TWI783414B - Feeding device and feeding method - Google Patents

Abstract

A feeding device includes a first storage bucket, a second storage bucket, a first connecting pipe, a first valve, a conveying equipment, a first baffle, and a second baffle. The second storage bucket is located above the first storage bucket. One end of the first connecting pipe is connected to the first storage bucket. Another end of the first connecting pipe is connected to the second storage bucket. The first valve is arranged on or in the first connecting pipe. The conveying equipment is arranged under a discharge port of the first storage bucket, and is configured to convey a plurality of raw materials along a first direction. The first baffle is arranged on the first direction of the discharge port. The second baffle is arranged on the first direction of the first baffle.

Description

Feeding device and feeding method

The invention relates to a feeding device and a feeding method.

At present, the common method of producing single crystal is the Czochralski method, and the equipment used in the Czochralski method is a Czochralski single crystal furnace. The process of producing a single crystal by the Czochralski method includes heating a quartz crucible filled with polycrystalline raw materials to a molten state in a heater, inserting a seed crystal into the molten state, and then pulling out the seed crystal from the molten liquid to form a single crystal column.

In some single crystal production processes, in order to reduce energy consumption, the single crystal growth process is performed multiple times without turning off the heater. However, in order to avoid the consumption of raw materials in the quartz crucible during the process of growing single crystals, resulting in a decrease in the yield of single crystals, generally a feeding device is used to add raw materials to the quartz crucible so that the liquid level of the molten soup in the quartz crucible The height can be maintained within a certain range.

The invention provides a feeding device, which can better control the feeding rate of raw materials.

The invention provides a feeding method, which can better control the feeding rate of raw materials.

An embodiment of the present invention provides a feeding device, including a first storage tank, a second storage tank, a first connecting pipe, a first valve, a feeding device, a first baffle and a second baffle. The second storage tank is located above the first storage tank. One end of the first connecting pipe is connected to the first material storage tank, and has a first outer angle with the first material storage tank. The other end of the first connecting pipe is connected to the second storage tank, and has a second outer angle with the second storage tank. The first valve is arranged on or in the first connecting pipe. The conveying device is arranged below the discharge port of the first storage barrel, and is configured to convey a plurality of raw materials along the first direction. The first baffle is arranged in the first direction of the outlet. The second baffle is arranged in the first direction of the first baffle, wherein the distance between the first baffle and the conveying device is greater than or equal to the distance between the second baffle and the conveying device.

An embodiment of the present invention provides a feeding method, including providing the aforementioned feeding device; providing raw materials in the second storage tank; at least part of the raw materials arrive at the first storage tank from the second storage tank through the first connecting pipe; at least Part of the raw materials leave the first storage barrel from the discharge port of the first storage barrel, and arrive at the conveying device; the conveying device conveys at least part of the raw materials along the first direction, and passes through the first baffle plate and the second baffle in sequence. bezel.

Fig. 1 is a schematic cross-sectional view of a feeding device according to an embodiment of the present invention.

Please refer to FIG. 1 , the feeding device 10 includes a first storage tank 100 , a second storage tank 200 , a first connecting pipe 150 , a first valve 152 , a feeding device 410 , a first baffle 422 and a second baffle 424 . In this embodiment, the feeding device further includes a second connecting pipe 250 , a second valve 252 , a third storage tank 300 and a third baffle 426 .

The second storage tank 200 is located above the first storage tank 100 . One end of the first connecting pipe 150 is connected to the first storage tank 100 and has a first outer angle θ1 with the first storage tank 100 . In this embodiment, one end of the first connecting pipe 150 is connected to the top 100t of the first storage barrel 100, and there is a first outer angle θ1 between the first connecting pipe 150 and the top 100t. The first external angle θ1 is, for example, between 90 degrees and 120 degrees, and in other embodiments, for example, between 100 degrees and 120 degrees, and preferably the first external angle θ1 is between 110 degrees and 120 degrees, which can reach more levels. force distribution and lengthen the rotational path to reduce impact forces.

The other end of the first connecting pipe 150 is connected to the second storage tank 200 and has a second outer angle θ2 with the second storage tank 200 . In this embodiment, the first connecting tube 150 connects the bottom 200b and the side 200s1 of the second storage tank 200 , and there is a second outer angle θ2 between the first connecting tube 150 and the side 200s1 of the second storage tank 200 . In some embodiments, 0 degrees < second external angle θ2 < 60 degrees, in other embodiments, 20 degrees < θ2 < 60 degrees, wherein the best is 40 degrees < θ2 < 60 degrees, can achieve more horizontal points force.

The first valve 152 is disposed on or in the first connecting pipe 150 . In this embodiment, the first valve 152 is used to control whether the raw material S can pass through the first connecting pipe 150 . The greater the opening degree of the first valve 152 is, the more raw material S can pass through the first connecting pipe 150 . The smaller the opening degree of the first valve 152 is, the less the raw material S can pass through the first connecting pipe 150 . In some embodiments, the first valve 152 is disposed between the first connecting pipe 150 and the second storage tank 200 or between the first connecting pipe 150 and the first storage tank 100 . The third storage tank 300 is located above the second storage tank 200 . One end of the second connecting pipe 250 is connected to the second storage tank 200 and has a third outer angle θ3 with the second storage tank 200 . In this embodiment, one end of the second connecting pipe 250 is connected to the top 200t of the second storage tank 200, and there is a third outer angle θ3 between the second connecting pipe 250 and the top 200t. The third outer angle θ3 is, for example, between 90 degrees and 135 degrees, and in other embodiments, it is 105 degrees < θ3 < 135 degrees, preferably 120 degrees < θ3 < 135 degrees, which can reduce the impact force of the side 200s2. In this embodiment, one end of the second connecting pipe 250 is connected to the side surface 200s2 of the second storage tank 200, and the side surface 200s2 has an inclination angle θ4 relative to the vertical plane. In some embodiments, 0 degrees < tilt angle θ4 < 45 degrees.

The other end of the second connecting pipe 250 is connected to the third storage tank 300 and has a fourth outer angle θ5 with the third storage tank 300 . In this embodiment, the second connecting tube 250 connects the bottom 300b and the side 300s1 of the third storage tank 300 , and there is a fifth outer angle θ5 between the second connecting tube 250 and the side 300s1 of the third storage tank 300 . In some embodiments, 0 degree<the fourth outer angle θ5<45 degrees, in other embodiments 15 degrees<theta3<45 degrees, and the optimum is 30 degrees<theta3<45 degrees, which can reduce the impact force on the side 200s2.

The second valve 252 is disposed on or in the second connecting pipe 250 . In this embodiment, the second valve 252 is used to control whether the raw material S can pass through the second connecting pipe 250 . The greater the opening degree of the second valve 252 is, the more raw material S can pass through the second connecting pipe 250 . The smaller the opening degree of the second valve 252 is, the less the raw material S can pass through the second connecting pipe 250 . In some embodiments, the second valve 252 is disposed between the second connecting pipe 250 and the second storage tank 200 or between the second connecting pipe 250 and the third storage tank 300 .

In this embodiment, the material inlet IP is located at the top 300t of the third storage tank 300 , and the material inlet IP is connected to the top 300t and the side 300s2 of the third storage tank 300 . In some embodiments, the side surface 300s2 has an inclination angle θ6 with respect to the vertical plane. In some embodiments, 0 degrees < tilt angle θ6 < 45 degrees.

In this embodiment, the feeding device 10 includes a third storage tank 300 , but the present invention is not limited thereto. In other embodiments, the feeding device 10 does not include the third storage tank 300 , and the material inlet IP is located at the top 200t of the second storage tank 200 .

The material delivery system 400 is located below the material outlet EP of the first storage tank 100 . In this embodiment, the conveying system 400 includes a conveying device 410 , a first baffle 422 , a second baffle 424 and a third baffle 426 . The conveying device 410 is disposed below the discharge port EP of the first storage barrel 100 and is configured to convey a plurality of raw materials S along the first direction D1. In some embodiments, the conveying device 410 is a conveyor belt or other devices capable of transporting the raw material S to the first direction D1. In some embodiments, the conveying system 400 includes channels, and the height of the channels on the conveying device 410 is L0. The height L0 is, for example, between 100 mm and 400 mm, wherein the height L0 of the channel is the distance between the top 410 t of the delivery device 410 and the bottom EPb of the material outlet EP of the first storage tank 100 .

The first baffle 422 is disposed in the first direction D1 of the discharge port EP. The second baffle 424 is disposed in the first direction D1 of the first baffle 422 . The third baffle 426 is disposed in the first direction D1 of the second baffle 424 .

The distance L3 between the bottom 422b of the first baffle 422 and the top 410t of the delivery device 410 is greater than or equal to the distance L2 between the bottom 424b of the second baffle 424 and the top 410t of the delivery device 410 . The distance L2 between the bottom 424b of the second baffle 424 and the top 410t of the delivery device 410 is greater than or equal to the distance L1 between the bottom 426b of the third baffle 426 and the top 410t of the delivery device 410 . In some embodiments, the initial distance between the bottom 422b of the first baffle 422 and the top 410t of the delivery device 410 is 80% of the height L0, and the bottom 424b of the second baffle 424 and the top 410t of the delivery device 410 The initial distance between them is 60% of the height L0, and the initial distance between the bottom 426b of the third baffle plate 426 and the top 410t of the conveying device 410 is 50% of the height L0.

In this embodiment, the feeding method includes adding the raw material S into the material inlet IP to provide the raw material S in the third storage tank 300 . The raw material arrives at the second storage tank 200 after passing through the second connecting pipe 250 from the third storage tank 300 , so as to provide the raw material S in the second storage tank 200 . In some embodiments, the maximum weight A3 of the material S that can be loaded in the third storage tank 300 is 100 to 200 kg.

In some embodiments, the rate at which the raw material S passes through the second connecting pipe 250 is controlled by adjusting the opening area of the second valve 252 . In some embodiments, the weight of the raw material S in the second storage tank 200 is B2, the maximum weight of the raw material S that can be loaded in the second storage tank 200 is A2, and the open area percentage of the second valve 252 is C2. The relationship between B2/A2 and C2 is shown in Table 1.

Table 1 B2/A2 C2 50% 100% 55% 90% 60% 80% 65% 70% 70% 60% 75% 50% 80% 40% 85% 30% 90% 20% 95% 10% 100% 0%

It can be seen from Table 1 that when the second storage tank 200 is filled with the raw material S (B2/A2=100%), the second valve 252 is closed (C2=0%), thereby preventing the raw material S from continuing to pass through the second connecting pipe 250 causes the second storage tank 200 to be overloaded. When the raw material S in the second storage tank 200 is only half (B2/A2=50%), the second valve 252 is opened to the maximum (C2=100%), so as to increase the flow rate of the raw material S through the second connecting pipe 250 rate. Specifically, when the raw material S in the second storage tank 200 is relatively full (for example, 95%≦B2/A2≦100%), try to close the second valve 252 (for example, 0%≦C2≦10%), and borrow This prevents the second storage tank 200 from being overloaded by the raw material S continuing to pass through the second connecting pipe 250 . When the raw material S in the second storage tank 200 is only about half (for example, 50%≦B2/A2≦55%), try to open the second valve 252 to the maximum (for example, 90%≦C2≦100%) to The rate at which the raw material S passes through the second connecting pipe 250 is increased. In other words, in this embodiment, the opening area of the second valve 252 increases as the weight of the raw material S in the second storage barrel 200 decreases. In some embodiments, the maximum weight A2 of the material S that can be loaded in the second storage barrel 200 is 100 to 200 kg.

Next, at least part of the raw material S reaches the first storage tank 100 from the second storage tank 200 through the first connecting pipe 150 to provide the raw material S in the first storage tank 100 .

In some embodiments, the rate at which the raw material S passes through the first connecting pipe 150 is controlled by adjusting the opening area of the first valve 152 . In some embodiments, the weight of the raw material S in the first storage tank 100 is B1, the maximum weight of the raw material S that can be loaded in the first storage tank 100 is A1, and the open area percentage of the first valve 152 is C1. The relationship between B1/A1 and C1 is shown in Table 2.

Table 2 B1/A1 C1 90% 100% 91% 90% 92% 80% 93% 70% 94% 60% 95% 50% 96% 40% 97% 30% 98% 20% 99% 10% 100% 0%

It can be seen from Table 2 that when the first storage tank 100 is filled with raw material S (B1/A1=100%), the first valve 152 is closed (C1=0%), thereby preventing the raw material S from continuing to pass through the first connecting pipe 150 causes the first storage tank 100 to be overloaded. When only 90% of the raw material S in the first storage tank 100 is left (B2/A2=90%), the first valve 152 is opened to the maximum (C1=100%) to increase the amount of raw material S passing through the first connecting pipe 150 s speed. In detail, when the first storage tank 100 is relatively full of the raw material S (for example, 99%≦B1/A1≦100%), the first valve 152 is closed (for example, 0%≦C1≦10%), thereby preventing the raw material from S continues to pass through the first connecting pipe 150 causing the first storage tank 100 to be overloaded. When the raw material S in the first storage tank 100 is only about 90% (for example, 90%≦B1/A1≦91%), the first valve 152 is opened to the maximum (90%≦C1≦100%) to increase The rate at which the raw material S passes through the first connecting pipe 150 . In other words, in this embodiment, the opening area of the first valve 152 decreases as the weight of the raw material S in the first storage tank 100 increases. In some embodiments, the maximum weight A of the raw material S that can be loaded in the first storage tank 100 is 100 to 300 kg.

.In some embodiments, when the area percentage C1 of the opening of the first valve 152 is not 0% (that is, when the first valve 152 is opened), the second valve 252 does not act, that is, the second valve 252 is closed state. In some embodiments, when there is no raw material S in the third storage tank 300 , the second valve 252 is not activated, that is, the second valve 252 is closed.

In some embodiments, the material of the first storage tank 100, the second storage tank 200, and the third storage tank 300 includes quartz glass, and the raw material S is silicon particles, thereby improving the first storage tank 100, the second storage tank The second storage tank 200 and the third storage tank 300 pollute the raw material S. In some embodiments, the particle size of the raw material S is greater than 0 and less than 50 mm.

Based on the above, the feeding rate of raw materials can be better controlled by more than one storage tank. In some embodiments, by setting the angle of the connecting pipe, the impact force of the raw material on the storage tank can be reduced. In addition, the valve used to isolate different storage tanks can make the raw material more evenly distributed in each storage In the barrel, it can also save the feeding time and improve the efficiency of feeding.

Please continue to refer to FIG. 1 , part of the raw material S leaves the first storage tank 100 from the discharge port EP of the first storage tank 100 , and arrives at the delivery device 410 . The conveying device 410 conveys a part of the raw material S along the first direction D1 and passes through the first baffle 422 , the second baffle 424 and the third baffle 426 in sequence.

Fig. 2 is a flowchart of a feeding method according to an embodiment of the present invention.

Please refer to FIG. 1 and FIG. 2 , in step S1 , the feeding rate of the first storage tank 100 is calculated. In some embodiments, the discharge rate of the first storage tank 100 is calculated by measuring the weight of the material S leaving the first storage tank 100 . For example, the weight change of the raw material S in the first raw material barrel 100 is detected every 20 minutes, and the difference in the weight of the raw material S in the first raw material barrel 100 is calculated every 20 minutes to determine the difference between the first raw material barrel 100. Feed rate.

In step S2, it is detected whether the second storage tank 200 is being replenished. For example, when the first valve 152 is opened, it is determined that the second material storage tank 200 is being replenished, and when the first valve 152 is closed, it is determined that the second material storage tank 200 is not being replenished.

In step S3, when the second material storage barrel 200 is being replenished, the heights of the first baffle 422 , the second baffle 424 and the third baffle 426 are not adjusted. In other words, the distance L3 between the bottom 422b of the first baffle 422 and the top 410t of the delivery device 410, the distance L2 between the bottom 424b of the second baffle 424 and the top 410t of the delivery device 410, and the distance L2 between the bottom 422b of the first baffle 422 and the top 410t of the delivery device 410 are maintained. The distance L1 between the bottom 426b of the third baffle 426 and the top 410t of the conveying device 410 .

In step S4, when the second storage tank 200 is not feeding, compare the discharge rate of the first storage tank 100 with the expected discharge rate. When the feeding rate of the first storage tank 100 is equal to the expected feeding rate, the heights of the first baffle plate 422, the second baffle plate 424 and the third baffle plate 426 are not adjusted, that is, the bottom of the first baffle plate 422 is maintained 422b and the distance L3 between the top 410t of the conveying device 410, the distance L2 between the second baffle 424 and the top 410t of the conveying device 410, and the bottom 426b of the third baffle 426 and the top 410t of the conveying device 410 The distance between L1.

In step S5 and step S7, when the feeding rate of the first storage tank 100 is different from the expected feeding rate, the distance L3 between the bottom 422b of the first baffle plate 422 and the top 410t of the delivery device 410 is changed . For example, when the feeding rate of the first storage tank 100 is lower than the expected feeding rate, it is detected whether the height of the first baffle 422 reaches the maximum value (for example, whether the detection distance L3 is equal to the height L0), and When the distance L3 between the bottom 422b of the first baffle 422 and the top 410t of the delivery device 410 does not reach the maximum value (for example, when the distance L3 is less than the height L0), increase the distance between the bottom 422b of the first baffle 422 and the top 410t of the delivery device. The distance L3 between the tops 410 t of 410 , thereby increasing the velocity of the raw material S passing through the first baffle plate 422 .

In some embodiments, if the discharge rate of the first storage tank 100 is greater than the expected discharge rate, the distance L3 between the bottom 422b of the first baffle plate 422 and the top 410t of the delivery device 410 is reduced, by This reduces the velocity of the feedstock S passing through the first baffle 422 .

In step S6 and step S9, when the feeding rate of the first storage tank 100 is lower than the expected feeding rate, and the distance L3 between the bottom 422b of the first baffle plate 422 and the top 410t of the conveying device 410 After reaching the maximum value (for example, when the distance L3 is equal to the height L0), detect whether the height of the second baffle plate 424 reaches the maximum value (for example, detect whether the distance L2 is equal to the height L0), and when the height of the second baffle plate 424 does not reach At the maximum value, the distance L2 between the bottom 424b of the second baffle 424 and the top 410t of the conveying device 410 is increased, thereby increasing the velocity of the raw material S passing through the second baffle 424 .

In step S8 and step S10, when the feeding rate of the first storage tank 100 is lower than the expected feeding rate, and the distance L2 between the bottom 424b of the second baffle plate 424 and the top 410t of the delivery device 410 After reaching the maximum value (for example, when the distance L2 is equal to the height L0), detect whether the height of the third baffle 426 reaches the maximum value (for example, detect whether the distance L3 is equal to the height L0), and when the height of the third baffle 426 does not reach At the maximum value, the distance L1 between the bottom 426 b of the third baffle 426 and the top 410 t of the conveying device 410 is increased, thereby increasing the speed of the raw material S passing through the third baffle 426 .

The use of multiple baffles can avoid the problem of material S being stuck on the feeding device 410, and can make the distribution of the raw material S on the feeding device 410 more uniform, making the feeding rate easier to control.

FIG. 3A is a schematic cross-sectional and top view of a first storage tank according to an embodiment of the present invention. It must be noted here that the embodiment in FIG. 3A follows the component numbers and part of the content of the embodiment in FIG. 1 , wherein the same or similar numbers are used to indicate the same or similar components, and the description of the same technical content is omitted. For the description of the omitted part, reference may be made to the foregoing embodiments, and details are not repeated here.

Please refer to FIG. 3A. In this embodiment, the first storage tank 100 includes a first side wall 110, a second side wall 120, and a third side wall 130 connected in sequence from top to bottom, and the acute angle α1 between the first side wall and the horizontal plane is greater than Or equal to the acute angle α2 between the second side wall and the horizontal plane, and the acute angle α2 is greater than or equal to the acute angle α3 between the third side wall and the horizontal plane. The acute angle α1, the acute angle α2, and the acute angle α3 are greater than 0̊ and less than or equal to 90̊. In some embodiments, 60 degrees<acute angle α1≦90 degrees; 30 degrees<acute angle α2≦75 degrees; 15 degrees<acute angle α3≦45 degrees.

The height H1 of the first sidewall 110 is greater than the height H2 of the second sidewall 120 , and the height H2 is greater than the height H3 of the third sidewall 130 . In some embodiments, the height H0 of the first storage barrel 100 is 1 meter to 2.7 meters. In some embodiments, the height H1 is 40%-70% of H0, the height H2 is 20%-50% of H0, and the height H3 is 0%-40% of H0. In some embodiments, height H1 is 50% of H0, height H2 is 30% of H0, and height H3 is 20% of H0. By using the multi-section first storage barrel 100 with sidewalls having different angles, the feeding rate at different positions can be controlled, the impact force received when adding the raw material S can be reduced, and the uniformity of the raw material S distribution can be improved.

In some embodiments, the first hopper 100 is substantially rotationally symmetric. The rotationally symmetrical first storage tank 100 can make the distribution of the raw material S in the first storage tank 100 more uniform, and further make the distribution of the raw material S leaving the first storage tank 100 from the discharge port EP more uniform.

In some embodiments, the raw material S in the first storage barrel 100 descends along a spiral path, thereby increasing the movement path of the raw material S in the first storage barrel 100, and reducing the impact of the raw material S on the first storage barrel by using frictional force. The impact force generated by the storage tank 100.

FIG. 3B is a schematic cross-sectional and top view of a second storage tank according to an embodiment of the present invention. It must be noted here that the embodiment in FIG. 3B uses the same or similar components with the same or similar numbers, and the description of the same technical content is omitted. For the description of the omitted part, reference may be made to the foregoing embodiments, and details are not repeated here.

Please refer to FIG. 3B , in this embodiment, one side 200s2 of the second storage tank 200 is an inclined plane, and the other side 200s1 is an arc. In this embodiment, the second storage tank 200 is substantially non-rotationally symmetrical.

The raw material S in the second storage tank 200 descends along the side 200s1 and/or 200s2 of the raw material tank, and in design, if the height HA of the storage tank 200 is small, the impact force of the raw material S on the storage tank will be slightly Smaller, at this time, if a non-rotationally symmetrical storage barrel is designed, the raw material S can quickly drop along the side 200s1 and/or 200s2 of the raw material barrel, and quickly reach the required weight of the material, and the storage barrel 200 can further make the raw material S leaving the storage tank 200 from the connecting pipe 150 more evenly distributed.

FIG. 3C is a schematic cross-sectional and top view of a second storage tank according to an embodiment of the present invention. It must be noted here that the embodiment in FIG. 3C uses the same or similar components with the same or similar numbers, and the description of the same technical content is omitted. For the description of the omitted part, reference may be made to the foregoing embodiments, and details are not repeated here.

Please refer to FIG. 3C , in this embodiment, one side 300s2 of the third storage tank 300 is an inclined plane, and the other side 300s1 is an arc. In this embodiment, the third storage tank 300 is substantially non-rotationally symmetrical.

The raw material S in the third storage tank 300 descends along the side 300s1 and/or 300s2 of the raw material tank, and in design, if the height HB of the storage tank 300 is small, the impact force of the raw material S on the storage tank will be slightly Smaller, at this time, if a non-rotationally symmetrical storage barrel is designed, the raw material S can quickly drop along the side 300S1 and/or 300S2 of the raw material barrel, and quickly reach the required weight of the material, and the non-rotational symmetry The storage tank can make the raw material S in the storage tank 300 more evenly distributed.

In summary, the feeding device and feeding method of the present invention can better control the feeding rate of raw materials.

10: Feeding device 100: The first storage tank 100t, 200t, 300t, 410t: top 150: the first connecting pipe 152: The first valve 200: The second storage tank 200b, 300b, 422b, 424b, 426b, EPb: Bottom 200s1, 200s2, 300s1, 300s2: side 250: the second connecting pipe 252: second valve 300: The third storage tank 400: Conveyor system 410: feeding device 422: first baffle plate 424: second baffle 426: The third baffle D1: the first direction EP: discharge port IP: Inlet L0, H0, H1, H2, H3, HA, HB: Height L1, L2, L3: Distance S: raw material α1, α2, α3: acute angle θ1: first exterior angle θ2: Second exterior angle θ3: third exterior angle θ4, θ6: tilt angle θ5: Fourth exterior angle

Fig. 1 is a schematic cross-sectional view of a feeding device according to an embodiment of the present invention. Fig. 2 is a flowchart of a feeding method according to an embodiment of the present invention. FIG. 3A is a schematic cross-sectional and top view of a first storage tank according to an embodiment of the present invention. FIG. 3B is a schematic cross-sectional and top view of a second storage tank according to an embodiment of the present invention. FIG. 3C is a schematic cross-sectional and top view of a third storage tank according to an embodiment of the present invention.

10: Feeding device 100: The first storage tank 100t, 200t, 300t, 410t: top 150: the first connecting pipe 152: The first valve 200: The second storage tank 200b, 300b, 422b, 424b, 426b, EPb: Bottom 200s1, 200s2, 300s1, 300s2: side 250: the second connecting pipe 252: second valve 300: The third storage tank 400: Conveyor system 410: Conveying device 422: The first baffle 424: second baffle 426: The third baffle D1: the first direction EP: discharge port IP: Inlet L0: height L1, L2, L3: Distance S: raw material θ1: first exterior angle θ2: Second exterior angle θ3: third outer angle θ4, θ6: tilt angle θ5: Fourth exterior angle

Claims (14)

A feeding device, comprising: a first storage tank; a second storage tank located above the first storage tank; A first connecting pipe, wherein one end of the first connecting pipe is connected to the first storage tank and has a first outer angle with the first storage tank, and the other end of the first connecting pipe is connected to the second storage tank a material barrel, and has a second outer angle with the second material storage barrel; a first valve disposed on or in the first connecting pipe; a conveying device, disposed below a discharge port of the first storage barrel, and configured to convey a plurality of raw materials along a first direction; a first baffle disposed in the first direction of the outlet; and A second baffle, arranged in the first direction of the first baffle, wherein the distance between the first baffle and the feeding device is greater than or equal to the distance between the second baffle and the feeding device distance. The feeding device as described in claim 1, further comprising: a third baffle, arranged in the first direction of the second baffle, wherein the distance between the second baffle and the conveying device is greater than or equal to the distance between the third baffle and the conveying device distance. The feeding device as described in claim 1, further comprising: a third storage tank located above the second storage tank; a second connecting pipe, wherein one end of the second connecting pipe is connected to the second storage tank, and the other end of the second connecting pipe is connected to the third storage tank; and A second valve is arranged on or in the second connecting pipe. The feeding device according to claim 1, wherein the first storage tank includes a first side wall, a second side wall and a third side wall connected in sequence from top to bottom, wherein the acute angle between the first side wall and the horizontal plane α1 is greater than or equal to the acute angle α2 between the second side wall and the horizontal plane, and the acute angle α2 is greater than or equal to the acute angle α3 between the third side wall and the horizontal plane. The feeding device according to claim 1, wherein the height H1 of the first side wall is greater than the height H2 of the second side wall, and the height H2 is greater than the height H3 of the third side wall. The feeding device according to claim 1, wherein the first storage tank is substantially rotationally symmetrical, and the second storage tank is substantially non-rotationally symmetrical. A feeding method, comprising: Provide the feeding device as described in claim 1; providing the raw materials in the second storage tank; At least part of the raw materials arrive at the first storage tank from the second storage tank through the first connecting pipe; At least part of the raw materials leave the first storage tank from the outlet of the first storage tank and arrive at the delivery device; The conveying device conveys at least part of the raw materials along the first direction, and passes through the first baffle and the second baffle in sequence. The feeding method as described in claim item 7, wherein the feeding device further includes: detecting the weight change of the raw materials in the first storage tank; and Change the distance between the first baffle and the conveying device. The feeding method as described in claim item 7, wherein the feeding device further includes: a third storage tank located above the second storage tank; A second connecting pipe, wherein one end of the second connecting pipe is connected to the second storage tank, and the other end of the second connecting pipe is connected to the third storage tank; a second valve disposed on or in the second connecting pipe; and a third baffle, arranged in the first direction of the second baffle, wherein the distance between the second baffle and the conveying device is greater than or equal to the distance between the third baffle and the conveying device distance. The feeding method as described in claim 9, wherein the opening area of the first valve decreases as the weight of the raw materials in the first storage tank increases, and the opening area of the second valve decreases as the weight of the second The weight of these raw materials in the storage tank decreases and rises. The feeding method as described in claim item 7, further comprising: Calculate the feed rate of the first storage tank; Comparing the discharge rate of the first storage tank with the expected discharge rate; changing the distance between the first baffle plate and the delivery device when the discharge rate of the first storage tank is different from the expected discharge rate; and When the feeding rate of the first storage tank is equal to the expected feeding rate, the distance between the first baffle plate and the feeding device is maintained. The feeding method as described in claim item 11, further comprising: After the distance between the first baffle and the conveying device reaches a maximum value, the distance between the second baffle and the conveying device is increased. The feeding method as described in claim item 11, further comprising: Detect whether the second storage tank is feeding; changing the distance between the first baffle plate and the feeding device when the feeding rate of the first storage tank is different from the expected feeding rate and the second storage tank is not in feeding; When the second material storage tank is feeding material, the distance between the first baffle plate and the material conveying device is maintained. The feeding method according to claim 7, wherein the raw materials are silicon particles with a particle size greater than 0 and less than 50 mm.

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