TWI779490B - Method for producing large light reflection element and method for producing optical image forming device - Google Patents

Abstract

A method for manufacturing a large-scale light reflection element and a method for manufacturing an optical imaging device, including the following process: a plurality of unit light reflection elements are arranged on a transparent flat plate with the light reflection surfaces in the same direction, and the display has a The inspection reference image of the horizontal line parallel to each light reflecting surface of each unit light reflecting element, and then observe the continuity of the mirror image formed by the horizontal line reflecting once on each light reflecting surface from the other side of the transparent plate, and judge the phase The disposition of adjacent unit light reflection elements is good, the aforementioned display has a certain angle with the transparent plate and is arranged on one side of the transparent plate.

Description

Manufacturing method of large light reflection element and manufacturing method of optical imaging device

field of invention

The present invention relates to a method of manufacturing a large-scale light reflection element including a method for judging the product quality of a large-scale light reflection element, and to the manufacture of an optical imaging device using the large-scale light reflection element manufactured by the manufacturing method method, the aforementioned large-scale light reflective element is formed by arranging a plurality of unit light reflective elements in a planar shape, and the aforementioned plurality of unit light reflective elements has a plurality of light reflective elements perpendicular to one side and arranged in parallel at predetermined intervals. noodle.

Background of the invention

For example, Patent Document 1 discloses a method of manufacturing an optical imaging device, which aims to easily and precisely manufacture a large optical imaging device required for an aerial image display device capable of displaying a large aerial image. The manufacturing method of the optical imaging device disclosed in Patent Document 1 has the following process: two mirror panels (light reflection elements) are vertically arranged in parallel with a plurality of light reflection surfaces, and the light reflection surfaces of the mirror panels are perpendicular to each other. Overlapping to manufacture unit optical imaging elements; in the state that the direction of the light reflection surface of the mirror plate of adjacent unit optical imaging elements is consistent, a plurality of unit optical imaging elements are adjacent to a predetermined transparent cover plate and arranged in a two-dimensional shape ; With the upper and lower transparent cover plates, the unit optical imaging element group arranged in two dimensions is sandwiched from the vertical direction, and the surrounding of the unit optical imaging element group is covered; and the internal air pressure is reduced by the upper and lower transparent cover plates Fix the unit optical imaging element group into a plane shape.

In addition, as shown in FIG. 14 in Patent Document 2, a method of manufacturing an imaging element is disclosed, which has the following process: prepare a plurality of light reflection elements (mirror panels), and the plurality of light reflection elements are along the direction perpendicular to the thickness direction. Arranged in the first direction and each has a plurality of reflective surfaces; from among the plurality of light reflective elements, at least two or more light reflective elements 101, 102 are placed on a planar body (base portion) 104 having a light-transmitting portion 103 Above, the light reflective element (refer to the mirror panel) 105 whose reflective surface is perpendicular to the light reflective elements 101 and 102 is arranged on the lower part of the light-transmitting part 103 of the planar body 104, and each of the light reflective elements 101 and 102 adjacent to each other is selected. The arrangement of the plurality of reflective surfaces included is the combination of 2 reflective elements that cause the offset of the aerial images 106, 107 of the projected object (figure) 108 to become smaller; and reflect the 2 light included in the selected combination The elements 101, 102 are joined on a plane.

Furthermore, Patent Document 3, as shown in FIG. 15 , describes the following process: arranging a plurality of light reflection elements (mirror panels) 110, 111 in the direction of their planes; The way of 110, 111 first configures another light reflective element (refer to the mirror panel) 112, and confirms the mirror image (real image) 113 of the projected object 114 imaged by the plurality of light reflective elements 110, 111 and light reflective element 112, On the one hand, the plurality of light reflective elements 110, 111 are positioned mutually in such a way that the real image 113 corresponds to the shape of the projected object 114; and the positions of the plurality of light reflective elements 110, 111 positioned mutually are fixed. Furthermore, among the above, the light reflective elements 101 , 102 , 110 , and 111 are display unit reflective elements.

Prior art literature

patent documents

[Patent Document 1] Japanese Unexamined Patent Publication No. 2013-101230

[Patent Document 2] Japanese Unexamined Patent Publication No. 2017-203809

[Patent Document 3] WO No. 2016/178424

Summary of the invention

However, in Patent Document 1, an imaging element (same unit optical imaging element) is manufactured by overlapping two light reflection elements (same mirror panel) so that the light reflection surfaces of the light reflection elements are perpendicular to each other. And a plurality of imaging elements are adjacent to a predetermined transparent flat plate (with the transparent cover plate) and arranged in a two-dimensional shape in the plane direction, and are pressed and fixed on the transparent flat plate, so the light reflection surface of each imaging element will be shifted, or slightly When deforming, there is a problem that the image to be formed is distorted. Moreover, if the image to be formed is distorted, the entire imaging element in which the upper and lower light reflection elements are integrated must be replaced.

In addition, in the case of Patent Documents 2 and 3, except for the light reflection elements (mirror panels) A and B to be inspected as comparison objects, there is no light reflection element whose light reflection surface is perpendicular to the light reflection elements A, B In the case of C (referring to the mirror panel), the aerial image or the mirror image is not formed, so the light reflection element C becomes an essential configuration. Furthermore, if the accuracy of the light reflection element C is poor, the unit light reflection elements A and B cannot be accurately measured (selection, positioning, and quality determination).

In addition, since the image to be inspected is an aerial image, there is also a problem of increasing the size of the entire inspection (manufacturing) apparatus.

The present invention is made in view of such circumstances, and its object is to provide a method for manufacturing a large-scale light reflection element and a method for manufacturing an optical imaging device using the large-scale light reflection element manufactured by the method. The manufacturing method of the light reflective element is to arrange a plurality of unit light reflective elements in a planar shape to manufacture a large light reflective element. In order to confirm (check) the arrangement of the light reflective surface, it is not necessary to arrange the light reflective surface orthogonally. The reflective elements are arranged facing up and down, and it is possible to determine whether the arrangement of the unit light reflective elements arranged in a planar shape is good without the imaging of an aerial image or a mirror image.

The method of manufacturing a large light reflective element according to the first invention for carrying out the aforementioned object is a method of manufacturing a large light reflective element in which a plurality of unit light reflective elements are arranged in a planar shape. A plurality of light reflections arranged in parallel at predetermined intervals On the other hand, the manufacturing method of the above-mentioned large-scale light reflection element is characterized in that it includes process A. The above-mentioned process A is to arrange a plurality of the above-mentioned unit light reflection elements on a transparent flat plate with the above-mentioned light reflection surfaces in the same direction, and place them on the display. Display an inspection reference image with a horizontal line parallel to the light reflecting surfaces of each unit light reflecting element, and then observe from the other side of the transparent plate that the horizontal line is reflected once on each of the light reflecting surfaces The continuity of the mirror image is used to determine the configuration of the adjacent aforementioned unit light reflection elements. The aforementioned display has a certain angle to the transparent flat panel and is arranged on one side of the transparent flat panel.

The method of manufacturing a large-scale light reflective element of the second invention that implements the aforementioned object is a method of manufacturing a large-scale light reflective element that is square in plan view by arranging a plurality of unit light reflective elements in a planar shape. The element has a plurality of light-reflecting surfaces perpendicular to one side and arranged in parallel at predetermined intervals, and is square in plan view. The manufacturing method of the aforementioned large-scale light-reflecting element is characterized in that it includes a process A. The unit light reflection elements are disposed on a transparent flat plate with the aforementioned light reflection surfaces in the same direction, and an inspection reference image having horizontal lines parallel to the aforementioned light reflection surfaces of each of the aforementioned unit light reflection elements is displayed on the display, and then From the other side of the transparent plate, observe the continuity of the mirror image formed by the horizontal line reflecting once on each of the light reflecting surfaces, and judge whether the configuration of the adjacent aforementioned unit light reflecting elements is good, the aforementioned display and the transparent plate It has a certain angle and is arranged on one side of the transparent plate.

In the manufacturing method of the large-scale light reflection element of the second invention, the above-mentioned unit light reflection element is preferably a square with a side of 90-200 mm, but the present invention is not limited to this figure.

In the manufacturing method of the large-scale light reflection element of the third invention, in the first and second inventions, the angle formed by the aforementioned transparent flat panel and the aforementioned display is preferably in the range of 40 to 50 degrees.

Furthermore, in the method for manufacturing a large-scale light reflection element according to the fourth invention, in the first to third inventions, the inspection reference image preferably has a plurality of horizontal lines and a plurality of vertical lines perpendicular to the horizontal lines. In grid shape.

In addition, in the manufacturing methods of the large-scale light reflection elements of the first to fourth inventions, the unit light reflection elements determined to be defective in the aforementioned process A may be replaced with other unit light reflective elements, and the aforementioned process A may be performed again.

Moreover, in the manufacturing method of the large-scale light reflection element of the first to fourth inventions, it is preferable to use a computer-synthesized image for the aforementioned inspection reference image.

Furthermore, in the manufacturing method of the above-mentioned large-scale light reflection element, the temporary fixation of the said unit light reflection element to the said transparent plate is preferably performed by vacuum suction.

The manufacturing method of the large-scale light reflection element of the fifth invention is that in the first to fourth inventions, the above-mentioned unit light reflection element is manufactured by the following process: In the first process, a plurality of transparent plates are passed through the light reflection material and the adhesive Lamination, manufacturing a block with a height of h and having side surfaces P~S around it; the second process is to grind the opposite sides Q and S of the block, and grind from the side Q to the side The distance w of S is set to be the same as the aforementioned height h, and the aforementioned side surfaces P and R are square; the third process is to cut the aforementioned block processed in the aforementioned second process parallel to the aforementioned side P or the aforementioned side R. Manufacturing a plurality of light-reflective substrates with the same thickness; and the fourth process, grinding the two ends of the cut light-reflective substrates.

In the manufacturing method of the large-sized light reflection element of the fifth invention, the cutting process can be performed in the second process, and the cutting process is to roughly adjust from the side Q to the side S before grinding the sides Q and S. distance.

Also, in the manufacturing method of the large-scale light reflective element of the fifth invention, the roughness of the aforementioned side surfaces Q and S polished in the aforementioned second process and the aforementioned both ends of the aforementioned unit light reflective element polished in the aforementioned fourth process is preferably It is 30 nm or less, but the present invention is not limited to this numerical value.

In the method for manufacturing a large-scale light-reflecting element according to the fifth invention, the light-reflecting material is preferably a metal vapor-deposited film formed on at least one side of the transparent plate, but may also be a metal film.

The manufacturing method of the optical imaging device of the 6th invention is a manufacturing method of the optical imaging device manufactured by using the large light reflecting element manufactured by the manufacturing method of the large light reflecting element of the 1st - 5th invention, which has: In process a, the corners of the aforementioned large-scale light reflective elements are obliquely cut in such a way that the outer shape is square when viewed from the plane, to form a medium-sized light reflector with each of the aforementioned light reflective surfaces inclined at 45 degrees relative to the sides of the aforementioned square. element; and process b, making each of the aforementioned light reflecting surfaces orthogonal to each other and overlapping two aforementioned medium-sized light reflecting elements.

The manufacturing method of the optical imaging device of the 7th invention is in the 6th invention, which is to prepare two medium-sized light reflective elements, and the aforementioned medium-sized light reflective elements are the aforementioned corners of the right-angled equilateral triangles cut out in the aforementioned process a. 4 pieces are put together so that the light reflection surfaces of the respective corners face the same direction, and the light reflection surfaces of the two pieces are made to be perpendicular to each other, and the light reflection elements of the 2 pieces are superimposed.

The manufacturing method of the large-scale light reflection element of the first to fifth inventions is to confirm (inspect) the arrangement of the light reflection surface, and use the inspection reference image (mirror image) of the display device directly reflected on the light reflection surface, so it is better than the patent document The aerial image or mirror image disclosed in 2 and 3 is more vivid, and since the reference light reflection element is not used, the device itself can also be simplified, and furthermore, compared with the patent documents 2 and 3 that the accuracy of the reference light reflection element will affect the measurement accuracy , excellent reliability.

In particular, in the case of manufacturing by the first process, the second process, the third process, and the fourth process, unit light reflection elements of the same size can be manufactured more efficiently. The reflective element laminates a plurality of transparent plates through the light reflective material and the adhesive to produce a rectangular columnar block with a height of h and surrounding sides P~S; the aforementioned second process is to grind the opposite side of the block Q, S, and make the distance w from the side Q to the side S the same as the height h, and make the sides P and R square; the third process is to make the block processed in the second process parallel to the side P or side R Cutting to produce a plurality of light reflective substrates with the same thickness; the fourth process is to grind the two ends of the cut light reflective substrates.

In addition, the manufacturing method of the optical imaging device according to the sixth invention uses the large-scale light reflecting element manufactured by the manufacturing method of the large-sized light reflecting element according to the first to fifth inventions, whereby it is possible to manufacture a displayable optical device with high yield. Optical imaging device for large spatial images with less distortion.

10: unit light reflection element

11: Transparent flat panel

11a: light transmission part

12: Light reflective material

12a: light reflecting surface

13: Optical imaging device

15: Large-scale optical imaging device

16: Corner

17: Optical imaging device

20: Transparent sheet

20a: light transmission part

21: light reflective material

22: light reflective surface

23: blocks

24: Tablet

25: block

26: Light reflective substrate

27: Vacuum suction port

28,29: unit light reflective element

29a, 29b: pressing mechanism

29d: regular light reflective element

30: Check device

31: Transparent flat panel

32: Display device (monitor)

33: camera device

34:x guide department

35:y guidance department

37: Adsorption and conveying equipment

39: Lattice image (check reference image)

40a: Check image

40d: Reference image

41: vertical line

41a: Check longitudinal lines

41d: Datum longitudinal line

42:Horizontal line

42a: Check horizontal lines

42d: Datum horizontal line

43a, 43d: outer frame

51:Large light reflective element

52: Transparent flat panel

53:x guide department

54:y guidance department

55,56: Movable guide part

57: corner

58: Medium-sized light reflective element

60: transparent plate

61~64: unit light reflection element

65:Large light reflective element

66: display

68: camera

69: light reflective surface

71: Discontinuous part

72: Drop Department

101: Light reflection element

102: Light reflection element

103: Translucent part

104: planar body (abutment)

105: Light reflection element (refer to mirror panel)

106: Aerial image

107: Aerial image

108: Projected Object (Figure)

110: Light reflection element (mirror panel)

111: Light reflection element (mirror panel)

112: Light reflection element

113: mirror image (real image)

114: Projected object

A,B,C: light reflective element

An: Offset

Am: Offset

Ku: value

Ks: value

P: side

P1: new profile

P2: Optical end face

Q: side

Q1: side

Q2:Laminated end face

R: side

R1: New side

R2: Optical end face

S: side

S1: side

S2: laminated end face

T: side

T1: top surface

T2: laminated end face

U: Bottom

U1: bottom surface

U2: laminated end face

h: height

w: width

x: x-axis direction

y: y-axis direction

z: z-axis direction

θ: rotation around the z-axis

1(A) is an explanatory diagram of a unit light reflection element, (B) is an explanatory diagram of a conventional optical imaging device manufactured using the same unit light reflection element, and (C) is a conventional large-scale optical imaging device manufactured using the same optical imaging device. An explanatory diagram of the optical imaging device, (D) is a plan view of other known optical imaging devices cut out from the same large optical imaging device.

Fig. 2(A) is a perspective view of a block used in the manufacture of a unit light reflective element used in the manufacturing method of a large light reflective element according to an embodiment of the present invention, and (B) is a plan view of the processed state of the same block .

Fig. 3(A) is a plan view showing the cutting part of the same block, (B) is the same side view, (C) is the same front view ((B) the cutting distance is very roughly recorded, but the block has For example, 500~3000 pieces of light reflective substrate).

Fig. 4(A) is a side view of the light-reflecting substrate cut out from the same block, and (B) is the same front view.

Fig. 5(A) is a side view of a polished unit light reflection element, and Fig. 5(B) is a perspective view of the same.

Fig. 6 is a plan view of a transparent flat plate on which the same unit light reflection element is placed.

7(A) is an explanatory diagram of individual inspection (determination of goodness) of a unit light reflection element used in the method of manufacturing a large-scale light reflection element according to an embodiment of the present invention, and (B) shows the inspection on a display device. The reference image (grid image), (C) is the reference image or inspection image captured by the imaging device.

FIG. 8 is an analysis diagram of an inspection image captured by an imaging device.

Fig. 9 is an explanatory diagram of a method of manufacturing a large-sized light reflection element according to an embodiment of the present invention.

10(A) and (B) are explanatory views of a method of judging the goodness of a large-sized light reflection element.

Fig. 11(A) is an inspection image captured by an imaging device, and Fig. 11(B) is a detailed view thereof.

Fig. 12(A) is another inspection image captured by the imaging device, and Fig. 12(B) is a detailed view thereof.

FIG. 13 is an explanatory diagram of a method of manufacturing an optical imaging device according to another embodiment of the present invention.

FIG. 14 is an explanatory diagram of a conventional method of manufacturing an optical imaging device.

FIG. 15 is an explanatory diagram of a conventional method of manufacturing an optical imaging device.

Detailed Description of the Preferred Embodiment

Next, a method of manufacturing a large light reflection element and a method of manufacturing an optical imaging device according to an embodiment of the present invention will be described with reference to the attached drawings.

Before explaining the manufacturing method of the large-scale light reflection element and the manufacturing method of the optical imaging device of the present invention, firstly, the manufacturing method of the conventional optical imaging device will be described.

FIG. 1(A) shows a unit light reflection element 10 that is square (90 to 200 mm on one side) viewed from a plane. The unit light reflection element 10 is formed by arranging a plurality of light reflection materials 12 in parallel at a certain distance. ) Vertical metal vapor deposition film (metal vapor deposition layer) such as aluminum is formed. Moreover, the symbol 11a shows the light transmission part of the unit light reflection element 10, and the surface of each light reflection material 12 functions as the light reflection surface 12a. The optical imaging device 13 shown in FIG. Optical imaging devices larger than 20cm.

Therefore, the current situation is to manufacture a large optical imaging device 15 as shown in FIG. In this case, a large optical imaging device that is square in plan view can be manufactured by arranging n optical imaging devices of a natural number n of 2 or more squarely arranged vertically and horizontally. However, a large optical imaging device It does not have to be a square in plan view, and the number and configuration of small optical imaging devices to be bonded can be appropriately selected according to the size and shape of the large optical imaging device.

But, when the optical imaging device 15 shown in Figure 1 (C) will be vertical or horizontal to the observer when the light reflection surface 12a arranged in the direction perpendicular to one side of the square is used, there will be light from the object. light only The problem that the light reflection surface 12a of the unit light reflection element 10 either up or down reflects and does not form an image. Therefore, in fact, as shown in FIG. 1(C) imaginary line, the corner 16 of the large-scale optical imaging device 15 is obliquely cut, and as shown in FIG. 1(D), a plane-viewed The optical imaging device 17 whose outer shape is a square and each light reflection surface 12a is inclined at 45 degrees with respect to each side of the square is used.

However, since the optical imaging device 13 shown in FIG. 1(B) is made of one set of unit light reflection elements 10 up and down, even if there is a slight twist in each unit light reflection element 10, it can image normally. In contrast, the large-scale optical imaging device 15 of FIG. 1(C) produced by combining a plurality of optical imaging devices 13 and the optical imaging device 17 of FIG. 1(D) produced by cutting out the optical imaging device 15 In this case, there will be imaging distortion due to combinations of slight offset, twist, and bend of each light reflection surface 12a of each optical imaging device 13 (each unit light reflection element 10 ). That is to say, in the process of manufacturing a unit light reflective element 10 with a side of 9-20 cm, when the light reflective material 12 (light reflective surface 12a) is twisted or bent due to subtle external factors, the result will occur such as large-scale Optical distortion occurs in the optical imaging device 15 , and a specially assembled large optical imaging device 15 becomes unusable. Therefore, it has been desired to judge the quality of the unit light reflection elements 10 one by one in the assembly stage.

Therefore, the present invention has been completed by confirming that there is no abnormality or abnormality in the structure of each unit light reflection element 10 at the stage of the unit light reflection element 10 (see FIG. 1(A)) before manufacturing the optical imaging device 13. defect, and use unit light reflective elements 10 without abnormalities etc., first, make a large light reflective element, and overlap the two large light reflective elements in a way that the light reflective surfaces are perpendicular to each other when viewed from a plane, thereby Large-scale optical imaging devices can be manufactured. By combining 4 pieces (or 9 pieces, 16 pieces, that is, the number of square pieces of a natural number n greater than 2) of unit light reflection elements that are square when viewed from the plane, it is possible to produce a square that is square when viewed from the plane. A large light reflective element. Furthermore, as long as the large-scale light reflection element is square in plan view, the unit light reflection element does not have to be square in plan view. The shape, number and arrangement of the unit light reflection elements constituting the large-scale light reflection element Can be selected appropriately.

When manufacturing large-scale light reflection elements and large-scale optical imaging devices, first of all, Referring to Fig. 2 ~ Fig. 5, the unit light reflective element 28 (unit light reflective element 28 has the unit light reflective element 28 that is used for the manufacturing method of the large-scale light reflective element of one embodiment of the present invention cheaply and accurately is described 10 the same structure) of the new method. As shown in Figure 2(A), prepare a plate with high light transmittance, extremely small thickness unevenness (for example, the error of thickness is less than 5%, preferably less than 1%), and the thickness is, for example, 0.2~2mm A plurality of transparent boards 20 made of glass or hard transparent resin boards. The size of the transparent plate 20 can be set to a rectangle (including a square) of 90-250mm, and the surface thickness can be used below 100nm (preferably below 50nm, more preferably below 10nm), but it is not limited to these. Furthermore, ▽▽▽ in the drawing indicates mirror polishing.

The transparent board 20 is put into a vacuum furnace, and metal vapor deposition such as aluminum (or white metal) is performed on one side (or both sides) thereof. In addition, this metal vapor-deposition layer (metal vapor-deposition film) constitutes the light reflection material 21 . With the light reflection material 21, finally, as shown in the enlarged view of FIG. 3(B), a light reflection surface 22 is formed on one side (or both sides) of the transparent plate 20. In addition, here, instead of the vapor-deposited metal layer, a metal reflection plate (for example, a mirror plate) may be used as the light reflection material, but in this case, it may be formed (arranged) only on one side of the transparent plate 20 .

Next, a plurality of sheets (for example, 500 to 1500 sheets) of the transparent plate 20 formed with the light reflection surface 22 are pressed and laminated through a transparent adhesive. Here, as the adhesive, a thermosetting type, an ultraviolet curing type, a room temperature curing type, a two-component mixing type, or the like can be used. Thereby, as shown in FIG. 2(A) , a block 23 having six sides in the shape of a rectangular column (cube or cuboid) can be obtained. Here, the transparent boards 20 are stacked from bottom to top, let the side faces around the block 23 be P, Q, R, S, and let the top and bottom faces be T, U.

Since the top surface T and the bottom surface U of the block 23 are the surface of the transparent plate 20 or the light reflection material 21 (metal deposition surface), the surface roughness is maintained at 100 nm or less (for example, 10 nm) even without polishing. Furthermore, the top surface T and the bottom surface U to be the reference plane must be parallel within the range of ±0.05 degrees, preferably ±0.02 degrees, and the distance (interval) from the top surface T to the bottom surface U, that is, the height of the block 23 h must be correct, so if necessary, adjust the height by pressing in a vacuum with flat rolling or the like (height adjustment can be performed before or during the curing of the adhesive). In addition, the parallelism and size of the top surface T and the bottom surface U (the error should be within 1 μm) should be measured in three dimensions. Measure and confirm with a measuring device or a height measuring device (the above is the first process).

Next, a cutting process is performed. The above-mentioned cutting process is performed by cutting the block material 23 from the front (viewed from the side surface P), and cutting the two ends in the width direction approximately parallel to the opposing side surfaces Q and S. Width adjustment (coarse adjustment). This is shown in Figure 2(B) and Figure 3(A)~(C), by temporarily placing the block material 23 on a flat plate 24 arranged horizontally, and utilizing a plurality of vacuum suction ports 27 arranged on the flat plate 24 to The blocks 23 are sucked and held, and cut with a band saw (or other cutting equipment). Next, the two side surfaces (two cut surfaces) subjected to the cutting process are ground to form two new side surfaces Q1, S1. The side surfaces Q1 and S1 are perpendicular to the top surface T or the bottom surface U, and the distance (width) w from the side surface Q1 to the side surface S1 is equal to the height h. Thereby, as shown in Fig. 3 (A) ~ (C), form the new top surface T1 and bottom surface U1 of shortened width (having width w), and the new side surface Q1 that has the height h equal to width w equal, The new side faces P1 and R1 surrounded by S1 become a complete square block 25 (with a dimensional accuracy within 0.5 μm, for example) (the above is the second process). Furthermore, considering the amount of grinding, the distance between the two sides (two cut surfaces) after cutting is cut to be slightly larger than the height h (width w after grinding + amount of grinding), so that the desired surface can be obtained after grinding. size of.

Next, as shown in Fig. 3 and Fig. 4, the block body 25 surrounded by the side S1, the bottom U1, the side Q1, and the top T1 and viewed from the side P1 is placed on the flat plate 24 and fixed, and The side P1 (or side R1) cuts off multiple places in parallel sequentially or simultaneously, and as shown in Figure 4 (A) and (B), the manufacturing thickness is the standard thickness (0.5~2mm) + grinding amount of the manufacturing light reflection base Material 26 (the above is the third process).

Next, the end surfaces (cut surfaces) of the cut light reflection base material 26 are mirror-polished to form the optical end surfaces P2 and R2 to manufacture a unit light reflection element 28 having a thickness of the standard size.

5(A), (B) show the unit light reflection element 28 of the predetermined thickness perpendicular to the adjacent laminated end faces Q2, T2, S2, U2, but in this embodiment, only on the transparent plate 20 formed The light reflection material 21 is formed on one side of the light penetrating portion 20a (refer to the enlarged view of FIG. The penetrating portion 20a is exposed. On the other hand, in the case where the light reflection material 21 is formed on both surfaces of the light transmission portion 20a, the light reflection material 21 is formed on the upper and lower surfaces (lamination end surfaces T2, U2). The unit light reflection element 29 (see FIG. 6 ). The surface roughness of the ground optical end faces P2, R2 and the ground laminated end faces Q2, S2 can be 30nm (or less, eg less than 10nm) (the above is the fourth process).

Hereinafter, a method of manufacturing a large light reflection element according to an embodiment of the present invention will be described.

When using the unit light reflection element 28 to manufacture a large-scale light reflection element, the unit light reflection element 28 adjacent to the stacking direction of the light penetrating part 20a and the light reflection material 21 is to place the top of one of the unit light reflection elements 28 The surface (lamination end surface T2 ) and the lower surface (lamination end surface U2 ) of another unit light reflection element 28 face each other, whereby the light penetrating portion 20 a and the light reflection material 21 are arranged alternately. On the other hand, when a large-scale light reflection element is manufactured using a unit light reflection element 29 having a light reflection material 21 on both upper and lower surfaces (lamination end faces T2, U2), the lamination direction of the light transmission part 20a and the light reflection material 21 is opposite. Adjacent unit light reflection elements 29 bond the light reflection materials 21 , but since the metal vapor deposition film and the adhesive layer are thin, there is hardly any problem.

Next, the equipment and method for inspecting whether the unit light reflection element 29 (the unit light reflection element 28 is the same, and the unit light reflection element 29 will be hereinafter represented) whether it is manufactured normally (standard specification) or not will be described. At the beginning, when large-area transparent boards and light-reflecting materials are laminated to manufacture large-scale light-reflecting elements (mirror panels), large-scale manufacturing equipment is required, and size (flatness) management becomes difficult, but multiple pieces of small ( In this embodiment, the unit light reflection element 29 of 150mm square) is covered to make a large light reflection element. First, an apparatus and method for individually inspecting each unit light reflection element 29 will be described first.

As shown in Fig. 6 and Fig. 7 (A), the inspection device 30 of the unit light reflection element has: a transparent flat plate 31 fixedly arranged; Below (one side) of transparent plate 31, above-mentioned transparent plate 31 is arranged with the unit light reflection element 29 that is square when viewed from the plane at predetermined position; A mirror image of the image of the display device 32 is captured via the unit light reflection element 29 .

A frame (not shown) is disposed around a transparent flat plate 31 formed of a glass plate, and is transparent. As shown in Figure 7(A) as a whole, the plate 31 can move in the horizontal direction (x-axis direction and y-axis direction), vertical direction (z-axis direction), and can also tilt (around the x-axis and y-axis direction) and pivot (rotation θ around the z-axis), the unit light reflection elements 29 placed on the transparent plate 31 can be arranged at any position. Moreover, as shown in FIG. 6 , at the base of the x-axis direction and the base of the y-axis direction of the transparent flat plate 31, mutually orthogonal x-guiding portions 34 and y-guiding portions 35 are provided, so that the transparent flat plate 31 can be placed The unit light reflection elements 29 are positioned in the same direction as the light reflection surface 22 (temporarily fixed). Also, it is also possible to provide a plurality of suction mechanisms for vacuum suctioning and holding (temporarily fixing) the unit light reflection elements 29 mounted on the transparent flat plate 31 there, but it is preferable to provide a pressing mechanism because it will interfere with the measurement. The mechanisms 29a, 29b press and hold the unit light reflection element 29 from the side. Above the transparent flat plate 31 , as shown in FIG. 7(A) , an adsorption transport device 37 for transporting the unit light reflection elements 29 is provided.

As shown in FIG. 7(B), an overall square grid image 39 as an example of an inspection reference image is displayed on the display device 32 . Here, the grid image 39 is formed by arranging a plurality of vertical lines 41 perpendicular to the x-axis direction (parallel to the y-axis direction) and a plurality of horizontal lines 42 parallel to the x-axis direction at predetermined pitches (regular intervals). lattice. When the grid image 39 is photographed by the imaging device 33 through a regular (standard) unit light reflection element 29d without bending or twisting on each light reflection surface 22, a reference image 40d as shown in FIG. 7(C) can be obtained. , so it is saved as the reference image data. Here, since many light reflecting surfaces 22 are arranged at equal intervals in the unit light reflecting element 29d, it is different from the image when viewing the grid image 39 through a single mirror, and it will pass through a plurality of light reflecting surfaces 22 arranged in parallel. Looking at the grid image 39, as shown in FIG. 7(C), the reference image 40d appears to be a trapezoid in which the vertical lines 41 and horizontal lines 42 of the grid image 39 are respectively transformed into reference vertical lines 41d and reference horizontal lines 42d. Furthermore, it is desirable that the size (specification) of the unit light reflection element 29d used as a reference is consistent with that of the unit light reflection element 29 to be inspected. In addition, the grid image is preferably an image synthesized using a computer, but is not limited thereto, as long as the vertical lines and horizontal lines are accurately drawn at regular intervals.

Next, when judging the quality of the unit light reflection element 29 , the unit light reflection element 29 to be inspected is placed on the transparent flat plate 31 and positioned. Next, in the same procedure as that of the unit light reflection element 29d, the mirror image of the grid image 39 displayed on the display device 32 is mirrored via the unit light reflection element 29. The inspection image 40a is obtained by photographing with the imaging device 33 . Furthermore, although inspection is performed by displaying the inspection image 40a superimposed on the reference image 40d, the inspection image 40a becomes almost the same image as the reference image 40d. Therefore, the reference image 40d or the inspection image 40a By moving, zooming in and out, and comparing (overlapping) the outlines of both, it is possible to easily compare (check) from the similarity (similarity) between the inspection image 40a and the reference image 40d.

If there is abnormality in the light reflection surface 22 of the unit light reflection element 29, for example, the inspection horizontal line 42a of the inspection image 40a deviates from the reference horizontal line 42d of the reference image 40d, so the distortion (deviation) of the inspection horizontal line 42a can be obtained from it. ) to judge the quality of the unit light reflection element 29. In addition, instead of completely overlapping the inspection image 40a and the reference image 40d (making the display magnification consistent), for example, the size of the inspection image 40a may be reduced in a range of 0.9 to 0.98 times the reference image 40d vertically and horizontally. .

The above-mentioned good or bad judgment can also be carried out visually, but since the boundary line between good and bad may not be clear, it is advisable to use a computer for calculation processing (image processing).

Hereinafter, an example of the determination of the similarity between the reference image 40d and the inspection image 40a (good or bad determination) by a computer will be described. Here, as shown in FIG. 8, mark x1, x2...xn... on each reference vertical line 41d inside the outer frame 43d of the reference image 40d, and mark y1, y2 on each reference horizontal line 42d. ..yn.... n may be, for example, about 5 to 50. Furthermore, when comparing the reference image 40d and the inspection image 40a, the outer frames 43d and 43a may be made to match as much as possible. However, when comparing visually, it is only necessary to observe and check the distortion of the horizontal line 42a, and therefore the matching of the outer frames 43d and 43a is not an essential requirement.

When there is abnormality in the unit light reflection element 29 to be inspected, since the position of the inspection horizontal line 42a deviates from the reference horizontal line 42d of the reference image 40d in the upward or downward direction, each reference vertical line 41d (x1, x2... xn..,) intersects with each inspection horizontal line 42a, measure the deviation An above the direction of each inspection horizontal line 42a and calculate its maximum value (or average value), and when its value Ku is larger than the reference value (case 1), or, measure the deviation Am (not shown) in the direction below each inspection horizontal line 42a and calculate its maximum value (or average value), and when its value Ks is greater than the reference value (case 2), then it is judged to be in The unit light reflection element 29 has an abnormality and is defective. The measured value Ku, Ks is preferably the larger value measured in pixel units. The reference value is obtained by experiment. Furthermore, the light reflective surface 22 of the unit light reflective element 29 is along the inspection horizontal line 42a of the inspection image 40a, so if the unit light reflective element 29 is placed correctly, the distortion of the inspection longitudinal line 41a is usually not observed.

In the aforementioned method, the maximum value (or average value) of the deviation An of each inspection horizontal line 42a of each measurement has been calculated, but the root mean square value (Root Mean Square Value) of all deviations An can also be calculated, and The standard values measured in advance are compared to determine pass/fail (degree of similarity).

In this way, to determine the goodness of the square unit light reflection elements 29, arrange and bond four (or nine or 16) good quality unit light reflection elements 29 in a planar manner so that the light reflection surfaces 22 are in the same direction. , so as to manufacture at least two large-scale light reflection elements 51 . Next, as shown in FIG. 9 , two large-scale light reflection elements 51 can be stacked on a large-scale transparent flat plate 52 in such a way that their respective light reflection surfaces 22 are orthogonal to each other. , y guide part 54, movable guide parts 55, 56 are positioned and bonded with adhesive to form a large optical imaging device.

Here, it is also possible to prepare a large object with the same structure as the inspection device 30 shown in FIG. For the reflective element 51, it is preferable to strictly inspect each unit light reflective element 29, prepare only the necessary number of good products, and arrange and join them to manufacture a large light reflective element 51.

Furthermore, when a plurality of unit light reflection elements are arranged and bonded, the plurality of unit light reflection elements are arranged on a transparent plate, and each unit light reflection element is bonded to the transparent plate at the same time between adjacent unit light reflection elements, Thereby, a plurality of unit light reflection elements can be reliably integrated, and a large light reflection element is excellent in handling and shape stability.

Also, in the above embodiment, the whole unit light reflection element 29 is inspected for the distortion of the light reflection surface 22, but since the distortion is often a part of the unit light reflection element 29, only a part of the unit light reflection element 29 is inspected. The present invention is also applicable to the situation where a pass or fail check is performed.

In the above-mentioned embodiments, shooting of inspection reference images or inspection of inspection images is performed from one place, but When the target light reflection element is large, since the inspection reference image is also large, it is also possible to simultaneously photograph or inspect from multiple places, and it is also possible to sequentially capture large light reflections while moving the imaging device 33 For each part of the component, the inspection image (mirror image) is compared with the reference image. Furthermore, visual observation can also be performed from plural places, but the presence or absence of the reference image is optional.

Next, referring to Fig. 10(A), (B), Fig. 11(A), (B), Fig. 12(A), (B), on the one hand, the goodness of the large-scale light reflection element of one embodiment of the present invention The judgment method will be described. As shown in FIG. 10(A), on the transparent plate 60, the unit light reflection elements 61-64 (one side is 90-200mm respectively) which are square in plan view are arranged in the same direction with each light reflection surface 69. 4 sheets are closely bonded and arranged in a planar shape. By bonding these four unit light reflection elements 61 to 64, a large light reflection element 65 that is square in plan view can be obtained, but at this point in time, the unit light reflection elements 61 to 64 are not bonded (for example, Temporarily fixed to the transparent plate 60 by vacuum suction). Below the transparent flat panel 60, the planar display 66 is arranged obliquely so as to form a certain angle (40-50 degrees) with the transparent flat panel 60 . A grid image (an example of an inspection reference image) 39 as shown in FIG. 7(B) is displayed on the display 66 . The number and arrangement (pitch) of the horizontal lines parallel to the vertical lines of the grid image and the light reflection surfaces 69 of the unit light reflection elements 61 to 64 can correspond to the number of light reflection surfaces 69 of the large light reflection element 65 It can be set freely according to configuration.

In this state, the grid image 39 (vertical line 41, horizontal line 42) is displayed on the display 66, and the camera 68 is placed directly above the central base of the large-scale light-reflecting element 65 to observe the large-scale light-reflecting element 65 , as shown in FIG. 11(A), the inspection image is visually confirmed. In this case, the image (mirror image) of the horizontal line 42 entering the camera 68 after being reflected once on a light reflection surface 69 of the large light reflection element 65 becomes one or a few according to the height of the light reflection surface 69 . Here, when the positions of the light reflection surfaces 69 of adjacent unit light reflection elements 61 to 64 deviate, as shown in FIG. Therefore, it can be judged from the continuity of the mirror image whether the arrangement of each unit light reflection element 61-64 is good or not. Furthermore, the angle of the display 66 can be adjusted so as to produce the largest deviation from the inspection image (inspection vertical line 41a or inspection horizontal line 42a) (process A).

Figure 12 (A), (B) shows other inspection images taken by the camera 68, the discontinuity 71 can be seen on the inspection vertical line 41a, and the drop portion 72 can be seen on the inspection horizontal line 42a, accordingly, The quality of the large light reflection element 65 can be judged.

Furthermore, when inspecting a large-scale light reflection element in which the unit light reflection elements of a plurality of pieces (the number of the square of the natural number n of 2 or more) are arranged in a row, it is also possible to repeat the first two pieces of unit light reflection elements in sequence. Process A where the array is inspected, and then a unit light reflection element is added for inspection. Thereby, compared with arranging a plurality of light reflective elements at the same time for inspection, it is easier to identify defective unit light reflective elements. The movement and replacement of each light reflective element is carried out by suction and transfer equipment. The unit light reflective element judged to be defective in process A is replaced with other unit light reflective elements, and process A is carried out again. In this way, only the units judged as good products are finally determined. The light reflection element is fixed (bonded) with an adhesive to obtain a large light reflection element 65 .

In the above embodiments, a unit light reflection element is only inspected from one direction, but the unit light reflection element can be rotated 180 degrees in the plane, and the direction of the light reflection surface 22 is consistent for re-inspection ( Confirmation inspection of process A). In this way, the accuracy of good product judgment can be improved. Furthermore, the unit light reflection element to be inspected may be turned over and inspected. Furthermore, when performing good or bad judgment of the large-scale light reflective element of this embodiment, the individual inspection of each unit light reflective element described above can also be omitted.

Next, a method for manufacturing an optical imaging device according to an embodiment of the present invention will be described.

First, the corners of the above-mentioned large-scale light reflection elements 65 are obliquely cut in such a way that the outer shape is a square when viewed from a plane, and each light reflection surface 69 is formed as a medium-sized light reflection element inclined at 45 degrees relative to each side of the square. Components (not shown) (process a). Next, the (medium-sized) optical imaging device can be manufactured by overlapping two medium-sized light-reflecting elements so that their respective light-reflecting surfaces 69 are perpendicular to each other (process b). The optical imaging device thus obtained has the same structure as the optical imaging device 17 shown in FIG. Judgment is also higher quality than conventional large-scale optical imaging devices. Furthermore, in the present embodiment, after the corners of the large-scale light reflection element 65 are obliquely cut to form a medium-sized light reflection element, two medium-sized light reflection elements are made so that the respective light reflection surfaces 69 orthogonally overlapped (bonded) to manufacture an optical imaging device, but it is also possible to make the respective light reflecting surfaces 69 of two large-scale light reflecting elements 65 overlapped and bonded orthogonally, and then the corners can be obliquely cut off.

Next, the manufacturing method of the optical imaging device of other embodiments of the present invention will be described.

As shown in Figure 13, prepare 2 pieces of medium-sized light reflection elements 58, the above-mentioned 2 pieces of medium-sized light reflection elements 58 are the 4 pieces of corners of the right-angled equilateral triangle cut in the above-mentioned process a (a part of the light reflection element) ) 57 together, each light reflection surface 69 of each corner 57 faces the same direction, and two light reflection elements 58 are overlapped on the large-scale transparent flat plate 52 in the mode that each light reflection surface 69 is orthogonal, thereby effectively Using the corner portion 57 cut off in the above-mentioned process a, an optical imaging device equivalent to the optical imaging device produced in the above-mentioned process b can be manufactured, which is excellent in resource saving. Furthermore, when four corners 57 are joined to manufacture a medium-sized light reflection element 58, four corners 57 are arranged on a transparent plate, and adjacent corners 57 are joined, and each corner is joined to the transparent plate at the same time. 57, so that the four corners 57 can be reliably integrated, and the medium-sized light reflection element 58 is excellent in handling and form stability. However, as mentioned above, when the corners (a part of the optical imaging device) are obliquely cut after joining the two large light reflection elements 65, only the cut four corners are arranged on the transparent plate, The adjacent corners are joined together, and the corners are joined to the transparent plate at the same time to obtain an optical imaging device.

Industrial availability

When using small unit light reflective elements to manufacture large light reflective elements, each unit light reflective element and large light reflective elements can be easily inspected, and high-quality large light reflective elements and optical imaging devices can be manufactured cheaply.

39: grid image

60: transparent plate

61~64: unit light reflection element

65:Large light reflective element

66: display

68: camera

69: light reflective surface

Claims (8)

A method of manufacturing a large-scale light reflective element, which is a large-scale light reflective element manufactured by arranging a plurality of unit light reflective elements in a planar shape. A plurality of light reflecting surfaces, the manufacturing method of the aforementioned large-scale light reflecting element is characterized in that it includes a process A, the aforementioned process A is to arrange a plurality of the aforementioned unit light reflecting elements on a transparent flat plate in such a way that the aforementioned light reflecting surfaces are in the same direction On the display, display an inspection reference image with a horizontal line parallel to the aforementioned light reflecting surfaces of each of the aforementioned unit light reflecting elements, and then observe the horizontal line from the other side of the aforementioned transparent plate to reflect 1 Next, the continuity of the mirror images formed determines whether the disposition of the adjacent aforementioned unit light reflection elements is good, and the aforementioned display has a certain angle with the transparent flat panel and is arranged on one side of the transparent flat panel. A method for manufacturing a large-scale light reflection element, which is a method for manufacturing a large-scale light reflection element that is square in plan view by arranging a plurality of unit light reflection elements in a planar shape. The plurality of light reflection surfaces arranged in parallel at predetermined intervals are square when viewed from a plane, and the manufacturing method of the aforementioned large-scale light reflection element is characterized in that it includes process A. The aforementioned process A is to combine the plurality of aforementioned unit light reflection elements with the aforementioned Each light reflective surface is arranged in the same direction on a transparent flat plate, and the inspection reference image having a horizontal line parallel to the aforementioned light reflective surfaces of each of the aforementioned unit light reflective elements is displayed on the display, and then from the other side of the aforementioned transparent flat plate Observe the continuity of the mirror image formed by reflecting the horizontal line once on each of the aforementioned light-reflecting surfaces, and determine whether the configuration of the adjacent aforementioned unit light-reflecting elements is good. The aforementioned display and the transparent plate are arranged at a certain angle. on one side of the transparent plate. The method of manufacturing a large-scale light reflection element according to Claim 1 or 2, wherein the angle formed by the aforementioned transparent plate and the aforementioned display is in the range of 40 to 50 degrees. The manufacturing method of a large-scale light reflection element according to claim 1 or 2, wherein the inspection reference image has a plurality of horizontal lines and a plurality of vertical lines perpendicular to the horizontal lines in a grid shape. The method of manufacturing a large light reflective element as claimed in claim 1 or 2, which is to replace the unit light reflective element judged to be defective in the aforementioned process A with other unit light reflective elements, and implement the aforementioned process A again. The method of manufacturing a large-scale light reflective element according to claim 1 or 2, wherein the aforementioned inspection reference image is an image synthesized by a computer. The manufacturing method of a large-scale light reflective element according to claim 1 or 2, wherein the temporary fixation of the unit light reflective element to the transparent flat plate is performed by vacuum suction. A method for manufacturing an optical imaging device, which is a method for manufacturing an optical imaging device using the aforementioned large-scale light reflection element manufactured by the method for manufacturing a large-scale light reflection element in claim 2, characterized in that it has: process a , cutting off the corners of the aforementioned large-scale light reflective element obliquely in such a way that the shape is square when viewed from a plane, forming a medium-sized light reflective element with each light reflective surface inclined at 45 degrees relative to each side of the aforementioned square; And process b, making each of the above-mentioned light-reflecting surfaces orthogonal to each other and overlapping two pieces of the above-mentioned medium-sized light-reflecting elements.

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