TWI417662B - A photosensitive resin composition and a hardened product thereof - Google Patents

A photosensitive resin composition and a hardened product thereof Download PDF

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TWI417662B
TWI417662B TW097137563A TW97137563A TWI417662B TW I417662 B TWI417662 B TW I417662B TW 097137563 A TW097137563 A TW 097137563A TW 97137563 A TW97137563 A TW 97137563A TW I417662 B TWI417662 B TW I417662B
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group
carbon atoms
resin composition
photosensitive resin
alkyl
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TW097137563A
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TW200935175A (en
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Yoko Shibasaki
Masao Arima
Kazuyoshi Yoneda
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Taiyo Holdings Co Ltd
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    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/0045Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/0047Photosensitive materials characterised by additives for obtaining a metallic or ceramic pattern, e.g. by firing
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds

Description

感光性樹脂組成物及其硬化物 Photosensitive resin composition and cured product thereof

本發明關於適合於要求低翹曲性的薄印刷電路板、尤其撓性電路板的阻焊劑或樹脂絕緣層等的可撓性硬化皮膜形成之感光性樹脂組成物,其硬化物及具有硬化皮膜的印刷電路板。The present invention relates to a photosensitive resin composition which is suitable for a thin printed circuit board which requires low warpage, in particular, a solder resist or a resin insulating layer of a flexible circuit board, and a hardened material and a hardened film. Printed circuit board.

以往,撓性電路板係使用在稱為覆蓋層的聚醯亞胺薄膜上塗佈有黏著劑的絕緣薄膜,對此以壓機冲孔加工及層合,再藉由壓機於加壓條件下進行熱硬化,成為形成有電路的撓性基板之表面的覆蓋層。此覆蓋層因為係由作為基底的聚醯亞胺薄膜及作為黏著劑層的低收縮熱硬化性樹脂所構成,故層合後及壓機硬化後的翹曲非常小,而且於其後的補強板之黏貼、熱硬化後或零件安裝的回流焊接時之翹曲亦可能非常少,大量使用於撓性基板用途。Conventionally, a flexible circuit board uses an insulating film coated with an adhesive on a polyimide film called a cover layer, which is punched and laminated by a press, and then pressed by a press. The film is thermally cured to form a coating layer on the surface of the flexible substrate on which the circuit is formed. Since the cover layer is composed of a polyimide film as a base and a low shrinkage thermosetting resin as an adhesive layer, warpage after lamination and hardening of the press is very small, and reinforcement thereafter. The warpage of the board after sticking, heat hardening or reflow soldering of the component mounting may be very small, and it is used in a large amount for flexible substrate applications.

然而,由於藉由壓機來冲孔加工,故微細加工係困難,而且於與形成有電路的電路板層合時,有定位精度不良的缺點。However, since the punching process is performed by the press, the microfabrication is difficult, and when it is laminated with the circuit board on which the circuit is formed, there is a disadvantage that the positioning accuracy is poor.

對於此,有提案當作感光性覆蓋層的鹼顯像性感光性樹脂組成物或其乾膜,例如在專利文獻1(特開2000-131836號公報)中,提案一種感光性樹脂組成物,其含有使(a)具有2個以上的羥基及1個以上的羧基之化合物、(b)具有6員環構造的2官能以上之聚異氰酸酯及(c)具有羥基的(甲基)丙烯酸酯反應而得之具有羧基的胺基甲酸乙酯丙烯酸酯、光聚合引發劑、稀釋劑及2官能以上的環氧樹脂。In the above, an alkali-developing photosensitive resin composition which is a photosensitive coating layer, or a dry film thereof, is proposed, and a photosensitive resin composition is proposed in the patent document 1 (JP-A-2000-131836). It contains (a) a compound having two or more hydroxyl groups and one or more carboxyl groups, (b) a bifunctional or higher polyisocyanate having a 6-membered ring structure, and (c) a (meth) acrylate having a hydroxyl group. Further, a urethane acrylate having a carboxyl group, a photopolymerization initiator, a diluent, and a bifunctional or higher epoxy resin are obtained.

然而,由於係光硬化性的熱硬化性組成物,有交聯所致的硬化收縮,在光硬化後及熱硬化後發生翹曲的問題。However, due to the photocurable thermosetting composition, there is a problem of hardening shrinkage due to crosslinking, and warpage occurs after photocuring and after thermal curing.

再者,作為低翹曲性的組成物,專利文獻2(特開2005-10318號公報)中提案一種用於電路基板之阻焊劑的感光性樹脂組成物,其含有:含有含羧基的胺基甲酸乙酯改性環氧(甲基)丙烯酸酯之活性能量線硬化性樹脂、1分子中具有1個至2個乙烯性不飽和鍵的活性能量線硬化性不飽和化合物、光聚合引發劑、稀釋劑及熱硬化性環氧化合物,專利文獻3(W02004/079452號公報)中提案一種感光性樹脂組成物,其含有鹼水溶液可溶性胺基甲酸乙酯樹脂、光聚合引發劑、及反應性交聯劑。再者,專利文獻4(特開2002-229201號公報)中提案一種感光性組成物,其含有:含有具羧基的胺基甲酸乙酯(甲基)丙烯酸酯化合物及此以外的具乙烯性不飽和基的化合物之光硬化成分、熱硬化性樹脂、光聚合引發劑及熱聚合觸媒。In addition, a photosensitive resin composition for a solder resist of a circuit board, which contains an amine group containing a carboxyl group, is proposed in the patent document 2 (Japanese Unexamined Patent Publication No. 2005-10318). An active energy ray-curable resin of ethyl acrylate-modified epoxy (meth) acrylate, an active energy ray-curable unsaturated compound having one to two ethylenic unsaturated bonds in one molecule, a photopolymerization initiator, A thinner and a thermosetting epoxy compound, and a photosensitive resin composition containing an alkali aqueous solution soluble urethane resin, a photopolymerization initiator, and reactive crosslinking are proposed in Patent Document 3 (WO2004/079452). Agent. In addition, a photosensitive composition containing a urethane (meth) acrylate compound having a carboxyl group and having an ethylenicity other than the above is proposed in the patent document 4 (JP-A-2002-229201). A photocurable component of a saturated group compound, a thermosetting resin, a photopolymerization initiator, and a thermal polymerization catalyst.

此等組成物雖然硬化後的翹曲為充分小之值,但實際採用於撓性電路板時,有由於補強板黏貼步驟之後加熱、及零件安裝時的加熱而發生翹曲的缺點。Although the warpage after hardening of these compositions is a sufficiently small value, when it is actually used for a flexible wiring board, there is a disadvantage that warpage occurs due to heating after the reinforcing plate bonding step and heating at the time of component mounting.

再者,近年來,以提高定位精度為目的之雷射直接曝光係受到注目,但於使用如前述之習知感光性樹脂組成物時,有必須多的曝光量、曝光費時之問題。Further, in recent years, laser direct exposure for the purpose of improving the positioning accuracy has been attracting attention. However, when the photosensitive resin composition as described above is used, there is a problem that a large amount of exposure and exposure time are required.

[專利文獻1]特開2000-131836號公報(發明申請專利範圍)[Patent Document 1] JP-A-2000-131836 (Scope of Invention Application)

[專利文獻2]特開2005-10318號公報(發明申請專利範圍)[Patent Document 2] JP-A-2005-10318 (Scope of Invention Application)

[專利文獻3]WO 2004/079452號公報(發明申請專利範圍)[Patent Document 3] WO 2004/079452 (Scope of Invention Patent Application)

[專利文獻4]特開2002-229201號公報(發明申請專利範圍)[Patent Document 4] JP-A-2002-229201 (Scope of Invention Application)

本發明係為了消除如前述的先前技術之問題點而完成者,其主要目的為提供可抑制撓性基板的製作步驟及其後步驟或零件安裝步驟中的加熱所致的翹曲之發生,而且即使光聚合引發劑為少量添加也為高感度,亦可雷射直接曝光,且可形成與以往的阻焊劑組成物同樣的對各種基材之密接性、耐焊熱性、耐濕性、耐藥品性、電絕緣性等諸特性優異的硬化皮膜之圖型的感光性樹脂組成物。The present invention has been made in order to eliminate the problems of the prior art as described above, and its main object is to provide an occurrence of warpage caused by heating in the manufacturing step of the flexible substrate and the subsequent step or part mounting step, and Even if the photopolymerization initiator is added in a small amount, it is highly sensitive, and it can be directly exposed by laser, and can form the same adhesion to various substrates, solder heat resistance, moisture resistance, and chemical resistance as in the conventional solder resist composition. A photosensitive resin composition of a pattern of a cured film having excellent properties such as properties and electrical insulating properties.

再者,本發明之目的提供藉由使用如此的感光性樹脂組成物而得之上述諸特性優異的硬化物、及由該硬化物形成阻焊劑等的硬化皮膜而成的印刷電路板,尤其撓性印刷電路板。In addition, it is an object of the present invention to provide a printed circuit board obtained by using such a photosensitive resin composition and having a cured product having excellent properties as described above, and a cured film obtained by forming a solder resist or the like from the cured product. Printed circuit board.

為了達成前述目的,本發明提供一種感光性樹脂組成物,其特徵係:其係含有(A)含羧基的樹脂、(B)具有下述通式(I)所示的基之肟酯系光聚合引發劑、及(C)分子中具有2個以上的乙烯性不飽和基之化合物的藉由稀鹼水溶液可顯像的組成物,對於100質量份的上述含羧基的樹脂(A)而言,係以0.1~1.5質量份之比例含有上述肟酯系光聚合引發劑(B);In order to achieve the above object, the present invention provides a photosensitive resin composition comprising (A) a carboxyl group-containing resin and (B) an oxime ester light having a group represented by the following formula (I). A composition which can be developed by a dilute alkali aqueous solution of a polymerization initiator and a compound having two or more ethylenically unsaturated groups in the molecule (C), for 100 parts by mass of the above carboxyl group-containing resin (A) , the above oxime ester photopolymerization initiator (B) is contained in a ratio of 0.1 to 1.5 parts by mass;

(式中,R1 表示氫原子、苯基(可經碳數1~6的烷基、苯基或鹵素原子所取代)、碳數1~20的烷基(可經1個以上的羥基所取代,在烷基鏈的中間可有1個以上的氧原子)、碳數5~8的環烷基、碳數2~20的烷醯基或苯甲醯基(可經碳數1~6的烷基或苯基所取代),R2 表示苯基(可經碳數1~6的烷基、苯基或鹵素原子所取代)、碳數1~20的烷基(可經1個以上的羥基所取代,在烷基鏈的中間可有1個以上的氧原子)、碳數5~8的環烷基、碳數2~20的烷醯基或苯甲醯基(可經碳數1~6的烷基或苯基所取代))。(wherein R 1 represents a hydrogen atom, a phenyl group (which may be substituted by an alkyl group having 1 to 6 carbon atoms, a phenyl group or a halogen atom), or an alkyl group having 1 to 20 carbon atoms (which may be one or more hydroxyl groups) Substituting, there may be one or more oxygen atoms in the middle of the alkyl chain), a cycloalkyl group having 5 to 8 carbon atoms, an alkanoyl group having 2 to 20 carbon atoms or a benzhydryl group (a carbon number of 1 to 6) Alkyl or phenyl substituted), R 2 represents a phenyl group (which may be substituted by an alkyl group having 1 to 6 carbon atoms, a phenyl group or a halogen atom), and an alkyl group having 1 to 20 carbon atoms (more than one or more) Substituted by a hydroxyl group, may have one or more oxygen atoms in the middle of the alkyl chain), a cycloalkyl group having 5 to 8 carbon atoms, an alkanoyl group having 2 to 20 carbon atoms, or a benzhydryl group (carbon number per pass) 1~6 alkyl or phenyl substituted)).

於較佳的態樣中,從低翹曲性之點來看,前述含羧基的樹脂(A)係具有雙酚A、雙酚F、聯苯、聯二甲苯酚骨架或其氫化骨架的構造之樹脂,或具有胺基甲酸乙酯構造的樹脂。又,從光硬化性之點來看,前述含羧基的樹脂(A)較佳為具有2個以上的自由基聚合性不飽和雙鍵之感光性樹脂。再者,前述感光性樹脂組成物之乾燥塗膜在355nm的吸光度以乾燥膜厚25μm計係在0.3~1.2的範圍內。又,從硬化皮膜的耐熱性等特性提高之觀點來看,本發明的感光性樹脂組成物較佳為含有熱硬化性成分(D)。In a preferred aspect, the carboxyl group-containing resin (A) has a structure of bisphenol A, bisphenol F, biphenyl, dimethicone skeleton or a hydrogenated skeleton thereof from the viewpoint of low warpage. Resin, or a resin having a urethane configuration. Moreover, it is preferable that the carboxyl group-containing resin (A) is a photosensitive resin having two or more radical polymerizable unsaturated double bonds, from the viewpoint of photocurability. Further, the dry coating film of the photosensitive resin composition had an absorbance at 355 nm in a range of 0.3 to 1.2 in terms of a dry film thickness of 25 μm. In addition, the photosensitive resin composition of the present invention preferably contains a thermosetting component (D) from the viewpoint of improving properties such as heat resistance of the cured film.

前述感光性樹脂組成物係可為液狀形態及乾膜形態的任一者。The photosensitive resin composition may be either a liquid form or a dry film form.

再者,本發明提供一種印刷電路板,其具有將前述感光性樹脂組成物或其乾膜在銅上進行光硬化而得之硬化物,尤其藉由雷射振盪光源進行光硬化而得之硬化物,及藉由最大波長為350~410nm的雷射光使光硬化後,熱硬化而得之硬化皮膜。Furthermore, the present invention provides a printed circuit board having a cured product obtained by photohardening the photosensitive resin composition or a dry film thereof on copper, in particular, hardening by laser hardening of a laser source. And hardening the film by hardening the light by laser light having a maximum wavelength of 350 to 410 nm, and hardening the film.

本發明的感光性樹脂組成物由於含有具有下述通式(I)所示的基之肟酯系光聚合引發劑(B)當作與含羧基的樹脂(A)及分子中具有2個以上的乙烯性不飽和基之化合物(C)一起摻合的光聚合引發劑,故可抑制撓性基板的製作步驟及其後步驟或零件安裝步驟中的加熱所致的翹曲之發生,而且即使對於100質量份的上述含羧基的樹脂(A)而言,以0.1~1.5質量份之比例的少量含有上述肟酯系光聚合引發劑(B),也高感度,亦可雷射直接曝光。又,本發明的感光性樹脂組成物係藉由稀鹼水溶液可顯像的組成物,而且雖然低翹曲性,也可形成與以往的阻焊劑組成物同樣的對各種基材之密接性、耐焊熱性、耐濕性、耐藥品性、無電解鍍金耐性、電絕緣性等諸特性優異的硬化皮膜之圖型。因此,本發明的感光性樹脂組成物係可有利地適用於印刷電路板、尤其撓性印刷電路板的阻焊劑或樹脂絕緣層等的硬化皮膜之形成。The photosensitive resin composition of the present invention contains the oxime ester-based photopolymerization initiator (B) having a group represented by the following formula (I) as having two or more of the carboxyl group-containing resin (A) and the molecule. The photopolymerization initiator in which the ethylenically unsaturated group-containing compound (C) is blended together can suppress the occurrence of warpage caused by heating in the manufacturing step of the flexible substrate and the subsequent step or part mounting step, and even The above-mentioned oxime ester-based photopolymerization initiator (B) is contained in a small amount in an amount of 0.1 to 1.5 parts by mass based on 100 parts by mass of the carboxyl group-containing resin (A), and is also highly sensitive or directly exposed by laser. Further, the photosensitive resin composition of the present invention is a composition which can be developed by a dilute aqueous alkali solution, and has low warpage properties, and can form the same adhesion to various substrates as the conventional solder resist composition. A pattern of a hardened film excellent in properties such as solder heat resistance, moisture resistance, chemical resistance, electroless gold plating resistance, and electrical insulating properties. Therefore, the photosensitive resin composition of the present invention can be favorably applied to the formation of a hardened film such as a solder resist or a resin insulating layer of a printed circuit board, particularly a flexible printed circuit board.

實施發明的最佳形態Best form for implementing the invention

本發明者們發現後加熱步驟及零件安裝時的翹曲係因為光聚合性引發劑的揮發所致,而且組成物的吸光度會大幅影響翹曲。本發明者們進一步研究此等現象,結果發現於使用具有下述通式(I)所示的基之肟酯系光聚合引發劑(B)當作與含羧基的樹脂(A)及分子中具有2個以上的乙烯性不飽和基之化合物(C)一起摻合的光聚合引發劑時,可得到即使少量添加也具有充分的光特性,亦可雷射直接曝光的感光性樹脂組成物,而終於完成本發明。The present inventors have found that the post-heating step and the warpage at the time of component mounting are caused by the volatilization of the photopolymerization initiator, and the absorbance of the composition greatly affects the warpage. The present inventors have further studied the above phenomenon, and as a result, it has been found that an oxime ester-based photopolymerization initiator (B) having a group represented by the following formula (I) is used as a carboxyl group-containing resin (A) and in a molecule. When a photopolymerization initiator containing a compound (C) having two or more ethylenically unsaturated groups is blended together, a photosensitive resin composition which has sufficient light characteristics even when added in a small amount and which can be directly exposed by laser can be obtained. The invention has finally been completed.

以下說明本發明的感光性樹脂組成物之各成分。Each component of the photosensitive resin composition of the present invention will be described below.

首先,作為含羧基的樹脂(A),可使用本身不具有乙烯性不飽和雙鍵之含羧基的樹脂、或具有乙烯性不飽和雙鍵的感光性含羧基的樹脂中任一者,但沒有特定的限定,可合適地使用尤其以下所列舉的化合物(可為寡聚物及聚合物中任一者)。First, as the carboxyl group-containing resin (A), any of a carboxyl group-containing resin having no ethylenic unsaturated double bond or a photosensitive carboxyl group-containing resin having an ethylenically unsaturated double bond can be used, but no Specific compounds, particularly exemplified below (which may be either an oligomer or a polymer) may be suitably used.

(1)使(甲基)丙烯酸等的不飽和羧酸與苯乙烯、α-甲基苯乙烯、(甲基)丙烯酸低級烷基酯、異丁烯等之具有不飽和雙鍵的化合物共聚合而得之含羧基的樹脂。(1) copolymerizing an unsaturated carboxylic acid such as (meth)acrylic acid with a compound having an unsaturated double bond such as styrene, α-methylstyrene, a lower alkyl (meth)acrylate or isobutylene. a carboxyl group-containing resin.

(2)由脂肪族二異氰酸酯、支鍵脂肪族二異氰酸酯、脂環式二異氰酸酯、芳香族二異氰酸酯等的二異氰酸酯、與二羥甲基丙酸、二羥甲基丁酸等之含有羧基的二醇化合物、及聚碳酸酯系多元醇、聚醚系多元醇、聚酯系多元醇、聚烯烴系多元醇、丙烯酸系多元醇、雙酚A系環氧烷加成物二醇、具有酚性羥基及醇性羥基的化合物等之二醇化合物的聚加成反應所得之含羧基的胺基甲酸乙酯樹脂。(2) a diisocyanate such as an aliphatic diisocyanate, a branched aliphatic diisocyanate, an alicyclic diisocyanate or an aromatic diisocyanate, or a carboxyl group containing dimethylolpropionic acid or dimethylolbutanoic acid a diol compound, a polycarbonate-based polyol, a polyether-based polyol, a polyester-based polyol, a polyolefin-based polyol, an acrylic polyol, a bisphenol A-based alkylene oxide adduct diol, and a phenol A carboxyl group-containing urethane resin obtained by a polyaddition reaction of a diol compound such as a hydroxyl group or an alcoholic hydroxyl group.

(3)由二異氰酸酯與雙酚A型環氧樹脂、氫化雙酚A型環氧樹脂、溴化雙酚A型環氧樹脂、雙酚F型環氧樹脂、雙酚S型環氧樹脂、聯二甲苯酚型環氧樹脂、雙酚型環氧樹脂等的2官能環氧樹脂之(甲基)丙烯酸酯或其部分酸酐改性物、含有羧基二醇化合物、及二醇化合物的聚加成反應所得之感光性含有羧基的胺基甲酸乙酯樹脂。(3) From diisocyanate and bisphenol A epoxy resin, hydrogenated bisphenol A epoxy resin, brominated bisphenol A epoxy resin, bisphenol F epoxy resin, bisphenol S epoxy resin, (meth) acrylate of a bifunctional epoxy resin such as a bixylenol type epoxy resin or a bisphenol type epoxy resin, or a partial acid anhydride modified product thereof, a carboxyl group-containing compound, and a diol compound A photosensitive carboxyl group-containing urethane resin obtained by the reaction.

(4)於前述(2)或(3)的樹脂之合成中,添加具(甲基)丙烯酸羥烷基酯等之分子內具有1個羥基及1個以上的(甲基)丙烯醯基之化合物,而末端(甲基)丙烯酸化之含有羧基的胺基甲酸乙酯樹脂。(4) In the synthesis of the resin of the above (2) or (3), a molecule having a hydroxyalkyl (meth) acrylate or the like has one hydroxyl group and one or more (meth) acrylonitrile groups. a compound, and a terminal (meth) acrylated carboxyl group-containing urethane resin.

(5)於前述(2)或(3)的樹脂之合成中,添加異佛爾酮二異氰酸酯與季戊四醇三丙烯酸酯的等莫耳反應物等之分子內具有1個異氰酸酯基及1個以上的(甲基)丙烯醯基之化合物,而末端(甲基)丙烯酸化之含有羧基的胺基甲酸乙酯樹脂。(5) In the synthesis of the resin of the above (2) or (3), one or more isocyanate groups and one or more molecules are added to the molecule such as isophorone diisocyanate and pentaerythritol triacrylate. A (meth)acrylonitrile-based compound and a terminal (meth)acrylated carboxyl group-containing urethane resin.

(6)使如後述的多官能(固形)環氧樹脂與(甲基)丙烯酸反應,於所生成的羥基附加2元酸酐而得之感光性含羧基的樹脂。(6) A photosensitive carboxyl group-containing resin obtained by reacting a polyfunctional (solid) epoxy resin as described later with (meth)acrylic acid and adding a dibasic acid anhydride to the produced hydroxyl group.

(7)使2官能(固形)環氧樹脂的羥基經環氧氯丙烷進一步環氧化的多官能環氧樹脂與(甲基)丙烯酸反應,於所生成的羥基附加2元酸酐而得之感光性含羧基的樹脂。(7) A photosensitive epoxy resin obtained by reacting a polyfunctional epoxy resin which further epoxidizes a hydroxyl group of a bifunctional (solid) epoxy resin with epichlorohydrin with (meth)acrylic acid, and adding a dibasic acid anhydride to the generated hydroxyl group A resin containing a carboxyl group.

(8)使如後述的2官能氧雜環丁烷樹脂與二羧酸反應,於所生成的1級羥基附加2元酸酐而得之含有羧基的聚酯樹脂。(8) A polyester resin containing a carboxyl group obtained by reacting a bifunctional oxetane resin as described later with a dicarboxylic acid to form a dibasic acid anhydride in the produced first-order hydroxyl group.

(9)於上述樹脂(1)~(8)更附加1分子內具有1個環氧基及1個以上的(甲基)丙烯醯基之化合物而成的感光性含羧基的樹脂。(9) A photosensitive carboxyl group-containing resin obtained by adding a compound having one epoxy group and one or more (meth) acrylonitrile groups in one molecule to the above resins (1) to (8).

於此等含羧基的樹脂之中較佳的情況為在前述(2)~(5)的樹脂之合成中所用的具有異氰酸酯基的化合物(亦包含二異氰酸酯)係不具有苯環的二異氰酸酯之情況,及前述(6)、(7)的樹脂之合成中所用的多官能及2官能環氧樹脂係具有雙酚A骨架、雙酚F骨架、聯苯骨架、聯二甲苯酚骨架之線狀構造化合物及其氫化化合物的情況,此從可撓性等之點來看係較宜。又,在另一方面,前述(2)~(5)的樹脂及彼此的如前述(9)之改性物,由於在主鏈具有胺基甲酸乙酯鍵結,對於翹曲較好。而且,前述(1)、(2)、(8)以外的樹脂,由於分子內具有感光性基(自由基聚合性不飽和雙鍵),從光硬化性之點來較佳。Among these carboxyl group-containing resins, a compound having an isocyanate group (including a diisocyanate) used in the synthesis of the resin of the above (2) to (5) is preferably a diisocyanate having no benzene ring. In the case, the polyfunctional and bifunctional epoxy resin used in the synthesis of the resin of the above (6) and (7) has a linear form of a bisphenol A skeleton, a bisphenol F skeleton, a biphenyl skeleton, and a bixylenol skeleton. In the case of constructing a compound and a hydrogenated compound thereof, it is preferred from the viewpoint of flexibility and the like. On the other hand, the resins of the above (2) to (5) and the modified product of the above (9) are preferably bonded to the main chain with a urethane bond. In addition, the resin other than the above (1), (2), and (8) is preferred from the viewpoint of photocurability because it has a photosensitive group (radical polymerizable unsaturated double bond) in the molecule.

再者,於本說明書中,(甲基)丙烯酸酯係為將丙烯酸酯、甲基丙烯酸酯及彼等的混合物總稱的用語,其它類似的表現亦同樣。Further, in the present specification, the (meth) acrylate is a term generally referred to as an acrylate, a methacrylate, and a mixture thereof, and the other similar expressions are also the same.

如前述之含羧基的樹脂(A),由於在主幹.聚合物的側鏈具有多數的游離羧基,故可被稀鹼水溶液所顯像。The carboxyl group-containing resin (A) as described above, due to the backbone. The side chain of the polymer has a large number of free carboxyl groups and can be visualized by a dilute aqueous alkali solution.

又,前述含羧基的樹脂(A)之酸價宜在40~200mgKOH/g的範圍內,更佳為45~120mgKOH/g之範圍。含羧基的樹脂(A)之酸價若低於40mgKOH/g,則鹼顯像變困難,另一方面若超過200mgKOH/g,則由於顯像液而導致曝光部進行溶解,線係超出所要地變細,或視情況地,曝光部與末曝光部沒有區別,被顯像液所溶解剝離,難以形成正常的抗蝕圖型而不宜。Further, the acid value of the carboxyl group-containing resin (A) is preferably in the range of 40 to 200 mgKOH/g, more preferably 45 to 120 mgKOH/g. When the acid value of the carboxyl group-containing resin (A) is less than 40 mgKOH/g, alkali development becomes difficult. On the other hand, if it exceeds 200 mgKOH/g, the exposed portion is dissolved by the developing solution, and the wire system exceeds the desired position. The thickness is reduced or, as the case may be, the exposure portion is not different from the final exposure portion, and is dissolved and peeled off by the developing liquid, and it is difficult to form a normal resist pattern.

再者,前述含羧基的樹脂(A)的重量平均分子量雖然隨著樹脂骨架而不同,但一般宜為2,000~150,000的範圍,更佳為5,000~100,000的範圍。重量平均分子量若低於2,000,則塗膜的膠黏性能差,曝光後的塗膜之耐濕性差,顯像時發生膜減薄,解像度大幅變差。另一方面,重量平均分子量若超過150,000,則顯像性會顯著變差,儲存安定會變差。In addition, although the weight average molecular weight of the carboxyl group-containing resin (A) varies depending on the resin skeleton, it is generally preferably in the range of 2,000 to 150,000, more preferably in the range of 5,000 to 100,000. When the weight average molecular weight is less than 2,000, the adhesiveness of the coating film is poor, and the moisture resistance of the coating film after exposure is poor, and film thinning occurs at the time of development, and the resolution is greatly deteriorated. On the other hand, if the weight average molecular weight exceeds 150,000, the developability is remarkably deteriorated, and the storage stability is deteriorated.

如此之含羧基的樹脂(A)之配合量宜為在全部組成物的20~60質量%之範圍內,較佳為30~50質量%之範圍。若低於上述範圍,則塗膜強度降低而不宜。另一方面,若多於上述範圍,則組成物的黏性變高,或塗佈性等降低而不宜。The amount of the carboxyl group-containing resin (A) is preferably in the range of 20 to 60% by mass, preferably 30 to 50% by mass based on the entire composition. If it is less than the above range, the film strength is lowered, which is not preferable. On the other hand, when it is more than the above range, the viscosity of the composition becomes high, and the coatability and the like are lowered.

其次,本發明所用之具有前述通式(I)所示的基之肟酯系光聚合引發劑(B),係即使少量也感度充分,可有效地防止後加熱及零件安裝時的引發劑揮發所致的翹曲。通常,於感光性覆蓋層及阻焊劑所用的感光性組成物中,對於100質量份的含羧基的樹脂而言,含有5~20質量份的光聚合引發劑。然而,對於100質量份的含羧基的樹脂(A)而言,0.1~1.5質量份的具有前述通式(I)所示之基的肟酯系光聚合引發劑(B)係足夠,而且可給予零件安裝後的翹曲少之硬化物。茲認為在含有許多光聚合引發劑的組成物時,或許在後加熱或零件安裝的回流焊接之際,光聚合引發劑揮發而體積收縮,導致翹曲的發生。從另一方面來看,於組成物的熱硬化之際若為幾乎揮發盡的光聚合引發劑時,則即使添加比較多也沒有問題。即,撓性基板的製作步驟為光硬化→熱硬化→後加熱→零件安裝(回流焊接),若舉出一般例,則其溫度經歴為光硬化(在20~30℃歷數秒)→熱硬化(在140~160℃歷30~60分鐘)→後加熱(在150~170℃歷2小時)→零件安裝(在240~260℃歷數秒~數十秒)。此處,於熱硬化之際幾乎揮發盡的光聚合引發劑,係在本硬化以後已經揮發的成分幾乎不殘留,而在後加熱及零件安裝時不會成為體積收縮的原因。作為如此的光聚合引發劑,可舉出經150℃的加熱而減少50%以上的化合物,後述的(B1a)係合適。In addition, the oxime ester-based photopolymerization initiator (B) having the group represented by the above formula (I) used in the present invention has sufficient sensitivity even in a small amount, and can effectively prevent post-heating and initiator volatilization during component mounting. The resulting warpage. In the photosensitive composition for the photosensitive coating layer and the solder resist, the photopolymerization initiator is contained in an amount of 5 to 20 parts by mass based on 100 parts by mass of the carboxyl group-containing resin. However, for 100 parts by mass of the carboxyl group-containing resin (A), 0.1 to 1.5 parts by mass of the oxime ester-based photopolymerization initiator (B) having the group represented by the above formula (I) is sufficient, and Give the hardened material with less warpage after the parts are installed. It is considered that in the case of a composition containing a plurality of photopolymerization initiators, the photopolymerization initiator may volatilize and shrink in volume upon post-heating or reflow soldering of component mounting, resulting in occurrence of warpage. On the other hand, in the case of thermal curing of the composition, if it is a photopolymerization initiator which is almost volatilized, there is no problem even if it is added in a relatively large amount. That is, the manufacturing process of the flexible substrate is photo-curing→thermal curing→post-heating→part mounting (reflow soldering). If a general example is given, the temperature is tempered by photohardening (at 20 to 30 ° C for several seconds) → thermosetting (At 140~160°C for 30~60 minutes) → After heating (at 150~170°C for 2 hours) → Parts installation (240~260°C for several seconds~ tens of seconds). Here, the photopolymerization initiator which is almost volatilized at the time of thermal curing is hardly left in the component which has volatilized after the hardening, and does not cause volume shrinkage during post-heating and component mounting. As such a photopolymerization initiator, a compound which is reduced by 50% or more by heating at 150 ° C is mentioned, and (B1a) which is mentioned later is suitable.

作為具有前述通式(I)所示的基之肟酯系光聚合引發劑(B),較佳可舉出下述式(V)所示的2-(乙醯氧基亞胺基甲基)噻噸-9-酮或下述通式(VI)及(VII)所示的化合物。The oxime ester-based photopolymerization initiator (B) having a group represented by the above formula (I) is preferably 2-(ethyloxyiminomethyl) represented by the following formula (V). A thioxan-9-one or a compound represented by the following formulas (VI) and (VII).

(式中,R10 表示氫原子、鹵素原子、碳數1~12的烷基、環戊基、環己基、苯基、苄基、苯甲醯基、碳數2~12的烷醯基、碳數2~12的烷氧羰基(於構成烷氧基的烷基之碳數為2以上時,烷基可經1個以上的羥基所取代,在烷基鏈的中間可有1個以上的氧原子)或苯氧羰基,(In the formula, R 10 represents a hydrogen atom, a halogen atom, an alkyl group having 1 to 12 carbon atoms, a cyclopentyl group, a cyclohexyl group, a phenyl group, a benzyl group, a benzamyl group, an alkanoyl group having 2 to 12 carbon atoms, The alkoxycarbonyl group having 2 to 12 carbon atoms (when the number of carbon atoms of the alkyl group constituting the alkoxy group is 2 or more, the alkyl group may be substituted by one or more hydroxyl groups, and one or more of the alkyl chains may be present in the middle of the alkyl chain. Oxygen atom) or phenoxycarbonyl,

R11 、R13 各自獨立地表示苯基(可經碳數1~6的烷基、苯基或鹵素原子所取代)、碳數1~20的烷基(可經1個以上的羥基所取代,在烷基鏈的中間可有1個以上的氧原子)、碳數5~8的環烷基、碳數2~20的烷醯基或苯甲醯基(可經碳數1~6的烷基或苯基所取代),R 11 and R 13 each independently represent a phenyl group (which may be substituted by an alkyl group having 1 to 6 carbon atoms, a phenyl group or a halogen atom) or an alkyl group having 1 to 20 carbon atoms (which may be substituted by one or more hydroxyl groups). , may have one or more oxygen atoms in the middle of the alkyl chain), a cycloalkyl group having 5 to 8 carbon atoms, an alkanoyl group having 2 to 20 carbon atoms, or a benzamidine group (a carbon number of 1 to 6) Alky or phenyl substituted),

R12 表示氫原子、苯基(可經碳數1~6的烷基、苯基或鹵素原子所取代)、碳數1~20的烷基(可經1個以上的羥基所取代,在烷基鏈的中間可有1個以上的氧原子)、碳數5~8的環烷基、碳數2~20的烷醯基或苯甲醯基(可經碳數1~6的烷基或苯基所取代))。R 12 represents a hydrogen atom, a phenyl group (which may be substituted by an alkyl group having 1 to 6 carbon atoms, a phenyl group or a halogen atom), or an alkyl group having 1 to 20 carbon atoms (which may be substituted by one or more hydroxyl groups). There may be one or more oxygen atoms in the middle of the base chain, a cycloalkyl group having 5 to 8 carbon atoms, an alkanoyl group having 2 to 20 carbon atoms or a benzhydryl group (a group having 1 to 6 carbon atoms or Substituted by phenyl)).

[化4][Chemical 4]

(式中,R14 及R15 各自獨立地表示碳數1~12的烷基,M表示S、O或NH,R16 、R17 、R18 、R19 及R20 各自獨立地表示氫原子或碳數1~6的烷基,m及n表示0~5的整數)。(wherein R 14 and R 15 each independently represent an alkyl group having 1 to 12 carbon atoms, M represents S, O or NH, and R 16 , R 17 , R 18 , R 19 and R 20 each independently represent a hydrogen atom. Or an alkyl group having 1 to 6 carbon atoms, and m and n represent an integer of 0 to 5).

於前述肟酯系光聚合引發劑(B)之中,更佳為前述式(V)所示的2-(乙醯氧基亞胺基甲基)噻噸-9-酮及式(VI)所示的化合物。作為市售品,汽巴特殊化學品公司製的CGI-325、Irgacure OXE01、Irgacure OXEO2等。Among the above oxime ester-based photopolymerization initiators (B), more preferably 2-(ethyloxyiminomethyl)thioxanthene-9-one represented by the above formula (V) and formula (VI) The compound shown. As a commercial product, CGI-325, Irgacure OXE01, Irgacure OXEO2, etc. manufactured by Ciba Specialty Chemicals Co., Ltd.

如前述的肟酯系光聚合引發劑係可單獨或組合2種以上來使用。The oxime ester-based photopolymerization initiators may be used singly or in combination of two or more.

如前述地,前述肟酯系光聚合引發劑(B)的最合適量,雖然對於100質量份的前述含羧基的樹脂(A)而言,0.1~1.5質量份係足夠,但是為了使光反應更確實,可添加前述肟酯系以外之光聚合引發劑(B1)或光重合助劑(B2)。以減低後加熱所致的翹曲為目的,所添加的其它引發劑之配合量,對於100質量份的前述含羧基的樹脂(A)而言,係合計量宜為6質量份以下,更佳為5質量份以下。而且作為例外,明顯地熱硬化步驟(150℃左右的加熱)所揮發的光聚合引發劑(B1a),即使添加比上述範圍還多,在後加熱步驟之際也不會影響揮發,可實現符合目的的低翹曲。如此的加熱揮發性光聚合引發劑(B1a)係可藉由熱重量分析及頂空GC-MS等進行簡單分析而選定,在150℃的熱硬化之前後,揮發的光聚合引發劑之量極端(50%以上)變化的化合物係合適。具體例有2-甲基-1-[4-(甲基硫基)苯基]-2-嗎啉代丙酮-1,市售品有汽巴特殊化學品公司製的Irgacure 907等。As described above, the most suitable amount of the above-mentioned oxime ester-based photopolymerization initiator (B) is sufficient for 0.1 to 1.5 parts by mass of 100 parts by mass of the carboxyl group-containing resin (A), but in order to cause light reaction More specifically, a photopolymerization initiator (B1) or a photoretention aid (B2) other than the above oxime ester type may be added. For the purpose of reducing the warpage caused by the post-heating, the amount of the other initiator to be added is preferably 6 parts by mass or less, more preferably 100 parts by mass of the carboxyl group-containing resin (A). It is 5 parts by mass or less. Further, as an exception, the photopolymerization initiator (B1a) volatilized by the heat hardening step (heating at about 150 ° C) is more than the above range, and does not affect volatilization during the post-heating step, and can achieve the purpose. Low warpage. Such a heated volatile photopolymerization initiator (B1a) can be selected by simple analysis by thermogravimetric analysis and headspace GC-MS, etc., and the amount of volatilized photopolymerization initiator is extreme after heat hardening at 150 °C. (50% or more) varying compounds are suitable. Specific examples are 2-methyl-1-[4-(methylthio)phenyl]-2-morpholinoacetone-1, and commercially available products include Irgacure 907 manufactured by Ciba Specialty Chemicals Co., Ltd., and the like.

此外,作為在150℃不揮發而可少量加的光聚合引發劑,可舉出2-苄基-2-二甲胺基-1-(4-嗎啉代苯基)-丁-1-酮、2-(二甲胺基)-2-[(4-甲基苯基)甲基]-1-[4-(4-嗎啉基)苯基]-1-丁酮、N,N-二甲胺基苯乙酮等。作為市售品,可舉出汽巴特殊化學品公司製的Irgacure 369、Irgacure 379等。Further, as a photopolymerization initiator which is not volatile at 150 ° C and can be added in a small amount, 2-benzyl-2-dimethylamino-1-(4-morpholinophenyl)-butan-1-one is exemplified. , 2-(dimethylamino)-2-[(4-methylphenyl)methyl]-1-[4-(4-morpholinyl)phenyl]-1-butanone, N,N- Dimethylamino acetophenone and the like. As a commercial item, Irgacure 369, Irgacure 379, etc. by Ciba Specialty Chemicals Co., Ltd. are mentioned.

又,作為醯基膦氧化物系引發劑,可舉出2,4,6-三甲基苯甲醯基二苯基膦氧化物、雙(2,4,6-三甲基苯甲醯基)-苯基膦氧化物、雙(2,6-二甲氧基苯甲醯基)-2,4,4-三甲基-戊基膦氧化物等。作為市售品,可舉出BASF公司製的Lucirin TPO、汽巴特殊化學品公司製的Irgacure 819等。Further, examples of the mercaptophosphine oxide-based initiator include 2,4,6-trimethylbenzimidyldiphenylphosphine oxide and bis(2,4,6-trimethylbenzylidene). )-Phenylphosphine oxide, bis(2,6-dimethoxybenzylidene)-2,4,4-trimethyl-pentylphosphine oxide, and the like. As a commercial item, Lucirin TPO by BASF Corporation, Irgacure 819 by Ciba Specialty Chemicals Co., Ltd., etc. are mentioned.

另外,作為本發明的感光性樹脂組成物中所可用的光引發助劑及增感劑,可舉出苯偶姻化合物、苯乙酮化合物、蒽醌化合物、噻噸酮化合物、縮酮化合物、二苯甲酮化合物、呫噸酮化合物、及3級胺化合物等。In addition, examples of the photoinitiation aid and the sensitizer which can be used in the photosensitive resin composition of the present invention include a benzoin compound, an acetophenone compound, an anthraquinone compound, a thioxanthone compound, and a ketal compound. A benzophenone compound, a xanthone compound, and a tertiary amine compound.

若舉出苯偶姻化合物的具體例,例如為苯偶姻、苯偶姻甲基醚、苯偶姻乙基醚、苯偶姻異丙基醚。Specific examples of the benzoin compound include benzoin, benzoin methyl ether, benzoin ethyl ether, and benzoin isopropyl ether.

若舉出苯乙酮化合物的具體例,例如為苯乙酮、2,2-二甲氧基-2-苯基苯乙酮、2,2-二乙氧基-2-苯基苯乙酮、1,1-二氯苯乙酮。Specific examples of the acetophenone compound are, for example, acetophenone, 2,2-dimethoxy-2-phenylacetophenone, and 2,2-diethoxy-2-phenylacetophenone. 1,1-dichloroacetophenone.

若舉出蒽醌化合物的具體例,例如為2-甲基蒽醌、2-乙基蒽醌、2-第三丁基蒽醌、1-氯蒽醌。Specific examples of the hydrazine compound include 2-methyl hydrazine, 2-ethyl hydrazine, 2-tert-butyl fluorene, and 1-chloroindole.

若舉出噻噸酮化合物的具體例,例如為2,4-二甲硫基呫噸酮、2,4-二乙基噻噸酮、2-氯噻噸酮、2,4-二異丙基噻噸酮。Specific examples of the thioxanthone compound are, for example, 2,4-dimethylthioxanthone, 2,4-diethylthioxanthone, 2-chlorothioxanthone, 2,4-diisopropyl Thiophenone.

若舉出縮酮化合物的具體例,例如為苯乙酮二甲基縮酮、苄基二甲基縮酮。Specific examples of the ketal compound include acetophenone dimethyl ketal and benzyl dimethyl ketal.

若舉出二苯甲酮化合物的具體例,例如為二苯甲酮、4-苯甲醯基二苯基硫化物、4-苯甲醯基-4’-甲基二苯基硫化物、4-苯甲醯基-4’-乙基二苯基硫化物、4-苯甲醯基-4’-丙基二苯基硫化物。Specific examples of the benzophenone compound include benzophenone, 4-benzylidene diphenyl sulfide, 4-benzylidene-4'-methyldiphenyl sulfide, and 4 - benzylidene-4'-ethyldiphenyl sulfide, 4-benzylidene-4'-propyldiphenyl sulfide.

作為3級胺化合物的具體例,例如為乙醇胺化合物、具有二烷胺基苯構造的化合物,例如4,4’-二甲胺基二苯甲酮(日本曹達公司製Nisocure MABP)、4,4’-二乙胺基二苯甲酮(保土谷化學公司製EAB)等的二烷胺基二苯甲酮、7-(二乙胺基)-4-甲基-2H-1-苯并吡喃-2-酮(7-(二乙胺基)-4-甲基香豆素)等之含二烷胺基的香豆素化合物、4-二甲胺基苯甲酸乙酯(日本化藥公司製Kayacure EPA)、2-二甲胺基苯甲酸乙基(International Biosynthetic公司製Quantacure DMB)、4-二甲胺基苯甲酸(正丁氧基)乙基(International Biosynthetic公司製Quantacure BEA)、對二甲胺基苯甲酸異戊基乙基酯(日本化藥公司製Kayacure DMBI)、4-二甲胺基苯甲酸2-乙基己酯(Van Dyk公司製Esolol 507)、4,4’-二乙胺基二苯甲酮(保土谷化學公司製EAB)。Specific examples of the tertiary amine compound include, for example, an ethanolamine compound and a compound having a dialkylaminobenzene structure, such as 4,4'-dimethylaminobenzophenone (Nisocure MABP manufactured by Nippon Soda Co., Ltd.), 4, 4 Dialkylaminobenzophenone, 7-(diethylamino)-4-methyl-2H-1-benzopyridine, such as '-diethylaminobenzophenone (EAB, manufactured by Hodogaya Chemical Co., Ltd.) a dialkylamine-containing coumarin compound, 4-dimethylaminobenzoic acid ethyl ester, such as nal-2-one (7-(diethylamino)-4-methylcoumarin) Kayacure EPA), ethyl 2-dimethylaminobenzoate (Quantacure DMB manufactured by International Biosynthetic Co., Ltd.), 4-dimethylaminobenzoic acid (n-butoxy)ethyl (Quantacure BEA manufactured by International Biosynthetic Co., Ltd.), p-Isoamylethyl dimethylaminobenzoate (Kayacure DMBI, manufactured by Nippon Kayaku Co., Ltd.), 2-ethylhexyl 4-dimethylaminobenzoate (Esolol 507, manufactured by Van Dyk Co., Ltd.), 4, 4' -Diethylaminobenzophenone (EAB manufactured by Hodogaya Chemical Co., Ltd.).

於前述光聚合引發劑之中,較佳為噻噸酮化合物及3級胺化合物。於本發明的感光性樹脂組成物中,從深部硬化性的方面來看,較佳為含有噻噸酮化合物,其中較佳為2,4-二甲硫基呫噸酮、2,4-二乙基噻噸酮、2-氯噻噸酮、2,4-二異丙基噻噸酮等的噻噸酮化合物。Among the above photopolymerization initiators, a thioxanthone compound and a tertiary amine compound are preferred. In the photosensitive resin composition of the present invention, from the viewpoint of deep hardenability, it is preferred to contain a thioxanthone compound, of which 2,4-dimethylthioxanthone and 2,4-di are preferred. A thioxanthone compound such as ethyl thioxanthone, 2-chlorothioxanthone or 2,4-diisopropylthioxanthone.

如此的噻噸酮化合物之配合量,對於100質量份的前述含羧基的樹脂(A)而言,較佳為2質量份以下的比例,更佳為1質量份以下的比例。噻噸酮化合物的配合量若過多,則成為後加熱時的翹曲原因,與製品的成本上升有關聯而不宜。The amount of the thioxanthone compound to be added is preferably 2 parts by mass or less, more preferably 1 part by mass or less, per 100 parts by mass of the carboxyl group-containing resin (A). When the amount of the thioxanthone compound is too large, it causes a warpage at the time of post-heating, and it is not preferable in connection with an increase in the cost of the product.

作為3級胺化合物,較佳為具有二烷胺基苯構造的化合物,其中特佳為二烷胺基二苯甲酮化合物、最大吸收波長在350~410nm之含有二烷胺基的香豆素化合物。作為二烷胺基二苯甲酮化合物,4,4’-二乙胺基二苯甲酮係毒性亦低而較宜。最大吸收波長在350~410nm之含有二烷胺基的香豆素化合物,由於最大吸收波長位於紫外線區域,故著色少,不用說無色透明的感光性樹脂組成物,也可使用著色顏料,提供反映著色顏料本身的色之著色阻焊劑膜。特佳為7-(二乙胺基)-4-甲基-2H-1-苯并吡喃-2-酮,因為對波長400~410nm的雷射光顯示優異的增感效果。As the tertiary amine compound, a compound having a dialkylaminobenzene structure is preferred, and a dialkylaminobenzophenone compound and a dialkylamine-containing coumarin having a maximum absorption wavelength of 350 to 410 nm are particularly preferred. Compound. As the dialkylaminobenzophenone compound, the 4,4'-diethylaminobenzophenone is also low in toxicity and is preferable. The coumarin compound having a dialkylamine group having a maximum absorption wavelength of 350 to 410 nm has a small absorption wavelength in the ultraviolet region, so that the coloring is small, and it is not necessary to use a colorless and transparent photosensitive resin composition, and a coloring pigment can also be used to provide a reflection. A colored solder resist film of the coloring pigment itself. Particularly preferred is 7-(diethylamino)-4-methyl-2H-1-benzopyran-2-one because it exhibits an excellent sensitizing effect on laser light having a wavelength of 400 to 410 nm.

如此的3級胺化合物之配合量,對於100質量份的前述含羧基的樹脂(A)而言,較佳為0.1~2質量份的比例,更佳為0.1~1質量份的比例。3級胺化合物的配合量若為0.1質量份以下,則有無法得到充分的增感效果之傾向。若超過2質量份,則成為後加熱時的翹曲原因,由於與製品的成本上升有關聯而不宜。The amount of the tertiary amine compound to be added is preferably 0.1 to 2 parts by mass, more preferably 0.1 to 1 part by mass, per 100 parts by mass of the carboxyl group-containing resin (A). When the amount of the tertiary amine compound is 0.1 part by mass or less, a sufficient sensitizing effect may not be obtained. When it exceeds 2 parts by mass, it causes a warpage at the time of post-heating, and it is unsuitable because it is related to the cost increase of a product.

如前述的光聚合引發劑、光引發助劑及增感劑係可為單獨或當作2種類以上的混合物來使用。The photopolymerization initiator, the photoinitiation aid, and the sensitizer described above may be used singly or as a mixture of two or more types.

此等光聚合引發劑及引發助劑的配合比例,除了對於100質量份的前述含羧基的樹脂(A)而言,以0.1~1.5質量份的配合比例規定前述具有通式(I)所示的基之肟酯系光聚合引發劑(B),而且較佳為將後述的含有著色劑及增感劑的組成物之乾燥塗膜在355nm的吸光度以乾燥膜厚25μm計為在0.3~1.2的範圍內之比例添加。此吸光度的範圍係有效於本發明目的之減低後加熱及零件安裝的回流焊接時之翹曲。雖然細節未明,但認為是因為組成物的光反應可在表層及深部比較均勻光硬化的範圍。吸光度若高於1.2,則光無法透射到深部為止,未反應光硬化成分會殘留許多,由於後加熱或零件安裝的回流焊接而發生劇烈反應,看到基板發生翹曲或彎曲。另一方面,吸光度若比0.3還低,則無法有效地利用光,無法對應於高感度化或本發明目的之一的雷射直接曝光,故不適合。另外,藉由將吸光度調整在上述合適範圍,明顯地亦提高硬化皮膜的耐藥品性及無電解鍍金性。由於此等現象係以往所未明白,而為本發明者們首先發現的效果。The mixing ratio of the photopolymerization initiator and the initiator auxiliary agent is not particularly limited to 100 parts by mass of the carboxyl group-containing resin (A), and the compounding ratio of 0.1 to 1.5 parts by mass is defined by the above formula (I). The base-based ester-based photopolymerization initiator (B) is preferably a dry coating film of a composition containing a coloring agent and a sensitizer described later at an absorbance at 355 nm of 0.3 to 1.2 in a dry film thickness of 25 μm. The proportion of the range is added. This range of absorbance is effective for the purpose of the present invention to reduce warpage during post-heating and reflow soldering of component mounting. Although the details are not clear, it is considered that the photoreaction of the composition is relatively uniform in the surface layer and the deep portion. When the absorbance is higher than 1.2, the light cannot be transmitted to the deep portion, and the unreacted photohardenable component remains a lot, and the violent reaction occurs due to post-heating or reflow soldering of the component mounting, and the substrate is warped or bent. On the other hand, if the absorbance is lower than 0.3, the light cannot be effectively used, and it is not suitable for laser direct exposure which is high sensitivity or one of the objects of the present invention. Further, by adjusting the absorbance to the above-mentioned appropriate range, the chemical resistance of the hardened film and the electroless gold plating property are remarkably improved. Since these phenomena are not understood in the past, they are the effects first discovered by the inventors.

作為前述分子中具有2個以上的乙烯性不飽和基之化合物(C),可使用以往眾所周知的各種(甲基)丙烯酸酯單體,並沒有限定於特定者。As the compound (C) having two or more ethylenically unsaturated groups in the molecule, various conventionally known (meth) acrylate monomers can be used, and are not limited to those specific.

作為具體例,例如可舉出乙二醇、甲氧基四乙二醇、聚乙二醇、丙二醇等的二醇之二丙烯酸酯類;己二醇、三羥甲基丙烷、季戊四醇、二季戊四醇、三羥基乙基異氰尿酸酯等的多元醇或此等的環氧乙烷加成物、環氧丙烷加成物或己內酯加成物等的多價丙烯酸酯類;苯氧基丙烯酸酯、雙酚A二丙烯酸酯、及此等的酚類之環氧乙烷加成物或環氧丙烷加成物等的多價丙烯酸酯類;上述多醇類的胺基甲酸乙酯丙烯酸酯類;甘油二縮水甘油醚、甘油三縮水甘油醚、三羥甲基丙烷三縮水甘油醚、三縮水甘油基異氰尿酸酯等的縮水甘油醚之多價丙烯酸酯類;蜜胺丙烯酸酯;及對應於上述丙烯酸酯的各甲基丙烯酸酯類等。Specific examples thereof include diacrylates of diols such as ethylene glycol, methoxytetraethylene glycol, polyethylene glycol, and propylene glycol; hexanediol, trimethylolpropane, pentaerythritol, and dipentaerythritol; a polyvalent acrylate such as a polyol such as trihydroxyethyl isocyanurate or such an ethylene oxide adduct, a propylene oxide adduct or a caprolactone adduct; or a phenoxy group; a polyvalent acrylate such as an acrylate, a bisphenol A diacrylate, or an oxirane adduct of such a phenol or a propylene oxide adduct; or a urethane acrylate of the above polyol a polyvalent acrylate of a glycidyl ether such as glycerol diglycidyl ether, glycerol triglycidyl ether, trimethylolpropane triglycidyl ether or triglycidyl isocyanurate; melamine acrylate And each methacrylate corresponding to the above acrylate.

再者,可舉出使甲酚酚醛清漆型環氧樹脂等的多官能環氧樹脂與(甲基)丙烯酸反應而成的環氧丙烯酸酯樹脂、或使其環氧丙烯酸酯樹脂的羥基更與季戊四醇三丙烯酸酯等的(甲基)丙烯酸羥酯及異佛爾酮二異氰酸酯等的二異氰酸酯之半胺基甲酸乙酯化合物反應而成的環氧胺基甲酸乙酯丙烯酸酯化合物等。此等環氧丙烯酸酯系樹脂係不會降低指觸乾燥性,可提高光硬化性。Further, an epoxy acrylate resin obtained by reacting a polyfunctional epoxy resin such as a cresol novolac type epoxy resin with (meth)acrylic acid, or a hydroxyl group of the epoxy acrylate resin may be used. An epoxy urethane acrylate compound obtained by reacting a hydroxy ester of (meth) acrylate such as pentaerythritol triacrylate or a diisocyanate compound of a diisocyanate such as isophorone diisocyanate. These epoxy acrylate-based resins can improve the photocurability without reducing the dryness of the touch.

於前述含有乙烯性不飽和基的化合物之中,較佳為含有2個乙烯性不飽和基者、多官能且於多元醇附加環氧乙烷、環氧丙烷、己內酯而改性者的(甲基)丙烯酸酯類。Among the compounds containing an ethylenically unsaturated group, those having two ethylenically unsaturated groups and having a polyfunctional group and modified with ethylene oxide, propylene oxide or caprolactone are preferred. (Meth) acrylates.

又,從難燃性的觀點來看,較佳為9,10-二氫-9-氧雜-10-磷菲-10-氧化物與慣用公知的多官能(甲基)丙烯酸酯之邁克爾加成反應的改性物。Further, from the viewpoint of flame retardancy, it is preferably a 9,10-dihydro-9-oxa-10-phosphaphenanthrene-10-oxide and a conventionally known polyfunctional (meth) acrylate Michael Plus. A modified modification.

如前述分子中具有2個以上的乙烯性不飽和基之化合物(C)的配合量,對於100質量份的前述含羧基的樹脂(A),較佳為5~100質量份之比例,更佳為1~70質量份之比例。前述配合量若低於5質量份,則光硬化性降低,在活性能量線照射後藉由鹼顯像係難以形成圖型,故不宜。另一方面,若超過100質量份,則在鹼水溶液中的溶解性降低,塗膜變脆,故不宜。The compounding amount of the compound (C) having two or more ethylenically unsaturated groups in the molecule is preferably from 5 to 100 parts by mass, more preferably 100 parts by mass of the carboxyl group-containing resin (A). It is a ratio of 1 to 70 parts by mass. When the amount is less than 5 parts by mass, the photocurability is lowered, and it is difficult to form a pattern by the alkali developing system after the irradiation of the active energy ray, which is not preferable. On the other hand, when it exceeds 100 parts by mass, the solubility in the aqueous alkali solution is lowered, and the coating film becomes brittle, which is not preferable.

於本發明的感光性樹脂組成物中,為了賦予耐熱性,可添加熱硬化性成分(D)。特佳的熱硬化性成分(D)係分子中具有2個以上的環狀醚基及/或環狀硫醚基(以下簡稱環狀(硫)醚基)之熱硬化性樹脂。於此等之中,較佳為2官能性的環氧樹脂,另外亦可使用二異氰酸酯或其2官能性嵌段異氰酸酯。In the photosensitive resin composition of the present invention, a thermosetting component (D) may be added in order to impart heat resistance. A particularly preferred thermosetting component (D) is a thermosetting resin having two or more cyclic ether groups and/or cyclic thioether groups (hereinafter referred to as cyclic (thio)ether groups). Among these, a bifunctional epoxy resin is preferable, and a diisocyanate or a bifunctional block isocyanate can also be used.

如此在分子中具有2個以上的環狀(硫)醚基之熱硬化性成分(D),係分子中具有2個以上的3、4或5員環之環狀醚基或環狀硫醚基的任一種或2種類的基之化合物,例如可舉出分子中具有至少2個以上的環氧基之化合物,即多官能環氧化合物(D-1),分子中具有至少2個以上的氧雜環丁烷基之化合物,即多官能氧雜環丁烷化合物(D-2),分子中具有2個以上的硫醚基之化合物,即環硫化物樹脂(D-3)等。The thermosetting component (D) having two or more cyclic (thio)ether groups in the molecule, such as a cyclic ether group or a cyclic thioether having two or more 3, 4 or 5 membered rings in the molecule. Examples of the compound of any one or two types of the group include a compound having at least two or more epoxy groups in the molecule, that is, a polyfunctional epoxy compound (D-1) having at least two or more molecules. The compound of the oxetane group, that is, the polyfunctional oxetane compound (D-2), a compound having two or more thioether groups in the molecule, that is, an episulfide resin (D-3).

作為前述多官能環氧化合物(D-1),例如可舉出日本環氧樹脂公司製的JER828、JER834、JER1001、JER1004、大日本油墨化學工業公司製的Epiclon 840、Epiclon 850、Epiclon 1050、Epiclon 2055、東都化成公司製的Epotohto YD-011、YD-013、YD-127、YD-128、陶式化學公司製的D.E.R.317、D.E.R.331、D.E.R.661、D.E.R.664、汽巴特殊化學品公司的Araldite 6071、Araldite 6084、Araldite GY250、Araldite GY260、住友化學工業公司製的Sumiepoxy ESA-011、ESA-014、ELA-115、ELA-128、旭化成工業公司製的A.E.R.330、A.E.R.331、A.E.R.661、A.E.R.664等(皆商品名)的雙酚A型環氧樹脂;日本環氧樹脂公司製的YL903、大日本油墨化學工業公司製的Epiclon 152、Epiclon 165、東都化成公司製的Epotohto YDB-400、YDB-500、陶式化學公司製的D.E.R.542、汽巴特殊化學品公司製的Araldite 8011、住友化學工業公司製的Sumiepoxy ESBM400、ESB-700、旭化成工業公司製的A.E.R.711、A.E.R.714等(皆商品名)的溴化環氧樹脂;日本環氧樹脂公司製的JER152、JER154、陶式化學公司製的D.E.N.431、D.E.N.438、大日本油墨化學工業公司製的Epiclon N-730、Epiclon N-770、Epiclon N-865、東都化成公司製的Epotohto YDCN-701、YDCN-704、汽巴特殊化學品公司製的Araldite ECN1235、Araldite ECN1273、Araldite ECN1299、Araldite XPY307、日本化藥公司製的EPPN-201、EOCN-1025、EOCN-1020、EOCN-104S、RE-306、住友化學工業公司製的Sumiepoxy ESCN-195X、ESCN-220、旭化成工業公司製的A.E.R.ECN-235、ECN-299等(皆商品名)的酚醛清漆型環氧樹脂;大日本油墨化學工業公司製的Epiclon 830、日本環氧樹脂公司製JER807、東都化成公司製的Epotohto YDF-170、YDF-175、YDF-2001、YDF-2004、汽巴特殊化學品公司製的Araldite XPY306等(皆商品名)的雙酚F型環氧樹脂;東都化成公司製的Epotohto ST-2004、ST-2007、ST-3000(商品名)等的氫化雙酚A型環氧樹脂;日本環氧樹脂公司製的JER604、東都化成公司製的Epotohto YH-434、汽巴特殊化學品公司製的Araldite MY720、住友化學工業公司製的Sumiepoxy ELM-120等(皆商品名)的縮水甘油基胺型環氧樹脂;汽巴特殊化學品公司製的Araldite CY-350(商品名)等的乙內醯脲型環氧樹脂;DAICEL化學工業公司製的Celoxide 2021、汽巴特殊化學品公司製的Araldite CY175、CY179等(皆商品名)的脂環式環氧樹脂;日本環氧樹脂公司製的YL-933、陶式化學公司製的T.E.N.、EPPN-501、EPPN-502等(皆商品名)的三羥基苯基甲烷型環氧樹脂;日本環氧樹脂公司製的YL-6056、YX-4000、YL-6121(皆商品名)等的聯二甲苯酚型或雙酚型環氧樹脂或此等的混合物;日本化藥公司製EBPS-200、旭電化工業公司製EPX-30、大日本油墨化學工業公司製的EXA-1514(商品名)等的雙酚S型環氧樹脂;日本環氧樹脂公司製的JER157S(商品名)等的雙酚A酚醛清漆型環氧樹脂;日本環氧樹脂公司製的YL-931、汽巴特殊化學品公司製的Araldite 163等(皆商品名)的四羥苯基乙烷型環氧樹脂;汽巴特殊化學品公司製的Araldite PT810、日產化學工業公司製的TEPIC等(皆商品名)的雜環式環氧樹脂;日本油脂公司製Blenmer DGT等的苯二甲酸二縮水甘油酯樹脂;東都化成公司製ZX-1063等的四縮水甘油基二甲苯酚基乙烷樹脂;新日鉄化學公司製ESN-190、ESN-360、大日本油墨化學工業公司製HP-4032、EXA-4750、EXA-4700等之含萘基的環氧樹脂;大日本油墨化學工業公司製HP-7200、HP-7200H等之具有二環戊二烯骨架的環氧樹脂;日本油脂公司製CP-50S、CP-50M等的甲基丙烯酸縮水甘油酯共聚合系環氧樹脂;以及環己基馬來醯亞胺與甲基丙烯酸縮水甘油酯的共聚合環氧樹脂;環氧改性的聚丁二烯橡膠衍生物(例如DAICEL化學工業製PB-3600等)、CTBN改性環氧樹脂(例如東都化成公司製的YR-102、YR-450等)等,惟不受此等所限定。此等環氧樹脂可為單獨或組合2種以上來使用。於此等之中,特佳為酚醛清漆型環氧樹脂、雜環式環氧樹脂、雙酚A型環氧樹脂或此等的混合物。Examples of the polyfunctional epoxy compound (D-1) include JER828, JER834, JER1001, and JER1004 manufactured by Nippon Epoxy Co., Ltd., Epiclon 840, Epiclon 850, Epiclon 1050, and Epiclon manufactured by Dainippon Ink and Chemicals. 2055, Epotohto YD-011, YD-013, YD-127, YD-128 manufactured by Dongdu Chemical Co., Ltd., DER317, DER331, DER661, DER664 manufactured by Ceramic Chemical Co., Ltd., Araldite of Ciba Specialty Chemicals Co., Ltd. 6071, Araldite 6084, Araldite GY250, Araldite GY260, Sumitepoxy ESA-011, ESA-014, ELA-115, ELA-128, manufactured by Sumitomo Chemical Industries, AER330, AER331, AER661, AER664 manufactured by Asahi Kasei Kogyo Co., Ltd. Bisphenol A type epoxy resin (both trade names); YL903 manufactured by Japan Epoxy Resin Co., Ltd., Epiclon 152, Epiclon 165 manufactured by Dainippon Ink and Chemicals Co., Ltd., Epotohto YDB-400, YDB- manufactured by Dongdu Chemical Co., Ltd. 500, DER542 manufactured by Ceramic Chemical Co., Ltd., Araldite 8011 manufactured by Ciba Specialty Chemicals Co., Ltd., Sumiepoxy ESBM400 manufactured by Sumitomo Chemical Industries Co., Ltd., ESB-700, AER711 manufactured by Asahi Kasei Industrial Co., Ltd. Brominated epoxy resin such as AER714 (both trade names); JER152 and JER154 manufactured by Nippon Epoxy Co., Ltd., DEN431 and DEN438 manufactured by Ceramic Chemical Co., Ltd., and Epiclon N-730 manufactured by Dainippon Ink Chemical Industry Co., Ltd. Epiclon N-770, Epiclon N-865, Epotohto YDCN-701, YDCN-704, manufactured by Dongdu Chemical Co., Ltd., Araldite ECN1235, Araldite ECN1273, Araldite ECN1299, Araldite XPY307, manufactured by Nippon Kayaku Co., Ltd. EPPN-201, EOCN-1025, EOCN-1020, EOCN-104S, RE-306, Sumiepoxy ESCN-195X, ESCN-220, manufactured by Sumitomo Chemical Industries, AERECN-235, ECN-299, etc., manufactured by Asahi Kasei Kogyo Co., Ltd. (all brand name) novolac type epoxy resin; Epiclon 830 manufactured by Dainippon Ink Chemical Industry Co., Ltd., JER807 manufactured by Nippon Epoxy Co., Ltd., Epotohto YDF-170, YDF-175, YDF-2001 manufactured by Dongdu Chemical Co., Ltd. YDF-2004, bisphenol F-type epoxy resin of Araldite XPY306 (all trade names) manufactured by Ciba Specialty Chemicals Co., Ltd.; Epotohto ST-2004, ST-2007, ST-3000 (trade name) manufactured by Dongdu Chemical Co., Ltd. Hydrogenated bisphenol A type epoxy tree JER604 manufactured by Nippon Epoxy Co., Ltd., Epotohto YH-434 manufactured by Tosho Chemical Co., Ltd., Araldite MY720 manufactured by Ciba Specialty Chemicals Co., Ltd., and Sumiepoxy ELM-120 manufactured by Sumitomo Chemical Industries Co., Ltd. (all trade names) Amine-type epoxy resin; an internal urethane-type epoxy resin such as Araldite CY-350 (trade name) manufactured by Ciba Specialty Chemicals Co., Ltd.; Celoxide 2021 manufactured by DAICEL Chemical Industry Co., Ltd., manufactured by Ciba Specialty Chemicals Co., Ltd. Araldite CY175, CY179, etc. (all trade name) alicyclic epoxy resin; YL-933 made by Japan Epoxy Resin Co., Ltd., TEN, EPPN-501, EPPN-502, etc., manufactured by Ceramic Chemical Co., Ltd. Trihydroxyphenylmethane type epoxy resin; biphenyl phenol type or bisphenol type epoxy resin such as YL-6056, YX-4000, YL-6121 (all trade name) manufactured by Nippon Epoxy Co., Ltd. Such a mixture; EBPS-200 manufactured by Nippon Kayaku Co., Ltd., EPX-30 manufactured by Asahi Kasei Kogyo Co., Ltd., and bisphenol S-type epoxy resin such as EXA-1514 (trade name) manufactured by Dainippon Ink Chemical Industry Co., Ltd.; Bisphenol A novolacs such as JER157S (trade name) manufactured by Oxygen Resin Co., Ltd. Epoxy resin; YL-931 manufactured by Nippon Epoxy Co., Ltd., Araldite 163 manufactured by Ciba Specialty Chemicals Co., Ltd. (all trade names), tetrahydroxyphenylethane type epoxy resin; Ciba Specialty Chemicals Co., Ltd. Araldite PT810, heterogeneous epoxy resin such as TEPIC (trade name) manufactured by Nissan Chemical Industries Co., Ltd.; diglycidyl phthalate resin such as Blenmer DGT manufactured by Nippon Oil & Fats Co., Ltd.; ZX-1063 manufactured by Dongdu Chemical Co., Ltd., etc. Tetraglycidyl xylenyl ethane resin; Naphthyl-containing ring made by Essence Chemical Co., Ltd. ESN-190, ESN-360, and Nippon Ink Chemical Industry Co., Ltd. HP-4032, EXA-4750, EXA-4700, etc. Oxygen resin; epoxy resin having a dicyclopentadiene skeleton such as HP-7200 and HP-7200H manufactured by Dainippon Ink and Chemicals Co., Ltd.; glycidyl methacrylate such as CP-50S and CP-50M manufactured by Nippon Oil & Fats Co., Ltd. a copolymerized epoxy resin; and a copolymerized epoxy resin of cyclohexylmaleimide and glycidyl methacrylate; an epoxy-modified polybutadiene rubber derivative (for example, PB-3600 manufactured by DAICEL Chemical Industry Co., Ltd.) Etc.), CTBN modified epoxy resin (such as Dongdu As manufactured by YR-102, YR-450, etc.) and the like, but these are not defined. These epoxy resins may be used alone or in combination of two or more. Among them, a novolac type epoxy resin, a heterocyclic epoxy resin, a bisphenol A type epoxy resin or a mixture thereof is particularly preferred.

作為前述多官能氧雜環丁烷化合物(D-2),可舉出雙[(3-甲基-3-氧雜環丁烷基甲氧基)甲基]醚、雙[(3-乙基-3-氧雜環丁烷基甲氧基)甲基]醚、1,4-雙[(3-甲基-3-氧雜環丁烷基甲氧基)甲基]苯、1,4-雙[(3-乙基-3-氧雜環丁烷基甲氧基)甲基]苯、(3-甲基-3-氧雜環丁烷基)甲基丙烯酸酯、(3-乙基-3-氧雜環丁烷基)甲基丙烯酸酯、(3-甲基-3-氧雜環丁烷基)甲基甲基丙烯酸酯、(3-乙基-3-氧雜環丁烷基)甲基甲基丙烯酸酯或此等的寡聚物或共聚物等的多官能氧雜環丁烷類,以及氧雜環丁烷醇與酚醛清漆樹脂、聚(對羥基苯乙烯)、梳型雙酚類、杯芳烴類、杯間苯二酚芳烴類、或矽倍半氧烷等之具有羥基的樹脂之醚化物等。另外,可舉出具有氧雜環丁烷環的不飽和單體與(甲基)丙烯酸烷基酯的共聚物等。The polyfunctional oxetane compound (D-2) may, for example, be bis[(3-methyl-3-oxetanylmethoxy)methyl]ether or bis[(3-ethyl) 1,-3-oxetanylmethoxy)methyl]ether, 1,4-bis[(3-methyl-3-oxetanylmethoxy)methyl]benzene, 1, 4-bis[(3-ethyl-3-oxetanylmethoxy)methyl]benzene, (3-methyl-3-oxetanyl)methacrylate, (3- Ethyl-3-oxetanyl)methacrylate, (3-methyl-3-oxetanyl)methyl methacrylate, (3-ethyl-3-oxocycle) Butylalkyl)methyl methacrylate or polyfunctional oxetane such as oligomers or copolymers, and oxetane with novolac resin, poly(p-hydroxystyrene) An etherified product of a resin having a hydroxyl group such as a comb-type bisphenol, a calixarene, a cup-resorcinol aromatic hydrocarbon, or a sesquioxane. Further, a copolymer of an unsaturated monomer having an oxetane ring and an alkyl (meth)acrylate may, for example, be mentioned.

作為前述分子中具有2個以上的環狀硫醚基之化合物(D-3),例如可舉出日本環氧樹脂公司製的雙酚A型環硫化物樹脂YL7000等。又,亦可使用酚醛清漆型環氧樹脂的環氧基之氧原子經取代成硫原子的環硫化物樹脂等。The compound (D-3) having two or more cyclic thioether groups in the above-mentioned molecule may, for example, be a bisphenol A type episulfide resin YL7000 manufactured by Nippon Epoxy Co., Ltd., or the like. Further, an episulfide resin in which an oxygen atom of an epoxy group of a novolac type epoxy resin is substituted with a sulfur atom or the like can also be used.

前述分子中具有2個以上的環狀(硫)醚基之熱硬化性成分(D)的配合量,係宜為對於1當量的前述含羧基的樹脂(A)之羧基而言,環狀(硫)醚基在0.6~2.5當量、更佳0.8~2.0當量的範圍。於分子中具有2個以上的環狀(硫)醚基之熱硬化性成分(D)的配合量低於0.6當量時,由於羧基會殘留在殘硬化皮膜中,耐熱性、耐鹼性、電絕緣性等降低,故不宜。另一方面,於超過2.5當量時,由於低分子量的環狀(硫)醚基殘留在乾燥塗膜中,塗膜的強度等降低,故不宜。The amount of the thermosetting component (D) having two or more cyclic (thio)ether groups in the molecule is preferably a ring (for one equivalent of the carboxyl group of the carboxyl group-containing resin (A)). The thio)ether group is in the range of 0.6 to 2.5 equivalents, more preferably 0.8 to 2.0 equivalents. When the amount of the thermosetting component (D) having two or more cyclic (thio)ether groups in the molecule is less than 0.6 equivalent, the carboxyl group remains in the residual hardening film, and heat resistance, alkali resistance, and electric resistance are caused. Insulation and the like are lowered, so it is not suitable. On the other hand, when it is more than 2.5 equivalents, since the low molecular weight cyclic (thio)ether group remains in the dried coating film, the strength of the coating film and the like are lowered, which is not preferable.

於使用上述分子中具有2個以上的環狀(硫)醚基之熱硬化性成分(D)時,較佳為含有熱硬化觸媒。作為如此的熱硬化觸媒,例如可舉出咪唑、2-甲基咪唑、2-乙基咪唑、2-乙基-4-甲基咪唑、2-苯基咪唑、4-苯基咪唑、1-氰乙基-2-苯基咪唑、1-(2-氰乙基)-2-乙基-4-甲基咪唑等的咪唑衍生物;氰胍、苄基二甲基胺、4-(二甲胺基)-N,N-二甲基苄基胺、4-甲氧基-N,N-二甲基苄基胺、4-甲基-N,N-二甲基苄基胺等的胺化合物、己二酸二醯肼、癸二酸二醯肼等的醯肼化合物;三苯基膦等的磷化合物等。又,作為市售者,例如四國化成工業公司製的2MZ-A、2MZ-OK、2PHZ、2P4BHZ、2P4MHZ(皆咪唑系化合物的商品名)、SANAPRO公司製的U-CAT3503N、U-CAT3502T(皆二甲胺的嵌段異氰酸酯化合物之商品名)、DBU、DBN、U-CATSA102、U-CAT5002(皆二環式脒化合物及其鹽)等。不受此等所特別限定,環氧樹脂或氧雜環丁烷化合物的熱硬化觸媒、只要能促進環氧基及/或氧雜環丁烷基的羧基之反應即可,可為單獨或混合2種以上來使用。又,亦可使用胍胺、乙醯胍胺、苯并胍胺、蜜胺、2,4-二胺基-6-甲基丙烯醯氧基乙基-S-三、2-乙烯基-4,6-二胺基-S-三、2-乙烯基-4,6-二胺基-S-三‧異氰尿酸加成物、2,4-二胺基-6-甲基丙烯醯氧基乙基-S-三‧異氰尿酸加成物等的S-三衍生物,較佳為併用亦作為此等密接性賦予劑的機能化合物與前述熱硬化觸媒。When the thermosetting component (D) having two or more cyclic (thio)ether groups in the above molecule is used, it is preferred to contain a thermosetting catalyst. Examples of such a thermosetting catalyst include imidazole, 2-methylimidazole, 2-ethylimidazole, 2-ethyl-4-methylimidazole, 2-phenylimidazole, 4-phenylimidazole, and 1 - an imidazole derivative such as cyanoethyl-2-phenylimidazole or 1-(2-cyanoethyl)-2-ethyl-4-methylimidazole; cyanogen, benzyldimethylamine, 4-( Dimethylamino)-N,N-dimethylbenzylamine, 4-methoxy-N,N-dimethylbenzylamine, 4-methyl-N,N-dimethylbenzylamine, etc. An amine compound, a ruthenium compound such as diammonium adipate or bismuth sebacate; a phosphorus compound such as triphenylphosphine or the like. In addition, as a commercial product, for example, 2MZ-A, 2MZ-OK, 2PHZ, 2P4BHZ, 2P4MHZ (trade name of imidazole-based compound) manufactured by Shikoku Chemical Industrial Co., Ltd., U-CAT3503N and U-CAT3502T manufactured by SANAPRO Co., Ltd. A trade name of a blocked isocyanate compound of dimethylamine, DBU, DBN, U-CATSA102, U-CAT5002 (all bicyclic hydrazine compounds and salts thereof). The thermosetting catalyst of the epoxy resin or the oxetane compound is not particularly limited as long as it can promote the reaction of the carboxyl group of the epoxy group and/or the oxetane group, either alone or Mix two or more types for use. Further, guanamine, acetamide, benzoguanamine, melamine, 2,4-diamino-6-methylpropenyloxyethyl-S-III can also be used. 2-vinyl-4,6-diamino-S-three 2-vinyl-4,6-diamino-S-three ‧Isocyanuric acid adduct, 2,4-diamino-6-methylpropenyloxyethyl-S-three ‧S-three of isocyanuric acid adducts, etc. The derivative is preferably used in combination as a functional compound of the adhesion imparting agent and the aforementioned thermosetting catalyst.

此等熱硬化觸媒的配合量以通常量的比例係足夠,例如對於100質量份的含羧基的樹脂(A)或分子中具有2個以上的環狀(硫)醚基之熱硬化性成分(D)而言,較佳為0.1~20質量份,更佳為0.5~15.0質量份。The amount of the thermosetting catalyst is sufficient in a usual amount, for example, for 100 parts by mass of the carboxyl group-containing resin (A) or a thermosetting component having two or more cyclic (thio)ether groups in the molecule. In the case of (D), it is preferably 0.1 to 20 parts by mass, more preferably 0.5 to 15.0 parts by mass.

本發明的感光性樹脂組成物係可摻合著色劑。作為著色劑,可使用紅、藍、綠、黃等慣用公知的著色劑,可為顏料、染料、色素中任一者。但是,從環境負荷減低及對人體影響的觀點來看,較佳為不含有鹵素。The photosensitive resin composition of the present invention can be blended with a colorant. As the coloring agent, a conventionally known coloring agent such as red, blue, green, or yellow can be used, and any of a pigment, a dye, and a coloring matter can be used. However, from the viewpoint of a reduction in environmental load and influence on the human body, it is preferred that halogen is not contained.

藍色著色劑:Blue colorant:

作為藍色著色劑,有酞花青系、蒽醌系,顏料系為歸類為顏料(Pigment)的化合物,具體地可舉出如下述的附有色指數(C.I.;染料及染色者的協會The Society of Dyers and Colourists)發行)編號者:顏料藍15、顏料藍15:1、顏料藍15:2、顏料藍15:3、顏料藍15:4、顏料藍15:6、顏料藍16、顏料藍60。Examples of the blue coloring agent include a phthalocyanine system and an anthraquinone system, and the pigment system is a compound classified as a pigment. Specifically, a color index (CI; dyes and dyes associations as described below) is exemplified. Society of Dyers and Colourists) Issued by: Pigment Blue 15, Pigment Blue 15:1, Pigment Blue 15:2, Pigment Blue 15:3, Pigment Blue 15:4, Pigment Blue 15:6, Pigment Blue 16, Pigment Blue 60.

作為染料系,可使用溶劑藍35、溶劑藍63、溶劑藍68、溶劑藍70、溶劑藍83、溶劑藍87、溶劑藍94、溶劑藍97、溶劑藍122、溶劑藍136、溶劑藍67、溶劑藍70等。於上述以外,亦可使用金屬取代或無取代的酞花青化合物。As the dye system, solvent blue 35, solvent blue 63, solvent blue 68, solvent blue 70, solvent blue 83, solvent blue 87, solvent blue 94, solvent blue 97, solvent blue 122, solvent blue 136, solvent blue 67, Solvent blue 70 and the like. In addition to the above, a metal-substituted or unsubstituted phthalocyanine compound can also be used.

綠色著色劑:Green colorant:

作為綠色著色劑,同樣地有酞花青系、蒽醌系,具體地可使用顏料綠7、顏料綠36、溶劑綠3、溶劑綠5、溶劑綠20、溶劑綠28等。於上述以外,亦可使用金屬取代或無取代的酞花青化合物。As the green colorant, phthalocyanine or guanidine is similarly used, and specifically, pigment green 7, pigment green 36, solvent green 3, solvent green 5, solvent green 20, solvent green 28, and the like can be used. In addition to the above, a metal-substituted or unsubstituted phthalocyanine compound can also be used.

黃色著色劑:Yellow colorant:

作為黃色著色劑,有單偶氮系、雙偶氮系、縮合偶氮系、苯并咪唑酮系、異吲哚啉酮系、蒽醌系等,具體地可舉出以下者。Examples of the yellow coloring agent include a monoazo type, a bisazo type, a condensed azo type, a benzimidazolone type, an isoindolinone type, an anthraquinone type, and the like, and specific examples thereof include the following.

蒽醌系:溶劑黃163、顏料黃24、顏料黃108、顏料黃193、顏料黃147、顏料黃199、顏料黃202。Lanthanide: Solvent Yellow 163, Pigment Yellow 24, Pigment Yellow 108, Pigment Yellow 193, Pigment Yellow 147, Pigment Yellow 199, Pigment Yellow 202.

異吲哚啉酮系:顏料黃110、顏料黃109、顏料黃139、顏料黃179、顏料黃185。Isoindolinone: Pigment Yellow 110, Pigment Yellow 109, Pigment Yellow 139, Pigment Yellow 179, Pigment Yellow 185.

縮合偶氮系:顏料黃93、顏料黃94、顏料黃95、顏料黃128、顏料黃155、顏料黃166、顏料黃180。Condensed azo system: Pigment Yellow 93, Pigment Yellow 94, Pigment Yellow 95, Pigment Yellow 128, Pigment Yellow 155, Pigment Yellow 166, Pigment Yellow 180.

苯并咪唑酮:顏料黃120、顏料黃151、顏料黃154、顏料黃156、顏料黃175、顏料黃181。Benzimidazolone: Pigment Yellow 120, Pigment Yellow 151, Pigment Yellow 154, Pigment Yellow 156, Pigment Yellow 175, Pigment Yellow 181.

單偶氮系:顏料黃1、2、3、4、5、6、9、10、12、61、62、62:1、65、73、74、75、97、100、104、105、111、116、167、168、169、182、183。Monoazo system: Pigment Yellow 1, 2, 3, 4, 5, 6, 9, 10, 12, 61, 62, 62: 1, 65, 73, 74, 75, 97, 100, 104, 105, 111 , 116, 167, 168, 169, 182, 183.

雙偶氮系:顏料黃12、13、14、16、17、55、63、81、83、87、126、127、152、170、172、174、176、188、198。Bisazo: Pigment Yellow 12, 13, 14, 16, 17, 55, 63, 81, 83, 87, 126, 127, 152, 170, 172, 174, 176, 188, 198.

紅色著色劑:Red colorant:

作為紅色著色劑,有單偶氮系、雙偶氮系、偶氮湖系、苯并咪唑酮系、苝系、二酮基吡咯并吡咯系、縮合偶氮系、蒽醌系、喹吖啶酮系等,具體地可舉出以下者。Examples of the red coloring agent include monoazo, bisazo, azo lake, benzimidazolone, anthracene, diketopyrrolopyrrole, condensed azo, anthraquinone, and quinacridine. Specific examples of the ketone system and the like include the following.

單偶氮系:顏料紅1、2、3、4、5、6、8、9、12、14、15、16、17、21、22、23、31、32、112、114、146、147、151、170、184、187、188、193、210、245、253、258、266、267、268、269。Monoazo system: Pigment Red 1, 2, 3, 4, 5, 6, 8, 9, 12, 14, 15, 16, 17, 21, 22, 23, 31, 32, 112, 114, 146, 147 , 151, 170, 184, 187, 188, 193, 210, 245, 253, 258, 266, 267, 268, 269.

雙偶氮系:顏料紅37、38、41。Bisazo: Pigment Red 37, 38, 41.

單偶氮湖系:顏料紅48:1、48:2、48:3、48:4、49:1、49:2、50:1、52:1、52:2、53:1、53:2、57:1、58:4、63:1、63:2、64:1、68。Single azo lake system: Pigment Red 48:1, 48:2, 48:3, 48:4, 49:1, 49:2, 50:1, 52:1, 52:2, 53:1, 53: 2. 57:1, 58:4, 63:1, 63:2, 64:1, 68.

苯并咪唑酮系:顏料紅171、顏料紅175、顏料紅176、顏料紅185、顏料紅208。Benzimidazolone type: Pigment Red 171, Pigment Red 175, Pigment Red 176, Pigment Red 185, Pigment Red 208.

苝系:溶劑紅135、溶劑紅179、顏料紅123、顏料紅149、顏料紅166、顏料紅178、顏料紅179、顏料紅190、顏料紅194、顏料紅224。Lanthanide: Solvent Red 135, Solvent Red 179, Pigment Red 123, Pigment Red 149, Pigment Red 166, Pigment Red 178, Pigment Red 179, Pigment Red 190, Pigment Red 194, Pigment Red 224.

二酮基吡咯并吡咯系:顏料紅254、顏料紅255、顏料紅264、顏料紅270、顏料紅272。Diketopyrrolopyrrole: Pigment Red 254, Pigment Red 255, Pigment Red 264, Pigment Red 270, Pigment Red 272.

縮合偶氮系:顏料紅220、顏料紅144、顏料紅166、顏料紅214、顏料紅220、顏料紅221、顏料紅242。Condensed azo system: Pigment Red 220, Pigment Red 144, Pigment Red 166, Pigment Red 214, Pigment Red 220, Pigment Red 221, Pigment Red 242.

蒽醌系:顏料紅168、顏料紅177、顏料紅216、溶劑紅149、溶劑紅150、溶劑紅52、溶劑紅207。Lanthanide: Pigment Red 168, Pigment Red 177, Pigment Red 216, Solvent Red 149, Solvent Red 150, Solvent Red 52, Solvent Red 207.

喹吖啶酮系:顏料紅122、顏料紅202、顏料紅206、顏料紅207、顏料紅209。Quinacridone type: Pigment Red 122, Pigment Red 202, Pigment Red 206, Pigment Red 207, Pigment Red 209.

另外,以調整色調為目的,可添加紫、橙、茶色、黑等的著色劑。Further, for the purpose of adjusting the color tone, a coloring agent such as purple, orange, brown, or black may be added.

若具體例示,有顏料紫19、23、29、32、36、38、42、溶劑紫13、36、C.I.顏料橙1、C.I.顏料橙5、C.I.顏料橙13、C.I.顏料橙14、C.I.顏料橙16、C.I.顏料橙17、C.I.顏料橙24、C.I.顏料橙34、C.I.顏料橙36、C.I.顏料橙38、C.I.顏料橙40、C.I.顏料橙43、C.I.顏料橙46、C.I.顏料橙49、C.I.顏料橙51、C.I.顏料橙61、C.I.顏料橙63、C.I.顏料橙64、C.I.顏料橙71、C.I.顏料橙73、C.I.顏料棕23、C.I.顏料棕25、C.I.顏料黑1、C.I.顏料黑7等。Specific examples include Pigment Violet 19, 23, 29, 32, 36, 38, 42, Solvent Violet 13, 36, CI Pigment Orange 1, CI Pigment Orange 5, CI Pigment Orange 13, CI Pigment Orange 14, CI Pigment Orange 16. CI Pigment Orange 17, CI Pigment Orange 24, CI Pigment Orange 34, CI Pigment Orange 36, CI Pigment Orange 38, CI Pigment Orange 40, CI Pigment Orange 43, CI Pigment Orange 46, CI Pigment Orange 49, CI Pigment Orange 51, CI Pigment Orange 61, CI Pigment Orange 63, CI Pigment Orange 64, CI Pigment Orange 71, CI Pigment Orange 73, CI Pigment Brown 23, CI Pigment Brown 25, CI Pigment Black 1, CI Pigment Black 7, and the like.

著色劑的具體配合比率,雖然因為亦受所用之著色劑的種類或其它添加劑等的種類所影響而不能一概而論,但於本發明的感光性樹脂組成物中,較佳為使在355nm的吸光度以乾燥膜厚25μm計係在0.3~1.2的範圍內比例配合。特佳的著色劑係藍與綠為酞花青系、蒽醌系,黃為蒽醌系,紅為二酮基吡咯并吡咯系、蒽醌系,而且不含有鹵素原子。於此等之中,從感度及解像性的觀點來看,特佳為紅色著色劑及黃色著色劑。The specific blending ratio of the coloring agent is not affected by the kind of the coloring agent used or the kind of other additives, etc., but in the photosensitive resin composition of the present invention, it is preferred to make the absorbance at 355 nm The dry film thickness of 25 μm was proportionally blended in the range of 0.3 to 1.2. Particularly preferred coloring agents are blue and green for the phthalocyanine, lanthanide, yellow for the lanthanide, red for the diketopyrrolopyrrole, lanthanide, and no halogen atoms. Among these, a red coloring agent and a yellow coloring agent are particularly preferable from the viewpoint of sensitivity and resolution.

本發明的感光性樹脂組成物,為了提高其塗膜的物理強度等,視需要可摻合填料。作為如此的填料,可使用公知慣用的無機或有機填料,特佳為使用硫酸鋇、球狀矽石及滑石。再者,為了得到白色外觀或難燃性,亦可使用氧化鈦或金屬氧化物、氫氧化鋁等的金屬氫氧化物當作填充用顏料填料。填料的配合量較佳為組成物全體量的75重量%以下,更佳為0.1~60重量%的比例。於填料的配合量超過組成物全體量之75重量%時,由於絕緣組成物的黏度變高,塗佈、成形性降低,硬化物變脆,故不宜。In order to increase the physical strength and the like of the coating film of the photosensitive resin composition of the present invention, a filler may be blended as needed. As such a filler, a conventionally known inorganic or organic filler can be used, and particularly, barium sulfate, spheroidal vermiculite, and talc are used. Further, in order to obtain a white appearance or flame retardancy, a metal hydroxide such as titanium oxide, metal oxide or aluminum hydroxide may be used as the filler for filling. The blending amount of the filler is preferably 75% by weight or less, more preferably 0.1% to 60% by weight based on the total amount of the composition. When the amount of the filler is more than 75% by weight based on the total amount of the composition, the viscosity of the insulating composition is increased, coating and moldability are lowered, and the cured product is brittle, which is not preferable.

此等填料的配合量,對於100質量份的前述含羧基的樹脂(A)而言,較佳為300質量份以下,更佳為0.1~300質量份,特佳為0.1~150質量份。於填料的配合量超過300質量份時,由於感光性樹脂組成物的黏度變高,印刷性降低,硬化物變脆,故不宜。The amount of the filler to be added is preferably 300 parts by mass or less, more preferably 0.1 to 300 parts by mass, even more preferably 0.1 to 150 parts by mass, per 100 parts by mass of the carboxyl group-containing resin (A). When the amount of the filler is more than 300 parts by mass, the viscosity of the photosensitive resin composition is increased, the printability is lowered, and the cured product is brittle, which is not preferable.

再者,本發明的感光性樹脂組成物,為了前述含羧基的樹脂(A)之合成或組成物的調製,或為了塗佈在基板或載體薄膜上而黏度調整,可以使用有機溶劑。Further, in the photosensitive resin composition of the present invention, an organic solvent can be used for the preparation of the carboxyl group-containing resin (A) or the preparation of the composition, or for coating the substrate or the carrier film to adjust the viscosity.

作為如此的有機溶劑,可舉出酮類、芳香族烴類、二醇醚類、二醇醚醋酸酯類、酯類、醇類、脂肪族烴、石油系溶劑等。更具體地為甲基乙基酮、環己酮等的酮類;甲苯、二甲苯、四甲基苯等的芳香族烴類;溶纖劑、甲基溶纖劑、丁基溶纖劑、卡必醇、甲基卡必醇、丁基卡必醇、丙二醇單甲基醚、二丙二醇單甲基醚、二丙二醇二乙基醚、三乙二醇單乙基醚等的二醇醚類;醋酸乙酯、醋酸丁酯、二丙二醇甲基醚醋酸酯、丙二醇甲基醚醋酸酯、丙二醇乙基醚醋酸酯、丙二醇丁基醚醋酸酯等的酯類;乙醇、丙醇、乙二醇、丙二醇等的醇類;辛烷、癸烷等的脂肪族烴;石油醚、石油腦、氫化石油腦、溶劑油等的石油系溶劑等。如此的有機溶劑可為單獨或當作2種以上的混合物來使用。Examples of such an organic solvent include ketones, aromatic hydrocarbons, glycol ethers, glycol ether acetates, esters, alcohols, aliphatic hydrocarbons, petroleum solvents, and the like. More specifically, ketones such as methyl ethyl ketone and cyclohexanone; aromatic hydrocarbons such as toluene, xylene, and tetramethylbenzene; cellosolve, methyl cellosolve, butyl cellosolve, and carbene Glycol ethers such as alcohol, methyl carbitol, butyl carbitol, propylene glycol monomethyl ether, dipropylene glycol monomethyl ether, dipropylene glycol diethyl ether, triethylene glycol monoethyl ether; Esters of ethyl ester, butyl acetate, dipropylene glycol methyl ether acetate, propylene glycol methyl ether acetate, propylene glycol ethyl ether acetate, propylene glycol butyl ether acetate; ethanol, propanol, ethylene glycol, propylene glycol An alcohol such as an aliphatic hydrocarbon such as octane or decane; a petroleum solvent such as petroleum ether, petroleum brain, hydrogenated petroleum brain or solvent oil. Such an organic solvent may be used singly or as a mixture of two or more kinds.

本發明的感光性樹脂組成物,視需要更可摻合氫醌、氫醌單甲基醚、第三丁基兒茶酚、焦兒茶酚、啡噻等公知慣用的熱聚合抑制劑、微粉矽石、有機膨土、蒙脫石等公知慣用的增黏劑、聚矽氧系、氟系、高分子系等的消泡劑及/或均平劑、咪唑系、噻唑系、三唑系等的矽烷偶合劑、抗氧化劑、防鏽劑等般的公知慣用之添加劑類。The photosensitive resin composition of the present invention may be further blended with hydroquinone, hydroquinone monomethyl ether, tert-butylcatechol, pyrocatechol, and thiophene as needed. A known conventionally used tackifier, such as a thermal polymerization inhibitor, a fine vermiculite, an organic bentonite, or a montmorillonite, a defoaming agent such as a polyfluorene-based, a fluorine-based or a polymer-based, and/or a leveling agent. A well-known and customary additive such as a decane coupling agent such as an imidazole type, a thiazole type or a triazole type, an antioxidant, or a rust preventive agent.

本發明的感光性樹脂組成物亦可為乾膜的形態,其具備載體薄膜(支持體)及在該載體薄膜上所形成的由上述感光性樹脂組成物所層。The photosensitive resin composition of the present invention may be in the form of a dry film, and includes a carrier film (support) and a layer formed of the photosensitive resin composition formed on the carrier film.

於乾膜化之際,以前述有機溶劑來稀釋本發明的感光性樹脂組成物而調整在恰當的黏度,藉由柯馬(comma)塗佈機、刀塗機、唇塗機、桿塗機、擠塗機、逆塗機、傳料輥塗佈機、凹槽輥塗佈機、噴塗機等,以均一厚度塗佈在載體薄膜上,通常在50~130℃的溫度乾燥1~30分鐘,可得到膜。塗佈膜厚係沒有特別的限制,一般而言,以乾燥後的膜厚在10~150μm、較佳在20~60μm的範圍內適宜選擇。At the time of dry film formation, the photosensitive resin composition of the present invention is diluted with the above organic solvent to adjust the viscosity to a proper viscosity by a comma coater, a knife coater, a lip coater, and a bar coater. , extrusion coater, reverse coater, transfer roll coater, gravure roll coater, sprayer, etc., coated on the carrier film with a uniform thickness, usually dried at 50~130 ° C for 1~30 minutes , a film is available. The coating film thickness is not particularly limited, and is generally selected from the range of 10 to 150 μm, preferably 20 to 60 μm after drying.

作為載體薄膜,使用塑膠薄膜,較佳為使用聚對苯二甲酸乙二酯等的聚酯薄膜、聚醯亞胺薄膜、聚醯胺醯亞胺薄膜、聚丙烯薄膜、聚苯乙烯薄膜等的塑膠薄膜。載體薄膜的厚度係沒有特別的限制,一般係在10~150μm的範圍內適宜選擇。As the carrier film, a plastic film is used, and a polyester film such as polyethylene terephthalate, a polyimide film, a polyimide film, a polypropylene film, a polystyrene film, or the like is preferably used. Plastic film. The thickness of the carrier film is not particularly limited, and is generally suitably selected in the range of 10 to 150 μm.

於載體薄膜上成膜後,以防止塵埃附著於膜表面等為目的,更宜在膜的表面上層合可剝離的覆蓋薄膜。After the film is formed on the carrier film, it is more preferable to laminate the peelable cover film on the surface of the film for the purpose of preventing dust from adhering to the surface of the film.

作為可剝離的覆蓋薄膜,例如可使用聚乙烯薄膜、聚四氟乙烯薄膜、聚丙烯薄膜、經表面處理的紙等,只要於剝離覆蓋薄膜時,膜與覆蓋薄膜的黏著力膜係小於與載體薄膜的黏著力即可。As the peelable cover film, for example, a polyethylene film, a polytetrafluoroethylene film, a polypropylene film, a surface-treated paper, or the like can be used, as long as the adhesive film of the film and the cover film is smaller than the carrier when the cover film is peeled off. The adhesion of the film is sufficient.

具有如以上的組成之本發明的液狀感光性樹脂組成物,視需要可藉由前述有機溶劑調整到適合於塗佈方法的黏度,在基材上以浸塗法、流塗法、輥塗法、桿塗法、網版印刷法、簾幕塗佈法等的方法來塗佈,在約60~100℃的溫度使組成物中所含有的有機溶劑揮發乾燥(暫時乾燥),可形成不發黏的塗膜。又,於前述乾膜形態時,使用熱輥層合機等來貼合於基材上(以前述感光性樹脂組成物層與基材成接觸的方式使貼合)。於上述薄膜的感光性樹脂組成物層上更具備可剝離的覆蓋薄膜之乾膜時,在剝離覆蓋薄膜後,以上述感光性樹脂組成物層與基材成為接觸的方式,使用熱輥層合機等來貼合。The liquid photosensitive resin composition of the present invention having the above composition may be adjusted to a viscosity suitable for a coating method by the above-mentioned organic solvent, and may be subjected to dip coating, flow coating, or roll coating on a substrate. Coating by a method such as a method, a bar coating method, a screen printing method, or a curtain coating method, and the organic solvent contained in the composition is volatilized and dried (temporarily dried) at a temperature of about 60 to 100 ° C to form a film. Sticky coating. Moreover, in the dry film form, it is bonded to the base material using a hot roll laminator or the like (the photosensitive resin composition layer is bonded to the substrate so as to be in contact with each other). When the dry film of the peelable cover film is further provided on the photosensitive resin composition layer of the film, after the cover film is peeled off, the photosensitive resin composition layer is brought into contact with the substrate so that hot roll lamination is used. Machines and so on.

然後,對於所得到的塗膜(感光性樹脂組成物層)(用上述乾膜時,於層合在基材上後,不剝離載體薄膜),進行曝光(活性能量線的照射)。曝光係可為藉由接觸式(或非接觸方式),通過形成有圖型的光罩,藉由活性能量線進行選擇曝光之方法,或藉由雷射直接曝光機進行直接圖型曝光的方法中任一者。藉由此曝光,塗膜的曝光部(活性能量線所照射的部分)硬化。接著,藉由稀鹼水溶液(例如0.3~3%碳酸鈉水溶液)使未曝光部顯像而形成抗蝕圖型(用上述乾膜時,曝光後,剝離載體薄膜,進行顯像)。然後再僅加熱硬化,或藉由活性能量線的照射後加熱硬化或加熱硬化後活性能量線的照射使最終硬化(本硬化),可形成電絕緣性、密接性、耐焊熱性、耐藥品性、無電解鍍金耐性等優異的硬化皮膜(硬化物)。於含有熱硬化性成分(D)的感光性樹脂組成物之情況,例如藉由加熱到約140~180℃的溫度使熱硬化,可使前述含羧基的樹脂(A)之羧基、與分子中具有2個以上的環狀醚基及/或環狀硫醚基之熱硬化性成分(D)反應,而形成耐熱性、耐藥品性、耐吸濕性、密接性、電特性等諸特性優異的硬化皮膜。Then, the obtained coating film (photosensitive resin composition layer) (when the dry film is used, the carrier film is not peeled off after being laminated on the substrate), and exposure (irradiation of active energy rays) is performed. The exposure system may be a contact type (or non-contact method), a method of forming a pattern through a photomask, a selective exposure by an active energy line, or a direct pattern exposure by a laser direct exposure machine. Any of them. By this exposure, the exposed portion of the coating film (the portion irradiated by the active energy ray) is hardened. Next, the unexposed portion is developed by a dilute aqueous alkali solution (for example, 0.3 to 3% aqueous sodium carbonate solution) to form a resist pattern (when the dry film is used, after exposure, the carrier film is peeled off and developed). Then, it is only heat-hardened, or is subjected to heat-hardening or heat-hardening after irradiation with an active energy ray, and then the active energy ray is irradiated to cause final hardening (this hardening), thereby forming electrical insulation, adhesion, solder heat resistance, and chemical resistance. An excellent hardened film (hardened material) such as electroless gold plating resistance. In the case of the photosensitive resin composition containing the thermosetting component (D), for example, by heat-heating to a temperature of about 140 to 180 ° C, the carboxyl group and the molecule of the carboxyl group-containing resin (A) can be obtained. The thermosetting component (D) having two or more cyclic ether groups and/or a cyclic thioether group reacts to form excellent properties such as heat resistance, chemical resistance, moisture absorption resistance, adhesion, and electrical properties. Harden the membrane.

作為上述基材,可使用預先形成有電路的印刷電路板,尤其撓性印刷電路板,以及紙-酚樹脂、紙-環氧樹脂、玻璃布-環氧樹脂、玻璃-聚醯亞胺、玻璃布/不織布-環氧樹脂、玻璃布/紙-環氧樹脂、合成纖維-環氧樹脂、用氟樹脂˙聚乙烯˙PPO˙氰酸酯等的複合材之全部等級(FR-4等)的覆銅積層板、或聚醯亞胺薄膜、PET薄膜、玻璃基板、陶瓷基板、晶圓板等。As the above substrate, a printed circuit board in which a circuit is formed in advance, in particular, a flexible printed circuit board, and paper-phenol resin, paper-epoxy resin, glass cloth-epoxy resin, glass-polyimine, glass can be used. Cloth/non-woven fabric-epoxy resin, glass cloth/paper-epoxy resin, synthetic fiber-epoxy resin, fluororesin, bismuth polyethylene, ̇PPO phthalocyanate, etc. All grades (FR-4, etc.) A copper clad laminate, a polyimide film, a PET film, a glass substrate, a ceramic substrate, a wafer plate, or the like.

塗佈本發明的感光性樹脂組成物後所進行的揮發乾燥,係可用熱風循環式乾燥爐、IR爐、加熱板、對流烘箱等(用具備蒸氣加熱空氣方式的熱源者,使逆流接觸乾燥機內的熱風之方法,或藉由噴嘴來噴吹支持體的方式)來進行。The volatilization drying performed after applying the photosensitive resin composition of the present invention may be a hot air circulation type drying furnace, an IR furnace, a heating plate, a convection oven, or the like (a heat source having a steam heating air method is used to make a countercurrent contact dryer) The method of hot air inside, or the method of blowing the support by a nozzle).

作為上述活性能量線照射所用的曝光機,只是搭載高壓水銀燈、超高壓水銀燈、金屬鹵化物燈、短弧水銀燈等之照射350~450nm的範圍之紫外線的裝置即可,亦可使用直接描繪裝置(例如藉由來自電腦的CAD數據以直接雷射描繪圖像的雷射直接成像裝置)。作為直描機的雷射光源,可使用最大波長在350~410nm之範圍的雷射光,可使用氣體雷射、固體雷射中任一者。用於圖像形成的曝光量係隨著膜厚等而不同,一般可為20~800mJ/cm2 ,較佳為在20~600mJ/cm2 的範圍內。The exposure machine used for the active energy ray irradiation may be a device that irradiates ultraviolet rays in the range of 350 to 450 nm, such as a high pressure mercury lamp, an ultrahigh pressure mercury lamp, a metal halide lamp, or a short arc mercury lamp, and may be a direct drawing device ( For example, a laser direct imaging device that draws an image by direct laser imaging from CAD data from a computer). As the laser light source of the direct drawing machine, laser light having a maximum wavelength in the range of 350 to 410 nm can be used, and any of a gas laser and a solid laser can be used. The exposure amount for image formation varies depending on the film thickness and the like, and is generally 20 to 800 mJ/cm 2 , preferably 20 to 600 mJ/cm 2 .

作為前述顯像方法,可以藉由浸漬法、噴淋法、噴霧法、刷法等;作為顯像液,可使用氫氧化鉀、氫氧化鈉、碳酸鈉、碳酸鉀、磷酸鈉、矽酸鈉、氨、胺類等的鹼水溶液。As the developing method, a dipping method, a shower method, a spray method, a brush method, or the like can be used; as the developing solution, potassium hydroxide, sodium hydroxide, sodium carbonate, potassium carbonate, sodium phosphate, sodium citrate can be used. An aqueous alkali solution such as ammonia or an amine.

[實施例][Examples]

以下顯示實施例及比較例來具體說明本發明,惟本發明當然不受下述實施例所限定。再者,除了特別預先指明,以下的「份」及「%」皆以質量為基準。The present invention will be specifically described by the following examples and comparative examples, but the present invention is of course not limited by the following examples. Furthermore, the following "parts" and "%" are based on quality unless otherwise specified.

合成例1Synthesis Example 1

(A-1)相當於前述含羧基的樹脂(3),使用脂環式二異氰酸酯之具有雙酚A構造的感光性含有羧基的胺基甲酸乙酯樹脂之合成:於可分離式燒瓶中,投入368.0克作為雙酚A型環氧化合物的日本化藥(股)製RE310S(2官能雙酚A型環氧樹脂,環氧當量:184克/當量)、142.7克丙烯酸(分子量:72.06)、2.94克作為熱聚合抑制劑的2,6-二第三丁基對甲酚及1.53克作為反應觸媒的三苯膦,在98℃的溫度使反應到反應液的酸價成為0.5mgKOH/g以下為止,得到環氧羧酸酯化合物(a)(理論分子量:510.7)。接著,於此反應液中,添加588.2克作為反應用溶劑的卡必醇醋酸酯、105.5克二羥甲基丙酸(b)(分子量:134.16),使升溫到45℃。於此溶液中,以反應溫度不超過65℃的方式,徐徐添加264.7克異佛爾酮二異氰酸酯(c)(分子量:222.28)。滴下結束後,使溫度上升到80℃,藉由紅外吸收光譜測定法,使反應6小時直到2250cm-1 附近的吸收變沒有為止,再於98℃的溫度使反2小時,得到含有60重量%的鹼水溶液可溶性胺基甲酸乙酯樹脂之樹脂溶液。測定酸價,結果為28.9mgKOH/g(固體成分酸價:48.1mgKOH/g)。以下,將此反應生成物當作樹脂溶液(A-1)。(A-1) a synthesis of a photosensitive carboxyl group-containing urethane resin having a bisphenol A structure using an alicyclic diisocyanate corresponding to the carboxyl group-containing resin (3): in a separable flask, 368.0 g of RE310S (2-functional bisphenol A type epoxy resin, epoxy equivalent: 184 g/eq.), 142.7 g of acrylic acid (molecular weight: 72.06), which is a bisphenol A type epoxy compound, was prepared. 2.94 g of 2,6-di-t-butyl-p-cresol as a thermal polymerization inhibitor and 1.53 g of triphenylphosphine as a reaction catalyst, the acid value of the reaction solution was changed to 0.5 mgKOH/g at a temperature of 98 °C. Hereinafter, the epoxy carboxylate compound (a) (theoretical molecular weight: 510.7) was obtained. Next, 588.2 g of carbitol acetate as a reaction solvent and 105.5 g of dimethylolpropionic acid (b) (molecular weight: 134.16) were added to the reaction mixture, and the temperature was raised to 45 °C. In this solution, 264.7 g of isophorone diisocyanate (c) (molecular weight: 222.28) was slowly added so that the reaction temperature did not exceed 65 °C. After the completion of the dropwise addition, the temperature was raised to 80 ° C, and the reaction was allowed to proceed for 6 hours until the absorption in the vicinity of 2250 cm -1 was not obtained by infrared absorption spectrometry, and the temperature was further lowered at 98 ° C for 2 hours to obtain 60% by weight. A resin solution of an aqueous alkali solution soluble urethane resin. The acid value was measured and found to be 28.9 mgKOH/g (solid content acid value: 48.1 mgKOH/g). Hereinafter, this reaction product was referred to as a resin solution (A-1).

合成例2Synthesis Example 2

(A-2)相當於前述含羧基的樹脂(3),使用脂環式二異氰酸酯之具有雙酚F構造的感光性含有羧基的胺基甲酸乙酯樹脂之合成:投入169份(0.5莫耳)的雙酚F型環氧樹脂(R110,三井化學(股)製,環氧當量169克/當量)、36份(0.5莫耳)的丙烯酸、74份(0.5莫耳)的二羥甲基丁酸、0.10份的甲基氫醌、185份的卡必醇醋酸酯,加熱到100℃,確認上述混合物均勻溶解後,投入3.0份的三乙胺,加熱到110℃,使反應約25小時。然後,將反應物冷卻到室溫為止,投入152份(1.0莫耳)的四氫苯二甲酸酐,加熱到100℃使反應約5小時,而得到酸酐改性環氧丙烯酸酯(d)。接著,於氮氣流環境下,投入832.5份(3.75莫耳)異佛爾酮二異氰酸酯、747份(0.75莫耳)的聚碳酸酯多元醇(PMHC-1050,(股)KURARAY製)、222份(1.5莫耳)的二羥甲基丁酸、1662份的卡必醇醋酸酯、6.5份的二月桂酸二丁錫,加熱到70℃,使反應約8小時。停止氮氣流後,將反應混合物冷卻到室溫為止,在乾燥空氣氣流環境下,投入2463份(2.0莫耳)的上述酸酐改性環氧丙烯酸酯(d),加熱到80℃,使反應約6小時。然後,將反應物冷卻到室溫為止,投入76份(0.5莫耳)的四氫苯二甲酸酐,加熱到110℃使反應約4小時,而得到固體成分酸價93.5mgKOH/g、固體成分濃度60%的感光性含有羧基的胺基甲酸乙酯樹脂。以下,將此反應生成物當作樹脂溶液(A-2)。(A-2) A synthesis of a photosensitive carboxyl group-containing urethane resin having a bisphenol F structure using an alicyclic diisocyanate corresponding to the carboxyl group-containing resin (3): 169 parts (0.5 mol) Bisphenol F type epoxy resin (R110, manufactured by Mitsui Chemicals Co., Ltd., epoxy equivalent 169 g/eq), 36 parts (0.5 mol) of acrylic acid, 74 parts (0.5 mol) of dimethylol Butyric acid, 0.10 parts of methylhydroquinone, and 185 parts of carbitol acetate were heated to 100 ° C. After confirming that the mixture was uniformly dissolved, 3.0 parts of triethylamine was added, and the mixture was heated to 110 ° C to react for about 25 hours. . Then, the reaction product was cooled to room temperature, and 152 parts (1.0 mol) of tetrahydrophthalic anhydride was charged, and the mixture was heated to 100 ° C to carry out a reaction for about 5 hours to obtain an acid anhydride-modified epoxy acrylate (d). Next, 832.5 parts (3.75 mol) of isophorone diisocyanate, 747 parts (0.75 mol) of polycarbonate polyol (PMHC-1050, manufactured by KURARAY), and 222 parts were charged under a nitrogen atmosphere. (1.5 mol) of dimethylolbutanoic acid, 1662 parts of carbitol acetate, and 6.5 parts of dibutyltin dilaurate were heated to 70 ° C to allow a reaction for about 8 hours. After stopping the nitrogen flow, the reaction mixture was cooled to room temperature, and 2463 parts (2.0 mol) of the above anhydride-modified epoxy acrylate (d) was charged under a dry air flow, and heated to 80 ° C to react. 6 hours. Then, the reaction product was cooled to room temperature, and 76 parts (0.5 mol) of tetrahydrophthalic anhydride was charged, and the mixture was heated to 110 ° C to carry out a reaction for about 4 hours to obtain a solid content acid value of 93.5 mgKOH/g, and a solid content. A carboxyl group-containing urethane resin having a concentration of 60%. Hereinafter, this reaction product was referred to as a resin solution (A-2).

合成例3Synthesis Example 3

(A-3)相當於前述含羧基的樹脂(4),使用脂環式二異氰酸酯之感光性含有羧基的胺基甲酸乙酯樹脂之合成:於具備攪拌裝置、溫度計、冷凝器的反應容器中,投入2400克(3莫耳)由1,5-戊二醇與1,6-己二醇所衍生的聚碳酸酯二醇(旭化成化學(股)製,數量平均分子量800)、603克(4.5莫耳)二羥甲基丙酸及238克(2.6莫耳)作為單羥基化合物的丙烯酸2-羥基乙酯。接著,投入1887克(8.5莫耳)作為聚異氰酸酯的異佛爾酮二異氰酸酯,邊攪拌邊加熱到60℃為止而停止,於反應容器內的溫度開始降低的時間點再度加熱,在80℃繼續攪拌,藉由紅外線吸收光譜確認異氰酸酯基的吸收光譜(2280cm-1 )消失而結束反應。以固體成分成為50質量%的方式,添加卡必醇醋酸酯。所得到之感光性含有羧基的胺基甲酸乙酯樹脂之固體成分的酸價為50mgKOH/g。以下,將此反應生成物當作樹脂溶液(A-3)。(A-3) corresponds to the carboxyl group-containing resin (4), and is a synthesis of a photosensitive carboxyl group-containing urethane resin using an alicyclic diisocyanate: in a reaction vessel equipped with a stirring device, a thermometer, and a condenser 2400 g (3 mol) of polycarbonate diol derived from 1,5-pentanediol and 1,6-hexanediol (manufactured by Asahi Kasei Chemicals Co., Ltd., number average molecular weight 800), 603 g ( 4.5 moles of dimethylolpropionic acid and 238 grams (2.6 moles) of 2-hydroxyethyl acrylate as a monohydroxy compound. Next, 1887 g (8.5 mol) of isophorone diisocyanate as a polyisocyanate was charged, and it was stopped by heating to 60 ° C with stirring, and heated again at the time when the temperature in the reaction container began to decrease, and continued at 80 ° C. After stirring, it was confirmed by infrared absorption spectrum that the absorption spectrum (2280 cm -1 ) of the isocyanate group disappeared, and the reaction was terminated. Carbitol acetate was added so that the solid content became 50% by mass. The solid content of the obtained photosensitive carboxyl group-containing urethane resin was 50 mgKOH/g. Hereinafter, this reaction product was referred to as a resin solution (A-3).

(A-4)相當於前述含羧基的樹脂(6),使用具有聯苯骨架的聯苯酚醛清漆環氧樹脂之感光性含羧基的樹脂:將日本化藥(股)製ZCR-1601H(固體成分65%樹脂的酸價為98mgKOH/g)的樹脂溶液當作A-4。(A-4) Corresponding to the carboxyl group-containing resin (6), a photosensitive carboxyl group-containing resin using a biphenyl novolak epoxy resin having a biphenyl skeleton: ZCR-1601H (solid) manufactured by Nippon Kayaku Co., Ltd. A resin solution having an acid value of 98 mg KOH/g of 65% resin was used as A-4.

(A-5)相當於前述含羧基的樹脂(7),使用雙酚F構造的多官能環氧樹脂之感光性含羧基的樹脂:將日本化藥(股)製ZFR-1124(固體成分63%樹脂的酸價為102mgKOH/g)的樹脂溶液當作A-5。(A-5) A carboxyl group-containing resin corresponding to the carboxyl group-containing resin (7) and a polyfunctional epoxy resin having a bisphenol F structure: ZFR-1124 (solid content 63) manufactured by Nippon Kayaku Co., Ltd. A resin solution having an acid value of 102 mgKOH/g of % resin was regarded as A-5.

實施例1~7及比較例1~3Examples 1 to 7 and Comparative Examples 1 to 3

使用上述各樹脂溶液(A-1)~(A-5),以下述表1所示的比例(質量份)與表1所示的各種成分一起摻合,於攪拌機中預備混合後,藉由三輥磨機進行混煉,而調製阻焊劑用感光性樹脂組成物。此處,所得到的感光性樹脂組成物之分散度係藉由Erichsen公司製研磨度計的粒度測定進行評價,結果所有的組成物皆為15μm以下。Each of the resin solutions (A-1) to (A-5) described above was blended with the various components shown in Table 1 in the proportions (mass parts) shown in Table 1 below, and prepared by mixing in a stirrer. The three-roll mill is kneaded to prepare a photosensitive resin composition for the solder resist. Here, the degree of dispersion of the obtained photosensitive resin composition was evaluated by particle size measurement by a grind meter manufactured by Erichsen Co., Ltd., and all the compositions were 15 μm or less.

性能評價:Performance evaluation: <最合適曝光量/感度><Optimum exposure/sensitivity>

將銅厚35μm的電路圖型基板酸洗後,進行水洗,在乾燥後,藉由網版印刷法全面塗佈前述各實施例及各比較例的感光性樹脂組成物,在80℃的熱風循環式乾燥爐中使乾燥60分鐘。乾燥後,使用搭載有最大波長355nm的半導體雷射之直接描繪裝置、搭載有短弧水銀燈的曝光裝置、搭載有高壓水銀燈的直描機,透過梯級光楔片(Kodak No.2)進行曝光,藉由30℃的1wt%碳酸鈉水溶液,以0.2MPa的噴灑壓力進行60秒顯像時,將殘留的梯級光楔片之圖型為6段時當作最合適曝光量。The circuit pattern substrate having a copper thickness of 35 μm was pickled, washed with water, and after drying, the photosensitive resin composition of each of the above examples and comparative examples was completely applied by screen printing, and the hot air circulation type at 80 ° C was applied. Dry in a drying oven for 60 minutes. After drying, a direct drawing device equipped with a semiconductor laser having a maximum wavelength of 355 nm, an exposure device equipped with a short arc mercury lamp, and a direct drawing machine equipped with a high pressure mercury lamp were used, and exposed by a step wedge (Kodak No. 2). When the development was carried out for 60 seconds at a spray pressure of 0.2 MPa by a 1 wt% sodium carbonate aqueous solution at 30 ° C, the pattern of the remaining step wedges was regarded as the optimum exposure amount when the pattern was 6 stages.

<解像性><resolution>

將線/間隙為300/300μm、銅厚35μm的電路圖型基板以拋光輥研磨後,進行水洗,在乾燥後,藉由網版印刷法塗佈前述各實施例及各比較例的感光性樹脂組成物,在80℃的熱風循環式乾燥爐中使乾燥30分鐘。乾燥後,使用搭載有最大波長355nm的半導體雷射之直接描繪裝置進行曝光。曝光圖型係使用對間隙部描繪20/30/40/50/60/70/80/90/100μm的線之直描用數據。以曝光量成為感光性樹脂組成物的最合適曝光量之方式,照射活性能量線。曝光後,藉由30℃的1wt%碳酸鈉水溶液進行顯像而描繪圖型,進行150℃×60分鐘的熱硬化而得到硬化塗膜。A circuit pattern substrate having a line/gap of 300/300 μm and a copper thickness of 35 μm was polished by a polishing roll, washed with water, and after drying, the photosensitive resin composition of each of the foregoing examples and comparative examples was applied by screen printing. The material was dried in a hot air circulating drying oven at 80 ° C for 30 minutes. After drying, exposure was performed using a direct drawing device equipped with a semiconductor laser having a maximum wavelength of 355 nm. The exposure pattern uses data for direct drawing of a line of 20/30/40/50/60/70/80/90/100 μm for the gap portion. The active energy ray is irradiated so that the exposure amount becomes the most suitable exposure amount of the photosensitive resin composition. After the exposure, the pattern was drawn by development using a 1 wt% sodium carbonate aqueous solution at 30 ° C, and heat curing was performed at 150 ° C for 60 minutes to obtain a cured coating film.

使用經調整到200倍的光學顯微鏡,求得所得到的阻焊劑用感光性樹脂組成物之硬化塗膜的最小殘存線。The minimum residual line of the cured coating film of the obtained photosensitive resin composition for solder resist was obtained using an optical microscope adjusted to 200 times.

<吸光度><absorbance>

吸光度的測定係使用紫外可見分光光度計(日本分光(股)製Ubest-V-570Ds)及積分球裝置(日本分光(股)製ISN-470)。使用塗佈機,將前述各實施例及各比較例的感光性樹脂組成物塗佈在玻璃板上後,使用熱風循環式乾燥爐在80℃乾燥30分鐘,在玻璃板上製作感光性樹脂組成物的乾燥塗膜。使用紫外可見分光光度計及積分球裝置,在與塗佈有感光性樹脂組成物的玻璃板相同的玻璃板,測定500~300nm的吸光度基線。測定所製作之附有乾燥塗膜的玻璃板之吸光度,由基線來算出乾燥塗膜的吸光度,得到目的之光波長355nm的吸光度。為了防止塗佈膜厚的偏差所致的吸光度偏差,藉由塗佈機將塗佈厚改變成4階段而進行此業,作成塗佈厚與355nm的吸光度之曲線圖,由其近似式算出膜厚25μm的乾燥塗膜之吸光度,作為各自的吸光度。The absorbance was measured using an ultraviolet-visible spectrophotometer (Ubest-V-570Ds manufactured by JASCO Corporation) and an integrating sphere device (ISN-470 manufactured by JASCO Corporation). The photosensitive resin composition of each of the above Examples and Comparative Examples was applied onto a glass plate using a coater, and then dried at 80 ° C for 30 minutes in a hot air circulating drying oven to prepare a photosensitive resin composition on a glass plate. Dry coating of the material. The absorbance baseline at 500 to 300 nm was measured using an ultraviolet-visible spectrophotometer and an integrating sphere device on the same glass plate as the glass plate coated with the photosensitive resin composition. The absorbance of the glass plate with the dried coating film produced was measured, and the absorbance of the dried coating film was calculated from the baseline to obtain the absorbance at a target light wavelength of 355 nm. In order to prevent the variation in the absorbance due to the variation in the thickness of the coating film, the coating thickness was changed to four stages by a coater, and a graph of the coating thickness and the absorbance at 355 nm was prepared, and the film was calculated from the approximate expression. The absorbance of the dried coating film having a thickness of 25 μm was taken as the respective absorbance.

特性試驗Characteristic test

評價基板製作法:於形成有銅電路的聚醯亞胺基板上,藉由網版印刷全面塗佈前述各實施例及各比較例的感光性樹脂組成物,在80℃乾燥20分鐘,放置冷卻至室溫為止。對此基板,使用搭載有短弧水銀燈的曝光裝置,以最合適曝光量將阻焊劑圖型曝光,藉由30℃的1wt%Na2 CO3 水溶液,在0.2MPa的噴嘴壓力之條件下進行60秒顯像,而得到抗蝕圖型。將此基板在150℃加熱60分鐘而硬化。對於所得到的撓性電路板(評價基板),評價如以下的特性。Evaluation of substrate production method: The photosensitive resin composition of each of the above examples and comparative examples was applied by screen printing on a polyimide substrate having a copper circuit, and dried at 80 ° C for 20 minutes, and allowed to stand for cooling. Until room temperature. For this substrate, an exposure apparatus equipped with a short-arc mercury lamp was used to expose the solder resist pattern at the most appropriate exposure amount, and the solution was carried out under a nozzle pressure of 0.2 MPa by a 1 wt% Na 2 CO 3 aqueous solution at 30 ° C. Second impression, and a resist pattern is obtained. The substrate was cured by heating at 150 ° C for 60 minutes. The following characteristics were evaluated about the obtained flexible wiring board (evaluation substrate).

<塗膜的顏色><Color of coating film>

對上述各實施例及各比較例的抗蝕圖型,目視判斷硬化物的顏色。The color of the cured product was visually observed for the resist patterns of the above respective examples and comparative examples.

<耐焊熱性><solder heat resistance>

將塗佈有松香系助熔劑的評價基板浸漬在預先設定在260℃的焊料槽中,以改性醇洗淨助熔劑後,目視評側抗蝕層的鼓起.剝落。判定基準係如以下。The evaluation substrate coated with the rosin-based flux was immersed in a solder bath set at 260 ° C in advance, and after modifying the alcohol to clean the flux, the flaking and peeling of the side resist layer was visually observed. The criterion for determination is as follows.

○:進行10秒浸漬,即使以賽璐玢黏著膠帶進行剝離試驗,也沒有看到剝落。○: The immersion was carried out for 10 seconds, and even if the peeling test was carried out with the cellophane adhesive tape, no peeling was observed.

Δ:進行10秒浸漬,若以賽璐玢黏著膠帶進行剝離試驗,則少許剝落。Δ: The immersion was carried out for 10 seconds, and if the peeling test was carried out with the cellophane adhesive tape, it peeled off a little.

×:若進行10秒間,則有抗蝕層有鼓起、剝落。X: If the etching is performed for 10 seconds, the resist layer may swell and peel off.

<無電解鍍金耐性><electroless gold plating resistance>

對評價基板,使用市售品的無電解鍍鎳浴及無電解鍍金浴,在鎳0.5μm、金0.03μm的條件下進行鍍敷,藉由膠帶剝離,評價有無抗蝕層的剝落或有無鍍料的滲入後,藉由膠帶剝離來評價有無抗蝕層的剝落。判定基準係如以下。The evaluation substrate was subjected to electroless nickel plating bath and electroless gold plating bath under the conditions of nickel 0.5 μm and gold 0.03 μm, and peeled off by a tape to evaluate the presence or absence of peeling of the resist layer or presence or absence of plating. After the infiltration of the material, the peeling of the resist layer was evaluated by tape peeling. The criterion for determination is as follows.

○:未看到鍍料的滲入、抗蝕層的剝落。○: The infiltration of the plating material and the peeling of the resist layer were not observed.

Δ:鍍敷後看到僅僅稍微的滲入,膠帶剝離後亦看到抗蝕層的剝落。Δ: Only slight infiltration was observed after plating, and peeling of the resist layer was also observed after the tape was peeled off.

×:鍍敷後有抗蝕層的剝落。×: Peeling of the resist layer after plating.

<耐電蝕性><Electrical corrosion resistance>

代替銅箔基板,使用IPC B-25的梳型電極B試樣,在上述條件下製作評價基板,對此梳型電極施加DC100V的偏壓,確認在85℃、85%R.H.的恆溫恆濕槽中1,000時間後有無遷移。判定基準係如以下。In place of the copper foil substrate, an evaluation electrode substrate was produced under the above conditions using a comb-shaped electrode B sample of IPC B-25, and a bias voltage of DC 100 V was applied to the comb-shaped electrode to confirm a constant temperature and humidity chamber at 85 ° C and 85% RH. There is no migration after 1,000 hours. The criterion for determination is as follows.

○:幾乎沒有看到變化者○: Almost no changers are seen

Δ:變色者Δ: discoloration

×:發生遷移者×: The mover occurred

<耐酸性><acid resistance>

將評價基板在室溫浸漬於10vol%H2 SO4 水溶液中30分鐘,確認硫酸水溶液的滲入或塗膜的溶出以及膠帶剝離所致的抗蝕層之剝落。判定基準係如以下。The evaluation substrate was immersed in a 10 vol% H 2 SO 4 aqueous solution at room temperature for 30 minutes, and the penetration of the aqueous sulfuric acid solution or the elution of the coating film and the peeling of the resist layer due to the tape peeling were confirmed. The criterion for determination is as follows.

○:沒有硫酸水溶液的滲入、塗膜的溶出、抗蝕層的剝落。○: There was no infiltration of a sulfuric acid aqueous solution, elution of a coating film, and peeling of a resist layer.

Δ:確認少許之硫酸水溶液的滲入、塗膜的溶出或抗蝕層的剝落。Δ: The infiltration of a small amount of the sulfuric acid aqueous solution, the elution of the coating film, or the peeling of the resist layer were confirmed.

×:確認硫酸水溶液的滲入、塗膜的溶出或抗蝕層的大剝落。X: The infiltration of the aqueous sulfuric acid solution, the elution of the coating film, or the large peeling of the resist layer was confirmed.

<翹曲><warp>

於50μm厚的聚醯亞胺薄膜(Kapton 300H)上,藉由網版印刷全面塗佈感光性樹脂組成物,在80℃乾燥20分鐘,放置冷卻到室溫為止。對此基板,使用搭載有短弧水銀燈的曝光裝置,以最合適曝光量將阻焊劑圖型,藉由30℃的1wt%Na2 CO3 水溶液,在0.2MPa的噴嘴壓力之條件下進行60秒顯像,而得到抗蝕圖型。將此基板在150℃加熱60分鐘而硬化。由所得到的薄膜切出10cm×10cm,測定翹曲量。The photosensitive resin composition was completely coated on a 50 μm-thick polyimine film (Kapton 300H) by screen printing, dried at 80 ° C for 20 minutes, and left to cool to room temperature. For this substrate, an exposure device equipped with a short-arc mercury lamp was used, and the solder resist pattern was applied at an optimum exposure amount by a 1 wt% Na 2 CO 3 aqueous solution at 30 ° C for 60 seconds under a nozzle pressure of 0.2 MPa. Visualization, and a resist pattern is obtained. The substrate was cured by heating at 150 ° C for 60 minutes. From the obtained film, 10 cm × 10 cm was cut out, and the amount of warpage was measured.

又,亦同樣地測定更將上述薄膜在熱風乾燥爐中於170℃加熱2小時後的薄膜翹曲量。(後加熱後的翹曲量)Further, the amount of warpage of the film after heating the film in a hot air drying oven at 170 ° C for 2 hours was measured in the same manner. (the amount of warpage after heating)

表2及表3中顯示評價結果。The evaluation results are shown in Table 2 and Table 3.

實施側8<乾膜評價>Implementation side 8<dry film evaluation>

以甲基乙基酮將實施例3中所使用的組成物稀釋,塗佈在PET薄膜上,在80℃乾燥30分鐘而形成乾燥厚度25μm的感光性樹脂組成物層。再於其上黏貼覆蓋薄膜而得到乾膜。然後,剝離覆蓋薄膜,於以電路厚35μm形成有圖型的銅箔基板上,熱層合薄膜,接著使用搭載有最大波長355nm的半導體雷射之直接描繪裝置,在150mj/cm2 的條件下進行曝光。曝光後剝離載體薄膜,藉由150℃的熱風乾燥器進行60分鐘加熱硬化,而製作試驗基板。對所得到之具有硬化皮膜的試驗基板,藉由前述試驗法及評價法進行各特性的評價試驗。The composition used in Example 3 was diluted with methyl ethyl ketone, coated on a PET film, and dried at 80 ° C for 30 minutes to form a photosensitive resin composition layer having a dry thickness of 25 μm. A cover film is then adhered thereon to obtain a dry film. Then, the cover film was peeled off, and the pattern was formed on a copper foil substrate having a circuit thickness of 35 μm, and the film was thermally laminated, followed by a direct drawing device equipped with a semiconductor laser having a maximum wavelength of 355 nm, at 150 mj/cm 2 . Exposure. After the exposure, the carrier film was peeled off and heat-hardened by a hot air dryer at 150 ° C for 60 minutes to prepare a test substrate. The test substrate having the hardened film obtained was subjected to an evaluation test of each characteristic by the above test method and evaluation method.

結果係得到與表3中所示實施例3之結果大致同等的結果。As a result, results substantially similar to those of Example 3 shown in Table 3 were obtained.

如上述表2及表3中所示地,於用肟酯系光聚合引發劑的本發明之實施例1~7及8中,可抑制熱硬化後及後加熱後的翹曲之發生。相對於此,於用肟酯系以外的光聚合引發劑之比較例1~3中,無法抑制熱硬化後及後加熱後的翹曲之發生,尤其在用肟酯系以外之無揮發性的光聚合引發劑的比較例2中,吸光度高,後加熱後的翹曲之發生係顯著。又,於比較少量用肟酯系以外的光聚合引發劑之比較例3中,由於硬化不充分,故耐焊熱性差。As shown in the above Tables 2 and 3, in Examples 1 to 7 and 8 of the present invention using an oxime ester-based photopolymerization initiator, occurrence of warpage after heat curing and after heating can be suppressed. On the other hand, in Comparative Examples 1 to 3 in which a photopolymerization initiator other than the oxime ester type was used, it was not possible to suppress the occurrence of warpage after heat curing and after heating, especially in the case of non-volatile other than the oxime ester type. In Comparative Example 2 of the photopolymerization initiator, the absorbance was high, and the occurrence of warpage after the post-heating was remarkable. Further, in Comparative Example 3 in which a relatively small amount of a photopolymerization initiator other than the oxime ester system was used, since the curing was insufficient, the solder heat resistance was inferior.

Claims (12)

一種感光性樹脂組成物,其特徵係:其係含有(A)具有雙酚A、雙酚F、聯苯、聯二甲苯酚骨架或其氫化骨架的構造之含羧基的樹脂、(B)具有下述通式(I)所示的基之肟酯系光聚合引發劑、及(C)分子中具有2個以上的乙烯性不飽和基之化合物的藉由稀鹼水溶液可顯像的組成物,對於100質量份的上述含羧基的樹脂(A)而言,係以0.1~1.5質量份之比例含有上述肟酯系光聚合引發劑(B); (式中,R1表示氫原子、苯基(可經碳數1~6的烷基、苯基或鹵素原子所取代)、碳數1~20的烷基(可經1個以上的羥基所取代,在烷基鏈的中間可有1個以上的氧原子)、碳數5~8的環烷基、碳數2~20的烷醯基或苯甲醯基(可經碳數1~6的烷基或苯基所取代),R2表示苯基(可經碳數1~6的烷基、苯基或鹵素原子所取代)、碳數1~20的烷基(可經1個以上的羥基所取代,在烷基鏈的中間可有1個以上的氧原子)、碳數5~8的環烷基、碳數2~20的烷醯基或苯甲醯基(可經碳數1~6的 烷基或苯基所取代))。 A photosensitive resin composition characterized in that it contains (A) a carboxyl group-containing resin having a structure of bisphenol A, bisphenol F, biphenyl, a bixylenol skeleton or a hydrogenated skeleton thereof, and (B) The oxime ester-based photopolymerization initiator represented by the following formula (I) and the (C) compound having two or more ethylenically unsaturated groups in the molecule which can be visualized by a dilute aqueous alkali solution The above-mentioned oxime ester-based photopolymerization initiator (B) is contained in an amount of 0.1 to 1.5 parts by mass based on 100 parts by mass of the above carboxyl group-containing resin (A); (wherein R 1 represents a hydrogen atom, a phenyl group (which may be substituted by an alkyl group having 1 to 6 carbon atoms, a phenyl group or a halogen atom), or an alkyl group having 1 to 20 carbon atoms (which may be one or more hydroxyl groups) Substituting, there may be one or more oxygen atoms in the middle of the alkyl chain), a cycloalkyl group having 5 to 8 carbon atoms, an alkanoyl group having 2 to 20 carbon atoms or a benzhydryl group (a carbon number of 1 to 6) Alkyl or phenyl substituted), R 2 represents a phenyl group (which may be substituted by an alkyl group having 1 to 6 carbon atoms, a phenyl group or a halogen atom), and an alkyl group having 1 to 20 carbon atoms (more than one or more) Substituted by a hydroxyl group, may have one or more oxygen atoms in the middle of the alkyl chain), a cycloalkyl group having 5 to 8 carbon atoms, an alkanoyl group having 2 to 20 carbon atoms, or a benzhydryl group (carbon number per pass) 1~6 alkyl or phenyl substituted)). 如申請專利範圍第1項之感光性樹脂組成物,其中該含羧基的樹脂(A)進一步具有胺基甲酸乙酯構造。 The photosensitive resin composition of claim 1, wherein the carboxyl group-containing resin (A) further has an urethane structure. 如申請專利範圍第1項之感光性樹脂組成物,其中該含羧基的樹脂(A)係具有2個以上的自由基聚合性不飽和雙鍵之樹脂。 The photosensitive resin composition of the first aspect of the invention, wherein the carboxyl group-containing resin (A) is a resin having two or more radical polymerizable unsaturated double bonds. 如申請專利範圍第1項之感光性樹脂組成物,其中該肟酯系光聚合引發劑(B)係下述式(V)所示的肟酯系光聚合引發劑, The photosensitive resin composition of the first aspect of the invention, wherein the oxime ester-based photopolymerization initiator (B) is an oxime ester-based photopolymerization initiator represented by the following formula (V), 如申請專利範圍第1項之感光性樹脂組成物,其中該肟酯系光聚合引發劑(B)係下述式(VI)所示的肟酯系光聚合引發劑, (式中,R10表示氫原子、鹵素原子、碳數1~12的烷基、環戊基、環己基、苯基、苄基、苯甲醯基、碳數2~12的烷醯基、碳數2~12的烷氧羰基(於構成烷氧基的烷基之碳數為2以上時,烷基可經1個以上的羥基所取代,在烷基鏈的中間可有1個以上的氧原子)或苯氧羰基;R11、R13各自獨立地表示苯基(可經碳數1~6的烷基、苯基或鹵素原子所取代)、碳數1~20的烷基(可經1個以上的羥基所取代,在烷基鏈的中間可有1個以上的氧原子)、碳數5~8的環烷基、碳數2~20的烷醯基或苯甲醯基(可經碳數1~6的烷基或苯基所取代);R12表示氫原子、苯基(可經碳數1~6的烷基、苯基或鹵素原子所取代)、碳數1~20的烷基(可經1個以上的羥基所取代,在烷基鏈的中間可有1個以上的氧原子)、碳數5~8的環烷基、碳數2~20的烷醯基或苯甲醯基(可經碳數1~6的烷基或苯基所取代))。 The photosensitive resin composition of the first aspect of the invention, wherein the oxime ester-based photopolymerization initiator (B) is an oxime ester-based photopolymerization initiator represented by the following formula (VI), (In the formula, R 10 represents a hydrogen atom, a halogen atom, an alkyl group having 1 to 12 carbon atoms, a cyclopentyl group, a cyclohexyl group, a phenyl group, a benzyl group, a benzamyl group, an alkanoyl group having 2 to 12 carbon atoms, The alkoxycarbonyl group having 2 to 12 carbon atoms (when the number of carbon atoms of the alkyl group constituting the alkoxy group is 2 or more, the alkyl group may be substituted by one or more hydroxyl groups, and one or more of the alkyl chains may be present in the middle of the alkyl chain. An oxygen atom) or a phenoxycarbonyl group; R 11 and R 13 each independently represent a phenyl group (which may be substituted by an alkyl group having 1 to 6 carbon atoms, a phenyl group or a halogen atom), and an alkyl group having 1 to 20 carbon atoms. Substituted by one or more hydroxyl groups, one or more oxygen atoms may be present in the middle of the alkyl chain), a cycloalkyl group having 5 to 8 carbon atoms, an alkanoyl group having 2 to 20 carbon atoms or a benzhydryl group ( It can be substituted by an alkyl group having 1 to 6 carbon atoms or a phenyl group; R 12 represents a hydrogen atom, a phenyl group (which may be substituted by an alkyl group having 1 to 6 carbon atoms, a phenyl group or a halogen atom), and a carbon number of 1~ 20 alkyl group (which may be substituted by one or more hydroxyl groups, may have one or more oxygen atoms in the middle of the alkyl chain), a cycloalkyl group having 5 to 8 carbon atoms, or an alkyl fluorenyl group having 2 to 20 carbon atoms Or a benzamidine group (which may be substituted by an alkyl group having 1 to 6 carbon atoms or a phenyl group)). 如申請專利範圍第1項之感光性樹脂組成物,其中作為光聚合引發劑,除了含有該肟酯系光聚合引發劑(B),亦含有在150℃揮發50%以上的光聚合引發劑(B1a)。 The photosensitive resin composition of the first aspect of the invention, wherein the photopolymerization initiator contains a photopolymerization initiator (B) which volatilizes at 50 ° C or more at 150 ° C as a photopolymerization initiator (B). B1a). 如申請專利範圍第1項之感光性樹脂組成物,其中更含有熱硬化性成分(D)。 The photosensitive resin composition of claim 1, wherein the thermosetting component (D) is further contained. 如申請專利範圍第1至7項中任一項之感光性樹脂組成物,其係乾燥塗膜在355nm的吸光度以乾燥膜厚25μm計係在0.3~1.2的範圍內。 The photosensitive resin composition according to any one of claims 1 to 7, wherein the dry coating film has an absorbance at 355 nm in a range of 0.3 to 1.2 in a dry film thickness of 25 μm. 一種感光性的乾膜,其特徵係在載體薄膜上塗佈如申請專利範圍第1至8項中任一項之感光性樹脂組成物後乾燥而得。 A photosensitive dry film obtained by drying a photosensitive resin composition according to any one of claims 1 to 8 after drying on a carrier film. 一種硬化物,其特徵係將如申請專利範圍第1至8項中任一項之感光性樹脂組成物或如申請專利範圍第9項之乾膜在銅上進行光硬化而得。 A cured product obtained by photohardening a photosensitive resin composition according to any one of claims 1 to 8 or a dry film of claim 9 in copper. 一種硬化物,其特徵係將如申請專利範圍第1至8項中任一項之感光性樹脂組成物或如申請專利範圍第9項之乾膜,藉由雷射振盪光源進行光硬化而得。 A cured product characterized by the photosensitive resin composition according to any one of claims 1 to 8 or the dry film of claim 9 of the patent application, which is photohardened by a laser oscillating light source. . 一種印刷電路板,其特徵係具有藉由最大波長為350~410nm的雷射光使如申請專利範圍第1至8項中任一項之感光性樹脂組成物或如申請專利範圍第9項之乾膜進行光硬化後,熱硬化而得之硬化皮膜。 A printed circuit board characterized by having a photosensitive resin composition according to any one of claims 1 to 8 or a ninth application of the ninth aspect of the patent application by the laser light having a maximum wavelength of 350 to 410 nm. After the film is photohardened, it is hardened by heat to obtain a hardened film.
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