TWI785995B - Nozzle device - Google Patents

Abstract

A spray head device comprises a spray head and a liquid inlet pipe. The shower head defines a chamber, an air inlet connected to the top of the chamber, at least one first discharge hole connected to the bottom of the chamber, and at least one discharge hole connected to the bottom of the chamber and connected to the first discharge hole. spaced apart second spray holes. The liquid inlet pipe is arranged on the spray head and partly located in the chamber, and the liquid inlet pipe defines at least one first liquid spray hole connected to the chamber and corresponding to the top of the first spray hole, and at least one connected to the chamber. The chamber corresponds to the second spray hole above the second spray hole. The spray head device has a simple overall structure, small volume, light weight, and low manufacturing cost, and can be used in cleaning occasions with small space. In addition, the process of transferring the nozzle device by the robotic arm is stable and not easy to shake, which can improve the cleaning effect of cleaning the substrate.

Description

Nozzle device

The invention relates to a shower head device, in particular to a shower head device for cleaning substrates.

For example, in the semiconductor manufacturing process, the wafer will be processed through multiple different processes. After the wafer is processed by each process, there will be residues such as chemical agents on the surface of the wafer. Therefore, it is necessary to clean the wafer during the cleaning process. Spray cleaning fluid to remove residue from wafers.

The nozzle device in the existing cleaning process is to connect two nozzles together through a connecting structure, so that the nozzles can spray cleaning liquid on the wafer respectively. However, the method of connecting the shower heads through the connection structure makes the overall structure of the shower head device complex, bulky and heavy, resulting in high manufacturing cost. In addition, due to the large volume and heavy weight of the shower head device, it is easy to shake violently when the robot arm transfers the shower head device and moves relative to the wafer.

Therefore, one object of the present invention is to provide a spray head device which can overcome at least one disadvantage of the prior art.

Therefore, the spray head device of the present invention includes a spray head and a liquid inlet pipe.

The shower head defines a chamber, an air inlet connected to the top of the chamber, at least one first discharge hole connected to the bottom of the chamber, and at least one discharge hole connected to the bottom of the chamber and connected to the first discharge hole. spaced apart second spray holes. The liquid inlet pipe is arranged on the spray head and partly located in the chamber, and the liquid inlet pipe defines at least one first liquid spray hole connected to the chamber and corresponding to the top of the first spray hole, and at least one connected to the chamber. The chamber corresponds to the second spray hole above the second spray hole.

In some embodiments, the center of the first spray hole is located on an inclined first axis, the center of the second spray hole is located on an inclined second axis, the first axis intersects the second axis and An acute angle is formed so that the first spray hole and the second spray hole are flared outward.

In some embodiments, the liquid inlet pipe includes a split pipe section arranged in the chamber, the center of the split pipe section is aligned with the center of the air inlet hole along a longitudinal direction, and the split pipe section has a top-to-bottom abutting against the nozzle. end, the split pipe section is formed with the first liquid spray hole and the second liquid spray hole respectively located on the opposite side of the bottom end, and the split pipe section separates the chamber into a first guide channel and a second Guide flow channel, the top of the first guide flow channel and the top of the second guide flow channel communicate with each other and communicate with the air inlet, the bottom of the first guide flow channel and the bottom of the second guide flow channel are not communicate with each other, the first guide channel communicates between the first spray hole and the first spray hole, and the second guide channel communicates between the second spray hole and the second spray hole .

In some embodiments, the split pipe segment has a split tip aligned with the center of the air inlet hole.

In some embodiments, the liquid inlet tube defines a liquid inlet hole, the liquid inlet tube includes a tube wall disposed in the chamber and surrounding the liquid inlet hole, the tube wall thickness is not uniform and has a The bottom end of the liquid hole abuts against the maximum thickness portion of the spray head, and the tube wall is formed with the first liquid spray hole and the second liquid spray hole which are connected to the liquid inlet hole and are respectively located on opposite sides of the maximum thickness portion.

In some embodiments, the maximum thickness portion has a bottom end that abuts against the spray head, and the tube wall also has a first flow guiding slope that is obliquely connected to the bottom end, and a first flow guide slope that is obliquely connected to the bottom end. abutting against the second inclined flow guide surface at the bottom, the first inclined flow guide surface forms an acute angle with the second inclined flow guide surface, the first liquid spray hole has a first liquid injection port formed on the first inclined flow guide surface, The second spray hole has a second spray port formed on the second guide slope.

In some embodiments, the first flow guide slope has a first blocking surface between the first liquid spray port and the abutting bottom, and the second flow guide slope has a first blocking surface between the second liquid spray port. The second blocking surface between the opening and the abutting bottom end.

In some implementation aspects, the tube wall also has a splitter tip, and the splitter tip is aligned with the center of the inlet hole along a longitudinal direction.

In some embodiments, the shower head includes a body, and two cover plates disposed on the body, the body is formed with the air inlet hole, the first spray hole and the second spray hole, and the cover plates and The body jointly defines the chamber, and the cover plates are respectively fixedly connected to opposite ends of the pipe wall.

In some implementations, the liquid inlet tube includes a bottom end, a first flow guide slope, and a second flow guide slope located in the chamber, the bottom end is against the nozzle, and the bottom end is against the nozzle. The first diversion slope and the second diversion slope are connected obliquely to the abutting bottom and form an acute angle, and the first liquid spray hole and the second liquid spray hole are respectively formed on the first diversion slope and the second diversion slope The two guide slopes are respectively located on opposite sides of the abutting bottom.

In some implementations, the first liquid spray hole has a first liquid spray port formed on the first flow guide slope, and the second liquid spray hole has a second spray hole formed on the second flow guide slope. liquid port, the first diversion inclined surface has a first blocking surface between the first liquid jet port and the abutting bottom, and the second diversion inclined plane has a first barrier surface between the second liquid jet port and the top Reach the second blocking face between the bottom ends.

In some embodiments, the first spray hole is larger than the first liquid spray hole, and the second spray hole is larger than the second liquid spray hole.

In some embodiments, the spray head includes a first bottom surface and a second bottom surface, the first bottom surface and the second bottom surface are each rectangular, the first spray hole has a first spray port, and the second spray hole There is a second outlet, the first outlet is elongated and obliquely formed on the first bottom surface, and the second outlet is elongated and obliquely formed on the second bottom surface.

In some embodiments, the shower head defines a plurality of first ejection holes and a plurality of second ejection holes, the first ejection holes are arranged at intervals along a first horizontal direction, and the second ejection holes are arranged along the first horizontal direction. The horizontal direction is arranged at intervals, each of the first spray holes is spaced apart from the corresponding second spray holes along a second horizontal direction perpendicular to the first horizontal direction, and the liquid inlet pipe defines a plurality of first spray holes and a plurality of second spray holes, the first spray holes are arranged at intervals along the first horizontal direction, the second spray holes are arranged at intervals along the first horizontal direction, each of the first spray holes The holes are spaced apart from the corresponding second spray holes along the second horizontal direction.

In some embodiments, each of the first spray holes is larger than the corresponding first liquid spray hole, and each of the second spray holes is larger than the corresponding second liquid spray hole.

In some embodiments, the spray head includes a first bottom surface and a second bottom surface, each of the first spray holes has a first spray port formed on the first bottom surface, and each of the second spray holes has a The second ejection port formed on the second bottom surface, the first ejection port and the second ejection port each have an elongated shape.

In some implementations, the first bottom surface and the second bottom surface are each rectangular, the length extension direction of the first bottom surface and the length extension direction of the second bottom surface are parallel to the first horizontal direction, and the first ejection The first ejection ports of the holes are obliquely formed on the first bottom surface with the same inclination direction, and the second ejection ports of the second ejection holes are obliquely formed on the second bottom surface with the same inclination direction.

In some implementations, the projections of the first nozzles of every two adjacent first nozzles in the second horizontal direction partially overlap, and the projections of every two adjacent second nozzles Projections of the second ejection ports in the second horizontal direction partially overlap.

The present invention has at least the following effects: the overall structure of the nozzle device is simple, small in size, light in weight, and low in manufacturing cost, and can be applied to cleaning occasions with small space. In addition, the process of transferring the nozzle device by the robotic arm is stable and not easy to shake, which can improve the cleaning effect of cleaning the substrate.

Before the present invention is described in detail, it should be noted that in the following description, similar elements are denoted by the same numerals.

Referring to FIG. 1 , an embodiment of a showerhead device 200 of the present invention is, for example, used in semiconductor manufacturing processes to clean a substrate 1 such as a wafer (as shown in FIG. 9 ). The spray head device 200 includes a spray head 2 and a liquid inlet pipe 3 disposed on the spray head 2 .

For the convenience of subsequent description, a first horizontal direction X of the shower head device 200, a second horizontal direction Y perpendicular to the first horizontal direction X, and a vertical direction perpendicular to the first horizontal direction X and the second horizontal direction are defined. Vertical Z of Y. The first horizontal direction X takes the front and rear directions as an example, the direction indicated by the arrow in FIG. 1 is the front, and the reverse direction is the rear. The second horizontal direction Y takes the left and right direction as an example, the direction indicated by the arrow in FIG. 1 is left, and the opposite direction is right. The longitudinal direction Z is the up-down direction, the direction indicated by the arrow in FIG. 1 is up, and the opposite direction is down.

Referring to FIG. 2 , FIG. 3 , FIG. 4 and FIG. 5 , the spray head 2 includes a body 21 and two cover plates 22 disposed on the body 21 . The body 21 has a casing 23 , a top tube 24 disposed at the top of the casing 23 , and a nozzle 25 disposed at the bottom of the casing 23 . The cover plates 22 cover opposite ends of the housing 23 along the first horizontal direction X, and each of the cover plates 22 is fixedly connected to the housing 23 by screw locking. The casing 23 , the nozzle 25 and the cover plates 22 jointly define a chamber 26 for the liquid inlet pipe 3 to pass through. Each of the cover plates 22 is formed with a perforation 221 for the liquid inlet pipe 3 to pass through. The housing 23 and the top pipe 24 define an air inlet 27 connected to the top of the chamber 26 . The top pipe 24 is used to connect with a gas supply source (not shown), the gas supply source can supply gas into the chamber 26 through the air inlet 27, and the gas is dry compressed air (Clean Dry Air, CDA ) as an example, but not limited to.

Referring to Fig. 4, Fig. 5 and Fig. 6, the nozzle 25 has a connection block 250 connected to the casing 23, a first nozzle arm 251 extending downward and obliquely to the left from the bottom end of the connection block 250, and a The bottom end of the connecting block 250 faces downward and obliquely extends to the right with the second nozzle arm 252 . The first nozzle arm 251 and the second nozzle arm 252 are bifurcated and spaced apart along the second horizontal direction Y. The first nozzle arm 251 and the connection block 250 jointly define a plurality of first spray holes 253 communicated with the bottom of the chamber 26 and arranged at intervals along the first horizontal direction X. As shown in FIG. The second nozzle arm 252 and the connection block 250 jointly define a plurality of second spray holes 254 communicated with the bottom of the chamber 26 and arranged at intervals along the first horizontal direction X. As shown in FIG. Each of the first spray holes 253 is centered on an inclined first axis L1. Each of the second spray holes 254 is centered on an inclined second axis L2. The first axis L1 intersects the second axis L2 and forms an acute angle A1. In this embodiment, the acute angle A1 may be any angle between 6.5 degrees and 8.5 degrees, preferably, the acute angle A1 is 7.5 degrees, but not limited thereto.

Referring to FIG. 2 , FIG. 3 , FIG. 4 and FIG. 5 , the liquid inlet pipe 3 extends along the first horizontal direction X and passes through the shell 23 and the cover plates 22 of the body 21 . The liquid inlet pipe 3 includes a shunt pipe section 31 disposed in the chamber 26 , a liquid inlet pipe section 33 formed at the front end of the shunt pipe section 31 , and an end pipe section 34 formed at the rear end of the shunt pipe section 31 . The branch pipe section 31 , the liquid inlet pipe section 33 and the end pipe section 34 jointly define a liquid inlet hole 35 . The liquid inlet pipe section 33 and the end pipe section 34 respectively pass through the through holes 221 of the cover plates 22 , and the liquid inlet pipe section 33 and the end pipe section 34 respectively protrude from the cover plates 22 . The liquid inlet pipe section 33 is used to connect with a liquid supply source (not shown in the figure), and the liquid supply source can supply the cleaning liquid 4 (as shown in FIG. 9 ) into the liquid inlet hole 35 . The liquid 4 is deionized water (Deionzied Water, DIW) as an example, but not limited thereto. The distribution pipe section 31 has a pipe wall 310 surrounding the liquid inlet hole 35. The pipe wall 310 forms a plurality of pipes connected between the bottom end of the liquid inlet hole 35 and the chamber 26 and aligned along the first horizontal direction X. First spray holes 311 arranged at intervals, and a plurality of second spray holes 312 connected between the bottom end of the liquid inlet hole 35 and the chamber 26 and arranged at intervals along the first horizontal direction X (Fig. 4 only one of them will be shown). The first spray holes 311 correspond to the tops of the first spray holes 253 . The second spray holes 312 respectively correspond to the tops of the second spray holes 254 .

The center of the split pipe section 31 is aligned with the center of the air inlet 27 along the longitudinal direction Z and divides the chamber 26 into a first guide channel 261 and a second guide channel 262 . The top of the first guiding channel 261 and the top of the second guiding channel 262 communicate with each other and communicate with the air inlet 27 . The bottom of the first guide channel 261 is connected to the first spray holes 311 and the first spray holes 253 . The bottom of the second guiding channel 262 is connected to the second spray holes 312 and the second spray holes 254 .

Each of the first spray holes 311 can spray the liquid 4 input from the liquid inlet hole 35 into the first guide flow channel 261 . The first guide channel 261 can guide the gas input by the air inlet 27 to between the first liquid spray holes 311 and the first spray holes 253, so that the gas and the first spray holes 253 The liquid 4 ejected from a liquid ejection hole 311 flows together. Each of the second liquid injection holes 312 can spray the liquid 4 inputted from the liquid inlet hole 35 into the second guiding channel 262 . The second guide channel 262 can guide the gas input by the air inlet 27 to between the second liquid spray holes 312 and the second spray holes 254, so that the gas and the first spray holes The liquid 4 ejected from the two liquid spray holes 312 is confluent.

The pipe wall 310 of the branch pipe section 31 has a bottom end 313 that abuts against the top end of the connecting block 250 of the nozzle 25, so that the bottom of the first guide channel 261 and the bottom of the second guide channel 262 not connected to each other. In this way, the gas guided by the first guiding channel 261 and the gas guided by the second guiding channel 262 can be avoided from converging together under the tube wall 310 to generate turbulent flow. In addition, each of the first liquid spray hole 311 and the corresponding second liquid spray hole 312 are respectively located on the opposite side of the abutting bottom end 313 along the second horizontal direction Y, and the height in the longitudinal direction Z is higher than that of the top. reach the height of the bottom end 313, so that the gas flowing in the first guide channel 261 can first merge with the liquid 4 ejected from the first liquid spray holes 311 and then drive the liquid 4 to hit the tube wall 310 to generate gas mist 5 (as shown in Figure 9), and the gas flowing in the second guiding channel 262 can first merge with the liquid 4 ejected from the second liquid spray holes 312 Then the liquid 4 is driven to collide with the tube wall 310 to generate the aerosol 5 .

In this embodiment, the thickness of the pipe wall 310 of the distribution pipe section 31 is not uniform, the pipe wall 310 has a maximum thickness portion 314 located at the bottom of the liquid inlet hole 35 , and the maximum thickness portion 314 has the abutting bottom end 313 , the abutting bottom end 313 is spaced below the liquid inlet hole 35 along the longitudinal direction Z. The maximum thickness portion 314 has a thickness T taken along the longitudinal direction Z and between the abutting bottom end 313 and the liquid inlet 35 , and the thickness T is the maximum thickness of the tube wall 310 . Each of the first spray holes 311 and the corresponding second spray holes 312 are respectively located on opposite sides of the maximum thickness portion 314 along the second horizontal direction Y. Thereby, a certain distance can be kept between each of the first liquid spray hole 311 and the corresponding second liquid spray hole 312 and the abutting bottom end 313 in the longitudinal direction Z, so as to ensure that the gas can first contact with the After the liquid 4 ejected from the first liquid spray holes 311 or the second liquid spray holes 312 converges, the liquid 4 is driven to collide with the pipe wall 310 .

More specifically, the pipe wall 310 of the distribution pipe section 31 also has a first flow guide slope 315 obliquely connected to the abutting bottom end 313 , and a second flow guide slope obliquely connected to the abutting bottom end 313 316. The first inclined flow guide surface 315 and the second inclined flow guide surface 316 are spaced apart along the second horizontal direction Y and form an acute angle A2. Each of the first spray holes 311 has a first spray port 317 formed on the first guide slope 315 . Each of the second spray holes 312 has a second spray port 318 formed on the second guide slope 316 . The first guide inclined surface 315 has a first blocking surface 319 between the first spray opening 317 of the first spray holes 311 and the abutting bottom end 313 , and the second guide inclined surface 316 has A second blocking surface 320 between the second liquid spray opening 318 of the second liquid spray holes 312 and the abutting bottom 313, the first blocking surface 319 and the second blocking surface 320 are used to block The gas and the liquid 4 it carries. The size of the acute angle A2 is preferably smaller, whereby the length of each of the first spray holes 311 and the length of each of the second spray holes 312 can be designed longer, thereby increasing the amount of liquid 4 The velocity of the flow in the first liquid spray hole 311 and the second liquid spray hole 312. In addition, the area of the first guide slope 315 and the area of the second guide slope 316 can be designed larger, thereby making the first blocking surface 319 and the first stop surface 319 of the first guide slope 315 The second blocking surface 320 of the second guide slope 316 has a large enough blocking area to block and allow the gas and the liquid 4 driven by the gas to collide.

The pipe wall 310 of the distribution pipe section 31 also has a distribution tip 321 aligned with the center of the inlet hole 27 . The distribution tip 321 has a distribution tip 322 , a first distribution slope 323 connected to the left side of the distribution tip 322 , and a second distribution slope 324 connected to the right side of the distribution tip 322 . After the gas transported by the air inlet 27 flows into the chamber 26, it will be blocked by the split tip 322 and split, so that half of the gas will be guided by the first split slope 323 and flow smoothly into the first guide. The flow channel 261 and the other half of the gas are guided by the second distribution slope 324 to smoothly flow into the second guide flow channel 262 , thereby improving the flow smoothness of the distribution.

The cover plates 22 are respectively clamped on opposite ends of the branch pipe section 31 along the first horizontal direction X, and each of the cover plates 22 is fixedly connected to the pipe wall 310 of the branch pipe section 31 by screw locking. Thereby, the branch pipe segment 31 can be prevented from rotating relative to the spray head 2, so that the first liquid spray port 317 of each of the first liquid spray holes 311 can be kept and positioned in the center of the corresponding first spray hole 253 position, the second spray port 318 of each of the second spray holes 312 can be maintained and positioned in a position aligned with the center of the corresponding second spray hole 254, the split tip 322 can be firmly maintained and positioned at The position aligned with the center of the air inlet 27 , and the abutting bottom end 313 can be firmly held and positioned at the abutting position of the top end of the connecting block 250 .

Referring to FIG. 4 , FIG. 6 , FIG. 7 and FIG. 8 , the first nozzle arm 251 has a first bottom surface 255 facing downwards. The first bottom surface 255 is rectangular and its length extending direction is parallel to the first horizontal direction X. Referring to FIG. The second nozzle arm 252 has a second bottom surface 256 facing downward. The second bottom surface 256 is rectangular and its length extending direction is parallel to the first horizontal direction X. As shown in FIG. Each of the first spray holes 253 has a first spray port 257 formed on the first bottom surface 255 , and each of the second spray holes 254 has a second spray port 258 formed on the second bottom surface 256 . The first ejection hole 253 and the first ejection port 257 are larger than the corresponding first liquid ejection port 317, the second ejection hole 254 and the second ejection port 258 are larger than the corresponding second liquid ejection port 318, thereby , so that the first spray hole 253 and the second spray hole 254 can provide more flow of the gas mist 5 flow, and the first spray port 257 and the second spray port 258 can spray more flow of the gas mist 5. In this embodiment, each of the first nozzle 257 and the second nozzle 258 is elongated, and the elongated shape is an ellipse as an example but not limited thereto, and the elongated shape may also be a rectangle. Thereby, the spray width of the aerosol 5 sprayed from the first spray port 257 and the second spray port 258 is large.

Further, the first ejection ports 257 of the first ejection holes 253 are obliquely formed on the first bottom surface 255 and the inclination direction is the same, whereby the first ejection ports 257 of the first ejection holes 253 can be reduced. The length occupied by the first bottom surface 255 in the extending direction enables the length of the first bottom surface 255 to be designed to be relatively short. The second ejection ports 258 of the second ejection holes 254 are obliquely formed on the second bottom surface 256 and the inclination direction is the same, whereby the second ejection ports 258 of the second ejection holes 254 can be lowered. The length occupied by the bottom surface 256 in the extending direction enables the length of the second bottom surface 256 to be designed to be relatively short.

More specifically, the projections of the first ejection ports 257 of every two adjacent first ejection holes 253 on the second horizontal direction Y partially overlap, thereby, in addition to further reducing the first In addition to the length occupied by the first ejection port 257 of the ejection hole 253 in the length extension direction of the first bottom surface 255, the first ejection port of every two adjacent first ejection holes 253 can be At least a part of spray widths of the aerosol 5 ejected by 257 can overlap together. The projections of the second ejection ports 258 of every two adjacent second ejection holes 254 on the second horizontal direction Y partially overlap, thereby, in addition to further reducing the impact of the second ejection holes 254 In addition to the length occupied by the second ejection port 258 in the length extension direction of the second bottom surface 256, the second ejection port 258 ejected from every two adjacent second ejection holes 254 At least a part of spray widths of the aerosol 5 can be overlapped.

The method for cleaning the substrate 1 by the shower head device 200 is described in detail below:

Referring to FIG. 4 , FIG. 9 and FIG. 10 , FIG. 9 and FIG. 10 are schematic diagrams of cleaning the substrate 1 by the shower head device 200 of this embodiment. The substrate 1 has an upper surface 11 , and the upper surface 11 is recessed to form a plurality of grooves 12 . A robot arm (not shown) will transfer the shower head device 200 to move relative to the substrate 1 to clean the substrate 1 .

The liquid 4 input from the liquid inlet hole 35 of the liquid inlet pipe 3 along the first horizontal direction X will flow into the first liquid spray holes 311 and the second liquid spray holes 312 . Because the aperture of each of the first spray holes 311 and the aperture of each of the second spray holes 312 are smaller than the aperture of the liquid inlet hole 35, therefore, the liquid 4 flows into each of the first spray holes 311 and 312. The flow rate increases after each second spray hole 312 . In addition, each of the first spray holes 311 and each of the second spray holes 312 and the maximum thickness portion 314, the first guide slope 315, the second guide slope 316, and the acute angle A2, etc. The relationship between the structural features makes each of the first spray holes 311 and each of the second spray holes 312 have a certain length. Thereby, the liquid 4 can be gradually accelerated to a certain flow velocity during the flow in the first liquid spray hole 311 and the second liquid spray hole 312, so that each of the first liquid spray ports 317 and each of the first liquid spray ports 317 The liquid 4 ejected from the second liquid ejection port 318 has a certain velocity and pressure.

On the other hand, after the gas input from the inlet hole 27 along the longitudinal direction Z flows into the chamber 26, the gas will be blocked by the split tip 322 of the split tip 321 and diverted, so that half of the gas will flow along the longitudinal direction Z. The gas flows smoothly into the first guide flow channel 261 along the first distribution slope 323 , and the other half of the gas smoothly flows into the second guide flow channel 262 along the second flow distribution slope 324 .

The liquid 4 ejected through the first liquid injection port 317 of the first liquid injection holes 311 will be driven by the gas flowing to the bottom of the first guide channel 261 and hit the first guide slope 315 The first blocking surface 319 enables the gas and the liquid 4 to form the mist 5 and flow into the first spray holes 253 . In addition, the liquid 4 sprayed through the second liquid injection port 318 of the second liquid injection holes 312 will be driven by the gas flowing to the bottom of the second guiding channel 262 and hit the second guiding slope. 316 of the second blocking surface 320 , so that the gas and the liquid 4 jointly constitute the gas mist 5 and then flow into the second spray holes 254 .

Since each of the first spray holes 253 and each of the second spray holes 254 has a certain length, the gas mist 5 flows in the first spray holes 253 and the second spray holes 254. It can be gradually accelerated to a certain flow rate, so that the aerosol 5 ejected from each of the first spray ports 257 and each of the second spray ports 258 has a certain flow rate and pressure.

Since the first axis L1 and the second axis L2 intersect and form the acute angle A1 and are inclined to the upper surface 11 of the substrate 1, the first ejection ports 257 of the first nozzle arm 251 and the second The spraying angles of the mist 5 sprayed from the second outlets 258 of the nozzle arm 252 are different, so that the spraying area of the mist 5 can be effectively increased to form a cleaning effect without dead ends. Thereby, residues such as chemical agents remaining in the grooves 12 can be effectively removed.

The spray head device 200 of this embodiment defines the first spray holes 253 and the second spray holes 254 through the spray head 2, and the liquid inlet pipe 3 defines the first spray holes 311 and the second spray holes. The two spray holes 312 enable the spray head device 200 to achieve the dual-output spray cleaning effect of the two spray heads in the prior art. Since the shower head device 200 of this embodiment does not need to connect two shower heads together through a connecting structure, compared with the shower head device of the prior art, the overall structure is simple, the volume is small and the weight is light, thereby reducing the manufacturing cost, making The spray head device 200 can be applied in cleaning occasions with small space. In addition, the process of transferring the shower head device 200 by the robot arm is stable and not easy to shake, which can improve the cleaning effect of the substrate 1 .

It should be noted that, in another implementation form of this embodiment, the number of the first spray holes 253, the number of the second spray holes 254, the number of the first liquid spray holes 311 and the number of the second spray holes The number of liquid holes 312 can also be designed as one according to requirements, and is not limited to the number disclosed in this embodiment.

To sum up, the shower head device 200 of this embodiment has a simple overall structure, small volume, light weight, and low manufacturing cost, and can be applied to cleaning occasions with small spaces. In addition, the process of transferring the shower head device 200 by the robot arm is stable and not easy to shake, which can improve the cleaning effect of the substrate 1 , so the purpose of the present invention can be achieved.

But what is described above is only an embodiment of the present invention, and should not limit the scope of the present invention. All simple equivalent changes and modifications made according to the patent scope of the present invention and the content of the patent specification are still within the scope of the present invention. Within the scope covered by the patent of the present invention.

1: Substrate 11: Upper surface 12: Groove 200: Nozzle device 2: Nozzle 21: Ontology 22: Cover 221: perforation 23: shell 24: Jacking pipe 25: Nozzle 250: Connection block 251: The first nozzle arm 252: Second nozzle arm 253: The first spray hole 254: the second spray hole 255: the first bottom surface 256: second bottom surface 257: The first jet outlet 258: The second jet outlet 26: chamber 261: The first guiding channel 262: The second guiding channel 27: Air intake hole 3: Liquid inlet pipe 31: Split pipe section 310: pipe wall 311: the first spray hole 312: Second spray hole 313: top to bottom 314: Maximum thickness part 315: the first diversion slope 316: the second diversion slope 317: The first spray port 318: the second spray port 319: The first blocking face 320: Second blocking face 321: Diverting tip top 322: Split tip 323: the first diversion slope 324: the second diversion slope 33: Liquid inlet pipe section 34: end pipe section 35: Inlet hole 4: liquid 5:Aerosol A1, A2: acute angle L1: first axis L2: second axis T: Thickness X: the first horizontal direction Y: the second horizontal direction Z: Vertical

Other features and effects of the present invention will be clearly presented in the implementation manner with reference to the drawings, wherein: Fig. 1 is a perspective view of an embodiment of the shower head device of the present invention; Fig. 2 is a side view of this embodiment; Fig. 3 is a front view of this embodiment; Fig. 4 is a sectional view taken along line IV-IV in Fig. 2; Fig. 5 is a cross-sectional view taken along the V-V line in Fig. 3; Fig. 6 is a bottom view of this embodiment; Fig. 7 is an incomplete partial enlarged view viewed along the direction of arrow A in Fig. 3; Fig. 8 is an incomplete partial enlarged view viewed along the arrow B direction in Fig. 3; Figure 9 is a schematic diagram of the embodiment and a substrate; and FIG. 10 is a schematic diagram of the embodiment and the substrate.

200: Nozzle device

2: Nozzle

21: Ontology

23: Shell

24: Jacking pipe

25: Nozzle

250: Connection block

251: The first nozzle arm

252: Second nozzle arm

253: The first spray hole

254: the second spray hole

255: the first bottom surface

256: second bottom surface

257: The first jet outlet

258: The second jet outlet

26: chamber

261: The first guiding channel

262: The second guiding channel

27: Air intake hole

31: Split pipe section

310: pipe wall

311: the first spray hole

312: Second spray hole

313: top to bottom

314: Maximum thickness part

315: the first diversion slope

316: the second diversion slope

317: The first spray port

318: the second spray port

319: The first blocking face

320: Second blocking face

321: Diverting tip top

322: Split tip

323: the first diversion slope

324: the second diversion slope

35: Inlet hole

A1, A2: acute angle

L1: first axis

L2: second axis

T: Thickness

Y: the second horizontal direction

Z: Vertical

Claims (18)

A sprinkler device comprising: A spray head, defining a chamber, an air inlet connected to the top of the chamber, at least one first discharge hole connected to the bottom of the chamber, and at least one discharge connected to the bottom of the chamber and connected to the first discharge spaced-apart second orifices; and A liquid inlet pipe is arranged on the spray head and partly located in the chamber, the liquid inlet pipe defines at least one first liquid spray hole connected to the chamber and corresponding to the top of the first spray hole, and at least one connected to the first spray hole The chamber corresponds to the second liquid spray hole above the second spray hole. The spray head device according to claim 1, wherein the center of the first spray hole is located on an inclined first axis, the center of the second spray hole is located on an inclined second axis, and the first axis and the The second axes intersect and form an acute angle, so that the first spray hole and the second spray hole are flared outward. The spray head device according to claim 1, wherein the liquid inlet pipe includes a split pipe section arranged in the chamber, the center of the split pipe section is aligned with the center of the air inlet hole along a longitudinal direction, and the split pipe section has a The top of the nozzle is against the bottom end, and the branch pipe section is formed with the first liquid spray hole and the second liquid spray hole respectively located on the opposite side of the top bottom end, and the branch pipe section divides the chamber into a first guide flow channel and a second guide flow channel, the top of the first guide flow channel and the top of the second guide flow channel communicate with each other and communicate with the air intake hole, the bottom of the first guide flow channel and the second guide flow channel The bottoms of the guide channels are not connected to each other, the first guide channel is connected between the first spray hole and the first spray hole, and the second guide channel is connected between the second spray hole and the first spray hole. Between the two ejection holes. The spray head device as claimed in claim 3, wherein, the branch pipe section has a branch point aligned with the center of the air inlet hole. The spray head device as claimed in claim 1, wherein the liquid inlet pipe defines a liquid inlet hole, the liquid inlet pipe includes a pipe wall disposed in the chamber and surrounding the liquid inlet hole, the thickness of the pipe wall is not uniform and There is a maximum thickness portion located at the bottom of the liquid inlet hole and abutted against the spray head, and the tube wall is formed with the first liquid spray hole and the second liquid spray hole which are connected to the liquid inlet hole and are respectively located on the opposite side of the maximum thickness portion. Two spray holes. The spray head device according to claim 5, wherein the maximum thickness portion has a bottom end abutting against the spray head, and the pipe wall also has a first flow guide slope obliquely connected to the bottom end, and A second diversion inclined surface obliquely connected to the abutting bottom end, the first diversion inclined surface forms an acute angle with the second diversion inclined surface, and the first spray hole has a second diversion inclined surface formed on the first diversion inclined surface A liquid spray port, the second liquid spray hole has a second liquid spray port formed on the second guide slope. The spray head device as claimed in claim 6, wherein the first flow guide slope has a first blocking surface between the first liquid injection port and the abutting bottom end, and the second flow guide slope has a The second blocking surface between the second liquid spray port and the abutting bottom end. The shower head device as claimed in claim 5, wherein the tube wall further has a splitter tip, and the splitter tip is aligned with the center of the air inlet hole along a longitudinal direction. The shower head device as claimed in claim 5, wherein the shower head includes a body and two cover plates disposed on the body, the body is formed with the air inlet hole, the first ejection hole and the second ejection hole, The cover plates and the body jointly define the cavity, and the cover plates are respectively fixedly connected with opposite ends of the pipe wall. The spray head device as claimed in claim 1, wherein the liquid inlet pipe includes a bottom end, a first diversion inclined surface, and a second diversion slope located in the chamber, and the bottom end abuts against the In the spray head, the first guide slope and the second guide slope are obliquely connected to the bottom end of the abutment and form an acute angle, and the first liquid spray hole and the second liquid spray hole are respectively formed on the first guide The flow slope and the second flow guide slope are respectively located on opposite sides of the abutting bottom end. The spray head device according to claim 10, wherein, the first liquid spray hole has a first liquid spray port formed on the first guide slope, and the second liquid spray hole has a first liquid spray port formed on the second guide slope. The second liquid injection port of the slope, the first guide slope has a first blocking surface between the first liquid spray port and the abutting bottom end, the second flow guide slope has a first barrier surface between the second spray port The second blocking surface between the liquid opening and the abutting bottom. The spray head device according to claim 1, wherein the first spray hole is larger than the first liquid spray hole, and the second spray hole is larger than the second liquid spray hole. The shower head device according to claim 12, wherein the shower head includes a first bottom surface and a second bottom surface, the first bottom surface and the second bottom surface are each rectangular, the first spray hole has a first spray port, The second ejection hole has a second ejection port, the first ejection port is oblong and obliquely formed on the first bottom surface, and the second ejection port is oblong and obliquely formed on the second bottom surface. The shower head device according to any one of claims 1 to 11, wherein the shower head defines a plurality of first ejection holes and a plurality of second ejection holes, and the first ejection holes are arranged at intervals along a first horizontal direction , the second spray holes are arranged at intervals along the first horizontal direction, each of the first spray holes is spaced apart from the corresponding second spray holes along a second horizontal direction perpendicular to the first horizontal direction, the The liquid inlet pipe defines a plurality of first liquid spray holes and a plurality of second liquid spray holes, the first liquid spray holes are arranged at intervals along the first horizontal direction, and the second liquid spray holes are arranged along the first horizontal direction Arranged at intervals, each of the first liquid spray holes is spaced apart from the corresponding second liquid spray holes along the second horizontal direction. The spray head device as claimed in claim 14, wherein each of the first spray holes is larger than the corresponding first liquid spray hole, and each of the second spray holes is larger than the corresponding second liquid spray hole. The shower head device according to claim 15, wherein the shower head includes a first bottom surface and a second bottom surface, each of the first spray holes has a first spray port formed on the first bottom surface, and each of the first spray holes The two jetting holes have a second jetting opening formed on the second bottom surface, and the first jetting opening and the second jetting opening are elongated respectively. The shower head device according to claim 16, wherein the first bottom surface and the second bottom surface are each in a rectangular shape, the length extension direction of the first bottom surface and the length extension direction of the second bottom surface are parallel to the first horizontal direction, The first spray ports of the first spray holes are obliquely formed on the first bottom surface in the same direction, and the second spray ports of the second spray holes are formed obliquely on the second bottom surface in the same direction. The shower head device according to claim 17, wherein the projections of the first nozzles of every two adjacent first nozzle holes in the second horizontal direction overlap, and every two adjacent first nozzle holes The projections of the second ejection ports of the second ejection holes in the second horizontal direction partially overlap.

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