WO2019194139A1 - Temperature adjusting device for stone surface plate, and inspection device provided with same - Google Patents

Temperature adjusting device for stone surface plate, and inspection device provided with same Download PDF

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Publication number
WO2019194139A1
WO2019194139A1 PCT/JP2019/014502 JP2019014502W WO2019194139A1 WO 2019194139 A1 WO2019194139 A1 WO 2019194139A1 JP 2019014502 W JP2019014502 W JP 2019014502W WO 2019194139 A1 WO2019194139 A1 WO 2019194139A1
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WO
WIPO (PCT)
Prior art keywords
temperature
panel
surface plate
stone
temperature control
Prior art date
Application number
PCT/JP2019/014502
Other languages
French (fr)
Japanese (ja)
Inventor
米澤　良
Original Assignee
株式会社ブイ・テクノロジー
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2018178799A external-priority patent/JP7105482B2/en
Application filed by 株式会社ブイ・テクノロジー filed Critical 株式会社ブイ・テクノロジー
Priority to CN201980016331.5A priority Critical patent/CN111868510B/en
Publication of WO2019194139A1 publication Critical patent/WO2019194139A1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects

Definitions

  • the present invention relates to a temperature control device for a stone surface plate and an inspection device provided with the same.
  • FPD Flat Panel Display
  • LCD liquid crystal display
  • organic EL panels organic EL panels
  • the size of the glass substrate has been increasing.
  • a photomask that performs the same magnification exposure on the glass substrate is used. Therefore, the blanks, which are the original plate for forming the electronic circuit on the photomask and the photomask, are remarkably increased with the increase in size of the LCD panel and the mother glass.
  • an inspection apparatus as disclosed in Patent Document 1 is used.
  • This inspection apparatus includes a stone surface plate as a stage serving as a base of the apparatus.
  • a mask support portion capable of reciprocating in the stroke direction is provided on the stone surface plate.
  • the photomask moves along the stroke direction supported by the mask support.
  • the photomask is supported by the mask support portion in an upright state so that the mask surface is parallel to the stroke direction and the vertical direction. That is, the photomask is placed on the stone surface plate in a so-called vertical position.
  • the temperature environment for polishing to obtain the flat surface accuracy of the stone surface plate does not necessarily match the temperature environment in which the inspection device is used.
  • the environmental temperature of the inspection apparatus differs for each user environment.
  • a stone surface plate with a thickness of 400 mm and a length of 4.5 m is made of granite (granite)
  • the temperature difference between the top and bottom surfaces of the stone surface plate is 0.1 ° C.
  • a pitching error close to 0.2 sec (1 sec: 1/3600 degrees) occurs.
  • a stone surface plate polished in winter is easy to produce in an environment where the lower surface is cold, and the plane accuracy cannot be reproduced unless the operating environment is kept at a low temperature.
  • the upper surface side of the stone surface plate is exposed to the inside of the thermal chamber, so the temperature is often adjusted, but the lower surface side of the stone surface plate is often not fully adjusted.
  • the lower surface of the stone surface plate is greatly affected by the temperature of the installation floor surface facing each other. If the installation floor is cooler than the bottom surface of the stone surface plate, the infrared rays emitted from the bottom surface of the stone surface plate are absorbed by the installation floor surface, and the same amount of infrared light as that emitted from the bottom surface of the stone surface plate returns. It will get cold because there isn't.
  • the present invention has been made in view of the above-described problems, and includes a stone surface plate temperature adjustment device that can easily maintain the planar accuracy of the stone surface plate regardless of the installation location, and a device to be inspected.
  • An object of the present invention is to provide an inspection apparatus capable of improving the inspection accuracy of a panel.
  • an aspect of the present invention is a temperature control device for a stone surface plate disposed with a gap between the floor surface and an installation floor surface.
  • a lower surface temperature control panel disposed on the installation floor so as to face the lower surface; and a temperature control unit that controls a temperature of the lower surface temperature adjustment panel, wherein the lower surface temperature adjustment panel includes the installation floor surface
  • the said lower surface temperature control panel arrange
  • a panel side temperature sensor is provided on the bottom surface temperature control panel, and an upper surface side temperature sensor that is paired with the panel side temperature sensor is provided on the upper surface of the stone surface plate corresponding to the panel side temperature sensor.
  • the temperature control unit adjusts the temperature of each of the lower surface temperature control panels based on the temperature detection values of the panel side temperature sensor and the upper surface side temperature sensor that form a pair in the vertical direction. It is preferable to control the temperature of the part.
  • the periphery of the gap sandwiched between the lower surface temperature control panel and the lower surface of the stone surface plate is surrounded by a partition wall.
  • the heat insulating panel is formed of a resin sheet having an independent foam structure.
  • the thermal radiation panel is made of a metal plate.
  • the temperature adjusting unit is a tube for circulating a refrigerant.
  • the tube has a pair of refrigerant flow paths parallel to each other, and the refrigerant is set to flow in opposite directions in each of the pair of refrigerant flow paths.
  • a heat exchanger that cools the refrigerant with cooling water having a temperature lower than the reference temperature is cooled to the reference temperature, and the refrigerant cooled by the heat exchanger is supplied to the tank.
  • a stone surface plate on which a panel to be inspected is placed, an inspection camera for imaging the state of the panel surface of the panel to be inspected, and the stone.
  • a temperature control device for a surface plate, and a bottom surface temperature control panel disposed on the installation floor so that the temperature control device faces a bottom surface of the stone surface plate, and a bottom surface temperature control panel
  • a temperature control unit that controls the temperature, and the lower surface temperature control panel is disposed on the heat insulation panel and the heat insulation panel, the temperature adjustment unit is embedded, and the temperature is adjusted.
  • a heat radiating panel that supplies and absorbs heat by the adjusting unit, and the temperature control unit is configured such that a temperature difference between the upper surface of the stone surface plate and the surface of the heat radiating panel becomes a set value.
  • the temperature of the thermal radiation panel is controlled.
  • the present invention it is possible to suppress the deformation of the stone surface plate regardless of the installation location, and in particular, the temperature adjusting device for the stone surface plate that can easily maintain the plane accuracy, and the inspection accuracy of the panel to be inspected are provided. It is possible to realize an inspection apparatus that can improve the above.
  • FIG. 1 is a sectional view schematically showing an inspection apparatus according to the first embodiment of the present invention.
  • FIG. 2 is an exploded perspective view of an essential part of the inspection apparatus according to the first embodiment of the present invention.
  • FIG. 3 is an explanatory plan view showing a state in which the stone surface plate of the inspection apparatus according to the first embodiment of the present invention is removed.
  • FIG. 4 is a schematic configuration diagram of the inspection apparatus and the temperature adjustment apparatus according to the first embodiment of the present invention.
  • FIG. 5 is a cross-sectional view of the first bottom surface temperature adjustment panel used in the temperature adjustment device according to the first embodiment of the present invention.
  • FIG. 6A is an explanatory diagram schematically illustrating a state in which the stone surface plate is deformed due to the temperature distribution in the inspection apparatus according to the first embodiment of the present invention.
  • FIG. 6B is an explanatory diagram illustrating a state of the stone surface plate when the temperature control is performed by the temperature adjusting device in the inspection device according to the first embodiment of the present invention.
  • FIG. 7 is an explanatory diagram showing a state of the photomask in a state where the temperature control of the stone surface plate is performed by the inspection apparatus according to the first embodiment of the present invention.
  • FIG. 8A is an explanatory diagram schematically illustrating a state in which the stone surface plate is deformed due to the temperature distribution in the inspection apparatus according to the second embodiment of the present invention.
  • FIG. 8-2 is an explanatory diagram showing a state of the stone surface plate when the temperature control is performed by the temperature adjusting device in the inspection device according to the second embodiment of the present invention.
  • FIG. 9A is an explanatory diagram schematically illustrating a state in which the stone surface plate is deformed due to the temperature distribution in the inspection apparatus according to the third embodiment of the present invention.
  • FIG. 9-2 is an explanatory diagram illustrating a state of the stone surface plate when the temperature control is performed by the temperature adjustment device in the inspection device according to the third embodiment of the present invention.
  • FIG. 10 is a cross-sectional view of a first bottom surface temperature control panel used in an inspection apparatus and a temperature adjustment apparatus according to the fourth embodiment of the present invention.
  • FIG. 11 is an explanatory plan view of a lower surface temperature control panel used in an inspection apparatus and a temperature adjustment apparatus according to the fifth embodiment of the present invention.
  • 12 is a cross-sectional view taken along the line XII-XII in FIG.
  • FIG. 13 is a schematic block diagram of the temperature control apparatus which concerns on the 6th Embodiment of this invention.
  • FIG. 14 is an explanatory diagram showing a state in which the pattern of the photomask is deformed due to the occurrence of pitching that turns around the horizontal axis that intersects perpendicularly to the stroke direction on the stone surface plate.
  • FIG. 1 shows an inspection apparatus 1 including a stone surface plate temperature control apparatus according to a first embodiment of the present invention.
  • the inspection apparatus 1 according to the present embodiment is used for inspection of the pattern arrangement of the photomask M that is the panel to be inspected shown in FIG.
  • the inspection apparatus 1 can detect the position data of the mask pattern formed on the mask surface of the photomask M, and by comparing the position data with the design data, detection of a defect in the mask pattern of the photomask M and the mask. The pattern can be corrected.
  • the inspection apparatus 1 of the present embodiment is disposed on an installation floor surface F.
  • the inspection apparatus 1 includes a stone surface plate 2 as a stage serving as the basis of the apparatus, a mask support portion 3 as a panel support portion, and a plurality of (6 in the present embodiment as shown in FIG. 3 in the present embodiment). ) Vibration isolation tables 4, 5, 6, 7, 8, 9; an imaging unit 10;
  • the stone surface plate 2 is made of granite (granite), for example. As shown in FIGS. 1 and 2, the stone surface plate 2 has a substantially rectangular parallelepiped shape, and has an upper surface 21, a lower surface 22, side surfaces 23 and 24 on both sides, and side surfaces 25 and 26 on both ends in the longitudinal direction.
  • the size of the stone surface plate 2 is, for example, a substantially rectangular parallelepiped shape having a width of about 1,200 mm, a length of about 4,500 mm, and a thickness of about 400 mm.
  • size of the stone surface plate 2 is changed suitably according to the magnitude
  • a guide groove 2 ⁇ / b> A extending along the longitudinal direction is formed on the upper surface 21 of the stone surface plate 2 at the center in the width direction W of the upper surface 21.
  • Recesses 2B are formed at the four corners of the lower surface 22 of the stone surface plate 2, respectively.
  • concave portions 2C are formed on both sides of the width direction W at the center in the longitudinal direction of the lower surface of the stone surface plate 2, respectively.
  • the above-described six vibration isolation tables 4, 5, 6, 7, 8, and 9 are installed on the installation floor F so as to correspond to the recesses 2B and 2C of the stone surface plate 2 to be arranged.
  • the bottom surfaces of the recesses 2B and 2C are the upper surfaces 4A, 5A, 6A, and 7A of the corresponding vibration isolation tables 4, 5, 6, 7, 8, and 9 respectively. , 8A, 9A.
  • FIG. 1 in a state where the stone surface plate 2 is supported by the vibration isolation tables 4, 5, 6, 7, 8, 9, between the lower surface 22 of the stone surface plate 2 and the installation floor surface F, A gap C having a predetermined height is formed.
  • a mask support portion 3 is provided in the guide groove 2 ⁇ / b> A of the stone surface plate 2 so as to be movable in the stroke direction S of the stone surface plate 2 (longitudinal direction of the stone surface plate 2).
  • the mask support unit 3 includes a support frame 3A that supports the edge of the photomask M.
  • the vibration isolation tables 4, 6, 7, 9 corresponding to the recess 2 ⁇ / b> B of the stone surface plate 2 are active vibration isolation tables, and the vibration isolation tables 5, corresponding to the recess 2 ⁇ / b> C of the stone surface plate 2.
  • 8 is a passive vibration isolation table.
  • the configuration of the vibration isolation table is not limited to this.
  • the imaging unit 10 includes an upper and lower guide column 10A and an inspection camera 10B.
  • the inspection camera 10B is provided so as to be movable in the vertical direction along the vertical guide column 10A.
  • the upper and lower guide columns are provided on the upper surface 21 of the stone surface plate 2.
  • the inspection camera 10B is set to move up and down by a control device and a drive device (not shown).
  • the temperature adjustment device 11 includes a first upper surface temperature sensor 31, a second upper surface temperature sensor 32, a third upper surface temperature sensor 33, a fourth upper surface temperature sensor 34, and a first lower surface temperature. Tone panel 12, second bottom surface temperature control panel 13, third bottom surface temperature control panel 14, fourth bottom surface temperature control panel 15, first panel side temperature sensor 41, second panel side temperature sensor 42, and third panel side temperature. A sensor 43, a fourth panel side temperature sensor 44, water temperature adjusting heaters 17, 18, 19, 20, a temperature adjusting tube 37 as a temperature adjusting unit, and a temperature control unit 16 for controlling the temperature of the lower surface temperature adjusting panel, And a curtain 50 (see FIG. 2) as a partition wall.
  • the first upper surface side temperature sensor 31, the first upper surface side temperature sensor 31, A second upper surface side temperature sensor 32, a third upper surface side temperature sensor 33, and a fourth upper surface side temperature sensor 34 are provided.
  • the first upper surface side temperature sensor 31, the second upper surface side temperature sensor 32, the third upper surface side temperature sensor 33, and the fourth upper surface side temperature sensor 34 are connected to the temperature controller 16, and each region A1, A2, A3, The temperature detection value at A4 is output to the temperature control unit 16.
  • the first lower surface temperature adjustment panel 12, the second lower surface temperature adjustment panel 13, the third lower surface temperature adjustment panel 14, and the fourth lower surface temperature adjustment panel 15 are sequentially arranged in four regions A1, A2, A3, A4 of the stone surface plate 2. It arrange
  • the first lower surface temperature control panel 12 is configured by laminating a heat insulating panel 35 and a heat radiation panel 36.
  • FIG. 5 shows only the first bottom surface temperature control panel 12, but the second bottom surface temperature control panel 13, the third bottom surface temperature control panel 14, and the fourth bottom surface temperature control panel 15 have the same configuration, and a heat insulating panel. 35 and a heat radiation panel 36.
  • the heat insulation panel 35 is made of a resin sheet material having an independent foam structure with high heat insulation. This heat insulation panel 35 is arrange
  • the heat insulating panel 35 has an independent foam structure, it has a higher heat shielding effect than a heat insulating material having a continuous foam structure.
  • the thermal radiation panel 36 is made of a metal plate having high thermal conductivity.
  • the heat radiation panel 36 is made of an aluminum plate. As shown in FIG. 5, the heat radiation panel 36 is laminated on the heat insulation panel 35.
  • a temperature adjustment tube 37 that is a tube as a temperature adjustment unit is embedded in the surface of the thermal radiation panel 36. For this reason, the heat radiation panel 36 is supplied with heat or absorbed by the temperature adjusting tube 37 and is controlled in temperature, and performs heat radiation at the controlled temperature on the lower surface 22 of the stone surface plate 2.
  • the temperature adjustment tube 37 is integrally formed so that a pair of refrigerant flow paths 37 ⁇ / b> A and 37 ⁇ / b> B are parallel to each other.
  • water of the same temperature is set to flow in the opposite directions in the refrigerant flow paths 37A and 37B.
  • the temperature adjustment tube 37 is made of, for example, a fluororesin.
  • the pressure resistance can be enhanced, and the effect of preventing water leakage can be enhanced.
  • the temperature adjustment tube 37 includes the first lower surface temperature adjustment panel 12, the second lower surface temperature adjustment panel 13, the third lower surface temperature adjustment panel 14, and the fourth lower surface temperature adjustment panel 15.
  • the heat radiation panel 36 is laid out and embedded so as to meander.
  • the arrangement density of the temperature adjustment tubes 37 with respect to the heat radiation panel 36 is preferably uniform, taking into account the heat distribution due to heat transfer depending on the arrangement state of the vibration isolation tables 4, 5, 6, 7, 8, and 9. The arrangement density may be determined.
  • the temperature adjustment tubes 37 provided on the first lower surface temperature adjustment panel 12, the second lower surface temperature adjustment panel 13, the third lower surface temperature adjustment panel 14, and the fourth lower surface temperature adjustment panel 15, respectively,
  • the water temperature adjusted water is supplied from the water temperature adjusting heaters 17, 18, 19, 20.
  • one temperature adjustment tube 37 since one temperature adjustment tube 37 has the refrigerant flow paths 37A and 37B, the water temperature adjustment is performed from each of the water temperature adjustment heaters 17, 18, 19, and 20 to the two refrigerant flow paths 37A and 37B. Is set to supply the water.
  • the first panel side temperature sensor 41, the second A panel side temperature sensor 42, a third panel side temperature sensor 43, and a fourth panel side temperature sensor 44 are arranged on the upper surfaces of the first lower surface temperature adjustment panel 12, the second lower surface temperature adjustment panel 13, the third lower surface temperature adjustment panel 14, and the fourth lower surface temperature adjustment panel 15, the first panel side temperature sensor 41, the second A panel side temperature sensor 42, a third panel side temperature sensor 43, and a fourth panel side temperature sensor 44 are arranged.
  • the first panel side temperature sensor 41, the second panel side temperature sensor 42, the third panel side temperature sensor 43, and the fourth panel side temperature sensor 44 are sequentially converted from the first upper surface side temperature on the stone surface plate 2.
  • the sensor 31, the second upper surface side temperature sensor 32, the third upper surface side temperature sensor 33, and the fourth upper surface side temperature sensor 34 are arranged at positions corresponding to the vertical direction.
  • the first panel side temperature sensor 41, the second panel side temperature sensor 42, the third panel side temperature sensor 43, and the fourth panel side temperature sensor 44 are connected to the temperature control unit 16.
  • the water temperature adjusting heaters 17, 18, 19, and 20 supply water supplied at a reference temperature (T) based on a control signal from the temperature control unit 16 to a predetermined control temperature (T + A). , (T + B), (T + C), (T + D).
  • T reference temperature
  • the reference temperature (T) is set to a constant temperature that is always lower than the temperature of the upper surface 21 of the stone surface plate 2 in the environment where the inspection apparatus 1 is operated.
  • the temperature control unit 16 includes a first upper surface side temperature sensor 31, a second upper surface side temperature sensor 32, a third upper surface side temperature sensor 33, and a fourth upper surface on the upper surface 21 side of the stone surface plate 2.
  • the side temperature sensor 34 is connected to the first panel side temperature sensor 41, the second panel side temperature sensor 42, the third panel side temperature sensor 43, and the fourth panel side temperature sensor 44 on the lower surface temperature control panel side. Yes.
  • the temperature control unit 16 is connected to the water temperature adjusting heaters 17, 18, 19, and 20.
  • the temperature control unit 16 includes, for example, a computing device such as a personal computer and a device having a storage unit.
  • the reference temperature (T) in the water temperature adjusting heaters 17, 18, 19, and 20 is set so that the difference between the upper surface side temperature and the lower surface side temperature of the stone surface plate 2 becomes a preset temperature.
  • the water temperature adjusting heaters 17, 18, 19, and 20 are controlled by determining the degree of heating applied to the water temperature.
  • the difference between the upper surface temperature and the lower surface temperature (upper surface temperature ⁇ lower surface temperature) can be set to about 0.2 ° C., for example.
  • what is necessary is just to determine the difference of upper surface side temperature and lower surface side temperature according to the characteristic of each stone surface plate 2.
  • a curtain 50 as a partition wall is provided around each of the first lower surface temperature adjustment panel 12, the second lower surface temperature adjustment panel 13, and the third lower surface temperature adjustment panel 14. Place.
  • an antistatic vinyl chloride sheet is used as the curtain 50.
  • the curtain 50 is used for the purpose of closing the gap between the stone surface plate 2 and the installation floor surface F.
  • the curtain 50 defines a space (gap C) above each of the first lower surface temperature adjustment panel 12, the second lower surface temperature adjustment panel 13, and the third lower surface temperature adjustment panel 14. Therefore, the curtain 50 can prevent air convection between the lower surface temperature control panels. For this reason, the curtain 50 fulfill
  • the temperature control unit 16 performs temperature control with the water temperature adjusting heaters 17, 18, 19, and 20.
  • FIG. 6A schematically shows a state in which the temperature difference in the vertical direction of the stone surface plate 2 changes depending on the installation environment, and pitching occurs at a plurality of locations.
  • the deformation of the stone surface plate 2 can be suppressed as shown in FIG. Therefore, as shown in FIG. 7, the deformation of the photomask M placed on the stone surface plate 2 can be prevented, and an inspection error due to the deformation of the mask pattern Mp of the photomask M can be prevented.
  • the temperature adjusting device 11 Since the temperature adjusting device 11 according to the present embodiment performs the above-described operation and operation, it is possible to suppress the deformation of the stone surface plate 2 regardless of the installation location, and in particular, the planar accuracy of the upper surface 21 can be easily maintained. . Therefore, in the inspection apparatus 1 including the temperature adjusting device 11, the inspection accuracy of the photomask M can be improved.
  • the installation environment of the inspection apparatus 1 includes a temperature-controlled thermal chamber and a clean room where the temperature control of the upper surface 21 of the stone surface plate 2 is not performed only by downflowing clean air.
  • the influence of the temperature from the installation floor surface F side can be suppressed in any of the installation environments described above.
  • transformation of the stone surface plate 2 can be suppressed even in the summer when the temperature is high or in the winter when the temperature is low.
  • the first lower surface temperature adjustment panel 12 and the second temperature control panel 12 corresponding to each of the regions A1, A2, A3, and A4 obtained by dividing the stone surface plate 2 into four.
  • the temperature of the lower surface temperature control panel 13, the third lower surface temperature control panel 14, and the fourth lower surface temperature control panel 15 it is possible to correct the complicated bending of the stone surface plate 2.
  • the heat radiation of the first lower surface temperature adjustment panel 12, the second lower surface temperature adjustment panel 13, the third lower surface temperature adjustment panel 14, and the fourth lower surface temperature adjustment panel 15 is achieved. Since the temperature of the lower surface 22 of the stone surface plate 2 is controlled by heat radiation from the panel 36, the stone surface plate 2 is not subjected to stress that is caused by direct heating.
  • FIGS. 8A and 8B schematically show the stone surface plate 2 and the bottom surface temperature control panel used in the inspection apparatus 1 and the temperature adjustment apparatus 11 according to the second embodiment of the present invention.
  • a first upper surface side temperature sensor 31, a second upper surface side temperature sensor 32, and a third upper surface side temperature sensor 33 are provided in regions A 1, A 2 and A 3 obtained by dividing the stone surface plate 2 into three in the longitudinal direction. Is provided.
  • a first lower surface temperature adjustment panel 12, a second lower surface temperature adjustment panel 13, and a third lower surface temperature adjustment panel 14 are provided as the lower surface temperature adjustment panels.
  • Other configurations in the present embodiment are substantially the same as the configuration contents of the first embodiment described above.
  • a plurality of deformations of the stone surface plate 2 as shown in FIG. 8A can be suppressed, and the flat shape of the upper surface can be maintained as shown in FIG. 8B.
  • FIGS. 9-1 and 9-2 schematically show the stone surface plate 2 and the bottom surface temperature control panel used in the inspection apparatus 1 and the temperature adjustment apparatus 11 according to the third embodiment of the present invention.
  • the first upper surface side temperature sensor 31 and the second upper surface side temperature sensor 32 are provided in the regions A1 and A2 obtained by dividing the stone surface plate 2 into two in the longitudinal direction.
  • the lower surface temperature adjustment panel is provided with a first lower surface temperature adjustment panel 12 and a second lower surface temperature adjustment panel 13.
  • Other configurations in the present embodiment are substantially the same as the configuration contents of the first embodiment described above.
  • the deformation of the stone surface plate 2 as shown in FIG. 9-1 can be suppressed, and the flat top surface can be maintained as shown in FIG. 9-2.
  • FIG. 10 shows a first bottom surface temperature adjustment panel 12A used in the inspection apparatus 1 and the temperature adjustment apparatus 11 according to the fourth embodiment of the present invention.
  • the heat radiation panel 36 in the first bottom surface temperature control panel 12 of the first embodiment is reversed and laminated on the heat insulation panel 35. Therefore, the temperature adjustment tube 37 is located in the vicinity of the interface between the heat insulating panel 35 and the heat radiation panel 36.
  • Other configurations of the present embodiment are the same as those of the first embodiment described above.
  • the temperature adjustment tube 37 is disposed below the heat radiation panel 36, so that when the heat transmitted from the temperature adjustment tube 37 is transmitted to the upper surface of the heat radiation panel 36, the upper surface.
  • the temperature uniformity can be further improved.
  • “Fifth Embodiment” 11 and 12 show a bottom temperature control panel 60 according to a fifth embodiment of the present invention.
  • the lower surface temperature adjustment panel 60 has a configuration in which a heat insulating panel 35 and a heat radiation panel 36 are stacked in the same manner as in the first embodiment.
  • the temperature adjustment tube 38 as a temperature adjustment unit embedded in the surface of the thermal radiation panel 36 is a tube having one flow path.
  • Other configurations of the present embodiment are the same as those of the first embodiment described above.
  • FIG. 13 shows a schematic configuration of a temperature adjustment device 11A according to the sixth embodiment of the present invention.
  • the water supplied to the water temperature adjusting heaters 17, 18, 19, 20 is used by reducing and returning the water returning from the respective temperature adjusting tubes 37 to an appropriate temperature in the tank 71.
  • the first panel side temperature sensor 41, the second panel side temperature sensor 42, the third panel side temperature sensor 43, and the fourth panel side temperature sensor 44 are arranged on the lower surface of the stone surface plate 2. Yes.
  • the other configuration of the present embodiment is substantially the same as the configuration of the first embodiment described above, and therefore will be described with reference to the drawings corresponding to the first embodiment as appropriate.
  • the temperature adjustment device 11A includes a first upper surface temperature sensor 31, a second upper surface temperature sensor 32, a third upper surface temperature sensor 33, a fourth upper surface temperature sensor 34, a first panel temperature sensor 41, and a second panel. Side temperature sensor 42, third panel side temperature sensor 43, fourth panel side temperature sensor 44, water temperature adjustment heaters 17, 18, 19, 20, temperature adjustment tube 37 as a temperature adjustment unit, and temperature adjustment tube 37.
  • the temperature adjustment tube 37 is integrally formed so that the pair of refrigerant channels 37A and 37B are parallel to each other (see FIGS. 2 and 3).
  • the temperature adjustment tube 37 is set so that water of the same temperature flows in the refrigerant flow paths 37A and 37B in opposite directions.
  • each temperature adjustment tube 37 is supplied with water whose water temperature has been adjusted by the water temperature adjustment heaters 17, 18, 19, and 20.
  • the water temperature adjustment heaters 17, 18, 19, and 20 are supplied to the two refrigerant flow paths 37A and 37B, respectively. It is set to supply water whose temperature is adjusted.
  • a pipe 81 is connected to the downstream side of the water temperature adjusting heater 17.
  • the downstream end of the pipe 81 is branched into two pipes 81A and 81B.
  • the pipe 81A is connected to a refrigerant flow path 37A (see FIGS. 2 and 3) provided in the corresponding first lower surface temperature control panel 12.
  • the pipe 81B is connected to the refrigerant flow path 37B so that the water flow in the flow path is in the opposite direction to the water flow in the refrigerant flow path 37A.
  • a pipe 82 is connected to the downstream side of the water temperature adjusting heater 18.
  • the downstream end of the pipe 82 is branched into two pipes 82A and 82B.
  • the pipe 82A is connected to a refrigerant flow path 37A (see FIGS. 2 and 3) provided in the corresponding second lower surface temperature control panel 13.
  • the pipe 82B is connected to the refrigerant flow path 37B so that the water flow in the flow path is opposite to the water flow in the refrigerant flow path 37A.
  • a pipe 83 is connected to the downstream side of the water temperature adjusting heater 19.
  • the downstream end of the pipe 83 is branched into two pipes 83A and 83B.
  • the pipe 83A is connected to a refrigerant flow path 37A (see FIGS. 2 and 3) provided in the corresponding third lower surface temperature control panel 14.
  • the pipe 83B is connected to the refrigerant flow path 37B so that the water flow in the flow path is in the opposite direction to the water flow in the refrigerant flow path 37A.
  • a pipe 84 is connected to the downstream side of the water temperature adjusting heater 20.
  • the downstream end of the pipe 84 is branched into two pipes 84A and 84B.
  • the pipe 84A is connected to a refrigerant flow path 37A (see FIGS. 2 and 3) provided in the corresponding fourth lower surface temperature control panel 15.
  • the pipe 84B is connected to the refrigerant flow path 37B so that the water flow in the flow path is opposite to the water flow in the refrigerant flow path 37A.
  • the downstream ends of the pair of refrigerant flow paths 37A and 37B in the temperature adjustment tube 37 provided on the first lower surface temperature control panel 12 shown in FIG. 3 are sequentially connected to the pipes 85A and 85B. ing. The downstream ends of these pipes 85A and 85B are connected to the pipe 85 and merge.
  • the downstream ends of the pair of refrigerant flow paths 37A and 37B in the temperature adjustment tube 37 provided on the second lower surface temperature control panel 13 are sequentially connected to the pipes 86A and 86B as shown in FIG.
  • the downstream ends of these pipes 86A and 86B are connected to the pipe 86 and merge.
  • the downstream ends of the pair of refrigerant flow paths 37A and 37B in the temperature adjustment tube 37 provided on the third lower surface temperature control panel 14 are sequentially connected to the pipes 87A and 87B as shown in FIG.
  • the downstream ends of these pipes 87A and 87B are connected to the pipe 87 and merge.
  • the downstream ends of the pair of refrigerant flow paths 37A and 37B in the temperature adjustment tube 37 provided on the fourth lower surface temperature control panel 15 are sequentially connected to the pipes 88A and 88B as shown in FIG.
  • the downstream ends of these pipes 88 ⁇ / b> A and 88 ⁇ / b> B are connected to and merged with the upstream end of the pipe 89.
  • the downstream end of the pipe 89 is connected to the heat exchanger 72.
  • the pipes 85, 86, 87, and 88 are connected to the pipe 89 and merge.
  • the pipe 89 is connected to the heat exchanger 72.
  • the water supplied from the pipe 89 and heat-exchanged through the heat exchanger 72 is supplied to the tank 71 through the pipe 89A.
  • a temperature sensor 92 is provided in the pipe 89A.
  • a circulating water supply pipe 93 is connected to the tank 71.
  • a circulating pump 94 and a pressure gauge 96 are provided in the circulating water supply pipe 93.
  • the tank 71 is provided with a tank level meter 95.
  • a pipe 90 for supplying cooling water is connected to the heat exchanger 72.
  • the water supplied from the pipe 90 and heat-exchanged through the heat exchanger 72 is guided to the cooling water outlet through the pipe 90A.
  • a three-way valve 73 is interposed in the pipe 90.
  • a bypass pipe 91 connected to the pipe 90A is connected to the three-way valve 73.
  • cooling water such as tap water having a low temperature (for example, a temperature around 10 ° C.) is supplied from the pipe 90, and the circulating water supplied from the pipe 89 is used as a reference in the heat exchanger 72. Control to lower the temperature (T).
  • the temperature control unit 16 includes a first upper surface side temperature sensor 31, a second upper surface side temperature sensor 32, a third upper surface side temperature sensor 33, and a fourth upper surface on the upper surface 21 side of the stone surface plate 2.
  • the side temperature sensor 34 is connected to the first panel side temperature sensor 41, the second panel side temperature sensor 42, the third panel side temperature sensor 43, and the fourth panel side temperature sensor 44 on the lower surface 22 side.
  • the temperature control unit 16 is connected to the water temperature adjusting heaters 17, 18, 19, 20, the three-way valve 73, and the temperature sensor 92.
  • the reference temperature (T) in the water temperature adjusting heaters 17, 18, 19, and 20 is set so that the difference between the upper surface side temperature and the lower surface side temperature of the stone surface plate 2 becomes a preset temperature.
  • the water temperature adjusting heaters 17, 18, 19, and 20 are controlled by determining the degree of heating applied to the water temperature.
  • the difference between the upper surface temperature and the lower surface temperature can be set to about 0.2 ° C., for example.
  • what is necessary is just to determine the difference of upper surface side temperature and lower surface side temperature according to the characteristic of each stone surface plate 2.
  • the first panel side temperature sensor 41, the second panel side temperature sensor 42, the third panel side temperature sensor 43, and the fourth panel side temperature sensor 44 are arranged on the lower surface 22 of the stone surface plate 2.
  • it is arranged on the surface of the first lower surface temperature adjustment panel 12, the second lower surface temperature adjustment panel 13, the third lower surface temperature adjustment panel 14, and the fourth lower surface temperature adjustment panel 15. May be. In short, it is only necessary to set the temperature difference between the upper surface 21 side and the lower surface 22 side in each region of the stone surface plate 2.
  • the water temperature adjusting heaters 17, 18, 19, and 20 are configured to supply water supplied at a reference temperature (T) to a predetermined control temperature (T + A) based on a control signal from the temperature control unit 16. , (T + B), (T + C), (T + D).
  • the reference temperature (T) is set to a constant temperature that is always lower than the temperature of the upper surface 21 of the stone surface plate 2 in the environment where the apparatus is operated.
  • the reference temperature (T) is set to 20 ° C., for example. That is, in the present embodiment, the reference temperature (T) of water stored in the tank 71 is set to 20 ° C.
  • cooling water is supplied to the pipe 90.
  • Water heated to a temperature (T + A), (T + B), (T + C), (T + D), etc. higher than 20 ° C. is supplied to the heat exchanger 72 via a pipe 89.
  • the temperature of water supplied to the heat exchanger 72 via the pipe 89 is, for example, about 23 ° C.
  • the temperature control unit 16 controls the three-way valve 73 based on the temperature detection value of the temperature sensor 92 to flow cooling water to the bypass pipe 91, flow cooling water to the heat exchanger 72, and flow rate of cooling water. To control. Thereby, in the heat exchanger 72, the water supplied from the pipe 89 can be lowered from 23 ° C. to 20 ° C. by the cooling water having a water temperature of 11 ° C., and the temperature of the water stored in the tank 71 is set to 20 ° C. be able to. Thus, in this Embodiment, since it is not necessary to heat a cooling water with a low water temperature (11 degreeC) to 20 degreeC, a big electric power is not consumed.
  • the temperature difference from the reference temperature (T) to the control temperatures (T + A), (T + B), (T + C), and (T + D) can be reduced, so that the power consumption can be greatly suppressed.
  • the reference temperature (T) is determined from the minimum control temperature of the first lower surface temperature adjustment panel 12, the second lower surface temperature adjustment panel 13, the third lower surface temperature adjustment panel 14, and the fourth lower surface temperature adjustment panel 15.
  • water is used as the coolant to be circulated in the water temperature adjusting heaters 17, 18, 19, 20, the temperature adjusting tube 37, the heat exchanger 72, and the tank 71, but is not limited thereto.
  • water is circulated through the tank 71, even if a water leak occurs, a water leak exceeding the capacity of the tank 71 does not occur.
  • this Embodiment there exists an advantage that a water leak is detectable from the water quantity fall in a tank.
  • the photomask M is applied as the panel to be inspected, but blanks serving as a photomask original plate on which an electronic circuit is formed may be applied.
  • the heat insulation panel 35 and the heat radiation panel 36 are laminated and integrated, but the heat radiation panel 36 may be stacked on the heat insulation panel 35.
  • the heat insulation panel 35 uses the thing of the magnitude
  • the photomask M is moved in the stroke direction S on the stone surface plate 2, but the photomask M is fixed on the stone surface plate 2 and the imaging unit 10 side is moved in the stroke direction S.
  • the photomask M is inspected in a vertically placed state, but a panel to be inspected such as the photomask M may be inspected horizontally, that is, in a horizontally placed state. Good.

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Abstract

The present invention comprises: a lower-surface temperature adjustment panel which is disposed on an installation floor surface; and a temperature control which controls the temperature of the lower-surface temperature adjustment panel. The temperature control unit controls the temperature of the lower-surface temperature adjustment panel such that the temperature difference between the upper surface of a stone surface plate and the surface of the lower-surface temperature adjustment panel reaches a set value.

Description

石定盤の温度調整装置およびそれを備えた検査装置Temperature control device for stone surface plate and inspection device provided with the same
　本発明は、石定盤の温度調整装置およびそれを備えた検査装置に関する。 The present invention relates to a temperature control device for a stone surface plate and an inspection device provided with the same.
　近年、液晶ディスプレイ（Liquid Crystal Display：ＬＣＤ）パネル、有機ＥＬパネルなどのフラットパネルディスプレイ（Flat Panel Display：ＦＰＤ）では、ディスプレイの大画面化に伴いガラス基板の大型化が進んでいる。大型のＦＰＤの製造においては、このガラス基板に対して等倍露光を行うフォトマスクが用いられている。したがって、フォトマスクおよびフォトマスクに電子回路を形成する原版となるブランクスは、ＬＣＤパネルやマザーガラスの大型化に伴って著しく大型化している。 In recent years, in flat panel displays (Flat Panel Display: FPD) such as liquid crystal display (LCD) panels and organic EL panels, the size of the glass substrate has been increasing. In the manufacture of a large FPD, a photomask that performs the same magnification exposure on the glass substrate is used. Therefore, the blanks, which are the original plate for forming the electronic circuit on the photomask and the photomask, are remarkably increased with the increase in size of the LCD panel and the mother glass.
　大型のフォトマスクにおけるパターン配置などの検査を行うには、例えば、特許文献１に開示されるような検査装置を用いる。この検査装置は、装置の基礎となるステージとしての石定盤を備えている。石定盤の上には、ストローク方向に対して往復移動が可能なマスク支持部が設けられている。フォトマスクは、このマスク支持部に支持されてストローク方向に沿って移動する。このとき、フォトマスクは、マスク面がストローク方向と上下方向とに平行をなすように、起立した状態でマスク支持部に支持される。すなわち、フォトマスクは、所謂縦置きした状態で石定盤上に載せられる。 In order to inspect a pattern arrangement or the like in a large photomask, for example, an inspection apparatus as disclosed in Patent Document 1 is used. This inspection apparatus includes a stone surface plate as a stage serving as a base of the apparatus. On the stone surface plate, a mask support portion capable of reciprocating in the stroke direction is provided. The photomask moves along the stroke direction supported by the mask support. At this time, the photomask is supported by the mask support portion in an upright state so that the mask surface is parallel to the stroke direction and the vertical direction. That is, the photomask is placed on the stone surface plate in a so-called vertical position.
特開２０１７－１０２０７４号公報JP 2017-102074 A
　このような検査装置において、石定盤の平面精度を保つことは、非常に重要である。図１４に示すように、石定盤２００において、ストローク方向Ｓに対して垂直に交わる図示しない水平軸の軸回りに曲がるピッチングが生じると、それに伴って、フォトマスク２０１にマスク面上での曲がりが発生する。フォトマスク２０１がマスク面上で曲がることにより、パネル面上のパターン２０２も位置ずれを起こしてしまう。したがって、石定盤２００にピッチングが生じると、正確な検査が行えないという問題がある。 In such an inspection apparatus, it is very important to keep the surface accuracy of the stone surface plate. As shown in FIG. 14, in the stone surface plate 200, when pitching occurs around a horizontal axis (not shown) that intersects perpendicularly to the stroke direction S, the photomask 201 bends on the mask surface accordingly. Will occur. When the photomask 201 is bent on the mask surface, the pattern 202 on the panel surface is also displaced. Therefore, when pitching occurs in the stone surface plate 200, there is a problem that accurate inspection cannot be performed.
　石定盤の製造において、石定盤の平面精度を出すための研磨を行う温度環境は、必ずしも検査装置を使用する温度環境と一致しない。すなわち、検査装置の環境温度は、ユーザ環境毎に異なる。例えば、花崗岩（グラナイト）で厚みが４００ｍｍ、長さが４．５ｍの石定盤を作製し、石定盤の上下面の温度差（上面の温度＞下面の温度）が０．１℃ある場合、０．２秒角（１秒角：１／３６００度）近いピッチング誤差が発生する。冬期に研磨した石定盤は、下面が冷えた環境で作製され易く、使用環境も下面を低温に保たないと平面精度の再現ができない。 In the production of a stone surface plate, the temperature environment for polishing to obtain the flat surface accuracy of the stone surface plate does not necessarily match the temperature environment in which the inspection device is used. In other words, the environmental temperature of the inspection apparatus differs for each user environment. For example, when a stone surface plate with a thickness of 400 mm and a length of 4.5 m is made of granite (granite), and the temperature difference between the top and bottom surfaces of the stone surface plate (top surface temperature> bottom surface temperature) is 0.1 ° C. , A pitching error close to 0.2 sec (1 sec: 1/3600 degrees) occurs. A stone surface plate polished in winter is easy to produce in an environment where the lower surface is cold, and the plane accuracy cannot be reproduced unless the operating environment is kept at a low temperature.
　一般的に、検査装置において、石定盤の上面側はサーマルチャンバ内に晒されているため温度調整されることが多いが、石定盤の下面側は温度調整が行き届かない場合が多い。石定盤の下面は、向き合う設置床面の温度の影響を大きく受ける。設置床面が石定盤の下面より温度が低い場合、石定盤の下面から出た赤外線が設置床面で吸収され、石定盤の下面から出た赤外線量と同じだけの赤外線量が戻らないため冷えることになる。逆に、設置床面が石定盤の下面より温度が高い場合、石定盤の下面から出た赤外線量以上に赤外線が石定盤の下面に戻るため、石定盤の下面の温度は上昇傾向となる。 Generally, in an inspection device, the upper surface side of the stone surface plate is exposed to the inside of the thermal chamber, so the temperature is often adjusted, but the lower surface side of the stone surface plate is often not fully adjusted. The lower surface of the stone surface plate is greatly affected by the temperature of the installation floor surface facing each other. If the installation floor is cooler than the bottom surface of the stone surface plate, the infrared rays emitted from the bottom surface of the stone surface plate are absorbed by the installation floor surface, and the same amount of infrared light as that emitted from the bottom surface of the stone surface plate returns. It will get cold because there isn't. Conversely, if the installation floor surface is hotter than the bottom surface of the stone surface plate, the temperature of the bottom surface of the stone surface plate rises because infrared rays return to the bottom surface of the stone surface plate more than the amount of infrared light emitted from the bottom surface of the stone surface plate It becomes a trend.
　ここで、石定盤の下面を直接的に加熱または冷却して温度調節を行うことが考えられる。この場合、直接的な温度調節により、石定盤側での早急な応答が要求されるため、石定盤の形状安定化が困難となると考えられる。また、石定盤の下面を直接的に加熱または冷却しても、設置床面からの熱的影響を排除できないため、石定盤の形状を正確に制御することは困難となると考えられる。 Here, it is conceivable to adjust the temperature by directly heating or cooling the lower surface of the stone surface plate. In this case, since immediate response on the stone surface plate side is required by direct temperature control, it is considered that it is difficult to stabilize the shape of the stone surface plate. In addition, even if the lower surface of the stone surface plate is directly heated or cooled, it is considered that it is difficult to accurately control the shape of the stone surface plate because the thermal influence from the installation floor surface cannot be excluded.
　したがって、石定盤を備える検査装置では、設置床面の温度環境に起因する石定盤の変形により、フォトマスクのパターン検査に誤差が発生することを抑制することが求められる。 Therefore, in an inspection apparatus equipped with a stone surface plate, it is required to suppress the occurrence of an error in the pattern inspection of the photomask due to the deformation of the stone surface plate due to the temperature environment of the installation floor surface.
　本発明は、上記の課題に鑑みてなされたものであって、設置場所に拘わらずに、石定盤の平面精度を容易に維持できる石定盤の温度調整装置、およびそれを備え、被検査パネルの検査精度を向上させることができる検査装置を提供することを目的とする。 The present invention has been made in view of the above-described problems, and includes a stone surface plate temperature adjustment device that can easily maintain the planar accuracy of the stone surface plate regardless of the installation location, and a device to be inspected. An object of the present invention is to provide an inspection apparatus capable of improving the inspection accuracy of a panel.
　上述した課題を解決し、目的を達成するために、本発明の態様は、設置床面との間に間隙を隔てて配置される石定盤の温度調整装置であって、前記石定盤の下面に対向するように前記設置床面上に配置される下面温調パネルと、前記下面温調パネルの温度を制御する温度制御部と、を備え、前記下面温調パネルは、前記設置床面上に配置される断熱パネルと、前記断熱パネルの上に配置され、温度調整部が設けられ当該温度調整部により熱供給または熱吸収される熱輻射パネルと、を備え、前記温度制御部は、前記石定盤の上面と、前記熱輻射パネルの表面と、の温度差が設定値となるように前記熱輻射パネルの温度を制御することを特徴とする。 In order to solve the above-described problems and achieve the object, an aspect of the present invention is a temperature control device for a stone surface plate disposed with a gap between the floor surface and an installation floor surface. A lower surface temperature control panel disposed on the installation floor so as to face the lower surface; and a temperature control unit that controls a temperature of the lower surface temperature adjustment panel, wherein the lower surface temperature adjustment panel includes the installation floor surface A heat radiation panel disposed on the heat insulation panel, and a heat radiation panel disposed on the heat insulation panel, provided with a temperature adjustment unit and supplied with heat or absorbed by the temperature adjustment unit, and the temperature control unit includes: The temperature of the thermal radiation panel is controlled so that the temperature difference between the upper surface of the stone surface plate and the surface of the thermal radiation panel becomes a set value.
　上記態様としては、前記下面温調パネルが、前記設置床面の前記石定盤を設置する占有領域を、前記石定盤の長手方向に沿って複数に分割したそれぞれの分割領域毎に、配置されることが好ましい。 As said aspect, the said lower surface temperature control panel arrange | positions for every division area which divided | segmented the occupied area which installs the said stone surface plate of the said installation floor surface into plurality along the longitudinal direction of the said stone surface plate. It is preferred that
　上記態様としては、前記下面温調パネルにパネル側温度センサが設けられ、前記パネル側温度センサに対応する石定盤の上面に、該パネル側温度センサと対をなす上面側温度センサが設けられ、前記温度制御部は、上下方向で対応して対をなす、前記パネル側温度センサと、前記上面側温度センサと、の温度検出値に基づいて、それぞれの前記下面温調パネルの前記温度調整部の温度を制御することが好ましい。 As the above aspect, a panel side temperature sensor is provided on the bottom surface temperature control panel, and an upper surface side temperature sensor that is paired with the panel side temperature sensor is provided on the upper surface of the stone surface plate corresponding to the panel side temperature sensor. The temperature control unit adjusts the temperature of each of the lower surface temperature control panels based on the temperature detection values of the panel side temperature sensor and the upper surface side temperature sensor that form a pair in the vertical direction. It is preferable to control the temperature of the part.
　上記態様としては、前記下面温調パネルと前記石定盤の下面とで挟まれた間隙の周囲は、区画壁で囲まれることが好ましい。 As the above aspect, it is preferable that the periphery of the gap sandwiched between the lower surface temperature control panel and the lower surface of the stone surface plate is surrounded by a partition wall.
　上記態様としては、前記断熱パネルが、独立発泡構造の樹脂シートで構成されることが好ましい。 As the above aspect, it is preferable that the heat insulating panel is formed of a resin sheet having an independent foam structure.
　上記態様としては、前記熱輻射パネルが、金属板で構成されることが好ましい。 As the above aspect, it is preferable that the thermal radiation panel is made of a metal plate.
　上記態様としては、前記温度調整部が、冷媒を流通させるチューブであることが好ましい。 As the above aspect, it is preferable that the temperature adjusting unit is a tube for circulating a refrigerant.
　上記態様としては、前記チューブは、互いに並行する一対の冷媒流路を有し、前記一対の冷媒流路のそれぞれに、冷媒が互いに逆方向に流れるように設定されていることが好ましい。 As the above aspect, it is preferable that the tube has a pair of refrigerant flow paths parallel to each other, and the refrigerant is set to flow in opposite directions in each of the pair of refrigerant flow paths.
　上記態様としては、前記温度調整チューブに、前記下面温調パネルで温められる前記石定盤の温度よりも低い基準温度に調整された冷媒を供給するタンクと、前記温度調整チューブを通過した戻りの冷媒を、前記基準温度よりも低い温度の冷却水で当該基準温度まで下がるように冷却する熱交換器と、を備え、前記熱交換器で冷却した冷媒を前記タンクに供給することが好ましい。 As said aspect, the tank which supplies the refrigerant | coolant adjusted to the reference temperature lower than the temperature of the said stone surface plate heated by the said lower surface temperature control panel to the said temperature adjustment tube, and the return of having passed through the said temperature adjustment tube It is preferable that a heat exchanger that cools the refrigerant with cooling water having a temperature lower than the reference temperature is cooled to the reference temperature, and the refrigerant cooled by the heat exchanger is supplied to the tank.
　本発明の他の態様は、設置床面との間に間隙を隔てて配置され、被検査パネルを載せる石定盤と、前記被検査パネルのパネル面の状態を撮像する検査カメラと、前記石定盤の温度調整装置と、を備え、前記温度調整装置が、前記石定盤の下面に対向するように、前記設置床面上に配置される下面温調パネルと、前記下面温調パネルの温度を制御する温度制御部と、を備え、前記下面温調パネルは、前記設置床面上に配置される断熱パネルと、前記断熱パネルの上に配置され、温度調整部が埋設され、当該温度調整部により熱供給および熱吸収される熱輻射パネルと、を備え、前記温度制御部は、前記石定盤の上面と、前記熱輻射パネルの表面と、の温度差が設定値となるように前記熱輻射パネルの温度を制御することを特徴とする。 According to another aspect of the present invention, there is provided a stone surface plate on which a panel to be inspected is placed, an inspection camera for imaging the state of the panel surface of the panel to be inspected, and the stone. A temperature control device for a surface plate, and a bottom surface temperature control panel disposed on the installation floor so that the temperature control device faces a bottom surface of the stone surface plate, and a bottom surface temperature control panel A temperature control unit that controls the temperature, and the lower surface temperature control panel is disposed on the heat insulation panel and the heat insulation panel, the temperature adjustment unit is embedded, and the temperature is adjusted. A heat radiating panel that supplies and absorbs heat by the adjusting unit, and the temperature control unit is configured such that a temperature difference between the upper surface of the stone surface plate and the surface of the heat radiating panel becomes a set value. The temperature of the thermal radiation panel is controlled.
　本発明によれば、設置場所に拘わらずに、石定盤の変形を抑制でき、特に、平面精度を容易に維持できる石定盤の温度調整装置、およびそれを備え、被検査パネルの検査精度を向上させることができる検査装置を実現できる。 According to the present invention, it is possible to suppress the deformation of the stone surface plate regardless of the installation location, and in particular, the temperature adjusting device for the stone surface plate that can easily maintain the plane accuracy, and the inspection accuracy of the panel to be inspected are provided. It is possible to realize an inspection apparatus that can improve the above.
図１は、本発明の第１の実施の形態に係る検査装置の概略を示す断面図である。FIG. 1 is a sectional view schematically showing an inspection apparatus according to the first embodiment of the present invention. 図２は、本発明の第１の実施の形態に係る検査装置の要部分解斜視図である。FIG. 2 is an exploded perspective view of an essential part of the inspection apparatus according to the first embodiment of the present invention. 図３は、本発明の第１の実施の形態に係る検査装置の石定盤を除いた状態を示す平面説明図である。FIG. 3 is an explanatory plan view showing a state in which the stone surface plate of the inspection apparatus according to the first embodiment of the present invention is removed. 図４は、本発明の第１の実施の形態に係る検査装置および温度調整装置の概略構成図である。FIG. 4 is a schematic configuration diagram of the inspection apparatus and the temperature adjustment apparatus according to the first embodiment of the present invention. 図５は、本発明の第１の実施の形態に係る温度調整装置に用いる第１下面温調パネルの断面図である。FIG. 5 is a cross-sectional view of the first bottom surface temperature adjustment panel used in the temperature adjustment device according to the first embodiment of the present invention. 図６－１は、本発明の第１の実施の形態に係る検査装置において石定盤に温度分布による変形が生じた状態を模式的に示す説明図である。FIG. 6A is an explanatory diagram schematically illustrating a state in which the stone surface plate is deformed due to the temperature distribution in the inspection apparatus according to the first embodiment of the present invention. 図６－２は、本発明の第１の実施の形態に係る検査装置において温度調整装置により温度制御を行ったときの石定盤の状態を示す説明図である。FIG. 6B is an explanatory diagram illustrating a state of the stone surface plate when the temperature control is performed by the temperature adjusting device in the inspection device according to the first embodiment of the present invention. 図７は、本発明の第１の実施の形態に係る検査装置により、石定盤の温度制御を行った状態でのフォトマスクの状態を示す説明図である。FIG. 7 is an explanatory diagram showing a state of the photomask in a state where the temperature control of the stone surface plate is performed by the inspection apparatus according to the first embodiment of the present invention. 図８－１は、本発明の第２の実施の形態に係る検査装置において石定盤に温度分布による変形が生じた状態を模式的に示す説明図である。FIG. 8A is an explanatory diagram schematically illustrating a state in which the stone surface plate is deformed due to the temperature distribution in the inspection apparatus according to the second embodiment of the present invention. 図８－２は、本発明の第２の実施の形態に係る検査装置において温度調整装置により温度制御を行ったときの石定盤の状態を示す説明図である。FIG. 8-2 is an explanatory diagram showing a state of the stone surface plate when the temperature control is performed by the temperature adjusting device in the inspection device according to the second embodiment of the present invention. 図９－１は、本発明の第３の実施の形態に係る検査装置において石定盤に温度分布による変形が生じた状態を模式的に示す説明図である。FIG. 9A is an explanatory diagram schematically illustrating a state in which the stone surface plate is deformed due to the temperature distribution in the inspection apparatus according to the third embodiment of the present invention. 図９－２は、本発明の第３の実施の形態に係る検査装置において温度調整装置により温度制御を行ったときの石定盤の状態を示す説明図である。FIG. 9-2 is an explanatory diagram illustrating a state of the stone surface plate when the temperature control is performed by the temperature adjustment device in the inspection device according to the third embodiment of the present invention. 図１０は、本発明の第４の実施の形態に係る検査装置および温度調整装置に用いられる第１下面温調パネルの断面図である。FIG. 10 is a cross-sectional view of a first bottom surface temperature control panel used in an inspection apparatus and a temperature adjustment apparatus according to the fourth embodiment of the present invention. 図１１は、本発明の第５の実施の形態に係る検査装置および温度調整装置に用いられる下面温調パネルの平面説明図である。FIG. 11 is an explanatory plan view of a lower surface temperature control panel used in an inspection apparatus and a temperature adjustment apparatus according to the fifth embodiment of the present invention. 図１２は、図１１のXII－XII断面図である。12 is a cross-sectional view taken along the line XII-XII in FIG. 図１３は、本発明の第６の実施の形態に係る温度調整装置の概略構成図である。FIG. 13: is a schematic block diagram of the temperature control apparatus which concerns on the 6th Embodiment of this invention. 図１４は、石定盤においてストローク方向に対して垂直に交わる水平軸の軸回りに曲がるピッチングが生じてフォトマスクのパターンが変形した状態を示す説明図である。FIG. 14 is an explanatory diagram showing a state in which the pattern of the photomask is deformed due to the occurrence of pitching that turns around the horizontal axis that intersects perpendicularly to the stroke direction on the stone surface plate.
　以下に、本発明の実施の形態に係る石定盤の温度調整装置および検査装置の詳細を図面に基づいて説明する。但し、図面は模式的なものであり、各部材の寸法、寸法の比率、形状、変形の度合いなどは現実のものと異なることに留意すべきである。また、図面相互間においても互いの各部材の数、寸法の関係や比率や形状が異なる部分が含まれている。 Hereinafter, the details of the temperature control device and the inspection device for the stone surface plate according to the embodiment of the present invention will be described with reference to the drawings. However, the drawings are schematic, and it should be noted that the dimensions, ratios of dimensions, shapes, degrees of deformation, and the like of each member are different from actual ones. Also, the drawings include portions having different numbers, dimensional relationships, ratios, and shapes of the members.
「第１の実施の形態」
　図１は、本発明の第１の実施の形態に係る石定盤の温度調整装置を備えた検査装置１を示す。本実施の形態に係る検査装置１は、図１に示す被検査パネルであるフォトマスクＭのパターン配置の検査に用いられる。この検査装置１により、フォトマスクＭのマスク面に形成されたマスクパターンの位置データを検出でき、この位置データと設計データとを比較することにより、フォトマスクＭのマスクパターンの欠陥の検出やマスクパターンの修正などが可能となる。 “First Embodiment”
FIG. 1 shows an inspection apparatus 1 including a stone surface plate temperature control apparatus according to a first embodiment of the present invention. The inspection apparatus 1 according to the present embodiment is used for inspection of the pattern arrangement of the photomask M that is the panel to be inspected shown in FIG. The inspection apparatus 1 can detect the position data of the mask pattern formed on the mask surface of the photomask M, and by comparing the position data with the design data, detection of a defect in the mask pattern of the photomask M and the mask. The pattern can be corrected.
［検査装置の概略構成］
　図１に示すように、本実施の形態の検査装置１は、設置床面Ｆの上に配置される。検査装置１は、装置の基礎となるステージとしての石定盤２と、パネル支持部としてのマスク支持部３と、石定盤２を支える複数（図３に示すように本実施の形態では６つ）の除振台４，５，６，７，８，９と、撮像部１０と、温度調整装置１１を備える。 [Schematic configuration of inspection equipment]
As shown in FIG. 1, the inspection apparatus 1 of the present embodiment is disposed on an installation floor surface F. The inspection apparatus 1 includes a stone surface plate 2 as a stage serving as the basis of the apparatus, a mask support portion 3 as a panel support portion, and a plurality of (6 in the present embodiment as shown in FIG. 3 in the present embodiment). ) Vibration isolation tables 4, 5, 6, 7, 8, 9; an imaging unit 10;
（石定盤）
　石定盤２は、例えば、花崗岩（グラナイト）で構成される。図１および図２に示すように、石定盤２は略直方体形状であり、上面２１と、下面２２と、両側の側面２３，２４と、長手方向両端の側面２５，２６と、を有する。石定盤２の大きさは、例えば、幅が１，２００ｍｍ程度、長さが４，５００ｍｍ程度、厚みが４００ｍｍ程度の略直方体形状である。なお、石定盤２の大きさは、扱うフォトマスクＭの大きさにより、適宜変更する。 (Stone plate)
The stone surface plate 2 is made of granite (granite), for example. As shown in FIGS. 1 and 2, the stone surface plate 2 has a substantially rectangular parallelepiped shape, and has an upper surface 21, a lower surface 22, side surfaces 23 and 24 on both sides, and side surfaces 25 and 26 on both ends in the longitudinal direction. The size of the stone surface plate 2 is, for example, a substantially rectangular parallelepiped shape having a width of about 1,200 mm, a length of about 4,500 mm, and a thickness of about 400 mm. In addition, the magnitude | size of the stone surface plate 2 is changed suitably according to the magnitude | size of the photomask M to handle.
　図２に示すように、石定盤２の上面２１には、上面２１の幅方向Ｗの中央に、長手方向に沿って延びるガイド溝２Ａが形成されている。石定盤２の下面２２の四隅には、それぞれ凹部２Ｂが形成されている。また、石定盤２の下面の長手方向中央の幅方向Ｗの両側には、それぞれ凹部２Ｃが形成されている。 As shown in FIG. 2, a guide groove 2 </ b> A extending along the longitudinal direction is formed on the upper surface 21 of the stone surface plate 2 at the center in the width direction W of the upper surface 21. Recesses 2B are formed at the four corners of the lower surface 22 of the stone surface plate 2, respectively. In addition, concave portions 2C are formed on both sides of the width direction W at the center in the longitudinal direction of the lower surface of the stone surface plate 2, respectively.
　上記した６つ除振台４，５，６，７，８，９は、配置される石定盤２の凹部２Ｂ，２Ｃに対応するように設置床面Ｆ上に設置される。石定盤２は、凹部２Ｂ，２Ｃの底面（凹部内の空間の天井面）が、対応する除振台４，５，６，７，８，９のそれぞれの上面４Ａ，５Ａ，６Ａ，７Ａ，８Ａ，９Ａの上に当接するように配置される。図１に示すように、除振台４，５，６，７，８，９で石定盤２を支えた状態において、石定盤２の下面２２と設置床面Ｆとの間には、所定の高さ寸法を有する間隙Ｃが形成される。 The above-described six vibration isolation tables 4, 5, 6, 7, 8, and 9 are installed on the installation floor F so as to correspond to the recesses 2B and 2C of the stone surface plate 2 to be arranged. In the stone surface plate 2, the bottom surfaces of the recesses 2B and 2C (the ceiling surfaces of the spaces in the recesses) are the upper surfaces 4A, 5A, 6A, and 7A of the corresponding vibration isolation tables 4, 5, 6, 7, 8, and 9 respectively. , 8A, 9A. As shown in FIG. 1, in a state where the stone surface plate 2 is supported by the vibration isolation tables 4, 5, 6, 7, 8, 9, between the lower surface 22 of the stone surface plate 2 and the installation floor surface F, A gap C having a predetermined height is formed.
（マスク支持部）
　図１に示すように、石定盤２のガイド溝２Ａには、マスク支持部３が石定盤２のストローク方向Ｓ（石定盤２の長手方向）に移動自在に設けられている。マスク支持部３は、フォトマスクＭの縁部を支持する支持枠３Ａを備える。 (Mask support part)
As shown in FIG. 1, a mask support portion 3 is provided in the guide groove 2 </ b> A of the stone surface plate 2 so as to be movable in the stroke direction S of the stone surface plate 2 (longitudinal direction of the stone surface plate 2). The mask support unit 3 includes a support frame 3A that supports the edge of the photomask M.
（除振台）
　本実施の形態では、石定盤２の凹部２Ｂに対応する除振台４，６，７，９は、アクティブ除振台であり、石定盤２の凹部２Ｃに対応する除振台５，８は、パッシブ除振台である。なお、本発明では、除振台の構成は、これに限定されるものではない。 (Vibration isolation table)
In the present embodiment, the vibration isolation tables 4, 6, 7, 9 corresponding to the recess 2 </ b> B of the stone surface plate 2 are active vibration isolation tables, and the vibration isolation tables 5, corresponding to the recess 2 </ b> C of the stone surface plate 2. 8 is a passive vibration isolation table. In the present invention, the configuration of the vibration isolation table is not limited to this.
（撮像部）
　図１に示すように、撮像部１０は、上下ガイド支柱１０Ａと、検査カメラ１０Ｂと、を備える。検査カメラ１０Ｂは、上下ガイド支柱１０Ａに沿って上下方向に移動可能に設けられている。上下ガイド支柱は、石定盤２の上面２１に設けられている。検査カメラ１０Ｂは、図示しない制御装置および駆動装置により、上下移動するように設定されている。 (Imaging part)
As shown in FIG. 1, the imaging unit 10 includes an upper and lower guide column 10A and an inspection camera 10B. The inspection camera 10B is provided so as to be movable in the vertical direction along the vertical guide column 10A. The upper and lower guide columns are provided on the upper surface 21 of the stone surface plate 2. The inspection camera 10B is set to move up and down by a control device and a drive device (not shown).
［温度調整装置の構成］
　図４に示すように、温度調整装置１１は、第１上面側温度センサ３１、第２上面側温度センサ３２、第３上面側温度センサ３３、第４上面側温度センサ３４と、第１下面温調パネル１２、第２下面温調パネル１３、第３下面温調パネル１４、第４下面温調パネル１５と、第１パネル側温度センサ４１、第２パネル側温度センサ４２、第３パネル側温度センサ４３、第４パネル側温度センサ４４と、水温調整ヒータ１７，１８，１９，２０と、温度調整部としての温度調整チューブ３７と、下面温調パネルの温度を制御する温度制御部１６と、区画壁としてのカーテン５０（図２参照）と、を備える。 [Configuration of temperature control device]
As shown in FIG. 4, the temperature adjustment device 11 includes a first upper surface temperature sensor 31, a second upper surface temperature sensor 32, a third upper surface temperature sensor 33, a fourth upper surface temperature sensor 34, and a first lower surface temperature. Tone panel 12, second bottom surface temperature control panel 13, third bottom surface temperature control panel 14, fourth bottom surface temperature control panel 15, first panel side temperature sensor 41, second panel side temperature sensor 42, and third panel side temperature. A sensor 43, a fourth panel side temperature sensor 44, water temperature adjusting heaters 17, 18, 19, 20, a temperature adjusting tube 37 as a temperature adjusting unit, and a temperature control unit 16 for controlling the temperature of the lower surface temperature adjusting panel, And a curtain 50 (see FIG. 2) as a partition wall.
（上面側温度センサ）
　本実施の形態では、図４に示すように、石定盤２の上面２１を長手方向に４分割した領域Ａ１，Ａ２，Ａ３，Ａ４に対して、順次、第１上面側温度センサ３１、第２上面側温度センサ３２、第３上面側温度センサ３３、第４上面側温度センサ３４が、設けられている。これら第１上面側温度センサ３１、第２上面側温度センサ３２、第３上面側温度センサ３３、第４上面側温度センサ３４は、温度制御部１６に接続され、各領域Ａ１，Ａ２，Ａ３，Ａ４での温度検出値を温度制御部１６に出力する。 (Top surface temperature sensor)
In the present embodiment, as shown in FIG. 4, the first upper surface side temperature sensor 31, the first upper surface side temperature sensor 31, A second upper surface side temperature sensor 32, a third upper surface side temperature sensor 33, and a fourth upper surface side temperature sensor 34 are provided. The first upper surface side temperature sensor 31, the second upper surface side temperature sensor 32, the third upper surface side temperature sensor 33, and the fourth upper surface side temperature sensor 34 are connected to the temperature controller 16, and each region A1, A2, A3, The temperature detection value at A4 is output to the temperature control unit 16.
（下面温調パネル）
　第１下面温調パネル１２、第２下面温調パネル１３、第３下面温調パネル１４、第４下面温調パネル１５は、順次、石定盤２の４つの領域Ａ１，Ａ２，Ａ３，Ａ４（図４参照）に上下方向に対応するように、石定盤２の下方の設置床面Ｆ上に配置されている。 (Bottom temperature control panel)
The first lower surface temperature adjustment panel 12, the second lower surface temperature adjustment panel 13, the third lower surface temperature adjustment panel 14, and the fourth lower surface temperature adjustment panel 15 are sequentially arranged in four regions A1, A2, A3, A4 of the stone surface plate 2. It arrange | positions on the installation floor F below the stone surface plate 2 so that it may respond | correspond to an up-down direction (refer FIG. 4).
　図５に示すように、第１下面温調パネル１２は、断熱パネル３５と、熱輻射パネル３６と、が積層されて構成されている。なお、図５は、第１下面温調パネル１２のみを示すが、第２下面温調パネル１３、第３下面温調パネル１４、第４下面温調パネル１５も同様の構成であり、断熱パネル３５と熱輻射パネル３６とでなる。 As shown in FIG. 5, the first lower surface temperature control panel 12 is configured by laminating a heat insulating panel 35 and a heat radiation panel 36. FIG. 5 shows only the first bottom surface temperature control panel 12, but the second bottom surface temperature control panel 13, the third bottom surface temperature control panel 14, and the fourth bottom surface temperature control panel 15 have the same configuration, and a heat insulating panel. 35 and a heat radiation panel 36.
　断熱パネル３５は、断熱性の高い独立発泡構造の樹脂シート材で構成されている。この断熱パネル３５が、図１に示すように設置床面Ｆに接触するように配置される。特に、断熱パネル３５は、独立発泡構造であるため、連続発泡構造の断熱材に比較して熱遮断効果が高い。ただし、本発明では、設置床面Ｆ側からの熱の伝導を抑制できる他の断熱部材を適用してもよい。 The heat insulation panel 35 is made of a resin sheet material having an independent foam structure with high heat insulation. This heat insulation panel 35 is arrange | positioned so that the installation floor surface F may be contacted, as shown in FIG. In particular, since the heat insulating panel 35 has an independent foam structure, it has a higher heat shielding effect than a heat insulating material having a continuous foam structure. However, in this invention, you may apply the other heat insulation member which can suppress conduction of the heat from the installation floor F side.
　熱輻射パネル３６は、熱伝導性の高い金属板で構成されている。本実施の形態では、熱輻射パネル３６をアルミニウム板で構成している。図５に示すように、熱輻射パネル３６は、断熱パネル３５の上に積層されている。熱輻射パネル３６の表面には、温度調整部としてのチューブである温度調整チューブ３７が埋設されている。このため、熱輻射パネル３６は、温度調整チューブ３７により熱供給または熱吸収されて温度制御され、制御された温度の熱輻射を石定盤２の下面２２に行う。 The thermal radiation panel 36 is made of a metal plate having high thermal conductivity. In the present embodiment, the heat radiation panel 36 is made of an aluminum plate. As shown in FIG. 5, the heat radiation panel 36 is laminated on the heat insulation panel 35. A temperature adjustment tube 37 that is a tube as a temperature adjustment unit is embedded in the surface of the thermal radiation panel 36. For this reason, the heat radiation panel 36 is supplied with heat or absorbed by the temperature adjusting tube 37 and is controlled in temperature, and performs heat radiation at the controlled temperature on the lower surface 22 of the stone surface plate 2.
（温度調整部）
　図２、図３および図５に示すように、温度調整チューブ３７は、一対の冷媒流路３７Ａ，３７Ｂが互いに平行をなすように一体的に形成されている。なお、本実施の形態では、温度調整チューブ３７における温度均一性を高めるため、冷媒流路３７Ａ，３７Ｂ内に同じ温度の水を互いに逆方向に流通させるように設定されている。 (Temperature adjuster)
As shown in FIGS. 2, 3, and 5, the temperature adjustment tube 37 is integrally formed so that a pair of refrigerant flow paths 37 </ b> A and 37 </ b> B are parallel to each other. In the present embodiment, in order to improve the temperature uniformity in the temperature adjustment tube 37, water of the same temperature is set to flow in the opposite directions in the refrigerant flow paths 37A and 37B.
　本実施の形態では、温度調整チューブ３７を例えばフッ素樹脂で構成している。温度調整チューブ２３をフッ素樹脂で構成することにより、耐圧力性を高めることができ、水漏れを防ぐ効果を高めることができる。図２および図３に示すように、温度調整チューブ３７は、第１下面温調パネル１２、第２下面温調パネル１３、第３下面温調パネル１４、第４下面温調パネル１５のそれぞれの熱輻射パネル３６に対して、蛇行するようにレイアウトされて埋設されている。なお、熱輻射パネル３６に対する温度調整チューブ３７の配置密度は、均等になることが好ましく、除振台４，５，６，７，８，９の配置状態による熱伝達などによる熱分布を加味して配置密度を決定してもよい。 In this embodiment, the temperature adjustment tube 37 is made of, for example, a fluororesin. By constructing the temperature adjustment tube 23 with a fluororesin, the pressure resistance can be enhanced, and the effect of preventing water leakage can be enhanced. As shown in FIGS. 2 and 3, the temperature adjustment tube 37 includes the first lower surface temperature adjustment panel 12, the second lower surface temperature adjustment panel 13, the third lower surface temperature adjustment panel 14, and the fourth lower surface temperature adjustment panel 15. The heat radiation panel 36 is laid out and embedded so as to meander. The arrangement density of the temperature adjustment tubes 37 with respect to the heat radiation panel 36 is preferably uniform, taking into account the heat distribution due to heat transfer depending on the arrangement state of the vibration isolation tables 4, 5, 6, 7, 8, and 9. The arrangement density may be determined.
　図４に示すように、第１下面温調パネル１２、第２下面温調パネル１３、第３下面温調パネル１４、第４下面温調パネル１５にそれぞれ設けられた温度調整チューブ３７は、順次、水温調整ヒータ１７，１８，１９，２０から水温調整された水が供給される。なお、本実施の形態では、１つの温度調整チューブ３７は、冷媒流路３７Ａ，３７Ｂを有するため、水温調整ヒータ１７，１８，１９，２０のそれぞれから２つの冷媒流路３７Ａ，３７Ｂへ水温調整された水を供給するように設定されている。 As shown in FIG. 4, the temperature adjustment tubes 37 provided on the first lower surface temperature adjustment panel 12, the second lower surface temperature adjustment panel 13, the third lower surface temperature adjustment panel 14, and the fourth lower surface temperature adjustment panel 15, respectively, The water temperature adjusted water is supplied from the water temperature adjusting heaters 17, 18, 19, 20. In this embodiment, since one temperature adjustment tube 37 has the refrigerant flow paths 37A and 37B, the water temperature adjustment is performed from each of the water temperature adjustment heaters 17, 18, 19, and 20 to the two refrigerant flow paths 37A and 37B. Is set to supply the water.
（パネル側温度センサ）
　第１下面温調パネル１２、第２下面温調パネル１３、第３下面温調パネル１４、第４下面温調パネル１５のそれぞれの上面には、順次、第１パネル側温度センサ４１、第２パネル側温度センサ４２、第３パネル側温度センサ４３、第４パネル側温度センサ４４が配置されている。なお、これら第１パネル側温度センサ４１、第２パネル側温度センサ４２、第３パネル側温度センサ４３、第４パネル側温度センサ４４は、順次、石定盤２上の、第１上面側温度センサ３１、第２上面側温度センサ３２、第３上面側温度センサ３３、第４上面側温度センサ３４に対して上下方向に対応する位置に配置されることが好ましい。 (Panel side temperature sensor)
On the upper surfaces of the first lower surface temperature adjustment panel 12, the second lower surface temperature adjustment panel 13, the third lower surface temperature adjustment panel 14, and the fourth lower surface temperature adjustment panel 15, the first panel side temperature sensor 41, the second A panel side temperature sensor 42, a third panel side temperature sensor 43, and a fourth panel side temperature sensor 44 are arranged. The first panel side temperature sensor 41, the second panel side temperature sensor 42, the third panel side temperature sensor 43, and the fourth panel side temperature sensor 44 are sequentially converted from the first upper surface side temperature on the stone surface plate 2. It is preferable that the sensor 31, the second upper surface side temperature sensor 32, the third upper surface side temperature sensor 33, and the fourth upper surface side temperature sensor 34 are arranged at positions corresponding to the vertical direction.
　これら第１パネル側温度センサ４１、第２パネル側温度センサ４２、第３パネル側温度センサ４３、第４パネル側温度センサ４４は、温度制御部１６に接続されている。第１パネル側温度センサ４１、第２パネル側温度センサ４２、第３パネル側温度センサ４３、第４パネル側温度センサ４４で検出された、第１下面温調パネル１２、第２下面温調パネル１３、第３下面温調パネル１４、第４下面温調パネル１５の上面の温度検出値は、温度制御部１６に出力される。 The first panel side temperature sensor 41, the second panel side temperature sensor 42, the third panel side temperature sensor 43, and the fourth panel side temperature sensor 44 are connected to the temperature control unit 16. The first bottom surface temperature control panel 12, the second bottom surface temperature control panel detected by the first panel side temperature sensor 41, the second panel side temperature sensor 42, the third panel side temperature sensor 43, and the fourth panel side temperature sensor 44. 13, the detected temperature values of the upper surfaces of the third lower surface temperature control panel 14 and the fourth lower surface temperature control panel 15 are output to the temperature control unit 16.
（水温調整ヒータ）
　図４に示すように、水温調整ヒータ１７，１８，１９，２０は、基準温度（Ｔ）で供給される水を、温度制御部１６からの制御信号に基づいて、所定の制御温度（Ｔ＋Ａ），（Ｔ＋Ｂ），（Ｔ＋Ｃ），（Ｔ＋Ｄ）に昇温させる作用・動作を行う。なお、ここで、基準温度（Ｔ）は、検査装置１を稼働させる環境において、石定盤２の上面２１の温度よりも常に低い一定の温度が設定されている。 (Water temperature adjustment heater)
As shown in FIG. 4, the water temperature adjusting heaters 17, 18, 19, and 20 supply water supplied at a reference temperature (T) based on a control signal from the temperature control unit 16 to a predetermined control temperature (T + A). , (T + B), (T + C), (T + D). Here, the reference temperature (T) is set to a constant temperature that is always lower than the temperature of the upper surface 21 of the stone surface plate 2 in the environment where the inspection apparatus 1 is operated.
（温度制御部）
　図４に示すように、温度制御部１６は、石定盤２の上面２１側の、第１上面側温度センサ３１、第２上面側温度センサ３２、第３上面側温度センサ３３、第４上面側温度センサ３４と、下面温調パネル側の、第１パネル側温度センサ４１、第２パネル側温度センサ４２、第３パネル側温度センサ４３、第４パネル側温度センサ４４と、に接続されている。温度制御部１６は、水温調整ヒータ１７，１８，１９，２０に接続されている。 (Temperature controller)
As shown in FIG. 4, the temperature control unit 16 includes a first upper surface side temperature sensor 31, a second upper surface side temperature sensor 32, a third upper surface side temperature sensor 33, and a fourth upper surface on the upper surface 21 side of the stone surface plate 2. The side temperature sensor 34 is connected to the first panel side temperature sensor 41, the second panel side temperature sensor 42, the third panel side temperature sensor 43, and the fourth panel side temperature sensor 44 on the lower surface temperature control panel side. Yes. The temperature control unit 16 is connected to the water temperature adjusting heaters 17, 18, 19, and 20.
　温度制御部１６は、例えば、パーソナルコンピュータのような演算装置や記憶部を有するデバイスを備えて構成される。温度制御部１６では、石定盤２の上面側温度と下面側温度との差が、予め設定された温度となるように、水温調整ヒータ１７，１８，１９，２０での基準温度（Ｔ）に加える加熱度合を決定して水温調整ヒータ１７，１８，１９，２０を制御する。なお、上記の上面側温度と下面側温度との差（上面側温度－下面側温度）は、例えば、０.２℃程度に設定することができる。なお、上面側温度と下面側温度との差は、個々の石定盤２の特性に応じて決定すればよい。 The temperature control unit 16 includes, for example, a computing device such as a personal computer and a device having a storage unit. In the temperature control unit 16, the reference temperature (T) in the water temperature adjusting heaters 17, 18, 19, and 20 is set so that the difference between the upper surface side temperature and the lower surface side temperature of the stone surface plate 2 becomes a preset temperature. The water temperature adjusting heaters 17, 18, 19, and 20 are controlled by determining the degree of heating applied to the water temperature. The difference between the upper surface temperature and the lower surface temperature (upper surface temperature−lower surface temperature) can be set to about 0.2 ° C., for example. In addition, what is necessary is just to determine the difference of upper surface side temperature and lower surface side temperature according to the characteristic of each stone surface plate 2. FIG.
　このように水温調整ヒータ１７，１８，１９，２０を制御することにより、第１下面温調パネル１２、第２下面温調パネル１３、第３下面温調パネル１４、第４下面温調パネル１５にそれぞれ設けられた温度調整チューブ３７内を流通する水の温度を変化させることができる。このため、各下面温調パネルの熱輻射パネル３６は、個々に温度制御される。 Thus, by controlling the water temperature adjusting heaters 17, 18, 19, 20, the first lower surface temperature adjustment panel 12, the second lower surface temperature adjustment panel 13, the third lower surface temperature adjustment panel 14, and the fourth lower surface temperature adjustment panel 15. It is possible to change the temperature of the water flowing through the temperature adjusting tube 37 provided in each of the two. For this reason, the temperature of the heat radiation panel 36 of each bottom surface temperature control panel is individually controlled.
（区画壁）
　図２に示すように、本実施の形態では、第１下面温調パネル１２、第２下面温調パネル１３、第３下面温調パネル１４のそれぞれの周囲に沿って、区画壁としてのカーテン５０を配置する。本実施の形態では、カーテン５０として、例えば、静電防止塩化ビニルシートなどを用いる。なお、カーテン５０は、石定盤２と設置床面Ｆとの間の隙間を塞ぐ目的で用いる。また、カーテン５０は、第１下面温調パネル１２、第２下面温調パネル１３、第３下面温調パネル１４のそれぞれの上方の空間（間隙Ｃ）を区画している。したがって、カーテン５０により、下面温調パネル相互間での空気の対流を防止できる。このため、カーテン５０は、各下面温調パネルにおける隣接パネルから温度の影響を防止する機能を果たす。 (Partition wall)
As shown in FIG. 2, in the present embodiment, a curtain 50 as a partition wall is provided around each of the first lower surface temperature adjustment panel 12, the second lower surface temperature adjustment panel 13, and the third lower surface temperature adjustment panel 14. Place. In the present embodiment, for example, an antistatic vinyl chloride sheet is used as the curtain 50. The curtain 50 is used for the purpose of closing the gap between the stone surface plate 2 and the installation floor surface F. The curtain 50 defines a space (gap C) above each of the first lower surface temperature adjustment panel 12, the second lower surface temperature adjustment panel 13, and the third lower surface temperature adjustment panel 14. Therefore, the curtain 50 can prevent air convection between the lower surface temperature control panels. For this reason, the curtain 50 fulfill | performs the function which prevents the influence of temperature from the adjacent panel in each lower surface temperature control panel.
（作用および動作）
　本実施の形態に係る検査装置１および温度調整装置１１では、石定盤２の上面２１の各領域Ａ１，Ａ２，Ａ３，Ａ４の温度と、これら領域Ａ１，Ａ２，Ａ３，Ａ４に対応する石定盤２の下方の各下面温調パネルの温度と、を検出することにより、温度制御部１６が水温調整ヒータ１７，１８，１９，２０での温度制御を行う。 (Action and operation)
In the inspection apparatus 1 and the temperature adjustment apparatus 11 according to the present embodiment, the temperatures of the areas A1, A2, A3, A4 on the upper surface 21 of the stone surface plate 2 and the stones corresponding to these areas A1, A2, A3, A4. By detecting the temperature of each lower surface temperature control panel below the surface plate 2, the temperature control unit 16 performs temperature control with the water temperature adjusting heaters 17, 18, 19, and 20.
　したがって、本実施の形態では、石定盤２の各領域Ａ１，Ａ２，Ａ３，Ａ４における上面２１側の温度と、下方側の温度と、の温度差を設定した温度差に維持することができるため、石定盤２の変形を抑制できる。図６－１は、石定盤２に上下方向の温度差が設置環境により変化して、複数の箇所でピッチングが発生した状態を模式的に示している。本実施の形態では、上記の温度制御を行うことで、図６－２に示すように、石定盤２の変形を抑制することができる。したがって、図７に示すように、石定盤２に載せられたフォトマスクＭの変形も防止でき、フォトマスクＭのマスクパターンＭｐに変形が発生することによる検査ミスを未然に防止できる。 Therefore, in this embodiment, the temperature difference between the temperature on the upper surface 21 side and the temperature on the lower side in each region A1, A2, A3, A4 of the stone surface plate 2 can be maintained at a set temperature difference. Therefore, deformation of the stone surface plate 2 can be suppressed. FIG. 6A schematically shows a state in which the temperature difference in the vertical direction of the stone surface plate 2 changes depending on the installation environment, and pitching occurs at a plurality of locations. In the present embodiment, by performing the above temperature control, the deformation of the stone surface plate 2 can be suppressed as shown in FIG. Therefore, as shown in FIG. 7, the deformation of the photomask M placed on the stone surface plate 2 can be prevented, and an inspection error due to the deformation of the mask pattern Mp of the photomask M can be prevented.
　本実施の形態に係る温度調整装置１１は、上述の作用および動作を行うため、設置場所に拘わらずに、石定盤２の変形を抑制でき、特に、上面２１の平面精度を容易に維持できる。したがって、この温度調整装置１１を備える検査装置１では、フォトマスクＭの検査精度を向上させることができる。 Since the temperature adjusting device 11 according to the present embodiment performs the above-described operation and operation, it is possible to suppress the deformation of the stone surface plate 2 regardless of the installation location, and in particular, the planar accuracy of the upper surface 21 can be easily maintained. . Therefore, in the inspection apparatus 1 including the temperature adjusting device 11, the inspection accuracy of the photomask M can be improved.
　検査装置１の設置環境としては、温度制御されたサーマルチャンバ内や、クリーンエアをダウンフローさせだけで、石定盤２の上面２１の温度管理がされていないクリーンルーム内などがある。本実施の形態の検査装置１および温度調整装置１１によれば、上記のいずれの設置環境においても、設置床面Ｆ側からの温度の影響を抑制できる。また、本実施の形態では、気温の高い夏期や気温の低い冬期であっても、石定盤２の変形を抑制できる。 The installation environment of the inspection apparatus 1 includes a temperature-controlled thermal chamber and a clean room where the temperature control of the upper surface 21 of the stone surface plate 2 is not performed only by downflowing clean air. According to the inspection apparatus 1 and the temperature adjustment apparatus 11 of the present embodiment, the influence of the temperature from the installation floor surface F side can be suppressed in any of the installation environments described above. Moreover, in this Embodiment, deformation | transformation of the stone surface plate 2 can be suppressed even in the summer when the temperature is high or in the winter when the temperature is low.
　本実施の形態に係る検査装置１および温度調整装置１１では、石定盤２の上面の温度から一定差の温度を目的値となるように、石定盤２の下面２２側の温度制御するだけであるため、全体的な制御の流れとしてはオープンループの制御となり、制御系の安定性を簡単に確保できる。 In the inspection apparatus 1 and the temperature adjustment apparatus 11 according to the present embodiment, only the temperature control on the lower surface 22 side of the stone surface plate 2 is performed so that the temperature of a certain difference from the temperature of the upper surface of the stone surface plate 2 becomes a target value. Therefore, the overall control flow is open loop control, and the stability of the control system can be easily ensured.
　本実施の形態に係る検査装置１および温度調整装置１１では、石定盤２を４つに分割した領域Ａ１，Ａ２，Ａ３，Ａ４のそれぞれに対応する、第１下面温調パネル１２、第２下面温調パネル１３、第３下面温調パネル１４、第４下面温調パネル１５の温度調節を行うことで、石定盤２の複雑な曲がりに対する補正が可能となる。 In the inspection device 1 and the temperature adjustment device 11 according to the present embodiment, the first lower surface temperature adjustment panel 12 and the second temperature control panel 12 corresponding to each of the regions A1, A2, A3, and A4 obtained by dividing the stone surface plate 2 into four. By adjusting the temperature of the lower surface temperature control panel 13, the third lower surface temperature control panel 14, and the fourth lower surface temperature control panel 15, it is possible to correct the complicated bending of the stone surface plate 2.
　本実施の形態に係る検査装置１および温度調整装置１１では、第１下面温調パネル１２、第２下面温調パネル１３、第３下面温調パネル１４、第４下面温調パネル１５の熱輻射パネル３６からの熱輻射により石定盤２の下面２２の温度制御を行うため、石定盤２に対して、直接的な加熱に伴うようなストレスを与えることがない。 In the inspection apparatus 1 and the temperature adjustment apparatus 11 according to the present embodiment, the heat radiation of the first lower surface temperature adjustment panel 12, the second lower surface temperature adjustment panel 13, the third lower surface temperature adjustment panel 14, and the fourth lower surface temperature adjustment panel 15 is achieved. Since the temperature of the lower surface 22 of the stone surface plate 2 is controlled by heat radiation from the panel 36, the stone surface plate 2 is not subjected to stress that is caused by direct heating.
「第２の実施の形態」
　図８－１および図８－２は、本発明の第２の実施の形態に係る検査装置１および温度調整装置１１に用いられる石定盤２および下面温調パネルを模式的に示す。本実施の形態では、石定盤２を長手方向に３つに分割した領域Ａ１，Ａ２，Ａ３に、第１上面側温度センサ３１、第２上面側温度センサ３２、第３上面側温度センサ３３を設けている。これに対応して、下面温調パネルとして、第１下面温調パネル１２、第２下面温調パネル１３、第３下面温調パネル１４が設けられている。本実施の形態における他の構成は、上記した第１の実施の形態の構成内容と略同様である。 “Second Embodiment”
FIGS. 8A and 8B schematically show the stone surface plate 2 and the bottom surface temperature control panel used in the inspection apparatus 1 and the temperature adjustment apparatus 11 according to the second embodiment of the present invention. In the present embodiment, a first upper surface side temperature sensor 31, a second upper surface side temperature sensor 32, and a third upper surface side temperature sensor 33 are provided in regions A 1, A 2 and A 3 obtained by dividing the stone surface plate 2 into three in the longitudinal direction. Is provided. Correspondingly, a first lower surface temperature adjustment panel 12, a second lower surface temperature adjustment panel 13, and a third lower surface temperature adjustment panel 14 are provided as the lower surface temperature adjustment panels. Other configurations in the present embodiment are substantially the same as the configuration contents of the first embodiment described above.
　本実施の形態においても、図８－１に示すような石定盤２の複数の変形を抑制して、図８－２に示すように上面が平坦な形状を保つことができる。 Also in the present embodiment, a plurality of deformations of the stone surface plate 2 as shown in FIG. 8A can be suppressed, and the flat shape of the upper surface can be maintained as shown in FIG. 8B.
「第３の実施の形態」
　図９－１および図９－２は、本発明の第３の実施の形態に係る検査装置１および温度調整装置１１に用いられる石定盤２および下面温調パネルを模式的に示す。本実施の形態では、石定盤２を長手方向に２つに分割した領域Ａ１，Ａ２に、第１上面側温度センサ３１と第２上面側温度センサ３２とを設けている。これに対応して、下面温調パネルは、第１下面温調パネル１２と、第２下面温調パネル１３と、が設けられている。本実施の形態における他の構成は、上記した第１の実施の形態の構成内容と略同様である。 “Third Embodiment”
FIGS. 9-1 and 9-2 schematically show the stone surface plate 2 and the bottom surface temperature control panel used in the inspection apparatus 1 and the temperature adjustment apparatus 11 according to the third embodiment of the present invention. In the present embodiment, the first upper surface side temperature sensor 31 and the second upper surface side temperature sensor 32 are provided in the regions A1 and A2 obtained by dividing the stone surface plate 2 into two in the longitudinal direction. Correspondingly, the lower surface temperature adjustment panel is provided with a first lower surface temperature adjustment panel 12 and a second lower surface temperature adjustment panel 13. Other configurations in the present embodiment are substantially the same as the configuration contents of the first embodiment described above.
　本実施の形態においても、図９－１に示すような石定盤２の変形を抑制して、図９－２に示すように上面が平坦な形状を保つことができる。 Also in the present embodiment, the deformation of the stone surface plate 2 as shown in FIG. 9-1 can be suppressed, and the flat top surface can be maintained as shown in FIG. 9-2.
「第４の実施の形態」
　図１０は、本発明の第４の実施の形態に係る検査装置１および温度調整装置１１に用いる第１下面温調パネル１２Ａを示す。この実施の形態では、上記第１の実施の形態の第１下面温調パネル１２における熱輻射パネル３６を表裏反転させて断熱パネル３５に積層した構成である。したがって、温度調整チューブ３７は、断熱パネル３５と熱輻射パネル３６との界面近傍に位置する。本実施の形態の他の構成は、上記した第１の実施の形態と同様である。 “Fourth Embodiment”
FIG. 10 shows a first bottom surface temperature adjustment panel 12A used in the inspection apparatus 1 and the temperature adjustment apparatus 11 according to the fourth embodiment of the present invention. In this embodiment, the heat radiation panel 36 in the first bottom surface temperature control panel 12 of the first embodiment is reversed and laminated on the heat insulation panel 35. Therefore, the temperature adjustment tube 37 is located in the vicinity of the interface between the heat insulating panel 35 and the heat radiation panel 36. Other configurations of the present embodiment are the same as those of the first embodiment described above.
　本実施の形態では、熱輻射パネル３６の下側に温度調整チューブ３７を配置したことにより、温度調整チューブ３７から伝達される熱が、熱輻射パネル３６の上面に伝達されたときに、この上面において温度の均一性をより高めることができる。 In the present embodiment, the temperature adjustment tube 37 is disposed below the heat radiation panel 36, so that when the heat transmitted from the temperature adjustment tube 37 is transmitted to the upper surface of the heat radiation panel 36, the upper surface. The temperature uniformity can be further improved.
「第５の実施の形態」
　図１１および図１２は、本発明の第５の実施の形態に係る下面温調パネル６０を示す。図１２に示すように、下面温調パネル６０は、断熱パネル３５と熱輻射パネル３６とを積層してなる構成は、上記第１の実施の形態と同様である。本実施の形態では、熱輻射パネル３６の表面に埋設する温度調整部としての温度調整チューブ３８が１つの流路を持つチューブである。本実施の形態の他の構成は、上記した第１の実施の形態と同様である。 “Fifth Embodiment”
11 and 12 show a bottom temperature control panel 60 according to a fifth embodiment of the present invention. As shown in FIG. 12, the lower surface temperature adjustment panel 60 has a configuration in which a heat insulating panel 35 and a heat radiation panel 36 are stacked in the same manner as in the first embodiment. In the present embodiment, the temperature adjustment tube 38 as a temperature adjustment unit embedded in the surface of the thermal radiation panel 36 is a tube having one flow path. Other configurations of the present embodiment are the same as those of the first embodiment described above.
「第６の実施の形態」
　図１３は、本発明の第６の実施の形態に係る温度調整装置１１Ａの概略構成を示す。なお、本実施の形態では、水温調整ヒータ１７，１８，１９，２０に供給する水をそれぞれの温度調整チューブ３７から戻る水を適当な温度に下げてタンク７１に貯留、循環させて用いる。また、本実施の形態では、第１パネル側温度センサ４１、第２パネル側温度センサ４２、第３パネル側温度センサ４３、第４パネル側温度センサ４４を石定盤２の下面に配置している。本実施の形態の他の構成は、上述の第１の実施の形態の構成と略同様であるため、第１の実施の形態に対応する図面を適宜用いて説明する。 “Sixth Embodiment”
FIG. 13 shows a schematic configuration of a temperature adjustment device 11A according to the sixth embodiment of the present invention. In the present embodiment, the water supplied to the water temperature adjusting heaters 17, 18, 19, 20 is used by reducing and returning the water returning from the respective temperature adjusting tubes 37 to an appropriate temperature in the tank 71. In the present embodiment, the first panel side temperature sensor 41, the second panel side temperature sensor 42, the third panel side temperature sensor 43, and the fourth panel side temperature sensor 44 are arranged on the lower surface of the stone surface plate 2. Yes. The other configuration of the present embodiment is substantially the same as the configuration of the first embodiment described above, and therefore will be described with reference to the drawings corresponding to the first embodiment as appropriate.
　以下、図１から図４、および図１３を用いて本実施の形態に係る温度調整装置１１Ａについて説明する。温度調整装置１１Ａは、第１上面側温度センサ３１、第２上面側温度センサ３２、第３上面側温度センサ３３、第４上面側温度センサ３４と、第１パネル側温度センサ４１、第２パネル側温度センサ４２、第３パネル側温度センサ４３、第４パネル側温度センサ４４と、水温調整ヒータ１７，１８，１９，２０と、温度調整部としての温度調整チューブ３７と、温度調整チューブ３７をそれぞれ備える第１下面温調パネル１２、第２下面温調パネル１３、第３下面温調パネル１４、第４下面温調パネル１５と、それぞれの温度調整チューブ３７の温度を制御する温度制御部１６と、タンク７１と、熱交換器７２と、三方弁７３と、を備える。 Hereinafter, the temperature adjustment device 11A according to the present embodiment will be described with reference to FIGS. 1 to 4 and FIG. The temperature adjustment device 11A includes a first upper surface temperature sensor 31, a second upper surface temperature sensor 32, a third upper surface temperature sensor 33, a fourth upper surface temperature sensor 34, a first panel temperature sensor 41, and a second panel. Side temperature sensor 42, third panel side temperature sensor 43, fourth panel side temperature sensor 44, water temperature adjustment heaters 17, 18, 19, 20, temperature adjustment tube 37 as a temperature adjustment unit, and temperature adjustment tube 37. The first lower surface temperature control panel 12, the second lower surface temperature control panel 13, the third lower surface temperature control panel 14, the fourth lower surface temperature control panel 15, and the temperature control unit 16 that controls the temperature of each temperature adjustment tube 37. A tank 71, a heat exchanger 72, and a three-way valve 73.
　温度調整チューブ３７は、一対の冷媒流路３７Ａ，３７Ｂが互いに平行をなすように一体的に形成されている（図２および図３参照）。温度調整チューブ３７では、冷媒流路３７Ａ，３７Ｂ内に同じ温度の水を互いに逆方向に流通させるように設定されている。 The temperature adjustment tube 37 is integrally formed so that the pair of refrigerant channels 37A and 37B are parallel to each other (see FIGS. 2 and 3). The temperature adjustment tube 37 is set so that water of the same temperature flows in the refrigerant flow paths 37A and 37B in opposite directions.
　図１３に示すように、それぞれの温度調整チューブ３７には、水温調整ヒータ１７，１８，１９，２０でそれぞれ水温調整された水が供給される。なお、本実施の形態では、１つの温度調整チューブ３７が、一対の冷媒流路３７Ａ，３７Ｂを有するため、水温調整ヒータ１７，１８，１９，２０のそれぞれから２つの冷媒流路３７Ａ，３７Ｂへ水温調整された水を供給するように設定されている。 As shown in FIG. 13, each temperature adjustment tube 37 is supplied with water whose water temperature has been adjusted by the water temperature adjustment heaters 17, 18, 19, and 20. In the present embodiment, since one temperature adjustment tube 37 has a pair of refrigerant flow paths 37A and 37B, the water temperature adjustment heaters 17, 18, 19, and 20 are supplied to the two refrigerant flow paths 37A and 37B, respectively. It is set to supply water whose temperature is adjusted.
　具体的には、水温調整ヒータ１７の下流側には、配管８１が接続されている。この配管８１の下流端は、２つの配管８１Ａ，８１Ｂに分岐されている。配管８１Ａは、対応する第１下面温調パネル１２に設けられた冷媒流路３７Ａ（図２および図３参照）に接続されている。配管８１Ｂは、冷媒流路３７Ｂに対して、流路内の水の流れが冷媒流路３７Ａ内の水の流れと逆方向になるように接続されている。 Specifically, a pipe 81 is connected to the downstream side of the water temperature adjusting heater 17. The downstream end of the pipe 81 is branched into two pipes 81A and 81B. The pipe 81A is connected to a refrigerant flow path 37A (see FIGS. 2 and 3) provided in the corresponding first lower surface temperature control panel 12. The pipe 81B is connected to the refrigerant flow path 37B so that the water flow in the flow path is in the opposite direction to the water flow in the refrigerant flow path 37A.
　水温調整ヒータ１８の下流側には、配管８２が接続されている。この配管８２の下流端は、２つの配管８２Ａ，８２Ｂに分岐されている。配管８２Ａは、対応する第２下面温調パネル１３に設けられた冷媒流路３７Ａ（図２および図３参照）に接続されている。配管８２Ｂは、冷媒流路３７Ｂに対して、流路内の水の流れが冷媒流路３７Ａ内の水の流れと逆方向になるように接続されている。 A pipe 82 is connected to the downstream side of the water temperature adjusting heater 18. The downstream end of the pipe 82 is branched into two pipes 82A and 82B. The pipe 82A is connected to a refrigerant flow path 37A (see FIGS. 2 and 3) provided in the corresponding second lower surface temperature control panel 13. The pipe 82B is connected to the refrigerant flow path 37B so that the water flow in the flow path is opposite to the water flow in the refrigerant flow path 37A.
　水温調整ヒータ１９の下流側には、配管８３が接続されている。この配管８３の下流端は、２つの配管８３Ａ，８３Ｂに分岐されている。配管８３Ａは、対応する第３下面温調パネル１４に設けられた冷媒流路３７Ａ（図２および図３参照）に接続されている。配管８３Ｂは、冷媒流路３７Ｂに対して、流路内の水の流れが冷媒流路３７Ａ内の水の流れと逆方向になるように接続されている。 A pipe 83 is connected to the downstream side of the water temperature adjusting heater 19. The downstream end of the pipe 83 is branched into two pipes 83A and 83B. The pipe 83A is connected to a refrigerant flow path 37A (see FIGS. 2 and 3) provided in the corresponding third lower surface temperature control panel 14. The pipe 83B is connected to the refrigerant flow path 37B so that the water flow in the flow path is in the opposite direction to the water flow in the refrigerant flow path 37A.
　水温調整ヒータ２０の下流側には、配管８４が接続されている。この配管８４の下流端は、２つの配管８４Ａ，８４Ｂに分岐されている。配管８４Ａは、対応する第４下面温調パネル１５に設けられた冷媒流路３７Ａ（図２および図３参照）に接続されている。配管８４Ｂは、冷媒流路３７Ｂに対して、流路内の水の流れが冷媒流路３７Ａ内の水の流れと逆方向になるように接続されている。 A pipe 84 is connected to the downstream side of the water temperature adjusting heater 20. The downstream end of the pipe 84 is branched into two pipes 84A and 84B. The pipe 84A is connected to a refrigerant flow path 37A (see FIGS. 2 and 3) provided in the corresponding fourth lower surface temperature control panel 15. The pipe 84B is connected to the refrigerant flow path 37B so that the water flow in the flow path is opposite to the water flow in the refrigerant flow path 37A.
　図３に示す第１下面温調パネル１２に設けられた温度調整チューブ３７における、一対の冷媒流路３７Ａ，３７Ｂの下流端は、図１３に示すように、順次、配管８５Ａ，８５Ｂに接続されている。これら配管８５Ａ，８５Ｂの下流端は、配管８５に接続されて合流している。 As shown in FIG. 13, the downstream ends of the pair of refrigerant flow paths 37A and 37B in the temperature adjustment tube 37 provided on the first lower surface temperature control panel 12 shown in FIG. 3 are sequentially connected to the pipes 85A and 85B. ing. The downstream ends of these pipes 85A and 85B are connected to the pipe 85 and merge.
　第２下面温調パネル１３に設けられた温度調整チューブ３７における、一対の冷媒流路３７Ａ，３７Ｂの下流端は、図１３に示すように、順次、配管８６Ａ，８６Ｂに接続されている。これら配管８６Ａ，８６Ｂの下流端は、配管８６に接続されて合流している。 The downstream ends of the pair of refrigerant flow paths 37A and 37B in the temperature adjustment tube 37 provided on the second lower surface temperature control panel 13 are sequentially connected to the pipes 86A and 86B as shown in FIG. The downstream ends of these pipes 86A and 86B are connected to the pipe 86 and merge.
　第３下面温調パネル１４に設けられた温度調整チューブ３７における、一対の冷媒流路３７Ａ，３７Ｂの下流端は、図１３に示すように、順次、配管８７Ａ，８７Ｂに接続されている。これら配管８７Ａ，８７Ｂの下流端は、配管８７に接続されて合流している。 The downstream ends of the pair of refrigerant flow paths 37A and 37B in the temperature adjustment tube 37 provided on the third lower surface temperature control panel 14 are sequentially connected to the pipes 87A and 87B as shown in FIG. The downstream ends of these pipes 87A and 87B are connected to the pipe 87 and merge.
　第４下面温調パネル１５に設けられた温度調整チューブ３７における、一対の冷媒流路３７Ａ，３７Ｂの下流端は、図１３に示すように、順次、配管８８Ａ，８８Ｂに接続されている。これら配管８８Ａ，８８Ｂの下流端は、配管８９の上流端に接続されて合流している。配管８９の下流端は、熱交換器７２に接続されている。 The downstream ends of the pair of refrigerant flow paths 37A and 37B in the temperature adjustment tube 37 provided on the fourth lower surface temperature control panel 15 are sequentially connected to the pipes 88A and 88B as shown in FIG. The downstream ends of these pipes 88 </ b> A and 88 </ b> B are connected to and merged with the upstream end of the pipe 89. The downstream end of the pipe 89 is connected to the heat exchanger 72.
　配管８５，８６，８７，８８は、配管８９に接続されて合流している。配管８９は、熱交換器７２に接続されている。配管８９から供給されて熱交換器７２を通って熱交換された水は、配管８９Ａを介してタンク７１に供給されるようになっている。配管８９Ａには、温度センサ９２が設けられている。 The pipes 85, 86, 87, and 88 are connected to the pipe 89 and merge. The pipe 89 is connected to the heat exchanger 72. The water supplied from the pipe 89 and heat-exchanged through the heat exchanger 72 is supplied to the tank 71 through the pipe 89A. A temperature sensor 92 is provided in the pipe 89A.
　タンク７１には、循環水供給配管９３が接続されている。循環水供給配管９３には、循環ポンプ９４および圧力計９６が設けられている。タンク７１には、タンクレベル計９５が設けられている。循環水供給配管９３の下流端には、水温調整ヒータ１７に接続される配管９７と、水温調整ヒータ１８に接続される配管９８と、水温調整ヒータ１９に接続される配管９９と、水温調整ヒータ２０に接続される配管１００と、が接続されている。 A circulating water supply pipe 93 is connected to the tank 71. A circulating pump 94 and a pressure gauge 96 are provided in the circulating water supply pipe 93. The tank 71 is provided with a tank level meter 95. At the downstream end of the circulating water supply pipe 93, a pipe 97 connected to the water temperature adjusting heater 17, a pipe 98 connected to the water temperature adjusting heater 18, a pipe 99 connected to the water temperature adjusting heater 19, and a water temperature adjusting heater. And a pipe 100 connected to 20.
　図１３に示すように、熱交換器７２には、冷却水を供給する配管９０が接続されている。配管９０から供給されて熱交換器７２を通って熱交換された水は、配管９０Ａを介して冷却水出口へ導かれる。配管９０には、三方弁７３が介在されている。三方弁７３には、配管９０Ａに接続するバイパス配管９１が接続されている。 As shown in FIG. 13, a pipe 90 for supplying cooling water is connected to the heat exchanger 72. The water supplied from the pipe 90 and heat-exchanged through the heat exchanger 72 is guided to the cooling water outlet through the pipe 90A. A three-way valve 73 is interposed in the pipe 90. A bypass pipe 91 connected to the pipe 90A is connected to the three-way valve 73.
　本実施の形態では、温度の低い（例えば、１０℃前後の温度の）水道水などの冷却水を配管９０から供給して、熱交換器７２内で、配管８９から供給された循環水を基準温度（Ｔ）まで下げる制御を行う。 In the present embodiment, cooling water such as tap water having a low temperature (for example, a temperature around 10 ° C.) is supplied from the pipe 90, and the circulating water supplied from the pipe 89 is used as a reference in the heat exchanger 72. Control to lower the temperature (T).
　図１３に示すように、温度制御部１６は、石定盤２の上面２１側の、第１上面側温度センサ３１、第２上面側温度センサ３２、第３上面側温度センサ３３、第４上面側温度センサ３４と、下面２２側の、第１パネル側温度センサ４１、第２パネル側温度センサ４２、第３パネル側温度センサ４３、第４パネル側温度センサ４４と、に接続されている。さらに、温度制御部１６は、水温調整ヒータ１７，１８，１９，２０、三方弁７３、温度センサ９２に接続されている。 As shown in FIG. 13, the temperature control unit 16 includes a first upper surface side temperature sensor 31, a second upper surface side temperature sensor 32, a third upper surface side temperature sensor 33, and a fourth upper surface on the upper surface 21 side of the stone surface plate 2. The side temperature sensor 34 is connected to the first panel side temperature sensor 41, the second panel side temperature sensor 42, the third panel side temperature sensor 43, and the fourth panel side temperature sensor 44 on the lower surface 22 side. Further, the temperature control unit 16 is connected to the water temperature adjusting heaters 17, 18, 19, 20, the three-way valve 73, and the temperature sensor 92.
　温度制御部１６では、石定盤２の上面側温度と下面側温度との差が、予め設定された温度となるように、水温調整ヒータ１７，１８，１９，２０での基準温度（Ｔ）に加える加熱度合を決定して水温調整ヒータ１７，１８，１９，２０を制御する。なお、上記の上面側温度と下面側温度との差（上面側温度－下面側温度）は、例えば、０.２℃程度に設定することができる。なお、上面側温度と下面側温度との差は、個々の石定盤２の特性に応じて決定すればよい。また、本実施の形態では、第１パネル側温度センサ４１、第２パネル側温度センサ４２、第３パネル側温度センサ４３、第４パネル側温度センサ４４を石定盤２の下面２２に配置しているが、上記第１の実施の形態のように、第１下面温調パネル１２、第２下面温調パネル１３、第３下面温調パネル１４、第４下面温調パネル１５の表面に配置してもよい。要するに、石定盤２の各領域において、上面２１側と下面２２側との温度差を設定できればよい。」 In the temperature control unit 16, the reference temperature (T) in the water temperature adjusting heaters 17, 18, 19, and 20 is set so that the difference between the upper surface side temperature and the lower surface side temperature of the stone surface plate 2 becomes a preset temperature. The water temperature adjusting heaters 17, 18, 19, and 20 are controlled by determining the degree of heating applied to the water temperature. The difference between the upper surface temperature and the lower surface temperature (upper surface temperature−lower surface temperature) can be set to about 0.2 ° C., for example. In addition, what is necessary is just to determine the difference of upper surface side temperature and lower surface side temperature according to the characteristic of each stone surface plate 2. FIG. In the present embodiment, the first panel side temperature sensor 41, the second panel side temperature sensor 42, the third panel side temperature sensor 43, and the fourth panel side temperature sensor 44 are arranged on the lower surface 22 of the stone surface plate 2. However, as in the first embodiment, it is arranged on the surface of the first lower surface temperature adjustment panel 12, the second lower surface temperature adjustment panel 13, the third lower surface temperature adjustment panel 14, and the fourth lower surface temperature adjustment panel 15. May be. In short, it is only necessary to set the temperature difference between the upper surface 21 side and the lower surface 22 side in each region of the stone surface plate 2. "
　このように水温調整ヒータ１７，１８，１９，２０を制御することにより、第１下面温調パネル１２、第２下面温調パネル１３、第３下面温調パネル１４、第４下面温調パネル１５にそれぞれ設けられた温度調整チューブ３７内を流通する水の温度を変化させることができる。このため、各下面温調パネルの熱輻射パネル３６は、個々に温度制御される。 Thus, by controlling the water temperature adjusting heaters 17, 18, 19, 20, the first lower surface temperature adjustment panel 12, the second lower surface temperature adjustment panel 13, the third lower surface temperature adjustment panel 14, and the fourth lower surface temperature adjustment panel 15. It is possible to change the temperature of the water flowing through the temperature adjusting tube 37 provided in each of the two. For this reason, the temperature of the heat radiation panel 36 of each bottom surface temperature control panel is individually controlled.
　図１３に示すように、水温調整ヒータ１７，１８，１９，２０は、基準温度（Ｔ）で供給される水を、温度制御部１６からの制御信号に基づいて、所定の制御温度（Ｔ＋Ａ），（Ｔ＋Ｂ），（Ｔ＋Ｃ），（Ｔ＋Ｄ）に昇温させる作用・動作を行う。なお、ここで、基準温度（Ｔ）は、装置を稼働させる環境において、石定盤２の上面２１の温度よりも常に低い一定の温度が設定されている。本実施の形態では、基準温度（Ｔ）を例えば、２０℃に設定している。すなわち、本実施の形態では、タンク７１に貯留する水の基準温度（Ｔ）が２０℃に設定されている。 As shown in FIG. 13, the water temperature adjusting heaters 17, 18, 19, and 20 are configured to supply water supplied at a reference temperature (T) to a predetermined control temperature (T + A) based on a control signal from the temperature control unit 16. , (T + B), (T + C), (T + D). Here, the reference temperature (T) is set to a constant temperature that is always lower than the temperature of the upper surface 21 of the stone surface plate 2 in the environment where the apparatus is operated. In the present embodiment, the reference temperature (T) is set to 20 ° C., for example. That is, in the present embodiment, the reference temperature (T) of water stored in the tank 71 is set to 20 ° C.
　本実施の形態では、配管９０には、例えば、１１℃の冷却水が供給される。熱交換器７２には、２０℃よりも高い温度（Ｔ＋Ａ）、（Ｔ＋Ｂ）、（Ｔ＋Ｃ）、（Ｔ＋Ｄ）などに加熱された水が配管８９を介して供給される。なお、具体的には、配管８９を介して熱交換器７２へ供給される水の温度は、例えば、２３℃程度である。 In the present embodiment, for example, 11 ° C. cooling water is supplied to the pipe 90. Water heated to a temperature (T + A), (T + B), (T + C), (T + D), etc. higher than 20 ° C. is supplied to the heat exchanger 72 via a pipe 89. Specifically, the temperature of water supplied to the heat exchanger 72 via the pipe 89 is, for example, about 23 ° C.
　温度制御部１６は、温度センサ９２の温度検出値に基づいて、三方弁７３を制御して、バイパス配管９１に冷却水を流したり、熱交換器７２へ冷却水を流したり、冷却水の流量を制御する。これにより、熱交換器７２内では、水温１１℃の冷却水により、配管８９から供給された水を２３℃から２０℃まで下げることができ、タンク７１へ貯留する水の温度を２０℃にすることができる。このように、本実施の形態では、水温の低い（１１℃）冷却水を２０℃まで温める必要がないため、大きな電力を消費することがない。 The temperature control unit 16 controls the three-way valve 73 based on the temperature detection value of the temperature sensor 92 to flow cooling water to the bypass pipe 91, flow cooling water to the heat exchanger 72, and flow rate of cooling water. To control. Thereby, in the heat exchanger 72, the water supplied from the pipe 89 can be lowered from 23 ° C. to 20 ° C. by the cooling water having a water temperature of 11 ° C., and the temperature of the water stored in the tank 71 is set to 20 ° C. be able to. Thus, in this Embodiment, since it is not necessary to heat a cooling water with a low water temperature (11 degreeC) to 20 degreeC, a big electric power is not consumed.
　なお、第１上面温度側センサ３１および第１パネル側温度センサ４１、第２上面側温度センサ３２および第２パネル側温度センサ４２、第３上面側温度センサ３３および第３パネル側温度センサ４３、第４上面側温度センサ３４および第４パネル側温度センサ４４は、それぞれ熱電対をなすように構成しても勿論よい。 The first upper surface temperature sensor 31 and the first panel temperature sensor 41, the second upper surface temperature sensor 32 and the second panel temperature sensor 42, the third upper surface temperature sensor 33 and the third panel temperature sensor 43, Of course, the fourth upper surface side temperature sensor 34 and the fourth panel side temperature sensor 44 may each be configured to form a thermocouple.
　本実施の形態においては、例えば、１１℃程度の水道水などの冷媒を２０℃以上の温度まで昇温させる必要がなく、消費電力を大幅に抑えることができる。すなわち、本実施の形態では、基準温度（Ｔ）から制御温度（Ｔ＋Ａ），（Ｔ＋Ｂ），（Ｔ＋Ｃ），（Ｔ＋Ｄ）までの温度差を小さくできるため、消費電力を大幅に抑えることができる。また、本実施の形態では、基準温度（Ｔ）を第１下面温調パネル１２、第２下面温調パネル１３、第３下面温調パネル１４および第４下面温調パネル１５の最低制御温度よりやや低めに設定することにより、冷却水の使用量も大幅に抑制できる。 In this embodiment, for example, it is not necessary to raise the temperature of a coolant such as tap water of about 11 ° C. to a temperature of 20 ° C. or higher, and power consumption can be significantly reduced. That is, in this embodiment, the temperature difference from the reference temperature (T) to the control temperatures (T + A), (T + B), (T + C), and (T + D) can be reduced, so that the power consumption can be greatly suppressed. In the present embodiment, the reference temperature (T) is determined from the minimum control temperature of the first lower surface temperature adjustment panel 12, the second lower surface temperature adjustment panel 13, the third lower surface temperature adjustment panel 14, and the fourth lower surface temperature adjustment panel 15. By using a slightly lower setting, the amount of cooling water used can be significantly reduced.
　本実施の形態では、水温調整ヒータ１７，１８，１９，２０、温度調整チューブ３７、熱交換器７２、およびタンク７１に循環させる冷媒として水を用いたが、これに限定されない。本実施の形態では、タンク７１に水を循環させる構成であるため、仮に水漏れが発生した場合でも、タンク７１の容量分以上の水漏れは発生しない。また、本実施の形態では、タンク内の水量低下から水漏れを検出できるという利点がある。これに対して、タンクに水を循環させずに、水道水などの冷却水（一次冷却水）を水温調整ヒータ１７，１８，１９，２０で直接加熱させる構成（比較例）とした場合、第１下面温調パネル１２、第２下面温調パネル１３、第３下面温調パネル１４および第４下面温調パネル１５などに水漏れセンサ配置することが難しい。このため、この比較例では、水漏れが発生した場合、水漏れ量が大量となる虞がある。したがって、本実施の形態のようにタンク７１に循環させる構成とすることにより、水漏れの発生を大幅に抑制できる。 In this embodiment, water is used as the coolant to be circulated in the water temperature adjusting heaters 17, 18, 19, 20, the temperature adjusting tube 37, the heat exchanger 72, and the tank 71, but is not limited thereto. In the present embodiment, since water is circulated through the tank 71, even if a water leak occurs, a water leak exceeding the capacity of the tank 71 does not occur. Moreover, in this Embodiment, there exists an advantage that a water leak is detectable from the water quantity fall in a tank. On the other hand, when a configuration (comparative example) in which cooling water (primary cooling water) such as tap water is directly heated by the water temperature adjusting heaters 17, 18, 19, 20 without circulating water in the tank, It is difficult to dispose a water leak sensor on the first bottom surface temperature control panel 12, the second bottom surface temperature control panel 13, the third bottom surface temperature control panel 14, the fourth bottom surface temperature control panel 15, and the like. For this reason, in this comparative example, when a water leak occurs, there is a possibility that the amount of water leak becomes large. Therefore, the occurrence of water leakage can be significantly suppressed by adopting a configuration that circulates in the tank 71 as in the present embodiment.
「その他の実施の形態」
　以上、第１～第６の実施の形態について説明したが、これら実施の形態の開示の一部をなす論述および図面はこの発明を限定するものであると理解すべきではない。この開示から当業者には様々な代替実施の形態、実施例および運用技術が明らかとなろう。 "Other embodiments"
Although the first to sixth embodiments have been described above, it should not be understood that the description and the drawings, which form part of the disclosure of these embodiments, limit the present invention. From this disclosure, various alternative embodiments, examples and operational techniques will be apparent to those skilled in the art.
　例えば、上記実施の形態では、被検査パネルとしてフォトマスクＭを適用したが、電子回路を形成したフォトマスクの原版となるブランクスを適用してもよい。 For example, in the above embodiment, the photomask M is applied as the panel to be inspected, but blanks serving as a photomask original plate on which an electronic circuit is formed may be applied.
　上記実施の形態では、断熱パネル３５と熱輻射パネル３６とを積層して一体化した構成であるが、断熱パネル３５の上に熱輻射パネル３６を積み重ねる構成としてもよい。また、断熱パネル３５は、石定盤２を配置する占有領域全体に亘る大きさおよび形状のものを用い、その上に、複数の熱輻射パネル３６を長手方向に沿って連続して配置する構成としても勿論よい。 In the above embodiment, the heat insulation panel 35 and the heat radiation panel 36 are laminated and integrated, but the heat radiation panel 36 may be stacked on the heat insulation panel 35. Moreover, the heat insulation panel 35 uses the thing of the magnitude | size and shape over the whole occupied area | region which arrange | positions the stone surface plate 2, and the structure which arrange | positions the several thermal radiation panel 36 continuously along a longitudinal direction on it Of course.
　上記実施の形態では、石定盤２上でフォトマスクＭをストローク方向Ｓに移動させる構成としたが、石定盤２上にフォトマスクＭを固定し、撮像部１０側をストローク方向Ｓに移動させる構成としても勿論よい。 In the above embodiment, the photomask M is moved in the stroke direction S on the stone surface plate 2, but the photomask M is fixed on the stone surface plate 2 and the imaging unit 10 side is moved in the stroke direction S. Of course, it is also possible to adopt a configuration that allows them to be used.
　上記実施の形態に係る検査装置１では、フォトマスクＭを縦置き状態で検査を行う構成であるが、フォトマスクＭなどの被検査パネルを水平に、すなわち横置き状態で検査を行う構成としてもよい。 In the inspection apparatus 1 according to the above-described embodiment, the photomask M is inspected in a vertically placed state, but a panel to be inspected such as the photomask M may be inspected horizontally, that is, in a horizontally placed state. Good.
　Ａ１，Ａ２，Ａ３，Ａ４　領域
　Ｃ　間隙
　Ｆ　設置床面
　Ｍ　フォトマスク（被検査パネル）
　Ｓ　ストローク方向
　１　検査装置
　２　石定盤
　２Ａ　ガイド溝
　２Ｂ　凹部（アクティブ除振台用）
　２Ｃ　凹部（パッシブ除振台用）
　４、５，６，７，８，９　除振台
　１０Ｂ　検査カメラ
　１１，１１Ａ　温度調整装置
　１２，１２Ａ　第１下面温調パネル
　１３　第２下面温調パネル
　１４　第３下面温調パネル
　１５　第４下面温調パネル
　１６　温度制御部
　１７，１８，１９，２０　水温調整ヒータ
　２１　上面
　２２　下面
　２３　側面（石定盤の幅方向Ｗの一端側の側面）
　２４　側面（石定盤の幅方向Ｗの他端側の側面）
　２５　側面（石定盤のストローク方向Ｓの一端側の側面）
　２６　側面（石定盤のストローク方向Ｓの他端側の側面）
　３１　第１上面側温度センサ
　３２　第２上面側温度センサ
　３３　第３上面側温度センサ
　３４　第４上面側温度センサ
　３５　断熱パネル
　３６　熱輻射パネル
　３７，３８　温度調整チューブ（温度調整部）
　３７Ａ，３７Ｂ　冷媒流路
　４１　第１パネル側温度センサ
　４２　第２パネル側温度センサ
　４３　第３パネル側温度センサ
　４４　第４パネル側温度センサ
　５０　カーテン（区画壁）
　６０　下面温調パネル
　７１　タンク　７２　熱交換器
　７３　三方弁
  A1, A2, A3, A4 Area C Gap F Installation floor M Photomask (inspected panel)
S Stroke direction 1 Inspection device 2 Stone surface plate 2A Guide groove 2B Concavity (for active vibration isolation table)
2C recess (for passive vibration isolation table)
4, 5, 6, 7, 8, 9 Anti-vibration table 10B Inspection camera 11, 11A Temperature adjustment device 12, 12A First bottom surface temperature control panel 13 Second bottom surface temperature control panel 14 Third bottom surface temperature control panel 15 Fourth bottom surface Temperature control panel 16 Temperature control unit 17, 18, 19, 20 Water temperature adjustment heater 21 Upper surface 22 Lower surface 23 Side surface (side surface on one end side in width direction W of stone surface plate)
24 side surface (side surface on the other end side in the width direction W of the stone surface plate)
25 Side (Side side of one side in the stroke direction S of the stone surface plate)
26 side surface (side surface on the other end side in the stroke direction S of the stone surface plate)
31 1st upper surface side temperature sensor 32 2nd upper surface side temperature sensor 33 3rd upper surface side temperature sensor 34 4th upper surface side temperature sensor 35 Thermal insulation panel 36 Thermal radiation panel 37,38 Temperature adjustment tube (temperature adjustment part)
37A, 37B Refrigerant flow path 41 First panel side temperature sensor 42 Second panel side temperature sensor 43 Third panel side temperature sensor 44 Fourth panel side temperature sensor 50 Curtain (partition wall)
60 Bottom temperature control panel 71 Tank 72 Heat exchanger 73 Three-way valve

Claims (10)

  1. 　設置床面との間に間隙を隔てて配置される石定盤の温度調整装置であって、
    　前記石定盤の下面に対向するように、前記設置床面上に配置される下面温調パネルと、
    　前記下面温調パネルの温度を制御する温度制御部と、を備え、
    　前記下面温調パネルは、
    　前記設置床面上に配置される断熱パネルと、
    　前記断熱パネルの上に配置され、温度調整部が設けられ当該温度調整部により熱供給または熱吸収される熱輻射パネルと、を備え、
    　前記温度制御部は、前記石定盤の上面と、前記熱輻射パネルの表面と、の温度差が設定値となるように前記熱輻射パネルの温度を制御する、石定盤の温度調整装置。     A temperature control device for a stone surface plate arranged with a gap between it and the installation floor surface,
    A lower surface temperature control panel arranged on the installation floor so as to face the lower surface of the stone surface plate,
    A temperature control unit for controlling the temperature of the lower surface temperature control panel,
    The lower surface temperature control panel is:
    A heat insulating panel disposed on the installation floor;
    A heat radiating panel disposed on the heat insulating panel, provided with a temperature adjusting unit, and supplied with heat or absorbed by the temperature adjusting unit;
    The temperature control unit is a temperature adjusting device for a stone surface plate that controls the temperature of the heat radiation panel so that a temperature difference between the upper surface of the stone surface plate and the surface of the heat radiation panel becomes a set value.
  2. 　前記下面温調パネルは、前記設置床面の前記石定盤を設置する占有領域を、前記石定盤の長手方向に沿って複数に分割したそれぞれの分割領域毎に、配置される、請求項１に記載の石定盤の温度調整装置。 The lower surface temperature control panel is arranged for each divided area obtained by dividing an occupied area where the stone surface plate of the installation floor surface is installed into a plurality along the longitudinal direction of the stone surface plate. The temperature control apparatus of the stone surface plate of 1.
  3. 　前記下面温調パネルにパネル側温度センサが設けられ、
    　前記パネル側温度センサに対応する石定盤の上面に、該パネル側温度センサと対をなす上面側温度センサが設けられ、
    　前記温度制御部は、対をなす、前記パネル側温度センサと、上下方向で対応する前記上面側温度センサと、の温度検出値に基づいて、それぞれの前記下面温調パネルの前記温度調整部の温度を制御する、
    　請求項１または請求項２に記載の石定盤の温度調整装置。     A panel-side temperature sensor is provided on the lower surface temperature control panel,
    On the upper surface of the stone surface plate corresponding to the panel side temperature sensor, an upper surface side temperature sensor that is paired with the panel side temperature sensor is provided,
    The temperature control unit is configured to detect the temperature adjustment unit of each of the lower surface temperature control panels based on the temperature detection values of the paired panel side temperature sensor and the upper surface side temperature sensor corresponding in the vertical direction. Control the temperature,
    The temperature control apparatus of the stone surface plate of Claim 1 or Claim 2.
  4. 　前記下面温調パネルと前記石定盤の下面とで挟まれた間隙の周囲は、区画壁で囲まれる、請求項１から請求項３のいずれか一項に記載の石定盤の温度調整装置。 The temperature adjusting device for a stone surface plate according to any one of claims 1 to 3, wherein a space between the bottom surface temperature control panel and a bottom surface of the stone surface plate is surrounded by a partition wall. .
  5. 　前記断熱パネルは、独立発泡構造の樹脂シートで構成される、請求項１から請求項４のいずれか一項に記載の石定盤の温度調整装置。 The said heat insulation panel is a temperature control apparatus of the stone surface plate as described in any one of Claims 1-4 comprised with the resin sheet of an independent foam structure.
  6. 　前記熱輻射パネルは、金属板で構成される、請求項１から請求項５のいずれか一項に記載の石定盤の温度調整装置。 The temperature adjusting device for a stone surface plate according to any one of claims 1 to 5, wherein the thermal radiation panel is made of a metal plate.
  7. 　前記温度調整部は、冷媒を流通させる温度調整チューブである、請求項１から請求項６のいずれか一項に記載の石定盤の温度調整装置。 The temperature adjusting device for a stone surface plate according to any one of claims 1 to 6, wherein the temperature adjusting unit is a temperature adjusting tube for circulating a refrigerant.
  8. 　前記温度調整チューブは、互いに並行する一対の冷媒流路を有し、
    　前記一対の冷媒流路のそれぞれに、冷媒が互いに逆方向に流れるように設定されている、請求項７に記載の石定盤の温度調整装置。     The temperature adjustment tube has a pair of refrigerant flow paths parallel to each other,
    The temperature control device for a stone surface plate according to claim 7, wherein each of the pair of refrigerant flow paths is set so that the refrigerant flows in directions opposite to each other.
  9. 　前記温度調整チューブに、前記下面温調パネルで温められる前記石定盤の温度よりも低い基準温度に調整された冷媒を供給するタンクと、
    　前記温度調整チューブを通過した戻りの冷媒を、前記基準温度よりも低い温度の冷却水で当該基準温度まで下がるように冷却する熱交換器と、を備え、
    　前記熱交換器で冷却した冷媒を前記タンクに供給する請求項７または請求項８に記載の石定盤の温度調整装置。     A tank for supplying the temperature adjustment tube with a refrigerant adjusted to a reference temperature lower than the temperature of the stone surface plate heated by the lower surface temperature control panel;
    A heat exchanger that cools the returned refrigerant that has passed through the temperature adjustment tube so as to be lowered to the reference temperature with cooling water having a temperature lower than the reference temperature, and
    The temperature adjusting device for a stone surface plate according to claim 7 or 8, wherein the refrigerant cooled by the heat exchanger is supplied to the tank.
  10. 　前記設置床面との間に間隙を隔てて配置され、被検査パネルを載せる前記石定盤と、
    　前記被検査パネルに対して相対的に移動して、前記被検査パネルのパネル面の状態を撮像する検査カメラと、
    　請求項１から請求項９のいずれか一項に記載の前記石定盤の温度調整装置と、を備えた検査装置。
          The stone surface plate on which the panel to be inspected is placed, with a gap between the floor and the installation floor;
    An inspection camera that moves relative to the panel to be inspected and images the state of the panel surface of the panel to be inspected;
    The inspection apparatus provided with the temperature adjusting device of the said stone surface plate as described in any one of Claims 1-9.
PCT/JP2019/014502 2018-04-03 2019-04-01 Temperature adjusting device for stone surface plate, and inspection device provided with same WO2019194139A1 (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62218837A (en) * 1986-03-20 1987-09-26 Fujitsu Ltd Precision optical measuring surface plate
JPH09126703A (en) * 1995-10-31 1997-05-16 Naruko Denki Seisakusho:Kk Precise constant temperature surface plate
JP2008010633A (en) * 2006-06-29 2008-01-17 Tokyo Seimitsu Co Ltd Prober
DE102010056039A1 (en) * 2010-12-16 2012-06-21 Carl Zeiss Industrielle Messtechnik Gmbh Apparatus for determining spatial coordinates of measurement point at measurement object, detects rotational error of frame device along X-axis direction based on distances between reference surfaces along Y and Z axes directions

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62218837A (en) * 1986-03-20 1987-09-26 Fujitsu Ltd Precision optical measuring surface plate
JPH09126703A (en) * 1995-10-31 1997-05-16 Naruko Denki Seisakusho:Kk Precise constant temperature surface plate
JP2008010633A (en) * 2006-06-29 2008-01-17 Tokyo Seimitsu Co Ltd Prober
DE102010056039A1 (en) * 2010-12-16 2012-06-21 Carl Zeiss Industrielle Messtechnik Gmbh Apparatus for determining spatial coordinates of measurement point at measurement object, detects rotational error of frame device along X-axis direction based on distances between reference surfaces along Y and Z axes directions

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