地使用聚酯系樹脂。In addition, in the present invention, a resin-made substrate having no heat resistance may be used in addition to the above-mentioned substrate. Specifically, examples of the base material made of resin include polyimide, polyester resin, polyether resin (PES), polystyrene (PS), polymethyl methacrylate (PMMA) , polycarbonate (PC), polyamide (PA), polypropylene (PP), polyoxyxylene (PPO) and the like, polyester-based resins can be suitably used.

本發明之感光性樹脂組成物或乾膜係適宜作為印刷配線板製造用,更佳為用於形成永久被膜。此時,使用本發明之感光性樹脂組成物或乾膜,藉由前述的製造方法等形成硬化物。本發明之感光性樹脂組成物或乾膜的樹脂層具有絕緣性之情況,適宜使用於形成阻焊劑或包覆層或層間絕緣層。此外,本發明之感光性樹脂組成物亦可用於形成錫堤。   另一方面,本發明之感光性樹脂組成物或乾膜的樹脂層係導電性之情況,則適宜使用於導電電路、電極、電磁波遮蔽形成、導電性接著劑等。 [實施例]The photosensitive resin composition or dry film of the present invention is suitable for manufacturing printed wiring boards, more preferably for forming permanent coatings. At this time, a cured product is formed by the above-mentioned production method or the like using the photosensitive resin composition or dry film of the present invention. When the resin layer of the photosensitive resin composition or dry film of the present invention has insulating properties, it is suitably used to form a solder resist, a cover layer, or an interlayer insulating layer. In addition, the photosensitive resin composition of the present invention can also be used to form tin banks. On the other hand, when the resin layer of the photosensitive resin composition or dry film of the present invention is conductive, it is suitable for use in conductive circuits, electrodes, electromagnetic wave shielding, conductive adhesives, and the like. [Example]

接著將舉出實施例以進一步詳細地說明本發明,然而本發明並非受到此等實施例之限定者。Next, examples will be given to further describe the present invention in detail, but the present invention is not limited by these examples.

[感光性樹脂組成物的調製]   將下述表1及表2所記載的各成分進行摻混、攪拌,並使用三輥磨進行3流程。之後,以使漿料黏度成為250dPa・s±20Pa・s之方式添加作為溶劑之卡必醇乙酸酯,獲得同表中記載之各感光性樹脂組成物。[Preparation of Photosensitive Resin Composition] The components listed in the following Tables 1 and 2 were blended and stirred, and three steps were performed using a three-roll mill. Thereafter, carbitol acetate as a solvent was added so that the slurry viscosity became 250 dPa·s±20 Pa·s, and each photosensitive resin composition described in the same table was obtained.

(鹼可溶性樹脂1的合成)

Figure 02_image007
上述一般式(IV)中X為C(CH3 )2 ,將平均聚合度n為3.3之雙酚A型環氧樹脂(環氧當量650g/eq、軟化點80℃)371份與環氧氯丙烷925份溶解於二甲亞碸462.5份後,於攪拌下在70℃以100分鐘添加98.5%NaOH52.8份。添加後進一步在70℃下進行3小時之反應。反應結束後,添加水250份進行水洗。油水分離後,由油層將二甲亞碸之大部分及過量的未反應環氧氯丙烷在減壓下蒸餾回收、使含有殘留的副生成鹽與二甲亞碸之反應生成物溶解於甲基異丁基酮750份,再添加30%NaOH 10份,在70℃進行1小時反應。反應結束後,以水200份進行2次水洗。油水分離後,由油層將甲基異丁基酮蒸餾回收,得到環氧當量287g/eq、軟化點65℃的環氧樹脂(a)。獲得的環氧樹脂(a)由環氧基當量計算,為前述起始物質雙酚A型環氧樹脂中之醇性羥基3.3個中約3.1個被環氧化者。將該環氧樹脂(a)310份及卡必醇乙酸酯282份置入燒瓶,在90℃進行加熱・攪拌,進行溶解。得到的溶液一旦冷卻至60℃,加入丙烯酸72份(1莫耳)、甲基對苯二酚0.5份、三苯基膦2份,加熱至100℃,進行約60小時反應,得到酸價為0.2mgKOH/g之反應物。於其中加入四氫苯二甲酐140份(0.92莫耳),加熱至90℃,進行反應,得到鹼可溶性樹脂1的樹脂溶液。生成物的固體成分濃度為64質量%,固體成分酸價為100mgKOH/g。(Synthesis of Alkali-Soluble Resin 1)
Figure 02_image007
In the general formula (IV) above, X is C(CH 3 ) 2 , and 371 parts of bisphenol A epoxy resin (epoxy equivalent 650g/eq, softening point 80°C) with an average degree of polymerization n of 3.3 and epoxy chloride After dissolving 925 parts of propane in 462.5 parts of dimethylsulfoxide, 52.8 parts of 98.5% NaOH were added at 70° C. for 100 minutes with stirring. After the addition, a reaction was further performed at 70° C. for 3 hours. After completion of the reaction, 250 parts of water were added and washed with water. After the oil and water are separated, most of the dimethyloxide and excess unreacted epichlorohydrin are distilled and recovered from the oil layer under reduced pressure, and the reaction product containing the residual by-product salt and dimethyloxide is dissolved in the methyl 750 parts of isobutyl ketone was added, and 10 parts of 30% NaOH was added, and it reacted at 70 degreeC for 1 hour. After completion of the reaction, washing with water was performed twice with 200 parts of water. After oil-water separation, methyl isobutyl ketone was distilled and recovered from the oil layer to obtain an epoxy resin (a) having an epoxy equivalent of 287 g/eq and a softening point of 65°C. The obtained epoxy resin (a) is calculated from the equivalent weight of epoxy groups, and is about 3.1 of the 3.3 alcoholic hydroxyl groups in the aforementioned starting material bisphenol A type epoxy resin that have been epoxidized. 310 parts of this epoxy resin (a) and 282 parts of carbitol acetate were put into a flask, and it heated and stirred at 90 degreeC, and melt|dissolved. Once the obtained solution was cooled to 60°C, 72 parts (1 mole) of acrylic acid, 0.5 parts of methyl hydroquinone, and 2 parts of triphenylphosphine were added, heated to 100°C, and reacted for about 60 hours to obtain an acid value of 0.2mgKOH/g reactant. 140 parts (0.92 mol) of tetrahydrophthalic anhydride was added there, and it heated at 90 degreeC, and it reacted, and the resin solution of alkali-soluble resin 1 was obtained. The solid content concentration of the product was 64% by mass, and the solid content acid value was 100 mgKOH/g.

(鹼可溶性樹脂2的合成)   在安裝有攪拌裝置、還流管之2L燒瓶中,置入作為分子中具有2個以上環氧基之環氧化合物(a)之ADEKA股份公司製EP-4300E(2官能雙酚A型環氧樹脂、環氧當量:185.0g/當量)370.0g、作為分子中具有乙烯性不飽和基之單羧氧化合物(b)之丙烯酸(分子量:72.06) 144.1g、作為熱聚合抑制劑之對苯二酚單甲基醚1.10g及作為反應催化劑之三苯基膦1.61g,在98℃之溫度下,反應至反應液的酸價成為0.5mg・KOH/g以下為止,獲得環氧羧酸酯化合物(理論分子量:548.2)。   接下來,於此反應液中添加作為反應用溶媒之甲基乙基酮627.6g、作為熱聚合抑制劑之對苯二酚單甲基醚3.59g、作為具有羧基之二醇化合物之2,2-雙(二羥甲基)-丙酸(分子量:134.1)222.9g,使其昇溫至45℃。將作為二異氰酸酯化合物之異佛爾酮二異氰酸酯(分子量:222.3) 394.4g以不使反應溫度超過65℃的方式緩緩地滴入此溶液中。滴入結束後,使溫度上升至80℃,並藉由紅外線吸收光譜測定法,使其反應6小時至2250cm-1 附近的吸收消失為止,獲得鹼可溶性樹脂2的樹脂溶液。固體成分為65質量%,固體成分酸價為80mgKOH/g。(Synthesis of Alkali-Soluble Resin 2) In a 2L flask equipped with a stirring device and a return pipe, EP-4300E (2 Functional bisphenol A epoxy resin, epoxy equivalent: 185.0g/equivalent) 370.0g, acrylic acid (molecular weight: 72.06) 144.1g as the monocarboxylate compound (b) having an ethylenically unsaturated group in the molecule, as heat 1.10g of hydroquinone monomethyl ether as a polymerization inhibitor and 1.61g of triphenylphosphine as a reaction catalyst are reacted at a temperature of 98°C until the acid value of the reaction solution becomes below 0.5mg・KOH/g. An epoxy carboxylate compound (theoretical molecular weight: 548.2) was obtained. Next, 627.6 g of methyl ethyl ketone as a reaction solvent, 3.59 g of hydroquinone monomethyl ether as a thermal polymerization inhibitor, and 2,2 - 222.9 g of bis(dimethylol)-propionic acid (molecular weight: 134.1), and the temperature was raised to 45°C. 394.4 g of isophorone diisocyanate (molecular weight: 222.3) which is a diisocyanate compound was dripped gradually in this solution so that reaction temperature may not exceed 65 degreeC. After the dropping, the temperature was raised to 80° C., and reacted by infrared absorption spectrometry for 6 hours until the absorption around 2250 cm −1 disappeared, to obtain a resin solution of alkali-soluble resin 2 . The solid content was 65% by mass, and the solid content acid value was 80 mgKOH/g.

(鹼可溶性樹脂的酸解離定數(pKa)的測定方法)   於100ml的燒杯中,將經調製或準備之鹼可溶性樹脂1~3的樹脂溶液分別精秤為0.5g,之後使其溶解於乙二醇丁基醚溶液50ml中。將此溶液以0.1mol/L乙醇性水酸鉀溶液進行滴定。滴定裝置係使用平沼產業股份公司製之自動滴定裝置(COM-1500)(半滴定法)。酸解離定數(pKa)係定義為半當量點(當量點的滴定量的一半)。鹼可溶性樹脂1~3的pKa,係各自如下述表1所示。(Measurement method of acid dissociation constant (pKa) of alkali-soluble resin) In a 100ml beaker, the prepared or prepared resin solutions of alkali-soluble resins 1 to 3 were accurately weighed to 0.5g, and then dissolved in ethyl alcohol Diol butyl ether solution in 50ml. This solution was titrated with 0.1 mol/L ethanolic potassium hydrate solution. As a titration device, an automatic titration device (COM-1500) manufactured by Hiranuma Sangyo Co., Ltd. (half titration method) was used. The acid dissociation constant (pKa) is defined as the half equivalence point (half of the titrated amount at the equivalence point). The pKa's of the alkali-soluble resins 1 to 3 are shown in Table 1 below, respectively.

(接觸角的測定)   將銅厚35μm的整面銅箔之基材以拋光輥研磨後,進行水洗,並乾燥。於此基材上,以網版印刷法將實施例1~9及比較例1~5之各組成物整面塗布。之後,針對實施例1~7及比較例1~3的各組成物,係以80℃的熱風循環式乾燥爐(YAMATO科學股份公司製DF610)將乾燥時間變更為40、50、60、70分鐘,針對實施例8~9及比較例4~5的各組成物,係以90℃的熱風循環式乾燥爐(YAMATO科學股份公司製DF610)將乾燥時間變更為20、25、30、35分鐘,各自進行乾燥,獲得95mm×75mm的乾燥塗膜。待乾燥之各基材藉由托盤的利用,設置於爐內的中央部,藉由空氣的循環或管道的調節將裝置內的溫度調整在80℃乾燥的情況及90℃乾燥的情況皆為±1℃之範圍內。   水的接觸角係將DropMaster DM300作為接觸角計,並將FAMAS(兩者均由協和界面科學股份公司製)作為界面測定解析統合系統使用,以下述條件及方法藉由真圓擬合法進行測定及解析。   ・啟動界面測定解析統合系統,並將CA/PD控制器開機。此時,將控制器的畫面上的「視野」選擇為「標準」。接下來,將水置入塑膠注射器,於該尖端安裝不鏽鋼製的針(22號尺寸),於評估面滴下。滴下的時候,確認接觸角計上附屬的相機的焦點是否正確。滴下後馬上按下控制器畫面上的「測定」按鈕。   ・於測定中所使用的水:以裝置(奧璐佳瑙股份公司製PureLite PRO-0250-003)所製備之處理水水質為0.7μS/cm以下的離子交換水   ・水的滴下量:2μL   ・測定溫度:20℃   ・鏡頭的視野範圍:標準   接著,將水滴下不久之後的接觸角於水平放置的前述乾燥塗膜上的任意5個位置進行測定,並將該平均值定義為水的接觸角。此處,任意的5個位置的接觸角的值,係為各自藉由按下「測定」按鈕所自動算出的值。   又,針對實施例1~7及比較例1~3的各組成物,係求得將以80℃40分鐘進行乾燥後之乾燥塗膜上的水的接觸角作為A(°),且將以80℃70分鐘進行乾燥後之乾燥塗膜上的水的接觸角作為B(°)之情況之下述式:   R80 (%)=|(B-A)/A|×100   所表示之變化率R80 (%)。   又,針對實施例8~9及比較例4~5的各組成物,係求得將以90℃20分鐘進行乾燥後之乾燥塗膜上的水的接觸角作為C(°),且將以90℃35分鐘進行乾燥後之乾燥塗膜上的水的接觸角作為D(°)之情況之下述式:   R90 (%)=|(D-C)/C|×100   所表示之變化率R90 (%)。   水的接觸角及變化率係如表1所示。(Measurement of Contact Angle) A base material of a full-surface copper foil having a copper thickness of 35 μm was ground with a buff roll, washed with water, and dried. On this substrate, the compositions of Examples 1-9 and Comparative Examples 1-5 were coated on the entire surface by screen printing method. After that, for each composition of Examples 1-7 and Comparative Examples 1-3, the drying time was changed to 40, 50, 60, and 70 minutes in a hot air circulation drying oven (DF610 manufactured by Yamato Science Co., Ltd.) at 80°C. For each composition of Examples 8-9 and Comparative Examples 4-5, the drying time was changed to 20, 25, 30, and 35 minutes with a hot air circulation drying oven (DF610 manufactured by YAMATO Science Co., Ltd.) at 90°C, Each was dried to obtain a dried coating film of 95 mm×75 mm. The substrates to be dried are placed in the center of the furnace by using trays, and the temperature in the device is adjusted at 80°C and 90°C by air circulation or pipeline adjustment. within 1°C. The contact angle of water uses DropMaster DM300 as a contact angle meter and FAMAS (both manufactured by Kyowa Interface Science Co., Ltd.) as an integrated system for interface measurement and analysis, and is measured and analyzed by the true circle fitting method under the following conditions and methods .・Start the integrated system of interface measurement and analysis, and start the CA/PD controller. In this case, select "Standard" for "Field of View" on the screen of the controller. Next, water was put into a plastic syringe, a stainless steel needle (size 22) was attached to the tip, and dripped on the evaluation surface. When dropping, check whether the focus of the camera attached to the contact angle meter is correct. Immediately after dropping, press the "Measurement" button on the controller screen.・Water used in the measurement: Ion-exchanged water with a water quality of 0.7 μS/cm or less prepared by a device (PureLite PRO-0250-003 manufactured by Olucano Co., Ltd.) ・Amount of water dropped: 2 μL ・Measurement temperature: 20°C ・Viewing range of the lens: standard Next, measure the contact angle immediately after the water drop on the above-mentioned dry coating film placed horizontally at any 5 positions, and define the average value as the water contact angle . Here, the values of the contact angles at five arbitrary positions are values automatically calculated by pressing the "Measurement" button respectively. In addition, for each composition of Examples 1 to 7 and Comparative Examples 1 to 3, the contact angle of water on the dried coating film after drying at 80° C. for 40 minutes was obtained as A (°), and expressed as After drying at 80°C for 70 minutes, the contact angle of water on the dry coating film is taken as B (°): The change rate R represented by R 80 (%)=|(BA)/A|×100 80 (%). In addition, for each composition of Examples 8 to 9 and Comparative Examples 4 to 5, the contact angle of water on the dried coating film after drying at 90°C for 20 minutes was obtained as C (°), and was expressed as The following formula for the contact angle of water on the dry coating film after drying at 90°C for 35 minutes is D (°): R 90 (%)=|(DC)/C|×100 The rate of change R 90 (%). The water contact angle and rate of change are shown in Table 1.

(顯影管理幅)   將銅厚35μm的整面銅箔之基材以拋光輥研磨後,進行水洗,並乾燥。於此基材上、以網版印刷法將實施例1~9及比較例1~5之各組成物整面塗布。之後,針對實施例1~7及比較例1~3的各組成物,係以80℃的熱風循環式乾燥爐(YAMATO科學股份公司製DF610)將乾燥時間變更為40、50、60、70分鐘,針對實施例8~9及比較例4~5的各組成物,係以90℃的熱風循環式乾燥爐(YAMATO科學股份公司製DF610)將乾燥時間變更為20、25、30、35分鐘各自進行乾燥,獲得乾燥塗膜。將所獲得之乾燥塗膜,各自於實施例1~4、8及比較例1~2、4使用30℃的1質量%Na2 CO3 水溶液、於實施例5~7、9及比較例3、5使用30℃的0.2質量%Na2 CO3 水溶液,以噴壓0.2MPa的條件下進行60秒鐘之顯影,以各自的乾燥時間所獲得之乾燥塗膜是否可顯影,及,測驗使其乾燥時不會發生因熱霧化所造成之顯影不良之時間。目視銅上,若硬化性樹脂組成物的成分沒有殘留下來作為殘渣,則定義為可顯影,將定義為可顯影之乾燥時間作為評估基準。此定義為可顯影之最長乾燥時間稱為顯影管理幅,若此為越長時間,則因乾燥所造成之幅度係越廣,藉由基板作製步驟之製造管理係變得容易。   評估基準係如同下述。所獲得之結果表示於表1。   ○:80℃60分鐘以上或90℃30分鐘以上   × :80℃未滿60分鐘或90℃未滿30分鐘(Development Management Width) The base material of the entire surface copper foil with a copper thickness of 35 μm was ground with a polishing roll, washed with water, and dried. On this substrate, each composition of Examples 1-9 and Comparative Examples 1-5 was coated on the entire surface by screen printing method. After that, for each composition of Examples 1-7 and Comparative Examples 1-3, the drying time was changed to 40, 50, 60, and 70 minutes in a hot air circulation drying oven (DF610 manufactured by Yamato Science Co., Ltd.) at 80°C. , for each composition of Examples 8~9 and Comparative Examples 4~5, the drying time was changed to 20, 25, 30, and 35 minutes respectively in a hot air circulation drying oven (DF610 manufactured by YAMATO Science Co., Ltd.) at 90°C. Drying is performed to obtain a dry coating film. The obtained dried coating films were respectively used in Examples 1~4, 8 and Comparative Examples 1~2, 4 using 30°C 1% by mass Na 2 CO 3 aqueous solution, in Examples 5~7, 9 and Comparative Example 3 5. Use 0.2% by mass Na 2 CO 3 aqueous solution at 30°C to develop for 60 seconds under the condition of spray pressure of 0.2 MPa, and check whether the dried coating film obtained by the respective drying time can be developed, and test to make it When drying, there will be no poor development time caused by thermal fogging. Visually inspecting the copper, if the components of the curable resin composition do not remain as residues, it is defined as developable, and the drying time defined as developable is used as an evaluation standard. This definition means that the longest drying time that can be developed is called the development management width. The longer the time is, the wider the width caused by drying is, and the manufacturing management through the substrate manufacturing step becomes easier. The evaluation criteria are as follows. The obtained results are shown in Table 1. ○: Over 60 minutes at 80°C or over 30 minutes at 90°C ×: Less than 60 minutes at 80°C or less than 30 minutes at 90°C

(解析性1評估用試驗片作製法)   將具有銅厚35μm之30μm/40μm的直線與間隔(L/S)之電路圖案之基材以拋光輥研磨後,進行水洗,並乾燥。於此基材上,以網版印刷法將下述表1及2所記載之感光性樹脂組成物之中之實施例1~4、8及比較例1~2、4的各組成物使用200網眼的聚酯網版整面塗布。之後,以80℃的熱風循環式乾燥爐(YAMATO科學股份公司製DF610)以乾燥時間30分鐘進行乾燥,獲得乾燥後之膜厚為20μm的乾燥塗膜。之後,將所獲得之乾燥塗膜,使用作為光源之搭載金屬鹵素燈的曝光裝置(股份公司ORC MANUFACTURING CO., LTD.製HMW-680-GW20),介隔30μm/40μm的直線與間隔(L/S)的負像掩模,以最適曝光量曝光圖案。此處,最適曝光量係定義為將由上述所獲得之乾燥塗膜,使用搭載金屬鹵素燈的曝光裝置,介隔感度為21段的梯型板進行曝光,並使用液溫30℃的1質量%Na2 CO3 水溶液,以噴壓0.2MPa的條件下進行60秒鐘之顯影時,殘存之梯型板的圖案成為6段之曝光量。接下來,使用液溫30℃的1質量%的Na2 CO3 水溶液進行顯影、水洗。最後,以150℃×60分鐘使其硬化,製作解析性1評估用試驗片。(Preparation method of test piece for analytical performance 1 evaluation) A substrate having a circuit pattern of 30 μm/40 μm lines and spaces (L/S) with a copper thickness of 35 μm was ground with a polishing roll, washed with water, and dried. On this substrate, each composition of Examples 1~4, 8 and Comparative Examples 1~2, 4 among the photosensitive resin compositions recorded in the following Tables 1 and 2 was used for 200 Mesh polyester screen full surface coating. Then, it dried with the 80 degreeC hot-air circulation type drying oven (Yamato Science Co., Ltd. product DF610) for 30 minutes of drying time, and obtained the dry coating film whose film thickness after drying was 20 micrometers. After that, the obtained dried coating film was subjected to an exposure device equipped with a metal halide lamp as a light source (HMW-680-GW20 manufactured by ORC MANUFACTURING CO., LTD.), with a line and a space of 30 μm/40 μm (L /S) negative image mask to expose the pattern at the optimum exposure. Here, the optimum exposure dose is defined as exposing the dry coating film obtained above using an exposure device equipped with a metal halide lamp, and using a trapezoidal plate with a sensitivity of 21 steps, and using 1% by mass of a liquid temperature of 30°C When Na 2 CO 3 aqueous solution is developed for 60 seconds under the condition of spray pressure of 0.2 MPa, the remaining pattern of the trapezoidal plate becomes the exposure amount of 6 stages. Next, development and water washing were performed using a 1% by mass Na 2 CO 3 aqueous solution at a liquid temperature of 30°C. Finally, it was made to harden at 150 degreeC x 60 minutes, and the test piece for analytical 1 evaluation was produced.

(解析性1)   於試驗片的30μm/40μm的直線與間隔(L/S)中,評估解析性。   ○:線無缺損,亦無底切。   × :線有缺損或底切。(Resolution 1) The resolubility was evaluated in the line and space (L/S) of 30μm/40μm in the test piece. ○: There is no thread defect and no undercut. × : The thread is missing or undercut.

(解析性2評估用試驗片作製法)   於PET薄膜(東麗股份公司製LUMIRROR T60厚度125μm)上、下述表1及2所記載之感光性樹脂組成物之中,將實施例5~7、9及比較例3、5的各組成物,將評估用的各導電性樹脂組成物使用380網眼的聚酯網版以使乾燥後之膜厚成為5μm之方式整面塗布,接下來,針對實施例5~7及比較例3的各組成物係以80℃的熱風循環式乾燥爐(YAMATO科學股份公司製DF610)30分鐘、針對實施例9及比較例5的各組成物係以90℃的熱風循環式乾燥爐(YAMATO科學股份公司製DF610)15分鐘,各自進行乾燥,形成指觸乾燥性良好的乾燥塗膜。之後,將所獲得之乾燥塗膜,使用作為光源之搭載金屬鹵素燈的曝光裝置(股份公司ORC MANUFACTURING CO.,LTD.製HMW-680-GW20),介隔30μm/40μm的直線與間隔(L/S)的負像掩模,以最適曝光量曝光圖案。此處,最適曝光量係定義為將由上述所獲得之乾燥塗膜,使用搭載金屬鹵素燈的曝光裝置,介隔感度為21段的梯型板,並使用液溫30℃的0.2質量% Na2 CO3 水溶液,以噴壓0.2MPa的條件下進行60秒鐘之顯影時,殘存之梯型板的圖案成為6段之曝光量。接下來,使用液溫30℃濃度為0.2質量%之Na2 CO3 水溶液進行顯影、水洗。最後,以150℃×60分鐘使其硬化,製作解析性評估用試驗片。(Preparation method of test piece for analysis 2 evaluation) On a PET film (LUMIRROR T60 thickness 125 μm manufactured by Toray Co., Ltd.), among the photosensitive resin compositions described in the following Tables 1 and 2, Examples 5 to 7 were mixed , 9, and Comparative Examples 3 and 5, each conductive resin composition for evaluation was coated on the entire surface using a 380-mesh polyester screen so that the film thickness after drying became 5 μm, and then, For each composition of Examples 5 to 7 and Comparative Example 3, use a hot air circulation drying oven (DF610 manufactured by YAMATO Science Co., Ltd.) at 80° C. for 30 minutes, and for each composition of Example 9 and Comparative Example 5, use 90 Each was dried in a hot air circulating drying oven (DF610 manufactured by Yamato Science Co., Ltd.) at °C for 15 minutes to form a dry coating film with good dryness to the touch. After that, the obtained dried coating film was subjected to an exposure device equipped with a metal halide lamp as a light source (HMW-680-GW20 manufactured by ORC MANUFACTURING CO., LTD.), with a line and a space of 30 μm/40 μm (L /S) negative image mask to expose the pattern at the optimum exposure. Here, the optimum exposure dose is defined as using an exposure device equipped with a metal halide lamp for the dry coating film obtained above, a trapezoidal plate with a separation sensitivity of 21, and using 0.2% by mass Na 2 at a liquid temperature of 30°C. When CO 3 aqueous solution is developed for 60 seconds under the condition of a spray pressure of 0.2 MPa, the remaining pattern of the trapezoidal plate becomes the exposure amount of 6 stages. Next, development and water washing were performed using an aqueous solution of Na 2 CO 3 having a liquid temperature of 30° C. and a concentration of 0.2% by mass. Finally, it was made to harden at 150 degreeC x 60 minutes, and the test piece for analytical evaluation was produced.

(解析性2)   於試驗片的30μm/40μm的直線與間隔(L/S)中,評估解析性。   ○:線無缺損,亦無底切。   × :線有缺損或底切。(Resolution 2) The resolubility was evaluated in the 30μm/40μm line and space (L/S) of the test piece. ○: There is no thread defect and no undercut. × : The thread is missing or undercut.

(顯影液的汙染評估)   將實施例1~9及比較例1~5的各組成物於100ml的螺紋管中精秤為4g後,針對實施例1~7及比較例1~3係以80℃的熱風循環式乾燥爐(YAMATO科學股份公司製DF610)70分鐘、針對實施例8~9及比較例4~5係以90℃的熱風循環式乾燥爐(YAMATO科學股份公司製DF610)35分鐘,各自進行乾燥,獲得乾燥塗膜。放入乾燥塗膜之螺紋管中,針對實施例1~4、8及比較例1~2、4係以1質量%Na2 CO3 水溶液,針對實施例5~7、9及比較例3、5係以0.2質量%Na2 CO3 水溶液,各自添加30g,蓋上蓋子使其攪拌8分鐘後,於20℃下靜置40分鐘。之後,藉由目視確認螺紋管的液面上是否附著固體物質。評估基準係如同下述。所獲得之結果表示於上述表中。   ◎:完全沒有固體物質,螺紋管中的液體為透明。   ○:雖然沒有固體物質,然而螺紋管中液體並非透明。   △:僅有少量固體物質,螺紋管中的液體亦非透明。   × :有大量固體物質,螺紋管中的液體亦非透明。(Contamination evaluation of developing solution) After each composition of Examples 1-9 and Comparative Examples 1-5 was precisely weighed to 4g in a 100ml threaded tube, 80% was used for Examples 1-7 and Comparative Examples 1-3 ℃ for 70 minutes in a hot air circulation drying oven (DF610 manufactured by Yamato Scientific Co., Ltd.), and for Examples 8 to 9 and Comparative Examples 4 to 5, use a hot air circulation drying oven (DF610 manufactured by Yamato Scientific Co., Ltd.) at 90 °C for 35 minutes , each dried to obtain a dry coating film. Put into the threaded tube of dry coating film, for embodiment 1~4, 8 and comparative example 1~ 2 , 4 system with 1 mass % Na2CO3 aqueous solution, for embodiment 5~7, 9 and comparative example 3, In the 5 series, 30 g of 0.2% by mass Na 2 CO 3 aqueous solution was added, the lid was closed and stirred for 8 minutes, and then left to stand at 20° C. for 40 minutes. After that, it was checked visually whether solid matter adhered to the liquid surface of the threaded tube. The evaluation criteria are as follows. The results obtained are shown in the above table. ◎: There is no solid substance at all, and the liquid in the threaded tube is transparent. ○: Although there is no solid substance, the liquid in the threaded tube is not transparent. △: There is only a small amount of solid matter, and the liquid in the threaded tube is not transparent. × : There is a large amount of solid matter, and the liquid in the threaded tube is not transparent.

(顯影裝置的篩眼堵塞)   將於「顯影液的汙染」中經過評估之螺紋管再進一步於20℃下靜置40分鐘。之後,通過孔徑10μm的過濾器,藉由目視評估過濾器中之固體成分的堵塞狀況。   ◎:過濾器中沒有固體成分的堵塞。   ○:過濾器中僅有少量固體成分的堵塞。   × :過濾器中有大量固體成分的堵塞。(Clogging of the developing device's mesh) The threaded tube evaluated in "Contamination of the developer" was further left to stand at 20°C for 40 minutes. Afterwards, through a filter with a pore size of 10 μm, the clogging status of the solid components in the filter was visually evaluated. ◎: There is no clogging of solid components in the filter. ○: There is only a small amount of solid clogging in the filter. ×: The filter is blocked by a large amount of solid components.

試驗結果總括表示於表1。此外,關於表1中的各成分中未標示單位之數值者,係表示質量份。The test results are summarized in Table 1. In addition, about the numerical value which does not indicate the unit among each component in Table 1, it represents a mass part.

Figure 02_image009
Figure 02_image009

此外,表1中的*1~*24係表示以下成分。又,表1中「-」之記載,係表示未評估。   *1:含羧基之雙酚A型環氧丙烯酸酯樹脂,固體成分64質量%,固體成分酸價100mgKOH/g,參照鹼可溶性樹脂1的合成,表中的摻混量為樹脂溶液的摻混量   *2:含羧基之雙酚A型胺基甲酸酯環氧丙烯酸酯樹脂,固體成分51質量%,固體成分酸價85mgKOH/g,參照鹼可溶性樹脂2的合成,表中的摻混量為樹脂溶液的摻混量   *3:CYCLOMER P(ACA)Z230AA、DAICEL-ALLNEX股份公司製之含羧基之感光性共聚合樹脂溶液,固體成分53.0質量%,固體成分酸價40mgKOH/g,表中的摻混量係樹脂溶液的摻混量   *4:反應性稀釋劑,日本化藥股份公司製KAYARAD DPHA,二季戊四醇五丙烯酸酯與二季戊四醇六丙烯酸酯的混合物   *5:反應性稀釋劑,日本化藥股份公司製KAYARAD DPCA-60,二季戊四醇五丙烯酸酯與二季戊四醇六丙烯酸酯的混合物的己內酯改質物   *6:反應性稀釋劑,新中村化學工業股份公司製NK OLIGO U-4HA,將六亞甲基二異氰酸酯與2-羥基-3-丙烯醯氧基丙基甲基丙烯酸酯反應之4官能胺基甲酸酯(甲基)丙烯酸酯   *7:雙醯基氧化膦系光聚合起始劑,IGM Resins公司製Omnirad 819   *8:肟酯系光聚合起始劑,BASF JAPAN公司製IRGACURE OXE02   *9:熱硬化性成分,三菱化學股份公司製jER828,雙酚A型環氧樹脂   *10:由下述結構式所表示之環氧樹脂(環氧當量:300~330g/eq)

Figure 02_image011
*11:由下述結構式所表示之環氧樹脂(環氧當量:300~330g/eq)
Figure 02_image013
*12:熱硬化性成分,共榮社化學股份公司製Epolight 40E,乙二醇二環氧丙酯   *13:熱硬化性成分,旭化成化學品股份公司製DURANATE MF-B60B,嵌段異氰酸酯   *14:2-苯基-4,5-二羥基甲基咪唑,四國化成工業股份公司製curezol 2PHZ-PW   *15:C.I.Pigment Blue 15:3   *16:C.I.Pigment Yellow 147   *17:矽氧系消泡劑,信越化學工業股份公司製KS-66   *18:分散劑,BYK・JAPAN公司製DISPERBYK-191   *19:有機酸,關東化學股份公司製2,2'-硫代二乙酸   *20:填充劑,堺化學工業股份公司製Baryace B-30、硫酸鋇   *21:填充劑,Admatechs股份公司製SO-E2,球狀二氧化矽   *22:填充劑,日本滑石股份公司製SG-2000,滑石   *23:填充劑,球狀銀粉末(最大粒徑30μm以下、平均粒徑2μm,此外,平均粒徑係藉由使用電子顯微鏡(SEM)10,000倍觀察之隨機的10個粒子的平均粒徑。)   *24:溶劑、出光興產股份公司製Ipzole 150,石油系溶劑In addition, *1~*24 in Table 1 represent the following components. In addition, the description of "-" in Table 1 means that it has not been evaluated. *1: Carboxyl-containing bisphenol A type epoxy acrylate resin, solid content 64% by mass, solid content acid value 100mgKOH/g, referring to the synthesis of alkali-soluble resin 1, the blending amount in the table is the blending amount of the resin solution Quantity*2: Carboxyl group-containing bisphenol A urethane epoxy acrylate resin, solid content 51% by mass, solid content acid value 85mgKOH/g, refer to the synthesis of alkali-soluble resin 2, the blending amount in the table is the blending amount of the resin solution *3: CYCLOMER P (ACA) Z230AA, carboxyl group-containing photosensitive copolymer resin solution manufactured by DAICEL-ALLNEX Co., Ltd., solid content 53.0% by mass, solid content acid value 40mgKOH/g, in the table The blending amount is the blending amount of the resin solution *4: Reactive diluent, Nippon Kayaku Co., Ltd. KAYARAD DPHA, a mixture of dipentaerythritol pentaacrylate and dipentaerythritol hexaacrylate *5: Reactive diluent, Japan KAYARAD DPCA-60 manufactured by Kayaku Co., Ltd., caprolactone-modified substance of a mixture of dipentaerythritol pentaacrylate and dipentaerythritol hexaacrylate *6: reactive diluent, NK OLIGO U-4HA manufactured by Shin-Nakamura Chemical Industry Co., Ltd., Tetrafunctional urethane (meth)acrylate obtained by reacting hexamethylene diisocyanate with 2-hydroxy-3-acryloxypropyl methacrylate*7: Bisacylphosphine oxide-based photopolymerization Initiator, Omnirad 819 manufactured by IGM Resins *8: Oxime ester-based photopolymerization initiator, IRGACURE OXE02 manufactured by BASF JAPAN Corporation *9: Thermosetting component, jER828 manufactured by Mitsubishi Chemical Corporation, bisphenol A type epoxy resin *10: Epoxy resin represented by the following structural formula (epoxy equivalent: 300~330g/eq)
Figure 02_image011
*11: Epoxy resin represented by the following structural formula (epoxy equivalent: 300~330g/eq)
Figure 02_image013
*12: Thermosetting component, Epolight 40E manufactured by Kyoeisha Chemical Co., Ltd., ethylene glycol diglycidyl ester*13: Thermosetting component, Duranate MF-B60B manufactured by Asahi Kasei Chemical Co., Ltd., blocked isocyanate*14 : 2-Phenyl-4,5-dihydroxymethylimidazole, curezol 2PHZ-PW manufactured by Shikoku Chemical Industry Co., Ltd. *15: CIPigment Blue 15: 3 *16: CIPigment Yellow 147 *17: Silicone-based defoamer , KS-66 manufactured by Shin-Etsu Chemical Co., Ltd. *18: Dispersant, DISPERBYK-191 manufactured by BYK・JAPAN Corporation *19: Organic acid, 2,2'-thiodiacetic acid manufactured by Kanto Chemical Co., Ltd. *20: Filler, Sakai Chemical Industry Co., Ltd. Baryace B-30, barium sulfate *21: Filler, Admatechs Co., Ltd. SO-E2, spherical silica *22: Filler, Nippon Talc Co., Ltd. SG-2000, talc *23 : Filler, spherical silver powder (maximum particle size 30 μm or less, average particle size 2 μm, and the average particle size is the average particle size of 10 random particles observed with an electron microscope (SEM) at 10,000 times.) * 24: Solvent, Ipzole 150 manufactured by Idemitsu Kosan Co., Ltd., petroleum-based solvent

如同上述表1所示,可知藉由水的接觸角A、C為75.0°以上,且接觸角的變化率R80 (實施例1~7)、R90 (實施例8~9)為3.0以下之實施例1~9的感光性樹脂組成物,可獲得滿足正式硬化後之塗膜的高解析性的同時,亦可防止顯影步驟中顯影液的汙染或因沉澱物所造成之顯影裝置之堵塞之感光性樹脂組成物。另一方面,可知藉由比較例1及2的感光性樹脂組成物,由於水的接觸角A、C為未滿75.0°,故即使接觸角的變化率R80 (比較例1~2)、R90 (比較例4)為3.0以下,亦無法獲得滿足正式硬化後之塗膜的高解析性的同時,亦可防止顯影步驟中顯影液的汙染或因沉澱物所造成之顯影裝置之堵塞之感光性樹脂組成物。又,可知藉由比較例3、5的感光性樹脂組成物,水的接觸角A、C雖係為75.0°以上,然而由於接觸角的變化率R80 (比較例3)、R90 (比較例5)超過3.0,故無法獲得滿足正式硬化後之塗膜的高解析性的同時,亦可防止顯影步驟中顯影液的汙染或因沉澱物所造成之顯影裝置之堵塞之感光性樹脂組成物。As shown in the above Table 1, it can be seen that the contact angles A and C of water are 75.0° or more, and the change rates R 80 (Examples 1-7) and R 90 (Examples 8-9) of the contact angle are 3.0 or less The photosensitive resin compositions of Examples 1 to 9 can not only obtain high resolution of the coating film after formal hardening, but also prevent the contamination of the developing solution in the developing step or the clogging of the developing device caused by deposits. The photosensitive resin composition. On the other hand, it can be seen that with the photosensitive resin compositions of Comparative Examples 1 and 2, since the contact angles A and C of water are less than 75.0°, even if the rate of change of the contact angle R 80 (Comparative Examples 1-2), R 90 (Comparative Example 4) is below 3.0, and the high resolution of the coating film after formal hardening cannot be obtained. At the same time, it can also prevent the contamination of the developing solution in the developing step or the clogging of the developing device caused by sediment. Photosensitive resin composition. Also, it can be seen that with the photosensitive resin compositions of Comparative Examples 3 and 5, although the contact angles A and C of water are 75.0° or more, due to the change rate of the contact angle R 80 (Comparative Example 3), R 90 (Comparative Example Example 5) If it exceeds 3.0, it is impossible to obtain a photosensitive resin composition that satisfies the high resolution of the coating film after the official hardening, and can also prevent the contamination of the developing solution in the developing step or the clogging of the developing device caused by deposits .

(比電阻值)   於PET薄膜(東麗股份公司製LUMIRROR T60厚度125μm)上,將實施例6及9的各組成物使用380網眼的聚酯網版整面塗布,接下來,於熱風循環式乾燥爐(YAMATO科學股份公司製DF610)於80℃下乾燥30分鐘,形成指觸乾燥性良好的乾燥塗膜。之後,將所獲得之乾燥塗膜,使用作為光源之搭載金屬鹵素燈的曝光裝置((股)ORC MANUFACTURING CO., LTD.製HMW-680-GW20),介隔4mm×100mm的導電圖案電路形成用之負像掩模,以最適曝光量曝光圖案。此處,最適曝光量係定義為將由上述所獲得之乾燥塗膜,使用搭載金屬鹵素燈的曝光裝置,介隔感度為21段的梯型板,並使用液溫30℃的0.2質量% Na2 CO3 水溶液,以噴壓0.2MPa的條件下進行60秒鐘之顯影時,殘存之梯型板的圖案成為6段之曝光量。接下來,使用液溫30℃之Na2 CO3 濃度為0.2質量%的碳酸鈉水溶液進行顯影、水洗。最後,以150℃×60分鐘使其硬化,製作比電阻評估用試驗片。使用所述試驗片測定電阻值與膜厚,算出比電阻。算出之結果,實施例6及9皆獲得4.0×10-5 (Ω・cm)之低的比電阻值。根據上述內容,可知將如同2,2’-硫代二乙酸之有機酸使用於導電性樹脂組成物,會變得更具有導電性。(Specific resistance value) On a PET film (LUMIRROR T60 thickness 125 μm manufactured by Toray Co., Ltd.), each composition of Examples 6 and 9 was coated on the entire surface using a 380-mesh polyester screen, and then circulated in hot air. Drying oven (DF610 manufactured by Yamato Science Co., Ltd.) was performed at 80° C. for 30 minutes to form a dry coating film with good dryness to the touch. After that, the obtained dried coating film was formed by using an exposure device equipped with a metal halide lamp as a light source (HMW-680-GW20 manufactured by ORC MANUFACTURING CO., LTD.), and forming a conductive pattern circuit with an interval of 4 mm x 100 mm. Use the negative image mask to expose the pattern with the optimum exposure. Here, the optimum exposure dose is defined as using an exposure device equipped with a metal halide lamp for the dry coating film obtained above, a trapezoidal plate with a separation sensitivity of 21, and using 0.2% by mass Na 2 at a liquid temperature of 30°C. When CO 3 aqueous solution is developed for 60 seconds under the condition of a spray pressure of 0.2 MPa, the remaining pattern of the trapezoidal plate becomes the exposure amount of 6 stages. Next, image development and water washing were performed using an aqueous sodium carbonate solution having a Na 2 CO 3 concentration of 0.2% by mass at a liquid temperature of 30°C. Finally, it was made to harden at 150 degreeC x 60 minutes, and the test piece for specific resistance evaluation was produced. The resistance value and the film thickness were measured using the test piece, and the specific resistance was calculated. As a result of calculation, Examples 6 and 9 both obtained a low specific resistance value of 4.0×10 -5 (Ω·cm). From the above, it can be seen that the use of an organic acid such as 2,2'-thiodiacetic acid in a conductive resin composition becomes more conductive.

Claims (5)

一種感光性樹脂組成物,其係含有鹼可溶性樹脂及導電性填充劑的感光性樹脂組成物,其特徵在於,將藉由感光性樹脂組成物的塗布而形成之塗膜以80℃ 40分鐘進行乾燥後之乾燥塗膜上的水的接觸角作為A(°),且將藉由感光性樹脂組成物的塗布而形成之塗膜以80℃ 70分鐘進行乾燥後之乾燥塗膜上的水的接觸角作為B(°)之情況中,A為75.0°以上,且以R80(%)=|(B-A)/A|×100所表示之變化率R80為3.0以下。 A photosensitive resin composition, which is a photosensitive resin composition containing an alkali-soluble resin and a conductive filler, characterized in that the coating film formed by coating the photosensitive resin composition is carried out at 80°C for 40 minutes The contact angle of water on the dry coating film after drying is A (°), and the contact angle of water on the dry coating film after drying the coating film formed by coating the photosensitive resin composition at 80°C for 70 minutes When the contact angle is B(°), A is 75.0° or more, and the rate of change R 80 represented by R 80 (%)=|(BA)/A|×100 is 3.0 or less. 一種感光性樹脂組成物,其係含有鹼可溶性樹脂及導電性填充劑的感光性樹脂組成物,其特徵在於,將藉由感光性樹脂組成物的塗布而形成之塗膜以90℃ 20分鐘進行乾燥後之乾燥塗膜上的水的接觸角作為C(°),且將藉由感光性樹脂組成物的塗布而形成之塗膜以90℃ 35分鐘進行乾燥後之乾燥塗膜上的水的接觸角作為D(°)之情況中,C為75.0°以上,且以R90(%)=|(D-C)/C|×100所表示之變化率R90為3.0 以下。 A photosensitive resin composition, which is a photosensitive resin composition containing an alkali-soluble resin and a conductive filler, characterized in that the coating film formed by coating the photosensitive resin composition is carried out at 90°C for 20 minutes The contact angle of water on the dry coating film after drying is C (°), and the contact angle of water on the dry coating film after drying the coating film formed by coating the photosensitive resin composition at 90°C for 35 minutes When the contact angle is D (°), C is 75.0° or more, and the rate of change R 90 represented by R 90 (%)=|(DC)/C|×100 is 3.0 or less. 一種乾膜,其特徵在於,其係具有將請求項1或2所記載之感光性樹脂組成物於薄膜上塗布、乾燥所得之樹脂層。 A dry film, characterized in that it has a resin layer obtained by coating and drying the photosensitive resin composition described in claim 1 or 2 on a film. 一種硬化物,其特徵在於,其係使請求項1或2所記載之感光性樹脂組成物,或,請求項3所記載之乾膜之樹脂層硬化而得。 A cured product characterized in that it is obtained by curing the photosensitive resin composition described in Claim 1 or 2, or the resin layer of the dry film described in Claim 3. 一種印刷配線板,其特徵在於其係具有如請求項4所記載之硬化物。 A printed wiring board characterized in that it has the cured product described in Claim 4.
TW107124217A 2017-08-09 2018-07-13 Photosensitive resin composition, dry film, cured product and printed wiring board TWI787305B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017154489A JP6789193B2 (en) 2017-08-09 2017-08-09 Photosensitive resin compositions, dry films, cured products, and printed wiring boards
JP2017-154489 2017-08-09

Publications (2)

Publication Number Publication Date
TW201910917A TW201910917A (en) 2019-03-16
TWI787305B true TWI787305B (en) 2022-12-21

Family

ID=65416538

Family Applications (1)

Application Number Title Priority Date Filing Date
TW107124217A TWI787305B (en) 2017-08-09 2018-07-13 Photosensitive resin composition, dry film, cured product and printed wiring board

Country Status (3)

Country Link
JP (1) JP6789193B2 (en)
CN (1) CN109388020A (en)
TW (1) TWI787305B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116670593A (en) * 2020-12-25 2023-08-29 富士胶片株式会社 Method for producing laminate, method for producing circuit wiring, and transfer film
CN113174030A (en) * 2021-06-03 2021-07-27 东胜化学(上海)有限公司 PCB solder resist ink resin and preparation method thereof

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200935175A (en) * 2007-10-01 2009-08-16 Taiyo Ink Mfg Co Ltd Photosensitive resin composition and curing article thereof
JP2013156506A (en) * 2012-01-31 2013-08-15 Taiyo Ink Mfg Ltd Photosensitive resin composition and printed wiring board
TW201530252A (en) * 2014-01-27 2015-08-01 Taiyo Ink Suzhou Co Ltd Alkali developable photosensitive resin composition, dry film, cured object, and printed circuit board

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000155415A (en) * 1998-11-19 2000-06-06 Hitachi Chem Co Ltd Photosensitive resin composition, photosensitive film and resist pattern forming method
JP2003183401A (en) * 2001-12-20 2003-07-03 Showa Denko Kk Curable resin composition and cured product thereof
JP2004012627A (en) * 2002-06-04 2004-01-15 Sumitomo Bakelite Co Ltd Photosensitive silver paste and picture display device using same
JP2007186601A (en) * 2006-01-13 2007-07-26 Toyo Ink Mfg Co Ltd Photosensitive material
JP5514608B2 (en) * 2010-03-31 2014-06-04 富士フイルム株式会社 Actinic ray-sensitive or radiation-sensitive resin composition and pattern forming method using the same
JP5953644B2 (en) * 2010-08-19 2016-07-20 日立化成株式会社 Polyhydroxyurethane compound and method for producing the same, curable resin composition, photosensitive element, method for forming resist pattern, and method for producing printed wiring board
JP2012168436A (en) * 2011-02-16 2012-09-06 Toppan Printing Co Ltd Photosensitive white composition for color filter, and color filter
KR20140148400A (en) * 2012-03-28 2014-12-31 도레이 카부시키가이샤 Photosensitive conductive paste and method for producing conductive pattern
JP5899082B2 (en) * 2012-08-08 2016-04-06 富士フイルム株式会社 Pattern forming method and electronic device manufacturing method using the same
CN104737239B (en) * 2012-10-22 2018-01-30 太阳控股株式会社 Conductive composition, electrode, plasma display and contact panel
JP6248273B2 (en) * 2014-04-15 2017-12-20 株式会社野田スクリーン Water repellent cured coating film, curable resin composition solution, and curable coating
JP5882510B2 (en) * 2014-06-30 2016-03-09 太陽インキ製造株式会社 Photosensitive dry film and method for producing printed wiring board using the same
KR101951669B1 (en) * 2014-09-30 2019-02-25 후지필름 가부시키가이샤 Pattern forming method, resist pattern, and method for producing electronic device
JP6813267B2 (en) * 2015-06-03 2021-01-13 太陽インキ製造株式会社 Etching resist composition and dry film
JP2016194563A (en) * 2015-03-31 2016-11-17 太陽インキ製造株式会社 Conductive resin composition and conductive circuit
JP6620923B2 (en) * 2015-06-05 2019-12-18 Dic株式会社 (Meth) acrylate resin and resist member
JP6788372B2 (en) * 2015-06-05 2020-11-25 太陽インキ製造株式会社 Alkaline developable resin composition, dry film, cured product and printed wiring board
JP6569049B2 (en) * 2015-10-16 2019-09-04 株式会社野田スクリーン Crosslinked fluorine-containing polystyrene derivative coating film, crosslinking group-containing fluorine-containing polystyrene derivative and crosslinkable resin composition solution
JP6421161B2 (en) * 2015-11-27 2018-11-07 株式会社タムラ製作所 Photosensitive resin composition

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200935175A (en) * 2007-10-01 2009-08-16 Taiyo Ink Mfg Co Ltd Photosensitive resin composition and curing article thereof
JP2013156506A (en) * 2012-01-31 2013-08-15 Taiyo Ink Mfg Ltd Photosensitive resin composition and printed wiring board
TW201530252A (en) * 2014-01-27 2015-08-01 Taiyo Ink Suzhou Co Ltd Alkali developable photosensitive resin composition, dry film, cured object, and printed circuit board

Also Published As

Publication number Publication date
JP2019032474A (en) 2019-02-28
CN109388020A (en) 2019-02-26
TW201910917A (en) 2019-03-16
JP6789193B2 (en) 2020-11-25

Similar Documents

Publication Publication Date Title
US9596754B2 (en) Dry film, printed wiring board using same, method for producing printed wiring board, and flip chip mounting substrate
KR102624058B1 (en) Curable resin composition, dry film, cured product and printed wiring board
KR101693900B1 (en) Photocurable resin composition, dry film and cured product of the photocurable resin composition, and printed wiring board using the photocurable resin composition, the dry film, and the cured product
JP6877202B2 (en) Negative photocurable resin composition, dry film, cured product and printed wiring board
KR101372202B1 (en) Photocurable resin composition
JP6767153B2 (en) Dry film, hardened material and printed wiring board
JP5439075B2 (en) Photocurable resin composition
JP6767154B2 (en) Dry film, hardened material and printed wiring board
JP5952904B2 (en) Alkali-developable photosensitive resin composition, dry film, cured product, and printed wiring board
JP2022025366A (en) Dry film, dry film set, cured product of the same, and electronic component
TWI787305B (en) Photosensitive resin composition, dry film, cured product and printed wiring board
TWI673332B (en) Curable resin composition, dry film, cured product, and printed wiring board
TWI726016B (en) Curable resin composition, dry film, cured product, and printed wiring board
JP6748478B2 (en) Dry film, cured product and printed wiring board
JP6995469B2 (en) Curable resin composition, dry film, cured product and printed wiring board
JP7043568B2 (en) Photosensitive resin compositions, dry films, cured products, and printed wiring boards
JP7216480B2 (en) Photocurable thermosetting resin composition, dry film, cured product, and printed wiring board
TWI819431B (en) Solder resist composition, dry film, printed wiring board and method for producing them
CN109563222B (en) Photocurable resin composition, dry film, cured product, and printed wiring board
JP6336802B2 (en) Method for manufacturing conductive circuit
JP7383388B2 (en) Curable compositions, dry films, cured products, and electronic components
TW202136404A (en) Curable resin composition, dry film, cured product and electronic component capable of preventing yellowing during thermal curing and long-term yellowing caused by ultraviolet rays
CN117500663A (en) Laminated structure, cured product of resin layer in the laminated structure, electronic component, and method for forming cured product
TW202409110A (en) Hardening compositions, dry films, hardened materials and electronic parts