JP5660690B2 - Photosensitive resin composition and cured product thereof - Google Patents
Photosensitive resin composition and cured product thereof Download PDFInfo
- Publication number
- JP5660690B2 JP5660690B2 JP2013161550A JP2013161550A JP5660690B2 JP 5660690 B2 JP5660690 B2 JP 5660690B2 JP 2013161550 A JP2013161550 A JP 2013161550A JP 2013161550 A JP2013161550 A JP 2013161550A JP 5660690 B2 JP5660690 B2 JP 5660690B2
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- carbon atoms
- resin composition
- photosensitive resin
- substituted
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- 239000011342 resin composition Substances 0.000 title claims description 64
- 229920005989 resin Polymers 0.000 claims description 90
- 239000011347 resin Substances 0.000 claims description 90
- -1 oxime ester Chemical class 0.000 claims description 86
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims description 74
- 239000003999 initiator Substances 0.000 claims description 50
- 150000001875 compounds Chemical class 0.000 claims description 47
- 125000000217 alkyl group Chemical group 0.000 claims description 39
- 125000004432 carbon atom Chemical group C* 0.000 claims description 39
- 238000000576 coating method Methods 0.000 claims description 33
- 229920001187 thermosetting polymer Polymers 0.000 claims description 31
- 239000011248 coating agent Substances 0.000 claims description 30
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 28
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 claims description 25
- 238000002835 absorbance Methods 0.000 claims description 20
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 19
- 238000001035 drying Methods 0.000 claims description 11
- 125000005843 halogen group Chemical group 0.000 claims description 11
- 125000004430 oxygen atom Chemical group O* 0.000 claims description 11
- 125000002252 acyl group Chemical group 0.000 claims description 10
- 125000003236 benzoyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C(*)=O 0.000 claims description 10
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N diphenyl Chemical compound C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 claims description 10
- 238000000016 photochemical curing Methods 0.000 claims description 10
- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 claims description 9
- 125000000753 cycloalkyl group Chemical group 0.000 claims description 8
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 6
- 235000010290 biphenyl Nutrition 0.000 claims description 5
- 239000004305 biphenyl Substances 0.000 claims description 5
- 229910052802 copper Inorganic materials 0.000 claims description 5
- 239000010949 copper Substances 0.000 claims description 5
- JOYRKODLDBILNP-UHFFFAOYSA-N urethane group Chemical group NC(=O)OCC JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 claims description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 4
- 229910052799 carbon Inorganic materials 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 125000004169 (C1-C6) alkyl group Chemical group 0.000 claims description 3
- 206010034972 Photosensitivity reaction Diseases 0.000 claims description 3
- 230000036211 photosensitivity Effects 0.000 claims description 3
- 125000003837 (C1-C20) alkyl group Chemical group 0.000 claims description 2
- 125000003545 alkoxy group Chemical group 0.000 claims description 2
- 125000004453 alkoxycarbonyl group Chemical group 0.000 claims description 2
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 claims description 2
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 claims description 2
- 125000001511 cyclopentyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C1([H])[H] 0.000 claims description 2
- 230000010355 oscillation Effects 0.000 claims description 2
- 125000006678 phenoxycarbonyl group Chemical group 0.000 claims description 2
- 239000000049 pigment Substances 0.000 description 89
- 239000010408 film Substances 0.000 description 78
- 239000003822 epoxy resin Substances 0.000 description 56
- 229920000647 polyepoxide Polymers 0.000 description 56
- 239000000203 mixture Substances 0.000 description 31
- 239000000126 substance Substances 0.000 description 31
- 239000000758 substrate Substances 0.000 description 28
- 238000010438 heat treatment Methods 0.000 description 25
- 238000000034 method Methods 0.000 description 20
- 239000000047 product Substances 0.000 description 19
- 239000010410 layer Substances 0.000 description 18
- 229910000679 solder Inorganic materials 0.000 description 17
- 239000007864 aqueous solution Substances 0.000 description 16
- 239000004593 Epoxy Substances 0.000 description 14
- 230000015572 biosynthetic process Effects 0.000 description 13
- 239000002253 acid Substances 0.000 description 12
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 12
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 11
- PYKYMHQGRFAEBM-UHFFFAOYSA-N anthraquinone Natural products CCC(=O)c1c(O)c2C(=O)C3C(C=CC=C3O)C(=O)c2cc1CC(=O)OC PYKYMHQGRFAEBM-UHFFFAOYSA-N 0.000 description 11
- 238000006243 chemical reaction Methods 0.000 description 11
- 238000003786 synthesis reaction Methods 0.000 description 11
- 230000000052 comparative effect Effects 0.000 description 10
- 239000007787 solid Substances 0.000 description 10
- 239000000243 solution Substances 0.000 description 10
- 229920002803 thermoplastic polyurethane Polymers 0.000 description 10
- 150000004056 anthraquinones Chemical class 0.000 description 9
- 238000002156 mixing Methods 0.000 description 9
- 238000007747 plating Methods 0.000 description 9
- 239000002904 solvent Substances 0.000 description 9
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 8
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 8
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 8
- 230000001588 bifunctional effect Effects 0.000 description 8
- 239000003086 colorant Substances 0.000 description 8
- 125000004122 cyclic group Chemical group 0.000 description 8
- LYCAIKOWRPUZTN-UHFFFAOYSA-N ethylene glycol Natural products OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 8
- 238000011156 evaluation Methods 0.000 description 8
- 239000011521 glass Substances 0.000 description 8
- 229920001721 polyimide Polymers 0.000 description 8
- XTQHKBHJIVJGKJ-UHFFFAOYSA-N sulfur monoxide Chemical group S=O XTQHKBHJIVJGKJ-UHFFFAOYSA-N 0.000 description 8
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 7
- 229910052753 mercury Inorganic materials 0.000 description 7
- 230000008569 process Effects 0.000 description 7
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 239000003054 catalyst Substances 0.000 description 6
- 239000007795 chemical reaction product Substances 0.000 description 6
- XCJYREBRNVKWGJ-UHFFFAOYSA-N copper(II) phthalocyanine Chemical compound [Cu+2].C12=CC=CC=C2C(N=C2[N-]C(C3=CC=CC=C32)=N2)=NC1=NC([C]1C=CC=CC1=1)=NC=1N=C1[C]3C=CC=CC3=C2[N-]1 XCJYREBRNVKWGJ-UHFFFAOYSA-N 0.000 description 6
- 239000013039 cover film Substances 0.000 description 6
- 125000005442 diisocyanate group Chemical group 0.000 description 6
- 238000004090 dissolution Methods 0.000 description 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 6
- 229910052737 gold Inorganic materials 0.000 description 6
- 239000010931 gold Substances 0.000 description 6
- 229920003986 novolac Polymers 0.000 description 6
- 239000003960 organic solvent Substances 0.000 description 6
- 229920005862 polyol Polymers 0.000 description 6
- 238000005476 soldering Methods 0.000 description 6
- 239000005058 Isophorone diisocyanate Substances 0.000 description 5
- 238000010521 absorption reaction Methods 0.000 description 5
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 5
- 125000000751 azo group Chemical group [*]N=N[*] 0.000 description 5
- 238000001723 curing Methods 0.000 description 5
- 238000011161 development Methods 0.000 description 5
- 230000018109 developmental process Effects 0.000 description 5
- 239000000945 filler Substances 0.000 description 5
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 5
- NIMLQBUJDJZYEJ-UHFFFAOYSA-N isophorone diisocyanate Chemical compound CC1(C)CC(N=C=O)CC(C)(CN=C=O)C1 NIMLQBUJDJZYEJ-UHFFFAOYSA-N 0.000 description 5
- NYGZLYXAPMMJTE-UHFFFAOYSA-M metanil yellow Chemical group [Na+].[O-]S(=O)(=O)C1=CC=CC(N=NC=2C=CC(NC=3C=CC=CC=3)=CC=2)=C1 NYGZLYXAPMMJTE-UHFFFAOYSA-M 0.000 description 5
- 239000003208 petroleum Substances 0.000 description 5
- 150000003077 polyols Chemical class 0.000 description 5
- KCTAWXVAICEBSD-UHFFFAOYSA-N prop-2-enoyloxy prop-2-eneperoxoate Chemical compound C=CC(=O)OOOC(=O)C=C KCTAWXVAICEBSD-UHFFFAOYSA-N 0.000 description 5
- 238000007650 screen-printing Methods 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 5
- 239000007921 spray Substances 0.000 description 5
- FPZWZCWUIYYYBU-UHFFFAOYSA-N 2-(2-ethoxyethoxy)ethyl acetate Chemical compound CCOCCOCCOC(C)=O FPZWZCWUIYYYBU-UHFFFAOYSA-N 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 239000003513 alkali Substances 0.000 description 4
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical class C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 4
- 239000012965 benzophenone Substances 0.000 description 4
- 150000004294 cyclic thioethers Chemical group 0.000 description 4
- 125000000664 diazo group Chemical group [N-]=[N+]=[*] 0.000 description 4
- 125000003700 epoxy group Chemical group 0.000 description 4
- 238000013007 heat curing Methods 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 4
- 229910000029 sodium carbonate Inorganic materials 0.000 description 4
- RIOQSEWOXXDEQQ-UHFFFAOYSA-N triphenylphosphine Chemical compound C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 RIOQSEWOXXDEQQ-UHFFFAOYSA-N 0.000 description 4
- PTBDIHRZYDMNKB-UHFFFAOYSA-N 2,2-Bis(hydroxymethyl)propionic acid Chemical compound OCC(C)(CO)C(O)=O PTBDIHRZYDMNKB-UHFFFAOYSA-N 0.000 description 3
- JVYDLYGCSIHCMR-UHFFFAOYSA-N 2,2-bis(hydroxymethyl)butanoic acid Chemical compound CCC(CO)(CO)C(O)=O JVYDLYGCSIHCMR-UHFFFAOYSA-N 0.000 description 3
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Natural products CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 description 3
- 239000004925 Acrylic resin Substances 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical class C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 description 3
- 239000004642 Polyimide Substances 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- GOOHAUXETOMSMM-UHFFFAOYSA-N Propylene oxide Chemical class CC1CO1 GOOHAUXETOMSMM-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- 238000000862 absorption spectrum Methods 0.000 description 3
- 150000008065 acid anhydrides Chemical class 0.000 description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 3
- BAPJBEWLBFYGME-UHFFFAOYSA-N acrylic acid methyl ester Natural products COC(=O)C=C BAPJBEWLBFYGME-UHFFFAOYSA-N 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 239000002585 base Substances 0.000 description 3
- 229920001577 copolymer Polymers 0.000 description 3
- 150000004292 cyclic ethers Chemical group 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 125000004663 dialkyl amino group Chemical group 0.000 description 3
- 239000000975 dye Substances 0.000 description 3
- 238000010292 electrical insulation Methods 0.000 description 3
- 239000003112 inhibitor Substances 0.000 description 3
- IQPQWNKOIGAROB-UHFFFAOYSA-N isocyanate group Chemical group [N-]=C=O IQPQWNKOIGAROB-UHFFFAOYSA-N 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 125000003566 oxetanyl group Chemical group 0.000 description 3
- 230000035515 penetration Effects 0.000 description 3
- 229920000515 polycarbonate Polymers 0.000 description 3
- 239000004417 polycarbonate Substances 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- FYNROBRQIVCIQF-UHFFFAOYSA-N pyrrolo[3,2-b]pyrrole-5,6-dione Chemical compound C1=CN=C2C(=O)C(=O)N=C21 FYNROBRQIVCIQF-UHFFFAOYSA-N 0.000 description 3
- 239000001062 red colorant Substances 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 238000012719 thermal polymerization Methods 0.000 description 3
- 150000003553 thiiranes Chemical class 0.000 description 3
- 239000001060 yellow colorant Substances 0.000 description 3
- KMOUUZVZFBCRAM-OLQVQODUSA-N (3as,7ar)-3a,4,7,7a-tetrahydro-2-benzofuran-1,3-dione Chemical compound C1C=CC[C@@H]2C(=O)OC(=O)[C@@H]21 KMOUUZVZFBCRAM-OLQVQODUSA-N 0.000 description 2
- BTJPUDCSZVCXFQ-UHFFFAOYSA-N 2,4-diethylthioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(CC)=CC(CC)=C3SC2=C1 BTJPUDCSZVCXFQ-UHFFFAOYSA-N 0.000 description 2
- LCHAFMWSFCONOO-UHFFFAOYSA-N 2,4-dimethylthioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(C)=CC(C)=C3SC2=C1 LCHAFMWSFCONOO-UHFFFAOYSA-N 0.000 description 2
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 2
- HHOJVZAEHZGDRB-UHFFFAOYSA-N 2-(4,6-diamino-1,3,5-triazin-2-yl)ethyl 2-methylprop-2-enoate Chemical compound CC(=C)C(=O)OCCC1=NC(N)=NC(N)=N1 HHOJVZAEHZGDRB-UHFFFAOYSA-N 0.000 description 2
- UHFFVFAKEGKNAQ-UHFFFAOYSA-N 2-benzyl-2-(dimethylamino)-1-(4-morpholin-4-ylphenyl)butan-1-one Chemical compound C=1C=C(N2CCOCC2)C=CC=1C(=O)C(CC)(N(C)C)CC1=CC=CC=C1 UHFFVFAKEGKNAQ-UHFFFAOYSA-N 0.000 description 2
- ZCDADJXRUCOCJE-UHFFFAOYSA-N 2-chlorothioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(Cl)=CC=C3SC2=C1 ZCDADJXRUCOCJE-UHFFFAOYSA-N 0.000 description 2
- NJWGQARXZDRHCD-UHFFFAOYSA-N 2-methylanthraquinone Chemical compound C1=CC=C2C(=O)C3=CC(C)=CC=C3C(=O)C2=C1 NJWGQARXZDRHCD-UHFFFAOYSA-N 0.000 description 2
- VPWNQTHUCYMVMZ-UHFFFAOYSA-N 4,4'-sulfonyldiphenol Chemical compound C1=CC(O)=CC=C1S(=O)(=O)C1=CC=C(O)C=C1 VPWNQTHUCYMVMZ-UHFFFAOYSA-N 0.000 description 2
- ZXLYUNPVVODNRE-UHFFFAOYSA-N 6-ethenyl-1,3,5-triazine-2,4-diamine Chemical compound NC1=NC(N)=NC(C=C)=N1 ZXLYUNPVVODNRE-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 229920000298 Cellophane Polymers 0.000 description 2
- ROSDSFDQCJNGOL-UHFFFAOYSA-N Dimethylamine Chemical compound CNC ROSDSFDQCJNGOL-UHFFFAOYSA-N 0.000 description 2
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 2
- 244000028419 Styrax benzoin Species 0.000 description 2
- 235000000126 Styrax benzoin Nutrition 0.000 description 2
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 2
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 2
- 235000008411 Sumatra benzointree Nutrition 0.000 description 2
- VMKBJESZDNXQHG-UHFFFAOYSA-N [(9-oxothioxanthen-2-yl)methylideneamino] acetate Chemical compound C1=CC=C2C(=O)C3=CC(C=NOC(=O)C)=CC=C3SC2=C1 VMKBJESZDNXQHG-UHFFFAOYSA-N 0.000 description 2
- HVVWZTWDBSEWIH-UHFFFAOYSA-N [2-(hydroxymethyl)-3-prop-2-enoyloxy-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(CO)(COC(=O)C=C)COC(=O)C=C HVVWZTWDBSEWIH-UHFFFAOYSA-N 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 239000002390 adhesive tape Substances 0.000 description 2
- 150000001298 alcohols Chemical class 0.000 description 2
- 150000001338 aliphatic hydrocarbons Chemical class 0.000 description 2
- UMLWXYJZDNNBTD-UHFFFAOYSA-N alpha-dimethylaminoacetophenone Natural products CN(C)CC(=O)C1=CC=CC=C1 UMLWXYJZDNNBTD-UHFFFAOYSA-N 0.000 description 2
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 2
- 239000012298 atmosphere Substances 0.000 description 2
- TZCXTZWJZNENPQ-UHFFFAOYSA-L barium sulfate Chemical compound [Ba+2].[O-]S([O-])(=O)=O TZCXTZWJZNENPQ-UHFFFAOYSA-L 0.000 description 2
- MYONAGGJKCJOBT-UHFFFAOYSA-N benzimidazol-2-one Chemical compound C1=CC=CC2=NC(=O)N=C21 MYONAGGJKCJOBT-UHFFFAOYSA-N 0.000 description 2
- 150000008641 benzimidazolones Chemical class 0.000 description 2
- ZYGHJZDHTFUPRJ-UHFFFAOYSA-N benzo-alpha-pyrone Natural products C1=CC=C2OC(=O)C=CC2=C1 ZYGHJZDHTFUPRJ-UHFFFAOYSA-N 0.000 description 2
- 229960002130 benzoin Drugs 0.000 description 2
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 2
- 230000001851 biosynthetic effect Effects 0.000 description 2
- QDVNNDYBCWZVTI-UHFFFAOYSA-N bis[4-(ethylamino)phenyl]methanone Chemical compound C1=CC(NCC)=CC=C1C(=O)C1=CC=C(NCC)C=C1 QDVNNDYBCWZVTI-UHFFFAOYSA-N 0.000 description 2
- 239000000038 blue colorant Substances 0.000 description 2
- 238000013329 compounding Methods 0.000 description 2
- 229960000956 coumarin Drugs 0.000 description 2
- 235000001671 coumarin Nutrition 0.000 description 2
- 150000007973 cyanuric acids Chemical class 0.000 description 2
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 2
- DIOQZVSQGTUSAI-UHFFFAOYSA-N decane Chemical compound CCCCCCCCCC DIOQZVSQGTUSAI-UHFFFAOYSA-N 0.000 description 2
- 239000003085 diluting agent Substances 0.000 description 2
- XXBDWLFCJWSEKW-UHFFFAOYSA-N dimethylbenzylamine Chemical compound CN(C)CC1=CC=CC=C1 XXBDWLFCJWSEKW-UHFFFAOYSA-N 0.000 description 2
- 150000002009 diols Chemical class 0.000 description 2
- VFHVQBAGLAREND-UHFFFAOYSA-N diphenylphosphoryl-(2,4,6-trimethylphenyl)methanone Chemical compound CC1=CC(C)=CC(C)=C1C(=O)P(=O)(C=1C=CC=CC=1)C1=CC=CC=C1 VFHVQBAGLAREND-UHFFFAOYSA-N 0.000 description 2
- 238000007598 dipping method Methods 0.000 description 2
- 150000002148 esters Chemical class 0.000 description 2
- UHESRSKEBRADOO-UHFFFAOYSA-N ethyl carbamate;prop-2-enoic acid Chemical compound OC(=O)C=C.CCOC(N)=O UHESRSKEBRADOO-UHFFFAOYSA-N 0.000 description 2
- 239000004744 fabric Substances 0.000 description 2
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Landscapes
- Graft Or Block Polymers (AREA)
- Macromonomer-Based Addition Polymer (AREA)
- Non-Metallic Protective Coatings For Printed Circuits (AREA)
- Materials For Photolithography (AREA)
- Polymerisation Methods In General (AREA)
Description
本発明は、低反り性が要求される薄いプリント配線板、特にフレキシブル配線板のソルダーレジストや樹脂絶縁層等の可撓性の硬化皮膜形成に適した感光性樹脂組成物、その硬化物及びその硬化皮膜を有するプリント配線板に関する。 The present invention relates to a photosensitive resin composition suitable for forming a flexible cured film such as a solder resist and a resin insulating layer of a thin printed wiring board, particularly a flexible wiring board, which requires low warpage, and a cured product thereof. The present invention relates to a printed wiring board having a cured film.
従来、フレキシブル配線板は、カバーレイといわれるポリイミドフィルムに接着剤を塗布した絶縁フィルムを用い、これをプレス打ち抜き加工してラミネートし、さらにプレスで加圧条件下に熱硬化することにより、回路形成されたフレキシブル基板の表面のカバー層としていた。このカバーレイは、ベースとしてのポリイミドフィルムと、接着剤層としての低収縮熱硬化性樹脂とから構成されていることから、ラミネート後及びプレス硬化後の反りは非常に小さく、さらにはその後の補強板の貼り付け、熱硬化後や部品実装のリフローはんだ付け時の反りも非常に少なくすることができ、フレキシブル基板用途に大量に使用されている。
しかしながら、プレスにて打ち抜き加工するために、微細な加工が困難であり、かつ、回路形成された配線板とのラミネートの際に位置合わせ精度が良くないという欠点がある。
Conventionally, flexible wiring boards use an insulating film with adhesive applied to a polyimide film called a coverlay, which is press punched and laminated, and then heat cured under pressure under pressure to form a circuit. As a cover layer on the surface of the flexible substrate. Since this cover lay is composed of a polyimide film as a base and a low shrinkage thermosetting resin as an adhesive layer, warping after lamination and after press curing is very small, and further reinforcement after that The warpage after board pasting, thermosetting, and reflow soldering for component mounting can be extremely reduced, and it is used in large quantities for flexible substrate applications.
However, since punching is performed with a press, fine processing is difficult, and the positioning accuracy is not good when laminating with a circuit board on which a circuit is formed.
それに対し、感光性カバーレイとしてアルカリ現像性感光性樹脂組成物やそのドライフィルムが提案されており、例えば、特許文献1(特開2000−131836号公報)には、(a)2個以上のヒドロキシル基と1個以上のカルボキシル基を有する化合物、(b)6員環構造を有する2官能以上のポリイソシアネート及び(c)ヒドロキシル基を有する(メタ)アクリレートを反応させて得られるカルボキシル基を有するウレタンアクリレート、光重合開始剤、希釈剤及び2官能以上のエポキシ樹脂を含有する感光性樹脂組成物が提案されている。
しかしながら、光硬化性で熱硬化性の組成物であるために架橋による硬化収縮があり、光硬化後及び熱硬化後に反りを生じるという問題がある。
On the other hand, an alkali-developable photosensitive resin composition and its dry film have been proposed as a photosensitive coverlay. For example, Patent Document 1 (Japanese Patent Laid-Open No. 2000-131636) discloses (a) two or more pieces. It has a carboxyl group obtained by reacting a compound having a hydroxyl group and one or more carboxyl groups, (b) a bifunctional or higher polyisocyanate having a 6-membered ring structure, and (c) a (meth) acrylate having a hydroxyl group. A photosensitive resin composition containing a urethane acrylate, a photopolymerization initiator, a diluent, and a bifunctional or higher functional epoxy resin has been proposed.
However, since it is a photo-curable and thermosetting composition, there is a problem that there is curing shrinkage due to crosslinking, and warping occurs after photo-curing and after heat-curing.
さらに低反り性の組成物として、特許文献2(特開2005−10318号公報)には、カルボキシル基含有ウレタン変性エポキシ(メタ)アクリレートを含む活性エネルギー線硬化性樹脂、1分子中に1個ないし2個のエチレン性不飽和結合を有する活性エネルギー線硬化性不飽和化合物、光重合開始剤、希釈剤及び熱硬化性エポキシ化合物を含有する回路基板のソルダーレジストに用いる感光性樹脂組成物が提案され、特許文献3(WO 2004/079452号公報)には、アルカリ水溶液可溶性ウレタン樹脂、光重合開始剤、及び反応性架橋剤を含有する感光性樹脂組成物が提案されている。さらに、特許文献4(特開2002−229201号公報)には、カルボキシル基を有するウレタン(メタ)アクリレート化合物とこれ以外のエチレン性不飽和基を有する化合物とを含む光硬化成分と、熱硬化性樹脂と、光重合開始剤と、熱重合触媒とを含有する感光性組成物が提案されている。
これらの組成物は、硬化後の反りは充分小さい値であるが、実際にフレキシブル配線板に適用した場合、補強板貼り付け工程による後加熱、及び部品実装時の加熱により反りが発生するという欠点を有していた。
Furthermore, as a low warpage composition, Patent Document 2 (Japanese Patent Laid-Open No. 2005-10318) discloses an active energy ray-curable resin containing a carboxyl group-containing urethane-modified epoxy (meth) acrylate, one to one molecule. A photosensitive resin composition for use in a circuit board solder resist containing an active energy ray-curable unsaturated compound having two ethylenically unsaturated bonds, a photopolymerization initiator, a diluent and a thermosetting epoxy compound has been proposed. Patent Document 3 (WO 2004/079452) proposes a photosensitive resin composition containing an alkaline aqueous solution-soluble urethane resin, a photopolymerization initiator, and a reactive crosslinking agent. Furthermore, Patent Document 4 (Japanese Patent Laid-Open No. 2002-229201) discloses a photocuring component containing a urethane (meth) acrylate compound having a carboxyl group and a compound having an ethylenically unsaturated group other than this, and thermosetting. A photosensitive composition containing a resin, a photopolymerization initiator, and a thermal polymerization catalyst has been proposed.
These compositions have a sufficiently small warp after curing, but when actually applied to a flexible wiring board, there is a drawback that warp occurs due to post-heating by the reinforcing plate attaching process and heating at the time of component mounting. Had.
さらに、近年、位置合わせ精度の向上を目的としてレーザーダイレクト露光が注目されているが、前記したような従来の感光性樹脂組成物を用いた場合、露光量が多く必要であり、露光に時間がかかるという問題がある。
本発明は、前記したような従来技術の問題点を解消するためになされたものであり、その主たる目的は、フレキシブル基板を作製する工程及びその後工程や、部品実装工程における加熱による反りの発生を抑制でき、さらには光重合開始剤が少量の添加であっても高感度であり、レーザーダイレクト露光も可能であり、しかも従来のソルダーレジスト組成物と同様の各種基材に対する密着性、はんだ耐熱性、耐湿性、耐薬品性、電気絶縁性等の諸特性に優れる硬化皮膜のパターンを形成できる感光性樹脂組成物を提供することにある。
さらに本発明の目的は、このような感光性樹脂組成物を用いることによって得られる上記のような諸特性に優れた硬化物、及び該硬化物によりソルダーレジスト等の硬化皮膜が形成されてなるプリント配線板、特にフレキシブルプリント配線板を提供することにある。
The present invention has been made in order to solve the problems of the prior art as described above, and its main purpose is to generate warpage due to heating in the process of manufacturing a flexible substrate and its subsequent processes and component mounting processes. In addition, it is highly sensitive even when a small amount of photopolymerization initiator is added, laser direct exposure is possible, and adhesion to various substrates similar to conventional solder resist compositions, solder heat resistance Another object of the present invention is to provide a photosensitive resin composition capable of forming a cured film pattern excellent in various properties such as moisture resistance, chemical resistance and electrical insulation.
Furthermore, an object of the present invention is to obtain a cured product excellent in various properties as described above obtained by using such a photosensitive resin composition, and a print in which a cured film such as a solder resist is formed by the cured product. It is providing a wiring board, especially a flexible printed wiring board.
前記目的を達成するために、本発明によれば、(A)カルボキシル基含有樹脂、(A−1)ウレタン構造を有するカルボキシル基含有樹脂、(B)下記一般式(I)で示される基を有するオキシムエステル系光重合開始剤、及び(C)分子中に2個以上のエチレン性不飽和基を有する化合物を含有する希アルカリ水溶液により現像可能な組成物であって、上記カルボキシル基含有樹脂(A)100質量部に対して上記オキシムエステル系光重合開始剤(B)が0.1〜1.5質量部の割合で含有されていることを特徴とする感光性樹脂組成物が提供される。より好適には、(A)カルボキシル基含有樹脂、(B)下記一般式(I)で示される基を有するオキシムエステル系光重合開始剤、及び(C)分子中に2個以上のエチレン性不飽和基を有する化合物を含有する希アルカリ水溶液により現像可能な組成物であって、上記カルボキシル基含有樹脂(A)が、(A−1)ウレタン構造を有するカルボキシル基含有樹脂と、(A−2)上記(A−1)以外の他のカルボキシル基含有樹脂とを含み、上記カルボキシル基含有樹脂(A)100質量部に対して上記オキシムエステル系光重合開始剤(B)が0.1〜1.5質量部の割合で含有されていることを特徴とする感光性樹脂組成物が提供される。
好適な態様においては、前記カルボキシル基含有樹脂(A)、(A−1)及び(A−2)は、低反り性の点から、ビスフェノールA、ビスフェノールF、ビフェニル、ビキシレノール骨格もしくはその水添骨格である構造を有する樹脂、あるいはウレタン構造を有する樹脂である。また、前記カルボキシル基含有樹脂(A)、(A−1)及び(A−2)の少なくともいずれか1種は、光硬化性の点から、2個以上のラジカル重合性不飽和二重結合を有する感光性の樹脂であることが好ましい。さらに、前記感光性樹脂組成物は、その乾燥塗膜の355nmにおける吸光度が、乾燥膜厚25μmで0.3〜1.2の範囲内にあることが好ましい。また、本発明の感光性樹脂組成物は、硬化皮膜の耐熱性等の特性向上の観点から、熱硬化性成分(D)を含有することが好ましい。
前記感光性樹脂組成物は、液状形態及びドライフィルムの形態のいずれであってもよい。
In a preferred embodiment, the carboxyl group-containing resins (A), (A-1) and (A-2) are bisphenol A, bisphenol F, biphenyl, a bixylenol skeleton or hydrogenated thereof from the viewpoint of low warpage. A resin having a structure that is a skeleton or a resin having a urethane structure. In addition, at least one of the carboxyl group-containing resins (A), (A-1) and (A-2) has two or more radically polymerizable unsaturated double bonds from the viewpoint of photocurability. It is preferable that it is the photosensitive resin which has. Furthermore, the photosensitive resin composition preferably has an absorbance at 355 nm of the dried coating film in the range of 0.3 to 1.2 at a dry film thickness of 25 μm. Moreover, it is preferable that the photosensitive resin composition of this invention contains a thermosetting component (D) from a viewpoint of characteristic improvement, such as the heat resistance of a cured film.
The photosensitive resin composition may be in a liquid form or a dry film form.
さらに本発明によれば、前記感光性樹脂組成物又はそのドライフィルムを、銅上にて光硬化して得られる硬化物、特にレーザー発振光源にて光硬化して得られる硬化物、及び最大波長が350〜410nmのレーザー光によって光硬化させた後、熱硬化して得られた硬化皮膜を有するプリント配線板が提供される。 Furthermore, according to the present invention, a cured product obtained by photocuring the photosensitive resin composition or its dry film on copper, particularly a cured product obtained by photocuring with a laser oscillation light source, and a maximum wavelength. Is printed with a laser beam of 350 to 410 nm, and then a printed wiring board having a cured film obtained by heat curing is provided.
本発明の感光性樹脂組成物は、カルボキシル基含有樹脂(以下、総称する場合、代表して符合「A」で表す)及び分子中に2個以上のエチレン性不飽和基を有する化合物(C)と共に配合する光重合開始剤として、前記一般式(I)で示される基を有するオキシムエステル系光重合開始剤(B)を含有するため、フレキシブル基板を作製する工程及びその後工程や、部品実装工程における加熱による反りの発生を抑制でき、また、上記カルボキシル基含有樹脂(A)100質量部に対して上記オキシムエステル系光重合開始剤(B)が0.1〜1.5質量部の割合の少量で含有されていても、高感度であり、レーザーダイレクト露光も可能である。また、本発明の感光性樹脂組成物は、希アルカリ水溶液により現像可能な組成物であって、しかも低反り性であるにも拘らず、従来のソルダーレジスト組成物と同様の各種基材に対する密着性、はんだ耐熱性、耐湿性、耐薬品性、無電解金めっき耐性、電気絶縁性等の諸特性に優れる硬化皮膜のパターンを形成できる。従って、本発明の感光性樹脂組成物は、プリント配線板、特にフレキシブルプリント配線板のソルダーレジストや樹脂絶縁層等の硬化皮膜の形成に有利に適用できる。 The photosensitive resin composition of the present invention comprises a carboxyl group-containing resin (hereinafter collectively represented by the symbol “A” as a representative) and a compound (C) having two or more ethylenically unsaturated groups in the molecule. Since it contains the oxime ester photopolymerization initiator (B) having the group represented by the general formula (I) as a photopolymerization initiator to be blended together, a process for producing a flexible substrate, a subsequent process, and a component mounting process Generation | occurrence | production of the curvature by heating in can be suppressed, Moreover, the said oxime ester type photoinitiator (B) is a ratio of 0.1-1.5 mass part with respect to 100 mass parts of said carboxyl group-containing resin (A). Even if it is contained in a small amount, it has high sensitivity and laser direct exposure is possible. In addition, the photosensitive resin composition of the present invention is a composition that can be developed with a dilute aqueous alkali solution and has low warpage, but it adheres to various substrates similar to conventional solder resist compositions. It is possible to form a cured film pattern having excellent properties such as heat resistance, solder heat resistance, moisture resistance, chemical resistance, electroless gold plating resistance, and electrical insulation. Therefore, the photosensitive resin composition of the present invention can be advantageously applied to the formation of a cured film such as a solder resist or a resin insulating layer of a printed wiring board, particularly a flexible printed wiring board.
本発明者らは、後加熱工程及び部品実装時の反りが光重合性開始剤の揮発によるものであること、また組成物の吸光度が反りに大きく影響することを見出した。本発明者らは、これらの現象についてさらに研究した結果、カルボキシル基含有樹脂(A)及び分子中に2個以上のエチレン性不飽和基を有する化合物(C)と共に配合する光重合開始剤として、前記一般式(I)で示される基を有するオキシムエステル系光重合開始剤(B)を用いた場合、少量の添加であっても充分な光特性を有し、レーザーダイレクト露光も可能な感光性樹脂組成物が得られることを見出し、本発明を完成するに至ったものである。
以下、本発明の感光性樹脂組成物の各成分について説明する。
The present inventors have found that the warp during the post-heating step and component mounting is due to volatilization of the photopolymerizable initiator, and that the absorbance of the composition greatly affects the warp. As a result of further study of these phenomena, the present inventors have found that as a photopolymerization initiator to be blended together with a carboxyl group-containing resin (A) and a compound having two or more ethylenically unsaturated groups in the molecule (C), When the oxime ester-based photopolymerization initiator (B) having the group represented by the general formula (I) is used, the photosensitivity is sufficient even if added in a small amount and capable of laser direct exposure. The present inventors have found that a resin composition can be obtained and have completed the present invention.
Hereinafter, each component of the photosensitive resin composition of this invention is demonstrated.
まず、カルボキシル基含有樹脂(A)としては、それ自体がエチレン性不飽和二重結合を有さないカルボキシル基含有樹脂や、エチレン性不飽和二重結合を有する感光性のカルボキシル基含有樹脂のいずれも使用でき、特定のものに限定されないが、特に以下に列挙するような化合物(オリゴマー及びポリマーのいずれでも良い)を好適に使用できる。 First, as the carboxyl group-containing resin (A), any of a carboxyl group-containing resin that itself does not have an ethylenically unsaturated double bond and a photosensitive carboxyl group-containing resin that has an ethylenically unsaturated double bond Although it is not limited to a specific thing, especially the compound (any of an oligomer and a polymer) as enumerated below can be used conveniently.
(1)(メタ)アクリル酸等の不飽和カルボン酸と、スチレン、α−メチルスチレン、低級アルキル(メタ)アクリレート、イソブチレン等の不飽和二重結合を有する化合物を共重合させることによって得られるカルボキシル基含有樹脂。
(2)脂肪族ジイソシアネート、分岐脂肪族ジイソシアネート、脂環式ジイソシアネート、芳香族ジイソシアネート等のジイソシアネートと、ジメチロールプロピオン酸、ジメチロールブタン酸等のカルボキシル基含有ジアルコール化合物、及びポリカーボネート系ポリオール、ポリエーテル系ポリオール、ポリエステル系ポリオール、ポリオレフィン系ポリオール、アクリル系ポリオール、ビスフェノールA系アルキレンオキシド付加体ジオール、フェノール性ヒドロキシル基及びアルコール性ヒドロキシル基を有する化合物等のジオール化合物の重付加反応により得られるカルボキシル基含有ウレタン樹脂。
(3)ジイソシアネートと、ビスフェノールA型エポキシ樹脂、水添ビスフェノールA型エポキシ樹脂、臭素化ビスフェノールA型エポキシ樹脂、ビスフェノールF型エポキシ樹脂、ビスフェノールS型エポキシ樹脂、ビキシレノール型エポキシ樹脂、ビフェノール型エポキシ樹脂等の2官能エポキシ樹脂の(メタ)アクリレートもしくはその部分酸無水物変性物、カルボキシル基含有ジアルコール化合物、及びジオール化合物の重付加反応により得られる感光性のカルボキシル基含有ウレタン樹脂。
(4)前記(2)又は(3)の樹脂の合成中に、ヒドロキシアルキル(メタ)アクリレート等の分子内に1つの水酸基と1つ以上の(メタ)アクリル基を有する化合物を加え、末端(メタ)アクリル化したカルボキシル基含有ウレタン樹脂。
(5)前記(2)又は(3)の樹脂の合成中に、イソホロンジイソシアネートとペンタエリスリトールトリアクリレートの等モル反応物などの分子内に1つのイソシアネート基と1つ以上の(メタ)アクリル基を有する化合物を加え、末端(メタ)アクリル化したカルボキシル基含有ウレタン樹脂。
(6)後述するような多官能(固形)エポキシ樹脂に(メタ)アクリル酸を反応させ、生成した水酸基に2塩基酸無水物を付加させて得られる感光性のカルボキシル基含有樹脂。
(7)2官能(固形)エポキシ樹脂の水酸基をさらにエピクロロヒドリンでエポキシ化した多官能エポキシ樹脂に(メタ)アクリル酸を反応させ、生成した水酸基に2塩基酸無水物を付加させて得られる感光性のカルボキシル基含有樹脂。
(8)後述するような2官能オキセタン樹脂にジカルボン酸を反応させ、生成した1級の水酸基に2塩基酸無水物を付加させて得られるカルボキシル基含有ポリエステル樹脂。
(9)上記樹脂(1)〜(8)にさらに1分子内に1つのエポキシ基と1つ以上の(メタ)アクリル基を有する化合物を付加してなる感光性のカルボキシル基含有樹脂。
(1) A carboxyl obtained by copolymerizing an unsaturated carboxylic acid such as (meth) acrylic acid and a compound having an unsaturated double bond such as styrene, α-methylstyrene, lower alkyl (meth) acrylate, and isobutylene. Group-containing resin.
(2) Diisocyanates such as aliphatic diisocyanates, branched aliphatic diisocyanates, alicyclic diisocyanates, aromatic diisocyanates, carboxyl group-containing dialcohol compounds such as dimethylolpropionic acid and dimethylolbutanoic acid, and polycarbonate polyols and polyethers Carboxyl group content obtained by polyaddition reaction of diol compounds such as polyols, polyester polyols, polyolefin polyols, acrylic polyols, bisphenol A alkylene oxide adduct diols, compounds having phenolic hydroxyl groups and alcoholic hydroxyl groups Urethane resin.
(3) Diisocyanate, bisphenol A type epoxy resin, hydrogenated bisphenol A type epoxy resin, brominated bisphenol A type epoxy resin, bisphenol F type epoxy resin, bisphenol S type epoxy resin, bixylenol type epoxy resin, biphenol type epoxy resin A photosensitive carboxyl group-containing urethane resin obtained by polyaddition reaction of a bifunctional epoxy resin (meth) acrylate or a partially modified anhydride thereof, a carboxyl group-containing dialcohol compound, and a diol compound.
(4) During the synthesis of the resin of the above (2) or (3), a compound having one hydroxyl group and one or more (meth) acryl groups in the molecule such as hydroxyalkyl (meth) acrylate is added, and the terminal ( (Meth) acrylic carboxyl group-containing urethane resin.
(5) During the synthesis of the resin of the above (2) or (3), one isocyanate group and one or more (meth) acryl groups are introduced into the molecule such as an equimolar reaction product of isophorone diisocyanate and pentaerythritol triacrylate. The carboxyl group-containing urethane resin which added the compound which has and was terminally (meth) acrylated.
(6) A photosensitive carboxyl group-containing resin obtained by reacting (meth) acrylic acid with a polyfunctional (solid) epoxy resin as described later and adding a dibasic acid anhydride to the generated hydroxyl group.
(7) Obtained by reacting (meth) acrylic acid with a polyfunctional epoxy resin obtained by epoxidizing the hydroxyl group of a bifunctional (solid) epoxy resin with epichlorohydrin and adding a dibasic acid anhydride to the produced hydroxyl group. A photosensitive carboxyl group-containing resin.
(8) A carboxyl group-containing polyester resin obtained by reacting a difunctional oxetane resin as described later with a dicarboxylic acid and adding a dibasic acid anhydride to the primary hydroxyl group produced.
(9) A photosensitive carboxyl group-containing resin obtained by adding a compound having one epoxy group and one or more (meth) acryl groups in one molecule to the resins (1) to (8).
これらカルボキシル基含有樹脂の中でも好ましいものは、前記(2)〜(5)の樹脂の合成に用いられるイソシアネート基を有する化合物(ジイソシアネートも含む)がベンゼン環を有していないジイソシアネートの場合、及び前記(6)、(7)の樹脂の合成に用いられる多官能及び2官能エポキシ樹脂がビスフェノールA骨格、ビスフェノールF骨格、ビフェニル骨格、ビキシレノール骨格を有する線状構造の化合物及びその水添化合物の場合が、可撓性等の点で好ましい。また、別の側面では、前記(2)〜(5)の樹脂及びそれらの前記(9)の如き変性物は、主鎖にウレタン結合を有しており、反りに対して好ましい。また、前記(1)、(2)、(8)以外の樹脂は分子内に感光性基(ラジカル重合性不飽和二重結合)を有しているため、光硬化性の点で好ましい。
なお、本明細書において、(メタ)アクリレートとは、アクリレート、メタクリレート及びそれらの混合物を総称する用語であり、他の類似の表現についても同様である。
Among these carboxyl group-containing resins, preferred are those in which the compound having an isocyanate group (including diisocyanate) used for the synthesis of the resins of (2) to (5) is a diisocyanate having no benzene ring, and (6) In the case where the polyfunctional and bifunctional epoxy resins used for the synthesis of the resin of (7) are a compound having a linear structure having a bisphenol A skeleton, a bisphenol F skeleton, a biphenyl skeleton, a bixylenol skeleton, and a hydrogenated compound thereof Is preferable in terms of flexibility and the like. In another aspect, the resins (2) to (5) and the modified products thereof (9) have a urethane bond in the main chain and are preferable for warpage. In addition, since the resins other than (1), (2) and (8) have a photosensitive group (radical polymerizable unsaturated double bond) in the molecule, they are preferable in terms of photocurability.
In the present specification, (meth) acrylate is a term that collectively refers to acrylate, methacrylate, and mixtures thereof, and the same applies to other similar expressions.
前記したようなカルボキシル基含有樹脂(A)は、バックボーン・ポリマーの側鎖に多数の遊離のカルボキシル基を有するため、希アルカリ水溶液による現像が可能になる。
また、前記カルボキシル基含有樹脂(A)の酸価は、40〜200mgKOH/gの範囲にあることが望ましく、より好ましくは45〜120mgKOH/gの範囲である。カルボキシル基含有樹脂(A)の酸価が40mgKOH/g未満であるとアルカリ現像が困難となり、一方、200mgKOH/gを超えると現像液による露光部の溶解が進むために、必要以上にラインが痩せたり、場合によっては、露光部と未露光部の区別なく現像液で溶解剥離してしまい、正常なレジストパターンの形成が困難となるので好ましくない。
Since the carboxyl group-containing resin (A) as described above has a large number of free carboxyl groups in the side chain of the backbone polymer, development with a dilute alkaline aqueous solution becomes possible.
The acid value of the carboxyl group-containing resin (A) is desirably in the range of 40 to 200 mgKOH / g, and more preferably in the range of 45 to 120 mgKOH / g. If the acid value of the carboxyl group-containing resin (A) is less than 40 mgKOH / g, alkali development becomes difficult. On the other hand, if it exceeds 200 mgKOH / g, dissolution of the exposed area by the developer proceeds, so the line becomes thinner than necessary. In some cases, the exposed portion and the unexposed portion are not distinguished from each other by dissolution and peeling with a developer, which makes it difficult to form a normal resist pattern.
また、前記カルボキシル基含有樹脂(A)の重量平均分子量は、樹脂骨格により異なるが、一般的に2,000〜150,000の範囲が望ましく、より好ましくは5,000〜100,000の範囲である。重量平均分子量が2,000未満であると、塗膜のタックフリー性能が劣ることがあり、露光後の塗膜の耐湿性が悪く、現像時に膜減りが生じ、解像度が大きく劣ることがある。一方、重量平均分子量が150,000を超えると、現像性が著しく悪くなることがあり、貯蔵安定性が劣ることがある。 Moreover, although the weight average molecular weight of the said carboxyl group-containing resin (A) changes with resin frame | skeleton, generally the range of 2,000-150,000 is desirable, More preferably, it is the range of 5,000-100,000. is there. If the weight average molecular weight is less than 2,000, the tack-free performance of the coating film may be inferior, the moisture resistance of the coating film after exposure may be poor, the film may be reduced during development, and the resolution may be greatly inferior. On the other hand, when the weight average molecular weight exceeds 150,000, developability may be remarkably deteriorated, and storage stability may be inferior.
このようなカルボキシル基含有樹脂(A)の配合量は、全組成物の20〜60質量%の範囲にあることが望ましく、好ましくは30〜50質量%の範囲である。上記範囲より少ない場合、塗膜強度が低下したりするので好ましくない。一方、上記範囲より多い場合、組成物の粘性が高くなったり、塗布性等が低下するので好ましくない。 The blending amount of such a carboxyl group-containing resin (A) is desirably in the range of 20 to 60% by mass of the total composition, and preferably in the range of 30 to 50% by mass. When the amount is less than the above range, the coating strength is lowered, which is not preferable. On the other hand, when the amount is larger than the above range, the viscosity of the composition is increased or the coating property is lowered, which is not preferable.
次に、本発明に用いる前記一般式(I)で示される基を有するオキシムエステル系光重合開始剤(B)は、少量でも感度が充分であり、後加熱及び部品実装の際の開始剤揮発による反りの防止に効果がある。通常、感光性カバーレイ及びソルダーレジストに用いられる感光性組成物には、光重合開始剤がカルボキシル基含有樹脂100質量部に対して5〜20質量部含まれている。しかしながら、前記一般式(I)で示される基を有するオキシムエステル系光重合開始剤(B)は、カルボキシル基含有樹脂(A)100質量部に対して0.1〜1.5質量部で充分であり、さらに部品実装後の反りが少ない硬化物を与える。これは、光重合開始剤が多く含まれる組成物の場合、おそらく後加熱もしくは部品実装のリフローはんだ付けの際に光重合開始剤が揮発し、体積収縮するために反りが発生したものと考えられる。このことは、別の側面から見れば、組成物の熱硬化の際に殆ど揮発してしまう光重合開始剤の場合、比較的多く加えても問題ないということになる。すなわち、フレキシブル基板の作製工程は、光硬化→熱硬化→後加熱→部品実装(リフローはんだ付け)となるが、一般的な例を挙げると、その温度履歴は光硬化(20〜30℃で数秒)→熱硬化(140〜160℃で30〜60分)→後加熱(150〜170℃で2時間)→部品実装(240〜260℃で数秒〜数十秒)である。ここで、熱硬化の際に殆どが揮発してしまう光重合開始剤は、本硬化以降ではもはや揮発する成分は殆ど残っておらず、後加熱及び部品実装時に体積収縮の原因にならないものと考えられる。そのような光重合開始剤としては、150℃の加熱で50%以上減少する化合物が挙げられ、後述する(Ba1)が好適である。 Next, the oxime ester photopolymerization initiator (B) having the group represented by the general formula (I) used in the present invention has sufficient sensitivity even in a small amount, and the initiator volatilization at the time of post-heating and component mounting. It is effective in preventing warpage caused by. Usually, the photosensitive composition used for the photosensitive coverlay and the solder resist contains 5 to 20 parts by mass of a photopolymerization initiator with respect to 100 parts by mass of the carboxyl group-containing resin. However, the oxime ester photopolymerization initiator (B) having the group represented by the general formula (I) is sufficient in an amount of 0.1 to 1.5 parts by mass with respect to 100 parts by mass of the carboxyl group-containing resin (A). Furthermore, it gives a cured product with less warping after component mounting. In the case of a composition containing a large amount of photopolymerization initiator, it is probable that the photopolymerization initiator volatilizes during post-heating or reflow soldering for component mounting, and warpage occurs due to volume shrinkage. . From another aspect, this means that there is no problem even if a relatively large amount is added in the case of a photopolymerization initiator that is almost volatilized during thermosetting of the composition. That is, the manufacturing process of the flexible substrate is photocuring → thermosetting → postheating → component mounting (reflow soldering). To give a general example, the temperature history is photocuring (20-30 ° C. for several seconds). ) → thermosetting (140 to 160 ° C. for 30 to 60 minutes) → post heating (150 to 170 ° C. for 2 hours) → component mounting (240 to 260 ° C. for several seconds to several tens of seconds). Here, it is considered that the photopolymerization initiator, which is mostly volatilized during the thermal curing, has almost no volatile component remaining after the main curing and does not cause volume shrinkage during post-heating and component mounting. It is done. Examples of such a photopolymerization initiator include compounds that decrease by 50% or more upon heating at 150 ° C., and (Ba1) described later is preferable.
前記一般式(I)で示される基を有するオキシムエステル系光重合開始剤(B)としては、好ましくは、下記式(V)で示される2−(アセチルオキシイミノメチル)チオキサンテン−9−オンや、下記一般式(VI)及び(VII)で示される化合物が挙げられる。
R11、R13は、それぞれ独立に、フェニル基(炭素数1〜6のアルキル基、フェニル基もしくはハロゲン原子で置換されていてもよい)、炭素数1〜20のアルキル基(1個以上の水酸基で置換されていてもよく、アルキル鎖の中間に1個以上の酸素原子を有していてもよい)、炭素数5〜8のシクロアルキル基、炭素数2〜20のアルカノイル基又はベンゾイル基(炭素数が1〜6のアルキル基もしくはフェニル基で置換されていてもよい)を表し、
R12は、水素原子、フェニル基(炭素数1〜6のアルキル基、フェニル基もしくはハロゲン原子で置換されていてもよい)、炭素数1〜20のアルキル基(1個以上の水酸基で置換されていてもよく、アルキル鎖の中間に1個以上の酸素原子を有していてもよい)、炭素数5〜8のシクロアルキル基、炭素数2〜20のアルカノイル基又はベンゾイル基(炭素数が1〜6のアルキル基もしくはフェニル基で置換されていてもよい)を表す。)
R 11 and R 13 are each independently a phenyl group (which may be substituted with a C 1-6 alkyl group, a phenyl group or a halogen atom), a C 1-20 alkyl group (one or more Which may be substituted with a hydroxyl group and may have one or more oxygen atoms in the middle of the alkyl chain), a cycloalkyl group having 5 to 8 carbon atoms, an alkanoyl group having 2 to 20 carbon atoms or a benzoyl group (Which may be substituted with an alkyl group having 1 to 6 carbon atoms or a phenyl group),
R 12 is a hydrogen atom, a phenyl group (which may be substituted with an alkyl group having 1 to 6 carbon atoms, a phenyl group or a halogen atom), or an alkyl group having 1 to 20 carbon atoms (substituted with one or more hydroxyl groups). And may have one or more oxygen atoms in the middle of the alkyl chain), a cycloalkyl group having 5 to 8 carbon atoms, an alkanoyl group having 2 to 20 carbon atoms or a benzoyl group (having a carbon number). 1-6 alkyl groups or phenyl groups optionally substituted). )
前記したオキシムエステル系光重合開始剤(B)の中でも、前記式(V)で示される2−(アセチルオキシイミノメチル)チオキサンテン−9−オン、及び式(VI)で示される化合物がより好ましい。市販品としては、チバ・スペシャルティ・ケミカルズ社製のCGI−325、イルガキュアー OXE01、イルガキュアー OXE02等が挙げられる。
前記したようなオキシムエステル系光重合開始剤は、単独で又は2種以上を組み合わせて用いることができる。
Among the oxime ester photopolymerization initiators (B), 2- (acetyloxyiminomethyl) thioxanthen-9-one represented by the formula (V) and a compound represented by the formula (VI) are more preferable. . Examples of commercially available products include CGI-325, Irgacure OXE01, and Irgacure OXE02 manufactured by Ciba Specialty Chemicals.
The oxime ester photopolymerization initiator as described above can be used alone or in combination of two or more.
先に述べたように、前記したオキシムエステル系光重合開始剤(B)の最適量は、前記カルボキシル基含有樹脂(A)100質量部に対して0.1〜1.5質量部で充分であるが、より光反応を確実にするために前記オキシムエステル系以外の光重合開始剤(B1)もしくは光重合助剤(B2)を加えることができる。後加熱による反りを低減する目的から、加える他の開始剤の配合量は、前記カルボキシル基含有樹脂(A)100質量部に対して、合計量で6質量部以下であることが望ましく、さらに好ましくは5質量部以下である。さらに例外として、熱硬化する工程(150℃程度の加熱)で揮発する光重合開始剤(B1a)は、上記範囲よりも多く加えても、後加熱工程の際には揮発の影響が無く、目的どおりに低反りが実現できることが明らかとなった。このような加熱揮発性の光重合開始剤(B1a)は、熱重量分析及びヘッドスペースGC−MS等で簡単に分析して選定することができ、150℃の熱硬化の前と後で、揮発してくる光重合開始剤の量が極端に(50%以上)変化する化合物が好適である。具体的な例としては、2−メチル−1−[4−(メチルチオ)フェニル]−2−モルホリノプロパノン−1、市販品としては、チバ・スペシャルティ・ケミカルズ社製のイルガキュアー907などがある。 As described above, the optimum amount of the oxime ester photopolymerization initiator (B) is 0.1 to 1.5 parts by mass with respect to 100 parts by mass of the carboxyl group-containing resin (A). However, a photopolymerization initiator (B1) or photopolymerization assistant (B2) other than the oxime ester can be added in order to further ensure the photoreaction. For the purpose of reducing warpage due to post-heating, the amount of other initiator added is desirably 6 parts by mass or less in total with respect to 100 parts by mass of the carboxyl group-containing resin (A), more preferably. Is 5 parts by mass or less. Further, as an exception, the photopolymerization initiator (B1a) that volatilizes in the thermosetting step (heating at about 150 ° C.) is not affected by volatilization in the post-heating step even if it is added in a larger amount than the above range. It became clear that low warpage can be realized as expected. Such a heat-volatile photopolymerization initiator (B1a) can be selected by simple analysis by thermogravimetric analysis and headspace GC-MS, and is volatilized before and after thermosetting at 150 ° C. A compound in which the amount of the resulting photopolymerization initiator changes extremely (50% or more) is suitable. Specific examples include 2-methyl-1- [4- (methylthio) phenyl] -2-morpholinopropanone-1, and commercially available products include Irgacure 907 manufactured by Ciba Specialty Chemicals.
その他、150℃で揮発しないが少量加えることのできる光重合開始剤としては、2−ベンジル−2−ジメチルアミノ−1−(4−モルホリノフェニル)−ブタン−1−オン、2−(ジメチルアミノ)−2−[(4−メチルフェニル)メチル]−1−[4−(4−モルホリニル)フェニル]−1−ブタノン、N,N−ジメチルアミノアセトフェノンなどが挙げられる。市販品としては、チバ・スペシャルティ・ケミカルズ社製のイルガキュアー369、イルガキュアー379などが挙げられる。
また、アシルホスフィンオキサイド系開始剤として、2,4,6−トリメチルベンゾイルジフェニルホスフィンオキサイド、ビス(2,4,6−トリメチルベンゾイル)−フェニルホスフィンオキサイド、ビス(2,6−ジメトキシベンゾイル)−2,4,4−トリメチル−ペンチルホスフィンオキサイドなどが挙げられる。市販品としては、BASF社製のルシリンTPO、チバ・スペシャルティ・ケミカルズ社製のイルガキュアー819などが挙げられる。
Other photopolymerization initiators that do not volatilize at 150 ° C. but can be added in small amounts include 2-benzyl-2-dimethylamino-1- (4-morpholinophenyl) -butan-1-one, 2- (dimethylamino) -2-[(4-methylphenyl) methyl] -1- [4- (4-morpholinyl) phenyl] -1-butanone, N, N-dimethylaminoacetophenone and the like. Examples of commercially available products include Irgacure 369 and Irgacure 379 manufactured by Ciba Specialty Chemicals.
Further, as the acylphosphine oxide-based initiator, 2,4,6-trimethylbenzoyldiphenylphosphine oxide, bis (2,4,6-trimethylbenzoyl) -phenylphosphine oxide, bis (2,6-dimethoxybenzoyl) -2, Examples include 4,4-trimethyl-pentylphosphine oxide. Examples of commercially available products include Lucilin TPO manufactured by BASF and Irgacure 819 manufactured by Ciba Specialty Chemicals.
他に本発明の感光性樹脂組成物に用いることができる光開始助剤及び増感剤としては、ベンゾイン化合物、アセトフェノン化合物、アントラキノン化合物、チオキサントン化合物、ケタール化合物、ベンゾフェノン化合物、キサントン化合物、及び3級アミン化合物等を挙げることができる。
ベンゾイン化合物の具体例を挙げると、例えば、ベンゾイン、ベンゾインメチルエーテル、ベンゾインエチルエーテル、ベンゾインイソプロピルエーテルである。
Other photoinitiators and sensitizers that can be used in the photosensitive resin composition of the present invention include benzoin compounds, acetophenone compounds, anthraquinone compounds, thioxanthone compounds, ketal compounds, benzophenone compounds, xanthone compounds, and tertiary compounds. An amine compound etc. can be mentioned.
Specific examples of the benzoin compound include benzoin, benzoin methyl ether, benzoin ethyl ether, and benzoin isopropyl ether.
アセトフェノン化合物の具体例を挙げると、例えば、アセトフェノン、2,2−ジメトキシ−2−フェニルアセトフェノン、2,2−ジエトキシ−2−フェニルアセトフェノン、1,1−ジクロロアセトフェノンである。
アントラキノン化合物の具体例を挙げると、例えば、2−メチルアントラキノン、2−エチルアントラキノン、2−t−ブチルアントラキノン、1−クロロアントラキノンである。
Specific examples of the acetophenone compound include acetophenone, 2,2-dimethoxy-2-phenylacetophenone, 2,2-diethoxy-2-phenylacetophenone, and 1,1-dichloroacetophenone.
Specific examples of the anthraquinone compound include 2-methylanthraquinone, 2-ethylanthraquinone, 2-t-butylanthraquinone, and 1-chloroanthraquinone.
チオキサントン化合物の具体例を挙げると、例えば、2,4−ジメチルチオキサントン、2,4−ジエチルチオキサントン、2−クロロチオキサントン、2,4−ジイソプロピルチオキサントンである。
ケタール化合物の具体例を挙げると、例えば、アセトフェノンジメチルケタール、ベンジルジメチルケタールである。
Specific examples of the thioxanthone compound include 2,4-dimethylthioxanthone, 2,4-diethylthioxanthone, 2-chlorothioxanthone, and 2,4-diisopropylthioxanthone.
Specific examples of the ketal compound include acetophenone dimethyl ketal and benzyl dimethyl ketal.
ベンゾフェノン化合物の具体例を挙げると、例えば、ベンゾフェノン、4−ベンゾイルジフェニルスルフィド、4−ベンゾイル−4’−メチルジフェニルスルフィド、4−ベンゾイル−4’−エチルジフェニルスルフィド、4−ベンゾイル−4’−プロピルジフェニルスルフィドである。 Specific examples of the benzophenone compound include, for example, benzophenone, 4-benzoyldiphenyl sulfide, 4-benzoyl-4′-methyldiphenyl sulfide, 4-benzoyl-4′-ethyldiphenyl sulfide, 4-benzoyl-4′-propyldiphenyl. Sulfide.
3級アミン化合物の具体例を挙げると、例えば、エタノールアミン化合物、ジアルキルアミノベンゼン構造を有する化合物、例えば、4,4’−ジメチルアミノベンゾフェノン(日本曹達社製ニッソキュアーMABP)、4,4’−ジエチルアミノベンゾフェノン(保土ヶ谷化学社製EAB)などのジアルキルアミノベンゾフェノン、7−(ジエチルアミノ)−4−メチル−2H−1−ベンゾピラン−2−オン(7−(ジエチルアミノ)−4−メチルクマリン)等のジアルキルアミノ基含有クマリン化合物、4−ジメチルアミノ安息香酸エチル(日本化薬社製カヤキュアーEPA)、2−ジメチルアミノ安息香酸エチル(インターナショナルバイオ−シンセエティックス社製Quantacure DMB)、4−ジメチルアミノ安息香酸(n−ブトキシ)エチル(インターナショナルバイオ−シンセエティックス社製Quantacure BEA)、p−ジメチルアミノ安息香酸イソアミルエチルエステル(日本化薬社製カヤキュアーDMBI)、4−ジメチルアミノ安息香酸2−エチルヘキシル(Van Dyk社製Esolol 507)、4,4’−ジエチルアミノベンゾフェノン(保土ヶ谷化学社製EAB)である。 Specific examples of the tertiary amine compound include, for example, an ethanolamine compound, a compound having a dialkylaminobenzene structure, such as 4,4′-dimethylaminobenzophenone (Nisso Cure MABP manufactured by Nippon Soda Co., Ltd.), 4,4′-diethylamino. Dialkylamino benzophenone such as benzophenone (EAB manufactured by Hodogaya Chemical Co.), and dialkylamino groups such as 7- (diethylamino) -4-methyl-2H-1-benzopyran-2-one (7- (diethylamino) -4-methylcoumarin) Containing coumarin compound, ethyl 4-dimethylaminobenzoate (Kayacure EPA manufactured by Nippon Kayaku Co., Ltd.), ethyl 2-dimethylaminobenzoate (Quantacure DMB manufactured by International Bio-Synthetics), 4-dimethylaminobenzoic acid ( -Butoxy) ethyl (Quantacure BEA, manufactured by International Bio-Synthetics), p-dimethylaminobenzoic acid isoamyl ethyl ester (Nippon Kayaku Kayacure DMBI), 4-dimethylaminobenzoic acid 2-ethylhexyl (manufactured by Van Dyk) Esolol 507), 4,4′-diethylaminobenzophenone (EAB manufactured by Hodogaya Chemical Co., Ltd.).
前記した光重合開始剤の中でも、チオキサントン化合物及び3級アミン化合物が好ましい。本発明の感光性樹脂組成物には、チオキサントン化合物が含まれることが深部硬化性の面から好ましく、中でも、2,4−ジメチルチオキサントン、2,4−ジエチルチオキサントン、2−クロロチオキサントン、2,4−ジイソプロピルチオキサントン等のチオキサントン化合物が好ましい。
このようなチオキサントン化合物の配合量としては、前記カルボキシル基含有樹脂(A)100質量部に対して、好ましくは2質量部以下、より好ましくは1質量部以下の割合である。チオキサントン化合物の配合量が多すぎると、後加熱時の反りの原因となるし、製品のコストアップに繋がるので、好ましくない。
Among the photopolymerization initiators described above, thioxanthone compounds and tertiary amine compounds are preferred. The photosensitive resin composition of the present invention preferably contains a thioxanthone compound from the viewpoint of deep curable properties. Among them, 2,4-dimethylthioxanthone, 2,4-diethylthioxanthone, 2-chlorothioxanthone, 2,4 -Thioxanthone compounds such as diisopropylthioxanthone are preferred.
The amount of such a thioxanthone compound is preferably 2 parts by mass or less, more preferably 1 part by mass or less with respect to 100 parts by mass of the carboxyl group-containing resin (A). If the amount of the thioxanthone compound is too large, it is not preferable because it causes warping during post-heating and increases the cost of the product.
3級アミン化合物としては、ジアルキルアミノベンゼン構造を有する化合物が好ましく、中でも、ジアルキルアミノベンゾフェノン化合物、最大吸収波長が350〜410nmにあるジアルキルアミノ基含有クマリン化合物が特に好ましい。ジアルキルアミノベンゾフェノン化合物としては、4,4’−ジエチルアミノベンゾフェノンが、毒性も低く好ましい。最大吸収波長が350〜410nmにあるジアルキルアミノ基含有クマリン化合物は、最大吸収波長が紫外線領域にあるため、着色が少なく、無色透明な感光性樹脂組成物はもとより、着色顔料を用い、着色顔料自体の色を反映した着色ソルダーレジスト膜を提供することが可能となる。特に、7−(ジエチルアミノ)−4−メチル−2H−1−ベンゾピラン−2−オンが波長400〜410nmのレーザー光に対して優れた増感効果を示すことから好ましい。 As the tertiary amine compound, a compound having a dialkylaminobenzene structure is preferable, and among them, a dialkylaminobenzophenone compound and a dialkylamino group-containing coumarin compound having a maximum absorption wavelength of 350 to 410 nm are particularly preferable. As the dialkylaminobenzophenone compound, 4,4'-diethylaminobenzophenone is preferable because of its low toxicity. Dialkylamino group-containing coumarin compounds having a maximum absorption wavelength of 350 to 410 nm have a maximum absorption wavelength in the ultraviolet region, so that they are less colored and use a colored pigment as well as a colorless and transparent photosensitive resin composition. It is possible to provide a colored solder resist film reflecting the color of the above. In particular, 7- (diethylamino) -4-methyl-2H-1-benzopyran-2-one is preferable because it exhibits an excellent sensitizing effect on laser light having a wavelength of 400 to 410 nm.
このような3級アミン化合物の配合量としては、前記カルボキシル基含有樹脂(A)100質量部に対して、好ましくは0.1〜2質量部、より好ましくは0.1〜1質量部の割合である。3級アミン化合物の配合量が0.1質量部以下であると、十分な増感効果を得ることができない傾向にある。2質量部を超えると、後加熱時の反りの原因となるし、製品のコストアップに繋がるので、好ましくない。 The amount of such a tertiary amine compound is preferably 0.1 to 2 parts by mass, more preferably 0.1 to 1 part by mass with respect to 100 parts by mass of the carboxyl group-containing resin (A). It is. When the amount of the tertiary amine compound is 0.1 parts by mass or less, there is a tendency that a sufficient sensitizing effect cannot be obtained. Exceeding 2 parts by mass is not preferable because it causes warping during post-heating and increases the cost of the product.
前記したような光重合開始剤、光開始助剤及び増感剤は、単独で又は2種類以上の混合物として使用することができる。
これら光重合開始剤及び開始助剤の配合割合は、前記カルボキシル基含有樹脂(A)100質量部に対し前記一般式(I)で示される基を有するオキシムエステル系光重合開始剤(B)が0.1〜1.5質量部という配合割合の規定の他に、後で述べる着色剤及び増感剤も含めた組成物の乾燥塗膜の355nmにおける吸光度が、乾燥膜厚25μmで0.3〜1.2の範囲となるような割合で加えることが好ましい。この吸光度の範囲は、本発明で目的としている後加熱及び部品実装のリフローはんだ付け時の反りを低減することに効果があることがわかった。詳細は明らかでないが、組成物の光反応を表層と深部で比較的均一に光硬化することができる範囲であることによるものと思われる。吸光度が1.2より高いと深部まで光が透過せず、未反応光硬化成分が多く残存し、後加熱や部品実装のリフローはんだ付けで急激に反応して基板の反りやうねりを生じる現象が見られた。一方、吸光度が0.3よりも低い場合、光を有効に利用できず、高感度化や本発明の目的の一つであるレーザーダイレクト露光に対応できないため不適である。その他、吸光度を上記好適な範囲に調整することにより、硬化皮膜の耐薬品性及び無電解金めっき性も向上することが明らかになった。これらの現象は、従来明らかにされていなかったもので、本発明者らにより初めて見出された効果である。
The photopolymerization initiator, photoinitiator aid and sensitizer as described above can be used alone or as a mixture of two or more.
The mixing ratio of these photopolymerization initiator and initiation assistant is such that the oxime ester photopolymerization initiator (B) having the group represented by the general formula (I) with respect to 100 parts by mass of the carboxyl group-containing resin (A). In addition to the prescription of the blending ratio of 0.1 to 1.5 parts by mass, the absorbance at 355 nm of the dried coating film of the composition including the colorant and sensitizer described later is 0.3 when the dry film thickness is 25 μm. It is preferable to add at a ratio so as to be in the range of -1.2. This range of absorbance was found to be effective in reducing warpage during post-heating and component mounting reflow soldering, which is the object of the present invention. Although details are not clear, it is considered that the photoreaction of the composition is within a range in which photocuring can be performed relatively uniformly in the surface layer and in the deep part. If the absorbance is higher than 1.2, light does not transmit to the deep part, a large amount of unreacted photocuring components remain, and there is a phenomenon in which the substrate is warped or swelled by abrupt reaction by post-heating or reflow soldering of component mounting. It was seen. On the other hand, if the absorbance is lower than 0.3, it is not suitable because light cannot be used effectively, and it cannot cope with high sensitivity and laser direct exposure which is one of the objects of the present invention. In addition, it has been clarified that the chemical resistance and the electroless gold plating property of the cured film are improved by adjusting the absorbance to the above-mentioned preferable range. These phenomena have not been clarified so far, and are the effects found for the first time by the present inventors.
前記分子中に2個以上のエチレン性不飽和基を有する化合物(C)としては、従来公知の各種(メタ)アクリレートモノマーを用いることができ、特定のものに限定されない。具体例としては、例えば、エチレングリコール、メトキシテトラエチレングリコール、ポリエチレングリコール、プロピレングリコールなどのグリコールのジアクリレート類;ヘキサンジオール、トリメチロールプロパン、ペンタエリスリトール、ジペンタエリスリトール、トリス−ヒドロキシエチルイソシアヌレートなどの多価アルコール又はこれらのエチレオキサイド付加物、プロピレンオキサイド付加物もしくはカプロラクトン付加物などの多価アクリレート類;フェノキシアクリレート、ビスフェノールAジアクリレート、及びこれらのフェノール類のエチレンオキサイド付加物もしくはプロピレンオキサイド付加物などの多価アクリレート類;上記ポリアルコール類のウレタンアクリレート類;グリセリンジグリシジルエーテル、グリセリントリグリシジルエーテル、トリメチロールプロパントリグリシジルエーテル、トリグリシジルイソシアヌレートなどのグリシジルエーテルの多価アクリレート類;メラミンアクリレート;及び上記アクリレートに対応する各メタクリレート類などが挙げられる。 As the compound (C) having two or more ethylenically unsaturated groups in the molecule, various conventionally known (meth) acrylate monomers can be used and are not limited to specific ones. Specific examples include, for example, glycol diacrylates such as ethylene glycol, methoxytetraethylene glycol, polyethylene glycol, and propylene glycol; hexanediol, trimethylolpropane, pentaerythritol, dipentaerythritol, tris-hydroxyethyl isocyanurate, and the like. Polyhydric acrylates such as polyhydric alcohols or their ethylene oxide adducts, propylene oxide adducts or caprolactone adducts; phenoxy acrylate, bisphenol A diacrylate, ethylene oxide adducts or propylene oxide adducts of these phenols, etc. Polyhydric acrylates of the above; urethane acrylates of the above polyalcohols; glycerin diglycidyl ether; Li serine triglycidyl ether, trimethylolpropane triglycidyl ether, polyvalent acrylates of glycidyl ethers such as triglycidyl isocyanurate; melamine acrylate; and the like each methacrylates corresponding to the acrylates.
さらに、クレゾールノボラック型エポキシ樹脂などの多官能エポキシ樹脂に、(メタ)アクリル酸を反応させたエポキシアクリレート樹脂や、さらにそのエポキシアクリレート樹脂の水酸基に、ペンタエリスリトールトリアクリレートなどのヒドロキシ(メタ)アクリレートとイソホロンジイソシアネートなどのジイソシアネートのハーフウレタン化合物を反応させたエポキシウレタンアクリレート化合物などが挙げられる。このようなエポキシアクリレート系樹脂は、指触乾燥性を低下させることなく、光硬化性を向上させることができる Furthermore, a polyfunctional epoxy resin such as a cresol novolac type epoxy resin, an epoxy acrylate resin obtained by reacting (meth) acrylic acid, and a hydroxy (meth) acrylate such as pentaerythritol triacrylate with a hydroxyl group of the epoxy acrylate resin Examples thereof include an epoxy urethane acrylate compound obtained by reacting a half urethane compound of diisocyanate such as isophorone diisocyanate. Such an epoxy acrylate resin can improve photocurability without deteriorating the touch drying property.
前記したエチレン性不飽和基含有化合物の中でも、好ましくは2個のエチレン性不飽和基を含有しているもの、多官能であってもポリオールにエチレンオキサイド、プロピレンオキサイド、カプロラクトンを付加して変性したものの(メタ)アクリレート類が好ましい。
また、難燃性の観点からは、9,10−ジヒドロー9−オキサ−10−フォスファフェナンスレン−10−オキサイドと慣用公知の多官能(メタ)アクリレートとのマイケル付加反応による変性物が好ましい。
Among the above-mentioned ethylenically unsaturated group-containing compounds, those containing two ethylenically unsaturated groups are preferable, even if they are polyfunctional, modified by adding ethylene oxide, propylene oxide, caprolactone to the polyol. Of these, (meth) acrylates are preferred.
From the viewpoint of flame retardancy, a modified product by Michael addition reaction of 9,10-dihydro-9-oxa-10-phosphaphenanthrene-10-oxide and a conventionally known polyfunctional (meth) acrylate is preferable. .
前記したような分子中に2個以上のエチレン性不飽和基を有する化合物(C)の配合量は、前記カルボキシル基含有樹脂(A)100質量部に対して、5〜100質量部、より好ましくは、1〜70質量部の割合である。前記配合量が、5質量部未満の場合、光硬化性が低下し、活性エネルギー線照射後のアルカリ現像により、パターン形成が困難となるので、好ましくない。一方、100質量部を超えた場合、アルカリ水溶液に対する溶解性が低下して、塗膜が脆くなるので、好ましくない。 The compounding amount of the compound (C) having two or more ethylenically unsaturated groups in the molecule as described above is more preferably 5 to 100 parts by mass, more preferably 100 parts by mass of the carboxyl group-containing resin (A). Is a ratio of 1 to 70 parts by mass. When the blending amount is less than 5 parts by mass, photocurability is lowered, and pattern formation becomes difficult by alkali development after irradiation with active energy rays, which is not preferable. On the other hand, when the amount exceeds 100 parts by mass, the solubility in an alkaline aqueous solution is lowered, and the coating film becomes brittle.
本発明の感光性樹脂組成物には、耐熱性を付与するために、熱硬化性成分(D)を加えることができる。特に好ましい熱硬化性成分(D)は、分子中に2個以上の環状エーテル基及び/又は環状チオエーテル基(以下、環状(チオ)エーテル基と略す)を有する熱硬化性樹脂である。これらの中でも2官能性のエポキシ樹脂が好ましく、他にはジイソシアネートやその2官能性ブロックイソシアネートも使用することができる。 A thermosetting component (D) can be added to the photosensitive resin composition of the present invention in order to impart heat resistance. A particularly preferred thermosetting component (D) is a thermosetting resin having two or more cyclic ether groups and / or cyclic thioether groups (hereinafter abbreviated as cyclic (thio) ether groups) in the molecule. Among these, bifunctional epoxy resins are preferable, and diisocyanate and its bifunctional blocked isocyanate can also be used.
このような分子中に2つ以上の環状(チオ)エーテル基を有する熱硬化性成分(D)は、分子中に3、4又は5員環の環状エーテル基、又は環状チオエーテル基のいずれか一方又は2種類の基を2個以上有する化合物であり、例えば、分子中に少なくとも2つ以上のエポキシ基を有する化合物、すなわち多官能エポキシ化合物(D−1)、分子中に少なくとも2つ以上のオキセタニル基を有する化合物、すなわち多官能オキセタン化合物(D−2)、分子中に2個以上のチオエーテル基を有する化合物、すなわちエピスルフィド樹脂(D−3)などが挙げられる。 The thermosetting component (D) having two or more cyclic (thio) ether groups in such a molecule is either a three-, four- or five-membered cyclic ether group or a cyclic thioether group in the molecule. Or a compound having two or more two types of groups, for example, a compound having at least two epoxy groups in the molecule, that is, a polyfunctional epoxy compound (D-1), at least two oxetanyl in the molecule And a compound having a group, that is, a polyfunctional oxetane compound (D-2), a compound having two or more thioether groups in the molecule, that is, an episulfide resin (D-3).
前記多官能エポキシ化合物(D−1)としては、例えば、ジャパンエポキシレジン社製のJER828、JER834、JER1001、JER1004、大日本インキ化学工業社製のエピクロン840、エピクロン850、エピクロン1050、エピクロン2055、東都化成社製のエポトートYD−011、YD−013、YD−127、YD−128、ダウケミカル社製のD.E.R.317、D.E.R.331、D.E.R.661、D.E.R.664、チバ・スペシャルティ・ケミカルズ社のアラルダイド6071、アラルダイド6084、アラルダイドGY250、アラルダイドGY260、住友化学工業社製のスミ−エポキシESA−011、ESA−014、ELA−115、ELA−128、旭化成工業社製のA.E.R.330、A.E.R.331、A.E.R.661、A.E.R.664等(何れも商品名)のビスフェノールA型エポキシ樹脂;ジャパンエポキシレジン社製のYL903、大日本インキ化学工業社製のエピクロン152、エピクロン165、東都化成社製のエポトートYDB−400、YDB−500、ダウケミカル社製のD.E.R.542、チバ・スペシャルティ・ケミカルズ社製のアラルダイド8011、住友化学工業社製のスミ−エポキシESB−400、ESB−700、旭化成工業社製のA.E.R.711、A.E.R.714等(何れも商品名)のブロム化エポキシ樹脂;ジャパンエポキシレジン社製のJER152、JER154、ダウケミカル社製のD.E.N.431、D.E.N.438、大日本インキ化学工業社製のエピクロンN−730、エピクロンN−770、エピクロンN−865、東都化成社製のエポトートYDCN−701、YDCN−704、チバ・スペシャルティ・ケミカルズ社製のアラルダイドECN1235、アラルダイドECN1273、アラルダイドECN1299、アラルダイドXPY307、日本化薬社製のEPPN−201、EOCN−1025、EOCN−1020、EOCN−104S、RE−306、住友化学工業社製のスミ−エポキシESCN−195X、ESCN−220、旭化成工業社製のA.E.R.ECN−235、ECN−299等(何れも商品名)のノボラック型エポキシ樹脂;大日本インキ化学工業社製のエピクロン830、ジャパンエポキシレジン社製JER807、東都化成社製のエポトートYDF−170、YDF−175、YDF−2001、YDF−2004、チバ・スペシャルティ・ケミカルズ社製のアラルダイドXPY306等(何れも商品名)のビスフェノールF型エポキシ樹脂;東都化成社製のエポトートST−2004、ST−2007、ST−3000(商品名)等の水添ビスフェノールA型エポキシ樹脂;ジャパンエポキシレジン社製のJER604、東都化成社製のエポトートYH−434、チバ・スペシャルティ・ケミカルズ社製のアラルダイドMY720、住友化学工業社製のスミ−エポキシELM−120等(何れも商品名)のグリシジルアミン型エポキシ樹脂;チバ・スペシャルティ・ケミカルズ社製のアラルダイドCY−350(商品名)等のヒダントイン型エポキシ樹脂;ダイセル化学工業社製のセロキサイド2021、チバ・スペシャルティ・ケミカルズ社製のアラルダイドCY175、CY179等(何れも商品名)の脂環式エポキシ樹脂;ジャパンエポキシレジン社製のYL−933、ダウケミカル社製のT.E.N.、EPPN−501、EPPN−502等(何れも商品名)のトリヒドロキシフェニルメタン型エポキシ樹脂;ジャパンエポキシレジン社製のYL−6056、YX−4000、YL−6121(何れも商品名)等のビキシレノール型もしくはビフェノール型エポキシ樹脂又はそれらの混合物;日本化薬社製EBPS−200、旭電化工業社製EPX−30、大日本インキ化学工業社製のEXA−1514(商品名)等のビスフェノールS型エポキシ樹脂;ジャパンエポキシレジン社製のJER157S(商品名)等のビスフェノールAノボラック型エポキシ樹脂;ジャパンエポキシレジン社製のYL−931、チバ・スペシャルティ・ケミカルズ社製のアラルダイド163等(何れも商品名)のテトラフェニロールエタン型エポキシ樹脂;チバ・スペシャルティ・ケミカルズ社製のアラルダイドPT810、日産化学工業社製のTEPIC等(何れも商品名)の複素環式エポキシ樹脂;日本油脂社製ブレンマーDGT等のジグリシジルフタレート樹脂;東都化成社製ZX−1063等のテトラグリシジルキシレノイルエタン樹脂;新日鉄化学社製ESN−190、ESN−360、大日本インキ化学工業社製HP−4032、EXA−4750、EXA−4700等のナフタレン基含有エポキシ樹脂;大日本インキ化学工業社製HP−7200、HP−7200H等のジシクロペンタジエン骨格を有するエポキシ樹脂;日本油脂社製CP−50S、CP−50M等のグリシジルメタアクリレート共重合系エポキシ樹脂;さらにシクロヘキシルマレイミドとグリシジルメタアクリレートの共重合エポキシ樹脂;エポキシ変性のポリブタジエンゴム誘導体(例えばダイセル化学工業製PB−3600等)、CTBN変性エポキシ樹脂(例えば東都化成社製のYR−102、YR−450等)等が挙げられるが、これらに限られるものではない。これらのエポキシ樹脂は、単独で又は2種以上を組み合わせて用いることができる。これらの中でも特にノボラック型エポキシ樹脂、複素環式エポキシ樹脂、ビスフェノールA型エポキシ樹脂又はそれらの混合物が好ましい。 Examples of the polyfunctional epoxy compound (D-1) include JER828, JER834, JER1001, JER1004 manufactured by Japan Epoxy Resin, Epicron 840, Epicron 850, Epicron 1050, Epicron 1050, and Epitome 2055 manufactured by Dainippon Ink and Chemicals, Inc. Epototo YD-011, YD-013, YD-127, YD-128 manufactured by Kasei Co., Ltd., D.C. E. R. 317, D.E. E. R. 331, D.D. E. R. 661, D.E. E. R. 664, Ciba Specialty Chemicals' Araldide 6071, Araldide 6084, Araldide GY250, Araldide GY260, Sumitomo Chemical Industries Sumi-Epoxy ESA-011, ESA-014, ELA-115, ELA-128, Asahi Kasei Kogyo Co., Ltd. A. E. R. 330, A.I. E. R. 331, A.I. E. R. 661, A.I. E. R. Bisphenol A type epoxy resin such as 664 (all trade names); YL903 manufactured by Japan Epoxy Resin, Epicron 152, Epicron 165 manufactured by Dainippon Ink and Chemicals, Epototo YDB-400, YDB-500 manufactured by Tohto Kasei Co., Ltd. D. Chemicals manufactured by Dow Chemical Company. E. R. 542, Araldide 8011 manufactured by Ciba Specialty Chemicals, Sumi-epoxy ESB-400, ESB-700 manufactured by Sumitomo Chemical Co., Ltd., and A.D. E. R. 711, A.I. E. R. Brominated epoxy resins such as 714 (all trade names); JER152 and JER154 manufactured by Japan Epoxy Resin, and D.C. E. N. 431, D.D. E. N. 438, Epicron N-730, Epicron N-770, Epicron N-865, Etototo YDCN-701, YDCN-704 from Toto Kasei Co., Ltd., Araldide ECN1235 from Ciba Specialty Chemicals, Araldide ECN1273, Araldide ECN1299, Araldide XPY307, Nippon Kayaku Co., Ltd. EPPN-201, EOCN-1025, EOCN-1020, EOCN-104S, RE-306, Sumitomo Chemical Industries Sumi-epoxy ESCN-195X, ESCN- 220, manufactured by Asahi Kasei Corporation. E. R. Novolak type epoxy resins such as ECN-235, ECN-299, etc. (both trade names); Epicron 830 manufactured by Dainippon Ink & Chemicals, JER807 manufactured by Japan Epoxy Resin, Epotot YDF-170 manufactured by Toto Kasei Co., YDF- 175, YDF-2001, YDF-2004, Araldide XPY306 manufactured by Ciba Specialty Chemicals, etc. (both trade names); Epototo ST-2004, ST-2007, ST- manufactured by Tohto Kasei Co., Ltd. Hydrogenated bisphenol A type epoxy resin such as 3000 (trade name); Japan Epoxy Resin JER604, Toto Kasei Epototo YH-434, Ciba Specialty Chemicals Araldide MY720, Sumitomo Chemical Co., Ltd. SUMI-EPOXY ELM Glycidylamine type epoxy resin such as 120 (all trade names); Hydantoin type epoxy resin such as Araldide CY-350 (trade name) manufactured by Ciba Specialty Chemicals; Celoxide 2021 manufactured by Daicel Chemical Industries, Ciba Specialty -Alicyclic epoxy resins such as Araldide CY175, CY179, etc. (both trade names) manufactured by Chemicals; YL-933 manufactured by Japan Epoxy Resin; E. N. , EPPN-501, EPPN-502, etc. (all trade names) trihydroxyphenylmethane type epoxy resin; Japan Epoxy Resin YL-6056, YX-4000, YL-6121 (all trade names), etc. Xylenol type or biphenol type epoxy resin or a mixture thereof; bisphenol S type such as EBPS-200 manufactured by Nippon Kayaku Co., Ltd., EPX-30 manufactured by Asahi Denka Kogyo Co., Ltd., EXA-1514 (trade name) manufactured by Dainippon Ink & Chemicals, Inc. Epoxy resin; Bisphenol A novolak type epoxy resin such as JER157S (trade name) manufactured by Japan Epoxy Resin; YL-931 manufactured by Japan Epoxy Resin, Araldide 163 manufactured by Ciba Specialty Chemicals, etc. (all trade names) Tetraphenylolethane type epoxy resin; Hexacyclic epoxy resins such as Araldide PT810 manufactured by Ba Specialty Chemicals Co., Ltd., TEPIC manufactured by Nissan Chemical Industries Co., Ltd. (both trade names); Diglycidyl phthalate resins such as Bremer DGT manufactured by NOF Corporation; ZX manufactured by Toto Kasei Co., Ltd. Tetraglycidylxylenoylethane resin such as -1063; naphthalene group-containing epoxy resins such as Nippon Steel Chemical Co., Ltd. ESN-190, ESN-360, Dainippon Ink and Chemicals, Inc. HP-4032, EXA-4750, EXA-4700; Epoxy resins having a dicyclopentadiene skeleton such as HP-7200 and HP-7200H manufactured by Dainippon Ink &Chemicals; Glycidyl methacrylate copolymer epoxy resins such as CP-50S and CP-50M manufactured by Nippon Oil &Fats; and cyclohexylmaleimide And glycidyl methacrylate Copolymerized epoxy resin; epoxy-modified polybutadiene rubber derivatives (for example, PB-3600 manufactured by Daicel Chemical Industries), CTBN-modified epoxy resins (for example, YR-102, YR-450 manufactured by Tohto Kasei Co., Ltd.) and the like. However, it is not limited to these. These epoxy resins can be used alone or in combination of two or more. Among these, a novolac type epoxy resin, a heterocyclic epoxy resin, a bisphenol A type epoxy resin or a mixture thereof is particularly preferable.
前記多官能オキセタン化合物(D−2)としては、ビス[(3−メチル−3−オキセタニルメトキシ)メチル]エーテル、ビス[(3−エチル−3−オキセタニルメトキシ)メチル]エーテル、1,4−ビス[(3−メチル−3−オキセタニルメトキシ)メチル]ベンゼン、1,4−ビス[(3−エチル−3−オキセタニルメトキシ)メチル]ベンゼン、(3−メチル−3−オキセタニル)メチルアクリレート、(3−エチル−3−オキセタニル)メチルアクリレート、(3−メチル−3−オキセタニル)メチルメタクリレート、(3−エチル−3−オキセタニル)メチルメタクリレートやそれらのオリゴマー又は共重合体等の多官能オキセタン類の他、オキセタンアルコールとノボラック樹脂、ポリ(p−ヒドロキシスチレン)、カルド型ビスフェノール類、カリックスアレーン類、カリックスレゾルシンアレーン類、又はシルセスキオキサンなどの水酸基を有する樹脂とのエーテル化物などが挙げられる。その他、オキセタン環を有する不飽和モノマーとアルキル(メタ)アクリレートとの共重合体なども挙げられる。 Examples of the polyfunctional oxetane compound (D-2) include bis [(3-methyl-3-oxetanylmethoxy) methyl] ether, bis [(3-ethyl-3-oxetanylmethoxy) methyl] ether, 1,4-bis [(3-Methyl-3-oxetanylmethoxy) methyl] benzene, 1,4-bis [(3-ethyl-3-oxetanylmethoxy) methyl] benzene, (3-methyl-3-oxetanyl) methyl acrylate, (3- In addition to polyfunctional oxetanes such as ethyl-3-oxetanyl) methyl acrylate, (3-methyl-3-oxetanyl) methyl methacrylate, (3-ethyl-3-oxetanyl) methyl methacrylate and oligomers or copolymers thereof, oxetane Alcohol and novolak resin, poly (p-hydroxystyrene), cardo type Scan phenols, calixarenes, calix resorcin arenes, or the like ethers of a resin having a hydroxyl group such as silsesquioxane and the like. In addition, a copolymer of an unsaturated monomer having an oxetane ring and an alkyl (meth) acrylate is also included.
前記分子中に2個以上の環状チオエーテル基を有する化合物(D−3)としては、例えば、ジャパンエポキシレジン社製のビスフェノールA型エピスルフィド樹脂YL7000などが挙げられる。また、ノボラック型エポキシ樹脂のエポキシ基の酸素原子を硫黄原子に置き換えたエピスルフィド樹脂なども用いることができる。 Examples of the compound (D-3) having two or more cyclic thioether groups in the molecule include bisphenol A type episulfide resin YL7000 manufactured by Japan Epoxy Resins. An episulfide resin in which the oxygen atom of the epoxy group of the novolak type epoxy resin is replaced with a sulfur atom can also be used.
前記分子中に2つ以上の環状(チオ)エーテル基を有する熱硬化性成分(D)の配合量は、前記カルボキシル基含有樹脂(A)のカルボキシル基1当量に対して、環状(チオ)エーテル基が好ましくは0.6〜2.5当量、より好ましくは、0.8〜2.0当量となる範囲にあることが望ましい。分子中に2つ以上の環状(チオ)エーテル基を有する熱硬化性成分(D)の配合量が0.6当量未満である場合、硬化皮膜にカルボキシル基が残り、耐熱性、耐アルカリ性、電気絶縁性などが低下するので、好ましくない。一方、2.5当量を超える場合、低分子量の環状(チオ)エーテル基が乾燥塗膜に残存することにより、塗膜の強度などが低下するので、好ましくない。 The compounding amount of the thermosetting component (D) having two or more cyclic (thio) ether groups in the molecule is cyclic (thio) ether with respect to 1 equivalent of the carboxyl group of the carboxyl group-containing resin (A). The group is preferably in the range of 0.6 to 2.5 equivalents, more preferably 0.8 to 2.0 equivalents. When the blending amount of the thermosetting component (D) having two or more cyclic (thio) ether groups in the molecule is less than 0.6 equivalent, a carboxyl group remains in the cured film, resulting in heat resistance, alkali resistance, electricity This is not preferable because the insulating property is lowered. On the other hand, when the amount exceeds 2.5 equivalents, the low molecular weight cyclic (thio) ether group remains in the dry coating film, which is not preferable because the strength of the coating film decreases.
上記分子中に2つ以上の環状(チオ)エーテル基を有する熱硬化性成分(D)を使用する場合、熱硬化触媒を含有することが好ましい。そのような熱硬化触媒としては、例えば、イミダゾール、2−メチルイミダゾール、2−エチルイミダゾール、2−エチル−4−メチルイミダゾール、2−フェニルイミダゾール、4−フェニルイミダゾール、1−シアノエチル−2−フェニルイミダゾール、1−(2−シアノエチル)−2−エチル−4−メチルイミダゾール等のイミダゾール誘導体;ジシアンジアミド、ベンジルジメチルアミン、4−(ジメチルアミノ)−N,N−ジメチルベンジルアミン、4−メトキシ−N,N−ジメチルベンジルアミン、4−メチル−N,N−ジメチルベンジルアミン等のアミン化合物、アジピン酸ジヒドラジド、セバシン酸ジヒドラジド等のヒドラジン化合物;トリフェニルホスフィン等のリン化合物などが挙げられる。また、市販されているものとしては、例えば四国化成工業社製の2MZ−A、2MZ−OK、2PHZ、2P4BHZ、2P4MHZ(いずれもイミダゾール系化合物の商品名)、サンアプロ社製のU−CAT3503N、U−CAT3502T(いずれもジメチルアミンのブロックイソシアネート化合物の商品名)、DBU、DBN、U−CATSA102、U−CAT5002(いずれも二環式アミジン化合物及びその塩)などが挙げられる。特にこれらに限られるものではなく、エポキシ樹脂やオキセタン化合物の熱硬化触媒、もしくはエポキシ基及び/又はオキセタニル基とカルボキシル基の反応を促進するものであればよく、単独で又は2種以上を混合して使用してもかまわない。また、グアナミン、アセトグアナミン、ベンゾグアナミン、メラミン、2,4−ジアミノ−6−メタクリロイルオキシエチル−S−トリアジン、2−ビニル−4,6−ジアミノ−S−トリアジン、2−ビニル−4,6−ジアミノ−S−トリアジン・イソシアヌル酸付加物、2,4−ジアミノ−6−メタクリロイルオキシエチル−S−トリアジン・イソシアヌル酸付加物等のS−トリアジン誘導体を用いることもでき、好ましくはこれら密着性付与剤としても機能する化合物を前記熱硬化触媒と併用する。 When the thermosetting component (D) having two or more cyclic (thio) ether groups in the molecule is used, it is preferable to contain a thermosetting catalyst. Examples of such thermosetting catalysts include imidazole, 2-methylimidazole, 2-ethylimidazole, 2-ethyl-4-methylimidazole, 2-phenylimidazole, 4-phenylimidazole, 1-cyanoethyl-2-phenylimidazole. Imidazole derivatives such as 1- (2-cyanoethyl) -2-ethyl-4-methylimidazole; dicyandiamide, benzyldimethylamine, 4- (dimethylamino) -N, N-dimethylbenzylamine, 4-methoxy-N, N -Amine compounds such as dimethylbenzylamine and 4-methyl-N, N-dimethylbenzylamine; hydrazine compounds such as adipic acid dihydrazide and sebacic acid dihydrazide; and phosphorus compounds such as triphenylphosphine. Examples of commercially available products include 2MZ-A, 2MZ-OK, 2PHZ, 2P4BHZ, 2P4MHZ (both trade names of imidazole compounds) manufactured by Shikoku Kasei Kogyo Co., Ltd., U-CAT3503N manufactured by San Apro, U -CAT3502T (all are trade names of blocked isocyanate compounds of dimethylamine), DBU, DBN, U-CATSA102, U-CAT5002 (all are bicyclic amidine compounds and salts thereof), and the like. It is not particularly limited to these, as long as it is a thermosetting catalyst for an epoxy resin or an oxetane compound, or a catalyst that promotes the reaction between an epoxy group and / or an oxetanyl group and a carboxyl group, either alone or in combination of two or more. May be used. Guanamine, acetoguanamine, benzoguanamine, melamine, 2,4-diamino-6-methacryloyloxyethyl-S-triazine, 2-vinyl-4,6-diamino-S-triazine, 2-vinyl-4,6-diamino S-triazine derivatives such as -S-triazine and isocyanuric acid adducts and 2,4-diamino-6-methacryloyloxyethyl-S-triazine and isocyanuric acid adducts can also be used. A compound that also functions in combination with the thermosetting catalyst.
これら熱硬化触媒の配合量は、通常の量的割合で充分であり、例えばカルボキシル基含有樹脂(A)又は分子中に2つ以上の環状(チオ)エーテル基を有する熱硬化性成分(D)100質量部に対して、好ましくは0.1〜20質量部、より好ましくは0.5〜15.0質量部である。 The blending amount of these thermosetting catalysts is sufficient in the usual quantitative ratio, for example, a carboxyl group-containing resin (A) or a thermosetting component (D) having two or more cyclic (thio) ether groups in the molecule. Preferably it is 0.1-20 mass parts with respect to 100 mass parts, More preferably, it is 0.5-15.0 mass parts.
本発明の感光性樹脂組成物は、着色剤を配合することができる。着色剤としては、赤、青、緑、黄などの慣用公知の着色剤を使用することができ、顔料、染料、色素のいずれでもよい。但し、環境負荷低減並びに人体への影響の観点からハロゲンを含有しないことが好ましい。 The photosensitive resin composition of this invention can mix | blend a coloring agent. As the colorant, conventionally known colorants such as red, blue, green and yellow can be used, and any of pigments, dyes and dyes may be used. However, it is preferable not to contain a halogen from the viewpoint of reducing the environmental burden and affecting the human body.
青色着色剤:
青色着色剤としてはフタロシアニン系、アントラキノン系があり、顔料系はピグメント(Pigment)に分類されている化合物、具体的には、下記のようなカラーインデックス(C.I.;ザ ソサイエティ オブ ダイヤーズ アンド カラリスツ(The Society of Dyers and Colourists)発行)番号が付されているものを挙げることができる:Pigment Blue 15、Pigment Blue 15:1、Pigment Blue 15:2、Pigment Blue 15:3、Pigment Blue 15:4、Pigment Blue 15:6、Pigment Blue 16、Pigment Blue 60。
染料系としては、Solvent Blue 35、Solvent Blue 63、Solvent Blue 68、Solvent Blue 70、Solvent Blue 83、Solvent Blue 87、Solvent Blue 94、Solvent Blue 97、Solvent Blue 122、Solvent Blue 136、Solvent Blue 67、Solvent Blue 70等を使用することができる。上記以外にも、金属置換もしくは無置換のフタロシアニン化合物も使用することができる。
Blue colorant:
Blue colorants include phthalocyanine-based and anthraquinone-based compounds, and pigment-based compounds classified as Pigment, specifically, the following color index (CI; The Society of Dyers and Colorists) (Issued by The Society of Dyers and Colorists) can be listed with numbers: Pigment Blue 15, Pigment Blue 15: 1, Pigment Blue 15: 2, Pigment Blue 15: 3, Pigment Blue 15: 4 , Pigment Blue 15: 6, Pigment Blue 16, Pigment Blue 60.
The dye systems include Solvent Blue 35, Solvent Blue 63, Solvent Blue 68, Solvent Blue 70, Solvent Blue 83, Solvent Blue 87, Solvent Blue 94, Solvent Blue 97, Solvent Blue 122, Solvent Blue 136, Solvent Blue 67, Solvent Blue 70 etc. can be used. In addition to the above, a metal-substituted or unsubstituted phthalocyanine compound can also be used.
緑色着色剤:
緑色着色剤としては、同様にフタロシアニン系、アントラキノン系があり、具体的にはPigment Green 7、Pigment Green 36、Solvent Green 3、Solvent Green 5、Solvent Green 20、Solvent Green 28等を使用することができる。上記以外にも、金属置換もしくは無置換のフタロシアニン化合物も使用することができる。
Green colorant:
Similarly, as the green colorant, there are phthalocyanine type and anthraquinone type, and specifically, Pigment Green 7, Pigment Green 36, Solvent Green 3, Solvent Green 5, Solvent Green 20, Solvent Green 28, etc. can be used. . In addition to the above, a metal-substituted or unsubstituted phthalocyanine compound can also be used.
黄色着色剤:
黄色着色剤としてはモノアゾ系、ジスアゾ系、縮合アゾ系、ベンズイミダゾロン系、イソインドリノン系、アントラキノン系等があり、具体的には以下のものが挙げられる。
アントラキノン系:Solvent Yellow 163、Pigment Yellow 24、Pigment Yellow 108、Pigment Yellow 193、Pigment Yellow 147、Pigment Yellow 199、Pigment Yellow 202。
イソインドリノン系:Pigment Yellow110、Pigment Yellow 109、PigmentYellow 139、Pigment Yellow 179、PigmentYellow 185。
縮合アゾ系:Pigment Yellow 93、Pigment Yellow 94、Pigment Yellow 95、Pigment Yellow 128、Pigment Yellow 155、Pigment Yellow 166、Pigment Yellow 180。
ベンズイミダゾロン系:Pigment Yellow120、Pigment Yellow 151、PigmentYellow 154、Pigment Yellow 156、PigmentYellow 175、Pigment Yellow 181。
モノアゾ系:Pigment Yellow 1, 2, 3, 4, 5, 6, 9, 10, 12, 61, 62, 62:1, 65, 73, 74, 75, 97, 100, 104, 105, 111, 116, 167, 168, 169, 182, 183。
ジスアゾ系:Pigment Yellow 12, 13, 14, 16, 17, 55, 63, 81, 83, 87, 126, 127, 152, 170, 172, 174, 176, 188, 198。
Yellow colorant:
Examples of yellow colorants include monoazo, disazo, condensed azo, benzimidazolone, isoindolinone, anthraquinone, and the like.
Anthraquinone series: Solvent Yellow 163, Pigment Yellow 24, Pigment Yellow 108, Pigment Yellow 193, Pigment Yellow 147, Pigment Yellow 199, Pigment Yellow 202.
Isoindolinone series: Pigment Yellow 110, Pigment Yellow 109, Pigment Yellow 139, Pigment Yellow 179, Pigment Yellow 185.
Condensed azo series: Pigment Yellow 93, Pigment Yellow 94, Pigment Yellow 95, Pigment Yellow 128, Pigment Yellow 155, Pigment Yellow 166, Pigment Yellow 180.
Benzimidazolone series: Pigment Yellow120, Pigment Yellow 151, PigmentYellow 154, Pigment Yellow 156, PigmentYellow 175, Pigment Yellow 181.
Monoazo: Pigment Yellow 1, 2, 3, 4, 5, 6, 9, 10, 12, 61, 62, 62: 1, 65, 73, 74, 75, 97, 100, 104, 105, 111, 116 , 167, 168, 169, 182, 183.
Disazo: Pigment Yellow 12, 13, 14, 16, 17, 55, 63, 81, 83, 87, 126, 127, 152, 170, 172, 174, 176, 188, 198.
赤色着色剤:
赤色着色剤としてはモノアゾ系、ジズアゾ系、アゾレーキ系、ベンズイミダゾロン系、ペリレン系、ジケトピロロピロール系、縮合アゾ系、アントラキノン系、キナクリドン系などがあり、具体的には以下のものが挙げられる。
モノアゾ系:Pigment Red 1, 2, 3, 4, 5, 6, 8, 9, 12, 14, 15, 16, 17, 21, 22, 23, 31, 32, 112, 114, 146, 147, 151, 170, 184, 187, 188, 193, 210, 245, 253, 258, 266, 267, 268, 269。
ジスアゾ系:Pigment Red 37, 38, 41。
モノアゾレーキ系:Pigment Red 48:1, 48:2, 48:3, 48:4, 49:1, 49:2, 50:1, 52:1, 52:2, 53:1, 53:2, 57:1, 58:4, 63:1, 63:2, 64:1, 68。
ベンズイミダゾロン系:Pigment Red 171、Pigment Red 175、Pigment Red 176、Pigment Red 185、Pigment Red 208。
ぺリレン系:Solvent Red 135、Solvent Red 179、Pigment Red 123、Pigment Red 149、Pigment Red 166、Pigment Red 178、Pigment Red 179、Pigment Red 190、Pigment Red 194、Pigment Red 224。
ジケトピロロピロール系:Pigment Red 254、Pigment Red 255、Pigment Red 264、Pigment Red 270、Pigment Red 272。
縮合アゾ系:Pigment Red 220、Pigment Red 144、Pigment Red 166、Pigment Red 214、Pigment Red 220、Pigment Red 221、Pigment Red 242。
アンスラキノン系:Pigment Red 168、Pigment Red 177、Pigment Red 216、Solvent Red 149、Solvent Red 150、Solvent Red 52、Solvent Red 207。
キナクリドン系:Pigment Red 122、Pigment Red 202、Pigment Red 206、Pigment Red 207、Pigment Red 209。
Red colorant:
Examples of red colorants include monoazo, diazo, azo lake, benzimidazolone, perylene, diketopyrrolopyrrole, condensed azo, anthraquinone, and quinacridone. It is done.
Monoazo: Pigment Red 1, 2, 3, 4, 5, 6, 8, 9, 12, 14, 15, 16, 17, 21, 22, 23, 31, 32, 112, 114, 146, 147, 151 , 170, 184, 187, 188, 193, 210, 245, 253, 258, 266, 267, 268, 269.
Disazo: Pigment Red 37, 38, 41.
Monoazo lakes: Pigment Red 48: 1, 48: 2, 48: 3, 48: 4, 49: 1, 49: 2, 50: 1, 52: 1, 52: 2, 53: 1, 53: 2, 57 : 1, 58: 4, 63: 1, 63: 2, 64: 1, 68.
Benzimidazolone series: Pigment Red 171, Pigment Red 175, Pigment Red 176, Pigment Red 185, Pigment Red 208.
Perylene series: Solvent Red 135, Solvent Red 179, Pigment Red 123, Pigment Red 149, Pigment Red 166, Pigment Red 178, Pigment Red 179, Pigment Red 190, Pigment Red 194, Pigment Red 224.
Diketopyrrolopyrrole series: Pigment Red 254, Pigment Red 255, Pigment Red 264, Pigment Red 270, Pigment Red 272.
Condensed azo series: Pigment Red 220, Pigment Red 144, Pigment Red 166, Pigment Red 214, Pigment Red 220, Pigment Red 221 and Pigment Red 242.
Anthraquinone series: Pigment Red 168, Pigment Red 177, Pigment Red 216, Solvent Red 149, Solvent Red 150, Solvent Red 52, Solvent Red 207.
Kinacridone series: Pigment Red 122, Pigment Red 202, Pigment Red 206, Pigment Red 207, Pigment Red 209.
その他、色調を調整する目的で紫、オレンジ、茶色、黒などの着色剤を加えても良い。
具体的に例示すれば、Pigment Violet19、23、29、32、36、38、42、Solvent Violet 13、36、C.I.ピグメントオレンジ1、C.I.ピグメントオレンジ5、C.I.ピグメントオレンジ13、C.I.ピグメントオレンジ14、C.I.ピグメントオレンジ16、C.I.ピグメントオレンジ17、C.I.ピグメントオレンジ24、C.I.ピグメントオレンジ34、C.I.ピグメントオレンジ36、C.I.ピグメントオレンジ38、C.I.ピグメントオレンジ40、C.I.ピグメントオレンジ43、C.I.ピグメントオレンジ46、C.I.ピグメントオレンジ49、C.I.ピグメントオレンジ51、C.I.ピグメントオレンジ61、C.I.ピグメントオレンジ63、C.I.ピグメントオレンジ64、C.I.ピグメントオレンジ71、C.I.ピグメントオレンジ73、C.I.ピグメントブラウン23、C.I.ピグメントブラウン25、C.I.ピグメントブラック1、C.I.ピグメントブラック7等がある。
In addition, colorants such as purple, orange, brown, and black may be added for the purpose of adjusting the color tone.
Specifically, Pigment Violet 19, 23, 29, 32, 36, 38, 42, Solvent Violet 13, 36, CI Pigment Orange 1, CI Pigment Orange 5, CI Pigment Orange 13, CI Pigment Orange 14, CI Pigment Orange 16, CI Pigment Orange 17, CI Pigment Orange 24, CI Pigment Orange 34, CI Pigment Orange 36, CI Pigment Orange 38, CI Pigment Orange 40, CI Pigment Orange 43, CI Pigment Orange 46, CI Pigment Orange 49, CI Pigment Orange 51, CI Pigment Orange 61, CI Pigment Orange 63, CI Pigment Orange 64, CI Pigment Orange 71, CI Pigment Orange 73, CI Pigment Brown 23, CI Pigment Brown 25, CI Pigment Black 1, CI Pigment Black And the like.
着色剤の具体的な配合比率は、用いる着色剤の種類や他の添加剤等の種類にも影響されるので一概には言えないが、本発明の感光性樹脂組成物において、355nmにおける吸光度が、乾燥膜厚25μmで0.3〜1.2になるような割合で配合することが好ましい。特に好ましい着色剤は、青と緑はフタロシアニン系、アントラキノン系、黄はアントラキノン系、赤はジケトピロロピロール系、アントラキノン系で、且つハロゲン原子を含まないものである。これら中でも、赤色着色剤及び黄色着色剤は感度及び解像性の観点で特に好ましい。 Although the specific blending ratio of the colorant is influenced by the type of the colorant used and the type of other additives, it cannot be said unconditionally, but in the photosensitive resin composition of the present invention, the absorbance at 355 nm is low. It is preferable to blend at a ratio of 0.3 to 1.2 at a dry film thickness of 25 μm. Particularly preferred colorants are blue and green phthalocyanine, anthraquinone, yellow anthraquinone, red diketopyrrolopyrrole, anthraquinone, and no halogen atoms. Among these, a red colorant and a yellow colorant are particularly preferable from the viewpoints of sensitivity and resolution.
本発明の感光性樹脂組成物は、その塗膜の物理的強度等を上げるために、必要に応じて、フィラーを配合することができる。このようなフィラーとしては、公知慣用の無機フィラー及び有機フィラーよりなる群から選ばれた少なくとも1種が使用できるが、無機フィラー、特に硫酸バリウム、球状シリカ及びタルクが好ましく用いられる。さらに、1個以上のエチレン性不飽和基を有する化合物や前記多官能エポキシ樹脂(E−1)にナノシリカを分散したハンゼ−ケミー(Hanse−Chemie)社製のNANOCRYL(商品名)XP 0396、XP 0596、XP 0733、XP 0746、XP 0765、XP 0768、XP 0953、XP 0954、XP 1045(何れも製品グレード名)や、ハンゼ−ケミー社製のNANOPOX(商品名)XP 0516、XP 0525、XP 0314(何れも製品グレード名)も使用できる。これらのフィラーは、単独で又は2種以上を組み合わせて配合することができる。 The photosensitive resin composition of the present invention can contain a filler as necessary in order to increase the physical strength of the coating film. As such a filler, at least one selected from the group consisting of known and commonly used inorganic fillers and organic fillers can be used, but inorganic fillers, particularly barium sulfate, spherical silica and talc are preferably used. Furthermore, NANOCRYL (trade name) XP 0396, XP made by Hanse-Chemie, in which nano silica is dispersed in the compound having one or more ethylenically unsaturated groups or the polyfunctional epoxy resin (E-1). 0596, XP 0733, XP 0746, XP 0765, XP 0768, XP 0953, XP 0954, XP 1045 (all are product grade names), NANOPOX (trade names) XP 0516, XP 0525, XP 0314 manufactured by Hanse-Chemie (Both product grade names) can also be used. These fillers can be blended alone or in combination of two or more.
これらフィラーの配合量は、前記カルボキシル基含有樹脂(A)100質量部に対して、好ましくは300質量部以下、より好ましくは0.1〜300質量部、特に好ましくは、0.1〜150質量部である。フィラーの配合量が300質量部を超えた場合、感光性樹脂組成物の粘度が高くなり印刷性が低下したり、硬化物が脆くなるので好ましくない。 The blending amount of these fillers is preferably 300 parts by mass or less, more preferably 0.1 to 300 parts by mass, and particularly preferably 0.1 to 150 parts by mass with respect to 100 parts by mass of the carboxyl group-containing resin (A). Part. When the blending amount of the filler exceeds 300 parts by mass, the viscosity of the photosensitive resin composition is increased, the printability is lowered, and the cured product becomes brittle.
さらに、本発明の感光性樹脂組成物は、前記カルボキシル基含有樹脂(A)の合成や組成物の調製のため、又は基板やキャリアフィルムに塗布するための粘度調整のため、有機溶剤を使用することができる。
このような有機溶剤としては、ケトン類、芳香族炭化水素類、グリコールエーテル類、グリコールエーテルアセテート類、エステル類、アルコール類、脂肪族炭化水素、石油系溶剤などを挙げることができる。より具体的には、メチルエチルケトン、シクロヘキサノン等のケトン類;トルエン、キシレン、テトラメチルベンゼン等の芳香族炭化水素類;セロソルブ、メチルセロソルブ、ブチルセロソルブ、カルビトール、メチルカルビトール、ブチルカルビトール、プロピレングリコールモノメチルエーテル、ジプロピレングリコールモノメチルエーテル、ジプロピレングリコールジエチルエーテル、トリエチレングリコールモノエチルエーテル等のグリコールエーテル類;酢酸エチル、酢酸ブチル、ジプロピレングリコールメチルエーテルアセテート、プロピレングリコールメチルエーテルアセテート、プロピレングリコールエチルエーテルアセテート、プロピレングリコールブチルエーテルアセテートなどのエステル類;エタノール、プロパノール、エチレングリコール、プロピレングリコール等のアルコール類;オクタン、デカン等の脂肪族炭化水素;石油エーテル、石油ナフサ、水添石油ナフサ、ソルベントナフサ等の石油系溶剤などである。このような有機溶剤は、単独で又は2種以上の混合物として用いられる。
Furthermore, the photosensitive resin composition of the present invention uses an organic solvent for the synthesis of the carboxyl group-containing resin (A), the preparation of the composition, or the viscosity adjustment for application to a substrate or a carrier film. be able to.
Examples of such organic solvents include ketones, aromatic hydrocarbons, glycol ethers, glycol ether acetates, esters, alcohols, aliphatic hydrocarbons, petroleum solvents, and the like. More specifically, ketones such as methyl ethyl ketone and cyclohexanone; aromatic hydrocarbons such as toluene, xylene and tetramethylbenzene; cellosolve, methyl cellosolve, butyl cellosolve, carbitol, methyl carbitol, butyl carbitol, propylene glycol monomethyl Glycol ethers such as ether, dipropylene glycol monomethyl ether, dipropylene glycol diethyl ether, triethylene glycol monoethyl ether; ethyl acetate, butyl acetate, dipropylene glycol methyl ether acetate, propylene glycol methyl ether acetate, propylene glycol ethyl ether acetate , Esters such as propylene glycol butyl ether acetate; ethanol, propano , Ethylene glycol, alcohols such as propylene glycol; octane, aliphatic hydrocarbons decane; petroleum ether is petroleum naphtha, hydrogenated petroleum naphtha, and petroleum solvents such as solvent naphtha. Such organic solvents are used alone or as a mixture of two or more.
本発明の感光性樹脂組成物は、さらに必要に応じて、ハイドロキノン、ハイドロキノンモノメチルエーテル、t−ブチルカテコール、ピロガロール、フェノチアジンなどの公知慣用の熱重合禁止剤、微粉シリカ、有機ベントナイト、モンモリロナイトなどの公知慣用の増粘剤、シリコーン系、フッ素系、高分子系などの消泡剤及び/又はレベリング剤、イミダゾール系、チアゾール系、トリアゾール系等のシランカップリング剤、酸化防止剤、防錆剤などのような公知慣用の添加剤類を配合することができる。 If necessary, the photosensitive resin composition of the present invention may be a known conventional thermal polymerization inhibitor such as hydroquinone, hydroquinone monomethyl ether, t-butylcatechol, pyrogallol, phenothiazine, finely divided silica, organic bentonite, montmorillonite and the like. Conventional thickeners, antifoaming agents and / or leveling agents such as silicones, fluorines and polymers, silane coupling agents such as imidazoles, thiazoles and triazoles, antioxidants, rust inhibitors, etc. Such known and commonly used additives can be blended.
本発明の感光性樹脂組成物は、キャリアフィルム(支持体)と、該キャリアフィルム上に形成された上記感光性樹脂組成物からなる層とを備えたドライフィルムの形態とすることもできる。
ドライフィルム化に際しては、本発明の感光性樹脂組成物を前記有機溶剤で希釈して適切な粘度に調整し、コンマコーター、ブレードコーター、リップコーター、ロッドコーター、スクイズコーター、リバースコーター、トランスファロールコーター、グラビアコーター、スプレーコーター等でキャリアフィルム上に均一な厚さに塗布し、通常、50〜130℃の温度で1〜30分間乾燥して膜を得ることができる。塗布膜厚については特に制限はないが、一般に、乾燥後の膜厚で、10〜150μm、好ましくは20〜60μmの範囲で適宜選択される。
The photosensitive resin composition of this invention can also be made into the form of the dry film provided with the carrier film (support body) and the layer which consists of the said photosensitive resin composition formed on this carrier film.
In forming a dry film, the photosensitive resin composition of the present invention is diluted with the organic solvent to adjust to an appropriate viscosity, and a comma coater, a blade coater, a lip coater, a rod coater, a squeeze coater, a reverse coater, a transfer roll coater. A film can be obtained by applying a uniform thickness on a carrier film with a gravure coater, spray coater or the like, and drying usually at a temperature of 50 to 130 ° C. for 1 to 30 minutes. Although there is no restriction | limiting in particular about a coating film thickness, Generally, it is 10-150 micrometers by the film thickness after drying, Preferably it selects suitably in the range of 20-60 micrometers.
キャリアフィルムとしては、プラスチックフィルムが用いられ、ポリエチレンテレフタレート等のポリエステルフィルム、ポリイミドフィルム、ポリアミドイミドフィルム、ポリプロピレンフィルム、ポリスチレンフィルム等のプラスチックフィルムを用いることが好ましい。キャリアフィルムの厚さについては特に制限はないが、一般に、10〜150μmの範囲で適宜選択される。
キャリアフィルム上に成膜した後、さらに、膜の表面に塵が付着するのを防ぐなどの目的で、膜の表面に剥離可能なカバーフィルムを積層することが望ましい。
As the carrier film, a plastic film is used, and a plastic film such as a polyester film such as polyethylene terephthalate, a polyimide film, a polyamideimide film, a polypropylene film, or a polystyrene film is preferably used. Although there is no restriction | limiting in particular about the thickness of a carrier film, Generally, it selects suitably in the range of 10-150 micrometers.
After the film is formed on the carrier film, it is desirable to further laminate a peelable cover film on the surface of the film for the purpose of preventing dust from adhering to the surface of the film.
剥離可能なカバーフィルムとしては、例えば、ポリエチレンフィルム、ポリテトラフルオロエチレンフィルム、ポリプロピレンフィルム、表面処理した紙等を用いることができ、カバーフィルムを剥離するときに膜とキャリアフィルムとの接着力よりも膜とカバーフィルムとの接着力がより小さいものであればよい。 As the peelable cover film, for example, a polyethylene film, a polytetrafluoroethylene film, a polypropylene film, a surface-treated paper or the like can be used, and when the cover film is peeled off, the adhesive strength between the film and the carrier film is exceeded. What is necessary is just to have a smaller adhesive force between the membrane and the cover film.
以上のような組成を有する本発明の液状の感光性樹脂組成物は、必要に応じて前記有機溶剤で塗布方法に適した粘度に調整し、基材上に、ディップコート法、フローコート法、ロールコート法、バーコーター法、スクリーン印刷法、カーテンコート法等の方法により塗布し、約60〜100℃の温度で組成物中に含まれる有機溶剤を揮発乾燥(仮乾燥)させることにより、タックフリーの塗膜を形成できる。また、前記ドライフィルムの形態の場合、基材上にホットロールラミネーター等を用いて貼り合わせる(前記感光性樹脂組成物層と基材とが接触するように貼り合わせる)。上記フィルムの感光性樹脂組成物層上に、さらに剥離可能なカバーフィルムを備えたドライフィルムの場合、カバーフィルムを剥がした後、上記感光性樹脂組成物層と基材とが接触するようにホットロールラミネーター等を用いて貼り合わせる。 The liquid photosensitive resin composition of the present invention having the above composition is adjusted to a viscosity suitable for the coating method with the organic solvent as necessary, and on the substrate, a dip coating method, a flow coating method, The coating is performed by a roll coating method, a bar coater method, a screen printing method, a curtain coating method, or the like, and the organic solvent contained in the composition is volatilized and dried (temporarily dried) at a temperature of about 60 to 100 ° C. A free coating film can be formed. Moreover, in the case of the said dry film form, it bonds together on a base material using a hot roll laminator etc. (It bonds together so that the said photosensitive resin composition layer and a base material may contact). In the case of a dry film having a peelable cover film on the photosensitive resin composition layer of the film, after the cover film is peeled off, the photosensitive resin composition layer and the substrate are hot so that they come into contact with each other. Bond using a roll laminator.
その後、得られた塗膜(感光性樹脂組成物層)に対し(上記ドライフィルムを用いた場合は、基材上にラミネート後、キャリアフィルムを剥がさず)、露光(活性エネルギー線の照射)を行う。露光は、接触式(又は非接触方式)により、パターンを形成したフォトマスクを通して選択的に活性エネルギー線により露光する方法、あるいはレーザーダイレクト露光機により直接パターン露光する方法のいずれでもよい。この露光により、塗膜は、露光部(活性エネルギー線により照射された部分)が硬化する。次いで、未露光部を希アルカリ水溶液(例えば0.3〜3%炭酸ソーダ水溶液)により現像してレジストパターンが形成される(上記ドライフィルムを用いた場合、露光後、キャリアフィルムを剥がし、現像する)。その後さらに、加熱硬化のみ、又は活性エネルギー線の照射後加熱硬化もしくは加熱硬化後活性エネルギー線の照射で最終硬化(本硬化)させることにより、電気絶縁性、密着性、はんだ耐熱性、耐薬品性、無電解金めっき耐性などに優れた硬化皮膜(硬化物)が形成される。熱硬化性成分(D)を含有する感光性樹脂組成物の場合、例えば約140〜180℃の温度に加熱して熱硬化させることにより、前記カルボキシル基含有樹脂(A)のカルボキシル基と、分子中に2個以上の環状エーテル基及び/又は環状チオエーテル基を有する熱硬化性成分(D)が反応し、耐熱性、耐薬品性、耐吸湿性、密着性、電気特性などの諸特性に優れた硬化皮膜を形成することができる。 Then, for the resulting coating film (photosensitive resin composition layer) (when the above dry film is used, after laminating on the substrate, do not peel off the carrier film), exposure (irradiation of active energy rays) Do. The exposure may be either a contact type (or non-contact type) method of selectively exposing with an active energy ray through a photomask on which a pattern has been formed, or a method of direct pattern exposure using a laser direct exposure machine. By this exposure, the exposed portion (portion irradiated with active energy rays) of the coating film is cured. Next, the unexposed portion is developed with a dilute alkaline aqueous solution (for example, 0.3 to 3% sodium carbonate aqueous solution) to form a resist pattern (if the dry film is used, the carrier film is peeled off after exposure and developed) ). After that, it is further heat-cured only, or heat-cured after irradiation with active energy rays or heat-cured after heat-curing, and finally cured (main-cured) by irradiation with active energy rays, thereby providing electrical insulation, adhesion, solder heat resistance, and chemical resistance. A cured film (cured product) excellent in electroless gold plating resistance and the like is formed. In the case of the photosensitive resin composition containing the thermosetting component (D), for example, by heating to a temperature of about 140 to 180 ° C. and thermosetting, the carboxyl group of the carboxyl group-containing resin (A) and molecules A thermosetting component (D) having two or more cyclic ether groups and / or cyclic thioether groups reacts, and has excellent properties such as heat resistance, chemical resistance, moisture absorption resistance, adhesion, and electrical properties. A cured film can be formed.
上記基材としては、予め回路形成されたプリント配線板、特にフレキシブルプリント配線板の他、紙−フェノール樹脂、紙−エポキシ樹脂、ガラス布−エポキシ樹脂、ガラス−ポリイミド、ガラス布/不繊布−エポキシ樹脂、ガラス布/紙−エポキシ樹脂、合成繊維−エポキシ樹脂、フッ素樹脂・ポリエチレン・PPO・シアネートエステル等の複合材を用いた全てのグレード(FR−4等)の銅張積層板や、ポリイミドフィルム、PETフィルム、ガラス基板、セラミック基板、ウエハ板等を用いることができる。 Examples of the substrate include a printed wiring board on which a circuit is formed in advance, in particular, a flexible printed wiring board, paper-phenol resin, paper-epoxy resin, glass cloth-epoxy resin, glass-polyimide, glass cloth / non-woven cloth-epoxy. Resin, glass cloth / paper-epoxy resin, synthetic fiber-epoxy resin, copper-clad laminates of all grades (FR-4 etc.) using polyimide, polyethylene, PPO, cyanate ester, etc., polyimide film PET film, glass substrate, ceramic substrate, wafer plate and the like can be used.
本発明の感光性樹脂組成物を塗布した後に行う揮発乾燥は、熱風循環式乾燥炉、IR炉、ホットプレート、コンベクションオーブンなど(蒸気による空気加熱方式の熱源を備えたものを用い、乾燥機内の熱風を向流接触せしめる方法や、ノズルより支持体に吹き付ける方式)を用いて行うことができる。 Volatile drying performed after the photosensitive resin composition of the present invention is applied is a hot air circulation drying furnace, an IR furnace, a hot plate, a convection oven or the like (with a heat source of an air heating method using steam, It can be carried out using a method in which hot air is brought into countercurrent contact or a method in which a hot air is blown onto a support.
上記活性エネルギー線照射に用いられる露光機としては、高圧水銀灯ランプ、超高圧水銀灯ランプ、メタルハライドランプ、水銀ショートアークランプ等を搭載し、350〜450nmの範囲で紫外線を照射する装置であればよく、さらに、直接描画装置(例えばコンピューターからのCADデータにより直接レーザーで画像を描くレーザーダイレクトイメージング装置)も用いることができる。直描機のレーザー光源としては、最大波長が350〜410nmの範囲にあるレーザー光を用いていれば、ガスレーザー、固体レーザーのどちらでもよい。画像形成のための露光量は膜厚等によって異なるが、一般には20〜800mJ/cm2、好ましくは20〜600mJ/cm2の範囲内とすることができる。 As an exposure machine used for the active energy ray irradiation, a high-pressure mercury lamp lamp, an ultra-high pressure mercury lamp lamp, a metal halide lamp, a mercury short arc lamp, and the like may be used as long as the apparatus irradiates ultraviolet rays in a range of 350 to 450 nm. Furthermore, a direct drawing apparatus (for example, a laser direct imaging apparatus that directly draws an image with a laser using CAD data from a computer) can also be used. As the laser light source of the direct drawing machine, either a gas laser or a solid laser may be used as long as laser light having a maximum wavelength in the range of 350 to 410 nm is used. The amount of exposure for image formation varies depending on the film thickness and the like, but is generally 20 to 800 mJ / cm 2 , preferably 20 to 600 mJ / cm 2 .
前記現像方法としては、ディッピング法、シャワー法、スプレー法、ブラシ法等によることができ、現像液としては、水酸化カリウム、水酸化ナトリウム、炭酸ナトリウム、炭酸カリウム、リン酸ナトリウム、ケイ酸ナトリウム、アンモニア、アミン類などのアルカリ水溶液が使用できる。 The developing method can be a dipping method, a shower method, a spray method, a brush method or the like, and as a developer, potassium hydroxide, sodium hydroxide, sodium carbonate, potassium carbonate, sodium phosphate, sodium silicate, Alkaline aqueous solutions such as ammonia and amines can be used.
以下に実施例及び比較例を示して本発明について具体的に説明するが、本発明が下記実施例に限定されるものではないことはもとよりである。なお、以下において「部」及び「%」とあるのは、特に断りのない限り全て質量基準である。 EXAMPLES Hereinafter, the present invention will be described in detail with reference to examples and comparative examples, but the present invention is not limited to the following examples. In the following, “parts” and “%” are based on mass unless otherwise specified.
合成例1
(A−1)前述したカルボキシル基含有樹脂(3)に該当し、脂環式ジイソシアネートを使用したビスフェノールA構造を有する感光性カルボキシル基含有ウレタン樹脂の合成:
セパラブルフラスコ中に、ビスフェノールA型エポキシ化合物として、日本化薬(株)製RE310S(2官能ビスフェノールA型エポキシ樹脂、エポキシ当量:184g/当量)を368.0g、アクリル酸(分子量:72.06)を142.7g、熱重合禁止剤として2,6−ジ−tert−ブチル−p−クレゾールを2.94g及び反応触媒としてトリフェニルフォスフィンを1.53g仕込み、98℃の温度で反応液の酸価が0.5mgKOH/g以下になるまで反応させ、エポキシカルボキシレート化合物(a)(理論分子量:510.7)を得た。次いで、この反応液に反応用溶媒としてカルビトールアセテートを588.2g、ジメチロールプロピオン酸(b)(分子量:134.16)105.5gを加え、45℃に昇温させた。この溶液にイソホロンジイソシアネート(c)(分子量:222.28)264.7gを反応温度が65℃を超えないように徐々に滴下した。滴下終了後、温度を80℃に上昇させ、赤外吸収スペクトル測定法により、2250cm−1付近の吸収がなくなるまで6時間反応させ、さらに98℃の温度で2時間反応させ、アルカリ水溶液可溶性ウレタン樹脂を60重量%含む樹脂溶液を得た。酸価を測定したところ、28.9mgKOH/g(固形分酸価:48.1mgKOH/g)であった。以下、この反応生成物を樹脂溶液(A−1)とする。
Synthesis example 1
(A-1) Synthesis of photosensitive carboxyl group-containing urethane resin corresponding to the carboxyl group-containing resin (3) described above and having a bisphenol A structure using alicyclic diisocyanate:
In a separable flask, as a bisphenol A type epoxy compound, 368.0 g of RE310S (bifunctional bisphenol A type epoxy resin, epoxy equivalent: 184 g / equivalent) manufactured by Nippon Kayaku Co., Ltd., acrylic acid (molecular weight: 72.06) 142.7 g, 2,6-di-tert-butyl-p-cresol as a thermal polymerization inhibitor, 2.94 g, and 1.53 g of triphenylphosphine as a reaction catalyst, were charged at a temperature of 98 ° C. It was made to react until an acid value became 0.5 mgKOH / g or less, and the epoxy carboxylate compound (a) (theoretical molecular weight: 510.7) was obtained. Next, 588.2 g of carbitol acetate and 105.5 g of dimethylolpropionic acid (b) (molecular weight: 134.16) were added to this reaction solution as a reaction solvent, and the temperature was raised to 45 ° C. To this solution, 264.7 g of isophorone diisocyanate (c) (molecular weight: 222.28) was gradually added dropwise so that the reaction temperature did not exceed 65 ° C. After completion of the dropwise addition, the temperature is raised to 80 ° C., and the reaction is performed for 6 hours until absorption near 2250 cm −1 disappears by infrared absorption spectrum measurement, and the reaction is further performed for 2 hours at a temperature of 98 ° C. A resin solution containing 60 wt% was obtained. When the acid value was measured, it was 28.9 mgKOH / g (solid content acid value: 48.1 mgKOH / g). Hereinafter, this reaction product is referred to as a resin solution (A-1).
合成例2
(A−2)前述したカルボキシル基含有樹脂(3)に該当し、脂環式ジイソシアネートを使用したビスフェノールF構造を有する感光性カルボキシル基含有ウレタン樹脂の合成:
ビスフェノールF型エポキシ樹脂(R110、三井化学(株)製、エポキシ当量169g/当量)169部(0.5モル)、アクリル酸36部(0.5モル)、ジメチロールブタン酸74部(0.5モル)、メチルハイドロキノン0.10部、カルビトールアセテート185部を仕込み、100℃に加熱し、上記混合物が均一に溶解したことを確認後、トリエチルアミン3.0部を仕込み、110℃に加熱し、約25時間反応させた。その後、反応物を室温まで冷却し、テトラヒドロ無水フタル酸152部(1.0モル)を仕込み、100℃に加熱して約5時間反応させ、酸無水物変性エポキシアクリレート(d)を得た。次に、窒素気流雰囲気下にて、イソホロンジイソシアネート832.5部(3.75モル)、ポリカーボネートポリオール(PMHC−1050、(株)クラレ製)747部(0.75モル)、ジメチロールブタン酸222部(1.5モル)、カルビトールアセテート1662部、ジブチルチンジラウリレート6.5部を仕込み、70℃に加熱し、約8時間反応させた。窒素気流を止めた上で、反応混合物を室温まで冷却し、乾燥空気気流雰囲気下にて、上記酸無水物変性エポキシアクリレート(d)2463部(2.0モル)を仕込み、80℃に加熱し、約6時間反応させた。その後、反応物を室温まで冷却し、テトラヒドロ無水フタル酸76部(0.5モル)を仕込み、110℃に加熱して約4時間反応させ、固形分酸価93.5mgKOH/g、固形分濃度60%の感光性カルボキシル基含有ウレタン樹脂を得た。以下、この反応生成物を樹脂溶液(A−2)とする。
Synthesis example 2
(A-2) Synthesis of photosensitive carboxyl group-containing urethane resin corresponding to the carboxyl group-containing resin (3) and having a bisphenol F structure using alicyclic diisocyanate:
Bisphenol F-type epoxy resin (R110, manufactured by Mitsui Chemicals, Inc., epoxy equivalent of 169 g / equivalent) 169 parts (0.5 mol), acrylic acid 36 parts (0.5 mol), dimethylol butanoic acid 74 parts (0. 5 mol), 0.10 parts of methylhydroquinone and 185 parts of carbitol acetate were added and heated to 100 ° C. After confirming that the above mixture was uniformly dissolved, 3.0 parts of triethylamine was added and heated to 110 ° C. For about 25 hours. Thereafter, the reaction product was cooled to room temperature, charged with 152 parts (1.0 mol) of tetrahydrophthalic anhydride, heated to 100 ° C. and reacted for about 5 hours to obtain an acid anhydride-modified epoxy acrylate (d). Next, 832.5 parts (3.75 mol) of isophorone diisocyanate, 747 parts (0.75 mol) of polycarbonate polyol (PMHC-1050, manufactured by Kuraray Co., Ltd.), 222 of dimethylolbutanoic acid in a nitrogen stream atmosphere Parts (1.5 mol), 1662 parts of carbitol acetate and 6.5 parts of dibutyltin dilaurate were heated to 70 ° C. and reacted for about 8 hours. After stopping the nitrogen stream, the reaction mixture was cooled to room temperature, charged with 2463 parts (2.0 mol) of the acid anhydride-modified epoxy acrylate (d) in a dry air stream atmosphere, and heated to 80 ° C. For about 6 hours. Thereafter, the reaction product was cooled to room temperature, charged with 76 parts (0.5 mol) of tetrahydrophthalic anhydride, heated to 110 ° C. and reacted for about 4 hours, solid content acid value 93.5 mgKOH / g, solid content concentration A 60% photosensitive carboxyl group-containing urethane resin was obtained. Hereinafter, this reaction product is referred to as a resin solution (A-2).
合成例3
(A−3)前述したカルボキシル基含有樹脂(4)に該当し、脂環式ジイソシアネートを使用した感光性カルボキシル基含有ウレタン樹脂の合成:
撹拌装置、温度計、コンデンサーを備えた反応容器に、1,5−ペンタンジオールと1,6−ヘキサンジオールから誘導されるポリカーボネートジオール(宇部興産(株)製、PCDL800、数平均分子量800)2400g(3mol)、ジメチロールプロピオン酸603g(4.5mol)、及びモノヒドロキシル化合物として2−ヒドロキシエチルアクリレート238g(2.6mol)を投入した。次いで、ポリイソシアネートとしてイソホロンジイソシアネート1887(8.5mol)投入し、撹拌しながら60℃まで加熱して停止し、反応容器内の温度が低下し始めた時点で再度加熱して80℃で撹拌を続け、赤外線吸収スペクトルでイソシアネート基の吸収スペクトル(2280cm−1)が消失したことを確認して反応を終了した。固形分が50質量%となるようにカルビトールアセテートを添加した。得られた感光性カルボキシル基含有ウレタン樹脂の固形分の酸価は50mgKOH/gであった。以下、この反応生成物を樹脂溶液(A−3)とする。
Synthesis example 3
(A-3) Synthesis of photosensitive carboxyl group-containing urethane resin using alicyclic diisocyanate corresponding to the carboxyl group-containing resin (4) described above:
In a reaction vessel equipped with a stirrer, a thermometer, and a condenser, 2400 g of polycarbonate diol derived from 1,5-pentanediol and 1,6-hexanediol (Ube Industries, Ltd., PCDL800, number average molecular weight 800) 3 mol), 603 g (4.5 mol) of dimethylolpropionic acid, and 238 g (2.6 mol) of 2-hydroxyethyl acrylate as a monohydroxyl compound were added. Next, isophorone diisocyanate 1887 (8.5 mol) was added as polyisocyanate, and the mixture was heated to 60 ° C. with stirring and stopped. When the temperature in the reaction vessel started to decrease, the mixture was heated again and stirred at 80 ° C. The reaction was terminated after confirming that the absorption spectrum of the isocyanate group (2280 cm −1 ) disappeared in the infrared absorption spectrum. Carbitol acetate was added so that the solid content was 50% by mass. The acid value of the solid content of the obtained photosensitive carboxyl group-containing urethane resin was 50 mgKOH / g. Hereinafter, this reaction product is referred to as a resin solution (A-3).
(A−4)前述したカルボキシル基含有樹脂(6)に該当し、ビフェニル骨格を有するビフェニルノボラックエポキシ樹脂を使用した感光性カルボキシル基含有樹脂:
日本化薬(株)製ZCR−1601H(固形分65%樹脂としての酸価は98mgKOH/g)の樹脂溶液をA−4とする。
(A-4) Photosensitive carboxyl group-containing resin corresponding to the carboxyl group-containing resin (6) described above and using a biphenyl novolac epoxy resin having a biphenyl skeleton:
A resin solution of Nippon Kayaku Co., Ltd. ZCR-1601H (acid value as solid content 65% resin is 98 mgKOH / g) is designated as A-4.
(A−5)前述したカルボキシル基含有樹脂(7)に該当し、ビスフェノールF構造の多官能エポキシ樹脂を使用した感光性カルボキシル基含有樹脂:
日本化薬(株)製ZFR−1124(固形分63%樹脂としての酸価は102mgKOH/g)の樹脂溶液をA−5とする。
(A-5) Photosensitive carboxyl group-containing resin that corresponds to the carboxyl group-containing resin (7) described above and uses a polyfunctional epoxy resin having a bisphenol F structure:
A resin solution of Nippon Kayaku Co., Ltd. ZFR-1124 (acid value as solid content 63% resin is 102 mgKOH / g) is designated as A-5.
実施例1〜6、参考例及び比較例1〜3
上記各樹脂溶液(A−1)〜(A−5)を用い、下記表1に示す種々の成分とともに表1に示す割合(質量部)にて配合し、攪拌機にて予備混合した後、3本ロールミルで混練し、ソルダーレジスト用感光性樹脂組成物を調製した。ここで、得られた感光性樹脂組成物の分散度をエリクセン社製グラインドメータによる粒度測定にて評価したところ、いずれの組成物も15μm以下であった。
Examples 1-6, Reference Examples and Comparative Examples 1-3
Using each of the resin solutions (A-1) to (A-5) above, blended in the proportions (parts by mass) shown in Table 1 together with various components shown in Table 1, and after premixing with a stirrer, 3 It knead | mixed with this roll mill and prepared the photosensitive resin composition for soldering resists. Here, when the dispersion degree of the obtained photosensitive resin composition was evaluated by particle size measurement using a grindometer manufactured by Eriksen Co., all compositions were 15 μm or less.
性能評価:
〈最適露光量/感度〉
前記各実施例及び各比較例の感光性樹脂組成物を、銅厚35μmの回路パターン基板を酸洗後、水洗し、乾燥してからスクリーン印刷法により全面に塗布し、80℃の熱風循環式乾燥炉で60分間乾燥させた。乾燥後、最大波長355nmの半導体レーザーを搭載した直接描画装置、水銀ショートアークランプ搭載の露光装置、高圧水銀灯を搭載した直描機を用いてステップタブレット(Kodak No.2)を介して露光し、30℃の1wt%炭酸ナトリウム水溶液によりスプレー圧0.2MPaで60秒間現像を行った際に残存するステップタブレットのパターンが6段の時を最適露光量とした。
Performance evaluation:
<Optimal exposure / sensitivity>
The photosensitive resin compositions of the above Examples and Comparative Examples were pickled on a circuit pattern substrate having a copper thickness of 35 μm, washed with water, dried, and then applied to the entire surface by a screen printing method. It was dried for 60 minutes in a drying furnace. After drying, exposure is performed through a step tablet (Kodak No. 2) using a direct drawing device equipped with a semiconductor laser having a maximum wavelength of 355 nm, an exposure device equipped with a mercury short arc lamp, and a direct drawing machine equipped with a high-pressure mercury lamp, The optimum exposure dose was obtained when the pattern of the step tablet remaining when developing with a 1 wt% sodium carbonate aqueous solution at 30 ° C. for 60 seconds at a spray pressure of 0.2 MPa was 6 steps.
<解像性>
ライン/スペースが300/300μm、銅厚35μmの回路パターン基板をバフロール研磨後、水洗し、乾燥した後、前記各実施例及び各比較例の感光性樹脂組成物をスクリーン印刷法により塗布し、80℃の熱風循環式乾燥炉で30分間乾燥させた。乾燥後、最大波長355nmの半導体レーザーを搭載した直接描画装置を用いて露光した。露光パターンはスペース部に20/30/40/50/60/70/80/90/100μmのラインを描画させる直描用データを使用した。露光量は感光性樹脂組成物の最適露光量となるように活性エネルギー線を照射した。露光後、30℃の1wt%炭酸ナトリウム水溶液によって現像を行ってパターンを描き、150℃×60分の熱硬化をすることにより硬化塗膜を得た。
得られたソルダーレジスト用感光性樹脂組成物の硬化塗膜の最小残存ラインを、200倍に調整した光学顕微鏡を用いて求めた。
<Resolution>
A circuit pattern substrate having a line / space of 300/300 μm and a copper thickness of 35 μm was polished with buffalo, washed with water, dried, and then coated with the photosensitive resin composition of each of the above Examples and Comparative Examples by screen printing. It was dried for 30 minutes in a hot air circulation drying oven at 0 ° C. After drying, exposure was performed using a direct drawing apparatus equipped with a semiconductor laser having a maximum wavelength of 355 nm. As the exposure pattern, direct drawing data for drawing a 20/30/40/50/60/70/80/90/100 μm line in the space portion was used. The active energy ray was irradiated so that the exposure amount became the optimal exposure amount of the photosensitive resin composition. After the exposure, development was performed with a 1 wt% sodium carbonate aqueous solution at 30 ° C. to draw a pattern, and a cured coating film was obtained by heat curing at 150 ° C. for 60 minutes.
The minimum residual line of the cured coating film of the obtained photosensitive resin composition for solder resist was determined using an optical microscope adjusted to 200 times.
<吸光度>
吸光度の測定には、紫外可視分光光度計(日本分光(株)製Ubest−V−570DS)、及び積分球装置(日本分光(株)製ISN−470)を使用した。前記各実施例及び各比較例の感光性樹脂組成物をガラス板にアプリケーターを用いて塗布した後、熱風循環式乾燥炉を用いて80℃で30分乾燥し、感光性樹脂組成物の乾燥塗膜をガラス板上に作製した。紫外可視分光光度計及び積分球装置を用いて、感光性樹脂組成物を塗布したガラス板と同一のガラス板で、500〜300nmにおける吸光度ベースラインを測定した。作製した乾燥塗膜付きガラス板の吸光度を測定し、ベースラインから乾燥塗膜の吸光度を算出し、目的の光の波長355nmにおける吸光度を得た。塗布膜厚のずれによる吸光度のずれを防ぐため、この作業をアプリケーターによる塗布厚を4段階に変えて行い、塗布厚と355nmにおける吸光度のグラフを作成し、その近似式から膜厚25μmの乾燥塗膜の吸光度を算出して、それぞれの吸光度とした。
<Absorbance>
For the measurement of absorbance, an ultraviolet-visible spectrophotometer (Ubest-V-570DS manufactured by JASCO Corporation) and an integrating sphere device (ISN-470 manufactured by JASCO Corporation) were used. After applying the photosensitive resin composition of each of the above Examples and Comparative Examples to a glass plate using an applicator, the photosensitive resin composition was dried at 80 ° C. for 30 minutes using a hot air circulation drying oven, and the photosensitive resin composition was applied by dry coating. A film was prepared on a glass plate. Using an ultraviolet-visible spectrophotometer and an integrating sphere device, an absorbance baseline at 500 to 300 nm was measured on the same glass plate as that coated with the photosensitive resin composition. The absorbance of the produced glass plate with the dried coating film was measured, the absorbance of the dried coating film was calculated from the baseline, and the absorbance of the target light at a wavelength of 355 nm was obtained. In order to prevent deviation in absorbance due to deviation in coating film thickness, this operation is carried out by changing the coating thickness by the applicator into four stages, and a graph of the coating thickness and absorbance at 355 nm is created. The absorbance of the film was calculated and used as each absorbance.
特性試験
評価基板作製法:前記各実施例及び各比較例の感光性樹脂組成物を、銅回路が形成されたポリイミド基板上にスクリーン印刷で全面塗布し、80℃で20分乾燥し、室温まで放冷した。この基板に水銀ショートアークランプ搭載の露光装置を用いて最適露光量でソルダーレジストパターンを露光し、30℃の1wt%Na2CO3水溶液によりスプレー圧0.2MPaの条件で60秒間現像を行い、レジストパターンを得た。この基板を、150℃で60分加熱して硬化した。得られたフレキシブル配線板(評価基板)に対して以下のように特性を評価した。
Characteristic Test Evaluation Substrate Preparation Method: The photosensitive resin composition of each of the above Examples and Comparative Examples was applied on the entire surface of a polyimide substrate on which a copper circuit was formed by screen printing, dried at 80 ° C. for 20 minutes, and brought to room temperature. Allowed to cool. This substrate is exposed to a solder resist pattern with an optimum exposure amount using an exposure apparatus equipped with a mercury short arc lamp, and developed with a 1 wt% Na 2 CO 3 aqueous solution at 30 ° C. under a spray pressure of 0.2 MPa for 60 seconds. A resist pattern was obtained. This substrate was cured by heating at 150 ° C. for 60 minutes. The characteristic was evaluated as follows with respect to the obtained flexible wiring board (evaluation board | substrate).
<塗膜の色>
上記各実施例及び各比較例のレジストパターンについて、硬化物の色を目視にて、判断した。
<Color of coating film>
About the resist pattern of each said Example and each comparative example, the color of hardened | cured material was judged visually.
<はんだ耐熱性>
ロジン系フラックスを塗布した評価基板を、予め260℃に設定したはんだ槽に浸漬し、変性アルコールでフラックスを洗浄した後、目視によるレジスト層の膨れ・剥がれについて評価した。判定基準は以下のとおりである。
○:10秒間浸漬を行い、セロハン粘着テープでピール試験を行っても剥がれが認められない。
△:10秒間浸漬を行い、セロハン粘着テープでピール試験を行うと少し剥がれる。
×:10秒間浸漬を行うとレジスト層に膨れ、剥がれがある。
<Solder heat resistance>
The evaluation board | substrate which apply | coated the rosin-type flux was immersed in the solder tank previously set to 260 degreeC, and after washing | cleaning the flux with denatured alcohol, the swelling / peeling of the resist layer by visual observation was evaluated. The judgment criteria are as follows.
○: Dipping is not observed even after 10-second immersion and a peel test with a cellophane adhesive tape.
(Triangle | delta): It peels for a while when it immerses for 10 second and performs a peel test with a cellophane adhesive tape.
X: When immersed for 10 seconds, the resist layer swells and peels off.
<無電解金めっき耐性>
評価基板に、市販品の無電解ニッケルめっき浴及び無電解金めっき浴を用いて、ニッケル0.5μm、金0.03μmの条件でめっきを行い、テープピーリングにより、レジスト層の剥がれの有無やめっきのしみ込みの有無を評価した後、テープピーリングによりレジスト層の剥がれの有無を評価した。判定基準は以下のとおりである。
○:めっきの染み込み、レジスト層の剥がれが見られない。
△:めっき後にほんの僅か染み込みが見られ、テープピール後にレジスト層の剥がれも見られる。
×:めっき後にレジスト層の剥がれがある。
<Electroless gold plating resistance>
The evaluation substrate is plated using commercially available electroless nickel plating bath and electroless gold plating bath under the conditions of nickel 0.5 μm and gold 0.03 μm. After evaluating the presence or absence of penetration, the presence or absence of peeling of the resist layer was evaluated by tape peeling. The judgment criteria are as follows.
○: Plating penetration and peeling of the resist layer are not observed.
Δ: Slight penetration was observed after plating, and peeling of the resist layer was also observed after tape peeling.
X: The resist layer is peeled off after plating.
<耐電蝕性>
銅箔基板に代えてIPC B−25のクシ型電極Bクーポンを用い、上記の条件で評価基板を作製し、このクシ型電極にDC100Vのバイアス電圧を印加し、85℃、85%R.H.の恒温恒湿槽にて1,000時間後のマイグレーションの有無を確認した。判定基準は以下のとおりである。
○:ほとんど変化が認められないもの
△:変色したもの
×:マイグレーションが発生しているもの
<Corrosion resistance>
Using an IPC B-25 comb-type electrode B coupon instead of a copper foil substrate, an evaluation board was prepared under the above conditions, and a bias voltage of DC 100 V was applied to the comb-type electrode, and 85 ° C., 85% R.D. H. The presence or absence of migration after 1,000 hours was confirmed in a constant temperature and humidity chamber. The judgment criteria are as follows.
○: Almost no change △: Discolored ×: Migration has occurred
<耐酸性>
評価基板を10vol%H2SO4水溶液に室温で30分間浸漬し、硫酸水溶液の染み込みや塗膜の溶け出し、さらにテープビールによるレジスト層の剥がれを確認した。判定基準は以下のとおりである。
○:硫酸水溶液の染み込み、塗膜の溶け出し、レジスト層の剥がれなし。
△:硫酸水溶液の染み込み、塗膜の溶け出し、もしくはレジスト層の剥がれが少し確認される。
×:硫酸水溶液の染み込み、塗膜の溶け出し、もしくはレジスト層の大きな剥がれが確認される。
<Acid resistance>
The evaluation substrate was dipped in a 10 vol% H 2 SO 4 aqueous solution at room temperature for 30 minutes, soaking of the sulfuric acid aqueous solution and dissolution of the coating film were confirmed, and peeling of the resist layer by tape beer was confirmed. The judgment criteria are as follows.
○: Permeation of sulfuric acid aqueous solution, dissolution of the coating film, and no peeling of the resist layer.
Δ: Permeation of sulfuric acid aqueous solution, dissolution of coating film, or peeling of resist layer is slightly confirmed.
X: Permeation of sulfuric acid aqueous solution, dissolution of the coating film, or large peeling of the resist layer is confirmed.
<反り>
50μm厚のポリイミドフィルム(カプトン300H)上にスクリーン印刷で感光性樹脂組成物を全面塗布し、80℃で20分乾燥し、室温まで放冷した。この基板に水銀ショートアークランプ搭載の露光装置を用いて最適露光量でソルダーレジストパターンを露光し、30℃の1wt%Na2CO3水溶液によりスプレー圧0.2MPaの条件で60秒間現像を行い、レジストパターンを得た。この基板を、150℃で60分加熱して硬化した。得られたフィルムを10cm×10cmに切り出して反り量を測定した。
また、上記フィルムをさらに熱風乾燥炉にて170℃で2時間加熱した時のフィルムの反り量も同様に測定した。(後加熱後の反り量)
<Warpage>
The entire surface of the photosensitive resin composition was applied by screen printing onto a 50 μm thick polyimide film (Kapton 300H), dried at 80 ° C. for 20 minutes, and allowed to cool to room temperature. This substrate is exposed to a solder resist pattern with an optimum exposure amount using an exposure apparatus equipped with a mercury short arc lamp, and developed with a 1 wt% Na 2 CO 3 aqueous solution at 30 ° C. under a spray pressure of 0.2 MPa for 60 seconds. A resist pattern was obtained. This substrate was cured by heating at 150 ° C. for 60 minutes. The obtained film was cut into 10 cm × 10 cm and the amount of warpage was measured.
Further, the amount of warpage of the film when the film was further heated at 170 ° C. for 2 hours in a hot air drying oven was also measured. (Warpage amount after post-heating)
評価結果を表2及び表3に示す。
Claims (12)
(式中、R1は、水素原子、フェニル基(炭素数1〜6のアルキル基、フェニル基、もしくはハロゲン原子で置換されていてもよい)、炭素数1〜20のアルキル基(1個以上の水酸基で置換されていてもよく、アルキル鎖の中間に1個以上の酸素原子を有していてもよい)、炭素数5〜8のシクロアルキル基、炭素数2〜20のアルカノイル基又はベンゾイル基(炭素数が1〜6のアルキル基もしくはフェニル基で置換されていてもよい)を表し、R2は、フェニル基(炭素数1〜6のアルキル基、フェニル基もしくはハロゲン原子で置換されていてもよい)、炭素数1〜20のアルキル基(1個以上の水酸基で置換されていてもよく、アルキル鎖の中間に1個以上の酸素原子を有していてもよい)、炭素数5〜8のシクロアルキル基、炭素数2〜20のアルカノイル基又はベンゾイル基(炭素数が1〜6のアルキル基もしくはフェニル基で置換されていてもよい)を表す。) (A) carboxyl group-containing resin, (B) an oxime ester photopolymerization initiator having a group represented by the following general formula (I), and (C) a compound having two or more ethylenically unsaturated groups in the molecule In which the carboxyl group-containing resin (A) comprises (A-1) a carboxyl group-containing resin having a urethane structure, and (A-2) the above (A- 1) and other carboxyl group-containing resin, and the oxime ester photopolymerization initiator (B) is 0.1 to 1.5 parts by mass with respect to 100 parts by mass of the carboxyl group-containing resin (A). The photosensitive resin composition characterized by containing by the ratio.
(In the formula, R 1 represents a hydrogen atom, a phenyl group (which may be substituted with an alkyl group having 1 to 6 carbon atoms, a phenyl group, or a halogen atom), an alkyl group having 1 to 20 carbon atoms (one or more). Or may have one or more oxygen atoms in the middle of the alkyl chain), a cycloalkyl group having 5 to 8 carbon atoms, an alkanoyl group having 2 to 20 carbon atoms, or benzoyl. Represents a group (which may be substituted with an alkyl group having 1 to 6 carbon atoms or a phenyl group), and R 2 is a phenyl group (substituted with an alkyl group having 1 to 6 carbon atoms, a phenyl group or a halogen atom). Or an alkyl group having 1 to 20 carbon atoms (which may be substituted with one or more hydroxyl groups, and may have one or more oxygen atoms in the middle of the alkyl chain), carbon number 5 ˜8 cycloalkyl groups, Represents an alkanoyl group or a benzoyl group prime 2-20 (carbon atoms may be substituted with 1-6 alkyl or phenyl group).)
(式中、R10は、水素原子、ハロゲン原子、炭素数1〜12のアルキル基、シクロペンチル基、シクロヘキシル基、フェニル基、ベンジル基、ベンゾイル基、炭素数2〜12のアルカノイル基、炭素数2〜12のアルコキシカルボニル基(アルコキシル基を構成するアルキル基の炭素数が2以上の場合、アルキル基は1個以上の水酸基で置換されていてもよく、アルキル鎖の中間に1個以上の酸素原子を有していてもよい)、又はフェノキシカルボニル基を表し、
R11、R13は、それぞれ独立に、フェニル基(炭素数1〜6のアルキル基、フェニル基もしくはハロゲン原子で置換されていてもよい)、炭素数1〜20のアルキル基(1個以上の水酸基で置換されていてもよく、アルキル鎖の中間に1個以上の酸素原子を有していてもよい)、炭素数5〜8のシクロアルキル基、炭素数2〜20のアルカノイル基又はベンゾイル基(炭素数が1〜6のアルキル基もしくはフェニル基で置換されていてもよい)を表し、
R12は、水素原子、フェニル基(炭素数1〜6のアルキル基、フェニル基もしくはハロゲン原子で置換されていてもよい)、炭素数1〜20のアルキル基(1個以上の水酸基で置換されていてもよく、アルキル鎖の中間に1個以上の酸素原子を有していてもよい)、炭素数5〜8のシクロアルキル基、炭素数2〜20のアルカノイル基又はベンゾイル基(炭素数が1〜6のアルキル基もしくはフェニル基で置換されていてもよい)を表す。) The photosensitivity according to any one of claims 1 to 3 , wherein the oxime ester photopolymerization initiator (B) is an oxime ester photopolymerization initiator represented by the following formula (VI). Resin composition
(In the formula, R 10 is a hydrogen atom, a halogen atom, an alkyl group having 1 to 12 carbon atoms, a cyclopentyl group, a cyclohexyl group, a phenyl group, a benzyl group, a benzoyl group, an alkanoyl group having 2 to 12 carbon atoms, or 2 carbon atoms. To 12 alkoxycarbonyl groups (when the alkyl group constituting the alkoxyl group has 2 or more carbon atoms, the alkyl group may be substituted with one or more hydroxyl groups, and one or more oxygen atoms in the middle of the alkyl chain) Or a phenoxycarbonyl group,
R 11 and R 13 are each independently a phenyl group (which may be substituted with a C 1-6 alkyl group, a phenyl group or a halogen atom), a C 1-20 alkyl group (one or more Which may be substituted with a hydroxyl group and may have one or more oxygen atoms in the middle of the alkyl chain), a cycloalkyl group having 5 to 8 carbon atoms, an alkanoyl group having 2 to 20 carbon atoms or a benzoyl group (Which may be substituted with an alkyl group having 1 to 6 carbon atoms or a phenyl group),
R 12 is a hydrogen atom, a phenyl group (which may be substituted with an alkyl group having 1 to 6 carbon atoms, a phenyl group or a halogen atom), or an alkyl group having 1 to 20 carbon atoms (substituted with one or more hydroxyl groups). And may have one or more oxygen atoms in the middle of the alkyl chain), a cycloalkyl group having 5 to 8 carbon atoms, an alkanoyl group having 2 to 20 carbon atoms or a benzoyl group (having a carbon number). 1-6 alkyl groups or phenyl groups optionally substituted). )
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