TWI783138B - Temperature adjustment device for stone surface board and detection device equipped with it - Google Patents

Abstract

Equipped with: the lower temperature-regulating panel arranged on the installation floor; and the temperature control part for controlling the temperature of the lower temperature-regulating panel; It becomes the set value to control the temperature of the temperature control panel below.

Description

Temperature adjustment device for stone surface board and detection device equipped with it

The present invention relates to a temperature adjustment device for stone surface panels and a detection device equipped with the same.

In recent years, in flat panel displays (FPD) such as liquid crystal display (Liquid Crystal Display: LCD) panels and organic EL panels, the size of the glass substrate has continued to increase with the increase in the size of the display. In the manufacture of a large-scale FPD, a photomask that performs equal exposure on the glass substrate is used. Therefore, the size of the photomask and the original mother plate on which the electronic circuit is formed are also remarkably increased along with the size of the LCD panel or mother glass.

In order to detect the pattern arrangement etc. in a large photomask, the detection apparatus disclosed by patent document 1 is used, for example. This detection device has a stone surface plate as a base as a base of the device. A photomask supporting part that can reciprocate relative to the stroke direction is arranged on the stone surface plate. A photomask is supported by this photomask support part, and moves along a stroke direction. At this time, the mask is supported by the mask support portion in an upright state so that the mask surface is parallel to the stroke direction and the vertical direction. That is, the photomask is placed on the stone surface plate in a so-called vertical state. [Prior Art Literature] [Patent Document]

[Patent Document 1] JP-A-2017-102074

[Problem to be Solved by the Invention]

In such a detection device, it is very important to maintain the plane accuracy of the stone surface plate. As shown in FIG. 14 , in the stone surface plate 200 , if a pitching (pitching) of bending occurs in the axial direction of an unillustrated horizontal axis perpendicular to the stroke direction S, a photomask surface will be produced on the photomask 201 along with it. above the bend. Due to the bending of the mask 201 on the mask surface, the pattern 202 on the panel surface also causes a positional shift. Therefore, if the stone surface panel 200 is pitched, there will be a problem that accurate detection cannot be performed.

In the manufacture of stone surface panels, the temperature environment for grinding to obtain the plane accuracy of the stone surface panels may not be consistent with the temperature environment for using the testing device. That is, the ambient temperature of the detection device differs according to each user's environment. For example, a stone surface plate with a thickness of 400mm and a length of 4.5m is made of granite (granite). When the temperature difference between the upper and lower sides of the stone surface plate (the upper temperature > the lower temperature) is 0.1°C, an angle close to 0.2 seconds is generated. (1 second angle: 1/3600 degree) pitch error. Stone surface boards that are ground in winter are easy to make in the cold environment below. If the use environment does not keep the bottom at a low temperature, the plane accuracy cannot be reproduced.

Usually, in the inspection device, the upper side of the stone surface board is exposed to the heat treatment chamber, so the temperature adjustment is often carried out, and the temperature adjustment of the lower side of the stone surface board cannot be taken care of in most cases. The underside of the stone surface panel is greatly affected by the temperature of the facing installation floor. When the temperature of the installation ground is lower than the temperature of the underside of the stone surface board, the infrared rays emitted from the underside of the stone surface board are absorbed by the installation ground, and there will be no return of the same amount of infrared rays as the infrared rays emitted from the underside of the stone surface board , and thus become colder. Conversely, if the temperature of the ground is higher than the temperature under the stone surface plate, the infrared rays emitted from the underside of the stone surface plate will return to the bottom of the stone surface plate. Therefore, the temperature under the stone surface plate become an upward trend.

Here, it can be considered to directly heat or cool the underside of the stone surface plate for temperature regulation. In this case, a quick response on the side of the stone surface plate is required by direct temperature regulation, and therefore, it becomes difficult to stabilize the shape of the stone surface plate. Also, even if the underside of the stone surface plate is directly heated or cooled, the influence of heat from the installation floor cannot be eliminated, so it becomes difficult to accurately control the shape of the stone surface plate.

Therefore, in an inspection device equipped with a stone surface plate, it is required to be able to suppress errors in pattern detection of the mask caused by deformation of the stone surface plate due to the temperature environment of the installation floor.

In view of the above problems, the present invention aims to provide a temperature adjustment device for a stone surface panel that can easily maintain the flatness of the stone surface panel without being affected by the installation location, and an inspection device that can improve the detection accuracy of the panel to be inspected. device. [Means to solve the problem]

In order to solve the above-mentioned problems and achieve the purpose, an aspect of the present invention is a temperature adjustment device for a stone surface plate arranged with a gap between the installation ground, and it is characterized by having: The lower temperature-regulating panel arranged on the above-mentioned setting ground; and the temperature control part for controlling the temperature of the above-mentioned lower temperature-regulating panel; the above-mentioned lower temperature-regulating panel has: a heat insulation panel arranged on the above-mentioned setting ground; On the above-mentioned heat insulation panel, there is a heat radiation panel through which the temperature adjustment part performs heat supply or heat absorption; The temperature of the above-mentioned heat radiation panel is controlled in such a way that the temperature difference between them becomes a set value.

As the above-mentioned aspect, it is preferable that the temperature-regulating panel on the lower surface is arranged in each of the plurality of areas where the occupied area where the stone surface plate is installed on the above-mentioned installation floor is divided along the longitudinal direction of the stone surface plate. Divide the area.

As the above-mentioned aspect, preferably, a panel-side temperature sensor is arranged on the above-mentioned lower temperature-regulating panel, and a pair of the panel-side temperature sensor is set on the stone surface plate corresponding to the above-mentioned panel-side temperature sensor. The temperature sensor on the upper side, and the temperature control unit are based on the temperature detection values of the temperature sensor on the panel side and the temperature sensor on the upper side corresponding to the pair in the vertical direction, and adjust the temperature of the respective lower panel The temperature of the above-mentioned temperature adjustment part is controlled.

As the above-mentioned aspect, it is preferable that the periphery of the gap between the lower temperature-regulating panel and the lower surface of the stone surface plate is surrounded by a cell wall.

As the said aspect, it is preferable that the said heat insulation panel consists of the resin sheet of an independent foam structure.

As the said aspect, it is preferable that the said heat radiation panel consists of a metal plate.

As the above aspect, preferably, the temperature adjustment unit is a pipe through which a refrigerant flows.

As the aspect described above, it is preferable that the tube has a pair of refrigerant flow paths parallel to each other, and the refrigerant flow paths are set so that the refrigerant flows in opposite directions in each of the pair of refrigerant flow paths.

As the above-mentioned aspect, it is preferable to include: a container for supplying the refrigerant adjusted to a reference temperature lower than the temperature of the above-mentioned stone surface plate warmed by the above-mentioned lower temperature-regulating panel to the above-mentioned temperature-adjusting pipe; and a heat exchanger. , using cooling water at a temperature lower than the reference temperature to cool the refrigerant returned through the temperature adjustment pipe to the reference temperature; supply the refrigerant cooled by the heat exchanger to the container.

Another aspect of the present invention is characterized in that it includes: a stone surface plate disposed with a gap between the installation ground and used for placing the panel to be inspected; and an inspection camera for taking pictures of the state of the panel surface of the panel to be inspected ; and the temperature adjustment device of the above-mentioned stone surface board; the above-mentioned temperature adjustment device is equipped with: a lower temperature-regulating panel arranged on the above-mentioned installation ground in a manner facing the lower surface of the above-mentioned stone surface board; A temperature control part for controlling the temperature of the panel; the above-mentioned lower temperature-adjusting panel is equipped with: a heat-insulating panel arranged on the above-mentioned installation floor; A heat radiation panel for heat supply and heat absorption; the temperature control unit controls the temperature of the heat radiation panel in such a way that the temperature difference between the upper surface of the stone surface plate and the surface of the heat radiation panel becomes a set value. control. [Invention effect]

According to the present invention, it is possible to realize the temperature adjustment device of the stone surface panel which can suppress the deformation of the stone surface panel without being affected by the installation place, and especially can easily maintain the plane accuracy, and which can improve the detection accuracy of the panel to be tested. detection device.

The details of the temperature adjustment device and detection device of the stone surface panel of the embodiment of the present invention will be described below based on the drawings. However, the drawings are schematic representations, and it should be noted that the dimensions, ratios of dimensions, shapes, and degrees of deformation of each component may be different from those in reality. In addition, the relationship between the number and size of each member, or the ratio or shape of each member between the drawings also includes a portion that is different from each other.

"First Embodiment" Fig. 1 shows a detection device 1 provided with a temperature adjustment device for stone surface panels according to a first embodiment of the present invention. The detection apparatus 1 of this embodiment is used for detection of the pattern arrangement of the mask M which is the panel to be inspected shown in FIG. 1 . The detection device 1 can detect the position data of the mask pattern formed on the mask surface of the mask M, and by comparing the position data with the design data, defects of the mask pattern of the mask M can be detected. Inspection or correction of mask pattern, etc.

[Schematic configuration of detection device] As shown in FIG. 1, the detection apparatus 1 of this embodiment is arrange|positioned on the installation floor F. As shown in FIG. The detection device 1 is equipped with: a stone surface plate 2 as a stage that becomes the basis of the device; a mask support portion 3 as a panel support portion; a plurality of supporting stone surface plates 2 (six in the present embodiment as shown in FIG. 3 ) The vibration-removing platforms 4, 5, 6, 7, 8, 9; the camera unit 10; and the temperature adjustment device 11.

(Stone Surface Panel) The stone surface board 2 is made of, for example, granite (granite). As shown in Fig. 1 and Fig. 2, the stone surface plate 2 has a roughly rectangular parallelepiped shape and has: an upper surface 21, a lower surface 22, side surfaces 23, 24 on both sides, and side surfaces 25, 26 at both ends in the longitudinal direction. The size of the stone surface plate 2 is, for example, a roughly cuboid shape with a width of about 1200 mm, a length of about 4500 mm, and a thickness of about 400 mm. Also, the size of the stone surface board 2 can be appropriately changed according to the size of the mask M to be processed.

As shown in FIG. 2 , on the upper surface 21 of the stone surface plate 2 , a guide groove 2A extending along the longitudinal direction is formed at the center of the upper surface 21 in the width direction W. Recesses 2B are respectively formed in the four corners of the lower surface 22 of the stone surface plate 2 . Further, recessed portions 2C are formed on both sides in the width direction W of the center in the longitudinal direction of the lower surface of the stone surface plate 2 .

The above-mentioned six vibration-removing platforms 4, 5, 6, 7, 8, and 9 are installed on the installation floor F in a manner corresponding to the recesses 2B, 2C of the arranged stone surface panels 2. The stone surface board 2 is to contact the respective tops 4A, 5A, 6A, 5A, 6A, Modes above 7A, 8A, and 9A are configured. As shown in Fig. 1, in the state where the stone surface plate 2 is supported by the vibration-removing platforms 4, 5, 6, 7, 8, 9, a predetermined height is formed between the lower surface 22 of the stone surface plate 2 and the installation floor F. Dimension gap C.

(Reticle support part) As shown in FIG. 1 , in the guide groove 2A of the stone surface plate 2 , the photomask support portion 3 is freely movable in the travel direction S of the stone surface plate 2 (the long side direction of the stone surface plate 2 ). The mask support part 3 is equipped with the support frame 3A which supports the edge part of the mask M.

(devibration table) In this embodiment, the anti-vibration tables 4, 6, 7, and 9 corresponding to the concave portion 2B of the stone surface plate 2 are active anti-vibration tables, and the anti-vibration tables 5 and 8 corresponding to the concave portion 2C of the stone surface plate 2 are passive types. Devibration table. In addition, in the present invention, the configuration of the vibration-isolating table is not limited to this.

(camera department) As shown in FIG. 1 , the imaging unit 10 includes a vertical guide column 10A and a detection camera 10B. The inspection camera 10B is provided so as to be movable in the vertical direction along the vertical guide pillar 10A. The upper and lower guide pillars are arranged on the top 21 of the stone surface board 2 . The inspection camera 10B is installed so as to move up and down by a control device and a drive device not shown.

[Construction of temperature adjustment device] As shown in FIG. 4 , the temperature adjustment device 11 includes: a first upper surface temperature sensor 31, a second upper surface temperature sensor 32, a third upper surface temperature sensor 33, and a fourth upper surface temperature sensor. 34. The first lower temperature control panel 12, the second lower temperature control panel 13, the third lower temperature control panel 14, the fourth lower temperature control panel 15, the first panel side temperature sensor 41, the second panel side temperature sensor Detector 42, 3rd panel side temperature sensor 43, 4th panel side temperature sensor 44, water temperature adjustment heaters 17, 18, 19, 20, temperature adjustment pipe 37 as the temperature adjustment part, adjusted to the bottom The temperature control part 16 for controlling the temperature of the temperature panel, and the curtain 50 as the compartment wall (refer to FIG. 2 ).

(upper side temperature sensor) In this embodiment, as shown in FIG. 4 , the first upper surface side temperature sensors are sequentially provided corresponding to the areas A1, A2, A3, and A4 in which the upper surface 21 of the stone surface plate 2 is divided into four in the longitudinal direction. 31 . The second upper surface temperature sensor 32 , the third upper surface temperature sensor 33 , and the fourth upper surface temperature sensor 34 . Their first upper surface temperature sensor 31 , the second upper surface temperature sensor 32 , the third upper surface temperature sensor 33 , and the fourth upper surface temperature sensor 34 are connected to the temperature control unit 16 , and output the temperature detection values of the respective areas A1, A2, A3, A4 to the temperature control unit 16.

(Temperature panel below) The temperature regulation panel 12 below the 1st, the temperature regulation panel 13 below the 2nd, the temperature regulation panel 14 below the 3rd, the temperature regulation panel 15 below the 4th in the 4 areas A1, A2, A3, A4 ( Referring to FIG. 4 ), it is arranged on the installation floor F below the stone surface plate 2 in a corresponding manner in the up and down directions.

As shown in FIG. 5 , the first lower temperature control panel 12 is formed by laminating a heat insulating panel 35 and a heat radiation panel 36 . Again, Fig. 5 only shows the first bottom temperature regulation panel 12, the second bottom temperature regulation panel 13, the third bottom temperature regulation panel 14, and the fourth bottom temperature regulation panel 15 are also of the same configuration. The heat radiation panel 36 constitutes.

The heat insulating panel 35 is formed of a resin sheet having a high heat insulating closed-cell foam structure. This heat insulation panel 35 is arrange|positioned so that it may contact the installation floor F as shown in FIG. In particular, since the heat insulating panel 35 has an independent foam structure, it has a higher heat shielding effect than a heat insulating material having a continuous foam structure. However, other heat insulating members capable of suppressing conduction of heat from the installation floor F side can also be applied to the present invention.

The heat radiation panel 36 is made of a metal plate with high thermal conductivity. In this embodiment, the heat radiation panel 36 is made of an aluminum plate. As shown in FIG. 5 , the heat radiation panel 36 is laminated on the heat insulation panel 35 . On the surface of the heat radiation panel 36, the temperature adjustment pipe 37 which is a pipe as a temperature adjustment part is buried. Therefore, the heat radiation panel 36 controls the temperature through the temperature adjustment pipe 37 for heat supply or heat absorption, and outputs the controlled temperature heat radiation to the lower surface 22 of the stone surface plate 2 .

(temperature adjustment department) As shown in FIGS. 2 , 3 and 5 , the temperature adjustment pipe 37 is integrally formed so that a pair of refrigerant flow paths 37A, 37B are parallel to each other. Moreover, in this embodiment, in order to improve the temperature uniformity in the temperature adjustment pipe 37, it is set so that the water of the same temperature may flow in opposite directions in the refrigerant|coolant flow path 37A, 37B.

In the present embodiment, the temperature adjustment tube 37 is made of, for example, a fluororesin. Since the temperature adjustment tube 23 is made of fluororesin, the pressure resistance can be improved, and the effect of preventing water leakage can be enhanced. As shown in FIG. 2 and FIG. 3 , the heat radiation of the temperature adjustment tube 37 relative to the first lower temperature regulation panel 12 , the second lower temperature regulation panel 13 , the third lower temperature regulation panel 14 , and the fourth lower temperature regulation panel 15 Panels 36 are laid out and buried in a serpentine manner. In addition, it is better to adjust the arrangement density of the tubes 37 to be equal to the temperature of the heat radiation panel 36, and to consider the heat distribution caused by heat conduction and the like based on the arrangement states of the vibration-isolating tables 4, 5, 6, 7, 8, and 9. It is also possible to determine the configuration density.

As shown in FIG. 4 , the temperature adjustment pipes 37 respectively arranged on the first lower temperature regulation panel 12 , the second lower temperature regulation panel 13 , the third lower temperature regulation panel 14 , and the fourth lower temperature regulation panel 15 are arranged sequentially. Water whose water temperature is adjusted via water temperature adjustment heaters 17 , 18 , 19 , and 20 is supplied. Also, in the present embodiment, one temperature adjustment pipe 37 has the refrigerant flow paths 37A, 37B, so it is set so that the water temperature is supplied from the water temperature adjustment heaters 17, 18, 19, 20 to the two refrigerant flow paths 37A, 37B, respectively. Adjusted water.

(panel side temperature sensor) The first panel-side temperature sensor 41 is sequentially arranged on the upper surfaces of the first lower temperature-regulating panel 12, the second lower temperature-regulating panel 13, the third lower temperature-regulating panel 14, and the fourth lower temperature-regulating panel 15. , the second panel-side temperature sensor 42 , the third panel-side temperature sensor 43 , and the fourth panel-side temperature sensor 44 . Also, their 1st panel side temperature sensor 41, the 2nd panel side temperature sensor 42, the 3rd panel side temperature sensor 43, and the 4th panel side temperature sensor 44 are relative to the stone surface in sequence. The first upper surface temperature sensor 31 , the second upper surface temperature sensor 32 , the third upper surface temperature sensor 33 , and the fourth upper surface temperature sensor 34 on the panel 2 are arranged in corresponding vertical positions. The location is better.

The first panel-side temperature sensor 41 , the second panel-side temperature sensor 42 , the third panel-side temperature sensor 43 , and the fourth panel-side temperature sensor 44 are connected to the temperature control unit 16 . The first lower temperature control panel detected by the first panel-side temperature sensor 41 , the second panel-side temperature sensor 42 , the third panel-side temperature sensor 43 , and the fourth panel-side temperature sensor 44 12. The temperature detection values on the upper surfaces of the second lower temperature-regulating panel 13 , the third lower temperature-regulating panel 14 , and the fourth lower temperature-regulating panel 15 are output to the temperature control unit 16 .

(water temperature adjustment heater) As shown in Figure 4, the water temperature adjustment heaters 17, 18, 19, 20 are carried out, and according to the control signal of the temperature control unit 16, the water supplied at the reference temperature (T) is heated to the specified control temperature (T+A ), (T+B), (T+C), (T+D) functions and actions. Also, here, the reference temperature (T) is set to a constant temperature that is always lower than the temperature of the upper surface 21 of the stone surface plate 2 in the environment of the motion detection device 1 .

(temperature control department) As shown in Figure 4, the temperature control unit 16 is connected to the first upper surface temperature sensor 31, the second upper surface temperature sensor 32, and the third upper surface temperature sensor on the upper surface 21 side of the stone surface plate 2. 33, and the 4th upper side temperature sensor 34, and the 1st panel side temperature sensor 41, the 2nd panel side temperature sensor 42, the 3rd panel side temperature sensor 43, And the fourth panel side temperature sensor 44. The temperature control unit 16 is connected to water temperature adjustment heaters 17 , 18 , 19 , and 20 .

The temperature control unit 16 is constituted by, for example, a computing device such as a personal computer or a device having a memory unit. In the temperature control unit 16, the reference temperature to be added to the water temperature adjustment heaters 17, 18, 19, 20 is determined so that the difference between the upper side temperature and the lower side temperature of the stone surface plate 2 becomes a preset temperature. (T) and control the water temperature adjustment heaters 17,18,19,20. In addition, the difference between the temperature on the upper side and the temperature on the lower side (temperature on the upper side - temperature on the lower side) can be set to, for example, about 0.2°C. Also, the difference between the temperature on the upper side and the temperature on the lower side can be determined according to the characteristics of each stone surface board 2 .

By controlling the water temperature adjustment heaters 17, 18, 19, and 20 in this way, it is possible to flow through the first bottom temperature regulation panel 12, the second bottom temperature regulation panel 13, the third bottom temperature regulation panel 14, and the third bottom temperature regulation panel. 4. Changes in the temperature of the water in the temperature adjustment pipes 37 which are set respectively on the temperature adjustment panel 15 below. Therefore, the temperature of the heat radiation panels 36 of each lower temperature-regulating panel can be individually controlled.

(compartment wall) As shown in FIG. 2 , in this embodiment, curtains 50 as compartment walls are arranged along respective peripheries of the first lower temperature-regulating panel 12 , the second lower temperature-regulating panel 13 , and the third lower temperature-regulating panel 14 . . In this embodiment, as the curtain 50, for example, a static electricity preventing vinyl chloride sheet or the like is used. Moreover, the curtain 50 is used for the purpose of closing the gap between the stone surface board 2 and the installation floor F. As shown in FIG. Furthermore, the curtain 50 is used to divide the space (gap C) above each of the first lower temperature-regulating panel 12, the second lower temperature-regulating panel 13, and the third lower temperature-regulating panel 14. Therefore, the curtain 50 can prevent air convection between the lower temperature-regulating panels. Therefore, the curtain 50 functions to prevent the influence of the temperature from the adjacent panels in each of the lower temperature-regulating panels.

(function and action) In the detection device 1 and the temperature adjustment device 11 of this embodiment, by detecting the temperature of each area A1, A2, A3, A4 of the upper surface 21 of the stone surface plate 2, and the temperature of the areas A1, A2, A3, A4 The temperature of each lower temperature regulation panel below the corresponding stone surface board 2, the temperature control part 16 carries out the temperature control of the water temperature adjustment heaters 17, 18, 19, 20.

Therefore, in this embodiment, the temperature difference between the temperature on the upper surface 21 side and the temperature on the lower side in each area A1, A2, A3, A4 of the stone surface plate 2 can be maintained at a set temperature difference, so that the stone material can be suppressed. Deformation of the surface panel 2. Fig. 6-1 schematically shows the state in which the temperature difference in the upper and lower directions of the stone surface panel 2 changes due to the installation environment, and pitches are generated at multiple locations. In this embodiment, by carrying out the above-mentioned temperature control, as shown in FIG. 6-2, deformation of the stone surface board 2 can be suppressed. Therefore, as shown in FIG. 7 , deformation of the mask M mounted on the stone surface plate 2 can be prevented, and detection errors caused by deformation of the mask pattern Mp of the mask M can be prevented in advance.

The temperature adjusting device 11 of this embodiment performs the above functions and operations, so it is not limited to the installation place, and can suppress the deformation of the stone surface panel 2, and in particular, can easily maintain the plane accuracy of the upper surface 21. Therefore, in the detection apparatus 1 provided with this temperature adjustment apparatus 11, the detection precision of the photomask M can be improved.

The installation environment of the detection device 1 includes a temperature-controlled heat treatment room, or a clean room in which only clean air flows downward without temperature control of the upper surface 21 of the stone surface plate 2 . According to the detection device 1 and the temperature adjustment device 11 of this embodiment, even in any of the above-mentioned installation environments, the influence of the temperature from the installation floor F side can be suppressed. Moreover, in this embodiment, deformation|transformation of the stone surface board 2 can be suppressed also in the summer season with high temperature, or the winter season with low temperature.

In the detection device 1 and the temperature adjustment device 11 of the present embodiment, the temperature control on the lower side 22 side of the stone surface plate 2 is carried out only with the temperature having a certain difference from the temperature on the top surface of the stone surface plate 2 as the target value. Therefore, the overall control process is an open-loop control, and the stability of the control system can be easily ensured.

In the detection device 1 and the temperature adjustment device 11 of the present embodiment, the first lower temperature control panel 12 and the second lower surface respectively correspond to each of the four areas A1, A2, A3, and A4 for the divided stone surface plate 2. The temperature adjustment panel 13 , the third lower temperature adjustment panel 14 , and the fourth lower temperature adjustment panel 15 can adjust the temperature and correct the complicated curvature of the stone surface panel 2 .

In the detection device 1 and the temperature adjustment device 11 of this embodiment, the heat from the first bottom temperature regulation panel 12, the second bottom temperature regulation panel 13, the third bottom temperature regulation panel 14, and the fourth bottom temperature regulation panel 15 The heat radiation of the radiation panel 36 controls the temperature of the lower surface 22 of the stone surface plate 2 , and therefore, the stress accompanying direct heating is not given to the stone surface plate 2 .

"Second Embodiment" Figure 8-1 and Figure 8-2 schematically show the stone surface panel 2 and the lower temperature control panel used in the detection device 1 and the temperature adjustment device 11 of the second embodiment of the present invention. In this embodiment, the stone surface plate 2 is divided into three areas A1, A2, and A3 in the longitudinal direction, and a first upper surface temperature sensor 31, a second upper surface temperature sensor 32, and a third upper surface temperature sensor 31 are provided. Temperature sensor 33. Corresponding thereto, a first lower temperature regulation panel 12 , a second lower surface temperature regulation panel 13 , and a third lower surface temperature regulation panel 14 are provided as the lower surface temperature regulation panels. The other configurations of this embodiment are roughly the same as those of the above-mentioned first embodiment.

In this embodiment, multiple deformations of the stone surface plate 2 as shown in FIG. 8-1 can also be suppressed, and the upper surface can maintain a flat shape as shown in FIG. 8-2.

"Third Embodiment" 9-1 and 9-2 schematically show the stone surface panel 2 and the lower temperature control panel used in the detection device 1 and the temperature adjustment device 11 of the third embodiment of the present invention. In this embodiment, the stone surface panel 2 is divided into two regions A1 and A2 in the longitudinal direction, and a first upper surface temperature sensor 31 and a second upper surface temperature sensor 32 are provided. Corresponding thereto, a first bottom temperature regulation panel 12 and a second bottom temperature regulation panel 13 are provided as the bottom temperature regulation panel. The other configurations of this embodiment are roughly the same as those of the above-mentioned first embodiment.

In this embodiment, the deformation of the stone surface plate 2 shown in FIG. 9-1 can also be suppressed, and the upper surface can maintain a flat shape as shown in FIG. 9-2.

"Fourth Embodiment" Fig. 10 shows a first bottom temperature control panel 12A used in the detection device 1 and the temperature control device 11 according to the fourth embodiment of the present invention. In this embodiment, the front and back of the heat radiation panel 36 in the first lower temperature control panel 12 of the first embodiment described above are reversely laminated on the heat insulation panel 35 . Therefore, the temperature adjustment pipe 37 is located near the interface between the heat insulation panel 35 and the heat radiation panel 36 . Other configurations of this embodiment are the same as those of the above-mentioned first embodiment.

In this embodiment, by disposing the temperature adjustment pipe 37 on the lower side of the heat radiation panel 36, when the heat conducted from the temperature adjustment pipe 37 is conducted to the upper surface of the heat radiation panel 36, the uniformity of temperature can be further improved on the upper surface. sex.

"Fifth Embodiment" Fig. 11 and Fig. 12 show a lower temperature regulating panel 60 according to a fifth embodiment of the present invention. As shown in FIG. 12, the lower temperature control panel 60 has a structure in which a heat insulating panel 35 and a heat radiation panel 36 are laminated, which is the same as that of the above-mentioned first embodiment. In this embodiment, the temperature adjustment pipe 38 as a temperature adjustment part embedded in the surface of the heat radiation panel 36 is a pipe having one flow path. Other configurations of this embodiment are the same as those of the above-mentioned first embodiment.

"Sixth Embodiment" Fig. 13 shows a schematic configuration of a temperature adjustment device 11A according to a sixth embodiment of the present invention. In addition, in this embodiment, the water supplied to the water temperature adjustment heaters 17, 18, 19, 20 is lowered to an appropriate temperature by the water returned from the individual temperature adjustment pipes 37 and stored in the container 71 for recycling. Also, in this embodiment, the first panel-side temperature sensor 41, the second panel-side temperature sensor 42, the third panel-side temperature sensor 43, and the fourth panel-side temperature sensor 44 are arranged on the Below the stone surface board 2. The other configurations of this embodiment are roughly the same as those of the above-mentioned first embodiment, and therefore, the drawings corresponding to the first embodiment will be described as appropriate.

Hereinafter, 11 A of temperature adjustment apparatuses of this embodiment are demonstrated using FIGS. 1-4 and FIG. 13. FIG. The temperature adjustment device 11A includes: a first upper surface temperature sensor 31 , a second upper surface temperature sensor 32 , a third upper surface temperature sensor 33 , a fourth upper surface temperature sensor 34 , and a first panel. Side temperature sensor 41, second panel side temperature sensor 42, third panel side temperature sensor 43, and fourth panel side temperature sensor 44, water temperature adjustment heaters 17, 18, 19, 20 , the temperature adjustment pipe 37 as the temperature adjustment part, the first bottom temperature regulation panel 12, the second bottom temperature regulation panel 13, the third bottom temperature regulation panel 14 and the fourth bottom temperature regulation panel 15 respectively equipped with the temperature adjustment pipe 37, The temperature control part 16 which controls the temperature of the individual temperature adjustment pipe 37, the container 71, the heat exchanger 72, and the three-way valve 73.

The temperature adjustment pipe 37 is integrally formed so that a pair of refrigerant flow paths 37A and 37B are parallel to each other (see FIGS. 2 and 3 ). The temperature adjustment pipe 37 is set so that water of the same temperature flows in opposite directions to each other in the refrigerant flow paths 37A and 37B.

As shown in FIG. 13 , water whose water temperature has been adjusted through the water temperature adjustment heaters 17 , 18 , 19 , and 20 is supplied to the individual temperature adjustment pipes 37 . Also, in this embodiment, one temperature adjustment pipe 37 has a pair of refrigerant flow paths 37A, 37B, so it is set to supply the two refrigerant flow paths 37A, 37B from the water temperature adjustment heaters 17, 18, 19, 20, respectively. Water with water temperature adjustment.

Specifically, a pipe 81 is connected to the downstream side of the water temperature adjustment heater 17 . The downstream end of this pipe 81 is branched into two pipes 81A and 81B. The piping 81A is connected to the refrigerant flow path 37A provided on the corresponding first lower surface temperature regulation panel 12 (see FIGS. 2 and 3 ). The pipe 81B is connected to the refrigerant flow path 37B so that the flow of water in the flow path is reversed to the flow of water in the refrigerant flow path 37A.

A pipe 82 is connected to the downstream side of the water temperature adjustment heater 18 . The downstream end of the pipe 82 is branched into two pipes 82A and 82B. The piping 82A is connected to the refrigerant flow path 37A (see FIGS. 2 and 3 ) provided on the corresponding second lower surface temperature regulation panel 13 . The piping 82B is connected to the refrigerant flow path 37B so that the flow of water in the flow path is reversed to the flow of water in the refrigerant flow path 37A.

A pipe 83 is connected to the downstream side of the water temperature adjustment heater 19 . The downstream end of the pipe 83 is branched into two pipes 83A and 83B. The pipe 83A is connected to the refrigerant flow path 37A provided on the corresponding third lower surface temperature regulation panel 14 (see FIGS. 2 and 3 ). The pipe 83B is connected to the refrigerant flow path 37B so that the flow of water in the flow path is reversed to the flow of water in the refrigerant flow path 37A.

A pipe 84 is connected to the downstream side of the water temperature adjustment heater 20 . The downstream end of the pipe 84 is branched into two pipes 84A and 84B. The pipe 84A is connected to the refrigerant flow path 37A provided on the corresponding fourth bottom temperature regulation panel 15 (see FIGS. 2 and 3 ). The pipe 84B is connected to the refrigerant flow path 37B so that the flow of water in the flow path is reversed to the flow of water in the refrigerant flow path 37A.

The downstream ends of the pair of refrigerant passages 37A, 37B in the temperature adjustment pipe 37 provided on the first lower temperature control panel 12 shown in FIG. 3 are sequentially connected to pipes 85A, 85B as shown in FIG. 13 . The downstream ends of these pipes 85A and 85B are connected to the pipe 85 and merged.

The downstream ends of the pair of refrigerant passages 37A, 37B in the temperature adjustment pipe 37 provided on the second lower temperature adjustment panel 13 are sequentially connected to pipes 86A, 86B as shown in FIG. 13 . The downstream ends of these pipes 86A, 86B are connected to the pipe 86 and merged.

The downstream ends of the pair of refrigerant passages 37A, 37B in the temperature adjustment pipe 37 provided on the third bottom temperature adjustment panel 14 are sequentially connected to pipes 87A, 87B as shown in FIG. 13 . The downstream ends of these pipes 87A, 87B are connected to the pipe 87 and merged.

The downstream ends of the pair of refrigerant passages 37A, 37B in the temperature adjustment pipe 37 provided on the fourth bottom temperature adjustment panel 15 are sequentially connected to pipes 88A, 88B as shown in FIG. 13 . The downstream ends of these pipes 88A, 88B are connected to the upstream end of the pipe 89 and merged. The downstream end of the pipe 89 is connected to the heat exchanger 72 .

The pipes 85 , 86 , 87 , and 88 are connected to a pipe 89 and merged. The pipe 89 is connected to the heat exchanger 72 . The water supplied from the pipe 89 and heat-exchanged by the heat exchanger 72 is supplied to the container 71 via the pipe 89A. The temperature sensor 92 is installed in the piping 89A.

A circulating water supply pipe 93 is connected to the container 71 . The circulation pump 94 and the pressure gauge 96 are installed in the circulation water supply pipe 93 . A container level gauge 95 is provided in the container 71 . A pipe 97 connected to the water temperature adjustment heater 17, a pipe 98 connected to the water temperature adjustment heater 18, a pipe 99 connected to the water temperature adjustment heater 19, and a pipe 99 connected to the water temperature adjustment heater 19 are connected to the downstream end of the circulating water supply pipe 93. The piping 100 to which the water temperature adjustment heater 20 is connected.

As shown in FIG. 13 , a pipe 90 for supplying cooling water is connected to the heat exchanger 72 . The water supplied from the piping 90 and heat-exchanged by the heat exchanger 72 is guided to the cooling water outlet via the piping 90A. The three-way valve 73 is disposed on the piping 90 . The bypass pipe 91 connected to the pipe 90A is connected to the three-way valve 73 .

In this embodiment, cooling water such as channel water with a low temperature (for example, a temperature around 10° C.) is supplied from the pipe 90, and the circulating water supplied from the pipe 89 is lowered to the reference temperature (T )control.

As shown in Figure 13, the temperature control unit 16 is connected to the first upper surface temperature sensor 31, the second upper surface temperature sensor 32, and the third upper surface temperature sensor 33 on the upper surface 21 side of the stone surface plate 2. , and the 4th upper side temperature sensor 34, and the 1st panel side temperature sensor 41, the 2nd panel side temperature sensor 42, the 3rd panel side temperature sensor 43, and the 4th panel side temperature sensor 41 on the bottom 22 side. Panel side temperature sensor 44 . In addition, the temperature control unit 16 is connected to the water temperature adjustment heaters 17 , 18 , 19 , and 20 , the tripartite valve 73 , and the temperature sensor 92 .

In the temperature control unit 16, the reference temperature (T ) are added to control the water temperature adjustment heaters 17, 18, 19, 20. In addition, the difference between the temperature on the upper side and the temperature on the lower side (temperature on the upper side - temperature on the lower side) can be set to, for example, about 0.2°C. Also, the difference between the upper side temperature and the lower side temperature may be determined according to the characteristics of each stone surface board 2 . Also, in this embodiment, the first panel-side temperature sensor 41, the second panel-side temperature sensor 42, the third panel-side temperature sensor 43, and the fourth panel-side temperature sensor 44 are arranged on the The lower surface 22 of the stone surface plate 2 is arranged on the first lower temperature regulation panel 12, the second lower temperature regulation panel 13, the third lower temperature regulation panel 14, and the fourth lower temperature regulation panel 15 as in the above-mentioned first embodiment. The surface can also be. In short, the temperature difference between the upper 21 side and the lower 22 side can be set in each area of the stone surface plate 2 .

By controlling the water temperature adjustment heaters 17, 18, 19, and 20 in this way, it is possible to flow through the first lower temperature control panel 12, the second lower temperature control panel 13, and the third lower temperature control panel 14, respectively. , the temperature change of the water in the temperature adjustment pipe 37 of the temperature adjustment panel 15 below the 4th. Therefore, the temperature of the heat radiation panels 36 of each lower temperature-adjusting panel is individually controlled.

As shown in Figure 13, the water temperature adjustment heaters 17, 18, 19, 20 are based on the control signal from the temperature control unit 16 to raise the temperature of the water supplied at the reference temperature (T) to the specified control temperature (T Function and action of +A), (T+B), (T+C), (T+D). Also, here, the reference temperature (T) is set to a constant temperature that is always lower than the temperature of the upper surface 21 of the stone surface plate 2 in the environment in which the device operates. In the present embodiment, the reference temperature (T) is set to, for example, 20°C. That is, in the present embodiment, the reference temperature (T) of the water stored in the container 71 is set to 20°C.

In this embodiment, the cooling water of 11 degreeC is supplied to the piping 90, for example. Water heated to a temperature (T+A), (T+B), (T+C), (T+D) or the like higher than 20° C. is supplied to the heat exchanger 72 through a pipe 89 . Moreover, specifically, the temperature of the water supplied to the heat exchanger 72 via the pipe 89 is, for example, about 23°C.

The temperature control unit 16 controls the three-way valve 73 according to the temperature detection value of the temperature sensor 92, or makes the cooling water flow into the bypass pipe 91, or makes the cooling water flow into the heat exchanger 72, and controls the flow rate of the cooling water. Accordingly, in the heat exchanger 72, the water supplied from the pipe 89 can be lowered from 23°C to 20°C by cooling water with a water temperature of 11°C, and the temperature of the water stored in the container 71 can be set to 20°C. . In this way, in this embodiment, it is not necessary to heat the cooling water having a low water temperature (11° C.) to 20° C., so that large power consumption is not consumed.

Also, the first upper surface temperature sensor 31 and the first panel side temperature sensor 41, the second upper surface temperature sensor 32 and the second panel side temperature sensor 42, and the third upper surface temperature sensor 33, the third panel-side temperature sensor 43, the fourth upper surface-side temperature sensor 34, and the fourth panel-side temperature sensor 44 may be configured as thermocouples, respectively.

In this embodiment, for example, it is not necessary to raise the temperature of the refrigerant such as water supply water at about 11°C to a temperature of 20°C or higher, and power consumption can be significantly reduced. That is, in this embodiment, the temperature difference between the reference temperature (T) and the control temperatures (T+A), (T+B), (T+C), and (T+D) can be reduced, so that the Reduce power consumption. Also, in this embodiment, by setting the reference temperature (T) to be higher than that of the first bottom temperature regulation panel 12, the second bottom temperature regulation panel 13, the third bottom temperature regulation panel 14, and the fourth bottom temperature regulation panel 15 The minimum control temperature is slightly lower, so the usage of cooling water can be greatly reduced.

In the present embodiment, water is used as the refrigerant circulating through the water temperature adjustment heaters 17, 18, 19, 20, temperature adjustment pipe 37, heat exchanger 72, and container 71, but the present invention is not limited thereto. In this embodiment, since water is circulated in the container 71, even in the case of water leakage, the water leakage of the capacity of the container 71 does not occur. Also, in this embodiment, there is an advantage that water leakage can be detected from a decrease in the amount of water in the container. On the other hand, in the case of the configuration (comparative example) in which cooling water (primary cooling water) such as channel water is directly heated by the water temperature adjustment heaters 17, 18, 19, 20 without circulating water in the container, the It is difficult to install a water leakage sensor on the 1st bottom temperature control panel 12, the 2nd bottom temperature control panel 13, the 3rd bottom temperature control panel 14, and the 4th bottom temperature control panel 15, etc. Therefore, in the case of water leakage in this comparative example, the amount of water leakage may become large. Therefore, the occurrence of water leakage can be significantly suppressed by the configuration of circulating in the container 71 in this embodiment.

"Other implementation forms" The first to sixth embodiments have been described above, but it should be understood that the statements and drawings constituting a part of the disclosure of these embodiments are not intended to limit the present invention. A trader can perform various alternative embodiments, examples, and operating techniques based on this disclosure.

For example, in the above-mentioned embodiment, the mask M is applied as the panel to be inspected, but it is also possible to apply a master plate which becomes an original plate of the mask on which the electronic circuit is formed.

In the above embodiment, the heat insulating panel 35 and the heat radiation panel 36 are integrally laminated, but the heat radiation panel 36 may be laminated on the heat insulating panel 35 . Also, the size and shape of the heat insulating panel 35 can cover the entire occupied area where the stone surface panel 2 is arranged, and a plurality of heat radiation panels 36 can be arranged continuously along the longitudinal direction on it, of course.

In the above embodiment, the mask M is moved in the stroke direction S on the stone surface plate 2, but the mask M is fixed on the stone surface plate 2, and the imaging unit 10 side is moved in the stroke direction S. Of course you can.

In the detection device 1 of the above-mentioned embodiment, the configuration is configured to detect the photomask M in a vertical state, but it is also possible to make the detection panel such as the photomask M horizontal, that is, to perform detection in a horizontal state. Can.

A1, A2, A3, A4‧‧‧area C‧‧‧Gap F‧‧‧Set the ground M‧‧‧Reticle (Panel to be inspected) S‧‧‧travel direction 1‧‧‧Detection device 2‧‧‧Stone Surface Panel 2A‧‧‧guide 2B‧‧‧Concave (for active vibration isolation table) 2C‧‧‧Concave (for passive vibration isolation table) 4, 5, 6, 7, 8, 9‧‧‧Devibration table 10B‧‧‧Detection camera 11. 11A‧‧‧temperature adjustment device 12. 12A‧‧‧The first lower temperature control panel 13‧‧‧The second lower temperature control panel 14‧‧‧The third lower temperature control panel 15‧‧‧The fourth lower temperature control panel 16‧‧‧Temperature Control Department 17, 18, 19, 20‧‧‧Water temperature adjustment heater 21‧‧‧above 22‧‧‧below 23‧‧‧Side (the side of the end side of the width direction W of the stone surface plate) 24‧‧‧Side (the side of the other end side of the width direction W of the stone surface plate) 25‧‧‧Side (the side of the end side of the stroke direction S of the stone surface plate) 26‧‧‧Side (the side of the other end side of the stroke direction S of the stone surface plate) 31‧‧‧The first upper side temperature sensor 32‧‧‧The second upper side temperature sensor 33‧‧‧The third upper side temperature sensor 34‧‧‧4th upper side temperature sensor 35‧‧‧Heat insulation panel 36‧‧‧Heat radiation panel 37, 38‧‧‧Temperature adjustment pipe (temperature adjustment part) 37A, 37B‧‧‧refrigerant flow path 41‧‧‧The first panel side temperature sensor 42‧‧‧Temperature sensor on the second panel side 43‧‧‧The third panel side temperature sensor 44‧‧‧4th panel side temperature sensor 50‧‧‧curtain (compartment wall) 60‧‧‧The lower temperature control panel 71‧‧‧container 72‧‧‧Heat exchanger 73‧‧‧Three-way valve

[FIG. 1] FIG. 1 is a schematic cross-sectional view showing a detection device according to a first embodiment of the present invention. [ Fig. 2 ] Fig. 2 is an exploded perspective view showing important parts of the detection device according to the first embodiment of the present invention. [ Fig. 3 ] Fig. 3 is a plan explanatory view showing a state in which a stone surface plate is removed of the detection device according to the first embodiment of the present invention. [ Fig. 4] Fig. 4 shows a schematic configuration diagram of a detection device and a temperature adjustment device according to a first embodiment of the present invention. [ Fig. 5] Fig. 5 is a cross-sectional view showing a first bottom temperature control panel used in the temperature control device according to the first embodiment of the present invention. [FIG. 6-1] FIG. 6-1 is an explanatory diagram showing a model of a state where deformation of a stone surface plate due to temperature distribution occurs in the detection device according to the first embodiment of the present invention. [Fig. 6-2] Fig. 6-2 is an explanatory view showing the state of the stone surface plate when the temperature is controlled by the temperature adjusting device in the detecting device according to the first embodiment of the present invention. [ Fig. 7] Fig. 7 is an explanatory diagram showing a state of a photomask in a state where the temperature of a stone surface plate is controlled by the detection device according to the first embodiment of the present invention. [FIG. 8-1] FIG. 8-1 is an explanatory diagram showing a model of a state where deformation of a stone surface plate due to temperature distribution occurs in a detection device according to a second embodiment of the present invention. [Fig. 8-2] Fig. 8-2 is an explanatory view showing the state of the stone surface plate when the temperature is controlled by the temperature adjusting device in the detection device according to the second embodiment of the present invention. [FIG. 9-1] FIG. 9-1 is an explanatory diagram showing a model of a state in which deformation of a stone surface plate due to temperature distribution occurs in a detection device according to a third embodiment of the present invention. [Fig. 9-2] Fig. 9-2 is an explanatory view showing the state of the stone surface plate when the temperature is controlled by the temperature adjusting device in the detection device according to the third embodiment of the present invention. [FIG. 10] FIG. 10 is a cross-sectional view showing the first lower temperature control panel used in the detection device and the temperature control device according to the fourth embodiment of the present invention. [ Fig. 11 ] Fig. 11 is an explanatory plan view showing a lower temperature control panel used in a detection device and a temperature control device according to a fifth embodiment of the present invention. [FIG. 12] FIG. 12 is a sectional view taken along line XII-XII of FIG. 11. [FIG. 13] FIG. 13 shows a schematic configuration diagram of a temperature adjustment device according to a sixth embodiment of the present invention. [ Fig. 14] Fig. 14 is an explanatory view showing a state in which the pattern of the mask is deformed by bending and pitching in the axial direction of the horizontal axis perpendicular to the stroke direction in the stone surface plate.

A1, A2, A3, A4‧‧‧area

C‧‧‧Gap

2‧‧‧Stone Surface Panel

11‧‧‧temperature adjustment device

12‧‧‧The first lower temperature control panel

13‧‧‧The second lower temperature control panel

14‧‧‧The third lower temperature control panel

15‧‧‧The fourth lower temperature control panel

16‧‧‧Temperature Control Department

17, 18, 19, 20‧‧‧Water temperature adjustment heater

21‧‧‧above

22‧‧‧below

31‧‧‧The first upper side temperature sensor

32‧‧‧The second upper side temperature sensor

33‧‧‧The third upper side temperature sensor

34‧‧‧4th upper side temperature sensor

35‧‧‧Heat insulation panel

36‧‧‧Heat radiation panel

37‧‧‧Temperature adjustment pipe (temperature adjustment part)

41‧‧‧The first panel side temperature sensor

42‧‧‧Temperature sensor on the second panel side

43‧‧‧The third panel side temperature sensor

44‧‧‧4th panel side temperature sensor

(T+A), (T+B), (T+C), (T+D)‧‧‧regulated control temperature

(T)‧‧‧reference temperature

Claims (10)

A temperature adjustment device for a stone surface panel, which is a temperature adjustment device for a stone surface panel arranged with a gap between it and the installation floor, and is characterized in that it is arranged on the above-mentioned installation in such a manner that it faces the lower surface of the above-mentioned stone surface panel. a lower temperature-regulating panel on the ground; and a temperature control unit for controlling the temperature of the lower temperature-regulating panel; the lower temperature-regulating panel includes: a heat-insulating panel arranged on the above-mentioned installation ground; and a heat-insulating panel arranged on the above-mentioned heat-insulating panel On the top, a heat radiation panel is provided with a temperature adjustment part and the heat is supplied or absorbed by the temperature adjustment part; the temperature control part is based on the temperature difference between the upper surface of the stone surface board and the surface of the heat radiation The temperature of the above-mentioned heat radiation panel is controlled so as to become a set value. Such as the temperature adjustment device of the stone surface plate in the first item of the scope of the patent application, wherein the above-mentioned lower temperature-regulating panel is arranged on the long side of the above-mentioned stone surface plate along the occupied area of the above-mentioned installation ground for the installation of the above-mentioned stone surface plate The direction is divided into each divided area of a plurality of areas. Such as the temperature adjustment device of the stone surface panel in the first or second item of the patent scope of the application, wherein A panel-side temperature sensor is arranged on the above-mentioned lower temperature-regulating panel, and an upper-side temperature sensor paired with the panel-side temperature sensor is arranged above the stone surface plate corresponding to the above-mentioned panel-side temperature sensor. , the above-mentioned temperature control part is based on the temperature detection values of the pair of above-mentioned panel-side temperature sensors and the above-mentioned upper-side temperature sensor corresponding to the up-down direction, and control the above-mentioned temperature adjustment parts of the respective above-mentioned lower temperature-regulating panels. The temperature is controlled. Such as the temperature adjustment device of the stone surface plate in the 1st or 2nd scope of the patent application, wherein the surrounding of the gap between the above-mentioned lower temperature-regulating panel and the underside of the above-mentioned stone surface plate is surrounded by the compartment wall. Such as the temperature adjustment device of the stone surface panel in the 1st or 2nd scope of the patent application, wherein the above-mentioned heat insulation panel is composed of a resin sheet with an independent foam structure. Such as the temperature adjustment device for stone surface panels in claim 1 or 2 of the patent scope, wherein the above-mentioned heat radiation panel is made of a metal plate. Such as the temperature adjustment device for stone surface panels in the first or second patent scope of the application, wherein the above-mentioned temperature adjustment part is a temperature adjustment pipe for circulating refrigerant. For example, the temperature adjustment device for stone surface panels as claimed in item 7 of the scope of the patent application, wherein the above-mentioned temperature adjustment pipe has a pair of refrigerant flow paths parallel to each other, and is set so that the refrigerant flows in opposite directions in each of the pair of refrigerant flow paths. Such as the temperature adjustment device of the stone surface plate in claim 7 of the scope of the patent application, which includes: a container for supplying and adjusting the temperature of the above-mentioned temperature adjustment pipe to be lower than the temperature of the above-mentioned stone surface plate warmed by the above-mentioned lower temperature-regulating panel Refrigerant at a reference temperature; and a heat exchanger, using cooling water at a temperature lower than the above-mentioned reference temperature to cool the refrigerant returned through the above-mentioned temperature adjustment pipe to the reference temperature; it will be cooled by the above-mentioned heat exchanger The refrigerant is supplied to the above container. A detection device comprising: the above-mentioned stone surface plate which is arranged with a gap between the above-mentioned installation ground and used to place a panel to be tested; moves relative to the panel to be tested, and monitors the state of the panel surface of the panel to be tested A detection camera for taking pictures; and the above-mentioned stone surface plate as described in any one of items 1 to 9 of the scope of patent application The temperature adjustment device.

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