WO2021166281A1 - Method for manufacturing large-sized light reflection element and method for manufacturing optical image formation device - Google Patents

Abstract

Provided are a method for manufacturing a large-sized light reflection element and a method for manufacturing an optical image formation device that comprise a step A for disposing a plurality of unit light reflection elements 61-64 on a transparent surface plate 60 such that respective reflection surfaces 69 thereof face the same direction, displaying, on a display 66 disposed at a given angle with respect to the transparent surface plate 60 on one side of the transparent surface plate 60, an inspection reference image 39 having a horizontal line 42 parallel to the respective light reflection surfaces 69 of the unit light reflection elements 61-64, observing, from the other side of the transparent surface plate 60, the continuity of mirror images formed by the horizontal line 42 being once reflected by the respective light reflection surfaces 69, and determining whether the disposition of the unit light reflection elements 61-64 adjacent to each other is good or bad.

Description

Manufacturing method of large light reflecting element and manufacturing method of optical imaging device

The present invention determines the product quality of a large-sized light-reflecting element in which a plurality of unit light-reflecting elements having a large number of light-reflecting surfaces arranged in parallel at predetermined intervals perpendicular to one surface are arranged in a plane. The present invention relates to a method for manufacturing a large-scale light reflecting element including the method, and a method for manufacturing an optical imaging apparatus using the large-sized light reflecting element manufactured by the manufacturing method.

For example, Patent Document 1 describes a method for manufacturing an optical imaging device for the purpose of easily and highly accurately manufacturing a large-sized optical imaging device required for a spatial image display device capable of displaying a large spatial image. It is disclosed. In the method of manufacturing an optical imaging apparatus disclosed in Patent Document 1, two mirror sheets (light reflecting elements) in which a large number of light reflecting surfaces are erected in parallel are provided so that the light reflecting surfaces of the mirror sheets are orthogonal to each other. A predetermined transparent cover in a state where the process of manufacturing a unit optical imaging element by superimposing them in such a manner and a state in which a plurality of unit optical imaging elements are aligned with each other in the direction of the light reflecting surface of the mirror sheet of the adjacent unit optical imaging elements. The process of arranging the unit optical imaging elements adjacent to each other on the plate in a two-dimensional manner and the upper and lower transparent cover plates sandwich the unit optical imaging element groups arranged in a two-dimensional shape from a vertical direction, and the unit optical imaging element group It includes a step of covering the surroundings and a step of lowering the internal pressure and fixing the unit optical imaging element group in a plane by upper and lower transparent cover plates.

Further, in Patent Document 2, as shown in FIG. 14, a step of preparing a plurality of light reflecting elements (mirror plates) each having a plurality of reflecting surfaces arranged along a first direction orthogonal to the thickness direction, and a plurality of steps. At least two or more light reflecting elements 101 and 102 are placed on a flat body (base portion) 104 having a light transmitting portion 103, and the reflecting surface is orthogonal to the light reflecting elements 101 and 102. A light reflecting element (reference mirror plate) 105 is arranged below the light transmitting portion 103 of the plane body 104, and an object to be projected is caused by the arrangement of a plurality of reflecting surfaces included in each of the light reflecting elements 101 and 102 adjacent to each other. (Chart) The step of selecting a combination of two reflecting elements that reduce the deviation of the aerial images 106 and 107 of 108, and joining the two light reflecting elements 101 and 102 included in the selected combination on a plane. A method for manufacturing an imaging element including a step is disclosed.

Then, in Patent Document 3, as shown in FIG. 15, a step of arranging a plurality of light reflecting elements (mirror plates) 110 and 111 so as to be arranged in the plane direction thereof, and adjacent light reflecting elements 110 and 111 Another light-reflecting element (reference mirror plate) 112 is arranged so as to straddle the mirror image (real image) 113 of the projected object 114 imaged by the plurality of light-reflecting elements 110 and 111 and the light-reflecting element 112. While confirming the above, the step of mutually positioning the plurality of light reflecting elements 110 and 111 so that the real image 113 corresponds to the shape of the object to be projected 114, and the plurality of mutually positioned light reflecting elements 110 and 111. It is described that the step of fixing the position of the above is provided. In the above, the light reflecting elements 101, 102, 110, and 111 represent unit reflecting elements.

Japanese Unexamined Patent Publication No. 2013-101230 JP-A-2017-203809 WO2016 / 178424

However, in Patent Document 1, an imaging element (same as a unit optical imaging element) is formed by superimposing two light reflecting elements (same as a mirror sheet) so that the light reflecting surfaces of the light reflecting elements are orthogonal to each other. Is manufactured, and a plurality of imaging elements are arranged adjacent to a predetermined transparent flat plate (same as the transparent cover plate) in a two-dimensional manner in the plane direction and pressed and fixed to the transparent flat plate. If the light-reflecting surface of the light-reflecting surface is displaced or slightly deformed, there is a problem that the formed image is distorted. Then, when the formed image is distorted, it is necessary to replace the entire imaging element in which the upper and lower light reflecting elements are integrated.

Further, in the case of Patent Documents 2 and 3, in addition to the light reflecting elements (mirror plates) A and B to be inspected for comparison, the light reflecting element C whose light reflecting surface is orthogonal to these light reflecting elements A and B. Without the (reference mirror plate), the aerial image and the mirror image would not be imaged, so the light reflecting element C is indispensable. If the accuracy of the light reflecting element C is poor, accurate measurement (selection, positioning and quality determination) of the unit light reflecting elements A and B cannot be performed.

Furthermore, since the image to be inspected is an aerial image, there is also a problem that the entire inspection (manufacturing) device becomes large.

The present invention has been made in view of such circumstances, and in manufacturing a large-scale light-reflecting element by arranging a plurality of unit light-reflecting elements in a plane, light reflection is performed in order to confirm (inspect) the arrangement of the light-reflecting surfaces. It is not necessary to arrange the light reflecting elements whose surfaces are orthogonal to each other vertically, and it is not necessary to form an aerial image or a mirror image. It is an object of the present invention to provide a method for manufacturing a light reflecting element of the above and a method for manufacturing an optical imaging apparatus using a large-scale light reflecting element manufactured by the manufacturing method.

In the method for manufacturing a large-sized light-reflecting element according to the first invention, which meets the above object, a plurality of unit light-reflecting elements having a plurality of light-reflecting surfaces arranged perpendicularly to one surface and parallel to each other at predetermined intervals are arranged in a plane. It is a method of manufacturing a large-scale light-reflecting element that is manufactured by
A plurality of the unit light reflecting elements are arranged on the transparent platen so that the light reflecting surfaces are in the same direction, and one side of the transparent platen has a constant angle with the transparent platen. A mirror image formed by displaying an inspection reference image having a horizontal line parallel to each light reflecting surface of each unit light reflecting element on a display arranged therein and reflecting the horizontal line once on each light reflecting surface. The step A is included, in which the continuity of the light reflecting elements is observed from the other side of the transparent platen, and the quality of the arrangement of the adjacent unit light reflecting elements is determined.

The method for manufacturing a large-sized light-reflecting element according to the second invention according to the above object is a unit light-reflecting element having a plurality of light-reflecting surfaces perpendicular to one surface and arranged in parallel at predetermined intervals and having a square unit in a plan view. Is a method for manufacturing a large-sized light-reflecting element that is square in a plan view and is manufactured by arranging a plurality of light-reflecting elements in a plane.
A plurality of the unit light reflecting elements are arranged on the transparent platen so that the light reflecting surfaces are in the same direction, and one side of the transparent platen has a constant angle with the transparent platen. A mirror image formed by displaying an inspection reference image having a horizontal line parallel to each light reflecting surface of each unit light reflecting element on a display arranged therein and reflecting the horizontal line once on each light reflecting surface. The step A is included, in which the continuity of the light reflecting elements is observed from the other side of the transparent platen, and the quality of the arrangement of the adjacent unit light reflecting elements is determined.

In the method for manufacturing a large-scale light-reflecting element according to the second invention, the unit light-reflecting element is preferably a square having a side of 90 to 200 mm, but the present invention is not limited to this number.

In the method for manufacturing a large-sized light reflecting element according to the third invention, in the first and second inventions, the angle formed by the transparent surface plate and the display is preferably in the range of 40 to 50 degrees.
The method for manufacturing a large-scale light reflecting element according to the fourth aspect of the present invention is the method for manufacturing a large-scale light reflecting element. In the first to third inventions, the inspection reference image has a plurality of the horizontal lines and a plurality of vertical lines orthogonal to the horizontal lines. It is preferable that the surface is in a grid pattern.

Further, in the method for manufacturing a large-sized light reflecting element according to the first to fourth inventions, the unit light reflecting element determined to be defective in the step A is replaced with another unit light reflecting element, and the step A is performed. It can be done again.
Then, in the method for manufacturing a large-sized light reflecting element according to the first to fourth inventions, the inspection reference image is preferably an image synthesized by using a computer.
Further, in the above-mentioned method for manufacturing a large-scale light-reflecting element, it is preferable that the unit light-reflecting element is temporarily fixed to the transparent surface plate by vacuum suction.

The method for manufacturing a large-scale light reflecting element according to the fifth invention is described in the first to fourth inventions.
The unit light reflecting element
The first step of laminating a plurality of transparent plate materials via a light reflector and an adhesive to produce a square columnar block material having a height of h and side surfaces P to S around it.
The second step of polishing the opposite side surfaces Q and S of the block material so that the distance w from the side surface Q to the side surface S is the same as the height h and making the side surfaces P and R square.
A third step of cutting the block material processed in the second step in parallel with the side surface P or the side surface R to produce a plurality of light reflecting base materials having the same thickness.
It is manufactured by the fourth step of polishing both end faces of each of the cut light-reflecting base materials.

In the method for manufacturing a large-scale light reflecting element according to the fifth invention, a cutting process is performed in which the distance from the side surface Q to the side surface S is roughly adjusted before polishing the side surfaces Q and S in the second step. Is good.
Further, in the method for manufacturing a large-sized light reflecting element according to the fifth invention, the roughness of the side surfaces Q and S polished in the second step and the roughness of both end faces of the unit light reflecting element polished in the fourth step. Is preferably 30 nm or less, but the present invention is not limited to this value.
In the method for manufacturing a large-sized light-reflecting element according to the fifth invention, the light-reflecting material is preferably a metal-deposited film formed on at least one surface of the transparent plate material, but may be a metal film.

The method for manufacturing the optical imaging apparatus according to the sixth invention is the optical imaging manufactured by using the large-sized light-reflecting element manufactured by the method for manufacturing the large-sized light-reflecting element according to the first to fifth inventions. It ’s a manufacturing method of equipment.
A medium-sized light-reflecting element in which the corners of the large-sized light-reflecting element are diagonally cut so that the outer shape is square when viewed in a plan view, and each light-reflecting surface is inclined by 45 degrees with respect to each side of the square. Step a to form and
It has a step b of superimposing two medium-sized light-reflecting elements so that their respective light-reflecting surfaces are orthogonal to each other.

In the sixth invention, the method for manufacturing an optical imaging apparatus according to a seventh invention is a method of combining four right-angled isosceles triangle-shaped corners cut out in the step a and reflecting the light at each corner. Two medium-sized light-reflecting elements whose surfaces face in the same direction are prepared, and the two light-reflecting elements are superposed so that the respective light-reflecting surfaces are orthogonal to each other.

The method for manufacturing a large-scale light-reflecting element according to the first to fifth inventions uses an inspection reference image (mirror image) of a display device that directly reflects on the light-reflecting surface to confirm (inspect) the arrangement of the light-reflecting surfaces. Therefore, it becomes clearer than the aerial image and the mirror image disclosed in Patent Documents 2 and 3, and since the reference light reflecting element is not used, the device itself can be simplified, and further, the reference light reflecting element can be simplified. It is superior in reliability as compared with Patent Documents 2 and 3 in which the accuracy of the light affects the measurement accuracy.

In particular, the unit light reflecting element is the first step of laminating a plurality of transparent plate materials via a light reflecting material and an adhesive to produce a square columnar block material having a height of h and side surfaces P to S around it. , The second step of polishing the opposite side surfaces Q and S of the block material to make the distance w from the side surface Q to the side surface S the same as the height h, and making the side surfaces P and R square, and processing in the second step. A third step of cutting the cut block material in parallel with the side surface P or the side surface R to produce a plurality of light-reflecting base materials having the same thickness, and a fourth step of polishing both end surfaces of each cut light-reflecting base material. When the unit light reflecting element having the same size is manufactured by the above method, the unit light reflecting element having the same size can be manufactured more efficiently.

Further, in the method for manufacturing the optical imaging device according to the sixth invention, distortion is caused by using the large-scale light-reflecting element manufactured by the method for manufacturing the large-scale light-reflecting element according to the first to fifth inventions. An optical imaging device capable of displaying a small number of large spatial images can be manufactured with good yield.

(A) is an explanatory view of a unit light reflecting element, (B) is an explanatory view of a conventional optical imaging device manufactured by using the same unit light reflecting element, and (C) is an explanatory view of the optical imaging device. It is explanatory drawing of the conventional large-sized optical imaging apparatus manufactured by using the above, and (D) is a plan view of another conventional optical imaging apparatus cut out from the same large-sized optical imaging apparatus. (A) is a perspective view of a block material used for manufacturing a unit light reflecting element used in the method for manufacturing a large light reflecting element according to an embodiment of the present invention, and (B) shows a processed state of the block material. It is a plan view. (A) is a plan view showing a cut portion of the block body, (B) is a side view of the same block body, and (C) is a front view of the same block body. Has, for example, 500 to 3000 light-reflecting substrates). (A) is a side view of the light-reflecting base material cut out from the block body, and (B) is a front view of the same. (A) is a side view of a polished unit light reflecting element, and (B) is a perspective view of the same. It is a top view of the transparent surface plate on which the same unit light reflection element is mounted. (A) is an explanatory diagram of individual inspection (good / bad judgment) of a unit light reflecting element used in the method for manufacturing a large light reflecting element according to an embodiment of the present invention, and (B) is an inspection standard to be displayed on a display device. It is an image (lattice image), and (C) is a reference image or an inspection image captured by an imaging device. It is an analysis figure of the inspection image taken by the image pickup apparatus. It is explanatory drawing of the manufacturing method of the large-sized light reflection element which concerns on one Example of this invention. (A) and (B) are explanatory views of the quality determination method of a large-sized light reflection element. (A) is an inspection image captured by an imaging device, and (B) is a detailed explanatory view thereof. (A) is another inspection image captured by the imaging device, and (B) is a detailed explanatory view thereof. It is explanatory drawing of the manufacturing method of the optical imaging apparatus which concerns on another Example of this invention. It is explanatory drawing of the manufacturing method of the optical imaging apparatus which concerns on a conventional example. It is explanatory drawing of the manufacturing method of the optical imaging apparatus which concerns on a conventional example.

Subsequently, a method for manufacturing a large-scale light reflecting element and a method for manufacturing an optical imaging device according to an embodiment of the present invention will be described with reference to the accompanying drawings.
Before explaining the manufacturing method of the large-scale light reflecting element and the manufacturing method of the optical imaging device of the present invention, first, the manufacturing method of the conventional optical imaging device will be described.
FIG. 1A shows a unit light reflecting element 10 having a square shape (90 to 200 mm on a side) in a plan view. The unit light reflecting element 10 is a light reflection element formed inside a transparent flat plate 11 by a metal vapor deposition film (metal vapor deposition layer) such as aluminum that is perpendicular to the front surface (or the back surface, that is, one surface) of the transparent flat plate 11. A large number of members 12 are arranged in parallel at a constant pitch. Reference numeral 11a indicates a light transmitting portion of the unit light reflecting element 10, and the surface of each light reflecting material 12 functions as a light reflecting surface 12a. The optical imaging device 13 shown in FIG. 1B can be formed by superimposing two unit light reflecting elements 10 in a plan view so that the light reflecting surfaces 12a are orthogonal to each other. Then, it is difficult to manufacture an optical imaging device having a side of more than 20 cm.

Therefore, at present, a large-scale optical imaging device 15 shown in FIG. 1C is manufactured by arranging and pasting a plurality of small optical imaging devices 13 in a plane (vertically and horizontally). At this time, by arranging n square optical imaging devices having two or more natural numbers n in the vertical and horizontal directions, it is possible to manufacture a large square optical imaging device in a plan view, but large optics. The imaging device does not necessarily have to be square in a plan view, and the number and arrangement of small optical imaging devices to be bonded can be appropriately selected according to the size and shape of the large optical imaging device. can.
However, when the light reflecting surfaces 12a arranged in the direction orthogonal to one side of the square are used vertically or horizontally with respect to the observer as in the optical imaging device 15 shown in FIG. There is a problem that the light is reflected only by the light reflecting surface 12a of either the upper or lower unit light reflecting element 10 and does not form an image. Therefore, in reality, as shown by the virtual line in FIG. 1 (C), the corner portion 16 of the large optical imaging device 15 is cut diagonally and viewed in a plan view as shown in FIG. 1 (D). An optical imaging device 17 having a square outer shape and having each light reflecting surface 12a inclined by 45 degrees with respect to each side of the square is manufactured and used.

However, since the optical imaging apparatus 13 shown in FIG. 1B is a set of one upper and lower unit light reflecting element 10, each unit light reflecting element 10 has some distortion and the like. However, the image is normally formed, but the image is cut out from the large optical imaging device 15 and the optical imaging device 15 of FIG. 1C, which are manufactured by combining a plurality of optical imaging devices 13. In the optical imaging device 17 of FIG. 1D, imaging is performed by combining minute deviations, distortions, bends, and the like of each light reflecting surface 12a of each optical imaging device 13 (each unit light reflecting element 10). It was sometimes distorted. That is, in the process of manufacturing the unit light reflecting element 10 having a side of 9 to 20 cm, if the light reflecting material 12 (light reflecting surface 12a) is distorted or bent due to a delicate external factor, a large-scale optical result is obtained. Since optical distortion occurs in the imaging device 15 and a problem arises that the large optical imaging device 15 assembled at an angle cannot be used, it is possible to individually judge the quality of the unit light reflecting element 10 at the assembly stage. It was desired.

Therefore, at the stage of the unit light reflecting element 10 (see FIG. 1 (A)) before manufacturing the optical imaging device 13, it is confirmed that there is no abnormality or defect in the configuration of each unit light reflecting element 10, and the abnormality or the like is confirmed. First, a large-sized light-reflecting element is made by using the unit light-reflecting element 10 without a unit, and these two large-sized light-reflecting elements are viewed in a plan view and superposed so that the light-reflecting surfaces are orthogonal to each other. It was confirmed that the optical imaging apparatus of the above can be manufactured, and the present invention could be achieved. A large square light-reflecting element in a plan view is manufactured by combining four (or nine, sixteen, that is, two or more square units of a natural number n) of square unit light-reflecting elements in a plan view. can do. It should be noted that the large light reflecting element may be square in plan view, and the unit light reflecting element does not necessarily have to be square in plan view, and the shape of the unit light reflecting element constituting the large light reflecting element. The number and arrangement can be selected as appropriate.

In manufacturing a large-sized light reflecting element and a large-sized optical imaging device, first, referring to FIGS. 2 to 5, unit light used in the method for manufacturing a large-sized light reflecting element according to an embodiment of the present invention. A new method for manufacturing the reflecting element 28 (the unit light reflecting element 28 has the same structure as the unit light reflecting element 10) at low cost and with high accuracy will be described. As shown in part in FIG. 2A, the light transmittance is high, the thickness variation is extremely small (for example, the thickness error is 5% or less, more preferably 1% or less), and the thickness is, for example, 0. A plurality of transparent plate materials 20 made of a plate glass of 2 to 2 mm or a hard transparent resin plate are prepared. The size of the transparent plate material 20 is preferably a rectangle (including a square) of 90 to 250 mm, and a surface roughness of 100 nm or less (preferably 50 nm or less, more preferably 10 nm or less) is preferable. It is not limited to these. In the drawings, ▽▽▽ indicates mirror polishing.

The transparent plate material 20 is placed in a vacuum furnace, and one side (or both sides) of the transparent plate material 20 is vapor-deposited with a metal such as aluminum (which may be a white metal). The metal vapor deposition layer (metal vapor deposition film) constitutes the light reflector 21. Finally, as shown in the enlarged view of FIG. 3B, the light reflecting material 21 forms the light reflecting surface 22 on one side (or both sides) of the transparent plate material 20. Further, here, a metal reflective sheet (for example, a mirror sheet) can be used instead of the metal vapor deposition layer as the light reflecting material, but in this case, it is formed (arranged) on only one side of the transparent plate material 20. good.

Next, a plurality of transparent plate materials 20 (for example, 500 to 1500 sheets) on which the light reflecting surface 22 is formed are pressed and laminated via a transparent adhesive. Here, as the adhesive, a thermosetting type, an ultraviolet curing type, a room temperature curing type, a two-component mixed type, or the like can be applied. As a result, as shown in FIG. 2 (A), a block member 23 having a square columnar shape (cube or rectangular parallelepiped) having rectangular shapes on six surfaces is obtained. Here, assuming that the transparent plate members 20 are stacked from the bottom to the top, the side surfaces around the block member 23 are P, Q, R, S, and the ceiling surface and the bottom surface are T, U.

Since the ceiling surface T and the bottom surface U of the block material 23 are the surface of the transparent plate material 20 or the light reflecting material 21 (metal vapor deposition surface), they are maintained at a surface roughness of 100 nm or less (for example, 10 nm) without polishing. There is. The ceiling surface T and the bottom surface U, which are the reference surfaces, are parallel within a range of ± 0.05 degrees, preferably ± 0.02 degrees, and the distance (interval) from the ceiling surface T to the bottom surface U. That is, since the height h of the block material 23 needs to be accurate, the height is adjusted by pressing it in a vacuum with a flat press or the like as necessary (height adjustment is performed before or during the adhesive hardening). Good to do). Further, it is preferable to measure and confirm the parallelism and dimensions (preferably within an error of 1 μm) between the ceiling surface T and the bottom surface U with a three-dimensional measuring device, a height measuring device, or the like (the above is the first step).

Next, the block material 23 is viewed from the front (viewed from the side surface P), and both ends in the width direction are cut substantially parallel to the opposite side surfaces Q and S to adjust the width (coarse adjustment). conduct. This is a plurality of vacuums provided on the surface plate 24 by temporarily placing the block member 23 on the surface plate 24 arranged horizontally as shown in FIGS. 2 (B) and 3 (A) to 3 (C). This is performed by sucking and holding the block material 23 by the suction port 27 and cutting it with a band saw (or other cutting means). Then, by polishing both side surfaces (both cut surfaces) that have been cut, the two side surfaces Q1 and S1 are newly formed. These side surfaces Q1 and S1 are perpendicular to the ceiling surface T or the bottom surface U, and the distance (width) w from the side surface Q1 to the side surface S1 is equal to the height h. As a result, as shown in FIGS. 3A to 3C, a new ceiling surface T1 and a bottom surface U1 having a shortened width (having a width w) and a new side surface having a height h equal to the width w are obtained. A block body 25 (with a dimensional accuracy of, for example, within 0.5 μm) in which the new side surfaces P1 and R1 surrounded by Q1 and S1 are completely square is formed (the above is the second step). The distance between both side surfaces (both cut surfaces) after the cutting process is cut so as to be slightly larger than the height h (width w after polishing + polishing allowance) in consideration of the polishing allowance. The desired dimensions can be obtained after polishing.

Next, as shown in FIGS. 3 and 4, a square block body 25 surrounded by the side surface S1, the bottom surface U1, the side surface Q1, and the ceiling surface T1 and viewed from the side surface P1 side is placed and fixed on the surface plate 24. Then, the side surface P1 (or the side surface R1) is cut in parallel or simultaneously at a plurality of places, and as shown in FIGS. 4 (A) and 4 (B), the thickness is the standard thickness (0.5 to 2 mm) + the polishing allowance. The light-reflecting base material 26 is manufactured (the above is the third step).
Next, the end face (cut surface) of the cut light-reflecting base material 26 is mirror-polished to obtain optical end faces P2 and R2, and a unit light-reflecting element 28 having a standard dimensional thickness is manufactured.
The unit light reflecting elements 28 having a predetermined thickness in which the adjacent laminated end faces Q2, T2, S2, and U2 are orthogonal to each other are shown in FIGS. Since the light reflecting material 21 is formed only on one side of 20a (see the enlarged view of FIG. 4A), the bottom surface (laminated end face U2) of the unit light reflecting element 28 is as shown in FIG. 5A. The light transmitting portion 20a is exposed. On the other hand, when the light reflecting material 21 is formed on both sides of the light transmitting portion 20a, the unit light reflecting element 29 (see FIG. 6) having the light reflecting material 21 is formed on both the upper and lower surfaces (laminated end faces T2 and U2). NS. The roughness of the polished optical end faces P2 and R2 and the polished laminated end faces Q2 and S2 is preferably 30 nm (or less, for example, 10 nm or less) (the above is the fourth step).

Hereinafter, a method for manufacturing a large-sized light reflecting element according to an embodiment of the present invention will be described.
When a large-scale light-reflecting element is manufactured using the unit light-reflecting element 28, the unit light-reflecting element 28 adjacent to each other in the stacking direction of the light transmitting portion 20a and the light-reflecting material 21 is the upper surface of one of the unit light-reflecting elements 28. The light transmitting portion 20a and the light reflecting material 21 are alternately arranged by laminating the laminated end surface T2) and the lower surface (laminated end surface U2) of the other unit light reflecting element 28 so as to face each other. On the other hand, when a large-sized light-reflecting element is manufactured by using the unit light-reflecting element 29 having the light-reflecting material 21 on both the upper and lower surfaces (laminated end faces T2 and U2), the stacking direction of the light transmitting portion 20a and the light-reflecting material 21 The unit light reflecting element 29 adjacent to the light reflecting material 21 adheres the light reflecting materials 21 to each other, but this is not a problem because the thickness of the metal vapor deposition film and the adhesive layer is thin.

Next, a means and a method for inspecting whether or not the unit light reflecting element 29 (similarly, the unit light reflecting element 28 is also represented by the unit light reflecting element 29 below) is normally manufactured (standard specifications) will be described. If a large-area transparent plate material and a light-reflecting material are laminated from the beginning to manufacture a large-sized light-reflecting element (mirror plate), a large-sized manufacturing device is required and it becomes difficult to control the dimensions (flatness). A plurality of small-sized (150 mm square in this embodiment) unit light-reflecting element 29 can be manufactured and spread to manufacture a large-sized light-reflecting element. First, an apparatus and a method for individually inspecting each unit light reflecting element 29 will be described.

As shown in FIGS. 6 and 7A, in the unit light reflecting element inspection device 30, the fixedly arranged transparent platen 31 and the square unit light reflecting element 29 in a plan view are arranged at predetermined positions. A display device (display) 32 arranged below the transparent platen 31 at an angle of 40 to 50 degrees with respect to the transparent platen 31, and a unit from the upper side (other side) of the unit light reflecting element 29. It has an image pickup device 33 that captures a mirror image of the image of the display device 32 via the light reflection element 29.

A frame (not shown) is arranged around the transparent platen 31 formed of a glass plate, and the entire transparent platen 31 is in the horizontal direction (x-axis direction and y-axis) as shown in FIG. 7 (A). Direction), vertical direction (z-axis direction), tilting (x-axis and y-axis) and in-situ rotation (z-axis rotation θ) are possible, and a unit light reflecting element mounted on the transparent platen 31 The 29 can be placed at any position. As shown in FIG. 6, the x-axis direction base portion and the y-axis direction base portion of the transparent platen 31 are provided with x guides 34 and y guides 35 that are orthogonal to each other and are placed on the transparent platen 31. The unit light reflecting element 29 can be positioned (temporarily fixed) so that the light reflecting surfaces 22 are in the same direction. Further, it is possible to provide the transparent platen 31 with a plurality of suction mechanisms for vacuum-sucking the mounted unit light reflecting element 29 and holding (temporarily fixing) the unit light reflecting element 29 in place, but this hinders measurement. It is more preferable to provide the pressing mechanisms 29a and 29b to press-clamp the unit light reflecting element 29 from the side. As shown in FIG. 7A, a suction transport means 37 for transporting the unit light reflecting element 29 is provided above the transparent surface plate 31.

As shown in FIG. 7B, the display device 32 displays a grid image 39 having a square shape as a whole, which is an example of an inspection reference image. Here, in the lattice image 39, a plurality of vertical lines 41 perpendicular to the x-axis direction (parallel to the y-axis direction) and a plurality of horizontal lines 42 parallel to the x-axis direction are arranged at predetermined pitches (constant intervals), respectively. It is a thing. When the lattice image 39 is imaged by the image pickup apparatus 33 via a normal (reference) unit light reflecting element 29d having no bending or distortion on each light reflecting surface 22, a reference image 40d as shown in FIG. 7C can be obtained. Therefore, save it as reference image data. Here, since many light reflecting surfaces 22 are arranged at equal pitches on the unit light reflecting element 29d, a plurality of light reflecting surfaces arranged in parallel are arranged in parallel, unlike the image when the lattice image 39 is viewed through one mirror. The lattice image 39 is viewed through the light reflecting surface 22, and as shown in FIG. 7C, the reference image 40d has the vertical line 41 and the horizontal line 42 of the lattice image 39 as the reference vertical line 41d and the reference horizontal line, respectively. It looks like a trapezoid transformed into 42d. It is preferable that the size (specification) of the reference unit light reflecting element 29d matches the size (specification) of the unit light reflecting element 29 to be inspected. Further, the grid image is preferably an image synthesized by using a computer, but the present invention is not limited to this, and vertical lines and horizontal lines may be drawn at exactly regular intervals.

Next, when determining the quality of the unit light reflecting element 29, the unit light reflecting element 29 to be inspected is placed on the transparent surface plate 31 for positioning. Then, in the same procedure as the unit light reflecting element 29d, the mirror image of the lattice image 39 displayed on the display means 32 is imaged by the imaging device 33 via the unit light reflecting element 29 to obtain the inspection image 40a. Then, the inspection is performed by superimposing the reference image 40d on the inspection image 40a, but since the inspection image 40a is almost the same as the reference image 40d, the reference image 40d or the inspection image 40a is moved and scaled. By matching (overlapping) the contours of both, it is possible to easily compare (inspect) from the similarity (similarity) between the inspection image 40a and the reference image 40d.
If there is an abnormality in the light reflecting surface 22 of the unit light reflecting element 29, for example, the inspection horizontal line 42a of the inspection image 40a deviates from the reference horizontal line 42d of the reference image 40d, so that the unit light is caused by the distortion (positional deviation) of the inspection horizontal line 42a. The quality of the reflective element 29 can be determined. Instead of completely overlapping the inspection image 40a and the reference image 40d (matching the display magnifications), for example, the size of the inspection image 40a is set in the range of 0.9 to 0.98 times in the vertical and horizontal directions with respect to the reference image 40d. It may be made smaller.

The above-mentioned judgment of good or bad may be performed visually, but since the boundary between good and bad may not be clear, it is preferable to perform arithmetic processing (image processing) using a computer.
Hereinafter, an example of determining the similarity (pass / fail determination) between the reference image 40d and the inspection image 40a by a computer will be described below. Here, as shown in FIG. 8, x1, x2 ... xn ... Are assigned to each reference vertical line 41d in the outer frame 43d of the reference image 40d, and y1, y2 ... yn ... Are assigned to each reference horizontal line 42d. Attach. n may be, for example, about 5 to 50. When comparing the reference image 40d and the inspection image 40a, it is preferable that the outer frames 43d and 43a are matched as much as possible. However, in the case of visual comparison, it is sufficient to observe the distortion of the inspection horizontal line 42a, so that the outer frames 43d and 43a match is not an indispensable requirement.

If there is an abnormality in the unit light reflecting element 29 to be inspected, the position of the inspection horizontal line 42a shifts upward or downward from the reference horizontal line 42d of the reference image 40d, so that each reference vertical line 41d (x1, x2 ... When xn ...,) and each inspection horizontal line 42a intersect, the upward deviation An of each inspection horizontal line 42a is measured, the maximum value (or average value) is calculated, and the value Ku is larger than the reference value. (Case 1), or when the downward deviation Am (not shown) of each inspection horizontal line 42a is measured, the maximum value (or average value) is calculated, and the value Ks is larger than the reference value (Case 2). ) Is determined to be abnormal in the unit light reflecting element 29, and becomes defective. As the measured values Ku and Ks, it is preferable to adopt the larger value measured in pixel units. The reference value is obtained by experiment. Since the light reflecting surface 22 of the unit light reflecting element 29 is along the inspection horizontal line 42a of the inspection image 40a, distortion of the inspection vertical line 41a is not normally observed when the unit light reflecting element 29 is placed correctly.
In the above method, the maximum value (or average value) of the deviation An of each inspection horizontal line 42a measured individually was calculated, but the root mean square value (Root Mean Square Value) of all the deviation Ans was calculated and measured in advance. It is also possible to determine the pass / fail (degree of similarity) by comparing with the obtained reference value.

In this way, the quality of the square unit light reflecting element 29 is determined, and four (or nine or 16) non-defective unit light reflecting elements 29 are flattened so that the light reflecting surfaces 22 are in the same direction. By arranging them side by side and pasting them together, at least two large light reflecting elements 51 are manufactured. Then, as shown in FIG. 9, two large light reflecting elements 51 are superposed on the large transparent surface plate 52 so that the respective light reflecting surfaces 22 are orthogonal to each other, and the x guides 53 and y are orthogonal to each other. A large optical imaging device can be formed by positioning with guides 54 and movable guides 55 and 56 and joining them with an adhesive.
Here, a large device having the same structure as the inspection device 30 shown in FIG. 7 is prepared, and a large display device 32 is also prepared, which is the same as inspecting one unit light reflecting element 29 as described above. Although it is possible to inspect the large-sized light-reflecting element 51 by various methods, the large-sized light is obtained by strictly inspecting each unit light-reflecting element 29, preparing only the required number of non-defective products, and joining them side by side. It is preferable to manufacture the reflective element 51.
When arranging and joining a plurality of unit light reflecting elements, a plurality of unit light reflecting elements are arranged on a transparent plate to join adjacent unit light reflecting elements, and at the same time, each unit light is bonded to the transparent plate. By joining the reflecting elements, a plurality of unit light reflecting elements can be reliably integrated, and the handling and morphological stability of the large light reflecting element are excellent.

Further, in the above embodiment, the distortion of the light reflecting surface 22 was inspected for the entire unit light reflecting element 29, but since the distortion often occurs only partially, the unit light reflecting element 29 The present invention also applies to the case where a pass / fail inspection is performed only for a part.
In the above embodiment, the inspection reference image is imaged and the inspection image is inspected from one place. However, when the target light reflecting element is large, the inspection reference image is also large, so that there are a plurality of inspection reference images. Imaging and inspection may be performed simultaneously from different locations, or a part of a large light reflecting element may be sequentially imaged while moving the imaging device 33, and the inspection image (mirror image) and the reference image may be compared for each portion. .. The visual observation can be performed from a plurality of places, but the reference image may or may not be present.

Subsequently, referring to FIGS. 10 (A), (B), 11 (A), (B), 12 (A), and (B), a large light reflecting element according to an embodiment of the present invention. The pass / fail judgment method of the above will be described. As shown in FIG. 10A, square unit light reflecting elements 61 to 64 (each having a side of 90 to 200 mm) viewed in a plan view on the transparent surface plate 60 are arranged so that the light reflecting surfaces 69 are in the same direction. Place 4 sheets in close contact with each other. By joining these four unit light reflecting elements 61 to 64, a large light reflecting element 65 can be obtained, but at this point, the unit light reflecting elements 61 to 64 are not joined (for example, transparent by vacuum suction). It is temporarily fixed to the platen 60). Below the transparent surface plate 60, a flat display 66 is arranged so as to be inclined so as to form a constant angle (40 to 50 degrees) with the transparent surface plate 60. A grid image (an example of an inspection reference image) 39 as shown in FIG. 7B is displayed on the display 66. The number and arrangement (pitch) of the vertical lines of the lattice image and the horizontal lines parallel to the light reflecting surfaces 69 of the unit light reflecting elements 61 to 64 depend on the number and arrangement of the light reflecting surfaces 69 of the large light reflecting element 65. Can be set freely.

In this state, when a lattice image 39 (vertical line 41, horizontal line 42) is displayed on the display 66, the camera 68 is placed directly above the central base of the large light reflecting element 65, and the large light reflecting element 65 is observed. , As shown in FIG. 11A, the inspection image is visually recognized. In this case, the number of images (mirror images) of the horizontal lines 42 that are reflected by one light reflecting surface 69 of the large light reflecting element 65 and enter the camera 68 is one or a small number depending on the height of the light reflecting surface 69. .. Here, if the positions of the light reflecting surfaces 69 of the adjacent unit light reflecting elements 61 to 64 are misaligned, as shown in FIG. 11B, the inspection vertical line 41a or the inspection horizontal line 42a may be misaligned. Since a step difference occurs, it is possible to determine whether the arrangement of the light reflecting elements 61 to 64 of each unit is good or bad from the continuity of the mirror image. It is preferable to adjust the angle of the display 66 or the like so that the maximum deviation occurs in the inspection image (inspection vertical line 41a or inspection horizontal line 42a) (step A).

12 (A) and 12 (B) show other inspection images captured by the camera 68, in which a discontinuity 71 is seen on the inspection vertical line 41a and a step difference 72 is seen on the inspection horizontal line 42a. Thereby, the quality of the large light reflecting element 65 can be determined.
When inspecting a large light-reflecting element in which a plurality of unit light-reflecting elements (two or more natural numbers n squared) are arranged side by side, first, two unit light-reflecting elements are arranged side by side and inspected, and then the inspection is performed. It is also possible to sequentially repeat the step A of adding one unit light reflecting element to the inspection. This makes it easier to identify defective unit light-reflecting elements than to inspect a large number of light-reflecting elements side by side at the same time. The movement and replacement of each light reflecting element is performed by the adsorption and transporting means, and the unit light reflecting element determined to be defective in step A is replaced with another unit light reflecting element, and the final step A is performed again. A large-sized light-reflecting element 65 can be obtained by fixing (joining) only the unit light-reflecting element judged to be a good product with an adhesive.

In the above embodiment, only one unit light reflecting element is inspected from one direction, but the unit light reflecting element is rotated 180 degrees in a plane to change the direction of the light reflecting surface 22. Re-inspection (confirmation inspection in step A) can be performed in line. This improves the accuracy of non-defective product judgment. Further, the unit light reflecting element to be inspected can be turned inside out to perform the inspection. When determining the quality of the large-sized light-reflecting element according to the present embodiment, the individual inspection of each unit light-reflecting element described above may be omitted.

Subsequently, a method of manufacturing an optical imaging apparatus according to an embodiment of the present invention will be described.
First, the corners of the large light reflecting element 65 described above are cut diagonally so that the outer shape is square when viewed in a plan view, and each light reflecting surface 69 is a medium-sized medium-sized one inclined by 45 degrees with respect to each side of the square. A light reflecting element (not shown) is formed (step a). Then, the (medium-sized) optical imaging device can be manufactured by superimposing the two medium-sized light-reflecting elements so that the respective light-reflecting surfaces 69 are orthogonal to each other (step b). The optical imaging device thus obtained has the same structure as the optical imaging device 17 shown in FIG. 1 (D), but with respect to the unit light reflecting elements 61 to 64 and the large light reflecting elements 65 constituting the optical imaging device 17. Due to the quality judgment, the quality is higher than that of the conventional large-scale optical imaging device. In this embodiment, after the corners of the large light reflecting element 65 are diagonally cut to form a medium-sized light reflecting element, the light reflecting surfaces 69 of the two medium-sized light reflecting elements are orthogonal to each other. An optical imaging device was manufactured by superimposing (joining) them in this way, but after superimposing and joining two large light reflecting elements 65 so that their respective light reflecting surfaces 69 were orthogonal to each other, the corners were formed. The portion may be cut diagonally.

Next, a method of manufacturing the optical imaging apparatus according to another embodiment of the present invention will be described.
As shown in FIG. 13, four right-angled isosceles triangular corners (part of the light-reflecting element) 57 cut out in the above step a are combined so that the light-reflecting surfaces 69 of each corner 57 are in the same direction. The above step is performed by preparing two medium-sized light-reflecting elements 58 facing each other and superimposing the two light-reflecting elements 58 on a large transparent platen 52 so that the respective light-reflecting surfaces 69 are orthogonal to each other. By effectively utilizing the corner portion 57 cut in a, it is possible to manufacture an optical imaging device equivalent to the optical imaging device manufactured in the above step b, which is excellent in resource saving. When manufacturing the medium-sized light reflecting element 58 by joining the four corners 57, the four corners 57 are arranged on the transparent plate, and the adjacent corners 57 are joined to each other at the same time. By joining each corner portion 57 to the transparent plate, the four corner portions 57 can be reliably integrated, and the medium-sized light reflecting element 58 is excellent in handleability and morphological stability. However, as described above, when the corners (a part of the optical imaging device) are cut diagonally after joining the two large light reflecting elements 65, the four cut corners are cut by the transparent plate. An optical imaging device can be obtained simply by arranging them side by side and joining the adjacent corners to each other and at the same time joining each corner to the transparent plate.

When manufacturing a large-sized light-reflecting element using a small-sized unit light-reflecting element, each unit light-reflecting element and a large-sized light-reflecting element can be easily inspected, and a high-quality large-sized light-reflecting element and optical connection can be performed. The image device can be manufactured at low cost.

10: Unit light reflecting element, 11: Transparent flat plate, 11a: Light transmitting part, 12: Light reflecting material, 12a: Light reflecting surface, 13: Optical imaging device, 15: Large optical imaging device, 16: Corner part , 17: Optical imaging device, 20: Transparent plate material, 20a: Light transmitting part, 21: Light reflecting material, 22: Light reflecting surface, 23: Block material, 24: Plate plate, 25: Block body, 26: Light reflecting Base material, 27: Vacuum suction port, 28, 29: Unit light reflecting element, 29a, 29b: Pressing mechanism, 29d: Regular light reflecting element, 30: Inspection device, 31: Transparent platen, 32: Display means (display) ), 33: Imaging device, 34: x guide, 35: y guide, 37: Adsorption transfer means, 39: Lattice image (inspection reference image), 40a: Inspection image, 40d: Reference image, 41: Vertical line, 41a: Inspection vertical line, 41d: Reference vertical line, 42: Horizontal line, 42a: Inspection horizontal line, 42d: Reference horizontal line, 43a, 43d: Outer frame, 51: Large light reflecting element, 52: Transparent platen, 53: x guide, 54: y guide, 55, 56: movable guide, 57: corner, 58: medium-sized light reflecting element, 60: transparent platen, 61 to 64: unit light reflecting element, 65: large light reflecting element, 66: Display, 68: Camera, 69: Light reflecting surface, 71: Discontinuous part, 72: Step difference

Claims (14)

1. A method for manufacturing a large-scale light-reflecting element, in which a plurality of unit light-reflecting elements having a plurality of light-reflecting surfaces arranged perpendicularly to one surface and parallel to each other at predetermined intervals are arranged in a plane.
   A plurality of the unit light reflecting elements are arranged on the transparent platen so that the light reflecting surfaces are in the same direction, and one side of the transparent platen has a constant angle with the transparent platen. A mirror image formed by displaying an inspection reference image having a horizontal line parallel to each light reflecting surface of each unit light reflecting element on a display arranged therein and reflecting the horizontal line once on each light reflecting surface. A method for manufacturing a large-scale light-reflecting element, which comprises a step A of observing the continuity of the light-reflecting elements from the other side of the transparent platen and determining whether or not the adjacent unit light-reflecting elements are arranged.
2. Planar-viewing square unit light-reflecting elements having a plurality of light-reflecting surfaces arranged perpendicularly to one surface and parallel to each other at predetermined intervals are manufactured by arranging a plurality of flat-viewing square unit light-reflecting elements in a plane. It is a method of manufacturing a reflective element.
   A plurality of the unit light reflecting elements are arranged on the transparent platen so that the light reflecting surfaces are in the same direction, and one side of the transparent platen has a constant angle with the transparent platen. A mirror image formed by displaying an inspection reference image having a horizontal line parallel to each light reflecting surface of each unit light reflecting element on a display arranged therein and reflecting the horizontal line once on each light reflecting surface. A method for manufacturing a large-scale light-reflecting element, which comprises a step A of observing the continuity of the light-reflecting elements from the other side of the transparent platen and determining whether or not the adjacent unit light-reflecting elements are arranged.
3. The method for manufacturing a large-scale light-reflecting element according to claim 2, wherein the unit light-reflecting element is a square having a side of 90 to 200 mm.
4. The large-scale light-reflecting element according to any one of claims 1 to 3, wherein the angle between the transparent surface plate and the display is in the range of 40 to 50 degrees. Manufacturing method.
5. In the method for manufacturing a large-scale light reflecting element according to any one of claims 1 to 4, the inspection reference image has a plurality of the horizontal lines and a plurality of vertical lines orthogonal to the horizontal lines to form a grid. A method for manufacturing a large-scale light-reflecting element, which is characterized by the fact that the light-reflecting element is manufactured.
6. In the method for manufacturing a large-scale light-reflecting element according to any one of claims 1 to 5, the unit light-reflecting element determined to be defective in the step A is replaced with another unit light-reflecting element, and the step A is performed. A method for manufacturing a large-scale light-reflecting element, which comprises re-implementing.
7. The method for manufacturing a large-scale light-reflecting element according to any one of claims 1 to 6, wherein the inspection reference image is an image synthesized by using a computer. ..
8. The method for manufacturing a large-scale light-reflecting element according to any one of claims 1 to 7, wherein the unit light-reflecting element is temporarily fixed to the transparent platen by vacuum suction. Manufacturing method of reflective element.
9. In the method for manufacturing a large-scale light reflecting element according to any one of claims 1 to 8.
   The unit light reflecting element
   The first step of laminating a plurality of transparent plate materials via a light reflector and an adhesive to produce a square columnar block material having a height of h and side surfaces P to S around it.
   The second step of polishing the opposite side surfaces Q and S of the block material so that the distance w from the side surface Q to the side surface S is the same as the height h and making the side surfaces P and R square.
   A third step of cutting the block material processed in the second step in parallel with the side surface P or the side surface R to produce a plurality of light reflecting base materials having the same thickness.
   A method for manufacturing a large-scale light-reflecting element, which is manufactured by a fourth step of polishing both end faces of each of the cut light-reflecting base materials.
10. In the method for manufacturing a large-scale light reflecting element according to claim 9, a cutting process for roughly adjusting the distance from the side surface Q to the side surface S is performed before polishing the side surfaces Q and S in the second step. A method for manufacturing a large-sized light reflecting element.
11. In the method for manufacturing a large-scale light-reflecting element according to claim 9 or 10, the roughness of the side surfaces Q and S polished in the second step and the roughness of both end faces of the unit light-reflecting element polished in the fourth step is A method for manufacturing a large-sized light reflecting element, which is characterized by having a diameter of 30 nm or less.
12. The method for manufacturing a light-reflecting element according to any one of claims 9 to 11, wherein the light-reflecting material is a metal-deposited film formed on at least one surface of the transparent plate material. Production method.
13. A method for manufacturing an optical imaging apparatus manufactured by using the large-scale light-reflecting element manufactured by the method for manufacturing a large-scale light-reflecting element according to any one of claims 1 to 12.
    A medium-sized light-reflecting element in which the corners of the large-sized light-reflecting element are diagonally cut so that the outer shape is square when viewed in a plan view, and each light-reflecting surface is inclined by 45 degrees with respect to each side of the square. Step a to form and
    A method for manufacturing an optical imaging apparatus, which comprises a step b of superimposing two medium-sized light reflecting elements so that their respective light reflecting surfaces are orthogonal to each other.
14. In the method for manufacturing an optical imaging apparatus according to claim 13, the four right-angled isosceles triangle-shaped corners cut out in the step a are combined, and the light reflecting surfaces of the corners face the same direction. A method for manufacturing an optical imaging apparatus, which comprises preparing two medium-sized light-reflecting elements and superimposing the two light-reflecting elements so that their respective light-reflecting surfaces are orthogonal to each other.

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