TWI778003B - Negative photocurable resin composition, dry film, cured product, and printed wiring board - Google Patents

Negative photocurable resin composition, dry film, cured product, and printed wiring board Download PDF

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TWI778003B
TWI778003B TW106145951A TW106145951A TWI778003B TW I778003 B TWI778003 B TW I778003B TW 106145951 A TW106145951 A TW 106145951A TW 106145951 A TW106145951 A TW 106145951A TW I778003 B TWI778003 B TW I778003B
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resin
resin composition
photocurable resin
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TW201835684A (en
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嶋宮歩
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日商太陽油墨製造股份有限公司
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Abstract

本發明可提供可形成解析性優異,高耐熱性及高延伸率之硬化物的負型光硬化性樹脂組成物、具有由該組成物所得之樹脂層的乾薄膜、其硬化物及具有該硬化物之印刷配線板。本發明之負型光硬化性樹脂組成物,其特徵係包含(A)鹼可溶性樹脂、(B)具有6員環以上之環狀矽氧烷骨架的有機矽氧烷化合物、及(C)光聚合起始劑,前述(B)具有6員環以上之環狀矽氧烷骨架的有機矽氧烷化合物,具有下述通式(1)表示之骨架。

Figure 106145951-A0101-11-0001-1
(式中,n表示1以上之整數)The present invention can provide a negative photocurable resin composition capable of forming a cured product with excellent resolution, high heat resistance and high elongation, a dry film having a resin layer obtained from the composition, a cured product thereof, and a cured product having the cured product. printed wiring board. The negative-type photocurable resin composition of the present invention is characterized by comprising (A) an alkali-soluble resin, (B) an organosiloxane compound having a cyclosiloxane skeleton with six or more membered rings, and (C) a light The polymerization initiator, the aforementioned (B) organosiloxane compound having a cyclic siloxane skeleton with six or more members, has a skeleton represented by the following general formula (1).
Figure 106145951-A0101-11-0001-1
(in the formula, n represents an integer of 1 or more)

Description

負型光硬化性樹脂組成物、乾薄膜、硬化物及印刷配線板Negative photocurable resin composition, dry film, cured product, and printed wiring board

本發明係有關負型光硬化性樹脂組成物、乾薄膜、硬化物及印刷配線板。The present invention relates to a negative photocurable resin composition, a dry film, a cured product and a printed wiring board.

以往,印刷配線板中,層間絕緣層或阻焊劑層等之樹脂層之形成,使用正型或負型之感光性之組成物(例如專利文獻1)。一般而言,正型感光性組成物可形成高解析度的圖型,但是作為其成分之一所包含的光酸產生劑非常昂貴,而有成本面的問題。又,代表性的光酸產生劑的重氮萘醌,可藉由脫氮反應產生發泡,故厚膜(主要為10μm以上)之塗膜形成時,會有問題(例如專利文獻2)。為了解決這種問題,以往,期望解析性優異之負型感光性的組成物(亦即,負型光硬化性樹脂組成物)。Conventionally, in a printed wiring board, a positive-type or negative-type photosensitive composition is used to form a resin layer such as an interlayer insulating layer or a solder resist layer (for example, Patent Document 1). In general, a positive photosensitive composition can form a high-resolution pattern, but the photoacid generator contained as one of its components is very expensive, and there is a problem in terms of cost. In addition, naphthoquinone diazo which is a typical photoacid generator can generate foaming by denitrification reaction, so there is a problem when forming a thick film (mainly 10 μm or more) of the coating film (for example, Patent Document 2). In order to solve such a problem, conventionally, a negative-type photosensitive composition (that is, a negative-type photocurable resin composition) excellent in resolution has been desired.

又,如上述之印刷配線板的樹脂層,就信賴性等的觀點,要求高耐熱性及高延伸率(elongation rate),但是耐熱性與延伸率係取捨(trade off)的關係,故無法同時成立。 先前技術文獻 專利文獻In addition, the resin layer of the above-mentioned printed wiring board is required to have high heat resistance and high elongation rate from the viewpoint of reliability, etc., but heat resistance and elongation rate are in a trade-off relationship, so they cannot be simultaneously established. Prior Art Documents Patent Documents

專利文獻1:日本特開昭61-243869號公報   專利文獻2:日本特開2009-204805號公報Patent Document 1: Japanese Patent Laid-Open No. 61-243869 Patent Document 2: Japanese Patent Laid-Open No. 2009-204805

「發明所欲解決之課題」"Problems to be Solved by Inventions"

因此,本發明之目的係提供可形成解析性優異,高耐熱性及高延伸率之硬化物的負型光硬化性樹脂組成物、具有由該組成物所得之樹脂層的乾薄膜、該硬化物及具有該硬化物之印刷配線板。 「用以解決課題之手段」Therefore, the object of the present invention is to provide a negative photocurable resin composition capable of forming a cured product with excellent resolution, high heat resistance and high elongation, a dry film having a resin layer obtained from the composition, and the cured product and a printed wiring board having the cured product. "Means to Solve Problems"

本發明人有鑑於上述,而精心檢討的結果,發現藉由在負型光硬化性樹脂組成物中,混合具有6員環以上之環狀矽氧烷骨架的有機矽氧烷化合物,可解決上述課題,遂完成本發明。The inventors of the present invention have made careful examinations in view of the above, and found that the above-mentioned problems can be solved by mixing an organosiloxane compound having a cyclosiloxane skeleton with a 6-membered ring or more into a negative photocurable resin composition. The subject has been solved, and the present invention has been completed.

亦即,本發明之負型光硬化性樹脂組成物,其特徵係包含(A)鹼可溶性樹脂、(B)具有6員環以上之環狀矽氧烷骨架的有機矽氧烷化合物、及(C)光聚合起始劑,前述(B)具有6員環以上之環狀矽氧烷骨架的有機矽氧烷化合物,具有下述通式表示的骨架者。

Figure 02_image003
(式中,n表示1以上之整數)。That is, the negative type photocurable resin composition of the present invention is characterized by comprising (A) an alkali-soluble resin, (B) an organosiloxane compound having a cyclic siloxane skeleton with six or more membered rings, and ( C) The photopolymerization initiator, the organosiloxane compound having a cyclosiloxane skeleton having a 6-membered ring or more, which is the aforementioned (B), has a skeleton represented by the following general formula.
Figure 02_image003
(In the formula, n represents an integer of 1 or more).

本發明之負型光硬化性樹脂組成物,其中前述(B)具有6員環以上之環狀矽氧烷骨架的有機矽氧烷化合物,以具有熱硬化性反應基為佳。In the negative photocurable resin composition of the present invention, the (B) organosiloxane compound having a cyclic siloxane skeleton with a 6-membered ring or more preferably has a thermosetting reactive group.

本發明之負型光硬化性樹脂組成物,其中前述熱硬化性反應基,以環氧基為佳。In the negative photocurable resin composition of the present invention, the above-mentioned thermosetting reactive group is preferably an epoxy group.

本發明之負型光硬化性樹脂組成物,其中前述(B)具有6員環以上之環狀矽氧烷骨架的有機矽氧烷化合物,以具有感光性基為佳。In the negative photocurable resin composition of the present invention, the organosiloxane compound (B) having a cyclic siloxane skeleton having a 6-membered ring or more preferably has a photosensitive group.

本發明之負型光硬化性樹脂組成物,其中前述感光性基,以乙烯性不飽和基為佳。In the negative photocurable resin composition of the present invention, the photosensitive group is preferably an ethylenically unsaturated group.

本發明之負型光硬化性樹脂組成物,其係更含有具有乙烯性不飽和基的化合物為佳。The negative photocurable resin composition of the present invention preferably further contains a compound having an ethylenically unsaturated group.

本發明之負型光硬化性樹脂組成物,其中前述具有乙烯性不飽和基的化合物,以2官能以上之(甲基)丙烯酸酯化合物為佳。In the negative photocurable resin composition of the present invention, the above-mentioned compound having an ethylenically unsaturated group is preferably a (meth)acrylate compound having two or more functions.

本發明之負型光硬化性樹脂組成物,其中前述具有乙烯性不飽和基的化合物,以丙烯醯基當量為100以上的(甲基)丙烯酸酯化合物為佳。In the negative photocurable resin composition of the present invention, the compound having an ethylenically unsaturated group is preferably a (meth)acrylate compound having an acryl group equivalent of 100 or more.

本發明之乾薄膜,其特徵係具有將前述負型光硬化性樹脂組成物塗佈於薄膜,經乾燥所得的樹脂層。The dry film of the present invention is characterized by having a resin layer obtained by coating the negative photocurable resin composition on the film and drying it.

本發明之一種硬化物,其特徵係將前述負型光硬化性樹脂組成物、或將前述乾薄膜之樹脂層硬化所得者。A cured product of the present invention is characterized by being obtained by curing the negative photocurable resin composition or the resin layer of the dry film.

本發明之一種印刷配線板,其特徵係具有前述硬化物。 發明效果A printed wiring board of the present invention is characterized by having the above-mentioned hardened material. Invention effect

依據本發明時,可提供可形成解析性優異,高耐熱性及高延伸率之硬化物的負型光硬化性樹脂組成物、具有由該組成物所得之樹脂層的乾薄膜、其硬化物及具有該硬化物的印刷配線板。 實施發明之形態According to the present invention, there can be provided a negative photocurable resin composition capable of forming a cured product with excellent resolution, high heat resistance and high elongation, a dry film having a resin layer obtained from the composition, a cured product thereof, and the like. A printed wiring board having the cured product. The form in which the invention is carried out

本發明之負型光硬化性樹脂組成物,其特徵係含有(A)鹼可溶性樹脂、(B)具有6員環以上之環狀矽氧烷骨架的有機矽氧烷化合物、及(C)光聚合起始劑,其中前述(B)具有6員環以上之環狀矽氧烷骨架的有機矽氧烷化合物具有下述通式(1)表示的骨架,

Figure 02_image005
(式中,n表示1以上之整數)。   詳細機構雖不明,但是藉由調配(B)具有6員環以上之環狀矽氧烷骨架的有機矽氧烷化合物,意外地可使取捨關係的耐熱性與延伸率同時成立。又,因光暈受抑制,故解析性也良好。The negative-type photocurable resin composition of the present invention is characterized by comprising (A) an alkali-soluble resin, (B) an organosiloxane compound having a cyclosiloxane skeleton of 6 or more membered rings, and (C) a light A polymerization initiator, wherein the aforementioned (B) organosiloxane compound having a cyclic siloxane skeleton having a 6-membered ring or more has a skeleton represented by the following general formula (1),
Figure 02_image005
(In the formula, n represents an integer of 1 or more). Although the detailed mechanism is unknown, by preparing (B) an organosiloxane compound having a cyclosiloxane skeleton having a 6-membered ring or more, unexpectedly, the trade-off relationship between heat resistance and elongation can be established at the same time. In addition, since the halo is suppressed, the resolution is also good.

以下說明本發明之負型光硬化性樹脂組成物之各成分。Each component of the negative photocurable resin composition of the present invention will be described below.

[(A)鹼可溶性樹脂]   (A)鹼可溶性樹脂係含有酚性羥基、巰基、磺基及羧基之中1種以上的官能基,且可溶於鹼溶液的樹脂,較佳為可列舉具有2個以上之酚性羥基的化合物、含羧基之樹脂、具有酚性羥基及羧基的化合物、具有2個以上之巰基的化合物、具有磺基的化合物。(A)鹼可溶性樹脂,更佳為含羧基之樹脂。前述含羧基之樹脂,就光硬化性或耐顯影性的觀點,除了羧基外,分子內具有乙烯性不飽和基為佳,但是也可為不具有乙烯性不飽和基之含羧基之樹脂。乙烯性不飽和基係以來自(甲基)丙烯酸或彼等之衍生物者為佳。又,在此,(甲基)丙烯酸統稱為丙烯酸、甲基丙烯酸及彼等之混合物的用語,其他之類似的敘述也同樣。(A)鹼可溶性樹脂,可1種單獨使用或組合2種以上使用。[(A) Alkali-Soluble Resin] The (A) alkali-soluble resin contains one or more functional groups among phenolic hydroxyl groups, mercapto groups, sulfo groups, and carboxyl groups, and is soluble in an alkali solution. Compounds having two or more phenolic hydroxyl groups, carboxyl group-containing resins, compounds having phenolic hydroxyl groups and carboxyl groups, compounds having two or more mercapto groups, and compounds having sulfo groups. (A) Alkali-soluble resin, more preferably a carboxyl group-containing resin. The aforementioned carboxyl group-containing resin preferably has an ethylenically unsaturated group in the molecule in addition to the carboxyl group from the viewpoint of photocurability or development resistance, but may be a carboxyl group-containing resin that does not have an ethylenically unsaturated group. The ethylenically unsaturated groups are preferably those derived from (meth)acrylic acid or their derivatives. In addition, here, (meth)acrylic acid is collectively referred to as the term of acrylic acid, methacrylic acid, and the mixture of these, and other similar descriptions are also the same. (A) Alkali-soluble resin can be used individually by 1 type or in combination of 2 or more types.

含羧基之樹脂之具體例,可列舉以下所列舉的化合物(可為寡聚物及聚合物之任一)。Specific examples of the carboxyl group-containing resin include compounds listed below (which may be either an oligomer or a polymer).

(1)藉由(甲基)丙烯酸等之不飽和羧酸與苯乙烯、α-甲基苯乙烯、低級烷基(甲基)丙烯酸酯、異丁烯等之含不飽和基之化合物之共聚合所得之含羧基之樹脂。此含羧基之樹脂具有芳香環時,只要不飽和羧酸及含不飽和基之化合物之至少1種具有芳香環即可。(1) Obtained by copolymerization of an unsaturated carboxylic acid such as (meth)acrylic acid and an unsaturated group-containing compound such as styrene, α-methylstyrene, lower alkyl (meth)acrylate, isobutylene, etc. The carboxyl-containing resin. When the carboxyl group-containing resin has an aromatic ring, at least one of the unsaturated carboxylic acid and the unsaturated group-containing compound may have an aromatic ring.

(2)藉由脂肪族二異氰酸酯、分支脂肪族二異氰酸酯、脂環式二異氰酸酯、芳香族二異氰酸酯等之二異氰酸酯與二羥甲基丙酸、二羥甲基丁酸等之含羧基之二醇化合物及聚碳酸酯系多元醇、聚醚系多元醇、聚酯系多元醇、聚烯烴系多元醇、丙烯酸系多元醇、雙酚A系環氧烷(alkylene oxide )加成物二醇、具有酚性羥基及醇性羥基之化合物等之二醇化合物之聚加成反應所得之含羧基之胺基甲酸酯樹脂。此含羧基之胺基甲酸酯樹脂具有芳香環時,二異氰酸酯、含羧基之二醇化合物及二醇化合物之至少1種具有芳香環即可。(2) Diisocyanates such as aliphatic diisocyanates, branched aliphatic diisocyanates, alicyclic diisocyanates, aromatic diisocyanates, etc. and carboxyl group-containing two such as dimethylolpropionic acid, dimethylolbutyric acid, etc. Alcohol compounds, polycarbonate polyols, polyether polyols, polyester polyols, polyolefin polyols, acrylic polyols, bisphenol A-based alkylene oxide adduct diols, Carboxyl group-containing urethane resin obtained by polyaddition reaction of diol compounds such as compounds having phenolic hydroxyl groups and alcoholic hydroxyl groups. When the carboxyl group-containing urethane resin has an aromatic ring, at least one of the diisocyanate, the carboxyl group-containing diol compound, and the diol compound may have an aromatic ring.

(3)脂肪族二異氰酸酯、分支脂肪族二異氰酸酯、脂環式二異氰酸酯、芳香族二異氰酸酯等之二異氰酸酯化合物與聚碳酸酯系多元醇、聚醚系多元醇、聚酯系多元醇、聚烯烴系多元醇、丙烯酸系多元醇、雙酚A系環氧烷加成物二醇、具有酚性羥基及醇性羥基之化合物等之二醇化合物之聚加成反應所得之胺基甲酸酯樹脂之末端與酸酐反應而成之含有末端羧基之胺基甲酸酯樹脂。此含羧基之胺基甲酸酯樹脂具有芳香環時,二異氰酸酯化合物、二醇化合物及酸酐之至少1種具有芳香環即可。(3) Diisocyanate compounds such as aliphatic diisocyanates, branched aliphatic diisocyanates, alicyclic diisocyanates, aromatic diisocyanates, etc., and polycarbonate-based polyols, polyether-based polyols, polyester-based polyols, polyols Urethanes obtained by polyaddition reaction of olefin-based polyols, acrylic-based polyols, bisphenol A-based alkylene oxide adduct diols, and diol compounds having phenolic and alcoholic hydroxyl groups A urethane resin containing a terminal carboxyl group obtained by reacting the terminal of the resin with an acid anhydride. When the carboxyl group-containing urethane resin has an aromatic ring, at least one of the diisocyanate compound, the diol compound, and the acid anhydride may have an aromatic ring.

(4)藉由二異氰酸酯與、雙酚A型環氧樹脂、氫化雙酚A型環氧樹脂、雙酚F型環氧樹脂、雙酚S型環氧樹脂、雙二甲苯酚型環氧樹脂、聯苯二酚型環氧樹脂等之2官能環氧樹脂之(甲基)丙烯酸酯或其部分酸酐改質物、含羧基之二醇化合物及二醇化合物之聚加成反應所得之感光性含羧基之胺基甲酸酯樹脂。此感光性含羧基之胺基甲酸酯樹脂具有芳香環時,二異氰酸酯、2官能環氧樹脂之(甲基)丙烯酸酯或其部分酸酐改質物、含羧基之二醇化合物及二醇化合物之至少1種具有芳香環即可。(4) By diisocyanate and, bisphenol A epoxy resin, hydrogenated bisphenol A epoxy resin, bisphenol F epoxy resin, bisphenol S epoxy resin, bisphenol A epoxy resin, bisphenol A epoxy resin , The photosensitivity obtained by the polyaddition reaction of bifunctional epoxy resins such as biphenol-type epoxy resins (meth)acrylates or their partial acid anhydride modifications, carboxyl-containing diol compounds and diol compounds Carboxylic urethane resin. When this photosensitive carboxyl group-containing urethane resin has an aromatic ring, diisocyanate, (meth)acrylate of bifunctional epoxy resin or its partial acid anhydride modified product, carboxyl group-containing diol compound and diol compound At least one type may have an aromatic ring.

(5)上述(2)或(4)之樹脂合成中,添加羥基烷基(甲基)丙烯酸酯等之分子中具有1個羥基與1個以上之(甲基)丙烯醯基的化合物,進行末端(甲基)丙烯酸化之含羧基之胺基甲酸酯樹脂。此感光性含羧基之胺基甲酸酯樹脂具有芳香環時,分子中具有1個羥基與1個以上之(甲基)丙烯醯基之化合物也可具有芳香環。(5) In the resin synthesis of the above (2) or (4), a compound having one hydroxyl group and one or more (meth)acryloyl groups in the molecule, such as hydroxyalkyl (meth)acrylate, is added, and the Terminal (meth)acrylated carboxyl-containing urethane resin. When this photosensitive carboxyl group-containing urethane resin has an aromatic ring, the compound having one hydroxyl group and one or more (meth)acryloyl groups in the molecule may have an aromatic ring.

(6)上述(2)或(4)之樹脂合成中,添加異佛爾酮二異氰酸酯與季戊四醇三丙烯酸酯之等莫耳反應物等、分子中具有1個異氰酸酯基與1個以上之(甲基)丙烯醯基的化合物,進行末端(甲基)丙烯酸化之含羧基之胺基甲酸酯樹脂。此感光性含羧基之胺基甲酸酯樹脂具有芳香環時,分子中具有1個異氰酸酯基與1個以上之(甲基)丙烯醯基的化合物也可具有芳香環。(6) In the resin synthesis of the above (2) or (4), a molar reaction product such as isophorone diisocyanate and pentaerythritol triacrylate is added, and a molecule having one isocyanate group and one or more (methyl) A carboxyl group-containing urethane resin with terminal (meth)acrylation. When this photosensitive carboxyl group-containing urethane resin has an aromatic ring, the compound having one isocyanate group and one or more (meth)acryloyl groups in the molecule may have an aromatic ring.

(7)使多官能環氧樹脂與(甲基)丙烯酸反應,使鄰苯二甲酸酐、四氫鄰苯二甲酸酐、六氫化鄰苯二甲酸酐等之二元酸酐加成於存在於側鏈之羥基之感光性含羧基之樹脂。此感光性含羧基之樹脂具有芳香環時,多官能環氧樹脂及二元酸酐之至少1種具有芳香環即可。(7) The polyfunctional epoxy resin is reacted with (meth)acrylic acid, and dibasic acid anhydrides such as phthalic anhydride, tetrahydrophthalic anhydride, and hexahydrophthalic anhydride are added to the side Chain hydroxyl group photosensitive resin containing carboxyl group. When this photosensitive carboxyl group-containing resin has an aromatic ring, at least one of the polyfunctional epoxy resin and the dibasic acid anhydride may have an aromatic ring.

(8)使2官能環氧樹脂之羥基再以環氧氯丙烷進行環氧化之多官能環氧樹脂與(甲基)丙烯酸反應,對所生成之羥基加成二元酸酐之感光性含羧基之樹脂。此感光性含羧基之樹脂具有芳香環時,2官能環氧樹脂及二元酸酐之至少1種具有芳香環即可。(8) The hydroxyl group of the bifunctional epoxy resin is then epoxidized with epichlorohydrin to react with (meth)acrylic acid, and the resulting hydroxyl group is added to the photosensitive carboxyl group of the dibasic acid anhydride. resin. When this photosensitive carboxyl group-containing resin has an aromatic ring, at least one of the bifunctional epoxy resin and the dibasic acid anhydride may have an aromatic ring.

(9)使多官能氧雜環丁烷樹脂與二羧酸反應,對生成之一級羥基加成二元酸酐之含羧基之聚酯樹脂。此感光性含羧基之聚酯樹脂具有芳香環時,多官能氧雜環丁烷樹脂、二羧酸及二元酸酐之至少1種具有芳香環即可。(9) Polyfunctional oxetane resin is reacted with dicarboxylic acid, and a carboxyl group-containing polyester resin is added to a dibasic acid anhydride to a primary hydroxyl group. When the photosensitive carboxyl group-containing polyester resin has an aromatic ring, at least one of the polyfunctional oxetane resin, the dicarboxylic acid, and the dibasic acid anhydride may have an aromatic ring.

(10)1分子中具有複數之酚性羥基的化合物與環氧乙烷、環氧丙烷等之環氧烷反應所得之反應生成物,與含不飽和基之單羧酸反應所得之反應生成物,再與多元酸酐反應所得之含羧基之感光性樹脂。(10) A reaction product obtained by reacting a compound having a plurality of phenolic hydroxyl groups in one molecule with an alkylene oxide such as ethylene oxide and propylene oxide, and a reaction product obtained by reacting with an unsaturated group-containing monocarboxylic acid , and then react with polybasic acid anhydride to obtain the photosensitive resin containing carboxyl group.

(11)1分子中具有複數之酚性羥基之化合物與碳酸乙烯酯、碳酸丙烯酯等之環狀碳酸酯化合物反應所得之反應生成物,與含不飽和基之單羧酸反應所得之反應生成物,再與多元酸酐反應所得之含羧基之感光性樹脂。(11) A reaction product obtained by reacting a compound having a plurality of phenolic hydroxyl groups in one molecule with a cyclic carbonate compound such as ethylene carbonate and propylene carbonate, and a reaction product obtained by reacting with an unsaturated group-containing monocarboxylic acid and then react with polybasic acid anhydride to obtain carboxyl group-containing photosensitive resin.

(12)使1分子中具有複數之環氧基之環氧化合物與p-羥基苯乙醇等之1分子中具有至少1個醇性羥基與1個酚性羥基的化合物與(甲基)丙烯酸等之含不飽和基之單羧酸反應所得之反應生成物之醇性羥基,與馬來酸酐、四氫鄰苯二甲酸酐、偏苯三甲酸酐、均苯四甲酸酐、己二酸等之多元酸酐反應而得之含羧基之感光性樹脂。此感光性含羧基之聚酯樹脂具有芳香環時,環氧化合物、1分子中具有至少1個醇性羥基與1個酚性羥基之化合物、含不飽和基之單羧酸及多元酸酐之至少1種具有芳香環即可。(12) Compounds having at least one alcoholic hydroxyl group and one phenolic hydroxyl group in one molecule, such as an epoxy compound having a plurality of epoxy groups in one molecule, and a compound having at least one alcoholic hydroxyl group and one phenolic hydroxyl group, such as p-hydroxyphenethyl alcohol, and (meth)acrylic acid, etc. The alcoholic hydroxyl group of the reaction product obtained by the reaction of the unsaturated group-containing monocarboxylic acid, and the polyvalent of maleic anhydride, tetrahydrophthalic anhydride, trimellitic anhydride, pyromellitic anhydride, adipic acid, etc. Carboxyl-containing photosensitive resin obtained by acid anhydride reaction. When the photosensitive carboxyl group-containing polyester resin has an aromatic ring, at least one of an epoxy compound, a compound having at least one alcoholic hydroxyl group and one phenolic hydroxyl group in one molecule, an unsaturated group-containing monocarboxylic acid and a polybasic acid anhydride Only one type has an aromatic ring.

(13)對上述(1)~(12)之任一樹脂再加成環氧丙基(甲基)丙烯酸酯、α-甲基環氧丙基(甲基)丙烯酸酯等之分子中具有1個環氧基與1個以上之(甲基)丙烯醯基之化合物而成之感光性含羧基之樹脂。此感光性含羧基之胺基甲酸酯樹脂具有芳香環時,分子中具有1個環氧基與1個以上之(甲基)丙烯醯基的化合物也可具有芳香環。(13) Add glycidyl (meth)acrylate, α-methylglycidyl (meth)acrylate, etc. to any of the above resins (1) to (12), and have 1 in the molecule A photosensitive carboxyl group-containing resin composed of a compound of one epoxy group and one or more (meth)acryloyl groups. When this photosensitive carboxyl group-containing urethane resin has an aromatic ring, the compound having one epoxy group and one or more (meth)acryloyl groups in the molecule may have an aromatic ring.

(14)藉由含羧基之(甲基)丙烯酸系共聚樹脂與1分子中具有環氧乙烷環與乙烯性不飽和基的化合物之反應所得之感光性之含羧基之樹脂。(14) A photosensitive carboxyl group-containing resin obtained by reacting a carboxyl group-containing (meth)acrylic copolymer resin with a compound having an ethylene oxide ring and an ethylenically unsaturated group in one molecule.

(15)1分子中分別具有1個環氧基與不飽和雙鍵的化合物與、具有不飽和雙鍵之化合物之共聚物,與不飽和單羧酸反應,使生成之二級羥基與飽和或不飽和多元酸酐反應所得之感光性之含羧基之樹脂。(15) A copolymer of a compound having one epoxy group and an unsaturated double bond in one molecule and a compound having an unsaturated double bond, respectively, reacts with an unsaturated monocarboxylic acid to make the generated secondary hydroxyl group and saturated or The photosensitive carboxyl group-containing resin obtained by the reaction of unsaturated polybasic acid anhydrides.

(16)含羥基之聚合物與飽和或不飽和多元酸酐反應後,使生成之羧酸與1分子中分別具有1個環氧基與不飽和雙鍵的化合物反應所得之感光性之含羥基及羧基之樹脂。(16) A photosensitive hydroxyl group-containing polymer obtained by reacting a hydroxyl group-containing polymer with a saturated or unsaturated polybasic acid anhydride, and reacting the resulting carboxylic acid with a compound having one epoxy group and an unsaturated double bond in each molecule. Carboxyl resin.

如上述之含羧基之樹脂係因在主鏈、聚合物之側鏈具有多數羧基,故可藉由鹼水溶液顯影。The above-mentioned carboxyl group-containing resin has many carboxyl groups in the main chain and the side chain of the polymer, so it can be developed by an alkaline aqueous solution.

又,鹼可溶性樹脂也可適合使用具有下述式(2)或(3)表示之至少一者之醯胺醯亞胺構造的鹼可溶性樹脂。因包含環己烷環或具有直接與苯環鍵結之醯亞胺鍵的樹脂,因此可得到更強靭性及耐熱性優異的硬化物。特別是具有下述(2)表示之構造的醯胺醯亞胺樹脂,因光之透過性優異,故可進一步提高樹脂組成物之解析性。具有下述式(2)或(3)表示之至少一者之醯胺醯亞胺構造的鹼可溶性樹脂具有透明性者為佳,例如乾燥塗膜25μm中,波長365nm之光的透過率係以70%以上為佳。Moreover, the alkali-soluble resin which has an amide imide structure represented by at least one of following formula (2) or (3) can also be used suitably as an alkali-soluble resin. Since it contains a cyclohexane ring or a resin having an imide bond directly bonded to a benzene ring, a cured product with stronger toughness and excellent heat resistance can be obtained. In particular, the amide imide resin having the structure represented by the following (2) is excellent in light transmittance, so that the resolution of the resin composition can be further improved. The alkali-soluble resin having an amide imide structure represented by at least one of the following formulas (2) or (3) is preferably transparent. For example, in a dry coating film of 25 μm, the transmittance of light with a wavelength of 365 nm is More than 70% is better.

Figure 02_image007
Figure 02_image009
Figure 02_image007
Figure 02_image009

具有上述醯胺醯亞胺構造之鹼可溶性樹脂中之式(2)及(3)之構造的含量係以10~70質量%為佳。藉由使用此樹脂,可得到溶劑溶解性優異,且耐熱性、拉伸強度或伸度等之物性及尺寸安定性優異之硬化物。較佳為10~60質量%,更佳為20~50質量%。The content of the structures of the formulae (2) and (3) in the alkali-soluble resin having the above-mentioned amide imide structure is preferably 10 to 70 mass %. By using this resin, it is possible to obtain a cured product which is excellent in solvent solubility, and excellent in physical properties such as heat resistance, tensile strength and elongation, and dimensional stability. Preferably it is 10-60 mass %, More preferably, it is 20-50 mass %.

具有式(2)表示之醯胺醯亞胺構造的鹼可溶性樹脂,特別是具有下述式(4A)或(4B)

Figure 02_image011
(式(4A)及(4B)中,各自R為1價之有機基,以H、CF3 或CH3 為佳,X為直接鍵結或2價有機基,以直接鍵結、CH2 或C(CH3 )2 等之伸烷基為佳)表示之構造的樹脂,因拉伸強度或伸度等之物性及尺寸安定性優異,故較佳。就溶解性或機械物性的觀點,具有式(2)之構造的醯胺醯亞胺樹脂,可適合使用具有10~100質量%之式(4A)及(4B)之構造的樹脂。更佳為20~80質量%。Alkali-soluble resins having an amide imide structure represented by the formula (2), especially those having the following formula (4A) or (4B)
Figure 02_image011
(In formulas (4A) and (4B), each R is a monovalent organic group, preferably H, CF 3 or CH 3 , X is a direct bond or a divalent organic group, with a direct bond, CH 2 or A resin having a structure represented by an alkylene group such as C(CH 3 ) 2 is preferable) is preferable because it is excellent in physical properties such as tensile strength and elongation and dimensional stability. From the viewpoint of solubility or mechanical properties, as the amide imide resin having the structure of formula (2), resins having the structure of formula (4A) and (4B) in an amount of 10 to 100 mass % can be suitably used. More preferably, it is 20-80 mass %.

又,具有式(2)之構造的醯胺醯亞胺樹脂,就溶解性或機械物性的觀點,較佳為使用含有5~100莫耳%之式(4A)及(4B)之構造的醯胺醯亞胺樹脂。更佳為5~98莫耳%,又更佳為10~98莫耳%,又特佳為20~80莫耳%。In addition, as the amide imide resin having the structure of the formula (2), it is preferable to use an amide containing 5 to 100 mol% of the structure of the formula (4A) and (4B) from the viewpoint of solubility and mechanical properties. Amine imide resin. More preferably, it is 5-98 mol %, still more preferably 10-98 mol %, and still more preferably 20-80 mol %.

又,具有式(3)表示之醯胺醯亞胺構造的鹼可溶性樹脂,特別是具有式(5A)或(5B)

Figure 02_image013
(式(5A)及(5B)中,各自R為1價有機基,以H、CF3 或CH3 為佳,X為直接鍵結或2價有機基,以直接鍵結、CH2 或C(CH3 )2 等之伸烷基為佳)表示之構造的樹脂,因可得到拉伸強度或伸度等之機械物性優異之硬化物,故較佳。就溶解性或機械物性的觀點,具有式(3)之構造的醯胺醯亞胺樹脂,較佳為使用含有10~100質量%之式(5A)及(5B)之構造的樹脂。更佳為20~80質量%。Moreover, the alkali-soluble resin having the amide imide structure represented by the formula (3), in particular, has the formula (5A) or (5B)
Figure 02_image013
(In formula (5A) and (5B), each R is a monovalent organic group, preferably H, CF3 or CH3 , X is a direct bond or a divalent organic group, with a direct bond, CH2 or C A resin having a structure represented by an alkylene group such as (CH 3 ) 2 is preferable) is preferable because a cured product having excellent mechanical properties such as tensile strength and elongation can be obtained. From the viewpoint of solubility or mechanical properties, the amide imide resin having the structure of formula (3) is preferably a resin containing 10 to 100 mass % of the structure of formula (5A) and (5B). More preferably, it is 20-80 mass %.

具有式(3)之構造的醯胺醯亞胺樹脂,就展現良好機械物性的理由,較佳為使用含有2~95莫耳%之式(5A)及(5B)之構造的醯胺醯亞胺樹脂。更佳為10~80莫耳%。For the amide imide resin having the structure of the formula (3), it is preferable to use an amide imide resin containing 2 to 95 mol% of the structure of the formula (5A) and (5B) for the reason of exhibiting good mechanical properties. Amine resin. More preferably, it is 10-80 mol%.

具有醯胺醯亞胺構造之鹼可溶性樹脂,可藉由習知的方法製得。具有式(2)之構造的醯胺醯亞胺樹脂,例如可使用具有聯苯骨架之二異氰酸酯化合物與環己烷聚羧酸酐而得。The alkali-soluble resin having an amide imide structure can be obtained by a known method. The amide imide resin having the structure of the formula (2) can be obtained, for example, by using a diisocyanate compound having a biphenyl skeleton and a cyclohexane polycarboxylic acid anhydride.

具有聯苯骨架之二異氰酸酯化合物,可列舉4,4’-二異氰酸酯-3,3’-二甲基-1,1’-聯苯、4,4’-二異氰酸酯-3,3’-二乙基-1,1’-聯苯、4,4’-二異氰酸酯-2,2’-二甲基-1,1’-聯苯、4,4’-二異氰酸酯-2,2’-二乙基-1,1’-聯苯、4,4’-二異氰酸酯-3,3’-二(三氟甲基)-1,1’-聯苯、4,4’-二異氰酸酯-2,2’-二(三氟甲基)-1,1’-聯苯等。其他,也可使用二苯基甲烷二異氰酸酯等之芳香族聚異氰酸酯化合物等。Diisocyanate compounds having a biphenyl skeleton include 4,4'-diisocyanate-3,3'-dimethyl-1,1'-biphenyl, 4,4'-diisocyanate-3,3'-diphenyl Ethyl-1,1'-biphenyl, 4,4'-diisocyanate-2,2'-dimethyl-1,1'-biphenyl, 4,4'-diisocyanate-2,2'-diphenyl Ethyl-1,1'-biphenyl, 4,4'-diisocyanate-3,3'-bis(trifluoromethyl)-1,1'-biphenyl, 4,4'-diisocyanate-2, 2'-bis(trifluoromethyl)-1,1'-biphenyl, etc. In addition, aromatic polyisocyanate compounds, such as diphenylmethane diisocyanate, etc. can also be used.

環己烷聚羧酸酐,可列舉環己烷三羧酸酐、環己烷四羧酸酐等。Cyclohexane polycarboxylic acid anhydride, cyclohexane tricarboxylic acid anhydride, cyclohexane tetracarboxylic acid anhydride, etc. are mentioned.

又,具有式(3)之構造的醯胺醯亞胺樹脂,例如可使用上述具有聯苯骨架之二異氰酸酯化合物與具有2個酸酐基之聚羧酸酐而得。Moreover, the amide imide resin which has the structure of Formula (3) can be obtained, for example by using the diisocyanate compound which has the said biphenyl skeleton, and the polycarboxylic acid anhydride which has two acid anhydride groups.

具有2個酸酐基之聚羧酸酐,可列舉均苯四甲酸二酐、二苯甲酮-3,3’,4,4’-四羧酸二酐、二苯醚-3,3’,4,4’-四羧酸二酐、苯-1,2,3,4-四羧酸二酐、聯苯基-3,3’,4,4’-四羧酸二酐、聯苯基-2,2’,3,3’-四羧酸二酐、雙(2,3-二羧基苯基)甲烷二酐、雙(3,4-二羧基苯基)甲烷二酐、1,1-雙(2,3-二羧基苯基)乙烷二酐、1,1-雙(3,4-二羧基苯基)乙烷二酐、2,2-雙(2,3-二羧基苯基)丙烷二酸酐、2,3-雙(3,4-二羧基苯基)丙烷二酸酐、雙(3,4-二羧基苯基)碸二酐、雙(3,4-二羧基苯基)醚二酸酐、乙二醇雙偏苯三甲酸酐等之伸烷二醇雙偏苯三甲酸酐等。Polycarboxylic anhydrides having two acid anhydride groups include pyromellitic dianhydride, benzophenone-3,3',4,4'-tetracarboxylic dianhydride, and diphenyl ether-3,3',4 ,4'-tetracarboxylic dianhydride, benzene-1,2,3,4-tetracarboxylic dianhydride, biphenyl-3,3',4,4'-tetracarboxylic dianhydride, biphenyl- 2,2',3,3'-tetracarboxylic dianhydride, bis(2,3-dicarboxyphenyl)methane dianhydride, bis(3,4-dicarboxyphenyl)methane dianhydride, 1,1- Bis(2,3-dicarboxyphenyl)ethanedianhydride, 1,1-bis(3,4-dicarboxyphenyl)ethanedianhydride, 2,2-bis(2,3-dicarboxyphenyl) ) propane dianhydride, 2,3-bis(3,4-dicarboxyphenyl) propane dianhydride, bis(3,4-dicarboxyphenyl) bis(3,4-dicarboxyphenyl) bis(3,4-dicarboxyphenyl) Ether dianhydride, ethylene glycol bis-trimellitic anhydride, etc., alkylene glycol bis-trimellitic anhydride, etc.

又,具有上述醯胺醯亞胺構造之鹼可溶性樹脂之具體例,可列舉DIC公司製UNIDIC V-8000系列、Nippon高度紙工業公司製SOXR-U。Moreover, as a specific example of the alkali-soluble resin which has the said amide imide structure, the UNIDIC V-8000 series by DIC Corporation and SOXR-U by Nippon Advanced Paper Industries are mentioned.

(A)鹼可溶性樹脂之酸價係以20~120mgKOH/g之範圍為佳,更佳為30~100mgKOH/g之範圍。藉由使(A)鹼可溶性樹脂之酸價在上述範圍,可良好地鹼顯影,可形成正常硬化物的圖型。本發明之樹脂組成物之(A)鹼可溶性樹脂的重量平均分子量係因樹脂骨架而異,但是一般以2,000~150,000為佳。重量平均分子量為2,000以上時,乾燥塗膜之不黏手性、曝光後之塗膜之耐濕性良好,解析性也更良好。而重量平均分子量為150,000以下時,顯影性與儲存安定性良好。更佳為5,000~100,000。(A) The acid value of the alkali-soluble resin is preferably in the range of 20 to 120 mgKOH/g, more preferably in the range of 30 to 100 mgKOH/g. By making the acid value of the (A) alkali-soluble resin in the above-mentioned range, favorable alkali development can be achieved, and a pattern of a normal cured product can be formed. The weight average molecular weight of the (A) alkali-soluble resin of the resin composition of the present invention varies depending on the resin skeleton, but is generally preferably 2,000 to 150,000. When the weight-average molecular weight is 2,000 or more, the non-stick chirality of the dry coating film, the moisture resistance of the coating film after exposure are good, and the resolution is also more favorable. On the other hand, when the weight average molecular weight is 150,000 or less, the developability and storage stability are good. More preferably, it is 5,000 to 100,000.

[(B)具有6員環以上之環狀矽氧烷骨架的有機矽氧烷化合物]   (B)具有6員環以上之環狀矽氧烷骨架的有機矽氧烷化合物(以下也稱為「(B)有機矽氧烷化合物」),使用具有下述通式(1)表示之6員環以上之環狀矽氧烷骨架之公知慣用的化合物即可。

Figure 02_image015
(式中,n表示1以上之整數)   又,環狀矽氧烷骨架為6~12員環(亦即通式(1)中之n為1~4之整數)為佳,6~8員環(亦即通式(1)中之n為1或2)更佳。[(B) Organosiloxane compound having a cyclosiloxane skeleton with 6 or more membered rings] (B) Organosiloxane compound having a cyclic siloxane skeleton with 6 or more membered rings (hereinafter also referred to as "" (B) "Organosiloxane compound"), a known and conventional compound having a cyclosiloxane skeleton of 6 or more membered rings represented by the following general formula (1) may be used.
Figure 02_image015
(in the formula, n represents an integer of 1 or more) In addition, the cyclic siloxane skeleton is preferably a 6-12-membered ring (that is, n in the general formula (1) is an integer of 1-4), and 6-8 membered rings are preferred. Ring (ie, n in formula (1) is 1 or 2) is more preferred.

(B)有機矽氧烷化合物係以具有熱硬化性反應基為佳。具有熱硬化性反應基時,提高密著性,故較佳。熱硬化性反應基,可列舉羥基、羧基、異氰酸酯基、胺基、亞胺基、環氧基、氧雜環丁烷基、巰基、甲氧基甲基、甲氧基乙基、乙氧基甲基、乙氧基乙基、噁唑啉基(Oxazoline Group)等。其中,較佳為環氧基。又,就保存安定性(壽命)的觀點,具有作為環氧環己烷基( cyclohexene oxide group)基之環氧基為更佳。又,(B)有機矽氧烷化合物具有熱硬化性反應基時,熱硬化性反應基之官能基數係以1~6為佳,更佳為1~4。The organosiloxane compound (B) preferably has a thermosetting reactive group. When it has a thermosetting reactive group, it is preferable to improve adhesion. The thermosetting reactive group includes a hydroxyl group, a carboxyl group, an isocyanate group, an amino group, an imino group, an epoxy group, an oxetanyl group, a mercapto group, a methoxymethyl group, a methoxyethyl group, and an ethoxy group. Methyl, ethoxyethyl, oxazoline group (Oxazoline Group) and the like. Among them, an epoxy group is preferable. Moreover, from the viewpoint of storage stability (lifetime), it is more preferable to have an epoxy group as a cyclohexene oxide group. Moreover, when the (B) organosiloxane compound has a thermosetting reactive group, the functional group number of the thermosetting reactive group is preferably 1-6, more preferably 1-4.

(B)有機矽氧烷化合物也可具有感光性基。具有感光性基時,可防止滲出(bleed),故較佳。感光性基,可列舉乙烯基、苯乙烯基、甲基丙烯醯基、丙烯醯基等之乙烯性不飽和基。其中,以乙烯基、苯乙烯基、甲基丙烯醯基、丙烯醯基為佳。(B)有機矽氧烷化合物具有感光性基時,感光性基之官能基數,以1~6為佳,更佳為1~4。(B) The organosiloxane compound may have a photosensitive group. When it has a photosensitive group, it can prevent bleeding (bleed), so it is preferable. The photosensitive group includes ethylenically unsaturated groups such as vinyl, styryl, methacryloyl, and acryl. Among them, vinyl group, styryl group, methacryloyl group, and acryl group are preferable. (B) When the organosiloxane compound has a photosensitive group, the number of functional groups of the photosensitive group is preferably 1-6, more preferably 1-4.

(B)有機矽氧烷化合物也可具有熱硬化性反應基與感光性基之兩者。具有兩者時,可平衡良好實現提高耐熱性、密著性及防止滲出。(B) The organosiloxane compound may have both a thermosetting reactive group and a photosensitive group. When both are present, the improvement of heat resistance, adhesiveness, and bleed prevention can be achieved in a well-balanced manner.

熱硬化性反應基及感光性基,分別直接或經由有機基與通式(1)表示之6員環以上之環狀矽氧烷骨架之Si原子鍵結為佳。前述有機基可為分支,也可為具有羥基等之取代基,又,也可被氧原子、硫原子、羰基、酯基等中斷。前述有機基之碳原子數係以1~10為佳,以2~8為更佳。The thermosetting reactive group and the photosensitive group are preferably bonded to the Si atom of the 6-membered or more cyclic siloxane skeleton represented by the general formula (1), either directly or via an organic group. The aforementioned organic group may be branched, may have a substituent such as a hydroxyl group, or may be interrupted by an oxygen atom, a sulfur atom, a carbonyl group, an ester group, or the like. The number of carbon atoms of the aforementioned organic group is preferably 1-10, more preferably 2-8.

(B)有機矽氧烷化合物之市售品,可列舉信越Silicone公司製X-40-2670、X-40-2678、DMI公司製CX-783、和光純藥公司製1,3,5-三乙烯基-1,3,5-三甲基環三矽氧烷等。(B) Commercial products of organosiloxane compounds include X-40-2670, X-40-2678, manufactured by Shin-Etsu Silicone, CX-783, manufactured by DMI, and 1,3,5-tris, manufactured by Wako Pure Chemical Industries, Ltd. Vinyl-1,3,5-trimethylcyclotrisiloxane, etc.

(B)有機矽氧烷化合物之具體例,可列舉下述的化合物,但是不限定於此等。(B) Specific examples of the organosiloxane compound include, but are not limited to, the following compounds.

Figure 02_image017
Figure 02_image017

Figure 02_image019
Figure 02_image019

Figure 02_image021
Figure 02_image021

(B)有機矽氧烷化合物可1種單獨使用,亦可組合2種以上來使用。(B)有機矽氧烷化合物之調配量係相對於(A)鹼可溶性樹脂100質量份,為1~200質量份,更佳為5~100質量份。(B) The organosiloxane compound may be used alone or in combination of two or more. (B) The compounding quantity of an organosiloxane compound is 1-200 mass parts with respect to 100 mass parts of (A) alkali-soluble resin, More preferably, it is 5-100 mass parts.

[(C)光聚合起始劑]   (C)光聚合起始劑只要是作為光聚合起始劑或光自由基發生劑為公知的光聚合起始劑時,任一者皆可使用。[(C) Photopolymerization initiator] The (C) photopolymerization initiator can be used as long as it is a known photopolymerization initiator or a photoradical generator.

(C)光聚合起始劑,可列舉例如雙-(2,6-二氯苯甲醯基)苯基膦氧化物、雙-(2,6-二氯苯甲醯基)-2,5-二甲基苯基膦氧化物、雙-(2,6-二氯苯甲醯基)-4-丙基苯基膦氧化物、雙-(2,6-二氯苯甲醯基)-1-萘基膦氧化物、雙-(2,6-二甲氧基苯甲醯基)苯基膦氧化物、雙-(2,6-二甲氧基苯甲醯基)-2,4,4-三甲基戊基膦氧化物、雙-(2,6-二甲氧基苯甲醯基)-2,5-二甲基苯基膦氧化物、雙-(2,4,6-三甲基苯甲醯基)-苯基膦氧化物(BASF JAPAN公司製、IRGACURE819)等之雙醯基膦氧化物類;2,6-二甲氧基苯甲醯基二苯基膦氧化物、2,6-二氯苯甲醯基二苯基膦氧化物、2,4,6-三甲基苯甲醯基苯基膦酸甲酯、2-甲基苯甲醯基二苯基膦氧化物、三甲基乙醯基苯基膦酸異丙酯、2,4,6-三甲基苯甲醯基二苯基膦氧化物(BASF JAPAN公司製、DAROCUR TPO)等之單醯基膦氧化物類;1-羥基-環己基苯基酮、1-[4-(2-羥基乙氧基)-苯基]-2-羥基-2-甲基-1-丙烷-1-酮、2-羥基-1-{4-[4-(2-羥基-2-甲基-丙醯基)-苄基]苯基}-2-甲基-丙烷-1-酮、2-羥基-2-甲基-1-苯基丙烷-1-酮等之羥基苯乙酮類;苯偶姻、苄基、苯偶姻甲醚、苯偶姻乙醚、苯偶姻n-丙醚、苯偶姻異丙醚、苯偶姻n-丁醚等之苯偶姻類;苯偶姻烷醚類;二苯甲酮、p-甲基二苯甲酮、米希勒酮、甲基二苯甲酮、4,4’-二氯二苯甲酮、4,4’-雙二乙基胺基二苯甲酮等之二苯甲酮類;苯乙酮、2,2-二甲氧基-2-苯基苯乙酮、2,2-二乙氧基-2-苯基苯乙酮、1,1-二氯苯乙酮、1-羥基環己基苯基酮、2-甲基-1-[4-(甲基硫基)苯基]-2-嗎啉基-1-丙酮、2-苄基-2-二甲基胺基-1-(4-嗎啉基苯基)-丁酮-1(BASF JAPAN公司製、IRGACURE369)、2-(二甲基胺基)-2-[(4-甲基苯基)甲基)-1-[4-(4-嗎啉基)苯基]-1-丁酮、N,N-二甲基胺基苯乙酮等之苯乙酮類;噻噸酮、2-乙基噻噸酮、2-異丙基噻噸酮、2,4-二甲基噻噸酮、2,4-二乙基噻噸酮、2-氯噻噸酮、2,4-二異丙基噻噸酮等之噻噸酮類;蒽醌、氯蒽醌、2-甲基蒽醌、2-乙基蒽醌、2-tert-丁基蒽醌、1-氯蒽醌、2-戊基蒽醌、2-胺基蒽醌等之蒽醌類;苯乙酮二甲基縮醛、苄基二甲基縮醛等之縮醛類;乙基-4-二甲基胺基苯甲酸酯、2-(二甲基胺基)乙基苯甲酸酯、p-二甲基苯甲酸乙酯等之苯甲酸酯類;1,2-辛烷二酮,1-[4-(苯硫基)-,2-(O-苯甲醯肟)]、乙酮,1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]-,1-(O-乙醯氧基肟)(BASF JAPAN公司製、IRGACURE OXE-02)等之肟酯類;雙(η5-2,4-環戊二烯-1-基)-雙(2,6-二氟-3-(1H-吡咯-1-基)苯基)鈦、雙(環戊二烯基)-雙〔2,6-二氟-3-(2-(1-吡咯-1-基)乙基)苯基]鈦等之二茂鈦類;苯基二硫醚2-硝基茀、丁偶因(Butyroin)、大茴香偶因(Anisoin)乙醚、偶氮雙異丁腈、四甲基秋蘭姆二硫化物等。(C)光聚合起始劑可1種可單獨使用,亦可組合2種以上來使用。(C) Photopolymerization initiator, for example, bis-(2,6-dichlorobenzyl)phenylphosphine oxide, bis-(2,6-dichlorobenzyl)-2,5 -Dimethylphenylphosphine oxide, bis-(2,6-dichlorobenzyl)-4-propylphenylphosphine oxide, bis-(2,6-dichlorobenzyl)- 1-Naphthylphosphine oxide, bis-(2,6-dimethoxybenzyl)phenylphosphine oxide, bis-(2,6-dimethoxybenzyl)-2,4 ,4-trimethylpentylphosphine oxide, bis-(2,6-dimethoxybenzyl)-2,5-dimethylphenylphosphine oxide, bis-(2,4,6 -Trimethylbenzyl)-phenylphosphine oxide (BASF JAPAN company, IRGACURE819) and other bis-phosphoryl phosphine oxides; 2,6-dimethoxybenzyl diphenylphosphine oxide compound, 2,6-dichlorobenzyldiphenylphosphine oxide, methyl 2,4,6-trimethylbenzylphenylphosphonate, 2-methylbenzyldiphenyl Phosphine oxide, isopropyl trimethylacetylphenylphosphonate, 2,4,6-trimethylbenzyldiphenylphosphine oxide (manufactured by BASF JAPAN, DAROCUR TPO), etc. Phosphine oxides; 1-Hydroxy-cyclohexyl phenyl ketone, 1-[4-(2-hydroxyethoxy)-phenyl]-2-hydroxy-2-methyl-1-propan-1-one , 2-hydroxy-1-{4-[4-(2-hydroxy-2-methyl-propionyl)-benzyl]phenyl}-2-methyl-propan-1-one, 2-hydroxy- Hydroxyacetophenones such as 2-methyl-1-phenylpropan-1-one; benzoin, benzyl, benzoin methyl ether, benzoin ethyl ether, benzoin n-propyl ether, benzoin In isopropyl ether, benzoin n-butyl ether and other benzoins; benzoin alkyl ethers; benzophenone, p-methyl benzophenone, Michler's ketone, methyl diphenylmethane Ketones, 4,4'-dichlorobenzophenone, 4,4'-bis-diethylaminobenzophenone and other benzophenones; acetophenone, 2,2-dimethoxy- 2-Phenylacetophenone, 2,2-diethoxy-2-phenylacetophenone, 1,1-dichloroacetophenone, 1-hydroxycyclohexylphenone, 2-methyl-1 -[4-(Methylsulfanyl)phenyl]-2-morpholinyl-1-propanone, 2-benzyl-2-dimethylamino-1-(4-morpholinylphenyl)-butyl Keto-1 (manufactured by BASF JAPAN, IRGACURE369), 2-(dimethylamino)-2-[(4-methylphenyl)methyl)-1-[4-(4-morpholino)benzene Acetophenones such as]-1-butanone, N,N-dimethylaminoacetophenone; thioxanthone, 2-ethylthioxanthone, 2-isopropylthioxanthone, 2, 4-Dimethylthioxanthone, 2,4-diethylthioxanthone, 2-chlorothioxanthone, 2,4-diisopropylthioxanthone and other thioxanthones; anthraquinone, chloroanthracene Anthraquinones such as quinone, 2-methylanthraquinone, 2-ethylanthraquinone, 2-tert-butylanthraquinone, 1-chloroanthraquinone, 2-amylanthraquinone, 2-aminoanthraquinone, etc.; Acetophenone dimethyl acetal, Acetals such as benzyl dimethyl acetal; ethyl-4-dimethylaminobenzoate, 2-(dimethylamino)ethylbenzoate, p-dimethylbenzene Parabens such as ethyl formate; 1,2-octanedione, 1-[4-(phenylthio)-,2-(O-benzyl oxime)], ethyl ketone, 1-[9 -Ethyl-6-(2-methylbenzyl)-9H-carbazol-3-yl]-,1-(O-acetyloxyoxime) (manufactured by BASF JAPAN, IRGACURE OXE-02) Oxime esters such as; bis(η5-2,4-cyclopentadien-1-yl)-bis(2,6-difluoro-3-(1H-pyrrol-1-yl)phenyl)titanium, bis(2,6-difluoro-3-(1H-pyrrol-1-yl)phenyl)titanium (Cyclopentadienyl)-bis[2,6-difluoro-3-(2-(1-pyrrol-1-yl)ethyl)phenyl]titanocenes such as titanium; phenyl disulfide 2-Nitropyridine, Butyroin, Anisoin ether, azobisisobutyronitrile, tetramethylthiuram disulfide, etc. (C) A photopolymerization initiator may be used individually by 1 type, and may be used in combination of 2 or more types.

(C)光聚合起始劑之調配量,以固體成分換算,相對於(A)鹼可溶性樹脂100質量份,較佳為0.01~50質量份,更佳為0.1~30質量份。(C) The compounding quantity of a photopolymerization initiator is a solid content conversion, Preferably it is 0.01-50 mass parts with respect to 100 mass parts of (A) alkali-soluble resin, More preferably, it is 0.1-30 mass parts.

(具有乙烯性不飽和基的化合物)   本發明之負型光硬化性樹脂組成物,可含有具有乙烯性不飽和基的化合物。又,本說明書中,(A)~(C)成分具有乙烯性不飽和基時,該種化合物係自「具有乙烯性不飽和基的化合物」中去除。(Compound having ethylenically unsaturated group) The negative photocurable resin composition of the present invention may contain a compound having an ethylenically unsaturated group. In addition, in this specification, when components (A)-(C) have an ethylenically unsaturated group, such a compound is removed from "the compound which has an ethylenically unsaturated group".

具有乙烯性不飽和基的化合物,可使用公知慣用之光聚合性寡聚物、及光聚合性乙烯基單體等。其中,光聚合性寡聚物可列舉不飽和聚酯系寡聚物、(甲基)丙烯酸酯系寡聚物等。(甲基)丙烯酸酯系寡聚物,可列舉苯酚酚醛清漆環氧(甲基)丙烯酸酯、甲酚酚醛清漆環氧(甲基)丙烯酸酯、雙酚型環氧(甲基)丙烯酸酯等之環氧(甲基)丙烯酸酯、胺基甲酸酯(甲基)丙烯酸酯、環氧基胺基甲酸酯(甲基)丙烯酸酯、聚酯(甲基)丙烯酸酯、聚醚(甲基)丙烯酸酯、聚丁二烯改質(甲基)丙烯酸酯等。As a compound which has an ethylenically unsaturated group, a well-known and usual photopolymerizable oligomer, a photopolymerizable vinyl monomer, etc. can be used. Among them, the photopolymerizable oligomers include unsaturated polyester-based oligomers, (meth)acrylate-based oligomers, and the like. (Meth)acrylate-based oligomers include phenol novolak epoxy (meth)acrylate, cresol novolak epoxy (meth)acrylate, bisphenol epoxy (meth)acrylate, and the like epoxy (meth)acrylate, urethane (meth)acrylate, epoxy urethane (meth)acrylate, polyester (meth)acrylate, polyether (meth)acrylate base) acrylate, polybutadiene modified (meth)acrylate, etc.

光聚合性乙烯基單體,可列舉公知慣用者,例如苯乙烯、氯苯乙烯、α-甲基苯乙烯等之苯乙烯衍生物;乙酸乙烯酯、丁酸乙烯酯或苯甲酸乙烯酯等之乙烯酯類;乙烯基異丁醚、乙烯基-n-丁醚、乙烯基-t-丁醚、乙烯基-n-戊醚、乙烯基異戊醚、乙烯基-n-十八烷醚、乙烯基環己醚、乙二醇單丁基乙烯醚、三乙二醇單甲基乙烯醚等之乙烯醚類;丙烯醯胺、甲基丙烯醯胺、N-羥基甲基丙烯醯胺、N-羥基甲基甲基丙烯醯胺、N-甲氧基甲基丙烯醯胺、N-乙氧基甲基丙烯醯胺、N-丁氧基甲基丙烯醯胺等之(甲基)丙烯醯胺類;三烯丙基異三聚氰酸酯、鄰苯二甲酸二烯丙酯、間苯二甲酸二烯丙酯等之烯丙酯化合物;2-乙基己基(甲基)丙烯酸酯、月桂基(甲基)丙烯酸酯、四氫糠基(Furfuryl)(甲基)丙烯酸酯、異莰基(甲基)丙烯酸酯、苯基(甲基)丙烯酸酯、苯氧基乙基(甲基)丙烯酸酯等之(甲基)丙烯酸之酯類;羥基乙基(甲基)丙烯酸酯、羥基丙基(甲基)丙烯酸酯、季戊四醇三(甲基)丙烯酸酯等之羥基烷基(甲基)丙烯酸酯類;甲氧基乙基(甲基)丙烯酸酯、乙氧基乙基(甲基)丙烯酸酯等之烷氧基伸烷二醇單(甲基)丙烯酸酯類;乙二醇二(甲基)丙烯酸酯、丁二醇二(甲基)丙烯酸酯類、新戊二醇二(甲基)丙烯酸酯、1,6-己二醇二(甲基)丙烯酸酯、三羥甲基丙烷三(甲基)丙烯酸酯、季戊四醇四(甲基)丙烯酸酯、二季戊四醇六(甲基)丙烯酸酯等之伸烷基多元醇聚(甲基)丙烯酸酯;二乙二醇二(甲基)丙烯酸酯、三乙二醇二(甲基)丙烯酸酯、乙氧基化三羥甲基丙烷三丙烯酸酯、丙氧基化三羥甲基丙烷三(甲基)丙烯酸酯等之聚氧烷二醇聚(甲基)丙烯酸酯類;羥基新戊酸新戊二醇酯二(甲基)丙烯酸酯等之聚(甲基)丙烯酸酯類;三[(甲基)丙烯醯氧基乙基]異三聚氰酸酯等之異氰脲酸酯(isocyanurate)型聚(甲基)丙烯酸酯類等。The photopolymerizable vinyl monomers include well-known ones, such as styrene derivatives of styrene, chlorostyrene, α-methylstyrene, etc.; vinyl acetate, vinyl butyrate, vinyl benzoate, etc. Vinyl esters; vinyl isobutyl ether, vinyl-n-butyl ether, vinyl-t-butyl ether, vinyl-n-pentyl ether, vinyl isoamyl ether, vinyl-n-octadecyl ether, Vinyl cyclohexyl ether, ethylene glycol monobutyl vinyl ether, triethylene glycol monomethyl vinyl ether and other vinyl ethers; acrylamide, methacrylamide, N-hydroxymethyl acrylamide, N -(Meth)acrylamides such as hydroxymethyl methacrylamide, N-methoxymethacrylamide, N-ethoxymethacrylamide, N-butoxymethacrylamide, etc. Amines; allyl compounds of triallyl isocyanurate, diallyl phthalate, diallyl isophthalate, etc.; 2-ethylhexyl (meth)acrylate, Lauryl (meth)acrylate, Tetrahydrofurfuryl (Furfuryl) (meth)acrylate, Isobornyl (meth)acrylate, Phenyl (meth)acrylate, Phenoxyethyl (meth)acrylate ) (meth)acrylic acid esters such as acrylates; hydroxyalkyl (methyl) hydroxyethyl (meth)acrylate, hydroxypropyl (meth)acrylate, pentaerythritol tri(meth)acrylate, etc. ) acrylates; methoxyethyl (meth)acrylate, ethoxyethyl (meth)acrylate and other alkoxyalkylene glycol mono (meth)acrylates; ethylene glycol di ( Meth)acrylates, butanediol di(meth)acrylates, neopentyl glycol di(meth)acrylates, 1,6-hexanediol di(meth)acrylates, trimethylolpropane Alkylene polyol poly(meth)acrylates of tri(meth)acrylate, pentaerythritol tetra(meth)acrylate, dipentaerythritol hexa(meth)acrylate, etc.; diethylene glycol di(meth)acrylate Polyoxyalkane diacrylates of acrylates, triethylene glycol di(meth)acrylate, ethoxylated trimethylolpropane triacrylate, propoxylated trimethylolpropane tri(meth)acrylate, etc. Alcohol poly(meth)acrylates; poly(meth)acrylates such as neopentyl glycol hydroxypivalate di(meth)acrylate; tris[(meth)acryloyloxyethyl] Isocyanurate (isocyanurate) type poly(meth)acrylates etc., such as isocyanurate.

具有乙烯性不飽和基的化合物,較佳為具有(甲基)丙烯醯基之化合物,亦即(甲基)丙烯酸酯化合物。又,(甲基)丙烯酸酯化合物,因耐熱性更佳,故以2官能以上者為佳。又,(甲基)丙烯酸酯化合物係當丙烯醯基當量為100以上時,延伸率更佳,更能抑制光暈,而且,更不易產生硬化物之翹曲,故較佳。The compound having an ethylenically unsaturated group is preferably a compound having a (meth)acryloyl group, that is, a (meth)acrylate compound. Moreover, since the heat resistance of a (meth)acrylate compound is more favorable, it is preferable that it is bifunctional or more. In addition, when the acryl group equivalent of the (meth)acrylate compound is 100 or more, the elongation is better, the halo can be suppressed more, and the warpage of the cured product is less likely to occur, so it is preferable.

又,具有乙烯性不飽和基的化合物,也可使用下述通式(6)表示之(甲基)丙烯酸酯化合物。

Figure 02_image023
式中,R1 為氫原子、碳數1~20之有機基,可相同或相異,R2 為選自由碳數1~10之烷基、碳數1~10之伸烷基、及伸苯基所成群中之至少1種的官能基,   R3 表示氫原子或碳數1~4之烷基,   R4 表示氫原子或碳數1~4之烷基,   R5 表示氫原子或甲基,   p表示1~5之整數,q表示3以上之整數,   m表示1~4之整數,n表示1~10之整數。   較佳的態樣係前述(甲基)丙烯酸酯化合物為使(a)1分子中具有3個以上之酚性羥基的化合物與(b)環狀醚化合物或環狀碳酸酯化合物反應,所生成的羥基與(c)具有乙烯性不飽和基的化合物反應所得的丙烯酸酯化合物。此時,較佳為上述1分子中具有3個以上之酚性羥基的化合物(a)為具有室溫以上的軟化點之具有酚性羥基的化合物,又,上述具有乙烯性不飽和基的化合物(c)係以甲基丙烯酸為佳。Moreover, as a compound which has an ethylenically unsaturated group, the (meth)acrylate compound represented by following General formula (6) can also be used.
Figure 02_image023
In the formula, R 1 is a hydrogen atom, an organic group with 1 to 20 carbon atoms, which may be the same or different, and R 2 is selected from an alkyl group with 1 to 10 carbon atoms, an alkyl group with 1 to 10 carbon atoms, and an alkyl group with 1 to 10 carbon atoms. A functional group of at least one of the phenyl groups, R 3 represents a hydrogen atom or an alkyl group with 1 to 4 carbon atoms, R 4 represents a hydrogen atom or an alkyl group with 1 to 4 carbon atoms, and R 5 represents a hydrogen atom or an alkyl group with 1 to 4 carbon atoms. For methyl group, p represents an integer of 1 to 5, q represents an integer of 3 or more, m represents an integer of 1 to 4, and n represents an integer of 1 to 10. In a preferred aspect, the (meth)acrylate compound is produced by reacting (a) a compound having three or more phenolic hydroxyl groups in one molecule with (b) a cyclic ether compound or a cyclic carbonate compound. An acrylate compound obtained by reacting the hydroxyl group of (c) with a compound having an ethylenically unsaturated group. In this case, it is preferable that the compound (a) having a phenolic hydroxyl group having three or more phenolic hydroxyl groups in one molecule is a compound having a phenolic hydroxyl group having a softening point of room temperature or higher, and the compound having an ethylenically unsaturated group. The system (c) is preferably methacrylic acid.

具有乙烯性不飽和基的化合物可單獨使用1種,亦可組合2種以上來使用。具有乙烯性不飽和基的化合物之調配量係相對於(A)鹼可溶性樹脂100質量份,為1~80質量份,更佳為2~70質量份。The compound which has an ethylenically unsaturated group may be used individually by 1 type, and may be used in combination of 2 or more types. The compounding quantity of the compound which has an ethylenically unsaturated group is 1-80 mass parts with respect to 100 mass parts of (A) alkali-soluble resin, More preferably, it is 2-70 mass parts.

(熱硬化成分)   本發明之負型光硬化性樹脂組成物,可含有熱硬化成分。藉由將光硬化後之組成物再進行熱硬化,可提高硬化物之耐熱性、絕緣信賴性等的特性。熱硬化成分,可使用胺基樹脂、三聚氰胺樹脂、馬來醯亞胺化合物、苯并噁嗪樹脂、碳二亞胺樹脂、環碳酸酯化合物、環氧化合物、多官能氧雜環丁烷化合物、環硫化物樹脂等之公知慣用的熱硬化性樹脂。本發明可適合使用環氧化合物、氧雜環丁烷化合物、及馬來醯亞胺化合物,也可併用此等。(Thermosetting component) The negative photocurable resin composition of the present invention may contain a thermosetting component. By thermally curing the photocured composition, the properties of the cured product such as heat resistance and insulation reliability can be improved. As thermosetting components, amine-based resins, melamine resins, maleimide compounds, benzoxazine resins, carbodiimide resins, cyclocarbonate compounds, epoxy compounds, polyfunctional oxetane compounds, Known and usual thermosetting resins such as episulfide resins. In the present invention, an epoxy compound, an oxetane compound, and a maleimide compound can be suitably used, or these compounds can be used in combination.

上述環氧化合物可使用具有1個以上之環氧基之公知慣用的化合物,其中,較佳為具有2個以上之環氧基的化合物。可列舉例如丁基環氧丙醚、苯基環氧丙醚、環氧丙基(甲基)丙烯酸酯等之單環氧化合物、雙酚A型環氧樹脂、雙酚S型環氧樹脂、雙酚F型環氧樹脂、苯酚酚醛清漆型環氧樹脂、甲酚酚醛清漆型環氧樹脂、脂環式環氧樹脂、三羥甲基丙烷聚環氧丙醚、苯基-1,3-二環氧丙醚、聯苯基-4,4’-二環氧丙醚、1,6-己二醇二環氧丙醚、乙二醇或丙二醇之二環氧丙醚、山梨醣醇聚環氧丙醚、三(2,3-環氧基丙基)異三聚氰酸酯、三環氧丙基三(2-羥基乙基)異三聚氰酸酯等之1分子中具有2個以上之環氧基的化合物。As the above-mentioned epoxy compound, a known and usual compound having one or more epoxy groups can be used, and among them, a compound having two or more epoxy groups is preferable. For example, monoepoxy compounds such as butyl glycidyl ether, phenyl glycidyl ether, and glycidyl (meth)acrylate, bisphenol A type epoxy resin, bisphenol S type epoxy resin, Bisphenol F type epoxy resin, phenol novolak type epoxy resin, cresol novolak type epoxy resin, alicyclic epoxy resin, trimethylolpropane polyglycidyl ether, phenyl-1,3- Diglycidyl ether, biphenyl-4,4'-diglycidyl ether, 1,6-hexanediol diglycidyl ether, diglycidyl ether of ethylene glycol or propylene glycol, sorbitan Glycidyl ether, tris(2,3-epoxypropyl)isocyanurate, triglycidyltris(2-hydroxyethyl)isocyanurate, etc. have 2 in one molecule Compounds with more than one epoxy group.

具有2個以上之環氧基的化合物,具體而言,可列舉三菱化學公司製之jER828、jER834、jER1001、jER1004、DIC公司製之EPICLON840、EPICLON850、EPICLON1050、EPICLON2055、新日鐵住金化學公司製之EPOTOHTOYD-011、YD-013、YD-127、YD-128、 Dow Chemical日本公司製之D.E.R.317、D.E.R.331、D.E.R.661、D.E.R.664、住友化學公司製之Sumi-epoxyESA-011、ESA-014、ELA-115、ELA-128、旭化成工業公司製之A.E.R.330、A.E.R.331、A.E.R.661、A.E.R.664等之雙酚A型環氧樹脂;三菱化學公司製之jERYL903、DIC公司製之EPICLON152、EPICLON165、新日鐵住金化學公司製之EPOTOHTO YDB-400、YDB-500、Dow Chemical日本公司製之D.E.R.542、住友化學公司製之Sumi-epoxyESB-400、ESB-700、旭化成工業公司製之A.E.R.711、A.E.R.714等之溴化環氧樹脂;三菱化學公司製之jER152、jER154、Dow Chemical日本公司製之D.E.N.431、D.E.N.438、DIC公司製之EPICLONN-730、EPICLONN-770、EPICLONN-865、新日鐵住金化學公司製之EPOTOHTOYDCN-701、YDCN-704、日本化藥公司製之EPPN-201、EOCN-1025、EOCN-1020、EOCN-104S、RE-306、NC-3000、住友化學公司製之Sumi-epoxyESCN-195X、ESCN-220、旭化成工業公司製之A.E.R.ECN-235、ECN-299、新日鐵住金化學公司製之YDCN-700-2、YDCN-700-3、YDCN-700-5,YDCN-700-7、YDCN-700-10、YDCN-704 YDCN-704A、DIC公司製之EPICLONN-680、N-690、N-695等之酚醛清漆型環氧樹脂;DIC公司製之EPICLON830、三菱化學公司製jER807、新日鐵住金化學公司製之EPOTOHTO YDF-170、YDF-175、YDF-2004等之雙酚F型環氧樹脂;新日鐵住金化學公司製之EPOTOHTO ST-2004、ST-2007、ST-3000等之氫化雙酚A型環氧樹脂;三菱化學公司製之jER604、新日鐵住金化學公司製之EPOTOHTO YH-434;住友化學公司製之Sumi-epoxyELM-120等之環氧丙基胺型環氧樹脂;乙內醯脲型環氧樹脂;DAICEL公司製之CELLOXID 2021等之脂環式環氧樹脂;三菱化學公司製之YL-933、Dow Chemical日本公司製之T.E.N.、EPPN-501、EPPN-502等之三羥基苯基甲烷型環氧樹脂;三菱化學公司製之YL-6056、YX-4000、YL-6121等之雙二甲苯酚型或聯苯二酚型環氧樹脂或彼等之混合物;日本化藥公司製EBPS-200、ADEKA公司製EPX-30、DIC公司製之EXA-1514等之雙酚S型環氧樹脂;三菱化學公司製之jER157S等之雙酚A酚醛清漆型環氧樹脂;三菱化學公司製之jERYL-931等之四羥苯基乙烷型環氧樹脂;日產化學工業公司製之TEPIC等之雜環式環氧樹脂;日油公司製Blenmer DGT等之二環氧丙基苯二甲酸酯樹脂;新日鐵住金化學公司製ZX-1063等之四環氧丙基二甲苯醯基乙烷樹脂;新日鐵住金化學公司製ESN-190、ESN-360、DIC公司製HP-4032、EXA-4750、EXA-4700等之含有萘基之環氧樹脂;DIC公司製HP-7200、HP-7200H等之具有二環戊二烯骨架之環氧樹脂;日油公司製CP-50S、CP-50M等之環氧丙基甲基丙烯酸酯共聚合系環氧樹脂;此外,環己基馬來醯亞胺與環氧丙基甲基丙烯酸酯之共聚合環氧樹脂;CTBN改質環氧樹脂(例如新日鐵住金化學公司製之YR-102、YR-450等)等,但是不限於此等。The compound having two or more epoxy groups, specifically, jER828, jER834, jER1001, jER1004 manufactured by Mitsubishi Chemical Corporation, EPICLON840, EPICLON850, EPICLON1050, EPICLON2055 manufactured by Nippon Steel & Sumitomo Chemical Corporation, manufactured by DIC Corporation EPOTOHTOYD-011, YD-013, YD-127, YD-128, D.E.R.317, D.E.R.331, D.E.R.661, D.E.R.664, manufactured by Dow Chemical Japan, Sumi-epoxyESA-011, ESA-014, ELA manufactured by Sumitomo Chemical -115, ELA-128, A.E.R.330, A.E.R.331, A.E.R.661, A.E.R.664 and other bisphenol A epoxy resins manufactured by Asahi Kasei Industries; EPOTOHTO YDB-400, YDB-500 manufactured by Sumitomo Metal Chemical Co., Ltd., D.E.R.542 manufactured by Dow Chemical Japan, Sumi-epoxyESB-400, ESB-700 manufactured by Sumitomo Chemical Corporation, A.E.R.711, A.E.R.714 manufactured by Asahi Kasei Industries, etc. The brominated epoxy resin; jER152, jER154 manufactured by Mitsubishi Chemical Corporation, D.E.N.431, D.E.N.438 manufactured by Dow Chemical Japan Corporation, EPICLONN-730, EPICLONN-770, EPICLONN-865 manufactured by DIC Corporation, Nippon Steel & Sumitomo Metal Chemical Corporation EPOTOHTOYDCN-701, YDCN-704 manufactured by Nippon Kayaku Co., Ltd. EPPN-201, EOCN-1025, EOCN-1020, EOCN-104S, RE-306, NC-3000, Sumi-epoxyESCN-195X manufactured by Sumitomo Chemical Corporation , ESCN-220, A.E.R.ECN-235, ECN-299 manufactured by Asahi Kasei Industry Co., Ltd., YDCN-700-2, YDCN-700-3, YDCN-700-5, YDCN-700-7 manufactured by Nippon Steel & Sumitomo Metal Chemical Co., Ltd. , YDCN-700-10, YDCN-704, YDCN-704A, EPICLONN-680, N-690, N-695 made by DIC company novolak epoxy resin; EPICLON830 made by DIC company, jER807 made by Mitsubishi Chemical company, EPOTOHTO YDF-170, YDF-175, YDF-2004 and other bisphenol F-type epoxy resins manufactured by Nippon Steel & Sumitomo Metal Chemical Co., Ltd.; new Hydrogenated bisphenol A epoxy resins such as EPOTOHTO ST-2004, ST-2007, ST-3000 manufactured by Nippon Steel & Sumitomo Metal Chemical Corporation; jER604 manufactured by Mitsubishi Chemical Corporation, EPOTOHTO YH-434 manufactured by Nippon Steel & Sumitomo Metal Chemical Corporation; Epoxypropylamine type epoxy resins such as Sumi-epoxyELM-120 manufactured by Sumitomo Chemical Co., Ltd.; Hydantoin type epoxy resins; Alicyclic epoxy resins such as CELLOXID 2021 manufactured by DAICEL Corporation; Mitsubishi Chemical Corporation YL-933, T.E.N., EPPN-501, EPPN-502 made by Dow Chemical Japan Co., Ltd. of trihydroxyphenylmethane type epoxy resin; YL-6056, YX-4000, YL-6121 made by Mitsubishi Chemical Co., Ltd. Bis-xylenol-type or biquinol-type epoxy resins or their mixtures; bisphenol S-rings such as EBPS-200 manufactured by Nippon Kayaku Co., Ltd., EPX-30 manufactured by ADEKA Corporation, EXA-1514 manufactured by DIC Corporation, etc. Oxygen resin; bisphenol A novolak type epoxy resin such as jER157S manufactured by Mitsubishi Chemical Corporation; tetrahydroxyphenyl ethane type epoxy resin such as jERYL-931 manufactured by Mitsubishi Chemical Corporation; TEPIC manufactured by Nissan Chemical Industry Corporation, etc. Heterocyclic epoxy resins; Diglycidyl phthalate resins such as Blenmer DGT manufactured by NOF Corporation; Tetraglycidyl xylyl ethyl acetate such as ZX-1063 manufactured by Nippon Steel & Sumitomo Metal Chemical Co., Ltd. Alkane resins; ESN-190, ESN-360 manufactured by Nippon Steel & Sumitomo Metal Chemical Co., Ltd., HP-4032, EXA-4750, EXA-4700 manufactured by DIC Corporation and other epoxy resins containing naphthyl groups; HP-7200, HP manufactured by DIC Corporation Epoxy resin with dicyclopentadiene skeleton such as -7200H; glycidyl methacrylate copolymer epoxy resin such as CP-50S and CP-50M manufactured by NOF Corporation; Copolymerized epoxy resin of imide and glycidyl methacrylate; CTBN modified epoxy resin (such as YR-102, YR-450 manufactured by Nippon Steel & Sumitomo Metal Chemical Co., Ltd.), etc., but not limited to this Wait.

其次,說明氧雜環丁烷化合物。含有以下述通式(7)

Figure 02_image025
(式中,R6 表示氫原子或碳數1~6之烷基)表示之氧雜環丁烷環之氧雜環丁烷化合物的具體例,可列舉3-乙基-3-羥基甲基氧雜環丁烷(東亞合成公司製OXT-101)、3-乙基-3-(苯氧基甲基)氧雜環丁烷(東亞合成公司製OXT-211)、3-乙基-3-(2-乙基己氧基甲基)氧雜環丁烷(東亞合成公司製OXT-212)、1,4-雙{[(3-乙基-3-氧雜環丁烷基( oxetanyl) 甲氧基]甲基}苯(東亞合成公司製OXT-121)、雙(3-乙基-3-氧雜環丁烷基甲基)醚(東亞合成公司製OXT-221)等。此外,也可列舉苯酚酚醛清漆型的氧雜環丁烷化合物等。氧雜環丁烷化合物也可與上述環氧化合物併用,也可單獨使用。Next, the oxetane compound will be described. contains the following general formula (7)
Figure 02_image025
(In the formula, R 6 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms) Specific examples of the oxetane compound represented by the oxetane ring include 3-ethyl-3-hydroxymethyl Oxetane (OXT-101 manufactured by Toagosei Co., Ltd.), 3-ethyl-3-(phenoxymethyl)oxetane (OXT-211 manufactured by Toagosei Corporation), 3-ethyl-3 -(2-Ethylhexyloxymethyl)oxetane (OXT-212 manufactured by Toagosei Co., Ltd.), 1,4-bis{[(3-ethyl-3-oxetanyl ( oxetanyl) ) methoxy]methyl}benzene (OXT-121 manufactured by Toagosei Corporation), bis(3-ethyl-3-oxetanylmethyl) ether (OXT-221 manufactured by Toagosei Corporation), etc. In addition , and phenol novolac-type oxetane compounds, etc. The oxetane compounds may be used in combination with the above-mentioned epoxy compounds, or may be used alone.

上述馬來醯亞胺化合物,可列舉多官能脂肪族/脂環族馬來醯亞胺、多官能芳香族馬來醯亞胺。以2官能以上之馬來醯亞胺化合物(多官能馬來醯亞胺化合物)為佳。多官能脂肪族/脂環族馬來醯亞胺,可列舉例如N,N´-亞甲基雙馬來醯亞胺、N,N´-伸乙基雙馬來醯亞胺、參(羥基乙基)異氰脲酸酯)與脂肪族/脂環族馬來醯亞胺羧酸,進行脫水酯化所得之異氰脲酸酯骨架之馬來醯亞胺酯化合物;參(胺甲酸酯(carbamate)己基)異氰脲酸酯與脂肪族/脂環族馬來醯亞胺醇,進行胺基甲酸酯化所得之異氰脲酸酯骨架之馬來醯亞胺胺基甲酸酯化合物等之異氰脲酸酯(isocyanuric)骨架聚馬來醯亞胺類;異佛爾酮雙胺基甲酸酯雙(N-乙基馬來醯亞胺)、三乙二醇雙(馬來醯亞胺乙基碳酸酯)、脂肪族/脂環族馬來醯亞胺羧酸與各種脂肪族/脂環族多元醇,進行脫水酯化,或脂肪族/脂環族馬來醯亞胺羧酸酯與各種脂肪族/脂環族多元醇,進行酯交換反應所得之脂肪族/脂環族聚馬來醯亞胺酯化合物類;脂肪族/脂環族馬來醯亞胺羧酸與各種脂肪族/脂環族聚環氧化物,進行醚開環反應所得之脂肪族/脂環族聚馬來醯亞胺酯化合物類;脂肪族/脂環族馬來醯亞胺醇與各種脂肪族/脂環族聚異氰酸酯,進行胺基甲酸酯化反應所得之脂肪族/脂環族聚馬來醯亞胺胺基甲酸酯化合物類等。The above-mentioned maleimide compound includes polyfunctional aliphatic/alicyclic maleimide and polyfunctional aromatic maleimide. A maleimide compound having two or more functions (polyfunctional maleimide compound) is preferable. Polyfunctional aliphatic/alicyclic maleimide, for example, N,N´-methylenebismaleimide, N,N´-ethylidenebismaleimide, bis(hydroxyl) Ethyl) isocyanurate) and aliphatic/alicyclic maleimide carboxylic acid, the maleimide compound of isocyanurate skeleton obtained by dehydration esterification; see (carbamic acid) Ester (carbamate) hexyl) isocyanurate and aliphatic/alicyclic maleimide alcohol, maleimide carbamic acid of isocyanurate skeleton obtained by urethane esterification Isocyanuric (isocyanuric) skeleton polymaleimides of ester compounds, etc.; isophorone biscarbamate bis(N-ethylmaleimide), triethylene glycol bis( Maleimide ethyl carbonate), aliphatic/alicyclic maleimine carboxylic acid and various aliphatic/alicyclic polyols, dehydrated esterification, or aliphatic/alicyclic maleimide Aliphatic/alicyclic polymaleimide ester compounds obtained by transesterification of imine carboxylate with various aliphatic/alicyclic polyols; aliphatic/alicyclic maleimide carboxylate Aliphatic/alicyclic polymaleimide ester compounds obtained by ether ring-opening reaction between acid and various aliphatic/alicyclic polyepoxides; aliphatic/alicyclic maleimide alcohol and Various aliphatic/alicyclic polyisocyanates, aliphatic/alicyclic polymaleimide urethane compounds obtained by urethane reaction, etc.

多官能芳香族馬來醯亞胺,可列舉馬來醯亞胺羧酸與各種芳香族多元醇,進行脫水酯化,或馬來醯亞胺羧酸酯與各種芳香族多元醇,進行酯交換反應所得之芳香族聚馬來醯亞胺酯化合物類;馬來醯亞胺羧酸與各種芳香族聚環氧化物,進行醚開環反應所得之芳香族聚馬來醯亞胺酯化合物類;馬來醯亞胺醇與各種芳香族聚異氰酸酯,進行胺基甲酸酯化反應所得之芳香族聚馬來醯亞胺胺基甲酸酯化合物類等之芳香族多官能馬來醯亞胺類等。   上述多官能馬來醯亞胺,特別是延伸率更良好,故液狀之多官能馬來醯亞胺為佳。本發明中,液狀之多官能馬來醯亞胺係指以圓錐平板型黏度計(東機產業公司製TVH-33H)測量60℃、5rpm下的黏度為50,000cp以下的多官能馬來醯亞胺。Polyfunctional aromatic maleimides include dehydration esterification between maleimine carboxylic acid and various aromatic polyols, or transesterification between maleimide carboxylic acid esters and various aromatic polyols Aromatic polymaleimide ester compounds obtained by the reaction; aromatic polymaleimide ester compounds obtained by performing ether ring-opening reaction with maleimine carboxylic acid and various aromatic polyepoxides; Aromatic polyfunctional maleimides such as aromatic polymaleimide urethane compounds obtained by urethane reaction of maleimide alcohol and various aromatic polyisocyanates Wait. The above-mentioned polyfunctional maleimide, especially the elongation rate, is better, so the liquid polyfunctional maleimide is preferable. In the present invention, the liquid polyfunctional maleimide refers to a polyfunctional maleimide having a viscosity of 50,000 cp or less at 60° C. and 5 rpm measured with a cone-plate viscometer (TVH-33H manufactured by Toki Sangyo Co., Ltd.). imine.

熱硬化成分可單獨使用1種亦可組合2種以上來使用。熱硬化成分之調配量係以固體成分換算,相對於(A)鹼可溶性樹脂100質量份,以0.1~100質量份為佳,更佳為0.5~100質量份,又更佳為1~60質量份。調配作為熱硬化成分之馬來醯亞胺化合物時,馬來醯亞胺化合物之調配量係以固體成分換算,相對於(A)鹼可溶性樹脂100質量份,較佳為0.1~50質量份,更佳為0.2~20質量份。馬來醯亞胺化合物之調配量在0.1~50質量份之範圍內時,高延伸與耐熱性之平衡優異。A thermosetting component may be used individually by 1 type, or may be used in combination of 2 or more types. The blending amount of the thermosetting component is calculated in terms of solid content, and is preferably 0.1 to 100 parts by mass, more preferably 0.5 to 100 parts by mass, and more preferably 1 to 60 parts by mass relative to 100 parts by mass of the (A) alkali-soluble resin. share. When blending the maleimide compound as a thermosetting component, the blending amount of the maleimide compound is preferably 0.1 to 50 parts by mass based on 100 parts by mass of the (A) alkali-soluble resin, in terms of solid content, More preferably, it is 0.2-20 mass parts. When the blending amount of the maleimide compound is in the range of 0.1 to 50 parts by mass, the balance between high elongation and heat resistance is excellent.

(熱硬化觸媒)   本發明之負型光硬化性樹脂組成物,可含有熱硬化觸媒。熱硬化觸媒可使用例如咪唑、2-甲基咪唑、2-乙基咪唑、2-乙基-4-甲基咪唑、2-苯基咪唑、4-苯基咪唑、1-氰基乙基-2-苯基咪唑、1-(2-氰基乙基)-2-乙基-4-甲基咪唑等之咪唑衍生物;雙氰胺、苄基二甲基胺、4-(二甲基胺基)-N,N-二甲基苄基胺、4-甲氧基-N,N-二甲基苄基胺、4-甲基-N,N-二甲基苄基胺等之胺化合物、己二酸二醯肼、癸二酸二醯肼等之肼化合物;三苯基膦等之磷化合物等。(Thermosetting catalyst) The negative photocurable resin composition of the present invention may contain a thermosetting catalyst. As the thermosetting catalyst, for example, imidazole, 2-methylimidazole, 2-ethylimidazole, 2-ethyl-4-methylimidazole, 2-phenylimidazole, 4-phenylimidazole, 1-cyanoethyl can be used - imidazole derivatives of 2-phenylimidazole, 1-(2-cyanoethyl)-2-ethyl-4-methylimidazole, etc.; dicyandiamide, benzyldimethylamine, 4-(dimethylamine) amino)-N,N-dimethylbenzylamine, 4-methoxy-N,N-dimethylbenzylamine, 4-methyl-N,N-dimethylbenzylamine, etc. Amine compounds, hydrazine compounds such as adipic acid dihydrazine, sebacate dihydrazine, etc.; phosphorus compounds such as triphenylphosphine, etc.

又,市售者,可列舉例如四國化成工業公司製之2MZ-AP、2MZ-A、2MZ-OK、2PHZ、2P4BHZ、2P4MHZ(均為咪唑系化合物之商品名)、san-apro公司製之U-CAT3503N、U-CAT3502T(均為二甲基胺之嵌段異氰酸酯化合物之商品名)、DBU、DBN、U-CATSA102、U-CAT5002(均為二環式脒化合物及其鹽)等。特別是不限於此等,只要是環氧化合物或氧雜環丁烷化合物之熱硬化觸媒、或其他促進熱硬化成分之反應者即可,可單獨使用1種或混合2種以上使用。In addition, as commercially available ones, for example, 2MZ-AP, 2MZ-A, 2MZ-OK, 2PHZ, 2P4BHZ, 2P4MHZ (all are trade names of imidazole-based compounds) manufactured by Shikoku Chemical Industry Co., Ltd., and products manufactured by San-apro Co., Ltd. U-CAT3503N, U-CAT3502T (all are the trade names of blocked isocyanate compounds of dimethylamine), DBU, DBN, U-CATSA102, U-CAT5002 (all are bicyclic amidine compounds and their salts) and the like. In particular, it is not limited to these, as long as it is a thermosetting catalyst of an epoxy compound or an oxetane compound, or a reaction promoting reaction of other thermosetting components, it can be used alone or in combination of two or more.

又,也可使用胍胺、乙醯胍胺、苯胍胺、三聚氰胺、2,4-二胺基-6-甲基丙烯醯氧基乙基-S-三嗪、2-乙烯基-2,4-二胺基-S-三嗪、2-乙烯基-4,6-二胺基-S-三嗪・異三聚氰酸加成物、2,4-二胺基-6-甲基丙烯醯氧基乙基-S-三嗪・異三聚氰酸加成物等之S-三嗪衍生物,較佳為此等作為密著性賦予劑產生機能的化合物與熱硬化觸媒併用。In addition, guanamine, acetoguanamine, benzoguanamine, melamine, 2,4-diamino-6-methacryloyloxyethyl-S-triazine, 2-vinyl-2, 4-Diamino-S-triazine, 2-Vinyl-4,6-diamino-S-triazine・Isocyanuric acid adduct, 2,4-Diamino-6-methyl S-triazine derivatives such as acryloxyethyl-S-triazine, isocyanuric acid adducts, etc. Preferably, these compounds that function as adhesion imparting agents are used together with a thermosetting catalyst .

熱硬化觸媒之調配量係以固體成分換算,相對於(A)鹼可溶性樹脂100質量份,較佳為0.1~20質量份,更佳為0.2~20質量份。熱硬化觸媒之調配量在0.1~20質量份之範圍內時,保存安定性與硬化性之平衡優異。The mixing amount of the thermosetting catalyst is based on solid content conversion, and is preferably 0.1 to 20 parts by mass, more preferably 0.2 to 20 parts by mass, relative to 100 parts by mass of the (A) alkali-soluble resin. When the blending amount of the thermosetting catalyst is in the range of 0.1 to 20 parts by mass, the balance between storage stability and curability is excellent.

(聚合抑制劑)   本發明之負型光硬化性樹脂組成物係含有聚合抑制劑為佳,更能抑制光暈。(Polymerization inhibitor) It is preferable that the negative photocurable resin composition of the present invention contains a polymerization inhibitor, which can suppress halo.

聚合抑制劑,無特別限定,可使用光聚合抑制劑或熱聚合抑制劑。光聚合抑制劑,可列舉例如p-苯醌、萘醌、二-t-丁基・對甲酚、對苯二酚單甲醚、α-萘酚、乙脒乙酸酯、肼鹽酸鹽、苄基三甲基氯化銨、二硝基苯、苦味酸、苯醌二肟(quinone dioxime)、鄰苯三酚、單寧酸(tannic acid)、間苯二酚、銅鐵試劑(Cupferron)、吩噻嗪等。熱聚合抑制劑,可列舉4-甲氧基苯酚、氫醌、烷基或芳基取代氫醌、t-丁基兒茶酚、鄰苯三酚、2-羥基二苯甲酮、4-甲氧基-2-羥基二苯甲酮、氯化亞銅(cuprous chloride)、吩噻嗪、四氯苯醌、萘基胺、β-萘酚、2,6-二-t-丁基-4-甲酚、2,2’-伸甲基雙(4-甲基-6-t-丁基苯酚)、吡啶、硝基苯、二硝基苯、苦味酸、4-甲苯胺、亞甲基藍、銅與有機螯合劑反應物、水楊酸甲酯、及吩噻嗪、亞硝基化合物、亞硝基化合物與Al之螯合物等。聚合抑制劑以光聚合抑制劑為佳,其中,較佳為p-苯醌、萘醌、對苯二酚單甲醚、苯醌二肟等之醌系光聚合抑制劑。聚合抑制劑可單獨使用1種亦可組合2種以上來使用。The polymerization inhibitor is not particularly limited, and a photopolymerization inhibitor or a thermal polymerization inhibitor can be used. Examples of photopolymerization inhibitors include p-benzoquinone, naphthoquinone, di-t-butyl-p-cresol, hydroquinone monomethyl ether, α-naphthol, acetamidine acetate, and hydrazine hydrochloride. , benzyltrimethylammonium chloride, dinitrobenzene, picric acid, quinone dioxime, pyrogallol, tannic acid, resorcinol, cupferron ), phenothiazine, etc. Thermal polymerization inhibitors, such as 4-methoxyphenol, hydroquinone, alkyl or aryl substituted hydroquinone, t-butylcatechol, pyrogallol, 2-hydroxybenzophenone, 4-methylmethane Oxy-2-hydroxybenzophenone, cuprous chloride, phenothiazine, tetrachlorobenzoquinone, naphthylamine, beta-naphthol, 2,6-di-t-butyl-4 -Cresol, 2,2'-methylidenebis(4-methyl-6-t-butylphenol), pyridine, nitrobenzene, dinitrobenzene, picric acid, 4-toluidine, methylene blue, copper Reactants with organic chelating agents, methyl salicylate, phenothiazine, nitroso compounds, chelate compounds of nitroso compounds and Al, etc. The polymerization inhibitor is preferably a photopolymerization inhibitor, and among them, quinone-based photopolymerization inhibitors such as p-benzoquinone, naphthoquinone, hydroquinone monomethyl ether, and benzoquinone dioxime are preferred. The polymerization inhibitor may be used alone or in combination of two or more.

聚合抑制劑之調配量係相對於(A)鹼可溶性樹脂100質量份,為0.005~20質量份,更佳為、0.01~10質量份。The compounding quantity of a polymerization inhibitor is 0.005-20 mass parts with respect to 100 mass parts of (A) alkali-soluble resin, More preferably, it is 0.01-10 mass parts.

(平坦劑)   本發明之負型光硬化性樹脂組成物,可含有平坦劑。平坦劑無特別限定,可列舉例如聚丙烯酸酯系聚合物、聚醚改質二甲基聚矽氧烷共聚合物、聚酯改質二甲基聚矽氧烷共聚合物、聚醚改質甲基烷基聚矽氧烷共聚合物、芳烷基改質甲基烷基聚矽氧烷共聚合物及聚醚改質甲基烷基聚矽氧烷共聚合物等。平坦劑之市售品,可列舉例如BYK-Chemie・Japan公司製之BYK-350、-352、-354、-356、 -361N、-392、共榮社化學公司製之polyflow系列等。平坦劑可單獨使用1種亦可組合2種以上來使用。(Leveling agent) The negative photocurable resin composition of the present invention may contain a leveling agent. The leveling agent is not particularly limited, and examples thereof include polyacrylate-based polymers, polyether-modified dimethylpolysiloxane copolymers, polyester-modified dimethylpolysiloxane copolymers, and polyether-modified dimethylpolysiloxane copolymers. Methyl alkyl polysiloxane copolymers, aralkyl modified methyl alkyl polysiloxane copolymers and polyether modified methyl alkyl polysiloxane copolymers, etc. Commercially available flattening agents include BYK-350, -352, -354, -356, -361N, -392 manufactured by BYK-Chemie Japan, and polyflow series manufactured by Kyōeisha Chemical Co., Ltd., for example. A leveling agent may be used individually by 1 type, or may be used in combination of 2 or more types.

平坦劑之調配量係相對於(A)鹼可溶性樹脂100質量份,較佳為0.005~20質量份,更佳為、0.01~10質量份。The blending amount of the leveling agent is preferably 0.005 to 20 parts by mass, more preferably 0.01 to 10 parts by mass, relative to 100 parts by mass of the (A) alkali-soluble resin.

(著色劑)   本發明之負型光硬化性樹脂組成物可含有著色劑。著色劑無特別限定,可使用紅、藍、綠、黃、白、黑等之慣用習知的著色劑,可為顏料、染料、色素之任一者。具體而言,可列舉附有彩色指數(C.I.;The Society of Dyers and Colourist)發行)編號者。但是基於減低環境負荷及對人體之影響的觀點,以不含鹵素的著色劑為佳。(Colorant) The negative photocurable resin composition of the present invention may contain a colorant. The colorant is not particularly limited, and conventionally known colorants such as red, blue, green, yellow, white, and black can be used, and any of pigments, dyes, and pigments may be used. Specifically, those with a color index (C.I.; issued by The Society of Dyers and Colourist) number can be mentioned. However, from the viewpoint of reducing the environmental load and the influence on the human body, a halogen-free coloring agent is preferable.

紅色著色劑,可列舉單偶氮系、雙偶氮系、偶氮色澱系、苯并咪唑酮系、苝系、二酮吡咯并吡咯系、縮合偶氮系、蒽醌系、喹吖啶酮系等。藍色著色劑有金屬取代或無取代之酞菁系、蒽醌系,顏料系有分類為顏料(Pigment)的化合物。綠色著色劑,同樣有金屬取代或無取代之酞菁系、蒽醌系、苝系。黃色著色劑可列舉單偶氮系、雙偶氮系、縮合偶氮系、苯并咪唑酮系、異吲哚啉酮系、蒽醌系等。白色著色劑可列舉金紅石型、銳鈦礦型等之氧化鈦等。黑色著色劑可列舉鈦黑系、碳黑系、石墨系、氧化鐵系、蒽醌系、氧化鈷系、氧化銅系、錳系、氧化銻系、氧化鎳系、苝系、苯胺系之顏料、硫化鉬、硫化鉍等。其他,以調整色調之目的,亦可添加紫色、橙色、茶色等的著色劑。Red colorants include monoazo, disazo, azo lake, benzimidazolone, perylene, diketopyrrolopyrrole, condensed azo, anthraquinone, and quinacridine. Ketones, etc. Blue colorants include metal-substituted or unsubstituted phthalocyanines and anthraquinones, and pigments include compounds classified as pigments. Green colorants also include metal-substituted or unsubstituted phthalocyanines, anthraquinones, and perylenes. The yellow coloring agent includes monoazo-based, disazo-based, condensed-azo-based, benzimidazolone-based, isoindolinone-based, anthraquinone-based, and the like. As a white coloring agent, titanium oxide, such as a rutile type and anatase type, etc. are mentioned. Examples of black colorants include titanium black-based, carbon black-based, graphite-based, iron oxide-based, anthraquinone-based, cobalt oxide-based, copper oxide-based, manganese-based, antimony oxide-based, nickel oxide-based, perylene-based, and aniline-based pigments , molybdenum sulfide, bismuth sulfide, etc. In addition, colorants such as purple, orange, and brown may be added for the purpose of adjusting the color tone.

著色劑可1種單獨使用或組合2種以上使用。著色劑之調配量無特別限定,相對於(A)鹼可溶性樹脂100質量份,以10質量份以下為佳。更佳為0.1~5質量份。A coloring agent can be used individually by 1 type or in combination of 2 or more types. The blending amount of the colorant is not particularly limited, but is preferably 10 parts by mass or less with respect to 100 parts by mass of the (A) alkali-soluble resin. More preferably, it is 0.1-5 mass parts.

(有機溶劑)   本發明之負型光硬化性樹脂組成物,為了組成物之調製或、塗佈於基板或載體薄膜時之黏度調整等之目的,也可含有有機溶劑。有機溶劑,可使用甲基乙基酮、環己酮等之酮類;甲苯、二甲苯、四甲基苯等之芳香族烴類;溶纖劑、甲基溶纖劑、丁基溶纖劑、卡必醇、甲基卡必醇、丁基卡必醇、丙二醇單甲醚、二丙二醇單甲醚、二丙二醇二乙醚、二乙二醇單甲醚乙酸酯、三丙二醇單甲醚等之二醇醚類;乙酸乙酯、乙酸丁酯、乳酸丁酯、溶纖劑乙酸酯、丁基溶纖劑乙酸酯、卡必醇乙酸酯、丁基卡必醇乙酸酯、丙二醇單甲醚乙酸酯、二丙二醇單甲醚乙酸酯、碳酸丙烯酯等之酯類;辛烷、癸烷等之脂肪族烴類;石油醚、石油腦、溶劑石油腦等之石油系溶劑等公知慣用的有機溶劑。此等之有機溶劑,可1種單獨使用,亦可組合2種以上來使用。(Organic Solvent) The negative-type photocurable resin composition of the present invention may contain an organic solvent for the purpose of preparation of the composition or adjustment of the viscosity when it is applied to a substrate or a carrier film. As organic solvents, ketones such as methyl ethyl ketone and cyclohexanone can be used; aromatic hydrocarbons such as toluene, xylene, tetramethylbenzene, etc.; cellosolve, methyl cellosolve, butyl cellosolve, card Biol, methyl carbitol, butyl carbitol, propylene glycol monomethyl ether, dipropylene glycol monomethyl ether, dipropylene glycol diethyl ether, diethylene glycol monomethyl ether acetate, tripropylene glycol monomethyl ether, etc. Alcohol ethers; ethyl acetate, butyl acetate, butyl lactate, cellosolve acetate, butyl cellosolve acetate, carbitol acetate, butyl carbitol acetate, propylene glycol monomethyl ether Esters of acetate, dipropylene glycol monomethyl ether acetate, propylene carbonate, etc.; aliphatic hydrocarbons such as octane and decane; petroleum-based solvents such as petroleum ether, naphtha, solvent naphtha, etc. organic solvent. These organic solvents may be used alone or in combination of two or more.

此外,本發明之負型光硬化性樹脂組成物中,也可添加在電子材料領域公知慣用之其他的添加劑。其他的添加劑,可列舉抗氧化劑、紫外線吸收劑、矽烷偶合劑、可塑劑、難燃劑、抗靜電劑、防老化劑、抗菌・防黴劑、消泡劑、有機填料、無機填料、增黏劑、密著性賦予劑、觸變性賦予劑、光起始助劑、增感劑、硬化促進劑、脫模劑、表面處理劑、分散劑、濕潤分散劑、分散助劑、表面改質劑、安定劑、螢光體等。In addition, other well-known and conventional additives in the field of electronic materials may be added to the negative photocurable resin composition of the present invention. Other additives include antioxidants, ultraviolet absorbers, silane coupling agents, plasticizers, flame retardants, antistatic agents, antiaging agents, antibacterial and antifungal agents, antifoaming agents, organic fillers, inorganic fillers, tackifiers agent, adhesion imparting agent, thixotropy imparting agent, photoinitiating aid, sensitizer, hardening accelerator, mold release agent, surface treating agent, dispersing agent, wetting dispersing agent, dispersing aid, surface modifier , stabilizers, phosphors, etc.

本發明之負型光硬化性樹脂組成物,可經乾薄膜化後使用,也可以液狀使用。作為液狀使用時,可為1液性或2液性以上。(B)有機矽氧烷化合物具有熱硬化性反應基時,就保存時之安定性的觀點,與熱硬化觸媒分開,以2液以上為佳。又,(B)有機矽氧烷化合物具有感光性基時,與光聚合起始劑分開,以2液以上為佳。The negative-type photocurable resin composition of the present invention may be used after being dried in a thin film, or may be used in a liquid state. When used as a liquid, it may be one liquid or two or more liquids. (B) When the organosiloxane compound has a thermosetting reactive group, it is preferable to use 2 or more liquids separately from the thermosetting catalyst from the viewpoint of stability during storage. In addition, when the organosiloxane compound (B) has a photosensitive group, it is separated from the photopolymerization initiator, and preferably two or more liquids are used.

其次,本發明之乾薄膜,具有藉由在載體薄膜上,塗佈本發明之負型光硬化性樹脂組成物後,經乾燥所得之樹脂層。形成乾薄膜時,首先,將本發明之負型光硬化性樹脂組成物以上述有機溶劑稀釋,調整為適當的黏度,藉由缺角輪塗佈機、刮刀塗佈機、唇模塗佈機、桿塗佈機、擠壓塗佈機、逆輥塗佈機、轉送輥塗佈機、凹版塗佈機、噴霧塗佈機等,於載體薄膜上塗佈均勻的厚度。然後,藉由將塗佈後的組成物,通常以50~130℃之溫度下乾燥1~30分鐘,可形成樹脂層。塗佈膜厚無特別限制,一般,在乾燥後的膜厚為10~150μm,較佳為20~60μm之範圍內適宜選擇。Next, the dry film of the present invention has a resin layer obtained by coating the negative photocurable resin composition of the present invention on the carrier film and drying it. When forming a dry film, first, the negative photocurable resin composition of the present invention is diluted with the above-mentioned organic solvent, adjusted to an appropriate viscosity, and the film is coated by a notch wheel coater, a blade coater, and a lip die coater. , rod coater, extrusion coater, reverse roll coater, transfer roll coater, gravure coater, spray coater, etc., to coat a uniform thickness on the carrier film. Then, a resin layer can be formed by drying the coated composition at a temperature of usually 50 to 130° C. for 1 to 30 minutes. The thickness of the coating film is not particularly limited. Generally, the thickness of the film after drying is 10 to 150 μm, preferably 20 to 60 μm.

載體薄膜可使用塑膠薄膜,可使用例如聚對苯二甲酸乙二酯(PET)等之聚酯薄膜、聚醯亞胺薄膜、聚醯胺醯亞胺薄膜、聚丙烯薄膜、聚苯乙烯薄膜等。針對載體薄膜的厚度,無特別限制,一般可在10~150μm之範圍適宜選擇。The carrier film can be a plastic film, such as a polyester film such as polyethylene terephthalate (PET), a polyimide film, a polyimide film, a polypropylene film, a polystyrene film, etc. . There is no particular limitation on the thickness of the carrier film, and it can generally be appropriately selected in the range of 10 to 150 μm.

在載體薄膜上形成有由本發明之負型光硬化性樹脂組成物所成之樹脂層後,為了防止在膜之表面附著灰塵等之目的,可再於膜之表面積層可剝離的覆蓋薄膜較佳。可剝離的覆蓋薄膜,可使用例如聚乙烯薄膜或聚四氟乙烯薄膜、聚丙烯薄膜、經表面處理的紙等。覆蓋薄膜只要是剝離覆蓋薄膜時,小於樹脂層與載體薄膜之接著力者即可。After the resin layer made of the negative photocurable resin composition of the present invention is formed on the carrier film, in order to prevent dust from adhering to the surface of the film, a cover film that can be peeled off the surface of the film is preferred . As a peelable cover film, for example, polyethylene film or polytetrafluoroethylene film, polypropylene film, surface-treated paper and the like can be used. The cover film may be one that is smaller than the adhesive force between the resin layer and the carrier film when the cover film is peeled off.

又,本發明中,也可為藉由在上述覆蓋薄膜上,塗佈本發明之負型光硬化性樹脂組成物,使乾燥形成樹脂層,其表面積層載體薄膜者。亦即,本發明中,製造乾薄膜時,塗佈本發明之硬化性樹脂組成物之薄膜,也可使用載體薄膜及覆蓋薄膜之任一。In addition, in the present invention, the negative photocurable resin composition of the present invention may be applied on the cover film, and dried to form a resin layer, and a carrier film may be formed on the surface thereof. That is, in the present invention, when producing a dry film, the film to which the curable resin composition of the present invention is applied may use either a carrier film or a cover film.

本發明之負型光硬化性樹脂組成物作為光硬化性熱硬化性樹脂組成物使用時,對於塗佈該組成物,使溶劑揮發乾燥後所得的樹脂層,藉由進行曝光(光照射),使曝光部(經光照射的部分)產生硬化。具體而言,藉由接觸式或非接觸方式,通過形成有圖型的光罩,選擇性藉由活性能量線曝光或、藉由雷射直接曝光機進行直接圖型曝光,未曝光部以鹼水溶液(例如0.3~3質量%碳酸鈉水溶液)進行顯影,形成阻劑圖型。此外,藉由加熱至約100~180℃的溫度,使熱硬化(後硬化),可形成耐熱性、耐藥品性、耐吸濕性、密著性、電特性等之諸特性優異的硬化皮膜(硬化物)。When the negative photocurable resin composition of the present invention is used as a photocurable thermosetting resin composition, the resin layer obtained by coating the composition, volatilizing and drying the solvent, is exposed to light (light irradiation). The exposure part (the part irradiated with light) is hardened. Specifically, by a contact or non-contact method, through a mask with a pattern formed thereon, selective exposure by active energy rays or direct pattern exposure by a laser direct exposure machine is performed, and the unexposed part is exposed to alkali with alkali. An aqueous solution (for example, a 0.3-3 mass % sodium carbonate aqueous solution) is developed to form a resist pattern. In addition, by heating to a temperature of about 100 to 180° C. for thermal curing (post-curing), a cured film ( hardened material).

將本發明之負型光硬化性樹脂組成物作為光硬化性樹脂組成物使用時,塗佈該組成物,使溶劑揮發乾燥後,藉由進行曝光(光照射),使曝光部(經光照射的部分)產生硬化,可形成硬化皮膜(硬化物)。When the negative-type photocurable resin composition of the present invention is used as a photocurable resin composition, the composition is applied, the solvent is volatilized and dried, and then the exposed portion (irradiated with light) is exposed by exposure (light irradiation). part) hardened, and a hardened film (hardened product) can be formed.

本發明之負型光硬化性樹脂組成物,例如使用上述有機溶劑,調整為適於塗佈方法的黏度,於基材上藉由浸漬塗佈法、淋塗法、輥塗法、塗佈棒法、網版印刷法、淋幕式塗佈法等的方法進行塗佈後,以約60~100℃的溫度,使組成物中所含有之有機溶劑揮發乾燥(暫時乾燥),可形成不黏手的樹脂層。又,將上述組成物塗佈於載體薄膜或覆蓋薄膜上,使乾燥作為薄膜捲繞的乾薄膜時,藉由積層機等,以本發明之組成物層與基材接觸,貼合於基材上後,藉由剝離載體薄膜,可形成樹脂層。The negative photocurable resin composition of the present invention is, for example, adjusted to the viscosity suitable for the coating method using the above-mentioned organic solvent, and is applied to the substrate by dip coating method, flow coating method, roll coating method, coating bar method After coating by methods such as screen printing method, screen printing method, curtain coating method, etc., the organic solvent contained in the composition is volatilized and dried at a temperature of about 60~100 ° C (temporary drying), which can form a non-sticky Resin layer of the hand. In addition, when the above-mentioned composition is applied on a carrier film or a cover film and dried as a dry film wound as a film, the composition layer of the present invention is brought into contact with the base material by a laminator or the like, and is attached to the base material After being applied, a resin layer can be formed by peeling off the carrier film.

上述基材,除了首先藉由銅等形成電路的印刷配線板或可撓性的印刷配線板外,可列舉使用酚紙、環氧樹脂紙、環氧樹脂玻璃布、玻璃聚醯亞胺、玻璃布/環氧樹脂不織布、玻璃布/環氧樹脂紙、環氧樹脂合成纖維、氟樹脂・聚乙烯・聚苯醚,聚苯醚・氰酸酯等之高頻電路用貼銅積層板等的材質者,全部等級(FR-4等)之貼銅積層板、其他金屬基板、聚醯亞胺薄膜、PET薄膜、聚萘二甲酸乙二酯(PEN)薄膜、玻璃基板、陶瓷基板、晶圓板等。As the above-mentioned substrate, in addition to a printed wiring board or a flexible printed wiring board in which a circuit is first formed of copper or the like, phenolic paper, epoxy paper, epoxy glass cloth, glass polyimide, glass Cloth/epoxy non-woven fabric, glass cloth/epoxy resin paper, epoxy resin synthetic fiber, fluororesin・polyethylene・polyphenylene ether, polyphenylene ether・cyanate etc. For materials, all grades (FR-4, etc.) copper-clad laminates, other metal substrates, polyimide films, PET films, polyethylene naphthalate (PEN) films, glass substrates, ceramic substrates, wafers board etc.

上述揮發乾燥或熱硬化,可使用熱風循環式乾燥爐、IR爐、加熱板、對流烘箱等(使用具備藉由蒸氣之空氣加熱方式的熱源者,使乾燥機內之熱風對流接觸的方法及以噴嘴吹向支撐體的方式)來進行。For the above-mentioned volatilization drying or thermal curing, hot air circulation drying furnace, IR furnace, hot plate, convection oven, etc. can be used (those using a heat source equipped with an air heating method by steam, the method of contacting the hot air in the dryer with convection and the The nozzle is blown towards the support).

上述活性能量線照射所使用之曝光機,只要是搭載高壓水銀燈、超高壓水銀燈、金屬鹵素燈、短弧汞燈等,在350~450nm之範圍照射紫外線的裝置即可,也可使用直接繪圖裝置(例如藉由來自電腦之CAD數據直接以雷射描繪圖像之雷射直接成像裝置(Laser direct imaging apparatus)。直接繪圖機之燈光之光源或雷射光源係最大波長為350~410nm之範圍者即可。圖像形成用之曝光量係因膜厚等而異,但是一般可為20~1000mJ/cm2 ,較佳為20~800mJ/cm2 之範圍內。The exposure machine used for the above-mentioned active energy ray irradiation may be a device equipped with a high-pressure mercury-vapor lamp, an ultra-high-pressure mercury-vapor lamp, a metal halide lamp, a short-arc mercury lamp, etc. to irradiate ultraviolet rays in the range of 350 to 450 nm, and a direct drawing device may also be used. (For example, a laser direct imaging apparatus that draws images directly with a laser using CAD data from a computer. The light source or laser light source of the direct plotter's light is in the range of 350~410nm maximum wavelength That is, the exposure amount for image formation varies depending on the film thickness, etc., but is generally within the range of 20 to 1000 mJ/cm 2 , preferably 20 to 800 mJ/cm 2 .

上述顯影方法,可藉由浸漬法、噴灑法、噴霧法、刷塗法等,顯影液可使用氫氧化鉀、氫氧化鈉、碳酸鈉、碳酸鉀、磷酸鈉、矽酸鈉、氨、胺類等的鹼水溶液。The above-mentioned developing method can be by dipping method, spraying method, spraying method, brushing method, etc. The developer can use potassium hydroxide, sodium hydroxide, sodium carbonate, potassium carbonate, sodium phosphate, sodium silicate, ammonia, amines etc. alkaline aqueous solution.

本發明之負型光硬化性樹脂組成物,可用於形成作為阻焊劑、被覆層、層間絕緣層等之印刷配線板之永久被膜的圖型層,特別是可用於層間絕緣層之形成。又,本發明之負型光硬化性樹脂組成物係因解析性優異,可適用於微細圖型之形成所要求之IC封裝的圖型層,特別是FOWLP(Fan-Out Wafer Level Package)或PLP(Panel Level Package)之再配線層之形成。本發明之負型光硬化性樹脂組成物,即使以200℃以下之低溫進行硬化時,解析性、耐熱性及延伸率也優異,故例如IC封裝之製造時中,也可抑制對高溫處理困難的材料之不良影響。The negative-type photocurable resin composition of the present invention can be used to form a pattern layer of a permanent film of a printed wiring board as a solder resist, a coating layer, an interlayer insulating layer, etc., and especially can be used to form an interlayer insulating layer. In addition, the negative photocurable resin composition of the present invention is excellent in resolution and can be applied to the pattern layer of IC packages required for the formation of fine patterns, especially FOWLP (Fan-Out Wafer Level Package) or PLP (Panel Level Package) the formation of the redistribution layer. The negative photocurable resin composition of the present invention is excellent in resolution, heat resistance, and elongation even when cured at a low temperature of 200° C. or lower, so that, for example, in the manufacture of IC packages, it is possible to suppress difficulty in high temperature processing. adverse effects of the material.

實施例Example

以下顯示實施例及比較例具體說明本發明,但本發明非限定於下述實施例及比較例者。又,以下,「份」及「%」,無特別聲明時,為質量基準。The present invention is specifically described below with reference to Examples and Comparative Examples, but the present invention is not limited to the following Examples and Comparative Examples. In addition, below, "part" and "%" are the quality standards unless otherwise stated.

[鹼可溶性樹脂之合成] (合成例1:鹼可溶性樹脂A-1(感光性酚醛清漆型含羧基之樹脂))   在二乙二醇單乙醚乙酸酯600g中,投入鄰-甲酚醛清漆(ortho- cresol novolac)型環氧樹脂(DIC公司製、EPICLON N-695、軟化點95℃、環氧當量214、平均官能基數7.6)1070g(環氧丙基數(芳香環總數):5.0莫耳)、丙烯酸360g(5.0莫耳)、及氫醌1.5g,加熱至100℃進行攪拌、均勻溶解。   接著,投入三苯基膦4.3g,加熱至110℃,反應2小時後,昇溫至120℃,再進行12小時反應。於製得之反應液中,投入芳香族系烴(鄰-甲酚醛150)415g、四氫鄰苯二甲酸酐456.0g(3.0莫耳),以110℃反應4小時,冷卻後得到具有乙烯性不飽和基之含羧基之樹脂A-1的溶液。如此所得之含羧基之樹脂溶液A-1的固體成分為65%,固體成分之酸價為89mgKOH/g。[Synthesis of Alkali-Soluble Resin] (Synthesis Example 1: Alkali-Soluble Resin A-1 (Photosensitive novolak-type carboxyl group-containing resin)) In 600 g of diethylene glycol monoethyl ether acetate, o-cresol novolak ( ortho - cresol novolac) type epoxy resin (manufactured by DIC Corporation, EPICLON N-695, softening point 95°C, epoxy equivalent 214, average number of functional groups 7.6) 1070g (number of glycidyl groups (total number of aromatic rings): 5.0 moles) , 360 g (5.0 moles) of acrylic acid, and 1.5 g of hydroquinone were heated to 100° C. for stirring and uniformly dissolved. Next, 4.3 g of triphenylphosphine was put in, heated to 110° C., and reacted for 2 hours, then the temperature was raised to 120° C., and the reaction was further performed for 12 hours. In the prepared reaction solution, 415 g of aromatic hydrocarbon (o-cresol 150) and 456.0 g (3.0 mol) of tetrahydrophthalic anhydride were added, and reacted at 110° C. for 4 hours. A solution of unsaturated carboxyl group-containing resin A-1. The solid content of the carboxyl group-containing resin solution A-1 thus obtained was 65%, and the acid value of the solid content was 89 mgKOH/g.

[鹼可溶性樹脂之合成] (合成例2:鹼可溶性樹脂A-2(鹼可溶性醯胺醯亞胺樹脂))   於附攪拌裝置、溫度計、冷凝器之4口燒瓶中,投入二乙二醇單乙醚乙酸酯103.5重量份與異佛爾酮二異氰酸酯222.0重量份、偏苯三甲酸酐192.0重量份,邊進行攪拌邊昇溫至120℃。自60℃附近開始劇烈發泡,燒瓶內容物漸漸成為透明。以120℃,反應5小時,在體系內之NCO%成為9.0重量%的時點,冷卻至40℃。再添加二乙二醇單乙醚乙酸酯166.4重量份、甲基氫醌1.0重量份,其中添加丁醇58.4重量份,邊注意發熱,邊昇溫至80℃。以80℃使反應9小時後,以紅外線吸收光譜確認在2270cm-1 之異氰酸酯之吸收消失,得到淡黃色透明液體。藉由GPC之分子量分布測量,數平均分子量以聚苯乙烯換算為934,重量平均分子量以聚苯乙烯換算為1420。又,酸價為63.2KOH-mg/g(固體成分換算)。[Synthesis of Alkali-Soluble Resin] (Synthesis example 2: Alkali-soluble resin A-2 (alkali-soluble amide imide resin)) In a 4-neck flask equipped with a stirring device, a thermometer and a condenser, put diethylene glycol monohydrate 103.5 parts by weight of ether acetate, 222.0 parts by weight of isophorone diisocyanate, and 192.0 parts by weight of trimellitic anhydride were heated to 120°C while stirring. Vigorous foaming started from around 60°C, and the contents of the flask gradually became transparent. The reaction was carried out at 120°C for 5 hours, and when the NCO% in the system became 9.0% by weight, it was cooled to 40°C. 166.4 parts by weight of diethylene glycol monoethyl ether acetate, 1.0 part by weight of methylhydroquinone were added, and 58.4 parts by weight of butanol was added thereto, and the temperature was raised to 80° C. while paying attention to heat generation. After reacting at 80° C. for 9 hours, it was confirmed by infrared absorption spectrum that the absorption of isocyanate at 2270 cm −1 disappeared, and a pale yellow transparent liquid was obtained. The molecular weight distribution measurement by GPC showed that the number average molecular weight was 934 in terms of polystyrene, and the weight average molecular weight was 1420 in terms of polystyrene. In addition, the acid value was 63.2 KOH-mg/g (solid content conversion).

[鹼可溶性樹脂之合成] (合成例3:鹼可溶性樹脂A-3(鹼可溶性丙烯酸酯加成醯胺醯亞胺樹脂))   於附攪拌裝置、溫度計、冷凝器之4口燒瓶中,投入二乙二醇單乙醚乙酸酯103.5重量份與異佛爾酮二異氰酸酯222.0重量份、偏苯三甲酸酐192.0重量份,邊進行攪拌邊昇溫至120℃。自60℃附近開始劇烈發泡,燒瓶內容物漸漸成為透明。以120℃,反應5小時,在體系內之NCO%成為9.0重量%的時點,冷卻至40℃。再添加二乙二醇單乙醚乙酸酯166.4重量份、甲基氫醌1.0重量份,其中添加Aronix M-305(東亞合成製、羥基價120KOH-mg/g)234.7重量份,邊注意發熱,邊昇溫至80℃。以80℃使反應9小時後,以紅外線吸收光譜確認在2270cm-1 之異氰酸酯之吸收消失,得到淡黃色透明液體。藉由GPC之分子量分布測量,數平均分子量以聚苯乙烯換算為1084,重量平均分子量以聚苯乙烯換算為1524。又,酸價為68.3KOH-mg/g(固體成分換算)。[Synthesis of Alkali-Soluble Resin] (Synthesis Example 3: Alkali-Soluble Resin A-3 (Alkali-Soluble Acrylate-Added Amidoimide Resin)) In a 4-neck flask equipped with a stirring device, a thermometer and a condenser, put into two 103.5 parts by weight of ethylene glycol monoethyl ether acetate, 222.0 parts by weight of isophorone diisocyanate, and 192.0 parts by weight of trimellitic anhydride were heated to 120°C while stirring. Vigorous foaming started from around 60°C, and the contents of the flask gradually became transparent. The reaction was carried out at 120°C for 5 hours, and when the NCO% in the system became 9.0% by weight, it was cooled to 40°C. Then add 166.4 parts by weight of diethylene glycol monoethyl ether acetate and 1.0 parts by weight of methylhydroquinone, and add 234.7 parts by weight of Aronix M-305 (made by Toagosei, hydroxyl value 120KOH-mg/g), while paying attention to heat, The temperature was raised to 80°C. After reacting at 80° C. for 9 hours, it was confirmed by infrared absorption spectrum that the absorption of isocyanate at 2270 cm −1 disappeared, and a pale yellow transparent liquid was obtained. By the molecular weight distribution measurement by GPC, the number average molecular weight was 1084 in terms of polystyrene, and the weight average molecular weight was 1524 in terms of polystyrene. In addition, the acid value was 68.3 KOH-mg/g (solid content conversion).

[鹼可溶性樹脂之合成] (合成例4:鹼可溶性樹脂A-4(苯酚起始型鹼可溶性樹脂))   於具備溫度計、氮導入裝置兼環氧烷導入裝置及攪拌裝置之高壓鍋中,投入酚醛清漆型可溶性酚醛樹脂(昭和高分子(股)製、商品名「Shonol CRG 951」、OH當量:119.4)119.4g、氫氧化鉀1.19g及甲苯119.4g,進行攪拌同時將體系內進行氮取代,加熱昇溫。其次,慢慢滴下環氧丙烷63.8g,於125~132℃、0~4.8kg/cm2 下反應16小時。然後,冷卻至室溫,於此反應溶液中,添加89%磷酸1.56g,混合中和氫氧化鉀,得到不揮發分62.1%、羥基價為182.2g/eq.之酚醛清漆型可溶性酚醛樹脂之環氧丙烷反應溶液。此乃是酚性羥基1當量,加成平均1.08莫耳之環氧烷者。   其次,將所得之酚醛清漆型可溶性酚醛樹脂之環氧烷反應溶液293.0g、丙烯酸43.2g、甲磺酸11.53g、甲基氫醌0.18g及甲苯252.9g投入於具備攪拌機、溫度計及空氣吹入管的反應器中,以10ml/分鐘的速度吹入空氣,邊攪拌邊以110℃反應12小時。藉由反應生成的水,作為與甲苯之共沸混合物,餾出12.6g的水。然後,冷卻至室溫,將所得之反應溶液以15%氫氧化鈉水溶液35.35g中和,接著水洗。然後,使用蒸發器,以二乙二醇單乙醚乙酸酯118.1g取代同時將甲苯餾除,得到酚醛清漆型丙烯酸酯樹脂溶液。其次,將所得之酚醛清漆型丙烯酸酯樹脂溶液332.5g及三苯基膦1.22g投入於具備攪拌器、溫度計及空氣吹入管之反應器中,以10ml/分鐘的速度吹入空氣,邊攪拌邊添加四氫鄰苯二甲酸酐60.8g,以95~101℃使反應6小時。得到固形物之酸價88mgKOH/g、不揮發分65%之含羧基之感光性樹脂的樹脂溶液A-4。[Synthesis of Alkali-Soluble Resin] (Synthesis Example 4: Alkali-Soluble Resin A-4 (Phenol-Initiated Alkali-Soluble Resin)) In a pressure cooker equipped with a thermometer, a nitrogen introducing device, an alkylene oxide introducing device, and a stirring device, put phenolic A varnish-type soluble phenolic resin (manufactured by Showa Polymer Co., Ltd., trade name "Shonol CRG 951", OH equivalent: 119.4) 119.4 g, 1.19 g of potassium hydroxide and 119.4 g of toluene, while stirring, nitrogen-substituted in the system, Heat up. Next, 63.8 g of propylene oxide was gradually dropped, and the reaction was carried out at 125 to 132° C. and 0 to 4.8 kg/cm 2 for 16 hours. Then, it was cooled to room temperature. To this reaction solution, 1.56 g of 89% phosphoric acid was added, and potassium hydroxide was mixed and neutralized to obtain a novolak-type phenolic resin with a nonvolatile content of 62.1% and a hydroxyl value of 182.2 g/eq. Propylene oxide reaction solution. This is one equivalent of phenolic hydroxyl group, and an average of 1.08 moles of alkylene oxide is added. Next, 293.0 g of the alkylene oxide reaction solution of the obtained novolak-type phenolic resin, 43.2 g of acrylic acid, 11.53 g of methanesulfonic acid, 0.18 g of methylhydroquinone, and 252.9 g of toluene were put into a pipe equipped with a stirrer, a thermometer, and an air blower. Air was blown into the reactor at a rate of 10 ml/min, and the reaction was carried out at 110° C. for 12 hours while stirring. 12.6 g of water was distilled off as an azeotrope with toluene from the water produced by the reaction. Then, it cooled to room temperature, and the obtained reaction solution was neutralized with 35.35 g of 15% sodium hydroxide aqueous solution, and it washed with water. Then, using an evaporator, 118.1 g of diethylene glycol monoethyl ether acetate were substituted while toluene was distilled off to obtain a novolak-type acrylate resin solution. Next, 332.5 g of the obtained novolak-type acrylate resin solution and 1.22 g of triphenylphosphine were put into a reactor equipped with a stirrer, a thermometer, and an air blowing pipe, and air was blown in at a rate of 10 ml/min, while stirring. 60.8 g of tetrahydrophthalic anhydride was added, and it was made to react at 95-101 degreeC for 6 hours. Resin solution A-4 of a carboxyl group-containing photosensitive resin with a solid acid value of 88 mgKOH/g and a nonvolatile content of 65% was obtained.

[鹼可溶性樹脂之合成] (合成例5:鹼可溶性樹脂A-5(共聚合丙烯酸酯加成鹼可溶性樹脂))   將作為溶劑之二丙二醇單甲醚325.0質量份加熱至110℃,並將甲基丙烯酸174.0質量份、ε-己內酯改質甲基丙烯酸(平均分子量314)174.0質量份、甲基丙烯酸甲酯77.0質量份、二丙二醇單甲醚222.0質量份、及作為聚合觸媒之t-丁基過氧2-乙基己酸酯(日油公司製、PerbutylO)12.0質量份的混合物,以3小時滴下至具備溫度計、攪拌機、滴下漏斗及迴流冷卻器(reflux condenser)之燒瓶中,再以110℃攪拌3小時,使聚合觸媒失活,得到樹脂溶液。將此樹脂溶液冷卻後,添加DAICEL公司製Cyclomer M100(289.0質量份)、三苯基膦3.0質量份及氫醌單甲醚1.3質量份,昇溫至100℃,藉由攪拌進行環氧基之開環加成反應,得到固形物酸價79.8mgKOH/g、固體成分45.5質量%之含羧基的樹脂溶液A-5。[Synthesis of Alkali-Soluble Resin] (Synthesis Example 5: Alkali-Soluble Resin A-5 (Copolymerized Acrylate-Added Alkali-Soluble Resin)) 325.0 parts by mass of dipropylene glycol monomethyl ether as a solvent was heated to 110° C., 174.0 parts by mass of base acrylic acid, 174.0 parts by mass of ε-caprolactone-modified methacrylic acid (average molecular weight 314), 77.0 parts by mass of methyl methacrylate, 222.0 parts by mass of dipropylene glycol monomethyl ether, and t as a polymerization catalyst A mixture of 12.0 parts by mass of -butylperoxy 2-ethylhexanoate (manufactured by NOF Corporation, PerbutylO) was dropped into a flask equipped with a thermometer, a stirrer, a dropping funnel and a reflux condenser over 3 hours, The polymerization catalyst was deactivated by stirring at 110° C. for 3 hours to obtain a resin solution. After cooling this resin solution, Cyclomer M100 (289.0 parts by mass) manufactured by DAICEL, 3.0 parts by mass of triphenylphosphine, and 1.3 parts by mass of hydroquinone monomethyl ether were added, the temperature was raised to 100° C., and the epoxy group was opened by stirring. The cycloaddition reaction gave a carboxyl group-containing resin solution A-5 having a solid acid value of 79.8 mgKOH/g and a solid content of 45.5 mass %.

[具有乙烯性不飽和基的化合物之合成例] (合成例6:苯酚起始型環氧烷改質丙烯酸酯)   於具備溫度計、氮導入裝置兼環氧烷導入裝置及攪拌裝置的高壓鍋中,投入酚醛清漆型酚樹脂(昭和高分子股份公司製、羥基當量106)106份、50%氫氧化鈉水溶液2.6份、甲苯/甲基異丁基酮(質量比=2/1)100份,攪拌同時將體系內進行氮取代,其次加熱昇溫,於150℃、8kg/cm2 下,慢慢導入環氧丙烷60份使反應。持續反應約4小時,直到成為計量器壓0.0kg/cm2 為止後,冷卻至室溫。此反應溶液中,添加3.3份之36%鹽酸水溶液進行混合,中和氫氧化鈉。此中和反應生成物使用甲苯稀釋,水洗3次,使用蒸發器脫溶劑,得到羥基當量為164g/eq.之酚醛清漆型酚樹脂的環氧烷加成物。此乃是羥基1當量,加成平均1莫耳之環氧烷者。   將所得之酚醛清漆型可溶性酚樹脂之環氧烷加成物164份、丙烯酸72份、p-甲苯磺酸3.0份、氫醌單甲醚0.05份、甲苯100份投入於具備攪拌機、溫度計及空氣吹入管的反應器中,邊吹入空氣,邊攪拌以90℃反應12小時。藉由反應生成的水,作為與甲苯之共沸混合物,開始餾出後,再使反應5小時,冷卻至室溫。將所得之反應溶液使用5%NaCl水溶液水洗,以蒸發器餾除甲苯,添加卡必醇乙酸酯,得到固體成分70%之苯酚起始型環氧烷改質丙烯酸酯的樹脂溶液。[Synthesis example of compound having ethylenically unsaturated group] (Synthesis example 6: phenol-initiated alkylene oxide modified acrylate) 106 parts of novolak-type phenol resin (manufactured by Showa Polymer Co., Ltd., hydroxyl equivalent 106), 2.6 parts of 50% sodium hydroxide aqueous solution, and 100 parts of toluene/methyl isobutyl ketone (mass ratio = 2/1) were put and stirred At the same time, nitrogen substitution was carried out in the system, followed by heating and heating, and 60 parts of propylene oxide was gradually introduced at 150° C. and 8 kg/cm 2 to react. The reaction was continued for about 4 hours until the gauge pressure reached 0.0 kg/cm 2 and then cooled to room temperature. To this reaction solution, 3.3 parts of a 36% aqueous hydrochloric acid solution was added and mixed to neutralize sodium hydroxide. The neutralization reaction product was diluted with toluene, washed three times with water, and desolvated with an evaporator to obtain an alkylene oxide adduct of a novolak-type phenol resin having a hydroxyl equivalent of 164 g/eq. This is 1 equivalent of hydroxyl group, and an average of 1 mole of alkylene oxide is added. 164 parts of alkylene oxide adducts of the obtained novolak-type resol phenol resin, 72 parts of acrylic acid, 3.0 parts of p-toluenesulfonic acid, 0.05 parts of hydroquinone monomethyl ether, and 100 parts of toluene were put into a mixer equipped with a thermometer and air. It was made to react at 90 degreeC for 12 hours, blowing in the air, and stirring in the reactor which was blown into the tube. After the water produced by the reaction started to distill out as an azeotrope with toluene, the reaction was continued for 5 hours and cooled to room temperature. The obtained reaction solution was washed with 5% NaCl aqueous solution, toluene was distilled off with an evaporator, and carbitol acetate was added to obtain a resin solution of phenol-initiated alkylene oxide modified acrylate with a solid content of 70%.

(實施例1~15、比較例1)   依據下述表1、2所示之調配比例,調配各成分,使用攪拌機進行預備混合後,以三輥磨機使分散,經混練分別調製硬化性樹脂組成物。又,表中之調配量為質量份。(Examples 1 to 15, Comparative Example 1) Each component was prepared according to the mixing ratio shown in Tables 1 and 2 below, and after preliminary mixing with a mixer, dispersion was carried out with a three-roll mill, and curable resins were prepared by kneading. composition. In addition, the compounding quantity in a table|surface is a mass part.

Figure 02_image027
*1:上述合成例1合成之感光性酚醛清漆型含羧基之樹脂的樹脂溶液A-1(固體成分65%) *2:上述合成例2合成之鹼可溶性醯胺醯亞胺樹脂的樹脂溶液A-2(固體成分45%) *3:上述合成例3合成之鹼可溶性丙烯酸酯加成醯胺醯亞胺樹脂的樹脂溶液A-3(固體成分42%) *4:上述合成例4合成之苯酚起始型鹼可溶性樹脂的樹脂溶液A-4(固體成分65%) *5:上述合成例5合成之共聚合丙烯酸酯加成鹼可溶性樹脂的樹脂溶液A-5(固體成分46%) *6:BASF JAPAN公司製IRGACURETPO(氧化磷系光聚合起始劑) *7:BASF JAPAN公司製IRGACUREOXE02(肟系光聚合起始劑) *8:甲基乙基酮 *9:四國化成公司製1B2PZ(咪唑系硬化觸媒;1-苄基-2-苯基咪唑) *10:四國化成公司製2PHZ(咪唑系硬化觸媒;2-苯基-4,5-二羥基甲基咪唑) *11:川崎化成工業公司製QS-30(醌系光聚合抑制劑) *12:BYK公司製BYK-361N(聚丙烯酸酯系表面調整劑) *13:新中村化學工業公司製A-DCP(2官能;三環癸烷二甲醇二丙烯酸酯;分子量304) *14:BASF JAPAN公司製Laromer LR 8863(3官能;環氧乙烷加成三羥甲基丙烷三丙烯酸酯;分子量約340) *15:根上工業公司製UN9200A(2官能;具有非芳香族系之聚碳酸酯骨架之聚碳酸酯系胺基甲酸酯丙烯酸酯;分子量15000) *16:二季戊四醇六丙烯酸酯(6官能;分子量578;丙烯醯基當量未達100) *17:新中村化學工業公司製A-TMPT(3官能;三羥甲基丙烷三丙烯酸酯;分子量296;丙烯醯基當量未達100) *18:大阪有機化學工業公司製IBXA(單官能;丙烯酸異冰片酯;分子量208;丙烯醯基當量208) *19:上述合成例6合成之苯酚起始型環氧烷改質丙烯酸酯的樹脂溶液(固體成分70%) *20:Designer Molecules公司製BMI-1500(液狀雙馬來醯亞胺:雙馬來醯亞胺寡聚物、60℃、5rpm下,以圓錐平板型黏度計(東機產業公司製TVH-33H)進行測量的黏度:20,000±10,000cp) *21:DIC公司製HP-7200L(脂環式環氧化合物;卡必醇乙酸酯之稀釋品、固體成分85%) *22:信越SILICONES公司製X-40-2670(具有環狀有機矽氧烷8員環骨架之4官能脂環環氧化合物) *23:信越SILICONES公司製X-40-2678(具有環狀有機矽氧烷8員環骨架之2官能脂環環氧化合物) *24:DMI公司製CS-783(具有環狀有機矽氧烷8員環骨架之環氧丙醚丙烯酸酯) *25:和光純藥公司製(具有環狀有機矽氧烷6員環骨架之3官能乙烯基化合物) *26:DIC公司製850-S(Bis-A骨架環氧化合物)
Figure 02_image027
*1: Resin solution A-1 of photosensitive novolak-type carboxyl group-containing resin synthesized in Synthesis Example 1 above (solid content 65%) *2: Resin solution of alkali-soluble amide imide resin synthesized in Synthesis Example 2 above A-2 (solid content 45%) *3: Resin solution A-3 (solid content 42%) of the alkali-soluble acrylate-addition imide resin synthesized in Synthesis Example 3 above *4: Synthesized in Synthesis Example 4 above Resin solution A-4 of phenol-initiated alkali-soluble resin (solid content 65%) *5: Resin solution A-5 of copolymerized acrylate-added alkali-soluble resin synthesized in Synthesis Example 5 above (solid content 46%) *6: IRGACURETPO (phosphorus oxide-based photopolymerization initiator) manufactured by BASF JAPAN Corporation *7: IRGACUREOXE02 (oxime-based photopolymerization initiator) manufactured by BASF JAPAN Corporation *8: Methyl ethyl ketone *9: Shikoku Chemical Co., Ltd. 1B2PZ (imidazole-based hardening catalyst; 1-benzyl-2-phenylimidazole) *10: 2PHZ (imidazole-based hardening catalyst; 2-phenyl-4,5-dihydroxymethylimidazole) manufactured by Shikoku Chemical Co., Ltd. ) *11: QS-30 (quinone-based photopolymerization inhibitor) manufactured by Kawasaki Chemical Industry Co., Ltd. *12: BYK-361N (polyacrylate-based surface conditioner) manufactured by BYK Corporation *13: A-DCP manufactured by Shin-Nakamura Chemical Industry Co., Ltd. (Difunctional; Tricyclodecane dimethanol diacrylate; Molecular weight: 304) *14: Laromer LR 8863, manufactured by BASF JAPAN (Trifunctional; Trimethylolpropane triacrylate added with ethylene oxide; Molecular weight about 340) *15: UN9200A manufactured by Negami Kogyo Co., Ltd. (2-functional; polycarbonate-based urethane acrylate having a non-aromatic polycarbonate skeleton; molecular weight: 15,000) *16: Dipentaerythritol hexaacrylate (6-functional; Molecular weight 578; Acryloyl equivalent weight less than 100) *17: A-TMPT (tri-functional; trimethylolpropane triacrylate; molecular weight 296; Acryloyl equivalent weight less than 100) *18: IBXA (monofunctional; isobornyl acrylate; molecular weight 208; acryloyl equivalent 208) *19: Resin solution of phenol-initiated alkylene oxide-modified acrylate synthesized in Synthesis Example 6 above (solid Composition 70%) *20: BMI-1500 manufactured by Designer Molecules (liquid bismaleimide: bismaleimide oligomer, 60°C, 5 rpm, in a cone-plate viscometer (Toki Sangyo). Viscosity measured by company TVH-33H): 20,000±10,000cp) *21: DIC company HP-7200L (alicyclic epoxy compound; carbitol acetate dilution, solid content 85%) *22 : X-40-2670 made by Shin-Etsu Silicones Co., Ltd. (with a ring 4-functional alicyclic epoxy compound with 8-membered organosiloxane skeleton) *23: X-40-2678 (bifunctional alicyclic epoxy compound with 8-membered cyclic organosiloxane skeleton) manufactured by Shin-Etsu Silicones Co., Ltd. *24: CS-783 manufactured by DMI Corporation (glycidyl ether acrylate with 8-membered cyclic organosiloxane skeleton) *25: manufactured by Wako Pure Chemical Industries Ltd. (with 6-membered cyclic organosiloxane skeleton) Trifunctional vinyl compound) *26: 850-S (Bis-A skeleton epoxy compound) manufactured by DIC Corporation

Figure 02_image029
Figure 02_image029

針對所得之各實施例及比較例的負型光硬化性樹脂組成物,依據以下進行評價。其結果如上述表中所示。The negative photocurable resin compositions of the obtained Examples and Comparative Examples were evaluated as follows. The results are shown in the above table.

(評價用硬化膜製作)   將所得之各實施例及比較例之負型光硬化性樹脂組成物,以網版印刷以任意的膜厚全面塗佈於圖型形成之評價用的銅箔基板上,以80℃乾燥20分鐘,放冷至室溫。然後,對於所得之基板,使用搭載有高壓水銀燈的曝光裝置,以曝光量500mJ/cm2 對阻劑圖型進行曝光。然後,對於所得之基板,使用UV輸送帶式爐,以積算曝光量1000mJ/cm2 之條件照射紫外線後,以180℃加熱60分鐘進行硬化。自上述所得之硬化塗膜上,剝離銅箔,得到單獨硬化膜。對於所得之硬化膜,如以下評價特性。(Preparation of Cured Film for Evaluation) The obtained negative photocurable resin composition of each Example and Comparative Example was coated on the entire surface of the copper foil substrate for evaluation of pattern formation with an arbitrary film thickness by screen printing , dried at 80°C for 20 minutes, and allowed to cool to room temperature. Then, about the obtained board|substrate, using the exposure apparatus equipped with a high pressure mercury lamp, the resist pattern was exposed with the exposure amount of 500mJ/cm< 2 >. Then, the obtained substrate was irradiated with ultraviolet rays using a UV conveyor furnace on the condition of an accumulated exposure amount of 1000 mJ/cm 2 , and then heated at 180° C. for 60 minutes for curing. From the cured coating film obtained above, the copper foil was peeled off to obtain a single cured film. About the obtained cured film, the characteristic was evaluated as follows.

(耐熱性(玻璃轉移溫度Tg))   Tg係依據IPC TM-650,以昇溫速度5℃/分鐘、拉伸模式的條件,藉由DMA法測量。Tg為190℃以上者,評價為◎、未達190℃、且180℃以上者評價為〇、未達180℃、且170℃以上評價為△、未達170℃,評價為×。(Heat resistance (glass transition temperature Tg)) Tg is measured by the DMA method in accordance with IPC TM-650, under the conditions of a heating rate of 5°C/min and a stretching mode. Those with Tg of 190°C or more were evaluated as ⊚, those less than 190°C and 180°C or more were evaluated as 0, those less than 180°C and 170°C or more were evaluated as Δ, and those less than 170°C were evaluated as ×.

(延伸率(拉伸破壞))   延伸率(拉伸破壞延伸)係使用拉伸試驗機(島津製作所公司製AGS-G100W),依據JISK7127,在拉伸速度1.0mm/分鐘、23℃之條件下測量。(Elongation ratio (tensile failure)) The elongation ratio (tensile failure elongation) was measured using a tensile tester (AGS-G100W, manufactured by Shimadzu Corporation), according to JISK7127, at a tensile speed of 1.0 mm/min and 23°C. Measurement.

(翹曲)   以上述評價基板製作條件,在35μm厚之銅箔上,形成20μm厚的阻劑,以特定的步驟,並以硬化後之4方形之翹曲量之合計進行評價。合計為20mm以上、未達25mm者評價為◎、25mm以上、未達30mm者評價為〇、30mm以上者評價為×。(Warpage) According to the above evaluation substrate production conditions, a 20μm thick resist was formed on a 35μm thick copper foil, and the evaluation was performed by the total amount of warpage of the four squares after curing in a specific step. A total of 20 mm or more, less than 25 mm was evaluated as ⊚, 25 mm or more, and less than 30 mm were evaluated as 0, and those of 30 mm or more were evaluated as ×.

(解析性(光暈(halation)))   將所得之各實施例及比較例之負型光硬化性樹脂組成物,以旋轉塗佈機以任意的膜厚全面塗佈於評價用之矽晶圓上,以80℃乾燥20分鐘,放冷至室溫。然後,對於所得之評價用矽晶圓,使用搭載有高壓水銀燈的曝光裝置,以曝光量300mJ/cm2 ,使阻劑塗佈厚10-15μm時,成為設計開口徑20μm之阻劑圖型,經由負遮罩進行曝光,使用2.38質量%之TMAH(四甲銨=氫氧化物)顯影液,在噴霧壓0.15MPa的條件進行30秒鐘顯影。然後,對於所得之評價用矽晶圓,使用UV輸送帶式爐,以積算曝光量1000mJ/cm2 之條件照射紫外線後,以180℃加熱60分鐘進行硬化。   以上述評價用矽晶圓製作條件,當阻劑塗佈厚10~15μm時、設計開口徑20μm時,實測値為20~19μm,亦即光暈為1μm以內者評價為◎。同樣依據實測値,光暈超過1μm、且2μm以下時評價為○、光暈超過2μm時評價為×。(Analytical (halation)) The obtained negative photocurable resin composition of each Example and Comparative Example was fully coated on a silicon wafer for evaluation with a spin coater with an arbitrary film thickness dried at 80°C for 20 minutes, and allowed to cool to room temperature. Then, using an exposure apparatus equipped with a high-pressure mercury lamp for the obtained silicon wafer for evaluation, with an exposure amount of 300 mJ/cm 2 and a resist coating thickness of 10-15 μm, a resist pattern with a design opening diameter of 20 μm was obtained. Exposure was performed through a negative mask, and development was performed for 30 seconds under the conditions of a spray pressure of 0.15 MPa using a 2.38 mass % TMAH (tetramethylammonium=hydroxide) developer. Then, the obtained silicon wafer for evaluation was irradiated with ultraviolet rays using a UV conveyor furnace on the condition of an accumulated exposure amount of 1000 mJ/cm 2 , and then heated at 180° C. for 60 minutes for curing. Based on the above silicon wafer fabrication conditions for evaluation, when the resist coating thickness is 10-15 μm and the designed opening diameter is 20 μm, the measured value is 20-19 μm, that is, those with halo within 1 μm are evaluated as ◎. Also according to the actual measurement value, when the halo exceeds 1 μm and 2 μm or less, it is evaluated as ◯, and when the halo exceeds 2 μm, it is evaluated as ×.

如上述表中所示,可知本發明之負型光硬化性樹脂組成物解析性優異,又,可形成高耐熱性及高延伸率的硬化物。As shown in the above table, it was found that the negative-type photocurable resin composition of the present invention is excellent in resolution and can form a cured product with high heat resistance and high elongation.

Claims (9)

一種負型光硬化性樹脂組成物,其特徵係含有(A)鹼可溶性樹脂、(B)具有下述通式(1)表示的骨架,且下述通式(1)中之2個以上不同矽原子具有熱硬化性反應基或感光性基之具有6~12員環之環狀矽氧烷骨架的有機矽氧烷化合物,及(C)光聚合起始劑,其中前述(B)有機矽氧烷化合物為具有前述熱硬化性反應基與前述感光性基兩者之前述(B)有機矽氧烷化合物,或含有具有前述熱硬化性反應基之前述(B)有機矽氧烷化合物與具有前述感光性基之前述(B)有機矽氧烷化合物,
Figure 106145951-A0305-02-0051-1
(式中,n表示1~4之整數)。
A negative photocurable resin composition characterized by containing (A) an alkali-soluble resin, (B) having a skeleton represented by the following general formula (1), and two or more of the following general formula (1) are different An organosiloxane compound having a cyclosiloxane skeleton with a 6-12-membered ring and having a thermosetting reactive group or a photosensitive group on the silicon atom, and (C) a photopolymerization initiator, wherein the aforementioned (B) organosilicon The oxane compound is the aforementioned (B) organosiloxane compound having both the aforementioned thermosetting reactive group and the aforementioned photosensitive group, or the aforementioned (B) organosiloxane compound having the aforementioned thermosetting reactive group and the aforementioned (B) organosiloxane compound having the aforementioned thermosetting reactive group. The aforementioned (B) organosiloxane compound of the aforementioned photosensitive group,
Figure 106145951-A0305-02-0051-1
(In the formula, n represents an integer from 1 to 4).
如請求項1之負型光硬化性樹脂組成物,其中前述熱硬化性反應基為環氧基。 The negative photocurable resin composition according to claim 1, wherein the thermosetting reactive group is an epoxy group. 如請求項1之負型光硬化性樹脂組成物,其中前述感光性基為乙烯性不飽和基。 The negative photocurable resin composition according to claim 1, wherein the photosensitive group is an ethylenically unsaturated group. 如請求項1~3中任一項之負型光硬化性樹脂組成物, 其中進一步含有具有乙烯性不飽和基的化合物。 As the negative photocurable resin composition of any one of claims 1 to 3, Among them, a compound having an ethylenically unsaturated group is further contained. 如請求項4之負型光硬化性樹脂組成物,其中前述具有乙烯性不飽和基之化合物為2官能以上的(甲基)丙烯酸酯化合物。 The negative photocurable resin composition according to claim 4, wherein the compound having an ethylenically unsaturated group is a (meth)acrylate compound having two or more functions. 如請求項4之負型光硬化性樹脂組成物,其中前述具有乙烯性不飽和基之化合物為丙烯醯當量為100以上的(甲基)丙烯酸酯化合物。 The negative-type photocurable resin composition according to claim 4, wherein the compound having an ethylenically unsaturated group is a (meth)acrylate compound having an acrylamide equivalent of 100 or more. 一種乾薄膜,其特徵係具有將請求項1~6中任一項之負型光硬化性樹脂組成物塗佈於薄膜,經乾燥而得的樹脂層。 A dry film characterized by having a resin layer obtained by coating the negative photocurable resin composition of any one of claims 1 to 6 on the film and drying it. 一種硬化物,其特徵係將請求項1~6中任一項之負型光硬化性樹脂組成物、或請求項7之乾薄膜的樹脂層硬化而得。 A cured product obtained by curing the negative photocurable resin composition of any one of Claims 1 to 6, or the resin layer of the dry film of Claim 7. 一種印刷配線板,其特徵係具有請求項8之硬化物。 A printed wiring board characterized by having the cured product of claim 8.
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